CN111677925B - A vacuum electronically controlled proportional valve - Google Patents
A vacuum electronically controlled proportional valve Download PDFInfo
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- CN111677925B CN111677925B CN201910202448.4A CN201910202448A CN111677925B CN 111677925 B CN111677925 B CN 111677925B CN 201910202448 A CN201910202448 A CN 201910202448A CN 111677925 B CN111677925 B CN 111677925B
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
- F16K31/0675—Electromagnet aspects, e.g. electric supply therefor
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K17/00—Safety valves; Equalising valves, e.g. pressure relief valves
- F16K17/20—Excess-flow valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0025—Electrical or magnetic means
- F16K37/005—Electrical or magnetic means for measuring fluid parameters
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
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Abstract
Description
技术领域technical field
本发明涉及一种真空电控比例阀,通过内部所设的先导排气直杆与真空阀门组,进一步配合先导大气通道导入大气压力,使先导排气直杆得以两阶段配合调整真空强度,使其能达到具有节能及精密调整的目的。The invention relates to a vacuum electric control proportional valve. Through the pilot exhaust straight rod and the vacuum valve group arranged inside, the pilot atmospheric channel is further cooperated to introduce atmospheric pressure, so that the pilot exhaust straight rod can adjust the vacuum strength in two stages, so that the vacuum strength can be adjusted in two stages. It can achieve the purpose of energy saving and precise adjustment.
背景技术Background technique
自动化设备领域广泛使用的真空电控比例阀请参考如图11,通常具备有吸附对象的常规设定孔(91)、连接真空泵用的常规真空孔(92)以及用来调整真空压力的常规大气孔(93),通常由真空泵运作时,通过真空电控比例阀内部通路吸取常规设定孔(91)的压力与流体流向常规真空孔(92)形成真空,如图中的箭头标示。Please refer to Figure 11 for the vacuum electronically controlled proportional valve widely used in the field of automation equipment. It usually has a conventional setting hole (91) for adsorption objects, a conventional vacuum hole (92) for connecting a vacuum pump, and a conventional large valve for adjusting the vacuum pressure. When the air hole (93) is usually operated by a vacuum pump, the pressure of the conventional setting hole (91) and the fluid flow to the conventional vacuum hole (92) are drawn through the internal passage of the vacuum electric proportional valve to form a vacuum, as indicated by the arrow in the figure.
而真空电控比例阀于测试过程时,作业人员须要经过长时间的累积经验与反复测试,才能制造出一个良好的真空电控比例阀,但真空电控比例阀结构内的回路也相对复杂,让测试用的真空气压管路与设备需以90度转角方式进行连接,对于测试作业人员而言,无法通过以直进直出的组装方式连接真空气压管路与设备进行测试时,将会耗费较多的时间与精力。During the testing process of the vacuum electric proportional valve, the operator needs to go through a long period of accumulated experience and repeated tests to manufacture a good vacuum electric proportional valve, but the circuit in the vacuum electric proportional valve structure is also relatively complicated. The vacuum pressure pipeline and the equipment for testing need to be connected at a 90-degree angle. For the test operator, if the vacuum pressure pipeline and the equipment cannot be connected by a straight-in and straight-out assembly method for testing, it will cost a lot of money. more time and energy.
目前常规的真空电控比例阀内部的回路,若需针对内部气压回路进行修改,则需要花费许多时间与金钱进行改良,虽能改变外部真空气压管路连接的方式,但还有各种零件的配合也需要逐一进行测试,其中若需要维持原有真空调控的精细水平,势必需重新设计相关真空调控的零件;因此,仍有许多可供改善之处。At present, if the internal circuit of the conventional vacuum electric proportional valve needs to be modified for the internal air pressure circuit, it will take a lot of time and money to improve it. Although it can change the way of connecting the external vacuum air pressure pipeline, there are still various parts. The coordination also needs to be tested one by one. If it is necessary to maintain the fine level of the original vacuum control, it is necessary to redesign the relevant vacuum control parts; therefore, there are still many areas for improvement.
发明内容SUMMARY OF THE INVENTION
本发明的目的是提供一种真空电控比例阀,以解决现有技术中的技术问题,它能够利用先导排气直杆于阀座内所设的第一真空破坏阀门以及配合真空阀门组所设的第二真空破坏阀门,得以借此减少真空电控比例阀内部结构的复杂回路,且能通过第一真空破坏阀门与第二真空破坏阀门的启闭,进而精密调整真空压力的强度及缩短其反应时间。The purpose of the present invention is to provide a vacuum electronically controlled proportional valve to solve the technical problems in the prior art, which can utilize the first vacuum breaking valve set in the valve seat by the pilot exhaust straight rod and cooperate with the vacuum valve group. The second vacuum breaking valve can reduce the complicated circuit of the internal structure of the vacuum electric proportional valve, and can precisely adjust the strength and shortening of the vacuum pressure through the opening and closing of the first vacuum breaking valve and the second vacuum breaking valve. its reaction time.
本发明提供了一种真空电控比例阀,其由:一阀座的上方配设主膜片,利用结合导引座使该主膜片夹设其中形成一真空压力腔,而主膜片上方设有一弹性组件,且主膜片中央嵌设有一先导排气直杆,该先导排气直杆还配设有一真空阀门组,该导引座上方还设有真空压电磁阀、大气压电磁阀及传感器,且另有调整通道连通至真空压力腔上方,并以真空压电磁阀与大气压电磁阀进行控制,而一先导大气通道,设于阀座内连通至主膜片下方空间供大气压力流通用,另有一主通道设于阀座与导引座之间,此主通道能供一次侧压力与二次侧压力流通用,且主通道内另设有受真空压电阀控制的一引导通道以及连接该传感器的一回授通道。The invention provides a vacuum electronically controlled proportional valve, which consists of: a main diaphragm is arranged above a valve seat, and a vacuum pressure chamber is formed by sandwiching the main diaphragm by a combined guide seat, and a vacuum pressure chamber is formed above the main diaphragm. There is an elastic component, and a pilot exhaust straight rod is embedded in the center of the main diaphragm. The pilot exhaust straight rod is also equipped with a vacuum valve group, and a vacuum pressure solenoid valve, an atmospheric pressure solenoid valve and The sensor, and another adjustment channel is connected to the top of the vacuum pressure chamber, and is controlled by a vacuum pressure solenoid valve and an atmospheric pressure solenoid valve, and a pilot atmospheric channel is set in the valve seat and communicated to the space below the main diaphragm for atmospheric pressure flow. , and another main channel is set between the valve seat and the guide seat, this main channel can be used for the primary side pressure and the secondary side pressure flow, and the main channel is also provided with a guide channel controlled by a vacuum piezoelectric valve and Connect a feedback channel of this sensor.
该先导排气直杆位于阀座上方设有第一真空阀门,且真空阀门组上方与先导排气直杆另设有第二真空阀门,当一次侧压力通过引导通道配合该真空压电磁阀运作,经调整通道至真空压力腔内产生一真空压力,使主膜片向上连动先导排气直杆,进而带动真空阀门组位于下方的主阀门开启,使一次侧压力通过主阀门形成二次侧压力,用以达成真空吸附目的,直至主膜片向下位移回复至水平位置,连动先导排气直杆使主阀门关闭后呈稳压状态。The pilot exhaust straight rod is provided with a first vacuum valve above the valve seat, and a second vacuum valve is provided above the vacuum valve group and the pilot exhaust straight rod. When the primary side pressure passes through the guide channel, the vacuum pressure solenoid valve operates , through the adjustment channel to the vacuum pressure chamber to generate a vacuum pressure, so that the main diaphragm moves up the pilot exhaust straight rod, and then drives the main valve located below the vacuum valve group to open, so that the primary side pressure passes through the main valve to form the secondary side The pressure is used to achieve the purpose of vacuum adsorption until the main diaphragm is displaced downward and returns to the horizontal position, and the pilot exhaust straight rod is linked to make the main valve closed and stabilized.
而大气压电磁阀开启经调整通道导入外部大气压力,可施压于主膜片向下位移,使该第一真空破坏阀门呈开启状态,能让大气压力部分通过,用以降低真空吸附的强度,而当大气压电磁阀导入大气压力持续输入时,将使第二真空破坏阀门开启,使大气压力通过更多,能缩短降低真空吸附的反应时间,使其能达到节能及精密调整的目的。The atmospheric pressure solenoid valve is opened and the external atmospheric pressure is introduced through the adjustment channel, which can press the main diaphragm to move downward, so that the first vacuum breaking valve is in an open state, allowing the atmospheric pressure part to pass through to reduce the strength of vacuum adsorption. When the atmospheric pressure solenoid valve is introduced into the atmospheric pressure for continuous input, the second vacuum breaking valve will be opened, so that the atmospheric pressure can pass more, which can shorten the reaction time of reducing the vacuum adsorption, so that it can achieve the purpose of energy saving and precise adjustment.
附图说明Description of drawings
图1为本发明的立体图。FIG. 1 is a perspective view of the present invention.
图2为本发明的另一视角的立体图。FIG. 2 is a perspective view of another perspective of the present invention.
图3为本发明的回路示意图。FIG. 3 is a schematic diagram of the circuit of the present invention.
图4为本发明于准备状态的结构示意图。FIG. 4 is a schematic structural diagram of the present invention in a ready state.
图5为本发明于工作状态的结构示意图。FIG. 5 is a schematic structural diagram of the present invention in a working state.
图6为本发明于稳压状态的结构示意图。FIG. 6 is a schematic structural diagram of the present invention in a voltage-stabilizing state.
图7为本发明于第一段破真空状态的结构示意图。FIG. 7 is a schematic structural diagram of the present invention in the first stage of breaking the vacuum state.
图8为本发明于图7的局部放大示意图。FIG. 8 is a partial enlarged schematic view of FIG. 7 of the present invention.
图9为本发明于第二段破真空状态的结构示意图。FIG. 9 is a schematic structural diagram of the present invention in the state of breaking the vacuum in the second stage.
图10为本发明于图9的局部放大示意图。FIG. 10 is a partial enlarged schematic view of FIG. 9 of the present invention.
图11为常规结构的示意图。Figure 11 is a schematic diagram of a conventional structure.
附图标记说明:Description of reference numbers:
(10)...阀座(10)...Valve seat
(101)...引导通道(101)...guide channel
(102)...回授通道(102)...feedback channel
(11)...主膜片(11)...Main diaphragm
(111)...弹性组件(111)...elastic components
(12)...真空压力腔(12)...vacuum pressure chamber
(121)...调整通道(121)...Adjust channel
(122)...先导大气通道(122)...Pilot atmospheric passage
(123)...大气通道(123)...Atmospheric channel
(20)...先导排气直杆(20)...Pilot Exhaust Straight Rod
(201)...第一真空破坏阀门(201)...first vacuum break valve
(202)...第二真空破坏阀门(202)...Second vacuum break valve
(203)...主阀门(203)...Main valve
(204)...限位凸掣(204)...Limiting bump
(21)...真空阀门组(21)...Vacuum valve group
(22)...凸型件(22)...Convex
(23)...弹簧(23)...spring
(30)...导引座(30)...Guide seat
(31)...真空压电磁阀(31)...Vacuum pressure solenoid valve
(32)...大气压电磁阀(32)...Atmospheric pressure solenoid valve
(321)...大气口(321)...Air port
(33)...传感器(33)...Sensor
(40)...主通道(40)...Main channel
(P)...控制回路(P)...Control loop
(PR)...电源(PR)...Power
(PI)...入力讯号(PI)...input signal
(PS)...压力表示(PS)...Pressure representation
(PO)...出力讯号(PO)...output signal
(PP)...大气压力(PP)...atmospheric pressure
(PT)...真空压力(PT)...vacuum pressure
(P1)...一次侧压力(P1)...Primary side pressure
(P2)...二次侧压力(P2)...Secondary side pressure
(A)...大气孔(A)...large pores
(O)...设定孔(O)...Set hole
(V)...真空孔(V)...Vacuum hole
(91)...常规设定孔(91)...Regular setting hole
(92)...常规真空孔(92)...Conventional vacuum hole
(93)...常规大气孔。(93)...Conventional large pores.
具体实施方式Detailed ways
下面通过参考附图描述的实施例是示例性的,仅用于解释本发明,而不能解释为对本发明的限制。The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, but not to be construed as a limitation of the present invention.
本发明公开了一种真空电控比例阀,结构包含有:一阀座10,上方结合有一导引座30,该导引座30与阀座10间夹设有一主膜片11形成一真空压力腔12,该主膜片11上方设有一弹性组件111,该弹性组件111为一种弹簧,且主膜片11中央还嵌设有一先导排气直杆20,此先导排气直杆20更配设有一真空阀门组21,该真空阀门组21由:两凸型件22以凸面相对配合一弹簧23而组成,该凸型件22内部为贯通设计,能供该先导排气直杆20配设其中,且先导排气直杆20于侧缘上下两处各设有一限位凸掣204,能借此限制先导排气直杆20于上下位移的行程。The invention discloses a vacuum electronically controlled proportional valve. The structure comprises: a
该导引座30上方更连接有一真空压电磁阀31、一大气压电磁阀32、以及一传感器33,且另有一调整通道121连通至该真空压力腔12的上方,并通过真空压电磁阀31与大气压电磁阀32进行开关的控制。A vacuum
一先导大气通道122,设于阀座10内连通至主膜片11下方空间,借此供一大气压力PP流通;而一主通道40,设于阀座10与导引座30之间,该主通道40能供一次侧压力P1与二次侧压力P2流通用,且主通道40内另设有受真空压电磁阀31控制的一引导通道101、以及连接该传感器33的一回授通道102。A
该先导排气直杆20位于该阀座10上方设有一第一真空破坏阀门201,且真空阀门组21上方与该先导排气直杆20另设有一第二真空破坏阀202,当一次侧压力P1通过引导通道101配合真空压电磁阀31运作,经调整通道121至真空压力腔12内产生一真空压力PT,使主膜片11向上且连动先导排气直杆20,进而带动真空阀门组21位于下方的一主阀门203开启,使一次侧压力P1通过主阀门203形成二次侧压力P2,用以达到真空吸附目的,直至该主膜片11向下位移回复至水平位置,且连动先导排气直杆20使主阀门203关闭后呈稳压状态。The pilot exhaust
而大气压电磁阀32开启经调整通道121施压于主膜片11向下位移时,该大气压力PP经先导大气通道122至位于第一真空破坏阀门201呈开启,能让大气压力PP部分通过,用以降低真空吸附的强度,而当大气压力PP持续输入时,将使第二真空破坏阀门202开启,使大气压力PP通过更多,能缩短降低真空吸附的反应时间。When the atmospheric
请参阅图1-2,能见阀座10所设置的连接端,其分别用以吸附对象的一设定孔O、连接真空泵的一真空孔V及调整大气压的一大气孔A,通过内部结构的设计,让测试用的管线连接后,改由设定孔O直进至真空孔V直出,不需要以常规结构转90度的特别方式进行测试,让繁琐重复测试工作的不便处能获得改善。Please refer to FIG. 1-2 , you can see the connection ends provided by the
请参阅图3-4,可见真空压电磁阀31、大气压电磁阀32、以及传感器33,其主要通过一控制回路P经电源PR驱动后,设定好入力讯号P I以及出力讯号PO后,通过控制回路P的显示相关压力表示PS,来驱动真空压电磁阀31与大气压电磁阀32,而传感器33主要用以侦测二次侧压力P2的压力,当超过或低于二次侧压力P2设定值时,用以将信息反馈至控制回路P进行真空压电磁阀31和大气压电磁阀32之间的判别,并通过控制回路P驱动后续相关控制动作,此部分操控为一般常用手段,故不再加以赘述。3-4, it can be seen that the vacuum
而图4为本发明准备状态,能见真空压电磁阀31与大气压电磁阀32皆为未启动状态,而主通道40内的主阀门203呈关闭,而先导大气通道122则有部分大气压力PP流通至主膜片11下方,但主膜片11受到上方弹性组件111的弹性预压,使主膜片11保持为水平以下,可使大气压力PP经由第一真空破坏阀门201流通至二次侧压力P2,此时二次侧压力P2等于大气压力PP,此处描述水平以主膜片11两端为基准,再以主膜片11中央与两端基准进行对比后的描述。4 is the preparation state of the present invention, it can be seen that the vacuum
请参阅图5所示,为工作状态,首先可见真空压电磁阀31为开启,通过调整通道121产生真空压力PT,使主膜片11向上位移至水平以上,该弹性组件111被主膜片11挤压,而原本由先导大气通道122流入的大气压力PP,得以进入主膜片11下方的位置,来维持主膜片11目前水平以上的位置,而一次侧压力P1则经由引导通道101流至真空压电磁阀31内,当前述主膜片11上方的真空压力腔12产生真空压力PT时,该主膜片11向上位移时,会带动先导排气直杆20以及真空阀门组21位于下方的主阀门203开启,一次侧压力P1通过主阀门203,使其形成二次侧压力P2,来达到真空吸附的目的。Please refer to FIG. 5 , which is in the working state. First, it can be seen that the vacuum
请参阅图6所示,为稳压状态,当真空吸附目的达成后,传感器33会传送相关信息至控制回路P,进而关闭真空压电磁阀31,而位于真空压力腔12和调整通道121内的真空压力PT则保持稳定真空压力,此时的弹性组件111也会和从先导大气通道122进入的大气压力PP相互施压于主膜片11,使主膜片11回复至水平,而相关的主阀门203也会因为该先导排气直杆20位移带动真空阀门组21而呈关闭,来维持整体的内部真空。Please refer to FIG. 6 , which is in a stable state. When the vacuum adsorption purpose is achieved, the
请参阅图7-8所示,为第一段破真空状态,首先可见大气压电磁阀32开启,从一大气口231导入外部大气压力PP经调整通道121进入真空压力腔12内,让原本保持水平的主膜片11向下位移,逐渐的让第一真空破坏阀门201开启,让先导大气通道122内的大气压力PP得以顺沿先导排气直杆20向下通过第一真空破坏阀门201,来进行内部真空的细微调整。Please refer to FIGS. 7-8 , which is the first stage of breaking the vacuum state. First, it can be seen that the atmospheric
请参阅图9-10所示,为第二段破真空状态,接续前述第一段破真空状态,大气压电磁阀32开启后,持续性从大气口321导入大气压力PP,使主膜片11持续向下位移时,该先导排气直杆20的限位凸掣204将会推动第二真空破坏阀门202开启,此时位于第二真空破坏阀门202下方的大气通道123将会提供更多的大气压力PP进入,使内部真空的调整幅度得更为迅速,当主膜片11向下至该真空压力腔12底部时,会将该先导大气通道122进入的大气压力PP流量降至最小,同时也使大气通道123进入的大气压力PP流量升到最大。Please refer to FIGS. 9-10 , it is the second stage of breaking vacuum state, following the first stage of breaking vacuum state, after the atmospheric
综上所述,本发明真空电控比例阀,通过设计的先导大气通道122和先导排气直杆20加以配合,使外部空气通过第一真空破坏阀门201与第二真空破坏阀门202,得以流入二次侧压力P2,配合真空进行强度调整,让调整的反应速度都能获得改善,且更能简化常规复杂通气回路所带来的测试不便的问题。To sum up, the vacuum electronically controlled proportional valve of the present invention cooperates with the designed
以上依据图式所示的实施例详细说明了本发明的构造、特征及作用效果,以上所述仅为本发明的较佳实施例,但本发明不以图面所示限定实施范围,凡是依照本发明的构想所作的改变,或修改为等同变化的等效实施例,仍未超出说明书与图示所涵盖的精神时,均应在本发明的保护范围内。The structure, features and effects of the present invention have been described in detail above according to the embodiments shown in the drawings. The above are only the preferred embodiments of the present invention, but the scope of the present invention is not limited by the drawings. Changes made to the concept of the present invention, or modifications to equivalent embodiments with equivalent changes, shall fall within the protection scope of the present invention as long as they do not exceed the spirit covered by the description and drawings.
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CN205401910U (en) * | 2016-03-07 | 2016-07-27 | 上海气立可气动设备有限公司 | Energy -saving accurate air -vent valve |
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CN207961658U (en) * | 2018-02-27 | 2018-10-12 | 上海气立可气动设备有限公司 | Vacuum energy-saving type large capacity precise pressure regulating valve |
CN209977364U (en) * | 2019-03-11 | 2020-01-21 | 台湾气立股份有限公司 | Vacuum electric control proportional valve |
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JP5123803B2 (en) * | 2008-09-19 | 2013-01-23 | 積水化学工業株式会社 | Vacuum valve control device |
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US6508268B1 (en) * | 1998-11-13 | 2003-01-21 | Ckd Corporation | Vacuum pressure control apparatus |
CN205401910U (en) * | 2016-03-07 | 2016-07-27 | 上海气立可气动设备有限公司 | Energy -saving accurate air -vent valve |
CN207539400U (en) * | 2017-11-07 | 2018-06-26 | 上海气立可气动设备有限公司 | Energy-saving large capacity precise pressure regulating valve structure-improved |
CN207961658U (en) * | 2018-02-27 | 2018-10-12 | 上海气立可气动设备有限公司 | Vacuum energy-saving type large capacity precise pressure regulating valve |
CN209977364U (en) * | 2019-03-11 | 2020-01-21 | 台湾气立股份有限公司 | Vacuum electric control proportional valve |
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