[go: up one dir, main page]

CN111677925B - A vacuum electronically controlled proportional valve - Google Patents

A vacuum electronically controlled proportional valve Download PDF

Info

Publication number
CN111677925B
CN111677925B CN201910202448.4A CN201910202448A CN111677925B CN 111677925 B CN111677925 B CN 111677925B CN 201910202448 A CN201910202448 A CN 201910202448A CN 111677925 B CN111677925 B CN 111677925B
Authority
CN
China
Prior art keywords
vacuum
valve
channel
pressure
main
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201910202448.4A
Other languages
Chinese (zh)
Other versions
CN111677925A (en
Inventor
游平政
郑志圣
陈郁澧
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TAIWAN CHELIC CORP
Original Assignee
TAIWAN CHELIC CORP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TAIWAN CHELIC CORP filed Critical TAIWAN CHELIC CORP
Priority to CN201910202448.4A priority Critical patent/CN111677925B/en
Publication of CN111677925A publication Critical patent/CN111677925A/en
Application granted granted Critical
Publication of CN111677925B publication Critical patent/CN111677925B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00Actuating devices; Operating means; Releasing devices
    • F16K31/02Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F16K31/0675Electromagnet aspects, e.g. electric supply therefor
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K17/00Safety valves; Equalising valves, e.g. pressure relief valves
    • F16K17/20Excess-flow valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F16K37/0025Electrical or magnetic means
    • F16K37/005Electrical or magnetic means for measuring fluid parameters
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Control Of Fluid Pressure (AREA)
  • Fluid-Driven Valves (AREA)

Abstract

The invention discloses a vacuum electric control proportional valve, which is composed of a valve seat combined with a guide seat, wherein a vacuum solenoid valve, an atmosphere solenoid valve and a sensor are connected above the guide seat, a main diaphragm is clamped between the guide seat and the valve seat to form a vacuum pressure cavity, a pilot exhaust straight rod provided with a vacuum valve set is embedded in the center of the main diaphragm, a main channel for communicating a primary pressure and a secondary pressure is arranged between the valve seat and the guide seat, the main channel is also provided with a guide channel and a feedback channel, an adjusting channel for controlling a switch by the vacuum solenoid valve and the atmosphere solenoid valve is additionally arranged above the vacuum pressure cavity, a pilot atmosphere channel for communicating atmospheric pressure is arranged in the valve seat and communicated to the space below the main diaphragm, and a first vacuum breaking valve is arranged above the valve seat, and a second vacuum breaking valve is arranged above the vacuum valve group and on the guide exhaust straight rod.

Description

一种真空电控比例阀A vacuum electronically controlled proportional valve

技术领域technical field

本发明涉及一种真空电控比例阀,通过内部所设的先导排气直杆与真空阀门组,进一步配合先导大气通道导入大气压力,使先导排气直杆得以两阶段配合调整真空强度,使其能达到具有节能及精密调整的目的。The invention relates to a vacuum electric control proportional valve. Through the pilot exhaust straight rod and the vacuum valve group arranged inside, the pilot atmospheric channel is further cooperated to introduce atmospheric pressure, so that the pilot exhaust straight rod can adjust the vacuum strength in two stages, so that the vacuum strength can be adjusted in two stages. It can achieve the purpose of energy saving and precise adjustment.

背景技术Background technique

自动化设备领域广泛使用的真空电控比例阀请参考如图11,通常具备有吸附对象的常规设定孔(91)、连接真空泵用的常规真空孔(92)以及用来调整真空压力的常规大气孔(93),通常由真空泵运作时,通过真空电控比例阀内部通路吸取常规设定孔(91)的压力与流体流向常规真空孔(92)形成真空,如图中的箭头标示。Please refer to Figure 11 for the vacuum electronically controlled proportional valve widely used in the field of automation equipment. It usually has a conventional setting hole (91) for adsorption objects, a conventional vacuum hole (92) for connecting a vacuum pump, and a conventional large valve for adjusting the vacuum pressure. When the air hole (93) is usually operated by a vacuum pump, the pressure of the conventional setting hole (91) and the fluid flow to the conventional vacuum hole (92) are drawn through the internal passage of the vacuum electric proportional valve to form a vacuum, as indicated by the arrow in the figure.

而真空电控比例阀于测试过程时,作业人员须要经过长时间的累积经验与反复测试,才能制造出一个良好的真空电控比例阀,但真空电控比例阀结构内的回路也相对复杂,让测试用的真空气压管路与设备需以90度转角方式进行连接,对于测试作业人员而言,无法通过以直进直出的组装方式连接真空气压管路与设备进行测试时,将会耗费较多的时间与精力。During the testing process of the vacuum electric proportional valve, the operator needs to go through a long period of accumulated experience and repeated tests to manufacture a good vacuum electric proportional valve, but the circuit in the vacuum electric proportional valve structure is also relatively complicated. The vacuum pressure pipeline and the equipment for testing need to be connected at a 90-degree angle. For the test operator, if the vacuum pressure pipeline and the equipment cannot be connected by a straight-in and straight-out assembly method for testing, it will cost a lot of money. more time and energy.

目前常规的真空电控比例阀内部的回路,若需针对内部气压回路进行修改,则需要花费许多时间与金钱进行改良,虽能改变外部真空气压管路连接的方式,但还有各种零件的配合也需要逐一进行测试,其中若需要维持原有真空调控的精细水平,势必需重新设计相关真空调控的零件;因此,仍有许多可供改善之处。At present, if the internal circuit of the conventional vacuum electric proportional valve needs to be modified for the internal air pressure circuit, it will take a lot of time and money to improve it. Although it can change the way of connecting the external vacuum air pressure pipeline, there are still various parts. The coordination also needs to be tested one by one. If it is necessary to maintain the fine level of the original vacuum control, it is necessary to redesign the relevant vacuum control parts; therefore, there are still many areas for improvement.

发明内容SUMMARY OF THE INVENTION

本发明的目的是提供一种真空电控比例阀,以解决现有技术中的技术问题,它能够利用先导排气直杆于阀座内所设的第一真空破坏阀门以及配合真空阀门组所设的第二真空破坏阀门,得以借此减少真空电控比例阀内部结构的复杂回路,且能通过第一真空破坏阀门与第二真空破坏阀门的启闭,进而精密调整真空压力的强度及缩短其反应时间。The purpose of the present invention is to provide a vacuum electronically controlled proportional valve to solve the technical problems in the prior art, which can utilize the first vacuum breaking valve set in the valve seat by the pilot exhaust straight rod and cooperate with the vacuum valve group. The second vacuum breaking valve can reduce the complicated circuit of the internal structure of the vacuum electric proportional valve, and can precisely adjust the strength and shortening of the vacuum pressure through the opening and closing of the first vacuum breaking valve and the second vacuum breaking valve. its reaction time.

本发明提供了一种真空电控比例阀,其由:一阀座的上方配设主膜片,利用结合导引座使该主膜片夹设其中形成一真空压力腔,而主膜片上方设有一弹性组件,且主膜片中央嵌设有一先导排气直杆,该先导排气直杆还配设有一真空阀门组,该导引座上方还设有真空压电磁阀、大气压电磁阀及传感器,且另有调整通道连通至真空压力腔上方,并以真空压电磁阀与大气压电磁阀进行控制,而一先导大气通道,设于阀座内连通至主膜片下方空间供大气压力流通用,另有一主通道设于阀座与导引座之间,此主通道能供一次侧压力与二次侧压力流通用,且主通道内另设有受真空压电阀控制的一引导通道以及连接该传感器的一回授通道。The invention provides a vacuum electronically controlled proportional valve, which consists of: a main diaphragm is arranged above a valve seat, and a vacuum pressure chamber is formed by sandwiching the main diaphragm by a combined guide seat, and a vacuum pressure chamber is formed above the main diaphragm. There is an elastic component, and a pilot exhaust straight rod is embedded in the center of the main diaphragm. The pilot exhaust straight rod is also equipped with a vacuum valve group, and a vacuum pressure solenoid valve, an atmospheric pressure solenoid valve and The sensor, and another adjustment channel is connected to the top of the vacuum pressure chamber, and is controlled by a vacuum pressure solenoid valve and an atmospheric pressure solenoid valve, and a pilot atmospheric channel is set in the valve seat and communicated to the space below the main diaphragm for atmospheric pressure flow. , and another main channel is set between the valve seat and the guide seat, this main channel can be used for the primary side pressure and the secondary side pressure flow, and the main channel is also provided with a guide channel controlled by a vacuum piezoelectric valve and Connect a feedback channel of this sensor.

该先导排气直杆位于阀座上方设有第一真空阀门,且真空阀门组上方与先导排气直杆另设有第二真空阀门,当一次侧压力通过引导通道配合该真空压电磁阀运作,经调整通道至真空压力腔内产生一真空压力,使主膜片向上连动先导排气直杆,进而带动真空阀门组位于下方的主阀门开启,使一次侧压力通过主阀门形成二次侧压力,用以达成真空吸附目的,直至主膜片向下位移回复至水平位置,连动先导排气直杆使主阀门关闭后呈稳压状态。The pilot exhaust straight rod is provided with a first vacuum valve above the valve seat, and a second vacuum valve is provided above the vacuum valve group and the pilot exhaust straight rod. When the primary side pressure passes through the guide channel, the vacuum pressure solenoid valve operates , through the adjustment channel to the vacuum pressure chamber to generate a vacuum pressure, so that the main diaphragm moves up the pilot exhaust straight rod, and then drives the main valve located below the vacuum valve group to open, so that the primary side pressure passes through the main valve to form the secondary side The pressure is used to achieve the purpose of vacuum adsorption until the main diaphragm is displaced downward and returns to the horizontal position, and the pilot exhaust straight rod is linked to make the main valve closed and stabilized.

而大气压电磁阀开启经调整通道导入外部大气压力,可施压于主膜片向下位移,使该第一真空破坏阀门呈开启状态,能让大气压力部分通过,用以降低真空吸附的强度,而当大气压电磁阀导入大气压力持续输入时,将使第二真空破坏阀门开启,使大气压力通过更多,能缩短降低真空吸附的反应时间,使其能达到节能及精密调整的目的。The atmospheric pressure solenoid valve is opened and the external atmospheric pressure is introduced through the adjustment channel, which can press the main diaphragm to move downward, so that the first vacuum breaking valve is in an open state, allowing the atmospheric pressure part to pass through to reduce the strength of vacuum adsorption. When the atmospheric pressure solenoid valve is introduced into the atmospheric pressure for continuous input, the second vacuum breaking valve will be opened, so that the atmospheric pressure can pass more, which can shorten the reaction time of reducing the vacuum adsorption, so that it can achieve the purpose of energy saving and precise adjustment.

附图说明Description of drawings

图1为本发明的立体图。FIG. 1 is a perspective view of the present invention.

图2为本发明的另一视角的立体图。FIG. 2 is a perspective view of another perspective of the present invention.

图3为本发明的回路示意图。FIG. 3 is a schematic diagram of the circuit of the present invention.

图4为本发明于准备状态的结构示意图。FIG. 4 is a schematic structural diagram of the present invention in a ready state.

图5为本发明于工作状态的结构示意图。FIG. 5 is a schematic structural diagram of the present invention in a working state.

图6为本发明于稳压状态的结构示意图。FIG. 6 is a schematic structural diagram of the present invention in a voltage-stabilizing state.

图7为本发明于第一段破真空状态的结构示意图。FIG. 7 is a schematic structural diagram of the present invention in the first stage of breaking the vacuum state.

图8为本发明于图7的局部放大示意图。FIG. 8 is a partial enlarged schematic view of FIG. 7 of the present invention.

图9为本发明于第二段破真空状态的结构示意图。FIG. 9 is a schematic structural diagram of the present invention in the state of breaking the vacuum in the second stage.

图10为本发明于图9的局部放大示意图。FIG. 10 is a partial enlarged schematic view of FIG. 9 of the present invention.

图11为常规结构的示意图。Figure 11 is a schematic diagram of a conventional structure.

附图标记说明:Description of reference numbers:

(10)...阀座(10)...Valve seat

(101)...引导通道(101)...guide channel

(102)...回授通道(102)...feedback channel

(11)...主膜片(11)...Main diaphragm

(111)...弹性组件(111)...elastic components

(12)...真空压力腔(12)...vacuum pressure chamber

(121)...调整通道(121)...Adjust channel

(122)...先导大气通道(122)...Pilot atmospheric passage

(123)...大气通道(123)...Atmospheric channel

(20)...先导排气直杆(20)...Pilot Exhaust Straight Rod

(201)...第一真空破坏阀门(201)...first vacuum break valve

(202)...第二真空破坏阀门(202)...Second vacuum break valve

(203)...主阀门(203)...Main valve

(204)...限位凸掣(204)...Limiting bump

(21)...真空阀门组(21)...Vacuum valve group

(22)...凸型件(22)...Convex

(23)...弹簧(23)...spring

(30)...导引座(30)...Guide seat

(31)...真空压电磁阀(31)...Vacuum pressure solenoid valve

(32)...大气压电磁阀(32)...Atmospheric pressure solenoid valve

(321)...大气口(321)...Air port

(33)...传感器(33)...Sensor

(40)...主通道(40)...Main channel

(P)...控制回路(P)...Control loop

(PR)...电源(PR)...Power

(PI)...入力讯号(PI)...input signal

(PS)...压力表示(PS)...Pressure representation

(PO)...出力讯号(PO)...output signal

(PP)...大气压力(PP)...atmospheric pressure

(PT)...真空压力(PT)...vacuum pressure

(P1)...一次侧压力(P1)...Primary side pressure

(P2)...二次侧压力(P2)...Secondary side pressure

(A)...大气孔(A)...large pores

(O)...设定孔(O)...Set hole

(V)...真空孔(V)...Vacuum hole

(91)...常规设定孔(91)...Regular setting hole

(92)...常规真空孔(92)...Conventional vacuum hole

(93)...常规大气孔。(93)...Conventional large pores.

具体实施方式Detailed ways

下面通过参考附图描述的实施例是示例性的,仅用于解释本发明,而不能解释为对本发明的限制。The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, but not to be construed as a limitation of the present invention.

本发明公开了一种真空电控比例阀,结构包含有:一阀座10,上方结合有一导引座30,该导引座30与阀座10间夹设有一主膜片11形成一真空压力腔12,该主膜片11上方设有一弹性组件111,该弹性组件111为一种弹簧,且主膜片11中央还嵌设有一先导排气直杆20,此先导排气直杆20更配设有一真空阀门组21,该真空阀门组21由:两凸型件22以凸面相对配合一弹簧23而组成,该凸型件22内部为贯通设计,能供该先导排气直杆20配设其中,且先导排气直杆20于侧缘上下两处各设有一限位凸掣204,能借此限制先导排气直杆20于上下位移的行程。The invention discloses a vacuum electronically controlled proportional valve. The structure comprises: a valve seat 10, a guide seat 30 is combined above it, and a main diaphragm 11 is sandwiched between the guide seat 30 and the valve seat 10 to form a vacuum pressure In the cavity 12, an elastic component 111 is arranged above the main diaphragm 11. The elastic component 111 is a kind of spring, and a pilot exhaust straight rod 20 is embedded in the center of the main diaphragm 11. This pilot exhaust straight rod 20 is more suitable for A vacuum valve group 21 is provided. The vacuum valve group 21 is composed of two convex parts 22 with a convex surface opposite to a spring 23. The convex part 22 has a through design inside, which can be used for the pilot exhaust straight rod 20. Wherein, the pilot exhaust straight rod 20 is provided with a limit protrusion 204 at the upper and lower sides of the side edge, so as to limit the stroke of the pilot exhaust straight rod 20 in the up and down displacement.

该导引座30上方更连接有一真空压电磁阀31、一大气压电磁阀32、以及一传感器33,且另有一调整通道121连通至该真空压力腔12的上方,并通过真空压电磁阀31与大气压电磁阀32进行开关的控制。A vacuum pressure solenoid valve 31 , an atmospheric pressure solenoid valve 32 , and a sensor 33 are further connected above the guide seat 30 , and an adjustment channel 121 is connected to the top of the vacuum pressure chamber 12 , and is connected to the vacuum pressure solenoid valve 31 through the vacuum pressure solenoid valve 31 , and a sensor 33 . The atmospheric pressure solenoid valve 32 performs on-off control.

一先导大气通道122,设于阀座10内连通至主膜片11下方空间,借此供一大气压力PP流通;而一主通道40,设于阀座10与导引座30之间,该主通道40能供一次侧压力P1与二次侧压力P2流通用,且主通道40内另设有受真空压电磁阀31控制的一引导通道101、以及连接该传感器33的一回授通道102。A pilot atmosphere channel 122 is provided in the valve seat 10 and communicated with the space below the main diaphragm 11, thereby allowing an atmospheric pressure PP to circulate; and a main channel 40 is provided between the valve seat 10 and the guide seat 30, the The main channel 40 can be used for the primary side pressure P1 and the secondary side pressure P2 to flow together, and the main channel 40 is further provided with a guide channel 101 controlled by the vacuum pressure solenoid valve 31 and a feedback channel 102 connected to the sensor 33 .

该先导排气直杆20位于该阀座10上方设有一第一真空破坏阀门201,且真空阀门组21上方与该先导排气直杆20另设有一第二真空破坏阀202,当一次侧压力P1通过引导通道101配合真空压电磁阀31运作,经调整通道121至真空压力腔12内产生一真空压力PT,使主膜片11向上且连动先导排气直杆20,进而带动真空阀门组21位于下方的一主阀门203开启,使一次侧压力P1通过主阀门203形成二次侧压力P2,用以达到真空吸附目的,直至该主膜片11向下位移回复至水平位置,且连动先导排气直杆20使主阀门203关闭后呈稳压状态。The pilot exhaust straight rod 20 is provided with a first vacuum break valve 201 above the valve seat 10 , and a second vacuum break valve 202 is further provided above the vacuum valve group 21 and the pilot exhaust straight rod 20 . P1 cooperates with the vacuum pressure solenoid valve 31 to operate through the guide channel 101, and a vacuum pressure PT is generated in the vacuum pressure chamber 12 through the adjustment channel 121, so that the main diaphragm 11 is moved upward and the pilot exhaust rod 20 is connected, thereby driving the vacuum valve group 21 A main valve 203 located below is opened, so that the primary side pressure P1 passes through the main valve 203 to form a secondary side pressure P2, which is used to achieve the purpose of vacuum adsorption, until the main diaphragm 11 is displaced downward and returns to the horizontal position, and the linkage The pilot exhaust straight rod 20 closes the main valve 203 and is in a stable state.

而大气压电磁阀32开启经调整通道121施压于主膜片11向下位移时,该大气压力PP经先导大气通道122至位于第一真空破坏阀门201呈开启,能让大气压力PP部分通过,用以降低真空吸附的强度,而当大气压力PP持续输入时,将使第二真空破坏阀门202开启,使大气压力PP通过更多,能缩短降低真空吸附的反应时间。When the atmospheric pressure solenoid valve 32 is opened and the adjustment channel 121 presses the main diaphragm 11 to move downward, the atmospheric pressure PP passes through the pilot atmospheric channel 122 to the first vacuum breaking valve 201 to open, allowing the atmospheric pressure PP to partially pass through. It is used to reduce the strength of vacuum adsorption, and when the atmospheric pressure PP is continuously input, the second vacuum breaking valve 202 will be opened to allow more atmospheric pressure PP to pass through, which can shorten the reaction time of reducing vacuum adsorption.

请参阅图1-2,能见阀座10所设置的连接端,其分别用以吸附对象的一设定孔O、连接真空泵的一真空孔V及调整大气压的一大气孔A,通过内部结构的设计,让测试用的管线连接后,改由设定孔O直进至真空孔V直出,不需要以常规结构转90度的特别方式进行测试,让繁琐重复测试工作的不便处能获得改善。Please refer to FIG. 1-2 , you can see the connection ends provided by the valve seat 10, which are respectively used for a setting hole O for adsorbing the object, a vacuum hole V for connecting the vacuum pump, and an air hole A for adjusting the atmospheric pressure, through the internal structure The design allows the test pipeline to be connected, and then go straight from the setting hole O to the vacuum hole V straight out. It does not need to be tested in a special way of turning 90 degrees with the conventional structure, so that the inconvenience of tedious repeated testing work can be obtained. improve.

请参阅图3-4,可见真空压电磁阀31、大气压电磁阀32、以及传感器33,其主要通过一控制回路P经电源PR驱动后,设定好入力讯号P I以及出力讯号PO后,通过控制回路P的显示相关压力表示PS,来驱动真空压电磁阀31与大气压电磁阀32,而传感器33主要用以侦测二次侧压力P2的压力,当超过或低于二次侧压力P2设定值时,用以将信息反馈至控制回路P进行真空压电磁阀31和大气压电磁阀32之间的判别,并通过控制回路P驱动后续相关控制动作,此部分操控为一般常用手段,故不再加以赘述。3-4, it can be seen that the vacuum pressure solenoid valve 31, the atmospheric pressure solenoid valve 32, and the sensor 33 are mainly driven by the power supply PR through a control circuit P, and after the input signal P I and the output signal PO are set, the control The display related pressure of the circuit P represents PS, to drive the vacuum pressure solenoid valve 31 and the atmospheric pressure solenoid valve 32, and the sensor 33 is mainly used to detect the pressure of the secondary side pressure P2, when it exceeds or is lower than the secondary side pressure P2 is set It is used to feed back information to the control loop P to discriminate between the vacuum pressure solenoid valve 31 and the atmospheric pressure solenoid valve 32, and to drive subsequent related control actions through the control loop P. This part of the control is a commonly used method, so it is no longer necessary. to repeat.

而图4为本发明准备状态,能见真空压电磁阀31与大气压电磁阀32皆为未启动状态,而主通道40内的主阀门203呈关闭,而先导大气通道122则有部分大气压力PP流通至主膜片11下方,但主膜片11受到上方弹性组件111的弹性预压,使主膜片11保持为水平以下,可使大气压力PP经由第一真空破坏阀门201流通至二次侧压力P2,此时二次侧压力P2等于大气压力PP,此处描述水平以主膜片11两端为基准,再以主膜片11中央与两端基准进行对比后的描述。4 is the preparation state of the present invention, it can be seen that the vacuum pressure solenoid valve 31 and the atmospheric pressure solenoid valve 32 are both in the inactive state, while the main valve 203 in the main channel 40 is closed, and the pilot atmospheric pressure channel 122 has a partial atmospheric pressure PP Flow to below the main diaphragm 11, but the main diaphragm 11 is elastically pre-compressed by the upper elastic component 111, so that the main diaphragm 11 is kept below the level, and the atmospheric pressure PP can be circulated to the secondary side through the first vacuum break valve 201 The pressure P2, at this time, the secondary side pressure P2 is equal to the atmospheric pressure PP, and the description here is based on the two ends of the main diaphragm 11, and then the center of the main diaphragm 11 and the two ends are compared.

请参阅图5所示,为工作状态,首先可见真空压电磁阀31为开启,通过调整通道121产生真空压力PT,使主膜片11向上位移至水平以上,该弹性组件111被主膜片11挤压,而原本由先导大气通道122流入的大气压力PP,得以进入主膜片11下方的位置,来维持主膜片11目前水平以上的位置,而一次侧压力P1则经由引导通道101流至真空压电磁阀31内,当前述主膜片11上方的真空压力腔12产生真空压力PT时,该主膜片11向上位移时,会带动先导排气直杆20以及真空阀门组21位于下方的主阀门203开启,一次侧压力P1通过主阀门203,使其形成二次侧压力P2,来达到真空吸附的目的。Please refer to FIG. 5 , which is in the working state. First, it can be seen that the vacuum pressure solenoid valve 31 is open, and the vacuum pressure PT is generated through the adjustment channel 121 , so that the main diaphragm 11 is displaced upward to above the level, and the elastic component 111 is blocked by the main diaphragm 11 . Squeeze, and the atmospheric pressure PP originally flowed from the pilot atmospheric passage 122 can enter the position below the main diaphragm 11 to maintain the position above the current level of the main diaphragm 11, while the primary side pressure P1 flows through the guide passage 101 to In the vacuum pressure solenoid valve 31, when the vacuum pressure chamber 12 above the main diaphragm 11 generates a vacuum pressure PT, when the main diaphragm 11 is displaced upward, it will drive the pilot exhaust straight rod 20 and the vacuum valve group 21 located below. The main valve 203 is opened, and the primary side pressure P1 passes through the main valve 203 to form the secondary side pressure P2 to achieve the purpose of vacuum adsorption.

请参阅图6所示,为稳压状态,当真空吸附目的达成后,传感器33会传送相关信息至控制回路P,进而关闭真空压电磁阀31,而位于真空压力腔12和调整通道121内的真空压力PT则保持稳定真空压力,此时的弹性组件111也会和从先导大气通道122进入的大气压力PP相互施压于主膜片11,使主膜片11回复至水平,而相关的主阀门203也会因为该先导排气直杆20位移带动真空阀门组21而呈关闭,来维持整体的内部真空。Please refer to FIG. 6 , which is in a stable state. When the vacuum adsorption purpose is achieved, the sensor 33 will transmit relevant information to the control loop P, thereby closing the vacuum pressure solenoid valve 31 , and the vacuum pressure chamber 12 and the adjustment channel 121 The vacuum pressure PT maintains a stable vacuum pressure. At this time, the elastic component 111 and the atmospheric pressure PP entering from the pilot atmospheric channel 122 will also press each other on the main diaphragm 11, so that the main diaphragm 11 returns to the level, and the related main diaphragm 11 The valve 203 is also closed due to the displacement of the pilot exhaust straight rod 20 to drive the vacuum valve group 21 to maintain the overall internal vacuum.

请参阅图7-8所示,为第一段破真空状态,首先可见大气压电磁阀32开启,从一大气口231导入外部大气压力PP经调整通道121进入真空压力腔12内,让原本保持水平的主膜片11向下位移,逐渐的让第一真空破坏阀门201开启,让先导大气通道122内的大气压力PP得以顺沿先导排气直杆20向下通过第一真空破坏阀门201,来进行内部真空的细微调整。Please refer to FIGS. 7-8 , which is the first stage of breaking the vacuum state. First, it can be seen that the atmospheric pressure solenoid valve 32 is opened, and the external atmospheric pressure PP is introduced from an atmospheric port 231 into the vacuum pressure chamber 12 through the adjustment channel 121 to keep the original level. The main diaphragm 11 is displaced downward, and the first vacuum breaking valve 201 is gradually opened, so that the atmospheric pressure PP in the pilot atmospheric passage 122 can pass down the first vacuum breaking valve 201 along the pilot exhaust straight rod 20, to Make minor adjustments to the internal vacuum.

请参阅图9-10所示,为第二段破真空状态,接续前述第一段破真空状态,大气压电磁阀32开启后,持续性从大气口321导入大气压力PP,使主膜片11持续向下位移时,该先导排气直杆20的限位凸掣204将会推动第二真空破坏阀门202开启,此时位于第二真空破坏阀门202下方的大气通道123将会提供更多的大气压力PP进入,使内部真空的调整幅度得更为迅速,当主膜片11向下至该真空压力腔12底部时,会将该先导大气通道122进入的大气压力PP流量降至最小,同时也使大气通道123进入的大气压力PP流量升到最大。Please refer to FIGS. 9-10 , it is the second stage of breaking vacuum state, following the first stage of breaking vacuum state, after the atmospheric pressure solenoid valve 32 is opened, the atmospheric pressure PP is continuously introduced from the atmospheric port 321, so that the main diaphragm 11 continues to When moving downward, the limiting protrusion 204 of the pilot exhaust straight rod 20 will push the second vacuum breaking valve 202 to open, and the atmosphere channel 123 located under the second vacuum breaking valve 202 will provide more atmosphere at this time The pressure PP enters, so that the adjustment range of the internal vacuum is more rapid. When the main diaphragm 11 goes down to the bottom of the vacuum pressure chamber 12, the flow rate of the atmospheric pressure PP entering the pilot atmospheric channel 122 will be reduced to a minimum, and it will also make The atmospheric pressure PP flow rate entering the atmospheric passage 123 rises to the maximum.

综上所述,本发明真空电控比例阀,通过设计的先导大气通道122和先导排气直杆20加以配合,使外部空气通过第一真空破坏阀门201与第二真空破坏阀门202,得以流入二次侧压力P2,配合真空进行强度调整,让调整的反应速度都能获得改善,且更能简化常规复杂通气回路所带来的测试不便的问题。To sum up, the vacuum electronically controlled proportional valve of the present invention cooperates with the designed pilot air passage 122 and the pilot exhaust straight rod 20, so that the outside air can flow into the first vacuum breaking valve 201 and the second vacuum breaking valve 202. The secondary side pressure P2, combined with vacuum strength adjustment, can improve the adjustment response speed, and can simplify the test inconvenience caused by the conventional complex ventilation circuit.

以上依据图式所示的实施例详细说明了本发明的构造、特征及作用效果,以上所述仅为本发明的较佳实施例,但本发明不以图面所示限定实施范围,凡是依照本发明的构想所作的改变,或修改为等同变化的等效实施例,仍未超出说明书与图示所涵盖的精神时,均应在本发明的保护范围内。The structure, features and effects of the present invention have been described in detail above according to the embodiments shown in the drawings. The above are only the preferred embodiments of the present invention, but the scope of the present invention is not limited by the drawings. Changes made to the concept of the present invention, or modifications to equivalent embodiments with equivalent changes, shall fall within the protection scope of the present invention as long as they do not exceed the spirit covered by the description and drawings.

Claims (3)

1. A vacuum electrically controlled proportional valve, comprising:
the air conditioner comprises a valve seat (10), a guide seat (30) is combined above the valve seat (10), a main diaphragm (11) is clamped between the guide seat (30) and the valve seat (10) to form a vacuum pressure cavity (12), an elastic component (111) is arranged above the main diaphragm (11), a pilot exhaust straight rod (20) is embedded in the center of the main diaphragm (11), the pilot exhaust straight rod (20) is further provided with a vacuum valve set (21), a vacuum piezoelectric solenoid valve (31), an atmospheric pressure solenoid valve (32) and a sensor (33) are further connected above the guide seat (30), and an adjusting channel (121) is communicated to the upper part of the vacuum pressure cavity (12) and is controlled by the vacuum piezoelectric solenoid valve (31) and the atmospheric pressure solenoid valve (32);
a pilot atmospheric channel (122) arranged in the valve seat (10) and communicated to the space below the main diaphragm (11) so as to supply atmospheric pressure (PP) for circulation;
a main channel (40) arranged between the valve seat (10) and the guide seat (30), wherein the main channel (40) can be used for the flow of a primary pressure (P1) and a secondary pressure (P2), and a guide channel (101) controlled by the vacuum solenoid valve (31) and a feedback channel (102) connected with the sensor (33) are additionally arranged in the main channel (40);
the method is characterized in that: a first vacuum breaking valve (201) is arranged above the valve seat (10) of the pilot exhaust straight rod (20), a second vacuum breaking valve (202) is arranged between the upper part of the vacuum valve group (21) and the pilot exhaust straight rod (20), when the primary pressure (P1) cooperates with the vacuum solenoid valve (31) through the guide channel (101) to operate, a vacuum Pressure (PT) is generated in the vacuum pressure chamber (12) through the adjusting channel (121), the main diaphragm (11) is upwards linked with the pilot exhaust straight rod (20), and then a main valve (203) below the vacuum valve group (21) is driven to open, the primary pressure (P1) forms the secondary pressure (P2) through the main valve (203), so as to form vacuum adsorption until the main diaphragm (11) returns to the horizontal position, the pilot exhaust straight rod (20) is driven to enable the main valve (203) to be in a stable pressure state after being closed; when the atmospheric pressure solenoid valve (32) is opened and the main diaphragm (11) is pressed by the adjusting channel (121) to move downwards, the atmospheric pressure (PP) passes through the pilot atmospheric channel (122) to the first vacuum destruction valve (201) to be in an open state, the atmospheric pressure (PP) can partially pass through to reduce the strength of vacuum adsorption, and when the atmospheric pressure (PP) is continuously input, the second vacuum destruction valve (202) is opened to enable the atmospheric pressure (PP) to pass through more.
2. The vacuum electrically controlled proportioning valve of claim 1 wherein: the elastic component (111) is a spring.
3. The vacuum electrically controlled proportioning valve of claim 1 wherein: the vacuum valve group (21) is composed of: the two convex parts (22) are formed by matching a spring (23) with convex surfaces oppositely, the inner parts of the convex parts (22) are in a through design and can be provided with the pilot exhaust straight rod (20), and the upper part and the lower part of the side edge of the pilot exhaust straight rod (20) are respectively provided with a limiting convex stopper (204) which can limit the stroke of the pilot exhaust straight rod (20) in the up-and-down displacement.
CN201910202448.4A 2019-03-11 2019-03-11 A vacuum electronically controlled proportional valve Active CN111677925B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910202448.4A CN111677925B (en) 2019-03-11 2019-03-11 A vacuum electronically controlled proportional valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910202448.4A CN111677925B (en) 2019-03-11 2019-03-11 A vacuum electronically controlled proportional valve

Publications (2)

Publication Number Publication Date
CN111677925A CN111677925A (en) 2020-09-18
CN111677925B true CN111677925B (en) 2022-09-09

Family

ID=72433180

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910202448.4A Active CN111677925B (en) 2019-03-11 2019-03-11 A vacuum electronically controlled proportional valve

Country Status (1)

Country Link
CN (1) CN111677925B (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6508268B1 (en) * 1998-11-13 2003-01-21 Ckd Corporation Vacuum pressure control apparatus
CN205401910U (en) * 2016-03-07 2016-07-27 上海气立可气动设备有限公司 Energy -saving accurate air -vent valve
CN207539400U (en) * 2017-11-07 2018-06-26 上海气立可气动设备有限公司 Energy-saving large capacity precise pressure regulating valve structure-improved
CN207961658U (en) * 2018-02-27 2018-10-12 上海气立可气动设备有限公司 Vacuum energy-saving type large capacity precise pressure regulating valve
CN209977364U (en) * 2019-03-11 2020-01-21 台湾气立股份有限公司 Vacuum electric control proportional valve

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5123803B2 (en) * 2008-09-19 2013-01-23 積水化学工業株式会社 Vacuum valve control device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6508268B1 (en) * 1998-11-13 2003-01-21 Ckd Corporation Vacuum pressure control apparatus
CN205401910U (en) * 2016-03-07 2016-07-27 上海气立可气动设备有限公司 Energy -saving accurate air -vent valve
CN207539400U (en) * 2017-11-07 2018-06-26 上海气立可气动设备有限公司 Energy-saving large capacity precise pressure regulating valve structure-improved
CN207961658U (en) * 2018-02-27 2018-10-12 上海气立可气动设备有限公司 Vacuum energy-saving type large capacity precise pressure regulating valve
CN209977364U (en) * 2019-03-11 2020-01-21 台湾气立股份有限公司 Vacuum electric control proportional valve

Also Published As

Publication number Publication date
CN111677925A (en) 2020-09-18

Similar Documents

Publication Publication Date Title
TWI689678B (en) Vacuum electronic control proportional valve
CN209977364U (en) Vacuum electric control proportional valve
TWI689676B (en) Electronically controlled large capacity proportional valve
CN105202252A (en) Drive device of pneumatic proportional valve
TW202016455A (en) Two-stage air intake and two-stage air exhaust structure of electrically controlled proportional valve capable of achieving the purpose of outputting the secondary side pressure quickly and stably
TWI689679B (en) Vacuum large capacity electric control proportional valve
CN111677925B (en) A vacuum electronically controlled proportional valve
CN206495848U (en) Redundancy-type electromagnetic relief valve
CN111692403B (en) Vacuum large-capacity electric control proportional valve
CN210423900U (en) Vacuum large capacity electronically controlled proportional valve
TWM580152U (en) Electrically controlled vacuum proportional valve
JP2004319413A (en) Gas pressure reducing device of fuel cell system
TWM581173U (en) Vacuum large-capacity electric control proportional valve
CN101275679A (en) Pilot valve unit for actuator control
JP4265820B2 (en) Chemical supply system
CN213451993U (en) Pilot-operated type electromagnetic valve
CN111140667B (en) Two-section type air inlet and two-section type air exhaust structure of electric control proportional valve
KR100812560B1 (en) Flow control valve
KR101042327B1 (en) Pilot Valves Using Hydraulic Actuators
JP2836682B2 (en) Exhaust gas recirculation control valve
CN209398874U (en) A kind of two-period form air inlet of electronically controlled proportional valve and two-period form exhaust structure
US9523376B2 (en) Discrete pilot stage valve arrangement with fail freeze mode
CN203421225U (en) Gas proportional valve used for kitchen range
CN219866458U (en) Pneumatic control type vacuum pressure regulating valve
CN109838563A (en) A kind of gas proportion combination valve

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant