CN111550583A - High-precision glue pump for glue homogenizing and developing equipment - Google Patents
High-precision glue pump for glue homogenizing and developing equipment Download PDFInfo
- Publication number
- CN111550583A CN111550583A CN202010285572.4A CN202010285572A CN111550583A CN 111550583 A CN111550583 A CN 111550583A CN 202010285572 A CN202010285572 A CN 202010285572A CN 111550583 A CN111550583 A CN 111550583A
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- Prior art keywords
- glue
- way valve
- shell
- connecting rod
- glue pump
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K15/00—Check valves
- F16K15/02—Check valves with guided rigid valve members
- F16K15/04—Check valves with guided rigid valve members shaped as balls
- F16K15/042—Check valves with guided rigid valve members shaped as balls with a plurality of balls
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/08—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means
- B05B12/082—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means responsive to a condition of the discharged jet or spray, e.g. to jet shape, spray pattern or droplet size
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/08—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means
- B05B12/085—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means responsive to flow or pressure of liquid or other fluent material to be discharged
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K15/00—Check valves
- F16K15/02—Check valves with guided rigid valve members
- F16K15/04—Check valves with guided rigid valve members shaped as balls
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Details Of Reciprocating Pumps (AREA)
Abstract
The invention discloses a high-precision glue pump used for a glue homogenizing and developing device, belonging to the field of semiconductor processing; the high-precision glue pump used by the spin coating developing equipment comprises: the air conditioner comprises a driving cylinder, a connecting rod, an air bag, a shell, an end cover, a first one-way valve and a second one-way valve; the driving cylinder is fixedly connected with the first end of the connecting rod, the air sac is fixedly connected with the second end of the connecting rod, the shell is covered on the periphery of the air sac, and the driving cylinder is fixedly connected with the shell through an end cover; the first one-way valve is fixed at the feed inlet of the shell, and the second one-way valve is fixed at the discharge outlet of the shell; when the driving cylinder drives the connecting rod to reciprocate, the connecting rod drives the air sac to move in the shell; the high-precision glue pump used by the glue homogenizing and developing equipment ensures the accuracy of the glue flowing direction through the design of the one-way valve, so that the glue spraying amount of the glue spraying machine can reach a certain glue spraying amount each time, the precision of the glue spraying amount is improved, meanwhile, the process of spraying glue for the second time when the glue spraying amount is insufficient for the first time is avoided, and the waste of the glue is reduced.
Description
Technical Field
The invention belongs to the field of semiconductor processing, and particularly relates to a high-precision glue pump used for a glue homogenizing and developing device.
Background
In the semiconductor industry, photolithography processes are used in a wide variety of applications. The basic process of photolithography consists of steps of photoresist coating, exposure, development, etc. The photoresist itself can be present in liquid form. The apparatus is very important for the uniformity of the photoresist when coating the photoresist. The requirements on the performance and the precision of the rubber pump are very high.
The electric glue spraying device and the method disclosed in the Chinese invention patent CN 105834069A comprise a glue spraying nozzle, an electric glue spraying pump and a glue containing bottle, wherein the glue spraying nozzle is communicated with a glue spraying nozzle interface on the electric glue spraying pump, and the glue containing bottle is communicated with a glue conveying pipe interface on the electric glue spraying pump; the glue applying spray head comprises a spray head outer cover and a spray head inner cover which are connected with each other, a cavity is formed between the spray head outer cover and the spray head inner cover, and a glue spraying hole is formed in the spray head inner cover.
The glue sprayer structure in the prior art cannot accurately control the usage amount of the photoresist.
Disclosure of Invention
First, technical problem to be solved
The invention aims to solve the problems in the prior art, and particularly provides a high-precision glue pump used for a spin coater developer, which solves the problem that the conventional glue pump cannot accurately control the usage amount of photoresist.
Second, technical scheme
In order to solve the above technical problem, the present invention provides a high precision glue pump for a spin coater developer, comprising: the air conditioner comprises a driving cylinder, a connecting rod, an air bag, a shell, an end cover, a first one-way valve and a second one-way valve; the driving cylinder is fixedly connected with the first end of the connecting rod, the air sac is fixedly connected with the second end of the connecting rod, the shell is covered on the periphery of the air sac, and the driving cylinder is fixedly connected with the shell through an end cover; the first one-way valve is fixed at the feed inlet of the shell, and the second one-way valve is fixed at the discharge outlet of the shell; when the driving cylinder drives the connecting rod to move in a reciprocating mode, the connecting rod drives the air sac to move in the shell.
Wherein, be equipped with first sealing washer between actuating cylinder and the end cover.
And a second sealing ring is arranged at the joint of the first one-way valve or the second one-way valve and the shell.
The first check valve and the second check valve respectively comprise a valve body, a ball seat and a retainer ring; the ball body, the ball seat and the retainer ring are all arranged in the valve body; the ball seat is provided with a spherical concave hole with the same radian as the sphere; the ball is embedded in the spherical concave hole.
Wherein, a plurality of glue spraying holes are arranged on the retainer ring.
The valve body comprises a connecting port and a conveying port, the connecting port is connected with the shell, and the conveying port is connected with a conveying pipe.
The spherical end of the spherical concave hole of the ball seat in the first one-way valve faces the delivery port of the valve body.
And the opening end of the spherical concave hole of the ball seat in the second one-way valve faces to the delivery port of the valve body.
Wherein, first check valve and second check valve all are equipped with two spheroid and two ball seats.
Thirdly, the invention has the beneficial effects
Compared with the prior art, the high-precision glue pump used by the spin coating developing equipment has the following beneficial effects;
through the design of the one-way valve, the accuracy of the flowing direction of the glue is ensured, the glue spraying amount of the glue spraying machine can reach a certain glue spraying amount each time, the precision of the glue spraying amount is improved, meanwhile, the process that the glue spraying amount is insufficient for the first time and needs to be carried out for the second time is avoided, and the waste of the glue is reduced;
through the design of arranging the glue spraying holes on the retaining ring, the glue is uniformly thinned by the glue spraying holes when passing through the retaining ring, so that the uniformity is improved;
through the design of two spheroid and two ball seat cooperations, the reverse effect of damming that makes the check valve further improve has further improved the accuracy of glue flow direction.
Drawings
FIG. 1 is an overall view of a high precision glue pump used in the track developing apparatus of the present invention;
FIG. 2 is an exploded view of a high precision glue pump used in the track developing apparatus of the present invention;
FIG. 3 is an exploded view of the first check valve or the second check valve of the first embodiment of the high precision glue pump used in the track developing apparatus of the present invention;
FIG. 4 is a full sectional view of a first check valve of a first embodiment of a high precision glue pump for use in a track leveling development apparatus in accordance with the present invention;
FIG. 5 is a full sectional view of a second check valve of the first embodiment of the high precision glue pump used in the track leveling and developing apparatus of the present invention;
FIG. 6 is a schematic diagram of a retainer ring structure of a high-precision glue pump used in the spin coating and developing apparatus of the present invention;
FIG. 7 is a schematic view of a ball seat of a high precision glue pump for use in the track developing apparatus of the present invention;
FIG. 8 is a schematic view of a valve body of a high precision glue pump for use in the track developing apparatus of the present invention;
FIG. 9 is an exploded view of the first check valve or the second check valve of the second embodiment of the high precision glue pump used in the spin coater of the present invention;
FIG. 10 is a full sectional view of the first check valve of the second embodiment of the high precision glue pump for use in the track developing apparatus of the present invention;
FIG. 11 is a full sectional view of a second one-way valve of a second embodiment of a high precision glue pump for use in a track lithography apparatus according to the present invention;
in the figure: 1 is a driving cylinder; 2 is a connecting rod; 3 is a wind sac; 4 is a shell; 5 is an end cover; 6 is a first one-way valve; 7 is a second one-way valve; 8 is a first sealing ring; 9 is a second sealing ring; 101 is a valve body; 102 is a sphere; 103 is a ball seat; 104 is a retainer ring; 106 are spherical concave holes; 1041 is a glue spraying hole; 1011 is a connecting port; and 1012 is a delivery port.
Detailed Description
The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.
Example one
The structure of the high-precision glue pump used by the track developing apparatus of the present embodiment includes, as shown in fig. 1 to 8: drive cylinder 1, connecting rod 2, bellows 3, casing 4, end cover 5, first check valve 6 and second check valve 7
The first one-way valve 6 is fixed at the feed inlet of the shell 4; the second one-way valve 7 is fixed at the discharge hole of the shell 4; a second sealing ring 9 is arranged at the joint of the first one-way valve 6 and the second one-way valve 7 with the shell 4, and the first one-way valve 6 and the second one-way valve 7 have a sealing effect with the shell 4 to prevent glue from leaking from the joint; after entering the housing 4 from the first one-way valve 6, the glue cannot flow out reversely from the first one-way valve 6, and after flowing out from the second one-way valve 7, the glue in the housing 4 cannot flow into the housing 4 reversely from the second one-way valve 7.
Drive the first end fixed connection of actuating cylinder 1 and connecting rod 2, the second end fixed connection of bellows 3 and connecting rod 2, 4 covers of casing are located bellows 3 peripherally, drive actuating cylinder 1 and pass through end cover 5 and 4 fixed connection of casing, drive actuating cylinder 1 and be equipped with first sealing washer 8 with 5 junctions of end cover, prevent that glue from driving actuating cylinder 1 and 5 junctions seepage of end cover.
The driving cylinder 1 pulls the connecting rod 2 to enable the connecting rod 2 to pull the air sac 3 to compress, air in the shell 4 is discharged, the air pressure of the shell 4 is smaller than the external air pressure, at the moment, the first one-way valve 6 is opened, the second one-way valve 7 is closed, and glue enters the shell 4 from the first one-way valve 6;
drive actuating cylinder 1 and promote connecting rod 2 and make connecting rod 2 promote the bellows 3 and open, extrude the glue in the casing 4, first check valve 6 is closed this moment, and second check valve 7 is opened, and the glue in the casing 4 is extruded from second check valve 7, drives actuating cylinder 1 and just accomplishes one and spout gluey process once every reciprocating motion.
The first check valve 6 and the second check valve 7 respectively comprise a valve body 101, a ball 102, a ball seat 103 and a retainer ring 104; the ball 102, the ball seat 103 and the retainer ring 104 are all arranged in the valve body 101;
the ball seat 103 is provided with a spherical concave hole 106 with the same radian as the sphere 102; the sphere 102 is embedded in the spherical concave hole 106, the check ring 104 is provided with a plurality of glue spraying holes 1041, and glue is refined through the check ring 104 by the glue spraying holes 1041, so that the flow of the glue is more uniform. The valve body 101 includes a connection port 1011 and a delivery port 1012, the connection port 1011 is connected to the housing 4, and the delivery port 1012 is connected to the delivery pipe 105;
the sphere end 1061 of the sphere shrinkage pool 106 of the ball seat 103 in the first check valve 6 faces the delivery port 1012 of the valve body 101, so the bellows 3 is compressed, when the air pressure of the housing 4 is less than the external air pressure, the sphere 102 in the first check valve 6 is separated from the sphere shrinkage pool 106, so that the first check valve 6 is in an open state, the glue can enter the housing 4, and the bellows 3 is opened, when the glue in the housing 4 is squeezed, the sphere 102 in the first check valve 6 is attached to the sphere shrinkage pool 106 under the action of the pressure, the first check valve 6 is in a closed state, and the glue can not flow out from the first check valve 6 at the moment.
The open end 1062 of the spherical concave hole 106 of the ball seat 103 in the second check valve 7 faces the delivery port 1012 of the valve body 101, so that the air bag 3 is compressed, when the air pressure of the housing 4 is smaller than the external air pressure, the ball 102 in the second check valve 7 is attached to the spherical concave hole 106, so that the second check valve 7 is in a closed state, backflow of glue from the second check valve 7 is avoided, the air bag 3 is opened, when the glue in the housing 4 is squeezed, the ball 102 in the second check valve 7 is separated from the spherical concave hole 106, the second check valve 7 is in an open state, and the glue in the housing 4 flows out from the second check valve 7.
Example two
As shown in fig. 9 to 11, in order to further improve the one-way sealing performance of the first one-way valve 6 and the second one-way valve 7, on the basis of the first embodiment, two spheres 102 and two ball seats 103 are disposed in the first one-way valve 6 and the second one-way valve 7, each sphere 102 is embedded in the spherical concave hole 106 of the corresponding ball seat 103, and a single sphere 102 and the corresponding ball seat 103 can form a one-way sealing assembly, so the first one-way valve 6 and the second one-way valve 7 in this embodiment both have two one-way sealing assemblies, and therefore have higher one-way sealing performance, effectively prevent the first one-way valve 6 and the second one-way valve 7 from glue backflow, and further improve the glue spraying accuracy of the glue sprayer.
The above is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, it is possible to make several improvements and modifications without departing from the technical principle of the present invention, and these improvements and modifications should also be considered as the protection scope of the present invention.
Claims (9)
1. The utility model provides a high accuracy glue pump that spin coating developing apparatus used which characterized in that, the high accuracy glue pump that spin coating developing apparatus used includes: drive cylinder (1), connecting rod (2), air bag (3), shell (4), end cover (5), first check valve (6) and second check valve (7)
The driving cylinder (1) is fixedly connected with the first end of the connecting rod (2), the air bag (3) is fixedly connected with the second end of the connecting rod (2), the shell (4) is covered on the periphery of the air bag (3), and the driving cylinder (1) is fixedly connected with the shell (4) through the end cover (5);
the first one-way valve (6) is fixed at the feed inlet of the shell (4), and the second one-way valve (7) is fixed at the discharge outlet of the shell (4)
When the driving cylinder (1) drives and pushes the connecting rod (2) to reciprocate, the connecting rod (2) drives the air bag (3) to move in the shell (4).
2. The high precision glue pump for the track roller developer according to claim 1, wherein a first sealing ring (8) is arranged between the driving cylinder (1) and the end cap (5).
3. The high-precision glue pump for the spin coater according to claim 2, wherein a second sealing ring (9) is provided at the joint of the first one-way valve (6) or the second one-way valve (7) and the housing (4).
4. The high-precision glue pump for the track roller developing device according to claim 3, wherein the first one-way valve (6) and the second one-way valve (7) each comprise a valve body (101), a ball body (102), a ball seat (103) and a retainer ring (104);
the ball body (102), the ball seat (103) and the check ring (104) are all arranged in the valve body (101);
the ball seat (103) is provided with a spherical concave hole (106) with the same radian as the sphere (102); the sphere (102) is embedded in the spherical concave hole (106).
5. The high-precision glue pump for the spin coater according to claim 4, wherein the retainer ring (104) has a plurality of glue-spraying holes (1041).
6. The glue pump with high precision for the track roller developing device according to claim 5, wherein the valve body (101) comprises a connecting port (1011) and a delivery port (1012), the connecting port (1011) is connected with the housing (4), and the delivery port (1012) is connected with the delivery pipe (105).
7. The high precision glue pump for the track roller developing apparatus according to claim 6, wherein the spherical end (1061) of the spherical recess (106) of the ball seat (103) in the first one-way valve (6) faces the delivery port (1012) of the valve body (101).
8. The high precision glue pump for the track roller developer according to claim 7, wherein the open end (1062) of the spherical recess (106) of the ball seat (103) in the second one-way valve (7) faces the delivery port (1012) of the valve body (101).
9. The glue pump with high precision for the track roller developing device according to claim 8, wherein the first check valve (6) and the second check valve (7) are each provided with two balls (102) and two ball seats (103).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010285572.4A CN111550583A (en) | 2020-04-13 | 2020-04-13 | High-precision glue pump for glue homogenizing and developing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010285572.4A CN111550583A (en) | 2020-04-13 | 2020-04-13 | High-precision glue pump for glue homogenizing and developing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111550583A true CN111550583A (en) | 2020-08-18 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010285572.4A Pending CN111550583A (en) | 2020-04-13 | 2020-04-13 | High-precision glue pump for glue homogenizing and developing equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111550583A (en) |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01145072A (en) * | 1987-06-16 | 1989-06-07 | Frantz Medical Dev Ltd | Pump apparatus for controlling and injecting oral/parenteral fluid |
| CN201094944Y (en) * | 2007-08-03 | 2008-08-06 | 上海陈立实业有限公司 | Water pipe joint bonding rubber coating fixture |
| JP2008307478A (en) * | 2007-06-14 | 2008-12-25 | Kao Corp | Foam discharger |
| WO2010061704A1 (en) * | 2008-11-26 | 2010-06-03 | 電気化学工業株式会社 | Composition-dispensing device |
| CN202971153U (en) * | 2012-11-07 | 2013-06-05 | 三一汽车制造有限公司 | One-way valve unit and transmission device |
| CN103148225A (en) * | 2011-12-06 | 2013-06-12 | 道尼克斯索芙特隆公司 | Control valve, in particular for switching a fluid under high pressure |
| CN207033628U (en) * | 2017-07-31 | 2018-02-23 | 成都威特电喷有限责任公司 | Single cylinder diesel electronic controlled fuel pump enters oil outlet one-way valve |
| CN109340075A (en) * | 2018-10-15 | 2019-02-15 | 安徽致信汽车科技有限公司 | A kind of electromagnetic pump that can eliminate the precipitation of fuel negative-pressure air |
| JP2019091837A (en) * | 2017-11-16 | 2019-06-13 | 株式会社ディスコ | Liquid supply unit |
-
2020
- 2020-04-13 CN CN202010285572.4A patent/CN111550583A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01145072A (en) * | 1987-06-16 | 1989-06-07 | Frantz Medical Dev Ltd | Pump apparatus for controlling and injecting oral/parenteral fluid |
| JP2008307478A (en) * | 2007-06-14 | 2008-12-25 | Kao Corp | Foam discharger |
| CN201094944Y (en) * | 2007-08-03 | 2008-08-06 | 上海陈立实业有限公司 | Water pipe joint bonding rubber coating fixture |
| WO2010061704A1 (en) * | 2008-11-26 | 2010-06-03 | 電気化学工業株式会社 | Composition-dispensing device |
| CN103148225A (en) * | 2011-12-06 | 2013-06-12 | 道尼克斯索芙特隆公司 | Control valve, in particular for switching a fluid under high pressure |
| CN202971153U (en) * | 2012-11-07 | 2013-06-05 | 三一汽车制造有限公司 | One-way valve unit and transmission device |
| CN207033628U (en) * | 2017-07-31 | 2018-02-23 | 成都威特电喷有限责任公司 | Single cylinder diesel electronic controlled fuel pump enters oil outlet one-way valve |
| JP2019091837A (en) * | 2017-11-16 | 2019-06-13 | 株式会社ディスコ | Liquid supply unit |
| CN109340075A (en) * | 2018-10-15 | 2019-02-15 | 安徽致信汽车科技有限公司 | A kind of electromagnetic pump that can eliminate the precipitation of fuel negative-pressure air |
Non-Patent Citations (1)
| Title |
|---|
| 胡海清: "《气压与液压传动控制技术》", 31 August 2014, 北京理工大学出版社 * |
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| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20200818 |
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| RJ01 | Rejection of invention patent application after publication |