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CN111545766A - Equipment and method for preparing high-purity spherical metal powder - Google Patents

Equipment and method for preparing high-purity spherical metal powder Download PDF

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CN111545766A
CN111545766A CN202010579822.5A CN202010579822A CN111545766A CN 111545766 A CN111545766 A CN 111545766A CN 202010579822 A CN202010579822 A CN 202010579822A CN 111545766 A CN111545766 A CN 111545766A
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spherical metal
metal powder
radio frequency
powder
plasma generator
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柯良节
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
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    • B22F9/14Making metallic powder or suspensions thereof using physical processes using electric discharge

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Abstract

The invention discloses equipment and a method for preparing high-purity spherical metal powder, wherein the equipment comprises an automatic powder feeding device, a reaction generation chamber connected with the automatic powder feeding device, and a radio frequency plasma generator connected with the reaction generation chamber, wherein the automatic powder feeding device is used for feeding raw material powder particles with irregular shapes into the reaction generation chamber, and the radio frequency plasma generator is used for heating and melting the raw material powder particles fed into the reaction generation chamber to form the high-purity spherical metal powder. The invention adopts the radio frequency plasma generator to heat and melt the raw material powder particles, and can prepare the spherical metal powder with high spheroidization rate, high purity, large density and relatively narrow particle size distribution by utilizing the advantages of high energy density, high heating strength, large volume of plasma moment and the like of the radio frequency plasma generator; the invention does not pollute the product due to electrode evaporation, and is beneficial to ensuring the high purity of the prepared spherical metal powder.

Description

一种制备高纯球形金属粉体的设备及方法A kind of equipment and method for preparing high-purity spherical metal powder

技术领域technical field

本发明涉及球形金属粉体的制备领域,特别涉及一种制备高纯球形金属粉体的设备及方法。The invention relates to the field of preparation of spherical metal powder, in particular to a device and method for preparing high-purity spherical metal powder.

背景技术Background technique

金属3D打印技术的核心是材料和装置,随着金属3D打印技术的发展,装置逐渐成熟,但目前可用于金属3D打印的材料种类少、性能不稳定,传统冶金用金属粉末材料还不能完全适用金属3D打印工艺。另外,3D打印用金属粉末要求球形度高、含氧量低、粒度分布窄,而国内在金属粉末材料性能研究、制备技术数据积累等方面比较匿乏。目前,我国3D打印快速成型技术使用的材料大多需从国外进口,或设备厂家自己投入巨大精力和经费研制,价格昂贵,致使生产成本提高。因此解决好材料的性能和成本问题,将会更好地推动我国的快速成型技术的发展。The core of metal 3D printing technology is materials and devices. With the development of metal 3D printing technology, the device has gradually matured. However, there are few types of materials that can be used for metal 3D printing, and the performance is unstable. Traditional metal powder materials for metallurgy are not fully applicable. Metal 3D printing process. In addition, metal powders for 3D printing require high sphericity, low oxygen content, and narrow particle size distribution, while domestic research on metal powder material properties and preparation technology data accumulation is relatively lacking. At present, most of the materials used in my country's 3D printing rapid prototyping technology need to be imported from abroad, or equipment manufacturers have invested a lot of energy and funds to develop them, which are expensive, resulting in increased production costs. Therefore, solving the performance and cost problems of materials will better promote the development of rapid prototyping technology in China.

目前的球形金属粉体加工过程中,一般采用坩埚加热和电极感应加热两种加热的方式对金属进行熔化,熔化后的金属在气流的作用下吹散并冷却,生产相应的粉体,然后在后续的打印中使用。In the current process of spherical metal powder processing, two heating methods of crucible heating and electrode induction heating are generally used to melt the metal, and the melted metal is blown and cooled under the action of air flow to produce the corresponding powder, which is then used in subsequent prints.

然而,现有的球形金属粉体加工方式存在能耗较高、球化率低、粒度分布较宽以及球形金属粉体易受电极蒸发污染导致球形金属粉体的纯度较低的问题。However, the existing spherical metal powder processing methods have the problems of high energy consumption, low spheroidization rate, wide particle size distribution, and low purity of spherical metal powder due to the fact that spherical metal powder is easily contaminated by electrode evaporation.

因此,现有技术还有待于改进和发展。Therefore, the existing technology still needs to be improved and developed.

发明内容SUMMARY OF THE INVENTION

鉴于上述现有技术的不足,本发明的目的在于提供一种制备高纯球形金属粉体的设备及方法,旨在解决现有球形金属粉体加工方式存在能耗较高、球化率低、粒度分布较宽以及球形金属粉体易受电极蒸发污染导致球形金属粉体的纯度较低的问题。In view of the above-mentioned deficiencies in the prior art, the purpose of the present invention is to provide a device and method for preparing high-purity spherical metal powder, aiming to solve the problems of high energy consumption, low spheroidization rate, The wide particle size distribution and the susceptibility of spherical metal powder to contamination by electrode evaporation lead to the problem of low purity of spherical metal powder.

本发明的技术方案如下:The technical scheme of the present invention is as follows:

一种制备高纯球形金属粉体的设备,其中,包括自动送粉装置,与所述自动送粉装置连接的反应生成室,与所述反应生成室连接的射频等离子体发生器,所述自动送粉装置用于将形状不规则的原料粉体颗粒送入所述反应生成室,所述射频等离子体发生器用于对送入所述反应生成室的原料粉体颗粒进行加热熔化并形成高纯球形金属粉体。A device for preparing high-purity spherical metal powder, which includes an automatic powder feeding device, a reaction generation chamber connected with the automatic powder feeding device, a radio frequency plasma generator connected with the reaction generation chamber, and the automatic powder feeding device. The powder feeding device is used to send the irregularly shaped raw material powder particles into the reaction generation chamber, and the radio frequency plasma generator is used to heat and melt the raw material powder particles sent into the reaction generation chamber and form high-purity powder particles. Spherical metal powder.

所述制备高纯球形金属粉体的设备,其中,还包括与所述射频等离子体发生器电连接的控制系统,所述控制系统内设置有与所述射频等离子体发生器电连接的射频电源。The equipment for preparing high-purity spherical metal powders further includes a control system electrically connected to the radio frequency plasma generator, wherein the control system is provided with a radio frequency power supply that is electrically connected to the radio frequency plasma generator .

所述制备高纯球形金属粉体的设备,其中,还包括与所述射频等离子体发生器以及自动送粉装置分别连通的气柜,所述气柜用于存储等离子体反应气体、保护气体及载流气体。The equipment for preparing high-purity spherical metal powder further includes a gas cabinet connected with the radio frequency plasma generator and the automatic powder feeding device respectively, and the gas cabinet is used for storing plasma reaction gas, protective gas and carrier gas.

所述制备高纯球形金属粉体的设备,其中,还包括与所述反应生成室连通的真空手套箱收粉系统。The equipment for preparing high-purity spherical metal powder further comprises a vacuum glove box powder collecting system communicated with the reaction generating chamber.

所述制备高纯球形金属粉体的设备,其中,还包括与所述真空手套箱收粉系统连通的旋风除尘装置。The equipment for preparing high-purity spherical metal powder further comprises a cyclone dust removal device communicated with the powder collecting system of the vacuum glove box.

所述制备高纯球形金属粉体的设备,其中,还包括设置在所述旋风除尘装置底部的除尘收粉罐。The equipment for preparing high-purity spherical metal powder further includes a dust-removing and powder-collecting tank arranged at the bottom of the cyclone dust-removing device.

所述制备高纯球形金属粉体的设备,其中,还包括与所述反应生成室以及射频等离子体发生器连通的水环式真空泵组。The equipment for preparing high-purity spherical metal powder further includes a water-ring vacuum pump group connected with the reaction generating chamber and the radio frequency plasma generator.

一种基于所述设备制备高纯球形金属粉体的方法,其中,包括步骤:A method for preparing high-purity spherical metal powder based on the device, comprising the steps of:

自动送粉装置将原料粉体颗粒送入反应生成室;The automatic powder feeding device sends the raw powder particles into the reaction generation chamber;

启动射频等离子体发生器对送入所述反应生成室的原料粉体颗粒进行加热熔化,得到球形金属液滴,所述球形金属液滴凝固后形成所述高纯球形金属粉体。The radio frequency plasma generator is activated to heat and melt the raw material powder particles sent into the reaction generating chamber to obtain spherical metal droplets, and the spherical metal droplets solidify to form the high-purity spherical metal powder.

有益效果:本发明提供了一种制备高纯球形金属粉体的设备,其包括自动送粉装置,与所述自动送粉装置连接的反应生成室,与所述反应生成室连接的射频等离子体发生器,所述自动送粉装置用于将形状不规则的原料粉体颗粒送入所述反应生成室,所述射频等离子体发生器用于对送入所述反应生成室的原料粉体颗粒进行加热熔化并形成高纯球形金属粉体。本发明采用射频等离子发生器对原料粉体颗粒进行加热熔化处理,利用射频等离子体发生器具有能量密度高,加热强度大,等离子体矩的体积大,处理材料工艺简单等优点,可制备得到球化率高、纯度高、密度大且粒度分布相对较窄的球形金属粉体;且本发明没有使用电极,不会因电极蒸发而污染产品,有利于保证制得的球形金属粉体的高纯度。Beneficial effects: The present invention provides a device for preparing high-purity spherical metal powder, which includes an automatic powder feeding device, a reaction generation chamber connected with the automatic powder feeding device, and a radio frequency plasma connected with the reaction generation chamber generator, the automatic powder feeding device is used to send the raw material powder particles with irregular shapes into the reaction generation chamber, and the radio frequency plasma generator is used to carry out the raw material powder particles sent into the reaction generation chamber. Heating to melt and form high-purity spherical metal powder. The invention adopts the radio frequency plasma generator to heat and melt the raw powder particles, and the radio frequency plasma generator has the advantages of high energy density, high heating intensity, large volume of the plasma moment, simple process for processing materials and the like, and can prepare the balls. Spherical metal powder with high conversion rate, high purity, high density and relatively narrow particle size distribution; and the present invention does not use electrodes, and will not contaminate the product due to electrode evaporation, which is beneficial to ensure the high purity of the spherical metal powder obtained. .

附图说明Description of drawings

图1为本发明一种制备高纯球形金属粉体的设备较佳实施例的结构示意图。FIG. 1 is a schematic structural diagram of a preferred embodiment of an apparatus for preparing high-purity spherical metal powder according to the present invention.

图2为本发明一种制备高纯球形金属粉体的方法较佳实施例的流程图。FIG. 2 is a flow chart of a preferred embodiment of a method for preparing high-purity spherical metal powder according to the present invention.

具体实施方式Detailed ways

本发明提供一种制备高纯球形金属粉体的设备及方法,为使本发明的目的、技术方案及效果更加清楚、明确,以下对本发明进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。The present invention provides a device and method for preparing high-purity spherical metal powder. In order to make the purpose, technical solution and effect of the present invention clearer and clearer, the present invention is further described below in detail. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention.

请参阅图1,图1为本发明提供的一种制备高纯球形金属粉体的设备,如图所示,其包括自动送粉装置10,与所述自动送粉装置10连接的反应生成室20,与所述反应生成室20连接的射频等离子体发生器30,所述自动送粉装置10用于将形状不规则的原料粉体颗粒送入所述反应生成室20,所述射频等离子体发生器30用于对送入所述反应生成室20的原料粉体颗粒进行加热熔化并形成高纯球形金属粉体。Please refer to FIG. 1 . FIG. 1 is a device for preparing high-purity spherical metal powder provided by the present invention. As shown in the figure, it includes an automatic powder feeding device 10 and a reaction generating chamber connected to the automatic powder feeding device 10 20. The radio frequency plasma generator 30 connected to the reaction generation chamber 20, the automatic powder feeding device 10 is used for feeding the raw powder particles with irregular shapes into the reaction generation chamber 20, the radio frequency plasma The generator 30 is used for heating and melting the raw material powder particles sent into the reaction generating chamber 20 to form high-purity spherical metal powder.

在本实施例中,采用所述射频等离子体发生器对所述原料粉体颗粒进行加热熔化后得到熔融颗粒,所述熔融颗粒在其表面张力作用下可形成球形度很高的金属液滴,并在极短的时间内迅速凝固,从而形成高纯球形金属粉体。In this embodiment, the raw material powder particles are heated and melted by the radio frequency plasma generator to obtain molten particles, and the molten particles can form metal droplets with high sphericity under the action of their surface tension. And it solidifies rapidly in a very short time to form high-purity spherical metal powder.

本实施例采用射频等离子发生器对原料粉体颗粒进行加热熔化处理,利用射频等离子体发生器具有能量密度高,加热强度大,等离子体矩的体积大,处理材料工艺简单等优点,可制备得到球化率高、纯度高、密度大且粒度分布相对较窄的球形金属粉体;且本发明没有使用电极,不会因电极蒸发而污染产品,有利于保证制得的球形金属粉体的高纯度。In this embodiment, a radio frequency plasma generator is used to heat and melt the raw material powder particles, and the radio frequency plasma generator has the advantages of high energy density, high heating intensity, large volume of the plasma moment, and simple processing material process. Spherical metal powder with high spheroidization rate, high purity, high density and relatively narrow particle size distribution; and the present invention does not use electrodes, and will not contaminate the product due to electrode evaporation, which is beneficial to ensure the high quality of the spherical metal powder obtained. purity.

在一些实施方式中,所述原料粉体颗粒可以为铜粉颗粒、钛粉颗粒、钼粉颗粒或金粉颗粒,但不限于此。以钼粉颗粒为例,采用本发明设备将钼粉颗粒制备成高纯球形金属粉体,其产能≥3kg/h,球化率≥95%,粒度D50=20-35μm。In some embodiments, the raw material powder particles may be copper powder particles, titanium powder particles, molybdenum powder particles or gold powder particles, but are not limited thereto. Taking molybdenum powder particles as an example, the equipment of the invention is used to prepare the molybdenum powder particles into high-purity spherical metal powders, the production capacity is ≥3kg/h, the spheroidization rate is ≥95%, and the particle size is D50=20-35μm.

在一些实施方式中,所述自动送粉装置10具有自动送料功能,能够在惰性气体保护下将形状不规则的原料粉体颗粒送入到反应生成室20中。本实施例中,所述原料粉体颗粒的粒度范围为10-200微米,所述自动送粉装置10的送粉速率为1-40kg/h,所述自动送粉装置在送料过程中能够连续监控和即时调控。具体来讲,所述自动送料装置10内设置有送料仓、连续补料仓以及气动加料结构,作为举例,所述送料仓的容积为6L,所述补料仓的容积为5L。In some embodiments, the automatic powder feeding device 10 has an automatic feeding function, which can feed raw powder particles with irregular shapes into the reaction generation chamber 20 under the protection of inert gas. In this embodiment, the particle size range of the raw material powder particles is 10-200 microns, the powder feeding rate of the automatic powder feeding device 10 is 1-40 kg/h, and the automatic powder feeding device can continuously Monitoring and real-time regulation. Specifically, the automatic feeding device 10 is provided with a feeding bin, a continuous feeding bin and a pneumatic feeding structure. As an example, the volume of the feeding bin is 6L, and the volume of the feeding bin is 5L.

在一些实施方式中,根据电离度的不同,等离子体分为超高温、超高能量密度的完全电离等离子体(如核聚度)和电离度不足1%的弱电离等离子体(如电弧放电等)两大类,这种弱电离等离子体根据其中性粒子、离子、电子三者之间是否呈热平衡态,又分为平衡等离子体,即高温等离子体和非平衡等离子体(即低温等离子体)两类。高温等离子体的温度很高,约为4500℃至数万摄氏度,热容量也非常大,可用于物料的加热、熔化;低温等离子体是在真空条件下,用高压电场或灯丝电子发射等方法使工作气体电离而成,温度较低,一般不超过1000℃,而且热容量也非常小,主要用于材料表面处理。In some embodiments, according to the degree of ionization, plasma is divided into fully ionized plasma with ultra-high temperature and ultra-high energy density (such as nucleation degree) and weakly ionized plasma with ionization degree less than 1% (such as arc discharge, etc. ) two categories, this weakly ionized plasma is divided into equilibrium plasma, namely high temperature plasma and non-equilibrium plasma (ie low temperature plasma) according to whether the neutral particles, ions and electrons are in thermal equilibrium. two categories. The temperature of high temperature plasma is very high, about 4500℃ to tens of thousands of degrees Celsius, and the heat capacity is also very large, which can be used for heating and melting materials; The gas is ionized, the temperature is low, generally not more than 1000 ℃, and the heat capacity is also very small, mainly used for material surface treatment.

在一些实施方式中,所述射频等离子体发生器可以为等离子加热枪。所述等离子加热枪包括电弧等离子枪和高频等离子枪两种,所述等离子加热枪的原理为:阴极(通常用钍钨或铈钨电极)与作为阳极的铜喷嘴之间产生由工作气体弧光放电而形成的电弧,电弧等离子体由于工作气体的压力和喷嘴口的压缩而形成小直径的流束,其温度在3000℃左右,气流速率一般在10m/s以上,可高达5000m/s。因为电弧没有转移到被加热物料上,所以叫非转移弧式;若电极与喷嘴之间产生的电弧在生成后即被转移到接电源阳极的物料上,则叫转移弧式。在阴极与物料间的电弧由于机械压缩效应(由喷嘴口引起)、热收缩效应(由于弧柱中心比其外围温度高、电离度高、导电率大,电流自然趋于弧柱中心)和磁压缩效应(由弧柱本身的磁场引起)三者的联合作用,而受到强烈压缩,弧柱变得细长(细如针,也可长到1m以上)。在与弧柱内部膨胀压力保持平衡的条件下,弧柱中心气体高度电离,其温度可达10000~52000℃,气流速度可高达10000m/s。转移弧等离子枪在等离子加热中用得最广。在实际应用中,有时除阴极与物料之间的电弧-主电弧外,仍保留阴极与铜喷嘴间的电弧-维持电弧。In some embodiments, the RF plasma generator may be a plasma heat gun. The plasma heating gun includes an arc plasma gun and a high-frequency plasma gun. The principle of the plasma heating gun is: a working gas arc is generated between the cathode (usually thorium tungsten or cerium tungsten electrodes) and the copper nozzle as the anode. The arc formed by the discharge, the arc plasma forms a small-diameter beam due to the pressure of the working gas and the compression of the nozzle orifice. Because the arc is not transferred to the heated material, it is called a non-transferred arc type; if the arc generated between the electrode and the nozzle is transferred to the material connected to the power supply anode after generation, it is called a transferred arc type. The arc between the cathode and the material is due to the mechanical compression effect (caused by the nozzle opening), the thermal shrinkage effect (due to the higher temperature, higher ionization degree, and high conductivity of the arc column center than its periphery, the current naturally tends to the center of the arc column) and magnetic The compression effect (caused by the magnetic field of the arc column itself) is the combined action of the three, and under strong compression, the arc column becomes slender (as thin as a needle, and can also grow to more than 1m). Under the condition of maintaining balance with the expansion pressure inside the arc column, the gas in the center of the arc column is highly ionized, its temperature can reach 10,000-52,000°C, and the gas flow velocity can be as high as 10,000m/s. Transfer arc plasma guns are the most widely used in plasma heating. In practical applications, sometimes in addition to the arc between the cathode and the material - the main arc, the arc between the cathode and the copper nozzle - the maintenance arc is still retained.

工作气体分别通过高频感应线圈和电容式电极激发电离,所生成的等离子体可经由喷口喷出形成等离子体焰,也可留在工作区内供加热物料用。高频等离子体的优点是不受电极材料的污染,但生产成本高,发生器功率小,用得较少。电弧等离子枪的电源一般用具有陡降外特性的直流电源,正接,也有用三相交流电源的,其空载电压:用于机械加工的一般在75~400V范围内,用于熔炼的可高到3000V以上,高频等离子枪的电源通常用高频电子管振荡器,频率在0.4~75MHz范围内。加热装置随设备用途而异,如等离子熔炼炉具有耐火材料炉衬或水冷结晶器的炉体;等离子切割和喷涂装置的工作台或工作小车。The working gas is excited and ionized by the high-frequency induction coil and the capacitive electrode respectively, and the generated plasma can be sprayed through the nozzle to form a plasma flame, and can also be left in the working area for heating materials. The advantage of high-frequency plasma is that it is not polluted by electrode materials, but the production cost is high, the generator power is small, and it is used less. The power supply of the arc plasma gun is generally a DC power supply with a steep drop characteristic, positive connection, and a three-phase AC power supply is also used. Above 3000V, the power supply of the high-frequency plasma gun usually uses a high-frequency tube oscillator, and the frequency is in the range of 0.4 to 75MHz. Heating devices vary according to equipment use, such as plasma melting furnaces with refractory linings or furnace bodies for water-cooled crystallizers; workbenches or work trolleys for plasma cutting and spraying devices.

在一些实施方式中,本实施例中所述射频等离子体发生器产生的最高温度可达10000摄氏度,其设置有陶瓷等离子体约束管,可提供高纯度的加工能力;所述陶瓷等离子体约束管为水冷结构,在冷却通道的另一边是嵌入到火炬体并连接到射频电源的感应线圈;放电腔上游的气体分配头允许不同的气体流进入。In some embodiments, the maximum temperature generated by the RF plasma generator in this embodiment can reach 10,000 degrees Celsius, and a ceramic plasma confinement tube is provided to provide high-purity processing capability; the ceramic plasma confinement tube For the water-cooled structure, on the other side of the cooling channel is an induction coil embedded in the torch body and connected to the RF power supply; the gas distribution head upstream of the discharge chamber allows the entry of different gas flows.

在一些实施方式中,如图1所示,所述反应生成室20采用水冷双壁不锈钢(ss304)结构,所述反应生成室的底部设置有与其连通的真空手套箱收粉系统40,所述真空手套箱收粉系统40包括真空手套箱以及设置在所述真空手套箱内的若干个粉末收粉罐,所述粉末收集罐带有气密阀门和水冷结构,均位于真空手套箱内,可通过惰性气氛保护,确保加热熔化的金属粉末全程不与空气接触,保证其纯度。In some embodiments, as shown in FIG. 1 , the reaction generation chamber 20 adopts a water-cooled double-wall stainless steel (ss304) structure, and the bottom of the reaction generation chamber is provided with a vacuum glove box powder collecting system 40 in communication therewith. The vacuum glove box powder collecting system 40 includes a vacuum glove box and several powder collecting tanks arranged in the vacuum glove box. Protected by an inert atmosphere to ensure that the heated and melted metal powder is not in contact with air throughout the process to ensure its purity.

在一些实施方式中,如图1所示,所述制备高纯球形金属粉体的设备还包括与所述真空手套箱收粉系统40连通的旋风除尘装置50,所述旋风除尘装置50采用多个柔性复合材料过滤元件来收集粉末,带有气体吹扫装置。所述旋风除尘装置50的底部设置有除尘收粉罐60,所述除尘收粉罐60带有气密阀门和水冷结构,可通过惰性气氛保护,确保金属粉末全程不与空气接触。In some embodiments, as shown in FIG. 1 , the equipment for preparing high-purity spherical metal powder further includes a cyclone dust removal device 50 communicated with the vacuum glove box powder collection system 40 , and the cyclone dust removal device 50 adopts multiple A flexible composite filter element to collect powder with gas purge. The bottom of the cyclone dust-removing device 50 is provided with a dust-removing and powder-collecting tank 60. The dust-removing and powder-collecting tank 60 is provided with an airtight valve and a water-cooled structure, which can be protected by an inert atmosphere to ensure that the metal powder is not in contact with the air throughout the process.

在一些实施方式中,如图1所示,所述制备高纯球形金属粉体的设备还包括与所述射频等离子体发生器30电连接的控制系统70,所述控制系统70内设置有与所述射频等离子体发生器30电连接的射频电源。所述控制系统70可控制所述射频电源输出功率,所述射频电源的输出功率为15-80kw的,输入380V三相交流电,50Hz,功率可连续稳定输出;所述射频等离子发生器的频率2-3MHz。In some embodiments, as shown in FIG. 1 , the apparatus for preparing high-purity spherical metal powder further includes a control system 70 electrically connected to the radio frequency plasma generator 30 , and the control system 70 is provided with a The RF plasma generator 30 is electrically connected to the RF power supply. The control system 70 can control the output power of the radio frequency power supply, the output power of the radio frequency power supply is 15-80kw, input 380V three-phase alternating current, 50Hz, the power can be continuously and stably output; the frequency of the radio frequency plasma generator is 2 -3MHz.

在一些具体的实施方式中,肉1所示,所述控制系统70上还设置有与其电连接的触摸显示屏71,所述控制系统70包括工控机和PLC,通过所述工控机和PLC可实现对制备高纯球形金属粉体的设备的控制,所述控制系统70有自动和手动控制两种功能,操作过程全部在所述触摸显示屏71上实现,提供配方设置、真空系统、工艺系统、充气系统、冷却系统等人机操作界面;在工控机上可通过配方式参数设置方式实现对程序工艺过程和设备参数的设置。工控机配备多串口卡,通过RS232或RS485方式与各种控制器连接;控电柜采用国际标准,工控机和大部分控制器采用上架式安装,控电柜和主机之间采用控制电缆连接,可靠性高,便于维护;控电柜和主机内高压部分均设有防护罩,提高设备安全性;控电柜内主要电器外购件要求选用通过CE认证或ISO9001认证的生产厂商的产品,确保安全可靠。In some specific implementations, as shown in meat 1, the control system 70 is further provided with a touch display screen 71 electrically connected to it, the control system 70 includes an industrial computer and a PLC, through which the industrial computer and the PLC can Realize the control of the equipment for preparing high-purity spherical metal powder, the control system 70 has two functions of automatic and manual control, the operation process is all realized on the touch display screen 71, and the formula setting, vacuum system and process system are provided. , air charging system, cooling system and other man-machine operation interface; on the industrial computer, the setting of the program process and equipment parameters can be realized through the configuration parameter setting method. The industrial computer is equipped with a multi-serial port card, which is connected to various controllers through RS232 or RS485; the control cabinet adopts international standards, the industrial computer and most of the controllers are installed on the rack, and the control cable is connected between the control cabinet and the host. High reliability and easy maintenance; high-voltage parts in the control cabinet and the main unit are equipped with protective covers to improve equipment safety; the main electrical outsourcing parts in the control cabinet are required to use products from manufacturers that have passed CE certification or ISO9001 certification to ensure Safe and reliable.

在一些实施方式中,如图1所示,所述制备高纯球形金属粉体的设备还包括与所述射频等离子体发生器30以及自动送粉装置10分别连通的气柜80,所述气柜80用于存储等离子体反应气体、保护气体及载流气体。所述气柜80内部设置有气路系统,所述气柜80顶部设置有排风口以及氢气探测器,所述氢气探测器可在氢气浓度高的情况下对操作者进行报警警告,所述气路系统中设置有质量流量计、压力表、压力传感器、调压阀、截止阀、管路以及接头等部件。所述等离子体反应气体可以为氩气,氢气,氦气,氮气,氧气或空气,但不限于此;所述保护气体和载流气体均可为氩气、氮气或氦气。In some embodiments, as shown in FIG. 1 , the apparatus for preparing high-purity spherical metal powder further includes a gas cabinet 80 which is communicated with the radio frequency plasma generator 30 and the automatic powder feeding device 10 respectively. The cabinet 80 is used for storing plasma reaction gas, shielding gas and carrier gas. The gas tank 80 is provided with a gas circuit system inside, and the top of the gas tank 80 is provided with an air outlet and a hydrogen detector. The hydrogen detector can warn the operator when the hydrogen concentration is high. The gas circuit system is provided with mass flow meters, pressure gauges, pressure sensors, pressure regulating valves, stop valves, pipelines and joints and other components. The plasma reaction gas can be argon, hydrogen, helium, nitrogen, oxygen or air, but is not limited thereto; both the protective gas and the carrier gas can be argon, nitrogen or helium.

在一些实施方式中,如图1所示,所述制备高纯球形金属粉体的设备还包括与所述反应生成室20以及射频等离子体发生器30连通的水环式真空泵组90。所述水环式真空泵组的工作水温在15℃条件下,其带有气液分离器及板式换热器,带压力控制阀,预抽真空≤20kPa。In some embodiments, as shown in FIG. 1 , the apparatus for preparing high-purity spherical metal powder further includes a water ring vacuum pump set 90 in communication with the reaction generating chamber 20 and the radio frequency plasma generator 30 . The working water temperature of the water ring vacuum pump group is 15°C, it is equipped with a gas-liquid separator, a plate heat exchanger, a pressure control valve, and the pre-evacuation is less than or equal to 20kPa.

在一些实施方式中,所述制备高纯球形金属粉体的设备还包括压力控制系统,所述压力控制系统通过真空泵+可控蝶阀+薄膜规+气体质量流量控制器形成闭环控制;所述压力控制系统与射频等离子体发生器系统连锁,操作气氛及压力可自由选择惰性、还原性或氧化性操作气氛,压力150-760Torr(20~101kPa)范围内可控,反应器压力实时显示。In some embodiments, the device for preparing high-purity spherical metal powder further includes a pressure control system, and the pressure control system forms a closed-loop control through a vacuum pump + a controllable butterfly valve + a thin film gauge + a gas mass flow controller; the pressure The control system is interlocked with the radio frequency plasma generator system. The operating atmosphere and pressure can be freely selected from inert, reducing or oxidizing operating atmosphere. The pressure is controllable within the range of 150-760 Torr (20-101kPa), and the reactor pressure is displayed in real time.

在一些实施方式中,所述制备高纯球形金属粉体的设备还包括冷却系统,所述冷却系统带完整的水冷却系统管路,配有流量安全锁定装置;具备水温、流量监测和报警系统;具备停水、停电情况下循环水安全处理系统,确保设备安全。所述冷却系统可为等离子体电源提供必要的冷却,为等离子体炬及送粉管提供必要的冷却,以确保送粉管在高温下的连续使用,为反应室及旋风除尘收粉罐等提供必要的冷却;还可在停水、停电情况下作为应急水补充循环冷却水及通过软化补充去离子水,确保设备安全。In some embodiments, the equipment for preparing high-purity spherical metal powder further includes a cooling system, the cooling system has a complete water cooling system pipeline, is equipped with a flow safety locking device; has water temperature, flow monitoring and alarm systems ; Equipped with a circulating water safety treatment system in the event of water outage and power outage to ensure the safety of the equipment. The cooling system can provide the necessary cooling for the plasma power supply, the plasma torch and the powder feeding tube to ensure the continuous use of the powder feeding tube under high temperature, and provide the necessary cooling for the reaction chamber and the cyclone dust collector. Necessary cooling; it can also be used as emergency water to supplement circulating cooling water and deionized water by softening to ensure equipment safety in the event of water failure and power failure.

在一些实施方式中,如图2所示,还提供一种基于所述设备制备高纯球形金属粉体的方法,其包括步骤:In some embodiments, as shown in FIG. 2, a method for preparing high-purity spherical metal powder based on the device is also provided, which comprises the steps of:

S10、自动送粉装置将原料粉体颗粒送入反应生成室;S10, the automatic powder feeding device sends the raw material powder particles into the reaction generating chamber;

S20、启动射频等离子体发生器对送入所述反应生成室的原料粉体颗粒进行加热熔化,得到球形金属液滴,所述球形金属液滴凝固后形成所述高纯球形金属粉体。S20. Start the radio frequency plasma generator to heat and melt the raw material powder particles sent into the reaction generation chamber to obtain spherical metal droplets, and the spherical metal droplets solidify to form the high-purity spherical metal powder.

在本实施例中,采用所述射频等离子体发生器对所述原料粉体颗粒进行加热熔化后得到熔融颗粒,所述熔融颗粒在其表面张力作用下可形成球形度很高的金属液滴,并在极短的时间内迅速凝固,从而形成高纯球形金属粉体。本实施例采用射频等离子发生器对原料粉体颗粒进行加热熔化处理,利用射频等离子体发生器具有能量密度高,加热强度大,等离子体矩的体积大,处理材料工艺简单等优点,可制备得到球化率高、纯度高、密度大且粒度分布相对较窄的球形金属粉体;且本发明没有使用电极,不会因电极蒸发而污染产品,有利于保证制得的球形金属粉体的高纯度。In this embodiment, the raw material powder particles are heated and melted by the radio frequency plasma generator to obtain molten particles, and the molten particles can form metal droplets with high sphericity under the action of their surface tension. And it solidifies rapidly in a very short time to form high-purity spherical metal powder. In this embodiment, a radio frequency plasma generator is used to heat and melt the raw material powder particles, and the radio frequency plasma generator has the advantages of high energy density, high heating intensity, large volume of the plasma moment, and simple processing material process. Spherical metal powder with high spheroidization rate, high purity, high density and relatively narrow particle size distribution; and the present invention does not use electrodes, and will not contaminate the product due to electrode evaporation, which is beneficial to ensure the high quality of the spherical metal powder obtained. purity.

应当理解的是,本发明的应用不限于上述的举例,对本领域普通技术人员来说,可以根据上述说明加以改进或变换,所有这些改进和变换都应属于本发明所附权利要求的保护范围。It should be understood that the application of the present invention is not limited to the above examples. For those of ordinary skill in the art, improvements or transformations can be made according to the above descriptions, and all these improvements and transformations should belong to the protection scope of the appended claims of the present invention.

Claims (8)

1.一种制备高纯球形金属粉体的设备,其特征在于,包括自动送粉装置,与所述自动送粉装置连接的反应生成室,与所述反应生成室连接的射频等离子体发生器,所述自动送粉装置用于将形状不规则的原料粉体颗粒送入所述反应生成室,所述射频等离子体发生器用于对送入所述反应生成室的原料粉体颗粒进行加热熔化并形成高纯球形金属粉体。1. a device for preparing high-purity spherical metal powder, is characterized in that, comprises automatic powder feeding device, the reaction generation chamber connected with described automatic powder feeding device, the radio frequency plasma generator connected with described reaction generation chamber , the automatic powder feeding device is used to send the irregularly shaped raw material powder particles into the reaction generation chamber, and the radio frequency plasma generator is used to heat and melt the raw material powder particles sent into the reaction generation chamber And form high-purity spherical metal powder. 2.根据权利要求1所述制备高纯球形金属粉体的设备,其特征在于,还包括与所述射频等离子体发生器电连接的控制系统,所述控制系统内设置有与所述射频等离子体发生器电连接的射频电源。2 . The device for preparing high-purity spherical metal powder according to claim 1 , further comprising a control system electrically connected to the radio frequency plasma generator, wherein the control system is provided with a control system connected to the radio frequency plasma generator. 3 . The radio frequency power source to which the body generator is electrically connected. 3.根据权利要求1所述制备高纯球形金属粉体的设备,其特征在于,还包括与所述射频等离子体发生器以及自动送粉装置分别连通的气柜,所述气柜用于存储等离子体反应气体、保护气体及载流气体。3. The equipment for preparing high-purity spherical metal powder according to claim 1, characterized in that, further comprising a gas cabinet connected with the radio frequency plasma generator and the automatic powder feeding device respectively, and the gas cabinet is used for storage Plasma reactive gas, protective gas and carrier gas. 4.根据权利要求1所述制备高纯球形金属粉体的设备,其特征在于,还包括与所述反应生成室连通的真空手套箱收粉系统。4 . The device for preparing high-purity spherical metal powder according to claim 1 , further comprising a vacuum glove box powder collecting system communicated with the reaction generating chamber. 5 . 5.根据权利要求4所述制备高纯球形金属粉体的设备,其特征在于,还包括与所述真空手套箱收粉系统连通的旋风除尘装置。5 . The device for preparing high-purity spherical metal powder according to claim 4 , further comprising a cyclone dust removal device communicated with the powder collecting system of the vacuum glove box. 6 . 6.根据权利要求5所述制备高纯球形金属粉体的设备,其特征在于,还包括设置在所述旋风除尘装置底部的除尘收粉罐。6 . The device for preparing high-purity spherical metal powder according to claim 5 , further comprising a dust-removing and powder-collecting tank arranged at the bottom of the cyclone dust-removing device. 7 . 7.根据权利要求1所述制备高纯球形金属粉体的设备,其特征在于,还包括与所述反应生成室以及射频等离子体发生器连通的水环式真空泵组。7 . The device for preparing high-purity spherical metal powder according to claim 1 , further comprising a water-ring vacuum pump set communicating with the reaction generating chamber and the radio frequency plasma generator. 8 . 8.一种基于权利要求1-7任一所述设备制备高纯球形金属粉体的方法,其特征在于,包括步骤:8. A method for preparing high-purity spherical metal powder based on any one of the equipment of claims 1-7, characterized in that, comprising the steps of: 自动送粉装置将原料粉体颗粒送入反应生成室;The automatic powder feeding device sends the raw powder particles into the reaction generation chamber; 启动射频等离子体发生器对送入所述反应生成室的原料粉体颗粒进行加热熔化,得到球形金属液滴,所述球形金属液滴凝固后形成所述高纯球形金属粉体。The radio frequency plasma generator is activated to heat and melt the raw material powder particles sent into the reaction generating chamber to obtain spherical metal droplets, and the spherical metal droplets solidify to form the high-purity spherical metal powder.
CN202010579822.5A 2020-06-23 2020-06-23 Equipment and method for preparing high-purity spherical metal powder Pending CN111545766A (en)

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