CN111505834A - Focusing device and focusing method - Google Patents
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- CN111505834A CN111505834A CN202010153092.2A CN202010153092A CN111505834A CN 111505834 A CN111505834 A CN 111505834A CN 202010153092 A CN202010153092 A CN 202010153092A CN 111505834 A CN111505834 A CN 111505834A
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- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
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- G02B27/286—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising for controlling or changing the state of polarisation, e.g. transforming one polarisation state into another
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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Abstract
The application discloses a focusing device and a focusing method. The focusing device comprises a light source, a first modulator, a second modulator and a reflecting element, wherein the light source, the first modulator, the second modulator and the reflecting element are sequentially arranged along an optical axis, the light source is used for generating incident light beams, the first modulator is used for modulating the incident light beams into first radial polarized light, the second modulator is used for carrying out amplitude modulation on the first radial polarized light to form second radial polarized light, and the reflecting element is used for focusing the second radial polarized light to obtain a focusing light spot. The focusing device of the embodiment of the application has the advantages of simple structure, low cost, wide applicability and universality for incident light with various wavelengths, and can realize super-long and adjustable focal depth.
Description
Technical Field
The present disclosure relates to the field of super-resolution imaging, lithography, and data storage, and more particularly, to a focusing apparatus and a focusing method.
Background
When radially polarized light is focused by a high numerical aperture focusing objective, a light field having a small lateral dimension and a long focal depth can be obtained near the focal point. Based on such focusing characteristics, the related art generally uses a radially polarized light and a lens to obtain a light beam having a long focal depth. However, it is difficult to achieve an ultra-long and controllable depth of focus.
Disclosure of Invention
The application provides a focusing device and a focusing method.
The focusing device of this application embodiment includes light source, first modulator, second modulator and the reflection element that sets gradually along the optical axis, the light source is used for producing incident beam, first modulator is used for with incident beam modulation is first radial polarized light, the second modulator is used for right first radial polarized light carries out amplitude modulation in order to form the radial polarized light of second, reflection element be used for with the radial polarized light of second focuses on in order to obtain the focus facula.
The focusing method of the embodiment of the application comprises the following steps:
generating an incident beam;
modulating the incident light beam into first radially polarized light;
amplitude modulating the first radially polarized light to form second radially polarized light;
and focusing the second radial polarized light to obtain a focused light spot.
The focusing device and the focusing method have the advantages of simple structure, low cost, wide applicability and universality for incident lights with various wavelengths, and can realize super-long and adjustable focal depth.
Drawings
The foregoing and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
fig. 1 is a schematic structural view of a focusing apparatus according to an embodiment of the present application;
fig. 2 is a schematic plan view of a second modulator of a focusing apparatus according to an embodiment of the present application;
FIG. 3 is a schematic plan view of a second modulator of a focusing assembly according to another embodiment of the present application;
FIG. 4 is a schematic plan view of a second modulator of a focusing assembly according to yet another embodiment of the present application;
FIG. 5 is a schematic plan view of a second modulator of a focusing assembly according to yet another embodiment of the present application;
FIG. 6 is a schematic structural diagram of a focusing assembly according to another embodiment of the present application;
FIG. 7 is a schematic plan view of a color shifting layer of a focusing apparatus according to an embodiment of the present application;
FIG. 8 is a schematic view illustrating a color-changed state of a color-changing layer of a focusing apparatus according to an embodiment of the present application;
FIG. 9 is a schematic plan view of another color-changing state of a color-changing layer of a focusing apparatus according to an embodiment of the present application;
fig. 10 is a schematic view of the longitudinal distribution of the resulting focused spots of the focusing device of the present embodiment;
FIG. 11 is a schematic flow chart of a focusing method according to an embodiment of the present application;
fig. 12 is a flowchart illustrating a focusing method according to another embodiment of the present application.
Description of the main element symbols:
focusing apparatus 100, optical axis 11, light source 12, first modulator 14, second modulator 16, light blocking region 162 and light transmissive region 164, color shifting layer 166, first color shifting region 1661, second color shifting region 1662, third color shifting region 1663, reflective element 18.
Detailed Description
Reference will now be made in detail to embodiments of the present application, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary and intended to be used for explaining the present application and should not be construed as limiting the present application.
Referring to fig. 1, a focusing apparatus 100 according to an embodiment of the present disclosure includes a light source 12, a first modulator 14, a second modulator 16, and a reflective element 18, which are sequentially disposed along an optical axis 11.
The light source 12 is used to generate an incident light beam. In the present embodiment, the light source 12 is used to generate an incident light beam in a Bessel-Gaussian (Bessel-Gaussian) shape. Or the wave surface shape of emergent light of an incident light beam is Bessel-Gaussian.
The first modulator 14 is for modulating the incident light beam into first radially polarized light. In this way, the quality of the focus spot can be improved. It can be understood that the focal field generated by the radial polarized light under the condition of focusing is spirally symmetrical and non-deformable compared with the linear polarized light, so that the incident light beam is modulated into the first radial polarized light, and the quality of the focused light spot can be improved.
Specifically, the polarization direction of each point of the first radially polarized light is along the radial direction. The direction of light polarization for each point within the first radially polarized light can be represented by the following identity matrix:
wherein,
is the included angle between the position polar coordinate vector in the first radial polarized light vertical Z-axis section and the X-axis. PxDirection of light polarization, P, of a first radially polarized light on the X axisyThe direction of polarization of the first radially polarized light in the Y-axis, PzThe direction of light polarization in the Z-axis for the first radially polarized light.
The first modulator 14 may comprise a radial polarizer. Thus, the incident light beam can be simply and conveniently modulated into the first radial polarized light. Moreover, the radial polarizer is inexpensive and easy to obtain, which reduces the cost of the focusing device 100.
The first modulator 14 may also include a microstructure grating and an interferometer. In this way, modulation of the incident light beam into light of the first radial polarization can also be achieved.
The first modulator 14 may further comprise at least one of a conical mirror, a birefringent element, and a liquid crystal polarization selection device. The specific manner in which the incident light beam is modulated into light of the first radial polarization is not limited herein.
The second modulator 16 is for amplitude modulating the first radially polarized light to form second radially polarized light.
Referring to fig. 2, in the present embodiment, the second modulator 16 includes a diaphragm, the diaphragm includes a light shielding region 162 and a light transmitting region 164 surrounding the light shielding region 162, the light shielding region 162 is used for shielding the first radial polarized light, and the light transmitting region 164 is used for transmitting the first radial polarized light to form the second radial polarized light.
Therefore, the amplitude modulation of the first radial polarized light is realized through the shading area 162 and the light transmitting area 164 of the diaphragm to form the second radial polarized light, which is simple and convenient, has low cost, and can reduce the cost of the focusing device 100.
In the present embodiment, the light shielding region 162 is circular, the light transmitting region 164 is annular surrounding the light shielding region 162, and the centers of the light shielding region 162 and the light transmitting region 164 are both coincident with the center of the diaphragm. That is, the second modulator 16 is an annular diaphragm.
In this way, the annular diaphragm blocks the middle part of the first radial polarized light and allows the annular part on the periphery of the first radial polarized light to pass through, and the second radial polarized light with narrow annular amplitude distribution can be obtained. It can be understood that, since the peripheral portion of the first radially polarized light has a great influence on the longitudinal field component of the focusing region, the use of the second radially polarized light modulated by the annular diaphragm is advantageous for obtaining a focused spot having a small transverse dimension and a long focal depth.
It is understood that in other embodiments, the shaded region 162 may be rectangular, square, racetrack, triangular, or other shapes. The transparent region 164 surrounds the light-shielding region 162, i.e., the inner edge of the transparent region 164 forms a pattern corresponding to the shape of the light-shielding region 162. The outer edge of the light-transmitting region 164 may be formed in the same pattern as the light-shielding region 162 or in a different pattern from the light-shielding region 162. The center of the light-transmitting region 164 may coincide with the center of the light-shielding region 162, or may be offset from the center of the light-shielding region 162.
Referring to fig. 3, in one example, the light-shielding region 162 is square, the outer edge of the light-transmitting region 164 is also square, and the center of the light-transmitting region 164 coincides with the center of the light-shielding region 162.
Referring to fig. 4, in another example, the light-shielding region 162 is square, the outer edge of the light-transmitting region 164 forms a triangle, and the center of the light-transmitting region 164 is offset from the center of the light-shielding region 162.
Referring to fig. 5, in another example, the light-shielding region 162 is square, the outer edge of the light-transmitting region 164 forms a circle, and the center of the light-transmitting region 164 coincides with the center of the light-shielding region 162.
The specific shape and the specific relationship of the light-shielding region 162 and the light-transmitting region 164 are not limited herein.
Referring to fig. 2 again, in the present embodiment, the ratio of the radius R1 of the light shielding region 162 to the outer diameter R of the light transmissive region 164 is: 0.5-0.9999. That is, the range of values for R1/R is: 0.5-0.9999.
In this way, the light shielding region 162 shields the middle portion of the first radial polarized light, and the light transmitting region 164 allows the peripheral portion of the first radial polarized light to pass through, so as to obtain the second radial polarized light with narrow annular amplitude distribution.
Further, in the present embodiment, the ratio of the radius R1 of the light-shielding region 162 to the outer diameter R of the light-transmitting region 164 is 0.99. That is, R1/R has a value of 0.99. Thus, the light-transmitting region 164 transmits the polar peripheral portion of the first radial polarized light, which is beneficial to obtaining a focused light spot with a small lateral dimension and a long focal depth.
It is understood that in other embodiments, the ratio of the radius R1 of the light-blocking region 162 to the outer diameter R of the light-transmitting region 164 may also be 0.5, 0.6, 0.65, 0.77, 0.82, 0.91, 0.95, 0.99, 0.9992, or 0.9999. The specific value of the ratio of the radius R1 of the light shielding region 162 to the outer diameter R of the light transmitting region 164 is not limited as long as the ratio is in the range of 0.5 to 0.9999.
In the present embodiment, the transmittance of the first radially polarized light is 0 when the first radially polarized light enters the light blocking region 162; the first radially polarized light has a transmittance of 1 when incident on the transmissive region 164. That is, the transmittance function of the annular diaphragm can be expressed as:
where R is the radial position on the annular diaphragm, R1 is the radius of the light-shielding region 162, and R is the outer diameter R of the light-transmitting region 164, i.e., the maximum radius of the annular diaphragm, i.e., the entrance pupil radius. As described above, in the present embodiment, R1/R is 0.99.
In this way, the light-shielding region 162 shields all the first radial polarized light incident on the light-shielding region 162, thereby avoiding adverse effects on formation of a focused light spot with a small lateral dimension and a long focal depth. The light-transmitting region 164 allows the first radial polarized light incident on the light-transmitting region 164 to be transmitted completely, so that loss of the peripheral portion of the first radial polarized light can be avoided, and formation of a focused light spot with a small transverse dimension and a long focal depth is facilitated.
It will be appreciated that the point at radial position r1 on the annular diaphragm forms the boundary between the light-blocking region 162 and the light-transmitting region 164.
In other embodiments, the transmittance of the first radially polarized light may be 0 to 0.1 when the first radially polarized light is incident on the light blocking region 162. For example, 0.01, 0.015, 0.021, 0.09, 0.095, 0.1. In other embodiments, the first radially polarized light may have a transmittance of 0.9 to 1 when incident on transmissive region 164. For example, 0.91, 0.915, 0.921, 0.99, 0.9959.
Specific values of the transmittance of the first radially polarized light when the first radially polarized light is incident on the light-shielding region 162 and the light-transmitting region 164 are not limited herein. Can be selected according to the requirements of actual conditions.
In addition, the light blocking region 162 and the light transmitting region 164 may be formed by plating a light blocking film on the light transmitting substrate. That is, the portion of the transparent substrate plated with the light shielding film is a light shielding region 162, and the portion of the transparent substrate not plated with the light shielding film is a light transmitting region 164.
The light-shielding region 162 and the light-transmitting region 164 may also be formed by attaching a light-shielding sheet on a light-transmitting substrate. That is, the portion of the transparent substrate to which the light-shielding sheet is attached is a light-shielding region 162, and the portion of the transparent substrate to which the light-shielding sheet is not attached is a light-transmitting region 164.
The light-shielding region 162 and the light-transmitting region 164 may also be formed by connecting a light-shielding substrate and a light-transmitting substrate.
The specific formation manner of the light-shielding region 162 and the light-transmitting region 164 is not limited herein.
Referring to fig. 6, the focusing apparatus 100 may further include a controller 19, and the controller 19 is configured to adjust the radius r1 of the shading area 162. In this way, the ratio of the radius R1 of the light shielding region 162 to the outer diameter R of the light transmitting region 164 can be adjusted, thereby adjusting the depth of focus.
Referring to fig. 7, in the present embodiment, the second modulator 16 may include a color-changing layer 166, the color-changing layer 166 includes a plurality of color-changing regions, and the controller 19 is configured to apply a voltage to the color-changing regions to adjust the light transmittance of the color-changing regions, so as to shield the radius r1 of the light-shielding regions 162. In this way, the radius r1 of the light-shielding region 162 can be adjusted simply and accurately.
Specifically, the controller 19 is configured to apply a first preset voltage to the color-changing region so that the light transmittance of the color-changing region is 0. The controller 19 is configured to apply a second preset voltage to the color-changing region so that the light transmittance of the color-changing region is 1. Thus, the radius r1 of the light-shielding region 162 can be adjusted by adjusting the area of the light-shielding region by voltage.
In the example of fig. 7, 8, and 9, the colorshifting regions include a first colorshifting region 1661, a second colorshifting region 1662, and a third colorshifting region 1663.
In the example of fig. 8, controller 19 is configured to apply a first preset voltage to first colorable region 1661 and a second preset voltage to second and third colorable regions 1662, 1663 such that the optical transmissivity of first colorable region 1661 is 0 and the optical transmissivity of second and third colorable regions 1662, 1663 is 1, such that first colorable region 1661 is light-blocking region 162, i.e., radius r1 of light-blocking region 162 is the radius of first colorable region 1661.
In the example of fig. 9, controller 19 is configured to apply a first preset voltage to first and second colorable regions 1661, 1662 and a second preset voltage to third colorable region 1663 such that the optical transmittances of first and second colorable regions 1661, 1662 are 0 and the optical transmittance of third colorable region 1663 is 1, thereby making first and second colorable regions 1661, 1662 light-blocking regions 162, i.e., radius r1 of light-blocking region 162 is the outer diameter of second colorable region 1662.
It is understood that in other examples, the number of color-shifting regions may be 2, 4, 5, or other numbers. The color-changing regions may be circular, rectangular, square, annular, racetrack, or other shapes. The multiple discoloring regions may be the same or different in shape. The specific number, specific shape and specific relationship between the plurality of color-shifting regions are not limited herein.
The color changing layer 166 may be made of at least one of tungsten trioxide, polythiophene and its derivatives, viologen, tetrathiafulvalene, and metal phthalocyanine compounds. The specific material of the discoloring layer 166 is not limited herein.
In other embodiments, where the second modulator 16 comprises a transparent substrate, the focusing device 100 may comprise a driving assembly connected to a plurality of different sized masks, the driving assembly being configured to drive the masks to move to cover the transparent substrate and to drive the masks to move away from the transparent substrate.
Therefore, the light-shielding sheet of the light-transmitting substrate is replaced by the driving assembly, and the radius R1 of the light-shielding region 162 can be simply and conveniently adjusted, so that the ratio of the radius R1 of the light-shielding region 162 to the outer diameter R of the light-transmitting region 164 is adjusted, and the focal depth is adjusted.
In other embodiments, the focusing apparatus 100 may include a driving assembly connected to a plurality of ring diaphragms, each ring diaphragm having a different ratio of the radius R1 of the light shielding region 162 to the outer diameter R of the light transmitting region 164, the driving assembly being configured to drive the ring diaphragm to move to the optical axis 11 and to drive the ring diaphragm to move away from the optical axis 11.
Thus, the annular diaphragm in the optical axis 11 is replaced by the driving assembly, and the ratio of the radius R1 of the shading area 162 to the outer diameter R of the light transmitting area 164 can be simply and conveniently adjusted, so as to adjust the size of the focal depth.
Alternatively, the worker may manually block the radius r1 of region 162. For example, the light-shielding sheet is manually replaced, the annular diaphragm is manually replaced, and the like.
The specific manner in which the controller 19 adjusts the radius r1 of the shaded region 162 is not limited herein.
Referring again to fig. 1, the reflective element 18 is used for focusing the second radial polarized light to obtain a focused light spot. Specifically, the Numerical Aperture (NA) of the reflecting element 18 ranges from 0.8 to 1. For example, 0.8, 0.85, 0.91, 0.95, 0.99, 1. The reflective element 18 comprises a parabolic mirror. Further, in the present embodiment, the numerical aperture of the reflective element 18 is 1. Thus, the expansion of the focal depth is facilitated.
It is understood that the related art generally uses a radially polarized light and a lens to obtain a light beam having a long focal depth. However, the numerical aperture of the lens is difficult to reach 1, limited by the level of industrial manufacturing. This limits the extension of the depth of focus, resulting in a very long and controllable depth of focus that is difficult to achieve.
In the embodiment of the present application, the parabolic mirror is used as the reflecting element 18 to focus the second radial polarized light to obtain the focused light spot, and the super-resolution focused light spot with a super-long focal depth can be formed in the image focal plane area of the parabolic mirror 4.
Specifically, the electric field distribution of the light beam near the focused spot thus formed can be calculated by the following formula:
wherein,
a cylindrical coordinate system with an ideal focus position as an origin, C as a normalization constant, A1 as a light intensity distribution parameter of an incident light beam, T (r) as a transmittance function of the second modulator 16, A2 as a structural parameter of the reflective element 18, theta as an included angle between a focused light beam passing through the reflective element 18 and an optical axis,
the included angle between the polar coordinate vector of the position in the cross section of the light beam vertical to the Z axis and the X axis is shown, i is an imaginary unit, and k is 2 pi/lambda.
Thus, the size of the focused light spot on the focal plane can be calculated according to the relation between the electric field intensity of the light and the light intensity.
Fig. 10 is a schematic diagram of the longitudinal distribution of the focused spots obtained by the focusing apparatus 100 according to the embodiment of the present application when the numerical aperture NA of the reflecting element 18 is 1 and R1/R is 0.99. According to fig. 10, the longitudinal full width half maximum, i.e. the focal depth, of the focused spot is 91.4 λ. Moreover, the transverse full width at half maximum of the focusing light spot can reach 0.37 lambda, and transverse super resolution can be realized. In addition, the purity of the longitudinal field component of the focusing light spot, namely the Z-direction component, can reach more than 90%.
The focusing apparatus 100 according to the embodiment of the present invention has a wide application range, and can be preferably applied to the fields of high-resolution microscopic imaging, two-photon interference technology, lithography, high-density data storage, and the like. In these fields, it is desirable to obtain a light beam having a long focal depth. For example, in imaging and planar illumination microscopes, the use of a light beam with a long focal depth can significantly improve the temporal resolution. The specific application scenario of the focusing apparatus 100 is not limited herein.
In summary, the focusing apparatus 100 according to the embodiment of the present application includes a light source 12, a first modulator 14, a second modulator 16, and a reflective element 18, which are sequentially disposed along an optical axis 11, where the light source 12 is configured to generate an incident light beam, the first modulator 14 is configured to modulate the incident light beam into a first radial polarized light beam, the second modulator 16 is configured to perform amplitude modulation on the first radial polarized light beam to form a second radial polarized light beam, and the reflective element 18 is configured to focus the second radial polarized light beam to obtain a focused light spot.
The focusing device 100 of the embodiment of the present application has a simple structure, low cost, and wide applicability, and has universality for incident lights with various wavelengths, and can realize an ultra-long and adjustable focal depth.
Referring to fig. 11, a focusing method according to an embodiment of the present application includes:
step S12: generating an incident beam;
step S14: modulating an incident light beam into first radially polarized light;
step S16: amplitude modulating the first radially polarized light to form second radially polarized light;
step S18: the second radially polarized light is focused to obtain a focused spot.
The focusing device 100 of the embodiment of the present application has the advantages of simple method, easy operation, wide applicability, universality for incident lights with various wavelengths, and realization of ultra-long and adjustable focal depth.
Please note that, for the explanation and the description of the focusing method, reference may be made to the parts related to the focusing apparatus 100 in the foregoing, and further description is omitted here for the sake of avoiding redundancy.
Referring to fig. 12, in some embodiments, the focusing method is applied to a focusing apparatus 100, and the focusing apparatus 100 includes a light source 12, a first modulator 14, a second modulator 16, and a reflective element 18, which are sequentially disposed along an optical axis 11; step S12 includes:
step S122: controlling the light source 12 to generate an incident light beam;
step S14 includes:
step S142: modulating the incident light beam into first radially polarized light by a first modulator 14;
step S16 includes:
step S162: amplitude modulating the first radially polarized light by a second modulator 16 to form second radially polarized light;
step S18 includes:
step S182: the second radially polarized light is focused by the reflective element 18 to obtain a focused spot.
In some embodiments, the second modulator 16 includes a diaphragm including a light-blocking region 162 and a light-transmitting region surrounding the light-blocking region 162, the light-blocking region 162 is configured to block the first radial polarized light, the light-transmitting region is configured to transmit the first radial polarized light to form the second radial polarized light, the light-blocking region 162 is circular, the light-transmitting region is annular surrounding the light-blocking region 162, and the centers of the light-blocking region 162 and the light-transmitting region coincide with the center of the diaphragm; the focusing method comprises the following steps:
the radius of the light-shielding region 162 is adjusted to adjust the depth of focus of the focused spot.
It will be appreciated by those skilled in the art that the configurations shown in the figures are merely schematic representations of portions of configurations relevant to the present disclosure, and do not constitute limitations on the electronic devices to which the present disclosure may be applied, and that a particular electronic device may include more or fewer components than shown in the figures, or may combine certain components, or have a different arrangement of components.
It will be understood by those skilled in the art that all or part of the processes of the methods of the above embodiments may be implemented by hardware related to instructions of a computer program, and the program may be stored in a non-volatile computer readable storage medium, and when executed, may include the processes of the embodiments of the methods as described above. The storage medium may be a magnetic disk, an optical disk, a Read-Only Memory (ROM), or the like.
The above examples only express several embodiments of the present application, and the description thereof is more specific and detailed, but not construed as limiting the scope of the present application. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the concept of the present application, which falls within the scope of protection of the present application. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (12)
1. The focusing device is characterized by comprising a light source, a first modulator, a second modulator and a reflecting element, wherein the light source, the first modulator, the second modulator and the reflecting element are sequentially arranged along an optical axis, the light source is used for generating incident light beams, the first modulator is used for modulating the incident light beams into first radial polarized light, the second modulator is used for carrying out amplitude modulation on the first radial polarized light to form second radial polarized light, and the reflecting element is used for focusing the second radial polarized light to obtain a focusing light spot.
2. The focusing device of claim 1, wherein the light source is configured to generate the incident light beam in a Bezier-Gaussian shape.
3. The focusing assembly of claim 1, wherein the first modulator comprises a radial polarizer.
4. The focusing apparatus of claim 1, wherein the second modulator comprises an optical stop, the optical stop comprising an opaque region and a transparent region surrounding the opaque region, the opaque region being configured to block the first radially polarized light, the transparent region being configured to transmit the first radially polarized light to form the second radially polarized light.
5. The focusing device of claim 4, wherein the light-shielding region is circular, the light-transmitting region is annular surrounding the light-shielding region, and the centers of the light-shielding region and the light-transmitting region are coincident with the center of the diaphragm.
6. The focusing device of claim 5, wherein the ratio of the radius of the light-shielding region to the outer diameter of the light-transmitting region is in the range of: 0.5-0.9999.
7. The focusing assembly of claim 5, wherein the focusing assembly includes a controller for adjusting the radius of the optically shielded region.
8. The focusing arrangement of claim 1, wherein the numerical aperture of the reflective element is in the range of 0.8-1.
9. The focusing arrangement of claim 1, wherein the reflective element comprises a parabolic mirror.
10. A focusing method, comprising:
generating an incident beam;
modulating the incident light beam into first radially polarized light;
amplitude modulating the first radially polarized light to form second radially polarized light;
and focusing the second radial polarized light to obtain a focused light spot.
11. The focusing method according to claim 10, wherein the focusing method is used for a focusing apparatus comprising a light source, a first modulator, a second modulator, and a reflecting element arranged in this order along an optical axis; generating an incident light beam comprising:
controlling the light source to generate the incident light beam;
modulating the incident light beam into first radially polarized light, comprising:
modulating the incident light beam into first radially polarized light by the first modulator;
amplitude modulating the first radially polarized light to form second radially polarized light, comprising:
amplitude modulating the first radially polarized light by the second modulator to form second radially polarized light;
focusing the second radially polarized light to obtain a focused spot, comprising:
focusing the second radially polarized light by the reflecting element to obtain a focused spot.
12. The focusing method of claim 11, wherein the second modulator comprises an aperture, the aperture comprises an opaque region and a transparent region surrounding the opaque region, the opaque region is configured to block the first radially polarized light, the transparent region is configured to transmit the first radially polarized light to form the second radially polarized light, the opaque region is circular, the transparent region is annular surrounding the opaque region, and the center of the opaque region and the center of the transparent region both coincide with the center of the aperture; the focusing method comprises the following steps:
and adjusting the radius of the shading area to adjust the focal depth of the focusing light spot.
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