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CN111485262A - Indium electroplating composition and method of electroplating indium on nickel - Google Patents

Indium electroplating composition and method of electroplating indium on nickel Download PDF

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Publication number
CN111485262A
CN111485262A CN202010056803.4A CN202010056803A CN111485262A CN 111485262 A CN111485262 A CN 111485262A CN 202010056803 A CN202010056803 A CN 202010056803A CN 111485262 A CN111485262 A CN 111485262A
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indium
acid
electroplating
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nickel
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A·福伊特
M·克洛斯
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DuPont Electronic Materials International LLC
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Rohm and Haas Electronic Materials LLC
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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/54Electroplating: Baths therefor from solutions of metals not provided for in groups C25D3/04 - C25D3/50
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/56Electroplating: Baths therefor from solutions of alloys
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/10Electroplating with more than one layer of the same or of different metals
    • C25D5/12Electroplating with more than one layer of the same or of different metals at least one layer being of nickel or chromium
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60Electroplating characterised by the structure or texture of the layers
    • C25D5/605Surface topography of the layers, e.g. rough, dendritic or nodular layers
    • C25D5/611Smooth layers
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/627Electroplating characterised by the visual appearance of the layers, e.g. colour, brightness or mat appearance
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/48After-treatment of electroplated surfaces
    • C25D5/50After-treatment of electroplated surfaces by heat-treatment

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
  • Electroplating Methods And Accessories (AREA)

Abstract

The indium electroplating composition electroplates a substantially defect-free, whisker-free, uniform layer of indium having a smooth surface morphology on nickel. The indium electroplating compositions are environmentally friendly and comprise selected amino acids to provide smooth, uniform and defect free indium deposits.

Description

铟电镀组合物和在镍上电镀铟的方法Indium electroplating composition and method of electroplating indium on nickel

技术领域technical field

本发明涉及铟电镀组合物和用于在镍层上电镀铟的方法,其中铟沉积物是均匀的、基本上无空隙、无晶须并且具有光滑表面形态。更具体地,本发明涉及酸性铟电镀组合物和在镍层上电镀铟的方法,其中铟沉积物是均匀的、基本上无空隙、无晶须并且具有光滑表面形态,其中铟电镀组合物是环境友好的,并且包含选择的氨基酸以提供均匀的哑光、基本上无空隙、无晶须以及光滑表面形态的铟沉积物。The present invention relates to indium electroplating compositions and methods for electroplating indium on nickel layers wherein the indium deposits are uniform, substantially void-free, whisker-free, and have a smooth surface morphology. More particularly, the present invention relates to an acid indium electroplating composition and a method of electroplating indium on a nickel layer, wherein the indium deposit is uniform, substantially void-free, whisker-free and has a smooth surface morphology, wherein the indium electroplating composition is Indium deposits that are environmentally friendly and contain selected amino acids to provide a uniform matte, substantially void-free, whisker-free and smooth surface morphology.

背景技术Background technique

电解铟在连接器工业中对于压配合应用非常有吸引力。铟可用作锡的替代金属。锡通常在应力条件下生长晶须。随着电子部件变得越来越小,重要的是消除晶须形成的风险,该晶须形成可能造成电路短路。铟相对于锡的优势在于,铟即使在回流之后也不易形成晶须。Electrolytic indium is very attractive for press fit applications in the connector industry. Indium can be used as an alternative metal to tin. Tin normally grows whiskers under stress conditions. As electronic components become smaller, it is important to eliminate the risk of whisker formation, which can cause electrical shorts. The advantage of indium over tin is that indium is less prone to whisker formation even after reflow.

用于压配合应用的连接器引脚(铜合金)首先涂覆有镍,然后是与镍相邻的亮铟(indium flash)。铟层的厚度通常为0.2-1μm。问题在于,许多电解铟工艺不能够在不使用打底(strike)层(粘合促进剂涂层)的情况下镀覆具有均匀厚度分布且在镍上具有良好粘附性的薄层。此类打底层可具有1-100nm的厚度。Connector pins (copper alloys) for press fit applications are first coated with nickel, followed by indium flash adjacent to the nickel. The thickness of the indium layer is usually 0.2-1 μm. The problem is that many electrolytic indium processes are not capable of plating thin layers with uniform thickness distribution and good adhesion on nickel without the use of a strike layer (adhesion promoter coating). Such primer layers may have a thickness of 1-100 nm.

可再现地在镍层上镀覆具有目标厚度和光滑表面形态的无空隙均匀哑光铟的能力具有挑战性。铟还原在比质子还原的电位更负的电位下发生,并且阴极处大量的氢鼓泡使表面粗糙度增加。在铟沉积过程中形成的因惰性电子对效应而稳定的铟(1+)离子催化质子还原并且参与歧化反应以重新生成铟(3+)离子。不存在络合剂时,铟离子在pH>2以上开始从溶液中析出。在镍上镀覆铟具有挑战性,因为镍是质子还原的良好催化剂并且比铟更具惰性,因此镍可能在流电相互作用中引起铟的腐蚀。铟还可能与镍形成不希望的金属间化合物。铟镀覆的另一个问题是氢气的生成。此类氢气生成可能导致不适用于电子部件和装置的粗糙且不规则的铟沉积物。The ability to reproducibly deposit void-free uniform matte indium with target thickness and smooth surface morphology on nickel layers is challenging. Indium reduction occurs at a more negative potential than that for proton reduction, and the surface roughness increases due to the large amount of hydrogen bubbling at the cathode. Indium( 1+ ) ions formed during indium deposition, stabilized by the inert electron pair effect, catalyze proton reduction and participate in disproportionation reactions to regenerate indium( 3+ ) ions. In the absence of a complexing agent, indium ions begin to precipitate out of solution above pH > 2. Plating indium on nickel is challenging because nickel is a good catalyst for proton reduction and is more inert than indium, so nickel may cause corrosion of indium in galvanic interactions. Indium may also form undesired intermetallic compounds with nickel. Another problem with indium plating is the generation of hydrogen gas. Such hydrogen generation can result in rough and irregular indium deposits that are not suitable for use in electronic components and devices.

另外,许多常规的铟镀浴包含为了实现可接受的铟镀性能所需的对环境有害的添加剂,诸如某些抑制剂、许多平整剂、晶粒细化剂、某些缓冲剂以及用于抑制镀覆期间的析氢的化合物。关于如何处理化学废物以及工业上在开发和制造过程中可能使用的化学品类型,世界各地的许多政府正在通过更严格的环境法律和法规。例如,在欧盟,化学品注册、评估、授权和限制法规(被称为REACh)已经禁止了许多化学品或者正在禁止用于镀浴的化学品大量用于工业用途。Additionally, many conventional indium plating baths contain environmentally harmful additives such as certain inhibitors, many levelling agents, grain refiners, certain buffers, and Compounds that evolve hydrogen during plating. Many governments around the world are passing stricter environmental laws and regulations on how chemical waste is handled and the types of chemicals that industry may use in development and manufacturing processes. For example, in the European Union, the Registration, Evaluation, Authorization and Restriction of Chemicals Regulations (known as REACh) have banned many chemicals or are in the process of banning chemicals used in plating baths for industrial use in large quantities.

因此,需要改进的铟组合物,其用于在镍衬底上电镀铟金属层并且是环境友好的。Therefore, there is a need for improved indium compositions that are useful for electroplating indium metal layers on nickel substrates and that are environmentally friendly.

发明内容SUMMARY OF THE INVENTION

本发明涉及一种铟电镀组合物,其由以下项组成:水;一种或多种铟离子源;一种或多种酸,其选自由无机酸、烷烃磺酸以及所述酸的盐组成的组,其中所述无机酸选自由氨基磺酸以及硫酸组成的组;以及一种或多种氨基酸,其选自由丙氨酸、精氨酸、天冬氨酸、天冬酰胺、谷氨酸、甘氨酸、谷氨酰胺、组氨酸、亮氨酸、赖氨酸、苏氨酸、异亮氨酸、丝氨酸以及缬氨酸组成的组;任选地一种或多种合金金属;以及任选地一种或多种pH调节剂。The present invention relates to an indium electroplating composition consisting of: water; one or more sources of indium ions; one or more acids selected from the group consisting of inorganic acids, alkane sulfonic acids, and salts of said acids , wherein the inorganic acid is selected from the group consisting of sulfamic acid and sulfuric acid; and one or more amino acids selected from the group consisting of alanine, arginine, aspartic acid, asparagine, glutamic acid , glycine, glutamine, histidine, leucine, lysine, threonine, isoleucine, serine, and valine; optionally one or more alloying metals; and any Optionally one or more pH adjusting agents.

本发明还涉及一种在镍上电镀铟的方法,其包括:The present invention also relates to a method for electroplating indium on nickel, comprising:

a)提供包括与铜或铜合金层相邻的镍层的衬底;a) providing a substrate comprising a nickel layer adjacent to the copper or copper alloy layer;

b)使包括与所述铜或所述铜合金层相邻的所述镍层的所述衬底与铟电镀组合物接触,所述铟电镀组合物由以下项组成:水;一种或多种铟离子源;一种或多种酸,选自由无机酸、烷烃磺酸以及所述酸的盐组成的组,其中所述无机酸选自由氨基磺酸以及硫酸组成的组;以及一种或多种氨基酸,其选自由丙氨酸、精氨酸、天冬氨酸、天冬酰胺、谷氨酸、甘氨酸、谷氨酰胺、组氨酸、亮氨酸、赖氨酸、苏氨酸、异亮氨酸、丝氨酸以及缬氨酸组成的组;任选地一种或多种合金金属;以及任选地一种或多种pH调节剂;以及b) contacting the substrate comprising the nickel layer adjacent to the copper or copper alloy layer with an indium electroplating composition consisting of: water; one or more a source of indium ions; one or more acids selected from the group consisting of inorganic acids, alkane sulfonic acids, and salts of said acids, wherein said inorganic acids are selected from the group consisting of sulfamic acid and sulfuric acid; and one or Multiple amino acids selected from alanine, arginine, aspartic acid, asparagine, glutamic acid, glycine, glutamine, histidine, leucine, lysine, threonine, the group consisting of isoleucine, serine, and valine; optionally one or more alloying metals; and optionally one or more pH adjusting agents; and

c)使用所述铟电镀组合物电镀与所述衬底的所述镍层相邻的铟层。c) Electroplating an indium layer adjacent to the nickel layer of the substrate using the indium electroplating composition.

本发明的含水酸性铟电镀组合物和方法可用于在不使用打底层的情况下在镍上镀覆具有>0.1μm的厚度的铟金属层。所述含水酸性铟电镀组合物的电流效率高,并且铟沉积物是均匀且哑光、基本上无空隙、无晶须、具有光滑表面形态并显示出在镍上的良好粘附性。具有铟沉积物的衬底的后退火显示出轻微的脱湿至基本上没有脱湿。在铟电镀期间,基本上抑制了氢气逸出,以实现光滑均匀的哑光铟沉积物。铟电镀组合物仅含有经注册且符合REACh的化合物。The aqueous acidic indium electroplating compositions and methods of the present invention can be used to plate indium metal layers having a thickness of >0.1 μm on nickel without the use of a primer. The aqueous acidic indium electroplating composition is highly current efficient and the indium deposit is uniform and matte, substantially void-free, whisker-free, has a smooth surface morphology and exhibits good adhesion on nickel. Post-annealing of substrates with indium deposits showed slight to essentially no dewetting. During indium electroplating, hydrogen evolution is substantially suppressed to achieve smooth and uniform matte indium deposits. The indium electroplating composition contains only registered and REACh compliant compounds.

具体实施方式Detailed ways

如本说明书通篇所使用的,除非上下文另有明确指示,否则以下缩写具有以下含义:℃=摄氏度;g=克;mg=毫克;L=升;A=安培;dm=分米;ASD=A/dm2=电流密度;μm=微米(micron)=微米(micrometer);铟离子=In3+;nm=纳米=10-9米;μm=微米=10-6米;M=摩尔;min.=分钟;IC=集成电路;XRF=X射线荧光;以及e.g.=例如。As used throughout this specification, unless the context clearly dictates otherwise, the following abbreviations have the following meanings: °C = Celsius; g = grams; mg = milligrams; L = liters; A = amperes; dm = decimeters; ASD = A/dm 2 = current density; μm = micron = micrometer; indium ion = In 3+ ; nm = nanometer = 10 −9 meters; μm = micrometers = 10 −6 meters; M = moles; min .=min; IC=integrated circuit; XRF=X-ray fluorescence; and eg=eg.

在整个说明书中,术语“沉积”、“镀覆”和“电镀”可互换使用。术语“含水的”是指水基的或组合物的溶剂是水。术语“相邻”是指直接接触或两个单独的表面或平面具有共同界面。术语“界面”是指两个表面或平面之间的一个或多个接触点。术语“平面”是指基本上平坦的表面,从而使得连接其上的任何两个点的直线全部位于其中。术语“表面”是指制品或结构的外部区域或最上部区域。术语“共聚物”是由两种或更多种不同的单体或低聚物组成的化合物。术语“脱湿”是指在回流之后镍表面上的某个位置处的铟镀层的回缩,其中镍的此位置被称为不可湿的区域,并且在粘附性差时发生。术语“哑光”是指外观暗淡且平坦而无光泽。除非另外指出,否则所有镀浴均是基于水性溶剂的,即水基的镀浴。除非另外指出,否则所有量是重量百分比并且所有比率按摩尔计。所有数值范围都是包含的,并且可以按任何顺序组合,除非这种数值范围被限制为加起来最高100%是合乎逻辑的。Throughout the specification, the terms "depositing", "plating" and "electroplating" are used interchangeably. The term "aqueous" means that the solvent of the water-based or composition is water. The term "adjacent" refers to direct contact or that two separate surfaces or planes have a common interface. The term "interface" refers to one or more points of contact between two surfaces or planes. The term "plane" refers to a substantially flat surface such that a straight line connecting any two points thereon lies entirely therein. The term "surface" refers to the outer or uppermost region of an article or structure. The term "copolymer" is a compound composed of two or more different monomers or oligomers. The term "dewetting" refers to the retraction of the indium plating at a location on the nickel surface after reflow, where this location of the nickel is referred to as a non-wettable area, and occurs when adhesion is poor. The term "matte" refers to a dull and flat appearance without gloss. Unless otherwise indicated, all plating baths are aqueous solvent based, ie water based plating baths. All amounts are weight percentages and all ratios are in moles unless otherwise indicated. All numerical ranges are inclusive and combinable in any order unless it is logical that such numerical ranges be limited to add up to 100%.

本发明的含水酸性铟组合物包含可溶于含水环境的一种或多种铟离子源。这些来源包括但不限于烷烃磺酸(诸如甲烷磺酸、乙烷磺酸以及丁烷磺酸)的铟盐、氨基磺酸的铟盐、铟的硫酸盐、铟的氯化物和溴化物盐、硝酸盐、氢氧化物盐、氧化铟、氟硼酸盐、羧酸(诸如柠檬酸、乙酰乙酸、乙醛酸、丙酮酸、乙醇酸、丙二酸、异羟肟酸、亚氨基二乙酸、水杨酸、甘油酸、琥珀酸、苹果酸、酒石酸、羟基丁酸)的铟盐、氨基酸(诸如精氨酸、天冬氨酸、天冬酰胺、谷氨酸、甘氨酸、谷氨酰胺、亮氨酸、赖氨酸、苏氨酸、异亮氨酸以及缬氨酸)的铟盐。优选地,铟离子源是硫酸、氨基磺酸以及烷烃磺酸的一种或多种铟盐。更优选地,铟离子源是硫酸、氨基磺酸以及甲烷磺酸的一种或多种铟盐。最优选地,铟离子源是硫酸铟。The aqueous acidic indium compositions of the present invention comprise one or more sources of indium ions that are soluble in an aqueous environment. These sources include, but are not limited to, indium salts of alkanesulfonic acids such as methanesulfonic acid, ethanesulfonic acid, and butanesulfonic acid, indium salts of sulfamic acid, indium sulfate salts, indium chloride and bromide salts, Nitrates, hydroxide salts, indium oxide, fluoroborates, carboxylic acids (such as citric acid, acetoacetic acid, glyoxylic acid, pyruvic acid, glycolic acid, malonic acid, hydroxamic acid, iminodiacetic acid, Indium salts of salicylic acid, glyceric acid, succinic acid, malic acid, tartaric acid, hydroxybutyric acid, amino acids such as arginine, aspartic acid, asparagine, glutamic acid, glycine, glutamine, leucine amino acid, lysine, threonine, isoleucine and valine). Preferably, the source of indium ions is one or more indium salts of sulfuric acid, sulfamic acid, and alkanesulfonic acid. More preferably, the source of indium ions is one or more indium salts of sulfuric acid, sulfamic acid, and methanesulfonic acid. Most preferably, the source of indium ions is indium sulfate.

来自铟的水溶性盐的铟离子以足以提供期望厚度的铟沉积物的量包含在组合物中。优选地,来自水溶性铟盐的铟离子以5g/L至70g/L,更优选地10g/L至50g/L,最优选地10g/L至40g/L的量包含在组合物中。Indium ions from a water-soluble salt of indium are included in the composition in an amount sufficient to provide an indium deposit of the desired thickness. Preferably, indium ions from water-soluble indium salts are included in the composition in an amount of 5 g/L to 70 g/L, more preferably 10 g/L to 50 g/L, most preferably 10 g/L to 40 g/L.

选自由丙氨酸、精氨酸、天冬氨酸、天冬酰胺、谷氨酸、甘氨酸、谷氨酰胺、组氨酸、亮氨酸、赖氨酸、苏氨酸、异亮氨酸、丝氨酸以及缬氨酸组成的组的一种或多种氨基酸包含在本发明的铟镀覆组合物中。优选地,本发明的铟电镀组合物不含具有硫和硫官能团的氨基酸。优选地,该一种或多种氨基酸选自由精氨酸、天冬氨酸、天冬酰胺、甘氨酸、谷氨酰胺、赖氨酸、丝氨酸以及组氨酸组成的组,更优选地,该一种或多种氨基酸选自由精氨酸、天冬酰胺、甘氨酸、天冬氨酸、赖氨酸以及丝氨酸组成的组,甚至更优选地,该一种或多种氨基酸选自由甘氨酸、赖氨酸以及丝氨酸组成的组。最优选地,氨基酸是甘氨酸。在本发明的铟电镀组合物中包含这些氨基酸中的一种或多种抑制了铟电镀期间的氢气逸出并且稳定了铟离子,从而使得在>1.5的相对高的pH下基本上不发生铟离子的析出。selected from alanine, arginine, aspartic acid, asparagine, glutamic acid, glycine, glutamine, histidine, leucine, lysine, threonine, isoleucine, One or more amino acids from the group consisting of serine and valine are contained in the indium plating composition of the present invention. Preferably, the indium electroplating compositions of the present invention are free of sulfur and sulfur functional amino acids. Preferably, the one or more amino acids are selected from the group consisting of arginine, aspartic acid, asparagine, glycine, glutamine, lysine, serine and histidine, more preferably, the one The one or more amino acids are selected from the group consisting of arginine, asparagine, glycine, aspartic acid, lysine and serine, even more preferably, the one or more amino acids are selected from glycine, lysine and serine groups. Most preferably, the amino acid is glycine. Inclusion of one or more of these amino acids in the indium electroplating compositions of the present invention inhibits hydrogen evolution during indium electroplating and stabilizes the indium ions such that substantially no indium occurs at relatively high pH > 1.5 ion precipitation.

前述氨基酸中的一种或多种可以5g/L或更大的量包含在本发明的铟镀覆组合物中。优选地,本发明的一种或多种氨基酸可以10g/L至200g/L的量包含在内,更优选地,氨基酸可以25g/L至150g/L(例如30g/L至120g/L、30g/L至100g/L或25g/L至75g/L)的量包含在内,甚至更优选地,氨基酸可以25g/L至100g/L(例如30g/L至100g/L或40g/L至100g/L)的量包含在内,最优选地,氨基酸以50g/L至100g/L(例如50g/L至90g/L)的量包含在内。One or more of the aforementioned amino acids may be included in the indium plating composition of the present invention in an amount of 5 g/L or more. Preferably, one or more amino acids of the present invention may be included in an amount of 10g/L to 200g/L, more preferably, the amino acid may be included in an amount of 25g/L to 150g/L (eg 30g/L to 120g/L, 30g/L /L to 100g/L or 25g/L to 75g/L) is included, even more preferably, the amino acid may be 25g/L to 100g/L (eg 30g/L to 100g/L or 40g/L to 100g) /L) is included, most preferably the amino acid is included in an amount of 50 g/L to 100 g/L (eg 50 g/L to 90 g/L).

选自由无机酸、烷烃磺酸以及这些酸的盐组成的组的一种或多种酸,其中无机酸选自由氨基磺酸以及硫酸组成的组。烷烃磺酸包括但不限于甲烷磺酸、乙烷磺酸以及丁烷磺酸。优选地,该一种或多种酸选自由硫酸、氨基磺酸以及甲烷磺酸组成的组,更优选地,该一种或多种酸选自由硫酸以及氨基磺酸组成的组,最优选地,该酸是氨基磺酸。One or more acids selected from the group consisting of inorganic acids, alkane sulfonic acids, and salts of these acids, wherein the inorganic acids are selected from the group consisting of sulfamic acid and sulfuric acid. Alkane sulfonic acids include, but are not limited to, methane sulfonic acid, ethane sulfonic acid, and butane sulfonic acid. Preferably, the one or more acids are selected from the group consisting of sulfuric acid, sulfamic acid and methanesulfonic acid, more preferably the one or more acids are selected from the group consisting of sulfuric acid and sulfamic acid, most preferably , the acid is sulfamic acid.

前述酸中的一种或多种或其盐以10g/L或更大的量包含在本发明的铟电镀组合物中。优选地,该一种或多种酸以10g/L至300g/L,更优选地50g/L至250g/L,甚至更优选地50g/L至200g/L,最优选50g/L至100g/L的量包含在铟镀覆组合物中。One or more of the aforementioned acids or their salts are included in the indium electroplating composition of the present invention in an amount of 10 g/L or more. Preferably, the one or more acids are present at 10 g/L to 300 g/L, more preferably 50 g/L to 250 g/L, even more preferably 50 g/L to 200 g/L, most preferably 50 g/L to 100 g/L The amount of L is included in the indium plating composition.

本发明的含水酸性铟电镀组合物的pH在5或更小的范围内,优选地1-4,更优选地1-3,甚至更优选地1.5-3,最优选地1.5-2.5。The pH of the aqueous acidic indium electroplating composition of the present invention is in the range of 5 or less, preferably 1-4, more preferably 1-3, even more preferably 1.5-3, most preferably 1.5-2.5.

任选地,铟电镀组合物中可包含一种或多种pH调节剂,以提供并维持期望的酸性pH。pH调节剂可包含缓冲剂,这些缓冲剂包括一种酸及其共轭碱的盐。酸选自乙醛酸、丙酮酸、异羟肟酸、亚氨基二乙酸、水杨酸、琥珀酸、羟基丁酸、乙酸、乙酰乙酸、酒石酸、磷酸、草酸、碳酸、抗坏血酸、丁酸、硫代乙酸酸、乙醇酸、苹果酸、甲酸、庚酸、已酸、氢氟酸、乳酸、亚硝酸、辛酸、戊酸、尿酸、壬酸、癸酸、亚硫酸、硫酸、烷烃磺酸以及芳基磺酸,诸如甲烷磺酸、乙烷磺酸、苯磺酸、甲苯磺酸、氨基磺酸。诸如氢氧化钾和氢氧化钠的碱也可单独或与一种或多种前述酸组合用作pH调节剂。优选地,该一种或多种pH调节剂选自由氨基磺酸、硫酸、氢氧化钾以及氢氧化钠组成的组,更优选地,该一种或多种pH调节剂选自由氨基磺酸、硫酸以及氢氧化钾组成的组。Optionally, one or more pH modifiers may be included in the indium electroplating composition to provide and maintain the desired acidic pH. The pH adjusting agent may comprise buffering agents including an acid and its conjugate base salts. The acid is selected from glyoxylic acid, pyruvic acid, hydroxamic acid, iminodiacetic acid, salicylic acid, succinic acid, hydroxybutyric acid, acetic acid, acetoacetic acid, tartaric acid, phosphoric acid, oxalic acid, carbonic acid, ascorbic acid, butyric acid, sulfuric acid acetic acid, glycolic acid, malic acid, formic acid, heptanoic acid, caproic acid, hydrofluoric acid, lactic acid, nitrous acid, octanoic acid, valeric acid, uric acid, nonanoic acid, capric acid, sulfurous acid, sulfuric acid, alkanesulfonic acid and aromatic sulfonic acid, such as methanesulfonic acid, ethanesulfonic acid, benzenesulfonic acid, toluenesulfonic acid, sulfamic acid. Bases such as potassium hydroxide and sodium hydroxide can also be used as pH adjusters, alone or in combination with one or more of the foregoing acids. Preferably, the one or more pH modifiers are selected from the group consisting of sulfamic acid, sulfuric acid, potassium hydroxide and sodium hydroxide, more preferably, the one or more pH modifiers are selected from sulfamic acid, Sulfuric acid and potassium hydroxide.

任选地,含水酸性铟电镀组合物可包含一种或多种合金金属。优选地,该一种或多种合金金属选自由锡、铜、铋以及银组成的组,更优选地,该一种或多种合金金属选自由锡、铜以及银组成的组,最优选地,该合金金属是锡。这些合金金属可作为水溶性金属盐添加到铟组合物中。这类水溶性金属盐是本领域技术人员所熟知的。许多是可商购获得的或者可根据文献中的描述制备。可将一种或多种合金金属源以一定量添加到铟电镀组合物中,这些量使得铟合金具有1wt%至3wt%的一种或多种合金金属。优选地,合金金属从铟组合物中排除。优选地,仅镀覆铟金属。Optionally, the aqueous acidic indium electroplating composition may include one or more alloying metals. Preferably, the one or more alloying metals are selected from the group consisting of tin, copper, bismuth and silver, more preferably the one or more alloying metals are selected from the group consisting of tin, copper and silver, most preferably , the alloy metal is tin. These alloying metals can be added to the indium composition as water-soluble metal salts. Such water-soluble metal salts are well known to those skilled in the art. Many are commercially available or can be prepared as described in the literature. One or more sources of alloying metals may be added to the indium electroplating composition in amounts such that the indium alloy has 1 wt% to 3 wt% of the one or more alloying metals. Preferably, alloying metals are excluded from the indium composition. Preferably, only indium metal is plated.

任选地,可将一种或多种氯离子源加入本发明的铟电镀组合物中。氯离子源包括但不限于氯化钠和氯化钾。优选地,当将一种或多种氯离子源添加到铟电镀组合物中时,氯离子的浓度可在1-50g/L的范围内。Optionally, one or more sources of chloride ions can be added to the indium electroplating compositions of the present invention. Sources of chloride ions include, but are not limited to, sodium chloride and potassium chloride. Preferably, when one or more sources of chloride ions are added to the indium electroplating composition, the concentration of chloride ions may be in the range of 1-50 g/L.

常规的氢气抑制剂,诸如表卤代醇与含氮有机化合物的共聚物,从本发明的铟电镀组合物中排除。优选地,许多常规添加剂,诸如平整剂、抑制剂、增白剂、晶粒细化剂、合金金属以及表面活性剂,也从本发明的铟电镀组合物中排除。Conventional hydrogen suppressors, such as copolymers of epihalohydrin and nitrogen-containing organic compounds, are excluded from the indium electroplating compositions of the present invention. Preferably, many conventional additives, such as levelers, inhibitors, brighteners, grain refiners, alloying metals, and surfactants, are also excluded from the indium electroplating compositions of the present invention.

优选地,在本发明的含水酸性铟电镀组合物中,水是去离子水和蒸馏水中的至少一种,以限制附带的杂质。Preferably, in the aqueous acidic indium electroplating composition of the present invention, the water is at least one of deionized water and distilled water to limit incidental impurities.

优选地,本发明的含水酸性铟电镀组合物由以下项组成:水;一种或多种铟离子源,包括铟(In3+)阳离子和抗衡阴离子;一种或多种酸,选自由无机酸组成的组,其中这些无机酸选自由氨基磺酸、硫酸以及烷烃磺酸(包括氨基磺酸、硫酸以及烷烃磺酸的盐)组成的组;一种或多种氨基酸,选自由丙氨酸、精氨酸、天冬氨酸、天冬酰胺、甘氨酸、谷氨酰胺、组氨酸、亮氨酸、赖氨酸、苏氨酸、异亮氨酸、丝氨酸以及缬氨酸组成的组;任选地一种或多种氯离子源;以及任选地一种或多种pH调节剂。Preferably, the aqueous acidic indium electroplating composition of the present invention consists of: water; one or more sources of indium ions, including indium (In 3+ ) cations and counter anions; one or more acids selected from inorganic The group consisting of acids, wherein these inorganic acids are selected from the group consisting of sulfamic acid, sulfuric acid, and alkane sulfonic acid (including salts of sulfamic acid, sulfuric acid, and alkane sulfonic acid); one or more amino acids, selected from alanine , arginine, aspartic acid, asparagine, glycine, glutamine, histidine, leucine, lysine, threonine, isoleucine, serine and valine; optionally one or more sources of chloride ions; and optionally one or more pH adjusting agents.

更优选地,本发明的含水酸性铟电镀组合物由以下项组成:水;一种或多种铟离子源,包括铟(In3+)阳离子和抗衡阴离子;一种或多种酸,选自由氨基磺酸、硫酸、甲烷磺酸以及上述酸的盐组成的组;一种或多种氨基酸,选自由精氨酸、天冬氨酸、天冬酰胺、甘氨酸、谷氨酰胺、赖氨酸以及丝氨酸组成的组;一种或多种氯离子源;以及任选地一种或多种pH调节剂。More preferably, the aqueous acidic indium electroplating composition of the present invention consists of: water; one or more sources of indium ions, including indium (In 3+ ) cations and counter anions; one or more acids selected from The group consisting of sulfamic acid, sulfuric acid, methanesulfonic acid, and salts of the foregoing acids; one or more amino acids selected from the group consisting of arginine, aspartic acid, asparagine, glycine, glutamine, lysine, and the group consisting of serine; one or more sources of chloride ions; and optionally one or more pH adjusting agents.

最优选地,本发明的含水酸性铟电镀组合物由以下项组成:水;一种或多种铟离子源,包括铟(In3+)阳离子和抗衡阴离子;一种或多种酸,选自由氨基磺酸以及硫酸组成的组,其中最优选的酸是氨基磺酸;一种或多种氨基酸,选自由精氨酸、天冬酰胺、甘氨酸、赖氨酸以及丝氨酸组成的组,其中甘氨酸、赖氨酸以及丝氨酸是更优选的氨基酸,并且最优选甘氨酸;以及任选地一种或多种pH调节剂。Most preferably, the aqueous acidic indium electroplating composition of the present invention consists of: water; one or more sources of indium ions, including indium (In 3+ ) cations and counter anions; one or more acids selected from The group consisting of sulfamic acid and sulfuric acid, wherein the most preferred acid is sulfamic acid; one or more amino acids selected from the group consisting of arginine, asparagine, glycine, lysine and serine, wherein glycine, Lysine and serine are more preferred amino acids, and glycine is most preferred; and optionally one or more pH adjusting agents.

优选地,本发明的含水酸性铟电镀组合物可用于与镍层直接相邻电镀铟金属或铟合金,其中镍层与铜或铜合金直接相邻。更优选地,本发明的含水酸性铟电镀组合物可用于与镍层直接相邻电镀铟金属,其中镍层与铜或铜合金直接相邻。镍层的厚度优选在0.1-5μm的范围内。具有1-100nm,更典型地1-40nm的厚度值的常规铟或银打底层从镍表面排除,从而使得可与镍直接相邻电镀铟金属或铟合金,并且提供>100nm的哑光、均匀、无空隙、基本上无晶须的铟沉积物,该铟沉积物对镍具有良好的粘附性。可以通过交叉影线测试、引脚弯曲测试以及回流测试,然后进行脱湿控制来测试这种粘附性。Preferably, the aqueous acidic indium electroplating compositions of the present invention are useful for electroplating indium metal or indium alloys directly adjacent to a nickel layer that is directly adjacent to copper or copper alloys. More preferably, the aqueous acidic indium electroplating compositions of the present invention are useful for electroplating indium metal directly adjacent to a nickel layer that is directly adjacent to copper or copper alloys. The thickness of the nickel layer is preferably in the range of 0.1-5 μm. Conventional indium or silver undercoats with thickness values of 1-100 nm, more typically 1-40 nm, are excluded from the nickel surface, allowing indium metal or indium alloys to be electroplated directly adjacent to the nickel, and providing a matte, uniform >100 nm , void-free, substantially whisker-free indium deposits with good adhesion to nickel. This adhesion can be tested by cross-hatch testing, lead bend testing, and reflow testing followed by dehumidification control.

铟层的厚度在>0.1μm的范围内,优选地0.2μm至10μm,更优选为0.2μm至5μm,最优选为0.2μm至1μm。The thickness of the indium layer is in the range >0.1 μm, preferably 0.2 μm to 10 μm, more preferably 0.2 μm to 5 μm, most preferably 0.2 μm to 1 μm.

用于与镍直接相邻沉积铟金属或铟合金的设备是常规的。优选地,常规的可溶性铟电极用作阳极。电流密度可根据电镀组合物中铟离子的浓度以及浴液搅拌而变化。优选地,电流密度在0.1ASD或更大(例如0.1-50ASD、0.1-30ASD或0.1-20ASD)的范围内,更优选地,0.5ASD至50ASD(例如0.5-40ASD、1-20ASD或1-10ASD)。Equipment for depositing indium metal or indium alloys directly adjacent to nickel is conventional. Preferably, a conventional soluble indium electrode is used as the anode. The current density can vary depending on the concentration of indium ions in the electroplating composition and the agitation of the bath. Preferably, the current density is in the range of 0.1 ASD or greater (eg 0.1-50 ASD, 0.1-30 ASD or 0.1-20 ASD), more preferably 0.5 ASD to 50 ASD (eg 0.5-40 ASD, 1-20 ASD or 1-10 ASD) ).

铟金属或铟合金电镀期间铟组合物的温度可在室温至60℃的范围内。优选地,温度在室温至55℃的范围内,更优选地,室温至50℃,最优选地,30℃至45℃。The temperature of the indium composition during indium metal or indium alloy electroplating may range from room temperature to 60°C. Preferably, the temperature is in the range of room temperature to 55°C, more preferably room temperature to 50°C, most preferably, 30°C to 45°C.

本发明的含水酸性铟电镀组合物的铟镀覆速度可分别在1、2、4、8或10ASD下在0.2μm/min、0.5μm/min、>1μm/min、>2.3μm/min或>3μm/min的范围内。The indium plating speed of the aqueous acidic indium electroplating composition of the present invention can be > 0.2 μm/min, > 0.5 μm/min, > 1 μm/min, > 2.3 μm/min at 1, 2, 4, 8 or 10 ASD, respectively or >3μm/min.

任选地,使镀铟或铟合金的镍以及铜或铜合金衬底回流。回流测试优选在150℃的温度下,更优选地,200℃的温度,最优选地,200℃至350℃的温度下进行。回流可在用于金属衬底的常规回流炉中进行。回流的镀铟的镍衬底显示出轻微的脱湿或基本上没有脱湿。Optionally, the indium or indium alloy plated nickel and copper or copper alloy substrates are reflowed. The reflow test is preferably performed at a temperature of > 150°C, more preferably a temperature of > 200°C, most preferably a temperature of 200°C to 350°C. Reflow can be performed in conventional reflow ovens for metal substrates. The reflowed indium plated nickel substrate showed little or no dewetting.

尽管本发明的含水酸性铟电镀组合物优选用于与镍层直接相邻沉积铟金属或铟合金,其中镍层与铜或铜合金直接相邻,诸如对于IC电子装置中的连接器引脚,但是据设想,本发明的含水酸性铟电镀组合物可用于与其他金属诸如铜和铜合金直接相邻沉积铟金属或铟合金。优选地,与其他金属诸如镍、铜或铜合金直接相邻沉积铟金属,最优选地,与镍直接相邻沉积铟金属,其中镍与铜或铜合金直接相邻。Although the aqueous acidic indium electroplating compositions of the present invention are preferably used for depositing indium metal or indium alloys directly adjacent to a nickel layer that is directly adjacent to copper or copper alloys, such as for connector pins in IC electronics, However, it is envisaged that the aqueous acidic indium electroplating compositions of the present invention may be used to deposit indium metal or indium alloys directly adjacent to other metals such as copper and copper alloys. Preferably, the indium metal is deposited directly adjacent to other metals such as nickel, copper or copper alloys, and most preferably, the indium metal is deposited directly adjacent to nickel, wherein nickel is directly adjacent to copper or copper alloys.

以下实例旨在说明本发明,但是并不旨在限制本发明的范围。The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.

实例1-10Example 1-10

本发明的含水酸性铟电镀组合物的赫尔(Hull)槽电镀性能Hull cell electroplating performance of the aqueous acidic indium electroplating compositions of the present invention

制备了以下含水酸性铟电镀组合物:The following aqueous acidic indium electroplating compositions were prepared:

表1Table 1

Figure BDA0002371571140000081
Figure BDA0002371571140000081

前述铟电镀组合物的溶剂是水,并且用氢氧化钾调节铟电镀组合物的pH。The solvent of the aforementioned indium electroplating composition is water, and potassium hydroxide is used to adjust the pH of the indium electroplating composition.

将250mL的每种铟组合物置于单独的赫尔槽中。涂覆有镍的黄铜(铜锌合金)面板用作阴极。铟金属用作可溶性阳极。整流器设定为2A。在镀覆过程中,使用普通的实验室桨式搅拌器搅拌铟组合物。铟电镀进行3min。电流密度在0.1-10ASD的范围内。使用Fischerscope X-Ray XDV-SD XRF设备以1、2、3、4、6、8以及10ASD的电流密度测量铟金属沉积物。通过将每个电流密度下的厚度除以以分钟计的镀覆时间来确定镀覆速率。250 mL of each indium composition was placed in a separate Hull cell. A nickel-coated brass (copper-zinc alloy) panel was used as the cathode. Indium metal is used as the soluble anode. The rectifier is set to 2A. During the plating process, the indium composition was stirred using a common laboratory paddle stirrer. Indium plating was performed for 3 min. The current density is in the range of 0.1-10 ASD. Indium metal deposits were measured using a Fischerscope X-Ray XDV-SD XRF device at current densities of 1, 2, 3, 4, 6, 8, and 10 ASD. The plating rate was determined by dividing the thickness at each current density by the plating time in minutes.

随着电流密度的增加,在镍上沉积铟的镀覆速率也增加。镀覆速率在1ASD下的0.5μm/min的低速率到在10ASD下的3.2μm/min的高速率的范围内。电镀完成后,检查铟沉积物的沉积物质量。所有的铟沉积物都表现为光滑、哑光且均匀的。没有观察到沉积物缺陷。As the current density increases, the plating rate for depositing indium on nickel also increases. Plating rates ranged from a low rate of 0.5 μm/min at 1 ASD to a high rate of 3.2 μm/min at 10 ASD. After plating is complete, check the deposit quality of the indium deposit. All indium deposits appeared smooth, matte and uniform. No deposit defects were observed.

实例11-12Example 11-12

镍上铟金属的回流测试Reflow Test of Indium Metal on Nickel

制备了以下含水酸性铟电镀组合物:The following aqueous acidic indium electroplating compositions were prepared:

表2Table 2

Figure BDA0002371571140000091
Figure BDA0002371571140000091

1LUGALVANTM IZE,购自BASF(巴斯夫)(IZE含有48wt%-50wt%的共聚物)。 1 LUGALVAN IZE from BASF (IZE contains 48-50 wt% copolymer).

每种含水酸性铟电镀组合物都用于在涂覆镍的黄铜(铜锌合金)上镀覆铟。反电极是铟可溶性阳极。在5ASD的电流密度下,在衬底的镍上镀覆铟3min。在整个镀覆过程中搅拌铟电镀组合物。Each aqueous acidic indium electroplating composition was used to plate indium on nickel-coated brass (copper-zinc alloy). The counter electrode is an indium soluble anode. Indium was plated on the nickel of the substrate for 3 min at a current density of 5 ASD. The indium electroplating composition is agitated throughout the plating process.

镀覆后,用DI水冲洗镀铟的衬底、干燥并观察镀覆性能。镍上的铟沉积物在两个衬底上均表现为均匀、哑光且光滑的。After plating, the indium plated substrates were rinsed with DI water, dried and observed for plating properties. Indium deposits on nickel appeared uniform, matte and smooth on both substrates.

然后,使用常规回流炉对衬底进行回流/加热。在200℃回流3min。从炉中取出回流的衬底,并分析其表面的质量。用实例11的铟组合物镀覆的衬底没有显示出脱湿的迹象。相比之下,用实例12的铟组合物镀覆的衬底显示出明显的脱湿:在回流之前,镍在被铟覆盖的某些区域上暴露。The substrate is then reflowed/heated using a conventional reflow oven. Reflux for 3 min at 200°C. The reflowed substrate was removed from the furnace and the quality of its surface was analyzed. The substrate plated with the indium composition of Example 11 showed no signs of dewetting. In contrast, the substrate plated with the indium composition of Example 12 showed significant dewetting: prior to reflow, the nickel was exposed on certain areas covered by indium.

实例13-14Example 13-14

含有氨基酸半胱氨酸或氨基酸甘氨酸的含水酸性铟镀覆组合物的赫尔槽镀覆性能Hull Cell Plating Properties of Aqueous Acidic Indium Plating Compositions Containing Amino Acid Cysteine or Amino Acid Glycine

制备了以下含水酸性铟电镀组合物:The following aqueous acidic indium electroplating compositions were prepared:

表3table 3

Figure BDA0002371571140000101
Figure BDA0002371571140000101

将250mL的每种含水酸性铟组合物置于赫尔槽中。涂覆镍的黄铜(铜锌合金)衬底用作阴极。镀覆在桨式搅拌下以2A的电流进行3min。反电极是可溶性铟阳极。在0.1-10ASD的电流密度下评估涂层的外观和厚度。对于对比例13,因为0.1-3ASD的较低电流密度,所以没有铟镀覆的迹象。在电流密度高于3ASD时,铟沉积物非常薄(小于0.4μm)并且不均匀。在镀覆期间观察到大量气体逸出(用肉眼从阴极观察到鼓泡)。250 mL of each aqueous acidic indium composition was placed in a Hull cell. A nickel-coated brass (copper-zinc alloy) substrate was used as the cathode. Plating was carried out at a current of 2 A for 3 min with paddle stirring. The counter electrode is a soluble indium anode. The appearance and thickness of the coatings were evaluated at current densities of 0.1-10 ASD. For Comparative Example 13, there is no evidence of indium plating because of the lower current density of 0.1-3 ASD. At current densities above 3ASD, the indium deposits are very thin (less than 0.4 μm) and non-uniform. A large amount of gas evolution was observed during plating (bubbling was observed from the cathode with the naked eye).

相比之下,实例14的铟沉积物在0.1-10ASD下表现为均匀、哑光且光滑的。镀覆速度与上述实例1-5的镀覆速度相当。In contrast, the indium deposit of Example 14 appeared uniform, matte and smooth at 0.1-10 ASD. The plating rates were comparable to those of Examples 1-5 above.

实例15-17Example 15-17

含水酸性铟镀覆组合物的赫尔槽镀覆性能Hull Cell Plating Properties of Aqueous Acidic Indium Plating Compositions

制备了以下含水酸性铟电镀组合物:The following aqueous acidic indium electroplating compositions were prepared:

表4Table 4

Figure BDA0002371571140000102
Figure BDA0002371571140000102

1LUGALVANTM IZE,购自BASF(巴斯夫)(IZE含有48wt%-50wt%的共聚物)。 1 LUGALVAN IZE from BASF (IZE contains 48-50 wt% copolymer).

将250mL的每种含水酸性铟组合物置于赫尔槽中。涂覆镍的黄铜(铜锌合金)衬底用作阴极。镀覆以2A的电流进行。镀覆在桨式搅拌下进行3min。反电极是铟可溶性阳极。在0.1-10ASD的电流密度下评估铟涂层的外观和厚度。250 mL of each aqueous acidic indium composition was placed in a Hull cell. A nickel-coated brass (copper-zinc alloy) substrate was used as the cathode. Plating was performed with a current of 2A. Plating was carried out with paddle stirring for 3 min. The counter electrode is an indium soluble anode. The appearance and thickness of the indium coatings were evaluated at current densities of 0.1-10 ASD.

实例15的铟镀覆的衬底具有均匀、哑光且光滑的铟沉积物。在0.1-10ASD的电流密度范围内,镀覆速率良好并且与上述实例1-5基本上相同。没有可观察到的缺陷。The indium plated substrate of Example 15 had a uniform, matte and smooth indium deposit. In the current density range of 0.1-10 ASD, the plating rate was good and substantially the same as Examples 1-5 above. No observable defects.

相比之下,实例16-17的铟组合物镀覆的衬底没有显示出沉积在衬底上的大量的铟。实例16-17的衬底的XRF分析在衬底的某些区域显示出0.1-0.6μm的铟簇。在实例16-17的衬底的镀覆过程中观察到大量气体逸出。已经确定,咪唑/表卤代醇共聚物不适用于铟金属电镀。In contrast, the indium composition-coated substrates of Examples 16-17 did not exhibit significant amounts of indium deposited on the substrates. XRF analysis of the substrates of Examples 16-17 showed 0.1-0.6 μm indium clusters in certain regions of the substrates. A large amount of gas evolution was observed during the plating of the substrates of Examples 16-17. It has been determined that imidazole/epihalohydrin copolymers are not suitable for indium metal plating.

实例18Example 18

氢气生成和镍上铟的回流测试Hydrogen generation and reflow testing of indium on nickel

将上述表4的实例15、16以及17的铟镀覆组合物添加到单独的一升玻璃烧杯中。在每个烧杯中放置两个铟可溶性阳极。在每个烧杯中使用涂覆镍的黄铜试片作为阴极。将电极连接到整流器。对每种组合物施加4ASD的电流密度。镀覆在2min内完成。在整个镀覆过程中使用磁力搅拌器搅拌铟电镀组合物。镀覆后,将每个试片从烧杯中取出,并用DI水冲洗、干燥并分析铟镀覆性能。The indium plating compositions of Examples 15, 16, and 17 of Table 4 above were added to a separate one-liter glass beaker. Two indium soluble anodes were placed in each beaker. Nickel-coated brass coupons were used as cathodes in each beaker. Connect the electrodes to the rectifier. A current density of 4 ASD was applied to each composition. Plating was completed within 2 minutes. A magnetic stirrer was used to stir the indium electroplating composition throughout the plating process. After plating, each coupon was removed from the beaker, rinsed with DI water, dried and analyzed for indium plating performance.

实例15的试片具有2.2μm厚的均匀、哑光且光滑的铟沉积物。相比之下,来自实例16-17的镀覆组合物的铟沉积物非常薄。XRF分析测得实例16的铟组合物镀覆的试片的铟沉积物只有0.2μm厚,并且实例17的组合物的铟沉积物是0.1μm厚。对于实例16-17,在镀覆期间观察到大量气体逸出。The coupon of Example 15 had a 2.2 μm thick uniform, matte and smooth indium deposit. In contrast, the indium deposits from the plating compositions of Examples 16-17 were very thin. XRF analysis determined that the indium deposits of the indium composition coated coupons of Example 16 were only 0.2 μm thick, and the indium deposits of the composition of Example 17 were 0.1 μm thick. For Examples 16-17, substantial gas evolution was observed during plating.

使用8ASD的电流密度以1分30秒的镀覆时间重复上述实验。实例15的铟沉积物外观均匀、哑光且光滑,具有3.7μm厚的铟沉积物。来自实例16-17的组合物的铟沉积物分别具有0.55μm和0.35μm的铟厚度。The above experiment was repeated using a current density of 8 ASD with a plating time of 1 minute 30 seconds. The indium deposit of Example 15 was uniform, matte and smooth in appearance, with a 3.7 μm thick indium deposit. The indium deposits from the compositions of Examples 16-17 had indium thicknesses of 0.55 μm and 0.35 μm, respectively.

实例19-21Examples 19-21

氢气生成和镍上铟的回流测试Hydrogen generation and reflow testing of indium on nickel

制备了以下含水酸性铟电镀组合物:The following aqueous acidic indium electroplating compositions were prepared:

表5table 5

Figure BDA0002371571140000121
Figure BDA0002371571140000121

1LUGALVANTM IZE,购自BASF(巴斯夫)(IZE含有48wt%-50wt%的共聚物)。 1 LUGALVAN IZE from BASF (IZE contains 48-50 wt% copolymer).

将实例19-20的铟镀覆组合物中的每一种添加到单独的一升玻璃烧杯中。在每个烧杯中放置两个铟阳极,并在每个烧杯中使用涂覆镍的试片作为阴极。将电极连接到整流器。施加4ASD的电流密度进行2min的镀覆。在整个镀覆过程中搅拌镀覆组合物。在铟镀覆期间,对于实例20-21观察到大量氢气逸出。相比之下,对于实例19,观察到微量的氢气逸出。Each of the indium plating compositions of Examples 19-20 was added to a separate one-liter glass beaker. Two indium anodes were placed in each beaker, and a nickel-coated coupon was used as the cathode in each beaker. Connect the electrodes to the rectifier. A current density of 4 ASD was applied for 2 min of plating. The plating composition is stirred throughout the plating process. During indium plating, significant hydrogen evolution was observed for Examples 20-21. In contrast, for Example 19, trace amounts of hydrogen gas evolution were observed.

镀覆后,用DI水冲洗镀铟的衬底、干燥并观察镀覆性能。用实例19的铟组合物镀覆的镍上的铟沉积物表现为均匀、哑光且光滑的。平均铟厚度为2.2μm。After plating, the indium plated substrates were rinsed with DI water, dried and observed for plating properties. The indium deposits on nickel plated with the indium composition of Example 19 appeared uniform, matte and smooth. The average indium thickness was 2.2 μm.

相比之下,用实例20和实例21的铟组合物时,基本上没有铟沉积在镍上。用实例20的铟组合物镀覆的镍上的平均铟厚度仅为0.55μm,并且用实例21的铟组合物镀覆的镍上的平均厚度仅为0.35μm。In contrast, with the indium compositions of Examples 20 and 21, substantially no indium was deposited on the nickel. The average thickness of indium on nickel plated with the indium composition of Example 20 was only 0.55 μm, and the average thickness on nickel plated with the indium composition of Example 21 was only 0.35 μm.

然后使用常规的回流炉对具有与镍相邻的铟沉积物的衬底进行回流。在200℃回流3min。从炉中取出回流的衬底,并分析其表面的质量。用实例19的铟组合物镀覆的衬底没有显示出脱湿的迹象。相比之下,用实例20-21的铟组合物镀覆的衬底显示出分布在铟层的表面上的几个脱湿点。The substrate with the indium deposit adjacent to the nickel is then reflowed using a conventional reflow oven. Reflux for 3 min at 200°C. The reflowed substrate was removed from the furnace and the quality of its surface was analyzed. The substrate plated with the indium composition of Example 19 showed no signs of dewetting. In contrast, the substrates plated with the indium compositions of Examples 20-21 exhibited several dewetting spots distributed on the surface of the indium layer.

实例22-27Example 22-27

含水酸性铟电镀组合物的稳定性Stability of Aqueous Acidic Indium Electroplating Compositions

制备了以下含水酸性铟电镀组合物:The following aqueous acidic indium electroplating compositions were prepared:

表6Table 6

Figure BDA0002371571140000131
Figure BDA0002371571140000131

在室温下初始配制(make-up)之后,所有前述铟镀覆组合物均表现为无色的。所有铟镀覆组合物在室温下闲置一天。实例22的铟镀覆组合物明显混浊。在玻璃烧杯的底部观察到白色沉淀。白色沉淀表明从组合物中析出铟盐。All of the foregoing indium plating compositions appeared colorless after initial make-up at room temperature. All indium plating compositions were left at room temperature for one day. The indium plating composition of Example 22 was noticeably cloudy. A white precipitate was observed at the bottom of the glass beaker. A white precipitate indicates the indium salt precipitated from the composition.

相比之下,实例23-27的铟镀覆组合物保持无色,表明稳定性良好。实例23-27的组合物在几周内保持无色,表明铟组合物稳定。一个月后仍未观察到浑浊或沉淀。In contrast, the indium plating compositions of Examples 23-27 remained colorless, indicating good stability. The compositions of Examples 23-27 remained colorless for several weeks, indicating that the indium compositions were stable. No turbidity or precipitation was observed after one month.

Claims (10)

1.一种铟电镀组合物,其由以下项组成:水;一种或多种铟离子源;一种或多种酸,其选自由无机酸、烷烃磺酸以及所述酸的盐组成的组,其中所述无机酸选自由氨基磺酸以及硫酸组成的组;以及一种或多种氨基酸,其选自由丙氨酸、精氨酸、天冬氨酸、天冬酰胺、谷氨酸、甘氨酸、谷氨酰胺、亮氨酸、组氨酸、赖氨酸、苏氨酸、异亮氨酸、丝氨酸以及缬氨酸组成的组;任选地一种或多种合金金属;以及任选地一种或多种pH调节剂。1. An indium electroplating composition consisting of: water; one or more sources of indium ions; one or more acids selected from the group consisting of inorganic acids, alkane sulfonic acids, and salts of said acids group, wherein the inorganic acid is selected from the group consisting of sulfamic acid and sulfuric acid; and one or more amino acids selected from the group consisting of alanine, arginine, aspartic acid, asparagine, glutamic acid, the group consisting of glycine, glutamine, leucine, histidine, lysine, threonine, isoleucine, serine, and valine; optionally one or more alloying metals; and optionally one or more pH modifiers. 2.如权利要求1所述的铟电镀组合物,其中,所述一种或多种氨基酸选自由甘氨酸、精氨酸、赖氨酸、谷氨酰胺、丝氨酸、组氨酸以及天冬酰胺组成的组。2. The indium electroplating composition of claim 1, wherein the one or more amino acids are selected from the group consisting of glycine, arginine, lysine, glutamine, serine, histidine, and asparagine group. 3.如权利要求1所述的铟电镀组合物,其中,所述一种或多种氨基酸的量为至少5g/L。3. The indium electroplating composition of claim 1, wherein the one or more amino acids are present in an amount of at least 5 g/L. 4.如权利要求3所述的铟电镀组合物,其中,所述一种或多种氨基酸的量为10g/L至200g/L。4. The indium electroplating composition of claim 3, wherein the one or more amino acids are in an amount of 10 g/L to 200 g/L. 5.如权利要求1所述的铟电镀组合物,其中,所述一种或多种酸是选自由氨基磺酸以及硫酸组成的组的无机酸。5. The indium electroplating composition of claim 1, wherein the one or more acids are inorganic acids selected from the group consisting of sulfamic acid and sulfuric acid. 6.如权利要求1所述的铟电镀组合物,其中,所述一种或多种合金金属选自由锡、银、铋以及铜组成的组。6. The indium electroplating composition of claim 1, wherein the one or more alloying metals is selected from the group consisting of tin, silver, bismuth, and copper. 7.一种在镍上电镀铟的方法,其包括:7. A method of electroplating indium on nickel, comprising: a.提供包括与铜或铜合金层相邻的镍层的衬底:a. Provide a substrate including a nickel layer adjacent to the copper or copper alloy layer: b.使包括与所述铜或所述铜合金层相邻的所述镍层的所述衬底与铟电镀组合物接触,所述铟电镀组合物由以下项组成:水;一种或多种铟离子源;一种或多种酸,其选自由无机酸、烷烃磺酸以及所述酸的盐组成的组,其中所述无机酸选自由氨基磺酸以及硫酸组成的组;以及一种或多种氨基酸,其选自由丙氨酸、精氨酸、天冬氨酸、天冬酰胺、谷氨酸、甘氨酸、谷氨酰胺、组氨酸、亮氨酸、赖氨酸、苏氨酸、异亮氨酸、丝氨酸以及缬氨酸组成的组;任选地一种或多种合金金属;以及一种或多种pH调节剂;以及b. contacting the substrate including the nickel layer adjacent to the copper or copper alloy layer with an indium electroplating composition consisting of: water; one or more a source of indium ions; one or more acids selected from the group consisting of inorganic acids, alkane sulfonic acids, and salts of the acids, wherein the inorganic acids are selected from the group consisting of sulfamic acid and sulfuric acid; and a or amino acids selected from the group consisting of alanine, arginine, aspartic acid, asparagine, glutamic acid, glycine, glutamine, histidine, leucine, lysine, threonine , isoleucine, serine, and valine; optionally one or more alloying metals; and one or more pH adjusting agents; and c.使用所述铟电镀组合物电镀与所述衬底的所述镍层相邻的铟层。c. Electroplating an indium layer adjacent to the nickel layer of the substrate using the indium electroplating composition. 8.如权利要求7所述的在镍上电镀铟的方法,其中,所述铟层为大于0.1μm。8. The method of electroplating indium on nickel as claimed in claim 7, wherein the indium layer is larger than 0.1 μm. 9.如权利要求8所述的在镍上电镀铟的方法,其中,所述铟层为0.2-1μm。9. The method for electroplating indium on nickel according to claim 8, wherein the indium layer is 0.2-1 μm. 10.如权利要求7所述的电镀铟的方法,其中,所述一种或多种氨基酸选自由甘氨酸、赖氨酸、谷氨酰胺、组氨酸、丝氨酸、天冬酰胺以及精氨酸组成的组。10. The method of electroplating indium according to claim 7, wherein the one or more amino acids are selected from the group consisting of glycine, lysine, glutamine, histidine, serine, asparagine and arginine group.
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