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CN111438448A - A kind of laser processing equipment and method for free composite separation of galvanometer and nozzle - Google Patents

A kind of laser processing equipment and method for free composite separation of galvanometer and nozzle Download PDF

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Publication number
CN111438448A
CN111438448A CN202010389753.1A CN202010389753A CN111438448A CN 111438448 A CN111438448 A CN 111438448A CN 202010389753 A CN202010389753 A CN 202010389753A CN 111438448 A CN111438448 A CN 111438448A
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nozzle
galvanometer
field lens
laser
processing
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李晓
赵飞
运侠伦
万佳龙
梅雪松
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Wuxi Chaotong Intelligent Manufacturing Technology Research Institute Co ltd
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Wuxi Chaotong Intelligent Manufacturing Technology Research Institute Co ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • B23K26/382Removing material by boring or cutting by boring
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462Nozzles; Features related to nozzles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462Nozzles; Features related to nozzles
    • B23K26/1464Supply to, or discharge from, nozzles of media, e.g. gas, powder, wire
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/362Laser etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/362Laser etching
    • B23K26/364Laser etching for making a groove or trench, e.g. for scribing a break initiation groove

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

本发明涉及一种振镜和喷嘴自由复合分离激光加工装备及方法,具有振镜,所述振镜用以控制激光束的方向;场镜,所述场镜用以将通过所述振镜的已经控制好方向的激光束聚焦;喷嘴,所述喷嘴可复合分离地切换于所述场镜的正下方并可让经过所述场镜聚焦后的激光束通过时进行气体辅助;喷嘴运动机构,所述喷嘴运动机构用以辅助所述喷嘴复合分离地切换于所述场镜的下方;运动平台,所述运动平台用以放置工件。本发明设计了振镜与喷嘴的自由复合分离加工装备和加工方法,使振镜与喷嘴的加工优势相结合,并且保留了各自的加工能力,因此具有更优越的加工能力。

Figure 202010389753

The invention relates to a laser processing equipment and method for free composite separation of a galvanometer and a nozzle, comprising: a galvanometer, which is used to control the direction of a laser beam; The laser beam whose direction has been controlled is focused; the nozzle, which can be switched directly under the field lens in a composite and separate manner, and can be assisted by gas when the laser beam focused by the field lens passes through; the nozzle movement mechanism, The nozzle moving mechanism is used for assisting the nozzle to switch under the field lens in a composite and separate manner; a moving platform is used for placing the workpiece. The invention designs the free composite separation processing equipment and processing method of the galvanometer and the nozzle, so that the processing advantages of the galvanometer and the nozzle are combined, and their respective processing capabilities are retained, so they have more superior processing capabilities.

Figure 202010389753

Description

一种振镜和喷嘴自由复合分离激光加工装备及方法A kind of laser processing equipment and method for free composite separation of galvanometer and nozzle

技术领域technical field

本发明涉及激光加工技术领域,具体涉及一种振镜和喷嘴自由复合分离激光加工装备及方法。The invention relates to the technical field of laser processing, in particular to a laser processing equipment and method for free composite separation of a galvanometer and a nozzle.

背景技术Background technique

激光加工技术是利用激光束与物质相互作用的特性,对材料(包括金属与非金属)进行划线、打标、清洗、切割、焊接、表面处理、打孔及微加工等的一门加工技术。激光加工作为先进制造技术已广泛应用于汽车、电子、电器、航空、冶金、机械制造等国民经济重要部门,对提高产品质量、劳动生产率、自动化、无污染、减少材料消耗等起到愈来愈重要的作用。Laser processing technology is a processing technology for scribing, marking, cleaning, cutting, welding, surface treatment, drilling and micromachining of materials (including metals and non-metals) by using the characteristics of the interaction between laser beams and substances. . As an advanced manufacturing technology, laser processing has been widely used in important sectors of the national economy such as automobiles, electronics, electrical appliances, aviation, metallurgy, machinery manufacturing, etc. It plays an increasingly important role in improving product quality, labor productivity, automation, pollution-free, and reducing material consumption. important role.

振镜和激光切割头在激光加工领域应用广泛,它们各有优点也存在各自的不足。振镜通过控制内部的两个反射镜偏转实现对激光束的控制,其电机惯量小,通过场镜聚焦后可精确控制激光焦点在平面内的快速移动,广泛应用于激光打标、激光精密刻蚀等,但振镜无法配置同轴喷嘴,从而在加工过程中缺少气体保护,无法对加工产物进行及时吹离,因此很难用于深孔、深槽的加工。Galvo mirrors and laser cutting heads are widely used in the field of laser processing, and they each have their own advantages and disadvantages. The galvanometer controls the laser beam by controlling the deflection of two internal mirrors. Its motor inertia is small. After focusing through the field mirror, the rapid movement of the laser focus in the plane can be precisely controlled. It is widely used in laser marking and laser precision engraving. However, the galvanometer cannot be equipped with a coaxial nozzle, so there is a lack of gas protection during the processing, and the processing product cannot be blown away in time, so it is difficult to use for the processing of deep holes and deep grooves.

激光切割头配有同轴喷嘴吹气,在加工过程中喷射的高压气体具有保护及吹除作用,从而提高加工能力和质量,可用于较厚材料的切割、打孔。但切割头需要通过运动平台实现加工,运动平台一般惯量较大,很难适用于快速切割、精密小孔切割等对运动速度精度要求较高的场合。The laser cutting head is equipped with a coaxial nozzle for blowing air, and the high-pressure gas injected during the processing has the function of protection and blowing, thereby improving the processing capacity and quality, and can be used for cutting and punching thicker materials. However, the cutting head needs to be processed through a motion platform, and the motion platform generally has a large inertia, which is difficult to apply to occasions that require high motion speed and accuracy, such as rapid cutting and precision small hole cutting.

专利一种多功能激光加工头(授权号:CN102653030B),将振镜与喷嘴相结合,但该加工头是一种封闭的固连结构,无法实现场镜与切割头的分离,从而使振镜丧失了大范围加工的能力。Patented a multi-functional laser processing head (authorization number: CN102653030B), which combines the galvanometer and the nozzle, but the processing head is a closed fixed structure, which cannot realize the separation of the field lens and the cutting head, so that the galvanometer Lost the ability to process a wide range.

发明内容SUMMARY OF THE INVENTION

本发明的目的是克服现有技术的缺陷,提供一种振镜和喷嘴自由复合分离激光加工装备及方法。The purpose of the present invention is to overcome the defects of the prior art, and to provide a laser processing equipment and method for free composite separation of a galvanometer and a nozzle.

实现本发明目的的技术方案是:一种振镜和喷嘴自由复合分离激光加工装备,具有The technical scheme for realizing the purpose of the present invention is: a galvanometer and a nozzle are freely combined and separated laser processing equipment, which has the following characteristics:

振镜,所述振镜用以控制激光束的方向;a galvanometer, which is used to control the direction of the laser beam;

场镜,所述场镜用以将通过所述振镜的已经控制好方向的激光束聚焦;a field lens, which is used to focus the laser beam whose direction has been controlled through the galvanometer;

喷嘴,所述喷嘴可复合分离地切换于所述场镜的正下方并可让经过所述场镜聚焦后的激光束通过时进行气体辅助;a nozzle, which can be switched directly under the field lens in a composite and separate manner and can perform gas assistance when the laser beam focused by the field lens passes through;

喷嘴运动机构,所述喷嘴运动机构用以辅助所述喷嘴复合分离地切换于所述场镜的下方;a nozzle moving mechanism, the nozzle moving mechanism is used to assist the nozzle to switch under the field lens in a composite and separate manner;

运动平台,所述运动平台用以放置工件。The moving platform is used to place the workpiece.

上述技术方案所述喷嘴运动机构具有The nozzle moving mechanism described in the above technical solution has

喷嘴抽离机构,所述喷嘴抽离机构用以将所述喷嘴复合至所述场镜的正下方或分离开所述场镜的正下方;a nozzle extraction mechanism, the nozzle extraction mechanism is used to recombine the nozzle to the directly below the field lens or to separate it from the directly below the field lens;

喷嘴高度调节机构,所述喷嘴高度调节机构连接于所述喷嘴抽离机构,所述喷嘴高度调节机构用以调节所述喷嘴距离所述工件的高度。A nozzle height adjustment mechanism, the nozzle height adjustment mechanism is connected to the nozzle extraction mechanism, and the nozzle height adjustment mechanism is used to adjust the height of the nozzle from the workpiece.

上述技术方案所述喷嘴抽离机构和所述喷嘴高度调节机构使用伺服电机驱动。In the above technical solution, the nozzle extraction mechanism and the nozzle height adjustment mechanism are driven by servo motors.

上述技术方案所述喷嘴具有The nozzle described in the above technical solution has

进气口,所述进气口用以输入气体;an air inlet, the air inlet is used to input gas;

喷气口,所述喷气口用以喷出气体,所述喷气口工作时位于所述场镜的正下方。The air injection port is used for ejecting gas, and the air injection port is located directly under the field lens during operation.

上述技术方案所述喷嘴背离所述喷气口的一侧密封设有高透光镜片,所述高透光镜片用以保证经过所述场镜聚焦后的激光束的高透过性。In the above technical solution, the side of the nozzle facing away from the jet port is sealed with a high light transmission lens, and the high light transmission lens is used to ensure the high transmittance of the laser beam focused by the field lens.

本发明还提供一种振镜和喷嘴自由复合分离激光加工方法,该方法基于一种振镜和喷嘴自由复合分离激光加工装备,并且包括以下加工方法:The present invention also provides a laser processing method for free recombination and separation of a galvanometer and a nozzle. The method is based on a laser processing equipment for free recombination and separation of a galvanometer and a nozzle, and includes the following processing methods:

振镜独立加工A:运动平台不动,喷嘴复合至所述场镜的正下方,激光素通过振镜控制方向,由场镜聚焦后再通过喷嘴,激光束在喷嘴的加工范围内对运动平台上的工件进行加工;Galvanometer independent processing A: The moving platform does not move, the nozzle is compounded directly below the field mirror, the laser pixel controls the direction through the galvanometer, is focused by the field mirror and then passes through the nozzle, and the laser beam is directed to the moving platform within the processing range of the nozzle. on the workpiece for processing;

振镜独立加工B:运动平台不动,喷嘴分离开所述场镜的正下方,激光素通过振镜控制方向,由场镜聚焦,然后激光束在场镜的加工范围内对运动平台上的工件进行加工。Galvanometer independent processing B: The moving platform does not move, the nozzle is separated directly below the field mirror, the laser pixel is controlled by the galvanometer, and focused by the field mirror, and then the laser beam hits the workpiece on the moving platform within the processing range of the field mirror. to be processed.

一种振镜和喷嘴自由复合分离激光加工方法,该方法基于一种振镜和喷嘴自由复合分离激光加工装备,并且包括以下加工方法:A galvanometer and nozzle free composite separation laser processing method, the method is based on a galvanometer and nozzle free composite separation laser processing equipment, and includes the following processing methods:

平台独立加工:振镜不动,喷嘴复合至所述场镜的正下方,激光素通过振镜后由场镜聚焦,再通过喷嘴,运动平台带动工件进行运动加工。Platform-independent processing: the galvanometer does not move, the nozzle is compounded directly below the field mirror, the laser pixel passes through the galvanometer and is focused by the field mirror, and then passes through the nozzle, and the moving platform drives the workpiece for motion processing.

一种振镜和喷嘴自由复合分离激光加工方法,该方法基于一种振镜和喷嘴自由复合分离激光加工装备,并且包括以下加工方法:A galvanometer and nozzle free composite separation laser processing method, the method is based on a galvanometer and nozzle free composite separation laser processing equipment, and includes the following processing methods:

振镜平台复合加工:运动平台带动工件进行运动加工,同时,喷嘴复合至所述场镜的正下方,激光素通过振镜控制方向,由场镜聚焦后再通过喷嘴,激光束在喷嘴的加工范围内对运动平台上的工件进行加工激光素通过振镜控制方向,由场镜聚焦后再通过喷嘴,激光束在喷嘴的加工范围内对运动平台上的工件进行加工。Combined processing of the galvanometer platform: the moving platform drives the workpiece for motion processing. At the same time, the nozzle is combined to the right under the field mirror. The laser pixel controls the direction through the galvanometer, and is focused by the field mirror and then passes through the nozzle. The laser beam is processed in the nozzle. The workpiece on the moving platform is processed within the scope. The direction of the laser is controlled by the galvanometer, focused by the field lens and then passed through the nozzle. The laser beam processes the workpiece on the moving platform within the processing range of the nozzle.

采用上述技术方案后,本发明具有以下积极的效果:After adopting above-mentioned technical scheme, the present invention has following positive effect:

本发明提供一种振镜和喷嘴自由复合分离激光加工装备及方法,采用振镜和喷嘴自由复合分离的结构和控制形式,将振镜速度快、惯量小、精度高的优点与喷嘴气体辅助加工的优势相结合。加工微小结构时通过振镜在喷嘴范围内扫描,避免了通过大惯量机台的运动进行微小结构加工的难点,同时兼具气体辅助加工的优势。The invention provides a laser processing equipment and method for the free composite separation of the galvanometer and the nozzle, which adopts the structure and control form of the free composite separation of the galvanometer and the nozzle, and combines the advantages of high speed, small inertia, and high precision of the galvanometer with the gas-assisted processing of the nozzle. combination of advantages. When processing microstructures, the galvanometer scans within the nozzle range, avoiding the difficulty of microstructure processing through the motion of the large inertia machine, and at the same time, it has the advantages of gas-assisted processing.

进一步,该方法在上述优势的基础上,通过喷头分离机构实现喷嘴与振镜的分离,从而保留了振镜大范围加工、打标、划线的能力,解除了喷嘴对振镜加工能力的束缚。Further, on the basis of the above advantages, the method realizes the separation of the nozzle and the galvanometer through the nozzle separation mechanism, thereby retaining the ability of the galvanometer to process, mark and scribe in a large range, and release the nozzle from the shackles of the galvanometer processing ability. .

进一步,喷嘴上方采用高透光镜片的封闭密封结构,保证了激光能力不损失和喷嘴的密封要求,同时使得喷嘴结构小巧,同时高压气体对高透光镜片也有一定的冷却作用。Further, the closed sealing structure of the high-transmittance lens is adopted above the nozzle, which ensures that the laser capacity is not lost and the sealing requirements of the nozzle are not lost, and the nozzle structure is small. At the same time, the high-pressure gas also has a certain cooling effect on the high-transmission lens.

本发明提出的一种振镜和喷嘴自由复合分离激光加工方法,在上述加工装备的基础上,提出了应用于不同加工条件的复合分离加工控制方式,使上述加工装备的能力得到充分应用和发挥。The present invention proposes a free composite separation laser processing method of a galvanometer and a nozzle. On the basis of the above processing equipment, a composite separation processing control method applied to different processing conditions is proposed, so that the capabilities of the above processing equipment can be fully applied and brought into play. .

综上所述,本发明提出的一种振镜和喷嘴自由复合分离激光加工装备及方法,设计了振镜与喷嘴的自由复合分离加工装备和加工方法,使振镜与喷嘴的加工优势相结合,并且保留了各自的加工能力,因此具有更优越的加工能力。To sum up, the present invention proposes a laser processing equipment and method for the free composite separation of the galvanometer and the nozzle, and designs the free composite separation processing equipment and processing method of the galvanometer and the nozzle, so as to combine the processing advantages of the galvanometer and the nozzle. , and retain their respective processing capabilities, so they have superior processing capabilities.

附图说明Description of drawings

为了使本发明的内容更容易被清楚地理解,下面根据具体实施例并结合附图,对本发明作进一步详细的说明,其中In order to make the content of the present invention easier to understand clearly, the present invention will be described in further detail below according to specific embodiments and in conjunction with the accompanying drawings, wherein

图1为本发明的结构示意图。FIG. 1 is a schematic structural diagram of the present invention.

图中:振镜1、场镜2、喷嘴3、喷嘴运动机构4、运动平台5、工件6、喷嘴抽离机构41、喷嘴高度调节机构42、进气口31、喷气口32、高透光镜片7。In the figure: galvanometer 1, field mirror 2, nozzle 3, nozzle motion mechanism 4, motion platform 5, workpiece 6, nozzle extraction mechanism 41, nozzle height adjustment mechanism 42, air inlet 31, jet port 32, high light transmission Lens 7.

具体实施方式Detailed ways

为使本发明实施例的目的、技术方案和优点更加清楚,下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例是本发明一部分实施例,而不是全部的实施例。通常在此处附图中描述和示出的本发明实施例的组件可以以各种不同的配置来布置和设计。In order to make the purposes, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments These are some embodiments of the present invention, but not all embodiments. The components of the embodiments of the invention generally described and illustrated in the drawings herein may be arranged and designed in a variety of different configurations.

因此,以下对在附图中提供的本发明的实施例的详细描述并非旨在限制要求保护的本发明的范围,而是仅仅表示本发明的选定实施例。基于本发明中的实施例,本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。Thus, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the invention as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

应注意到:相似的标号和字母在下面的附图中表示类似项,因此,一旦某一项在一个附图中被定义,则在随后的附图中不需要对其进行进一步定义和解释。It should be noted that like numerals and letters refer to like items in the following figures, so once an item is defined in one figure, it does not require further definition and explanation in subsequent figures.

在本发明的描述中,需要说明的是,术语“中心”、“上”、“下”、“左”、“右”、“竖直”、“水平”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,或者是该发明产品使用时惯常摆放的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。此外,术语“第一”、“第二”、“第三”等仅用于区分描述,而不能理解为指示或暗示相对重要性。In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship that the product of the invention is usually placed in use, only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying The device or element referred to must have a particular orientation, be constructed and operate in a particular orientation, and therefore should not be construed as limiting the invention. Furthermore, the terms "first", "second", "third", etc. are only used to differentiate the description and should not be construed as indicating or implying relative importance.

此外,术语“水平”、“竖直”、“悬垂”等术语并不表示要求部件绝对水平或悬垂,而是可以稍微倾斜。如“水平”仅仅是指其方向相对“竖直”而言更加水平,并不是表示该结构一定要完全水平,而是可以稍微倾斜。Furthermore, the terms "horizontal", "vertical", "overhanging" etc. do not imply that a component is required to be absolutely horizontal or overhang, but rather may be slightly inclined. For example, "horizontal" only means that its direction is more horizontal than "vertical", it does not mean that the structure must be completely horizontal, but can be slightly inclined.

在本发明的描述中,还需要说明的是,除非另有明确的规定和限定,术语“设置”、“安装”、“相连”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通。对于本领域的普通技术人员而言,可以具体情况理解上述术语在本发明中的具体含义。In the description of the present invention, it should also be noted that, unless otherwise expressly specified and limited, the terms "arranged", "installed", "connected" and "connected" should be understood in a broad sense, for example, it may be a fixed connection, It can also be a detachable connection or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or the internal communication between the two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood in specific situations.

(实施例1)(Example 1)

见图1,本发明提供一种振镜和喷嘴自由复合分离激光加工装备,具有振镜1,所述振镜1用以控制激光束的方向;Referring to Fig. 1, the present invention provides a galvanometer and nozzle free composite separation laser processing equipment, which has a galvanometer 1, and the galvanometer 1 is used to control the direction of the laser beam;

场镜2,所述场镜2用以将通过所述振镜1的已经控制好方向的激光束聚焦;Field lens 2, the field lens 2 is used to focus the laser beam whose direction has been controlled through the galvanometer 1;

喷嘴3,所述喷嘴3可复合分离地切换于所述场镜2的正下方并可让经过所述场镜2聚焦后的激光束通过时进行气体辅助;Nozzle 3, the nozzle 3 can be switched directly below the field lens 2 and can be assisted by gas when the laser beam focused by the field lens 2 passes through;

喷嘴运动机构4,所述喷嘴运动机构4用以辅助所述喷嘴3复合分离地切换于所述场镜2的下方;A nozzle moving mechanism 4, the nozzle moving mechanism 4 is used to assist the nozzle 3 to switch below the field lens 2 in a composite and separate manner;

运动平台5,所述运动平台5用以放置工件6。The moving platform 5 is used for placing the workpiece 6 .

所述喷嘴3具有The nozzle 3 has

进气口31,所述进气口31用以输入气体;an air inlet 31, the air inlet 31 is used to input gas;

喷气口32,所述喷气口32用以喷出气体,所述喷气口32工作时位于所述场镜2的正下方。The air injection port 32 is used for ejecting gas, and the air injection port 32 is located directly below the field lens 2 during operation.

喷嘴3的形状和喷嘴口32尺寸参照一般激光切割头喷嘴,在此不做限定。The shape of the nozzle 3 and the size of the nozzle orifice 32 refer to general laser cutting head nozzles, which are not limited here.

所述喷嘴3背离所述喷气口32的一侧密封设有高透光镜片7,所述高透光镜片7用以保证经过所述场镜2聚焦后的激光束的高透过性。即高透光镜片7与喷嘴3的上方采用封闭密封结构,保证了激光能力不损失和喷嘴3的密封要求,同时使得喷嘴3结构小巧,同时高压气体对高透光镜片7 也有一定的冷却作用。The side of the nozzle 3 facing away from the jet port 32 is sealed with a high-transparency lens 7 , and the high-transmittance lens 7 is used to ensure the high transmittance of the laser beam focused by the field lens 2 . That is to say, a closed sealing structure is adopted on the top of the high light transmission lens 7 and the nozzle 3, which ensures that the laser power is not lost and the sealing requirements of the nozzle 3, and at the same time, the structure of the nozzle 3 is small, and the high pressure gas also has a certain cooling effect on the high light transmission lens 7. .

该实施例为本发明的核心技术方案,振镜1与喷嘴3采用分离设计,喷嘴运动机构4控制喷嘴3的位置在场镜2正下方和场镜2外自由快速切换;当喷嘴3位于场镜2外时,通过振镜1控制激光束的方向,使聚焦的光斑在场镜2加工范围内移动,完成激光划线、打标、清洗等工作;当喷嘴3位于场镜2正下方时,喷嘴3喷射高压气体,振镜1控制聚焦光斑在喷嘴3的喷嘴口32范围内进行画圆、画线、旋切等运动,实现气体辅助的激光打孔、切割、刻槽等工作;喷嘴3的自由复合分离通过计算机按照一定方法和加工条件进行控制。This embodiment is the core technical solution of the present invention. The galvanometer 1 and the nozzle 3 are designed separately, and the nozzle movement mechanism 4 controls the position of the nozzle 3 to switch freely and quickly between the field lens 2 and outside the field lens 2. When the nozzle 3 is located in the field lens 2, the direction of the laser beam is controlled by the galvanometer 1, so that the focused spot moves within the processing range of the field lens 2 to complete laser scribing, marking, cleaning, etc.; when the nozzle 3 is located directly under the field lens 2, the nozzle 3. High-pressure gas is injected, and the galvanometer 1 controls the focusing spot to perform circles, lines, rotary cutting and other movements within the range of the nozzle opening 32 of the nozzle 3, so as to realize gas-assisted laser drilling, cutting, grooving, etc.; Free composite separation is controlled by computer according to certain methods and processing conditions.

(实施例2)(Example 2)

本实施例为喷嘴运动机构4的一种实施方式,所述喷嘴运动机构4具有This embodiment is an implementation of the nozzle moving mechanism 4, and the nozzle moving mechanism 4 has

喷嘴抽离机构41,所述喷嘴抽离机构41用以将所述喷嘴3复合至所述场镜2的正下方或分离开所述场镜2的正下方;Nozzle extraction mechanism 41 , the nozzle extraction mechanism 41 is used for recombining the nozzle 3 directly below the field lens 2 or separating it from directly below the field lens 2 ;

喷嘴高度调节机构42,所述喷嘴高度调节机构42连接于所述喷嘴抽离机构41,所述喷嘴高度调节机构42用以调节所述喷嘴3距离所述工件6的高度。The nozzle height adjustment mechanism 42 is connected to the nozzle extraction mechanism 41 , and the nozzle height adjustment mechanism 42 is used to adjust the height of the nozzle 3 from the workpiece 6 .

所述喷嘴抽离机构41和所述喷嘴高度调节机构42使用伺服电机驱动。伺服电机使用技术在现有比较常见,其安装、使用以及配套的电脑控制系统在此不多做详述,此处应不影响本领域技术人员的理解。The nozzle extraction mechanism 41 and the nozzle height adjustment mechanism 42 are driven by servo motors. Servo motor use technology is relatively common in the present, and its installation, use and supporting computer control system will not be described in detail here, which should not affect the understanding of those skilled in the art.

喷嘴抽离机构41和喷嘴高度调节机构42通过电脑控制系统统一控制,用于实现喷嘴3复合至所述场镜2的正下方或分离开所述场镜2的正下方。The nozzle extraction mechanism 41 and the nozzle height adjustment mechanism 42 are uniformly controlled by the computer control system, so as to realize the combination of the nozzles 3 to be directly below the field lens 2 or to be separated from the directly below the field lens 2 .

本发明还提供一种振镜和喷嘴自由复合分离激光加工方法,该方法基于一种振镜和喷嘴自由复合分离激光加工装备,并且包括以下加工方法:The present invention also provides a laser processing method for free recombination and separation of a galvanometer and a nozzle. The method is based on a laser processing equipment for free recombination and separation of a galvanometer and a nozzle, and includes the following processing methods:

振镜独立加工A:运动平台5不动,喷嘴3复合至所述场镜2的正下方,激光素通过振镜1控制方向,由场镜2聚焦后再通过喷嘴3,激光束在喷嘴 3的加工范围内对运动平台5上的工件6进行加工;Galvanometer independent processing A: The moving platform 5 does not move, the nozzle 3 is compounded directly under the field mirror 2, the laser pixel controls the direction through the galvanometer 1, is focused by the field mirror 2 and then passes through the nozzle 3, and the laser beam is in the nozzle 3 The workpiece 6 on the motion platform 5 is processed within the processing range;

振镜独立加工B:运动平台5不动,喷嘴3分离开所述场镜2的正下方,激光素通过振镜1控制方向,由场镜2聚焦,然后激光束在场镜2的加工范围内对运动平台5上的工件6进行加工。Galvanometer independent processing B: the moving platform 5 does not move, the nozzle 3 is separated from the directly below the field mirror 2, the direction of the laser is controlled by the galvanometer 1, and is focused by the field mirror 2, and then the laser beam is within the processing range of the field mirror 2 The workpiece 6 on the moving platform 5 is processed.

平台独立加工:振镜1不动,喷嘴3复合至所述场镜2的正下方,激光素通过振镜1后由场镜2聚焦,再通过喷嘴3,运动平台5带动工件6进行运动加工。Platform independent processing: the galvanometer 1 does not move, the nozzle 3 is compounded directly under the field mirror 2, the laser pixel passes through the galvanometer 1 and is focused by the field mirror 2, and then passes through the nozzle 3, and the motion platform 5 drives the workpiece 6 for motion processing .

振镜平台复合加工:运动平台5带动工件6进行运动加工,同时,喷嘴3复合至所述场镜2的正下方,激光素通过振镜1控制方向,由场镜2 聚焦后再通过喷嘴3,激光束在喷嘴3的加工范围内对运动平台5上的工件 6进行加工激光素通过振镜1控制方向,由场镜2聚焦后再通过喷嘴3,激光束在喷嘴3的加工范围内对运动平台5上的工件6进行加工。Combined processing of the galvanometer platform: the moving platform 5 drives the workpiece 6 to perform motion processing. At the same time, the nozzle 3 is combined to the right under the field mirror 2, and the laser is controlled by the galvanometer 1. The direction is focused by the field mirror 2 and then passes through the nozzle 3 , the laser beam processes the workpiece 6 on the moving platform 5 within the processing range of the nozzle 3. The laser pixel controls the direction through the galvanometer 1, is focused by the field lens 2 and then passes through the nozzle 3. The laser beam is within the processing range of the nozzle 3. The workpiece 6 on the moving platform 5 is processed.

需要注意的是,以上的加工方法选取根据材料厚度、加工精度、材料材质、加工图形进行综合应用,电脑控制系统根据选取的加工方法自动控制喷嘴3位置和高压气体喷射以辅助加工。It should be noted that the above processing methods are selected for comprehensive application according to material thickness, processing accuracy, material material, and processing graphics. The computer control system automatically controls the position of nozzle 3 and high-pressure gas injection according to the selected processing method to assist processing.

以上所述的具体实施例,对本发明的目的、技术方案和有益效果进行了进一步详细说明,所应理解的是,以上所述仅为本发明的具体实施例而已,并不用于限制本发明,凡在本发明的精神和原则之内,所做的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The specific embodiments described above further describe the purpose, technical solutions and beneficial effects of the present invention in further detail. It should be understood that the above descriptions are only specific embodiments of the present invention, and are not intended to limit the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims (8)

1.一种振镜和喷嘴自由复合分离激光加工装备,其特征在于:具有振镜(1),所述振镜(1)用以控制激光束的方向;1. A galvanometer and nozzle free composite separation laser processing equipment, is characterized in that: have galvanometer (1), and described galvanometer (1) is in order to control the direction of laser beam; 场镜(2),所述场镜(2)用以将通过所述振镜(1)的已经控制好方向的激光束聚焦;a field lens (2), the field lens (2) is used to focus the laser beam whose direction has been controlled through the galvanometer (1); 喷嘴(3),所述喷嘴(3)可复合分离地切换于所述场镜(2)的正下方并可让经过所述场镜(2)聚焦后的激光束通过时进行气体辅助;a nozzle (3), the nozzle (3) can be switched directly below the field lens (2) in a composite and separate manner and can perform gas assist when the laser beam focused by the field lens (2) passes through; 喷嘴运动机构(4),所述喷嘴运动机构(4)用以辅助所述喷嘴(3)复合分离地切换于所述场镜(2)的下方;a nozzle moving mechanism (4), the nozzle moving mechanism (4) is used to assist the nozzle (3) to switch below the field lens (2) in a composite and separate manner; 运动平台(5),所述运动平台(5)用以放置工件(6)。A moving platform (5) is used for placing the workpiece (6). 2.根据权利要求1所述的一种振镜和喷嘴自由复合分离激光加工装备,其特征在于:所述喷嘴运动机构(4)具有2. A kind of galvanometer and nozzle free composite separation laser processing equipment according to claim 1, is characterized in that: described nozzle motion mechanism (4) has 喷嘴抽离机构(41),所述喷嘴抽离机构(41)用以将所述喷嘴(3)复合至所述场镜(2)的正下方或分离开所述场镜(2)的正下方;Nozzle extraction mechanism (41), the nozzle extraction mechanism (41) is used for recombining the nozzle (3) directly below the field lens (2) or separating it from the front side of the field lens (2). below; 喷嘴高度调节机构(42),所述喷嘴高度调节机构(42)连接于所述喷嘴抽离机构(41),所述喷嘴高度调节机构(42)用以调节所述喷嘴(3)距离所述工件(6)的高度。A nozzle height adjustment mechanism (42), the nozzle height adjustment mechanism (42) is connected to the nozzle extraction mechanism (41), and the nozzle height adjustment mechanism (42) is used to adjust the distance from the nozzle (3) to the Height of workpiece (6). 3.根据权利要求2所述的一种振镜和喷嘴自由复合分离激光加工装备,其特征在于:所述喷嘴抽离机构(41)和所述喷嘴高度调节机构(42)使用伺服电机驱动。3 . The laser processing equipment according to claim 2 , wherein the nozzle extraction mechanism ( 41 ) and the nozzle height adjustment mechanism ( 42 ) are driven by servo motors. 4 . 4.根据权利要求1所述的一种振镜和喷嘴自由复合分离激光加工装备,其特征在于:所述喷嘴(3)具有4. A kind of galvanometer and nozzle free composite separation laser processing equipment according to claim 1, is characterized in that: described nozzle (3) has 进气口(31),所述进气口(31)用以输入气体;an air inlet (31), the air inlet (31) is used to input gas; 喷气口(32),所述喷气口(32)用以喷出气体,所述喷气口(32)工作时位于所述场镜(2)的正下方。an air injection port (32), the air injection port (32) is used for ejecting gas, and the air injection port (32) is located directly below the field lens (2) during operation. 5.根据权利要求4所述的一种振镜和喷嘴自由复合分离激光加工装备,其特征在于:所述喷嘴(3)背离所述喷气口(32)的一侧密封设有高透光镜片(7),所述高透光镜片(7)用以保证经过所述场镜(2)聚焦后的激光束的高透过性。5. The laser processing equipment for free composite separation of a galvanometer and a nozzle according to claim 4, characterized in that: the side of the nozzle (3) facing away from the jet port (32) is sealed with a high-transmittance lens (7), the high transmittance lens (7) is used to ensure the high transmittance of the laser beam focused by the field lens (2). 6.一种振镜和喷嘴自由复合分离激光加工方法,其特征在于:该方法基于权利要求1-7任一所述的一种振镜和喷嘴自由复合分离激光加工装备,并且包括以下加工方法:6. A galvanometer and nozzle free composite separation laser processing method is characterized in that: the method is based on any one of claims 1-7 described a kind of galvanometer and nozzle free composite separation laser processing equipment, and comprises the following processing methods : 振镜独立加工A:运动平台(5)不动,喷嘴(3)复合至所述场镜(2)的正下方,激光素通过振镜(1)控制方向,由场镜(2)聚焦后再通过喷嘴(3),激光束在喷嘴(3)的加工范围内对运动平台(5)上的工件(6)进行加工;Galvanometer independent processing A: The moving platform (5) does not move, the nozzle (3) is compounded directly below the field lens (2), the laser pixel is controlled by the galvanometer (1) and focused by the field lens (2). Then through the nozzle (3), the laser beam processes the workpiece (6) on the moving platform (5) within the processing range of the nozzle (3); 振镜独立加工B:运动平台(5)不动,喷嘴(3)分离开所述场镜(2)的正下方,激光素通过振镜(1)控制方向,由场镜(2)聚焦,然后激光束在场镜(2)的加工范围内对运动平台(5)上的工件(6)进行加工。Galvanometer independent processing B: the moving platform (5) does not move, the nozzle (3) is separated from directly below the field mirror (2), the laser pixel is controlled by the galvanometer (1), and focused by the field mirror (2), The laser beam then processes the workpiece (6) on the moving platform (5) within the processing range of the field lens (2). 7.一种振镜和喷嘴自由复合分离激光加工方法,其特征在于:该方法基于权利要求1-7任一所述的一种振镜和喷嘴自由复合分离激光加工装备,并且包括以下加工方法:7. A galvanometer and nozzle free composite separation laser processing method is characterized in that: the method is based on any one of claims 1-7 described a kind of galvanometer and nozzle free composite separation laser processing equipment, and comprises the following processing methods : 平台独立加工:振镜(1)不动,喷嘴(3)复合至所述场镜(2)的正下方,激光素通过振镜(1)后由场镜(2)聚焦,再通过喷嘴(3),运动平台(5)带动工件(6)进行运动加工。The platform is independently processed: the galvanometer (1) does not move, the nozzle (3) is compounded directly under the field lens (2), the laser pixel passes through the galvanometer (1) and is focused by the field lens (2), and then passes through the nozzle ( 3), the motion platform (5) drives the workpiece (6) for motion processing. 8.一种振镜和喷嘴自由复合分离激光加工方法,其特征在于:该方法基于权利要求1-7任一所述的一种振镜和喷嘴自由复合分离激光加工装备,并且包括以下加工方法:8. A galvanometer and nozzle free composite separation laser processing method is characterized in that: the method is based on any one of claims 1-7 described a kind of galvanometer and nozzle free composite separation laser processing equipment, and comprises the following processing methods : 振镜平台复合加工:运动平台(5)带动工件(6)进行运动加工,同时,喷嘴(3)复合至所述场镜(2)的正下方,激光素通过振镜(1)控制方向,由场镜(2)聚焦后再通过喷嘴(3),激光束在喷嘴(3)的加工范围内对运动平台(5)上的工件(6)进行加工激光素通过振镜(1)控制方向,由场镜(2)聚焦后再通过喷嘴(3),激光束在喷嘴(3)的加工范围内对运动平台(5)上的工件(6)进行加工。Combined processing of the galvanometer platform: the moving platform (5) drives the workpiece (6) for motion processing, and at the same time, the nozzle (3) is combined to directly below the field mirror (2), and the laser element controls the direction through the galvanometer (1), Focused by the field lens (2) and then passed through the nozzle (3), the laser beam processes the workpiece (6) on the moving platform (5) within the processing range of the nozzle (3). The direction of the laser beam is controlled by the galvanometer (1). is focused by the field lens (2) and then passes through the nozzle (3), and the laser beam processes the workpiece (6) on the moving platform (5) within the processing range of the nozzle (3).
CN202010389753.1A 2020-05-11 2020-05-11 A kind of laser processing equipment and method for free composite separation of galvanometer and nozzle Withdrawn CN111438448A (en)

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Publication number Priority date Publication date Assignee Title
US6294754B1 (en) * 1999-01-14 2001-09-25 Mitsubishi Heavy Industries, Ltd. Laser beam machining head
CN1255411A (en) * 2000-01-07 2000-06-07 清华大学 Split-type coaxial powder-feeding nozzle for laser fusion and coating
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