CN111438133A - Chromium plate cleaning jig and cleaning method - Google Patents
Chromium plate cleaning jig and cleaning method Download PDFInfo
- Publication number
- CN111438133A CN111438133A CN202010362561.1A CN202010362561A CN111438133A CN 111438133 A CN111438133 A CN 111438133A CN 202010362561 A CN202010362561 A CN 202010362561A CN 111438133 A CN111438133 A CN 111438133A
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- Prior art keywords
- cleaning
- chromium plate
- ultrasonic
- plate
- chromium
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 238000004140 cleaning Methods 0.000 title claims abstract description 161
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 title claims abstract description 128
- 229910052804 chromium Inorganic materials 0.000 title claims abstract description 105
- 239000011651 chromium Substances 0.000 title claims abstract description 105
- 238000000034 method Methods 0.000 title claims abstract description 25
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 65
- 238000004506 ultrasonic cleaning Methods 0.000 claims abstract description 64
- 239000007788 liquid Substances 0.000 claims abstract description 49
- 239000008367 deionised water Substances 0.000 claims abstract description 45
- 229910021641 deionized water Inorganic materials 0.000 claims abstract description 45
- 238000003756 stirring Methods 0.000 claims abstract description 7
- 238000011068 loading method Methods 0.000 claims abstract description 5
- 239000000463 material Substances 0.000 claims abstract description 4
- 238000002791 soaking Methods 0.000 claims abstract description 4
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 20
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 20
- 238000002156 mixing Methods 0.000 claims description 9
- 230000002378 acidificating effect Effects 0.000 claims description 7
- 238000005406 washing Methods 0.000 claims description 6
- 239000002351 wastewater Substances 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 4
- 238000011084 recovery Methods 0.000 claims description 4
- 229910001220 stainless steel Inorganic materials 0.000 claims description 4
- 239000010935 stainless steel Substances 0.000 claims description 4
- 238000001035 drying Methods 0.000 claims description 2
- 230000003213 activating effect Effects 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 9
- 230000007547 defect Effects 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000009931 harmful effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 210000003205 muscle Anatomy 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
Landscapes
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The embodiment of the invention discloses a chromium plate cleaning jig and a cleaning method, wherein the chromium plate cleaning jig comprises: the ultrasonic cleaning tank is used for containing deionized water, and an ultrasonic generating device immersed by the deionized water is arranged in the ultrasonic cleaning tank; a cleaning container made of a material which does not chemically react with the cleaning liquid for cleaning the chromium plate, the cleaning liquid for cleaning the chromium plate is placed in the ultrasonic cleaning tank, and an opening at the top end of the cleaning container is set to be higher than the liquid level of the deionized water in the ultrasonic cleaning tank; and the special chromium plate box is used for loading the chromium plate to be cleaned and then soaking the chromium plate in the cleaning liquid in the cleaning container, and the box wall of the special chromium plate box is provided with meshes for the circulation of the cleaning liquid. According to the embodiment of the invention, the ultrasonic wave generating device in the ultrasonic cleaning tank generates the ultrasonic wave to stir the cleaning liquid to clean the chromium plate, so that the manual operation can be effectively reduced, the manual labor intensity is reduced, the damage to operators is avoided, and the cleaning efficiency and the cleaning effect are improved.
Description
Technical Field
The embodiment of the invention relates to the technical field of chromium plate cleaning, in particular to a chromium plate cleaning jig and a chromium plate cleaning method.
Background
The existing chromium plate cleaning method has the defects that firstly, the cleaning efficiency is low, the chromium plate needs to be manually wiped one by one, the time consumption is long, the labor intensity of operators is high, the cleaning solution is corrosive and easily causes certain damage to a human body, and in addition, the existing chromium plate cleaning method has the defects that the chromium plate is difficult to clean according to the L ED industrial characteristic, the size of the chromium plate is designed to be 3-5 inches, the size is large, the cleaning effect of the second chromium plate is poor, and the chromium plate is difficult to clean.
Disclosure of Invention
The technical problem to be solved by the embodiment of the invention is to provide a chromium plate cleaning jig to improve the chromium plate cleaning efficiency and effect and avoid the damage to operators.
The embodiment of the invention further aims to solve the technical problem of providing a chromium plate cleaning method so as to improve the chromium plate cleaning efficiency and effect and avoid damage to operators.
In order to solve the above technical problems, an embodiment of the present invention first provides the following technical solutions: a chromium plate cleaning jig comprises:
the ultrasonic cleaning tank is used for containing deionized water, and an ultrasonic generating device immersed by the deionized water is also arranged in the ultrasonic cleaning tank;
a cleaning container made of a material which does not chemically react with the cleaning liquid for cleaning the chromium plate, the cleaning liquid for cleaning the chromium plate is placed in the ultrasonic cleaning tank, and the top opening of the cleaning container is set to be higher than the liquid level of the deionized water in the ultrasonic cleaning tank; and
the special chromium plate box is used for loading a chromium plate to be cleaned and then soaking the chromium plate in the cleaning liquid in the cleaning container, and the box wall of the special chromium plate box is provided with meshes for the circulation of the cleaning liquid.
Furthermore, the inner surfaces of the two opposite side walls of the chromium plate special box are respectively and correspondingly provided with a plurality of parallel vertical convex ribs for limiting each loaded chromium plate.
Further, the ultrasonic generating device is arranged at the bottom corner of the ultrasonic cleaning tank.
Further, the ultrasonic cleaning tank is made of stainless steel and is provided with a water inlet pipe orifice and a water outlet pipe orifice.
Further, the cleaning container is a glass container, and the cleaning liquid is an acidic cleaning liquid formed by mixing sulfuric acid and hydrogen peroxide.
On the other hand, the embodiment of the invention also provides a chromium plate cleaning method based on any one of the chromium plate cleaning jigs, which comprises the following steps:
placing a cleaning container filled with a first amount of cleaning liquid into an ultrasonic cleaning tank filled with a second amount of deionized water, wherein the first amount enables the cleaning liquid not to overflow from the cleaning container in the cleaning process, and the second amount enables the liquid level of the deionized water to be lower than the top opening of the cleaning container and higher than the top surface of an ultrasonic generating device in the ultrasonic cleaning tank;
immersing a special chromium plate box loaded with a chromium plate to be cleaned into cleaning liquid in a cleaning container, wherein the top opening of the cleaning container is higher than the liquid level of deionized water;
and starting the ultrasonic wave generating device to generate ultrasonic waves to stir the cleaning liquid to clean the chromium plate in the chromium plate special box for a first preset time.
Further, after the ultrasonic wave generating device is started to generate ultrasonic waves to stir the cleaning solution to clean the chrome plate in the chrome plate special box for a preset time, the method further comprises:
and taking out the chromium plate, placing the chromium plate in the ultrasonic cleaning tank, and washing the chromium plate for a second preset time by using the deionized water.
Further, the method further comprises the following steps of taking out the chromium plate, placing the chromium plate in the ultrasonic cleaning tank, and after the chromium plate is washed by the deionized water for a second preset time, wherein the method further comprises the following steps:
and drying the washed chromium plate to obtain a dried chromium plate.
Further, the cleaning solution is an acidic cleaning solution prepared by mixing sulfuric acid and hydrogen peroxide.
Furthermore, a water inlet pipe orifice of the ultrasonic cleaning tank is connected with a deionized water supply device, a water outlet pipe orifice is connected with a wastewater recovery device, and deionized water in the ultrasonic cleaning tank is flowing running water with one end being fed and the other end being discharged.
The embodiment of the invention has the beneficial effects that: according to the embodiment of the invention, the cleaning container containing the cleaning solution is placed in the ultrasonic cleaning tank containing the deionized water, the special chromium plate box containing the chromium plate to be cleaned is immersed in the cleaning solution, and the ultrasonic wave generating device in the ultrasonic cleaning tank generates ultrasonic waves to stir the cleaning solution to clean the chromium plate, so that the manual operation can be effectively reduced, the manual labor intensity is reduced, the damage to operators is avoided, and the cleaning efficiency and the cleaning effect of the chromium plate are improved; in addition, the cleaning container is placed in deionized water, so that the conduction speed of ultrasonic waves can be well improved by utilizing the deionized water; the cleaning liquid is arranged in the cleaning container, is not contacted with the ultrasonic cleaning tank and can not corrode the ultrasonic cleaning tank and the ultrasonic generating device.
Drawings
FIG. 1 is a schematic structural view of an alternative embodiment of a chromium plate cleaning jig of the present invention.
FIG. 2 is a schematic structural view of a dedicated chrome plate cassette in an alternative embodiment of the chrome plate cleaning jig of the present invention.
FIG. 3 is a schematic flow chart showing the steps of an alternative embodiment of the method for cleaning a chromium plate according to the present invention.
Detailed Description
Referring to fig. 1 to 2, an alternative embodiment of the present invention provides a chrome plate cleaning tool, including:
an ultrasonic cleaning tank 10 for containing deionized water 12, wherein an ultrasonic generating device 14 (shown by a dotted line in fig. 1) immersed by the deionized water is further arranged in the ultrasonic cleaning tank 10;
a cleaning container 20 made of a material which does not chemically react with the cleaning solution 22 for cleaning the chrome plate 40, for containing the cleaning solution 22 for cleaning the chrome plate 40 and placing the cleaning solution 22 in the ultrasonic cleaning tank 10, wherein the top opening of the cleaning container 20 is set to be higher than the liquid level of the deionized water 12 in the ultrasonic cleaning tank 10; and
the chromium plate special box 30 is used for loading a chromium plate 40 to be cleaned and then soaking the chromium plate in the cleaning liquid 22 in the cleaning container 20, and the box wall of the chromium plate special box 30 is provided with meshes 32 for the circulation of the cleaning liquid 22.
In the embodiment of the invention, the cleaning container 20 containing the cleaning solution 22 is placed into the ultrasonic cleaning tank 10 containing the deionized water 12, the special chromium plate box 30 loaded with the chromium plate 40 to be cleaned is immersed into the cleaning solution 22, and the ultrasonic wave generating device 14 in the ultrasonic cleaning tank 10 generates ultrasonic waves to stir the cleaning solution 22 to clean the chromium plate 40, so that the manual operation can be effectively reduced, the manual labor intensity is reduced, the damage to operators is avoided, and the cleaning efficiency and the cleaning effect of the chromium plate 40 are improved; in addition, the cleaning container 20 is placed in the deionized water 12, so that the conduction speed of the ultrasonic waves can be well improved by using the deionized water 12; the cleaning liquid 22 is contained in the cleaning vessel 20, and does not contact the ultrasonic cleaning tank 10 and corrode the ultrasonic cleaning tank 10 and the ultrasonic generator 14.
In an alternative embodiment of the present invention, as shown in fig. 2, a plurality of parallel vertical ribs 34 for limiting each loaded chrome plate 40 are correspondingly disposed on the inner surfaces of the two opposite side walls of the chrome plate dedicated box 30. This embodiment corresponds through the internal surface at the relative both sides wall of the special box of chromium version and sets up vertical protruding muscle 34, can support to lean on the side of loading to the special box 30 of chromium version 40 and carry out fine injecing to chromium version 40, avoids chromium version 40 to rock in the special box 30 of chromium version.
In an alternative embodiment of the present invention, as shown in fig. 1, the ultrasonic wave generator 14 is disposed at the bottom corner of the ultrasonic cleaning tank 10. In the present embodiment, the ultrasonic generator 14 is disposed at the bottom corner of the ultrasonic cleaning tank 10, so as to avoid interference to the cleaning container 20 placed in the ultrasonic cleaning tank 10, and the cleaning container 20 with a larger volume can be used, thereby effectively increasing the number of washable chrome plates in one batch.
In another alternative embodiment of the present invention, the ultrasonic cleaning tank 10 is made of stainless steel and is provided with a water inlet pipe 16 and a water outlet pipe 18. In this embodiment, the ultrasonic cleaning tank 10 is made of stainless steel, so that the ultrasonic cleaning tank has better structural strength and corrosion resistance, and the water inlet pipe 16 and the water outlet pipe 18 are provided, so that the deionized water 12 can be conveniently injected into the ultrasonic cleaning tank 10 and the used wastewater can be discharged.
In an optional embodiment of the present invention, the cleaning container 20 is a glass container, and the cleaning liquid 22 is an acidic cleaning liquid formed by mixing sulfuric acid and hydrogen peroxide. In the embodiment, the glass container is used as the cleaning container 20, so that no chemical reaction occurs with common acidic cleaning solution, and the influence on the conduction of ultrasonic waves is small; and the cleaning liquid 22 formed by mixing the sulfuric acid and the hydrogen peroxide is adopted, so that the raw material cost is relatively low, and the cleaning effect is good.
On the other hand, another embodiment of the present invention further provides a method for cleaning a chrome plate based on any one of the above mentioned chrome plate cleaning jigs, as shown in fig. 3, including the following steps:
step S1, placing the cleaning container 20 filled with a first amount of cleaning solution 22 into the ultrasonic cleaning tank 10 filled with a second amount of deionized water 12, wherein the first amount prevents the cleaning solution 22 from overflowing from the cleaning container 20 during the cleaning process, and the second amount prevents the liquid level of the deionized water 12 from being lower than the top opening of the cleaning container 20 and higher than the top surface of the ultrasonic generating device 14 inside the ultrasonic cleaning tank 10;
step S2, immersing the chromium plate special box 30 loaded with the chromium plate 40 to be cleaned into the cleaning liquid 22 in the cleaning container 20, wherein the top opening of the cleaning container 20 is higher than the liquid level of the deionized water 12;
step S3, the ultrasonic wave generator 14 is activated to generate ultrasonic waves to agitate the cleaning liquid 22 to clean the chrome plate 40 in the chrome plate dedicated box 30 for a first preset time.
In the embodiment of the invention, the cleaning container 20 containing the cleaning solution 22 is placed into the ultrasonic cleaning tank 10 containing the deionized water 12, the special chromium plate box 30 loaded with the chromium plate 40 to be cleaned is immersed into the cleaning solution 22, and the ultrasonic wave generating device 14 in the ultrasonic cleaning tank 10 generates ultrasonic waves to stir the cleaning solution 22 to clean the chromium plate 40, so that the manual operation can be effectively reduced, the manual labor intensity is reduced, the damage to operators is avoided, and the cleaning efficiency and the cleaning effect of the chromium plate 40 are improved; in addition, the cleaning container 20 is placed in the deionized water 12, so that the conduction speed of the ultrasonic waves can be well improved by using the deionized water 12; the cleaning liquid 22 is contained in the cleaning vessel 20, and does not contact the ultrasonic cleaning tank 10 and corrode the ultrasonic cleaning tank 10 and the ultrasonic generator 14. In the specific implementation, ultrasonic cleaning is usually adopted for 5-10 minutes.
In another optional embodiment of the present invention, after the step S3, the method further includes:
step S4, taking out the chrome plate 40, placing the chrome plate in the ultrasonic cleaning tank 10, and washing the chrome plate 40 with the deionized water 12 for a second preset time.
The embodiment is through taking out the chromium plate 40 through ultrasonic cleaning and placing in ultrasonic cleaning tank 10 to utilize in ultrasonic cleaning tank 10 deionized water 12 washes chromium plate 40, can realize washing nearby, the simple operation. In practice, the washing is usually carried out for 3 to 5 minutes.
In yet another alternative embodiment of the present invention, after the step S4, the method further includes:
and step S5, airing the washed chromium plate 40 to obtain a dried chromium plate 40.
This embodiment is through the chromium version 40 that will wash dry the processing, and then can obtain dry chromium version 40, need not to adopt special stoving or air-dried device, the energy can be saved.
In an optional embodiment of the present invention, the cleaning solution is an acidic cleaning solution prepared by mixing sulfuric acid and hydrogen peroxide. In specific implementation, the mixing ratio of the sulfuric acid to the hydrogen peroxide can be sulfuric acid: hydrogen peroxide is 5: 1. in the embodiment, the cleaning liquid 22 formed by mixing the sulfuric acid and the hydrogen peroxide is adopted, so that the raw material cost is relatively low, and the cleaning effect is good.
In yet another alternative embodiment of the present invention, the inlet pipe 16 of the ultrasonic cleaning tank 10 is connected to an external deionized water supply device (not shown), the outlet pipe 18 is connected to an external waste water recovery device (not shown), and the deionized water 12 in the ultrasonic cleaning tank 10 is flowing live water which enters water at one end and exits water at the other end. This embodiment passes through ultrasonic cleaning tank 10's water inlet pipe mouth 16 with water outlet pipe mouth 18 connects outside deionized water feeding mechanism and waste water recovery device respectively, can make the interior deionized water 12 of ultrasonic cleaning tank 10 form mobile running water, can discharge the impurity that brings down and micro-cleaning solution when washing, avoids going ultrasonic cleaning tank 10 and causes harmful effects such as corruption.
The above description is only an embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications of equivalent structures and equivalent processes performed by the present specification and drawings, or directly or indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (10)
1. The utility model provides a chromium version washs tool which characterized in that includes:
the ultrasonic cleaning tank is used for containing deionized water, and an ultrasonic generating device immersed by the deionized water is also arranged in the ultrasonic cleaning tank;
a cleaning container made of a material which does not chemically react with the cleaning liquid for cleaning the chromium plate, the cleaning liquid for cleaning the chromium plate is placed in the ultrasonic cleaning tank, and the top opening of the cleaning container is set to be higher than the liquid level of the deionized water in the ultrasonic cleaning tank; and
the special chromium plate box is used for loading a chromium plate to be cleaned and then soaking the chromium plate in the cleaning liquid in the cleaning container, and the box wall of the special chromium plate box is provided with meshes for the circulation of the cleaning liquid.
2. A chromium plate cleaning jig according to claim 1, characterized in that the inner surfaces of the opposite side walls of the chromium plate dedicated box are respectively and correspondingly provided with a plurality of parallel vertical convex ribs for respectively limiting each loaded chromium plate.
3. A chromium plate cleaning jig according to claim 1, wherein the ultrasonic wave generating device is provided at a bottom corner of the ultrasonic cleaning tank.
4. A chromium plate cleaning jig according to claim 1, wherein the ultrasonic cleaning tank is made of stainless steel and is provided with a water inlet pipe orifice and a water outlet pipe orifice.
5. A chromium plate cleaning jig according to claim 1, characterized in that the cleaning vessel is a glass vessel, and the cleaning liquid is an acidic cleaning liquid obtained by mixing sulfuric acid and hydrogen peroxide.
6. A chromium plate cleaning method based on the chromium plate cleaning jig of any one of claims 1 to 5, characterized by comprising the steps of:
placing a cleaning container filled with a first amount of cleaning liquid into an ultrasonic cleaning tank filled with a second amount of deionized water, wherein the first amount enables the cleaning liquid not to overflow from the cleaning container in the cleaning process, and the second amount enables the liquid level of the deionized water to be lower than the top opening of the cleaning container and higher than the top surface of an ultrasonic generating device in the ultrasonic cleaning tank;
immersing a special chromium plate box loaded with a chromium plate to be cleaned into cleaning liquid in a cleaning container, wherein the top opening of the cleaning container is higher than the liquid level of deionized water;
and starting the ultrasonic wave generating device to generate ultrasonic waves to stir the cleaning liquid to clean the chromium plate in the chromium plate special box for a first preset time.
7. A method for cleaning a chrome plate according to claim 6, wherein said activating said ultrasonic wave generating means to generate ultrasonic waves to agitate said cleaning liquid for a predetermined time period to clean the chrome plate in said chrome plate exclusive box, further comprises:
and taking out the chromium plate, placing the chromium plate in the ultrasonic cleaning tank, and washing the chromium plate for a second preset time by using the deionized water.
8. A method for cleaning a chrome plate according to claim 7, wherein said chrome plate is taken out and placed in said ultrasonic cleaning tank, and after said chrome plate is rinsed with said deionized water for a second predetermined period of time, said method further comprises:
and drying the washed chromium plate to obtain a dried chromium plate.
9. A method for cleaning a chromium plate according to claim 6, wherein the cleaning liquid is an acidic cleaning liquid obtained by mixing sulfuric acid with hydrogen peroxide.
10. A chromium plate cleaning method according to claim 7, wherein the inlet port of the ultrasonic cleaning tank is connected to a deionized water supply device, the outlet port is connected to a waste water recovery device, and the deionized water in the ultrasonic cleaning tank is flowing running water which enters water at one end and exits water at the other end.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010362561.1A CN111438133A (en) | 2020-04-30 | 2020-04-30 | Chromium plate cleaning jig and cleaning method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010362561.1A CN111438133A (en) | 2020-04-30 | 2020-04-30 | Chromium plate cleaning jig and cleaning method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111438133A true CN111438133A (en) | 2020-07-24 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010362561.1A Pending CN111438133A (en) | 2020-04-30 | 2020-04-30 | Chromium plate cleaning jig and cleaning method |
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| Country | Link |
|---|---|
| CN (1) | CN111438133A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112044903A (en) * | 2020-08-18 | 2020-12-08 | 上海华力微电子有限公司 | Component cleaning device |
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| CN204215148U (en) * | 2014-11-18 | 2015-03-18 | 深圳市路维光电股份有限公司 | The accommodating framework of little chromium plate and rear processing procedure developing trough and etching bath |
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| CN106573829A (en) * | 2014-07-30 | 2017-04-19 | 康宁股份有限公司 | Ultrasonic tank and methods for uniform glass substrate etching |
| CN108246710A (en) * | 2018-04-16 | 2018-07-06 | 珠海格力新元电子有限公司 | Cleaning method, cleaning support and cleaning device for bonding welding head |
| CN108568427A (en) * | 2018-06-22 | 2018-09-25 | 中国振华集团永光电子有限公司（国营第八七三厂） | A kind of ultrasonic cleaning equipment of silicon chip |
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2020
- 2020-04-30 CN CN202010362561.1A patent/CN111438133A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5505785A (en) * | 1994-07-18 | 1996-04-09 | Ferrell; Gary W. | Method and apparatus for cleaning integrated circuit wafers |
| US20030084917A1 (en) * | 2001-11-08 | 2003-05-08 | Benteler Automobiltechnik Gmbh & Co. Kg | Method and device for cleaning metallic articles |
| CN1883034A (en) * | 2003-07-24 | 2006-12-20 | 晶粒精密清理仪器有限公司 | Ultrasonic assisted etch using corrosive liquids |
| CN106573829A (en) * | 2014-07-30 | 2017-04-19 | 康宁股份有限公司 | Ultrasonic tank and methods for uniform glass substrate etching |
| CN204215148U (en) * | 2014-11-18 | 2015-03-18 | 深圳市路维光电股份有限公司 | The accommodating framework of little chromium plate and rear processing procedure developing trough and etching bath |
| CN105750266A (en) * | 2016-04-27 | 2016-07-13 | 芜湖真空科技有限公司 | ITO glass cleaning method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112044903A (en) * | 2020-08-18 | 2020-12-08 | 上海华力微电子有限公司 | Component cleaning device |
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Application publication date: 20200724 |
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