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CN111435091B - Adaptive phase alignment module and method, and vibrating gyroscope measurement and control circuit - Google Patents

Adaptive phase alignment module and method, and vibrating gyroscope measurement and control circuit Download PDF

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CN111435091B
CN111435091B CN201910034788.0A CN201910034788A CN111435091B CN 111435091 B CN111435091 B CN 111435091B CN 201910034788 A CN201910034788 A CN 201910034788A CN 111435091 B CN111435091 B CN 111435091B
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signal
module
information
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CN111435091A (en
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陈华
钟燕清
范玉宝
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Institute of Microelectronics of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C25/00Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
    • G01C25/005Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass initial alignment, calibration or starting-up of inertial devices

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Abstract

本发明公开了一种自适应相位对准模块和方法、及振动式陀螺仪测控电路,其中,自适应相位对准模块,包括一自适应相位对准环路,该自适应相位对准环路包括:可调移相模块,用于根据控制端的信息对输入的第一信号进行移相操作;锁相模块,用于对可调移相模块进行第一移相操作后的第一信号中的特定信息进行锁相滤波;以及鉴相器,用于对锁相模块进行锁相滤波处理后的特定信息与第二信号进行相位比较,得到相位差信息;其中,相位差信息或者相位差信息的等同信息控制第一移相操作的自适应反馈调节以及锁定,锁定时特定信息与第二信号实现相位对准。该模块降低特定信息的相位抖动,并实现高精度、高准确度自适应相位对准,具有较强的鲁棒性。

Figure 201910034788

The invention discloses an adaptive phase alignment module and method, and a vibrating gyroscope measurement and control circuit, wherein the adaptive phase alignment module includes an adaptive phase alignment loop, the adaptive phase alignment loop It includes: an adjustable phase-shifting module for performing a phase-shifting operation on the input first signal according to the information of the control terminal; a phase-locking module for performing the first phase-shifting operation on the adjustable phase-shifting module in the first signal. The specific information is phase-locked and filtered; and a phase detector is used to compare the phase of the specific information after the phase-locked filtering process is performed on the phase-locked module with the second signal to obtain phase difference information; wherein the phase difference information or the phase difference information The equivalent information controls the adaptive feedback adjustment and locking of the first phase shifting operation, and the specific information and the second signal achieve phase alignment during locking. The module reduces the phase jitter of specific information, and realizes high-precision, high-accuracy adaptive phase alignment with strong robustness.

Figure 201910034788

Description

Self-adaptive phase alignment module and method and vibration gyroscope measurement and control circuit
Technical Field
The disclosure belongs to the technical field of inertia, and relates to a self-adaptive phase alignment module and method, and a vibration gyroscope measurement and control circuit.
Background
Compared with the traditional gyroscope, the silicon MEMS gyroscope has the remarkable advantages of low cost, low power consumption, small size, light weight, high reliability and the like, and has been widely applied to the fields of consumer electronics, automobiles, industrial control and the like. With the progress of research in recent years, the performance of the MEMS gyroscope gradually approaches the inertial navigation level, and the MEMS gyroscope is beginning to be applied to the advanced fields such as inertial navigation.
Typically, MEMS gyroscopes are vibratory gyroscopes, which are based on the coriolis effect for sensing angular velocity. If the gyroscope is driven to oscillate stably in the X-axis, and if a rotational angular velocity is input in the Z-axis, a coriolis displacement is generated in the Y-axis (detection axis), and the magnitude of the input angular velocity can be obtained by detecting the displacement. In order to improve the anti-interference capability, the MEMS gyroscope generally operates in a low-pass region rather than a mode matching region, which causes the coriolis displacement to be very weak. Due to non-ideal factors of the micro-machining process, the driving displacement of the MEMS gyroscope may deviate from the X-axis by an angle, so that a component of the driving displacement is coupled to the detection axis, resulting in a quadrature error. The phase of the quadrature error lags the coriolis displacement by 90 degrees and the magnitude of the quadrature error is much larger than the coriolis displacement. Usually, a coherent demodulation method is used to extract the coriolis displacement, thereby completing the angular velocity detection.
The phase relationship between the drive displacement and the coriolis displacement of the MEMS vibratory gyroscope is dependent on the relationship between the drive mode resonant frequency and the detection mode resonant frequency of the gyroscope, and when the drive mode resonant frequency is greater than, less than, or equal to the detection mode resonant frequency, different phase relationships exist between the drive displacement and the coriolis displacement.
In the prior art, a coherent demodulation system which is based on quadrature error alignment and does not depend on a gyro working mode is provided by utilizing the property that the phase relation between quadrature error and Coriolis displacement is constant and is not influenced by the relation between two modal resonant frequencies of a gyroscope, the MEMS gyroscope in the scheme realizes normal driving and correct detection, the scale factor is 1.415 mV/degree/s, the zero-offset instability degree is 108 degrees/h, the zero-offset instability degree of the MEMS gyroscope system is higher, and the circuit system has the following problems: firstly, manually observing whether the phases are aligned or not and manually adjusting the phase shift value of the phase shifter easily cause phase alignment errors, and the errors also have the problem of creep along with temperature and time, so that the performance of the gyroscope is necessarily limited; phase jitter exists in quadrature errors of the detection path, and the accuracy of phase alignment is not high, so that the demodulation effect is not good and the overall performance of the gyroscope is not high; and (III) the driving displacement amplitude in the driving loop is unstable.
Disclosure of Invention
Technical problem to be solved
The present disclosure provides an adaptive phase alignment module and method, and a vibration gyroscope measurement and control circuit, to at least partially solve the above-mentioned technical problems.
(II) technical scheme
According to an aspect of the present disclosure, there is provided an adaptive phase alignment module 1 comprising an adaptive phase alignment loop, the adaptive phase alignment loop comprising: the adjustable phase shifting module 11 is used for performing phase shifting operation on the input first signal according to the information of the control end; the phase-locking module 12 is configured to perform phase-locking filtering on specific information in the first signal after the adjustable phase-shifting module 11 performs the first phase-shifting operation; the phase discriminator 13 is used for performing phase comparison on the specific information subjected to the phase locking filtering processing by the phase locking module 12 and a second signal to obtain phase difference information, and a specific phase alignment relation exists between the second signal and the specific information; and the phase difference information or the equivalent information of the phase difference information controls the self-adaptive feedback adjustment and locking of the first phase shifting operation, and specific information and a second signal realize phase alignment when in locking.
In some embodiments of the present disclosure, the adaptive phase alignment loop further comprises: the phase difference-error conversion module is used for converting the phase difference information into error information; wherein the error information is equivalent information of the phase difference information, and the error information controls the adaptive feedback adjustment of the first phase shift operation so that the specific information and the second signal realize phase alignment.
In some embodiments of the present disclosure, in the adaptive phase alignment module 1, the phase difference-error conversion module includes: a charge pump 14 for converting the phase difference information into an error current; and a loop filter 15 converting the error current into an error voltage.
In some embodiments of the present disclosure, in the adaptive phase alignment module 1, the phase-locked module 12 is one or more of the following circuit structures: a phase locked loop or a digital phase locked loop.
In some embodiments of the present disclosure, in the adaptive phase alignment module 1, the adjustable phase shift module 11 is one or more of the following devices: a tuneable phase shifter, a digital phase shifter or an analog phase shifter.
In some embodiments of the present disclosure, in the adaptive phase alignment module 1, the first signal is a differential detection signal or a single-ended detection signal of the vibration gyroscope, the differential detection signal or the single-ended detection signal contains coriolis shift, quadrature error and noise, the specific information is the quadrature error, and the second signal is a demodulated carrier of the vibration gyroscope.
In some embodiments of the present disclosure, in the adaptive phase alignment module 1, the phase locking module 12 performs phase locking filtering on the specific information in the first signal after performing the first phase shifting operation by setting a threshold value.
In some embodiments of the present disclosure, in the adaptive phase alignment module 1, the first signal is converted into a voltage signal form by a parameter conversion module and is input to the adjustable phase shift module 11.
In some embodiments of the present disclosure, the parameter conversion module converts the varying capacitance or current into a voltage signal form.
In some embodiments of the present disclosure, the parameter conversion module is a C/V conversion circuit or a transimpedance amplification circuit.
In some embodiments of the present disclosure, in the adaptive phase alignment module 1, the adjustable phase shift module 11, the phase lock module 12, and the phase detector 13 are implemented by using digital circuits or analog circuits.
According to another aspect of the present disclosure, there is provided a vibration gyroscope measurement and control circuit, including: a detection path comprising any one of the adaptive phase alignment modules mentioned in this disclosure.
In some embodiments of the present disclosure, in the measurement and control circuit of the vibratory gyroscope, the main channel of the detection path further includes a mixer 16, and the phase-shifted differential detection signal or the single-ended detection signal output by the adjustable phase shifting module 11 and the demodulation carrier of the vibratory gyroscope are coherently demodulated in the mixer 16.
In some embodiments of the present disclosure, in the measurement and control circuit of the vibratory gyroscope, the detection path further includes: a low pass filter 3 and an analog-to-digital converter 4, wherein the output of the mixer 16 is supplied to the low pass filter 3, the low pass filter 3 filters out high frequency components and leaves a direct current component, and the direct current component is supplied to the analog-to-digital converter 4, and the analog-to-digital converter 4 quantizes and codes the direct current component and converts the direct current component into a digital signal.
In some embodiments of the present disclosure, in the vibratory gyroscope test and control circuit, the detection path is open-loop or closed-loop.
In some embodiments of the present disclosure, the vibration gyroscope measurement and control circuit further includes: and a driving loop, in which the driving loop includes a second phase-locking module 52, the second phase-locking module 52 is capable of performing phase-locking filtering processing, and the demodulated carrier of the vibration gyroscope is output to the mixer 16 by the second phase-locking module 52.
In some embodiments of the present disclosure, in the measurement and control circuit of the vibratory gyroscope, the second phase-locked module 52 is one or more of the following circuit structures: a phase locked loop or a digital phase locked loop.
In some embodiments of the present disclosure, in the measurement and control circuit of the vibratory gyroscope, the driving loop further includes: the driving circuit comprises a second parameter conversion module 51, an amplitude detector 53 and a variable gain amplifier 54, wherein the second parameter conversion module 51 converts an input signal into a voltage signal form for outputting, the amplitude detector 53 is used for measuring the amplitude of the voltage signal output by the second parameter conversion module 51 in real time and outputting an amplitude signal, and the output amplitude signal controls the amplification factor of the variable gain amplifier 54, so that the size of the excitation voltage is controlled, and stable driving is realized.
According to still another aspect of the present disclosure, there is provided an adaptive phase alignment method including: performing a first phase shift operation on an input first signal according to information of a control end; and performing adaptive feedback adjustment on the first phase shift operation at the control end, wherein the adaptive feedback adjustment comprises the following steps: performing phase-locked filtering on specific information in the first signal after the first phase shifting operation; comparing the phase of the specific information after the phase-locked filtering processing with that of a second signal to obtain phase difference information, wherein a specific phase alignment relation exists between the second signal and the specific information; and the phase difference information or the equivalent information of the phase difference information controls the self-adaptive feedback adjustment and locking of the first phase shifting operation, and specific information and a second signal realize phase alignment when in locking.
In some embodiments of the present disclosure, in the adaptive phase alignment method, the step of obtaining the phase difference information further includes: converting the phase difference information into error information; wherein the error information is equivalent information of the phase difference information, and the error information controls the adaptive feedback adjustment of the first phase shift operation so that the specific information and the second signal realize phase alignment.
In some embodiments of the present disclosure, in the adaptive phase alignment method, the error information includes: an error current or an error voltage.
In some embodiments of the present disclosure, in the adaptive phase alignment method, the first signal is a differential detection signal or a single-ended detection signal of the vibratory gyroscope, the differential detection signal or the single-ended detection signal contains coriolis shift, quadrature error, and noise, the specific information is quadrature error, and the second signal is a demodulated carrier of the vibratory gyroscope.
In some embodiments of the present disclosure, in the adaptive phase alignment method, the first signal is converted into a voltage signal form for input.
(III) advantageous effects
According to the technical scheme, the self-adaptive phase alignment module, the self-adaptive phase alignment method and the vibration gyroscope measurement and control circuit provided by the disclosure have the following beneficial effects:
(1) the self-adaptive phase alignment module realizes phase locking and filtering by utilizing the phase locking module, can lock specific information by setting a threshold value of the phase locking module, filters other superposed information and noise, reduces the phase jitter of the specific information and improves the phase alignment precision; in addition, the phase locking module, the phase discriminator and the adjustable phase shifting module form a self-adaptive feedback adjusting loop, the phase shifting amount of the adjustable phase shifting module is controlled in real time by utilizing the phase difference information between the specific information in the first signal and the second signal, locking and self-adaptive feedback adjustment are realized, finally, the specific information and the second signal realize phase alignment, the phase locking module in the self-adaptive feedback adjusting loop does not influence the first signal, high-precision and high-accuracy self-adaptive phase alignment is further realized, and the self-adaptive phase adjusting loop has stronger robustness and higher alignment precision.
(2) In the vibration type gyroscope measurement and control circuit, a phase-locking module (in an example, a phase-locked loop or a digital phase-locked loop) is used in a detection path, orthogonal errors are locked and filtered, and then phase alignment is carried out on the orthogonal errors and a demodulation carrier. The circuit structure fully utilizes the characteristic that a phase-locked loop is a band-pass filter with high quality factor, and greatly filters noise and clutter superposed on the orthogonal error, thereby reducing the phase jitter of the orthogonal error, improving the phase alignment precision and improving the performance of the gyroscope. In addition, the phase locking module is not arranged on a main channel of the detection channel, so that the detection signal is not influenced; in one embodiment, the phase-locked module is a phase-locked loop comprising a phase frequency detector, when the phase-locked loop is locked, the input voltage and the output voltage are in the same phase, and the phase of the quadrature error cannot be changed, in other embodiments, the phase-locked module can be a phase-locked loop comprising a phase detector, the output voltage leads or lags the input voltage by 90 degrees, and a phase compensation module is correspondingly arranged to realize phase compensation; when the phase-locked loop is captured, because the input voltage amplitude threshold is set, the Coriolis displacement can not be captured, only the orthogonal error is captured, and the correct phase alignment operation is ensured. The technical characteristics of the phase-locked loop improve the signal quality of the quadrature error, improve the phase alignment precision of the quadrature error and the carrier wave, and improve the performance of the gyroscope.
(3) In the vibration type gyroscope measurement and control circuit, a detection path comprises a self-adaptive phase alignment module, and in one example, a phase discriminator, a charge pump, a loop filter and an adjustable phase shifter are used to form a negative feedback system similar to a delay phase-locked loop. And controlling the phase shift amount of the adjustable phase shifter in real time by utilizing the quadrature error and phase difference information of a demodulation carrier (carrier for short), and finally realizing locking of the feedback system. The phase difference of the two input signals of the phase detector will be exactly equal to 90 degrees when locked. This completes the 90 degree phase alignment of the quadrature error and the carrier, and thus the in-phase or anti-phase alignment of the coriolis shift and the carrier. The technical characteristic is that the adjustable phase shifter is adjusted in a self-adaptive mode instead of a manual mode, high-precision phase alignment is achieved, the problem of creep deformation of phase alignment errors along with time and temperature is solved, and a system formed by the vibration type gyroscope measurement and control circuit has more stable performance.
(4) In a preferred embodiment, the drive loop incorporates a magnitude detector and a variable gain amplifier in the vibratory gyroscope test and control circuit. The amplitude detector can measure the amplitude of the output voltage of the C/V conversion circuit in real time, the amplitude represents the amplitude of the driving displacement, and any change of the amplitude is reflected in the output of the amplitude detector. The output signal controls the amplification factor of the variable gain amplifier, and further controls the size of the excitation voltage of the gyro device, so that the amplitude of the driving displacement is stabilized. The technical characteristic enables the scale factor of the gyro system to be more accurate and stable.
(5) In a preferred embodiment, the drive loop uses a novel phase-locked loop (phase-locked module), such as an electric pump-type phase-locked loop, which locks in with the input voltage being in phase with the output voltage. With such a phase locked loop, additional phase shifting operations and filtering operations may be omitted. The technical characteristics reduce the circuit complexity of the driving loop, reduce the electrical noise and improve the system reliability.
Drawings
Fig. 1 is a schematic structural diagram of an adaptive phase alignment module according to a first embodiment of the disclosure.
Fig. 2 is a flowchart of an adaptive phase alignment method according to a second embodiment of the present disclosure.
Fig. 3 is a schematic structural diagram of a measurement and control circuit of a vibratory gyroscope according to a third embodiment of the present disclosure.
[ notation ] to show
1-an adaptive phase alignment module;
11-an adjustable phase shift module; 12-a phase-locking module;
13-a phase detector; 14-a charge pump;
15-a loop filter; 16-a mixer;
2-parameter conversion module; 3-a low-pass filter;
4-an analog-to-digital converter; 5-a vibratory gyroscope;
51-a second parameter conversion module; 52-a second phase locking module;
53-amplitude detector; 54-variable gain amplifier.
Detailed Description
The self-adaptive phase alignment module is arranged in a detection access of the vibration type gyroscope measurement and control circuit, so that the phase jitter of orthogonal errors can be effectively reduced, the phase alignment precision is improved, high-precision and high-accuracy self-adaptive phase alignment can be realized, and the problem of creep of the phase alignment errors along with time and temperature is solved.
For the purpose of promoting a better understanding of the objects, aspects and advantages of the present disclosure, reference is made to the following detailed description taken in conjunction with the accompanying drawings.
In the present disclosure, a certain module may be a plurality of devices or circuit structures in a specific embodiment, in the drawings, some characters in a block of a structure diagram are module names, and some characters are implementation contents corresponding to the module in the specific embodiment, and in the specification, the device or circuit structure corresponding to the module in the specific embodiment is denoted by the same reference numeral as the module.
First embodiment
In a first exemplary embodiment of the present disclosure, an adaptive phase alignment module is provided.
Fig. 1 is a schematic structural diagram of an adaptive phase alignment module according to a first embodiment of the disclosure.
Referring to fig. 1, an adaptive phase alignment module 1 of the present disclosure includes an adaptive phase alignment loop, which includes: the adjustable phase shifting module 11 is used for performing phase shifting operation on the input first signal according to the information of the control end; the phase-locking module 12 is configured to perform phase-locking filtering on specific information in the first signal after the adjustable phase-shifting module 11 performs the first phase-shifting operation; the phase discriminator 13 is used for performing phase comparison on the specific information subjected to the phase locking filtering processing by the phase locking module 12 and a second signal to obtain phase difference information, and a specific phase alignment relation exists between the second signal and the specific information; wherein the phase difference information or equivalent information of the phase difference information controls adaptive feedback adjustment and locking of the first phase shifting operation, and the specific information and the second signal realize phase alignment when locking.
In some embodiments of the present disclosure, in the adaptive phase alignment module 1, the adjustable phase shift module 11, the phase lock module 12, and the phase detector 13 are implemented by using digital circuits or analog circuits.
This embodiment mainly introduces an implementation manner of the analog circuit.
In this embodiment, referring to fig. 1, the adaptive phase alignment module 1 further includes: the phase difference-error conversion module is used for converting the phase difference information into error information; wherein the error information is equivalent information of the phase difference information, the error information controlling the adaptive feedback adjustment of the first phase shifting operation such that the specific information and the second signal achieve phase alignment.
In one example, the phase difference-to-error conversion module includes: a charge pump 14 for converting the phase difference information into an error current; and a loop filter 15 converting the error current into an error voltage, as shown in fig. 1.
In this embodiment, the phase-locked module 12 is a phase-locked loop, the adjustable phase-shifting module 11 is an adjustable phase shifter, the first signal is a differential detection signal or a single-ended detection signal of the vibrating gyroscope, the differential detection signal or the single-ended detection signal includes coriolis displacement, quadrature error, noise, and the like, the specific information is the quadrature error, and the second signal is a demodulation carrier of the vibrating gyroscope.
In one embodiment, the phase-locked module 12 is a phase-locked loop including a phase frequency detector, and when the phase-locked loop is locked, the input voltage and the output voltage are in phase without changing the phase of the quadrature error.
In this embodiment, the vibrating gyroscope is a MEMS vibrating gyroscope, and of course, the MEMS vibrating gyroscope may be replaced by a non-MEMS process or a non-silicon-based gyroscope device.
In some embodiments of the present disclosure, referring to fig. 3, in the adaptive phase alignment module 1, the first signal is converted into a voltage signal form by a parameter conversion module 2 and input to the adjustable phase shift module 11.
In some embodiments of the present disclosure, the parameter conversion module 2 converts the varying capacitance or current into a voltage signal form. In some embodiments, the parameter conversion module is a C/V conversion circuit or a transimpedance amplification circuit. In this embodiment, the parameter conversion module 2 is a C/V conversion circuit, and as shown in fig. 1 and fig. 3, converts the differential detection signal or the single-ended detection signal into a voltage signal form, and inputs the voltage signal form to the adjustable phase shifter 11.
In some embodiments, the phase-locking module 12 performs the phase-locking filtering on the specific information in the first signal after performing the first phase-shifting operation by setting a threshold value. For example, in the present embodiment, the detection signal includes coriolis displacement, quadrature error and noise, and the adjustable phase shifter 11 performs a hysteresis phase shift operation on the detection signal. The phase locked loop 12 captures and locks only the quadrature error by properly setting the amplitude threshold of the input voltage to the phase locked loop. Given that the coriolis displacement is much smaller than the quadrature error, if the amplitude threshold is raised above the coriolis displacement, the coriolis displacement will not be captured and locked by the phase locked loop 12. The phase locked loop 12 maintains the input voltage and output voltage in phase when locked. In this way, the inserted phase locked loop can extract and filter the quadrature error without changing its phase, which greatly improves the accuracy of the phase alignment.
Of course, in other embodiments of the present disclosure, the adaptive phase alignment module 1 may implement the above related functions in a digital circuit manner except for the parameter conversion module (which is included in the detection path shown in fig. 3, and in other embodiments, the parameter conversion module may not be included). In addition, the specific embodiment of each module is only an example, and may also be other devices or circuit structures capable of implementing the functions of the module, for example, the phase-locked module 12 may also be a digital phase-locked loop, the adjustable phase-shifting module 11 may also be a digital phase shifter or an analog phase shifter, and the parameter conversion module may also be a transimpedance amplifier circuit.
The self-adaptive phase alignment module realizes phase locking and filtering by utilizing the phase locking module, can lock specific information by setting a threshold value of the phase locking module, filters other superposed information and noise, reduces the phase jitter of the specific information and improves the phase alignment precision; in addition, the phase locking module, the phase discriminator and the adjustable phase shifting module form a self-adaptive feedback adjusting loop, the phase shifting amount of the adjustable phase shifting module is controlled in real time by utilizing the phase difference information between the specific information in the first signal and the second signal, the self-adaptive feedback adjustment is realized, the phase alignment of the specific information and the second signal is realized during final locking, the phase locking module in the self-adaptive feedback adjusting loop does not influence the first signal, the high-precision and high-accuracy self-adaptive phase alignment is further realized, and the self-adaptive phase adjusting loop has stronger robustness and higher alignment precision.
Second embodiment
In a second exemplary embodiment of the present disclosure, an adaptive phase alignment method is provided.
Fig. 2 is a flowchart of an adaptive phase alignment method according to a second embodiment of the present disclosure.
Referring to fig. 2, the adaptive phase alignment method of the present disclosure includes:
step S21: performing a first phase shift operation on an input first signal according to information of a control end;
in this embodiment, the first signal is a differential detection signal of the vibration gyroscope, and the differential detection signal includes coriolis displacement, quadrature error, noise, and the like.
In other embodiments, the first signal may be a single-ended detection signal, which contains coriolis displacement, quadrature error, noise, and the like.
In some embodiments, the first signal is converted to a voltage signal form for input.
Step S22: performing adaptive feedback regulation on the first phase shifting operation at a control end;
referring to fig. 2, the step S22 includes the following sub-steps:
substep S22 a: performing phase-locked filtering on specific information in the first signal after the first phase shifting operation;
in this embodiment, the specific information is a quadrature error. In this embodiment, the phase-locked filtering is performed by using a threshold setting method to filter the coriolis displacement and noise, and the quadrature error is retained.
Step S22 b: comparing the phase of the specific information after the phase-locking filtering processing with that of a second signal to obtain phase difference information, wherein a specific phase alignment relation exists between the second signal and the specific information;
wherein the phase difference information or equivalent information of the phase difference information controls adaptive feedback adjustment of the first phase shifting operation such that the specific information and the second signal achieve phase alignment.
In this embodiment, the second signal is a demodulation carrier of the vibratory gyroscope, and a specific phase alignment relationship between the demodulation carrier and the quadrature error is as follows: the two differ by 90 deg..
The adaptive feedback adjustment using the phase difference information to control the first phase shifting operation such that the specific information is phase aligned with the second signal is illustrated by the dashed arrow in fig. 2.
As indicated by the dashed arrow in fig. 2, in the present embodiment, the adaptive feedback adjustment of the first phase shift operation is controlled by the equivalent information of the phase difference information, so that the specific information and the second signal are phase-aligned. Therefore, the step S22 further includes the following sub-step S22 c.
Step S22 c: converting the phase difference information into error information;
in this embodiment, the error information is equivalent to the phase difference information, and the error information includes: an error current or an error voltage.
Step S23: when the self-adaptive phase alignment loop is locked, the phase difference between the specific information in the first signal and the second signal is constant, and the phase alignment is finished.
In this embodiment, the phase difference between the specific information in the first signal and the second signal is constant at 90 degrees, and phase alignment is achieved.
Of course, in this embodiment, the adaptive phase alignment method is exemplified by processing the quadrature error of the vibratory gyroscope and demodulating the phase alignment between the carriers, and in other application scenarios, two signals having a phase relationship may be processed to implement high-precision and high-accuracy adaptive phase alignment of the two signals, and the phase difference is not limited to 90 ° in this scenario.
Third embodiment
In a third exemplary embodiment of the present disclosure, a vibratory gyroscope test and control circuit is provided.
Fig. 3 is a schematic structural diagram of a measurement and control circuit of a vibratory gyroscope according to a third embodiment of the present disclosure.
Referring to fig. 3, the vibration gyroscope measurement and control circuit of the present disclosure includes: a detection path comprising any one of the adaptive phase alignment modules mentioned in this disclosure.
In some embodiments of the present disclosure, in the vibratory gyroscope test and control circuit, the detection path is open-loop or closed-loop. In the present embodiment, the detection path in the open loop form is exemplified.
In some embodiments of the present disclosure, the main channel of the detection path further includes a mixer 16, and the phase-shifted differential detection signal output by the adjustable phase shifting module 11 and the demodulation carrier of the vibratory gyroscope are coherently demodulated in the mixer 16.
In some embodiments of the present disclosure, in the measurement and control circuit of the vibratory gyroscope, the detection path further includes: a low pass filter 3 and an analog-to-digital converter 4, wherein the output of the mixer 16 is supplied to the low pass filter 3, the low pass filter 3 filters out high frequency components and leaves a direct current component, and the direct current component is supplied to the analog-to-digital converter 4, and the analog-to-digital converter 4 quantizes and codes the direct current component and converts the direct current component into a digital signal.
In some embodiments of the present disclosure, referring to fig. 3, in the detection path, the first signal is converted into a voltage signal form by a parameter conversion module 2 and input to the adjustable phase shift module 11.
In some embodiments of the present disclosure, the parameter conversion module 2 converts the varying capacitance or current into a voltage signal form. In some embodiments, the parameter conversion module is a C/V conversion circuit or a transimpedance amplification circuit. In this embodiment, the parameter conversion module 2 is a C/V conversion circuit, and converts the differential detection signal into a voltage signal form to be input to the adjustable phase shifter 11 as shown in fig. 1 and 3.
This vibrating gyroscope measurement and control circuit still includes: and a driving loop, in which the driving loop includes a second phase-locking module 52, the second phase-locking module 52 is capable of performing phase-locking filtering processing, and the demodulated carrier of the vibration gyroscope is output to the mixer 16 by the second phase-locking module 52.
In some embodiments of the present disclosure, in the measurement and control circuit of the vibratory gyroscope, the second phase-locked module 52 is one or more of the following circuit structures: a phase locked loop or a digital phase locked loop.
In one embodiment, the second phase-locked module 52 is a phase-locked loop including a phase frequency detector, and the input voltage and the output voltage are in phase when the phase-locked loop is locked, and in other embodiments, the second phase-locked module 52 may be a phase-locked loop including a phase detector, and the output voltage leads or lags the input voltage by 90 °, and a phase compensation module is correspondingly disposed to implement phase compensation.
In some embodiments of the present disclosure, the drive loop further comprises: the driving circuit comprises a second parameter conversion module 51, an amplitude detector 53 and a variable gain amplifier 54, wherein the second parameter conversion module 51 converts an input signal into a voltage signal form for outputting, the amplitude detector 53 is used for measuring the amplitude of the voltage signal output by the second parameter conversion module 51 in real time and outputting an amplitude signal, and the output amplitude signal controls the amplification factor of the variable gain amplifier 54, so that the size of the excitation voltage is controlled, and stable driving is realized.
The following describes the vibration gyro measurement and control circuit of the preferred embodiment in detail with reference to fig. 3.
Referring to fig. 3, in the preferred embodiment, the vibration gyroscope measurement and control circuit includes two parts, one part is a driving loop, and the other part is a detection path.
In this embodiment, the driving loop includes: a vibration gyro 5, a C/V conversion circuit 51, a magnitude detector 53, a phase-locked loop 52, and a variable gain amplifier 54.
Referring to fig. 3, in the drive circuit, a C/V conversion circuit 51 converts the capacitance variation amount of the vibration gyro 5 into a voltage, adjusts the phase of the voltage, amplifies the voltage to an appropriate value, and finally supplies to a magnitude detector 53 and a phase-locked loop 52, respectively. The amplitude detector 53 acquires amplitude information of the voltage, and controls the gain of the variable gain amplifier 54 according to the amplitude information. The phase locked loop 52 captures and locks the input voltage to achieve an output voltage in phase, which is then fed to the mixer 16 of the sense path and the variable gain amplifier 54 of the drive loop, respectively. The variable gain amplifier 54 receives the output voltage of the phase-locked loop 52 and dynamically adjusts its output voltage according to the output information of the amplitude detector 53, thereby exciting the vibration gyro 5 with this voltage.
In the embodiment, the amplitude detector and the variable gain amplifier are added in the driving loop, so that the scale factor of the gyro system is more accurate and more stable. The amplitude detector can measure the amplitude of the output voltage of the C/V conversion circuit in real time, the amplitude represents the amplitude of the driving displacement, and any change of the amplitude is reflected in the output of the amplitude detector. The output signal controls the amplification factor of the variable gain amplifier, and further controls the size of the excitation voltage of the gyro device, so that the amplitude of the driving displacement is stabilized.
In this embodiment, the drive loop uses a novel phase-locked loop (phase-locked module), such as an electric pump type phase-locked loop, which locks in such a way that the input voltage is in phase with the output voltage. With such a phase locked loop, additional phase shifting operations and filtering operations may be omitted. The technical characteristics reduce the circuit complexity of the driving loop, reduce the electrical noise and improve the system reliability.
In this embodiment, the detection path includes: a C/V conversion circuit 2, a tunable phase shifter 11, a phase locked loop 12, a phase detector 13, a charge pump 14, a loop filter 15, a mixer 16, a low pass filter 3 and an analog-to-digital converter 4.
Referring to fig. 3, in the detection path, the C/V conversion circuit 2 converts the differential detection signal (containing information such as quadrature error, coriolis displacement, and noise) of the vibration gyro 5 into a voltage, performs differential operation and phase adjustment, and then amplifies it to an appropriate voltage value. The adjustable phase shifter 11 is responsible for performing a lagging phase shift on the phase of the input voltage according to the information of the control terminal, and the voltage information after the phase shift is supplied to the phase-locked loop 12 and the mixer 16. The phase locked loop 12 locks and filters the input voltage and outputs a voltage of the same phase to the phase detector 13. The phase detector 13 compares the phase of the filtered quadrature error with the carrier and supplies the phase difference information to the charge pump 14. The charge pump 14 converts the phase difference information into an error current, and supplies the error current to the loop filter 15. The loop filter 15 converts the error current into an error voltage. The error voltage is used to control the phase shift value of the tuneable phase shifter 11. In practice, the adjustable phase shifter 11, the phase locked loop 12, the phase detector 13, the charge pump 14 and the loop filter 15 form an adaptive phase alignment feedback loop, and finally the quadrature error and the carrier will achieve 90 degree phase alignment. The mixer 16 coherently demodulates the phase-shifted detection signal and the carrier wave, and outputs the result to the low-pass filter 3. The low-pass filter 3 filters out the high frequency components, leaving the dc component, which is supplied to the analog-to-digital converter 4. The analog-to-digital converter 4 quantizes and encodes the direct current component, converts the direct current component into a digital signal, and supplies the digital signal to a subsequent system.
In the present embodiment, the vibration gyroscope 5 is a MEMS vibration gyroscope, and of course, the MEMS vibration gyroscope may be replaced by a non-MEMS process or a non-silicon-based gyroscope device.
The quadrature error is converted into a voltage signal through the C/V conversion circuit 2, and then phase-locked output is realized through the phase-locked loop 12, so that a cleaner quadrature error is obtained, and preparation is made for subsequent phase alignment with higher precision. The phase locked loop 12 is locked with the input and output voltages in phase so that the phase information of the quadrature error is not changed. In addition, since the pll 12 is equivalent to a high q bandpass filter, it can effectively filter out noise and clutter on the quadrature error, reduce its phase jitter, and facilitate subsequent phase alignment.
The detection signal contains coriolis displacement, quadrature error and noise. The adjustable phase shifter 11 performs a hysteresis phase shift operation on the detection signals. But the phase locked loop 12 only captures and locks the quadrature error by properly setting the amplitude threshold of the input voltage to the phase locked loop 12. Given that the coriolis displacement is much smaller than the quadrature error, if the amplitude threshold is increased to be greater than the coriolis displacement, the coriolis displacement is not locked by the phase-locked loop extraction. The phase-locked loop maintains the same phase relationship between the input voltage and the output voltage when locked. Thus, a phase locked loop inserted in the detection path can extract and filter the quadrature error without changing its phase, which greatly improves the accuracy of the phase alignment. In addition, phase difference (or phase error) information is formed by feeding the phase alignment information into a phase detector 13, and then the phase difference information/phase error information is converted into a voltage control signal through a charge pump and a loop filter for controlling the adjustable phase shifter to adjust the phase shift value so that the phase of the quadrature error is 90 degrees to the carrier, at which time the feedback system remains locked. The adjustable phase shifter 11 in the closed loop system formed by the adaptive phase alignment module resembles a voltage controlled delay line in a delay locked loop. Because the two inputs of the phase detector 13 maintain strict 90-degree phase difference relationship during locking, the adaptive phase alignment module can resist external interference to a certain extent and has tracking and locking capabilities. Therefore, the adaptive phase alignment module has stronger robustness and higher alignment precision.
In summary, the present disclosure provides an adaptive phase alignment module and method, and a measurement and control circuit of a vibrating gyroscope, wherein the adaptive phase alignment module is disposed in a detection path of the measurement and control circuit of the vibrating gyroscope, so as to effectively reduce phase jitter of quadrature error, improve phase alignment precision, and achieve high-precision and high-accuracy adaptive phase alignment, and have stronger robustness and higher alignment precision, thereby solving the problem of creep of phase alignment error along with time and temperature, and in addition, the driving loop is optimally disposed, thereby reducing circuit complexity of the driving loop, reducing electrical noise, improving system reliability, and making scale factor of the gyroscope system more accurate and stable, in short, the present disclosure improves performance, reliability and stability of the vibrating gyroscope on the basis of simplifying circuit structure, and the self-adaptive phase alignment with high precision and high accuracy is realized.
The use of ordinal numbers such as "first," "second," "third," etc., in the specification and claims to modify a corresponding element does not by itself connote any ordinal number of the element or any ordering of one element from another or the order of manufacture, and the use of the ordinal numbers is only used to distinguish one element having a certain name from another element having a same name.
Furthermore, the word "comprising" or "comprises" does not exclude the presence of elements or steps other than those listed in a claim. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements.
Those skilled in the art will appreciate that the modules in the device in an embodiment may be adaptively changed and disposed in one or more devices different from the embodiment. The modules or units or components of the embodiments may be combined into one module or unit or component, and furthermore they may be divided into a plurality of sub-modules or sub-units or sub-components. All of the features disclosed in this specification (including any accompanying claims, abstract and drawings), and all of the processes or elements of any method or apparatus so disclosed, may be combined in any combination, except combinations where at least some of such features and/or processes or elements are mutually exclusive. Each feature disclosed in this specification (including any accompanying claims, abstract and drawings) may be replaced by alternative features serving the same, equivalent or similar purpose, unless expressly stated otherwise. Also in the unit claims enumerating several means, several of these means may be embodied by one and the same item of hardware.
Similarly, it should be appreciated that in the foregoing description of exemplary embodiments of the disclosure, various features of the disclosure are sometimes grouped together in a single embodiment, figure, or description thereof for the purpose of streamlining the disclosure and aiding in the understanding of one or more of the various disclosed aspects. However, the disclosed method should not be interpreted as reflecting an intention that: that is, the claimed disclosure requires more features than are expressly recited in each claim. Rather, as the following claims reflect, disclosed aspects lie in less than all features of a single foregoing disclosed embodiment. Thus, the claims following the detailed description are hereby expressly incorporated into this detailed description, with each claim standing on its own as a separate embodiment of this disclosure.
The above-mentioned embodiments are intended to illustrate the objects, aspects and advantages of the present disclosure in further detail, and it should be understood that the above-mentioned embodiments are only illustrative of the present disclosure and are not intended to limit the present disclosure, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present disclosure should be included in the scope of the present disclosure.

Claims (12)

1.一种自适应相位对准模块(1),其特征在于,包括一自适应相位对准环路,该自适应相位对准环路包括:1. an adaptive phase alignment module (1) is characterized in that, comprises an adaptive phase alignment loop, and this adaptive phase alignment loop comprises: 可调移相模块(11),用于根据控制端的信息对输入的第一信号进行移相操作;An adjustable phase-shifting module (11) for performing a phase-shifting operation on the input first signal according to the information of the control terminal; 锁相模块(12),用于对可调移相模块(11)进行第一移相操作后的第一信号中的特定信息进行锁相滤波;以及a phase-locking module (12) for performing phase-locking filtering on specific information in the first signal after the adjustable phase-shifting module (11) performs the first phase-shifting operation; and 鉴相器(13),用于对锁相模块(12)进行锁相滤波处理后的特定信息与第二信号进行相位比较,得到相位差信息,该第二信号与特定信息之间存在特定的相位对准关系;A phase detector (13) is used to compare the phase of the specific information after the phase-locking filtering process is performed on the phase-locking module (12) with the second signal to obtain phase difference information, and there is a specific difference between the second signal and the specific information. phase alignment relationship; 其中,所述相位差信息或者该相位差信息的等同信息控制所述第一移相操作的自适应反馈调节以及锁定,锁定时特定信息与第二信号实现相位对准;Wherein, the phase difference information or the equivalent information of the phase difference information controls the adaptive feedback adjustment and locking of the first phase-shifting operation, and the specific information and the second signal achieve phase alignment during locking; 所述第一信号为振动式陀螺仪的差分检测信号或单端检测信号,该差分检测信号或单端检测信号包含科氏位移、正交误差和噪声,所述特定信息为正交误差,所述第二信号为振动式陀螺仪的解调载波。The first signal is a differential detection signal or a single-ended detection signal of a vibrating gyroscope, and the differential detection signal or single-ended detection signal includes Coriolis displacement, quadrature error and noise, and the specific information is quadrature error, so The second signal is the demodulated carrier wave of the vibrating gyroscope. 2.根据权利要求1所述的自适应相位对准模块,其特征在于,所述自适应相位对准环路还包括:2. The adaptive phase alignment module according to claim 1, wherein the adaptive phase alignment loop further comprises: 相位差-误差转换模块,用于将相位差信息转换为误差信息;The phase difference-error conversion module is used to convert the phase difference information into error information; 其中,所述误差信息为相位差信息的等同信息,该误差信息控制所述第一移相操作的自适应反馈调节,使得特定信息与第二信号实现相位对准;Wherein, the error information is equivalent information of the phase difference information, and the error information controls the adaptive feedback adjustment of the first phase-shift operation, so that the specific information and the second signal achieve phase alignment; 所述相位差-误差转换模块包括:The phase difference-error conversion module includes: 电荷泵(14),将相位差信息转换为误差电流;以及a charge pump (14) that converts the phase difference information into an error current; and 环路滤波器(15),将误差电流转换为误差电压。A loop filter (15) converts the error current to an error voltage. 3.根据权利要求1所述的自适应相位对准模块,其特征在于,3. The adaptive phase alignment module according to claim 1, wherein, 所述锁相模块(12)为如下电路结构中的一种或几种:锁相环或数字锁相环;和/或,The phase-locked module (12) is one or more of the following circuit structures: a phase-locked loop or a digital phase-locked loop; and/or, 所述可调移相模块(11)为如下器件中的一种或几种:可调移相器、数字移相器或模拟移相器。The adjustable phase shift module (11) is one or more of the following devices: an adjustable phase shifter, a digital phase shifter or an analog phase shifter. 4.根据权利要求1所述的自适应相位对准模块,其特征在于,所述锁相模块(12)通过设置门限值来对进行第一移相操作后的第一信号中的特定信息进行锁相滤波。4. The adaptive phase alignment module according to claim 1, wherein the phase locking module (12) performs the first phase shift operation on the specific information in the first signal by setting a threshold value phase-lock filtering. 5.根据权利要求1至4中任一项所述的自适应相位对准模块,其特征在于,所述第一信号经过一参数转换模块转化为电压信号形式输入至可调移相模块(11);5. The adaptive phase alignment module according to any one of claims 1 to 4, wherein the first signal is converted into a voltage signal form through a parameter conversion module and input to the adjustable phase shift module (11 ); 所述参数转换模块将变化的电容或电流转换为电压信号形式;The parameter conversion module converts the changed capacitance or current into a voltage signal form; 所述参数转换模块为C/V转换电路或跨阻放大电路;The parameter conversion module is a C/V conversion circuit or a transimpedance amplifying circuit; 所述可调移相模块(11)、锁相模块(12)、鉴相器(13)采用数字电路或模拟电路的方式实现。The adjustable phase-shifting module (11), the phase-locking module (12), and the phase detector (13) are implemented by means of digital circuits or analog circuits. 6.一种振动式陀螺仪测控电路,其特征在于,包括:6. A vibrating gyroscope measurement and control circuit is characterized in that, comprising: 检测通路,该检测通路包含权利要求1至5中任一项所述的自适应相位对准模块。A detection path comprising the adaptive phase alignment module of any one of claims 1 to 5. 7.根据权利要求6所述的振动式陀螺仪测控电路,其特征在于,所述检测通路的主干道上还包括混频器(16),所述可调移相模块(11)输出的移相后的差分检测信号或单端检测信号与所述解调载波在所述混频器(16)中进行相干解调;7. vibrating gyroscope measurement and control circuit according to claim 6, is characterized in that, on the main road of described detection path, also comprises mixer (16), the shifter output of described adjustable phase shift module (11) The phased differential detection signal or single-ended detection signal and the demodulated carrier are coherently demodulated in the mixer (16); 所述检测通路还包括:低通滤波器(3)和模数转换器(4),所述混频器(16)的输出供给所述低通滤波器(3),所述低通滤波器(3)滤除高频分量,留下直流分量,供给所述模数转换器(4),所述模数转换器(4)对该直流分量进行量化、编码,转成数字信号。The detection path further comprises: a low-pass filter (3) and an analog-to-digital converter (4), the output of the mixer (16) is supplied to the low-pass filter (3), the low-pass filter (3) Filtering out the high frequency component, leaving the DC component, and supplying it to the analog-to-digital converter (4), the analog-to-digital converter (4) quantizes and encodes the DC component, and converts it into a digital signal. 8.根据权利要求6所述的振动式陀螺仪测控电路,其特征在于,所述检测通路为开环或者闭环。8 . The vibrating gyroscope measurement and control circuit according to claim 6 , wherein the detection path is an open loop or a closed loop. 9 . 9.根据权利要求6至8中任一项所述的振动式陀螺仪测控电路,其特征在于,还包括:9. vibrating gyroscope measurement and control circuit according to any one of claims 6 to 8, is characterized in that, also comprises: 驱动环路,该驱动环路中包括第二锁相模块(52),该第二锁相模块(52)能够进行锁相滤波处理,所述解调载波由该第二锁相模块(52)输出至所述混频器(16);a driving loop, the driving loop includes a second phase-locking module (52), the second phase-locking module (52) can perform phase-locking filtering processing, and the demodulated carrier is controlled by the second phase-locking module (52) output to the mixer (16); 所述第二锁相模块(52)为如下电路结构中的一种或几种:锁相环或数字锁相环。The second phase-locked module (52) is one or more of the following circuit structures: a phase-locked loop or a digital phase-locked loop. 10.根据权利要求9所述的振动式陀螺仪测控电路,其特征在于,所述驱动环路还包括:第二参数转换模块(51)、幅值检测器(53)和可变增益放大器(54),10. The vibrating gyroscope measurement and control circuit according to claim 9, wherein the drive loop further comprises: a second parameter conversion module (51), an amplitude detector (53) and a variable gain amplifier ( 54), 其中,该第二参数转换模块(51)将输入信号转换为电压信号形式进行输出,幅值检测器(53)用于实时测量第二参数转换模块(51)输出的电压信号的幅值并输出幅值信号,输出的幅值信号控制该可变增益放大器(54)的放大倍数,从而控制激励电压的大小,实现稳定驱动。Wherein, the second parameter conversion module (51) converts the input signal into a voltage signal form for output, and the amplitude detector (53) is used to measure the amplitude of the voltage signal output by the second parameter conversion module (51) in real time and output it Amplitude signal, the output amplitude signal controls the amplification factor of the variable gain amplifier (54), so as to control the magnitude of the excitation voltage and realize stable driving. 11.一种自适应相位对准方法,其特征在于,包括:11. An adaptive phase alignment method, comprising: 根据控制端的信息对输入的第一信号进行第一移相操作;Perform a first phase shift operation on the input first signal according to the information of the control terminal; 对第一移相操作在控制端进行自适应反馈调节,该自适应反馈调节的步骤包括:Adaptive feedback adjustment is performed at the control end for the first phase-shift operation, and the steps of the adaptive feedback adjustment include: 对第一移相操作后的第一信号中的特定信息进行锁相滤波;以及performing phase-lock filtering on specific information in the first signal after the first phase-shift operation; and 对锁相滤波处理后的特定信息与第二信号进行相位比较,得到相位差信息,该第二信号与特定信息之间存在特定的相位对准关系;comparing the phase of the specific information after the phase-lock filtering process with the second signal to obtain phase difference information, and there is a specific phase alignment relationship between the second signal and the specific information; 其中,所述相位差信息或者该相位差信息的等同信息控制所述第一移相操作的自适应反馈调节以及锁定,锁定时特定信息与第二信号实现相位对准;Wherein, the phase difference information or the equivalent information of the phase difference information controls the adaptive feedback adjustment and locking of the first phase-shifting operation, and the specific information and the second signal achieve phase alignment during locking; 所述第一信号为振动式陀螺仪的差分检测信号或单端检测信号,该差分检测信号或单端检测信号包含科氏位移、正交误差和噪声,所述特定信息为正交误差,所述第二信号为振动式陀螺仪的解调载波。The first signal is a differential detection signal or a single-ended detection signal of a vibrating gyroscope, and the differential detection signal or single-ended detection signal includes Coriolis displacement, quadrature error and noise, and the specific information is quadrature error, so The second signal is the demodulated carrier wave of the vibrating gyroscope. 12.根据权利要求11所述的自适应相位对准方法,其特征在于,在所述得到相位差信息的步骤之后还包括:12. The adaptive phase alignment method according to claim 11, wherein after the step of obtaining the phase difference information, the method further comprises: 将相位差信息转换为误差信息;Convert the phase difference information into error information; 其中,所述误差信息为相位差信息的等同信息,该误差信息控制所述第一移相操作的自适应反馈调节,使得特定信息与第二信号实现相位对准;Wherein, the error information is equivalent information of the phase difference information, and the error information controls the adaptive feedback adjustment of the first phase-shift operation, so that the specific information and the second signal achieve phase alignment; 所述误差信息包括:误差电流或者误差电压;The error information includes: error current or error voltage; 所述第一信号为振动式陀螺仪的差分检测信号或单端检测信号,该差分检测信号或单端检测信号包含科氏位移、正交误差和噪声,所述特定信息为正交误差,所述第二信号为振动式陀螺仪的解调载波;The first signal is a differential detection signal or a single-ended detection signal of a vibrating gyroscope, and the differential detection signal or single-ended detection signal includes Coriolis displacement, quadrature error and noise, and the specific information is quadrature error, so Described second signal is the demodulation carrier wave of vibrating gyroscope; 所述第一信号转化为电压信号形式进行输入。The first signal is converted into a voltage signal for input.
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