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CN111431498B - A kind of conductive polymer solution for crystal resonator and its application - Google Patents

A kind of conductive polymer solution for crystal resonator and its application Download PDF

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CN111431498B
CN111431498B CN202010245410.8A CN202010245410A CN111431498B CN 111431498 B CN111431498 B CN 111431498B CN 202010245410 A CN202010245410 A CN 202010245410A CN 111431498 B CN111431498 B CN 111431498B
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conductive polymer
polymer solution
wafer
aqueous dispersion
parts
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CN111431498A (en
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徐禄波
陈国飞
方省众
王骥
张阳阳
于开悬
田昊
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Ningbo Institute of Material Technology and Engineering of CAS
Ningbo University
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Ningbo University
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    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz

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  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
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Abstract

The invention relates to the technical field of electronic components and discloses a conductive polymer solution for a crystal resonator and application thereof, wherein the conductive polymer solution comprises the following raw material components in parts by mass: 80 to 98.5 portions of polar proton solution; 1-10 parts of modified polythiophene aqueous dispersion; 0.1 to 3 parts of nano graphite sheet aqueous dispersion; 0.01 to 0.05 part of dispersing agent; 0.01 to 0.05 portion of leveling agent; 0.01 to 0.05 portion of wetting agent. The nano graphite sheet with good water dispersibility is added into the modified polythiophene aqueous dispersion, the defect that micron-sized filler influences the flatness of the conductive coating is overcome, the wetting agent ensures that the conductive polymer solution has good wettability to the wafer, and the surface regularity of the coating and the spraying efficiency are improved. The conductive polymer solution is sprayed on the surface of the wafer through a spray gun to prepare the quartz wafer for the resonator, the surface of which is coated with the conductive polymer electrode. The wafer has electrodes with good conductivity, the surface resistance of the electrode can be as low as 232 omega, and the wafer is expected to replace metal silver to be applied to the field of crystal resonators.

Description

一种晶体谐振器用导电高分子溶液及其应用A kind of conductive polymer solution for crystal resonator and its application

技术领域technical field

本发明涉及电子元器件技术领域,具体涉及一种晶体谐振器用导电高分子溶液及其应用。The invention relates to the technical field of electronic components, in particular to a conductive polymer solution for a crystal resonator and an application thereof.

背景技术Background technique

晶体谐振器就是指用石英材料做成的石英晶体谐振器,俗称晶振,是一种用电损耗很小的石英晶体经精密切割磨削并镀上电极焊上引线做成的机电器件,起产生频率的作用,具有稳定,抗干扰性能良好的特点,广泛应用于各种电子产品中。如果给晶体谐振器通电,它就会产生机械振荡,其振荡频率与他们的形状,材料,切割方向等密切相关,不同频率点石英晶振采用的电极尺寸不同。A crystal resonator refers to a quartz crystal resonator made of quartz material, commonly known as a crystal oscillator. It is an electromechanical device made of a quartz crystal with little power loss that is precisely cut and ground, plated with electrodes and welded with leads. The function of frequency, with the characteristics of stability and good anti-interference performance, is widely used in various electronic products. If the crystal resonator is energized, it will generate mechanical oscillation, and its oscillation frequency is closely related to their shape, material, cutting direction, etc., and the electrode size used in different frequency points of the quartz crystal oscillator is different.

现有技术晶体谐振器通电是通过在石英晶体谐振器表面镀银,再与电极连接。金属银具有良好的导电性和氧化稳定性,是目前晶体谐振器表面所镀的电极常用原料。电极材料一般利用纯度99.99%以上的银,为了提高电极的附着强度,在镀银之前先镀少量的铬(Cr)或镍(Ni)。In the prior art, the crystal resonator is energized by plating silver on the surface of the quartz crystal resonator, and then connecting with electrodes. Metal silver has good electrical conductivity and oxidation stability, and is currently a common raw material for electrodes plated on the surface of crystal resonators. The electrode material generally uses silver with a purity of more than 99.99%. In order to improve the adhesion strength of the electrode, a small amount of chromium (Cr) or nickel (Ni) is plated before silver plating.

CN103684318A公开了一种表面镀银的石英晶体谐振器的制造方法,依次包括下列步骤:(1)石英晶体的切割;(2)晶片的研磨;(3)X光测定角度;(4)粘砣与磨长;(5)切割与磨宽;(6)化料与倒边;(7)频率分选;步骤(8)腐蚀,通过使用化学溶剂腐蚀晶片的表面;其特征在于:还包括步骤(9)清洗,使用清洗剂清除晶片的灰泥、油污和化学残留液,然后再用清水进一步清洗;(10)镀银,在晶片的表面按照电极的尺寸镀一银层;(11)上架点胶与银胶固化,将镀银后的晶片放置在一个固定支架上,并已银胶固定,然后在100~120℃的温度下进行固化。本发明的银层均匀,容易脱落,便于固定银胶以及与电极连接,不容易损坏,使用寿命长。CN103684318A discloses a method for manufacturing a surface silver-plated quartz crystal resonator, which includes the following steps in turn: (1) cutting of the quartz crystal; (2) grinding of the wafer; (3) measuring the angle by X-ray; (4) sticking the mound (5) cutting and grinding width; (6) chemical material and chamfering; (7) frequency sorting; step (8) corrosion, by using a chemical solvent to corrode the surface of the wafer; it is characterized in that: it also includes the step (9) cleaning, using a cleaning agent to remove the plaster, oil stains and chemical residues of the chip, and then further cleaning with clear water; (10) silver plating, plating a silver layer on the surface of the chip according to the size of the electrode; (11) putting it on the shelf Glue dispensing and silver glue curing, place the silver-plated wafer on a fixed support, fix it with silver glue, and then cure it at a temperature of 100-120°C. The silver layer of the present invention is uniform, easy to fall off, convenient for fixing silver glue and connecting with electrodes, not easy to be damaged, and has long service life.

CN 102832902A公开了一种石英晶体谐振器及其加工方法,包括外壳、基座、引脚、弹簧片、导电胶、镀膜电极、晶片;所述镀膜电极包括基本电极和与其连接的微调电极;镀膜电极附着在晶片表其中的晶片由内至外依次包括下镀铬层,镀银层和上镀铬层。该发明能改善石英晶体谐振器的寄生响应特性,极大的提高了生产的石英晶体谐振器的性能和质量。CN 102832902A discloses a quartz crystal resonator and a processing method thereof, including a shell, a base, pins, spring sheets, conductive glue, a coating electrode, and a wafer; the coating electrode includes a basic electrode and a fine-tuning electrode connected thereto; a coating The wafer in which the electrodes are attached to the wafer surface sequentially includes a lower chromium plating layer, a silver plating layer and an upper chromium plating layer from the inside to the outside. The invention can improve the parasitic response characteristics of the quartz crystal resonator, and greatly improve the performance and quality of the produced quartz crystal resonator.

然而,现有技术中的镀银、镀铬等工艺都需对工艺要求较高,对金属原料的纯度要求也较高,同时晶体表面镀银、镀铬的过程工艺复杂,成本较高。开发新型易喷涂、高电导率的电极材料是改善目前晶片制备工艺的关键问题。However, the processes of silver plating and chrome plating in the prior art all require high technological requirements and high requirements for the purity of metal raw materials. At the same time, the processes of silver plating and chromium plating on the crystal surface are complex and costly. The development of new electrode materials that are easy to spray and have high conductivity is a key issue to improve the current wafer preparation process.

发明内容Contents of the invention

本发明旨在解决现有技术中晶体表面镀银的工艺要求高,工艺复杂,成本高的问题,提供了一种易喷涂,导电率高的高分子溶液,将该导电高分子溶液鹏图在晶体表面形成导电薄膜,以替代金属应用于晶体谐振器领域。The present invention aims to solve the problems of high technical requirements, complex process and high cost in the prior art of crystal surface silver plating, and provides a polymer solution that is easy to spray and has high conductivity. A conductive thin film is formed on the crystal surface to replace metal in the field of crystal resonators.

为实现上述目的,本发明采用的技术方案是:In order to achieve the above object, the technical scheme adopted in the present invention is:

一种晶体谐振器用导电高分子溶液,以100质量份计,包括如下原料组分:A conductive polymer solution for a crystal resonator, in 100 parts by mass, comprising the following raw material components:

极性质子溶液80~98.5份;80-98.5 parts of polar proton solution;

改性聚噻吩水分散液1~10份;1-10 parts of modified polythiophene aqueous dispersion;

纳米石墨片水分散液0.1~3份;0.1-3 parts of nano-graphite flake aqueous dispersion;

分散剂0.01~0.05份;Dispersant 0.01~0.05 parts;

流平剂0.01~0.05份;Leveling agent 0.01 ~ 0.05 parts;

润湿剂0.01~0.05份;0.01-0.05 parts of wetting agent;

所述的改性聚噻吩水分散液与纳米石墨片水分散液的质量比为100:50~100:1。The mass ratio of the modified polythiophene water dispersion to the nano-graphite water dispersion is 100:50˜100:1.

优选地,所述的改性聚噻吩水分散液与纳米石墨片水分散液的质量比为100:30~100:5,在该比例下,所获得的导电高分子溶液导电性更好,利用其制备的晶片电阻更低。Preferably, the mass ratio of the modified polythiophene aqueous dispersion to the nano-graphite flake aqueous dispersion is 100:30 to 100:5. In this ratio, the obtained conductive polymer solution has better conductivity. The wafer prepared by it has lower resistance.

所述的极性质子溶液为极性有机溶剂与水的混合溶液,所述的极性有机溶剂包括醇类溶剂、酮类溶剂、N-甲基吡咯烷酮(NMP)等本领域常用的极性质子溶剂。所述的极性质子溶液中水在所述导电高分子溶液的质量份为40~70份。The polar proton solution is a mixed solution of a polar organic solvent and water, and the polar organic solvent includes alcohol solvents, ketone solvents, N-methylpyrrolidone (NMP) and other polar protons commonly used in the art. solvent. In the polar protic solution, the mass part of water in the conductive polymer solution is 40-70 parts.

所述的醇类溶剂包括甲醇、乙醇、丁醇、异丙醇、甘油、乙二醇、丙二醇、三甘醇、四甘醇等;所述的酮类溶剂包括丙酮、甲基乙基酮、甲基异丁基酮等。Described alcoholic solvent includes methanol, ethanol, butanol, isopropanol, glycerol, ethylene glycol, propylene glycol, triethylene glycol, tetraethylene glycol etc.; Described ketone solvent includes acetone, methyl ethyl ketone, Methyl isobutyl ketone, etc.

通过调整溶剂成分,可以改善改性聚噻吩和纳米石墨片在溶剂中的分散稳定性,溶剂对晶片的浸润性以及溶剂的挥发速度。优选地,所述的极性有机溶剂为乙醇。溶剂挥发速度快,导电高分子溶液喷涂在晶片表面更不易凝结,对晶片的浸润性更好。By adjusting the solvent components, the dispersion stability of the modified polythiophene and nano-graphite sheets in the solvent, the wettability of the solvent to the wafer and the volatilization speed of the solvent can be improved. Preferably, the polar organic solvent is ethanol. The solvent volatilizes quickly, and the conductive polymer solution is less likely to condense when sprayed on the surface of the wafer, and has better wettability to the wafer.

所述的改性聚噻吩水分散液为聚(3,4-亚乙二氧基噻吩)-聚(苯乙烯磺酸)的水性分散体,其中聚(3,4-亚乙二氧基噻吩)-聚(苯乙烯磺酸)的平均粒径为50~100nm,在水中的固含量为0.5~2.0%。优选地,所述的改性聚噻吩水分散液选用德国赫利氏的CleviosPH 1000产品。The modified polythiophene aqueous dispersion is an aqueous dispersion of poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonic acid), wherein poly(3,4-ethylenedioxythiophene )-poly(styrene sulfonic acid) has an average particle diameter of 50-100 nm, and a solid content in water of 0.5-2.0%. Preferably, the modified polythiophene aqueous dispersion is CleviosPH 1000 product from Heraeus, Germany.

所述的纳米石墨片水分散液中纳米石墨片的平均粒径为10~500nm,在水中的固含量为0.1~10%。纳米石墨片具有良好的水分散性,在极性质子溶液中分散稳定好,得到的导电高分子溶液喷涂于晶片形成薄膜,薄膜中纳米石墨片分布均匀,导电性好。The average particle size of the nano graphite flakes in the aqueous dispersion of the nano graphite flakes is 10-500 nm, and the solid content in water is 0.1-10%. The nano-graphite flakes have good water dispersibility and are stable in polar proton solutions. The obtained conductive polymer solution is sprayed on the wafer to form a thin film. The nano-graphite flakes in the film are evenly distributed and have good conductivity.

所述的分散剂本领域常用的表面活性剂中一种或多种,如阳离子表面活性剂、阴离子表面活性剂、非离子表面活性剂、两性表面活性剂中一种或多种。The dispersant is one or more of commonly used surfactants in the field, such as one or more of cationic surfactants, anionic surfactants, nonionic surfactants, and amphoteric surfactants.

所述的阳离子表面活性剂包括胺盐型阳离子表面活性剂、季铵盐型阳离子表面活性剂、阳离子高分子表面活性剂等。The cationic surfactants include amine salt cationic surfactants, quaternary ammonium salt cationic surfactants, cationic polymer surfactants and the like.

进一步地,所述的胺盐型阳离子表面活性剂包括十八烷基胺盐酸盐,双十八烷基胺盐酸盐,N,N-二甲基十八胺盐酸盐,聚丙烯酰胺盐酸盐等。Further, the amine salt type cationic surfactant includes octadecylamine hydrochloride, dioctadecylamine hydrochloride, N,N-dimethyloctadecylamine hydrochloride, polyacrylamide hydrochloride, etc.

进一步地,所述的季铵盐型阳离子表面活性剂包括双十八烷基二甲基氯化铵,十八烷基二甲基苄基氯化铵,十八烷基酰胺二甲基丙基氯化铵,十八烷基三甲基氯化铵,十八烷基三甲基溴化铵,十六烷基三甲基氯化铵,十六烷基三甲基溴化铵,十二烷基三甲基氯化铵,十二烷基三甲基溴化铵,十二烷基二甲基苄基氯化铵,油酸酰胺甲基羟丙基氯化铵,芥酸酰胺丙基三甲基氯化铵等。Further, the quaternary ammonium salt type cationic surfactant includes dioctadecyl dimethyl ammonium chloride, octadecyl dimethyl benzyl ammonium chloride, stearylamide dimethyl propyl Ammonium Chloride, Octadecyltrimethylammonium Chloride, Octadecyltrimethylammonium Bromide, Cetyltrimethylammonium Chloride, Cetyltrimethylammonium Bromide, Dodecyltrimethylammonium Bromide Alkyl Trimethyl Ammonium Chloride, Lauryl Trimethyl Ammonium Bromide, Lauryl Dimethyl Benzyl Ammonium Chloride, Oleamide Methyl Hydroxypropyl Ammonium Chloride, Erucamide Propyl trimethyl ammonium chloride etc.

进一步地,所述的阳离子高分子表面活性剂包括聚乙烯亚胺、聚乙烯基吡咯烷酮、季铵化聚丙烯酰胺等。Further, the cationic polymer surfactant includes polyethyleneimine, polyvinylpyrrolidone, quaternized polyacrylamide and the like.

所述的阴离子表面活性剂包括烷基硫酸钠,烷基磺酸钠,烷基醚硫酸钠,烷基硫酸三乙醇胺,烷基醚硫酸三乙醇胺,烷基硫酸铵,烷基醚硫酸铵,烷基醚磷酸钠,氟代烷基羧酸钠等。Described anion surfactant comprises alkyl sodium sulfate, alkyl sodium sulfonate, sodium alkyl ether sulfate, triethanolamine alkyl sulfate, triethanolamine alkyl ether sulfate, ammonium alkyl sulfate, ammonium alkyl ether sulfate, alkyl ether ammonium sulfate, Sodium ether phosphate, sodium fluoroalkyl carboxylate, etc.

所述的非离子表面活性剂包括聚氧乙烯烷基醚,聚氧乙烯苯基醚,聚氧乙烯烷基酯,丙二醇-氧化丙烯共聚物,全氟烷基环氧乙烷加合物,2-乙基己醇环氧乙烷加合物等。Described nonionic surfactant comprises polyoxyethylene alkyl ether, polyoxyethylene phenyl ether, polyoxyethylene alkyl ester, propylene glycol-oxypropylene copolymer, perfluoroalkyl ethylene oxide adduct, 2 -Ethylhexanol ethylene oxide adduct, etc.

所述的两性表面活性剂包括烷基氨基乙酸甜菜碱,烷基酰胺乙酸甜菜碱,咪唑甜菜碱等。The amphoteric surfactants include alkyl aminoacetic acid betaine, alkyl amidoacetic acid betaine, imidazole betaine and the like.

由于纳米石墨片表面含有一定的羟基或羧基,呈现微弱的电负性,因此本发明的分散剂优选阳离子表面活性剂,可中和纳米石墨片电负性,使其在溶液中分散更稳定。Since the surface of the nano-graphite sheet contains certain hydroxyl or carboxyl groups, it presents weak electronegativity, so the dispersant of the present invention is preferably a cationic surfactant, which can neutralize the electronegativity of the nano-graphite sheet, making it more stable to disperse in the solution.

进一步优选地,所述的分散剂为聚乙烯亚胺,聚乙烯亚胺在水中以聚合阳离子存在,可以中和或吸附所有阴离子物质,其分子链上含有的氨基能与羧基反应生成氢健,与羧基反应生成离子健,与碳酰基反应生成共价健。聚乙烯亚胺可以和纳米石墨片具有更强的相互作用,利于纳米石墨片在水溶液中的分散。Further preferably, the dispersant is polyethyleneimine, which exists as polycation in water, can neutralize or adsorb all anionic substances, and the amino group contained on its molecular chain can react with carboxyl to generate hydrogen bond, It reacts with carboxyl group to generate ionic bond, and reacts with carbonyl group to generate covalent bond. Polyethyleneimine can have a stronger interaction with nano-graphite flakes, which is beneficial to the dispersion of nano-graphite flakes in aqueous solution.

所述的流平剂丙烯酸共聚物类流平剂、有机硅类流平剂或氟碳表面活性剂。The leveling agent is an acrylic copolymer leveling agent, a silicone leveling agent or a fluorocarbon surfactant.

优选地,所述的流平剂为丙烯酸共聚物类流平剂,该类产品常用语溶剂型和水性涂料体系,依靠相似相容原理,积聚在涂层表面,大幅度降低高分子导电溶液体系的表面张力,尤其能增进底材的润湿性,防止缩孔。Preferably, the leveling agent is an acrylic copolymer leveling agent. This type of product is commonly used in solvent-based and water-based coating systems. It relies on the principle of similar compatibility to accumulate on the surface of the coating, which greatly reduces the viscosity of the polymer conductive solution system. Excellent surface tension, especially to improve the wettability of the substrate and prevent shrinkage.

进一步优选地,所述的流平剂选用德国毕克公司的离子型丙烯酸酯共聚体溶液BYK381。Further preferably, the leveling agent is BYK381, an ionic acrylate copolymer solution from BYK, Germany.

所述的润湿剂为有机硅类双子型表面活性剂或炔二醇类双子型表面活性剂。由于导电高分子溶液的表面张力在7×10-4~8×10-4N·cm-1之间,略高于石英晶片的表面张力(大约为7×10-4N·cm-1),因此导电高分子溶液对石英晶片的浸润效果不佳。添加润湿剂,可以与流平剂协同,降低导电高分子溶液的表面张力,促进导电高分子溶液对石英晶体的良好浸润,防止缩孔或缩边等表面缺陷,增加溶液的流动性、流平性和附着力。The wetting agent is a silicone-based gemini surfactant or an acetylene glycol-based gemini surfactant. Since the surface tension of the conductive polymer solution is between 7×10 -4 and 8×10 -4 N·cm -1 , which is slightly higher than that of the quartz wafer (approximately 7×10 -4 N·cm -1 ) , so the wetting effect of the conductive polymer solution on the quartz wafer is not good. Adding a wetting agent can cooperate with the leveling agent to reduce the surface tension of the conductive polymer solution, promote the good infiltration of the conductive polymer solution on the quartz crystal, prevent surface defects such as shrinkage cavities or edge shrinkage, and increase the fluidity and flow of the solution. Flatness and adhesion.

优选地,所述的润湿剂为炔二醇类双子型表面活性剂,其不仅可降低平衡和动态表面张力,还能够显著改善流动性和流平性,很容易进入难以润湿的底物表面,提高导电高分子溶液对石英晶片的浸润性能。Preferably, the wetting agent is an acetylenic diol-based gemini surfactant, which can not only reduce the equilibrium and dynamic surface tension, but also significantly improve fluidity and leveling, and easily enter difficult-to-wet substrates Surface, improve the wettability of the conductive polymer solution to the quartz wafer.

进一步优选地,所述的润湿剂选用美国气体公司Dynol 607。Further preferably, the wetting agent is Dynol 607 from American Gas Company.

优选地,所述的分散剂为阳离子表面活性剂,所述的流平剂为丙烯酸共聚物类流平剂,所述的润湿剂为炔二醇类双子型表面活性剂。在该组合下,导电高分子溶液的浸润性、流动性、流动性更好。Preferably, the dispersant is a cationic surfactant, the leveling agent is an acrylic copolymer leveling agent, and the wetting agent is an acetylenic diol gemini surfactant. Under this combination, the wettability, fluidity, and fluidity of the conductive polymer solution are better.

进一步优选地,所述的分散剂为聚乙烯亚胺,所述的流平剂为德国毕克公司的离子型丙烯酸酯共聚体溶液BYK381,所述的润湿剂为美国气体公司Dynol 607。该组合下,导电高分子溶液的各项性能最优。Further preferably, the dispersant is polyethyleneimine, the leveling agent is ionic acrylate copolymer solution BYK381 from BYK, Germany, and the wetting agent is Dynol 607 from American Gas Company. Under this combination, the performance of the conductive polymer solution is optimal.

本发明提供的晶体谐振器用导电高分子溶液应用于晶体谐振器时,通过喷枪喷涂的方式将导电高分子溶液涂在晶片表面。When the conductive polymer solution for a crystal resonator provided by the present invention is applied to a crystal resonator, the conductive polymer solution is coated on the surface of a wafer by spraying with a spray gun.

由于导电高分子溶液的主成分为水,水对石英晶片的浸润效果较差,喷涂的过程中会在石英晶片表面凝结成水珠,导致涂层表面不平整。除了在溶液中添加流平剂、润湿剂以改善浸润效果外,还应当提高石英晶片的温度,加快喷涂液的快速挥发,石英晶片适宜的温度范围为100~150℃,优选为120℃。Since the main component of the conductive polymer solution is water, the wetting effect of water on the quartz wafer is poor, and water droplets will condense on the surface of the quartz wafer during the spraying process, resulting in uneven coating surface. In addition to adding leveling agent and wetting agent to the solution to improve the wetting effect, the temperature of the quartz wafer should be increased to accelerate the rapid volatilization of the spraying liquid. The suitable temperature range for the quartz wafer is 100-150°C, preferably 120°C.

同时在喷枪喷涂的过程中应当尽量避免溶液在石英晶片表面凝结成水珠,导致涂层表面不平整。如晶片表面出现液滴,应当立即停止喷涂,将晶片放入100~150℃的烘箱内热处理,使其表面的喷涂液挥发成膜;随后再继续喷涂,喷涂完成之后,将晶片放入烘箱中100~150℃处理2~15min除去溶剂。将模板拆除,得到表面涂有导电高分子电极的谐振器用石英晶片。At the same time, try to prevent the solution from condensing into water droplets on the surface of the quartz wafer during the spraying process of the spray gun, resulting in uneven coating surface. If droplets appear on the surface of the wafer, the spraying should be stopped immediately, and the wafer should be heat-treated in an oven at 100-150°C to make the spraying liquid on the surface volatilize and form a film; then continue spraying, and after the spraying is completed, put the wafer into the oven Treat at 100-150°C for 2-15 minutes to remove the solvent. The template is removed to obtain a quartz wafer for a resonator whose surface is coated with conductive polymer electrodes.

该晶片具有良好导电性能的电极,其表面电阻最低可低至232Ω,基于本发明的导电高分子溶液作为电极制备的晶体谐振器均可以顺利起震,谐振器的谐振频率可以在3.99~4.02MHz之间调节,有望代替金属银应用在晶体谐振器领域。The wafer has an electrode with good electrical conductivity, and its surface resistance can be as low as 232Ω. The crystal resonator prepared based on the conductive polymer solution of the present invention as an electrode can start vibration smoothly, and the resonant frequency of the resonator can be 3.99~4.02MHz. It is expected to replace metallic silver in the field of crystal resonators.

与现有技术相比,本发明具有以下有益效果:Compared with the prior art, the present invention has the following beneficial effects:

(1)在改性聚噻吩水分散液中添加水分散性良好的纳米级石墨,克服了微米级填料影响导电涂层平整度的缺点;(1) Adding nano-scale graphite with good water dispersibility to the modified polythiophene aqueous dispersion overcomes the shortcoming that the micron-scale filler affects the flatness of the conductive coating;

(2)采用的纳米石墨在水中具有良好的分散性,添加分散剂保证纳米石墨在水溶液中的分散稳定性;(2) The nano-graphite used has good dispersibility in water, adding a dispersant to ensure the dispersion stability of the nano-graphite in the aqueous solution;

(3)通过加入润湿剂、调整溶剂配比,保证导电高分子溶液对晶片具有良好的浸润性、适宜的挥发性,提高涂层表面规整度以及喷涂效率。(3) By adding a wetting agent and adjusting the solvent ratio, ensure that the conductive polymer solution has good wettability and proper volatility to the chip, and improve the surface regularity and spraying efficiency of the coating.

具体实施方式Detailed ways

为了使本发明的目的、技术方案及优点更加清楚明白,以下结合实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。本领域技术人员在理解本发明的技术方案基础上进行修改或等同替换,而未脱离本发明技术方案的精神和范围,均应涵盖在本发明的保护范围内。In order to make the object, technical solution and advantages of the present invention more clear, the present invention will be further described in detail below in conjunction with the examples. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. Modifications or equivalent replacements made by those skilled in the art on the basis of understanding the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention shall fall within the protection scope of the present invention.

以下实施方式所采用的原料均为市售产品。改性聚噻吩水分散液为德国赫利氏Clevios PH 1000,其固含量为1.0%;纳米石墨片为国内某厂商生产,平均粒径在10~100nm之间,固含量为10%;分散剂选用聚乙烯亚胺,为通用市售产品;流平剂为德国毕克公司的离子型丙烯酸酯共聚体溶液BYK381;润湿剂为美国气体公司炔二醇类双子型表面活性剂Dynol 607。The raw materials used in the following embodiments are all commercially available products. The modified polythiophene aqueous dispersion is Clevios PH 1000 from Germany, with a solid content of 1.0%; the nano-graphite flakes are produced by a domestic manufacturer, with an average particle size of 10-100nm and a solid content of 10%; the dispersant Polyethyleneimine is selected as a general commercially available product; the leveling agent is BYK381, an ionic acrylate copolymer solution from BYK, Germany; the wetting agent is Dynol 607, an acetylene glycol-based gemini surfactant from American Gas Company.

实施例1Example 1

取乙醇水溶液、改性聚噻吩水分散液、纳米石墨片水分散液、聚乙烯亚胺、BYK381和Dynol 607配制导电高分子溶液,其中各组分的质量占比分别为:水含量为40%,乙醇含量为49.36%,改性聚噻吩水分散液含量为10%,纳米石墨片水分散液含量为0.6%,聚乙烯亚胺含量为0.02%,BYK381含量为0.01%,Dynol 607含量为0.01%。Take ethanol aqueous solution, modified polythiophene aqueous dispersion, nano graphite sheet aqueous dispersion, polyethyleneimine, BYK381 and Dynol 607 to prepare conductive polymer solution, wherein the mass proportion of each component is respectively: water content is 40% , the content of ethanol is 49.36%, the content of modified polythiophene aqueous dispersion is 10%, the content of nanographite flake aqueous dispersion is 0.6%, the content of polyethyleneimine is 0.02%, the content of BYK381 is 0.01%, and the content of Dynol 607 is 0.01 %.

喷涂前,首先将晶片放在特定的模板上,在烘箱中加热至120℃,然后取出晶片,采用喷枪喷涂制得的导电高分子溶液,喷涂过程中随时留意导电高分子溶液在晶片表面的润湿情况,如果晶片表面出现液滴,立刻停止喷涂,将晶片放入120℃烘箱中热处理1min,之后取出晶片继续进行喷涂,直到晶片单面喷涂完1.5g导电高分子溶液。然后采用同样方式在晶片另一面喷涂1.55g导电高分子溶液。喷涂完成之后,将晶片放入烘箱中120℃处理10min除去溶剂。最后将模板拆除,得到表面涂有导电高分子电极的谐振器用石英晶片。Before spraying, first place the wafer on a specific template, heat it in an oven to 120°C, then take out the wafer, and use a spray gun to spray the prepared conductive polymer solution. During the spraying process, always pay attention to the wetting of the conductive polymer solution on the wafer surface. In wet conditions, if droplets appear on the surface of the wafer, stop spraying immediately, put the wafer in a 120°C oven for heat treatment for 1min, then take out the wafer and continue spraying until 1.5g of conductive polymer solution is sprayed on one side of the wafer. Then adopt the same method to spray 1.55g conductive polymer solution on the other side of the wafer. After spraying, the wafer was placed in an oven at 120° C. for 10 minutes to remove the solvent. Finally, the template is removed to obtain a quartz wafer for a resonator whose surface is coated with conductive polymer electrodes.

实施例2~3Embodiment 2~3

按照实施例1的喷涂工艺在晶片表面喷涂实施例1制备的导电高分子溶液,单侧晶片的喷涂量分别为2.5g(实施例2),5g(实施例3)。According to the spraying process of Example 1, the conductive polymer solution prepared in Example 1 was sprayed on the surface of the wafer, and the spraying amount of the wafer on one side was 2.5g (Example 2) and 5g (Example 3).

实施例4Example 4

取乙醇水溶液、改性聚噻吩水分散液、纳米石墨片水分散液、聚乙烯亚胺、BYK381和Dynol 607配制导电高分子溶液,其中各组分的质量占比分别为:水含量为50%,乙醇含量为39.36%,改性聚噻吩水分散液含量为9%,纳米石墨片水分散液含量为1.6%,聚乙烯亚胺含量为0.02%,BYK381含量为0.01%,Dynol 607含量为0.01%。Take ethanol aqueous solution, modified polythiophene aqueous dispersion, nano graphite sheet aqueous dispersion, polyethyleneimine, BYK381 and Dynol 607 to prepare conductive polymer solution, wherein the mass proportion of each component is respectively: water content is 50% , the content of ethanol is 39.36%, the content of modified polythiophene aqueous dispersion is 9%, the content of nanographite flake aqueous dispersion is 1.6%, the content of polyethyleneimine is 0.02%, the content of BYK381 is 0.01%, and the content of Dynol 607 is 0.01 %.

按照实施例1的喷涂工艺在晶片表面喷涂本实施例制备的导电高分子溶液,单侧晶片的喷涂量为2.5g。According to the spraying process of Example 1, the conductive polymer solution prepared in this example was sprayed on the surface of the wafer, and the amount of spraying on one side of the wafer was 2.5 g.

实施例5Example 5

取乙醇水溶液、改性聚噻吩水分散液、纳米石墨片水分散液、聚乙烯亚胺、BYK381和Dynol 607配制导电高分子溶液,其中各组分的质量占比分别为:水含量为70%,乙醇含量为19.36%,改性聚噻吩水分散液含量为8.5%,纳米石墨片水分散液含量为2.1%,聚乙烯亚胺含量为0.02%,BYK381含量为0.01%,Dynol 607含量为0.01%。Take ethanol aqueous solution, modified polythiophene aqueous dispersion, nano-graphite sheet aqueous dispersion, polyethyleneimine, BYK381 and Dynol 607 to prepare conductive polymer solution, wherein the mass proportion of each component is respectively: water content is 70% , the content of ethanol is 19.36%, the content of modified polythiophene aqueous dispersion is 8.5%, the content of nanographite flake aqueous dispersion is 2.1%, the content of polyethyleneimine is 0.02%, the content of BYK381 is 0.01%, and the content of Dynol 607 is 0.01% %.

按照实施例1的喷涂工艺在晶片表面喷涂本实施例制备的导电高分子溶液,单侧晶片的喷涂量为2.5g。According to the spraying process of Example 1, the conductive polymer solution prepared in this example was sprayed on the surface of the wafer, and the amount of spraying on one side of the wafer was 2.5 g.

对比例1Comparative example 1

取改性聚噻吩水分散液配制成导电高分子溶液,其中改性聚噻吩水分散液质量占比为10%,水占比90%。按照实施例1的喷涂工艺在晶片表面喷涂本对比例制备的导电高分子溶液,单侧晶片的喷涂量为2.5g。The modified polythiophene aqueous dispersion was used to prepare a conductive polymer solution, wherein the modified polythiophene aqueous dispersion accounted for 10% by mass and water accounted for 90%. According to the spraying process of Example 1, the conductive polymer solution prepared in this comparative example was sprayed on the surface of the wafer, and the amount of spraying on one side of the wafer was 2.5 g.

实施例1~5和对比例1的导电高分子溶液中各组分占比含量,单侧晶片喷涂量汇总于表1。Table 1 summarizes the proportions of each component in the conductive polymer solutions of Examples 1 to 5 and Comparative Example 1, and the spraying amount on one side of the wafer.

表1导电高分子溶液中各组分含量及单侧晶片喷涂量Table 1 The content of each component in the conductive polymer solution and the spraying amount of the wafer on one side

将实施例1~5和对比例1制备好的晶片进行表面电阻和谐振频率测试,采用安捷伦34401A万用电表测试电极阻抗,采用E5100分析仪和250B网络分析仪测量晶体的谐振频率,测试结果如表2所示。从表2中数据可以发现,采用实施例1~5的导电高分子溶液制备的晶片表面电阻随着喷涂量的增大而降低;且增大导电高分子溶液体系中纳米石墨片含量,降低改性聚噻吩水分散液的含量,晶片表面电阻进一步降低,最低可至232Ω,导电性极好;The wafers prepared in Examples 1 to 5 and Comparative Example 1 were tested for surface resistance and resonant frequency, using Agilent 34401A multimeter to test electrode impedance, using E5100 analyzer and 250B network analyzer to measure the resonant frequency of the crystal, and the test results As shown in table 2. From the data in Table 2, it can be found that the wafer surface resistance prepared by the conductive polymer solution of Examples 1 to 5 decreases with the increase of spraying amount; The content of non-toxic polythiophene aqueous dispersion, the surface resistance of the chip is further reduced, the lowest can reach 232Ω, and the conductivity is excellent;

同时可见,在单侧喷涂量均为2.5g下,对比例1的只含有改性聚噻吩的导电高分子溶液喷涂的晶片电阻为2349Ω,而实施例2制备的晶片表面电阻仅为1592Ω,说明纳米石墨片的加入能够大幅度提高溶液的导电性,基于上述导电液作为电极制备的晶体谐振器均可以顺利起震,谐振器的谐振频率可以在3.99~4.02MHz之间调节,有望代替金属银应用在晶体谐振器领域。Simultaneously, it can be seen that under the unilateral spraying amount of 2.5g, the chip resistance of the conductive polymer solution sprayed with only modified polythiophene in Comparative Example 1 is 2349 Ω, while the chip surface resistance prepared in Example 2 is only 1592 Ω, indicating that The addition of nano-graphite flakes can greatly improve the conductivity of the solution. The crystal resonators prepared based on the above-mentioned conductive liquid as electrodes can start vibration smoothly, and the resonant frequency of the resonator can be adjusted between 3.99 and 4.02MHz, which is expected to replace metallic silver. Used in the field of crystal resonators.

表2各实施例制备的晶片谐振频率和表面电阻Chip resonant frequency and surface resistance prepared by each embodiment of table 2

编号serial number 谐振频率(Hz)Resonant frequency (Hz) 表面电阻(Ohms)Surface resistance (Ohms) 实施例1Example 1 4,023,493.004,023,493.00 3576.213576.21 实施例2Example 2 4,016,154.104,016,154.10 1592.551592.55 实施例3Example 3 3,999,527.783,999,527.78 1098.801098.80 实施例4Example 4 4,016,232.104,016,232.10 920.53920.53 实施例5Example 5 4,016,737.914,016,737.91 232.16232.16 对比例1Comparative example 1 4,017,017.524,017,017.52 2349.222349.22

Claims (6)

1.一种晶体谐振器用导电高分子溶液,其特征在于,以100质量份计,包括如下原料组分:1. a conductive polymer solution for a crystal resonator, characterized in that, in 100 parts by mass, comprising the following raw material components: 极性质子溶液80~98.5份;80-98.5 parts of polar proton solution; 改性聚噻吩水分散液1~10份;1-10 parts of modified polythiophene aqueous dispersion; 纳米石墨片水分散液0.1~3份;0.1-3 parts of nano-graphite flake aqueous dispersion; 分散剂0.01~0.05份;Dispersant 0.01~0.05 parts; 流平剂0.01~0.05份;Leveling agent 0.01 ~ 0.05 parts; 润湿剂0.01~0.05份;0.01-0.05 parts of wetting agent; 所述的改性聚噻吩水分散液为聚(3,4-亚乙二氧基噻吩)-聚(苯乙烯磺酸)的水性分散体,其中聚(3,4-亚乙二氧基噻吩)-聚(苯乙烯磺酸)的平均粒径为50~100nm,在水中的质量含量为0.5~2.0%;所述的改性聚噻吩水分散液与纳米石墨片水分散液的质量比为100:30~100:5;The modified polythiophene aqueous dispersion is an aqueous dispersion of poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonic acid), wherein poly(3,4-ethylenedioxythiophene )-poly(styrene sulfonic acid) has an average particle diameter of 50 to 100nm, and a mass content in water of 0.5 to 2.0%; the mass ratio of the modified polythiophene water dispersion to the nanographite sheet water dispersion is 100:30~100:5; 所述的分散剂为聚乙烯亚胺;Described dispersant is polyethyleneimine; 所述的极性质子溶液为极性有机溶剂与水的混合溶液,所述的极性有机溶剂包括甲醇、乙醇、丙酮中任一种或多种。The polar protic solution is a mixed solution of a polar organic solvent and water, and the polar organic solvent includes any one or more of methanol, ethanol, and acetone. 2.根据权利要求1所述的晶体谐振器用导电高分子溶液,其特征在于,所述的纳米石墨片水分散液为纳米石墨片的水性分散体,纳米石墨片的平均粒径为10~500nm,在水中的质量含量为0.1~10%。2. The conductive polymer solution for crystal resonators according to claim 1, wherein the aqueous dispersion of graphite nanosheets is an aqueous dispersion of graphite nanosheets, and the average particle diameter of graphite nanosheets is 10 to 500nm , the mass content in water is 0.1-10%. 3.根据权利要求1所述的晶体谐振器用导电高分子溶液,其特征在于,所述的流平剂为丙烯酸共聚物类流平剂、有机硅类流平剂或氟碳表面活性剂。3. The conductive polymer solution for crystal resonators according to claim 1, wherein the leveling agent is an acrylic copolymer leveling agent, a silicone leveling agent or a fluorocarbon surfactant. 4.根据权利要求1所述的晶体谐振器用导电高分子溶液,其特征在于,所述的润湿剂为有机硅类双子型表面活性剂或炔二醇类双子型表面活性剂。4 . The conductive polymer solution for crystal resonators according to claim 1 , wherein the wetting agent is an organosilicon-based gemini surfactant or an acetylene glycol-based gemini surfactant. 5 . 5.根据权利要求1所述的晶体谐振器用导电高分子溶液,其特征在于,所述的流平剂为丙烯酸共聚物类流平剂,所述的润湿剂为炔二醇类双子型表面活性剂。5. The conductive polymer solution for crystal resonators according to claim 1, wherein the leveling agent is an acrylic acid copolymer leveling agent, and the wetting agent is an acetylenic glycol class gemini type surface active agent. 6.根据权利要求1~5任一项所述的晶体谐振器用导电高分子溶液在晶体谐振器中的应用,其特征在于,通过喷枪喷涂的方式将权利要求1~5任一项的导电高分子溶液涂在晶片表面。6. The application of the conductive polymer solution for a crystal resonator according to any one of claims 1 to 5 in a crystal resonator, characterized in that, the conductive high polymer solution according to any one of claims 1 to 5 is sprayed by a spray gun. The molecular solution is coated on the surface of the wafer.
CN202010245410.8A 2020-03-31 2020-03-31 A kind of conductive polymer solution for crystal resonator and its application Active CN111431498B (en)

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