CN111417248B - Impedance adjusting method and device for input end of matching box and radio frequency power supply system - Google Patents
Impedance adjusting method and device for input end of matching box and radio frequency power supply system Download PDFInfo
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- CN111417248B CN111417248B CN202010291595.6A CN202010291595A CN111417248B CN 111417248 B CN111417248 B CN 111417248B CN 202010291595 A CN202010291595 A CN 202010291595A CN 111417248 B CN111417248 B CN 111417248B
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- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
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Abstract
The invention discloses an impedance matching method of an input end of a matching box, which considers that before the impedance of the input end of the matching box does not reach a target impedance, the phase angle of the impedance of the input end of the matching box is changed in the adjusting process, and the closer to the target impedance, the smaller the numerical value of the phase angle of the impedance is, so that the step length is changed along with the phase angle in the matching process, the step length is increased when the current frequency is far away from the optimal frequency, the step length is reduced when the current frequency is close to the optimal frequency, the closer to the optimal frequency, the smaller the change rate of the frequency is, and the speed and the precision of impedance matching are improved. The invention also discloses an impedance matching device and a radio frequency power supply system of the input end of the matching box, and the impedance matching device and the radio frequency power supply system have the same beneficial effects as the impedance matching method.
Description
Technical Field
The invention relates to the technical field of radio frequency, in particular to an impedance adjusting method and device for an input end of a matching box and a radio frequency power supply system.
Background
The radio frequency power supply system comprises a radio frequency power supply and a plasma chamber. Generally, the impedance of the nonlinear load in the plasma chamber is time-varying, while the output impedance of the rf power supply is constant. Therefore, a serious impedance mismatch occurs between the rf power source and the plasma chamber, so that a large reflection efficiency exists on the transmission line, the power generated by the rf power source cannot be completely transmitted to the plasma chamber, and the power loss is large.
To solve this problem, a matching box is usually provided between the rf power supply and the plasma chamber, and the matching box includes a matching network composed of an inductor and a capacitor. In the matching mode in the prior art, the impedance of the input end of the matching box is changed by adjusting the working frequency of the radio frequency power supply, so that impedance matching is realized. But this adjustment method is performed by fixing the step size of the adjustment frequency and then sweeping back and forth over a frequency range until a suitable frequency is found. Although the matching time is saved to a certain extent compared with the traditional mechanical adjustment method, the requirement on the initial frequency sweep range is high, and the phenomenon that the optimal frequency cannot be found easily occurs.
Disclosure of Invention
The invention aims to provide an impedance adjusting method and device for an input end of a matching box and a radio frequency power supply system, and the impedance matching speed and precision are improved.
In order to solve the above technical problem, the present invention provides an impedance adjusting method for an input end of a matching box, including:
s11: setting the working frequency of the radio frequency power supply according to the frequency of the current sweep frequency period;
s12: determining the impedance of the input end of the matching box in the current sweep frequency period;
s13: obtaining the standing-wave ratio of the current frequency sweep period based on the impedance of the input end of the matching box of the current frequency sweep period, judging whether the standing-wave ratio is smaller than a matching threshold value, and if so, entering S15; otherwise, go to S14;
s14: determining a step size S of a frequency increase of a next sweep period based on an impedance of an input end of a matching box of a current sweep periodstep_upAnd returns to S11; wherein S isstep_up＝Sstep·Gset·sinθ，SstepIs a basic step size, GsetTo gain, θ is the phase angle of the impedance at the input of the matching box;
s15: and determining the frequency of the current sweep frequency period as the optimal frequency for realizing impedance matching of the radio frequency power supply.
Preferably, S11 is preceded by:
setting the iteration number N to be 0;
before returning to S11 in S14, the method further includes:
adding 1 to the iteration number N;
and judging whether N is larger than an iteration threshold, if so, judging that the matching is failed, and otherwise, returning to the step of S11.
Preferably, the matching threshold is 1.06.
Preferably, S12 includes:
obtaining the voltage V of the input end of the coaxial cable between the radio frequency power supply and the matching boxgenAnd current Igen；
Determining an ABCD matrix of the coaxial cable;
based on said voltage VgenCurrent IgenAnd obtaining the impedance Z of the input end of the matching box of the current sweep frequency period by the ABCD matrixmatch；
Wherein,
f is the frequency of the current sweep period, l is the length of the coaxial cable, and m is a constant;
preferably, obtaining the standing wave ratio of the current sweep period based on the impedance of the input end of the matching box of the current sweep period includes:
impedance Z of input end of matching box based on current sweep frequency periodmatchAnd a target impedance ZoObtaining a reflection coefficient K of the current sweep frequency period;
obtaining the standing wave ratio VSWR of the current frequency sweep period based on the reflection coefficient K of the current frequency sweep period0；
Wherein,
according to the current sweepImpedance Z of input end of frequency period matching boxmatchObtaining the standing-wave ratio of the current sweep frequency period;
wherein,
preferably, the target impedance Zo＝50Ω。
In order to solve the above technical problem, the present invention further provides an impedance adjusting device for an input end of a matching box, including:
a memory for storing a computer program;
a processor for implementing the steps of the impedance adjusting method for the input terminal of the matching box as described above when executing the computer program.
In order to solve the technical problem, the invention further provides a radio frequency power supply system which comprises a radio frequency power supply, a matching box, a coaxial cable arranged between the radio frequency power supply and the matching box, and an impedance adjusting device arranged at the input end of the matching box.
The invention provides an impedance matching method of an input end of a matching box, which considers that before the impedance of the input end of the matching box does not reach a target impedance, the phase angle of the impedance of the input end of the matching box is changed in the adjusting process, and the closer to the target impedance, the smaller the numerical value of the phase angle of the impedance is, based on the method, the phase angle is introduced into the impedance matching process, so that the step length is changed along with the phase angle in the matching process, the step length is increased when the current frequency is far away from the optimal frequency, the step length is reduced when the current frequency is close to the optimal frequency, the closer to the optimal frequency, the smaller the change rate of the frequency is, and the speed and the precision of impedance matching are improved.
The invention provides an impedance matching device of an input end of a matching box and a radio frequency power supply system, and has the same beneficial effects as the impedance matching method.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed in the prior art and the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
Fig. 1 is a process flow chart of an impedance adjusting method for an input end of a matching box according to the present invention;
FIG. 2 is a diagram illustrating a relationship between sin θ and frequency of a sweep period according to the present invention;
FIG. 3 is a diagram showing the relationship between the standing-wave ratio and the frequency of the sweep period in the matching process according to the present invention;
FIG. 4 is a schematic diagram of an impedance adjustment system for the input of a matching box according to the present invention;
fig. 5 is a smith chart of the impedance of the input end of the matching box and the impedance of the input end of the coaxial cable according to the present invention.
Detailed Description
The core of the invention is to provide an impedance adjusting method and device of the input end of the matching box and a radio frequency power supply system, thereby improving the speed and the precision of impedance matching.
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1, fig. 1 is a process flow chart of an impedance adjusting method for an input terminal of a matching box according to the present invention.
The method comprises the following steps:
s11: setting the working frequency of the radio frequency power supply according to the frequency of the current sweep frequency period;
s12: determining the impedance of the input end of the matching box in the current sweep frequency period;
s13: obtaining the standing-wave ratio of the current frequency sweep period based on the impedance of the input end of the matching box of the current frequency sweep period, judging whether the standing-wave ratio is smaller than a matching threshold value, and if so, entering S15; otherwise, go to S14;
s14: determining a step size S of a frequency increase of a next sweep period based on an impedance of an input end of a matching box of a current sweep periodstep_upAnd returns to S11; wherein S isstep_up＝Sstep·Gset·sinθ，SstepIs a basic step size, GsetTo gain, θ is the phase angle of the impedance at the input of the matching box;
s15: and determining the frequency of the current sweep frequency period as the optimal frequency for realizing impedance matching of the radio frequency power supply.
It should be noted that, in the present application, the impedance of the input end of the matching box refers to the port impedance of the rf power supply side of the matching box.
When the impedance of the input end of the matching box is adjusted, the frequency of the radio frequency power supply is adjusted. Specifically, the matching network in the matching box is considered to be composed of a capacitor and an inductor, when the frequency of the radio frequency power supply changes, the capacitive reactance of the capacitor and the inductive reactance of the inductor also change, and therefore the impedance of the input end of the matching box (namely the sum of the impedance of the plasma chamber and the impedance of the matching box) is enabled to be equal to the impedance of the radio frequency power supply by adjusting the frequency of the radio frequency power supply. And whether the impedance of the input end of the matching box is equal to the impedance of the radio frequency power supply or not is judged through the standing-wave ratio of the radio frequency power supply, and if the standing-wave ratio is small enough, namely smaller than the matching threshold, the impedance of the input end of the matching box is equal to the impedance of the radio frequency power supply.
Specifically, when the impedance of the input end of the matching box is adjusted, an initial value of the frequency sweep of the radio frequency power supply and a frequency sweep period may be set first, and the radio frequency power supply is controlled to start outputting a radio frequency signal with the initial value as a starting point and the frequency sweep period as a period, where the frequency of each frequency sweep period is different, and the impedance of the input end of the matching box is also different. And after controlling the radio frequency power supply to output a radio frequency signal with the frequency of the current frequency sweep period, determining the impedance of the input end of the matching box of the current frequency sweep period, obtaining the standing-wave ratio of the current frequency sweep period based on the impedance of the input end of the matching box, judging whether the standing-wave ratio is smaller than a matching threshold value, if so, indicating that the frequency of the current frequency sweep period is the optimal frequency, and at the moment, the impedance of the input end of the matching box is equal to the impedance of the radio frequency power supply. If not, the frequency of the current frequency sweep period is not satisfactory, and the frequency sweep needs to be continued, so that the frequency of the next frequency sweep period needs to be determined. As a preferred embodiment, the matching threshold here is 1.06. Of course, the matching threshold may be other values, and the present application is not limited thereto.
To obtain the frequency of the next sweep period, the step size S of the frequency increase of the next sweep period can be determined based on the impedance of the input of the matching boxstep_upWherein S isstep_up＝Sstep·GsetSin θ, where θ is the phase angle of the impedance at the input of the matching box, i.e.
Zmatch＝Rmatch+jXmatch，ZmatchTo match the impedance of the input of the tank, RmatchTo match the resistance of the tank, XmatchTo match the reactance of the tank. Since the impedance of the rf power supply is usually 50 Ω, the value of θ becomes smaller when the impedance of the input terminal of the matching box is closer to the impedance of the rf power supply, and becomes larger when the impedance of the input terminal of the matching box is farther from the impedance of the rf power supply. Based on the rule, the phase angle of the impedance of the input end of the matching box is introduced into the adjustment of the step length of the frequency, the smaller the numerical value of theta is, the impedance of the input end of the matching box approaches to the impedance of the radio frequency power supply, and the step length of the frequency increase of the next scanning period is reduced; the larger the value of theta is, the impedance of the input end of the matching box is far away from the impedance of the radio frequency power supply, the frequency increasing step length of the next sweep period is increased, and the step length is dynamically adjusted in such a way that the step length is adjusted so as to obtain the effect that the impedance of the input end of the matching box is far away from the impedance of the radio frequency power supply, and the frequency increasing step length of the next sweep period is increasedThe impedance of the input end of the matching box is adjusted, the impedance matching speed is increased, and the impedance matching precision is improved.
Referring to fig. 2 and fig. 3, fig. 2 is a diagram illustrating a relationship between sin θ and frequency of a sweep period according to the present invention, wherein the Y axis is sin θ, and the X axis is frequency of the sweep period. Fig. 3 is a corresponding relationship diagram of the standing-wave ratio and the frequency of the frequency sweep period in the matching process, wherein the Y axis is the standing-wave ratio, and the X axis is the frequency of the frequency sweep period.
In summary, in the present invention, before the impedance at the input end of the matching box does not reach the target impedance, the phase angle of the impedance at the input end of the matching box changes during the adjustment process, and the closer to the target impedance, the smaller the value of the phase angle of the impedance, based on which, the present application introduces the phase angle into the impedance matching process, so that the step length changes along with the phase angle during the matching process, the step length is increased when the current frequency is far from the optimal frequency, the step length is decreased when the current frequency is close to the optimal frequency, so that the closer to the optimal frequency, the smaller the change rate of the frequency is, and the speed and the accuracy of the impedance matching are improved.
On the basis of the above-described embodiment:
as a preferred embodiment, S11 is preceded by:
setting the iteration number N to be 0;
before returning to S11 in S14, the method further includes:
adding 1 to the iteration number N;
and judging whether N is larger than an iteration threshold, if so, judging that the matching is failed, and otherwise, returning to the step of S11.
Specifically, in consideration of the fact that in practical application, although the impedance of the input end of the matching box can be matched under most conditions, under some special conditions, the impedance of the input end of the matching box cannot be matched with the radio frequency power supply, in order to timely end the matching in a proper time, in this embodiment, an iteration threshold is further set, if the impedance matching is not realized after N sweep periods, the matching is determined to be failed, a worker can conveniently find the reason of the failure in time, and the efficiency of impedance matching is improved.
N here may be, but is not limited to, 4, and the specific value of N in this embodiment is not particularly limited and is determined according to actual circumstances.
As a preferred embodiment, S12 includes:
obtaining the voltage V of the input end of the coaxial cable between the radio frequency power supply and the matching boxgenAnd current Igen；
Determining an ABCD matrix of the coaxial cable;
based on voltage VgenCurrent IgenAnd obtaining the impedance Z of the input end of the matching box of the current sweep frequency period by the ABCD matrixmatch；
Wherein,
f is the frequency of the current sweep period, l is the length of the coaxial cable, and m is a constant;
the impedance of the input end of the matching box can not be directly obtained through the sensor, and therefore the impedance is indirectly obtained through the coaxial cable. In particular, the present application considers that the coaxial cable is a typical two-port network, and the characteristics of the coaxial cable can be characterized by an ABCD matrix, wherein the ABCD matrix is convenient for researching the cascade connection of the two-port network, but each element in the matrix has no definite physical meaning.
Referring to fig. 4 and 5, fig. 4 is a schematic diagram of an impedance adjusting system of an input end of a matching box according to the present invention, and fig. 5 is a smith chart of an impedance of the input end of the matching box and an impedance of the input end of a coaxial cable according to the present invention. At a different placeHas different electrical lengths, so that the impedance Z at the input end of the coaxial cablegenThe trajectory on the smith circle is rotational, with multiple intersections with lines that exhibit pure resistance. Taking the impedance of the rf power supply as 50 Ω as an example, when the impedance of the input end of the matching box matches the impedance of the rf power supply, the trace of the impedance of the input end of the matching box intersects the trace of the impedance of the input end of the coaxial cable at a 50 Ω pure resistive line on the smith circle.
Obtaining a voltage V at the input end of a coaxial cable between a radio frequency power supply and a matching box for obtaining the impedance at the input end of the matching boxgenAnd current IgenCorresponding impedance of ZgenThen determining the ABCD matrix of the coaxial cable, voltage VgenAnd current IgenThe product of the voltage V and the ABCD matrix is the voltage V of the input end of the matching boxmatchAnd current ImatchBased on the voltage V at the input of the matching boxmatchAnd current ImatchThe impedance Z of the input end of the matching box can be obtainedmatch。
Therefore, the impedance of the input end of the matching box can be obtained in the mode, and the accuracy is high.
As a preferred embodiment, obtaining the standing wave ratio of the current sweep period based on the impedance of the input end of the matching box of the current sweep period includes:
impedance Z of input end of matching box based on current sweep frequency periodmatchAnd a target impedance ZoObtaining a reflection coefficient K of the current sweep frequency period;
obtaining the standing wave ratio VSWR of the current frequency sweep period based on the reflection coefficient K of the current frequency sweep period0；
Wherein,
matching box output according to current sweep frequency periodImpedance Z of input terminalmatchObtaining the standing-wave ratio of the current sweep frequency period;
wherein,
after the impedance of the input end of the matching box is obtained, the standing-wave ratio of the current sweep frequency period can be obtained based on the impedance of the input end of the matching box, so that whether the impedance of the input end of the current matching box is matched with the impedance of the radio frequency power supply or not is judged, and the reliability is high.
As a preferred embodiment, the target impedance Zo＝50Ω。
Of course, the target impedance may be other values, such as 75 Ω, determined by the impedance of the rf power source.
The present invention also provides an impedance adjusting apparatus of an input end of a matching box, comprising:
a memory for storing a computer program;
and a processor for implementing the steps of the impedance adjusting method for the input end of the matching box when executing the computer program.
The invention also provides a radio frequency power supply system which comprises a radio frequency power supply, a matching box, a coaxial cable arranged between the radio frequency power supply and the matching box and an impedance adjusting device at the input end of the matching box.
For the introduction of the impedance adjusting device at the input end of the matching box and the rf power system provided by the present invention, please refer to the above method embodiment, which is not repeated herein.
It should be noted that, in the present specification, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (8)
1. A method of adjusting impedance at an input of a matching box, comprising:
s11: setting the working frequency of the radio frequency power supply according to the frequency of the current sweep frequency period;
s12: determining the impedance of the input end of the matching box in the current sweep frequency period;
s13: obtaining the standing-wave ratio of the current frequency sweep period based on the impedance of the input end of the matching box of the current frequency sweep period, judging whether the standing-wave ratio is smaller than a matching threshold value, and if so, entering S15; otherwise, go to S14;
s14: determining a step size for frequency increase for a next sweep period based on impedance of an input of a match box for a current sweep period
And returns to S11; wherein,
，
in order to be the basic step size,
in order to achieve the gain,
is the phase angle of the impedance at the input of the matching box;
s15: and determining the frequency of the current sweep frequency period as the optimal frequency for realizing impedance matching of the radio frequency power supply.
2. The method for adjusting the impedance of an input terminal of a matching box according to claim 1, wherein S11 is preceded by:
setting the iteration number N = 0;
before returning to S11 in S14, the method further includes:
adding 1 to the iteration number N;
and judging whether N is larger than an iteration threshold, if so, judging that the matching is failed, and otherwise, returning to the step of S11.
3. The method of adjusting the impedance of an input terminal of a matching box according to claim 1, wherein the matching threshold is 1.06.
4. A method for adjusting impedance of an input terminal of a matching box according to any one of claims 1 to 3, wherein S12 includes:
obtaining the voltage of the input end of the coaxial cable between the radio frequency power supply and the matching box
And current
；
Determining an ABCD matrix of the coaxial cable;
based on the voltage
Current of
And obtaining the impedance of the input end of the matching box of the current sweep frequency period by the ABCD matrix
；
Wherein,
，
；
5. the method for adjusting the impedance of the input end of the matching box as claimed in claim 4, wherein obtaining the standing wave ratio of the current sweep period based on the impedance of the input end of the matching box of the current sweep period comprises:
impedance of input end of matching box based on current sweep period
And target impedance
Obtaining the reflection coefficient of the current sweep frequency period
；
Reflection coefficient based on the current sweep period
Obtaining the standing-wave ratio of the current sweep frequency period
；
Wherein,
；
impedance of the input end of the matching box according to the current sweep period
Obtaining the standing-wave ratio of the current sweep frequency period;
wherein,
。
6. the impedance adjusting method of an input terminal of a matching box according to claim 5, wherein the target impedance
。
7. An impedance adjusting apparatus of an input terminal of a matching box, comprising:
a memory for storing a computer program;
a processor for implementing the steps of the method of impedance adjustment of the input of the matching box according to any of claims 1 to 6 when executing the computer program.
8. A radio frequency power supply system comprising a radio frequency power supply, a matching box, and a coaxial cable disposed between the radio frequency power supply and the matching box, further comprising an impedance adjusting device of an input end of the matching box according to claim 7.
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| CN101325837A (en) * | 2008-06-20 | 2008-12-17 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Plasma processing apparatus and radio frequency matching network thereof |
| DE102009054449A1 (en) * | 2009-11-25 | 2011-05-26 | Hüttinger Elektronik Gmbh + Co. Kg | Self-balancing RF plasma power supply |
| CN102573264A (en) * | 2011-12-01 | 2012-07-11 | 西安交通大学 | Open type unipolar radio-frequency non-thermal plasma generating device at atmospheric pressure |
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| US5897712A (en) * | 1996-07-16 | 1999-04-27 | Applied Materials, Inc. | Plasma uniformity control for an inductive plasma source |
| CN101325837A (en) * | 2008-06-20 | 2008-12-17 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Plasma processing apparatus and radio frequency matching network thereof |
| DE102009054449A1 (en) * | 2009-11-25 | 2011-05-26 | Hüttinger Elektronik Gmbh + Co. Kg | Self-balancing RF plasma power supply |
| CN102573264A (en) * | 2011-12-01 | 2012-07-11 | 西安交通大学 | Open type unipolar radio-frequency non-thermal plasma generating device at atmospheric pressure |
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