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CN111398693A - Method for measuring ESR (equivalent series resistance) and Q (Q) value of vacuum capacitor based on S-parameter network analyzer - Google Patents

Method for measuring ESR (equivalent series resistance) and Q (Q) value of vacuum capacitor based on S-parameter network analyzer Download PDF

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Publication number
CN111398693A
CN111398693A CN202010351620.5A CN202010351620A CN111398693A CN 111398693 A CN111398693 A CN 111398693A CN 202010351620 A CN202010351620 A CN 202010351620A CN 111398693 A CN111398693 A CN 111398693A
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network analyzer
vacuum capacitor
parameter network
esr
value
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CN202010351620.5A
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张超
刘锐
孙鹏
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Jiangsu Shenzhou Semi Technology Co ltd
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Jiangsu Shenzhou Semi Technology Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2688Measuring quality factor or dielectric loss, e.g. loss angle, or power factor
    • G01R27/2694Measuring dielectric loss, e.g. loss angle, loss factor or power factor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2605Measuring capacitance

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measurement Of Resistance Or Impedance (AREA)

Abstract

The invention provides a method for measuring ESR and Q values of a vacuum capacitor based on an S parameter network analyzer, which comprises the following steps: connecting two test ports of the S parameter network analyzer with a test fixture through a transmission cable; connecting two ends of a vacuum capacitor to be tested between a microstrip line and a ground wire in the test fixture; measuring the resonant frequency of the vacuum capacitor to be measured under different frequencies and the S21 value under the resonant frequency; and calculating and outputting the ESR value and the Q value of the vacuum capacitor to be detected according to the resonant frequency of the vacuum capacitor to be detected under different frequencies and the S21 value under the resonant frequency. The method disclosed by the invention has the advantages that the resonance frequency of the vacuum capacitor under different frequencies and the S21 value under the resonance frequency are firstly calculated by using the S parameter network analyzer, and the ESR and Q values can be accurately calculated according to the relation among the resonance frequency, the S21 value and the ESR and Q values.

Description

Method for measuring ESR (equivalent series resistance) and Q (Q) value of vacuum capacitor based on S-parameter network analyzer
Technical Field
The invention relates to the technical field of vacuum capacitor detection, in particular to a method for measuring ESR and Q values of a vacuum capacitor based on an S parameter network analyzer.
Background
A vacuum capacitor is a capacitor using vacuum as a medium. The electrode group of the capacitor is a group of concentric cylindrical electrodes formed by adopting high-conductivity oxygen-free copper strips and extending through a whole set of high-precision die one by one, and the electrodes are sealed in a vacuum container. Therefore, the performance is stable and reliable, and phenomena such as arcing, corona and the like are not easy to generate.
In theory, the capacitor itself does not generate any energy loss, but in practice, because the capacitor is made of a material with a resistance, the dielectric medium of the capacitor is lost, and the loss is externally represented as if a resistor is connected in series with the capacitor, so the resistor is called "equivalent series resistance", abbreviated as ESR.
The Q value of the capacitor is a main parameter for measuring the capacitance device, which is the ratio of the capacitance reactance presented by the capacitor when the capacitor is operated under an alternating voltage of a certain frequency to the equivalent loss resistance.
The ESR and Q values of the capacitor have great influence on the capacitor in a high-frequency application circuit, and if the ESR and Q values cannot be accurately measured, the use effect of the capacitor is seriously influenced. In view of this, how to provide a method for accurately measuring ESR and Q values of a vacuum capacitor is a technical problem to be solved by those skilled in the art.
Disclosure of Invention
The present invention is directed to solving, at least to some extent, one of the technical problems in the related art.
Therefore, the invention aims to provide a method for measuring ESR and Q values of a vacuum capacitor based on an S-parameter network analyzer, which comprises the following steps:
the method comprises the following steps: connecting two test ports of the S parameter network analyzer with a test fixture through a transmission cable;
step two: connecting two ends of a vacuum capacitor to be tested between a microstrip line and a ground wire in the test fixture;
step three: measuring the resonant frequency of the vacuum capacitor to be measured under different frequencies and the S21 value under the resonant frequency;
step four: and calculating and outputting the ESR value and the Q value of the vacuum capacitor to be detected according to the resonant frequency of the vacuum capacitor to be detected under different frequencies and the S21 value under the resonant frequency.
Optionally, the lower limit of the response frequency of the S-parameter network analyzer is not higher than 200kHz, and the upper limit of the response frequency of the S-parameter network analyzer is not lower than 3 GHz.
Optionally, the impedance of the transmission cable to the test fixture is not lower than 50 Ω.
Optionally, after the connection in the second step is completed, the path calibration is performed on the S-parameter network analyzer.
Optionally, the path calibrated standing wave ratio VSWR is not greater than 1.01.
Optionally, two ends of the vacuum capacitor to be tested are welded between the microstrip line and the ground wire in the test fixture.
Optionally, the test fixture has a dielectric constant of 3.5, a thickness of 1.52mm, and a loss tangent of 0.001.
Optionally, the distance between the microstrip line and the ground line is 1.5 mm.
Optionally, the resonant frequency of the vacuum capacitor to be measured at different frequencies and the S21 value at the resonant frequency are measured once every other fixed frequency range within the response frequency range of the S parameter network analyzer.
Compared with the closest prior art, the technical scheme provided by the invention has the following beneficial effects:
the method disclosed by the invention has the advantages that the resonance frequency of the vacuum capacitor under different frequencies and the S21 value under the resonance frequency are firstly calculated by using the S parameter network analyzer, and the ESR and Q values can be accurately calculated according to the relation among the resonance frequency, the S21 value and the ESR and Q values.
In addition, in the method, two test ports of the S parameter network analyzer are connected with the test clamp through the transmission cable with known parameters and then connected with the vacuum capacitor to be tested, so that the influence of the distributed parameters on the test result can be greatly reduced, and the detection accuracy is further improved.
Drawings
The foregoing and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a flow chart of a method according to an embodiment of the present invention.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.
The following describes a method for measuring ESR and Q values of a vacuum capacitor based on an S-parameter network analyzer according to an embodiment of the present invention with reference to the drawings.
Referring to fig. 1, a method for measuring ESR and Q values of a vacuum capacitor based on an S-parameter network analyzer according to an embodiment of the present invention includes:
the method comprises the following steps: connecting two test ports of the S parameter network analyzer with a test fixture through a transmission cable;
step two: connecting two ends of a vacuum capacitor to be tested between a microstrip line and a ground wire in the test fixture;
step three: measuring the resonant frequency of the vacuum capacitor to be measured under different frequencies and the S21 value under the resonant frequency;
step four: and calculating and outputting the ESR value and the Q value of the vacuum capacitor to be detected according to the resonant frequency of the vacuum capacitor to be detected under different frequencies and the S21 value under the resonant frequency.
In the embodiment of the invention, firstly, two test ports of an S parameter network analyzer are connected with a test fixture through a transmission cable, a vacuum capacitor to be tested is connected into a circuit of the S parameter network analyzer between a microstrip line and a ground wire in the test fixture, and the resonant frequency of the vacuum capacitor to be tested under different frequencies and the S21 value under the resonant frequency are calculated through the S parameter network analysis function of the S parameter network analyzer. And then, calculating the ESR value and the Q value of the vacuum capacitor to be measured according to the skin effect public indication (1), the ESR (S21) conversion public indication (2) and the Q value calculation public indication (3).
The skin effect expression (1), the ESR (S21) conversion expression (2), and the Q value calculation expression (3) are as follows:
Figure DEST_PATH_IMAGE002
······················(1)
Figure DEST_PATH_IMAGE004
·······················(2)
Figure DEST_PATH_IMAGE006
·························(3)
therefore, the ESR value and the Q value of the vacuum capacitor can be conveniently and accurately calculated.
Specifically, according to the method for measuring the ESR and Q values of the vacuum capacitor based on the S-parameter network analyzer provided by the embodiment of the present invention, the lower limit of the response frequency of the S-parameter network analyzer is not higher than 200kHz, the upper limit of the response frequency of the S-parameter network analyzer is not lower than 3GHz, and the upper limit of the response frequency of the S-parameter network analyzer is not lower than 3 GHz.
Specifically, the impedance of the transmission cable and the test fixture is not lower than 50 Ω. Generally, the ESR value of the vacuum capacitor is small, lower than 0.5 Ω. Therefore, the test fixture with the impedance not lower than 50 omega is selected to be connected in parallel with the vacuum capacitor to be tested (the difference is more than 100 times), and the influence of the test fixture with large impedance on the test result can be ignored.
Specifically, after the connection in step two of the embodiment of the present invention is completed, a path calibration may be performed on the S-parameter network analyzer, and when the standing-wave ratio VSWR after the path calibration is not greater than 1.01, it indicates that the response interval of the S-parameter network analyzer is relatively wide, the response range in the detection process is very wide, and the stability of the detection result is relatively good.
Specifically, two ends of the vacuum capacitor to be tested are welded between a microstrip line and a ground wire in the test fixture, the dielectric constant of the test fixture is 3.5, the thickness of the test fixture is 1.52mm, the loss tangent of the test fixture is 0.001, and the distance between the microstrip line and the ground wire is 1.5 mm. The selection of the test fixture is based on the theory of microstrip transmission lines, and a high-quality microwave dielectric plate is selected, so that the influence of parasitic parameters and the limit of a tested frequency range can be reduced, and the test accuracy can be greatly improved.
Specifically, the resonant frequency of the vacuum capacitor to be tested at different frequencies and the S21 value at the resonant frequency are measured once in the response frequency range of the S parameter network analyzer at intervals of a fixed frequency range, so that the vacuum capacitor to be tested can be tested for multiple times in different frequency bands in the whole response range, and the S parameter network analyzer has very high representativeness.
In summary, in the method of the embodiment of the present invention, the S parameter network analyzer is first used to calculate the resonant frequency of the vacuum capacitor at different frequencies and the S21 value at the resonant frequency, and then the ESR and the Q value can be accurately calculated according to the relationship between the resonant frequency, the S21 value, and the ESR and the Q value. In addition, in the method shown in the embodiment of the invention, the two test ports of the S parameter network analyzer are connected with the test fixture through the transmission cable with known parameters and then connected with the vacuum capacitor to be tested, so that the influence of the distributed parameters on the test result can be greatly reduced, and the detection accuracy is further improved.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
Any process or method descriptions in flow charts or otherwise described herein may be understood as representing modules, segments, or portions of code which include one or more executable instructions for implementing steps of a custom logic function or process, and alternate implementations are included within the scope of the preferred embodiment of the present invention in which functions may be executed out of order from that shown or discussed, including substantially concurrently or in reverse order, depending on the functionality involved, as would be understood by those reasonably skilled in the art of the present invention.

Claims (9)

1. A method for measuring ESR and Q values of a vacuum capacitor based on an S-parameter network analyzer is characterized by comprising the following steps:
the method comprises the following steps: connecting two test ports of the S parameter network analyzer with a test fixture through a transmission cable;
step two: connecting two ends of a vacuum capacitor to be tested between a microstrip line and a ground wire in the test fixture;
step three: measuring the resonant frequency of the vacuum capacitor to be measured under different frequencies and the S21 value under the resonant frequency;
step four: and calculating and outputting the ESR value and the Q value of the vacuum capacitor to be detected according to the resonant frequency of the vacuum capacitor to be detected under different frequencies and the S21 value under the resonant frequency.
2. The method for measuring ESR and Q values of vacuum capacitors based on the S-parameter network analyzer as claimed in claim 1, wherein the lower limit of the response frequency of the S-parameter network analyzer is not higher than 200kHz, and the upper limit of the response frequency of the S-parameter network analyzer is not lower than 3 GHz.
3. The method for measuring ESR and Q values of vacuum capacitors based on the S-parameter network analyzer as claimed in claim 1, wherein the impedance of the transmission cable and the test fixture is not lower than 50 Ω.
4. The method for measuring the ESR and Q values of the vacuum capacitor based on the S-parameter network analyzer as claimed in claim 1, wherein the S-parameter network analyzer is subjected to channel calibration after the connection of the second step is completed.
5. The method of claim 4, wherein the calibrated channel standing wave ratio (VSWR) is not greater than 1.01.
6. The method for measuring the ESR and Q values of the vacuum capacitor based on the S-parameter network analyzer as claimed in claim 1, wherein two ends of the vacuum capacitor to be tested are welded between a microstrip line and a ground wire in the test fixture.
7. The method for measuring ESR and Q values of vacuum capacitors based on an S-parameter network analyzer as claimed in claim 1 or 6, wherein the test fixture has a dielectric constant of 3.5, a thickness of 1.52mm and a loss tangent of 0.001.
8. The method for measuring the ESR and Q values of the vacuum capacitor based on the S-parameter network analyzer as claimed in claim 1, wherein the distance between the microstrip line and the ground line is 1.5 mm.
9. The method for measuring the ESR and the Q of the vacuum capacitor based on the S-parameter network analyzer as claimed in claim 1, wherein the resonant frequency of the vacuum capacitor to be measured at different frequencies and the S21 value at the resonant frequency are measured once every other fixed frequency range in the response frequency range of the S-parameter network analyzer.
CN202010351620.5A 2020-04-28 2020-04-28 Method for measuring ESR (equivalent series resistance) and Q (Q) value of vacuum capacitor based on S-parameter network analyzer Pending CN111398693A (en)

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CN111751626A (en) * 2020-07-28 2020-10-09 大连达利凯普科技有限公司 Resonant cavity applied to 5G element and testing method
CN113219257A (en) * 2021-04-29 2021-08-06 深圳市东昕科技有限公司 Parameter measuring circuit of capacitor and ESR capacity measuring instrument of capacitor

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CN113219257A (en) * 2021-04-29 2021-08-06 深圳市东昕科技有限公司 Parameter measuring circuit of capacitor and ESR capacity measuring instrument of capacitor

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Application publication date: 20200710