CN111396701B - X, Y direction adjustable base mechanism convenient to adjust and assemble and disassemble - Google Patents
X, Y direction adjustable base mechanism convenient to adjust and assemble and disassemble Download PDFInfo
- Publication number
- CN111396701B CN111396701B CN202010224195.3A CN202010224195A CN111396701B CN 111396701 B CN111396701 B CN 111396701B CN 202010224195 A CN202010224195 A CN 202010224195A CN 111396701 B CN111396701 B CN 111396701B
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- locking
- base
- right adjusting
- screw
- limiting block
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- 230000007246 mechanism Effects 0.000 title claims abstract description 50
- 230000001154 acute effect Effects 0.000 claims abstract description 5
- 230000006835 compression Effects 0.000 claims description 7
- 238000007906 compression Methods 0.000 claims description 7
- 238000009434 installation Methods 0.000 abstract description 9
- 230000006872 improvement Effects 0.000 description 9
- 239000004065 semiconductor Substances 0.000 description 5
- 238000012423 maintenance Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
- F16M11/043—Allowing translations
- F16M11/045—Allowing translations adapted to left-right translation movement
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
- F16M11/043—Allowing translations
- F16M11/048—Allowing translations adapted to forward-backward translation movement
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/18—Heads with mechanism for moving the apparatus relatively to the stand
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Drawers Of Furniture (AREA)
- Casings For Electric Apparatus (AREA)
Abstract
The X, Y-direction adjustable base mechanism convenient to adjust and assemble and disassemble comprises a base and a module installation bottom plate, wherein the module installation bottom plate can move forwards, backwards, leftwards and rightwards in a preset range through at least two set screws and is movably connected to the base; a chute is arranged on the upper bottom surface of the base opposite to the module mounting bottom plate, and an included angle alpha formed by the intersection of an extension line of the chute center line of the chute and the base center line of the base is an acute angle; a left-right adjusting mechanism for adjusting the left-right movement of the module installation bottom plate is arranged in the chute; the bottom of the base is provided with a base front-back adjusting mechanism and a base locking mechanism for locking the base. The invention has the advantages of good universality, convenient adjustment and simple structure.
Description
Technical Field
The invention relates to the technical field of automation equipment for the semiconductor industry, in particular to a modularized X, Y direction-adjustable base mechanism which is convenient to adjust and assemble and disassemble.
Background
With the rapid development of the global semiconductor industry, the demand for various types of semiconductor devices has increased dramatically. In the automatic production and processing process of semiconductor products, the requirements on the productivity of equipment are higher and higher, so that the requirements on the precision, the speed, the modularization, the universality and the maintenance and debugging of a base adjusting mechanism are higher and higher for the semiconductor automatic production equipment which operates at a high speed.
The traditional base adjusting mechanism generally adopts screws to directly fix an adjusting module on a large plate of a workbench, and then adjusts the front-back direction from front or back and adjusts the left-right direction from left or right. The adjusting module has the following problems that firstly, the universality is not strong, screw holes are drilled on the large plate surface of the workbench according to the size of the external dimension of the adjusting module, then the adjusting module is fixed by screws, and the position of the adjusting module can not be changed according to the requirement; secondly, the adjusting module is inconvenient to use and has poor precision; thirdly, the disassembly, the assembly and the maintenance are inconvenient, and the position needs to be repeatedly adjusted every time.
Disclosure of Invention
In order to overcome the problems, the invention provides a X, Y direction-adjustable base mechanism with strong universality, convenient adjustment, simple structure and convenient adjustment and disassembly and assembly for society.
The technical scheme of the invention is as follows: the X, Y-direction adjustable base mechanism with convenient adjustment and disassembly comprises a base and a module installation bottom plate, wherein the module installation bottom plate can move forwards, backwards, leftwards and rightwards in a preset range through at least two set screws and is movably connected to the base; a chute is arranged on the upper bottom surface of the base opposite to the module mounting bottom plate, and an included angle alpha formed by the intersection of an extension line of the chute center line of the chute and the base center line of the base is an acute angle; a left-right adjusting mechanism for adjusting the left-right movement of the module installation bottom plate is arranged in the chute; the bottom of the base is provided with a base front-back adjusting mechanism and a base locking mechanism for locking the base.
As an improvement to the invention, the angle α is selected between 8 degrees and 15 degrees.
As an improvement of the invention, the left and right adjusting mechanism comprises a left and right adjusting block and a left and right adjusting screw rod, the left and right adjusting screw rod is in threaded connection with the left and right adjusting block, and a convex column on the left and right adjusting block extends into a groove on the lower bottom surface of the module mounting bottom plate; and the left and right adjusting screw rods are rotated to enable the left and right adjusting blocks to reciprocate in the chute, so that the module mounting bottom plate is driven to move left and right.
As an improvement to the invention, the left-right adjusting mechanism further comprises a first limiting block, a first limiting block mounting groove is formed in the upper bottom surface of the base, the first limiting block is arranged in the first limiting block mounting groove, and a first groove of the first limiting block is held near the outer ends of the left-right adjusting screw.
As an improvement of the invention, the left-right adjusting mechanism further comprises a compression spring, and the compression spring is sleeved on the left-right adjusting screw rod between the first limiting block and the left-right adjusting block.
As an improvement of the invention, the front-back adjusting mechanism of the base comprises a front-back adjusting screw rod and a guide rail with an inclined plane, the front-back adjusting screw rod is in threaded connection with the base and the guide rail, and the base can move back and forth relative to the guide rail by rotating the front-back adjusting screw rod.
As an improvement of the invention, the base locking mechanism comprises a locking screw and a locking piece with a locking inclined plane, wherein the locking piece is arranged on the locking screw, the locking screw is rotated, and when the locking inclined plane of the locking piece is parallel to the inclined plane of the guide rail, the guide rail and the locking screw are in an unlocking state; when the locking inclined plane of the locking piece is tangent to the inclined plane of the guide rail, the guide rail and the locking screw are in a locking state.
As an improvement to the invention, the base locking mechanism further comprises a locking member, the locking member comprises a locking block and a locking jackscrew, the locking block is held at the middle part of the locking screw through a locking half groove, the locking jackscrew is in threaded connection with a screw hole on the base, and the inner end of the locking jackscrew is abutted against one surface, far away from the locking half groove, of the locking block.
As an improvement to the invention, the base locking mechanism further comprises a second limiting block, a second limiting block mounting groove is formed in the lower bottom surface of the base, the second limiting block is arranged in the second limiting block mounting groove, and a second groove of the second limiting block is held near the outer end of the locking screw.
As an improvement on the invention, the invention further comprises a butterfly spring piece, wherein the butterfly spring piece is positioned between the positioning screw and the module mounting bottom plate.
The invention adopts the structure that the upper bottom surface of the base corresponding to the module installation bottom plate is provided with the chute, and the included angle alpha formed by the intersection of the extension line of the chute central line of the chute and the base central line of the base is an acute angle; a left-right adjusting mechanism for adjusting the left-right movement of the module installation bottom plate is arranged in the chute; the bottom of the base is provided with a base front-back adjusting mechanism and a base locking mechanism for locking the base, so that the invention has the advantages of good universality, convenient adjustment and simple structure.
Drawings
Fig. 1 is a schematic perspective exploded view of an embodiment of the present invention.
Fig. 2 is a schematic perspective view of the assembled structure of fig. 1.
Fig. 3 is a schematic perspective view (unlocked state) of the base of fig. 1 from another perspective.
Fig. 4 is a schematic perspective view of another view of the module mounting base plate of fig. 1.
Fig. 5 is a schematic perspective view of the base locking mechanism of fig. 1 (locked state).
Fig. 6 is a schematic perspective view of the left-right adjusting mechanism in fig. 1.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
Referring to fig. 1 to 6, fig. 1 to 6 disclose a X, Y direction-adjustable base mechanism with convenient adjustment and disassembly, which comprises a base 1 and a module mounting bottom plate 2, wherein the module mounting bottom plate 2 is movably connected to the base 1 by at least two positioning screws 22, and can move forward, backward, left and right in a preset range; a chute 12 is arranged on the upper bottom surface 11 of the base 1 relative to the module mounting bottom plate 2, and an included angle alpha formed by the intersection of an extension line of a chute center line 121 of the chute 12 and a base center line 111 of the base 1 is an acute angle; a left-right adjusting mechanism 3 for adjusting the left-right movement of the module mounting bottom plate 2 is arranged in the chute 12; the bottom of the base 1 is provided with a base front-back adjusting mechanism 4 and a base locking mechanism 5 for locking the base; the invention arranges the chute 12 on the base 1, and arranges the left and right adjusting mechanism 3 in the chute 12, and can move the module mounting baseplate 2 left and right by adjusting the left and right adjusting mechanism 3, thereby achieving the purpose of convenient use. In the invention, the included angle alpha can be selected from 8-15 degrees, and when the included angle alpha is smaller than 8 degrees, the included angle is too small, and the moving step of the module mounting bottom plate 2 is too small; when the included angle alpha is larger than 15 degrees, the area of the base 1 can be increased due to the fact that the included angle is too large, and site installation is not facilitated.
Preferably, the left and right adjusting mechanism 3 includes a left and right adjusting block 31 and a left and right adjusting screw 32, the left and right adjusting screw 32 is in threaded connection with the left and right adjusting block 31, and a protruding column 311 on the left and right adjusting block 31 extends into a groove 21 on the lower bottom surface of the module mounting base plate 2; rotating the left and right adjusting screw 32 causes the left and right adjusting block 31 to reciprocate in the chute 12, thereby driving the module mounting base plate 2 to move left and right.
Preferably, the left and right adjusting mechanism 3 further includes a first stopper 33, a first stopper mounting groove 13 is provided on the upper bottom surface of the base 1, the first stopper 33 is provided in the first stopper mounting groove 13, the first groove 331 of the first stopper 33 is embraced near the outer end of the left and right adjusting screw 32, and the first stopper 33 can prevent the left and right adjusting screw 32 from axially withdrawing.
Preferably, the left-right adjusting mechanism 3 further includes a compression spring 34 (see fig. 6), and the compression spring 34 is sleeved on the left-right adjusting screw 32 between the first limiting block 33 and the left-right adjusting block 31; the compression spring 34 may tighten the screws of the left and right adjusting blocks 31 and the left and right adjusting screws 32, so as to prevent the screws from loosening during use.
Preferably, the base front-rear adjusting mechanism 4 includes a front-rear adjusting screw 41 and a guide rail 42 with a slope 421, the front-rear adjusting screw 41 is screwed with the base 1 and the guide rail 42, and the base 1 can be moved back and forth relative to the guide rail 42 by rotating the front-rear adjusting screw 41; in use, the guide rail 42 must be secured to the mounting plate of the machine to secure the guide rail 42.
Preferably, the base locking mechanism 5 includes a locking screw 51 and a locking member 52 with a locking inclined surface 521, the locking member 52 is provided on the locking screw 51, the locking screw 51 is rotated, and when the locking inclined surface 521 of the locking member 52 is parallel to the inclined surface 421 of the guide rail 42, the guide rail 42 and the locking screw 51 are in an unlocked state; when the locking slope 521 of the locking member 52 is tangential to the slope 421 of the guide rail 42, the guide rail 42 is in a locked state with the locking screw 51.
Preferably, the base locking mechanism 5 further comprises a locking member 53, the locking member 53 comprises a locking block 531 and a locking jackscrew 532, the locking block 531 is embraced in the middle of the locking screw 51 through a locking half groove 5311, the locking jackscrew 532 is in threaded connection with a screw hole 14 (see fig. 3) on the base 1, and the inner end of the locking jackscrew 532 abuts against a surface, away from the locking half groove 5311, of the locking block 531.
Preferably, the base locking mechanism 5 further includes a second stopper 54, a second stopper mounting groove 541 is provided on a lower bottom surface of the base 1, the second stopper 54 is provided in the second stopper mounting groove 541, and a second groove 542 of the second stopper 54 is embraced near an outer end of the locking screw 51.
Preferably, the invention further comprises a butterfly spring 221, and the butterfly spring 221 is located between the set screw 22 and the module mounting base plate 2.
In the present invention, the outer ends of the left and right adjusting screws 32, the outer ends of the front and rear adjusting screws 41 and the outer ends of the locking screws 51 are exposed from the same side of the base 1, so as to facilitate the adjustment of the user.
The invention is not limited to the specific embodiments described herein, but is intended to cover modifications of the invention as well as equivalent arrangements included within the scope of the appended claims.
Claims (3)
1. X, Y direction adjustable base mechanism convenient to adjust and assemble and disassemble is characterized in that: the device comprises a base (1) and a module mounting bottom plate (2), wherein the module mounting bottom plate (2) can move forwards, backwards, leftwards and rightwards in a preset range through at least two set screws (22) and is movably connected to the base (1); a chute (12) is arranged on the upper bottom surface (11) of the base (1) relative to the module mounting bottom plate (2), and an included angle (alpha) formed by the intersection of an extension line of a chute center line (121) of the chute (12) and a base center line (111) of the base (1) is an acute angle; A left-right adjusting mechanism (3) for adjusting the left-right movement of the module mounting bottom plate (2) is arranged in the chute (12); the bottom of the base (1) is provided with a base front-back adjusting mechanism (4) and a base locking mechanism (5) for locking the base; the left and right adjusting mechanism (3) comprises a left and right adjusting block (31) and a left and right adjusting screw (32), the left and right adjusting screw (32) is in threaded connection with the left and right adjusting block (31), and a convex column (311) on the left and right adjusting block (31) extends into a groove (21) on the lower bottom surface of the module mounting bottom plate (2); rotating the left and right adjusting screw rods (32) can enable the left and right adjusting blocks (31) to reciprocate in the chute (12), so that the module mounting bottom plate (2) is driven to move left and right; The left-right adjusting mechanism (3) further comprises a first limiting block (33), a first limiting block mounting groove (13) is formed in the upper bottom surface of the base (1), the first limiting block (33) is arranged in the first limiting block mounting groove (13), and a first groove (331) of the first limiting block (33) is held near the outer ends of the left-right adjusting screw (32); the left-right adjusting mechanism (3) further comprises a compression spring (34), and the compression spring (34) is sleeved on the left-right adjusting screw (32) between the first limiting block (33) and the left-right adjusting block (31); the base front-rear adjusting mechanism (4) comprises a front-rear adjusting screw (41) and a guide rail (42) with an inclined surface (421), the front-rear adjusting screw (41) is in threaded connection with the base (1) and the guide rail (42), and the base (1) can be moved forwards and backwards relative to the guide rail (42) by rotating the front-rear adjusting screw (41); The base locking mechanism (5) comprises a locking screw rod (51) and a locking piece (52) with a locking inclined plane (521), the locking piece (52) is arranged on the locking screw rod (51), the locking screw rod (51) is rotated, and when the locking inclined plane (521) of the locking piece (52) is parallel to the inclined plane (421) of the guide rail (42), the guide rail (42) and the locking screw rod (51) are in an unlocking state; when the locking inclined surface (521) of the locking piece (52) is tangential to the inclined surface (421) of the guide rail (42), the guide rail (42) and the locking screw (51) are in a locking state; The base locking mechanism (5) further comprises a locking member (53), the locking member (53) comprises a locking block (531) and a locking jackscrew (532), the locking block (531) is held at the middle part of the locking screw (51) through a locking half groove (5311), the locking jackscrew (532) is in threaded connection with a screw hole on the base (1), and the inner end of the locking jackscrew (532) is abutted against one surface, far away from the locking half groove (5311), of the locking block (531); the base locking mechanism (5) further comprises a second limiting block (54), a second limiting block mounting groove (541) is formed in the lower bottom surface of the base (1), the second limiting block (54) is arranged in the second limiting block mounting groove (541), and a second groove (542) of the second limiting block (54) is held near the outer end of the locking screw (51).
2. The adjustable X, Y direction base unit of claim 1, wherein: the included angle (alpha) is selected between 8 degrees and 15 degrees.
3. The adjustable X, Y direction base unit of claim 1 or 2, wherein: the device further comprises a butterfly-shaped elastic piece (221), wherein the butterfly-shaped elastic piece (221) is positioned between the positioning screw (22) and the module mounting bottom plate (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010224195.3A CN111396701B (en) | 2020-03-26 | 2020-03-26 | X, Y direction adjustable base mechanism convenient to adjust and assemble and disassemble |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010224195.3A CN111396701B (en) | 2020-03-26 | 2020-03-26 | X, Y direction adjustable base mechanism convenient to adjust and assemble and disassemble |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111396701A CN111396701A (en) | 2020-07-10 |
| CN111396701B true CN111396701B (en) | 2024-07-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010224195.3A Active CN111396701B (en) | 2020-03-26 | 2020-03-26 | X, Y direction adjustable base mechanism convenient to adjust and assemble and disassemble |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111396701B (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN212361322U (en) * | 2020-03-26 | 2021-01-15 | 深圳市标谱软件科技有限公司 | X, Y direction adjustable base mechanism with convenient adjustment, calibration and disassembly |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2831958B1 (en) * | 2001-11-05 | 2004-01-23 | Centre Nat Etd Spatiales | ROTATING TRAY DEVICE FOR SUPPORTING AND ORIENTING A LOAD |
| DE202004015016U1 (en) * | 2004-09-27 | 2004-11-18 | Cheng, Sheng-Huan, Lu-Chou | Steering operating mechanism for skateboard includes assembly seat fixed to front end of footplate |
| CN208817017U (en) * | 2018-09-12 | 2019-05-03 | 深圳市诺泰自动化设备有限公司 | A kind of novel base mechanism |
-
2020
- 2020-03-26 CN CN202010224195.3A patent/CN111396701B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN212361322U (en) * | 2020-03-26 | 2021-01-15 | 深圳市标谱软件科技有限公司 | X, Y direction adjustable base mechanism with convenient adjustment, calibration and disassembly |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111396701A (en) | 2020-07-10 |
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Effective date of registration: 20220921 Address after: Floors 1-3, 5, 7-8, Building A, Tea Tree, Tongfuyu Industrial Park, Inner Ring Road, Sanwei Community, Hangcheng Street, Bao'an District, Shenzhen, Guangdong 518000 Applicant after: Shenzhen Biaopu Semiconductor Co.,Ltd. Address before: 518000 5th floor, building a, tea tree, tongfuyu Industrial Park, inner ring road, Sanwei community, Hangcheng street, Bao'an District, Shenzhen City, Guangdong Province Applicant before: Shenzhen standard spectrum software technology Co.,Ltd. |
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