CN111372343A - Distributed microwave phase control method - Google Patents

Abstract

The invention discloses a distributed microwave phase control method, which comprises the following steps: enabling a plurality of phase control power modules to input microwaves into the cavity through each input port, and enabling the microwaves in the cavity to present a first electric field distribution; and enabling each phase control power module to adjust the phase of the microwave input into the cavity from each input port, so that the microwave in the cavity generates a second electric field distribution which is complementary to the first electric field distribution due to the change of the phase.

Description

Distributed microwave phase control method

technical field

The invention relates to microwave control technology, in particular to a distributed microwave phase control method.

Background technique

The traditional microwave heating technology uses the magnetron to generate microwaves to heat the object to be heated. However, the electric field intensity distribution of the microwave in this heating method is easily uneven, so that the part of the object to be heated located in the weak electric field area will be affected by the higher absorption intensity. The weak electric field produces a low heating area without significant heating, and the part of the object to be heated in the strong electric field area will generate a high heating area with significant heating due to the absorption of the strong electric field, thus causing the heated object to be heated by microwaves. Uneven heating condition.

In addition, in order to increase the temperature of the object to be heated in the low heat-receiving area, the distribution of the electric field intensity can generally be changed by a mechanical turntable or a microwave stirrer, but the effect is still limited.

Therefore, how to effectively perform regional heating or overall uniform heating is one of the urgent issues to be solved in the current industry.

SUMMARY OF THE INVENTION

The invention provides a distributed microwave phase control method, which can effectively perform regional heating or overall uniform heating.

The distributed microwave phase control method of the present invention includes: providing a casing with a chamber inside, and forming a plurality of input ports communicating with the chambers on the casing; allowing a plurality of phase-controlled power modules to transmit microwaves through each input port input into the cavity, so that the microwave in the cavity presents a first electric field distribution; and make each phase control power module adjust the phase of the microwave input into the cavity through each input port, so that the microwave in the cavity is generated due to the change of the phase The second electric field distribution is complementary to the first electric field distribution.

As can be seen from the above, the present invention utilizes a distributed input port array formed on the casing, and then provides microwaves of different phases to the input port through the phase-controlled power module for input to the chamber, and can actively (actively) control the chamber. The conversion of the electric field strength distribution of the microwaves in the chamber in different stages makes the electric fields of the microwaves in the chamber in different stages present complementary electric field distributions to each other, so that the heated object in the chamber can be obtained from the complementary electric field distributions in different stages. More uniform heating, thereby improving the uneven heating of traditional heaters.

Description of drawings

Fig. 1 is the system schematic diagram of applying the distributed microwave phase control method of the present invention;

Fig. 2 is the schematic flow chart of the distributed microwave phase control method of the present invention;

3 is a perspective view of the first embodiment of the input port of the present invention on a rectangular housing;

Fig. 4 is the electric field distribution diagram of the chamber of Fig. 3 of the present invention;

5 is a graph of the electric field between the input port port1 and the input port port2 when the chamber size of FIG. 4 is 2λ*2λ*1λ of the present invention;

Fig. 6 is the schematic diagram of the phase matching wave of the present invention;

Fig. 7 is the electric field distribution diagram of the phase matching wave of Fig. 4 of the present invention in circulation;

Fig. 8 is the schematic diagram of the object to be heated with a central sheet placed in the chamber shown in Fig. 3 of the present invention;

Fig. 9 is the temperature distribution diagram of the object to be heated in Fig. 8 of the present invention;

10 is a perspective view of a second embodiment of the input port of the present invention on a rectangular housing;

FIG. 11 is a temperature distribution diagram of the object to be heated in FIG. 10 of the present invention;

12 is a perspective view of a third embodiment of the input port of the present invention on a rectangular housing;

13 is a cross-sectional electric field distribution diagram of the chamber of FIG. 12 of the present invention; and

Figure 14 is a schematic view of the cylindrical housing of the present invention.

Symbol Description

1 shell

2-Phase Power Modules

3 Serial peripheral interface

4 Microprocessor

5 chambers

6 heated object

7 stage

8 Electric field distribution

51 The first electric field curve

52 Second electric field curve

61 Standing wave

62 Phase-matched waves

A node

B crest

C trough

Port input port

Steps S1 to S4.

Detailed ways

The embodiments of the present invention are described below by means of specific embodiments, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification.

It should be noted that the structures, proportions, sizes, etc. shown in the accompanying drawings of this specification are only used to cooperate with the contents disclosed in the specification for the understanding and reading of those who are familiar with the technology, and are not intended to limit the present invention. The limited conditions that can be implemented have no technical significance. Any modification of the structure, change of the proportional relationship or adjustment of the size should still fall within the scope of the present invention without affecting the effect and the purpose that the present invention can achieve. It is within the scope that the technical content disclosed in the present invention can cover. At the same time, terms such as "first", "second" and "third" quoted in this specification are only for the convenience of description and clarity, and are not used to limit the scope of implementation of the present invention. Changes or adjustments, without substantial changes to the technical content, should be regarded as the scope of the present invention.

Please refer to FIG. 1 , which is a schematic diagram of a system applying the distributed microwave phase control method of the present invention. The system includes: a casing 1 with a chamber 5 inside; a plurality of input ports (ports) located on the casing 1 and communicate with the chamber; a plurality of phase-controlled power modules 2 are connected to each of the input ports to provide microwaves to each of the input ports, so that each of the input ports inputs the microwaves into the chamber 5; a serial peripheral interface 3, which is connected with each of the phase-controlled power modules 2; and a microprocessor 4, which is connected with the serial peripheral interface 3, and controls the power of the microwave output by each phase-controlled power module 2 through the serial peripheral interface 3 and phase.

Please refer to FIG. 2 , which is a schematic flow chart of the distributed microwave phase control method of the present invention, including: in step S1 , a casing 1 with a chamber 5 inside is provided; in step S2 , on the casing 1 forming a plurality of input ports that communicate with the chamber 5; in step S3, a plurality of phase-controlled power modules 2 are made to provide microwaves to each of the input ports, so as to input the microwaves into the chamber 5 from the input ports, and then Make the microwaves in the cavity 5 exhibit a first electric field distribution; and in step S4, make each of the phase-controlled power modules 2 adjust the phase of the microwaves input to the cavity by the input ports, so that the microwaves in the cavity A second electric field distribution complementary to the first electric field distribution is generated due to the change in phase.

In one embodiment, the casing 1 is rectangular, cylindrical or polygonal, but not limited thereto.

Please refer to FIG. 3 , which is a perspective view of a first arrangement embodiment in which a plurality of input ports are provided on a rectangular casing 1 , wherein the casing 1 is provided with a circular array of input ports symmetrical to each other. Ports port1 to port4.

In one embodiment, the design size of the chamber 5 of the housing 1 is: the length of the Z axis of the chamber 5 is an integer multiple of λ (wavelength of microwave), and the length of the X and Y axes of the chamber 5 is an integer multiple of λ or The integer multiple of λ is plus 0.5λ, but not limited thereto.

Please refer to FIG. 4 , which is an electric field distribution diagram of step S3 and step S4 in the distributed microwave phase control method performed by the casing 1 of FIG. 3 , wherein 1[1,0] refers to port1[peak power size is 1 watt, the phase of the microwave is 0 degrees], and so on, and the size of the chamber 5 of the housing 1 can be divided into four types according to the design rules of the size of the chamber 5, the first one is 1.5λ* A multiple of 1.5λ*1λ, the second is a multiple of 2λ*2λ*1λ, the third is a multiple of 2.5λ*2.5λ*1λ, and the fourth is a multiple of 3λ*3λ*1λ.

It can be seen from Fig. 4 that the electric field distribution diagram distinguishes different electric field intensities according to different grayscale colors. The grayscale color from light to dark represents the electric field intensity from low to high, and the first electric field distribution and the second electric field distribution are complementary to the second electric field distribution. When the map and the first electric field distribution map are stacked together, the weak electric field region in the first electric field distribution map (for example, the middle region) overlaps the strong electric field region in the second electric field distribution map (for example, the middle region), or the second electric field The weak electric field region in the distribution map (eg, the middle region) overlaps the strong electric field region in the first electric field distribution map (eg, the middle region).

In the step S3, each phase-controlled power module 2 provides microwaves of the same phase to the input ports port1 to port4, so that the input ports port1 to port4 input the microwaves of the same phase into the chamber 5, so that the microwaves in the chamber 5 are The microwave exhibits a first electric field distribution, wherein the first electric field distribution is in the form of a standing wave.

In one embodiment, the step S4 enables each phase-controlled power module 2 to adjust the microwaves input from the symmetrical input ports to the chamber to be in opposite phases to each other (for example, the symmetrical input ports of port1 and port3 are 0 or 180 to each other). degree of opposite phase microwave), so that the microwave in the chamber generates a second electric field distribution that is complementary to the first electric field distribution due to the phase change, wherein the second electric field distribution is in the form of standing waves.

In one embodiment, the step S4 enables each phase-controlled power module 2 to adjust the microwaves input from the adjacent input ports to the chamber to be in opposite phases to each other (for example, the inputs of adjacent port1 and port2 are 0 or 180 from each other). degree of opposite phase microwave), so that the microwave in the chamber generates a second electric field distribution that is complementary to the first electric field distribution due to the phase change, wherein the second electric field distribution is in the form of standing waves.

In one embodiment, the step S4 enables each phase-controlled power module 2 to sequentially adjust the microwaves of the input ports (eg, port1 to port4) along the directions of each azimuth angle of the housing 1 to have a phase difference. , so that the microwave in the chamber generates a second electric field distribution in the form of a phase-matching wave due to the phase change.

Please refer to FIG. 5 , which is a graph of the electric field between the input port port1 and the input port port2 when the size of the chamber 5 in FIG. 4 is 2λ*2λ*1λ.

The first electric field curve 51 represents the electric field curve in the form of a standing wave between the input port port1 and the input port port2 when the phases of the microwaves at the input ports port1 to port4 are in the same phase, and the second electric field curve 52 represents the electric field curve of the input ports port1 to port4. When the adjacent input ports are in opposite phases, the electric field curve in the form of a standing wave between the input port port1 and the input port port2, where the node A of the electric field curve represents the weak electric field region, and the peak B or trough C in the strong electric field region is the higher electric field value in the strong electric field region. Relatively, the closer the strong electric field region is to node A, the smaller the electric field value.

It can be seen from FIG. 5 that the position of the node A of the first electric field curve 51 is located in the strong electric field region in the second electric field curve 52 , and the position of the node A of the second electric field curve 52 is in the strong electric field region in the first electric field curve 51 . , in other words, the complementary definition of the electric field curve is that when the first electric field curve 51 and the second electric field curve 52 overlap each other, the position of the node A of the first electric field curve 51 is located in the strong electric field region of the second electric field curve 52 , or the first electric field curve 52 The position of node A of the two electric field curves 52 is located in the strong electric field region of the first electric field curve 51 . It should be understood that since the standing wave oscillates in situ, the position of the node of the standing wave will not change with time. Secondly, since the input port port is the place where the microwave is fed, the first electric field curve 51 in the form of standing wave is different from the first electric field curve 51 in the form of standing wave. The two electric field curves 52 are located at the peak B or the trough C where the boundary between the input port port1 and the input port port2 is the highest electric field value. In addition, as can be seen from FIG. 5 , the first electric field curve 51 and the second electric field curve 52 exhibit substantially complementary distributions in the middle region between the input port port1 and the input port port2 .

Please refer to FIG. 6 , which is a schematic diagram of a phase-matched wave of the present invention. The housing 1 in FIG. 6 is a plan view of the housing 1 in FIG. 3 . It is assumed that the phase of the microwave provided by the input port port1 is 0 degrees, and the input port port2 The phase of the microwave provided is 90 degrees, the phase of the microwave provided by the input port port3 is 180 degrees, and the phase of the microwave provided by the input port port4 is 270 degrees. The low input port transmits to the high phase input port, and the input ports port1 to port4 are arranged on the housing 1 in a circular array, so microwaves in the form of standing waves 61 as indicated by thin arrows will travel from the input port1 to the input port Port4 generates a cycle, forming the phase matching wave 62 shown by the thick arrow. Since the phase matching wave 62 moves on the path of the cycle, the node position of the phase matching wave 62 changes with time.

Please refer to FIG. 7 , which is a second electric field distribution diagram of the phase-matched wave of FIG. 4 circulating in the chamber 5 of FIG. 3 of the present invention. The four embodiments of the phase-matched wave in FIG. 7 show phases every 45 degrees. Circulation of the matched wave in the chamber 5, wherein, when the phase matched wave is in the first embodiment, the phase of the phase matched wave at the input ports port1 to port4 is 0, 90, 180 and 270 degrees respectively, and the phase matched wave is in the second In the embodiment, the phases of the phase-matched waves at the input ports port1 to port4 are 45, 135, 225, and 315 degrees, respectively. In the third embodiment, the phases of the phase-matched waves at the input ports port1 to port4 are 90 degrees respectively. , 180, 270 and 0 degrees, the phase matching wave In the fourth embodiment, the phases of the phase matching waves at the input ports port1 to port4 are 135, 225, 315 and 45 degrees respectively.

It can be seen from FIG. 7 that the second electric field profiles of the four embodiments in which the phase-matched waves circulate in the chamber 5 are substantially complementary to the energy generated by the first electric field profile of FIG. 4 .

In one embodiment, if the phase-matched wave wants to have a more uniform distribution in the chamber 5, that is to say, its electric field distribution has the characteristics of optimal geometric symmetry, the design method of the phase difference of the microwave at the input port is as follows: There are N input ports in a circle in the azimuth and angle direction of the chamber. If the phase difference between adjacent input ports is the same, the phase difference is about (360/N) degrees or its multiple. If the phase difference is different, the input ports are in phase The sum of the angles to which the differences are added is approximately 360 degrees or a multiple thereof.

Taking the design of more evenly distributed phase-matching waves in the chamber 5 in Fig. 3 as an example, since there are 4 input ports in a circle along the azimuth angle of the chamber 5 in Fig. 3, the phase difference between each input port is relatively small. The optimal design is 360 degrees/4=90 degrees, and the phases of the microwaves of the four input ports are 0, 90, 180 and 270 degrees respectively. It can be seen from this that the input ports port1 to port4 of the phase matching wave in FIG. 4 are formed. The phase difference is the better design.

In one embodiment, the phase-matched waves are not limited to be provided by the input ports port1 to port4 of the annular array shown in FIG. The housing 1 shown is formed with 6 asymmetric annular arrays of input ports around the chamber 5, and the phase difference between each input port is preferably designed to be 360 degrees/6=60 degrees, The phases of the microwaves of the six input ports are 0, 60, 120, 180, 240 and 300 degrees, respectively.

Please refer to FIG. 8 , a circular sheet of heated object 6 is placed in the chamber 5 shown in FIG. 3 .

Please also refer to FIG. 9 , which is a temperature distribution diagram of the object to be heated 6 in three heating modes of the present invention in FIG. 8 , wherein the thick circular line represents the object to be heated 6 , and the temperature distribution diagram is in accordance with different grayscales The color distinguishes different temperatures, where the gray color from light to dark represents the temperature from low to high.

The first heating method: go to step S3, so that each phase-controlled power module 2 adjusts the microwaves input from the input ports port1 to port4 into the chamber 5 to be in the same phase and the power is 100W, and input them to the chamber 5 for 300 seconds. The object to be heated 6 is heated. It can be seen from FIG. 9 that the temperature distribution of the object 6 heated by the first heating method for 300 seconds differs by 74.4 degrees.

The second heating method: go to step S4, make each phase-controlled power module 2 adjust the microwave input into the chamber 5 from the input ports port1 to port4 into a phase-matched wave with a power of 100W, and input it into the chamber 5 for 300 seconds The object to be heated 6 is heated. It can be seen from FIG. 9 that the temperature distribution of the object to be heated 6 after being heated by the second heating method for 300 seconds differs by 47.4 degrees.

The third heating method: carry out the first heating method for 150 seconds and the second heating method for 150 seconds. It can be seen from FIG. 9 that the combination of the first heating method and the second heating method is used to heat the object 6 The difference in temperature distribution after heating is only 34.4 degrees. It can be seen that the coordinated application of step S3 and step S4 can improve the problem that the temperature distribution of the heated object 6 is very different after step S3 or step S4 is performed alone. The combined application of step S3 and step S4 can greatly reduce the temperature difference of the object to be heated 6 within the heating time.

Please refer to FIG. 10 , which is a perspective view of a second embodiment in which a plurality of input ports are provided on a rectangular casing 1 , wherein input ports in a three-dimensional array symmetrical to each other are formed on the six faces of the rectangular casing 1 port1 to port6, and a spherical heated object 6 is placed in the chamber 5 .

Please also refer to FIG. 11 , which is a temperature distribution diagram of the object to be heated 6 in FIG. 10 in three groups of heating according to the present invention, wherein the thick circle represents the object to be heated 6 , and the temperature distribution diagram is in accordance with different grayscales The color distinguishes different temperatures, where the gray color from light to dark represents the temperature from low to high.

The first group of heating methods: go to step S3, wherein, each phase-controlled power module 2 adjusts the microwaves input into the chamber 5 by the input ports port1 to port6 to be in the same phase and with a power of 100W, and input them into the chamber for 300 seconds 5 Heating the object 6 to be heated. It can be seen from FIG. 11 that the temperature distribution of the object 6 after being continuously heated by the first group of heating methods for 300 seconds differs by 46.4 degrees.

The second group of heating methods: go to step S4, wherein at least one set of symmetrical input ports port5 and port6 in the input ports are first connected to the matching terminal (in one embodiment, the matching terminal may be an impedance, but it is not limit), so that at least one set of symmetrical input ports port5 and port6 do not provide microwave input to the chamber 5, and then each phase-controlled power module 2 adjusts the microwaves input to the chamber by the adjacent input ports port1 to port4 to be equal to each other The phases are opposite to each other and the power is 100W, and is input into the chamber 5 for 300 seconds to heat the object to be heated 6 . It can be seen from FIG. 11 that the temperature distribution of the object to be heated 6 is continuously heated by the second group of heating methods for 300 seconds, with a difference of 25.3 degrees.

The third group of heating methods: the first group of heating methods lasts for 100 seconds and the second group of heating methods lasts for 200 seconds. It can be seen from Figure 11 that the combination of the first group of heating methods and the second group of heating methods is used to heat the object to be heated 6 The difference in the temperature distribution after step S3 is only 17.2 degrees. It can be seen that the coordinated application of step S3 and step S4 can improve the problem that the temperature distribution of the heated object 6 is very different after step S3 or step S4 is performed alone. The coordinated application of step S3 and step S4 during the heating time can greatly reduce the temperature difference of the object to be heated 6 .

Please refer to FIG. 12 , which is a perspective view of a third embodiment in which a plurality of input ports (ports) are provided on a rectangular housing 1 , wherein the input ports port1 of the left and right line arrays symmetrical to each other are formed on the housing 1 to port 2 , and a carrier 7 and the object to be heated 6 on the carrier 7 are attached to the bottom of the center of the chamber 5 .

Please also refer to FIG. 13 , which is a cross-sectional electric field distribution diagram of the chamber of the input ports port1 to port2 in FIG. 12 after adjusting the phase of the microwave of the present invention. The electric field distribution diagram shown in FIG. 13 is distinguished by different grayscale colors. Different electric field intensities, the gray color from light to dark represents the electric field intensity from low to high, and the dotted circle represents the strong electric field area located on the surface of the object to be heated 6, from FIG. The displacement will be generated with the adjustment of the phases of the microwaves input to ports port1 to port2. Therefore, by adjusting the phases of the microwaves at different stages, the electric fields of the microwaves in the chamber 5 at different stages can be generated to present complementary electric field distributions. In order to make the heated object 6 get more uniform heating from the complementary electric field distribution at different stages, in other words, the distributed microwave phase control method of the present invention can also change the phase of the microwaves of each input port in step S3, as long as the step It is the spirit of the present invention that the electric field distribution diagram of the chamber 5 in S4 and the electric field distribution diagram of the chamber 5 in step S3 are in a complementary form. Furthermore, the multiple input ports to which the distributed microwave phase control method of the present invention is applicable The arrangement on the casing 1 is not limited to the above-mentioned ones. For example, the arrangement of the plurality of input ports on the casing 1 can also be an asymmetrical three-dimensional array or an annular array, but it is not limited thereto.

Please refer to FIG. 14, which is a schematic diagram of the present invention applied to a cylindrical casing 1, wherein a plurality of input port arrays can be layered on the cylindrical casing 1, and ΔΦ1 to ΔΦ4 are represented as single-layered The phase of the microwave provided by each input port, Δθ1 and Δθ2 represent the phase difference of the microwave between the layers, and in the electric field distribution 8 generated by the microwave provided by the input port, the circle indicated by S represents the strong electric field area The circle indicated by W represents the weak electric field area, and the distribution of the strong electric field area and the weak electric field area can be switched by the distributed microwave phase control method of the present invention, so that the heated object in the electric field distribution can be more Heat evenly.

As can be seen from the above, the present invention utilizes a distributed input port array formed on the casing, and then provides microwaves of different phases through the phase control power module and is input into the chamber through the input port, so that the microwave in the chamber can be actively controlled to be different in different phases. The transformation of the electric field intensity distribution in different stages makes the microwave in the chamber present complementary electric field distributions in different stages of the electric field, so that the heated object in the chamber can be heated more uniformly from the complementary electric field distribution in different stages. In turn, the phenomenon of uneven heating of traditional heaters is improved.

The above embodiments are only used to illustrate the principles and effects of the present invention, but not to limit the present invention. Anyone skilled in the art can make modifications to the above embodiments without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention should be listed in the claims.

Claims (13)

1. a distributed microwave phase control method, is characterized in that, comprises: providing a housing with a chamber inside, and a plurality of input ports communicating with the chamber are formed on the housing; causing a plurality of phased power modules to input microwaves into the chamber through the input port, so that the microwaves in the chamber exhibit a first electric field distribution; and causing each of the phase-controlled power modules to adjust the phase of the microwaves input to the chamber by each of the input ports, so that the microwaves in the chamber generate a second electric field distribution that is complementary to the first electric field distribution due to the phase change; The second electric field distribution that is complementary to the first electric field distribution means that when the second electric field distribution diagram and the first electric field distribution diagram overlap, the weak electric field region in the middle region of the first electric field distribution diagram overlaps with The strong electric field region in the middle region of the second electric field distribution map, or the weak electric field region in the middle region of the second electric field distribution map overlaps the strong electric field region in the middle region of the first electric field distribution map. 2 . The distributed microwave phase control method according to claim 1 , wherein a plurality of input ports of a symmetrical array are formed on the housing. 3 . 3 . The distributed microwave phase control method according to claim 2 , wherein each of the phase-controlled power modules provides microwaves of the same phase to each of the input ports, so that each of the input ports inputs the microwaves of the same phase to the input ports. 4 . In the chamber, the microwaves in the chamber exhibit the first electric field distribution. 4 . The distributed microwave phase control method according to claim 3 , wherein each of the phase-controlled power modules adjusts the microwaves input from the symmetrical input ports to the cavity to have opposite phases, so that the cavity is in opposite phase. 5 . The microwave in the chamber produces a second electric field distribution that is complementary to the first electric field distribution due to the phase change, wherein the first electric field distribution and the second electric field distribution are in the form of standing waves, and the node positions of the standing waves do not vary with time Change. 5 . The distributed microwave phase control method according to claim 3 , wherein each of the phase-controlled power modules adjusts the microwaves input into the cavity from the adjacent input ports to have opposite phases, so that the cavity is in opposite phase. 6 . The microwave in the chamber generates a second electric field distribution that is complementary to the first electric field distribution due to the phase change, wherein the first electric field distribution and the second electric field distribution are in the form of standing waves, and the node positions of the standing waves do not vary with time. Change. 6 . The distributed microwave phase control method according to claim 5 , wherein after the first electric field distribution is generated, at least one group of symmetrical input ports in the input ports is connected to a matching terminal, so that the At least one set of symmetrical input ports does not provide microwave input to the chamber, and then each of the phased power modules adjusts the microwaves input to the chamber by the adjacent input ports to be in opposite phases to each other. 7 . The distributed microwave phase control method according to claim 3 , wherein each of the phase-controlled power modules sequentially adjusts the microwaves of the input ports along the directions of each azimuthal angle of the casing to be With a phase difference, the microwave in the chamber generates the second electric field distribution due to the phase change. 8 . The distributed microwave phase control method according to claim 7 , wherein the phase difference is designed such that there are N input ports along the directions of each azimuth angle of the housing, then the phase difference is: 9 . (360/N) degrees or multiples thereof. 9 . The distributed microwave phase control method according to claim 7 , wherein the first electric field distribution is in the form of a standing wave, and the second electric field distribution is in the form of a phase matching wave, wherein the node positions of the standing wave does not change with time, while the node position of the phase-matched wave changes with time. 10 . The distributed microwave phase control method according to claim 1 , wherein the casing and the chamber are rectangular, cylindrical or polygonal. 11 . 11 . The distributed microwave phase control method according to claim 2 , wherein the symmetric array is a line array, a three-dimensional array or a ring array. 12 . 12 . The distributed microwave phase control method according to claim 1 , wherein a plurality of input ports of an asymmetric array are formed on the casing. 13 . 13 . The distributed microwave phase control method according to claim 12 , wherein the asymmetric array is a three-dimensional array or a ring array. 14 .

Images