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CN111371435B - Explosive power source application of multilayer ferroelectric film stack - Google Patents

Explosive power source application of multilayer ferroelectric film stack Download PDF

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CN111371435B
CN111371435B CN202010189685.4A CN202010189685A CN111371435B CN 111371435 B CN111371435 B CN 111371435B CN 202010189685 A CN202010189685 A CN 202010189685A CN 111371435 B CN111371435 B CN 111371435B
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ferroelectric
multilayer
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film stack
ferroelectric film
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CN111371435A (en
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高志鹏
刘艺
杨佳
刘雨生
韩旭
谷伟
高刘德
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Institute of Fluid Physics of CAEP
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    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03KPULSE TECHNIQUE
    • H03K3/00Circuits for generating electric pulses; Monostable, bistable or multistable circuits
    • H03K3/02Generators characterised by the type of circuit or by the means used for producing pulses
    • H03K3/45Generators characterised by the type of circuit or by the means used for producing pulses by the use, as active elements, of non-linear magnetic or dielectric devices
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    • C04B35/01Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/48Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
    • C04B35/49Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates
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    • C04B35/493Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT containing also other lead compounds
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Abstract

The invention discloses an explosive power source application of a multilayer ferroelectric film stack, which belongs to the technical field of power sources and utilizes Pb (Mg) 1/ 3 Nb 2/3 )O 3 ‑PbZrO 3 ‑PbTiO 3 Preparing a ferroelectric film monolayer, wherein an interdigital electrode is arranged on the ferroelectric film monolayer; stacking ferroelectric film monolayers to form a ferroelectric multilayer film stack sample, wherein the stacking layer number of the ferroelectric multilayer film stack sample is more than or equal to 5 layers, and the ferroelectric film monolayers are connected in parallel by utilizing interdigital electrodes; the thickness of the ferroelectric film monolayer is less than or equal to 100 mu m. The pulse high-current signal is obtained by utilizing the impact discharge characteristic of the PMN-PZT ferroelectric film for the first time. The invention of the inventor has very important significance for the miniaturization development of ferroelectric pulse power sources. By adopting the application of the explosion power source, the volume of the ferroelectric pulse power source can be effectively reduced, and the application has obvious progress significance. The actual test results show that: compared with the existing blocky ceramic serving as a power source, the explosion power source can be reduced to about 1/20 in size.

Description

Explosive power source application of multilayer ferroelectric film stack
Technical Field
The invention relates to the technical field of power sources, in particular to an explosive power source application of a multilayer ferroelectric film stack. The application discloses the application of preparing a small explosive power source by utilizing a PMN-PZT ferroelectric film multilayer stack for the first time, and has very important significance for the miniaturization development of a ferroelectric pulse power source.
Background
The explosion power source technology is a power source technology which utilizes shock waves generated by explosion to act on ferroelectric materials so as to enable the ferroelectric materials to emit pulse currents. Ferroelectric materials store charge energy through external electric field polarization in the early stage, and then impact pressure is applied to change the structure of the materials to release the charge energy. Therefore, the pulse power supply with high power, large current and high voltage can be manufactured by utilizing the polarization energy storage-impact energy release property of the ferroelectric ceramic. The technology has very important application in the fields of national defense and industry.
Currently, the most widely used and studied material in the industry is bulk ferroelectric ceramics. However, how to further reduce the volume of the pulse power supply or to improve the electrical output performance per unit volume has become an important point of research.
Disclosure of Invention
It is an object of the present invention to provide explosive power source applications for multilayer ferroelectric thin film stacks to improve electrical output performance per unit volume. The pulse high-current signal is obtained by utilizing the impact discharge characteristic of the PMN-PZT ferroelectric film for the first time. The invention of the inventor has very important significance for the miniaturization development of ferroelectric pulse power sources. By adopting the method, the volume of the ferroelectric pulse power source can be effectively reduced, and the method has obvious progress significance.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
explosive power source applications of multilayer ferroelectric thin film stacks using Pb (Mg 1/3 Nb 2/3 )O 3 -PbZrO 3 -PbTiO 3 Preparing a ferroelectric film monolayer, wherein an interdigital electrode is arranged on the ferroelectric film monolayer; stacking ferroelectric film monolayers to form a ferroelectric multilayer film stack sample, wherein the stacking layer number of the ferroelectric multilayer film stack sample is more than or equal to 5 layers, and the ferroelectric film monolayers are connected in parallel by utilizing interdigital electrodes; the thickness of the ferroelectric film monolayer is less than or equal to 100 mu m.
The thickness of the ferroelectric thin film monolayer is 3-100 mu m.
The piezoelectric constant d of the ferroelectric film monolayer 33 More than or equal to 400pC/N. Preferably, the piezoelectric constant d of the ferroelectric thin film monolayer 33 400-1000 pC/N.
The remnant polarization of the ferroelectric film monolayer is more than or equal to 20pC/cm 2 . Preferably, the piezoelectric constant d of the ferroelectric thin film monolayer 33 20-80 pC/N.
The number of stacked layers is 5-500.
Ferroelectric multilayer film stack samples were tested as follows: the method comprises the steps of (1) short-circuiting the outer electrode of a ferroelectric multilayer film stack sample, connecting an electromagnetic induction coil in series on the short-circuit, placing the ferroelectric multilayer film stack sample on the surface of an energetic material, and using epoxy encapsulation as support and insulation of the ferroelectric multilayer film stack sample; the energetic material is ignited and a dynamic shock wave generated by the energetic material is applied to the ferroelectric multilayer thin film stack sample to release stored charge energy.
The energetic material is an explosive.
The impact pressure generated by the explosive is more than or equal to 5.0GPa. Preferably, the impact pressure generated by the explosive is 5.0-100.0 GPa.
In response to the foregoing, the present application provides explosive power source applications for a multilayer ferroelectric thin film stack. At present, the existing detonation is to use blocky ceramics as a power source, and the application of the explosion power source of the ferroelectric film is still studied. The PMN-PZT ferroelectric material has excellent ferroelectric and piezoelectric properties and has very wide application. The present application uses Pb (Mg) 1/3 Nb 2/3 )O 3 -PbZrO 3 -PbTiO 3 The impact discharge characteristic of the PMN-PZT ferroelectric film is obtained, and a pulse high-current signal is obtained, namely the application of the PMN-PZT ferroelectric film as an explosion power source is proposed for the first time. This finding is of great importance for the miniaturization of ferroelectric pulsed power sources. By adopting the power source, the volume of the power source can be greatly reduced, and the electrical output performance of the unit volume is improved. The actual test results show that: compared with the existing blocky ceramic serving as a power source, the explosion power source has the advantages that the volume of the explosion power source can be reduced to about 1/20, and the explosion power source has obvious progress significance.
Further, in order to verify the technical effects of the present application, the inventors conducted experiments, the experimental procedures are as follows.
(1) Sample preparation
Residual polarization intensity of PMN-PZT single-layer ferroelectric film>20pC/cm 2 Single layer piezoelectricConstant d 33 >400pC/N, monolayer film thickness<100 μm; stacking PMN-PZT single-layer ferroelectric film>And 5 layers of films are connected in parallel by using interdigital electrodes to form a ferroelectric multilayer film stack sample (as shown in fig. 1 and 2, fig. 1 shows a structure diagram of a single-layer PMN-PZT ferroelectric film, fig. 2 shows a stack diagram of the ferroelectric multilayer film stack sample, fig. 2 shows a stack diagram of 5 layers, in fig. 2, interdigital inner electrodes are positioned in the ferroelectric multilayer film stack sample, interdigital outer electrodes are positioned on the outer side of the ferroelectric multilayer film stack sample, and positive and negative interdigital inner electrodes are respectively connected through the interdigital outer electrodes to form positive and negative poles of a power source, and the interdigital electrodes and the ferroelectric film are sintered together in the preparation process).
(2) Assembly of explosive pulse power supply
The external electrodes of the prepared ferroelectric multilayer film stack sample are connected in a short circuit manner, an electromagnetic induction coil is connected in series on the short circuit connection external circuit, and the ferroelectric multilayer film stack sample is placed on the surface of explosive and is supported and insulated by epoxy encapsulation, as shown in fig. 3. In the specific operation, the positive electrode and the negative electrode of the ferroelectric multilayer film stack sample are respectively provided with copper electrodes as external electrodes, the external electrodes are connected through a short circuit wire, an electromagnetic induction coil is connected on the short circuit wire in series, and the electromagnetic induction coil is connected with an oscilloscope; the ferroelectric multilayer film stack sample is arranged on a plastic base, and epoxy encapsulation is adopted as support and insulation, and forms a part of the ferroelectric multilayer film stack sample, the copper electrode, the plastic base and the short circuit wire into a main body of the power source to be tested; the power source main body to be measured is integrally arranged on the explosive. In fig. 3, the electromagnetic induction coil and the oscilloscope constitute a test section, and the other components constitute a device section.
(3) Explosion experiment and signal acquisition
And igniting the explosive, and applying dynamic shock waves of the explosive explosion to the ferroelectric multilayer film stack sample to enable the ferroelectric multilayer film stack sample to release stored charge energy. When the impact pressure generated by explosion of the explosive is more than or equal to 5.0GPa, pulse current can be tested on an external resistor load (as shown in fig. 4 and 5, a schematic diagram of the working process of a power supply is shown in fig. 4, and a schematic diagram of a typical current pulse signal obtained by adopting the invention is shown in fig. 5).
In summary, the present invention discloses the use of Pb (Mg 1/3 Nb 2/3 )O 3 -PbZrO 3 -PbTiO 3 Explosive power source applications of ferroelectric thin film multilayer stacks are of great importance for the miniaturized development of ferroelectric pulsed power sources. The actual test results show that: compared with the existing blocky ceramic serving as a power source, the explosion power source has the advantages that the volume of the explosion power source can be reduced to about 1/20, the volume of the power source can be greatly reduced, and the electric output performance of unit volume is improved. Meanwhile, the explosion test result of the embodiment shows that the pulse power supply can meet the requirements of high-power, high-current and high-voltage pulse power supplies, can be applied to the national defense and industrial fields, and has very important significance.
Drawings
The invention will now be described by way of example and with reference to the accompanying drawings in which:
fig. 1 is a structural diagram of a single-layer PMN-PZT ferroelectric thin film.
Fig. 2 is a schematic illustration of the stacking of samples of a ferroelectric multilayer film stack.
FIG. 3 is a schematic diagram of the overall structure of the test device.
Fig. 4 is a schematic diagram of the operation of the explosion power source of the present application.
Fig. 5 is a schematic diagram of a typical current pulse signal obtained using the present invention.
Reference numerals: 1. the device comprises a PMN-PZT single-layer ferroelectric film, 2, an interdigital inner electrode, 3, an interdigital outer electrode, 4, a test part, 5, a device part, 6, an outer electrode, 7, an epoxy encapsulation, 8, a ferroelectric multilayer film stack sample, 9, an explosive, 10, a plastic base, 11, a short circuit wire, 20, an electromagnetic induction coil, 21 and an oscilloscope.
Detailed Description
All of the features disclosed in this specification, or all of the steps in a method or process disclosed, may be combined in any combination, except for mutually exclusive features and/or steps.
Any feature disclosed in this specification may be replaced by alternative features serving the same or equivalent purpose, unless expressly stated otherwise. That is, each feature is one example only of a generic series of equivalent or similar features, unless expressly stated otherwise.
In the following examples, the test was performed using the apparatus of FIGS. 1 to 3.
Example 1
(1) Sample preparation
Preparing a ferroelectric multilayer film stack sample: the residual polarization of PMN-PZT single-layer ferroelectric film was 25pC/cm 2 Single-layer piezoelectric constant d 33 =500 pC/N, a single layer film thickness of 80 μm, 34 layers of stack, each film connected in parallel using interdigital electrodes.
(2) Assembly of explosive pulse power supply
The method comprises the steps of (1) short-circuiting and connecting outer electrodes of a ferroelectric multilayer film stack, connecting electromagnetic induction coils in series on the outer electrodes, and forming a power source main body to be tested by using epoxy encapsulation as support and insulation; and placing the main body of the power source to be tested on the surface of the explosive.
(3) Explosion experiment and signal acquisition
And igniting the explosive, and applying dynamic shock waves of the explosive explosion to the ferroelectric multilayer film stack sample to enable the ferroelectric multilayer film stack sample to release stored charge energy.
In this example, the impact pressure generated by the explosion of the explosive was 6.0GPa, and a pulse current was measured on an external resistive load, and the current signal is shown in Table 1 below.
Table 1 measurement results of example 1
Peak current (A) 445
Half-height pulse width (mu s) 2.10
Response time (μs) 1.30
Example 2
(1) Sample preparation
Preparing a ferroelectric multilayer film stack sample: the residual polarization of PMN-PZT single-layer ferroelectric film was 25pC/cm 2 Single-layer piezoelectric constant d 33 =500 pC/N, a single layer film thickness of 80 μm, 34 layers of stack, each film connected in parallel using interdigital electrodes.
(2) Assembly of explosive pulse power supply
And (3) short-circuiting the outer electrodes of the ferroelectric multilayer film stack, connecting an electromagnetic induction coil on the outer electrodes in series, placing a ferroelectric multilayer film stack sample on the surface of the explosive, and using epoxy encapsulation as support and insulation.
(3) Explosion experiment and signal acquisition
And igniting the explosive, and applying dynamic shock waves of the explosive explosion to the ferroelectric multilayer film stack sample to enable the ferroelectric multilayer film stack sample to release stored charge energy.
In this example, the impact pressure generated by the explosion of the explosive was 6.5GPa, and a pulse current was measured on an applied resistive load, and the current signal is shown in Table 2 below.
TABLE 2 measurement results of example 2
Peak current (A) 495
Half-height pulse width (mu s) 2.15
Response time (μs) 1.22
Example 3
(1) Sample preparation
Preparing a ferroelectric multilayer film stack sample: the residual polarization of PMN-PZT single-layer ferroelectric film was 25pC/cm 2 Single-layer piezoelectric constant d 33 =500 pC/N, a single layer film thickness of 80 μm, 34 layers of stack, each film connected in parallel using interdigital electrodes.
(2) Assembly of explosive pulse power supply
And (3) short-circuiting the outer electrodes of the ferroelectric multilayer film stack, connecting an electromagnetic induction coil on the outer electrodes in series, placing a ferroelectric multilayer film stack sample on the surface of the explosive, and using epoxy encapsulation as support and insulation.
(3) Explosion experiment and signal acquisition
And igniting the explosive, and applying dynamic shock waves of the explosive explosion to the ferroelectric multilayer film stack sample to enable the ferroelectric multilayer film stack sample to release stored charge energy.
In this example, the impact pressure generated by the explosion of the explosive was 7.7GPa, and a pulse current was measured on an external resistive load, and the current signal is shown in Table 3 below.
TABLE 3 measurement results of example 3
Peak current (A) 640
Half-height pulse width (mu s) 1.89
Response time (μs) 1.11
The invention is not limited to the specific embodiments described above. The invention extends to any novel one, or any novel combination, of the features disclosed in this specification, as well as to any novel one, or any novel combination, of the steps of the method or process disclosed.

Claims (9)

1. Explosive power source applications of multilayer ferroelectric thin film stacks characterized by the use of Pb (Mg 1/3 Nb 2/3 )O 3 -PbZrO 3 -PbTiO 3 Preparing a ferroelectric film monolayer, wherein an interdigital electrode is arranged on the ferroelectric film monolayer; stacking ferroelectric film monolayers to form a ferroelectric multilayer film stack sample, wherein the stacking layer number of the ferroelectric multilayer film stack sample is more than or equal to 5 layers, and the ferroelectric film monolayers are connected in parallel by utilizing interdigital electrodes; the thickness of the ferroelectric film monolayer is less than or equal to 100 mu m;
dynamic shock waves generated by the energetic material are applied to the ferroelectric multilayer thin film stack sample to release stored charge energy.
2. The explosive power source application of the multilayer ferroelectric film stack according to claim 1, wherein the ferroelectric film monolayer has a thickness of 3-100 μm.
3. The explosive power source application of the multilayer ferroelectric film stack according to claim 1, wherein the piezoelectric constant d of the ferroelectric film monolayer 33 ≥400 pC/N。
4. The explosive power source application of the multilayer ferroelectric film stack according to any one of claims 1 to 3, wherein the ferroelectric film monolayer has a remnant polarization of 20pC/cm or more 2
5. The explosive power source application of a multilayer ferroelectric thin film stack according to any one of claims 1-3, wherein the number of stack layers is 5-500.
6. The explosive power source application of the multilayer ferroelectric thin film stack according to claim 4, wherein the number of stack layers is 5-500.
7. The explosive power source application of the multilayer ferroelectric film stack according to claim 1, wherein the ferroelectric multilayer film stack sample is tested as follows: the method comprises the steps of (1) short-circuiting the outer electrode of a ferroelectric multilayer film stack sample, connecting an electromagnetic induction coil in series on the short-circuit, placing the ferroelectric multilayer film stack sample on the surface of an energetic material, and using epoxy encapsulation as support and insulation of the ferroelectric multilayer film stack sample; the energetic material is ignited and a dynamic shock wave generated by the energetic material is applied to the ferroelectric multilayer thin film stack sample to release stored charge energy.
8. The explosive power source application of the multilayer ferroelectric thin film stack according to claim 7, wherein the energetic material is an explosive.
9. The explosive power source application of the multilayer ferroelectric thin film stack according to claim 8, wherein the explosive produces an impact pressure of 5.0GPa or greater.
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CN104734564A (en) * 2015-04-14 2015-06-24 大连理工大学 Full-interdigital electrode micro-piezoelectric thick film vibration energy collector and manufacturing method thereof

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JP3957528B2 (en) * 2002-03-05 2007-08-15 日本碍子株式会社 Piezoelectric / electrostrictive membrane element
US8894765B1 (en) * 2009-11-13 2014-11-25 Trs Technologies, Inc. High polarization energy storage materials using oriented single crystals
CN102684649A (en) * 2012-05-02 2012-09-19 西安交通大学 Cylindrical ferroelectric pulse generator
WO2017123300A1 (en) * 2015-10-19 2017-07-20 Powdermet, Inc. High-energy density nancocomposite capacitor
CN108111048A (en) * 2018-02-07 2018-06-01 中国工程物理研究院流体物理研究所 A kind of small-sized fast pulse high voltage power supply
CN108322982A (en) * 2018-04-12 2018-07-24 中国工程物理研究院流体物理研究所 Ferroelectric Explosive electricity transducing impulse generator, flash X-ray generation device and method

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Publication number Priority date Publication date Assignee Title
JP2002100819A (en) * 2000-09-20 2002-04-05 Ngk Insulators Ltd Piezoelectric element and its manufacturing method
CN104734564A (en) * 2015-04-14 2015-06-24 大连理工大学 Full-interdigital electrode micro-piezoelectric thick film vibration energy collector and manufacturing method thereof

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