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CN111365517B - Pilot-operated proportional flow valve with position feedback function - Google Patents

Pilot-operated proportional flow valve with position feedback function Download PDF

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Publication number
CN111365517B
CN111365517B CN202010362327.9A CN202010362327A CN111365517B CN 111365517 B CN111365517 B CN 111365517B CN 202010362327 A CN202010362327 A CN 202010362327A CN 111365517 B CN111365517 B CN 111365517B
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China
Prior art keywords
valve
pilot
main valve
main
pilot valve
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CN111365517A (en
Inventor
曹建波
章锋
蒋佑华
周志威
顾高峰
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Xingyu Electron Ningbo Co ltd
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Xingyu Electron Ningbo Co ltd
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F16K37/0075For recording or indicating the functioning of a valve in combination with test equipment
    • F16K37/0083For recording or indicating the functioning of a valve in combination with test equipment by measuring valve parameters
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00Actuating devices; Operating means; Releasing devices
    • F16K31/12Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/36Actuating devices; Operating means; Releasing devices actuated by fluid in which fluid from the circuit is constantly supplied to the fluid motor

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Fluid-Driven Valves (AREA)

Abstract

The invention relates to a pilot-operated proportional flow valve with a position feedback function, which comprises a pilot valve and a main valve which are communicated, wherein the pilot valve comprises a controller and a pilot valve module; the main valve comprises a valve body, a valve core, a left end cover, a right end cover and a spring; the pilot valve control port of the pilot valve is communicated with the main valve control port of the main valve, the main valve control port of the main valve is communicated with the right control cavity of the main valve, and a displacement sensor for measuring the displacement of the valve core is arranged in the main valve; the pressure of the pilot valve control port of the pilot valve and the input signal form a first nonlinear characteristic relation, the pressure of the main valve control port of the main valve and the valve opening of the main valve form a linear relation, and the valve opening of the main valve and the output gas flow form a second nonlinear characteristic relation; and correcting the output gas flow and the input signal to form a linear relation, and solidifying the pressure value of the control port of the intermediate variable pilot valve into the controller. The advantages are that: reasonable structure, suitability for gas flow control, good stability and high response speed.

Description

Pilot-operated proportional flow valve with position feedback function
Technical Field
The invention relates to the technical field of gas flow control, in particular to a pilot type proportional flow valve with a position feedback function.
Background
The flow rate of the fluid (gas and liquid) is generally related to the size of the cross-section of the space through which the fluid flows, when the external conditions (pressure and temperature, etc.) are unchanged. For a specific flow valve, the opening of the valve port is controlled to realize the output of the flow value with the required size.
By proportional flow valve is meant a control valve whose flow output is linear with the value of the input signal (current or voltage) applied. The pilot control valve means that the movement of the valve element of the main valve is controlled by the output pressure of the pilot valve.
The pilot valve is typically a miniature direct-acting proportional pressure valve. The direct-acting proportional pressure valve generally consists of a control circuit, an electromechanical transducer and a control valve core. The control mechanism is that an input electric signal (voltage/current) is input into a control circuit, after the signal is amplified, the signal is input into an electromechanical converter to output mechanical displacement, and the displacement forms the opening of a valve port to control the output pressure value. This pressure value is generally designed to be proportional to the input electrical signal.
The control pressure of the pilot valve is introduced into a control chamber in the main valve to control the movement of the main valve spool, and the valve spool outputs a displacement (valve port opening) in linear relation with the pressure through a valve spool spring system.
For liquid, the opening of the valve port and the flow rate can be approximately seen as a proportional relation in a certain flow rate range. Therefore, the hydraulic control device has been widely used in the field of hydraulic control and has good effect.
However, because of the wide variety of physical properties of gases and liquids, liquids are generally considered incompressible fluids, whereas gases are obviously compressible fluids. The flow rate of the gas flowing through the valve port is non-linear with the opening of the valve port. Thus, the flow rate of the gas cannot be proportional to the input signal.
In the control system, the process of feeding back the target output quantity to the front end and comparing the target output quantity with the input quantity, thereby enabling the system to automatically adapt to the output target value is called feedback control. In fluid control valves, feedback techniques are widely used; the position feedback is to feed back the output displacement value of the main valve core to the front end controller and compare with the target control value. The controller then further issues control instructions to correct the deviation of the actual output quantity. Compared with open-loop control, a closed-loop control system with a negative feedback function is greatly improved in stability and rapidity of system response.
Disclosure of Invention
The invention aims to solve the technical problem of the prior art, and provides the pilot type proportional flow valve with the position feedback function, which has the advantages of reasonable structure, suitability for gas flow control, good stability and high response speed.
The technical scheme adopted for solving the technical problems is as follows:
The pilot type proportional flow valve with the position feedback function comprises a pilot valve and a main valve which are communicated, wherein the pilot valve is provided with a pilot valve air inlet, a pilot valve pressure relief opening and a pilot valve control opening, and the pilot valve comprises a controller and a pilot valve module; the main valve comprises a valve body, a valve core, a left end cover, a right end cover and a spring, wherein the spring is arranged between the valve core and the left end cover; the pilot valve control port of the pilot valve is communicated with the main valve control port of the main valve, the main valve control port of the main valve is communicated with the right control cavity of the main valve, a displacement sensor for measuring the displacement of the valve core is arranged in the main valve, and the displacement sensor is in feedback connection with the controller;
The pressure of the pilot valve control port of the pilot valve and the input signal form a first nonlinear characteristic relation, the pressure of the main valve control port of the main valve and the valve opening of the main valve form a linear relation, and the valve opening of the main valve and the output gas flow form a second nonlinear characteristic relation; through laboratory testing, the output gas flow and the input signal are corrected to form a linear relationship, and the pressure value of the intermediate variable pilot valve control port is solidified into the controller.
The optimized technical measures also comprise:
The pilot valve module comprises an air inlet electromagnetic valve, an air outlet electromagnetic valve, a pressure sensor and an air path bottom plate, wherein the controller is in control connection with the air inlet electromagnetic valve and the air outlet electromagnetic valve, the pressure sensor is in feedback connection with the controller, the air inlet electromagnetic valve is arranged between an air inlet of the pilot valve and a control port of the pilot valve, and the air outlet electromagnetic valve is arranged between a pressure relief port of the pilot valve and the control port of the pilot valve.
The controller comprises a processor, an M/A analog-to-digital converter, an input/output interface circuit, a display circuit, a power supply and an electromagnetic valve driving circuit.
The left end of the right end cover is provided with a lug, and a right control cavity is formed between the periphery of the lug and the inner wall of the valve body.
The middle part of the valve core is provided with a groove.
The displacement sensor comprises a fixing part and a movement sensing part, wherein the fixing part is arranged on the left end cover, and the movement sensing part is fixed at the left end of the valve core.
And a sealing ring is arranged between the right end cover and the valve body.
The right end cover is fixed with the valve body through screws.
The outer cover is arranged outside the controller and the pilot valve module.
The pilot type proportional flow valve with the position feedback function is reasonable in structure, is composed of a pilot valve and a main valve, wherein the pressure of a pilot valve control port of the pilot valve and an input signal are in a first nonlinear characteristic relation, the pressure of the main valve control port of the main valve and the valve port opening of the main valve are in a linear relation, and the valve port opening of the main valve and the output gas flow are in a second nonlinear characteristic relation; through laboratory tests, the output gas flow and the input signal are corrected to form a linear relation, and the pressure value of the intermediate variable pilot valve control port is solidified into a controller; the linear relation between the flow of the main valve and the input signal is realized, the proportional control of the flow is realized, the valve is suitable for a gas flow environment, the displacement sensor for measuring the displacement of the valve core is arranged in the main valve, the displacement of the valve core is measured through the displacement sensor, and the closed loop feedback of the position of the valve core is formed, so that the flow is accurately controlled, the stability of the flow output is improved, and the response speed is improved.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic illustration of the pilot valve of FIG. 1 with the outer casing removed;
FIG. 3 is a bottom view of the pilot valve of FIG. 1;
FIG. 4 is a control schematic of the pilot valve of the present invention;
FIG. 5 is a schematic diagram of the controller of FIG. 4;
FIG. 6 is a schematic view of the main valve of the present invention;
FIG. 7 is a top view of the main valve of the present invention;
fig. 8 is a control schematic diagram of the proportional flow valve of the present invention.
Detailed Description
The invention is described in further detail below with reference to the embodiments of the drawings.
The present invention is schematically illustrated in figures 1to 8,
Wherein the reference numerals are as follows: the first nonlinear characteristic relationship L1, the linear relationship L2, the second nonlinear characteristic relationship L3, the pilot valve intake port P1, the pilot valve relief port R1, the pilot valve control port K1, the main valve intake port P2, the main valve exhaust port R2, the main valve control port K2, the operation port a, the pilot valve 1, the controller 11, the processor 11a, the M/a analog-to-digital converter 11b, the input/output interface circuit 11c, the display circuit 11d, the power supply 11e, the solenoid valve driving circuit 11f, the pilot valve module 12, the intake solenoid valve 12a, the exhaust solenoid valve 12b, the pressure sensor 12c, the gas circuit bottom plate 12d, the outer cover 13, the main valve 2, the pilot valve interface 2a, the right control chamber 2b, the valve body 21, the valve element 22, the groove 22a, the left end cover 23, the right end cover 24, the boss 24a, the spring 25, the seal ring 26, the screw 27, the displacement sensor 3, the fixing portion 3a, and the movement sensing portion 3b.
As shown in figures 1 to 8 of the drawings,
The pilot type proportional flow valve with the position feedback function comprises a pilot valve 1 and a main valve 2 which are communicated, wherein the pilot valve 1 is provided with a pilot valve air inlet P1, a pilot valve pressure relief port R1 and a pilot valve control port K1, and the pilot valve 1 comprises a controller 11 and a pilot valve module 12; the main valve 2 is provided with a main valve air supply port P2, a main valve air exhaust port R2, a main valve control port K2, a working port A and a pilot valve interface 2a, the main valve 2 comprises a valve body 21, a valve core 22, a left end cover 23, a right end cover 24 and a spring 25, and the spring 25 is arranged between the valve core 22 and the left end cover 23; the pilot valve control port K1 of the pilot valve 1 is communicated with the main valve control port K2 of the main valve 2, the main valve control port K2 of the main valve 2 is communicated with the right control cavity 2b of the main valve 2, a displacement sensor 3 for measuring the displacement of the valve core 22 is arranged in the main valve 2, and the displacement sensor 3 is in feedback connection with the controller 11;
The pressure of a pilot valve control port K1 of the pilot valve 1 and an input signal form a first nonlinear characteristic relation L1, the pressure of a main valve control port K2 of the main valve 2 and the valve opening of the main valve 2 form a linear relation L2, and the valve opening of the main valve 2 and the output gas flow form a second nonlinear characteristic relation L3; through laboratory tests, the output gas flow and the input signal are corrected to form a linear relationship, and the pressure value of the intermediate variable pilot valve control port K1 is solidified into the controller 11.
In the embodiment, the pilot valve module 12 includes an air inlet solenoid valve 12a, an air outlet solenoid valve 12b, a pressure sensor 12c and an air path bottom plate 12d, the controller 11 is in control connection with the air inlet solenoid valve 12a and the air outlet solenoid valve 12b, the pressure sensor 12c is in feedback connection with the controller 11, the air inlet solenoid valve 12a is disposed between the pilot valve air inlet P1 and the pilot valve control port K1, and the air outlet solenoid valve 12b is disposed between the pilot valve pressure relief port R1 and the pilot valve control port K1.
In the embodiment, the controller 11 includes a processor 11a, an M/a analog-to-digital converter 11b, an input/output interface circuit 11c, a display circuit 11d, a power supply 11e, and a solenoid valve driving circuit 11f.
In the embodiment, the left end of the right end cap 24 is provided with a projection 24a, and a right control chamber 2b is formed between the outer periphery of the projection 24a and the inner wall of the valve body 21.
In the embodiment, the middle portion of the spool 22 is provided with a groove 22a. The groove 22a is located at the main valve air supply port P2.
In the embodiment, the displacement sensor 3 includes a fixing portion 3a and a movement sensing portion 3b, the fixing portion 3a is mounted on the left end cover 23, and the movement sensing portion 3b is fixed on the left end of the valve core 22.
In an embodiment, a sealing ring 26 is disposed between the right end cover 24 and the valve body 21.
In the embodiment, the right end cover 24 is fixed with the valve body 21 by a screw 27.
In an embodiment, an outer casing 13 is provided outside the controller 11 and the pilot valve module 12.
Working principle:
The pilot proportional flow valve consists of a pilot valve 1 and a main valve 2 which are communicated, wherein a pilot valve air inlet P1, a pilot valve pressure relief opening R1 and a pilot valve control opening K1 are arranged on the pilot valve 1, a main valve air supply opening P2, a main valve air outlet R2, a main valve control opening K2, a working opening A and a pilot valve interface 2a are arranged on the main valve 2, and 3 openings (see FIG. 7) of the pilot valve interface 2a are correspondingly connected with the pilot valve air inlet P1, the pilot valve pressure relief opening R1 and the pilot valve control opening K1 on the pilot valve 1. The pilot valve control port K1 communicates with the main valve control port K2, that is, the pilot valve control port K1 and the main valve control port K2 have the same pressure.
As shown in fig. 4, the input signal sets the output pressure value of the pilot valve 1, and the pressure sensor 12c detects the actual pressure output from the pilot valve and feeds back to the controller 11. After logic operation, the controller 11 sends operation instructions to the solenoid valves (the air inlet solenoid valve 12a and the air outlet solenoid valve 12 b): when the feedback pressure is greater than the set pressure, the air inlet electromagnetic valve 12a is closed, the air outlet electromagnetic valve 12b is opened, the air of the pilot valve control port K1 is exhausted outwards from the pilot valve pressure relief port R1 through the air outlet electromagnetic valve 12b, and the pressure of the pilot valve control port K1 is reduced; conversely, when the feedback pressure is smaller than the set pressure, the intake solenoid valve 12a is opened, the exhaust solenoid valve 12b is closed, the pilot valve intake port P1 supplies air to the pilot valve control port K1 through the intake solenoid valve 12a, and the pressure of the pilot valve control port K1 rises. When the feedback pressure is equal to the set pressure, the air inlet solenoid valve 12a and the air outlet solenoid valve 12b are closed, and at this time, the pressure of the pilot valve control port K1 is dynamically stabilized within the accuracy range allowed by the set pressure, so that the correlation between the pressure of the pilot valve control port K1 and the input signal is established. The pressure of the pilot valve control port K1 and the input signal are in a first nonlinear characteristic relation L1.
As shown in fig. 6, the pilot valve control port K1 of the pilot valve 1 is communicated with the main valve control port K2 of the main valve 2, and the pressures of the two are equal, the main valve control port K2 is communicated with the right control chamber 2b of the main valve 2, and the pressure of the right control chamber 2b is used for controlling the movement of the valve core 22 of the main valve 2. The force of the pressure of the right control chamber 2b acting on the valve core 22 balances with the spring force of the left end of the valve core 22, so that the valve core 22 stays at a certain position, thereby controlling the opening of the valve port and controlling the flow rate of gas. For a certain pressure of the main valve control port K2, a stable valve port opening can be obtained, and a stable gas flow can be obtained. In this way, a correlation is established between the pressure of the main valve control port K2 and the gas flow of the main valve. As shown in fig. 8, in the main valve 2, the elastic force of the spring 25 and the compression amount of the spring are linearly related to each other, but the opening degree of the valve port and the gas flow rate are non-linearly related to each other due to the gas characteristic, that is, the opening degree of the valve port and the gas flow rate are non-linearly related to each other by a second non-linear relationship L3. That is, in the main valve 2, the pressure of the main valve control port K2 of the main valve 2 and the flow rate of the main valve 2 are nonlinear.
By introducing an intermediate variable-the pressure of the control port, a correlation between the output gas flow of the main valve 2 and the input signal is established. Correcting the relation between the flow of the main valve and the input signal into a linear relation through testing in a laboratory, and solidifying the data of the output control pressure value of the corresponding intermediate variable-pilot valve into a controller; thus, proportional control of the gas flow is achieved.
After the data is solidified, a certain position of the valve core 22 corresponds to a specific flow value, that is, a functional relationship exists between the position of the valve core 22 and the output flow value; meanwhile, a displacement sensor 3 for measuring the displacement of the valve core 22 is arranged in the main valve 2, the displacement sensor 3 is in feedback connection with the controller 11, and the position feedback of the valve core 22 is established by detecting the real-time position of the valve core 22 through the displacement sensor 3. When the displacement value of the valve core 22 detected by the displacement sensor 3 deviates from the corresponding value after data solidification, a command is sent out to increase or decrease the output pressure of the pilot valve 1, so that the valve core 22 returns to the set balance position, the dynamic stiffness of the valve core is greatly improved, and the flow stability and the response sensitivity of the proportional flow valve are also greatly improved.
The control principle of the present proportional flow valve is as shown in fig. 8:
The input signal I is input to the controller 11 of the pilot valve 1 to set the output pressure value of the pilot valve 1, and in the pilot valve 1, a specific functional relationship (i.e., a first nonlinear characteristic relationship L1) is established between the input signal I and the output variable P (control port pressure). The output variable P of the pilot valve 1 is taken as an input variable P ' of the main valve 2, and in the main valve 2, the input variable P ' outputs a variable, namely, the displacement X of the spool 22 through a spring system, and the displacement X of the spool 22 and the input variable P ' are in a linear relationship (namely, a linear relationship L2). The displacement X of the spool 22 corresponds to the opening of the valve port, and there is a functional relationship (i.e., a second nonlinear characteristic relationship L3) between the opening of the valve port and the output flow rate Q. The functional relationship between the opening of the valve port and the output flow Q is inherent to the valve structure itself, and is nonlinear, and specific values of the functional relationship can be tested in a laboratory.
The relationship between the input signal I and the output flow Q is established, and the whole relationship chain comprises 2 groups of nonlinear relationships (a first nonlinear characteristic relationship L1 and a second nonlinear characteristic relationship L3) and one group of linear relationships (linear relationship L2), wherein the linear relationship L2 is determined by the spring characteristic, and the second nonlinear characteristic relationship L3 can be obtained by testing in a laboratory. By superimposing the first nonlinear characteristic relationship L1, the linear relationship L2 and the second nonlinear characteristic relationship L3, a linear relationship between the input signal I and the output flow Q can be artificially established by laboratory tests. Thereby a specific function of the first non-linear characteristic relation L1 is obtained and solidified into the embedded software of the pilot valve 1.
The displacement sensor 3 monitors the real-time position of the valve core 22 and feeds back the real-time position to the controller 11 of the pilot valve 1, and establishes closed-loop feedback of the position of the valve core 22, so that the output flow rate of the main valve 2 is dynamically kept within the allowable variation range of the set value.
Therefore, the flow ratio control is realized, the proportional valve which is suitable for the gas environment and can accurately control the flow is realized, and the stability of flow output and the sensitivity of reaction are also improved.
The preferred embodiments of this invention have been described so far that various changes or modifications may be made by one of ordinary skill in the art without departing from the scope of this invention.

Claims (7)

1. The pilot type proportional flow valve with the position feedback function comprises a pilot valve (1) and a main valve (2) which are communicated, and is characterized in that the pilot valve (1) is provided with a pilot valve air inlet (P1), a pilot valve pressure relief port (R1) and a pilot valve control port (K1), and the pilot valve (1) comprises a controller (11) and a pilot valve module (12); the main valve (2) is provided with a main valve air supply port (P2), a main valve air exhaust port (R2), a main valve control port (K2), a working port (A) and a pilot valve interface (2 a), the main valve (2) comprises a valve body (21), a valve core (22), a left end cover (23), a right end cover (24) and a spring (25), and the spring (25) is arranged between the valve core (22) and the left end cover (23); the pilot valve control port (K1) of the pilot valve (1) is communicated with the main valve control port (K2) of the main valve (2), the main valve control port (K2) of the main valve (2) is communicated with the right control cavity (2 b) of the main valve (2), a displacement sensor (3) for measuring the displacement of the valve core (22) is arranged in the main valve (2), and the displacement sensor (3) is in feedback connection with the controller (11);
The pressure of a pilot valve control port (K1) of the pilot valve (1) and an input signal form a first nonlinear characteristic relation (L1), the pressure of a main valve control port (K2) of the main valve (2) and the valve opening of the main valve (2) form a linear relation (L2), and the valve opening of the main valve (2) and the output gas flow form a second nonlinear characteristic relation (L3); through laboratory tests, the output gas flow and the input signal are corrected to form a linear relation, and the pressure value of the intermediate variable pilot valve control port (K1) is solidified into the controller (11);
The pilot valve module (12) comprises an air inlet electromagnetic valve (12 a), an air outlet electromagnetic valve (12 b), a pressure sensor (12 c) and an air path bottom plate (12 d), wherein the controller (11) is in control connection with the air inlet electromagnetic valve (12 a) and the air outlet electromagnetic valve (12 b), the pressure sensor (12 c) is in feedback connection with the controller (11), the air inlet electromagnetic valve (12 a) is arranged between a pilot valve air inlet (P1) and a pilot valve control port (K1), and the air outlet electromagnetic valve (12 b) is arranged between a pilot valve pressure relief port (R1) and the pilot valve control port (K1);
The controller (11) comprises a processor (11 a), an M/A analog-to-digital converter (11 b), an input/output interface circuit (11 c), a display circuit (11 d), a power supply (11 e) and an electromagnetic valve driving circuit (11 f).
2. The pilot operated proportional flow valve with position feedback as claimed in claim 1, wherein: the left end of the right end cover (24) is provided with a lug (24 a), and a right control cavity (2 b) is formed between the periphery of the lug (24 a) and the inner wall of the valve body (21).
3. The pilot operated proportional flow valve with position feedback function of claim 2, wherein: the middle part of the valve core (22) is provided with a groove (22 a).
4. A pilot operated proportional flow valve with position feedback as claimed in claim 3, wherein: the displacement sensor (3) comprises a fixing part (3 a) and a movement induction part (3 b), wherein the fixing part (3 a) is arranged on the left end cover (23), and the movement induction part (3 b) is fixed at the left end of the valve core (22).
5. The pilot operated proportional flow valve with position feedback as claimed in claim 4, wherein: a sealing ring (26) is arranged between the right end cover (24) and the valve body (21).
6. The pilot operated proportional flow valve with position feedback as claimed in claim 5, wherein: the right end cover (24) and the valve body (21) are fixed through screws (27).
7. The pilot operated proportional flow valve with position feedback as claimed in claim 6, wherein: an outer cover shell (13) is arranged outside the controller (11) and the pilot valve module (12).
CN202010362327.9A 2020-04-30 2020-04-30 Pilot-operated proportional flow valve with position feedback function Active CN111365517B (en)

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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN212028721U (en) * 2020-04-30 2020-11-27 星宇电子(宁波)有限公司 Pilot-operated proportional flow valve with position feedback function

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57120784A (en) * 1981-01-20 1982-07-27 Yamatake Honeywell Co Ltd Control valve
CN105805376A (en) * 2014-12-31 2016-07-27 哈尔滨爱坦科技有限公司 Control method for proportional gas volume control valve

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN212028721U (en) * 2020-04-30 2020-11-27 星宇电子(宁波)有限公司 Pilot-operated proportional flow valve with position feedback function

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