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CN111338074A - Time sequence synthesis laser aberration self-adaptive correction device based on single wavefront sensor - Google Patents

Time sequence synthesis laser aberration self-adaptive correction device based on single wavefront sensor Download PDF

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CN111338074A
CN111338074A CN202010205763.5A CN202010205763A CN111338074A CN 111338074 A CN111338074 A CN 111338074A CN 202010205763 A CN202010205763 A CN 202010205763A CN 111338074 A CN111338074 A CN 111338074A
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CN111338074B (en
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孔令曦
杨超
赖柏衡
程涛
杨平
王帅
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    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
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    • GPHYSICS
    • G02OPTICS
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Abstract

本发明公开了一种基于单波前传感器的时序合成激光像差自适应校正装置,本发明以两路光路时序合成为例,该装置由1号脉冲子激光器(1)、2号脉冲子激光器(2)、1号变形镜(3)、2号变形镜(4)、合束转盘(5)、波前传感器(6)、1号触发信号源(7)、2号触发信号源(8)、波前处理系统(9)和信号发生器(10)组成,其中,波前传感器(6)置于合束转盘(5)之后,接收由合束转盘(5)输出的合束光。该装置用单波前传感器和单波前处理系统来校正多路时序合成光束的波前像差,以提升合成后的激光光束质量。

Figure 202010205763

The invention discloses a timing synthesis laser aberration self-adaptive correction device based on a single wavefront sensor. The present invention takes the timing synthesis of two optical paths as an example. (2), No. 1 deformable mirror (3), No. 2 deformable mirror (4), beam combining turntable (5), wavefront sensor (6), No. 1 trigger signal source (7), No. 2 trigger signal source (8) ), a wavefront processing system (9) and a signal generator (10), wherein the wavefront sensor (6) is placed behind the beam combining turntable (5) to receive the combined beam light output by the beam combining turntable (5). The device uses a single wavefront sensor and a single wavefront processing system to correct the wavefront aberration of the multi-channel time-series composite beam, so as to improve the quality of the combined laser beam.

Figure 202010205763

Description

一种基于单波前传感器的时序合成激光像差自适应校正装置An adaptive correction device for time-series synthesis laser aberration based on a single wavefront sensor

技术领域technical field

本发明涉及一种激光像差自适应校正控制装置,尤其涉及一种基于单波前传感器的时序合成激光像差自适应校正装置。The invention relates to a laser aberration self-adaptive correction control device, in particular to a time-series synthesis laser aberration self-adaptive correction device based on a single wavefront sensor.

背景技术Background technique

固体激光因其体积小,重量轻、全点运行等优点目前已广泛应用到科研、医疗、工业等重要领域。由于固体激光工作过程中有害热效应的影响,如何同时获得高功率高光束质量的固体激光一直是业内极富挑战的难题。通过多路激光时序合成方式,在理论上保持光束质量的同时,获得更高的输出功率,是解决该难题的重要技术路线之一(见于李红敏,左军卫,徐健,徐一汀,彭钦军,许祖彦,“脉冲激光的非相干合成技术研究”,激光技术.39,237-241,2015)。然而在实际的激光系统中,合成光路的静态或者动态像差会恶化子激光光束质量,因此,为在功率合成的同时保证较好的合成光束质量,必须对激光器波前像差及合束光路像差进行有效校正。Solid-state lasers have been widely used in important fields such as scientific research, medical treatment, and industry due to their small size, light weight, and full-point operation. Due to the influence of harmful thermal effects in the working process of solid-state lasers, how to obtain solid-state lasers with high power and high beam quality at the same time has always been a challenging problem in the industry. One of the important technical routes to solve this problem is to obtain a higher output power while maintaining the beam quality theoretically through the multi-channel laser timing synthesis method (see Li Hongmin, Zuo Junwei, Xu Jian, Xu Yiting, Peng Qinjun, Xu Zuyan). , "Research on Incoherent Synthesis of Pulsed Lasers", Laser Technology. 39, 237-241, 2015). However, in the actual laser system, the static or dynamic aberration of the combined optical path will deteriorate the quality of the sub-laser beam. Therefore, in order to ensure a better combined beam quality while combining power, the laser wavefront aberration and the combined optical path must be adjusted. Aberrations are effectively corrected.

发明内容SUMMARY OF THE INVENTION

本发明要解决的技术问题是:解决脉冲光束时序合成各子激光光束存在像差的问题,提供一种基于单波前传感器的时序合成激光像差自适应校正装置,提高合成后激光光束质量。The technical problem to be solved by the present invention is: to solve the problem of aberration of each sub-laser beam in the sequential synthesis of pulse beams, and to provide an adaptive correction device for sequential synthesis of laser aberration based on a single wavefront sensor to improve the quality of the synthesized laser beam.

本发明解决上述问题采用的技术方案是:一种基于单波前传感器的时序合成激光像差自适应校正装置,该装置由1号脉冲子激光器、2号脉冲子激光器、1号变形镜、2号变形镜、合束转盘、波前传感器、1号触发信号源、2号触发信号源、波前处理系统和信号发生器组成。在该装置中,所述波前传感器连接于波前处理系统的输入端;1号触发信号源对应第一路光路中的1号脉冲子激光器,同时2号触发信号源对应第二路光路中的2号脉冲子激光器,将此两部分光路与波前传感器和波前处理系统相连;1号变形镜、2号变形镜设于波前处理系统的输出端接收控制信号;信号发生器通过数据线缆与1号触发信号源和2号触发信号源连接以控制系统时序;1号触发信号源和2号触发信号源的脉冲在时序上是错位相间,波前传感器从时序上区分两光路波前像差信息;1号触发信号源输出脉冲触发信号时,对应的1号脉冲子激光器输出激光,波前传感器探测波前像差信息并发送到波前处理系统,波前处理系统根据接收到的波前像差信息解算1号变形镜的控制信号使其产生相应的面形补偿激光像差;在下个时刻,2号触发信号源输出脉冲触发信号时,对应的2号脉冲子激光器输出激光,波前传感器探测波前像差信息并发送到波前处理系统,波前处理系统根据接收到的波前像差信息解算2号变形镜的控制信号使其产生相应的面形补偿激光像差。通过上述工作模式,基于单台波前传感器的时序合成激光像差自适应校正装置可实现合成后激光光束质量的提高。The technical scheme adopted by the present invention to solve the above problems is: a time-series synthesis laser aberration adaptive correction device based on a single wavefront sensor, the device is composed of No. 1 pulsed sub-laser, No. 2 pulsed sub-laser, No. 1 deformable mirror, 2 It consists of No. deformable mirror, beam combining turntable, wavefront sensor, No.1 trigger signal source, No.2 trigger signal source, wavefront processing system and signal generator. In the device, the wavefront sensor is connected to the input end of the wavefront processing system; the trigger signal source No. 1 corresponds to the pulse sub-laser No. 1 in the first optical path, and the trigger signal source No. 2 corresponds to the pulse sub-laser in the second optical path. The No. 2 pulsed sub-laser connects the two optical paths with the wavefront sensor and the wavefront processing system; the No. 1 deformable mirror and the No. 2 deformable mirror are arranged at the output end of the wavefront processing system to receive the control signal; the signal generator is connected through a data cable Connect with the trigger signal source No. 1 and the trigger signal source No. 2 to control the timing of the system; the pulses of the trigger signal source No. 1 and the trigger signal source No. 2 are misaligned in timing, and the wavefront sensor distinguishes the wavefront images of the two optical paths in terms of timing. When the No. 1 trigger signal source outputs a pulse trigger signal, the corresponding No. 1 pulse sub-laser outputs laser light, and the wavefront sensor detects the wavefront aberration information and sends it to the wavefront processing system. The former aberration information solves the control signal of the No. 1 deformable mirror to generate the corresponding surface shape to compensate the laser aberration; at the next moment, when the No. 2 trigger signal source outputs a pulse trigger signal, the corresponding No. 2 pulse sub-laser outputs laser light, The wavefront sensor detects the wavefront aberration information and sends it to the wavefront processing system. The wavefront processing system calculates the control signal of the No. 2 deformable mirror according to the received wavefront aberration information to generate the corresponding surface shape to compensate the laser aberration. . Through the above working mode, the self-adaptive correction device for time-series synthesis laser aberration based on a single wavefront sensor can improve the quality of the synthesized laser beam.

其中,信号发生器发出第奇数个脉冲信号时,1号触发信号源输出脉冲触发信号,其对应的1号脉冲子激光器输出激光。Wherein, when the signal generator sends out an odd-numbered pulse signal, the No. 1 trigger signal source outputs a pulse trigger signal, and the corresponding No. 1 pulse sub-laser outputs laser light.

其中,信号发生器发出第偶数个脉冲信号时,2号触发信号源输出脉冲触发信号,其对应的2号脉冲子激光器输出激光。Among them, when the signal generator sends out an even-numbered pulse signal, the No. 2 trigger signal source outputs a pulse trigger signal, and the corresponding No. 2 pulse sub-laser outputs laser light.

其中,1号变形镜和2号变形镜是压电陶瓷、磁致伸缩、电磁式或液压式驱动器变形镜。Among them, the No. 1 deformable mirror and the No. 2 deformable mirror are piezoelectric ceramic, magnetostrictive, electromagnetic or hydraulic drive deformable mirrors.

其中,波前处理系统可以是计算机,也可以是专用集成电路板。Wherein, the wavefront processing system may be a computer or an application-specific integrated circuit board.

另外,提供一种基于单波前传感器的时序合成激光像差自适应校正装置,波前处理系统根据接收到的脉冲触发信号判断当前输出激光的脉冲子激光器,并根据波前传感器探测到的波前像差信息解算此时刻对应变形镜的控制信号,使其产生相应的面形补偿激光像差,具体实现步骤如下:In addition, an adaptive correction device for time-series synthesis laser aberration based on a single wavefront sensor is provided. The wavefront processing system determines the pulsed sub-laser currently outputting the laser according to the received pulse trigger signal, and according to the wavefront detected by the wavefront sensor The front aberration information is used to solve the control signal corresponding to the deformable mirror at this moment, so that it generates the corresponding surface shape to compensate the laser aberration. The specific implementation steps are as follows:

步骤1:波前处理系统接收到1号触发信号源的脉冲触发信号时,表明1号脉冲子激光器输出激光,波前传感器探测波前像差φi(x,y)并发送到波前处理系统,波前处理系统根据接收到的波前像差信息解算对应1号变形镜的控制信号,令其产生相应的面形,校正光束波前像差;Step 1: When the wavefront processing system receives the pulse trigger signal from the trigger signal source No. 1, it indicates that the pulse sub-laser No. 1 outputs laser light, and the wavefront sensor detects the wavefront aberration φ i (x, y) and sends it to the wavefront processing system System, the wavefront processing system calculates the control signal corresponding to the No. 1 deformable mirror according to the received wavefront aberration information, so that it generates the corresponding surface shape and corrects the beam wavefront aberration;

步骤2:波前处理系统接收到2号触发信号源的脉冲触发信号时,表明2号脉冲子激光器输出激光,波前传感器探测波前像差φj(x,y)并发送到波前处理系统,波前处理系统根据接收到的波前像差信息解算对应2号变形镜的控制信号,令其产生相应的面形,校正光束波前像差;Step 2: When the wavefront processing system receives the pulse trigger signal from the No. 2 trigger signal source, it indicates that the No. 2 pulse sub-laser outputs laser light, and the wavefront sensor detects the wavefront aberration φ j (x, y) and sends it to the wavefront processing System, the wavefront processing system calculates the control signal corresponding to the No. 2 deformable mirror according to the received wavefront aberration information, so that it generates the corresponding surface shape and corrects the beam wavefront aberration;

步骤3:重复执行步骤1和步骤2。Step 3: Repeat steps 1 and 2.

本发明与现有技术相比的优点在于:The advantages of the present invention compared with the prior art are:

(1)本发明旨在解决时序合成光路等像差引起光束质量退化的问题,相比于现有时序合成技术、指向控制技术,可明显提升合束后光束质量;(1) The present invention aims to solve the problem of beam quality degradation caused by aberrations such as the timing synthesis optical path. Compared with the existing timing synthesis technology and pointing control technology, the beam quality after beam combination can be significantly improved;

(2)本发明采用单路探测分时分路校正的系统结构,相比于现有传统分路探测校正的结构更为简单,控制系统更为紧凑;(2) The present invention adopts the system structure of single-channel detection and time-division and branch correction, which is simpler and more compact than the existing traditional branch detection and correction structure;

(3)本发明采用单路探测分时分路校正时序合成激光的像差。现有技术时序合束后,激光探测中存在的周期性时变高频像差对控制系统带宽的要求非常高,而本发明的分时分路方案从原理上消除了该高频像差,降低了控制的复杂度和难度。(3) The present invention adopts single-channel detection and time-division to correct the aberration of the time-series synthetic laser. After the prior art time-series beam combining, the periodic time-varying high-frequency aberration existing in laser detection has very high requirements on the bandwidth of the control system, and the time-division and branching scheme of the present invention eliminates the high-frequency aberration in principle and reduces the the complexity and difficulty of control.

附图说明Description of drawings

图1为本发明的结构示意图,其中,1为1号脉冲子激光器,2为2号脉冲子激光器,3为1号变形镜,4为2号变形镜,5为合束转盘,6为波前传感器,7为1号触发信号源,8为2号触发信号源,9为波前处理系统,10为信号发生器。Fig. 1 is a schematic diagram of the structure of the present invention, wherein 1 is a pulse sub-laser No. 1, 2 is a pulse sub-laser No. 2, 3 is a deformation mirror No. 1, 4 is a deformation mirror No. 2, 5 is a beam combining turntable, and 6 is a wave Front sensor, 7 is the No. 1 trigger signal source, 8 is the No. 2 trigger signal source, 9 is the wavefront processing system, and 10 is the signal generator.

图2为本发明用于2台脉冲子激光器时序合成像差校正控制时的工作时序图。FIG. 2 is a working sequence diagram when the present invention is used for the aberration correction control of two pulsed sub-lasers time-sequential synthesis.

图3为第一路激光校正前波前像差。Fig. 3 shows the wavefront aberration before the first laser beam is corrected.

图4为第一路激光校正前远场光强分布。Figure 4 shows the far-field light intensity distribution before the first laser correction.

图5为第一路激光校正后波前像差。Figure 5 shows the wavefront aberration after the first laser is corrected.

图6为第一路激光校正后远场光强分布。Figure 6 shows the far-field light intensity distribution after the first laser correction.

图7为第二路激光校正前波前像差。Figure 7 shows the wavefront aberration before the second laser beam is corrected.

图8为第二路激光校正前远场光强分布。Figure 8 shows the far-field light intensity distribution before the second laser correction.

图9为第二路激光校正后波前像差。Figure 9 shows the wavefront aberration after the second laser beam is corrected.

图10为第二路激光校正后远场光强分布。Figure 10 shows the far-field light intensity distribution after correction by the second laser.

图11为合束激光校正前远场光强分布。Figure 11 shows the far-field light intensity distribution before the combined beam laser is corrected.

图12为合束激光校正后远场光强分布。Figure 12 shows the far-field light intensity distribution after correction of the combined beam laser.

具体实施方式Detailed ways

为使本发明装置工作原理与实现过程更加清晰化,以下结合附图以及具体实施方式进一步说明本发明。In order to make the working principle and implementation process of the device of the present invention clearer, the present invention is further described below with reference to the accompanying drawings and specific embodiments.

如图1所示,一种基于单波前传感器的时序合成激光像差自适应校正装置,该装置由1号脉冲子激光器1、2号脉冲子激光器2、1号变形镜3、2号变形镜4、合束转盘5、波前传感器6、1号触发信号源7、2号触发信号源8、波前处理系统9和信号发生器10组成。在该装置中,所述波前传感器6连接于波前处理系统9的输入端;1号触发信号源7对应第一路光路中的1号脉冲子激光器1,同时2号触发信号源8对应第二路光路中的2号脉冲子激光器2,将此两部分光路与波前传感器6和波前处理系统9相连;1号变形镜3、2号变形镜4设于波前处理系统9的输出端接收控制信号;信号发生器10通过数据线缆与1号触发信号源7和2号触发信号源连8接以控制系统时序;1号触发信号源7和2号触发信号源8的脉冲在时序上是错位相间,波前传感器6从时序上区分两光路波前像差信息。其中,1号变形镜3和2号变形镜4是压电陶瓷、磁致伸缩、电磁式或液压式驱动器变形镜。波前处理系统9可以是计算机,也可以是专用集成电路板。As shown in Figure 1, a time-series synthesis laser aberration adaptive correction device based on a single wavefront sensor, the device is deformed by No. 1 pulse sub-laser 1, No. 2 pulse sub-laser 2, No. 1 deforming mirror 3, No. 2 The mirror 4 , the beam combining turntable 5 , the wavefront sensor 6 , the No. 1 trigger signal source 7 , the No. 2 trigger signal source 8 , the wave front processing system 9 and the signal generator 10 are composed. In this device, the wavefront sensor 6 is connected to the input end of the wavefront processing system 9; the No. 1 trigger signal source 7 corresponds to the No. 1 pulse sub-laser 1 in the first optical path, and the No. 2 trigger signal source 8 corresponds to the No. 1 pulse sub-laser 1. The No. 2 pulsed sub-laser 2 in the two optical paths is connected to the wavefront sensor 6 and the wavefront processing system 9; Receive the control signal; the signal generator 10 is connected with the No. 1 trigger signal source 7 and the No. 2 trigger signal source through the data cable to control the system timing; the pulses of the No. 1 trigger signal source 7 and the No. 2 trigger signal source 8 are in the timing sequence The above is the dislocation phase, and the wavefront sensor 6 distinguishes the wavefront aberration information of the two optical paths from the time sequence. Among them, the No. 1 deformable mirror 3 and the No. 2 deformable mirror 4 are piezoelectric ceramic, magnetostrictive, electromagnetic or hydraulic drive deformable mirrors. The wavefront processing system 9 may be a computer or an application-specific integrated circuit board.

设定装置中各部件的参数:系统中子激光器重复频率设为1000Hz,输出激光光束波长为671nm;信号发生器输出的TTL脉冲信号频率设为2000Hz,高电平触发;触发信号源输出的TTL脉冲信号频率设为1000Hz,高电平触发;波前传感器中CCD相机的采样频率设为2000Hz;变形镜选用59单元的压电陶瓷驱动器变形镜,驱动器采用六边形的排布方式,动作频率设为1000Hz;波前处理系统采用基于实时Linux操作系统的计算机,处理频率设为2000Hz;波前传感器采用夏克-哈特曼波前传感器,其中,微透镜的子孔径个数为12×12。Set the parameters of each component in the device: the repetition frequency of the system neutron laser is set to 1000Hz, and the wavelength of the output laser beam is 671nm; the frequency of the TTL pulse signal output by the signal generator is set to 2000Hz, and the high level triggers; the TTL output of the trigger signal source The frequency of the pulse signal is set to 1000Hz, and the high level is triggered; the sampling frequency of the CCD camera in the wavefront sensor is set to 2000Hz; the deformation mirror is a piezoelectric ceramic driver deforming mirror with 59 units, and the driver adopts a hexagonal arrangement. It is set to 1000Hz; the wavefront processing system adopts a computer based on real-time Linux operating system, and the processing frequency is set to 2000Hz; the wavefront sensor adopts the Shack-Hartmann wavefront sensor, and the number of sub-apertures of the microlens is 12×12 .

本发明装置的工作时序以信号发生器10控制。图2所示为在信号发生器10的输出脉冲调节下,装置中各部件工作的时序图。图中各部件工作时用1表示,不工作时用0表示。The working sequence of the device of the present invention is controlled by the signal generator 10 . FIG. 2 is a timing chart showing the operation of various components in the device under the regulation of the output pulse of the signal generator 10 . In the figure, each component is represented by 1 when it is working, and it is represented by 0 when it is not working.

信号发生器10发出第1、3、5、7…个脉冲信号时,1号触发信号源7输出的脉冲触发信号处在上升沿或者高电平,其对应的1号脉冲子激光器1输出激光。波前传感器6探测波前像差信息并发送到波前处理系统9,波前处理系统9根据接收到的波前像差信息解算1号变形镜3的控制信号使其产生相应的面形补偿激光像差。When the signal generator 10 sends out the 1st, 3rd, 5th, 7th ... pulse signals, the pulse trigger signal output by the trigger signal source 7 of No. 1 is at a rising edge or a high level, and the corresponding pulse sub-laser 1 of No. 1 outputs laser light. . The wavefront sensor 6 detects the wavefront aberration information and sends it to the wavefront processing system 9. The wavefront processing system 9 calculates the control signal of the No. 1 deformable mirror 3 according to the received wavefront aberration information to generate the corresponding surface shape Compensates for laser aberrations.

信号发生器10发出第2、4、6、8…个脉冲信号时,2号触发信号源8输出的脉冲触发信号处在上升沿或者高电平,其对应的2号脉冲子激光器2输出激光。波前传感器6探测波前像差信息并发送到波前处理系统9,波前处理系统9根据接收到的波前像差信息解算2号变形镜4的控制信号使其产生相应的面形补偿激光像差。When the signal generator 10 sends out the 2nd, 4th, 6th, 8th pulse signal, the pulse trigger signal output by the No. 2 trigger signal source 8 is at a rising edge or a high level, and the corresponding No. 2 pulse sub-laser 2 outputs laser light. . The wavefront sensor 6 detects the wavefront aberration information and sends it to the wavefront processing system 9. The wavefront processing system 9 calculates the control signal of the No. 2 deformable mirror 4 according to the received wavefront aberration information to generate the corresponding surface shape Compensates for laser aberrations.

波前处理系统9根据接收到的脉冲触发信号判断当前输出激光的脉冲子激光器,并根据波前传感器6探测到的波前像差信息解算此时刻对应变形镜的控制信号,使其产生相应的面形补偿激光像差,具体实现步骤如下:The wavefront processing system 9 determines the pulsed sub-laser currently outputting the laser according to the received pulse trigger signal, and calculates the control signal corresponding to the deformable mirror at this moment according to the wavefront aberration information detected by the wavefront sensor 6, so as to generate the corresponding control signal. The surface shape compensates laser aberration, and the specific implementation steps are as follows:

波前处理系统9接收到1号触发信号源7的脉冲触发信号时,表明1号脉冲子激光器1输出激光,波前传感器6探测波前像差φi(x,y)并发送到波前处理系统9,波前处理系统9根据接收到的波前像差信息解算对应1号变形镜3的控制信号,令其产生相应的面形,校正光束波前像差;When the wavefront processing system 9 receives the pulse trigger signal from the No. 1 trigger signal source 7, it indicates that the No. 1 pulse sub-laser 1 outputs laser light, and the wavefront sensor 6 detects the wavefront aberration φ i (x, y) and sends it to the wavefront The processing system 9, the wavefront processing system 9 calculates the control signal corresponding to the No. 1 deformable mirror 3 according to the received wavefront aberration information, so that it generates a corresponding surface shape and corrects the wavefront aberration of the beam;

步骤2:波前处理系统9接收到2号触发信号源8的脉冲触发信号时,表明2号脉冲子激光器2输出激光,波前传感器6探测波前像差φj(x,y)并发送到波前处理系统9,波前处理系统9根据接收到的波前像差信息解算对应2号变形镜4的控制信号,令其产生相应的面形,校正光束波前像差;Step 2: When the wavefront processing system 9 receives the pulse trigger signal from the No. 2 trigger signal source 8, it indicates that the No. 2 pulse sub-laser 2 outputs laser light, and the wavefront sensor 6 detects the wavefront aberration φ j (x, y) and sends To the wavefront processing system 9, the wavefront processing system 9 calculates the control signal corresponding to the No. 2 deformable mirror 4 according to the received wavefront aberration information, so that it generates a corresponding surface shape and corrects the wavefront aberration of the beam;

步骤3:重复执行步骤1和步骤2。Step 3: Repeat steps 1 and 2.

如图3-图12为对激光典型波前像差校正的仿真结果图,图3为第一路激光校正前波前像差。图4为第一路激光校正前远场光强分布。图5为第一路激光校正后波前像差。图6为第一路激光校正后远场光强分布。图7为第二路激光校正前波前像差。图8为第二路激光校正前远场光强分布。图9为第二路激光校正后波前像差。图10为第二路激光校正后远场光强分布。图11为合束激光校正前远场光强分布。图12为合束激光校正后远场光强分布。其中,校正的效果与选用变形镜的单元数有关。以β因子为光束质量评价指标,第一路激光校正前的光束质量为β1=10.92,校正后的光束质量为β′1=2.45;第二路激光校正前的光束质量为β2=11.24,校正后的光束质量为β′2=2.58;合束激光校正前的光束质量为βc=13.26,校正后的光束质量为β′c=2.71。由此可看出,经过校正,合束后的光束质量提高近5倍。Fig. 3-Fig. 12 are the simulation results of the typical wavefront aberration correction of the laser, and Fig. 3 is the first-path laser to correct the front wavefront aberration. Figure 4 shows the far-field light intensity distribution before the first laser correction. Figure 5 shows the wavefront aberration after the first laser is corrected. Figure 6 shows the far-field light intensity distribution after the first laser correction. Figure 7 shows the wavefront aberration before the second laser beam is corrected. Figure 8 shows the far-field light intensity distribution before the second laser correction. Figure 9 shows the wavefront aberration after the second laser beam is corrected. Figure 10 shows the far-field light intensity distribution after correction by the second laser. Figure 11 shows the far-field light intensity distribution before the combined beam laser is corrected. Figure 12 shows the far-field light intensity distribution after correction of the combined beam laser. Among them, the effect of correction is related to the number of units of the deformed mirror selected. Taking the β factor as the beam quality evaluation index, the beam quality of the first channel of laser before correction is β 1 =10.92, the beam quality after correction is β′ 1 =2.45; the beam quality of the second channel of laser before correction is β 2 =11.24 , the corrected beam quality is β′ 2 =2.58; the beam quality before the correction of the combined beam laser is β c =13.26, and the corrected beam quality is β′ c =2.71. It can be seen that, after correction, the beam quality after the beam combination is improved by nearly 5 times.

Claims (6)

1.一种基于单波前传感器的时序合成激光像差自适应校正装置,其特征在于:该装置由1号脉冲子激光器(1)、2号脉冲子激光器(2)、1号变形镜(3)、2号变形镜(4)、合束转盘(5)、波前传感器(6)、1号触发信号源(7)、2号触发信号源(8)、波前处理系统(9)和信号发生器(10)组成,在该装置中,所述波前传感器(6)连接于波前处理系统(9)的输入端;1号触发信号源(7)对应第一路光路中的1号脉冲子激光器(1),同时2号触发信号源(8)对应第二路光路中的2号脉冲子激光器(2),将此两部分光路与波前传感器(6)和波前处理系统(9)相连;1号变形镜(3)、2号变形镜(4)设于波前处理系统(9)的输出端接收控制信号;信号发生器(10)通过数据线缆与1号触发信号源(7)和2号触发信号源(8)连接以控制系统时序;1号触发信号源(7)和2号触发信号源(8)的脉冲在时序上是错位相间,波前传感器(6)从时序上区分两光路波前像差信息;1号触发信号源(7)输出脉冲触发信号时,对应的1号脉冲子激光器(1)输出激光,波前传感器(6)探测波前像差信息并发送到波前处理系统(9),波前处理系统(9)根据接收到的波前像差信息解算1号变形镜(3)的控制信号使其产生相应的面形补偿激光像差;在下个时刻,2号触发信号源(8)输出脉冲触发信号时,对应的2号脉冲子激光器(2)输出激光,波前传感器(6)探测波前像差信息并发送到波前处理系统(9),波前处理系统(9)根据接收到的波前像差信息解算2号变形镜(4)的控制信号使其产生相应的面形补偿激光像差;通过上述工作模式,基于单波前传感器的时序合成激光像差自适应校正装置可实现合成后激光光束质量的提高。1. A time-series synthesis laser aberration self-adaptive correction device based on a single-wavefront sensor, characterized in that: the device consists of No. 1 pulse sub-laser (1), No. 2 pulse sub-laser (2), No. 1 deformable mirror ( 3), No. 2 deformable mirror (4), beam combining turntable (5), wavefront sensor (6), No. 1 trigger signal source (7), No. 2 trigger signal source (8), wavefront processing system (9) and a signal generator (10), in the device, the wavefront sensor (6) is connected to the input end of the wavefront processing system (9); the No. 1 trigger signal source (7) corresponds to the first optical path No. 2 pulsed sub-laser (1), and No. 2 trigger signal source (8) corresponds to No. 2 pulsed sub-laser (2) in the second optical path, and the two parts of the optical path are connected with the wavefront sensor (6) and the wavefront processing system (9) connected; No. 1 deformable mirror (3) and No. 2 deformable mirror (4) are arranged at the output end of the wavefront processing system (9) to receive the control signal; the signal generator (10) is connected to the No. 1 trigger signal through a data cable The source (7) and the No. 2 trigger signal source (8) are connected to control the system timing; the pulses of the No. 1 trigger signal source (7) and the No. 2 trigger signal source (8) are misaligned in timing, and the wavefront sensor (6) ) Distinguish the wavefront aberration information of the two optical paths in terms of time sequence; when the No. 1 trigger signal source (7) outputs a pulse trigger signal, the corresponding No. 1 pulse sub-laser (1) outputs laser light, and the wavefront sensor (6) detects the wavefront image The difference information is sent to the wavefront processing system (9), and the wavefront processing system (9) calculates the control signal of the No. 1 deformable mirror (3) according to the received wavefront aberration information to generate the corresponding surface shape compensation laser aberration; at the next moment, when the No. 2 trigger signal source (8) outputs a pulse trigger signal, the corresponding No. 2 pulse sub-laser (2) outputs laser light, and the wavefront sensor (6) detects the wavefront aberration information and sends it to the wavefront A preprocessing system (9), the wavefront processing system (9) calculates the control signal of the No. 2 deformable mirror (4) according to the received wavefront aberration information to generate a corresponding surface shape to compensate the laser aberration; through the above work The laser aberration self-adaptive correction device based on the time-series synthesis of the single wavefront sensor can improve the quality of the synthesized laser beam. 2.如权利要求1所述的一种基于单波前传感器的时序合成激光像差自适应校正装置,其特征在于:信号发生器(10)发出第奇数个脉冲信号时,1号触发信号源(7)输出脉冲触发信号,其对应的1号脉冲子激光器(1)输出激光。2. A kind of time-series synthesis laser aberration self-adaptive correction device based on single-wavefront sensor as claimed in claim 1, is characterized in that: when the signal generator (10) sends out the odd-numbered pulse signal, No. 1 triggers the signal source (7) Output a pulse trigger signal, and the corresponding No. 1 pulse sub-laser (1) outputs laser light. 3.如权利要求1所述的一种基于单波前传感器的时序合成激光像差自适应校正装置,其特征在于:信号发生器(10)发出第偶数个脉冲信号时,2号触发信号源(8)输出脉冲触发信号,其对应的2号脉冲子激光器(2)输出激光。3. a kind of time-series synthesis laser aberration self-adaptive correction device based on single-wavefront sensor as claimed in claim 1 is characterized in that: when the signal generator (10) sends out the even-numbered pulse signal, No. 2 triggers the signal source (8) Output a pulse trigger signal, and the corresponding No. 2 pulse sub-laser (2) outputs laser light. 4.如权利要求1所述的一种基于单波前传感器的时序合成激光像差自适应校正装置,其特征在于:1号变形镜(3)和2号变形镜(4)是压电陶瓷、磁致伸缩、电磁式或液压式驱动器变形镜。4. The device for self-adaptive correction of time-series synthesis laser aberration based on a single-wavefront sensor according to claim 1, characterized in that: the No. 1 deformable mirror (3) and the No. 2 deformable mirror (4) are piezoelectric ceramics , Magnetostrictive, Electromagnetic or Hydraulic Drive Deformable Mirrors. 5.如权利要求1所述的一种基于单波前传感器的时序合成激光像差自适应校正装置,其特征在于:波前处理系统(9)可以是计算机,也可以是专用集成电路板。5. The device for self-adapting laser aberration correction based on a single-wavefront sensor according to claim 1, wherein the wavefront processing system (9) can be a computer or an application-specific integrated circuit board. 6.如权利要求1所述的一种基于单波前传感器的时序合成激光像差自适应校正装置,其特征在于:波前处理系统(9)根据接收到的脉冲触发信号判断当前输出激光的脉冲子激光器,并根据波前传感器(6)探测到的波前像差信息解算此时刻对应变形镜的控制信号,使其产生相应的面形补偿激光像差,具体实现步骤如下:6. A time-series synthesis laser aberration adaptive correction device based on a single wavefront sensor as claimed in claim 1, wherein the wavefront processing system (9) judges the current output laser according to the received pulse trigger signal. The pulsed sub-laser is used to calculate the control signal of the corresponding deformable mirror at this moment according to the wavefront aberration information detected by the wavefront sensor (6), so as to generate the corresponding surface shape to compensate the laser aberration. The specific implementation steps are as follows: 步骤1:波前处理系统(9)接收到1号触发信号源(7)的脉冲触发信号时,表明1号脉冲子激光器(1)输出激光,波前传感器(6)探测波前像差φi(x,y)并发送到波前处理系统(9),波前处理系统(9)根据接收到的波前像差信息解算对应1号变形镜(3)的控制信号,令其产生相应的面形,校正光束波前像差;Step 1: When the wavefront processing system (9) receives the pulse trigger signal from the No. 1 trigger signal source (7), it indicates that the No. 1 pulse sub-laser (1) outputs laser light, and the wavefront sensor (6) detects the wavefront aberration φ i (x, y) is sent to the wavefront processing system (9), and the wavefront processing system (9) calculates the control signal corresponding to the No. 1 deformable mirror (3) according to the received wavefront aberration information, and makes it generate Corresponding surface shape, correct beam wavefront aberration; 步骤2:波前处理系统(9)接收到2号触发信号源(8)的脉冲触发信号时,表明2号脉冲子激光器(2)输出激光,波前传感器(6)探测波前像差φj(x,y)并发送到波前处理系统(9),波前处理系统(9)根据接收到的波前像差信息解算对应2号变形镜(4)的控制信号,令其产生相应的面形,校正光束波前像差;Step 2: When the wavefront processing system (9) receives the pulse trigger signal from the No. 2 trigger signal source (8), it indicates that the No. 2 pulse sub-laser (2) outputs laser light, and the wavefront sensor (6) detects the wavefront aberration φ j (x, y) is sent to the wavefront processing system (9), and the wavefront processing system (9) calculates the control signal corresponding to the No. 2 deformable mirror (4) according to the received wavefront aberration information, and makes it generate Corresponding surface shape, correct beam wavefront aberration; 步骤3:重复执行步骤1和步骤2。Step 3: Repeat steps 1 and 2.
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