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CN111293055B - Processing equipment - Google Patents

Processing equipment Download PDF

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Publication number
CN111293055B
CN111293055B CN201911219072.4A CN201911219072A CN111293055B CN 111293055 B CN111293055 B CN 111293055B CN 201911219072 A CN201911219072 A CN 201911219072A CN 111293055 B CN111293055 B CN 111293055B
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CN
China
Prior art keywords
workpiece
unit
cassette
display screen
chuck table
Prior art date
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Active
Application number
CN201911219072.4A
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Chinese (zh)
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CN111293055A (en
Inventor
大高小由纪
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Disco Corp
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Disco Corp
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Filing date
Publication date
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Publication of CN111293055A publication Critical patent/CN111293055A/en
Application granted granted Critical
Publication of CN111293055B publication Critical patent/CN111293055B/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/409—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by using manual data input [MDI] or by using control panel, e.g. controlling functions with the panel; characterised by control panel details or by setting parameters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67282—Marking devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67294—Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Human Computer Interaction (AREA)
  • Automation & Control Theory (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Dicing (AREA)
  • Numerical Control (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

提供加工装置，能够掌握被加工物的加工的进行状况。加工装置具有卡盘工作台、切削单元、暂放被加工物的轨道、清洗单元、显示画面(111)、以及对显示于显示画面(111)的进行状况显示画面(112)进行设定的显示信息设定部。进行状况显示画面(112)设定有：装置内布局图(120)，其具有与轨道、卡盘工作台以及清洗单元对应的显示出规定的颜色(301、303、304)的对应区域(121、123、124)；被加工物标记，其在装置内布局图(120)中重叠显示被加工物的当前位置；以及多个格(131)，它们表示盒的收纳架。在格(131)内显示出与曾被收纳于格(131)所示的盒的收纳架中的被加工物的当前位置对应的对应区域(121、123、124)的颜色(301、303、304)。

A processing device is provided that can grasp the progress of processing of a workpiece. The processing device comprises a chuck table, a cutting unit, a track for temporarily placing the workpiece, a cleaning unit, a display screen (111), and a display information setting unit for setting a progress display screen (112) displayed on the display screen (111). The progress display screen (112) is set with: an internal layout diagram (120) of the device, which has corresponding areas (121, 123, 124) corresponding to the track, the chuck table, and the cleaning unit, which display prescribed colors (301, 303, 304); a workpiece mark, which overlaps and displays the current position of the workpiece in the internal layout diagram (120); and a plurality of grids (131) which represent storage racks for boxes. The color (301, 303, 304) of the corresponding area (121, 123, 124) corresponding to the current position of the workpiece in the storage rack of the box shown in the box (131) is displayed in the box (131).

Description

Processing device
Technical Field
The present invention relates to a processing apparatus.
Background
Various machining apparatuses are known which hold a plate-shaped workpiece on a chuck table and cut the workpiece with a cutting tool, thin the workpiece with a grinding tool, or machine the workpiece with a laser beam. In many of these processing apparatuses, a full-automatic processing apparatus is used in which a workpiece is taken out of a cassette in which a plurality of layers are formed and one workpiece is supported by each layer, the workpiece is processed by a chuck table, cleaned by a cleaning table, and returned to the cassette (for example, see patent document 1).
In the processing device shown in patent document 1 and the like, the areas other than the cassette are covered with the exterior cover for the purpose of preventing foreign matter from adhering to the object to be processed or preventing an operator from being injured accidentally.
Patent document 1 Japanese patent application laid-open No. 2016-15042
The processing apparatus shown in patent document 1 and the like covers the region other than the cassette with the exterior cover, and thus it is not possible to see at first glance where the object to be processed is positioned in the apparatus. Further, the processing apparatus shown in patent document 1 and the like displays, with numerals, where processing of the workpiece stored in the cassette is performed, but it is difficult to see clearly where the screen of the display apparatus is viewed from a remote position.
Disclosure of Invention
The present invention has been made in view of the above-described problems, and an object thereof is to provide a processing apparatus capable of grasping the progress of processing of a workpiece.
In order to achieve the object, the processing apparatus of the present invention includes a chuck table for holding a workpiece, a processing unit for processing the workpiece held by the chuck table, a cassette mounting area for mounting a cassette having a plurality of layers for accommodating the workpiece, a cleaning area for cleaning the workpiece, a conveying unit for conveying the workpiece between the cassette, the chuck table, and the cleaning area, a display screen for displaying a processing condition of the workpiece, and a display information setting unit for setting information displayed on the display screen, wherein the display information setting unit has an in-apparatus layout diagram having the chuck table and the cleaning area, each area displaying a predetermined color or a predetermined identification mark, the workpiece mark overlapping in the in-apparatus layout diagram and displaying a current position of the workpiece carried out from the cassette, and a plurality of cells indicating a state of processing of the cassette in which the layer of the cassette is displayed in correspondence to the predetermined color or the predetermined cell in the accommodated layer.
In the processing apparatus, the in-apparatus layout may include a conveying unit that conveys the object to be processed.
In the processing apparatus, a color or an identification mark indicating completion of the carry-in may be displayed in the cell indicating the layer in which the object to be processed carried out of the cassette and returned to the cassette again is stored.
The processing apparatus may further include a temporary storage area for temporarily storing the object to be processed carried out from the cassette placed in the cassette placement area, wherein the carrying means carries the object to be processed among the cassette, the temporary storage area, the chuck table, and the cleaning area, and wherein the in-apparatus layout includes the temporary storage area.
The present invention has an effect of grasping the progress of processing of a workpiece.
Drawings
Fig. 1 is a perspective view showing a configuration example of a processing apparatus according to embodiment 1.
Fig. 2 is a perspective view showing a cartridge of the processing apparatus shown in fig. 1.
Fig. 3 is a view showing a progress status display screen displayed on a display screen of a display unit of the processing apparatus shown in fig. 1.
Fig. 4 is a view showing an example of the workpiece mark displayed on the display screen of the display unit of the processing apparatus shown in fig. 1.
Fig. 5 is a view showing another example of the workpiece marks displayed on the display screen of the display unit of the processing apparatus shown in fig. 1.
Fig. 6 is a view showing a progress status display screen when a workpiece stored in the lowest storage rack of the cassette of the processing apparatus shown in fig. 1 is temporarily placed on a rail.
Fig. 7 is a view showing a progress status display screen when the 1 st conveying unit conveys the workpiece stored in the lowest storage rack of the cassette of the processing apparatus shown in fig. 1.
Fig. 8 is a view showing a progress status display screen when the workpiece stored in the lower second storage rack of the cassette of the processing apparatus shown in fig. 1 is temporarily placed on the rail.
Fig. 9 is a view showing a progress status display screen when the workpiece stored in the lowest storage rack of the cassette of the processing apparatus shown in fig. 1 is held on the chuck table and the workpiece stored in the next second storage rack is transported by the 1 st transport unit.
Fig. 10 is a view showing a progress status display screen when the 2 nd conveying unit conveys the workpiece stored in the lowest storage rack of the cassette of the processing apparatus shown in fig. 1, holds the workpiece stored in the next second storage rack on the chuck table, and temporarily places the workpiece stored in the next third storage rack on the track.
Fig. 11 is a view showing a progress status display screen when the workpiece stored in the lowest storage rack of the cassette of the processing apparatus shown in fig. 1 is held on the rotary table and the workpiece stored in the next third storage rack of the cassette is conveyed by the 1 st conveying means.
Fig. 12 is a view showing a progress display screen when the 1 st conveying unit conveys the workpiece that has been stored in the lowest storage rack of the cassette of the processing apparatus shown in fig. 1, the 2 nd conveying unit conveys the workpiece that has been stored in the next second storage rack, and the workpiece that has been stored in the next third storage rack of the cassette is held on the chuck table.
Fig. 13 is a view showing a progress status display screen when the workpiece stored in the lowest storage rack of the cassette of the processing apparatus shown in fig. 1 is placed on the rail temporarily and the workpiece stored in the next second storage rack is held on the rotary table.
Fig. 14 is a view showing a progress status display screen when the object to be processed, which has been stored in the lowest storage rack of the cassette of the processing apparatus shown in fig. 1, is carried into the cassette and the object to be processed, which has been stored in the next fourth storage rack, is temporarily placed on the rail.
Fig. 15 is a view showing a progress status display screen when a workpiece, which has been stored in the uppermost storage rack of the cassette of the machining apparatus shown in fig. 1, is temporarily placed on a rail after cutting.
Fig. 16 is a diagram showing a progress status display screen displayed on a display screen of a display unit of a processing apparatus according to modification 1 of embodiment 1.
Fig. 17 is a diagram showing a progress status display screen displayed on a display screen of a display unit of a processing apparatus according to modification 2 of embodiment 1.
Description of the reference numerals
1, Machining device, 10, chuck table, 20, cutting unit (machining unit), 50, box lifter (box loading area), 60, box, 64, storage rack (layer), 70, cleaning unit (cleaning area), 81, rail (temporary placing area), 90, conveying unit, 100, control unit, 101, display information setting part, 111, 112, status display screen (display information), 120, device internal layout, 121, temporary placing corresponding area, 122, 1 st conveying unit corresponding area, 123, chuck table corresponding area, 124, cleaning corresponding area, 125, 2 nd conveying unit corresponding area, 131, grids, 140, 141, processed object mark, 200, processed object, 301, 302, 303, 304, 305, color (prescribed color), 306, color indicating the completion of conveying.
Detailed Description
The mode (embodiment) for carrying out the present invention will be described in detail with reference to the accompanying drawings. The present invention is not limited to the following embodiments. The constituent elements described below include those that can be easily understood by those skilled in the art and those that are substantially the same. The structures described below may be appropriately combined. Various omissions, substitutions and changes in the structure may be made without departing from the spirit of the invention.
Embodiment 1
A processing apparatus according to embodiment 1 of the present invention will be described with reference to the accompanying drawings. Fig. 1 is a perspective view showing a configuration example of a processing apparatus according to embodiment 1. Fig. 2 is a perspective view showing a cartridge of the processing apparatus shown in fig. 1. Fig. 3 is a view showing a progress status display screen displayed on a display screen of a display unit of the processing apparatus shown in fig. 1. Fig. 4 is a view showing an example of the workpiece mark displayed on the display screen of the display unit of the processing apparatus shown in fig. 1. Fig. 5 is a view showing another example of the workpiece marks displayed on the display screen of the display unit of the processing apparatus shown in fig. 1.
The machining device 1 according to embodiment 1 is a machining device 1 for cutting (corresponding to machining) a workpiece 200 shown in fig. 1. In embodiment 1, the workpiece 200 is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer using silicon, sapphire, gallium, or the like as a base material. The workpiece 200 has devices 203 formed on a front surface 201 in regions divided in a lattice shape by a plurality of lines 202 to be divided formed in a lattice shape.
The workpiece 200 of the present invention may be a so-called TAIKO (registered trademark) wafer in which a central portion is thinned and a thick portion is formed on an outer peripheral portion, or may be a rectangular package substrate having a plurality of devices sealed with a resin, a ceramic substrate, a ferrite substrate, a substrate containing at least one of nickel and iron, or the like, in addition to the wafer. In embodiment 1, the workpiece 200 is supported by the ring frame 205 by attaching the back surface 204 to the adhesive tape 206 having the ring frame 205 attached to the outer periphery thereof.
The machining device 1 shown in fig. 1 is a device for holding a workpiece 200 by a chuck table 10 and cutting the workpiece along a line 202 to be cut by a cutting tool 21. As shown in fig. 1, the machining apparatus 1 includes a chuck table 10 for holding a workpiece 200 by suction by a holding surface 11, a cutting unit 20 for cutting the workpiece 200 held by the chuck table 10 by a cutting tool 21, a photographing unit 30 for photographing the workpiece 200 held by the chuck table 10, and a control unit 100.
As shown in fig. 1, the machining device 1 includes at least an X-axis moving means, not shown, for performing machining feed on the chuck table 10 in an X-axis direction parallel to the horizontal direction, a Y-axis moving means, not shown, for performing indexing feed on the cutting means 20 in a Y-axis direction parallel to the horizontal direction and perpendicular to the X-axis direction, and a Z-axis moving means 40 for performing plunge feed on the cutting means 20 in a Z-axis direction parallel to the vertical direction perpendicular to both the X-axis direction and the Y-axis direction. As shown in fig. 1, the machining device 1 is a machining device 1 having two cutting units 20, that is, a dicing saw having two main shafts, a so-called double-shaft-facing machining device 1.
The chuck table 10 has a disk shape, and the holding surface 11 for holding the workpiece 200 is formed of porous ceramics or the like. The chuck table 10 is provided so that a carry-in/out area for carrying in and out the workpiece 200 by the X-axis moving means is provided in the machining area below the cutting means 20 and in the lower side away from the cutting means 20, and is provided so as to be rotatable about an axis parallel to the Z-axis direction by a rotation driving source. The chuck table 10 is connected to a vacuum suction source, not shown, and sucks and holds the workpiece 200 placed on the holding surface 11 by the vacuum suction source. In embodiment 1, the chuck table 10 attracts and holds the back surface 204 side of the workpiece 200 through the adhesive tape 206. As shown in fig. 1, a plurality of clamping portions 12 for clamping the ring frame 205 are provided around the chuck table 10.
The cutting unit 20 is a cutting unit to which a cutting tool 21 for cutting the workpiece 200 held by the chuck table 10 is detachably attached. The cutting units 20 are provided so as to be movable in the Y-axis direction by the Y-axis moving unit and so as to be movable in the Z-axis direction by the Z-axis moving unit 40, respectively, with respect to the workpiece 200 held by the chuck table 10.
As shown in fig. 1, one cutting unit 20 is provided on one column portion 4 of a door-shaped support frame 3 erected from the apparatus main body 2 via a Y-axis moving unit, a Z-axis moving unit 40, and the like. As shown in fig. 1, the other cutting unit 20 is provided on the other column portion 5 of the support frame 3 via a Y-axis moving unit, a Z-axis moving unit 40, and the like. The support frame 3 connects the upper ends of the column portions 4 and 5 to each other via a horizontal beam 6.
The cutting unit 20 is capable of positioning the cutting tool 21 at an arbitrary position of the holding surface 11 of the chuck table 10 by the Y-axis moving unit and the Z-axis moving unit 40. The cutting unit 20 includes a spindle case 22 provided so as to be movable in the Y-axis direction and the Z-axis direction by the Y-axis moving unit and the Z-axis moving unit 40, and a spindle, not shown, provided on the spindle case 22 so as to be rotatable about an axis, rotated by a motor, and having a cutting tool 21 attached to a tip thereof.
The photographing unit 30 is fixed to the cutting unit 20 so as to move integrally with the cutting unit 20. The imaging unit 30 includes an imaging element that images the region to be divided of the workpiece 200 held by the chuck table 10 before cutting. The imaging element is, for example, a CCD (Charge-Coupled Device) imaging element or a CMOS (Complementary MOS, complementary metal oxide semiconductor) imaging element. The imaging unit 30 captures an image of the workpiece 200 held by the chuck table 10 to obtain an image for performing alignment or the like, aligns the workpiece 200 with the cutting tool 21, and outputs the obtained image to the control unit 100.
The X-axis moving unit moves the chuck table 10 in the X-axis direction as the machining feed direction, so that the chuck table 10 and the cutting unit 20 relatively perform machining feed along the X-axis direction. The Y-axis moving unit moves the cutting unit 20 in the Y-axis direction as the indexing direction, thereby indexing the chuck table 10 and the cutting unit 20 relatively along the Y-axis direction. The Z-axis moving unit 40 moves the cutting unit 20 in the Z-axis direction, which is the plunge feed direction, so that the chuck table 10 and the cutting unit 20 perform plunge feed relatively along the Z-axis direction.
The X-axis moving unit, the Y-axis moving unit, and the Z-axis moving unit 40 include a known ball screw rotatably provided around an axis, a known motor for rotating the ball screw around the axis, and a known rail for supporting the chuck table 10 or the cutting unit 20 to be movable in the X-axis direction, the Y-axis direction, or the Z-axis direction.
The machining device 1 includes an X-axis direction position detecting means, not shown, for detecting the position of the chuck table 10 in the X-axis direction, a Y-axis direction position detecting means, not shown, for detecting the position of the cutting means 20 in the Y-axis direction, and a Z-axis direction position detecting means for detecting the position of the cutting means 20 in the Z-axis direction. The X-axis direction position detecting unit and the Y-axis direction position detecting unit can be constituted by a linear scale and a readhead parallel to the X-axis direction or the Y-axis direction. The Z-axis direction position detection unit detects the Z-axis direction position of the cutting unit 20 by using the pulse of the motor. The X-axis direction position detecting means, the Y-axis direction position detecting means, and the Z-axis direction position detecting means output the X-axis direction of the chuck table 10, the Y-axis direction of the cutting means 20, or the Z-axis direction position to the control means 100. In embodiment 1, the positions of the respective components of the processing apparatus 1 in the X-axis direction, the Y-axis direction, and the Z-axis direction are specified by using a preset reference position, not shown, as a reference.
The machining apparatus 1 further includes a cassette lifter 50 as a cassette loading area for loading the cassette 60 containing the workpiece 200 before and after cutting on the upper surface and moving the cassette 60 up and down in the Z-axis direction, a cleaning unit 70 as a cleaning area for cleaning the workpiece 200 after cutting, a temporary placing unit 80 for placing the workpiece 200 in and out of the cassette 60, and a conveying unit 90 for conveying the workpiece 200.
As shown in fig. 2, the cassette 60 includes a bottom plate 61 placed on the cassette elevator 50, a top plate 62 opposed to the bottom plate 61 with a gap therebetween in the Z-axis direction, and a pair of side plates 63 connecting the ends of the bottom plate 61 and the top plate 62 in the X-axis direction. The pair of side plates 63 are opposed to each other with a space therebetween in the X-axis direction. Each of the pair of side plates 63 has a housing frame 64, and the housing frame 64 is a layer protruding in a direction toward each other. The cassette 60 has a plurality of storage racks 64 on each side plate 63 at equal intervals in the Z-axis direction, and in embodiment 1, 10 storage racks 64 are provided on each side plate 63. The upper surfaces of the housing frames 64 disposed on the pair of side plates 63 and facing each other in the X-axis direction are disposed on the same plane. Each storage rack 64 stores the workpiece 200 in the cassette 60 by placing the workpiece 200 on the upper surface. In embodiment 1, each storage rack 64 has an annular frame 205 mounted on the upper surface.
In the present description, when distinguishing the storage racks 64 from each other, natural numbers such as the numbers 64-1, -2, -3..about.10, which increase from 1, are described in order from the object on the lower side, and when the storage racks 64 are not distinguished from each other, only the number 64 is described. In the present specification, when the objects to be processed 200 stored in the storage racks 64 are distinguished from each other, the natural numbers that increase from 1 such as the numbers 200 are denoted by-1, -2, -3, and-10 in order from the object to be processed 200 stored in the storage rack 64 on the lower side, and when the objects to be processed 200 stored in the storage rack 64 are not distinguished from each other, only the reference number 200 is denoted by the description.
In embodiment 1, the cassette lifter 50 mounts the cassette 60 on the upper surface, and lifts and lowers the cassette 60 in the Z-axis direction by a motor, not shown.
The cleaning unit 70 has a disk shape, and the cleaning unit 70 includes a rotary table 72 having a holding surface 71 for holding the workpiece 200, such as porous ceramics, and a cleaning liquid supply nozzle, not shown, for supplying a cleaning liquid such as pure water to the workpiece 200 held by the holding surface 71 of the rotary table 72.
The rotary table 72 is connected to a vacuum suction source, not shown, and sucks and holds the workpiece 200 placed on the holding surface 71 by the vacuum suction source. The rotary table 72 is rotatably provided around an axis parallel to the Z-axis direction by a motor or the like, not shown. In embodiment 1, the cleaning unit 70 supplies the cleaning liquid from the cleaning liquid supply nozzle to the workpiece 200 while rotating the rotary table 72 that attracts and holds the rear surface 204 side of the workpiece 200 with the adhesive tape 206 interposed therebetween around the axis, thereby cleaning the workpiece 200 held by the holding surface 71.
The temporary placing unit 80 carries out one piece of the workpiece 200 before cutting from the cassette 60 placed on the cassette lifter 50, and carries in the workpiece 200 after cutting into the cassette 60. The temporary placing unit 80 includes a carry-in/out unit 83 that carries out the workpiece 200 before cutting from the cassette 60 and carries in the workpiece 200 after cutting into the cassette 60, and a pair of rails 81 that temporarily place the workpiece 200 before cutting carried out from the cassette 60 placed on the cassette lifter 50 and temporarily place a temporary placing area of the workpiece 200 after cutting. The holding unit 80 includes a detection sensor 82 for detecting the object 200 held on the rail 81. The detection sensor 82 outputs the detection result to the control unit 100.
The conveying unit 90 conveys the workpiece 200 among the cassette 60, the rail 81 of the temporary placing unit 80, the chuck table 10, and the rotary table 72 of the cleaning unit 70. The conveying unit 90 includes a 1 st conveying unit 91 and a2 nd conveying unit 92. The 1 st conveying unit 91 conveys the workpiece 200 before cutting, which is temporarily placed on the rail 81 of the temporary placing unit 80, to the chuck table 10, and conveys the cleaned workpiece 200 on the rotating table 72 of the cleaning unit 70 to the rail 81 of the temporary placing unit 80. The 2 nd conveying unit 92 conveys the cut workpiece 200 on the chuck table 10 to the rotary table 72 of the cleaning unit 70.
In the present specification, since the 1 st conveyance unit 91 and the 2 nd conveyance unit 92 have the same configuration, the 1 st conveyance unit 91 will be represented, and the same reference numerals will be given to the same portions of the 2 nd conveyance unit 92 and the 1 st conveyance unit 91, and the description thereof will be omitted. The 1 st conveying unit 91 includes a unit main body 94 provided to be movable in the Y-axis direction and to be movable upward and downward in the Z-axis direction on a2 nd support frame 7 provided upright from the apparatus main body 2 and disposed at a position closer to the carry-in/out area than the support frame 3, and a suction member 93 attached to the unit main body 94 and connected to a vacuum suction source, not shown, and sucking and holding a ring frame 205 supporting the workpiece 200. The 1 st conveying unit 91 sucks and holds the ring frame 205 by the suction member 93, and conveys the workpiece 200 by moving the unit main body 94 in the Y-axis direction and the Z-axis direction.
The control unit 100 controls the respective units of the processing apparatus 1, and causes the processing apparatus 1 to perform a processing operation on the workpiece 200. Specifically, the control unit 100 conveys the workpiece 200 before cutting to the temporary setting unit 80, temporarily sets the workpiece on the rail 81, and conveys the workpiece 200 temporarily set on the rail 81 to the chuck table 10 by the 1 st conveying unit 91. After the workpiece 200 is sucked and held on the chuck table 10 and the annular frame 205 is clamped by the clamping portion 12, the control unit 100 moves the chuck table 10 by the X-axis moving unit, and the imaging unit 30 images the workpiece 200 on the chuck table 10. The control unit 100 performs alignment to align the workpiece 200 with the cutting tool 21, and cuts the cutting tool 21 into the line 202 while relatively moving the chuck table 10 and the cutting tool 21 of the cutting unit 20 along the line 202.
After the cutting tool 21 cuts into all the lines 202, the control unit 100 releases the suction holding of the chuck table 10 and the clamping by the clamping portion 12, and the 2 nd conveying unit 92 conveys the workpiece 200 on the chuck table 10 to the rotary table 72. After the work 200 is sucked and held by the rotary table 72 and the work 200 is cleaned by the cleaning unit 70, the control unit 100 releases the suction and holding by the rotary table 72, and the 1 st conveying unit 91 conveys the work 200 on the rotary table 72 onto the rail 81. After the lower surface of the ring frame 205 supporting the workpiece 200 on the rail 81 and the upper surface of the housing rack 64, which is the same as before the carry-out, are positioned on the same plane by the cassette lifter 50, the control unit 100 carries the workpiece 200 on the rail 81 into the cassette 60 by the temporary placing unit 80.
The control unit 100 is a computer, and the control unit 100 includes an arithmetic processing device having a microprocessor such as a CPU (central processing unit), a storage device having a memory such as a ROM (read only memory) or a RAM (random access memory), and an input/output interface device. The arithmetic processing device of the control unit 100 performs arithmetic processing in accordance with a computer program stored in the storage device, and outputs a control signal for controlling the machining device 1 to the above-described units of the machining device 1 via the input/output interface device.
The control unit 100 determines whether or not the workpiece 200 is temporarily placed on the temporary placement rail 81 based on the detection result of the detection sensor 82. The control unit 100 determines whether or not the chuck table 10 suctions and holds the workpiece 200 by the holding surface 11, based on a negative pressure of a vacuum suction source connected to the chuck table 10, or the like. The control unit 100 determines whether or not the rotary table 72 suctions and holds the workpiece 200 by the holding surface 71, based on a negative pressure of a vacuum suction source connected to the rotary table 72, or the like. The control unit 100 determines whether or not the respective conveying units 91 and 92 are sucking and holding the workpiece 200 by the suction member 93, based on the negative pressure of the vacuum suction source connected to the suction member 93 of the respective conveying units 91 and 92, and the like.
The machining device 1 includes a display unit 110 (shown in fig. 1) connected to the control unit 100 and having a display screen 111 for displaying a state of machining operation, an image, and the like, and an input unit connected to the control unit 100 and used by an operator when registering machining content information and the like. The display unit 110 is constituted by a liquid crystal display device or the like. The input unit is constituted by an external input device such as a touch panel or a keyboard provided on the display screen 111 of the display unit 110.
The display unit 110 is controlled by the control unit 100 so that a progress status display screen 112 as display information shown in fig. 3 is displayed on the display screen 111 during the machining operation of the machining device 1. The progress status display screen 112 shows the progress status of the cutting process of the workpiece 200 in the processing apparatus 1.
As shown in fig. 3, the progress status display screen 112 has a start/stop input area 113 for inputting the start and stop of the cutting process of the processing apparatus 1, a captured image display area 114, a captured image display area where the capturing unit 30 captures images and displays images, an in-apparatus layout 120, and an in-box layout 130.
The in-device layout 120 has a temporary placement correspondence area 121 corresponding to the rail 81 of the temporary placement unit, a1 st conveyance unit correspondence area 122 corresponding to the 1 st conveyance unit 91, a chuck table correspondence area 123 corresponding to the chuck table 10, a cleaning correspondence area 124 corresponding to the rotary table 72 of the cleaning unit 70, and a 2 nd conveyance unit correspondence area 125 corresponding to the 2 nd conveyance unit 92. Each of the corresponding areas 121, 122, 123, 124, 125 displays a predetermined color or a predetermined identification mark. In embodiment 1, the respective corresponding areas 121, 122, 123, 124, 125 show mutually different colors 301, 302, 303, 304, 305. In embodiment 1, the in-device layout 120 has a blank area 126 that does not correspond to any of the units of the processing device 1. The blank area 126 may be used to correspond to other units of the processing apparatus 1 or units added to the processing apparatus 1.
The in-box layout 130 has a plurality of cells 131 corresponding to the storage racks 64. In embodiment 1, 10 cells 131 are arranged in the vertical direction of the display screen 111 so as to correspond to the storage racks 64 one by one, and each cell 131 corresponds to a storage rack 64 from the lower side to the upper side among the plurality of storage racks 64 of the cassette 60 in order from the bottom to the top. In the present specification, when the cells 131 are distinguished from each other, natural numbers, such as-1, -2, -3, -10, which increase from 1 in order from the object on the lower side, are described as being sequentially numbered 131, and when the cells 131 are not distinguished from each other, only the numbers 131 are described as being numbered.
As shown in fig. 1 and the like, the control unit 100 includes a display information setting unit 101 that sets information to be displayed on the display screen 111. In order to display the device layout 120 and the box layout 130 on the display screen 111, the display information setting unit 101 sets the device layout 120 and the box layout 130 as display information. That is, the display information setting unit 101 stores information of the in-device layout drawing 120 and the in-box layout drawing 130, and a program for causing the in-device layout drawing 120 and the in-box layout drawing 130 to be displayed on the display screen 111.
In order to show the current position of the workpiece 200 carried out from the cassette 60, the display information setting unit 101 sets the workpiece marks 140 and 141 shown in fig. 4 and 5, which are displayed in a superimposed manner on the in-device layout 120 of the display screen 111, as display information. In embodiment 1, the workpiece marks 140 and 141 shown in fig. 4 and 5 schematically show the planar shapes of the workpiece 200 and the annular frame 205. In the present specification, when the storage racks 64 in which the work pieces 200 shown by the work piece marks 140 and 141 are stored before the cutting process are distinguished from each other, the natural numbers of the numbers 140 and 141, which are increased from 1 to 1, such as the numbers-1, -2, and-3 are sequentially given from the work piece marks showing the work pieces 200 stored in the lower storage rack 64, and when the storage racks 64 in which the work pieces 200 shown by the work piece marks 140 and 141 are stored before the cutting process are not distinguished from each other, only the numbers 140 and 141 are given.
The display information setting unit 101 displays the workpiece marks 140 and 141 so as to overlap the respective corresponding areas 121, 122, 123, 124, and 125 corresponding to the current position in the processing apparatus 1 of the workpiece 200. In embodiment 1, the workpiece mark 140 shown in fig. 4 is used before being carried out from the cassette 60 and held on the chuck table 10, and the workpiece mark 141 shown in fig. 5 is used after being held on the chuck table 10 until being carried into the cassette 60. That is, the display information setting unit 101 stores information indicating the workpiece marks 140 and 141, and a program for displaying the workpiece marks 140 and 141 in a state of being superimposed on the corresponding areas 121, 122, 123, 124, and 125 of the display screen 111.
The display information setting unit 101 stores a grid display program 150, and executes the grid display program 150 during the cutting process of the processing device 1. The cell display program 150 is a program for displaying, in the cell 131, the colors 301, 302, 303, 304, 305 of the respective corresponding areas 121, 122, 123, 124, 125 or predetermined identification marks corresponding to the current positions of the objects 200 stored in the storage racks 64 of the cartridges 60 shown in the cell 131. In embodiment 1, the cell display program 150 displays, in each cell 131, the color corresponding to each corresponding region 121, 122, 123, 124, 125 (in embodiment 1, the same color 301, 302, 303, 304, 305 as each corresponding region 121, 122, 123, 124, 125), and each corresponding region 121, 122, 123, 124, 125 corresponds to the current position in the processing device 1 of the workpiece 200 stored in the storage rack 64 corresponding to each cell 131 before the cutting process.
The cell display program 150 is a program for displaying a color 306 or an identification mark indicating completion of loading in the cell 131 of the storage rack 64 in which the workpiece 200 is stored, which is returned to the cassette 60 after being loaded from the cassette 60. The cell display program 150 displays a color 306 (for example, gray in fig. 3, indicated by a thick parallel oblique line) indicating completion of the carry-in the cell 131 corresponding to the storage rack 64 in which the workpiece 200 carried out of the cassette 60 and returned again to the cassette 60 is stored.
The function of the display information setting unit 101 is realized by the memory device of the control unit 100 storing information indicating the in-device map 120, information indicating the in-box map 130, information indicating the object marks 140 and 141, and the grid display program 150, and the arithmetic processing device executing arithmetic processing in accordance with a computer program stored in the memory device.
The processing apparatus 1 covers the region other than the cassette 60 on the apparatus main body 2 with an external cover, not shown, and mounts the display unit 110 to the external cover.
Next, the present description describes the machining operation of the machining device 1 having the above-described configuration. Fig. 6 is a view showing a progress status display screen when a workpiece stored in the lowest storage rack of the cassette of the processing apparatus shown in fig. 1 is temporarily placed on a rail. Fig. 7 is a view showing a progress status display screen when the 1 st conveying unit conveys the workpiece stored in the lowest storage rack of the cassette of the processing apparatus shown in fig. 1. Fig. 8 is a view showing a progress status display screen when the workpiece stored in the lower second storage rack of the cassette of the processing apparatus shown in fig. 1 is temporarily placed on the rail. Fig. 9 is a view showing a progress status display screen when the workpiece stored in the lowest storage rack of the cassette of the processing apparatus shown in fig. 1 is held on the chuck table and the workpiece stored in the next second storage rack is transported by the 1 st transport unit. Fig. 10 is a view showing a progress status display screen when the 2 nd conveying unit conveys the workpiece stored in the lowest storage rack of the cassette of the processing apparatus shown in fig. 1, holds the workpiece stored in the next second storage rack on the chuck table, and temporarily places the workpiece stored in the next third storage rack on the track. Fig. 11 is a view showing a progress status display screen when the workpiece stored in the lowest storage rack of the cassette of the processing apparatus shown in fig. 1 is held on the rotary table and the workpiece stored in the next third storage rack of the cassette is conveyed by the 1 st conveying means. Fig. 12 is a view showing a progress display screen when the 1 st conveying unit conveys the workpiece that has been stored in the lowest storage rack of the cassette of the processing apparatus shown in fig. 1, the 2 nd conveying unit conveys the workpiece that has been stored in the next second storage rack, and the workpiece that has been stored in the next third storage rack of the cassette is held on the chuck table. Fig. 13 is a view showing a progress status display screen when the workpiece stored in the lowest storage rack of the cassette of the processing apparatus shown in fig. 1 is placed on the rail temporarily and the workpiece stored in the next second storage rack is held on the rotary table. Fig. 14 is a view showing a progress status display screen when the object to be processed, which has been stored in the lowest storage rack of the cassette of the processing apparatus shown in fig. 1, is carried into the cassette and the object to be processed, which has been stored in the next fourth storage rack, is temporarily placed on the rail. Fig. 15 is a view showing a progress status display screen when a workpiece, which has been stored in the uppermost storage rack of the cassette of the machining apparatus shown in fig. 1, is temporarily placed on a rail after cutting.
First, in the machining operation, the operator registers machining content information in the control unit 100, stores the workpiece 200 before the cutting machining in the cassette 60, and sets the cassette 60 on the upper surface of the cassette lifter 50. Then, when the machining device 1 receives a start instruction of a machining operation from an operator, the machining operation is started. In embodiment 1, control section 100 of machining apparatus 1 displays progress status display screen 112 on display screen 111 of display section 110, and when the operation of start/stop input area 113 by the operator is received, starts the machining operation of machining apparatus 1. In embodiment 1, in the machining operation, the machining device 1 sequentially performs the cutting machining on the objects 200 stored in the plurality of storage racks 64 of the cassette 60 from the objects 200 stored in the lower storage rack 64 to the objects 200 stored in the upper storage rack 64, but in the present invention, the order in which the machining device 1 performs the cutting machining on the objects 200 in the cassette 60 is not limited to the order shown in embodiment 1.
When the machining device 1 starts the machining operation, the cassette 60 is positioned by the cassette lifter 50 at a position where the lower surface of the ring frame 205 supporting the workpiece 200-1 stored in the lowermost storage rack 64-1 is flush with the upper surface of the rail 81. The control unit 100 carries out the work 200-1 stored in the lowermost storage rack 64-1 from the cassette 60 by the carry-in/out unit 83 of the temporary storage unit 80, and temporarily places the carried-out work 200-1 on the rail 81. When the detection sensor 82 detects the workpiece 200-1 temporarily placed on the rail 81, the control unit 100 superimposes and displays the workpiece mark 140-1 indicating the workpiece 200-1 that was stored in the lowermost storage rack 64-1 on the temporary placement corresponding area 121 of the progress status display screen 112 as shown in fig. 6. In addition, the control unit 100 displays the same color 301 as the temporary storage corresponding area 121 in the cell 131-1 corresponding to the lowermost storage rack 64-1 among the plurality of cells 131.
The control unit 100 sucks and holds the ring frame 205 supporting the workpiece 200-1 temporarily placed on the rail 81 of the temporary placement unit 80 by the 1 st conveyance unit 91, and moves the 1 st conveyance unit 91 and the chuck table 10 relatively by the X-axis movement unit or the like, so that the 1 st conveyance unit 91 moves upward of the chuck table 10. When the control unit 100 detects that the 1 st conveying unit 91 suctions and holds the ring frame 205 based on the negative pressure of the vacuum suction source connected to the suction member 93 of the 1 st conveying unit 91, as shown in fig. 7, the processed object mark 140-1 indicating the processed object 200-1 stored in the lowest storage rack 64-1 is displayed in the 1 st conveying unit corresponding area 122 of the status display screen 112 in a superimposed manner. The control unit 100 displays the same color 302 as the 1 st conveyance unit corresponding area 122 in the cell 131-1 corresponding to the lowermost storage rack 64-1 among the plurality of cells 131.
The control unit 100 positions the cassette 60 by the cassette lifter 50 at a position where the lower surface of the ring frame 205 supporting the workpiece 200-2 stored in the second storage rack 64-2 below is flush with the upper surface of the rail 81. The control unit 100 carries out the work 200-2 stored in the next second storage rack 64-2 from the cassette 60 by the carry-in/out unit 83 of the temporary storage unit 80, and temporarily places the carried-out work 200-2 on the rail 81. When the detection sensor 82 detects the workpiece 200-2 temporarily placed on the rail 81, the control unit 100 superimposes and displays the workpiece mark 140-2 indicating the workpiece 200-2 that was stored in the next second storage rack 64-2 on the temporary placement corresponding area 121 of the progress status display screen 112 as shown in fig. 8. In addition, the control unit 100 displays the same color 301 as the temporary storage corresponding area 121 in the cell 131-2 corresponding to the next-number second storage rack 64-2 among the plurality of cells 131.
The control unit 100 places the workpiece 200-1 on the holding surface 11 of the chuck table 10 by the 1st conveying unit 91, suctions and holds the workpiece 200-1 by the chuck table 10, and clamps the annular frame 205 by the clamp 12. When the control unit 100 detects that the chuck table 10 suctions and holds the workpiece 200-1 based on the negative pressure of the vacuum suction source connected to the chuck table 10, as shown in fig. 9, the workpiece mark 141-1 indicating the workpiece 200-1 that was stored in the lowest storage rack 64-1 is displayed in the chuck table corresponding area 123 of the progress status display screen 112 in an overlapping manner. Further, the control unit 100 displays the same color 303 as the chuck table corresponding region 123 in the cell 131-1 corresponding to the lowermost storage rack 64-1 among the plurality of cells 131.
The control unit 100 moves the chuck table 10 toward the processing region by the X-axis movement unit, photographs the object 200-1 by the photographing unit 30, and performs alignment based on the image photographed by the photographing unit 30. At this time, the control unit 100 displays the image captured by the capturing unit 30 in the captured image display area 114 of the progress status display screen 112.
The control unit 100 cuts the cutting tool 21 into the lines 202 to divide the workpiece 200-1 into the devices 203 while relatively moving the workpiece 200-1 and the cutting unit 20 along the lines 202. When the control unit 100 cuts the cutting tool 21 into all the lines 202 to divide the workpiece 200-1 sucked and held by the chuck table 10, the suction holding of the chuck table 10 and the clamping by the clamping portion 12 are released.
The control unit 100 sucks and holds the ring frame 205 supporting the workpiece 200-2 temporarily placed on the rail 81 of the stocker 80 by the 1 st conveying unit 91, and moves the 1 st conveying unit 91 and the chuck table 10 relatively by the X-axis moving unit or the like, so that the 1 st conveying unit 91 moves upward of the chuck table 10. When the control unit 100 detects that the 1 st conveying unit 91 suctions and holds the ring frame 205 based on the negative pressure of the vacuum suction source connected to the suction member 93 of the 1 st conveying unit 91, as shown in fig. 9, the processed object mark 140-2 indicating the processed object 200-2 stored in the next second storage rack 64-2 is displayed in the 1 st conveying unit corresponding area 122 of the status display screen 112 in a superimposed manner. The control unit 100 displays the same color 302 as the 1 st conveyance unit corresponding area 122 in the cell 131-2 corresponding to the next second storage rack 64-2 among the plurality of cells 131.
The control unit 100 sucks and holds the ring frame 205 supporting the workpiece 200-1 placed on the holding surface 11 of the chuck table 10 by the 2 nd conveying unit 92, and moves the 2 nd conveying unit 92 upward of the rotary table 72. When the control unit 100 detects that the 2 nd conveying unit 92 suctions and holds the ring frame 205 based on the negative pressure of the vacuum suction source connected to the suction member 93 of the 2 nd conveying unit 92, the processed object mark 141-1 indicating the processed object 200-1 stored in the lowermost storage rack 64-1 is displayed in the 2 nd conveying unit corresponding area 125 of the progress status display screen 112 in an overlapping manner as shown in fig. 10. The control unit 100 displays the same color 305 as the 2 nd conveyance unit corresponding area 125 in the cell 131-1 corresponding to the lowermost storage rack 64-1 among the plurality of cells 131.
The control unit 100 places the workpiece 200-2 on the holding surface 11 of the chuck table 10 by the 1 st conveying unit 91, suctions and holds the workpiece 200-2 by the chuck table 10, and clamps the annular frame 205 by the clamp 12. When the control unit 100 detects that the chuck table 10 is sucking and holding the workpiece 200-2 based on the negative pressure of the vacuum suction source connected to the chuck table 10, as shown in fig. 10, the workpiece mark 141-2 indicating the workpiece 200-2 that has been stored in the next second storage rack 64-2 is displayed in the chuck table corresponding area 123 of the progress status display screen 112 in an overlapping manner. In addition, the control unit 100 displays the same color 303 as the chuck table corresponding area 123 in the cell 131-2 corresponding to the next second storage rack 64-2 among the plurality of cells 131. The control unit 100 divides the workpiece 200-2 into the respective devices 203 in the same manner as the workpiece 200-1. When the control unit 100 cuts the cutting tool 21 into all the lines 202 to divide the workpiece 200-2 sucked and held by the chuck table 10, the suction holding of the chuck table 10 and the clamping by the clamping portion 12 are released.
The control unit 100 positions the cassette 60 by the cassette lifter 50 at a position such that the lower surface of the ring frame 205 supporting the workpiece 200-3 stored in the third storage rack 64-3 below is flush with the upper surface of the rail 81. The control unit 100 carries out the work 200-3 stored in the third storage rack 64-3 from the cassette 60 by the carry-in/carry-out unit 83 of the temporary storage unit 80, and temporarily places the carried-out work 200-3 on the rail 81. When the detection sensor 82 detects the workpiece 200-3 temporarily placed on the rail 81, the control unit 100 superimposes and displays the workpiece mark 140-3 indicating the workpiece 200-3 that was stored in the next third storage rack 64-3 on the temporary corresponding area 121 of the progress status display screen 112 as shown in fig. 10. In addition, the control unit 100 displays the same color 301 as the temporary storage corresponding area 121 in the cell 131-3 corresponding to the third storage rack 64-3 of the plurality of cells 131.
The control unit 100 places the workpiece 200-1 on the holding surface 71 of the rotary table 72 by the 2 nd conveying unit 92, and suctions and holds the workpiece 200-1 by the rotary table 72. When the control unit 100 detects that the rotary table 72 suctions and holds the workpiece 200-1 based on the negative pressure of the vacuum suction source connected to the rotary table 72, the workpiece mark 141-1 indicating the workpiece 200-1 that was stored in the lowermost storage rack 64-1 is displayed in the cleaning corresponding area 124 of the progress status display screen 112 in an overlapping manner as shown in fig. 11. In addition, the control unit 100 displays the same color 304 as the cleaning corresponding region 124 in the cell 131-1 corresponding to the lowermost storage rack 64-1 among the plurality of cells 131. The control unit 100 cleans the workpiece 200-1 by supplying the cleaning solution from the cleaning solution supply nozzle while rotating the rotary table 72 around the axis of the cleaning unit 70. After the workpiece 200-1 is cleaned by the cleaning unit 70 for a predetermined time, the control unit 100 stops the rotation of the rotary table 72 and the supply of the cleaning liquid, and releases the suction holding of the rotary table 72.
The control unit 100 sucks and holds the ring frame 205 supporting the workpiece 200-3 temporarily placed on the rail 81 of the stocker 80 by the 1 st conveying unit 91, and moves the 1 st conveying unit 91 and the chuck table 10 relatively by the X-axis moving unit or the like, so that the 1 st conveying unit 91 moves upward of the chuck table 10. When the control unit 100 detects that the 1 st conveying unit 91 suctions and holds the ring frame 205 based on the negative pressure of the vacuum suction source connected to the suction member 93 of the 1 st conveying unit 91, as shown in fig. 11, the processed object mark 140-3 indicating the processed object 200-3 stored in the next third storage rack 64-3 is displayed in the 1 st conveying unit corresponding area 122 of the progress status display screen 112 in an overlapping manner. The control unit 100 displays the same color 302 as the 1 st conveyance unit corresponding area 122 in the cell 131-3 corresponding to the third storage rack 64-3 among the plurality of cells 131.
The control unit 100 sucks and holds the ring frame 205 supporting the workpiece 200-2 placed on the holding surface 11 of the chuck table 10 by the 2 nd conveying unit 92, and moves the 2 nd conveying unit 92 upward of the rotary table 72. When the control unit 100 detects that the 2 nd conveying unit 92 suctions and holds the ring frame 205 based on the negative pressure of the vacuum suction source connected to the suction member 93 of the 2 nd conveying unit 92, as shown in fig. 12, the processed object mark 141-2 indicating the processed object 200-2 stored in the next second storage rack 64-2 is displayed in the 2 nd conveying unit corresponding area 125 of the status display screen 112 in a superimposed manner. The control unit 100 displays the same color 305 as the 2 nd conveyance unit corresponding area 125 in the cell 131-2 corresponding to the next second storage rack 64-2 among the plurality of cells 131.
The control unit 100 places the workpiece 200-3 on the holding surface 11 of the chuck table 10 by the 1 st conveying unit 91, suctions and holds the workpiece 200-3 by the chuck table 10, and clamps the annular frame 205 by the clamp 12. When the control unit 100 detects that the chuck table 10 is sucking and holding the workpiece 200-3 based on the negative pressure of the vacuum suction source connected to the chuck table 10, as shown in fig. 12, the workpiece mark 141-3 indicating the workpiece 200-3 that has been stored in the next third storage rack 64-2 is displayed in the chuck table corresponding area 123 of the progress status display screen 112 in an overlapping manner. In addition, the control unit 100 displays the same color 303 as the chuck table corresponding area 123 in the cell 131-3 corresponding to the next third storage rack 64-3 among the plurality of cells 131. The control unit 100 divides the workpiece 200-3 into the respective devices 203 in the same manner as the workpieces 200-1, 200-2. When the control unit 100 divides the workpiece 200-3 sucked and held by the chuck table 10 into the respective devices 203, the suction holding of the chuck table 10 and the clamping by the clamping portion 12 are released.
The control unit 100 sucks and holds the ring frame 205 supporting the workpiece 200-1 placed on the rotary table 72 by the 1 st conveying unit 91, and moves the 1 st conveying unit 91 above the rail 81 of the temporary placing unit 80. When the control unit 100 detects that the 1 st conveying unit 91 suctions and holds the ring frame 205 based on the negative pressure of the vacuum suction source connected to the suction member 93 of the 1 st conveying unit 91, as shown in fig. 12, the processed object mark 141-1 indicating the processed object 200-1 stored in the lowest storage rack 64-1 is displayed in the 1 st conveying unit corresponding area 122 of the status display screen 112 in a superimposed manner. The control unit 100 displays the same color 302 as the 1 st conveyance unit corresponding area 122 in the cell 131-1 corresponding to the lowermost storage rack 64-1 among the plurality of cells 131.
The control unit 100 places the workpiece 200-2 on the holding surface 71 of the rotary table 72 by the 2 nd conveying unit 92, and suctions and holds the workpiece 200-2 by the rotary table 72. When the control unit 100 detects that the rotary table 72 suctions and holds the workpiece 200-2 based on the negative pressure of the vacuum suction source connected to the rotary table 72, the workpiece mark 141-2 indicating the workpiece 200-2 that was stored in the next second storage rack 64-2 is displayed in the cleaning corresponding area 124 of the progress status display screen 112 in an overlapping manner as shown in fig. 13. In addition, the control unit 100 displays the same color 304 as the cleaning corresponding region 124 in the cell 131-2 corresponding to the next second storage rack 64-2 among the plurality of cells 131. The control unit 100 cleans the workpiece 200-2 by the cleaning unit 70 in the same manner as the workpiece 200-1, and when the cleaning is completed, the suction holding of the rotary table 72 is released.
When the 1 st conveying unit 91 mounts the workpiece 200-1 on the rail 81 of the stocker unit 80 and the detection sensor 82 detects the workpiece 200-1 placed on the rail 81, the control unit 100 superimposes and displays the workpiece mark 141-1 indicating the workpiece 200-1 stored in the lowermost storage rack 64-1 on the corresponding area 121 of the progress status display screen 112 as shown in fig. 13. In addition, the control unit 100 displays the same color 301 as the temporary storage corresponding area 121 in the cell 131-1 corresponding to the lowermost storage rack 64-1 among the plurality of cells 131.
The control unit 100 positions the cassette 60 by the cassette lifter 50 at a position such that the upper surface of the lowermost storage rack 64-1 storing the workpiece 200-1 mounted on the rail 81 is flush with the upper surface of the rail 81. The control unit 100 carries the workpiece 200-1 on the rail 81 into the lowermost storage rack 64-1 by the carry-in/out unit 83 of the temporary placement unit 80. When the detection sensor 82 does not detect the workpiece 200-1 temporarily placed on the rail 81, the control unit 100 displays a color 306 indicating completion of loading in the cell 131-1 corresponding to the lowermost storage rack 64-1 among the plurality of cells 131 as shown in fig. 14.
The control unit 100 positions the cassette 60 by the cassette lifter 50 at a position such that the lower surface of the ring frame 205 supporting the work 200-4 stored in the fourth storage rack 64-4 below is flush with the upper surface of the rail 81. The control unit 100 carries out the work 200-4 stored in the fourth storage rack 64-4 from the cassette 60 by the carry-in/carry-out unit 83 of the temporary storage unit 80, and temporarily places the carried-out work 200-4 on the rail 81. When the detection sensor 82 detects the workpiece 200-4 temporarily placed on the rail 81, the control unit 100 superimposes and displays the workpiece mark 140-4 indicating the workpiece 200-4 that was stored in the next fourth storage rack 64-4 on the temporary placement corresponding area 121 of the progress status display screen 112 as shown in fig. 14. Further, the control unit 100 displays the same color 301 as the temporary storage corresponding area 121 in the cell 131-4 corresponding to the fourth storage rack 64-4 of the plurality of cells 131.
In this way, the processing apparatus 1 displays the colors 301, 302, 303, 304, 305 of the corresponding areas 121, 122, 123, 124, 125 corresponding to the current positions of the objects 200 that were stored in the storage rack 64 of the cassette 60 shown in the cell 131 in the respective cells 131 of the in-box layout 130 of the progress status display screen 112 on the display screen 111 of the display unit 110. The processing device 1 displays a color 306 indicating completion of loading in the cell 131 indicating the storage rack 64 in which the object 200 to be processed is stored in the cassette 60 and returned again to the cassette 60 after being carried out from the cassette 60.
The machining device 1 sequentially conveys the workpiece 200 from the cassette 60 to the rail 81 of the stocker 80, the 1 st conveying unit 91, the chuck table 10, the 2 nd conveying unit 92, the swivel table 72, the 1 st conveying unit 91, the rail 81 of the stocker 80, and the cassette 60, and performs cutting machining. In embodiment 1, when the control unit 100 sequentially performs the cutting process on the workpiece 200 from the lower side in the cassette 60 and the detection sensor 82 detects the workpiece 200-10 that has been temporarily placed on the rail 81 and has been subjected to the cutting process on the tenth storage rack 64-10, as shown in fig. 15, the workpiece mark 141-10 indicating the workpiece 200-10 that has been temporarily stored in the tenth storage rack 64-10 is displayed in the temporary storage corresponding area 121 of the progress status display screen 112 in a superimposed manner. Further, the control unit 100 displays the same color 301 as the temporary storage corresponding area 121 in the cell 131-10 corresponding to the tenth storage rack 64-10 from among the plurality of cells 131. At this time, as shown in fig. 15, the control unit 100 displays the color 306 indicating the completion of the carry-in the cells 131-1 corresponding to the lowermost storage rack 64-1 to the cells 131-9 corresponding to the ninth storage rack 64-9 from among the plurality of cells 131. The control unit 100 positions the cassette 60 by the cassette lifter 50 at a position such that the upper surface of the uppermost storage rack 64-10 storing the workpiece 200-10 mounted on the rail 81 is flush with the upper surface of the rail 81. The control unit 100 carries the workpiece 200-10 on the rail 81 into the uppermost storage rack 64-10 by the carry-in/out unit 83 of the temporary placing unit 80. In this way, when the cutting process of all the objects 200 in the cartridge 60 is completed, the control unit 100 of the processing apparatus 1 ends the processing operation.
In the processing apparatus 1 according to embodiment 1, the in-apparatus layout 120 and the in-box layout 130 are set on the progress status display screen 112 displayed on the display screen 111 of the display unit 110. The processing apparatus 1 sets colors 301, 302, 303, 304, 305 different from each other in advance for the respective corresponding areas 121, 122, 123, 124, 125 of the in-apparatus layout 120, and sets cells 131 corresponding to the processed object 200 in the cassette 60 in the in-cassette layout 130. The processing apparatus 1 displays, in each cell 131, the colors 301, 302, 303, 304, 305 of the corresponding areas 121, 122, 123, 124, 125 corresponding to the current positions of the objects 200 that were stored in the storage racks 64 of the cartridges 60 corresponding to the cell 131. Therefore, the processing apparatus 1 allows the operator to recognize at a glance which position of the layout of the processed object 200 carried out from each storage rack 64 of the cassette 60 in the apparatus by the colors 301, 302, 303, 304, 305 of the cells 131. As a result, the processing apparatus 1 can grasp the progress of the processing of the workpiece 200.
Further, since the processing device 1 displays the object marks 140, 141 in the respective corresponding areas 121, 122, 123, 124, 125 in a superimposed manner, the corresponding areas 121, 122, 123, 124, 125 are checked, and the current position of each object 200 can be recognized at a glance by the operator.
The processing apparatus 1 sets the conveyance unit corresponding areas 122 and 125 corresponding to the conveyance units 91 and 92 on the progress status display screen 112. As a result, the processing apparatus 1 can also visually recognize the state of the object 200 being conveyed in the processing apparatus 1 by checking the colors 301, 302, 303, 304, 305, etc. of the cells 131.
Further, since the processing apparatus 1 displays the color 306 indicating completion of the carry-in the cell 131 corresponding to the housing rack 64 housing the workpiece 200 carried out of the cassette 60 and subjected to the cutting process into the cassette 60, the operator can recognize the processed workpiece 200 at a glance by checking the in-cassette layout 130.
Modification 1
A processing apparatus according to modification 1 of embodiment 1 of the present invention will be described with reference to the drawings. Fig. 16 is a diagram showing a progress status display screen displayed on a display screen of a display unit of a processing apparatus according to modification 1 of embodiment 1. In fig. 16, the same reference numerals are given to the same parts as those in embodiment 1, and the description thereof is omitted.
The machining device 1 according to modification 1 of embodiment 1 is supported by overlapping a plurality of (two in modification 1) cartridges 60 in the Z-axis direction by the cartridge lifter 50. The processing apparatus 1 according to modification 1 has the same configuration as the processing status display screen 112 according to embodiment 1 except that the processing status display screen 112 according to modification 1 has an in-box layout 130-1 corresponding to the lower box 60 and an in-box layout 130-2 corresponding to the upper box 60 out of the two boxes 60 as shown in fig. 16. The in-box maps 130-1 and 130-2 of the progress status display screen 112 of the processing apparatus 1 of modification 1 are identical in structure to the in-box map 130 of embodiment 1.
The processing apparatus 1 according to modification 1 sets the in-apparatus layout 120 and the in-box layout 130-1, 130-2 on the progress status display screen 112, and displays, in each cell 131 of the in-box layout 130-1, 130-2, the corresponding region 121, 122, 123, 124, 125 corresponding to the current position of the object 200 to be processed that was stored in the storage rack 64 of the box 60 corresponding to the cell 131, and the colors 301, 302, 303, 304, 305. Therefore, the processing apparatus 1 according to modification 1 can recognize at a glance which position of the layout in the apparatus the object 200 carried out from each storage rack 64 of the cassette 60 is by the colors 301, 302, 303, 304, 305 of the cells 131, and has an effect of being able to grasp the progress of the processing of the object 200.
Modification 2
A processing apparatus according to modification 2 of embodiment 1 of the present invention will be described with reference to the drawings. Fig. 17 is a diagram showing a progress status display screen displayed on a display screen of a display unit of a processing apparatus according to modification 2 of embodiment 1. In fig. 17, the same reference numerals are given to the same parts as those in embodiment 1, and the description thereof is omitted.
The machining device 1 according to modification 2 of embodiment 1 is supported by superimposing a plurality of cartridges 60 (two cartridges in modification 2) in the Z-axis direction by the cartridge lifter 50. The processing apparatus 1 according to modification 2 has the same configuration as that of the processing apparatus 112 according to embodiment 1, except that the processing status display screen 112 of modification 2 displays one of the 1 st in-box layout 130-1 corresponding to the lower box 60 and the 2 nd in-box layout 130-2 corresponding to the upper box 60 of the two boxes 60 as shown in fig. 17, and can switch between the displayed 1 st in-box layout 130-1 and 2 nd in-box layout 130-2. In addition to the configuration of the in-box layout 130 of embodiment 1, the in-box layout 130-1 and 130-2 of the progress status display screen 112 of the machining device 1 of modification 2 are provided with a box recognition area 132 indicating the box 60 being displayed. In modification 2, when the display information setting unit 101 of the machining device 1 receives an operation of the cassette recognition area 132 by the operator, the in-cassette layout 130-1, 130-2 displayed on the progress status display screen 112 is switched, but in the present invention, the method of switching the in-cassette layout 130-1, 130-2 displayed on the progress status display screen 112 is not limited to this method.
The processing apparatus 1 according to modification 2 sets the in-apparatus layout 120 and the in-box layout 130-1, 130-2 on the progress status display screen 112 in the same manner as in embodiment 1, and displays, in each cell 131 of the in-box layout 130-1, 130-2, the corresponding region 121, 122, 123, 124, 125 corresponding to the current position of the object 200 to be processed that was stored in the storage rack 64 of the box 60 corresponding to the cell 131, and the color 301, 302, 303, 304, 305 of the corresponding region. Therefore, the processing apparatus 1 according to modification 2 can recognize at a glance which position of the layout in the apparatus the object 200 carried out from each storage rack 64 of the cassette 60 is by the colors 301, 302, 303, 304, 305 of the cells 131, and has an effect of being able to grasp the progress of the processing of the object 200.
The present invention is not limited to the above-described embodiments and modifications. That is, various modifications can be made and implemented within the scope not departing from the gist of the present invention. In embodiment 1 and the like described above, the respective corresponding areas 121, 122, 123, 124, 125 on the progress status display screen 112 are displayed with mutually different colors 301, 302, 303, 304, 305, and the respective cells 131 are displayed with the colors 301, 302, 303, 304, 305 of the corresponding areas 121, 122, 123, 124, 125 corresponding to the current position of the workpiece 200. However, in the present invention, the identification marks different from each other may be displayed in the corresponding areas 121, 122, 123, 124, 125 of the progress status display screen 112, and the identification marks of the corresponding areas 121, 122, 123, 124, 125 corresponding to the current position of the workpiece 200 may be displayed in the respective cells 131. In addition, although the embodiment 1 and the like have shown an example in which the machining apparatus 1 is a cutting apparatus, the machining apparatus 1 of the present invention is not limited to the cutting apparatus, and may be various apparatuses for machining the workpiece 200, such as a grinding apparatus, a laser machining apparatus, and a planer.

Claims (4)

1. A processing apparatus, comprising:
a chuck table for holding a workpiece;
a processing unit for processing the workpiece held by the chuck table;
a cassette mounting area for mounting a cassette having a plurality of layers for accommodating the workpiece;
A cleaning region for cleaning the workpiece;
a conveying unit for conveying the workpiece among the box, the chuck workbench and the cleaning area;
a display screen for displaying the progress of the processing of the object to be processed, and
A display information setting unit for setting information to be displayed on the display screen,
It is characterized in that the method comprises the steps of,
The display information setting unit sets, as display information:
An in-device layout having a chuck table corresponding region corresponding to the chuck table and a cleaning corresponding region corresponding to the cleaning region, each corresponding region exhibiting a different color from the other;
A processed object mark for displaying the current position of the processed object carried out from the box in an overlapped manner in the internal layout of the device, and
A plurality of cells, representing the layer of the cartridge,
In the cell, the same color as the corresponding region corresponding to the current position of the object to be processed in the layer of the cassette shown in the cell is displayed in the processing operation.
2. The processing apparatus according to claim 1, wherein,
The in-device layout includes a conveying unit corresponding region corresponding to a conveying unit for conveying the workpiece.
3. The processing apparatus according to claim 1 or 2, wherein,
In the cell indicating the layer in which the object to be processed is stored, which is returned to the cassette again after being carried out from the cassette, a color or an identification mark indicating completion of carrying in is displayed.
4. The processing apparatus according to claim 1 or 2, wherein,
The processing device also has a temporary placing area for temporarily placing the processed object carried out from the box placed in the box placing area,
The conveying unit conveys the processed object among the box, the temporary placing area, the chuck workbench and the cleaning area,
The in-device layout includes a temporary corresponding area corresponding to the temporary area.
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