CN111289465B - TDLAS gas detection system and driving method thereof - Google Patents
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- 238000001514 detection method Methods 0.000 title claims abstract 16
- 238000000041 tunable diode laser absorption spectroscopy Methods 0.000 title claims abstract 11
- 238000000034 method Methods 0.000 title 1
- 238000010521 absorption reaction Methods 0.000 claims abstract 4
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 claims 1
- 229910001634 calcium fluoride Inorganic materials 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 238000010408 sweeping Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 abstract 1
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- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
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Abstract
本申请公开了TDLAS气体检测系统，包括激光驱动器，用于发出前二分之一周期为斜坡信号，后二分之一周期为恒定直流信号的激光驱动扫描信号；与激光驱动器相连的多个不同种类的激光器，用于接收激光驱动扫描信号，发射与斜坡信号对应第一激光，和与恒定直流信号对应的第二激光；分束装置，用于将每个激光器发射的第二激光分束成第一分束激光和第二分束激光；合束装置，用于对多个第二分束激光进行合束，得到合束激光；容纳待测气体的气室；透镜，用于汇聚气室出射的吸收后激光；检测装置，用于根据汇聚的吸收后激光对待测气体进行检测。该检测系统多个激光器间的激光互不干扰，且形成多个独立检测的光路，使得气体检测精度提升。
The present application discloses a TDLAS gas detection system, including a laser driver for sending out a laser drive scanning signal whose first half cycle is a ramp signal and the last half cycle is a constant DC signal; The type of laser is used for receiving the laser driving scanning signal, emitting the first laser corresponding to the ramp signal, and the second laser corresponding to the constant DC signal; the beam splitting device is used for splitting the second laser emitted by each laser into a beam. a first split laser and a second split laser; a beam combining device for combining a plurality of second split lasers to obtain a combined laser; a gas chamber for accommodating the gas to be measured; a lens for converging the gas chamber The emitted laser after absorption; a detection device for detecting the gas to be measured according to the collected laser after absorption. The lasers among the multiple lasers of the detection system do not interfere with each other, and multiple independent detection optical paths are formed, so that the gas detection accuracy is improved.
Description
Technical Field
The application relates to the technical field of optics, especially relate to a TDLAS gas detection system.
Background
The TDLAS (Tunable Diode Laser Absorption Spectroscopy) technique is a commonly used gas detection technique, and mainly utilizes the characteristic that the narrow line width and wavelength of a Tunable semiconductor Laser change along with the injection current to measure a single or a plurality of Absorption lines of molecules which are very close and difficult to distinguish.
At present, in the TDLAS gas detection technology, a single Distributed Feedback (DFB) semiconductor Laser or a Vertical Cavity Surface Emitting Laser (VCSEL) is usually adopted as a detection light source, and for a single-component gas, high detection accuracy can be achieved, but for a multi-component gas, an error of a detection result is large. In order to realize the detection of the multi-component gas, a gas detection system of a multi-component laser is arranged, and the problems that the multi-component laser has complicated optical paths, output light interferes with each other, and the simultaneous and independent gas detection of each optical path is difficult to realize are mainly concerned by the technical personnel in the field.
Disclosure of Invention
The utility model aims at providing a TDLAS gas detection system to simplify the light path of laser instrument in this system, realize that each light path can be simultaneously and independent carry out gaseous detection, improve the integrated level of system.
In order to solve the above technical problem, the present application provides a TDLAS gas detection system, including:
the laser driver is used for sending a laser driving scanning signal of which the first half period is a slope signal superposed with a high-frequency modulation signal and the second half period is a constant direct-current signal superposed with the high-frequency modulation signal;
the laser driving device comprises a laser driver, a plurality of lasers, a plurality of light sources and a plurality of light sources, wherein the lasers are connected with the laser driver and used for receiving laser driving scanning signals, emitting first lasers corresponding to the ramp signals and used for scanning gas, and emitting second lasers corresponding to the constant direct current signals;
beam splitting means for splitting the second laser light emitted by each of the lasers into a first split laser light and a second split laser light;
the beam combining device is used for combining the plurality of second sub-beam lasers to obtain combined laser;
the gas chamber is used for accommodating gas to be measured;
the lens is used for converging the absorbed laser emitted by the air chamber, and the absorbed laser comprises the combined laser and the laser emitted by the first split laser after being respectively emitted into the air chamber;
and the detection device is used for detecting the gas to be detected according to the converged absorbed laser.
Optionally, the beam combining device includes a total reflection mirror and a beam combining mirror.
Optionally, the method further includes:
a homogenizer between each of the lasers and the beam splitting device.
Optionally, the method further includes:
and the antireflection film is positioned on the surface of the homogenizer.
Optionally, the method further includes:
and the anti-reflection film is positioned on the back surface of the beam splitting device, wherein the back surface is a surface opposite to the second laser incidence surface.
Optionally, the beam splitting device is any one of a synthetic quartz beam splitter, a calcium fluoride beam splitter, and a BK7 beam splitter.
Optionally, the plurality of different types of lasers are distributed feedback lasers and vertical cavity surface emitting lasers, respectively.
Optionally, the method further includes:
and the processor is connected with the laser driver and used for sending out a driving instruction.
Optionally, the processor is an ARM processor.
The application provides a TDLAS gas detection system includes: the laser driver is used for sending a laser driving scanning signal of which the first half period is a slope signal superposed with a high-frequency modulation signal and the second half period is a constant direct-current signal superposed with the high-frequency modulation signal; the laser driving device comprises a laser driver, a plurality of lasers, a plurality of light sources and a plurality of light sources, wherein the lasers are connected with the laser driver and used for receiving laser driving scanning signals, emitting first lasers corresponding to the ramp signals and used for scanning gas, and emitting second lasers corresponding to the constant direct current signals; beam splitting means for splitting the second laser light emitted by each of the lasers into a first split laser light and a second split laser light; the beam combining device is used for combining the plurality of second sub-beam lasers to obtain combined laser; the gas chamber is used for accommodating gas to be measured; the lens is used for converging the absorbed laser emitted by the air chamber, and the absorbed laser comprises the combined laser and the laser emitted by the first split laser after being respectively emitted into the air chamber; and the detection device is used for detecting the gas to be detected according to the converged absorbed laser.
It can be seen that, be provided with a plurality of heterogeneous lasers among the gas detection system in this application, laser driver drive laser sends and produces the first laser that the wavelength increases gradually in certain extent under the effect of ramp signal, produce the fixed second laser of wavelength under the effect of invariable direct current signal, produce two kinds of lasers under the effect of ramp signal and invariable direct current signal promptly, can not produce mutual interference when driving a plurality of lasers emission laser, promote the precision to gas detection, beam splitting device divides the second laser beam splitting into first beam splitting laser and second beam splitting laser, beam combining device combines a plurality of second beam splitting laser into beam combining laser, beam combining laser and the first beam splitting laser of every laser form a plurality of mutually independent light paths, inject the gas chamber respectively, and then make detection device independently detect according to every light path.
Drawings
For a clearer explanation of the embodiments or technical solutions of the prior art of the present application, the drawings needed for the description of the embodiments or prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a TDLAS gas detection system according to an embodiment of the present disclosure;
FIG. 2 is a waveform diagram of a laser driving scanning signal;
fig. 3 is a schematic structural diagram of a beam splitting process and a beam combining process performed by laser according to an embodiment of the present disclosure;
fig. 4 is a schematic structural diagram of another TDLAS gas detection system according to an embodiment of the present disclosure.
Detailed Description
In order that those skilled in the art will better understand the disclosure, the following detailed description will be given with reference to the accompanying drawings. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, but the present invention may be practiced in other ways than those specifically described and will be readily apparent to those of ordinary skill in the art without departing from the spirit of the present invention, and therefore the present invention is not limited to the specific embodiments disclosed below.
As described in the background section, currently, the TDLAS gas detection technology usually uses a DFB laser or a VCSEL laser as a detection light source to detect a single-component gas, and for a multi-component gas, the detection result has a large error. How to set up the gas detection system of the multi-element laser, and solve the problem that the multi-element laser has complicated optical paths and is difficult to realize that each optical path simultaneously and independently detects gas, should be the focus of the technicians in this field.
In view of the above, the present application provides a TDLAS gas detecting system, please refer to fig. 1, fig. 1 is a schematic structural diagram of a TDLAS gas detecting system according to an embodiment of the present application, the system includes:
the laser driver 1 is used for sending a laser driving scanning signal of which the first half period is a ramp signal superposed with a high-frequency modulation signal and the second half period is a constant direct-current signal superposed with the high-frequency modulation signal;
the laser drivers (1) are connected with a plurality of lasers (2) of different types, and are used for receiving the laser driving scanning signals, emitting first lasers corresponding to the ramp signals and used for scanning gas and second lasers corresponding to the constant direct current signals;
beam splitting means 3 for splitting the second laser light emitted by each of the lasers 2 into a first split laser light and a second split laser light;
the beam combining device 4 is used for combining the plurality of second sub-beam lasers to obtain combined laser;
the gas chamber 5 is used for containing gas to be measured;
the lens 6 is used for converging the absorbed laser emitted by the gas chamber 5, and the absorbed laser comprises the combined laser and the laser emitted by the first split laser after being respectively emitted into the gas chamber 5;
and the detection device 7 is used for detecting the gas to be detected according to the converged absorbed laser.
The laser driver 1 includes a sine wave generating circuit, a low-frequency triangular wave generating circuit, and a sine wave and low-frequency triangular wave superimposing circuit. Referring to fig. 2, the ramp signal is used to drive the plurality of different types of lasers 2 to emit first laser beams sweeping the absorption peak of the gas to be measured at a fixed frequency, and the constant dc signal is used to drive the plurality of different types of lasers 2 to emit second laser beams, so that the center frequency of the combined laser beam is locked at the absorption peak position of the gas to be measured.
Optionally, the plurality of lasers 2 of different types are respectively a distributed feedback laser 2 and a vertical cavity surface emitting laser 2.
It should be noted that the beam splitting device 3 in the present embodiment includes, but is not limited to, a beam splitter, as long as it can split the laser light into two laser beams. When the beam splitting device 3 is a spectroscope, the beam splitting device 3 includes, but is not limited to, any one of a synthetic quartz spectroscope, a calcium fluoride spectroscope, and a BK7 spectroscope, wherein the substrate surface type accuracy of the spectroscope is λ/10. The spectroscope is plated with a multilayer dielectric film on the incident surface of the laser, and the multilayer dielectric film is determined according to the intensity ratio of the first split laser to the second split laser.
Further, the beam splitter is a planar beam splitter.
Optionally, the beam combining device 4 includes a total reflection mirror 42 and a beam combining mirror 41.
The beam splitting and combining processes are explained in detail below. The number of the beam splitters is 2, the two beam splitters are respectively and correspondingly distributed with the feedback lasers 2 and the vertical cavity surface emitting lasers 2, second lasers emitted by the two lasers 2 are incident into the beam splitters at an incident angle of 45 degrees (the incident angle can be set by itself), the beam splitters perform beam splitting on the second lasers according to the proportion of intensity 1:9, the second split lasers are reflected onto the total reflection mirror 42 in the beam combining device 4, and then the beam combining mirror 41 is used for combining the second split lasers, and a specific schematic diagram refers to fig. 3.
The detecting device 7 includes, but is not limited to, a photodetector and a concentration calculating device, and the specific structure depends on the gas concentration detecting method, wherein the photodetector is used for receiving the absorbed laser light and converting the absorbed laser light into an electrical signal. For example, when a direct absorption spectrum measurement method is adopted, the concentration calculation device can reversely estimate the gas concentration only by amplifying and processing the electric signal output by the photoelectric detector; when the wavelength modulation technology is adopted for detection, the detection device 7 further comprises a phase-locked amplifier, the phase-locked amplifier extracts second harmonic waves from telecommunication signals output by the photoelectric detector, and the concentration calculation equipment further calculates the gas concentration.
The gas detection system in this embodiment is provided with a plurality of different types of lasers 2, the laser driver 1 drives the lasers 2 to emit first laser light whose wavelength gradually increases within a certain range under the action of a ramp signal, and second laser light whose wavelength is fixed under the action of a constant direct current signal, produce two kinds of laser under ramp signal and invariable direct current signal's effect promptly, can not produce mutual interference when driving a plurality of lasers 2 emission laser, promote the precision to gaseous detection, beam splitting device 3 splits the second laser beam into beam splitting laser and second beam splitting laser, beam combining device 4 is a plurality of second beam splitting laser beam combining laser, beam combining laser and every laser 2's first beam splitting laser form a plurality of mutually independent light paths, jet into air chamber 5 respectively, and then make detection device 7 independently detect according to every light path.
In an embodiment of the present application, referring to fig. 4, the TDLAS gas detection system further includes:
a homogenizer 8, said homogenizer 8 being located between each of said lasers 2 and said beam splitting means 3.
The homogenizer 8 is used for homogenizing the laser emitted by the laser 2 to obtain laser with uniform intensity, wherein the applicable range of the homogenizer 8 is 193nm-10600 nm.
Further, the TDLAS gas detection system further comprises:
and an antireflection film positioned on the surface of the homogenizer 8.
Preferably, the surface of the homogenizer 8 is uniformly provided with an antireflection film, so that the uniformity of the laser emitted by the laser 2 is ensured, the sharp boundary of the laser is realized, and the high light energy utilization rate is ensured, thereby improving the uniformity of the subsequent laser intensity distribution when the second laser is split, reducing the detection error and improving the detection precision.
Preferably, the device further comprises an antireflection film located on the back surface of the beam splitting device 3, wherein the back surface is the surface opposite to the second laser incident surface.
The function of the anti-reflection film is to prevent the reflected light of the laser from damaging the laser 22, and simultaneously, the light splitting precision of the spectroscope can be improved.
On the basis of any one of the above embodiments, in an embodiment of the present application, the TDLAS gas detection system further includes:
and the processor 9 is connected with the laser driver 1 and used for sending out a driving instruction.
Preferably, the processor 9 is an ARM processor 9, and the ARM processor 9 has the advantages of high execution efficiency, low cost, and the like.
The embodiments are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same or similar parts among the embodiments are referred to each other. The device disclosed by the embodiment corresponds to the method disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the method part for description.
The TDLAS gas detection system provided by the present application is described in detail above. The principles and embodiments of the present application are explained herein using specific examples, which are provided only to help understand the method and the core idea of the present application. It should be noted that, for those skilled in the art, it is possible to make several improvements and modifications to the present application without departing from the principle of the present application, and such improvements and modifications also fall within the scope of the claims of the present application.
Claims (9)
1. A TDLAS gas detection system, comprising:
the laser driver is used for sending a laser driving scanning signal of which the first half period is a slope signal superposed with a high-frequency modulation signal and the second half period is a constant direct-current signal superposed with the high-frequency modulation signal;
the laser driving device comprises a laser driver, a plurality of lasers, a plurality of light sources and a plurality of light sources, wherein the lasers are connected with the laser driver and used for receiving laser driving scanning signals, emitting first lasers corresponding to the ramp signals and used for scanning gas, and emitting second lasers corresponding to the constant direct current signals;
beam splitting means for splitting the second laser light emitted by each of the lasers into a first split laser light and a second split laser light;
the beam combining device is used for combining the plurality of second sub-beam lasers to obtain combined laser;
the gas chamber is used for accommodating gas to be measured;
the lens is used for converging the absorbed laser emitted by the air chamber, and the absorbed laser comprises the combined laser and the laser emitted by the first split laser after being respectively emitted into the air chamber;
the detection device is used for detecting the gas to be detected according to the converged absorbed laser;
the ramp signal is used for driving a plurality of different types of the lasers to emit fixed first laser light with the same frequency and sweeping a gas absorption peak; the constant direct current signal is used for driving a plurality of different types of lasers to emit the second laser, so that the center frequency of the beam combination laser is locked at the position of an absorption peak of the gas.
2. The TDLAS gas detection system as claimed in claim 1 wherein the beam combining means comprises an all-mirror and a beam combining mirror.
3. The TDLAS gas detection system of claim 1 or 2, further comprising:
a homogenizer between each of the lasers and the beam splitting device.
4. The TDLAS gas detection system of claim 3, further comprising:
and the antireflection film is positioned on the surface of the homogenizer.
5. The TDLAS gas detection system of claim 4, further comprising:
and the anti-reflection film is positioned on the back surface of the beam splitting device, wherein the back surface is a surface opposite to the second laser incidence surface.
6. The TDLAS gas detection system as claimed in claim 5, wherein the beam splitting means is any one of a synthetic quartz beam splitter, a calcium fluoride beam splitter, a BK7 beam splitter.
7. The TDLAS gas detection system as claimed in claim 6 wherein the plurality of different types of lasers are distributed feedback lasers, vertical cavity surface emitting lasers, respectively.
8. The TDLAS gas detection system of claim 7, further comprising:
and the processor is connected with the laser driver and used for sending out a driving instruction.
9. The TDLAS gas detection system of claim 8, wherein the processor is an ARM processor.
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| CN112763454B (en) * | 2020-12-28 | 2022-05-27 | 中国科学院长春光学精密机械与物理研究所 | A multi-gas sensing system and detection method |
| CN113640248A (en) * | 2021-07-06 | 2021-11-12 | 杭州春来科技有限公司 | In-situ monitoring method for gas multi-component concentration |
| CN118983689A (en) * | 2024-10-18 | 2024-11-19 | 华夏天信传感科技(大连)有限公司 | A dual-wavelength spatial optical laser for dual-gas detection sensors |
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| KR100465965B1 (en) * | 2002-12-30 | 2005-01-13 | 고등기술연구원연구조합 | Apparatus for measuring the density of gas using laser multi-pass gas cell |
| CN101408458A (en) * | 2003-03-31 | 2009-04-15 | 佐勒技术公司 | Method and device for monitoring and controlling combusting course |
| CN101504367B (en) * | 2009-03-10 | 2011-07-20 | 哈尔滨工业大学 | Apparatus for simultaneously monitoring concentration of carbon monoxide and carbon dioxide |
| CN101793822B (en) * | 2010-01-29 | 2011-08-31 | 南京树声科技有限公司 | Multi-wavelength laser for measuring multi-component gas and measuring method thereof |
| CN102706832B (en) * | 2012-06-01 | 2014-05-21 | 吉林大学 | A Laser Infrared Gas Analyzer Based on TDLAS-WMS |
| CN103411919A (en) * | 2013-07-03 | 2013-11-27 | 安徽建筑大学 | System and method for simultaneously monitoring multiple components of building fire early-stage characteristic gases |
| CN103604773A (en) * | 2013-11-22 | 2014-02-26 | 长春理工大学 | Laser beam combiner for simultaneously detecting various types of gas of TDLAS (Tunable Diode Laser Absorption Spectroscopy) |
| CA2904850C (en) * | 2014-09-22 | 2021-04-20 | Ngp Inc. | Analytes monitoring by differential swept wavelength absorption spectroscopy methods |
| CN105510276A (en) * | 2015-12-01 | 2016-04-20 | 武汉阿卡瑞思光电自控有限公司 | TDLAS-based multicomponent gas multi-point monitoring system |
| CN206804520U (en) * | 2017-06-20 | 2017-12-26 | 杭州春来科技有限公司 | Detection of gas with multiple constituents device based on TDLAS technologies |
| CN107091818B (en) * | 2017-06-28 | 2020-05-12 | 武汉米字能源科技有限公司 | Multi-gas-chamber complex component gas analysis system and method |
| CN207730661U (en) * | 2017-12-25 | 2018-08-14 | 航天恒星科技有限公司 | Gas component detection device |
| CN108872147B (en) * | 2018-06-22 | 2020-07-24 | 中国科学院长春光学精密机械与物理研究所 | Laser generating device and gas concentration detection device based on TD L AS technology |
| CN110470622B (en) * | 2019-08-28 | 2020-09-08 | 中国科学院长春光学精密机械与物理研究所 | Gas concentration detection method, device and system |
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