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CN111272730B - High-sensitivity optical fiber surface plasmon sensor and preparation method thereof - Google Patents

High-sensitivity optical fiber surface plasmon sensor and preparation method thereof Download PDF

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CN111272730B
CN111272730B CN202010086462.5A CN202010086462A CN111272730B CN 111272730 B CN111272730 B CN 111272730B CN 202010086462 A CN202010086462 A CN 202010086462A CN 111272730 B CN111272730 B CN 111272730B
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microspheres
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CN111272730A (en
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倪海彬
曹瑷琛
平安
葛璐
周盈
成建新
张璐
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Nanjing University of Information Science and Technology
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Abstract

The invention discloses a high-sensitivity optical fiber surface plasmon sensor and a preparation method thereof, wherein the sensor comprises an optical fiber and a gold film arranged on the end surface of the optical fiber, the gold film is of a double-period gold disk array structure, and the double-period gold disk array structure is obtained by adopting nano PS microspheres with different diameters to sequentially perform ion etching on the surface of the gold film. The invention has the characteristic of double cycles, liquid to be measured is injected into the double-cycle gold disc structure, and the optical fiber is directly attached to the surface of the structure. The light source enters from the other end of the optical fiber or directly irradiates from the bottom, when the light source passes through the double-period gold disk array, a part of the light source is absorbed, and the laser generates a measurable Raman signal under the action of the metal structure. The invention can lead out the detection light from the light source through the optical fiber, interact with the sample, and send the signal light to the monitoring system through the collection and transmission of the optical fiber, has simple structure and is suitable for processing and production.

Description

高灵敏度光纤表面等离激元传感器及其制备方法High-sensitivity optical fiber surface plasmon sensor and preparation method thereof

技术领域technical field

本发明涉及光化学传感器技术领域,具体涉及一种高灵敏度光纤表面等离激元传感器及其制备方法。The invention relates to the technical field of photochemical sensors, in particular to a high-sensitivity optical fiber surface plasmon sensor and a preparation method thereof.

背景技术Background technique

表面等离子体激元(SPPs)是光和金属表面的自由电子相互作用所引起的一种电磁波模式。它的存在最早是由鲁弗斯•里奇在1957年预测,后来随着研究人员不断深入的探索,发现在光的振荡电磁场存在下,金属纳米粒子的自由电子相对于金属晶格发生振荡,此时纳米结构周围的局域光场强度较入射光光场强度而言发生大幅度提高。这个过程是特定频率的光共振,称为表面等离子体共振(SPR)。表面等离子体共振自20世纪90年代首次用于生物系统的实时分析以来,由于其具备实时性、无标签性和非侵入性的特点,已成为生物化学、生物学和医学领域的一项重要的光学生物传感技术。但由于金属孔阵列的非连续性,金属表面的电子数目将大量减少,在公正波长增强的电场通过金属或介质界面迅速衰减,所以金属孔阵列中同时存在表面等离子激元(SPP)和局域表面等离子体共振(LSPR)。Surface plasmons (SPPs) are electromagnetic wave modes induced by the interaction of light and free electrons on metal surfaces. Its existence was first predicted by Rufus Ritchie in 1957. Later, with the continuous exploration of researchers, it was found that in the presence of the oscillating electromagnetic field of light, the free electrons of metal nanoparticles oscillated relative to the metal lattice. At this time, the intensity of the local light field around the nanostructure is greatly increased compared with the light field intensity of the incident light. This process is the resonance of light at a specific frequency, known as surface plasmon resonance (SPR). Since surface plasmon resonance was first used for real-time analysis of biological systems in the 1990s, it has become an important field in biochemistry, biology and medicine due to its real-time, label-free and non-invasive characteristics. Optical Biosensing Technology. However, due to the discontinuity of the metal hole array, the number of electrons on the metal surface will be greatly reduced, and the electric field enhanced at a fair wavelength will rapidly decay through the metal or dielectric interface. Surface Plasmon Resonance (LSPR).

近年来,利用纳米粒子和纳米孔径几何形状的等离子体生物传感器因能满足需求而受到广泛关注。T. W. Ebbesen等人最早对纳米孔阵列光学性质进行研究,研究表明在适当条件下,金属薄膜中的单个纳米孔可能以类似的方式支持LSPR,对如何在近电场的范围内控制光子的运动给出了一个明确的答案,同时也为人们如何对光的使用和控制提供了一个新的途径。随后,国内外许多研究针对影响投射增强效应的几个参数,如金属材料及周期结构等方面进行进一步探讨。大部分结构是在纳米孔阵列中覆盖一层金属薄膜或在基底上制造金属纳米孔阵列。但采用多周期结构的纳米粒子制备不规则孔阵列的方法却鲜有涉及与研究,随着传感器技术的不断发展,人们对这种结构传感器的期望也越来越高,特别是,纳米孔阵列具有很高的应用前景。In recent years, plasmonic biosensors utilizing nanoparticles and nanopore geometries have received extensive attention due to their ability to meet the needs. The first study of the optical properties of nanohole arrays by T. W. Ebbesen et al. showed that, under appropriate conditions, individual nanoholes in metal thin films may support LSPR in a similar manner, giving insights into how to control the motion of photons in the range of near electric fields. It provides a clear answer, and also provides a new way for people to use and control light. Subsequently, many studies at home and abroad conducted further discussions on several parameters affecting the projection enhancement effect, such as metal materials and periodic structures. Most of the structures are covered with a metal film in the nanopore array or fabricated on the substrate. However, the method of fabricating irregular hole arrays using multi-periodic structured nanoparticles is rarely involved and studied. With the continuous development of sensor technology, people's expectations for such structured sensors are getting higher and higher. Has a high application prospect.

因此,将光纤直接依附在多周期纳米金圆盘阵列表面,制备完成的光纤具有极的高度灵敏度,能够快速准确得从光谱仪中判断是否存在所测物质,更加小型化、智能化、便捷化。主要运用于机场海关违禁物的检测、珠宝行业真伪鉴别及食品行业等一些重要的领域。Therefore, by directly attaching the optical fiber to the surface of the multi-period gold nanodisc array, the prepared optical fiber has extremely high sensitivity, and can quickly and accurately determine the presence of the measured substance from the spectrometer, which is more miniaturized, intelligent and convenient. It is mainly used in some important fields such as the detection of contraband at the airport and customs, the authenticity identification of the jewelry industry and the food industry.

发明内容SUMMARY OF THE INVENTION

本发明的目的在于改变传统圆形孔阵列,提供种高灵敏度光纤表面等离激元传感器及其制备方法,利用纳米球刻蚀出一种不规则的多周期纳米孔阵列结构,光源进入光纤后,由于SP激发和耦合效应,一部分的光将被金圆盘阵列吸收,从而出现在示波器上的波形将会出现尖锐的、反对称的峰谷线形,同一金膜也可以制备出多个不同周期的图案,形成多个吸收峰,呈现出全新的光学特性,可用于光学传感研究。The purpose of the present invention is to change the traditional circular hole array, provide a high-sensitivity optical fiber surface plasmon sensor and a preparation method thereof, and use nano-spheres to etch an irregular multi-period nano-hole array structure. , due to the SP excitation and coupling effect, a part of the light will be absorbed by the gold disk array, so the waveform appearing on the oscilloscope will appear sharp, antisymmetric peak-to-valley line shape, the same gold film can also be prepared with multiple different periods , forming multiple absorption peaks, showing brand-new optical properties, which can be used for optical sensing research.

为实现上述目的,本发明提供的技术方案是:For achieving the above object, the technical scheme provided by the present invention is:

一种高灵敏度光纤表面等离激元传感器,包括光纤和设于光纤端面的金薄膜,所述的金薄膜为双周期金圆盘阵列结构,所述的双周期金圆盘阵列结构是采用不同直径的纳米PS微球在金薄膜表面依次通过离子刻蚀得到。A high-sensitivity optical fiber surface plasmon sensor, comprising an optical fiber and a gold thin film arranged on the end face of the optical fiber, the gold thin film is a double-period gold disk array structure, and the double-period gold disk array structure adopts different The diameter of the nano-PS microspheres was sequentially obtained by ion etching on the surface of the gold film.

本发明在光纤端面制备周期性纳米金圆盘阵列。通过对光纤进行90°切割或者拉锥的工艺,外界的光从光纤另一端入射,经过光纤传输到有图案的金膜的底部,部分频率的光能够在纳米盘阵列表面激发表面等离激元,同时这部分光的能量转化为表面等离激元,从金纳米盘反射回去的光中这一部分光的强度减小,通过解调反射光,可以得到激发表面等离激元的波长,从而实现实时传感检测等应用。The invention prepares the periodic nano gold disk array on the end face of the optical fiber. By 90°cutting or tapering the optical fiber, the external light is incident from the other end of the optical fiber and transmitted to the bottom of the patterned gold film through the optical fiber. The light of some frequencies can excite surface plasmons on the surface of the nanodisk array. At the same time, the energy of this part of the light is converted into surface plasmon, and the intensity of this part of the light reflected from the gold nanodisk decreases. By demodulating the reflected light, the wavelength of the excited surface plasmon can be obtained, thereby Real-time sensor detection and other applications.

主要工作原理:当光波入射到金属表面时,在光波的引导下自由电子会在界面上小幅度的集体震荡,这样自由震荡的正、负粒子组成的集体称为表面等离子体(SurfacePlasmons,SPs),然而这样的金纳米圆盘阵列中存在着多重的SP模,借助这些SP模的激发,可以得到理想的透射及反射光谱。所以光源进入光纤后,由于SP激发和耦合效应,一部分的光将被金圆盘阵列吸收,从而出现在示波器上的波形将会出现尖锐的、反对称的峰谷线形。同一金膜也可以制备出多个不同周期的图案,形成多个吸收峰。Main working principle: When the light wave is incident on the metal surface, the free electrons will oscillate collectively on the interface with a small amplitude under the guidance of the light wave, and the collective composed of the free oscillating positive and negative particles is called Surface Plasmons (SPs) , however, there are multiple SP modes in such a gold nanodisc array. With the excitation of these SP modes, ideal transmission and reflection spectra can be obtained. Therefore, after the light source enters the fiber, due to the SP excitation and coupling effects, a part of the light will be absorbed by the gold disk array, so that the waveform appearing on the oscilloscope will have a sharp, antisymmetric peak-to-valley line shape. The same gold film can also prepare multiple patterns with different periods, forming multiple absorption peaks.

为了优化上述技术方案,采取的具体措施还包括:In order to optimize the above technical solutions, the specific measures taken also include:

上述的双周期金圆盘阵列结构包括第一圆盘和第二圆盘;其中,所述的第一圆盘是由大直径纳米PS微球以金薄膜为基底进行刻蚀制备,第一圆盘之间紧密连接;所述的第二圆盘是以第一圆盘制备后的表面作为新的基底并由小直径纳米PS微球进行刻蚀制备,第二圆盘之间紧密连接。The above-mentioned double-period gold disk array structure includes a first disk and a second disk; wherein, the first disk is prepared by etching large-diameter nano-PS microspheres with a gold film as a base, and the first disk is prepared by etching. The discs are tightly connected; the second disc is prepared by etching the surface of the first disc as a new substrate and is prepared by etching small-diameter nano-PS microspheres, and the second discs are tightly connected.

上述的第一圆盘采用的大直径纳米PS微球的直径与第二圆盘采用的小直径纳米PS微球的直径比为2:1;其中,每一组第一圆盘中,包括一个设于中心的整体第二圆盘以及以中心周向均匀分布的六个部分第二圆盘。The diameter ratio of the large-diameter nano-PS microspheres adopted by the above-mentioned first disc and the diameter ratio of the small-diameter nano-PS microspheres adopted by the second disc is 2:1; wherein, in each group of the first discs, a A whole second disc at the center and six partial second discs evenly distributed in the circumferential direction of the center.

上述的金薄膜与光纤端面之间采用电镀或胶粘的方式进行连接。The above-mentioned gold film and the end face of the optical fiber are connected by electroplating or gluing.

本发明还保护一种所述的高灵敏度光纤表面等离激元传感器的制备方法,包括以下步骤:The present invention also protects a method for preparing the high-sensitivity optical fiber surface plasmon sensor, comprising the following steps:

S1:取多模光纤,对其进行90°切割或拉锥;S1: Take the multimode fiber and cut it at 90° or taper it;

S2:在切割或者拉锥完成的光纤端面通过电镀或胶粘的方式设置一层50nm厚的金薄膜;S2: A 50nm-thick gold film is arranged on the end face of the fiber that has been cut or taper-drawn by electroplating or gluing;

S3:制备两组不同直径的聚苯乙烯微球阵列的胶体溶液,将两组胶体溶液分别缓慢注射到水表面,分别形成有序的微球薄膜A和微球薄膜B;S3: Prepare two sets of colloidal solutions of polystyrene microsphere arrays with different diameters, and slowly inject the two sets of colloidal solutions onto the water surface to form ordered microsphere films A and B respectively;

S4:将微球薄膜A转移至步骤S2得到的光纤端面上,自然干燥后放入离子刻蚀样品室内,在其表面刻蚀出纳米金圆盘阵列后再刻蚀掉表层的纳米小球;S4: transfer the microsphere film A to the end face of the optical fiber obtained in step S2, put it into the ion etching sample chamber after natural drying, etch the nano-gold disc array on its surface, and then etch the nano-spheres on the surface;

S5:将微球薄膜B转移至步骤S4得到的光纤端面上,自然干燥后放入离子刻蚀样品室内,在其表面刻蚀出纳米金圆盘阵列后再刻蚀掉表层的纳米小球,得到具有双周期纳米金圆盘阵列结构的高灵敏度光纤表面等离激元传感器。S5: transfer the microsphere film B to the end face of the optical fiber obtained in step S4, put it into the ion etching sample chamber after natural drying, etch the nano-gold disk array on its surface, and then etch the nano-spheres on the surface layer, A high-sensitivity fiber-optic surface plasmon sensor with a double-period gold nanodisc array structure is obtained.

进一步地,所述步骤S2中,胶粘的方式具体是指由环氧胶将金薄膜粘贴在光纤端面。Further, in the step S2, the method of gluing specifically refers to attaching the gold film to the end face of the optical fiber by epoxy glue.

进一步地,步骤S3中,所述的微球薄膜A采用的聚苯乙烯微球的直径与微球薄膜B采用的聚苯乙烯微球的直径比为2:1。Further, in step S3, the ratio of the diameter of the polystyrene microspheres used in the microsphere film A to the diameter of the polystyrene microspheres used in the microsphere film B is 2:1.

进一步地,所述步骤S4和S5中,刻蚀采用的束流为10~100nm/min。Further, in the steps S4 and S5, the beam current used in the etching is 10-100 nm/min.

本发明具有双周期的特点,将待测液体注入这样的双周期金圆盘结构内,光纤直接依附该结构表面。光源从光纤的另一端进入,或从底部直接照射,通过双周期金圆盘阵列时,一部分光源将被吸收,激光在金属结构的作用下产生可测量的拉曼信号。拉曼光谱是指光波在散射后频率发生相应变化的现象,是一种无损的分析技术,可以获得样品的化学结构、相和形态、结晶度以及分子相互作用的详细信息。拉曼光谱中谱峰的位置和强度能直接反映物质的含量,因此可以简化模型和减少样本的标定。当用波长比试样粒径小得多的单色照射气体、液体和透明试样时,大部分的光会按原来的发现投射,而一小部分则按不同的角度散射开来,产生散射光。在垂直方向观察时,除了与原入射光有相同的频率的瑞利散射外,还有一系列对称分布在若干条很弱的与入射光频率发生位移的拉曼谱线,这种现象称为拉曼效应。由于拉曼谱线的数目,位移的大小,谱线的长度直接与试样分子振动或转动能级有关。因此,与红外吸收光谱类似,对拉曼光谱的研究,也可以得到有关分子振动或转动的信息。目前拉曼光谱分析技术已广泛应用于物质的鉴定,分子结构的研究。The invention has the characteristic of double period, the liquid to be tested is injected into such double period gold disc structure, and the optical fiber is directly attached to the surface of the structure. The light source enters from the other end of the fiber, or directly illuminates from the bottom. When passing through the double-period gold disk array, part of the light source will be absorbed, and the laser will generate a measurable Raman signal under the action of the metal structure. Raman spectroscopy refers to the phenomenon in which the frequency of light waves changes accordingly after scattering. It is a non-destructive analytical technique that can obtain detailed information on the chemical structure, phase and morphology, crystallinity, and molecular interactions of a sample. The position and intensity of spectral peaks in Raman spectra can directly reflect the content of substances, so the model can be simplified and the calibration of samples can be reduced. When gases, liquids and transparent samples are irradiated with a single color with a wavelength much smaller than the particle size of the sample, most of the light is projected as it was originally found, while a small part is scattered at different angles, resulting in scattering Light. When viewed in the vertical direction, in addition to the Rayleigh scattering with the same frequency as the original incident light, there are also a series of symmetrically distributed Raman lines that are slightly shifted from the incident light frequency. This phenomenon is called Raman spectroscopy. Mann effect. Due to the number of Raman spectral lines and the magnitude of the displacement, the length of the spectral lines is directly related to the vibrational or rotational energy level of the sample molecules. Therefore, similar to infrared absorption spectroscopy, the study of Raman spectroscopy can also obtain information about molecular vibrations or rotations. At present, Raman spectroscopy has been widely used in the identification of substances and the study of molecular structures.

本发明的有益效果在于:The beneficial effects of the present invention are:

1. 本发明是在切割后的镀有一层金薄膜的光纤端面直接转移一层制备完成的PS微球阵列,对其进行刻蚀,接着去除转移的PS微球阵列,制备出第一层紧密连接的周期性纳米金圆盘结构。接着在这样的结构上再转移一层制备完成的PS微球阵列,此时的PS微球直径为第一次转移的PS微球直径的一半,然后再刻蚀再去球。外界光从制备结束的双周期结构光纤的另一端射入,经光纤传输到有图案的金膜底部,通过光谱仪对其光学特性进行检测及分析,结构简单,易于加工制备。1. The present invention is to directly transfer a layer of the prepared PS microsphere array on the end face of the optical fiber plated with a layer of gold film after cutting, etch it, then remove the transferred PS microsphere array, and prepare the first layer of tight Linked periodic gold nanodisc structures. Next, transfer another layer of the prepared PS microsphere array on such a structure, the diameter of the PS microsphere at this time is half of the diameter of the PS microsphere transferred for the first time, and then etch and remove the spheres. External light is injected from the other end of the double-period structure optical fiber after the preparation, and transmitted to the bottom of the patterned gold film through the optical fiber, and its optical properties are detected and analyzed by a spectrometer. The structure is simple and easy to process and prepare.

2. 现有的测量必须将待测物体放入测量光路中,才能得到较为准确的光谱图,本发明与现有技术相比,可以通过光纤将探测光从光源引出,与样品相互作用,又经光纤的收集和传输,将信号光送至监测系统。本发明结构简单,适用于加工生产。2. In the existing measurement, the object to be measured must be placed in the measurement optical path in order to obtain a more accurate spectrogram. Compared with the prior art, the present invention can extract the probe light from the light source through an optical fiber, interact with the sample, and After the collection and transmission of the optical fiber, the signal light is sent to the monitoring system. The invention has a simple structure and is suitable for processing and production.

附图说明Description of drawings

图1是本发明切割或拉锥后的光纤端面结构示意图。FIG. 1 is a schematic diagram of the structure of the fiber end face after cutting or tapering according to the present invention.

图2是本发明粘贴有金薄膜的光纤端面旋涂一层制备完成的大直径的PS微球阵列示意图。2 is a schematic diagram of a large-diameter PS microsphere array prepared by spin-coating a layer on the end face of an optical fiber pasted with a gold film according to the present invention.

图3是本发明大直径的PS微球刻蚀后形成具有周期性结构的金圆盘阵列示意图。FIG. 3 is a schematic diagram of a gold disk array with a periodic structure formed after the large-diameter PS microspheres of the present invention are etched.

图4是本发明中继续刻蚀去除表面的大直径PS微球,再转移一层小直径PS微球阵列的示意图。FIG. 4 is a schematic diagram of continuing to etch and remove the large-diameter PS microspheres on the surface, and then transferring a layer of small-diameter PS microspheres arrays in the present invention.

图5是图4中进行刻蚀后形成具有周期性结构的金圆盘阵列示意图。FIG. 5 is a schematic diagram of forming a gold disk array with periodic structure after etching in FIG. 4 .

图6是本发明继续刻蚀去除小直径PS微球的整体结构示意图。FIG. 6 is a schematic diagram of the overall structure of the present invention for continuing to etch and remove small-diameter PS microspheres.

图7是本发明光纤端面结构的放大图。FIG. 7 is an enlarged view of the structure of the fiber end face of the present invention.

图中序号,1-光纤、2-环氧胶、3-金薄膜、4-大直径纳米PS微球、5-小直径纳米PS微球、31-第一圆盘、32-第二圆盘、321-整体第二圆盘、322-部分第二圆盘。The serial number in the figure, 1-fiber, 2-epoxy glue, 3-gold film, 4-large-diameter nano-PS microspheres, 5-small-diameter nano-PS microspheres, 31-first disc, 32-second disc , 321 - the whole second disc, 322 - part of the second disc.

具体实施方式Detailed ways

下面结合附图和实施例对本发明作进一步说明。The present invention will be further described below with reference to the accompanying drawings and embodiments.

一种高灵敏度光纤表面等离激元传感器,包括光纤1和设于光纤端面的金薄膜3,所述的金薄膜3为双周期金圆盘阵列结构,所述的双周期金圆盘阵列结构是采用不同直径的纳米PS微球在金薄膜3表面依次通过离子刻蚀得到。参见图7,所述的双周期金圆盘阵列结构包括第一圆盘31和第二圆盘32;其中,所述的第一圆盘是由大直径纳米PS微球4以金薄膜3为基底进行刻蚀制备,第一圆盘31之间紧密连接;所述的第二圆盘32是以第一圆盘31制备后的表面作为新的基底并由小直径纳米PS微球5进行刻蚀制备,第二圆盘32之间紧密连接。A high-sensitivity optical fiber surface plasmon sensor, comprising an optical fiber 1 and a gold thin film 3 arranged on the end face of the optical fiber, the gold thin film 3 is a double-period gold disk array structure, and the double-period gold disk array structure It is obtained by using nano-PS microspheres of different diameters on the surface of the gold film 3 by ion etching in turn. Referring to FIG. 7, the double-period gold disk array structure includes a first disk 31 and a second disk 32; wherein, the first disk is composed of large-diameter nano-PS microspheres 4 and gold thin films 3 as The substrate is prepared by etching, and the first discs 31 are closely connected; the second disc 32 is based on the surface prepared by the first disc 31 as a new substrate and is etched by small-diameter nano-PS microspheres 5 etch preparation, the second discs 32 are tightly connected.

本实施例中,所述第一圆盘31采用的大直径纳米PS微球4的直径与第二圆盘32采用的小直径纳米PS微球5的直径比为2:1;其中,每一组第一圆盘31中,包括一个设于中心的整体第二圆盘321以及以中心周向均匀分布的六个部分第二圆盘322。In this embodiment, the ratio of the diameter of the large-diameter nano-PS microspheres 4 used in the first disk 31 to the diameters of the small-diameter nano-PS microspheres 5 used in the second disk 32 is 2:1; The group of first disks 31 includes a whole second disk 321 located at the center and six partial second disks 322 evenly distributed in the circumferential direction of the center.

实施例1Example 1

一种高灵敏度光纤表面等离激元传感器的制备方法,包括以下步骤:A preparation method of a high-sensitivity optical fiber surface plasmon sensor, comprising the following steps:

S1:参见图1,取多模光纤,对其进行拉锥,多模光纤的纤芯为200μm,包层为220μm,拉锥工艺后,需要对多模光纤进行研磨;S1: Referring to Figure 1, take the multimode fiber and taper it. The core of the multimode fiber is 200 μm and the cladding is 220 μm. After the taper process, the multimode fiber needs to be ground;

S2:参见图1,在拉锥完成的光纤端面通过胶粘的方式设置一层50nm厚的金薄膜,具体为采用环氧胶2将金薄膜粘贴在光纤的端面;S2: Referring to Figure 1, a layer of 50nm-thick gold film is set on the end face of the optical fiber that has been taper-drawn by means of gluing. Specifically, epoxy glue 2 is used to paste the gold film on the end face of the optical fiber;

S3:制备两组不同直径的聚苯乙烯微球阵列的胶体溶液,将两组胶体溶液分别缓慢注射到水表面,分别形成有序的微球薄膜A和微球薄膜B;其中,微球薄膜A采用的聚苯乙烯微球的直径设定为600nm,具体参见图2中的标注4,微球薄膜B采用的聚苯乙烯微球的直径设定为300nm,具体参见图4中的标注5,胶体溶液体积20mL,直径偏差率为0.2%,体积百分比浓度为0.05%,溶剂为去离子水;S3: Prepare two sets of colloidal solutions of polystyrene microsphere arrays with different diameters, and slowly inject the two sets of colloidal solutions onto the water surface to form an ordered microsphere film A and a microsphere film B respectively; among them, the microsphere film The diameter of the polystyrene microspheres used in A is set to 600 nm, as shown in Note 4 in Figure 2, and the diameter of the polystyrene microspheres used in the microsphere film B is set to 300 nm, as shown in Note 5 in Figure 4 for details. , the volume of the colloidal solution is 20 mL, the diameter deviation rate is 0.2%, the volume percentage concentration is 0.05%, and the solvent is deionized water;

S4:参见图2~3,将微球薄膜A转移至步骤S2得到的光纤端面上,自然干燥后放入离子刻蚀样品室内,选择刻蚀速率大约是20nm/min(刻蚀速率范围10nm/min 到100 nm/min,可根据不同需求进行调整),其表面刻蚀出纳米金圆盘阵列后再刻蚀掉表层的纳米小球;S4: Referring to Figures 2~3, transfer the microsphere film A to the end face of the optical fiber obtained in step S2, and put it into the ion etching sample chamber after natural drying. min to 100 nm/min, which can be adjusted according to different needs), the surface of which is etched with nano-gold disc arrays, and then the nano-spheres on the surface are etched away;

S5:参见图4~6,将微球薄膜B转移至步骤S4得到的光纤端面上,自然干燥后放入离子刻蚀样品室内,选择刻蚀速率大约是20nm/min(刻蚀速率范围10nm/min 到100 nm/min,可根据不同需求进行调整),其表面刻蚀出纳米金圆盘阵列后再刻蚀掉表层的纳米小球,得到具有双周期纳米金圆盘阵列结构的高灵敏度光纤表面等离激元传感器。S5: Referring to Figures 4 to 6, transfer the microsphere film B to the fiber end face obtained in step S4, put it into the ion etching sample chamber after natural drying, and select an etching rate of about 20 nm/min (the etching rate range is 10 nm/min min to 100 nm/min, which can be adjusted according to different needs), the surface of which is etched with nano-gold disc array, and then the surface layer of nano-spheres is etched to obtain a high-sensitivity optical fiber with double-period nano-gold disc array structure Surface plasmon sensor.

S6:光源进入光纤的另一端,经过光纤传输到有图案的金膜底部,利用光谱仪对该结构的光谱进行实时监测。S6: The light source enters the other end of the optical fiber, and is transmitted to the bottom of the patterned gold film through the optical fiber, and the spectrum of the structure is monitored in real time by a spectrometer.

实施例2Example 2

一种高灵敏度光纤表面等离激元传感器的制备方法,包括以下步骤:A preparation method of a high-sensitivity optical fiber surface plasmon sensor, comprising the following steps:

S1:取多模光纤,对其进行90°切割,多模光纤的纤芯为200μm,包层为220μm,90°切割后,需要对多模光纤进行研磨;S1: Take the multimode fiber and cut it at 90°. The core of the multimode fiber is 200 μm and the cladding is 220 μm. After 90° cutting, the multimode fiber needs to be ground;

S2:在切割完成的光纤端面通过电镀的方式设置一层50nm厚的金薄膜;S2: A 50nm-thick gold film is arranged on the cut fiber end face by electroplating;

S3:制备两组不同直径的聚苯乙烯微球阵列的胶体溶液,将两组胶体溶液分别缓慢注射到水表面,分别形成有序的微球薄膜A和微球薄膜B;其中,微球薄膜A采用的聚苯乙烯微球的直径设定为600nm,微球薄膜B采用的聚苯乙烯微球的直径设定为300nm,胶体溶液体积20mL,直径偏差率为0.2%,体积百分比浓度为0.05%,溶剂为去离子水;S3: Prepare two sets of colloidal solutions of polystyrene microsphere arrays with different diameters, and slowly inject the two sets of colloidal solutions onto the water surface to form an ordered microsphere film A and a microsphere film B respectively; among them, the microsphere film The diameter of the polystyrene microspheres used in A is set to 600 nm, the diameter of the polystyrene microspheres used in the microsphere film B is set to 300 nm, the volume of the colloidal solution is 20 mL, the diameter deviation rate is 0.2%, and the volume percentage concentration is 0.05 %, the solvent is deionized water;

S4:将微球薄膜A转移至步骤S2得到的光纤端面上,自然干燥后放入离子刻蚀样品室内,选择刻蚀速率大约是80nm/min(刻蚀速率范围10nm/min 到100 nm/min,可根据不同需求进行调整),其表面刻蚀出纳米金圆盘阵列后再刻蚀掉表层的纳米小球;S4: Transfer the microsphere film A to the end face of the optical fiber obtained in step S2, and put it into the ion etching sample chamber after natural drying. , which can be adjusted according to different needs), the surface of which is etched with a nano-gold disc array, and then the nano-spheres on the surface are etched away;

S5:将微球薄膜B转移至步骤S4得到的光纤端面上,自然干燥后放入离子刻蚀样品室内,选择刻蚀速率大约是80nm/min(刻蚀速率范围10nm/min 到100 nm/min,可根据不同需求进行调整),其表面刻蚀出纳米金圆盘阵列后再刻蚀掉表层的纳米小球,得到具有双周期纳米金圆盘阵列结构的高灵敏度光纤表面等离激元传感器。S5: Transfer the microsphere film B to the fiber end face obtained in step S4, put it into the ion etching sample chamber after natural drying, and select the etching rate to be about 80 nm/min (the etching rate ranges from 10 nm/min to 100 nm/min). , which can be adjusted according to different needs), the surface of which is etched with nano-gold disc array and then the surface layer of nano-spheres is etched to obtain a high-sensitivity optical fiber surface plasmon sensor with double-period nano-gold disc array structure .

S6:光源进入光纤的另一端,经过光纤传输到有图案的金膜底部,利用光谱仪对该结构的光谱进行实时监测。S6: The light source enters the other end of the optical fiber, and is transmitted to the bottom of the patterned gold film through the optical fiber, and the spectrum of the structure is monitored in real time by a spectrometer.

以上所述的仅是本发明的优选实施方式,应当指出,对于本领域的普通技术人员来说,在不脱离本发明创造构思的前提下,还可以做出若干变形和改进,这些都属于本发明的保护范围。The above are only the preferred embodiments of the present invention. It should be pointed out that for those of ordinary skill in the art, some modifications and improvements can be made without departing from the inventive concept of the present invention, which belong to the present invention. the scope of protection of the invention.

Claims (5)

1.一种高灵敏度光纤表面等离激元传感器,其特征在于:包括光纤(1)和设于光纤端面的金薄膜(3),所述的金薄膜(3)为双周期金圆盘阵列结构,所述的双周期金圆盘阵列结构是采用不同直径的纳米PS微球在金薄膜(3)表面依次通过离子刻蚀得到;1. A high-sensitivity optical fiber surface plasmon sensor is characterized in that: comprising optical fiber (1) and a gold film (3) arranged on the end face of the optical fiber, and described gold film (3) is a double-period gold disk array structure, the double-period gold disk array structure is obtained by using nano-PS microspheres of different diameters on the surface of the gold film (3) through ion etching in sequence; 所述的双周期金圆盘阵列结构包括第一圆盘(31)和第二圆盘(32);其中,所述的第一圆盘是由大直径纳米PS微球(4)以金薄膜(3)为基底进行刻蚀制备,第一圆盘(31)之间紧密连接;所述的第二圆盘(32)是以第一圆盘(31)制备后的表面作为新的基底并由小直径纳米PS微球(5)进行刻蚀制备,第二圆盘(32)之间紧密连接;The double-period gold disk array structure includes a first disk (31) and a second disk (32); wherein, the first disk is composed of large-diameter nano-PS microspheres (4) and gold thin films. (3) The substrate is prepared by etching, and the first discs (31) are closely connected; the second disc (32) uses the prepared surface of the first disc (31) as a new substrate and The small-diameter nano-PS microspheres (5) are prepared by etching, and the second discs (32) are tightly connected; 所述第一圆盘(31)采用的大直径纳米PS微球(4)的直径与第二圆盘(32)采用的小直径纳米PS微球(5)的直径比为2:1;其中,每一组第一圆盘(31)中,包括一个设于中心的整体第二圆盘(321)以及以中心周向均匀分布的六个部分第二圆盘(322)。The diameter ratio of the diameter of the large-diameter nano-PS microspheres (4) adopted by the first disc (31) to the diameter ratio of the small-diameter nano-PS microspheres (5) adopted by the second disc (32) is 2:1; wherein Each group of first disks (31) includes a whole second disk (321) located in the center and six partial second disks (322) evenly distributed in the circumferential direction of the center. 2.根据权利要求1所述的一种高灵敏度光纤表面等离激元传感器,其特征在于:所述的金薄膜(3)与光纤(1)端面之间采用电镀或胶粘的方式进行连接。2. A high-sensitivity optical fiber surface plasmon sensor according to claim 1, characterized in that: the gold film (3) and the end face of the optical fiber (1) are connected by electroplating or gluing . 3.权利要求1~2任一项所述的高灵敏度光纤表面等离激元传感器的制备方法,其特征在于,包括以下步骤:3. The preparation method of the high-sensitivity optical fiber surface plasmon sensor according to any one of claims 1 to 2, characterized in that, comprising the following steps: S1:取多模光纤,对其进行90°切割或拉锥;S1: Take the multimode fiber and cut it at 90° or taper it; S2:在切割或者拉锥完成的光纤端面通过电镀或胶粘的方式设置一层50nm厚的金薄膜;S2: A 50nm-thick gold film is arranged on the end face of the fiber that has been cut or taper-drawn by electroplating or gluing; S3:制备两组不同直径的聚苯乙烯微球阵列的胶体溶液,将两组胶体溶液分别缓慢注射到水表面,分别形成有序的微球薄膜A和微球薄膜B;所述的微球薄膜A采用的聚苯乙烯微球的直径与微球薄膜B采用的聚苯乙烯微球的直径比为2:1;S3: Prepare two sets of colloidal solutions of polystyrene microsphere arrays with different diameters, and slowly inject the two sets of colloidal solutions onto the water surface to form an ordered microsphere film A and a microsphere film B respectively; the microspheres The diameter ratio of the polystyrene microspheres used in the film A to the diameters of the polystyrene microspheres used in the microsphere film B is 2:1; S4:将微球薄膜A转移至步骤S2得到的光纤端面上,自然干燥后放入离子刻蚀样品室内,在其表面刻蚀出纳米金圆盘阵列后再刻蚀掉表层的纳米小球;S4: transfer the microsphere film A to the end face of the optical fiber obtained in step S2, put it into the ion etching sample chamber after natural drying, etch the nano-gold disc array on its surface, and then etch the nano-spheres on the surface; S5:将微球薄膜B转移至步骤S4得到的光纤端面上,自然干燥后放入离子刻蚀样品室内,在其表面刻蚀出纳米金圆盘阵列后再刻蚀掉表层的纳米小球,得到具有双周期纳米金圆盘阵列结构的高灵敏度光纤表面等离激元传感器。S5: transfer the microsphere film B to the end face of the optical fiber obtained in step S4, put it into the ion etching sample chamber after natural drying, etch the nano-gold disk array on its surface, and then etch the nano-spheres on the surface layer, A high-sensitivity fiber-optic surface plasmon sensor with a double-period gold nanodisc array structure is obtained. 4.根据权利要求3所述的高灵敏度光纤表面等离激元传感器的制备方法,其特征在于:所述步骤S2中,胶粘的方式具体是指由环氧胶(2)将金薄膜粘贴在光纤端面。4 . The method for preparing a high-sensitivity optical fiber surface plasmon sensor according to claim 3 , wherein in the step S2 , the method of gluing specifically refers to attaching the gold film by epoxy glue ( 2 ). 5 . on the fiber end face. 5.根据权利要求3所述的高灵敏度光纤表面等离激元传感器的制备方法,其特征在于:所述步骤S4和S5中,刻蚀采用的束流为10~100nm/min。5 . The method for preparing a high-sensitivity optical fiber surface plasmon sensor according to claim 3 , wherein: in the steps S4 and S5 , the beam current used in the etching is 10-100 nm/min. 6 .
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