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CN111261601A - Clamp embedded type high-integration-level compression joint type packaged power module - Google Patents

Clamp embedded type high-integration-level compression joint type packaged power module Download PDF

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CN111261601A
CN111261601A CN202010056949.9A CN202010056949A CN111261601A CN 111261601 A CN111261601 A CN 111261601A CN 202010056949 A CN202010056949 A CN 202010056949A CN 111261601 A CN111261601 A CN 111261601A
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copper bar
semiconductor chip
crimping
integration
power module
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CN111261601B (en
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李武华
常垚
罗皓泽
朱安康
陈宏�
何湘宁
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Zhejiang University ZJU
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/40Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367Cooling facilitated by shape of device
    • H01L23/3672Foil-like cooling fins or heat sinks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of semiconductor or other solid state devices
    • H01L25/03Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/07Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group subclass H10D
    • H01L25/071Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group subclass H10D the devices being arranged next and on each other, i.e. mixed assemblies

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  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
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Abstract

本发明公开了一种夹具内嵌型的高集成度压接式封装功率模块,其包括自上而下依次设置的正极散热片、直流正极铜排、交流输出铜排、直流负极铜排和负极散热片;所述的交流输出铜排的两侧对称安装有半导体芯片单元,半导体芯片单元的外围均匀分布有贯穿压接式模块的螺纹孔,通过绝缘双头螺丝紧固,由绝缘双头螺丝上的外螺纹与螺纹孔的内螺纹咬合产生压接力;本发明采用内嵌夹具实现模块压接,将铜排、散热器作为模块的组成部分,因此实现了高功率密度和高集成度;相比于传统压接式封装功率模块,本发明技术方案由于优化了夹具设计,降低了设计成本,简化了制作流程,该压接式封装功率模块用于实现高功率密度整流器。

Figure 202010056949

The invention discloses a clamp-embedded high-integration crimping package power module, which comprises a positive heat sink, a DC positive copper bar, an AC output copper bar, a DC negative copper bar and a negative electrode sequentially arranged from top to bottom Heat sink; semiconductor chip units are symmetrically installed on both sides of the AC output copper bar, and the periphery of the semiconductor chip unit is evenly distributed with threaded holes penetrating the crimping module, which are fastened by insulating double-headed screws. The external thread on the threaded hole is engaged with the internal thread of the threaded hole to generate a crimping force; the present invention adopts an embedded clamp to realize the crimping of the module, and uses the copper bar and the heat sink as the component parts of the module, thus realizing high power density and high integration; Compared with the traditional press-fit packaged power module, the technical solution of the present invention reduces the design cost and simplifies the manufacturing process due to the optimized fixture design, and the press-fit packaged power module is used to realize a high power density rectifier.

Figure 202010056949

Description

一种夹具内嵌型的高集成度压接式封装功率模块A clamp-embedded high-integration press-fit packaged power module

技术领域technical field

本发明属于电力电子器件技术领域,具体涉及一种夹具内嵌型的高集成度压接式封装功率模块。The invention belongs to the technical field of power electronic devices, and in particular relates to a clamp-embedded high-integration crimping package power module.

背景技术Background technique

压接式封装技术,相比塑封焊接式封装技术,具有免绑定线、无焊料层、双面散热、短路失效等应用特点,以此封装技术制成的大功率半导体模块,如晶闸管(SCR)、集成门极换向晶闸管(IGCT)、压接式绝缘栅双极晶体管(IGBT)等,具有热阻抗低、安全工作区宽、额定功率大等优点,广泛应用于柔性直流输电、高速轨道交通、远距离风力发电等工况复杂、环境恶劣、对可靠性要求高的场合。Compared with plastic sealing and soldering packaging technology, press-fit packaging technology has application characteristics such as wire-free bonding, no solder layer, double-sided heat dissipation, and short-circuit failure. High-power semiconductor modules made of this packaging technology, such as thyristor (SCR) ), Integrated Gate Commutated Thyristor (IGCT), Crimp Insulated Gate Bipolar Transistor (IGBT), etc., which have the advantages of low thermal impedance, wide safe working area and high rated power, and are widely used in flexible DC power transmission, high-speed rail Traffic, long-distance wind power generation and other occasions with complex working conditions, harsh environment and high reliability requirements.

由于压接式封装技术的特殊性,为实现模块内部和模块与模块之间可靠的电气连接,需对模块芯片施加10~20兆帕斯卡的压强。如附图1所示的是应用在现有商业化压接式模块中一种典型的压接力实现夹具结构,包括紧固螺栓1、支撑板2、紧固螺柱3、碟形弹簧组4、承重板5、散热器6、压接式模块7等部分。其中碟形弹簧组4由若干个相同的碟形弹簧堆叠而成,以满足压接式模块7所需的压接力。在压接式模块7外部的四个角落垂直放置紧固螺柱1,通过支撑板2和紧固螺柱3将碟形弹簧组4的形变固定,使碟形弹簧组4保持压缩状态并维持压接力。Due to the particularity of the crimping packaging technology, in order to achieve a reliable electrical connection inside the module and between the modules, a pressure of 10-20 MPa needs to be applied to the module chip. As shown in FIG. 1 is a typical crimping force realization fixture structure applied in an existing commercial crimping module, including a fastening bolt 1, a support plate 2, a fastening stud 3, and a disc spring group 4 , Bearing plate 5, radiator 6, crimping module 7 and other parts. The disc spring group 4 is formed by stacking several identical disc springs to meet the crimping force required by the crimping module 7 . Fastening studs 1 are placed vertically at the four corners outside the crimping module 7, and the deformation of the disc spring group 4 is fixed through the support plate 2 and the fastening studs 3, so that the disc spring group 4 is kept in a compressed state and maintained crimp force.

尽管该夹具能够实现加压并维持压力,然而尚有以下缺点亟待改进:(1)夹具需要与压接式模块尺寸相近的支撑板和承重板,同时需要外加紧固件和碟形弹簧组,增加了整套功率变换装置的体积和使用成本;(2)由于采用集中式的压力维持方式,使得压接式模块内部芯片之间的受压不均衡,模块中心部位的芯片受力较大而模块边缘位置的芯片受力较小;(3)由于夹具设计复杂,对操作精度要求较高,加上芯片受压不均衡,一旦操作有误,则会造成中心芯片破损或边缘芯片连接无效。Although the clamp can achieve pressurization and maintain pressure, there are still the following shortcomings that need to be improved: (1) The clamp needs a support plate and a load-bearing plate that are similar in size to the crimping module, and additional fasteners and disc springs are required. (2) Due to the centralized pressure maintenance method, the pressure between the chips inside the crimping module is unbalanced, and the chips in the center of the module are subjected to greater stress and the edge of the module The chip in the position is less stressed; (3) Due to the complex design of the fixture, the operation accuracy is high, and the pressure of the chip is not balanced. Once the operation is wrong, the center chip will be damaged or the edge chip connection will be invalid.

发明内容SUMMARY OF THE INVENTION

针对上述问题,本发明提供了一种夹具内嵌型的高集成度压接式封装功率模块,将传统外架的压接夹具去除,利用导电铜排、散热铝片直接作为压力接触件,在模块内部嵌入双头圆柱螺丝,均匀分布在芯片周围,施加并维持芯片所需压接力。In view of the above problems, the present invention provides a clamp-embedded high-integration crimping package power module, which removes the traditional crimping clamp of the outer frame, and uses conductive copper bars and heat-dissipating aluminum sheets directly as pressure contacts. Double-headed cylindrical screws are embedded in the module, which are evenly distributed around the chip to apply and maintain the required crimping force for the chip.

为了实现上述目的,本发明提供了一种夹具内嵌型的高集成度压接式封装功率模块,包括自上而下依次连接的正极散热片、压接式模块和负极散热片;所述的压接式模块包括直流正极铜排、交流输出铜排、直流负极铜排和半导体芯片单元。In order to achieve the above purpose, the present invention provides a clamp-embedded high-integration crimp-type packaged power module, comprising a positive heat sink, a pressure-connected module and a negative heat sink connected in sequence from top to bottom; the The crimping module includes a DC positive copper bar, an AC output copper bar, a DC negative copper bar and a semiconductor chip unit.

所述的交流输出铜排的两侧对称安装有半导体芯片单元,半导体芯片单元的外围均匀分布有贯穿直流正极铜排、交流输出铜排和直流负极铜排的螺纹孔,通过绝缘双头螺丝紧固,由绝缘双头螺丝上的外螺纹与螺纹孔的内螺纹咬合产生压接力;所述直流正极铜排和直流负极铜排的上下表面均设有绝缘膜,直流正极铜排和直流负极铜排上设有直流母线电容接口,交流输出铜排上设有负载接口。The two sides of the AC output copper bar are symmetrically installed with semiconductor chip units, and the periphery of the semiconductor chip unit is evenly distributed with threaded holes penetrating the DC positive copper bar, the AC output copper bar and the DC negative copper bar, which are fastened by insulating double-headed screws. The crimping force is generated by the engagement of the external thread on the insulating double-headed screw with the internal thread of the threaded hole; the upper and lower surfaces of the DC positive copper bar and the DC negative copper bar are provided with insulating films, and the DC positive copper bar and the DC negative copper bar are provided with insulating films. There is a DC bus capacitor interface on the row, and a load interface on the AC output copper row.

作为本发明的优选,所述的交流输出铜排的上下表面对称设有供半导体芯片单元安装的定位凹槽一和定位凹槽二,半导体芯片单元的正极与定位凹槽二紧密贴合,负极与定位凹槽一紧密贴合;直流正极铜排下层绝缘膜和直流负极铜排上层绝缘膜设有供半导体芯片单元穿过的通孔。As a preferred option of the present invention, the upper and lower surfaces of the AC output copper bars are symmetrically provided with a positioning groove 1 and a positioning groove 2 for mounting the semiconductor chip unit, the positive electrode of the semiconductor chip unit is closely attached to the positioning groove 2, and the negative electrode It is closely attached to the positioning groove 1; the insulating film of the lower layer of the DC positive copper bar and the upper insulating film of the DC negative copper bar are provided with through holes for the semiconductor chip units to pass through.

作为本发明的优选,所述的绝缘双头螺丝的高度与直流正极铜排的上表面、以及交流输出铜排的下表面平齐。As a preference of the present invention, the height of the insulating double-headed screw is flush with the upper surface of the DC positive electrode copper bar and the lower surface of the AC output copper bar.

作为本发明的优选,所述半导体芯片单元是由上钼片、半导体芯片、下钼片和铝片自上而下形成的一体化叠层组件;所述半导体芯片的正极与上钼片压接接触,负极与下钼片压接接触。As a preferred option of the present invention, the semiconductor chip unit is an integrated laminate assembly formed from top to bottom by an upper molybdenum sheet, a semiconductor chip, a lower molybdenum sheet and an aluminum sheet; the positive electrode of the semiconductor chip is crimped to the upper molybdenum sheet contact, and the negative electrode is in crimp contact with the lower molybdenum sheet.

作为本发明的优选,所述上钼片和下钼片的厚度为100μm~400μm,铝片厚度为50μm~200μm。As a preference of the present invention, the thickness of the upper molybdenum sheet and the lower molybdenum sheet is 100 μm˜400 μm, and the thickness of the aluminum sheet is 50 μm˜200 μm.

作为本发明的优选,所述半导体芯片采用硅二极管芯片、肖特基二极管芯片、碳化硅二极管芯片或碳化硅二极管芯片。As a preferred option of the present invention, the semiconductor chip is a silicon diode chip, a Schottky diode chip, a silicon carbide diode chip or a silicon carbide diode chip.

作为本发明的优选,所述半导体芯片单元设有阶梯限位结构,直流正极铜排下层绝缘膜和直流负极铜排上层绝缘膜设有供半导体芯片单元穿过的阶梯孔,阶梯孔与所述阶梯限位结构匹配。As a preferred aspect of the present invention, the semiconductor chip unit is provided with a stepped limit structure, the lower insulating film of the DC positive copper bar and the upper insulating film of the DC negative copper bar are provided with stepped holes for the semiconductor chip units to pass through, and the stepped holes are connected to the Ladder limit structure matching.

作为本发明的优选,所述的绝缘双头螺丝由聚醚醚酮制成,绝缘膜由聚对苯二甲酸乙二醇酯制成。As a preference of the present invention, the insulating double-ended screw is made of polyether ether ketone, and the insulating film is made of polyethylene terephthalate.

作为本发明的优选,每层绝缘膜厚度在50μm以上。As a preference of the present invention, the thickness of each insulating film is more than 50 μm.

作为本发明的优选,所述的正极散热片、压接式模块和负极散热片上设有贯通的螺纹孔,通过加长的绝缘双头螺丝紧固。As a preferred option of the present invention, the positive heat sink, the crimping module and the negative heat sink are provided with through threaded holes, which are fastened by elongated insulating double-headed screws.

与现有技术相比,本发明具有以下优点:Compared with the prior art, the present invention has the following advantages:

(1)本发明中的功率模块取消了碟形弹簧、支撑板、承重板等外架夹具,采用内嵌式的高强度双头螺丝分布与芯片周围,保证压接力的同时提高了模块功率密度。(1) The power module in the present invention cancels the outer frame fixtures such as disc springs, support plates, and load-bearing plates, and adopts embedded high-strength double-headed screws to distribute around the chip to ensure the crimping force and improve the module power density. .

(2)本发明中将直流侧正负极铜排压接之后形成叠层结构,同时以绝缘膜保证绝缘强度,在确保安全应用的同时降低了功率回路的杂散参数。(2) In the present invention, the positive and negative copper bars of the DC side are crimped to form a laminated structure, and the insulating film is used to ensure the dielectric strength, which reduces the stray parameters of the power circuit while ensuring safe application.

(3)本发明将散热片贴合在直流铜排表面,实现了压接式封装模块的双面散热特点,降低了模块整体的热阻抗。(3) In the present invention, the heat sink is attached to the surface of the DC copper bar, which realizes the double-sided heat dissipation feature of the crimping package module and reduces the overall thermal impedance of the module.

(4)本发明中并联的被压芯片单元周围均匀分布双头螺丝,将旋转力矩转化为压力并通过铜排紧固压接芯片单元,既保证了单个芯片上压力均匀,也保证了并联的被压芯片单元之间的压力分布均匀。通过均匀分布的机械压接应力,保证了芯片与铜排之间的接触热阻和接触电阻的均匀分布,避免了应用过程中温度极热点的出现,使压接式封装模块在多芯片并联情况下依然保持高可靠性。(4) Double-headed screws are evenly distributed around the chip units to be pressed in parallel in the present invention, the rotational torque is converted into pressure, and the chip units are fastened and crimped by copper bars, which not only ensures the uniform pressure on a single chip, but also ensures that the parallel connection The pressure distribution between the pressed chip units is uniform. Through the evenly distributed mechanical crimping stress, the uniform distribution of the contact thermal resistance and the contact resistance between the chip and the copper bar is ensured, avoiding the appearance of extreme temperature hot spots during the application process, and making the crimping package module in the case of multi-chip parallel connection. still maintain high reliability.

附图说明Description of drawings

图1为传统的典型压接力实现夹具的结构示意图;FIG. 1 is a schematic structural diagram of a traditional typical crimping force realization fixture;

图2为本发明高集成度压接式封装功率模块的一种具体实施方式结构分解示意图;FIG. 2 is a schematic structural exploded view of a specific embodiment of a high-integration press-fit packaged power module according to the present invention;

图3为本发明高集成度压接式封装功率模块的一种具体实施方式的整体结构剖面示意图;3 is a schematic cross-sectional view of the overall structure of a specific embodiment of a high-integration press-fit packaged power module according to the present invention;

图4为本发明高集成度压接式封装功率模块的一种具体实施方式的局部结构剖面示意图;4 is a schematic cross-sectional view of a partial structure of a specific embodiment of a high-integration press-fit packaged power module according to the present invention;

图中:1-紧固螺栓,2-支撑板,3-紧固螺柱,4-碟形弹簧组,5-承重板,6-散热器,7-压接式模块,8-正极散热片,9-加长的绝缘双头螺丝,10-直流正极铜排上层绝缘膜,11-直流正极铜排,12-绝缘双头螺丝,13-直流正极铜排下层绝缘膜,14-半导体芯片单元,15-交流输出铜排,16-交流输出铜排上层绝缘膜,17-直流负极铜排,18-交流输出铜排下层绝缘膜,19-负极散热片,20-上钼片,21-半导体芯片,22-绝缘膜,23-下钼片,24-铝片,25-直流正极铜排或交流输出铜排的下表面,26-直流负极铜排或交流输出铜排的上表面,27-定位凹槽。In the picture: 1- Fastening bolt, 2- Support plate, 3- Fastening stud, 4- Disc spring group, 5- Bearing plate, 6- Radiator, 7- Crimp module, 8- Positive heat sink , 9-extended insulating double-headed screw, 10-DC positive copper bar upper insulating film, 11-DC positive copper bar, 12-insulated double-headed screw, 13-DC positive copper bar lower insulating film, 14-semiconductor chip unit, 15- AC output copper bar, 16- AC output copper bar upper insulating film, 17- DC negative copper bar, 18- AC output copper bar lower insulating film, 19- Negative heat sink, 20- Upper molybdenum sheet, 21- Semiconductor chip , 22-insulating film, 23-lower molybdenum sheet, 24-aluminum sheet, 25-the lower surface of DC positive copper bar or AC output copper bar, 26-DC negative copper bar or the upper surface of AC output copper bar, 27-positioning groove.

具体实施方式Detailed ways

为了更好地理解本发明,下面将结合附图及具体实施方式对本发明的技术方案进行清楚、详细地描述。In order to better understand the present invention, the technical solutions of the present invention will be described clearly and in detail below with reference to the accompanying drawings and specific embodiments.

在本发明的描述中,需要说明的是,一系列描述方位的术语,如“上”、“下”、“左”、“右”、“内”、“外”、“竖直”、“水平”等均表示的是基于附图所指的方位或位置关系,仅是为了方便本发明的描述,而不是指示或暗示本发明中的装置或部件必须具有特定的方位或以特定的方位进行构造或操作,因此不能理解成对本发明的限制。In the description of the present invention, it should be noted that a series of terms describing the orientation, such as "upper", "lower", "left", "right", "inner", "outer", "vertical", " "Horizontal" and the like all indicate the orientation or positional relationship based on the drawings, which are only for the convenience of the description of the present invention, rather than indicating or implying that the devices or components in the present invention must have a specific orientation or be performed in a specific orientation. construction or operation, and therefore should not be construed as limiting the invention.

如图2所示给出了本发明夹具内嵌型的高集成度压接式封装功率模块的一种具体实施方式结构分解示意图,基于本发明的压接式封装功率模块主要包括双面压接钼片及铝片的半导体芯片单元、采用叠层结构的直流导电铜排和交流导电铜排、带翅片的铝制散热片、高强度绝缘双头螺丝、以及绝缘膜,其中双头螺丝由聚醚醚酮制成,绝缘膜由聚对苯二甲酸乙二醇酯制成。As shown in FIG. 2, a schematic diagram of the structure of a specific embodiment of the highly integrated crimping packaged power module embedded in the fixture of the present invention is shown. The crimping packaged power module based on the present invention mainly includes double-sided crimping Semiconductor chip units of molybdenum and aluminum sheets, DC conductive copper bars and AC conductive copper bars with a laminated structure, aluminum heat sinks with fins, high-strength insulating double-headed screws, and insulating films, of which the double-headed screws are made of Made of polyetheretherketone, insulating film made of polyethylene terephthalate.

具体的,直流导电铜排包括直流正极铜排11和直流负极铜排17,交流导电铜排作为交流输出铜排15;所述的交流输出铜排15的两侧对称安装有半导体芯片单元14,半导体芯片单元14的外围均匀分布有贯穿直流正极铜排11、交流输出铜排15和直流负极铜排17的螺纹孔,通过绝缘双头螺丝12紧固,由绝缘双头螺丝12上的外螺纹与螺纹孔的内螺纹咬合产生压接力;所述直流正极铜排11和直流负极铜排17的上下表面均设有绝缘膜,直流正极铜排11和直流负极铜排17上设有直流母线电容接口,交流输出铜排15上设有负载接口。Specifically, the DC conductive copper bar includes a DC positive copper bar 11 and a DC negative copper bar 17, and the AC conductive copper bar serves as the AC output copper bar 15; the two sides of the AC output copper bar 15 are symmetrically installed with semiconductor chip units 14, The periphery of the semiconductor chip unit 14 is evenly distributed with threaded holes penetrating the DC positive copper bar 11 , the AC output copper bar 15 and the DC negative copper bar 17 , which are fastened by the insulating double-headed screws 12 , and the external threads on the insulating double-headed screws 12 It is engaged with the internal thread of the threaded hole to generate a crimping force; the upper and lower surfaces of the DC positive copper bar 11 and the DC negative copper bar 17 are provided with insulating films, and the DC positive copper bar 11 and the DC negative copper bar 17 are provided with DC bus capacitors Interface, the AC output copper bar 15 is provided with a load interface.

以下给出夹具内嵌型的高集成度压接式封装功率模块在本发明的一个优选实施中的结构及其制作方法。The structure of a clip-embedded high-integration pressure-contact package power module in a preferred implementation of the present invention and a manufacturing method are given below.

在直流正极铜排11、直流负极铜排17和交流输出铜排15中间打直通孔,在直流正极铜排11和直流负极铜排17上拉出螺距一致的右旋螺纹线,并使得各孔位置对齐、直径一致。在直流正极铜排11、交流输出铜排15、直流负极铜排17上开挖方形定位凹槽,其中交流输出铜排15双面开挖方形定位凹槽且位置对应,直流正极铜排11下表面、交流输出铜排15下表面的凹槽长度和宽度保持与半导体芯片单元14的正极表面一致,直流负极铜排17上表面、交流输出铜排15上表面的凹槽长度和宽度保持与半导体芯片单元14的负极表面一致,半导体芯片单元14的正负极与凹槽紧密贴合。Drill straight through holes in the middle of the DC positive copper bar 11, the DC negative copper bar 17 and the AC output copper bar 15, and pull out the right-hand thread with the same pitch on the DC positive copper bar 11 and the DC negative copper bar 17, and make each hole The positions are aligned and the diameters are the same. A square positioning groove is excavated on the DC positive copper bar 11, the AC output copper bar 15, and the DC negative copper bar 17, wherein the AC output copper bar 15 is excavated with square positioning grooves on both sides and the positions are corresponding, and the DC positive copper bar 11 is under The length and width of the grooves on the surface and the lower surface of the AC output copper bar 15 are kept consistent with the positive surface of the semiconductor chip unit 14, and the length and width of the grooves on the upper surface of the DC negative copper bar 17 and the upper surface of the AC output copper bar 15 are kept consistent with the semiconductor chip unit 14. The surfaces of the negative electrodes of the chip unit 14 are consistent, and the positive and negative electrodes of the semiconductor chip unit 14 are closely attached to the grooves.

在直流正极铜排上层绝缘膜10、直流正极铜排下层绝缘膜13、直流负极铜排上层绝缘膜16、直流负极铜排下层绝缘膜18均打出直通孔,各孔位置与直流正极铜排11、交流输出铜排15、直流负极铜排17均保持对齐且尺寸一致。在直流正极铜排下层绝缘膜13、直流负极铜排上层绝缘膜16上挖直通方形孔,尺寸与各半导体芯片单元14尺寸一致。该绝缘膜上的直通方形孔与铜排上方形定位凹槽位置对齐,配合定位并卡牢半导体芯片单元14。Through holes are punched in the upper insulating film 10 of the DC positive copper bar, the lower insulating film 13 of the DC positive copper bar, the upper insulating film 16 of the DC negative copper bar, and the lower insulating film 18 of the DC negative copper bar. , the AC output copper bar 15 and the DC negative copper bar 17 are all aligned and of the same size. Straight through square holes are dug in the lower insulating film 13 of the DC positive copper bar and the upper insulating film 16 of the DC negative copper bar, the size of which is the same as that of each semiconductor chip unit 14 . The straight-through square holes on the insulating film are aligned with the square positioning grooves on the copper bars, and the semiconductor chip units 14 are positioned and fastened together.

将直流正极铜排上层绝缘膜10、直流正极铜排11、直流正极铜排下层绝缘膜13、半导体芯片单元14、交流输出铜排15、直流负极铜排上层绝缘膜16、直流负极铜排17、直流负极铜排下层绝缘膜18沿竖直方向由上到下对齐放置,将半导体芯片单元14放置在方形定位凹槽当中,并通过凹槽、绝缘膜上的直通方形孔固定。The upper insulating film 10 of the DC positive copper bar, the DC positive copper bar 11, the lower insulating film 13 of the DC positive copper bar, the semiconductor chip unit 14, the AC output copper bar 15, the DC negative copper bar upper insulating film 16, the DC negative copper bar 17 . The insulating film 18 of the lower layer of the DC negative copper bar is aligned vertically from top to bottom, and the semiconductor chip unit 14 is placed in the square positioning groove and fixed through the groove and the straight through square hole on the insulating film.

将双头螺丝12的螺距设置为直流正极铜排11和直流正负铜排17中的螺距,使双头螺丝两端的螺纹长度与两直流铜排厚度保持一致,绝缘双头螺丝12的高度与直流正极铜排11的上表面、以及交流输出铜排15的下表面平齐。将绝缘双头螺丝12嵌入到铜排、绝缘膜上已打好的直通孔内,固定并施加相同大小的力矩右旋拧紧螺丝,将旋转力矩转化为压接力,带动铜排压接半导体芯片单元14。Set the pitch of the double-ended screw 12 to the pitch in the DC positive copper bar 11 and the DC positive and negative copper bar 17, so that the thread length at both ends of the double-ended screw is consistent with the thickness of the two DC copper bars, and the height of the insulated double-ended screw 12 is the same as The upper surface of the DC positive copper bar 11 and the lower surface of the AC output copper bar 15 are flush. Insert the insulating double-headed screw 12 into the copper bar and the through hole that has been drilled on the insulating film, fix it and apply the same torque to tighten the screw right-hand, convert the rotational torque into crimping force, and drive the copper bar to crimp the semiconductor chip unit. 14.

将正极散热片8和负极散热片19分别贴合在直流正极铜排上层绝缘膜10和直流负极铜排下层绝缘膜18的表面,在散热片、铜排、绝缘膜角落打直通螺纹孔,通过加长的绝缘双头螺丝9嵌入到散热片、铜排、绝缘膜打好的直通螺纹孔内,不需施加力矩,直接固定散热器即可整合,形成如图3所示的高集成度压接式封装功率模块。The positive heat sink 8 and the negative heat sink 19 are respectively attached to the surface of the upper insulating film 10 of the DC positive copper bar and the surface of the lower insulating film 18 of the DC negative copper bar. The elongated insulating double-headed screws 9 are embedded in the straight-through threaded holes made by the heat sink, copper bar, and insulating film. Without applying torque, the heat sink can be directly fixed and integrated, forming a high-integration crimp as shown in Figure 3. packaged power modules.

在本实施例中,被压半导体芯片单元14及定位凹槽剖视图如图4所示。其中包括:上钼片20、半导体芯片21、绝缘膜22、下钼片23、铝片24、直流正极铜排11或交流输出铜排15的下表面25、直流负极铜排17或交流输出铜排15的上表面26、位于直流铜排与交流铜排之间的定位凹槽27。In this embodiment, a cross-sectional view of the pressed semiconductor chip unit 14 and the positioning groove is shown in FIG. 4 . Including: upper molybdenum sheet 20, semiconductor chip 21, insulating film 22, lower molybdenum sheet 23, aluminum sheet 24, lower surface 25 of DC positive copper bar 11 or AC output copper bar 15, DC negative copper bar 17 or AC output copper bar The upper surface 26 of the row 15 and the positioning groove 27 located between the DC copper row and the AC copper row.

所述的上钼片20尺寸与半导体芯片21正极的导电尺寸一致,下钼片尺寸与半导体芯片21负极的导电尺寸一致,铝片尺寸与下钼片尺寸一致,由于半导体芯片21正极的导电尺寸比半导体芯片21负极的导电尺寸大,因此在半导体芯片单元14的半导体芯片21负极处设有阶梯限位结构,上宽下窄。被压半导体芯片单元14整体放置于定位凹槽27之内,直流正极铜排下层绝缘膜和直流负极铜排上层绝缘膜设有供半导体芯片单元14穿过的阶梯孔,阶梯孔与所述阶梯限位结构匹配,定位凹槽与绝缘膜同时起到定位作用。为了与半导体芯片单元14的结构匹配,定位凹槽27包括设置在铜排下表面25上的大凹槽和设置在铜排上表面26上的小凹槽。The size of the upper molybdenum sheet 20 is consistent with the conductive size of the positive electrode of the semiconductor chip 21, the size of the lower molybdenum sheet is consistent with the conductive size of the negative electrode of the semiconductor chip 21, and the size of the aluminum sheet is consistent with the size of the lower molybdenum sheet. The conductive dimension is larger than that of the negative electrode of the semiconductor chip 21 , so a stepped limiting structure is provided at the negative electrode of the semiconductor chip 21 of the semiconductor chip unit 14 , which is wider at the top and narrower at the bottom. The pressed semiconductor chip unit 14 is placed in the positioning groove 27 as a whole. The lower insulating film of the DC positive copper bar and the upper insulating film of the DC negative copper bar are provided with stepped holes for the semiconductor chip unit 14 to pass through. The limit structure is matched, and the positioning groove and the insulating film play a positioning role at the same time. In order to match the structure of the semiconductor chip unit 14 , the positioning grooves 27 include large grooves provided on the lower surface 25 of the copper bars and small grooves provided on the upper surface 26 of the copper bars.

半导体芯片21的正极与上钼片20连接,负极与下钼片23连接,铝片24处于下钼片23和定位凹槽27之间。上钼片20的热膨胀系数处于铜排和半导体芯片21之间,在受热时引起的形变处于定位凹槽27和半导体芯片21之间,可起到缓冲作用。下钼片23和铝片24依次由上到下放置在半导体芯片21和铜排之间,可由下钼片23缓冲受热时定位凹槽27和半导体芯片21的形变,由铝片24缓冲上钼片20、半导体芯片21、下钼片23整体和小凹槽口的剩余应力。具体地,上钼片20和下钼片23的厚度为100μm~400μm,铝片厚度为50μm~200μm。绝缘膜22分为两层,每层厚度相同,在固定半导体芯片单元14的同时起到电气绝缘作用,防止两相邻铜排之间短路。具体地,绝缘膜每层厚度在50μm以上。The positive electrode of the semiconductor chip 21 is connected to the upper molybdenum sheet 20 , the negative electrode is connected to the lower molybdenum sheet 23 , and the aluminum sheet 24 is located between the lower molybdenum sheet 23 and the positioning groove 27 . The thermal expansion coefficient of the upper molybdenum sheet 20 is between the copper bar and the semiconductor chip 21, and the deformation caused by heating is between the positioning groove 27 and the semiconductor chip 21, which can play a buffering role. The lower molybdenum sheet 23 and the aluminum sheet 24 are sequentially placed between the semiconductor chip 21 and the copper bar from top to bottom, the lower molybdenum sheet 23 can buffer the deformation of the positioning groove 27 and the semiconductor chip 21 when heated, and the aluminum sheet 24 buffers the upper molybdenum The residual stress of the sheet 20, the semiconductor chip 21, the lower molybdenum sheet 23 as a whole and the small groove. Specifically, the thickness of the upper molybdenum sheet 20 and the lower molybdenum sheet 23 is 100 μm˜400 μm, and the thickness of the aluminum sheet is 50 μm˜200 μm. The insulating film 22 is divided into two layers, and each layer has the same thickness, which plays an electrical insulating role while fixing the semiconductor chip unit 14 and prevents short circuit between two adjacent copper bars. Specifically, each layer of the insulating film has a thickness of more than 50 μm.

在本发明的另一个实施例中,所述的交流输出铜排15的上下表面对称设有供半导体芯片单元14安装的定位凹槽一和定位凹槽二;半导体芯片单元14的宽度均匀一致,正极与定位凹槽二紧密贴合,负极与定位凹槽一紧密贴合;直流正极铜排下层绝缘膜13和直流负极铜排上层绝缘膜16设有供半导体芯片单元14穿过的通孔,仅通过交流输出铜排即可完成半导体芯片单元14的定位,且半导体芯片单元14的高度略高于定位凹槽一和定位凹槽二的槽深。所述半导体芯片单元14是由尺寸除厚度以外均一致的上钼片、半导体芯片、下钼片和铝片自上而下形成的一体化叠层组件;所述半导体芯片的正极与上钼片压接接触,负极与下钼片压接接触,所述半导体芯片采用硅二极管芯片、肖特基二极管芯片、碳化硅二极管芯片或碳化硅二极管芯片。In another embodiment of the present invention, the upper and lower surfaces of the AC output copper bar 15 are symmetrically provided with a positioning groove 1 and a positioning groove 2 for mounting the semiconductor chip unit 14; the width of the semiconductor chip unit 14 is uniform, The positive electrode is tightly attached to the positioning groove 2, and the negative electrode is closely attached to the positioning groove 1; The positioning of the semiconductor chip unit 14 can be completed only by the AC output copper bar, and the height of the semiconductor chip unit 14 is slightly higher than the groove depths of the first and second positioning grooves. The semiconductor chip unit 14 is an integrated laminate assembly formed from top to bottom by an upper molybdenum sheet, a semiconductor chip, a lower molybdenum sheet and an aluminum sheet with the same dimensions except for thickness; the positive electrode of the semiconductor chip and the upper molybdenum sheet Press contact, the negative electrode is press contact with the lower molybdenum sheet, and the semiconductor chip adopts silicon diode chip, Schottky diode chip, silicon carbide diode chip or silicon carbide diode chip.

本发明与现有技术相比,如附图1所示的是应用在现有商业化压接式模块中一种典型的压接力实现夹具结构,包括紧固螺栓1、支撑板2、紧固螺柱3、碟形弹簧组4、承重板5、散热器6、压接式模块7等部分。其中碟形弹簧组4由若干个相同的碟形弹簧堆叠而成,以满足压接式模块7所需的压接力。在压接式模块7外部的四个角落垂直放置紧固螺柱1,通过支撑板2和紧固螺柱3将碟形弹簧组4的形变固定,使碟形弹簧组4保持压缩状态并维持压接力。Compared with the prior art, as shown in FIG. 1 , the present invention is a typical crimping force realization clamp structure applied in an existing commercial crimping module, including a fastening bolt 1 , a supporting plate 2 , a fastening Stud 3, disc spring group 4, bearing plate 5, radiator 6, crimping module 7 and other parts. The disc spring group 4 is formed by stacking several identical disc springs to meet the crimping force required by the crimping module 7 . Fastening studs 1 are placed vertically at the four corners outside the crimping module 7, and the deformation of the disc spring group 4 is fixed through the support plate 2 and the fastening studs 3, so that the disc spring group 4 is kept in a compressed state and maintained crimp force.

综上,本发明中的压接式封装功率模块,相比较传统的压接式功率模块,无需采用键合线工艺和焊接工艺,半导体芯片只需施加压力并满足压接力条件,即可通过钼片等金属薄片实现电气连接,避免了因绑定线易脱落和焊料层易磨损带来的失效问题;无需采用外夹具,省却了大体积的紧固件、承重板等,节省了成本和模块重量;采用特定的内嵌式夹具结构,维持压接力的同时节省夹具空间,并使被压半导体芯片承压均匀;采用特定的铜排和散热器集成结构,有效降低了杂散电感和热阻抗,实现了具有高集成度特性的功率模块。To sum up, compared with the traditional crimping type power module, the crimping package power module of the present invention does not need to adopt the bonding wire process and welding process. Sheets and other metal sheets are used to achieve electrical connection, avoiding the failure problem caused by the easy falling off of the bonding wire and the easy wear of the solder layer; no need to use external fixtures, eliminating the need for large-volume fasteners, load-bearing plates, etc., saving costs and modules. Weight; using a specific embedded fixture structure, maintaining the crimping force while saving the fixture space, and making the pressed semiconductor chip bear even pressure; using a specific integrated structure of copper bars and heat sinks, effectively reducing stray inductance and thermal impedance , to achieve a power module with high integration characteristics.

上述对实施例的描述是为便于本技术领域的普通技术人员能理解和应用本发明。熟悉本领域技术的人员显然可以容易地对上述实施例做出各种修改,并把在此说明的一般原理应用到其他实施例中而不必经过创造性的劳动。因此,本发明不限于上述实施例,本领域技术人员根据本发明的揭示,对于本发明做出的改进和修改都应该在本发明的保护范围之内。The above description of the embodiments is for the convenience of those of ordinary skill in the art to understand and apply the present invention. It will be apparent to those skilled in the art that various modifications to the above-described embodiments can be readily made, and the general principles described herein can be applied to other embodiments without inventive effort. Therefore, the present invention is not limited to the above-mentioned embodiments, and improvements and modifications made by those skilled in the art according to the disclosure of the present invention should all fall within the protection scope of the present invention.

Claims (10)

1.一种夹具内嵌型的高集成度压接式封装功率模块,其特征在于,包括自上而下依次连接的正极散热片(8)、压接式模块和负极散热片(19);所述的压接式模块包括直流正极铜排(11)、交流输出铜排(15)、直流负极铜排(17)和半导体芯片单元(14);1. A high-integration crimping type encapsulation power module embedded in a fixture, characterized in that it comprises a positive heat sink (8), a press-fit module and a negative heat sink (19) that are sequentially connected from top to bottom; The crimping type module comprises a DC positive copper bar (11), an AC output copper bar (15), a DC negative copper bar (17) and a semiconductor chip unit (14); 所述的交流输出铜排(15)的两侧对称安装有半导体芯片单元(14),半导体芯片单元(14)的外围均匀分布有贯穿直流正极铜排(11)、交流输出铜排(15)和直流负极铜排(17)的螺纹孔,通过绝缘双头螺丝(12)紧固,由绝缘双头螺丝(12)上的外螺纹与螺纹孔的内螺纹咬合产生压接力;所述直流正极铜排(11)和直流负极铜排(17)的上下表面均设有绝缘膜,直流正极铜排(11)和直流负极铜排(17)上设有直流母线电容接口,交流输出铜排(15)上设有负载接口。Semiconductor chip units (14) are symmetrically mounted on both sides of the AC output copper bar (15), and the periphery of the semiconductor chip unit (14) is evenly distributed with a DC positive copper bar (11) and an AC output copper bar (15) and the threaded hole of the DC negative copper bar (17), which is fastened by the insulating double-ended screw (12), and the crimping force is generated by the engagement of the external thread on the insulating double-ended screw (12) with the internal thread of the threaded hole; the DC positive electrode The upper and lower surfaces of the copper bar (11) and the DC negative copper bar (17) are provided with insulating films, the DC positive copper bar (11) and the DC negative copper bar (17) are provided with a DC bus capacitor interface, and the AC output copper bar ( 15) There is a load interface on it. 2.如权利要求1所述的一种夹具内嵌型的高集成度压接式封装功率模块,其特征在于,所述的交流输出铜排(15)的上下表面对称设有供半导体芯片单元安装的定位凹槽一和定位凹槽二,半导体芯片单元的正极与定位凹槽二紧密贴合,负极与定位凹槽一紧密贴合;直流正极铜排下层绝缘膜(13)和直流负极铜排上层绝缘膜(16)设有供半导体芯片单元(14)穿过的通孔。2. A clamp-embedded high-integration crimping package power module according to claim 1, wherein the upper and lower surfaces of the AC output copper bars (15) are symmetrically provided with semiconductor chip units Installed positioning groove 1 and positioning groove 2, the positive electrode of the semiconductor chip unit is closely attached to the positioning groove 2, and the negative electrode is closely attached to the positioning groove 1; The upper insulating film (16) is provided with through holes through which the semiconductor chip units (14) pass. 3.如权利要求1所述的一种夹具内嵌型的高集成度压接式封装功率模块,其特征在于,所述的绝缘双头螺丝(12)的高度与直流正极铜排(11)的上表面、以及交流输出铜排(15)的下表面平齐。3. A clamp-embedded high-integration crimping package power module according to claim 1, wherein the height of the insulating double-ended screw (12) is the same as the DC positive copper bar (11) and the lower surface of the AC output copper bar (15) are flush. 4.如权利要求1所述的一种夹具内嵌型的高集成度压接式封装功率模块,其特征在于,所述半导体芯片单元(14)是由上钼片(20)、半导体芯片(21)、下钼片(23)和铝片(24)自上而下形成的一体化叠层组件;所述半导体芯片(21)的正极与上钼片(20)压接接触,负极与下钼片(23)压接接触。4. A clamp-embedded high-integration crimping package power module according to claim 1, characterized in that, the semiconductor chip unit (14) is composed of an upper molybdenum sheet (20), a semiconductor chip ( 21), an integrated laminate assembly formed from top to bottom by a lower molybdenum sheet (23) and an aluminum sheet (24); the positive electrode of the semiconductor chip (21) is in crimp contact with the upper molybdenum sheet (20), and the negative electrode is in contact with the lower molybdenum sheet (20). The molybdenum sheet (23) is in crimp contact. 5.如权利要求4所述的一种夹具内嵌型的高集成度压接式封装功率模块,其特征在于,所述上钼片和下钼片的厚度为100μm~400μm,铝片厚度为50μm~200μm。5 . The clamp-embedded high-integration crimping package power module according to claim 4 , wherein the thickness of the upper molybdenum sheet and the lower molybdenum sheet is 100 μm to 400 μm, and the thickness of the aluminum sheet is 100 μm to 400 μm. 6 . 50μm~200μm. 6.如权利要求4所述的一种夹具内嵌型的高集成度压接式封装功率模块,其特征在于,所述半导体芯片采用硅二极管芯片、肖特基二极管芯片、碳化硅二极管芯片或碳化硅二极管芯片。6. A clamp-embedded high-integration press-fit packaged power module according to claim 4, wherein the semiconductor chip is a silicon diode chip, a Schottky diode chip, a silicon carbide diode chip or a Silicon carbide diode chips. 7.如权利要求1所述的一种夹具内嵌型的高集成度压接式封装功率模块,其特征在于,所述半导体芯片单元设有阶梯限位结构,直流正极铜排下层绝缘膜和直流负极铜排上层绝缘膜设有供半导体芯片单元穿过的阶梯孔,阶梯孔与所述阶梯限位结构匹配。7. A clamp-embedded high-integration crimping packaged power module as claimed in claim 1, wherein the semiconductor chip unit is provided with a stepped limit structure, the lower insulating film of the DC positive copper bar and the The upper insulating film of the DC negative copper bar is provided with a stepped hole for the semiconductor chip unit to pass through, and the stepped hole is matched with the stepped limiting structure. 8.如权利要求1所述的一种夹具内嵌型的高集成度压接式封装功率模块,其特征在于,所述的绝缘双头螺丝(12)由聚醚醚酮制成,绝缘膜由聚对苯二甲酸乙二醇酯制成。8. A clamp-embedded high-integration crimping package power module according to claim 1, wherein the insulating double-headed screw (12) is made of polyetheretherketone, and the insulating film Made of polyethylene terephthalate. 9.如权利要求1所述的一种夹具内嵌型的高集成度压接式封装功率模块,其特征在于,每层绝缘膜厚度在50μm以上。9 . The clamp-embedded high-integration crimping package power module according to claim 1 , wherein the thickness of each insulating film is more than 50 μm. 10 . 10.如权利要求1所述的一种夹具内嵌型的高集成度压接式封装功率模块,其特征在于,所述的正极散热片(8)、压接式模块和负极散热片(19)上设有贯通的螺纹孔,通过加长的绝缘双头螺丝紧固。10. A clamp-embedded high-integration crimp-type packaged power module according to claim 1, characterized in that the positive heat sink (8), the crimp module and the negative heat sink (19) ) is provided with a through threaded hole, which is fastened by an extended insulated double-headed screw.
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CN112290773A (en) * 2020-10-29 2021-01-29 浙江大学 A compression type crimping package power module and its thermal resistance network model modeling method
CN112953170A (en) * 2021-03-08 2021-06-11 清华大学 Water-cooling high-power full-bridge unit based on crimping type IGCT
CN115084054A (en) * 2022-04-30 2022-09-20 中国第一汽车股份有限公司 Double-sided heat dissipation power semiconductor module assembly with temperature measurement function
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Publication number Priority date Publication date Assignee Title
CN112290773A (en) * 2020-10-29 2021-01-29 浙江大学 A compression type crimping package power module and its thermal resistance network model modeling method
CN112953170A (en) * 2021-03-08 2021-06-11 清华大学 Water-cooling high-power full-bridge unit based on crimping type IGCT
CN117397022A (en) * 2021-05-28 2024-01-12 日立能源有限公司 Clamping elements and methods for manufacturing power semiconductor devices
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CN115206949B (en) * 2022-07-13 2023-09-29 西安电子科技大学 Double-sided crimping packaging structure of vertical conduction type power semiconductor device

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