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CN111257351A - Irradiation water-cooling sample platform - Google Patents

Irradiation water-cooling sample platform Download PDF

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CN111257351A
CN111257351A CN202010086563.2A CN202010086563A CN111257351A CN 111257351 A CN111257351 A CN 111257351A CN 202010086563 A CN202010086563 A CN 202010086563A CN 111257351 A CN111257351 A CN 111257351A
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sample stage
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CN111257351B (en
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刘东平
牛春杰
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Dalian University of Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L9/00Supporting devices; Holding devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/28Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/44Sample treatment involving radiation, e.g. heat
    • GPHYSICS
    • G21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21BFUSION REACTORS
    • G21B1/00Thermonuclear fusion reactors
    • G21B1/25Maintenance, e.g. repair or remote inspection
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00Energy generation of nuclear origin
    • Y02E30/10Nuclear fusion reactors

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Abstract

The invention discloses an irradiation water-cooling sample stage, which comprises a sample stage main body, wherein a sample placing stage is arranged at the top of the sample stage main body, a sample support base is arranged at the bottom of the sample stage main body, and a sample protective sleeve is arranged outside the sample stage main body; the lower part of the sample table main body is provided with a water inlet and a water outlet, and the water inlet is positioned above the water outlet; a fixing ring is arranged inside the sample table main body; the water outlet end is connected with a bias connection wire. The invention can be used for researching the damage characteristic behavior of plasma material surface treatment under the condition of high-power irradiation. And experimental basis is provided for the water cooling test of the ITER divertor.

Description

辐照水冷样品台Irradiation water-cooled sample stage

技术领域technical field

本发明涉及在核聚变托克马克技术领域中,能够模拟磁约束核聚变反应过程对第一壁及水冷偏滤器材料,在高温、强粒子轰击条件下的损伤效应进行模拟的一种可行性实验装置。The invention relates to a feasibility experiment for simulating the damage effect of a first wall and a water-cooled divertor material under the conditions of high temperature and strong particle bombardment in the technical field of nuclear fusion tokamak by simulating the magnetic confinement nuclear fusion reaction process device.

背景技术Background technique

随着传统化石燃料的枯竭及日益严重的环境问题,使得发展新型能源迫在眉睫。上世纪出现的核聚变为解决能源问题带来了一次革新,就目前来说,聚变能的发展已经势不可挡。为了更好的实现技术共享,包含中国在内的俄、美、法等7个成员国共同承担研发费用,并在国际上正式开展“国际热核聚变实验堆计划”即ITER计划。在聚变环境下,作为直接面向等离子体的第一壁材料及用于排除He灰等杂质的偏滤器材料,将受到来自聚变反应物(氘、氚)和产物(氦、中子)的辐照。所产生的杂质容易在强电磁场环境下输运至等离子体芯部,从而造成聚变堆的熄灭。因此,展开面向等离子体材料和聚变环境下等离子体相互作用研究具有重要的科学意义和应用价值。在本发明中,利用自主设计的高功率射频离子源产生高密度等离子体,从而模拟面向等离子材料所处的辐照环境,利用水冷样品托能够将面向等离子体材料表面温度降至1000K以下,从而系统的研究了钨及其合金材料在He+或H+/D+辐照条件下的损伤行为,为ITER计划提供有效的理论及实验数据支撑。With the exhaustion of traditional fossil fuels and the increasingly serious environmental problems, the development of new energy sources is imminent. The nuclear fusion that appeared in the last century has brought a revolution to solving the energy problem. For now, the development of fusion energy has been unstoppable. In order to better realize technology sharing, seven member countries including China, Russia, the United States, and France jointly bear the research and development expenses, and officially launched the "International Thermonuclear Experimental Reactor Project", the ITER project. In the fusion environment, as the first wall material directly facing the plasma and the divertor material for removing impurities such as He ash, it will be irradiated from the fusion reactants (deuterium, tritium) and products (helium, neutrons) . The generated impurities are easily transported to the plasma core under the strong electromagnetic field environment, resulting in the extinction of the fusion reactor. Therefore, it is of great scientific significance and application value to carry out research on plasma-oriented materials and plasma interactions in a fusion environment. In the present invention, a self-designed high-power radio frequency ion source is used to generate high-density plasma, so as to simulate the irradiation environment where the plasma-facing material is located, and the water-cooled sample holder can reduce the surface temperature of the plasma-facing material below 1000K, thereby The damage behavior of tungsten and its alloys under He + or H + /D + irradiation was systematically studied, providing effective theoretical and experimental data support for the ITER program.

对于核聚变而言,其稳定运行的关键是在于寻找到能够承受强电磁场、高能粒子轰击及高温条件下能够稳定运行的包裹聚变堆的材料。因此,针对目前已有的如铍、钼、钨或碳等关键的聚变堆外包材料,对于其特有的辐照损伤机理研究就显得尤为重要。众所周知,为保证聚变堆的稳定运行,对于堆芯包裹的第一壁材料及偏滤器靶板材料,均采用在钨或铍背靶板焊接铜管并通入冷却水的形式,使其表面温度降低,从而使得面向等离子体材料能够在高温、强粒子轰击条件下能够稳定运行。因此,本设计根据聚变堆实际运行过程中的相关参数,通过自主发明的辐照水冷样品台将放置于等离子体环境中的被测样品温度降低至1000K以下。基于此,本发明自行设计辐照水冷样品台实验装置,其主要目的为了模拟在聚变堆实际运行过程中,在低能大流强的环境下水冷材料本身的性能及结构所产生的变化。迄今为止该装置的设计尚未见报道。For nuclear fusion, the key to its stable operation is to find materials that can withstand strong electromagnetic fields, high-energy particle bombardment and stable operation under high temperature conditions. Therefore, it is particularly important to study the unique radiation damage mechanism of the existing key fusion reactor outsourcing materials such as beryllium, molybdenum, tungsten or carbon. As we all know, in order to ensure the stable operation of the fusion reactor, for the first wall material and the divertor target plate material wrapped in the core, the copper tube is welded to the tungsten or beryllium back target plate and the cooling water is introduced to make the surface temperature. reduced, so that the plasma-oriented material can operate stably under high temperature and strong particle bombardment conditions. Therefore, this design reduces the temperature of the tested sample placed in the plasma environment to below 1000K through the self-invented irradiation water-cooled sample stage according to the relevant parameters during the actual operation of the fusion reactor. Based on this, the present invention designs an experimental device for an irradiation water-cooled sample platform, the main purpose of which is to simulate the changes in the performance and structure of the water-cooled material itself in the low-energy and high-current environment during the actual operation of the fusion reactor. The design of the device has not been reported so far.

发明内容SUMMARY OF THE INVENTION

本发明的目的是提供一种可用于测试大功率低温辐照条件下样品性能的水冷样品台,能够模拟核聚变堆托克马克运行环境下,面向等离子体材料的辐照损伤行为研究。The purpose of the present invention is to provide a water-cooled sample stage that can be used to test the performance of samples under high-power and low-temperature irradiation conditions, which can simulate the irradiation damage behavior of plasma materials under the operating environment of a nuclear fusion reactor tokemak.

为实现上述发明目的,本发明所采用的技术方案是:For realizing the above-mentioned purpose of the invention, the technical scheme adopted in the present invention is:

一种辐照水冷样品台装置,包括样品台主体,所述样品台主体的顶部设有样品放置台,所述样品台主体的底部设有样品托底座,所述样品台主体的外部设有样品保护套;An irradiation water-cooled sample stage device includes a sample stage main body, a sample placement stage is arranged on the top of the sample stage main body, a sample holder base is arranged at the bottom of the sample stage main body, and a sample is arranged on the outside of the sample stage main body. protective case;

所述的样品台主体的下部设有进水口、出水口,所述进水口位于出水口的上方;所述样品台主体的内部设有固定环;The lower part of the main body of the sample stage is provided with a water inlet and a water outlet, and the water inlet is located above the water outlet; the inside of the main body of the sample stage is provided with a fixing ring;

所述出水口端与偏压接线连接。The water outlet end is connected with the bias wiring.

进一步的,所述进水口的一端连接进水管,另一端与进水接口连接。Further, one end of the water inlet is connected to the water inlet pipe, and the other end is connected to the water inlet port.

进一步的,所述的进水口通过固定环固定于样品台主体同轴中心位置处,并且所述进水口的出水端(顶端)与样品放置台距离为10mm。Further, the water inlet is fixed at the coaxial center position of the main body of the sample stage by a fixing ring, and the distance between the water outlet (top) of the water inlet and the sample placing table is 10 mm.

进一步的,所述的出水口的一端连接出水管,另一端与出水接口连接。Further, one end of the water outlet is connected to the water outlet pipe, and the other end is connected to the water outlet port.

进一步的,所述的样品台主体的内部设有用于固定进水口的出口端的固定环。Further, the inside of the main body of the sample stage is provided with a fixing ring for fixing the outlet end of the water inlet.

进一步的,所述固定环将进水管固定于样品台主体的中心位置处。Further, the fixing ring fixes the water inlet pipe at the central position of the main body of the sample stage.

进一步的,所述的出水管是焊接在样品托侧面距离样品放置台80mm位置处,保证水循环系统的正常使用。Further, the water outlet pipe is welded on the side of the sample holder at a position 80 mm away from the sample placing table, so as to ensure the normal use of the water circulation system.

进一步的,所述的样品台主体分别与进水口和出水口相通;水通过进水口经进水管进入样品台主体,再经出水口流出。Further, the main body of the sample stage is communicated with the water inlet and the water outlet respectively; the water enters the main body of the sample stage through the water inlet through the water inlet pipe, and then flows out through the water outlet.

进一步的,所述的偏压线接口放置于出水口端,并距离进水接口10mm的位置处。Further, the bias line interface is placed at the water outlet end at a distance of 10mm from the water inlet interface.

进一步的,所述的样品放置台与被测样品相连,所述出水口端通过偏压接线与偏压源相连接。Further, the sample placing platform is connected with the sample to be tested, and the water outlet end is connected with a bias voltage source through a bias voltage wire.

进一步的,所述的样品托底座与样品台主体固定连接。Further, the sample holder base is fixedly connected with the main body of the sample stage.

进一步的,所述的样品托底座与样品台主体下端通过螺纹紧密连接,保证其与真空腔室的绝缘。Further, the sample holder base is tightly connected with the lower end of the main body of the sample stage through threads to ensure insulation from the vacuum chamber.

进一步的,所述样品托底座的底部设置有氮化硼底座,所述样品托底座与氮化硼底座固定连接,所述的固定连接的方式为螺纹连接。Further, the bottom of the sample holder base is provided with a boron nitride base, the sample holder base is fixedly connected with the boron nitride base, and the fixed connection is in a threaded connection.

进一步的,所述样品台主体,包括样品放置台、进水口、出水口、固定环,由金属钼材料制成。Further, the main body of the sample stage, including the sample placing stage, the water inlet, the water outlet, and the fixing ring, is made of metal molybdenum material.

进一步的,所述样品保护套、样品托底座由采用高温热稳定性好的氮化硼陶瓷材料制成。Further, the sample protective cover and the sample holder base are made of boron nitride ceramic material with good high temperature thermal stability.

所述的样品保护套主体结构为圆柱体,其保护套内径与样品台主体外径保持一致,壁厚为3mm,在样品放置台处开有10mm*10mm方孔,使被测样品能够暴露在等离子体环境下,而其余部分则被氮化硼陶瓷罩保护起来。The main structure of the sample protective sleeve is a cylinder, the inner diameter of the protective sleeve is consistent with the outer diameter of the main body of the sample stage, the wall thickness is 3mm, and a 10mm*10mm square hole is opened at the sample placement stage, so that the sample to be tested can be exposed to plasma environment, while the rest is protected by a boron nitride ceramic cover.

综合上述技术方案,利用本发明可实现大功率辐照条件下,温度对等离子体材料表面处理的损伤特性行为进行研究。为ITER偏滤器水冷试验提供实验依据。本发明提供的一种在低能大流强(1×1022ions/m2-1×1023ions/m2)辐照条件下,被测样品经水冷处理后具有如下的有益效果:Combining the above technical solutions, the invention can realize the research on the damage characteristic behavior of the surface treatment of the plasma material under the condition of high-power irradiation. Provide experimental basis for the water cooling test of ITER divertor. Under the irradiation condition of low energy and high current intensity (1×10 22 ions/m 2 -1×10 23 ions/m 2 ) provided by the invention, the tested sample has the following beneficial effects after water cooling treatment:

利用水冷样品托能够在低能大流强辐照装置下使得材料表面温度降至1000K以下。能够有效地实现聚变装置实际运行过程中,对第一壁及偏滤器材料实际运行温度下的辐照损伤特性进行研究。W材料因其高温稳定等特点,被认为是目前最有希望发展的偏滤器靶板材料。将被测W样品放置于水冷样品台放置上表面,样品台通入冷却水冷却,利用的辐照装置辐照W样品使得在低温条件下表面结构发生改变,并通过扫描电子显微镜(SEM)及原子力显微镜分析W样品表面结构所产生的形貌变化,并与不加水冷时辐照后的样品进行比较。实验发现,在同样入射离子能量条件下,经过水冷循环处理后样品表面有大面积起泡情况而在相同实验条件下,不加水冷循环处理,当表面温度超过1000K时,样品表面便有明显的纳米丝状结构的产生而与有冷却循环水处理条件对比,其样品表面微观结构是完全不同的,所产生的现象也是从未别报道过的,证明了本发明的创新性。Using a water-cooled sample holder, the surface temperature of the material can be reduced to below 1000K under a low-energy and high-current irradiation device. In the actual operation process of the fusion device, the radiation damage characteristics of the first wall and the divertor material at the actual operating temperature can be effectively studied. Because of its high temperature stability and other characteristics, W material is considered to be the most promising divertor target material at present. The W sample to be tested is placed on the upper surface of the water-cooled sample stage, and the sample stage is cooled by cooling water. Atomic force microscopy was used to analyze the morphological changes produced by the surface structure of the W sample and compared with the irradiated sample without water cooling. The experiment found that under the same incident ion energy conditions, the surface of the sample had large area bubbles after the water-cooling cycle treatment. Under the same experimental conditions, without the water-cooling cycle treatment, when the surface temperature exceeded 1000K, the sample surface had obvious bubbles. Compared with the treatment conditions with cooling circulating water, the generation of nano-filament structure is completely different from the surface microstructure of the sample, and the phenomenon has never been reported before, which proves the innovation of the present invention.

附图说明Description of drawings

图1是辐照样品台主体结构示意图及样品台底座示意图;Fig. 1 is the schematic diagram of the main structure of the irradiation sample stage and the schematic diagram of the base of the sample stage;

图2是样品辐照的SEM图,其中a为水冷样品台辐照处理后样品表面,b为未水冷样品辐照处理后样品表面;Fig. 2 is the SEM image of the sample irradiation, wherein a is the surface of the sample after irradiation treatment of the water-cooled sample stage, and b is the surface of the sample that is not irradiated by the water-cooled sample;

图中:1、进水口,2、出水口,3、样品放置台,4、偏压线接口,5、样品台主体,6、样品托底座,7、进水接口,8、出水接口,9、固定环,10、氮化硼底座,11、样品保护套,12、进水管,13、出水管。In the picture: 1. Water inlet, 2. Water outlet, 3. Sample placing table, 4. Bias line interface, 5. Main body of sample table, 6. Sample holder base, 7. Water inlet port, 8. Water outlet port, 9 , Fixing ring, 10, Boron nitride base, 11, Sample protective sleeve, 12, Inlet pipe, 13, Outlet pipe.

具体实施方式Detailed ways

结合说明书附图对本发明具体实施进一步描述如下。The specific implementation of the present invention is further described as follows with reference to the accompanying drawings.

一种用于辐照冷却装置的水冷样品台,包括样品台主体5,所述样品台主体5的顶部设有样品放置台3,所述样品台主体5的底部设有样品托底座10,所述样品台主体5的外部设有样品保护套11所述样品台主体5的下部设有进水口1、出水口2,所述进水口1位于出水口2的上方,所述样品台主体5的内部设有用于固定进水管的固定环;所述出水口2与偏压接线连接;。A water-cooled sample stage for an irradiation cooling device includes a sample stage main body 5, a sample placing stage 3 is arranged on the top of the sample stage main body 5, and a sample holder base 10 is arranged at the bottom of the sample stage main body 5, so The outside of the sample stage main body 5 is provided with a sample protective cover 11. The lower part of the sample stage main body 5 is provided with a water inlet 1 and a water outlet 2. The water inlet 1 is located above the water outlet 2. The inside is provided with a fixing ring for fixing the water inlet pipe; the water outlet 2 is connected with the bias wiring;

所述的样品台主体5是由高温稳定的金属钼材料制成,即为钼样品台,所述的进水口1是由高温稳定的金属钼材料制成,所述的进水口所述进水口1的一端连接进水管12,另一端与白钢进水接口7连接,通过圆形钼板与样品台主体5下端焊接密封,并通过固定环9将进水口1的出口端固定于样品台主体5的中心位置处,并与上端样品放置台3留有10mm间隙,保证循环水可通过进水管12注入并且喷射在样品放置台3下表面。进水口下端与白钢进水接口7相连,使循环水由样品台主体5下端注入并喷射在样品台上表面,从而达到冷却的效果;The main body 5 of the sample stage is made of a high-temperature stable metal molybdenum material, that is, a molybdenum sample stage, and the water inlet 1 is made of a high-temperature stable metal molybdenum material. One end of 1 is connected to the water inlet pipe 12, and the other end is connected to the white steel water inlet port 7. The circular molybdenum plate is welded and sealed with the lower end of the sample stage main body 5, and the outlet end of the water inlet 1 is fixed to the sample stage main body through the fixing ring 9. 5, and leave a 10mm gap with the upper sample placing table 3 to ensure that the circulating water can be injected through the water inlet pipe 12 and sprayed on the lower surface of the sample placing table 3. The lower end of the water inlet is connected with the white steel water inlet port 7, so that the circulating water is injected from the lower end of the sample stage main body 5 and sprayed on the upper surface of the sample stage, so as to achieve the cooling effect;

所述的出水口2是采用金属钼材料制成,所述出水口2的一端连接出水管12,另一端与白钢出水接口8连接,所述的出水口2的一端与样品台主体5侧方距离上表面80mm开口处焊接,另一端与出水口接口8相连,保证冷却水能够持续稳定流出。The water outlet 2 is made of metal molybdenum material, one end of the water outlet 2 is connected to the water outlet pipe 12, the other end is connected to the white steel water outlet 8, and one end of the water outlet 2 is connected to the side of the main body 5 of the sample stage. It is welded at the opening 80mm away from the upper surface, and the other end is connected to the water outlet interface 8 to ensure that the cooling water can flow out continuously and stably.

所述的样品放置台3放置于样品台主体5上顶部,采用金属钼材料制成,表面经抛光处理,与被测样品相连,保证被测样品下表面与样品托放置台3上表面充分接触,从而提高冷却效率。The sample placing table 3 is placed on the top of the main body 5 of the sample table, and is made of metal molybdenum material. The surface is polished and connected to the sample to be tested to ensure that the lower surface of the sample to be tested is fully in contact with the upper surface of the sample holder placing table 3. , thereby improving the cooling efficiency.

所述的偏压线接口4放置于出水口2的进水端,出水口2通过偏压接线与偏压源相连接,当开启直流负偏压源时,能够吸引离子轰击在样品表面,模拟辐照损伤实验。The bias line interface 4 is placed at the water inlet end of the water outlet 2, and the water outlet 2 is connected to the bias source through a bias wire. When the DC negative bias source is turned on, it can attract ions to bombard the surface of the sample, simulating Radiation damage experiments.

所述的样品保护套11全身采用均有高温热稳定良好的氮化硼陶瓷材料制成,总长度为100mm,直径为30mm,壁厚为3mm。样品保护套11上表面开有10mm*10mm方孔使得被测样品能够完全暴露在等离子体环境中,其余部分则被保护套遮挡住,保护样品台主体5其余部分免受高能粒子轰击,从而造成水冷样品托损害。The whole body of the sample protective cover 11 is made of boron nitride ceramic material with good thermal stability at high temperature, with a total length of 100 mm, a diameter of 30 mm, and a wall thickness of 3 mm. A 10mm*10mm square hole is opened on the upper surface of the sample protective cover 11 so that the sample to be tested can be completely exposed to the plasma environment, and the rest is blocked by the protective cover to protect the rest of the sample stage main body 5 from bombardment by high-energy particles, thereby causing Water-cooled sample holder damage.

所述的样品托底座6由直径60mm的氮化硼陶瓷材料制成,并与水冷样品台主体5下端通过螺纹紧密相连。所述样品托底座6的底部与氮化硼底座10通过螺纹紧密相连。同时确保水冷样品台主体5能够稳定的置于离子源中心位置处,从而保证水冷样品台主体5与真空腔体之间完全绝缘。The sample holder base 6 is made of boron nitride ceramic material with a diameter of 60 mm, and is tightly connected with the lower end of the water-cooled sample stage main body 5 through threads. The bottom of the sample holder base 6 is tightly connected with the boron nitride base 10 through threads. At the same time, it is ensured that the main body 5 of the water-cooled sample stage can be stably placed at the center of the ion source, thereby ensuring complete insulation between the main body 5 of the water-cooled sample stage and the vacuum chamber.

本发明的工作原理为,首先将进水接口7一端与进水口1相连,另一端与白钢进水管12相连接,所述进水管11与水冷循环系统相连。出水接口8一端与出水口2相连另一端与白钢出水管13相连。将样品托底座6与样品主体5下端通过螺纹旋紧连接,并放置于真空腔内部。将被测样品放置于样品放置台3中心处,并将样品保护套11由上至下套在水冷样品台主体5外表面,仅确保被测样品暴露于等离子体区域内。将偏压接口4与样品台主体5相连接。打开水冷循环系统,可通过调节进水量调节冷却效率。开启偏压电源,将产生的高密度等离子体,通过定向吸引最终达到被测样品表面进行辐照实验,通过调节进水压力使温度达到预定的实验条件。The working principle of the present invention is as follows: first, one end of the water inlet port 7 is connected with the water inlet 1, and the other end is connected with the white steel water inlet pipe 12, and the water inlet pipe 11 is connected with the water cooling circulation system. One end of the water outlet 8 is connected to the water outlet 2 and the other end is connected to the white steel water outlet pipe 13 . The sample holder base 6 and the lower end of the sample main body 5 are screwed together and placed in the vacuum chamber. Place the sample to be tested in the center of the sample placing table 3, and cover the sample protective cover 11 on the outer surface of the main body 5 of the water-cooled sample stage from top to bottom, only to ensure that the sample to be tested is exposed to the plasma area. The bias interface 4 is connected to the sample stage main body 5 . Open the water cooling circulation system, and the cooling efficiency can be adjusted by adjusting the water intake. Turn on the bias power supply, and the generated high-density plasma will finally reach the surface of the tested sample through directional attraction for irradiation experiments, and the temperature will reach the predetermined experimental conditions by adjusting the water inlet pressure.

将被测W样品放置于水冷样品台放置上表面,样品台通入冷却水冷却,利用自主研发的辐照装置(公开号CN104157321B)辐照W样品使得在低温条件下表面结构发生改变,并通过扫描电子显微镜(SEM)分析W样品表面结构所产生的形貌变化,并与不加水冷时辐照后的样品进行比较。所述测试条件为入射离子能量条件:50ev,功率5kw,能量流为1×1022ions/m2,水冷循环处理样品的温度为800K,不加水冷循环处理的温度为1300K;实验发现,在同样入射离子能量条件(50ev)下,经过水冷循环处理后样品表面有大面积起泡情况(如图2(a)所示)。而在相同实验条件下,不加水冷循环处理,当表面温度超过1300K时,样品表面便有明显的纳米丝状结构的产生(如图2(b)所示)。而与有冷却循环水处理条件对比,其样品表面微观结构是完全不同的,所产生的现象也是从未别报道过的,证明了本发明的创新性。The W sample to be tested is placed on the upper surface of the water-cooled sample stage, the sample stage is cooled by cooling water, and the W sample is irradiated by the self-developed irradiation device (publication number CN104157321B) to make the surface structure change under low temperature conditions. Scanning electron microscopy (SEM) was used to analyze the topographic changes produced by the surface structure of the W samples and compared with the irradiated samples without water cooling. The test conditions are the incident ion energy conditions: 50ev, power 5kw, energy flow 1×10 22 ions/m 2 , the temperature of the sample treated with water cooling cycle is 800K, and the temperature without water cooling cycle treatment is 1300K; Under the same incident ion energy condition (50ev), there is a large area of bubbles on the surface of the sample after water cooling cycle treatment (as shown in Figure 2(a)). Under the same experimental conditions, without water cooling cycle treatment, when the surface temperature exceeds 1300K, the surface of the sample has obvious nano-filament structure (as shown in Figure 2(b)). Compared with the treatment conditions with cooling circulating water, the microstructure of the sample surface is completely different, and the phenomenon has never been reported before, which proves the innovation of the present invention.

以上所述,仅为本发明较佳的具体实施方式,但本发明的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本发明披露的技术范围内,根据发明的技术方案及其发明构思加以等同替换或改变,都应涵盖在本发明的保护范围之内。The above description is only a preferred embodiment of the present invention, but the protection scope of the present invention is not limited to this. The equivalent replacement or modification of its inventive concept shall be included within the protection scope of the present invention.

Claims (10)

1. An irradiation water-cooling sample platform which is characterized in that: the sample table comprises a sample table main body, wherein a sample placing table is arranged at the top of the sample table main body, a sample support base is arranged at the bottom of the sample table main body, and a sample protective sleeve is arranged outside the sample table main body;
the lower part of the sample table main body is provided with a water inlet and a water outlet, and the water inlet is positioned above the water outlet; a fixing ring is arranged inside the sample table main body;
the water outlet is connected with a bias connection wire.
2. The irradiation water-cooled sample stage according to claim 1, characterized in that: one end of the water inlet is connected with the water inlet pipe, and the other end of the water inlet is connected with the water inlet interface.
3. The irradiation water-cooled sample stage according to claim 1, characterized in that: one end of the water outlet is connected with the water outlet pipe, and the other end of the water outlet is connected with the water outlet interface.
4. The irradiation water-cooled sample stage according to claim 2, characterized in that: the inside of sample platform main part is equipped with the solid fixed ring that is used for the water outlet end of fixed water inlet.
5. The irradiation water-cooled sample stage according to claim 3, wherein: the water inlet pipe is fixed at the center of the sample table main body by the fixing ring.
6. The irradiation water-cooled sample stage according to claim 1, characterized in that: the sample support base is fixedly connected with the sample table main body.
7. The irradiation water-cooled sample stage according to claim 1, characterized in that: the sample placing table is connected with a sample to be measured, and the water outlet end is connected with a bias voltage source through a bias voltage wiring.
8. The irradiation water-cooled sample stage according to claim 1, characterized in that: and a boron nitride base is arranged at the bottom of the sample support base.
9. The irradiation water-cooled sample stage according to claim 1, characterized in that: the sample table main body is made of a metal molybdenum material.
10. The irradiation water-cooled sample stage according to claim 1, characterized in that: the sample protective sleeve and the sample support base are made of boron nitride ceramic materials.
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