CN111254003B - Cooling liquid used in cutting process and preparation method and application thereof - Google Patents
Cooling liquid used in cutting process and preparation method and application thereof Download PDFInfo
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- CN111254003B CN111254003B CN201811458731.5A CN201811458731A CN111254003B CN 111254003 B CN111254003 B CN 111254003B CN 201811458731 A CN201811458731 A CN 201811458731A CN 111254003 B CN111254003 B CN 111254003B
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- cooling liquid
- polyoxyethylene ether
- agent
- emulsifier
- cooling
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- 239000000110 cooling liquid Substances 0.000 title claims abstract description 82
- 238000005520 cutting process Methods 0.000 title claims abstract description 54
- 238000002360 preparation method Methods 0.000 title abstract description 28
- 229920000056 polyoxyethylene ether Polymers 0.000 claims abstract description 86
- 229940051841 polyoxyethylene ether Drugs 0.000 claims abstract description 86
- 239000002518 antifoaming agent Substances 0.000 claims abstract description 27
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 24
- 239000003995 emulsifying agent Substances 0.000 claims abstract description 23
- 239000008367 deionised water Substances 0.000 claims abstract description 19
- 229910021641 deionized water Inorganic materials 0.000 claims abstract description 19
- 239000000314 lubricant Substances 0.000 claims abstract description 17
- 239000002270 dispersing agent Substances 0.000 claims abstract description 15
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 14
- 239000003963 antioxidant agent Substances 0.000 claims abstract description 12
- 230000003078 antioxidant effect Effects 0.000 claims abstract description 8
- 239000002253 acid Substances 0.000 claims abstract description 7
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 claims description 33
- -1 phosphate ester Chemical class 0.000 claims description 30
- XXROGKLTLUQVRX-UHFFFAOYSA-N hydroxymethylethylene Natural products OCC=C XXROGKLTLUQVRX-UHFFFAOYSA-N 0.000 claims description 23
- 239000011259 mixed solution Substances 0.000 claims description 20
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 claims description 15
- 229910003460 diamond Inorganic materials 0.000 claims description 15
- 239000010432 diamond Substances 0.000 claims description 15
- 238000002156 mixing Methods 0.000 claims description 11
- 229910019142 PO4 Inorganic materials 0.000 claims description 10
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 10
- 239000010452 phosphate Substances 0.000 claims description 10
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 9
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 9
- YGSDEFSMJLZEOE-UHFFFAOYSA-N salicylic acid Chemical compound OC(=O)C1=CC=CC=C1O YGSDEFSMJLZEOE-UHFFFAOYSA-N 0.000 claims description 8
- 125000000217 alkyl group Chemical group 0.000 claims description 7
- 229910021419 crystalline silicon Inorganic materials 0.000 claims description 7
- 150000002191 fatty alcohols Chemical class 0.000 claims description 7
- 238000003756 stirring Methods 0.000 claims description 7
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 6
- 239000005711 Benzoic acid Substances 0.000 claims description 5
- 235000010233 benzoic acid Nutrition 0.000 claims description 5
- 235000006408 oxalic acid Nutrition 0.000 claims description 5
- 235000015165 citric acid Nutrition 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 4
- 239000012809 cooling fluid Substances 0.000 claims description 4
- FJKROLUGYXJWQN-UHFFFAOYSA-N papa-hydroxy-benzoic acid Natural products OC(=O)C1=CC=C(O)C=C1 FJKROLUGYXJWQN-UHFFFAOYSA-N 0.000 claims description 4
- 229960004889 salicylic acid Drugs 0.000 claims description 4
- 239000007864 aqueous solution Substances 0.000 claims description 2
- 150000002170 ethers Chemical class 0.000 claims description 2
- 150000004808 allyl alcohols Chemical group 0.000 claims 1
- 238000001816 cooling Methods 0.000 abstract description 14
- 230000000694 effects Effects 0.000 abstract description 13
- 239000007788 liquid Substances 0.000 abstract description 8
- 230000001050 lubricating effect Effects 0.000 abstract description 8
- 238000004140 cleaning Methods 0.000 abstract description 7
- 230000002411 adverse Effects 0.000 abstract description 6
- 229920002545 silicone oil Polymers 0.000 abstract description 6
- 230000001804 emulsifying effect Effects 0.000 abstract description 5
- 238000011031 large-scale manufacturing process Methods 0.000 abstract description 3
- 238000004064 recycling Methods 0.000 abstract 1
- REIUXOLGHVXAEO-UHFFFAOYSA-N pentadecan-1-ol Chemical compound CCCCCCCCCCCCCCCO REIUXOLGHVXAEO-UHFFFAOYSA-N 0.000 description 44
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 19
- 229910052710 silicon Inorganic materials 0.000 description 17
- 239000010703 silicon Substances 0.000 description 17
- 235000012431 wafers Nutrition 0.000 description 17
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 8
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 6
- 230000009286 beneficial effect Effects 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- 239000006260 foam Substances 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- 239000002351 wastewater Substances 0.000 description 6
- 150000003973 alkyl amines Chemical class 0.000 description 5
- 229920001451 polypropylene glycol Polymers 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- KKUKTXOBAWVSHC-UHFFFAOYSA-N Dimethylphosphate Chemical compound COP(O)(=O)OC KKUKTXOBAWVSHC-UHFFFAOYSA-N 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 239000002826 coolant Substances 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- GLDOVTGHNKAZLK-UHFFFAOYSA-N octadecan-1-ol Chemical compound CCCCCCCCCCCCCCCCCCO GLDOVTGHNKAZLK-UHFFFAOYSA-N 0.000 description 4
- 239000003921 oil Substances 0.000 description 4
- 239000011863 silicon-based powder Substances 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- LCGLNKUTAGEVQW-UHFFFAOYSA-N Dimethyl ether Chemical group COC LCGLNKUTAGEVQW-UHFFFAOYSA-N 0.000 description 3
- SNRUBQQJIBEYMU-UHFFFAOYSA-N Dodecane Natural products CCCCCCCCCCCC SNRUBQQJIBEYMU-UHFFFAOYSA-N 0.000 description 3
- 239000002202 Polyethylene glycol Substances 0.000 description 3
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 125000002958 pentadecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 3
- 229920001223 polyethylene glycol Polymers 0.000 description 3
- 229920002503 polyoxyethylene-polyoxypropylene Polymers 0.000 description 3
- 238000011084 recovery Methods 0.000 description 3
- ICLYJLBTOGPLMC-KVVVOXFISA-N (z)-octadec-9-enoate;tris(2-hydroxyethyl)azanium Chemical compound OCCN(CCO)CCO.CCCCCCCC\C=C/CCCCCCCC(O)=O ICLYJLBTOGPLMC-KVVVOXFISA-N 0.000 description 2
- KBPLFHHGFOOTCA-UHFFFAOYSA-N 1-Octanol Chemical compound CCCCCCCCO KBPLFHHGFOOTCA-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000000084 colloidal system Substances 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000005187 foaming Methods 0.000 description 2
- 238000009472 formulation Methods 0.000 description 2
- DCAYPVUWAIABOU-UHFFFAOYSA-N hexadecane Chemical compound CCCCCCCCCCCCCCCC DCAYPVUWAIABOU-UHFFFAOYSA-N 0.000 description 2
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- RZJRJXONCZWCBN-UHFFFAOYSA-N octadecane Chemical compound CCCCCCCCCCCCCCCCCC RZJRJXONCZWCBN-UHFFFAOYSA-N 0.000 description 2
- IACKKVBKKNJZGN-UHFFFAOYSA-N pentacosan-1-ol Chemical compound CCCCCCCCCCCCCCCCCCCCCCCCCO IACKKVBKKNJZGN-UHFFFAOYSA-N 0.000 description 2
- 229920000193 polymethacrylate Polymers 0.000 description 2
- 229920000036 polyvinylpyrrolidone Polymers 0.000 description 2
- 239000001267 polyvinylpyrrolidone Substances 0.000 description 2
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000010865 sewage Substances 0.000 description 2
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229940117013 triethanolamine oleate Drugs 0.000 description 2
- DQWPFSLDHJDLRL-UHFFFAOYSA-N triethyl phosphate Chemical compound CCOP(=O)(OCC)OCC DQWPFSLDHJDLRL-UHFFFAOYSA-N 0.000 description 2
- IFPMZBBHBZQTOV-UHFFFAOYSA-N 1,3,5-trinitro-2-(2,4,6-trinitrophenyl)-4-[2,4,6-trinitro-3-(2,4,6-trinitrophenyl)phenyl]benzene Chemical compound [O-][N+](=O)C1=CC([N+](=O)[O-])=CC([N+]([O-])=O)=C1C1=C([N+]([O-])=O)C=C([N+]([O-])=O)C(C=2C(=C(C=3C(=CC(=CC=3[N+]([O-])=O)[N+]([O-])=O)[N+]([O-])=O)C(=CC=2[N+]([O-])=O)[N+]([O-])=O)[N+]([O-])=O)=C1[N+]([O-])=O IFPMZBBHBZQTOV-UHFFFAOYSA-N 0.000 description 1
- XKFOHTQBONDGNK-UHFFFAOYSA-N 2-butylpentadecan-1-ol Chemical compound C(CCC)C(CO)CCCCCCCCCCCCC XKFOHTQBONDGNK-UHFFFAOYSA-N 0.000 description 1
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 1
- ALLXMZRKQHSMJF-UHFFFAOYSA-N 2-octylpentadecan-1-ol Chemical compound C(CCCCCCC)C(CO)CCCCCCCCCCCCC ALLXMZRKQHSMJF-UHFFFAOYSA-N 0.000 description 1
- GQDOLXMANJPNQT-UHFFFAOYSA-N CCCCCCCCCCCCCCCCCCCCC(CCCCCCCCCCCCC)CO Chemical compound CCCCCCCCCCCCCCCCCCCCC(CCCCCCCCCCCCC)CO GQDOLXMANJPNQT-UHFFFAOYSA-N 0.000 description 1
- AMQJEAYHLZJPGS-UHFFFAOYSA-N N-Pentanol Chemical compound CCCCCO AMQJEAYHLZJPGS-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 239000013556 antirust agent Substances 0.000 description 1
- BTFJIXJJCSYFAL-UHFFFAOYSA-N arachidyl alcohol Natural products CCCCCCCCCCCCCCCCCCCCO BTFJIXJJCSYFAL-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000005536 corrosion prevention Methods 0.000 description 1
- 239000002173 cutting fluid Substances 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 125000001421 myristyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229940038384 octadecane Drugs 0.000 description 1
- 239000003755 preservative agent Substances 0.000 description 1
- 230000002335 preservative effect Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000002562 thickening agent Substances 0.000 description 1
- 125000002889 tridecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000000080 wetting agent Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M173/00—Lubricating compositions containing more than 10% water
- C10M173/02—Lubricating compositions containing more than 10% water not containing mineral or fatty oils
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
- C10M2207/10—Carboxylix acids; Neutral salts thereof
- C10M2207/12—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms
- C10M2207/121—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of seven or less carbon atoms
- C10M2207/124—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of seven or less carbon atoms containing hydroxy groups; Ethers thereof
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
- C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
- C10M2209/104—Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing two carbon atoms only
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
- C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
- C10M2209/108—Polyethers, i.e. containing di- or higher polyoxyalkylene groups etherified
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2223/00—Organic non-macromolecular compounds containing phosphorus as ingredients in lubricant compositions
- C10M2223/02—Organic non-macromolecular compounds containing phosphorus as ingredients in lubricant compositions having no phosphorus-to-carbon bonds
- C10M2223/04—Phosphate esters
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2229/00—Organic macromolecular compounds containing atoms of elements not provided for in groups C10M2205/00, C10M2209/00, C10M2213/00, C10M2217/00, C10M2221/00 or C10M2225/00 as ingredients in lubricant compositions
- C10M2229/04—Siloxanes with specific structure
- C10M2229/041—Siloxanes with specific structure containing aliphatic substituents
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Organic Chemistry (AREA)
- Lubricants (AREA)
Abstract
The invention relates to a cooling liquid used in a cutting process, which comprises the following components in percentage by mass: 60-80% of emulsifier, 10-30% of dispersant, 0.1-5% of lubricant, 0.1-2% of defoaming agent, 0.1-0.5% of antioxidant acid agent and 100% of deionized water; the emulsifier comprises fatty alcohol-polyoxyethylene ether. Through reasonable compatibility of the components, the cooling, lubricating, antirust and cleaning liquid has excellent cooling, lubricating, antirust and cleaning performances, long service life, convenience in recycling, no pollution or low pollution to the environment, low foamability under the condition of ensuring good emulsifying effect and dispersing effect, so that the addition amount of the defoaming agent is reduced, and the adverse effect of silicone oil components in the defoaming agent on cooling liquid is reduced. And the preparation method of the cooling liquid is easy to operate, safe, reliable, low in comprehensive cost and suitable for large-scale production.
Description
Technical Field
The invention belongs to the technical field of machining cooling liquid, and relates to cooling liquid used in a cutting process, a preparation method and application thereof.
Background
Diamond wire cutting crystalline silicon is a novel silicon wafer processing technology developed in recent years. Compared with the sand line cutting, the method has the advantages of obvious cost advantage and mainly shows the aspects of high cutting productivity, small environmental pollution, less saw cut silicon material loss and the like. In the process, the diamond solidified on the bus is used for cutting, pure water is used as a cooling medium, and 1-3% of cooling liquid is added into the pure water and used for cooling saw seams and cleaning and dispersing cut silicon powder.
In order to achieve a good dispersion effect, the cooling liquid for diamond wire cutting is generally large in foam, and needs to be matched with a silicone oil or silicone oil modified foam inhibitor for use, but the silicone oil has obvious defects: the silicon wafer is easy to agglomerate and contaminate the surface of the silicon wafer to cause dirty wafer; the waste water after cutting is easy to be aggregated into sticky colloid; blocking waste water recovery systems and sewage treatment systems, filter membranes of filter presses or ceramic membranes and related pipes, etc.
CN104342273A discloses a cooling liquid for diamond wire cutting polycrystalline silicon wafer, which comprises water and a cooling assistant, and the cooling liquid also comprises an abrasive with hardness greater than that of silicon. When the polycrystalline silicon wafer is cut by the diamond wires, the diamond wires continuously grind and cut the polycrystalline silicon wafer, and the grinding materials in the cooling liquid are driven by the diamond wires moving at a high speed to grind the surface of the polycrystalline silicon wafer, so that a surface damage layer formed on the surface of the silicon wafer by a method similar to the method for performing multi-wire cutting by cutting edge materials is formed on the surface of the polycrystalline silicon wafer, the subsequent texturing of the polycrystalline silicon wafer is facilitated, and the texturing of the polycrystalline silicon wafer can be realized by adopting the conventional texturing process.
CN106590904A discloses a cooling liquid for diamond wire cutting single/polycrystalline silicon rod, which comprises: extreme pressure lubricant, penetrant, dispersant, solubilizer, defoaming agent and the balance of water. The cooling liquid has the following beneficial effects: the added extreme pressure lubricant has excellent extreme pressure lubricating performance, and the substances can be adsorbed on the surface of the diamond wire to form a lubricating film, so that the abrasion between the diamond wire and a silicon rod is reduced, and the adsorption of silicon powder generated by cutting on the surface of the wire can be prevented.
CN107523401A discloses a cooling liquid for cutting silicon wafers by diamond wires and a cutting process for reducing heat productivity, wherein the cooling liquid is prepared by stirring and mixing the following components: the silicon ingot cutting machine comprises a lubricating agent, a heat radiating agent, a defoaming agent, a leveling agent, a thickening agent, a dispersing agent, a surface active anticorrosive agent, an anti-settling agent and water, and in addition, silicon ingot is arranged into a plurality of straight lines for cutting, so that the heating value can be reduced, and the cutting time can be shortened. The cutting fluid has good heat dissipation performance, lubricating performance, anti-rust performance, oil removal cleaning function, anti-corrosion performance and flowing performance, and on the other hand, the cutting process is improved, the heat generated by cutting is reduced, and the cutting precision is improved.
CN103740452B discloses an environment-friendly cooling liquid for diamond wire cutting and a preparation method thereof, aiming at solving the technical problem of preparing the environment-friendly cooling liquid for diamond wire cutting with better cooling and antirust performances. The cooling liquid contains the following components: stabilizer, water-soluble lubricant, extreme pressure agent, antirust agent, preservative, wetting agent, defoaming agent and the balance of deionized water. The cooling liquid has excellent cooling, lubricating, antirust and cleaning performances, is not easy to decay and deteriorate, has long service life, is convenient to recycle, and has no pollution or low pollution to the environment.
Therefore, it is very useful to develop a coolant which has low foaming property while maintaining dispersibility, has excellent lubricity, cleans silicon wafers, reduces edge chipping, and reduces surface damage of the silicon wafers.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a cooling liquid used in a cutting process, and a preparation method and application thereof.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention provides a cooling liquid used in a cutting process, which is characterized by comprising the following components in percentage by mass:
the emulsifier comprises fatty alcohol-polyoxyethylene ether.
The mass percentage of the emulsifier is 60-80%, such as 60%, 62%, 65%, 67%, 70%, 72%, 74%, 76%, 78%, 80% and the like.
The mass percentage of the dispersant is 10-30%, such as 10%, 12%, 15%, 17%, 20%, 22%, 24%, 26%, 28%, 30% and the like.
The mass percentage of the lubricant is 0.1-5%, such as 0.1%, 0.2%, 0.5%, 1%, 2%, 3%, 4%, 5%, etc.
The mass percentage of the defoaming agent is 0.1-2%, such as 0.1%, 0.2%, 0.5%, 0.8%, 1%, 1.5%, 2% and the like.
The antioxidant agent is 0.1-0.5 wt%, such as 0.1%, 0.2%, 0.3%, 0.4%, 0.5%, etc.
The cooling liquid has excellent cooling, lubricating, antirust and cleaning performances through reasonable compatibility of the emulsifier, the lubricant, the dispersant, the defoaming agent, the antioxidant and the deionized water, has long service life, is convenient to recycle, has no pollution or low pollution to the environment, has low foamability under the condition of ensuring good emulsifying effect and dispersing effect, reduces the addition of the defoaming agent, and reduces the adverse effect of silicon oil components in the defoaming agent on the cooling liquid.
Preferably, the fatty alcohol-polyoxyethylene ether is C10-C18 fatty alcohol-polyoxyethylene ether (the C10-C18 are carbon numbers of a fatty alcohol chain of the fatty alcohol-polyoxyethylene ether), such as deca fatty alcohol-polyoxyethylene ether, dodeca fatty alcohol-polyoxyethylene ether, tridecyl fatty alcohol-polyoxyethylene ether, tetradecyl fatty alcohol-polyoxyethylene ether, hexadecane fatty alcohol-polyoxyethylene ether, octadecane fatty alcohol-polyoxyethylene ether, and the like.
Preferably, the fatty alcohol-polyoxyethylene ether is a C8-C15 branched fatty alcohol-polyoxyethylene ether, such as an octaalkyl branched fatty alcohol-polyoxyethylene ether, a decaalkyl branched fatty alcohol-polyoxyethylene ether, a dodecyl branched fatty alcohol-polyoxyethylene ether, a pentadecyl branched fatty alcohol-polyoxyethylene ether, and the like.
Preferably, the fatty alcohol-polyoxyethylene ether is C10-C18 fatty alcohol-polyoxyethylene ether having C8-C15 alkyl branch (the C10-C18 is the carbon number of the fatty alcohol chain of the fatty alcohol-polyoxyethylene ether), such as octadecyl branched ten-carbon fatty alcohol-polyoxyethylene ether, dodecyl branched twelve-carbon fatty alcohol-polyoxyethylene ether, dodecyl branched pentadecyl fatty alcohol-polyoxyethylene ether, pentadecyl branched octadecyl fatty alcohol-polyoxyethylene ether, and the like.
The fatty alcohol-polyoxyethylene ether is used as the emulsifier, so that less foam can be generated under the condition of ensuring the emulsifying effect of the cooling liquid, the addition amount of the defoaming agent is greatly reduced, and the adverse effect of silicone oil components in the defoaming agent on the cooling liquid is weakened. The beneficial effect can be better and remarkable by selecting C10-C18 fatty alcohol polyoxyethylene ether or C8-C15 alkyl branched fatty alcohol polyoxyethylene ether, and the beneficial effect can be further improved by selecting C10-C18 fatty alcohol polyoxyethylene ether with C8-C15 alkyl branched chain as an emulsifier.
In the invention, the content of the fatty alcohol-polyoxyethylene ether in the emulsifier is more than 80% by mass (for example, 81%, 82%, 83%, 85%, 90%, 95%, 100%, etc.), and the emulsifier further comprises alkylphenol polyoxyethylene ether compounds.
In the present invention, the lubricant includes any one or a combination of at least two of phosphate ester, polypropylene glycol, triethyl phosphate, alkylamine polyoxyethylene ether, or alkylamine polyoxyethylene ester, for example, a combination of phosphate ester and polypropylene glycol, a combination of polypropylene glycol and triethyl phosphate, a combination of alkylamine polyoxyethylene ether and alkylamine polyoxyethylene ester, a combination of phosphate ester and polypropylene glycol and alkylamine polyoxyethylene ether, and the like, preferably phosphate ester.
The phosphate ester has good wear resistance, is biodegradable, has little pollution to the environment, has short pollution period, still has good service performance at higher temperature, has good compatibility, can be used by being compounded with various additives, and can more obviously reduce the collapse of crystalline silicon and reduce the damage of the surface of the crystalline silicon by using the phosphate ester as a lubricant.
In the present invention, the dispersant includes any one or a combination of at least two of allyl alcohol polyoxyethylene ether, polyethylene glycol, triethanolamine oleate, polyvinylpyrrolidone, acrylic acid-maleic acid copolymer, ammonium polymethacrylate, or polyoxyethylene polyoxypropylene ether, for example, a combination of allyl alcohol polyoxyethylene ether and polyethylene glycol, a combination of polyethylene glycol and triethanolamine oleate, a combination of polyvinylpyrrolidone and acrylic acid-maleic acid copolymer, a combination of ammonium polymethacrylate and polyoxyethylene polyoxypropylene ether, and allyl alcohol polyoxyethylene ether, and the like, preferably allyl alcohol polyoxyethylene ether.
The addition of the dispersing agent to the cooling liquid can increase the dispersibility and stability of the liquid.
In the present invention, the antioxidant agent includes any one or a combination of at least two of salicylic acid, oxalic acid, benzoic acid, or citric acid, for example, a combination of salicylic acid and oxalic acid, a combination of benzoic acid and citric acid, a combination of oxalic acid and benzoic acid and citric acid, and the like.
The addition of small-molecular acid agents such as salicylic acid, oxalic acid, benzoic acid or citric acid in the cooling liquid not only has the functions of rust prevention and corrosion prevention, but also can adjust the pH value of the cooling liquid, prevent silicon from reacting under alkaline conditions to generate silicate ions and dangerous gas hydrogen, and enable sticky jelly-like substances in the cooling liquid wastewater to be difficult to generate to block a wastewater recovery system.
In the present invention, the defoaming agent includes polyalkylsiloxane-based compounds.
The cooling liquid has low foamability, so that the addition amount of the defoaming agent can be greatly reduced, and the adverse effects of silicon oil components in the defoaming agent on the cooling liquid, such as easy agglomeration and contamination on the surface of a silicon wafer to cause dirty sheets, are reduced; the waste water after cutting is easy to be aggregated into sticky colloid; plugging wastewater recovery systems, sewage treatment systems, filter membranes of filter presses or ceramic membranes and related pipelines, and the like.
Preferably, the polyalkylsiloxane compound is any one or a combination of at least two of polymethylsiloxane, polydimethylsiloxane, polyethylsiloxane or polypropylsiloxane, such as polymethylsiloxane and polydimethylsiloxane, polyethylsiloxane and polypropylsiloxane, and the like.
In another aspect, the present invention provides a method for preparing the cooling fluid as described above, comprising the steps of:
(1) mixing the emulsifier, the dispersant, the lubricant, the defoaming agent and the deionized water according to the formula ratio to obtain a first mixed solution;
(2) dissolving an antioxidant acid agent in deionized water, and stirring to obtain a second mixed solution;
(3) and mixing the first mixed solution and the second mixed solution, and adjusting the pH value to obtain the cooling liquid.
The preparation method of the cooling liquid is easy to operate, safe, reliable, low in comprehensive cost and suitable for large-scale production.
Preferably, the pH is adjusted to 5.5-8.0, e.g., 5.5, 5.6, 5.8, 6.0, 6.2, 6.5, 7.0, 7.5, 8.0, etc.
Preferably, the agent used to adjust the pH is aqueous sodium hydroxide.
In a further aspect, the invention provides the use of a cooling liquid as described above in the field of crystalline silicon cutting, preferably diamond wire cutting.
Compared with the prior art, the invention has the following beneficial effects:
the cooling liquid has excellent cooling, lubricating, antirust and cleaning performances through reasonable compatibility of the emulsifier, the lubricant, the dispersant, the defoaming agent, the antioxidant and the deionized water, has long service life, is convenient to recycle, has no pollution or low pollution to the environment, has low foamability under the condition of ensuring good emulsifying effect and dispersing effect, reduces the addition of the defoaming agent, and reduces the adverse effect of silicon oil components in the defoaming agent on the cooling liquid. The preparation method of the cooling liquid is easy to operate, safe, reliable, low in comprehensive cost and suitable for large-scale production.
Detailed Description
To further illustrate the technical means and effects of the present invention, the following further describes the technical solution of the present invention with reference to the preferred embodiments of the present invention, but the present invention is not limited to the scope of the embodiments.
Example 1
The invention provides a cooling liquid used in a cutting process, which comprises the following components in percentage by mass:
| categories | Name (R) | Mass percentage of |
| Emulsifier | 2-decaalkyl pentadecanol polyoxyethylene ether | 70％ |
| Dispersing agent | Allyl alcohol polyoxyethylene ether | 20％ |
| Lubricant agent | Phosphoric acid dimethyl ester | 0.1％ |
| Defoaming agent | Polydimethylsiloxane | 2％ |
| Antioxidant acid agent | Citric acid | 0.1％ |
| Solvent(s) | Deionized water | 7.8％ |
The preparation method comprises the following steps:
mixing 2-decaalkyl pentadecanol polyoxyethylene ether, allyl alcohol polyoxyethylene ether, dimethyl phosphate, polydimethylsiloxane and deionized water according to the formula ratio to obtain a first mixed solution; dissolving citric acid in deionized water, and stirring to obtain a second mixed solution; and mixing the first mixed solution and the second mixed solution, and adjusting the pH value to 6.5 to obtain the cooling liquid.
Example 2
The invention provides a cooling liquid used in a cutting process, and the formula of the cooling liquid is different from that of the formula in example 1 only in that 2-decaalkyl pentadecanol polyoxyethylene ether is replaced by 2-octyl pentadecanol polyoxyethylene ether, and the rest is kept unchanged.
The preparation method is the same as that of example 1.
Example 3
The invention provides a cooling liquid used in a cutting process, and the formula of the cooling liquid is different from that of the formula in example 1 only in that 2-decaalkyl pentadecanol polyoxyethylene ether is replaced by 2-pentadecaalkyl pentadecanol polyoxyethylene ether, and the rest is kept unchanged.
The preparation method is the same as that of example 1.
Example 4
The invention provides a cooling liquid used in a cutting process, and the formula of the cooling liquid is different from that of the formula in example 1 only in that 2-decaalkyl pentadecanol polyoxyethylene ether is replaced by 2-butyl pentadecanol polyoxyethylene ether, and the rest is kept unchanged.
The preparation method is the same as that of example 1.
Example 5
The invention provides a cooling liquid used in a cutting process, and the formula of the cooling liquid is different from that of the formula in example 1 only in that 2-decaalkyl pentadecanol polyoxyethylene ether is replaced by 2-eicosyl pentadecanol polyoxyethylene ether, and the rest is kept unchanged.
The preparation method is the same as that of example 1.
Example 6
The invention provides a cooling liquid used in a cutting process, and the formula of the cooling liquid is different from that of the formula in example 1 only in that 2-decaalkyl pentadecanol polyoxyethylene ether is replaced by 2-decaalkyl decaethanol polyoxyethylene ether, and the rest is kept unchanged.
The preparation method is the same as that of example 1.
Example 7
The invention provides a cooling liquid used in a cutting process, and the formula of the cooling liquid is different from that of the formula in example 1 only in that 2-decaalkyl pentadecanol polyoxyethylene ether is replaced by 2-decaalkyl octadecanol polyoxyethylene ether, and the rest is kept unchanged.
The preparation method is the same as that of example 1.
Example 8
The invention provides a cooling liquid used in a cutting process, and the formula of the cooling liquid is different from that of the formula in example 1 only in that 2-decaalkyl pentadecanol polyoxyethylene ether is replaced by 2-decaalkyl amyl alcohol polyoxyethylene ether, and the rest is kept unchanged.
The preparation method is the same as that of example 1.
Example 9
The invention provides a cooling liquid used in a cutting process, and the formula of the cooling liquid is different from that of the formula in example 1 only in that 2-decaalkyl pentadecanol polyoxyethylene ether is replaced by 2-decaalkyl pentacosanol polyoxyethylene ether, and the rest is kept unchanged.
The preparation method is the same as that of example 1.
Example 10
The invention provides a cooling liquid used in a cutting process, and the formula of the cooling liquid is different from that of the formula in example 1 only in that 2-decaalkyl pentadecanol polyoxyethylene ether is replaced by pentadecanol polyoxyethylene ether, and the rest is kept unchanged.
The preparation method is the same as that of example 1.
Example 11
The invention provides a cooling liquid used in a cutting process, and the formula of the cooling liquid is different from that of the formula in example 1 only in that 2-decaalkyl pentadecanol polyoxyethylene ether is replaced by decaalcohol polyoxyethylene ether, and the rest is kept unchanged.
The preparation method is the same as that of example 1.
Example 12
The invention provides a cooling liquid used in a cutting process, and the formula of the cooling liquid is different from that of the formula in example 1 only in that 2-decaalkyl pentadecanol polyoxyethylene ether is replaced by octadecanol polyoxyethylene ether, and the rest is kept unchanged.
The preparation method is the same as that of example 1.
Example 13
The invention provides a cooling liquid used in a cutting process, and the formula of the cooling liquid is different from that of the formula in example 1 only in that 2-decaalkyl pentadecanol polyoxyethylene ether is replaced by octanol polyoxyethylene ether, and the rest is kept unchanged.
The preparation method is the same as that of example 1.
Example 14
The invention provides a cooling liquid used in a cutting process, and the formula of the cooling liquid is different from that of the formula in example 1 only in that 2-decaalkyl pentadecanol polyoxyethylene ether is replaced by eicosanol polyoxyethylene ether, and the rest is kept unchanged.
The preparation method is the same as that of example 1.
Example 15
The invention provides a cooling liquid used in a cutting process, and the formula of the cooling liquid is different from that of the formula in example 1 only in that allyl alcohol polyoxyethylene ether is replaced by polyoxyethylene polyoxypropylene ether, and the rest is kept unchanged.
The preparation method is the same as that of example 1.
Example 16
The present invention provides a coolant for use in a cutting process, the formulation of which differs from the formulation of example 1 only in that dimethyl phosphate is replaced with polypropylene glycol, and the remainder remains unchanged.
The preparation method is the same as that of example 1.
Example 17
The invention provides a cooling liquid used in a cutting process, which comprises the following components in percentage by mass:
| categories | Name (R) | Mass percentage of |
| Emulsifier | 2-decaalkyl pentadecanol polyoxyethylene ether | 60％ |
| Dispersing agent | Allyl alcohol polyoxyethylene ether | 30％ |
| Lubricant agent | Phosphoric acid dimethyl ester | 0.1％ |
| Defoaming agent | Polydimethylsiloxane | 0.1％ |
| Antioxidant acid agent | Citric acid | 0.1％ |
| Solvent(s) | Deionized water | 9.7％ |
The preparation method comprises the following steps:
mixing 2-decaalkyl pentadecanol polyoxyethylene ether, allyl alcohol polyoxyethylene ether, dimethyl phosphate, polydimethylsiloxane and deionized water according to the formula ratio to obtain a first mixed solution; dissolving citric acid in deionized water, and stirring to obtain a second mixed solution; and mixing the first mixed solution and the second mixed solution, and adjusting the pH value to 5.5 to obtain the cooling liquid.
Example 18
The invention provides a cooling liquid used in a cutting process, which comprises the following components in percentage by mass:
| categories | Name (R) | Mass percentage of |
| Emulsifier | 2-decaalkyl pentadecanol polyoxyethylene ether | 80％ |
| Dispersing agent | Allyl alcohol polyoxyethylene ether | 10％ |
| Lubricant agent | Phosphoric acid dimethyl ester | 5％ |
| Defoaming agent | Polydimethylsiloxane | 2％ |
| Antioxidant acid agent | Citric acid | 0.5％ |
| Solvent(s) | Deionized water | 2.5％ |
The preparation method comprises the following steps:
mixing 2-decaalkyl pentadecanol polyoxyethylene ether, allyl alcohol polyoxyethylene ether, dimethyl phosphate, polydimethylsiloxane and deionized water according to the formula ratio to obtain a first mixed solution; dissolving citric acid in deionized water, and stirring to obtain a second mixed solution; and mixing the first mixed solution and the second mixed solution, and adjusting the pH value to 8.0 to obtain the cooling liquid.
Comparative example 1
The invention provides a cooling liquid used in a cutting process, and the formula of the cooling liquid is different from that of the formula in example 1 only in that 2-decaalkyl pentadecanol polyoxyethylene ether is replaced by methyl phenol polyoxyethylene ether, and the rest is kept unchanged.
The preparation method is the same as that of example 1.
Example 19
Performance testing
In this example, the evaluation tests of dispersibility, foamability, good cutting yield and smear rate were performed on the coolants obtained in examples 1 to 18 and comparative example 1, respectively, by the following specific methods:
(1) the cooling liquids prepared in examples 1 to 18 and comparative example 1 were used to dissolve silicon powders with a mass fraction of 5%, and after settling for 7 days, the cooling liquids were shaken again for 1min to evaluate the dispersibility and redispersibility of the cooling liquids on the silicon powders; in the evaluation indexes, "good" means that the solution can be dispersed into a homogeneous state again by shaking within 10s, "good" means that the solution can be dispersed into a homogeneous state again by shaking within 10-30s, "bad" means that the solution cannot be effectively dispersed into a homogeneous state even after shaking for more than 30 s;
(2) respectively diluting the cooling liquids prepared in examples 1-18 and comparative example 1 with deionized water to obtain 0.3 mass percent aqueous solution, taking 50mL, stirring for 30s at 40 revolutions per minute by using a foam analyzer, testing the height of foam and defoaming time, and characterizing the foamability;
(3) crystalline silicon was cut on a machine using the cooling liquids prepared in examples 1 to 18 and comparative example 1, respectively, and the cut yield and the smear rate were examined.
The results of the above tests are shown in table 1.
TABLE 1
The data results in table 1 show that:
compared with the comparative example 1, the cooling liquids prepared in the examples 1 to 18 have excellent dispersibility and low foaming property, the defoaming time is shortened to 3-6s, the damage and pollution to silicon wafers can be reduced, the sheet fouling rate is lower than 0.07%, the good product rate is higher than 95.27%, and the theory is presumed as follows: the fatty alcohol-polyoxyethylene ether serving as the emulsifier can only generate less foam under the condition of ensuring the emulsifying and dispersing effects of the cooling liquid, so that the addition amount of the defoaming agent is greatly reduced, and the dirt or other adverse effects caused by silicone oil components in the defoaming agent are weakened; as can be seen from the test data of examples 10-14, the beneficial effects can be further improved by selecting C10-C18 fatty alcohol polyoxyethylene ether as an emulsifier; as can be seen from the test data of examples 1-5, the beneficial effects can be further improved by selecting the C8-C15 alkyl branched fatty alcohol-polyoxyethylene ether as the emulsifier, and the best effect can be achieved by selecting the C10-C18 alkyl polyoxyethylene ether with C8-C15 alkyl branched chain as the emulsifier.
The applicant states that the cooling liquid used in the cutting process of the present invention and the preparation method and use thereof are illustrated by the above examples, but the present invention is not limited to the above examples, i.e. it does not mean that the present invention must be implemented by the above examples. It should be understood by those skilled in the art that any modification of the present invention, equivalent substitutions of the raw materials of the product of the present invention, addition of auxiliary components, selection of specific modes, etc., are within the scope and disclosure of the present invention.
The preferred embodiments of the present invention have been described in detail, however, the present invention is not limited to the specific details of the above embodiments, and various simple modifications may be made to the technical solution of the present invention within the technical idea of the present invention, and these simple modifications are within the protective scope of the present invention.
It should be noted that the various technical features described in the above embodiments can be combined in any suitable manner without contradiction, and the invention is not described in any way for the possible combinations in order to avoid unnecessary repetition.
Claims (9)
1. The cooling liquid used in the cutting process is characterized by comprising the following components in percentage by mass:
60 to 80 percent of emulsifier
10 to 30 percent of dispersant
0.1 to 5 percent of lubricant
0.1 to 2 percent of defoaming agent
Antioxidant agent 0.1-0.5%
Deionized water to 100%;
the emulsifier is C10-C18 fatty alcohol polyoxyethylene ether with C8-C15 alkyl branched chain;
the lubricant is phosphate ester; the dispersing agent is allyl alcohol polyoxyethylene ether;
the antioxidant agent comprises any one or combination of at least two of salicylic acid, oxalic acid, benzoic acid or citric acid.
2. The cooling liquid according to claim 1, wherein the mass percentage of the fatty alcohol-polyoxyethylene ether in the emulsifier is more than 80%, and the emulsifier further comprises alkylphenol polyoxyethylene ether compounds.
3. The cooling fluid of claim 1, wherein the defoaming agent comprises a polyalkylsiloxane-based compound.
4. The cooling fluid according to claim 3, wherein the polyalkylsiloxane compound is any one of polymethylsiloxane, polydimethylsiloxane, polyethylsiloxane or polypropylsiloxane, or a combination of at least two thereof.
5. A method of preparing a cooling fluid according to any one of claims 1 to 4, comprising the steps of:
(1) mixing the emulsifier, the dispersant, the lubricant, the defoaming agent and the deionized water according to the formula ratio to obtain a first mixed solution;
(2) dissolving an antioxidant acid agent in deionized water, and stirring to obtain a second mixed solution;
(3) and mixing the first mixed solution and the second mixed solution, and adjusting the pH value to obtain the cooling liquid.
6. The method of claim 5, wherein the pH is adjusted to 5.5 to 8.0.
7. The method of claim 6, wherein the agent for adjusting the pH is an aqueous solution of sodium hydroxide.
8. Use of the cooling liquid according to any one of claims 1 to 4, wherein the cooling liquid is used in the field of crystalline silicon cutting.
9. Use according to claim 8, wherein the cooling liquid is used in the field of diamond wire cutting of crystalline silicon.
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| CN112680272B (en) * | 2020-12-29 | 2022-08-16 | 江苏奥首材料科技有限公司 | Ceramic material cutting fluid |
| CN112662460A (en) * | 2020-12-29 | 2021-04-16 | 江苏奥首材料科技有限公司 | Wafer cutting fluid containing natural plant extracts |
| CN113583745B (en) * | 2021-07-09 | 2022-08-26 | 煤炭科学技术研究院有限公司 | Compatible concentrated solution for hydraulic support and preparation method thereof |
| CN113736550A (en) * | 2021-09-02 | 2021-12-03 | 江苏捷捷半导体新材料有限公司 | Diamond wire cutting fluid for circulating system of slicing equipment and preparation method of diamond wire cutting fluid |
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