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CN111252558B - Contactless dip angle controllable transportation platform and control method - Google Patents

Contactless dip angle controllable transportation platform and control method Download PDF

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CN111252558B
CN111252558B CN202010085859.2A CN202010085859A CN111252558B CN 111252558 B CN111252558 B CN 111252558B CN 202010085859 A CN202010085859 A CN 202010085859A CN 111252558 B CN111252558 B CN 111252558B
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platform
air
shaft
air flotation
motor
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CN111252558A (en
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钟伟
王荣月
仲飞
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Jiangsu University of Science and Technology
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00Non-mechanical conveyors not otherwise provided for
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00Control devices, e.g. for safety, warning or fault-correcting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2203/00Indexing code relating to control or detection of the articles or the load carriers during conveying
    • B65G2203/04Detection means

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  • Control Of Position Or Direction (AREA)

Abstract

本发明公开了一种无接触倾角可控式输运平台,包括第一台面、第二台面和气浮平台上层板和气浮平台下层板,第一台面上安装有一对第一支撑,在第一支撑上安装有第一转轴和第二轴,第一转轴的一端与第一电机连接,在第一转轴上套有第一圆齿轮,第一圆齿轮与第一扇形齿轮啮合,第一扇形齿轮套在第二轴上,第二轴同时安装在第二支撑上,第二支撑固定在第二台面上;在气浮平台上层板的侧面均匀安装有若干个位置传感器,所述第一电机、第二电机和位置传感器均与控制器信号连接。本发明通过对气浮平台倾角的控制,能够实现快速驱动,同时防止物件滑落;将无接触倾角可控式气浮输运平台搭载于水平导轨滑台或机械臂上,易于实现物件的大范围无接触运输。

Figure 202010085859

The invention discloses a non-contact inclination controllable transport platform, comprising a first table, a second table, an upper plate of an air-floating platform and a lower plate of the air-floating platform, a pair of first supports are installed on the first table, and the first supports A first rotating shaft and a second shaft are installed on it, one end of the first rotating shaft is connected with the first motor, a first circular gear is sleeved on the first rotating shaft, the first circular gear is meshed with the first sector gear, and the first sector gear is sleeved On the second shaft, the second shaft is installed on the second support at the same time, and the second support is fixed on the second table; several position sensors are evenly installed on the side of the upper plate of the air floating platform, the first motor, the second support Both the motor and the position sensor are connected with the controller signal. By controlling the inclination of the air-floating platform, the present invention can realize rapid driving and prevent objects from slipping; the non-contact inclination-controllable air-floating transport platform is mounted on a horizontal guide rail slide or mechanical arm, which is easy to realize a wide range of objects. Contactless transport.

Figure 202010085859

Description

一种无接触倾角可控式输运平台及控制方法A non-contact inclination controllable transport platform and control method

技术领域technical field

本发明涉及无接触倾角可控式输运平台及控制方法,属于轻薄物件的无接触输运领域。The invention relates to a non-contact inclination controllable transportation platform and a control method, and belongs to the field of non-contact transportation of light and thin objects.

背景技术Background technique

随着物流输运行业的快速发展和工业生产过程的要求日益提高,精密制造、精密输送等技术逐渐向着高精度、高洁净和高可靠性的要求的方向发展。新一代产品制造对输运系统提出了更高的要求. 传统的接触式输运定位方式如图1所示(采用皮带、滚轮、橡胶吸盘等方式),容易导致精密物件产生裂纹和刮痕,还容易造成污染。无摩擦非接触的输运方式可以有效的避免这些问题,满足一些特殊应用场合的技术要求。With the rapid development of the logistics transportation industry and the increasing requirements of the industrial production process, technologies such as precision manufacturing and precision transportation are gradually developing towards the requirements of high precision, high cleanliness and high reliability. The new generation of product manufacturing puts forward higher requirements for the transportation system. The traditional contact transportation positioning method as shown in Figure 1 (using belts, rollers, rubber suction cups, etc.) is easy to cause cracks and scratches on precision objects. It is also easy to cause pollution. Frictionless and non-contact transportation can effectively avoid these problems and meet the technical requirements of some special applications.

目前利用气压传动技术实现无接触输运的方法主要有两类,一种是被动驱动式,另一种是主动驱动式。被动驱动式的实现方法是利用空气静压轴承的原理,通过位于物件下方的平台供气使平台与物件之间形成气膜,达到无接触状态,气膜仅提供用于平衡物重的支撑力,再利用其他可动平台(滑台、滚轮等)提供外力驱动物件运动,如图2。被动驱动方式的主要缺点在于无法实现完全无接触,即驱动装置与物件存在接触。较为典型的装置有如中国专利申请“气浮设备”(申请公布号为CN208037535U,申请公布日为:2018年11月2日)、“非接触式传送装置和非接触式传送系统”(申请公布号为CN108698775A,申请公布日为:2018年10月23日)、“一种非接触式气浮平台”(申请公布号为CN108861590A,申请公布日为:2018年11月23日)、“气悬浮式非接触自动输送装置”(申请公布号为CN103171898A,申请公布日为:2013年6月26日)。主动驱动式的实现方法是在物件和输运装置之间利用斜向喷流(原理如图3所示)或是生成水平气流牵引拖曳的方式(原理如图4所示)驱动物件运动,较为典型的装置有如“一种气浮输运装置”(申请公布号为CN104495391A,申请公布日为:2014年11月7日)、“玻璃基板非接触式气浮输运装置”(申请公布号为CN108910534A,申请公布日为:2018年07月05日)。然而,尽管主动驱动的方法可以实现完全无接触,它的缺点在于提供的驱动力偏弱,无法适应一些需要快速运动的场合。此外,这种方式实现大范围传输时还存在平台构建复杂、成本高等问题。At present, there are two main methods of using pneumatic transmission technology to realize non-contact transportation, one is passive driving type, and the other is active driving type. The realization method of passive drive type is to use the principle of aerostatic bearing to form an air film between the platform and the object through the air supply of the platform under the object to achieve a non-contact state, and the air film only provides a supporting force for balancing the weight of the object. , and then use other movable platforms (slides, rollers, etc.) to provide external force to drive the movement of objects, as shown in Figure 2. The main disadvantage of passive driving is that it cannot be completely contactless, that is, the driving device is in contact with the object. The more typical devices are the Chinese patent application "air flotation equipment" (application publication number CN208037535U, application publication date: November 2, 2018), "non-contact transmission device and non-contact transmission system" (application publication number It is CN108698775A, the application publication date is: October 23, 2018), "a non-contact air flotation platform" (application publication number is CN108861590A, the application publication date is: November 23, 2018), "air suspension type" Non-contact automatic conveying device” (application publication number CN103171898A, application publication date: June 26, 2013). The implementation method of active driving is to use the oblique jet between the object and the transport device (the principle is shown in Figure 3) or the method of generating horizontal airflow traction and drag (the principle is shown in Figure 4) to drive the movement of the object. Typical devices are "an air flotation transport device" (application publication number CN104495391A, application publication date: November 7, 2014), "glass substrate non-contact air flotation transport device" (application publication number: CN108910534A, application publication date: July 5, 2018). However, although the active driving method can achieve complete contactless, its disadvantage is that the driving force provided is weak and cannot be adapted to some occasions that require rapid movement. In addition, there are problems of complex platform construction and high cost when realizing large-scale transmission in this way.

发明内容SUMMARY OF THE INVENTION

发明目的:为了克服现有技术中存在的不足,本发明提供一种无接触倾角可控式输运平台及控制方法,通过对气浮平台倾角的控制,能够实现快速驱动,同时防止圆形物件滑落;将无接触倾角可控式气浮输运平台搭载于水平导轨滑台或机械臂上,易于实现圆形物件的大范围无接触运输。Purpose of the invention: In order to overcome the deficiencies in the prior art, the present invention provides a non-contact inclination controllable transport platform and a control method. By controlling the inclination of the air-floating platform, rapid driving can be achieved while preventing round objects Sliding down; the non-contact inclination controllable air-floating transportation platform is mounted on the horizontal rail slide table or mechanical arm, and it is easy to realize the large-scale non-contact transportation of round objects.

技术方案:为解决上述技术问题,本发明的无接触倾角可控式输运平台,包括第一台面、第二台面和气浮平台上层板和气浮平台下层板,第一台面上安装有一对第一支撑,在第一支撑上安装有第一转轴和第二轴,第一转轴的一端与第一电机连接,在第一转轴上套有第一圆齿轮,第一圆齿轮与第一扇形齿轮啮合,第一扇形齿轮套在第二轴上,第二轴同时安装在第二支撑上,第二支撑固定在第二台面上;第二台面上安装有一对第三支撑,在第三支撑上安装有第三转轴和第四轴,第三转轴的一端与第二电机连接,在第三转轴上套有第二圆齿轮,第二圆齿轮与第二扇形齿轮啮合,第二扇形齿轮套在第四轴上,第四轴同时安装在第四支撑上,第四支撑固定在气浮平台下层板上;所述气浮平台上层板上设置多个通孔,通孔在气浮平台上层板上呈对称分布,气浮平台上层板中心的通孔的孔径最小,越靠近气浮平台上层板边缘的孔径越大,在气浮平台上层板的侧面均匀安装有若干个位置传感器,在气浮平台上层板的侧面还设有导气孔,气浮平台下层板设有凹槽和密封槽,用于在两板连接后形成一个空腔;所述第一电机、第二电机和位置传感器均与控制器信号连接。Technical solution: In order to solve the above technical problems, the non-contact inclination controllable transportation platform of the present invention includes a first table, a second table, an upper plate of the air-floating platform and a lower plate of the air-floating platform, and a pair of first table is installed on the first table. Support, a first rotating shaft and a second shaft are installed on the first support, one end of the first rotating shaft is connected with the first motor, a first circular gear is sleeved on the first rotating shaft, and the first circular gear meshes with the first sector gear , the first sector gear is sleeved on the second shaft, the second shaft is simultaneously installed on the second support, the second support is fixed on the second table; a pair of third supports are installed on the second table, and are installed on the third support There are a third rotating shaft and a fourth shaft, one end of the third rotating shaft is connected with the second motor, a second circular gear is sleeved on the third rotating shaft, the second circular gear is meshed with the second sector gear, and the second sector gear is sleeved on the first gear. On the four shafts, the fourth shaft is simultaneously installed on the fourth support, and the fourth support is fixed on the lower board of the air flotation platform; the upper board of the air flotation platform is provided with a plurality of through holes, and the through holes are on the upper board of the air flotation platform Symmetrical distribution, the aperture of the through hole in the center of the upper plate of the air flotation platform is the smallest, and the closer to the edge of the upper plate of the air flotation platform, the larger the aperture, and several position sensors are evenly installed on the side of the upper plate of the air flotation platform. The side of the upper board is also provided with air guide holes, and the lower board of the air flotation platform is provided with grooves and sealing grooves, which are used to form a cavity after the two boards are connected; the first motor, the second motor and the position sensor are all connected with the control signal connection.

作为优选,所述通孔的直径大小为0.5mm~2mm。Preferably, the diameter of the through hole is 0.5mm˜2mm.

作为优选,等直径的通孔离中心孔的距离相等。Preferably, the through holes of equal diameter are at the same distance from the central hole.

一种上述的无接触倾角可控式输运平台的控制方法,包括以下步骤:A control method of the above-mentioned non-contact inclination controllable transport platform, comprising the following steps:

步骤(1),设置初始参数,主要设置的参数包括:判断是否需要控制倾角的临界位移γ;圆形圆形物件的特征尺寸(半径或直径);位置传感器信号读取周期;电机控制信号发送周期;Step (1), set the initial parameters, the main parameters include: judging whether the critical displacement γ of the inclination angle needs to be controlled; the characteristic size (radius or diameter) of the circular object; the reading cycle of the position sensor signal; the transmission of the motor control signal cycle;

步骤(2)控制器连续采集三个周期位置传感器的数据;Step (2) The controller continuously collects the data of the position sensor for three periods;

步骤(3),控制器读取每个位置传感器数据,控制器通过位于X、Y轴上的任意三个位置传感器捕捉圆形物件的实际位置,并将位置信息发送到控制器;Step (3), the controller reads the data of each position sensor, the controller captures the actual position of the circular object through any three position sensors located on the X and Y axes, and sends the position information to the controller;

步骤(4),读取每个位置传感器的数值,确定出圆形物件相对气浮平台的最大位移△Xmax;Step (4), read the value of each position sensor, and determine the maximum displacement △Xmax of the circular object relative to the air floating platform;

进入步骤(5),判断最大位移变化值是否小于临界值,若是,无需控制气浮平台旋转,气浮平台自身能够实现圆形物件对心趋势随气浮平台运动,进入步骤(7);若否,进入步骤(6),Go to step (5), determine whether the maximum displacement change value is less than the critical value, if so, there is no need to control the rotation of the air flotation platform, the air flotation platform itself can realize the movement of the circular object centering trend with the air flotation platform, and go to step (7); No, go to step (6),

步骤(6)确定出圆形物件相对气浮平台的2个次最大位移△Xsubmax,根据三点坐标定位出圆形圆形物件的中心位置,从而确定出圆形物件在X和Y方向上的移动量(Δx和Δy)、移动方向(±X方向或±Y方向)以及圆形物件相对速度和加速度a,由Gsinθx = ma,得出θx,由θyxΔy/Δx确定θy大小,由控制器控制第一电机和第二电机旋转方向和旋转角度;Step (6) Determine the two sub-maximum displacements △Xsubmax of the circular object relative to the air floating platform, locate the center position of the circular circular object according to the three-point coordinates, and determine the circular object in the X and Y directions. The amount of movement (Δx and Δy), the direction of movement (±X direction or ±Y direction), and the relative velocity and acceleration a of the circular object are obtained from Gsinθ x = ma, which gives θ x , which is determined by θ yx Δy/Δx θ y size, the controller controls the rotation direction and rotation angle of the first motor and the second motor;

步骤(7),重复步骤(3),直到圆形物件运输到指定位置。Step (7), repeat step (3) until the round object is transported to the designated position.

有益效果:与现有技术相比,本发明具有以下优点:Beneficial effect: Compared with the prior art, the present invention has the following advantages:

1) 通过在气浮平台表面开设呈辐射状分布的孔径沿径向增大的出气孔,可实现在微小扰动条件下仍使圆形物件悬浮于气浮平台中部。1) By opening radially distributed air outlet holes on the surface of the air flotation platform, the diameter of which increases in the radial direction, the circular object can be suspended in the middle of the air flotation platform under the condition of slight disturbance.

2)通过控制气浮平台的旋转倾角,可实现对悬浮圆形物件的倾斜控制,利用重力的斜向分量作为驱动力,获得较大的运动加速度,使圆形物件能够跟随下方平台做水平移动。2) By controlling the rotation inclination of the air floating platform, the tilt control of the suspended circular object can be realized, and the oblique component of gravity is used as the driving force to obtain a large motion acceleration, so that the circular object can follow the platform below to move horizontally .

3)通过在气浮平台侧面处安装位置传感器检测圆形物件位置变化,作为反馈输入控制器控制平台倾角,能够实现对圆形物件移动状态的精准控制。3) By installing a position sensor on the side of the air flotation platform to detect the position change of the circular object, as a feedback input controller to control the inclination of the platform, the precise control of the movement state of the circular object can be achieved.

附图说明Description of drawings

图1 是接触式滚轮输运装置工作情形示意图;Figure 1 is a schematic diagram of the working situation of the contact roller conveying device;

图2 是一种被动驱动式无接触输运装置工作情形示意图;Figure 2 is a schematic diagram of the working situation of a passively driven contactless transport device;

图3 是斜向喷流主动驱动式输运装置工作原理示意图;Figure 3 is a schematic diagram of the working principle of the oblique jet active-driven transport device;

图4 是水平气流牵引拖曳主动驱动式输运装置工作原理示意图;Figure 4 is a schematic diagram of the working principle of the horizontal airflow traction towing active drive transport device;

图5是本发明的工作原理示意图;Fig. 5 is the working principle schematic diagram of the present invention;

图6是无接触倾角可控式输运平台机械部分的斜侧视图;Fig. 6 is the oblique side view of the mechanical part of the non-contact inclination controllable transport platform;

图7是无接触倾角可控式输运平台机械部分的主视图;Figure 7 is a front view of the mechanical part of the non-contact inclination controllable transport platform;

图8是无接触倾角可控式输运平台机械部分的俯视图;Figure 8 is a top view of the mechanical part of the non-contact inclination controllable transport platform;

图9是气浮平台的俯视图;Figure 9 is a top view of the air flotation platform;

图10是图9的A-A剖视图;Fig. 10 is the A-A sectional view of Fig. 9;

图11是装置整体爆炸图;Figure 11 is an exploded view of the whole device;

图12是无接触倾角可控式输运平台控制原理图;Figure 12 is the control principle diagram of the non-contact inclination controllable transport platform;

图13是无接触倾角可控式输运平台控制方法的程序流程图;Fig. 13 is the program flow chart of the control method of the non-contact inclination controllable transport platform;

图14是无接触倾角可控式输运平台的搭载于二维滑台上的应用示意图。FIG. 14 is a schematic diagram of the application of the non-contact inclination controllable transport platform mounted on the two-dimensional sliding table.

具体实施方式Detailed ways

下面结合附图对本发明作更进一步的说明。The present invention will be further described below in conjunction with the accompanying drawings.

如图1至图14所示,本发明的无接触倾角可控式输运平台,包括第一台面9、第二台面13和气浮平台上层板1和气浮平台下层板3,第一台面9上安装有一对第一支撑,在第一支撑上安装有第一转轴和第二轴12,第一转轴的一端通过联轴器11与第一电机10连接,在第一转轴上套有第一圆齿轮8,第一圆齿轮8与第一扇形齿轮7啮合,第一扇形齿轮7套在第二轴12上,第二轴12同时安装在第二支撑上,第二支撑固定在第二台面13上;第二台面13上安装有一对第三支撑,在第三支撑上安装有第三转轴和第四轴,第三转轴的一端与第二电机连接,在第三转轴上套有第二圆齿轮,第二圆齿轮与第二扇形齿轮啮合,第二扇形齿轮套在第四轴上,第四轴同时安装在第四支撑上,第四支撑固定在气浮平台下层板3上,各个轴通过轴承6安装在对应的支撑上;所述气浮平台上层板1上设置多个通孔,通孔在气浮平台上层板1上呈对称分布,所述通孔的直径大小为0.5mm~2mm,等直径的通孔离中心孔的距离相等,气浮平台上层板1中心的通孔的孔径最小,越靠近气浮平台上层板1边缘的孔径越大,在气浮平台上层板1的侧面均匀安装有若干个位置传感器2,在气浮平台上层板1的侧面还设有导气孔,气浮平台下层板3设有凹槽和密封槽,用于在两板连接后形成一个空腔,气浮平台上层板1与气浮平台下层板3通过密封圈5密封,两层板之间通过螺钉14连接;所述第一电机10、第二电机和位置传感器2均与控制器信号连接。位置传感器2为非接触式(红外、激光等)传感器,检测到圆形物件边缘的3点位置,然后计算出圆形物件的中心,以此获得圆形物件的位置信息。As shown in FIGS. 1 to 14 , the non-contact inclination controllable transport platform of the present invention includes a first table 9 , a second table 13 , an upper deck 1 of an air flotation platform, and a lower deck 3 of the air flotation platform. A pair of first supports are installed, a first shaft and a second shaft 12 are installed on the first supports, one end of the first shaft is connected to the first motor 10 through a coupling 11, and a first circle is sleeved on the first shaft. Gear 8, the first circular gear 8 meshes with the first sector gear 7, the first sector gear 7 is sleeved on the second shaft 12, the second shaft 12 is simultaneously installed on the second support, and the second support is fixed on the second table 13 A pair of third supports are installed on the second table 13, a third shaft and a fourth shaft are installed on the third supports, one end of the third shaft is connected with the second motor, and a second circle is sleeved on the third shaft Gear, the second circular gear meshes with the second sector gear, the second sector gear is sleeved on the fourth shaft, the fourth shaft is simultaneously installed on the fourth support, and the fourth support is fixed on the lower plate 3 of the air-floating platform. The bearing 6 is installed on the corresponding support; the upper plate 1 of the air flotation platform is provided with a plurality of through holes, the through holes are symmetrically distributed on the upper plate 1 of the air flotation platform, and the diameter of the through holes is 0.5mm~ 2mm, the distance between the through holes of equal diameter and the center hole is the same, the hole diameter of the through hole in the center of the upper plate 1 of the air flotation platform is the smallest, and the closer to the edge of the upper plate 1 of the air flotation platform, the larger the hole diameter, and the diameter of the through hole in the upper plate 1 of the air flotation platform is larger. Several position sensors 2 are evenly installed on the side, and there are air guide holes on the side of the upper board 1 of the air flotation platform. The lower board 3 of the air flotation platform is provided with grooves and sealing grooves to form a cavity after the two boards are connected. , the upper board 1 of the air flotation platform and the lower board 3 of the air flotation platform are sealed by the sealing ring 5, and the two boards are connected by screws 14; the first motor 10, the second motor and the position sensor 2 are all connected with the controller signal . The position sensor 2 is a non-contact (infrared, laser, etc.) sensor, which detects the 3-point position of the edge of the circular object, and then calculates the center of the circular object to obtain the position information of the circular object.

一种上述的无接触倾角可控式输运平台的控制方法,包括以下步骤:A control method of the above-mentioned non-contact inclination controllable transport platform, comprising the following steps:

步骤(1),设置初始参数,气浮平台需要建立x轴和y轴,控制电机绕这两轴旋转驱动气浮平台。此外,主要设置的参数还包括:判断是否需要控制倾角的临界位移γ;圆形圆形物件的特征尺寸(半径或直径);位置传感器信号读取周期;电机控制信号发送周期;圆形物件圆心的理论运动轨迹;Step (1), set the initial parameters, the air flotation platform needs to establish x-axis and y-axis, and control the motor to rotate around these two axes to drive the air flotation platform. In addition, the main set parameters also include: the critical displacement γ for judging whether to control the inclination angle; the characteristic size (radius or diameter) of the circular object; the reading cycle of the position sensor signal; the transmission cycle of the motor control signal; the center of the circular object The theoretical trajectory of the motion;

步骤(2)控制器连续采集三个周期位置传感器的数据,控制器从第四个周期的数据开始控制,提高了加速度求解的精度,即提高了控制精度;Step (2) The controller continuously collects the data of the position sensor for three cycles, and the controller starts to control from the data of the fourth cycle, which improves the accuracy of the acceleration solution, that is, the control accuracy is improved;

步骤(3),控制器读取每个位置传感器数据,控制器通过位于X、Y轴上的任意三个位置传感器捕捉圆形物件的实际位置,并将位置信息发送到控制器;Step (3), the controller reads the data of each position sensor, the controller captures the actual position of the circular object through any three position sensors located on the X and Y axes, and sends the position information to the controller;

步骤(4),读取每个位置传感器2的数值,确定出圆形物件相对气浮平台的最大位移△Xmax,△Xmax为相邻两次数据的差值的最大值;Step (4), read the value of each position sensor 2, and determine the maximum displacement △Xmax of the circular object relative to the air floating platform, where △Xmax is the maximum value of the difference between two adjacent data;

进入步骤(5),判断最大位移变化值是否小于临界值,若是,无需控制气浮平台旋转,气浮平台自身能够实现圆形物件对心趋势随气浮平台运动,进入步骤(7);若否,进入步骤(6),Go to step (5), determine whether the maximum displacement change value is less than the critical value, if so, there is no need to control the rotation of the air flotation platform, the air flotation platform itself can realize the movement of the circular object centering trend with the air flotation platform, and go to step (7); No, go to step (6),

步骤(6)确定出圆形物件相对气浮平台的2个次最大位移△Xsubmax,根据三点坐标定位出圆形圆形物件的中心位置,从而确定出圆形物件在X和Y方向上的移动量(Δx和Δy)、移动方向(±X方向或±Y方向)(±X或±Y为圆形物件相对于气浮平台的偏离方向,通过此方法用以确定电机的旋转方向。例如:当圆形物件相对气浮平台产生±X方向偏离量时,应控制电机使气浮平台绕Y轴旋转,当圆形物件相对气浮平台产生±Y方向偏离量时,应控制电机使气浮平台绕X轴旋转)以及圆形物件相对速度和加速度a,由Gsinθx = ma,得出θx,由θyxΔy/Δx确定θy大小,由控制器控制第一电机10和第二电机旋转方向和旋转角度,θx为第一电机的期望角度,θy为第二电机的期望角度,Δx和Δy为圆形物件在X和Y方向上的移动量,得到两个倾角后,控制电机旋转到期望角度;两个期望角度的初始角度均为零度,期望角度指相对初始角度的数值,由于初始角度为零度,期望角度即为计算得到的角度。Step (6) Determine the two sub-maximum displacements △Xsubmax of the circular object relative to the air floating platform, locate the center position of the circular circular object according to the three-point coordinates, and determine the circular object in the X and Y directions. Movement amount (Δx and Δy), movement direction (±X direction or ±Y direction) (±X or ±Y is the deviation direction of the circular object relative to the air floating platform, and this method is used to determine the rotation direction of the motor. For example : When the circular object has a deviation in the ±X direction relative to the air floating platform, the motor should be controlled to make the air floating platform rotate around the Y axis. When the circular object has a deviation in the ±Y direction relative to the air floating platform, the motor should be controlled to make the air The floating platform rotates around the X-axis) and the relative velocity and acceleration a of the circular object. From Gsinθ x = ma, θ x is obtained, the size of θ y is determined by θ yx Δy/Δx, and the first motor 10 is controlled by the controller and the rotation direction and rotation angle of the second motor, θ x is the desired angle of the first motor, θ y is the desired angle of the second motor, Δx and Δy are the amount of movement of the circular object in the X and Y directions, and two After tilting, control the motor to rotate to the desired angle; the initial angles of the two desired angles are both zero degrees, and the desired angle refers to the value relative to the initial angle. Since the initial angle is zero degrees, the desired angle is the calculated angle.

步骤(7),重复步骤(3),直到圆形物件运输到指定位置。Step (7), repeat step (3) until the round object is transported to the designated position.

如图5所示,为本发明装置的工作原理示意图,圆形物件初始状态悬浮于气浮平台表面中心,当下方驱动气浮平台缓慢移动时,由于圆形物件与气浮平台无接触,其中心偏离气浮平台中心。由于气浮平台表面外侧孔径大,外侧孔出气流量大,当圆形物件往外侧移动覆盖了大孔径的气孔时,圆形物件受气压的作用不均匀使圆形物件略微倾斜而出现恢复到中心的运动趋势,外侧孔径逐渐增大的设计方案能够保证圆形物件在受到较小扰动时仍能够自动对心。当下方驱动气浮平台快速移动时,圆形物件偏离气浮平台中心靠近气浮平台边缘,位置传感器2检测到圆形物件位置变化,将此信号反馈给控制器(控制器可以是工控机、PLC、单片机等),控制电机驱动气浮平台产生倾斜,倾斜程度由位置传感器2的反馈信号决定。圆形物件随气浮平台发生倾斜后,其重力分量可提供驱动力,确保圆形物件能够跟随下方驱动气浮平台移动。As shown in Figure 5, which is a schematic diagram of the working principle of the device of the present invention, the circular object is initially suspended in the center of the surface of the air flotation platform. The center is offset from the center of the air flotation platform. Due to the large aperture on the outside of the surface of the air flotation platform and the large air flow out of the outside hole, when the circular object moves to the outside to cover the large-diameter air hole, the circular object is unevenly affected by the air pressure, causing the circular object to tilt slightly and return to the center. The design scheme of gradually increasing the outer aperture can ensure that the circular object can still be automatically centered when it is subjected to minor disturbances. When the air-floating platform is driven below to move rapidly, the circular object deviates from the center of the air-floating platform and approaches the edge of the air-floating platform, and the position sensor 2 detects the position change of the circular object and feeds this signal back to the controller (the controller can be an industrial computer, PLC, single-chip microcomputer, etc.), control the motor to drive the air-floating platform to generate inclination, and the degree of inclination is determined by the feedback signal of the position sensor 2. After the circular object tilts with the air-floating platform, its gravity component can provide the driving force to ensure that the circular object can follow the driving air-floating platform below to move.

如图6至图8所示,所述无接触倾角可控式输运平台装置主要包括气浮平台上层板1、位置传感器2、气浮平台下层板3、进气接头4以及用于驱动气浮平台产生倾斜的气浮平台。气浮平台由结构相同的上下两层组成,分别为上气浮平台和下气浮平台,用于实现2个旋转自由度。下气浮平台由第一电机10带动第一圆齿轮8驱动第一扇形齿轮7带动第一台面9旋转。所述输运平台装置中,位置传感器2安装在气浮平台上层板1侧面。气源通过连接软管与进气接头4相连,位置传感器2的信号输出端口与输入转换模块连接,输入转换模块与数据采集模块连接,数据采集模块与控制器连接。输入转换模块为信号调理电路,可将位置传感器2输出的模拟电流电压信号传输给数据采集模块。数据采集模块为A/D转换电路,用于将位置传感器2输出的模拟量信号转换为数字量信号。控制器可以是工控机,或是单片机、可编程控制器。按照设定的控制算法,最终驱动电机实现气浮平台的倾角变化。As shown in Figures 6 to 8, the non-contact inclination controllable transport platform device mainly includes an upper plate 1 of an air flotation platform, a position sensor 2, a lower plate 3 of the air flotation platform, an air intake joint 4, and a driving air The floating platform produces an inclined air-floating platform. The air flotation platform consists of two upper and lower layers with the same structure, namely the upper air flotation platform and the lower air flotation platform, which are used to realize two rotational degrees of freedom. The lower air floating platform is driven by the first motor 10 to drive the first circular gear 8 to drive the first sector gear 7 to drive the first table 9 to rotate. In the transport platform device, the position sensor 2 is installed on the side of the upper deck 1 of the air-floating platform. The air source is connected with the air inlet joint 4 through the connecting hose, the signal output port of the position sensor 2 is connected with the input conversion module, the input conversion module is connected with the data acquisition module, and the data acquisition module is connected with the controller. The input conversion module is a signal conditioning circuit, which can transmit the analog current and voltage signals output by the position sensor 2 to the data acquisition module. The data acquisition module is an A/D conversion circuit, which is used to convert the analog signal output by the position sensor 2 into a digital signal. The controller can be an industrial computer, or a single-chip computer or a programmable controller. According to the set control algorithm, the final drive motor realizes the change of the inclination of the air floating platform.

如图9和图10所示,气浮平台上层板1表面为光滑平面,开设呈放射状对称分布的通气孔(1-1),气孔孔径由平台内部向外部逐渐增大,直径范围为0.5mm~2mm。气浮平台上层板1侧面开设有螺纹孔,用于连接位置传感器2。图10中,气浮平台下层板3与气浮平台上层板1连接,两者之间通过密封圈密封。气浮平台下层板3内部含凹槽空腔,外侧开设有螺纹孔与凹槽空腔导通,螺纹孔用于安装气接头与气管连接进行供气。As shown in Figure 9 and Figure 10, the surface of the upper plate 1 of the air flotation platform is a smooth plane, and there are radially symmetrical ventilation holes (1-1), and the diameter of the air holes gradually increases from the inside of the platform to the outside, and the diameter range is 0.5mm ~2mm. There are threaded holes on the side of the upper plate 1 of the air flotation platform for connecting the position sensor 2 . In FIG. 10 , the lower board 3 of the air flotation platform is connected with the upper board 1 of the air flotation platform, and the two are sealed by a sealing ring. The lower plate 3 of the air flotation platform has a groove cavity inside, and the outer side is provided with a threaded hole to communicate with the groove cavity.

在图11中,气浮平台由结构相同的上下两层组成,下气浮平台由第一电机10驱动轴转动,轴上安装第一圆齿轮8与第一扇形齿轮7相啮合从而带动第一台面9旋转。In Figure 11, the air-floating platform is composed of upper and lower layers with the same structure. The lower air-floating platform is rotated by the first motor 10 to drive the shaft. The table top 9 rotates.

如图12所示,通过读取位置传感器2的信号,获得最大位移量△Xmax,若最大位移少于γ,表明圆形物件能够在气浮平台自动对心趋势的作用下保持稳定;若最大位移大于γ,则表明需要通过控制气浮平台使气浮平台发生倾斜。此时,通过读取位置传感器2的信号获得至少两个次最大位移△Xsubmax,根据三点坐标定位出圆形圆形物件的中心位置,从而确定出圆形物件在X和Y方向上的移动量(Δx和Δy)、移动方向(±X方向或±Y方向)以及圆形物件相对速度和加速度。由圆形物件移动方向确定气浮平台两轴旋转方向,由圆形物件相对加速度确定x轴旋转倾角。确定x轴旋转倾角的方法是其能产生的重力分量应与造成圆形物件加速度的力大小相等,通过对斜面圆形物件的受力分析关系,即Gsinθx = ma,由此可得x轴旋转倾角θx,进而根据倾角与位移增量之间的比例关系θyxΔy/Δx确定y轴旋转倾角θy,根据轴的旋转方向和角度大小驱动电机进行控制。As shown in Figure 12, by reading the signal of the position sensor 2, the maximum displacement △Xmax is obtained. If the maximum displacement is less than γ, it indicates that the circular object can remain stable under the action of the automatic centering trend of the air floating platform; if the maximum displacement is less than γ If the displacement is greater than γ, it indicates that the air-floating platform needs to be tilted by controlling the air-floating platform. At this time, at least two sub-maximum displacements ΔXsubmax are obtained by reading the signal of the position sensor 2, and the center position of the circular object is located according to the three-point coordinates, thereby determining the movement of the circular object in the X and Y directions. amount (Δx and Δy), direction of movement (±X direction or ±Y direction), and relative velocity and acceleration of circular objects. The two-axis rotation direction of the air-floating platform is determined by the moving direction of the circular object, and the x-axis rotation inclination is determined by the relative acceleration of the circular object. The method to determine the rotational inclination of the x-axis is that the gravity component it can generate should be equal to the force that causes the acceleration of the circular object. By analyzing the force relationship of the inclined circular object, that is, Gsinθ x = ma, the x-axis can be obtained. Rotate the inclination angle θ x , and then determine the y-axis rotation inclination angle θ y according to the proportional relationship between the inclination angle and the displacement increment θ yx Δy/Δx, and drive the motor to control according to the rotation direction and angle of the shaft.

图13所示为无接触倾角可控式输运平台控制程序流程图。程序开始,完成参数和状态初始化设置后,进入步骤2,红外、光栅等位置传感器2捕捉圆形物件的实际位置并通过数据采集模块传入控制系统中。进入步骤3,确定出圆形物件相对气浮平台的最大位移△Xmax。进入步骤4,判断最大位移变化值是否小于临界值,若是,则进入步骤5,无需控制气浮平台旋转,进入步骤6,气浮平台自身能够实现圆形物件对心趋势随气浮平台运动;若否,进入步骤7,确定出圆形物件相对气浮平台的2个次最大位△Xsubmax,进入步骤8和步骤9,由三点定位计算圆形物件相对气浮平台的轨迹趋势和计算圆形物件相对速度。进入步骤10和步骤11,分别由步骤8获得的轨迹趋势计算气浮平台的旋转方向,由步骤9获得的相对气浮平台速度根据圆形物件的重力分量计算气浮平台的旋转角度。而后进入步骤12,控制电机驱动气浮平台运动。在步骤13中,依据位置传感器2的数据判断圆形物件是否与平台同步,若否,返回步骤2重复以上过程;若是,保持平台当前的位姿状态。Figure 13 shows the flow chart of the control program of the non-contact inclination controllable transport platform. The program starts. After completing the parameter and state initialization settings, go to step 2. Position sensors 2 such as infrared and grating capture the actual position of the circular object and transmit it to the control system through the data acquisition module. Go to step 3, and determine the maximum displacement △Xmax of the circular object relative to the air floating platform. Go to step 4, judge whether the maximum displacement change value is less than the critical value, if so, go to step 5, without controlling the rotation of the air flotation platform, go to step 6, the air flotation platform itself can realize the movement of the circular object centering trend with the air flotation platform; If no, go to step 7, determine the 2 sub-maximum positions △Xsubmax of the circular object relative to the air floating platform, go to steps 8 and 9, calculate the trajectory trend of the circular object relative to the air floating platform and calculate the circle from the three-point positioning The relative velocity of the shaped object. Go to step 10 and step 11, respectively calculate the rotation direction of the air flotation platform from the trajectory trend obtained in step 8, and calculate the rotation angle of the air flotation platform according to the gravity component of the circular object from the relative air flotation platform speed obtained in step 9. Then enter step 12, control the motor to drive the air floating platform to move. In step 13, it is judged whether the circular object is synchronized with the platform according to the data of the position sensor 2, if not, return to step 2 to repeat the above process; if so, keep the current pose state of the platform.

图14是将无接触倾角可控式输运平台搭载于二维水平滑台上方的应用案例示意图。通过对气浮平台的倾角控制,能够保证圆形物件随气浮平台移动,从而实现圆形物件的完全无接触大范围运输。Figure 14 is a schematic diagram of an application case where a non-contact inclination controllable transport platform is mounted above a two-dimensional horizontal slide. By controlling the inclination of the air-floating platform, it can ensure that the circular objects move with the air-floating platform, so as to realize the complete non-contact and large-scale transportation of the circular objects.

以上所述仅是本发明的优选实施方式,应当指出:对于本技术领域的普通技术人员来说,在不脱离本发明原理的前提下,还可以做出若干改进和润饰,这些改进和润饰也应视为本发明的保护范围。The above is only the preferred embodiment of the present invention, it should be pointed out that: for those skilled in the art, without departing from the principle of the present invention, several improvements and modifications can also be made, and these improvements and modifications are also It should be regarded as the protection scope of the present invention.

Claims (3)

1.一种无接触倾角可控式输运平台,其特征在于:包括第一台面、第二台面和气浮平台上层板和气浮平台下层板,第一台面上安装有一对第一支撑,在第一支撑上安装有第一转轴和第二轴,第一转轴的一端与第一电机连接,在第一转轴上套有第一圆齿轮,第一圆齿轮与第一扇形齿轮啮合,第一扇形齿轮套在第二轴上,第二轴同时安装在第二支撑上,第二支撑固定在第二台面上;第二台面上安装有一对第三支撑,在第三支撑上安装有第三转轴和第四轴,第三转轴的一端与第二电机连接,在第三转轴上套有第二圆齿轮,第二圆齿轮与第二扇形齿轮啮合,第二扇形齿轮套在第四轴上,第四轴同时安装在第四支撑上,第四支撑固定在气浮平台下层板上;所述气浮平台上层板上设置多个通孔,通孔在气浮平台上层板上呈对称分布,气浮平台上层板中心的通孔的孔径最小,越靠近气浮平台上层板边缘的孔径越大,在气浮平台上层板的侧面均匀安装有若干个位置传感器,在气浮平台上层板的侧面还设有导气孔,气浮平台下层板设有凹槽和密封槽,在气浮平台上层板和气浮平台下层板连接后形成一个空腔;所述第一电机、第二电机和位置传感器均与控制器信号连接。1. a non-contact inclination controllable transport platform is characterized in that: comprise the first table, the second table and the upper deck of the air-floating platform and the lower deck of the air-floating platform, a pair of first supports are installed on the first deck, and a pair of first supports are installed on the first deck. A first rotating shaft and a second shaft are installed on a support, one end of the first rotating shaft is connected with the first motor, a first circular gear is sleeved on the first rotating shaft, the first circular gear meshes with the first sector gear, and the first sector The gear is sleeved on the second shaft, the second shaft is simultaneously installed on the second support, and the second support is fixed on the second table; a pair of third supports are installed on the second table, and a third rotating shaft is installed on the third support and the fourth shaft, one end of the third shaft is connected with the second motor, a second circular gear is sleeved on the third shaft, the second circular gear is meshed with the second sector gear, and the second sector gear is sleeved on the fourth shaft, The fourth shaft is simultaneously installed on the fourth support, and the fourth support is fixed on the lower board of the air flotation platform; the upper board of the air flotation platform is provided with a plurality of through holes, and the through holes are symmetrically distributed on the upper board of the air flotation platform, The diameter of the through hole in the center of the upper plate of the air flotation platform is the smallest, and the closer to the edge of the upper plate of the air flotation platform, the larger the hole diameter. Several position sensors are evenly installed on the side of the upper plate of the air flotation platform. There is also an air guide hole, the lower plate of the air flotation platform is provided with a groove and a sealing groove, and a cavity is formed after the upper plate of the air flotation platform and the lower plate of the air flotation platform are connected; the first motor, the second motor and the position sensor are all Connect to the controller signal. 2.根据权利要求1所述的无接触倾角可控式输运平台,其特征在于:所述通孔的直径大小为0.5mm~2mm。2 . The non-contact inclination controllable transport platform according to claim 1 , wherein the diameter of the through hole is 0.5 mm to 2 mm. 3 . 3.根据权利要求1所述的无接触倾角可控式输运平台,其特征在于:等直径的通孔离中心孔的距离相等。3 . The non-contact inclination controllable transport platform according to claim 1 , wherein the distances between the through holes of equal diameter and the central hole are equal. 4 .
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Publication number Priority date Publication date Assignee Title
CN113314449B (en) * 2021-06-28 2023-09-08 江苏科技大学 A suction-floating non-contact transportation device and control method

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1623219A (en) * 2001-12-27 2005-06-01 考夫乐科学方案有限公司 High-performance non-contact support platforms
CN101081515A (en) * 2006-06-02 2007-12-05 Smc株式会社 Non-contact transport apparatus
CN101431008A (en) * 2007-11-06 2009-05-13 东京毅力科创株式会社 Substrate treatment device, coating device and coating method
CN101759017A (en) * 2009-12-31 2010-06-30 东莞宏威数码机械有限公司 Air-floating baseplate transmission mechanism
JP2011219250A (en) * 2010-04-14 2011-11-04 Oiles Corp Non-contact carrying device
CN202138864U (en) * 2011-06-22 2012-02-08 帆宣系统科技股份有限公司 Air-floating substrate angle positioning structure
CN202657685U (en) * 2011-04-29 2013-01-09 微劲科技股份有限公司 Equipment with air-floating platform
CN205427052U (en) * 2016-03-14 2016-08-03 西安星展测控科技股份有限公司 Antenna far field testing system
CN106125770A (en) * 2016-07-22 2016-11-16 西安电子科技大学 A kind of azimuth pitch moves two axle bed framves
CN108840102A (en) * 2018-06-13 2018-11-20 合肥工业大学 A kind of air-flotation system for being used to convey glass panel with tilting jet mechanism
CN109643648A (en) * 2016-08-29 2019-04-16 株式会社日本制钢所 Laser irradiation device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8834073B2 (en) * 2010-10-29 2014-09-16 Corning Incorporated Transport apparatus having a measuring system and methods therefor

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1623219A (en) * 2001-12-27 2005-06-01 考夫乐科学方案有限公司 High-performance non-contact support platforms
CN101081515A (en) * 2006-06-02 2007-12-05 Smc株式会社 Non-contact transport apparatus
CN101431008A (en) * 2007-11-06 2009-05-13 东京毅力科创株式会社 Substrate treatment device, coating device and coating method
CN101759017A (en) * 2009-12-31 2010-06-30 东莞宏威数码机械有限公司 Air-floating baseplate transmission mechanism
JP2011219250A (en) * 2010-04-14 2011-11-04 Oiles Corp Non-contact carrying device
CN202657685U (en) * 2011-04-29 2013-01-09 微劲科技股份有限公司 Equipment with air-floating platform
CN202138864U (en) * 2011-06-22 2012-02-08 帆宣系统科技股份有限公司 Air-floating substrate angle positioning structure
CN205427052U (en) * 2016-03-14 2016-08-03 西安星展测控科技股份有限公司 Antenna far field testing system
CN106125770A (en) * 2016-07-22 2016-11-16 西安电子科技大学 A kind of azimuth pitch moves two axle bed framves
CN109643648A (en) * 2016-08-29 2019-04-16 株式会社日本制钢所 Laser irradiation device
CN108840102A (en) * 2018-06-13 2018-11-20 合肥工业大学 A kind of air-flotation system for being used to convey glass panel with tilting jet mechanism

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