CN111251260B - An easy-to-maintain rigid-flexible coupling platform structure and its multi-degree-of-freedom motion platform - Google Patents

Abstract

The invention discloses an easy-maintenance rigid-flexible coupling platform structure and a multi-degree-of-freedom motion platform formed by the same, which comprises a working platform, a platform frame, a detection element and a driving element device, wherein the working platform is sleeved in the platform frame through a concave-convex structure and is not contacted with the platform frame, and two end surfaces of the platform frame and the working platform are fixedly connected through at least two groups of flexible hinges; the working platform is connected with the driving force output end of the driving element device; the detection element at least comprises a group of main detection elements for detecting the movement displacement or speed of the working platform; the auxiliary detecting element is used for detecting the deformation amount or the deformation speed of the flexible hinge. When the flexible hinges are replaced, the flexible hinges are replaced group by group without the need of disassembling the working platform entirely, and the original assembly relation can not be damaged when any group of flexible hinges are replaced independently. In addition, the flexible hinges of multiunit can adopt different thickness combinations simultaneous working, realizes many rigidity adjustment, adapts to different load conditions.

Description

An easy-to-maintain rigid-flexible coupling platform structure and its multi-degree-of-freedom motion platform

technical field

The invention relates to a rigid-flexible coupling platform, in particular to an easy-maintenance rigid-flexible coupling platform and a multi-degree-of-freedom motion platform composed thereof.

Background technique

Large-stroke high-precision motion platforms are widely used in semiconductor packaging and other fields. In order to comprehensively take into account the requirements of both large stroke and high precision, the macro-micro composite motion platform is widely used in the design of the above-mentioned large stroke high-precision motion platform. In a typical macro-micro compound motion platform, the flexible hinge can effectively solve the friction dead zone problem, and has the advantage of greatly improving the positioning accuracy without increasing the cost. Therefore, the working platform often adopts a flexible hinge-based design. plan.

The patent No. CN201811524858.2 discloses a rigid-flexible coupling platform and motion platform with intermediate stiffness adjustment, and the patent No. CN201811524858.2 discloses a rigid-flexible coupling platform and motion platform with stiffness adjustment on both sides. The two patents The design of the spring (flexible hinge) in the technical solution is not easy to maintain. To replace the spring, the entire working platform needs to be dismantled and reassembled. If different rigidities need to be adjusted, multiple sets of splints with different gaps need to be prepared to adapt to different The thickness of the spring leaf is complicated to replace.

Contents of the invention

In order to overcome the above-mentioned defects in the prior art, the present invention provides an easy-to-maintain rigid-flexible coupling platform, a control method thereof and a multi-degree-of-freedom motion platform composed of the same. When replacing the flexible hinges, the corresponding set of flexible hinges can be quickly replaced as required without dismantling the entire working platform, and any set of flexible hinges can be replaced independently without destroying the original assembly relationship. In addition, multiple sets of flexible hinges can work simultaneously with different thickness combinations to achieve multiple stiffness adjustments. During adjustment, the stiffness of the flexible hinge can be changed by increasing or decreasing the thickness of the flexible hinge, so that one working platform can adapt to different load situations.

The purpose of the present invention can adopt following technical scheme to reach:

An easy-maintenance rigid-flexible coupling platform, including a working platform, a platform frame, a detection element and a driving element device, the working platform is sleeved in the platform frame, and the working platform is connected to the platform frame through a flexible hinge, and the platform frame passes through The guide mechanism is connected to the base; the working platform is connected to the driving force output end of the driving element device, and the driving element device drives the working platform and transfers the driving force to the platform frame through a flexible hinge so that the working platform and the platform frame as a whole follow the guide The length direction of the mechanism moves; the flexible hinge includes at least two groups of flexible hinges, and the flexible hinges are arranged on the two end faces of the working platform; the detection element includes a first group of detectors and a second group of detectors, and the first A group of detectors is arranged between the working platform and the base to detect the movement displacement or speed of the entire rigid-flexible coupling platform in the X-axis direction; the second group of detectors is arranged between the platform frame and the working platform or the base, To detect the movement displacement or speed of the working platform in the X-axis direction.

As a preferred solution, there is a slit on the side of the platform frame, the flexible hinge is fixed on the slit, and a protrusion is provided on the side of the working platform, and the protrusion extends into the slit and is compatible with the flexible hinge. Hinge fixed connection.

As a preferred solution, the inner bottom surface of the platform frame has an opening, and the power output end of the driving element device is fixedly connected to the bottom surface of the working platform through the opening.

As a preferred solution, the upper end of the cutout is fixedly equipped with a side sealing strip plate, the upper part of the flexible hinge is fixedly connected with the side sealing strip plate through the upper pressing block, and the lower part of the flexible hinge is fixed with the platform frame through the lower pressing block Connection, the middle part of the flexible hinge is fixedly connected with the protrusion of the working platform through the middle pressing block.

As a preferred solution, both the first group of detectors and the second group of detectors include detection heads and scale elements, and the detection heads and scale elements of the first group of detectors are respectively installed between the working platform and the base ; The detection head and the scale element of the second group of detectors are respectively installed between the platform frame and the working platform or the base.

An easy-to-maintain rigid-flexible coupling platform and a multi-degree-of-freedom motion platform composed thereof, the base is installed on the bottom platform through a guide mechanism, the bottom platform includes a frame and a Y-axis driving device installed on the frame, the base is guided through The mechanism is installed on the frame, and the power output end of the Y-axis driving device is connected to the base to drive the base to slide along the Y-axis direction; a third group of detectors is provided on the base and the frame, and the third group of detectors is used for Detect the movement displacement or speed of the base in the Y-axis direction.

As a preferred solution, the third group of detectors includes detection heads and scale elements, and the detection heads and scale elements of the third group of detectors are installed on the base and the frame respectively.

As a preferred solution, the guide mechanism includes a linear guide rail and a slider slidably mounted on the linear guide rail.

As a preferred solution, the bottom end of the platform frame is connected to the slider, and the slider is slidably installed on the linear guide rail, and the linear guide rail is fixedly connected to the base; the bottom end of the base is connected to the slider, and the slider It can be slidably installed on the linear guide rail, and the linear guide rail is fixedly connected to the frame.

As a preferred solution, the drive element device and the Y-axis drive device are linear motors.

Implement the present invention, have following beneficial effect:

1. The flexible hinge of the present invention adopts a multi-group structure arranged on the outer surface of the platform frame. When replacing the flexible hinges, the corresponding set of flexible hinges can be quickly replaced as required without dismantling the entire working platform. The replacement is simple, convenient and fast, and replacing any set of flexible hinges alone will not destroy the original assembly relationship. In addition, multiple sets of flexible hinges can work simultaneously with different thickness combinations to achieve multiple stiffness adjustments. During adjustment, the stiffness of the flexible hinge can be changed by increasing or decreasing the thickness of the flexible hinge, so that one working platform can adapt to different load situations.

2. After the protrusion of the present invention passes through the cutout, it can be connected with the flexible hinge, realize the connection between the working platform and the flexible hinge, ensure that the working platform is suspended in the platform frame, and at the same time, can realize the installation of the flexible hinge to the platform frame It is convenient to replace the flexible hinge without dismantling the whole platform, and the replacement is simple, convenient, fast and flexible.

3. The present invention can respectively detect the displacement or velocity of the entire rigid-flexible coupling platform and the working platform in the X-axis direction through the detection head and the scale element, so as to obtain the displacement or velocity data of each platform in real time, and pass the third group of detection The sensor can detect the displacement or speed of the base, the working platform installed on the base, and the platform frame in the Y-axis direction, and can obtain the displacement or speed data of each platform in the Y-axis direction in real time, thereby realizing precise control of motion compensation .

Description of drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only These are some embodiments of the present invention. Those skilled in the art can also obtain other drawings based on these drawings without creative work.

Figure 1 is a schematic structural diagram of an easy-maintenance rigid-flexible coupling platform.

FIG. 2 is an enlarged view of part A in FIG. 1 .

Figure 3 is an exploded view of Figure 1;

Fig. 4 is a partially enlarged view of part B of Fig. 3;

Figure 5 shows the platform frame structure of the easy-maintenance rigid-flexible coupling platform;

Fig. 6 is a schematic structural diagram of a single-degree-of-freedom easy-to-maintain rigid-flexible coupling platform;

Figure 7 is an exploded view of a single-degree-of-freedom easy-to-maintain rigid-flexible coupling platform;

Fig. 8 is a structural schematic diagram of a two-degree-of-freedom motion platform composed of an easy-to-maintain rigid-flexible coupling platform;

Figure 9 is an exploded view of a two-degree-of-freedom motion platform composed of an easy-to-maintain rigid-flexible coupling platform.

Detailed ways

The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

Example

Referring to Figures 1 to 7, this embodiment relates to an easy-maintenance rigid-flexible coupling platform, including a working platform 1, a platform frame 2, a detection element and a driving element device 3, the working platform 1 is sleeved in the platform frame 2, and works The platform 1 is connected to the platform frame 2 through a flexible hinge 4, and the platform frame 2 is connected to the base 5 through a guide mechanism; the working platform 1 is connected to the driving force output end of the driving element device 3, and the driving element device 3 drives the working platform 1 And the driving force is transferred to the platform frame 2 through the flexible hinge 4 to make the working platform 1 and the platform frame 2 move along the length direction of the guide mechanism as a whole; the flexible hinge 4 includes at least two groups of flexible hinges, and the flexible hinge 4 is set On the two end surfaces of the working platform 1; the inner bottom surface of the platform frame 2 has an opening 21, and the power output end of the driving element device 3 is fixedly connected to the bottom surface of the working platform 1 through the opening 21; the detection The components include a first group of detectors 61 and a second group of detectors, the first group of detectors 61 are arranged on the working platform 1 and the base 5 to detect the movement displacement or speed of the entire rigid-flexible coupling platform in the X-axis direction ; The second group of detectors is set on the working platform 1 and the platform frame 2 to detect the movement displacement or speed of the working platform 1 in the X-axis direction.

Through the first group of detectors 61 and the second group of detectors to detect the displacement or speed of the entire rigid-flexible coupling platform and the working platform 1 in the X-axis direction, the displacement or speed of each platform in the X-axis direction can be obtained in real time data, and then realize the precise control of motion compensation.

The flexible hinge 4 of the present invention adopts a multi-group structure arranged on the outer surface of the platform frame 2 . When replacing the flexible hinges, the corresponding set of flexible hinges can be quickly replaced as required without dismantling the entire working platform 1 . The replacement is simple, convenient and fast, and replacing any set of flexible hinges alone will not destroy the original assembly relationship. In addition, multiple sets of flexible hinges can work simultaneously with different thickness combinations to achieve multiple stiffness adjustments. During adjustment, the stiffness of the flexible hinge can be changed by increasing or decreasing the thickness of the flexible hinge, so that one working platform can adapt to different load situations.

The side of the platform frame 2 has a slit 21, the flexible hinge is fixed on the slit 21, the side of the working platform 1 is provided with a protrusion 11, and the protrusion 11 stretches into the slit 21 and is connected with the flexible hinge. Hinge fixed connection.

After the protrusion 11 passes through the cutout 21, it can be connected with the flexible hinge 4, realize the connection between the working platform 1 and the flexible hinge 4, ensure that the working platform 1 is suspended and set in the platform frame 2, and at the same time realize the installation of the flexible hinge 4 On the platform frame 2, it is convenient to replace the flexible hinge 4 without disassembling the entire platform, and the replacement is simple, convenient, fast and flexible.

The upper end of the cutout 21 is fixedly installed with the edge sealing plate 5, the upper part of the flexible hinge 4 is fixedly connected with the edge sealing plate through the upper pressing block 41, and the lower part of the flexible hinge 4 is fixed with the platform frame 2 through the lower pressing block 43 Connection, the middle part of the flexible hinge 4 is fixedly connected with the protrusion of the working platform 1 through the middle pressing block 42 . When the working platform 1 is installed on the platform frame 2, it is only necessary to insert the protrusion 11 into the cutout 21 from top to bottom, and then install the edge sealing strip plate 5 on the cutout 21 to seal the cutout 21 to prevent The protrusion 11 of the working platform 1 slides out from the cutout 21 . The upper pressing block 41, the middle pressing block 42 and the lower pressing block 43 adopt the same structure, no special structure is required, they can be mass-produced and reused, and the manufacturing cost is saved.

Both the first group of detectors 61 and the second group of detectors 62 include a detection head and a scale element, and the detection head 611 and the scale element 612 of the first group of detectors 61 are installed on the working platform 1 and the base 5 respectively; The detection head 621 and the scale element of the second group of detectors 62 are installed on the working platform 1 and the platform frame 2 respectively. One detection head corresponds to one scale element, forming a group of detectors. The displacement or velocity of the entire rigid-flexible coupling platform and the working platform 1 in the X-axis direction can be detected through the detection head and the scale element, so as to obtain the displacement or velocity data of each platform in real time, and then realize the precise control of motion compensation.

Build the above-mentioned single-degree-of-freedom rigid-flexible coupling platform into a two-degree-of-freedom motion platform composed of an easy-to-maintain rigid-flexible coupling platform, as shown in Figures 6 to 9, the base 5 is installed on the bottom platform 7 through a guiding mechanism , the bottom platform 7 includes a frame 71 and a Y-axis driving device 72 installed on the frame 71, the base 5 is installed on the frame 71 through a guide mechanism, and the power output end of the Y-axis driving device 72 is connected to the base 5 Drive the base 5 to slide along the Y-axis direction; the base 5 and the frame 71 are provided with a third group of detectors 73, and the third group of detectors 73 are used to detect the movement displacement or speed of the base 5 in the Y-axis direction, forming Two degrees of freedom motion platform. The third group of detectors 73 can detect the displacement or speed of the base 5 and the working platform 1 and platform frame 2 installed on the base 5 in the Y-axis direction, and the displacement or speed of each platform in the Y-axis direction can be obtained in real time. Speed data, and then realize the precise control of motion compensation.

The third group of detectors 73 includes a detection head 731 and a scale element 732 , and the detection head 731 and the scale element 732 of the third group of detectors 73 are installed on the base 5 and the frame 71 respectively. The detection head 731 corresponds to the scale element 732 to form a third group of detectors 73 . When working, the displacement or speed of the base 5 and the working platform 1 and platform frame 2 installed on the base 5 in the Y-axis direction can be detected by the detection head 731 and the scale element 732, so as to obtain real-time information on the Y-axis of each platform. The displacement or velocity data in the axial direction can realize the precise control of motion compensation.

The guide mechanism includes a linear guide rail 81 and a slider 82 slidably mounted on the linear guide rail 81 . The bottom end of the platform frame 2 is connected with the slide block 82, the slide block 82 can be slidably installed on the linear guide rail 81, and the linear guide rail 81 is fixedly connected on the base 5, therefore, the platform frame 2 can move along the length direction of the linear guide rail 81 That is, slide in the X-axis direction; the bottom end of the base 5 is connected to the slider 82, the slider 82 is slidably mounted on the linear guide rail 81, the linear guide rail 81 is fixedly connected to the frame 71, the base 5 and the frame mounted on the base 5 The platform frame 2 and the working platform 1 can slide along the length direction of the linear guide rail 81 , that is, the Y-axis direction.

The driving element device 3 and the Y-axis driving device 72 are linear motors. Certainly, the driving element device 3 and the Y-axis driving device 72 can also be composed of servo motors, ball screws and nuts.

The above disclosure is only a preferred embodiment of the present invention, which certainly cannot limit the scope of rights of the present invention. Therefore, equivalent changes made according to the claims of the present invention still fall within the scope of the present invention.

Claims (7)

1. The easy-maintenance rigid-flexible coupling platform is characterized by comprising a working platform, a platform frame, a detection element and a driving element device, wherein the working platform is sleeved in the platform frame through a concave-convex structure and is connected with the platform frame through a flexible hinge, and the platform frame is connected with a base through a guide mechanism; the working platform is connected with a driving force output end of the driving element device, and the driving element device drives the working platform and transfers the driving force to the platform frame through the flexible hinge so that the working platform and the platform frame integrally move along the direction of the guide mechanism; the flexible hinges at least comprise two groups of flexible hinges, and the flexible hinges are arranged on two end faces of the working platform; the detection element comprises a first group of detectors or a first group of detectors and a second group of detectors, wherein the first group of detectors are arranged between the working platform and the base so as to detect the movement displacement or speed of the working platform in the direction of the guide rail; the second group of detectors are arranged between the platform frame and the working platform or the base to detect the deformation amount or the deformation speed of the flexible hinge in the direction of the guide rail;

the flexible hinges adopt a plurality of groups of structures which are arranged on the outer side face of the platform frame, and the plurality of groups of flexible hinges can work simultaneously by adopting different thickness combinations so as to realize multi-rigidity adjustment;

the side surface of the platform frame is provided with a notch, the flexible hinge is fixed on the notch, the side surface of the working platform is provided with a bulge, and the bulge stretches into the notch and is fixedly connected with the flexible hinge;

the upper end of the notch is fixedly provided with a blank holder plate, the upper part of the flexible hinge is fixedly connected with the blank holder plate through an upper pressing block, the lower part of the flexible hinge is fixedly connected with the platform frame through a lower pressing block, and the middle part of the flexible hinge is fixedly connected with the bulge of the working platform through a middle pressing block;

the first group of detectors and the second group of detectors comprise detection heads and scale elements, and the detection heads and the scale elements of the first group of detectors are respectively arranged between the working platform and the base; the detection heads and the scale elements of the second group of detectors are respectively arranged between the platform frame and the working platform or the base.

2. The easy-to-maintain rigid-flexible coupling platform according to claim 1, wherein the inner bottom surface of the platform frame is provided with an opening, and the power output end of the driving element device is fixedly connected with the bottom surface of the working platform through the opening.

3. The multi-degree-of-freedom motion platform based on the easy-to-maintain rigid-flexible coupling platform according to claim 1, wherein the base is mounted on a bottom platform through a guide mechanism, the bottom platform comprises a frame and a Y-axis driving device mounted on the frame, the base is mounted on the frame through the guide mechanism, and a power output end of the Y-axis driving device is connected with the base to drive the base to slide along the Y-axis direction; and a third group of detectors are arranged on the base and the frame and used for detecting the movement displacement or speed of the base in the Y-axis direction.

4. A multiple degree of freedom motion platform comprising a rigid flexible coupling platform for easy maintenance according to claim 3, wherein the third set of detectors comprises a detection head and a scale element, the detection head and the scale element of the third set of detectors being mounted to the base and the frame, respectively.

5. A multiple degree of freedom motion platform comprising a flexible and rigid coupling platform for easy maintenance according to claim 3, wherein the guiding mechanism comprises a linear guide rail and a slider slidably mounted on the linear guide rail.

6. The multi-degree-of-freedom motion platform composed of a rigid-flexible coupling platform easy to maintain according to claim 3, wherein the bottom end of the platform frame is connected with a first sliding block, the first sliding block is slidably mounted on a first linear guide rail, and the first linear guide rail is fixedly connected to the base; the bottom of base is connected with the second slider, and second slider slidable mounting is on second linear guide, and second linear guide fixed connection is on the frame of base platform.

7. A multiple degree of freedom motion platform comprising a rigid flexible coupling platform for easy maintenance according to claim 3, wherein the driving element means and the Y-axis driving means are linear motors.

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