[go: up one dir, main page]

CN111245290B - A single-degree-of-freedom piezoelectric turntable and its excitation method - Google Patents

A single-degree-of-freedom piezoelectric turntable and its excitation method Download PDF

Info

Publication number
CN111245290B
CN111245290B CN202010067202.3A CN202010067202A CN111245290B CN 111245290 B CN111245290 B CN 111245290B CN 202010067202 A CN202010067202 A CN 202010067202A CN 111245290 B CN111245290 B CN 111245290B
Authority
CN
China
Prior art keywords
dimensional piezoelectric
dimensional
axis
piezoelectric
piezoelectric actuators
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202010067202.3A
Other languages
Chinese (zh)
Other versions
CN111245290A (en
Inventor
刘英想
张仕静
邓杰
刘军考
陈维山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Harbin Institute of Technology Shenzhen
Original Assignee
Harbin Institute of Technology Shenzhen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harbin Institute of Technology Shenzhen filed Critical Harbin Institute of Technology Shenzhen
Priority to CN202010067202.3A priority Critical patent/CN111245290B/en
Publication of CN111245290A publication Critical patent/CN111245290A/en
Application granted granted Critical
Publication of CN111245290B publication Critical patent/CN111245290B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12Constructional details
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001Driving devices, e.g. vibrators
    • H02N2/0015Driving devices, e.g. vibrators using only bending modes
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005Mechanical details, e.g. housings
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14Drive circuits; Control arrangements or methods

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

本发明提供了一种单自由度压电转台及其激励方法,属于压电驱动技术领域。单自由度压电转台包括一个环形基座、N个二维压电致动器、一个圆盘动子、2N个轴向固定螺钉、N个轴向压紧块和N个径向紧定螺钉,其中N为大于或等于6的偶数;通过设计施加在N个二维压电致动器的一路激励电压信号,控制其时序和幅值,激励N个二维压电致动器产生沿着圆盘动子外沿切线方向的弯曲运动,利用摩擦力驱动圆盘动子实现单自由度转动;通过调整施加在二维压电致动器上的另一路电压信号幅值,控制二维压电致动器与圆盘动子之间的摩擦力。本发明的单自由度压电转台具有无支承、摩擦力可控、大行程、运动分辨力高的优点,在精密驱动和定位领域有着广阔的应用前景。

Figure 202010067202

The invention provides a single-degree-of-freedom piezoelectric turntable and an excitation method thereof, belonging to the technical field of piezoelectric driving. The single-degree-of-freedom piezoelectric turntable includes an annular base, N two-dimensional piezoelectric actuators, a disc mover, 2N axial fixing screws, N axial compression blocks and N radial set screws , where N is an even number greater than or equal to 6; by designing an excitation voltage signal applied to N two-dimensional piezoelectric actuators, and controlling its timing and amplitude, the N two-dimensional piezoelectric actuators are excited to generate The bending motion of the disc mover along the tangential direction uses friction to drive the disc mover to achieve single-degree-of-freedom rotation; by adjusting the amplitude of another voltage signal applied to the two-dimensional piezoelectric actuator, the two-dimensional pressure is controlled. Friction between the electric actuator and the disc mover. The single-degree-of-freedom piezoelectric turntable of the invention has the advantages of no support, controllable friction force, large stroke and high motion resolution, and has broad application prospects in the fields of precision driving and positioning.

Figure 202010067202

Description

Single-degree-of-freedom piezoelectric turntable and excitation method thereof
Technical Field
The invention belongs to the technical field of piezoelectric driving, and particularly relates to a single-degree-of-freedom piezoelectric turntable and an excitation method thereof.
Background
The piezoelectric driving technology is a precise driving technology which converts electric energy into mechanical energy by utilizing the inverse piezoelectric effect of a piezoelectric material and realizes the motion output of a piezoelectric device by a specific actuating principle, and has the advantages of high motion precision, electromagnetic interference resistance, high response speed, power failure self-locking and the like. In recent years, with the rapid development of the fields of biomedicine, optical engineering and precision machining, the fields of biomedicine, optical engineering and precision machining have made urgent demands on precision rotary motion platforms. In view of the remarkable advantages of high displacement resolution, large stroke, simple structure, power-off self-locking, no electromagnetic interference and the like of the precise rotary motion platform utilizing the piezoelectric driving technology, the precise rotary motion platform has wide application prospects in the field of precise driving and positioning, and therefore, a plurality of scholars at home and abroad carry out extensive research on the precise piezoelectric rotary motion platform.
According to different working principles, the current piezoelectric rotary motion platform mainly comprises a resonant type and a non-resonant type. The resonant piezoelectric rotary motion platform utilizes an excitation voltage signal with ultrasonic frequency to excite the stator to generate ultrasonic vibration, and then drives the rotor to realize rotary motion output through friction coupling; the piezoelectric rotary motion platform has the motion output capacity of large stroke, high speed and large moment, but the piezoelectric rotary motion platform works in a high-frequency state, is accompanied by serious friction, abrasion and heating problems during running, has low motion precision and can only reach the micron order. The non-resonant piezoelectric rotary motion platform mainly realizes motion output by utilizing the alternate change of dynamic friction and static friction between a rotor and a stator, and has lower working frequency; although the output speed and the moment of the piezoelectric rotary platform are lower than those of a resonant piezoelectric rotary motion platform, the piezoelectric rotary motion platform realizes higher motion resolution and positioning accuracy; because the piezoelectric rotary platform works in a low-frequency range, the problem of friction and abrasion is weakened, and the problem of heating caused by high-speed and high-frequency operation is avoided; in a word, the non-resonant piezoelectric rotary motion platform is more suitable for application requirements of high motion precision, good stability and intermittent operation, and gradually becomes a hot spot of current research. For the piezoelectric rotary motion platform, the supporting mode of the mover and the friction force between the mover and the stator are two key factors determining the motion output characteristics of the mover; in order to support the mover and limit the redundant freedom of motion of the mover, the conventional piezoelectric rotary motion platform usually needs to design a support structure to support the mover; in order to ensure that the friction force required by the work is formed between the rotor and the stator, a complex pre-tightening mechanism is often required to be configured so as to adjust the pre-tightening force between the rotor and the stator and further adjust the friction force between the rotor and the stator, so that the stator can stably drive the rotor to realize motion output; however, the pre-tightening mechanism is usually a fixed mechanical device, and it is difficult to adjust the pre-tightening force during operation so as to control the magnitude of the friction force.
Disclosure of Invention
In view of the above, the invention aims to provide a single-degree-of-freedom piezoelectric turntable and an excitation method thereof, and solves the problems that the existing single-degree-of-freedom piezoelectric driving device is complex in supporting and limiting structure, and the friction force is difficult to regulate and control in operation.
In order to achieve the purpose, the technical scheme of the invention is realized as follows:
a single-degree-of-freedom piezoelectric turntable comprises an annular base, N two-dimensional piezoelectric actuators, a disc rotor, 2N axial fixing screws, N axial pressing blocks and N radial fastening screws, wherein N is an even number which is more than or equal to 6; the N two-dimensional piezoelectric actuators are divided into an upper layer and a lower layer which are uniformly distributed on the circumference of the annular base, and the upper layer and the lower layer respectively comprise N/2 two-dimensional piezoelectric actuators; the N two-dimensional piezoelectric actuators have the same structure; each two-dimensional piezoelectric actuator comprises a rectangular base, a piezoelectric element and a driving foot, wherein the rectangular base, the piezoelectric element and the driving foot are fixedly connected in sequence; the annular base comprises an annular base, N rectangular notches and N annular notches, wherein the N rectangular notches and the N annular notches are respectively and uniformly distributed along the circumferential direction of the upper end surface and the circumferential direction of the lower end surface of the annular base, the rectangular notches and the annular notches on each end surface of the annular base are respectively arranged in a one-to-one correspondence mode, the annular notches are formed by removing part of annular bodies from the corresponding end surfaces of the annular base, the rectangular notches are located on the bottom surfaces of the annular notches, and 2 axial threaded holes are formed in the bottom surfaces of the annular; a radial fastening threaded hole is formed in the outer cylindrical surface of the annular base and in the radial direction passing through the center of each rectangular notch; the annular gap, the rectangular gap, the axial threaded hole and the radial fastening threaded hole on the upper end surface and the annular gap, the rectangular gap, the axial threaded hole and the radial fastening threaded hole on the lower end surface are arranged in a mirror image relationship by taking the axial symmetry plane of the annular base as the center; the annular gap is matched with the axial pressing block in structure, and the axial pressing block is embedded into the annular gap and fixedly connected with the annular base through an axial fixing screw; the rectangular base of the two-dimensional piezoelectric actuator has the same shape characteristics with the rectangular notch on the annular base, and the rectangular base is embedded into the rectangular notch; the radial set screw is connected with the annular base through the radial set threaded hole and is in contact with the rectangular base of the two-dimensional piezoelectric actuator, and fine adjustment of the radial distribution position of the two-dimensional piezoelectric actuator along the annular base is realized by adjusting the position of the radial set screw; the outer edge of the disk rotor is provided with an upper conical ring surface and a lower conical ring surface, the driving feet of the upper N/2 two-dimensional piezoelectric actuators are in contact with the upper conical ring surface of the disk rotor, and the driving feet of the lower N/2 two-dimensional piezoelectric actuators are in contact with the lower conical ring surface of the disk rotor.
Further, the disk mover is supported by the N two-dimensional piezoelectric actuators uniformly arranged on the ring-shaped base, and all degrees of freedom of movement of the disk mover except for the rotational movement about its axis are restricted by the contact between the N two-dimensional piezoelectric actuators and the disk mover.
Furthermore, by using a path of voltage signal, the positive pressure between the two-dimensional piezoelectric actuator and the disc rotor is controlled by controlling the bending motion of the N two-dimensional piezoelectric actuators along the axis direction of the disc rotor, and the friction force between the two-dimensional piezoelectric actuator and the disc rotor is further controlled.
Further, each two-dimensional piezoelectric actuator produces independent bending motion along two orthogonal directions.
Furthermore, a threaded hole, a countersunk hole or a through hole is processed on the annular base and used for fixedly connecting the single-degree-of-freedom piezoelectric turntable with other parts.
An excitation method of a single-degree-of-freedom piezoelectric turntable is used for exciting N two-dimensional piezoelectric actuators to realize bending motion along the circumferential tangential direction outside a disc rotor at the same time and driving the disc rotor to realize single-degree-of-freedom rotary motion; namely, the driving disc rotor realizes the counterclockwise or clockwise rotary motion around the Z axis;
the specific process of the driving disc rotor rotating around the Z axis in the anticlockwise direction is as follows:
firstly, slowly-descending excitation voltage signals are applied to piezoelectric elements of N two-dimensional piezoelectric actuators, the N two-dimensional piezoelectric actuators generate slow bending deformation to a negative electrode limit position along a tangential direction anticlockwise around a Z axis, driving feet of the N two-dimensional piezoelectric actuators generate slow micro displacement along the tangential direction anticlockwise around the Z axis, and a disc rotor is driven by static friction force to generate micro angular displacement along the anticlockwise direction around the Z axis;
secondly, applying a rapidly rising excitation voltage signal to the piezoelectric elements of the N two-dimensional piezoelectric actuators, enabling the N two-dimensional piezoelectric actuators to rapidly bend and deform to a positive limit position in the clockwise tangential direction around the Z axis, enabling driving feet of the N two-dimensional piezoelectric actuators to rapidly generate small displacement in the clockwise tangential direction around the Z axis, and enabling the disc rotor to keep static due to inertia;
step three, repeating the step one to the step two to realize the continuous rotary motion of the disc rotor around the Z axis in the anticlockwise direction;
the specific process of the clockwise rotary motion of the driving disc rotor around the Z axis is as follows:
firstly, applying slowly rising excitation voltage signals on piezoelectric elements of N two-dimensional piezoelectric actuators, enabling the N two-dimensional piezoelectric actuators to generate slow bending deformation to a positive limit position along a tangential direction clockwise around a Z axis, enabling driving feet of the N two-dimensional piezoelectric actuators to generate slow micro displacement along the tangential direction clockwise around the Z axis, and driving a disc rotor to generate micro displacement clockwise around the Z axis through static friction force;
secondly, applying a rapidly-descending excitation voltage signal to piezoelectric elements of the N two-dimensional piezoelectric actuators, enabling the N two-dimensional piezoelectric actuators to rapidly bend and deform to a negative limit position along a tangential direction anticlockwise around the Z axis, enabling driving feet of the N two-dimensional piezoelectric actuators to rapidly generate micro displacement along the tangential direction anticlockwise around the Z axis, and enabling the disc rotor to keep static due to inertia;
and step three, repeating the step one to the step two to realize the continuous rotation motion of the disc rotor around the Z axis in the clockwise direction.
Further, the excitation voltage signal required for implementing the method is a periodic, asymmetric sawtooth or trapezoidal waveform, and the rising and falling processes of the excitation voltage signal in each period can be linear or nonlinear, but the duration of the rising and falling processes is not equal.
Compared with the prior art, the single-degree-of-freedom piezoelectric turntable and the excitation method thereof have the following advantages:
the single-degree-of-freedom rotary motion output of the disc rotor can be realized; the disc rotor has large stroke and high resolution motion output capacity; the double-layer configuration of the two-dimensional piezoelectric actuator in the single-degree-of-freedom piezoelectric rotating table and the special outer edge structural design of the disc rotor realize self-supporting and limiting of the disc rotor without adding other auxiliary devices on one hand, and realize regulation of positive pressure between the two-dimensional piezoelectric actuator and the disc rotor during operation on the other hand, thereby realizing regulation and control of friction between the two-dimensional piezoelectric actuator and the disc rotor; the single-degree-of-freedom piezoelectric rotary table disclosed by the invention overcomes the defects that the traditional piezoelectric rotary table is complex in pre-tightening structure and difficult in friction regulation and control; the electric regulation and control of the friction force between the two-dimensional piezoelectric actuator and the disc rotor are realized through electric signals, the mechanical output performance of the disc rotor is hopefully improved, and the application of the disc rotor in ultra-precise rotation driving and positioning is expanded.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate an embodiment of the invention and, together with the description, serve to explain the invention and not to limit the invention. In the drawings:
FIG. 1 is a three-dimensional schematic view of a single degree of freedom piezoelectric turret where N is equal to 6;
FIG. 2 is an exploded view of a single two-dimensional piezoelectric actuator hold-down structure of a single degree of freedom piezoelectric turret where N equals 6;
FIG. 3 is a schematic representation of a single two-dimensional piezoelectric actuator performing forward and reverse bending motions in two orthogonal directions A1 and A2, respectively; wherein, the partial graph (a) represents the positive bending motion of the single two-dimensional piezoelectric actuator along the A2 direction, the partial graph (b) represents the negative bending motion of the single two-dimensional piezoelectric actuator along the A2 direction, the partial graph (c) represents the positive bending motion of the single two-dimensional piezoelectric actuator along the A1 direction, and the partial graph (d) represents the negative bending motion of the single two-dimensional piezoelectric actuator along the A1 direction;
FIG. 4 is a schematic diagram of the motion of a single degree of freedom piezoelectric turntable with a two-dimensional piezoelectric actuator moving slowly and curvedly from a positive pole position to a negative pole position;
FIG. 5 is a schematic diagram of the motion of a single degree of freedom piezoelectric turntable with a two-dimensional piezoelectric actuator simultaneously bending rapidly from a negative limit position to a positive limit position;
FIG. 6 is a schematic diagram of the motion of a single degree of freedom piezoelectric turntable with a two-dimensional piezoelectric actuator moving slowly and curvedly from a negative limit position to a positive limit position;
FIG. 7 is a schematic diagram of the motion of a single degree of freedom piezoelectric turntable with a two-dimensional piezoelectric actuator simultaneously bending rapidly from a positive limit position to a negative limit position;
FIG. 8 is a schematic diagram of an excitation voltage signal of a single degree of freedom piezoelectric rotary stage; wherein, VmaxIs the maximum value of the amplitude of the forward voltage, -VmaxThe amplitude of the negative voltage is the maximum value, T is a period, T is the duration of the slow change of the voltage signal in one period, and T exceeds a half period T/2; a partial graph (a) shows that an excitation voltage signal with the amplitude value decreasing from the large positive value to the large negative value is applied first in one period T, and a partial graph (b) shows that an excitation voltage signal with the amplitude value increasing from the large negative value to the large positive value is applied first in one period T;
FIG. 9 is a schematic diagram of the realization of the pre-load adjustment of a single-degree-of-freedom piezoelectric rotary table, wherein the dotted arrows indicate the bending motion directions of the corresponding two-dimensional piezoelectric actuators.
In the above-mentioned drawings, the coordinate system XYZ is a cartesian space rectangular coordinate system, and the Z axis coincides with the axis of the disk rotor, and the X and Y axes respectively represent two orthogonal directions on the axial symmetry plane of the disk rotor.
Detailed Description
The technical solutions in the embodiments of the present invention are clearly and completely described below with reference to the accompanying drawings, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without any inventive step, are within the scope of the present invention.
Embodiments of the present invention will be described in further detail below with reference to the accompanying drawings.
The first embodiment is as follows: the present embodiment will be described in further detail with reference to fig. 1 and 2 of the specification. The embodiment provides a specific implementation scheme of a single-degree-of-freedom piezoelectric turntable, which comprises an annular base 1, N two-dimensional piezoelectric actuators 2, a disc rotor 3, 2N axial fixing screws 4, N axial pressing blocks 5 and N radial fastening screws 6, wherein N is an even number greater than or equal to 6; the N two-dimensional piezoelectric actuators 2 are divided into an upper layer and a lower layer which are uniformly distributed on the circumference of the annular base 1, and the upper layer and the lower layer respectively comprise N/2 two-dimensional piezoelectric actuators 2; the N two-dimensional piezoelectric actuators 2 have the same structure; each two-dimensional piezoelectric actuator 2 comprises a rectangular base 2-1, a piezoelectric element 2-2 and a driving foot 2-3, wherein the rectangular base 2-1, the piezoelectric element 2-2 and the driving foot 2-3 are fixedly connected in sequence; n rectangular gaps 1-1 and N annular gaps 1-2 are respectively and uniformly distributed along the circumferential direction of the upper end surface and the lower end surface of the annular base 1, the rectangular gaps 1-1 and the annular gaps 1-2 on each end surface of the annular base 1 are uniformly and correspondingly arranged, wherein the annular gaps 1-2 are formed by removing part of annular bodies from the corresponding end surfaces of the annular base 1, the rectangular gaps 1-1 are positioned on the bottom surfaces of the annular gaps 1-2, and 2 axial threaded holes 1-3 are arranged on the bottom surfaces of the annular gaps 1-2; a radial fastening threaded hole 1-4 is formed in the outer cylindrical surface of the annular base 1 in the radial direction passing through the center of each rectangular notch 1-1; the annular gap 1-2, the rectangular gap 1-1, the axial threaded hole 1-3 and the radial fastening threaded hole 1-4 on the upper end surface are arranged in a mirror image relationship with the annular gap 1-2, the rectangular gap 1-1, the axial threaded hole 1-3 and the radial fastening threaded hole 1-4 on the lower end surface by taking the axial symmetry plane of the annular base 1 as the center; the annular gap 1-2 is matched with the axial compression block 5 in structure, and the axial compression block 5 is embedded into the annular gap 1-2 and fixedly connected with the annular base 1 through an axial fixing screw 4; the rectangular base 2-1 of the two-dimensional piezoelectric actuator 2 has the same shape characteristics with the rectangular gap 1-1 on the annular base 1, and the rectangular base 2-1 is embedded into the rectangular gap 1-1; the radial set screw 6 is connected with the annular base 1 through a radial set threaded hole 1-4 and is in contact with the rectangular base 2-1 of the two-dimensional piezoelectric actuator 2, and the fine adjustment of the radial distribution position of the two-dimensional piezoelectric actuator 2 along the annular base 1 is realized by adjusting the position of the radial set screw 6; the outer edge of the disk rotor 3 is provided with an upper conical ring surface 3-1 and a lower conical ring surface 3-2, the driving feet 2-3 of the upper N/2 two-dimensional piezoelectric actuators 2 are in contact with the upper conical ring surface 3-1 of the disk rotor 3, and the driving feet 2-3 of the lower N/2 two-dimensional piezoelectric actuators 2 are in contact with the lower conical ring surface 3-2 of the disk rotor 3; the upper end face and the lower end face of the annular base 1 can be processed with threaded holes, countersunk holes or through holes for connecting the single-degree-of-freedom piezoelectric turntable with other parts.
The second embodiment is as follows: this embodiment will be described in further detail with reference to fig. 3 of the specification. The present embodiment provides a specific embodiment in which a single two-dimensional piezoelectric actuator 2 realizes bending motions in two orthogonal directions a1 and a 2. The two-dimensional bending motion of a single two-dimensional piezoelectric actuator 2 can be realized by applying a single excitation voltage signal to the piezoelectric element 2-2, as shown in fig. 3, so as to realize positive and negative bending motions along the a2 axis: when the amplitude of the excitation voltage signal is positive, the two-dimensional piezoelectric actuator 2 generates a bending motion in the positive direction along the a2 axis, as shown in fig. 3 (a); when the excitation voltage signal amplitude is negative, the two-dimensional piezoelectric actuator 2 generates a bending motion in the negative direction of the a2 axis, as shown in fig. 3 (b). Positive and negative bending movements along the a1 axis can be realized by applying another excitation voltage signal to the piezoelectric element 2-2, respectively, and when the amplitude of the excitation voltage signal is positive, the two-dimensional piezoelectric actuator 2 generates a positive bending movement along the a1 axis, as shown in fig. 3 (c); when the excitation voltage signal amplitude is negative, the two-dimensional piezoelectric actuator 2 generates a bending motion in the negative direction of the a1 axis, as shown in fig. 3 (d). The above-described a1 and a2 axis directions only represent two orthogonal bending motion directions achieved by the two-dimensional piezoelectric actuator 2.
The third concrete implementation mode: this embodiment is described in further detail with reference to fig. 4 to 8 of the specification. The embodiment provides a specific implementation scheme of an excitation method of a single-degree-of-freedom piezoelectric turntable, a Cartesian rectangular coordinate system XYZ is established by taking the center of a disc rotor 3 as a coordinate origin, and the Z axis of the coordinate system is collinear with the axis of the disc rotor 3, so that the excitation method can excite the disc rotor 3 of the single-degree-of-freedom piezoelectric turntable to realize the output of the anticlockwise or clockwise rotary motion around the Z axis; the following description is a case where the number N of the two-dimensional piezoelectric actuators 2 is equal to six.
The specific process of the counterclockwise rotary motion output of the driving disc rotor 3 around the Z axis is as follows:
step one, applying a path of slowly-descending excitation voltage signal on the piezoelectric elements 2-2 of the six two-dimensional piezoelectric actuators 2, corresponding to a period T in one excitation voltage signal period T in the graph (a) of FIG. 8; the six two-dimensional piezoelectric actuators 2 generate slow bending deformation to the position of a negative electrode in the tangential direction anticlockwise around the Z axis, the driving feet 2-3 of the six two-dimensional piezoelectric actuators 2 generate slow micro displacement in the tangential direction anticlockwise around the Z axis, and the disc rotor 3 is driven by static friction force to generate micro angular displacement in the anticlockwise direction around the Z axis, as shown in FIG. 4;
step two, applying a path of excitation voltage signal which rises rapidly on the piezoelectric elements 2-2 of the six two-dimensional piezoelectric actuators 2, corresponding to a T-T period in one excitation voltage signal period T in the graph (a) of FIG. 8; the six two-dimensional piezoelectric actuators 2 generate rapid bending deformation to a positive electrode limit position along a tangential direction clockwise around the Z axis, the driving feet 2-3 of the six two-dimensional piezoelectric actuators 2 generate rapid micro displacement along the tangential direction clockwise around the Z axis, and the disc rotor 3 keeps static due to inertia, as shown in FIG. 5;
in the first step and the second step, the duration of the T period is longer than half of an excitation period T/2 of the excitation voltage signal;
step three, repeating the step one to the step two, namely, repeatedly applying excitation voltage signals of a plurality of periods shown in fig. 8(a) to the six two-dimensional piezoelectric actuators to realize continuous rotary motion output of the disc rotor 3 around the Z axis in the counterclockwise direction;
the specific process of driving the disc rotor 3 to rotate clockwise around the Z axis to output is as follows:
step one, applying a path of slowly rising excitation voltage signal on the piezoelectric elements 2-2 of the six two-dimensional piezoelectric actuators 2, corresponding to a period T in one excitation voltage signal period T in fig. 8 (b); the six two-dimensional piezoelectric actuators 2 generate slow bending deformation to the positive limit position along the clockwise tangential direction around the Z axis, the driving feet 2-3 of the six two-dimensional piezoelectric actuators 2 generate slow micro displacement along the clockwise tangential direction around the Z axis, and the disc rotor 3 is driven by static friction force to generate micro angular displacement along the clockwise tangential direction around the Z axis, as shown in FIG. 6;
step two, applying a path of excitation voltage signal which is rapidly dropped on the piezoelectric elements 2-2 of the six two-dimensional piezoelectric actuators 2, corresponding to a T-T period in one excitation voltage signal period T in the graph (a) of FIG. 8; the six two-dimensional piezoelectric actuators 2 generate rapid bending deformation to a negative electrode limit position along a tangential direction anticlockwise around a Z axis, the driving feet 2-3 of the six two-dimensional piezoelectric actuators 2 generate rapid micro displacement along the tangential direction anticlockwise around the Z axis, and the disc rotor 3 keeps static due to inertia, as shown in FIG. 7;
in the first step and the second step, the duration of the T period is longer than half of an excitation period T/2 of the excitation voltage signal;
and step three, repeating the step one to the step two, namely, repeatedly applying excitation voltage signals of a plurality of cycles shown in fig. 8(b) to the six two-dimensional piezoelectric actuators to realize the continuous rotation motion output of the disc rotor 3 around the Z axis in the clockwise direction.
The fourth concrete implementation mode: this embodiment will be described in further detail with reference to fig. 9 of the specification. The embodiment provides a specific implementation scheme for adjusting the pretightening force of the single-degree-of-freedom piezoelectric turntable by using the voltage signal so as to regulate and control the friction force; the following description is a case where the number N of the two-dimensional piezoelectric actuators 2 is equal to six. The pretightening force of the single-degree-of-freedom piezoelectric turntable refers to positive pressure between six two-dimensional piezoelectric actuators 2 of the single-degree-of-freedom piezoelectric turntable and a disc rotor 3; the positive pressure determines the sliding friction force between the two-dimensional piezoelectric actuator 2 and the disk rotor 3, and the sliding friction force between the two-dimensional piezoelectric actuator 2 and the disk rotor 3 is in a direct proportional relation with the positive pressure between the two; voltage signals with positive and negative amplitudes are respectively applied to an upper three-dimensional piezoelectric actuator 2 and a lower three-dimensional piezoelectric actuator 2 of the single-degree-of-freedom piezoelectric turntable, the upper three-dimensional piezoelectric actuator 2 generates bending motion along the negative direction of the Z axis, the lower three-dimensional piezoelectric actuator 2 generates bending motion along the positive direction of the Z axis, and the direction of the bending motion of the two-dimensional piezoelectric actuator 2 along the Z axis is shown by a dotted arrow in FIG. 9; because the two-dimensional piezoelectric actuator 2 belongs to an elastic body, when the two-dimensional piezoelectric actuator 2 on the upper layer and the two-dimensional piezoelectric actuator 2 on the lower layer respectively generate slight bending motion along the negative direction of the Z axis and the positive direction of the Z axis, the driving feet 2-3 of the two-dimensional piezoelectric actuator 2 are always kept in contact with the upper conical ring surface 3-1 and the lower conical ring surface 3-2 of the disk rotor 3; the positive pressure between the six two-dimensional piezoelectric actuators 2 and the disc rotor 3 is adjusted to be large or small by increasing or decreasing the amplitude of the used voltage signal; because the friction force between the six two-dimensional piezoelectric actuators 2 and the disc rotor 3 is in direct proportion to the positive pressure, the magnitude regulation and control of the friction force are realized by using voltage signals.
The invention provides a piezoelectric turntable with single degree of freedom, which realizes the unification of supporting and driving parts and avoids the use of other supporting and limiting mechanisms by designing the configuration relation of a plurality of two-dimensional piezoelectric actuators and the structure of a disk rotor; on the other hand, the friction force of the piezoelectric rotating platform can be electrically adjusted in the running process; the defects that the friction force between the rotor and the stator is difficult to regulate and control due to the complex structure and uncontrollable pretightening force in operation of the traditional piezoelectric turntable are overcome; the excitation method of the single-degree-of-freedom piezoelectric turntable is provided, a plurality of two-dimensional piezoelectric actuators of the single-degree-of-freedom piezoelectric turntable are excited by periodic excitation signals to generate bending motion, tiny displacement along a specific direction is formed on a driving foot, and a rotor is driven to continuously rotate by using friction force. In summary, the single-degree-of-freedom piezoelectric turntable provided by the invention realizes the self-supporting and limiting of the rotor and the electric regulation and control of the friction force in operation, and has the characteristics of large stroke, no heating, high motion resolution and the like, and the characteristics can powerfully support the application of the single-degree-of-freedom piezoelectric turntable in ultra-precise driving and positioning engineering.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.

Claims (7)

1.一种单自由度压电转台,其特征在于:包括一个环形基座(1)、N个二维压电致动器(2)、一个圆盘动子(3)、2N个轴向固定螺钉(4)、N个轴向压紧块(5)、N个径向紧定螺钉(6),其中N为大于或等于6的偶数;N个二维压电致动器(2)分为上、下两层均布在环形基座(1)的圆周上,上下两层各包括N/2个二维压电致动器(2);所述N个二维压电致动器(2)的结构相同;所述每个二维压电致动器(2)包括矩形基座(2-1)、压电元件(2-2)和驱动足(2-3),矩形基座(2-1)、压电元件(2-2)和驱动足(2-3)依次固定联接;分别沿所述环形基座(1)上、下两个端面的圆周方向各均匀分布N个矩形缺口(1-1)和N个环形缺口(1-2),且环形基座(1)每个端面上的矩形缺口(1-1)和环形缺口(1-2)均一一对应设置,其中环形缺口(1-2)为从环形基座(1)的相应端面去除部分环形体后形成,矩形缺口(1-1)位于环形缺口(1-2)的底面上,在每个环形缺口(1-2)的底面上设有2个轴向螺纹孔(1-3);在环形基座(1)外圆柱面上且过每个矩形缺口(1-1)中心的径向方向上,设有一个径向紧定螺纹孔(1-4);上端面的所述环形缺口(1-2)、矩形缺口(1-1)、轴向螺纹孔(1-3)和径向紧定螺纹孔(1-4)与下端面的所述环形缺口(1-2)、矩形缺口(1-1)、轴向螺纹孔(1-3)和径向紧定螺纹孔(1-4)以环形基座(1)的轴向对称面为中心呈镜像关系布置;所述环形缺口(1-2)与轴向压紧块(5)的结构相适应,且轴向压紧块(5)嵌入环形缺口(1-2)中,通过轴向固定螺钉(4)与环形基座(1)固定联接;二维压电致动器(2)的矩形基座(2-1)与环形基座(1)上的矩形缺口(1-1)形状特征相同,矩形基座(2-1)嵌入矩形缺口(1-1)中;径向紧定螺钉(6)通过径向紧定螺纹孔(1-4)与环形基座(1)相连,且与二维压电致动器(2)的矩形基座(2-1)相接触,通过调整径向紧定螺钉(6)的位置,实现二维压电致动器(2)沿环形基座(1)的径向分布位置的微调;所述圆盘动子(3)外沿设置上锥形环面(3-1)和下锥形环面(3-2),上层N/2个二维压电致动器(2)的驱动足(2-3)与圆盘动子(3)的上锥形环面(3-1)相接触,而下层N/2个二维压电致动器(2)的驱动足(2-3)与圆盘动子(3)的下锥形环面(3-2)相接触。1. a single degree of freedom piezoelectric turntable, is characterized in that: comprise an annular base (1), N two-dimensional piezoelectric actuators (2), a disc mover (3), 2N axial Fixing screws (4), N axial compression blocks (5), and N radial set screws (6), where N is an even number greater than or equal to 6; N two-dimensional piezoelectric actuators (2) It is divided into upper and lower layers and are evenly distributed on the circumference of the annular base (1), and each of the upper and lower layers includes N/2 two-dimensional piezoelectric actuators (2); the N two-dimensional piezoelectric actuators The structure of the actuator (2) is the same; each of the two-dimensional piezoelectric actuators (2) includes a rectangular base (2-1), a piezoelectric element (2-2) and a driving foot (2-3). The base (2-1), the piezoelectric element (2-2) and the driving foot (2-3) are fixedly connected in sequence; they are respectively evenly distributed along the circumferential directions of the upper and lower end faces of the annular base (1) N rectangular notches (1-1) and N annular notches (1-2), and the rectangular notches (1-1) and annular notches (1-2) on each end face of the annular base (1) are uniform Correspondingly arranged, wherein the annular gap (1-2) is formed after removing part of the annular body from the corresponding end face of the annular base (1), and the rectangular gap (1-1) is located on the bottom surface of the annular gap (1-2), and each Two axial threaded holes (1-3) are provided on the bottom surface of each annular gap (1-2); In the upward direction, there is a radially tightening threaded hole (1-4); the annular gap (1-2), rectangular gap (1-1), axial threaded hole (1-3) and The radially tightening threaded holes (1-4) and the annular notch (1-2), rectangular notch (1-1), axial threaded holes (1-3) and radially tightening threaded holes ( 1-4) Arranged in a mirror-image relationship with the axial symmetry plane of the annular base (1) as the center; the annular gap (1-2) is adapted to the structure of the axial compression block (5), and the axial compression The tightening block (5) is embedded in the annular gap (1-2), and is fixedly connected with the annular base (1) through the axial fixing screw (4); the rectangular base (2-2) of the two-dimensional piezoelectric actuator (2) 1) The shape and characteristics of the rectangular gap (1-1) on the annular base (1) are the same, and the rectangular base (2-1) is embedded in the rectangular gap (1-1); the radial set screw (6) passes through the The threaded hole (1-4) is connected to the annular base (1), and is in contact with the rectangular base (2-1) of the two-dimensional piezoelectric actuator (2). By adjusting the radial set screw (6) position, to realize the fine-tuning of the radial distribution position of the two-dimensional piezoelectric actuator (2) along the annular base (1); the outer edge of the disc mover (3) is provided with an upper conical annular surface ( 3-1) and the lower conical torus (3-2), the driving feet (2-3) of the upper N/2 two-dimensional piezoelectric actuators (2) and the upper cone of the disc mover (3) The torus (3-1) is in contact with the lower conical torus ( 3-2) Phase touch. 2.根据权利要求1所述的一种单自由度压电转台,其特征在于:通过均匀布置在环形基座(1)上的N个二维压电致动器(2)支承圆盘动子(3),通过N个二维压电致动器(2)与圆盘动子(3)之间的接触,限制圆盘动子(3)除去绕自身轴线旋转运动之外的所有运动自由度。2. A single-degree-of-freedom piezoelectric turntable according to claim 1, characterized in that: the disc is supported by N two-dimensional piezoelectric actuators (2) evenly arranged on the annular base (1). The sub (3), through the contact between the N two-dimensional piezoelectric actuators (2) and the disc mover (3), restricts all movements of the disc mover (3) except for the rotational movement around its own axis degrees of freedom. 3.根据权利要求1所述的一种单自由度压电转台,其特征在于:利用一路电压信号,通过控制N个二维压电致动器(2)沿圆盘动子(3)轴线方向的弯曲运动,控制二维压电致动器(2)与圆盘动子(3)之间的正压力大小,进一步控制二维压电致动器(2)与圆盘动子(3)之间摩擦力。3. A piezoelectric turntable with a single degree of freedom according to claim 1, characterized in that: by using one voltage signal, N two-dimensional piezoelectric actuators (2) are controlled along the axis of the disc mover (3) The bending motion in the direction controls the positive pressure between the two-dimensional piezoelectric actuator (2) and the disc mover (3), and further controls the two-dimensional piezoelectric actuator (2) and the disc mover (3). ) friction. 4.根据权利要求1所述的一种单自由度压电转台,其特征在于:每个二维压电致动器(2)产生独立的、沿着两个正交方向的弯曲运动。4. A single degree of freedom piezoelectric turntable according to claim 1, characterized in that: each two-dimensional piezoelectric actuator (2) produces independent bending motions along two orthogonal directions. 5.根据权利要求1所述的一种单自由度压电转台,其特征在于:环形基座(1)上加工有螺纹孔、沉头孔或通孔,用于将单自由度压电转台与其它零部件固定连接。5. A single-degree-of-freedom piezoelectric turntable according to claim 1, wherein the annular base (1) is machined with threaded holes, countersunk holes or through holes, which are used to convert the single-degree-of-freedom piezoelectric turntable Fixed connection with other components. 6.根据权利要求1-5中任一项所述的一种单自由度压电转台的激励方法,其特征在于:该方法用于激励N个二维压电致动器(2)实现同时沿圆盘动子(3)外沿圆周切线方向的弯曲运动,驱动圆盘动子(3)实现单自由度旋转运动;即,圆盘动子(3)实现绕Z轴逆时针或顺时针方向的旋转运动;6. The excitation method of a single-degree-of-freedom piezoelectric turntable according to any one of claims 1-5, wherein the method is used to excite N two-dimensional piezoelectric actuators (2) to achieve simultaneous The bending motion along the outer circumference of the disc mover (3) along the tangential direction of the circumference drives the disc mover (3) to realize single-degree-of-freedom rotational motion; that is, the disc mover (3) realizes counterclockwise or clockwise around the Z axis direction of rotation; 其中,驱动圆盘动子(3)绕Z轴逆时针方向旋转运动的具体过程如下:The specific process of driving the disc mover (3) to rotate counterclockwise around the Z axis is as follows: 步骤一、在N个二维压电致动器(2)的压电元件(2-2)上施加缓慢下降的激励电压信号,N个二维压电致动器(2)在沿着绕Z轴逆时针的切线方向上产生缓慢弯曲变形至负极限位置,N个二维压电致动器(2)的驱动足(2-3)在沿着绕Z轴逆时针的切线方向上产生缓慢变化的微小位移,通过静摩擦力驱动圆盘动子(3)绕Z轴逆时针方向产生微小角位移;Step 1. Apply a slowly decreasing excitation voltage signal to the piezoelectric elements (2-2) of the N two-dimensional piezoelectric actuators (2), and the N two-dimensional piezoelectric actuators (2) are moving along the windings. Slowly bending and deforming to the negative limit position in the counterclockwise tangential direction of the Z axis, the driving feet (2-3) of the N two-dimensional piezoelectric actuators (2) are generated along the counterclockwise tangent direction around the Z axis The slowly changing tiny displacement drives the disc mover (3) counterclockwise around the Z-axis to generate a tiny angular displacement through static friction; 步骤二、在N个二维压电致动器(2)的压电元件(2-2)上施加快速上升的激励电压信号,N个二维压电致动器(2)在沿着绕Z轴顺时针的切线方向上产生快速弯曲变形至正极限位置,N个二维压电致动器(2)的驱动足(2-3)在沿着绕Z轴顺时针的切线方向上产生快速变化的微小位移,圆盘动子(3)由于惯性保持静止;Step 2: Apply a rapidly rising excitation voltage signal to the piezoelectric elements (2-2) of the N two-dimensional piezoelectric actuators (2), and the N two-dimensional piezoelectric actuators (2) are moving along the windings. A rapid bending deformation is generated in the clockwise tangential direction of the Z axis to the positive limit position, and the driving feet (2-3) of the N two-dimensional piezoelectric actuators (2) are generated along the clockwise tangential direction around the Z axis. Rapidly changing tiny displacements, the disc mover (3) remains stationary due to inertia; 步骤三、重复步骤一至步骤二,实现圆盘动子(3)绕Z轴逆时针方向的连续旋转运动;Step 3. Repeat Step 1 to Step 2 to realize the continuous rotational movement of the disc mover (3) in the counterclockwise direction around the Z axis; 驱动圆盘动子(3)绕Z轴顺时针方向旋转运动的具体过程如下:The specific process of driving the disc mover (3) to rotate clockwise around the Z axis is as follows: 步骤一、在N个二维压电致动器(2)的压电元件(2-2)上施加缓慢上升的激励电压信号,N个二维压电致动器(2)在沿着绕Z轴顺时针的切线方向上产生缓慢弯曲变形至正极限位置,N个二维压电致动器(2)的驱动足(2-3)在沿着绕Z轴顺时针的切线方向上产生缓慢变化的微小位移,通过静摩擦力驱动圆盘动子(3)绕Z轴顺时针方向产生微小角位移;Step 1. Apply a slowly rising excitation voltage signal to the piezoelectric elements (2-2) of the N two-dimensional piezoelectric actuators (2), and the N two-dimensional piezoelectric actuators (2) are moving along the windings. A slow bending deformation is generated in the clockwise tangential direction of the Z axis to the positive limit position, and the driving feet (2-3) of the N two-dimensional piezoelectric actuators (2) are generated along the clockwise tangential direction around the Z axis. The slowly changing tiny displacement drives the disc mover (3) clockwise around the Z-axis to generate a tiny angular displacement through static friction; 步骤二、在N个二维压电致动器(2)的压电元件(2-2)上施加快速下降的激励电压信号,N个二维压电致动器(2)在沿着绕Z轴逆时针的切线方向上产生快速弯曲变形至负极限位置,N个二维压电致动器(2)的驱动足(2-3)在沿着绕Z轴逆时针的切线方向上产生快速变化的微小位移,圆盘动子(3)由于惯性保持静止;Step 2: Apply a rapidly decreasing excitation voltage signal to the piezoelectric elements (2-2) of the N two-dimensional piezoelectric actuators (2), and the N two-dimensional piezoelectric actuators (2) are moving along the windings. The rapid bending deformation to the negative limit position is generated in the anticlockwise tangential direction of the Z axis, and the driving feet (2-3) of the N two-dimensional piezoelectric actuators (2) are generated in the anticlockwise tangential direction around the Z axis. Rapidly changing tiny displacements, the disc mover (3) remains stationary due to inertia; 步骤三、重复步骤一至步骤二,实现圆盘动子(3)绕Z轴顺时针方向的连续旋转运动。Step 3: Repeat steps 1 to 2 to realize the continuous rotational movement of the disc mover (3) in the clockwise direction around the Z axis. 7.根据权利要求6所述的一种单自由度压电转台的激励方法,其特征在于:实现该方法所需的激励电压信号为周期性的、非对称的锯齿状或梯形波形,激励电压信号每个周期中上升和下降过程可以是线性的,也可以是非线性的,但上升和下降过程所持续的时长不相等。7. The excitation method of a single-degree-of-freedom piezoelectric turntable according to claim 6, wherein the excitation voltage signal required to realize the method is a periodic, asymmetrical sawtooth or trapezoidal waveform, and the excitation voltage The rise and fall process of each cycle of the signal can be linear or non-linear, but the duration of the rise and fall processes is not equal.
CN202010067202.3A 2020-01-20 2020-01-20 A single-degree-of-freedom piezoelectric turntable and its excitation method Active CN111245290B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010067202.3A CN111245290B (en) 2020-01-20 2020-01-20 A single-degree-of-freedom piezoelectric turntable and its excitation method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010067202.3A CN111245290B (en) 2020-01-20 2020-01-20 A single-degree-of-freedom piezoelectric turntable and its excitation method

Publications (2)

Publication Number Publication Date
CN111245290A CN111245290A (en) 2020-06-05
CN111245290B true CN111245290B (en) 2021-02-19

Family

ID=70879824

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010067202.3A Active CN111245290B (en) 2020-01-20 2020-01-20 A single-degree-of-freedom piezoelectric turntable and its excitation method

Country Status (1)

Country Link
CN (1) CN111245290B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112436755B (en) * 2020-11-11 2021-08-06 南京航空航天大学 Rotary piezoelectric transmission device based on static friction and its working method
CN112865598B (en) * 2021-03-30 2024-04-05 吉林大学 Differential inertial piezoelectric rotary driver
CN113513943B (en) * 2021-04-09 2022-06-17 南京航空航天大学 Piezoelectric-driven two-dimensional micro-motion imaging platform
CN113206614B (en) * 2021-05-06 2022-11-15 上海隐冠半导体技术有限公司 Exercise device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10158063B2 (en) * 2013-04-18 2018-12-18 Cornell University Monolithic PZT actuator, stage, and method for making
CN105450081B (en) * 2016-01-26 2017-06-13 哈尔滨工业大学 Stepping crawling type based on many piezoelectric vibrator bending motions drives motivational techniques
CN105553328A (en) * 2016-02-02 2016-05-04 吉林大学 Piezoelectric vibrating peristaltic motor
CN106208804B (en) * 2016-08-01 2019-07-19 南京航空航天大学 A high-speed rotating ultrasonic motor and the electrical excitation method of its stator
CN207603478U (en) * 2017-11-21 2018-07-10 深圳市富世达通讯有限公司 Actuation means
CN109889085B (en) * 2019-04-09 2020-08-07 哈尔滨工业大学 Piezo-driven ultra-precision three-degree-of-freedom planar motion platform and its excitation method

Also Published As

Publication number Publication date
CN111245290A (en) 2020-06-05

Similar Documents

Publication Publication Date Title
CN111245290B (en) A single-degree-of-freedom piezoelectric turntable and its excitation method
Wang et al. A novel piezoelectric inchworm actuator driven by one channel direct current signal
CN107462963B (en) Piezo-electric driven variable diaphragm dimming device and method
CN102185519B (en) Mode conversion type piezoelectric thread transmission linear ultrasonic motor
JPH04229082A (en) Piezoelectric motor
CN109787505B (en) A linear piezoelectric motor and its driving method
CN113224972B (en) Single-stator three-degree-of-freedom spherical ultrasonic motor and excitation method thereof
CN107046380A (en) A kind of many spoke-type ultrasound electric machines
CN110048636B (en) Piezoelectric ultrasonic driver based on longitudinal vibration sandwich transducer and method of using the same
CN108111056B (en) Rotary ultrasonic motor driven by four tuning fork type piezoelectric vibrators and working mode
CN104578901A (en) Walking piezoelectric rotary motor
Shafik et al. Piezoelectric motor technology: A review
CN207232479U (en) A kind of iris diaphgram light modulating device of Piezoelectric Driving
CN110752771A (en) A novel high-efficiency piezoelectric rotary precision drive platform based on the principle of parasitic inertia
CN104038100B (en) What realize based on polypody rotary piezoelectric driver drives motivational techniques across yardstick
CN114670083B (en) Bearing platform for non-contact driving three-rotational-freedom-degree displacement output
CN111854663A (en) A piezoelectric thread-driven one-dimensional positioning platform
CN101839717B (en) Near-field ultrasound floated-type gyroscope
CN212572422U (en) Birotor rotating piezoelectric motor
Zhou et al. A nut-type ultrasonic motor and its application in the focus system
CN108199616B (en) A quasi-zero stiffness composite rotor ultrasonic motor
CN111313749A (en) Surface-mounted piezoelectric-driven two-degree-of-freedom underwater mechanical arm and driving method thereof
US5107162A (en) Ultrasonic motor using rectangular wave
JP2012100483A (en) Vibration type drive device
CN211720487U (en) Sandwich type rotary dual-drive piezoelectric actuator

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant