CN111157414A - Particulate matter sensor - Google Patents
Particulate matter sensor Download PDFInfo
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- CN111157414A CN111157414A CN202010081896.6A CN202010081896A CN111157414A CN 111157414 A CN111157414 A CN 111157414A CN 202010081896 A CN202010081896 A CN 202010081896A CN 111157414 A CN111157414 A CN 111157414A
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- base material
- substrate
- particulate matter
- matter sensor
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- 239000013618 particulate matter Substances 0.000 title claims description 40
- 239000000463 material Substances 0.000 claims abstract description 60
- 239000000758 substrate Substances 0.000 claims abstract description 57
- 238000010438 heat treatment Methods 0.000 claims abstract description 32
- 239000002245 particle Substances 0.000 claims abstract description 32
- 230000005611 electricity Effects 0.000 claims abstract description 18
- 230000003068 static effect Effects 0.000 claims abstract description 18
- 238000012360 testing method Methods 0.000 claims abstract description 11
- 238000004519 manufacturing process Methods 0.000 claims abstract description 9
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 claims abstract description 7
- 230000005686 electrostatic field Effects 0.000 claims abstract description 4
- 238000001514 detection method Methods 0.000 claims description 6
- 238000007650 screen-printing Methods 0.000 claims description 3
- 238000009795 derivation Methods 0.000 claims description 2
- 238000010147 laser engraving Methods 0.000 claims description 2
- 230000001105 regulatory effect Effects 0.000 claims description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 8
- 238000002360 preparation method Methods 0.000 abstract description 5
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 238000009529 body temperature measurement Methods 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000004071 soot Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- DOTMOQHOJINYBL-UHFFFAOYSA-N molecular nitrogen;molecular oxygen Chemical compound N#N.O=O DOTMOQHOJINYBL-UHFFFAOYSA-N 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000002912 waste gas Substances 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
- G01N15/0656—Investigating concentration of particle suspensions using electric, e.g. electrostatic methods or magnetic methods
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- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
The invention relates to a particle sensor comprising: the base material comprises a first base material, a second base material, a third base material and a fourth base material which are arranged in sequence, wherein the base material is made of an aluminum oxide material; the sensing layer is formed on the first substrate and comprises a positive electrode, a static electricity leading-out electrode and a negative electrode, the positive electrode and the negative electrode are used for generating an electrostatic field to adsorb the particles, and the static electricity leading-out electrode is used for leading out static electricity; the heating electrode is formed between the second substrate and the third substrate and used for heating the particle sensor according to the control voltage; and the temperature measuring electrode is formed on one side of the fourth base material, which is far away from the third base material, and is used for testing the temperature of the heating electrode. According to the particle sensor and the preparation method thereof, the alumina is used as the material of the base material, so that the process steps for manufacturing the particle sensor are simpler.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to a particulate matter sensor.
Background
The particulate matter sensor is also called a PM sensor, is mainly used for detecting the content of carbon smoke particles discharged into the atmosphere, can be used for 12V and 24V voltage power supply systems, and mainly comprises an induction chip, an assembly connector, a control module and the like. When the sensor works normally, the electrodes on the substrate are electrified to work, a magnetic field is generated between the positive electrode and the negative electrode, and when waste gas flows through the electrodes, fine particles are adsorbed on two sides of the electrodes under the action of the magnetic field force. As time goes on, the more the particles between the positive and negative electrodes are accumulated, the conduction between the positive and negative electrodes is conducted. After the positive electrode and the negative electrode are conducted, current is generated between the positive electrode and the negative electrode, the current is increased along with more and more accumulated objects, when the current reaches a certain threshold value, a detection cycle is completed, the length of the cycle time is detected, and the concentration of soot in tail gas can be judged. The particle sensor is the same as the nitrogen oxygen sensor, and when the particle sensor needs to wait for dew point release and has a test requirement, the particle sensor is heated and regenerated firstly to burn particles accumulated in the previous test cycle. However, the conventional particle sensor uses zirconia as a base material, so that the manufacturing process is complicated.
Disclosure of Invention
In view of the above, there is a need to provide a particulate matter sensor that addresses the above-mentioned problems.
A particulate matter sensor comprising:
the base material comprises a first base material, a second base material, a third base material and a fourth base material which are arranged in sequence, wherein the base material is made of an aluminum oxide material;
the sensing layer is formed on the first substrate and comprises a positive electrode, a static electricity leading-out electrode and a negative electrode, the positive electrode and the negative electrode are used for generating an electrostatic field to adsorb the particles, and the static electricity leading-out electrode is used for leading out static electricity;
the heating electrode is formed between the second substrate and the third substrate and used for heating the particle sensor according to the control voltage;
and the temperature measuring electrode is formed on one side of the fourth base material, which is far away from the third base material, and is used for testing the temperature of the particulate matter sensor.
In one embodiment, the particulate matter sensor further comprises a control circuit connected with the positive electrode and the negative electrode for determining the particulate matter concentration by testing a detection cycle time between the positive electrode and the negative electrode.
In one embodiment, the heating electrode, the third substrate and the fourth substrate are all provided with conductive holes, a heating electrode connecting pin is arranged on one side of the fourth substrate far away from the third substrate, and the conductive holes are connected with the heating electrode pins.
In one embodiment, the temperature measuring electrode converts the temperature value of the particulate matter sensor into a resistance value to test the temperature of the particulate matter sensor;
the control circuit is also connected with the temperature measuring electrode, and a preset resistance value is stored in the control circuit;
the control circuit is also used for comparing the resistance value converted by the temperature measuring electrode with the preset resistance value and regulating the control voltage through PID feedback control.
In one embodiment, the thickness ranges of the first substrate, the second substrate, the third substrate and the fourth substrate are all 350-400 um.
In one embodiment, the distance between the positive electrode and the negative electrode is in a range of 30um to 40 um.
In one embodiment, the width of the positive electrode, the static electricity leading-out electrode and the negative electrode ranges from 85um to 105 um.
In one embodiment, the heating electrode heats up to a maximum temperature of 900 ℃.
A method of making a particulate matter sensor, comprising:
providing a substrate; the base material comprises a first base material, a second base material, a third base material and a fourth base material which are arranged in sequence, wherein the base material is made of an aluminum oxide material;
forming a sensing layer on the first substrate; the sensing layer comprises a positive electrode, an electrostatic derivation electrode and a negative electrode;
forming a heating electrode on the third substrate;
and forming a temperature measuring electrode on the fourth base material.
In one embodiment, the sensing layer is formed using screen printing and laser engraving processes.
According to the particle sensor and the preparation method thereof, the alumina is used as the material of the base material, so that the process steps for manufacturing the particle sensor are simpler.
Drawings
FIG. 1 is an exploded view of a particulate matter sensor in an embodiment of the invention;
FIG. 2 is a partially enlarged view of a positive electrode and a negative electrode in an embodiment of the invention;
FIG. 3 is a flow chart of a method of making a particle sensor in an embodiment of the invention.
Detailed Description
The following further describes embodiments of the present invention with reference to the drawings.
The application provides a particulate matter sensor and a preparation method thereof, and the particulate matter sensor takes an aluminum oxide material as a base material, so that the manufacturing process is simpler compared with the traditional particulate matter sensor.
Fig. 1 is an exploded view of a particulate matter sensor in one embodiment. As shown in FIG. 1, the particle sensor 100 includes a substrate 110, a sensing layer 120, a heating electrode 130, and a temperature measuring electrode 140.
The substrate 110 includes a first substrate 112, a second substrate 114, a third substrate 116, and a fourth substrate 117 disposed in sequence. The substrate 110 is made of alumina material, for example, alumina powder is made into an alumina cast sheet as the first substrate 112, the second substrate 114, the third substrate 116 and the fourth substrate 117. The thickness of each layer of the cast aluminum oxide sheet can range from 350um to 400 um.
The sensing layer 120 is formed on the first substrate 112 for detecting particles. Specifically, the sensing layer 120 includes a positive electrode 122, a static electricity leading-out electrode 124, and a negative electrode 126, and the width of the positive electrode 122, the static electricity leading-out electrode 124, and the negative electrode 126 may be set to range from 85um to 105 um. Here, referring to fig. 2, the distance between the positive electrode 122 and the negative electrode 126 is made very small, for example, the distance between the positive electrode 122 and the negative electrode 126 is in a range of 30um to 40 um.
When the particulate matter sensor 100 is operating normally, an operating voltage is applied between the positive electrode 122 and the negative electrode 126, so that an electrostatic field is generated between the positive electrode 122 and the negative electrode 126. When the gas to be detected flows through the positive electrode 122 and the negative electrode 126, fine particles are adsorbed on both sides of the positive electrode 122 and the negative electrode 126 by the magnetic field force. Over time, when the particulate matter between the positive electrode 122 and the negative electrode 126 is accumulated to a certain degree, the positive electrode 122 and the negative electrode 126 are conducted, so that current is generated between the positive electrode 122 and the negative electrode 126, the current is increased along with the adsorption of the particulate matter, and when the current reaches a certain threshold value, a detection cycle is completed. The concentration of the particulate matter in the sample to be detected can be judged by detecting the cycle time. For example, when the gas to be detected is exhaust gas emitted from a vehicle, the concentration of soot in the exhaust gas can be determined.
In this embodiment, the particle sensor 100 may further include a control circuit (not shown). The particle sensor 100 is further provided with a positive electrode pin 127, an electrostatic lead-out electrode pin 128 and a negative electrode pin 129, wherein the positive electrode 122 and the positive electrode pin 127, the electrostatic lead-out electrode 124 and the electrostatic lead-out electrode pin 128, and the negative electrode 126 and the negative electrode pin 129 are respectively connected through platinum wires. The control circuit is connected with the positive electrode 122, the static electricity leading-out electrode 124 and the negative electrode 126 through a positive electrode pin 127, a static electricity leading-out electrode pin 128 and a negative electrode pin 129 respectively, the control circuit judges the concentration of the particulate matters through testing the detection cycle time of the positive electrode 122 and the negative electrode 126, and can control the static electricity leading-out electrode 124 to carry out static electricity leading-out, so that the inaccuracy of the detection result caused by static electricity interference is avoided.
The heating electrode 130 is formed between the second substrate 114 and the third substrate 116. The heating electrode 130 is used for heating the particle sensor 100 according to the magnitude of the control voltage, so that the particle sensor 100 can reach the working temperature quickly, and the improvement of the testing efficiency is facilitated. For example, the maximum temperature of the heating electrode 130 may be set to 900 ℃, so as to avoid burning the device due to too high temperature. The heat generating region of the heating electrode 130 may be set to 12mm or approximately 12 mm.
In the present embodiment, the heating electrode 130, the third substrate 116 and the fourth substrate 118 are all provided with a conductive via 150. A heating electrode connecting pin 144 and a heating electrode connecting pin 146 are arranged on one side of the fourth substrate 118 far away from the third substrate 116, and the heating electrode 130 is connected with the heating electrode connecting pin 144 and the heating electrode connecting pin 146 through a conductive hole 150. The control circuit may be connected to the heater electrode connection pin 144 and the heater electrode connection pin 146, and output a control voltage to the heater electrode 130 through the heater electrode connection pin 144 and the heater electrode connection pin 146, thereby performing heating.
The temperature measuring electrode 140 is formed on a side of the fourth substrate 118 away from the third substrate 116, and the temperature measuring electrode 140 is used for measuring the temperature of the particulate matter sensor 100.
Specifically, the particle sensor 100 is further provided with a temperature measurement electrode pin 142 and a temperature measurement electrode pin 148, and the temperature measurement electrode 140 is connected with the temperature measurement electrode pin 142 and the temperature measurement electrode pin 148 through a heating wire. The temperature measuring electrode 140 converts the temperature value of the particulate matter sensor 100 into a resistance value, the control circuit is connected with the temperature measuring electrode pin 142 and the temperature measuring electrode pin 148, and the temperature of the particulate matter sensor 100 is determined through the resistance value converted by the temperature measuring electrode 140.
The temperature measuring electrode 140 may be made of a platinum wire, and has the following characteristic formula according to a characteristic curve of a resistance value and a temperature of the platinum wire:
Rt＝R0(1+αt)
the temperature of the particle sensor 100 is calculated based on the magnitude of the resistance value, where Rt is Rh measured at t, R0 is the resistance of the heater electrode 130 at 0 ℃, α is the temperature coefficient of platinum, when the particle sensor 100 actually works, a preset resistance value is stored in the control circuit, the control circuit does not always measure and calculate the actual temperature of the particle sensor 100, but the control circuit presets Rh as a preset resistance value (e.g., 10 Ω), and then compares the preset resistance value with the actually measured resistance value Rh converted by the temperature measuring electrode 140, and if the actually measured Rh is greater than 10 Ω, the control voltage is decreased, otherwise, the control voltage is increased.
In one embodiment, as shown in FIG. 3, a method of making a particulate matter sensor includes the steps of:
step S110, providing a substrate.
Specifically, the base material comprises a first base material, a second base material, a third base material and a fourth base material which are arranged in sequence, and the base material is made of an aluminum oxide material. For example, cast alumina sheets are made using alumina powder as the first, second, third, and fourth substrates.
Step S120 is to form a sensing layer on the first substrate.
Specifically, the sensing layer includes a positive electrode, a static electricity leading-out electrode, and a negative electrode. The induction layer can adopt screen printing and laser sculpture technology to form, compares in traditional printing process and is difficult to appear short circuit defect to improve the product yield.
In step S130, a heating electrode is formed on the third substrate.
In step S140, a temperature measuring electrode is formed on the fourth substrate.
The particulate matter sensor of preparation in this embodiment is the particulate matter sensor that provides in any above-mentioned embodiment, and particulate matter sensor's specific structure is no longer repeated.
According to the particle sensor and the preparation method thereof, the alumina is used as the material of the base material, so that the process steps for manufacturing the particle sensor are simpler.
Claims (10)
1. A particulate matter sensor, comprising:
the base material comprises a first base material, a second base material, a third base material and a fourth base material which are arranged in sequence, wherein the base material is made of an aluminum oxide material;
the sensing layer is formed on the first substrate and comprises a positive electrode, a static electricity leading-out electrode and a negative electrode, the positive electrode and the negative electrode are used for generating an electrostatic field to adsorb the particles, and the static electricity leading-out electrode is used for leading out static electricity;
the heating electrode is formed between the second substrate and the third substrate and used for heating the particle sensor according to the control voltage;
and the temperature measuring electrode is formed on one side of the fourth base material, which is far away from the third base material, and is used for testing the temperature of the particulate matter sensor.
2. The particulate matter sensor according to claim 1, further comprising a control circuit connected with the positive electrode and the negative electrode for determining the particulate matter concentration by testing a detection cycle time between the positive electrode and the negative electrode.
3. The particle sensor according to claim 2, wherein the heating electrode, the third substrate and the fourth substrate are each provided with a conductive hole, a heating electrode connecting pin is provided on a side of the fourth substrate away from the third substrate, and the conductive hole is connected with the heating electrode pin.
4. The particulate matter sensor according to claim 3, wherein the temperature measuring electrode converts a temperature value of the particulate matter sensor into a resistance value to test the temperature of the particulate matter sensor;
the control circuit is also connected with the temperature measuring electrode, and a preset resistance value is stored in the control circuit;
the control circuit is also used for comparing the resistance value converted by the temperature measuring electrode with the preset resistance value and regulating the control voltage through PID feedback control.
5. The particulate matter sensor of claim 1, wherein the first substrate, the second substrate, the third substrate, and the fourth substrate each have a thickness ranging from 350um to 400 um.
6. The particulate matter sensor according to claim 1, wherein a distance between the positive electrode and the negative electrode is in a range of 30 to 40 um.
7. The particulate matter sensor according to claim 1, wherein the positive electrode, the static-electricity-deriving electrode, and the negative electrode have a width ranging from 85um to 105 um.
8. The particulate matter sensor according to claim 1, wherein the heating electrode heats up to a maximum temperature of 900 ℃.
9. A method of making a particulate matter sensor, comprising:
providing a substrate; the base material comprises a first base material, a second base material, a third base material and a fourth base material which are arranged in sequence, wherein the base material is made of an aluminum oxide material;
forming a sensing layer on the first substrate; the sensing layer comprises a positive electrode, an electrostatic derivation electrode and a negative electrode;
forming a heating electrode on the third substrate;
and forming a temperature measuring electrode on the fourth base material.
10. The method of claim 9, wherein the sensing layer is formed using screen printing and laser engraving processes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010081896.6A CN111157414A (en) | 2020-02-06 | 2020-02-06 | Particulate matter sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010081896.6A CN111157414A (en) | 2020-02-06 | 2020-02-06 | Particulate matter sensor |
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| CN111157414A true CN111157414A (en) | 2020-05-15 |
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| CN202010081896.6A Pending CN111157414A (en) | 2020-02-06 | 2020-02-06 | Particulate matter sensor |
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20110283773A1 (en) * | 2010-05-24 | 2011-11-24 | Denso Corporation | Particulate matter detection sensor and particulate matter detection sensor unit |
| CN103429861A (en) * | 2011-03-16 | 2013-12-04 | 丰田自动车株式会社 | Particulate-matter processing device |
| CN106053308A (en) * | 2016-07-07 | 2016-10-26 | 中国第汽车股份有限公司 | Chip type particulate matter sensor chip for vehicles and method for manufacturing chip type particulate matter sensor chip |
| CN106248540A (en) * | 2015-06-09 | 2016-12-21 | 阿莫泰克有限公司 | Particulate matter sensors and utilize its waste gas cleaning system |
| CN206671127U (en) * | 2017-03-23 | 2017-11-24 | 中国第一汽车股份有限公司 | A kind of automobile-used particulate matter sensors chip |
| CN110095395A (en) * | 2019-06-03 | 2019-08-06 | 深圳市森世泰科技有限公司 | Chip, sensor and measurement method for gas particles object measurement of concetration |
| US20190293541A1 (en) * | 2016-12-15 | 2019-09-26 | Denso Corporation | Particulate matter detection apparatus |
| CN211955123U (en) * | 2020-02-06 | 2020-11-17 | 浙江百岸科技有限公司 | Particulate matter sensor |
-
2020
- 2020-02-06 CN CN202010081896.6A patent/CN111157414A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20110283773A1 (en) * | 2010-05-24 | 2011-11-24 | Denso Corporation | Particulate matter detection sensor and particulate matter detection sensor unit |
| CN103429861A (en) * | 2011-03-16 | 2013-12-04 | 丰田自动车株式会社 | Particulate-matter processing device |
| CN106248540A (en) * | 2015-06-09 | 2016-12-21 | 阿莫泰克有限公司 | Particulate matter sensors and utilize its waste gas cleaning system |
| CN106053308A (en) * | 2016-07-07 | 2016-10-26 | 中国第汽车股份有限公司 | Chip type particulate matter sensor chip for vehicles and method for manufacturing chip type particulate matter sensor chip |
| US20190293541A1 (en) * | 2016-12-15 | 2019-09-26 | Denso Corporation | Particulate matter detection apparatus |
| CN206671127U (en) * | 2017-03-23 | 2017-11-24 | 中国第一汽车股份有限公司 | A kind of automobile-used particulate matter sensors chip |
| CN110095395A (en) * | 2019-06-03 | 2019-08-06 | 深圳市森世泰科技有限公司 | Chip, sensor and measurement method for gas particles object measurement of concetration |
| CN211955123U (en) * | 2020-02-06 | 2020-11-17 | 浙江百岸科技有限公司 | Particulate matter sensor |
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