CN111121689B - Linear displacement sensor calibration high-precision adjusting device - Google Patents
Linear displacement sensor calibration high-precision adjusting device Download PDFInfo
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- CN111121689B CN111121689B CN202010047841.3A CN202010047841A CN111121689B CN 111121689 B CN111121689 B CN 111121689B CN 202010047841 A CN202010047841 A CN 202010047841A CN 111121689 B CN111121689 B CN 111121689B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
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Abstract
The invention discloses a high-precision adjustment device for linear displacement sensor calibration, which comprises a sensor mounting component base and a clamp mounting component moving table. The device is comparatively easy fixed, install the linear displacement sensor of various different model specifications, the vertical adjustment mechanism of the device is used for adjusting sensor fixed platform vertical direction and reciprocates, plane rotation adjustment mechanism is used for adjusting sensor fixed platform horizontal direction's rotation, through vertical adjustment mechanism, plane rotation adjustment mechanism and fine setting screw, can the efficient diversified regulation of completion linear displacement sensor, the efficient of installation regulation has reduced the influence of abbe error as far as, the collineation principle has been realized, work efficiency has greatly been improved, avoided simultaneously because the influence of operating personnel installation horizontal factor, can guarantee the measurement accuracy requirement.
Description
Technical Field
The invention relates to the field of metrological verification and calibration measurement, in particular to a high-precision adjustment device for linear displacement sensor calibration. The high-precision adjusting device is mainly used for arranging, fixing and adjusting different types of linear displacement sensors when different types of displacement sensors such as an inductive displacement sensor, a laser displacement sensor, a resistance displacement sensor, a stay wire (rope) type displacement sensor and the like are calibrated.
Background
A linear displacement sensor is a device that senses a change in length dimension and converts it into a usable output signal, and is widely used in various industries of industrial automation. The types of linear displacement sensors are also various due to different output signal modes, and currently, the linear displacement sensors are more common, such as an inductive displacement sensor, a laser displacement sensor, a resistance displacement sensor, a stay wire (rope) displacement sensor and the like. However, when the four common types of linear displacement sensors are calibrated, due to the fact that different types of sensor structure forms are large in difference, even if some calibration devices with high automation degree at present are fixed by the detection platform, the installation and fixation of different types of linear displacement sensors with large structural size differences still are not convenient and simple enough. At present, the following problems mainly exist in the process of installing and fixing a linear displacement sensor to calibrate the linear displacement sensor: (1) The linear displacement sensors are various, and no universal device can be used for realizing the fixed installation and use of most types of linear displacement sensors; (2) The efficiency of installation regulation is not high, in order to reduce the influence of abbe error as far as possible, satisfies the collineation principle, often needs long time to carry out the repeated adjustment, even like this still can't accomplish the effect of higher precision.
Disclosure of Invention
Aiming at the defects, the invention provides the linear displacement sensor calibration high-precision adjusting device with higher universality, which can be used for easily and fixedly installing linear displacement sensors of different types and specifications, can be used for efficiently completing multidirectional adjustment of the linear displacement sensors, achieves the collineation principle, greatly improves the working efficiency, simultaneously avoids the influence of installation level factors of operators, and can ensure the measurement precision requirement.
The technical scheme of the invention is as follows:
The invention provides a high-precision adjusting device for calibrating a linear displacement sensor, which comprises a sensor mounting part base and a clamp mounting part moving table; the sensor mounting component base is provided with two parallel first linear guide rails and a fine adjustment screw, the two parallel first linear guide rails are provided with sliding bases, the fine adjustment screw is connected to one end of the sliding base, which is close to the fine adjustment screw, through a transmission block, and the fine adjustment screw controls the sliding base to perform displacement adjustment on the first linear guide rails through the transmission block; the sliding base is sequentially provided with a vertical adjusting mechanism, a plane rotation adjusting mechanism and a sensor fixing platform from bottom to top, the sensor fixing platform is vertically provided with a plurality of pressing pieces, and the linear displacement sensor is fixed on the sensor fixing platform through the pressing pieces; the second linear guide rail, the sliding block and the supporting block are sequentially arranged on the clamp installation part moving table from bottom to top, and the supporting block can move along with the sliding block on the second linear guide rail; one end of the supporting block is perpendicular to the supporting block, an adjusting auxiliary ruler is arranged on the end of the supporting block, and a sensor is arranged parallel to the supporting block and connected with a measuring rod; the sensor connection measuring rod can be in the same straight line with the calibration point of the linear displacement sensor. The vertical adjustment mechanism is used for adjusting the vertical movement of the sensor fixing platform, the plane rotation adjustment mechanism is used for adjusting the rotation of the sensor fixing platform in the horizontal direction, the alignment displacement sensor is adjusted in multiple directions through the vertical adjustment mechanism, the plane rotation adjustment mechanism and the fine adjustment screw rod, the collineation principle is achieved, the working efficiency is greatly improved, meanwhile, the influence of the installation level factor of an operator is avoided, and the measurement accuracy requirement can be guaranteed.
Further, a fine adjustment screw fixing block is arranged on the sensor mounting component base, and the fine adjustment screw is fixed on the fine adjustment screw fixing block.
Further, a plurality of first assembly fixing holes which are arranged in an array are formed in the sensor mounting component base, and the first linear guide rail and the fine adjustment screw fixing block are fixed on the sensor mounting component base through the first assembly fixing holes. The first fitting fixing hole can be used to fix all necessary auxiliary devices.
Further, both ends of the sliding base are higher than the middle part, the middle part forms a groove structure, both ends of the sliding base are respectively fixed on two parallel first linear guide rails, and the vertical adjusting mechanism, the plane rotation adjusting mechanism and the sensor fixing platform are sequentially arranged in the groove structure from bottom to top.
Further, a sensor cushion block is arranged on the sensor fixing platform, and the linear displacement sensor is fixed between the sensor cushion block and the pressing piece through pressing the pressing piece.
Further, a plurality of second assembly fixing holes which are arranged in an array are formed in the sensor fixing platform; the press firmware is used for fixing the linear displacement sensors with various specifications by being installed in the second assembly fixing hole. Therefore, the sensor fixing platform can be used for fixedly mounting linear displacement sensors with different specifications.
Further, a laser interferometer reflecting mirror is arranged at the end part of the clamp mounting part moving table far away from the sensor mounting part base.
Further, a connecting piece is arranged at one end, close to the base of the sensor mounting component, of the clamp mounting component moving table, and the second linear guide rail is mounted on the clamp mounting component moving table through the connecting piece.
Further, two bulges are transversely arranged in the middle of the moving platform of the clamp installation part, a groove is formed between the two bulges, the laser interferometer is installed in the groove, and the connecting piece is installed on the bulges on two sides of the groove.
Further, the device also comprises a component fixing table, wherein the component fixing table is arranged at one side close to the reflecting mirror of the laser interferometer; the assembly fixing table is provided with a laser interference mirror and a reflecting mirror assembly, and the central lines of the laser interference mirror, the reflecting mirror assembly, the laser interferometer interference mirror and the sensor connecting measuring rod are overlapped.
The specification of the sensor connecting measuring rod used in the invention is selected according to the types of different linear displacement sensors, such as: the sensor connecting measuring rod is mainly used for matching and calibrating a laser type displacement sensor or an inductance type displacement sensor (20-1 in figure 3), the sensor connecting measuring rod is mainly used for matching and calibrating a stay wire (rope) type displacement sensor (20-2 in figure 3), and the sensor connecting measuring rod is mainly used for matching and calibrating a resistance type displacement sensor (20-3 in figure 3).
The invention has the beneficial effects that:
1. The adjusting device can easily fix and install various linear displacement sensors with different types and specifications, can efficiently complete multidirectional adjustment of the linear displacement sensors, has high installation and adjustment efficiency, reduces the influence of Abbe errors as much as possible, realizes the collineation principle, greatly improves the working efficiency, simultaneously avoids the influence of installation level factors of operators, and can ensure the measurement accuracy requirement.
2. In the adjusting device, the plurality of second assembly fixing holes are arranged on the sensor fixing platform in a displaying way, different types of linear displacement sensors with larger difference in different structural dimensions can be placed on the sensor cushion block, and the calibrated sensor is fixed through a group of press-fixing pieces.
3. In the adjusting device, the vertical direction movement of the sensor fixing platform can be accurately adjusted by adjusting the vertical adjusting mechanism, the horizontal direction rotation of the sensor fixing platform can be accurately adjusted by adjusting the plane rotation adjusting mechanism, so that the sensor and the connecting measuring rod keep a uniform straight line, and then the sensor is finely adjusted by adjusting the fine adjusting screw rod, thereby realizing the multidirectional adjustment of the linear displacement sensor and enabling the sensor to achieve the effect of higher precision.
Drawings
Fig. 1 shows a schematic front view of the structure of the linear displacement sensor calibration high-precision adjusting device of the present invention.
Fig. 2 shows a schematic top view of the structure of the linear displacement sensor calibration high-precision adjusting device of the invention.
In the figure, 1, a sensor mounting part base, 2, a first assembly fixing hole, 3, a first linear guide rail, 4, a sensor fixing platform, 5, a sliding base, 6, a vertical adjusting mechanism, 7, a plane rotation adjusting mechanism, 8, a trimming screw fixing block, 9, a trimming screw, 10, a transmission block, 11, a second assembly fixing hole, 12, a linear displacement sensor, 13, a sensor cushion block, 14, a press firmware, 15, a clamp mounting part moving table, 16, a connecting piece, 17, a second linear guide rail, 18, a sliding block, 19, a supporting block, 20, a sensor connecting measuring rod, 21, a laser interferometer counter mirror, 22, an adjusting auxiliary ruler, 23, a component fixing table, 24, a laser interferometer mirror and a reflecting mirror assembly.
Fig. 3 shows a schematic structural diagram of three different specifications of sensor connecting measuring rods equipped for the linear displacement sensor calibration high-precision adjusting device.
In the figure, 20-1 is connected with a measuring rod by a sensor matched with a calibration laser type displacement sensor or an inductive type displacement sensor, 20-2 is connected with a measuring rod by a sensor matched with a calibration stay wire (rope) type displacement sensor, and 20-3 is connected with a measuring rod by a sensor matched with a calibration resistance type displacement sensor.
Detailed Description
Example 1
As shown in fig. 1 and 2, a high-precision calibration adjustment device for linear displacement sensors is mainly used for installing and fixedly adjusting displacement sensors of different types and specifications, such as an inductive displacement sensor, a laser displacement sensor, a resistance displacement sensor, a guy wire (rope) displacement sensor and the like. The apparatus includes a sensor mounting part base 1 and a jig mounting part moving table 15; the sensor mounting component base 1 is provided with two parallel first linear guide rails 3 and a fine adjustment screw rod 9, the two parallel first linear guide rails 3 are provided with a sliding base 5, the fine adjustment screw rod 9 is connected to one end of the sliding base 5, which is close to the fine adjustment screw rod 9, through a transmission block 10, and the fine adjustment screw rod 9 controls the sliding base 5 to perform displacement adjustment on the first linear guide rails 3 through the transmission block 10; the sliding base 5 is sequentially provided with a vertical adjusting mechanism 6, a plane rotation adjusting mechanism 7 and a sensor fixing platform 4 from bottom to top, the sensor fixing platform 4 is vertically provided with a plurality of pressing pieces 14, and the linear displacement sensor 12 is fixed on the sensor fixing platform 4 through the pressing pieces 14; the second linear guide rail 17, the sliding block 18 and the supporting block 19 are sequentially arranged on the clamp installation part moving table 15 from bottom to top, and the supporting block 19 can move on the second linear guide rail 17 along with the sliding block 18; one end of the supporting block 19 is provided with an adjusting auxiliary ruler 22 perpendicular to the supporting block 19, and a sensor connecting measuring rod 20 is arranged parallel to the supporting block 19; the sensor connecting stylus 20 can be collinear with the calibration point of the linear displacement sensor 12. The vertical adjustment mechanism is used for adjusting the vertical movement of the sensor fixing platform, the plane rotation adjustment mechanism is used for adjusting the rotation of the sensor fixing platform in the horizontal direction, the alignment displacement sensor is adjusted in multiple directions through the vertical adjustment mechanism, the plane rotation adjustment mechanism and the fine adjustment screw rod, the collineation principle is achieved, the working efficiency is greatly improved, meanwhile, the influence of the installation level factor of an operator is avoided, and the measurement accuracy requirement can be guaranteed.
The sensor mounting component base 1 is provided with a fine adjustment screw fixing block 8, and the fine adjustment screw 9 is fixed on the fine adjustment screw fixing block 8. The sensor mounting component base 1 on set up a plurality of first assembly fixed orifices 2 that are the array arrangement, first linear guide 3 and fine setting screw fixed block 8 are fixed on the sensor mounting component base 1 through first assembly fixed orifices 2. The two ends of the sliding base 5 are higher than the middle part, the middle part forms a groove structure, the two ends of the sliding base 5 are respectively fixed on the two parallel first linear guide rails 3, and the vertical adjusting mechanism 6, the plane rotation adjusting mechanism 7 and the sensor fixing platform 4 are sequentially arranged in the groove structure from bottom to top. The sensor fixing platform 4 is provided with a sensor cushion block 13, and the linear displacement sensor 12 is fixed between the sensor cushion block 13 and the pressing piece 14 through pressing the pressing piece 14. A plurality of second assembly fixing holes 11 which are arranged in an array are formed in the sensor fixing platform 4; the press-fitting member 14 fixes the linear displacement sensors 12 of various specifications by being fitted in the second fitting fixing holes 11.
The clamp mounting member moving stage 15 is provided with a laser interferometer reflecting mirror 21 at an end portion thereof remote from the sensor mounting member base 1. The clamp mounting member moving table 15 is provided with a connecting member 16 at an end closer to the sensor mounting member base 1, and the second linear guide 17 is mounted on the clamp mounting member moving table 15 via the connecting member 16. Two bulges are transversely arranged in the middle of the clamp installation part moving table 15, a groove is arranged between the two bulges, the laser interferometer 21 is installed in the groove, and the connecting pieces 16 are installed on the bulges on two sides of the groove.
The device also comprises a component fixing table 23, wherein the component fixing table 23 is arranged on one side close to the laser interferometer reflecting mirror 21; the assembly fixing table 23 is provided with a laser interference mirror and reflector assembly 24, and the center lines of the laser interference mirror and reflector assembly 24, the laser interferometer interference mirror 21 and the sensor connecting measuring rod 20 are overlapped.
Example 2 calibration and high precision adjustment of 1m gauge pull-wire Linear Displacement sensor
Firstly, a sensor connecting measuring rod 20-2 matched with a calibration stay wire (rope) displacement sensor is assembled on a supporting block 19; meanwhile, the calibrated stay wire type linear displacement sensor is placed on the sensor cushion block 13, two pressing pieces 14 are vertically installed on the sensor fixing platform 4 through the second assembly fixing holes 11, the pressing pieces 14 are pressed, and the stay wire type linear displacement sensor placed on the sensor cushion block 13 is fixed between the sensor cushion block 13 and the pressing pieces 14.
Then, the stay wire of the stay wire type linear displacement sensor is connected with a sensor connecting measuring rod 20-2 of the matched calibration stay wire (rope) type displacement sensor, the vertical direction and the horizontal direction are firstly roughly regulated by a vertical regulating mechanism 6 and a plane rotation regulating mechanism 7, then the installation position of the stay wire type linear displacement sensor is finely regulated by a fine regulating screw 9, the sensor connecting measuring rod 20-2 of the matched calibration stay wire (rope) type displacement sensor is kept on the same straight line by visual inspection, a laser pen is directly placed on the initially fixed stay wire type linear displacement sensor, the laser emitted by the laser pen indicates a certain scale line of an auxiliary regulating ruler 22, a sliding block 18 moves on a second linear guide rail 17 to drive the auxiliary regulating ruler fixed on a supporting block 19 and the sensor connecting measuring rod 20-2 of the matched calibration stay wire (rope) type displacement sensor to linearly move, when the stay wire type linear displacement sensor and the sensor connecting measuring rod 20-2 of the matched calibration stay wire (rope) type displacement sensor deviate in the moving process, and the laser pen can also rotate on the auxiliary regulating ruler 22 again by the auxiliary regulating mechanism 6 when the stay wire type linear displacement sensor and the auxiliary regulating ruler are not deviated from the same straight line. Finally, the stay wire and the sensor connecting measuring rod 20-2 matched with the calibration stay wire (rope) type displacement sensor always keep the collinearly principle in the calibration process of the stay wire type linear displacement sensor.
Example 3 calibration and high precision adjustment of laser displacement sensor
Firstly, a sensor connecting measuring rod 20-1 matched with a calibration laser displacement sensor or an inductance displacement sensor is assembled on a supporting block 19, meanwhile, the calibrated wire-drawing type displacement sensor is placed on a sensor cushion block 13, two pressing pieces 14 are vertically installed on a sensor fixing platform 4 through a second assembling fixing hole 11, the pressing pieces 14 are pressed, and the laser displacement sensor placed on the sensor cushion block 13 is fixed between the sensor cushion block 13 and the pressing pieces 14.
The laser beam emitted by the laser displacement sensor is hit to the plane end of the sensor connecting measuring rod 20-1 matched with the calibration laser displacement sensor or the inductance displacement sensor, the vertical direction and the horizontal direction are roughly adjusted firstly through the vertical adjusting mechanism 6 and the plane rotation adjusting mechanism 7, then the mounting position of the laser displacement sensor is finely adjusted by using the fine adjusting screw 9, the laser beam of the laser displacement sensor and the sensor connecting measuring rod 20-1 matched with the calibration laser displacement sensor or the inductance displacement sensor are kept in the same straight line by visual inspection, a laser beam is directly placed on the linear displacement sensor 12 which is fixed at the beginning, the laser emitted by the laser pen indicates the position of a certain scale mark of the adjusting auxiliary ruler 22, the sliding block 18 moves on the second linear guide rail 17 to drive the adjusting auxiliary ruler fixed on the supporting block 19 and the sensor connecting measuring rod 20-1 matched with the calibration laser displacement sensor or the inductance displacement sensor, and the laser beam displacement sensor is enabled to move linearly when the laser displacement sensor is hit to the linear displacement sensor matched with the calibration laser displacement sensor or the inductance displacement sensor, and the laser pen is offset from the plane end of the first linear guide rail 20-1 in the vertical direction, and the laser pen can deflect from the initial plane guide mechanism through the second linear guide rail 17 when the laser pen moves on the first linear guide rail and the second linear guide rail 17. Finally, the laser beam of the laser displacement sensor and the sensor connecting measuring rod 20-1 matched with the calibration laser displacement sensor or the inductance displacement sensor always keep the collineation principle in the calibration process of the laser displacement sensor.
Example 4 calibration and high precision adjustment of inductive displacement sensor
The calibration inductive displacement sensor is also selected from a sensor connecting measuring rod 20-1 matched with the calibration laser displacement sensor or the inductive displacement sensor, firstly, the sensor connecting measuring rod 20-1 matched with the calibration laser displacement sensor or the inductive displacement sensor is assembled on a supporting block 19, the calibrated inductive displacement sensor is placed on a sensor cushion block 13, two pressing pieces 14 are vertically installed on a sensor fixing platform 4 through a second assembling fixing hole 11, the pressing pieces 14 are pressed, and the inductive displacement sensor placed on the sensor cushion block 13 is fixed between the sensor cushion block 13 and the pressing pieces 14.
The telescopic rod of the inductive displacement sensor is matched with a calibration laser type displacement sensor or the sensor connecting measuring rod 20-1 of the inductive displacement sensor to be compressed, the vertical direction and the horizontal direction are firstly roughly regulated by the vertical regulating mechanism 6 and the plane rotation regulating mechanism 7, then the installation position of the inductive displacement sensor is finely regulated by the fine regulating screw 9, the telescopic rod of the inductive displacement sensor and the sensor connecting measuring rod 20-1 matched with the calibration laser type displacement sensor or the inductive displacement sensor are kept in the same straight line by visual inspection, a laser is directly placed on the initially fixed inductive displacement sensor, the laser emitted by the laser pen indicates the position of a certain scale mark of the regulating auxiliary scale 22, the sliding block 18 moves on the second linear guide rail 17 to drive the regulating auxiliary scale fixed on the supporting block 19 and the connecting measuring rod 20 (1), and if the telescopic rod of the inductive displacement sensor and the sensor connecting measuring rod 20-1 matched with the calibration laser type displacement sensor deviate from the plane at the moment in the movement of the end of the initial calibration laser type displacement sensor, the initial scale is also rotated by the fine regulating mechanism 9 when the telescopic rod deviates from the plane of the initially fixed auxiliary scale 22, and the initial regulating mechanism is rotated at the moment. Finally, the telescopic rod and the sensor connecting measuring rod 20-1 matched with the calibration laser type displacement sensor or the inductive type displacement sensor always keep the collineation principle in the calibration process of the inductive type displacement sensor.
Example 5 calibration and high precision adjustment of resistive displacement sensor
First, the sensor connecting measuring rod 20-3 matched with the calibrated resistance type displacement sensor is assembled on the supporting block 19, the calibrated resistance type displacement sensor is placed on the sensor cushion block 13, two pressing pieces 14 are vertically installed on the sensor fixing platform 4 through the second assembling fixing holes 11, the pressing pieces 14 are pressed, and the resistance type displacement sensor placed on the sensor cushion block 13 is fixed between the sensor cushion block 13 and the pressing pieces 14.
The sensor pull rod is connected with the sensor connecting measuring rod 20-3 matched with the calibration resistance type displacement sensor, the vertical direction and the horizontal direction are firstly roughly regulated by the vertical regulating mechanism 6 and the plane rotation regulating mechanism 7, then the resistor type displacement sensor mounting position is finely regulated by the fine regulating screw rod 9, the sensor pull rod and the sensor connecting measuring rod 20-3 matched with the calibration resistance type displacement sensor are kept on the same straight line by visual inspection, a laser is directly placed on the initially fixed resistor type displacement sensor, the laser emitted by the laser pen indicates the position of a certain scale mark of the regulating auxiliary scale 22, the sliding block 18 moves on the second linear guide rail 17 to drive the regulating auxiliary scale fixed on the supporting block 19 and the sensor connecting measuring rod 20-3 matched with the calibration resistance type displacement sensor to linearly move, and if the resistor type displacement sensor pull line and the sensor connecting measuring rod 20-3 matched with the calibration resistance type displacement sensor are not offset on the same straight line in the moving process, the laser indication can also deviate from the initial fixed scale 22, and the plane rotation regulating mechanism 7 can be regulated by the fine regulating mechanism again. Finally, the principle that the pull wire and the sensor connecting measuring rod 20-3 matched with the calibrated resistive displacement sensor are always kept collinear in the calibration process of the resistive displacement sensor is realized.
The foregoing description of embodiments of the invention has been presented for purposes of illustration and description, and is not intended to be exhaustive or limited to the embodiments disclosed.
Claims (8)
1. A high-precision adjustment device for calibrating a linear displacement sensor, which is characterized by comprising a sensor mounting component base (1) and a clamp mounting component moving table (15);
The sensor mounting component base (1) is provided with two parallel first linear guide rails (3) and a fine adjustment screw rod (9), the two parallel first linear guide rails (3) are provided with a sliding base (5), the fine adjustment screw rod (9) is connected to one end, close to the fine adjustment screw rod (9), of the sliding base (5) through a transmission block (10), and the fine adjustment screw rod (9) controls the sliding base (5) to perform displacement adjustment on the first linear guide rails (3) through the transmission block (10); the sliding base (5) is sequentially provided with a vertical adjusting mechanism (6), a plane rotation adjusting mechanism (7) and a sensor fixing platform (4) from bottom to top, the sensor fixing platform (4) is vertically provided with a plurality of press fixing pieces (14), and the linear displacement sensor (12) is fixed on the sensor fixing platform (4) through the press fixing pieces (14);
the clamp installation part moving table (15) is sequentially provided with a second linear guide rail (17), a sliding block (18) and a supporting block (19) from bottom to top, and the supporting block (19) can move on the second linear guide rail (17) along with the sliding block (18); an adjusting auxiliary ruler (22) is arranged at one end part of the supporting block (19) perpendicular to the supporting block (19), and a sensor connecting measuring rod (20) is arranged parallel to the supporting block (19); the sensor connecting measuring rod (20) can be in the same straight line with the calibration point of the linear displacement sensor (12);
A laser interferometer (21) is arranged at the end part of the clamp installation part moving table (15) far away from the sensor installation part base (1); a connecting piece (16) is arranged at one end, close to the sensor mounting part base (1), of the clamp mounting part moving table (15), and a second linear guide rail (17) is mounted on the clamp mounting part moving table (15) through the connecting piece (16).
2. The linear displacement sensor calibration high-precision adjusting device according to claim 1, wherein a fine adjustment screw fixing block (8) is arranged on the sensor mounting component base (1), and the fine adjustment screw (9) is fixed on the fine adjustment screw fixing block (8).
3. The linear displacement sensor calibration high-precision adjusting device according to claim 2, wherein a plurality of first assembly fixing holes (2) which are arranged in an array are formed in the sensor mounting component base (1), and the first linear guide rail (3) and the fine adjustment screw fixing block (8) are fixed on the sensor mounting component base (1) through the first assembly fixing holes (2).
4. The linear displacement sensor calibration high-precision adjusting device according to claim 1, wherein two ends of the sliding base (5) are higher than a middle part, the middle part forms a groove structure, two ends of the sliding base (5) are respectively fixed on two parallel first linear guide rails (3), and the vertical adjusting mechanism (6), the plane rotation adjusting mechanism (7) and the sensor fixing platform (4) are sequentially arranged in the groove structure from bottom to top.
5. The linear displacement sensor calibration high-precision adjusting device according to claim 1, wherein a sensor cushion block (13) is arranged on the sensor fixing platform (4), and the linear displacement sensor (12) is fixed between the sensor cushion block (13) and the pressing piece (14) through pressing the pressing piece (14).
6. The linear displacement sensor calibration high-precision adjusting device according to claim 1, wherein a plurality of second assembly fixing holes (11) which are arranged in an array are formed on the sensor fixing platform (4); the press fitting piece (14) is used for fixing the linear displacement sensors (12) with various specifications by being installed in the second assembly fixing hole (11).
7. The linear displacement sensor calibration high-precision adjusting device according to claim 1, wherein two protrusions are transversely arranged in the middle of the clamp mounting part moving table (15), a groove is formed between the two protrusions, the laser interferometer anti-interference mirror (21) is mounted in the groove, and the connecting pieces (16) are mounted on the protrusions on two sides of the groove.
8. The linear displacement sensor calibration high-precision adjustment device according to claim 1, further comprising a component mount (23), the component mount (23) being on a side close to the laser interferometer (21); the assembly fixing table (23) is provided with a laser interference mirror and reflector assembly (24), and the central lines of the laser interference mirror and reflector assembly (24), the laser interferometer interference mirror (21) and the sensor connecting measuring rod (20) are overlapped.
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| CN112066961B (en) * | 2020-09-15 | 2021-04-13 | 山东鑫诚精密机械有限公司 | Abbe error control system for precision measurement |
| CN112504193B (en) * | 2020-12-11 | 2022-06-07 | 中国航空工业集团公司北京长城计量测试技术研究所 | Variable-angle measuring device and method for stay cord displacement sensor |
| CN113790690B (en) * | 2021-11-17 | 2024-04-02 | 陕西省计量科学研究院 | Clamping posture adjusting system and adjusting method for linear displacement sensor for calibration |
| CN114370817B (en) * | 2022-01-12 | 2023-08-15 | 中国测试技术研究院机械研究所 | Device and method for calibrating club instrument |
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| CN103630099A (en) * | 2013-12-02 | 2014-03-12 | 常州市计量测试技术研究所 | Automated linear displacement sensor calibration device |
| CN106370142A (en) * | 2016-11-15 | 2017-02-01 | 江苏方天电力技术有限公司 | Wide range displacement sensor calibrating device and calibrating method |
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| JP2928206B2 (en) * | 1997-10-21 | 1999-08-03 | 山形日本電気株式会社 | Apparatus and method for manufacturing semiconductor device |
| CN110542397A (en) * | 2019-09-03 | 2019-12-06 | 龙岩市计量所 | A comprehensive calibration device for linear displacement sensors |
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| CN103630099A (en) * | 2013-12-02 | 2014-03-12 | 常州市计量测试技术研究所 | Automated linear displacement sensor calibration device |
| CN106370142A (en) * | 2016-11-15 | 2017-02-01 | 江苏方天电力技术有限公司 | Wide range displacement sensor calibrating device and calibrating method |
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