CN111085942B - A kind of abrasive micro-jet polishing method and polishing device based on phase-controlled cavitation effect - Google Patents
A kind of abrasive micro-jet polishing method and polishing device based on phase-controlled cavitation effect Download PDFInfo
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- CN111085942B CN111085942B CN201911426168.8A CN201911426168A CN111085942B CN 111085942 B CN111085942 B CN 111085942B CN 201911426168 A CN201911426168 A CN 201911426168A CN 111085942 B CN111085942 B CN 111085942B
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- 238000000034 method Methods 0.000 title claims abstract description 34
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- 239000012530 fluid Substances 0.000 claims abstract description 22
- 230000005284 excitation Effects 0.000 claims abstract description 14
- 239000000919 ceramic Substances 0.000 claims description 41
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- 238000007789 sealing Methods 0.000 claims description 10
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- 238000004401 flow injection analysis Methods 0.000 claims description 7
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- 238000002161 passivation Methods 0.000 claims description 7
- 238000004364 calculation method Methods 0.000 claims description 5
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- 238000003491 array Methods 0.000 claims description 3
- 229910002113 barium titanate Inorganic materials 0.000 claims description 3
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical group [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 claims description 3
- 229910052451 lead zirconate titanate Inorganic materials 0.000 claims description 3
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims description 3
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- 230000006378 damage Effects 0.000 abstract description 5
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
- B24C1/08—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for polishing surfaces, e.g. smoothing a surface by making use of liquid-borne abrasives
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C3/00—Abrasive blasting machines or devices; Plants
- B24C3/02—Abrasive blasting machines or devices; Plants characterised by the arrangement of the component assemblies with respect to each other
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C5/00—Devices or accessories for generating abrasive blasts
- B24C5/005—Vibratory devices, e.g. for generating abrasive blasts by ultrasonic vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C5/00—Devices or accessories for generating abrasive blasts
- B24C5/02—Blast guns, e.g. for generating high velocity abrasive fluid jets for cutting materials
- B24C5/04—Nozzles therefor
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
本发明公开了一种基于相控空化效应的磨粒微射流抛光方法，该方法将相控声波聚焦原理引入到磨粒微射流抛光领域，通过调节声波发射频率和功率、激励脉冲相位延迟时间，可实现在不改变喷嘴距离工件表面高度以及微射流流速等工艺参数的情况下，对空泡尺度、空化强度以及空泡群溃灭冲击区域位置的单独控制。本发明还提供了一种基于相控空化效应的磨粒微射流抛光装置，该装置采用锥形射流腔体对空化发生装置与射流装置进行耦合设计，可在机械手或六自由度移动平台的驱动下，完成微结构、复杂曲面零件的抛光。相比于其他空化辅助流体抛光方法，本发明可实现以单一变量控制的方式灵活调控空泡溃灭对磨粒‑壁面冲击动能的增强程度，避免发生空蚀破坏，保证工件表面空化冲击的均匀性。
The invention discloses an abrasive particle micro-jet polishing method based on a phase-controlled cavitation effect. The method introduces the phase-controlled acoustic wave focusing principle into the field of abrasive particle micro-jet polishing, and adjusts the acoustic wave emission frequency and power, and the excitation pulse phase delay time. , which can realize the independent control of the size of the cavitation, the intensity of cavitation and the position of the impact area of the collapse of the cavitation group without changing the process parameters such as the height of the nozzle from the workpiece surface and the flow rate of the micro-jet. The invention also provides an abrasive particle micro-jet polishing device based on the phase-controlled cavitation effect. The device adopts a conical jet cavity to couple the cavitation generating device and the jet device, and can be used on a manipulator or a six-degree-of-freedom mobile platform. Driven by the polishing of microstructure and complex curved parts. Compared with other cavitation-assisted fluid polishing methods, the present invention can flexibly adjust the degree of enhancement of the impact kinetic energy of the abrasive particle-wall surface by the collapse of the cavitation in a single-variable control manner, avoid cavitation damage, and ensure the cavitation impact on the surface of the workpiece. uniformity.
Description
Technical Field
The invention relates to the technical field of abrasive particle micro-jet polishing, in particular to an abrasive particle micro-jet polishing method and device based on a phase-controlled cavitation effect.
Background
In the fields of electronic information, bioengineering, national defense aviation and the like, a class of metal parts with tiny structures and complex profiles exist, and the metal parts are required to have higher surface quality in the use process. The fluid polishing method adopts the fluid with better flexibility as the abrasive particle driving medium, can effectively avoid workpiece damage caused by hard pressing of the abrasive particles, and is gradually applied to polishing of various complex curved surface parts. However, the fluid polishing method is inefficient due to the driving force of the fluid medium, which limits its practical application in industry.
The introduction of cavitation in fluids to enhance polishing efficiency by virtue of the energy generated by cavitation collapse is a major trend in the development of fluid polishing processes. In this type of method, the cavitation intensity determines the enhancement effect of cavitation collapse on the kinetic energy of the abrasive particle-wall impact: the higher the cavitation strength is, the more obvious the enhancement effect is, but the more easily cavitation destruction occurs; the cavitation intensity is insufficient, and the polishing efficiency cannot be obviously improved. The position of the collapse impact area of the cavity group determines the position of an effective reinforcing area, and for parts with high depth-to-width ratio, the position of the collapse impact area of the cavity group is often required to be adjusted for many times in order to achieve uniform reinforcing effect.
The existing cavitation enhanced abrasive particle jet polishing method has certain defects in the aspects of adjusting cavitation intensity and collapse positions of cavitation groups. For example, the invention patent with the application number of CN201610914661.4 provides a high-efficiency fluid finishing method and device based on the structural cavitation effect, the invention introduces the venturi tube cavitation effect into the fluid finishing, and the venturi tube structure is arranged on a processing tool and matched with the high-speed turbulent vortex of abrasive particle flow, so that the polishing of the abrasive particles to the surface of a workpiece is realized. However, the method adopts a hydraulic structure to generate cavitation, and cannot realize active control on cavitation strength under the condition of not changing the flow velocity and components of the abrasive flow; meanwhile, the structure designed by the method is not suitable for micro complex curved surface parts.
Meanwhile, the Chinese patent with the application number of CN201710976740.2 also has the problems. The invention patent with the application number of CN201910362390.X provides an ultrasonic cavitation auxiliary jet polishing system, and the ultrasonic cavitation auxiliary jet polishing system adopts an ultrasonic transducer to enable polishing liquid to generate high-frequency vibration and generate cavitation bubbles, so that the material removal efficiency of abrasive water jet is improved. However, this method requires adjusting the height of the nozzle from the surface of the workpiece or the flow rate of the jet to adjust the collapse position of the cavitation group, and cannot ensure the consistency of the process parameters during the polishing process. Therefore, the research and development of the cavitation enhanced abrasive particle micro-jet polishing method capable of independently regulating and controlling the cavitation intensity and the collapse position of the cavitation group is a very practical work.
Disclosure of Invention
The invention aims to solve the problem that the existing cavitation-enhanced abrasive particle flow polishing method is difficult to independently regulate and control the cavitation intensity and the collapse position of a cavitation bubble group, and provides an abrasive particle micro-jet polishing method and a polishing device based on a phase-controlled cavitation effect.
The invention realizes the purpose through the following technical scheme: a abrasive particle micro-jet polishing method based on a phase-controlled cavitation effect adopts a conical jet cavity to form micro-jet and the micro-jet is emitted to the surface to be polished of a polishing workpiece; meanwhile, annular array piezoelectric ceramics are arranged above the conical jet flow cavity in a coupling mode, and the excitation pulse phase delay time of each annular structure piezoelectric ceramic is controlled through a phase control algorithm, so that sound waves are focused at a sound wave focusing point close to the ejection opening of the conical jet flow cavity; controlling the sound pressure threshold value at the sound wave focusing point to be larger than the cavitation threshold value, so that the cavitation effect is generated at the sound wave focusing point, and the cavitation bubble group is continuously generated; the cavitation bubble group reaches the near-wall surface area of the surface to be polished of the polishing workpiece to be collapsed under the driving of the micro jet, and the micro jet polishing efficiency is improved by means of energy generated by collapse of the cavitation bubble in the cavitation bubble group.
Furthermore, the active control of the size and the cavitation intensity of the air bubbles is realized under the condition of not changing the technological parameters of the micro jet by adjusting the sound wave transmitting frequency and the power of the multi-channel phase-controlled transmitting system.
Furthermore, the height position of the sound wave focusing point, namely the cavitation bubble initial region, is adjusted by adjusting the phase delay time of the excitation pulse. Under the condition of a certain microjet flow speed, the height position of the cavitation bubble primary area directly determines the height position of the cavitation bubble group collapse impact area. Therefore, the invention can adjust the height position of the collapse impact area of the cavitation bubble group in the micro-jet without changing the process parameters of the height of the nozzle from the surface of the workpiece, the flow velocity of the micro-jet and the like by adjusting the phase delay time of the excitation pulse.
Further, the numerical value of the phase delay time is determined by fluid mechanics calculation by combining the flow velocity of the micro jet, the life cycle of the cavitation group and the height position of the pre-designed cavitation group collapse impact area.
Furthermore, the micro jet is low-viscosity liquid-solid two-phase fluid, and the fluid environment is guaranteed to have a lower cavitation threshold.
A grinding particle micro-jet polishing device based on a phased cavitation effect comprises a multi-channel phased emission system, a top end cover, an annular array focusing unit, a high-impedance matching layer, a conical jet cavity, a nozzle, a grinding particle flow injection port, a rubber sealing layer and a low-impedance matching layer; the internal flow channel structure of the conical jet flow cavity is in an inverted cone shape, and a nozzle is arranged at the lower end part of the flow channel; the abrasive particle flow injection port is arranged at the position of the side wall of the conical jet flow cavity; the low-impedance matching layer is arranged on the upper end face of the conical jet flow cavity, and the rubber sealing layer for sealing is arranged at the joint of the low-impedance matching layer and the conical jet flow cavity; the high-impedance matching layer is arranged on the low-impedance matching layer; the top end cover is fixed at the upper end of the high-impedance matching layer, and a circular hollow area is arranged between the top end cover and the high-impedance matching layer; the annular array focusing unit is arranged on the high-impedance matching layer and is positioned in a hollow area between the top end cover and the high-impedance matching layer; the multichannel phased emission system is connected with the annular array focusing unit through a lead.
The annular array focusing unit comprises annular array piezoelectric ceramics, epoxy resin passivation filler and a common electrode; the annular array piezoelectric ceramic is formed by a plurality of annular structure piezoelectric ceramic concentric arrays; the epoxy resin passivation filler is uniformly filled in gaps among the annular piezoelectric ceramics so as to ensure the independence of the working performance of the annular piezoelectric ceramics; the common electrode is positioned below the annular array piezoelectric ceramics; the multichannel phase-controlled transmitting system sends out excitation pulses to excite the annular piezoelectric ceramics to vibrate to generate sound waves.
Further, the high-impedance matching layer is made of hard curing epoxy resin materials filled with alumina particles; the low-impedance matching layer is made of soft curing epoxy resin materials.
Further, the aperture of the nozzle is between 0.1 and 10 mm.
Further, the piezoelectric ceramic with the annular structure is barium titanate piezoelectric ceramic or lead zirconate titanate piezoelectric ceramic.
The invention has the beneficial effects that:
1) according to the abrasive particle micro-jet polishing method based on the phase-controlled cavitation effect, the active control on the size and the cavitation intensity of the air bubbles can be realized under the condition of not changing the technological parameters of the micro-jet by adjusting the sound wave emission frequency and the sound wave emission power of the multi-channel phase-controlled emission system.
2) According to the abrasive particle micro-jet polishing method based on the phased cavitation effect, the delay time of the excitation pulse phase of each annular piezoelectric ceramic structure is adjusted, so that the position of a collapse impact area of a cavitation group in the micro-jet can be flexibly adjusted under the condition that the height of a nozzle from the surface of a workpiece, the flow velocity of the micro-jet and other process parameters are not changed.
3) According to the abrasive particle micro-jet polishing device based on the phased cavitation effect, the conical jet cavity is adopted to carry out coupling design on the cavitation generating device and the jet device, the cavitation generating device and the jet device are combined into a whole, and the whole polishing device is more flexible to control.
4) The abrasive particle micro-jet polishing device based on the phased cavitation effect can finish the high-efficiency fluid polishing of a microstructure and a complex curved surface workpiece under the driving of a robot or a six-degree-of-freedom moving platform.
Drawings
FIG. 1 is a schematic cross-sectional view of an abrasive particle micro-jet polishing device based on a phased cavitation effect.
FIG. 2 is an isometric view of an abrasive particle micro-jet polishing device based on phased cavitation effects of the present invention.
FIG. 3 is a cross-sectional view of a focusing unit of the annular array according to the present invention.
FIG. 4 is a schematic top view of an annular array piezoelectric ceramic of the present invention.
FIG. 5 is a schematic illustration of the rough polishing of the surface of a workpiece according to the present invention.
FIG. 6 is a schematic view of the present invention for fine polishing the surface of a workpiece.
FIG. 7 is a schematic view of high aspect ratio micro-scale feature polishing.
In the figure, a 1-multichannel phased emission system, a 2-top end cover, a 3-annular array focusing unit, a 4-high impedance matching layer, a 5-conical jet flow cavity, a 6-nozzle, a 7-workpiece, an 8-cavitation group collapse impact area, 9-micro jet flow, a 10-sound wave focusing point, 11-sound wave, 12-abrasive particle flow injection ports, a 13-rubber sealing layer, a 14-low impedance matching layer, 31-annular array piezoelectric ceramics, 32-epoxy resin passivation filler and a 33-common electrode are arranged.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described in detail with reference to the accompanying drawings 1 to 7 in conjunction with specific examples. It should be understood that the description is intended to be exemplary only, and is not intended to limit the scope of the present invention. Moreover, in the following description, descriptions of well-known structures and techniques are omitted so as to not unnecessarily obscure the concepts of the present invention.
The invention relates to an abrasive particle micro-jet polishing method based on a phase-controlled cavitation effect, which is characterized in that a conical jet cavity 5 is adopted to form a micro-jet 9, and the micro-jet 9 is emitted to the surface to be polished of a workpiece 7 for jet polishing; meanwhile, annular array piezoelectric ceramics 31 are coupled and arranged above the conical jet flow cavity 5, and the excitation pulse phase delay time of each annular structure piezoelectric ceramic is controlled through a phase control algorithm, so that the sound wave 11 is focused at a sound wave focusing point 10 close to the ejection opening of the conical jet flow cavity 5; controlling the sound pressure threshold value at the sound wave focusing point 10 to be larger than the cavitation threshold value, so that the cavitation effect is generated at the sound wave focusing point 10, and a cavitation bubble group is continuously generated; the cavitation groups reach the near-wall surface area of the surface to be polished of the workpiece 7 under the drive of the micro jet 9 to be collapsed, and the polishing efficiency of the micro jet 9 is improved by means of energy generated by collapse of the cavitation groups.
By adjusting the sound wave transmitting frequency and power of the multi-channel phase-controlled transmitting system 1, the active control of the size and the cavitation intensity of the air bubbles is realized under the condition of not changing the technological parameters of the micro jet 9.
By adjusting the phase delay time of the excitation pulse, the height position of the acoustic wave focusing point 10, i.e., the cavitation bubble generation region, can be adjusted. The height position of the cavitation bubble primary region directly determines the height position of the cavitation bubble burst collapse impact region 8 under the condition that the flow velocity of the micro jet 9 is constant. Therefore, the invention can adjust the height position of the cavitation bubble burst collapse impact area 8 in the micro-jet 9 by adjusting the excitation pulse phase delay time under the condition of not changing the process parameters such as the height of the nozzle 6 from the surface of the workpiece 7, the flow velocity of the micro-jet 9 and the like.
In the invention, the numerical value of the phase delay time is determined by fluid mechanics calculation by combining the flow velocity of the micro jet 9, the life cycle of the cavitation group and the height position of the cavitation group collapse impact region 8 which is designed in advance.
In the present invention, the micro-jet 9 is a low viscosity liquid-solid two-phase fluid, which ensures that the fluid environment has a lower cavitation threshold.
The invention relates to an abrasive particle micro-jet polishing device based on a phased cavitation effect, which comprises a multi-channel phased emission system 1, a top end cover 2, an annular array focusing unit 3, a high-impedance matching layer 4, a conical jet flow cavity 5, a nozzle 6, an abrasive particle flow injection port 12, a rubber sealing layer 13 and a low-impedance matching layer 14, wherein the top end cover is connected with the top end cover; the internal flow channel structure of the conical jet flow cavity 5 is in an inverted cone shape, and the lower end part of the flow channel is provided with a nozzle 6; the abrasive particle flow injection port 12 is arranged on the side wall of the conical jet flow cavity 5; the low-impedance matching layer 14 is arranged on the upper end face of the conical jet flow cavity 5, and the rubber sealing layer 13 for sealing is further arranged at the connection part of the low-impedance matching layer 14 and the conical jet flow cavity 5; the high impedance matching layer 4 is mounted above the low impedance matching layer 14; the top end cover is fixed at the upper end of the high-impedance matching layer, and a circular hollow area is arranged between the top end cover and the high-impedance matching layer; (ii) a The annular array focusing unit 3 is arranged above the high-impedance matching layer and is positioned in a hollow area between the top end cover 2 and the high-impedance matching layer 4; the multichannel phased transmitting system 1 is connected with the annular array focusing unit 3 through a lead.
The annular array focusing unit 3 comprises an annular array piezoelectric ceramic 31, an epoxy resin passivation filler 32 and a common electrode 33; the annular array piezoelectric ceramic 31 is composed of a plurality of annular piezoelectric ceramic concentric arrays; the epoxy resin passivation filler 32 is uniformly filled in gaps among the annular piezoelectric ceramics to ensure the independence of the working performance of the annular piezoelectric ceramics; the common electrode 33 is positioned below the annular array piezoelectric ceramics 31; the multichannel phase-controlled transmitting system 1 sends out excitation pulses to excite each annular structure piezoelectric ceramic to vibrate to generate sound waves 11.
In the present invention, the high impedance matching layer 4 is a hard cured epoxy resin material filled with alumina particles; the low impedance matching layer 14 is a soft cured epoxy material.
As the best choice of the invention, the aperture of the nozzle 6 is between 0.1 and 10 mm.
In the present invention, the piezoelectric ceramic having a ring structure is barium titanate-based piezoelectric ceramic or lead zirconate titanate-based piezoelectric ceramic.
Preferably, the first implementation: step polishing of workpiece surface
As shown in fig. 5 and 6, in a specific polishing process, polishing can be divided into two stages, namely rough polishing and finish polishing, so as to avoid cavitation damage caused by too high cavitation intensity. In the rough polishing stage, the prepared abrasive particles flow through a high-pressure water pump and are injected into the conical jet flow cavity 5, and a microjet 9 is formed through the bottom nozzle 6 to polish the workpiece 7; on the basis of this, the multi-channel phase-controlled transmitting system 1 is in time interval Deltat1Exciting each annular structure piezoelectric ceramic, stably focusing the sound wave 11 generated by each annular structure piezoelectric ceramic at a sound wave focusing point 10, and continuously generating cavitation bubble groups because the sound pressure of the area is greater than a cavitation threshold value; the generated cavitation bubble group directly impacts the surface of the workpiece 7 under the driving of the micro jet 8, and the energy generated by the collapsed cavitation bubbles on the surface of the workpiece 7 effectively improves the abrasive particle jet polishing efficiency; the whole polishing device completes rough polishing on the whole surface of the workpiece 7 under the driving of the mechanical arm or the six-degree-of-freedom moving platform.
After the rough polishing is finished, the whole polishing device returns to the polishing starting point under the driving of the manipulator or the six-degree-of-freedom moving platform, and the finish polishing of the whole surface of the workpiece 7 is started. In the fine polishing stage, the transmission power of the multi-channel phase-controlled transmission system 1 is reduced, and simultaneously the phase delay time is changed into delta t2) And controlling the position of the sound wave focusing point 10 to move upwards, so that the cavitation collapse impact area 8 is separated from the surface of the workpiece 7, the enhancement of the cavitation collapse on the abrasive particle-wall surface impact kinetic energy is directly weakened, and cavitation erosion damage is avoided.
The prepared micro jet 9 is a low-viscosity liquid-solid two-phase fluid, and the fluid environment is guaranteed to have a lower cavitation threshold.
The phase delay time Δ t1The specific numerical value of (2) needs to be combined with the flow velocity of the micro jet 9 and the height of the nozzle 6 from the surface of the workpiece to carry out fluid mechanics calculation, so that the service life cycle of the cavitation bubble group is ensured to be longer than the time required for the cavitation bubble group to move from the inlet of the nozzle 6 to the surface of the workpiece 7.
The phase delay time Δ t2The specific numerical value of (2) needs to be calculated by combining the life cycle of the cavitation group on the basis of the calculation, so that the life cycle of the cavitation group is ensured to be smaller than the time required for the cavitation group to move from the inlet of the nozzle 6 to the surface of the workpiece 7.
The second preferred embodiment: polishing for high aspect ratio micro-scale parts
As shown in fig. 7, when the micro-scale component with a high aspect ratio is faced, the excitation pulse phase delay time can be adjusted for multiple times in the polishing process of the micro-jet 9, and the sound wave focus point 10 is controlled to move back and forth along the height direction, so that the cavitation collapse impact area 8 moves back and forth along the depth direction of the workpiece, and the uniform coverage of the cavitation impact on the wall surface of the micro-groove of the workpiece 7 is realized.
The above embodiments are only preferred embodiments of the present invention, and are not intended to limit the technical solutions of the present invention, so long as the technical solutions can be realized on the basis of the above embodiments without creative efforts, which should be considered to fall within the protection scope of the patent of the present invention.
Claims (6)
1. A abrasive particle micro-jet polishing method based on a phase control cavitation effect is characterized in that: the abrasive particle micro-jet polishing device based on the phased cavitation effect is adopted, and comprises a multi-channel phased emission system (1), a top end cover (2), an annular array focusing unit (3), a high-impedance matching layer (4), a conical jet cavity (5), a nozzle (6), an abrasive particle flow injection port (12), a rubber sealing layer (13) and a low-impedance matching layer (14); the internal flow channel structure of the conical jet flow cavity (5) is in an inverted cone shape, and the lower end part of the flow channel is provided with a nozzle (6); the abrasive particle flow injection port (12) is arranged on the side wall of the conical jet flow cavity (5); the low-impedance matching layer (14) is arranged on the upper end face of the conical jet flow cavity (5), and a rubber sealing layer (13) for sealing is further arranged at the joint of the low-impedance matching layer (14) and the conical jet flow cavity (5); the high-impedance matching layer (4) is arranged on the upper surface of the low-impedance matching layer (14); the top end cover (2) is fixed at the upper end of the high-impedance matching layer (4), and a circular hollow area is arranged between the top end cover (2) and the high-impedance matching layer (4); the annular array focusing unit (3) is arranged above the high-impedance matching layer and is positioned in a hollow area between the top end cover (2) and the high-impedance matching layer (4); the multichannel phased transmitting system (1) is connected with the annular array focusing unit (3) through a lead;
forming a micro-jet (9) by adopting a conical jet cavity (5) and jetting the micro-jet (9) to the surface to be polished of the polishing workpiece (7) for jet polishing; meanwhile, annular array piezoelectric ceramics (31) are coupled and arranged above the conical jet flow cavity (5), and the excitation pulse phase delay time of each annular structure piezoelectric ceramic is controlled through a phase control algorithm, so that the sound waves (11) are focused at a sound wave focusing point (10) close to the ejection opening of the conical jet flow cavity (5); controlling the sound pressure threshold value at the sound wave focusing point (10) to be larger than the cavitation threshold value, so that the cavitation effect is generated at the sound wave focusing point (10) and the cavitation bubble group is continuously generated; the cavitation bubble group reaches a near-wall surface area of the surface to be polished of the polishing workpiece (7) to be destroyed under the drive of the micro jet (9), and the polishing efficiency of the micro jet (9) is improved by means of energy generated by the collapse of the cavitation bubble in the cavitation bubble group;
active control over the size and the cavitation intensity of the air bubbles is realized under the condition of not changing the technological parameters of the micro jet (9) by adjusting the sound wave emission frequency and the power of the multi-channel phase-controlled emission system (1);
the height position of a sound wave focusing point (10), namely a cavitation bubble primary region, is adjusted by adjusting the phase delay time of the excitation pulse;
and the numerical value of the phase delay time is combined with the flow velocity of the micro jet (9), the life cycle of the cavitation group and the height position of a pre-designed cavitation group collapse impact area (8) to carry out fluid mechanics calculation and determination.
2. The abrasive particle micro-jet polishing method based on the phased cavitation effect according to claim 1, characterized in that: the micro jet (9) is low-viscosity liquid-solid two-phase fluid, and the fluid environment is guaranteed to have a lower cavitation threshold.
3. The abrasive particle micro-jet polishing method based on the phased cavitation effect according to claim 1, characterized in that: the annular array focusing unit (3) comprises an annular array piezoelectric ceramic (31), epoxy resin passivation filler (32) and a common electrode (33); the annular array piezoelectric ceramics (31) is composed of a plurality of annular structure piezoelectric ceramics concentric arrays; the epoxy resin passivation filler (32) is uniformly filled in gaps among the annular piezoelectric ceramics so as to ensure the independence of the working performance of the annular piezoelectric ceramics; the common electrode (33) is positioned below the annular array piezoelectric ceramics (31); the multichannel phase-controlled transmitting system (1) sends out excitation pulses to excite the annular piezoelectric ceramics to vibrate to generate sound waves (11).
4. The abrasive particle micro-jet polishing method based on the phased cavitation effect according to claim 1, characterized in that: the high-impedance matching layer (4) is a hard curing epoxy resin material filled with a certain amount of alumina particles; the low impedance matching layer (14) is a soft cured epoxy material.
5. The abrasive particle micro-jet polishing method based on the phased cavitation effect according to claim 1, characterized in that: the aperture of the nozzle (6) is between 0.1 and 10 mm.
6. The abrasive particle micro-jet polishing method based on the phased cavitation effect according to claim 3, characterized in that: the piezoelectric ceramic with the annular structure is barium titanate piezoelectric ceramic or lead zirconate titanate piezoelectric ceramic.
Priority Applications (1)
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| CN112008614A (en) * | 2020-08-27 | 2020-12-01 | 天津大学 | Ultrasonic cavitation-assisted multi-nozzle jet polishing device and polishing method |
| CN112720273B (en) * | 2021-01-08 | 2025-01-10 | 中国计量大学 | An ultrasonic vibration modulated pulse abrasive microjet polishing system |
| CN113084714A (en) * | 2021-04-21 | 2021-07-09 | 中国科学院宁波材料技术与工程研究所 | Cavitation shot blasting device |
| CN113511297A (en) * | 2021-05-24 | 2021-10-19 | 中国计量大学 | Method for reducing wall cavitation by utilizing filament to regulate and control cavitation bubble jet |
| CN118393001A (en) * | 2024-06-27 | 2024-07-26 | 北京通泰恒盛科技有限责任公司 | Air coupling acoustic emission sensor |
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