CN111032335A - 阻气性层叠体 - Google Patents
阻气性层叠体 Download PDFInfo
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- CN111032335A CN111032335A CN201880051005.3A CN201880051005A CN111032335A CN 111032335 A CN111032335 A CN 111032335A CN 201880051005 A CN201880051005 A CN 201880051005A CN 111032335 A CN111032335 A CN 111032335A
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- gas barrier
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- 230000004888 barrier function Effects 0.000 title claims abstract description 46
- 239000010408 film Substances 0.000 claims abstract description 59
- 239000010409 thin film Substances 0.000 claims abstract description 33
- 238000011282 treatment Methods 0.000 claims abstract description 25
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims abstract description 16
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 9
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 8
- 239000007864 aqueous solution Substances 0.000 claims abstract description 6
- 150000001875 compounds Chemical class 0.000 claims description 4
- 229920000642 polymer Polymers 0.000 claims description 3
- 239000002253 acid Substances 0.000 abstract description 21
- 229920000307 polymer substrate Polymers 0.000 abstract description 7
- 238000010030 laminating Methods 0.000 abstract description 4
- 239000007789 gas Substances 0.000 description 52
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 38
- 238000007740 vapor deposition Methods 0.000 description 23
- 239000010410 layer Substances 0.000 description 21
- 238000010438 heat treatment Methods 0.000 description 20
- 239000000463 material Substances 0.000 description 20
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 18
- 239000001301 oxygen Substances 0.000 description 18
- 229910052760 oxygen Inorganic materials 0.000 description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 17
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 14
- 238000001704 evaporation Methods 0.000 description 14
- 230000008020 evaporation Effects 0.000 description 14
- 238000002834 transmittance Methods 0.000 description 14
- 239000002131 composite material Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 12
- 229910052814 silicon oxide Inorganic materials 0.000 description 9
- 229910052681 coesite Inorganic materials 0.000 description 8
- 238000001816 cooling Methods 0.000 description 8
- 229910052906 cristobalite Inorganic materials 0.000 description 8
- 239000000377 silicon dioxide Substances 0.000 description 8
- 229910052682 stishovite Inorganic materials 0.000 description 8
- 229910052905 tridymite Inorganic materials 0.000 description 8
- 238000003475 lamination Methods 0.000 description 7
- 229920000620 organic polymer Polymers 0.000 description 7
- 239000002245 particle Substances 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000004806 packaging method and process Methods 0.000 description 6
- 238000001771 vacuum deposition Methods 0.000 description 6
- 235000013305 food Nutrition 0.000 description 5
- 238000002156 mixing Methods 0.000 description 5
- 239000002985 plastic film Substances 0.000 description 5
- 229920006255 plastic film Polymers 0.000 description 5
- -1 polyethylene Polymers 0.000 description 5
- 229920000139 polyethylene terephthalate Polymers 0.000 description 5
- 239000005020 polyethylene terephthalate Substances 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 229920002799 BoPET Polymers 0.000 description 4
- 239000004698 Polyethylene Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 229910052593 corundum Inorganic materials 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 239000005022 packaging material Substances 0.000 description 4
- 239000011148 porous material Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 229910001845 yogo sapphire Inorganic materials 0.000 description 4
- OEPOKWHJYJXUGD-UHFFFAOYSA-N 2-(3-phenylmethoxyphenyl)-1,3-thiazole-4-carbaldehyde Chemical compound O=CC1=CSC(C=2C=C(OCC=3C=CC=CC=3)C=CC=2)=N1 OEPOKWHJYJXUGD-UHFFFAOYSA-N 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 239000003814 drug Substances 0.000 description 3
- 238000005470 impregnation Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- 230000035699 permeability Effects 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- 229920000219 Ethylene vinyl alcohol Polymers 0.000 description 2
- 150000007513 acids Chemical class 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000005034 decoration Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 229940079593 drug Drugs 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 239000005001 laminate film Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 238000004064 recycling Methods 0.000 description 2
- UOBYKYZJUGYBDK-UHFFFAOYSA-N 2-naphthoic acid Chemical compound C1=CC=CC2=CC(C(=O)O)=CC=C21 UOBYKYZJUGYBDK-UHFFFAOYSA-N 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- JHWNWJKBPDFINM-UHFFFAOYSA-N Laurolactam Chemical compound O=C1CCCCCCCCCCCN1 JHWNWJKBPDFINM-UHFFFAOYSA-N 0.000 description 1
- 229920000299 Nylon 12 Polymers 0.000 description 1
- 229920001007 Nylon 4 Polymers 0.000 description 1
- 229920002292 Nylon 6 Polymers 0.000 description 1
- 229920002302 Nylon 6,6 Polymers 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 239000004962 Polyamide-imide Substances 0.000 description 1
- 239000004697 Polyetherimide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004734 Polyphenylene sulfide Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 229920001328 Polyvinylidene chloride Polymers 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000003929 acidic solution Substances 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 238000007605 air drying Methods 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000002216 antistatic agent Substances 0.000 description 1
- 239000004760 aramid Substances 0.000 description 1
- 229920003235 aromatic polyamide Polymers 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000003851 corona treatment Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 208000028659 discharge Diseases 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 238000009820 dry lamination Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000009998 heat setting Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000004093 laser heating Methods 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000012785 packaging film Substances 0.000 description 1
- 229920006280 packaging film Polymers 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 229920002312 polyamide-imide Polymers 0.000 description 1
- 229920001707 polybutylene terephthalate Polymers 0.000 description 1
- 229920001601 polyetherimide Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 229920001955 polyphenylene ether Polymers 0.000 description 1
- 229920000069 polyphenylene sulfide Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000005033 polyvinylidene chloride Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000012779 reinforcing material Substances 0.000 description 1
- 230000002940 repellent Effects 0.000 description 1
- 239000005871 repellent Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000006097 ultraviolet radiation absorber Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D65/00—Wrappers or flexible covers; Packaging materials of special type or form
- B65D65/02—Wrappers or flexible covers
- B65D65/22—Details
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D65/00—Wrappers or flexible covers; Packaging materials of special type or form
- B65D65/38—Packaging materials of special type or form
- B65D65/42—Applications of coated or impregnated materials
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
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- C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
- C08J7/04—Coating
- C08J7/06—Coating with compositions not containing macromolecular substances
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D2565/00—Wrappers or flexible covers; Packaging materials of special type or form
- B65D2565/38—Packaging materials of special type or form
- B65D2565/381—Details of packaging materials of special type or form
- B65D2565/387—Materials used as gas barriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D2585/00—Containers, packaging elements or packages specially adapted for particular articles or materials
- B65D2585/68—Containers, packaging elements or packages specially adapted for particular articles or materials for machines, engines, or vehicles in assembled or dismantled form
- B65D2585/86—Containers, packaging elements or packages specially adapted for particular articles or materials for machines, engines, or vehicles in assembled or dismantled form for electrical components
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- C08J2367/00—Characterised by the use of polyesters obtained by reactions forming a carboxylic ester link in the main chain; Derivatives of such polymers
- C08J2367/02—Polyesters derived from dicarboxylic acids and dihydroxy compounds
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
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Abstract
本发明要解决的问题在于,提供耐酸性、透明性、阻气性优异的阻气薄膜。本发明的阻气性层叠体为在高分子基材的至少一面层叠无机薄膜层而成的层叠体,该无机薄膜层主要含有Al和Si,并且进行了在1摩尔/L的盐酸水溶液中浸渍1小时的处理时的、处理前后的Al含量之比满足(处理后的Al含量)/(处理前的Al含量)×100≥75的式子。
Description
技术领域
本发明涉及酸耐性、阻气性优异,适用于食品包装或电子元件等的包装的阻气性层叠体。
背景技术
近年,食品、药物、电子元件等中使用的包装材料,为了抑制内容物的氧化、变质、腐蚀等,需要防止氧、水蒸气等气体(gas)透过包装材料,寻求具有阻断这些气体的阻气性的包装材料。
作为阻气性优异的薄膜,已知在塑料薄膜上层叠铝(以下称为Al)而成的薄膜、涂覆偏二氯乙烯、乙烯乙烯醇共聚物而成的薄膜。另外,作为利用无机薄膜的薄膜,已知层叠氧化硅、氧化铝薄膜等而成的薄膜。
这种以往的阻气性薄膜具有以下的问题。Al层叠品虽然经济性、阻气性优异,但是不透明,因此不能看到包装时的内容物,另外,不透过微波,因此不能在电灶中使用。另外,若包装材料和包装体的结构的一部分含有Al则也存在不能进行塑料薄膜的回收再利用(recycling)这种问题。对于涂覆偏二氯乙烯、乙烯乙烯醇共聚物而成的薄膜,水蒸气、氧等的阻气性不充分,特别是在煮沸处理、蒸煮处理等高温处理中阻气性降低显著。另外,对于偏二氯乙烯系而言,焚烧时产生氯气等,也有可能对地球环境造成影响。
为了克服这些问题,最近提出了在由透明的高分子材料形成的基材上使用真空蒸镀法等方法形成陶瓷薄膜而成的透明蒸镀薄膜。
作为该陶瓷薄膜的材料,经常使用一氧化硅等硅氧化物、氧化铝(以下称为Al2O3)。但是阻气性良好的硅氧化物稍微具有褐色,作为透明阻气薄膜,不充分。另外,对于Al2O3而言,原材料的蒸发温度高、蒸镀工序中的蒸发速度变慢。因此,为了附着表现出阻气性的程度的充分膜厚,成膜时间延长、生产效率变差而导致高成本化。
为了解决上述问题,专利文献1中,通过将Al2O3和硅氧化物混合、形成复合氧化物的薄膜,以比较短的成膜时间制成透明性优异的薄膜。
但是本发明人等发现,利用上述方法制成的阻气薄膜由于浸渍于酸性溶液而存在无机薄膜层溶解的问题。
现有技术文献
专利文献
专利文献1:日本特开平7-242760号公报
发明内容
发明要解决的问题
本发明的目的在于,提供耐酸性和阻气性优异、可以用于对于酸性的食品的包装袋、或不耐酸的电子元件等的包装的层叠体。
用于解决问题的方案
本发明人等以上述现有技术的问题作为背景而进行深入研究,结果发现,通过调整蒸镀材料的加热比率等蒸镀条件、蒸镀方法,形成具有高的酸耐性和高的阻气性、透明性的层叠体。
本发明人等深入研究结果发现,通过以下所示的手段,可以解决上述问题,从而达成了本发明。即,本发明包含以下的技术特征。
1.一种层叠体,其特征在于,在高分子基材的至少一面层叠无机薄膜层而成的层叠体中,该无机薄膜层主要含有Al和Si,并且进行了在1摩尔/L的盐酸水溶液中浸渍1小时的处理时的、处理前后的无机薄膜层中的Al含量之比满足以下的式1。
(处理后的Al含量)/(处理前的Al含量)×100≥75 (式1)
2.根据1.所述的层叠体,其特征在于,该无机薄膜层为由含有Al和Si的复合氧化化合物形成的蒸镀膜层。
发明的效果
本发明中,通过调整Al和SiO2的加热量比率等蒸镀条件、蒸镀方法,可以提供酸耐性优异、并且阻气性和透明性优异的层叠体。
附图说明
图1为表示本发明的实施例1、2的制造中使用的真空蒸镀装置的图。
具体实施方式
以下对于本发明进行详细说明。
本发明的阻气性层叠体为一种阻气性层叠体,其特征在于,在高分子基材的至少一面层叠无机薄膜层而成的层叠体中,该无机薄膜层主要含有Al和Si,并且进行了在浓度1摩尔/L的盐酸水溶液中浸渍1小时的处理时的、处理前后的无机薄膜层中的Al含量之比满足以下的式1。
(处理后的Al含量)/(处理前的Al含量)×100≥75 (式1)
优选(处理后的Al含量)/(处理前的Al含量)×100≥80。
该无机薄膜层优选为由含有Al和Si的复合氧化化合物形成的蒸镀膜层。
认为通过将无机薄膜层浸渍于盐酸水溶液,无机物溶解于酸。即,式1表示无机薄膜层对酸的耐性。熟知Al通过在表面形成氧化覆膜而表现出对酸的耐性。但是,形成与硅氧化物的复合化合物膜的情况下,Al与氧的反应被硅氧化物阻断,有可能不能顺利地形成氧化覆膜。其结果,Al露出,因此容易溶解于酸,认为对酸的耐性差。如此对酸的耐性差的情况不能满足式1。
本发明的层叠体的阻气性优选温度23℃、相对湿度65%RH的气氛下的氧透过量为1.0ml/m2/24H/MPa以上且100ml/m2/24H/MPa以下。若阻气性超过100ml/m2/24H/MPa则有可能难以用于食品、药物和工业产品等,不怎么优选。另外,阻气性越低则越良好,但是利用现状的技术水平时,本技术特征中的阻气性的下限为1.0ml/m2/24H/MPa,即使是1.0ml/m2/24H/MPa,实用上也是充分的。作为更优选的范围,为1.0ml/m2/24H/MPa以上且70ml/m2/24H/MPa以下、特别优选处于1.0ml/m2/24H/MPa以上且30ml/m2/24H/MPa以下的范围内。
以下对于构成本发明的层叠体的材料和制造方法进行说明。
本发明中的高分子基材指的是将有机高分子熔融挤出、根据需要在长度方向和/或宽度方向实施拉伸、冷却、热定形而成的薄膜状的基材,作为有机高分子,可列举出聚乙烯、聚丙烯、聚对苯二甲酸乙二醇酯、聚对苯二甲酸丁二醇酯、聚亚乙基-2,6-萘二甲酸酯、尼龙6、尼龙4、尼龙66、尼龙12、聚氯乙烯、聚偏二氯乙烯、聚乙烯醇、全芳香族聚酰胺、聚酰胺酰亚胺、聚酰亚胺、聚醚酰亚胺、聚砜、聚苯硫醚、聚苯醚等。它们之中,从热收缩率、吸湿膨胀性低的观点考虑,优选为聚对苯二甲酸乙二醇酯。另外,这些有机高分子也可以少量共聚或者混合其它有机聚合物。
进而,在该有机高分子中可以添加公知的添加剂、例如紫外线吸收剂、抗静电剂、增塑材料、润滑材料、着色剂等,对于其透明度没有特别限定,但是作为透明阻气性薄膜使用的情况下,优选为具有50%以上、优选70%以上、进一步优选85%以上的总透光率的层叠体。
本发明的高分子基材只要不会损害本发明目的则在层叠薄膜层之前,可以对于该薄膜实施电晕放电处理、辉光放电处理、其它表面粗糙化处理,另外也可以实施锚固处理、印刷、装饰。
对于本发明的高分子基材,作为其厚度,优选处于5~200μm的范围内、进一步优选处于8~50μm的范围内、特别优选处于10~30μm的范围内。
另外,本发明中的基材层可以为2层以上的层叠薄膜。对于形成层叠薄膜时的层叠体的种类、层叠数、层叠方法等没有特别限定,可以根据需要由公知的方法任意选择。
本发明中的无机薄膜层主要含有Al、Si作为元素,它们的比率根据制成条件不同而不同。该成分中,在不会损害特性的范围内可以含有微量(相对于全部成分直至3%为止)的其它成分。作为该无机薄膜的厚度,从阻气性和可挠性的观点考虑,优选为5~100nm、进一步优选7~40nm。
该无机薄膜层的制作使用真空蒸镀法。本发明中,作为蒸发材料源,使用Al、SiO2,但是除此之外也可以混合一氧化硅(SiO)、氧化铝(Al2O3)等。Al也会由于氧化而形成AlO、Al2O3等氧化物。SiO2由于还原而形成SiO、Si等硅或硅氧化物。
另外,各颗粒的尺寸需要为适当的尺寸以使蒸镀时的压力不会变化。粒径的优选范围优选为直径3mm以上且20mm以下、进一步优选3mm以上且10mm以下。若粒径过大则施加热后直至蒸发为止花费时间,因此压力的变动增大,若过小则产生崩沸而颗粒附着于薄膜,成为外观品质降低、膜产生缺陷的原因。
各蒸镀材料通过坩埚而在炉缸内被隔开。Al由于导热系数高、Al颗粒之间的导热比达到蒸发温度快,因此全部Al颗粒进行液体化后升高至蒸发温度。因此仅利用间隔板将材料之间分割时,液体的Al有可能由间隙等流出。通过利用坩埚将材料隔开,除了降低热的分散而提高加热效率之外,还可以抑制液体的Al的流出。对于坩埚的种类没有特别限定,但是例如从耐热性和绝热性的观点考虑,优选为主要由Al2O3形成的坩埚、进一步优选为主要由Al2O3形成的具有孔隙的坩埚。
Al:Si原子的重量比优选在10:90~50:50的范围内构成、进一步优选处于20:80~40:60的范围内。Al比率过低的情况下不能表现出阻气性,Al比率过高的情况下,容易着色,作为透明阻气薄膜的用途受限。
作为加热方式,电子枪加热方式由于具有通过改变扫描、电流值而加热量变化的应答快等优点而优选,但是不限于该方法,可以使用电阻加热、高频感应加热、激光加热等。另外,可以向成膜机内导入反应性气体。此时,所导入的反应性气体优选被等离子体化。作为反应性气体,使用氧气,除此之外,也可以导入氮气、氢气、水蒸气等或者利用臭氧添加、离子辅助等手段。
氧气的导入量根据蒸镀材料的蒸发量变化而变化,因此没有特别限制,但是优选进行调整以使成膜时的真空腔1内的压力为5.0×10-1Pa以下、进一步优选1.0×10-1Pa以下。
电子枪的发射电流优选为0.3A以上且1.5A以下、进一步优选0.3A以上且1.0A以下、更优选0.3A以上且0.8A以下。若发射电流小于0.3A则得不到充分的蒸发速度,生产率降低。另外,若发射电流过大则硅氧化物的分解增大,难以控制压力。
电子枪将各材料分时加热。对于分时中的加热比而言,Al的加热量时间比设为a、SiO2的加热量时间比设为b时,优选a<b且2a>b。更优选处于a<b且1.5a≥b的范围内。若在a>b的条件下蒸镀则容易着色,但是2a<b时,SiO2的蒸发量过多,认为会由于这种蒸镀颗粒而阻碍Al和氧气的反应。
图1图示本发明中的真空蒸镀装置。真空腔1内借由冷却鼓2和导辊5配置有退卷部3和卷取部4。导辊图示出2个,但是不限于此。
将反应性气体使用配管11导入到真空腔1内。对于配管的形状、气体的导入位置没有特别限定,但是从反应性的观点考虑,优选如反应性气体导入方向12所示的方向那样,以气体被供给到配置有蒸镀材料的坩埚9与基材移行的冷却鼓2之间的方式配置。另外,配管11优选用防沉积板13覆盖以不会附着蒸镀材料。
本发明中,该薄膜的制成可以仅对于塑料薄膜的单面进行,也可以对于两面进行。另外,可以对于基板附加偏压等或者只要不会损害本发明目的则变更制成条件。
本发明的阻气性层叠体可以直接使用,但是也可以层压或涂覆其它的有机高分子的薄膜或薄层来使用。
例如使用本发明的阻气性层叠体来用于包装的情况下,根据所包装的内容物要求特性,可以使用各种薄膜、纸进行层压,作为代表性的层叠结构,认为有阻气性薄膜(PET上)/PE、阻气性薄膜(PET上)/CPP、NY/阻气性薄膜(PET上)/PE、阻气性薄膜(NY上)/PE等。作为层压方法,没有特别限制,但是优选为干式层压、挤出层压法等。进而也可以实施装饰或为了内容物说明而印刷,或者与外观用薄膜或增强材料等贴合。
实施例
以下示出实施例对于本发明进行具体说明,但是本发明不被实施例所限定。
以下示出实施例中进行的测定和操作方法。
1)膜厚、和Al、Si比的算出
使用荧光X射线分析装置(理学电气制System 3270)测定。X射线的产生使用铑管球、以50kV、50mA进行,使用由Al2O3/SiO2的复合膜中组成比不同的样品制成的标准曲线进行定量化。
2)氧透过率
对于所制成的阻气薄膜的氧透过率使用氧透过率测定装置(Modern ControlsInc,制OX-TRAN100)在23℃、65%R.H.的条件下测定。
4)光线透过率
使用雾度仪(日本电色制雾度仪NDH5000)测定总透光率。
5)酸耐性
以无机薄膜层来到液面侧的方式在制造为1摩尔/L的盐酸水溶液中浸渍切割为50mm×50mm见方的样品,静置1小时。然后在蒸馏水中浸渍30分钟进行水洗,风干后使用荧光X射线分析装置测定Al的峰强度,算出浸渍前后的Al含有率的变化。计算式为(浸渍后的Al含量)/(浸渍前的Al含量)×100。
(实施例1)
作为蒸镀源,使用7mm~9mm左右的颗粒状的Al(纯度99.9%)和4mm~7mm左右的SiO2(纯度99.9%),利用图1所示的真空蒸镀装置,在12μm厚的PET薄膜(东洋纺株式会社:E5100)上进行复合氧化薄膜的形成。上述2种蒸镀材料不混合,而向炉缸内的由Al2O3形成的具有孔隙的坩埚投入Al,在周围投入SiO2,由此隔开材料。作为加热源,使用一台电子枪,以分时的方式分别加热Al和SiO2。电子束的输出设为0.7A,对Al和SiO2的加热比(时间比)设为40:60,薄膜的进给速度为200m/分钟,制造19.1nm厚的复合膜。氧气的流量设为100sccm、蒸镀时的压力设为9.4×10-2Pa。另外,用于冷却蒸镀时的薄膜的涂覆辊的温度调整为-10℃,得到本发明的层叠体。它们的成膜条件如表1所示。
如此得到的层叠体的膜厚和Al、Si比率利用荧光X射线分析装置测定,使用所制作的层叠体,作为阻气性,测定氧透过率,作为光学特性,测定光线透过率。另外,评价酸耐性。
(实施例2)
作为蒸镀源,使用7mm~9mm左右的颗粒状的Al(纯度99.9%)和4mm~7mm左右的SiO2(纯度99.9%),利用图1所示的真空蒸镀装置,在12μm厚的PET薄膜(东洋纺株式会社:E5100)上进行复合氧化薄膜的形成。上述2种蒸镀材料不混合,而向炉缸内的由Al2O3形成的具有孔隙的坩埚投入Al,在周围投入SiO2,由此隔开材料。作为加热源,使用一台电子枪,以分时的方式分别加热Al和SiO2。电子束的输出设为0.6A,对Al和SiO2的加热比(时间比)设为49:51,薄膜的进给速度为100m/分钟,制造36.4nm厚的复合膜。氧气的流量设为100sccm、蒸镀时的压力设为6.5×10-2Pa。另外,用于冷却蒸镀时的薄膜的涂覆辊的温度调整为-10℃,得到本发明的层叠体。它们的成膜条件如表1所示。
如此得到的层叠体的膜厚和Al、Si比率利用荧光X射线分析装置测定,使用所制作的层叠体,作为阻气性,测定氧透过率,作为光学特性,测定光线透过率。另外,评价酸耐性。
(比较例1)
作为蒸镀源,使用7mm~9mm左右的颗粒状的Al(纯度99.9%)和4mm~7mm左右的SiO2(纯度99.9%),利用图1所示的真空蒸镀装置,在12μm厚的PET薄膜(东洋纺株式会社:E5100)上进行复合氧化薄膜的形成。上述2种蒸镀材料不混合,而向炉缸内的由Al2O3形成的具有孔隙的坩埚投入Al,在周围投入SiO2,由此隔开材料。作为加热源,使用一台电子枪,以分时的方式分别加热Al和SiO2。电子束的输出设为0.5A,对Al和SiO2的加热比(时间比)设为53:47,薄膜的进给速度为50m/分钟,制造54.5nm厚的复合膜。氧气的流量设为150sccm、蒸镀时的压力设为8.5×10-2Pa。另外,用于冷却蒸镀时的薄膜的涂覆辊的温度调整为-10℃,得到本发明的层叠体。它们的成膜条件如表1所示。
如此得到的层叠体的膜厚和Al、Si比率利用荧光X射线分析装置测定,使用所制作的层叠体,作为阻气性,测定氧透过率,作为光学特性,测定光线透过率。另外,评价酸耐性。
(比较例2)
作为蒸镀源,使用7mm~9mm左右的颗粒状的Al(纯度99.9%)和4mm~7mm左右的SiO2(纯度99.9%),利用图1所示的真空蒸镀装置,在12μm厚的PET薄膜(东洋纺株式会社:E5100)上进行复合氧化薄膜的形成。上述2种蒸镀材料不混合,而向炉缸内的由Al2O3形成的具有孔隙的坩埚投入Al,在周围投入SiO2,由此隔开材料。作为加热源,使用一台电子枪,以分时的方式分别加热Al和SiO2。电子束的输出设为0.4A,对Al和SiO2的加热比(时间比)设为60:40,薄膜的进给速度为200m/分钟,制造18.9nm厚的复合膜。不导入氧气。用于冷却蒸镀时的薄膜的涂覆辊的温度调整为-10℃,得到本发明的层叠体。它们的成膜条件如表1所示。
如此得到的层叠体的膜厚和Al、Si比率利用荧光X射线分析装置测定,使用所制作的层叠体,作为阻气性,测定氧透过率,作为光学特性,测定光线透过率。另外,评价酸耐性。
[表1]
[表2]
由表2可知,实施例1~2中的得到的层叠体的酸浸渍后的Al含有率为75%以上、示出酸耐性。另外,对于氧透过率和总透光率而言,作为透明阻气性薄膜也为充分的性能。另一方面,比较例1中得到的层叠体,由于对Al和SiO2的加热比(时间比)为a>b,因此利用盐酸水溶液处理后的Al含有率降低。比较例2中得到层叠体,由于不导入氧气,因此利用盐酸水溶液的处理后不含有Al,总透光率也示出低的值。
产业上的可利用性
通过本发明,能够以高速制造阻气性、耐酸性、和透明性优异的阻气薄膜,可以合适地用作食品、药物、精密电子元件等的包装领域中使用的包装用薄膜、特别是对忌避酸的用途的保护层。
附图标记说明
1…真空腔
2…冷却鼓
3…退卷部
4…卷取部
5…导辊
6…基材薄膜
7…无机薄膜层层叠体
8…电子枪
9…炉缸
10…真空泵
11…反应性气体导入配管
12…反应性气体导入方向
13…防沉积板
Claims (2)
1.一种阻气性层叠体,其特征在于,在高分子基材的至少一面层叠无机薄膜层而成的层叠体中,该无机薄膜层主要含有Al和Si,并且进行了在浓度1摩尔/L的盐酸水溶液中浸渍1小时的处理时的、处理前后的无机薄膜层中的Al含量之比满足以下的式1,
(处理后的Al含量)/(处理前的Al含量)×100≥75(式1)。
2.根据权利要求1所述的阻气性层叠体,其特征在于,该无机薄膜层为由含有Al和Si的复合氧化化合物形成的蒸镀膜层。
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