CN110940831A - Scanning probe microscope - Google Patents
Scanning probe microscope Download PDFInfo
- Publication number
- CN110940831A CN110940831A CN201911409382.2A CN201911409382A CN110940831A CN 110940831 A CN110940831 A CN 110940831A CN 201911409382 A CN201911409382 A CN 201911409382A CN 110940831 A CN110940831 A CN 110940831A
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- rack
- driving
- displacement adjusting
- piezoelectric ceramics
- microscope
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- 239000000523 sample Substances 0.000 title claims abstract description 73
- 238000006073 displacement reaction Methods 0.000 claims abstract description 36
- 230000005484 gravity Effects 0.000 claims abstract description 8
- 239000000919 ceramic Substances 0.000 claims description 51
- 235000014676 Phragmites communis Nutrition 0.000 claims description 3
- 239000000725 suspension Substances 0.000 claims description 3
- 238000005259 measurement Methods 0.000 abstract description 6
- 230000003287 optical effect Effects 0.000 description 3
- 230000008602 contraction Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
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- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The invention discloses a scanning probe microscope, which comprises a rack, an elastic piece for hanging the rack, a probe which is arranged on the rack and can reciprocate along the Z direction in a vertical plane, a sample table which is arranged on the rack and is positioned below the probe and can respectively reciprocate along the X direction and the Y direction in a horizontal plane, a mounting assembly which is arranged on the rack and can move in three axes (the X direction, the Y direction and the Z direction), a reflecting mirror which is arranged in the mounting assembly and is positioned above the probe, and a displacement adjusting assembly which is arranged on the rack and is connected to the mounting assembly and can move in three axes; the displacement adjusting assembly, the reflector and the probe coaxially extend, and a hollow gap for allowing light to pass through and irradiate the reflector from bottom to top is formed in the displacement adjusting assembly; the microscope also includes a photodetector disposed below the hollow gap. According to the scanning probe microscope, the displacement adjusting assembly for controlling the movement of the reflecting mirror is coaxially arranged below the reflecting mirror, so that the center of gravity of the microscope is centered, and the measurement accuracy is high.
Description
Technical Field
The present invention relates to a scanning probe microscope.
Background
Existing scanning probe microscopes with optical mirrors reflect the optical signal onto the sample or onto the photodetector through a movable mirror. Since the adjustment of the mirror requires three-axis movement, in order to prevent interference with light rays emitted from below to the lens, the displacement adjusting unit of the mirror is provided at a side portion of the optical path, which causes a shift of the center of gravity of the microscope to the side, thereby affecting the measurement accuracy of the microscope.
Disclosure of Invention
The invention aims to provide a scanning probe microscope, which has a centered center of gravity and high measurement precision.
In order to achieve the purpose, the invention adopts the technical scheme that:
a scanning probe microscope comprises a rack, an elastic piece used for hanging the rack, a probe which can move back and forth along a Z direction in a vertical plane and is arranged on the rack, a sample table which can move back and forth along an X direction and a Y direction in a horizontal plane and is arranged on the rack and positioned below the probe, a mounting assembly which can move in three axes (the X direction, the Y direction and the Z direction) and is arranged on the rack, a reflecting mirror which is arranged in the mounting assembly and is positioned above the probe, and a displacement adjusting assembly which can move in three axes and is arranged on the rack and connected to the mounting assembly;
the displacement adjusting assembly, the reflector and the probe coaxially extend, and a hollow gap for allowing light to pass through and irradiate the reflector from bottom to top is formed in the displacement adjusting assembly;
the microscope further comprises a photoelectric detector arranged below the hollow gap.
Preferably, the rack includes a cylinder disposed at a lower portion thereof, and the displacement adjusting assembly includes a sleeve coaxially sleeved on the cylinder, an annular support plate sleeved on the sleeve and capable of reciprocating in the X direction and the Y direction with respect to the sleeve, a first driving member for driving the sleeve to reciprocate in the Z direction with respect to the cylinder, and a second driving member for driving the annular support plate to reciprocate in the X direction and the Y direction with respect to the sleeve; the mounting assembly is connected to the annular carrier plate, and the photoelectric detector is arranged below the cylinder body.
More preferably, the installation component comprises two connecting columns with lower ends connected to the annular carrier plate and a connecting rod connected between the upper ends of the two connecting columns, and the reflector is installed on the connecting rod.
More preferably, the first driving member includes three first piezoelectric ceramics uniformly wound around the sleeve body and the cylinder body at intervals along the circumferential direction, a pressing member, a spring, and a first pressing member sequentially connected between one of the first piezoelectric ceramics and the sleeve body, and the three first piezoelectric ceramics are all fixed on the cylinder body.
More preferably, the displacement adjusting assembly further comprises a lower support plate disposed on the sleeve body and located below the annular support plate, and an upper support plate sleeved on the sleeve body and located above the annular support plate; the second driving piece comprises three lower piezoelectric ceramics which are uniformly wound between the annular carrier plate and the lower support plate at intervals along the circumferential direction, and three upper piezoelectric ceramics which are uniformly wound between the annular carrier plate and the upper support plate at intervals along the circumferential direction and are positioned above the lower piezoelectric ceramics in a one-to-one correspondence manner; the displacement adjusting assembly further comprises second pressing pieces which are arranged on the sleeve body and used for pressing the upper piezoelectric ceramics downwards in a one-to-one correspondence mode.
Still further preferably, the displacement adjustment assembly further comprises an elastic bearing plate arranged between the second pressing piece and the upper supporting plate, and an upper pit arranged on the upper surface of the upper supporting plate and used for providing a deformation space for the elastic bearing plate.
Preferably, the elastic member includes three springs having elastic expansion and contraction directions parallel to a vertical direction, and the center of gravity of the microscope is located in a lower end suspension plane of the three springs.
Preferably, the microscope further comprises a first driving assembly arranged on the rack and used for driving the probe to reciprocate in the vertical plane along the Z direction, and a second driving assembly arranged on the rack and used for driving the sample stage to reciprocate in the horizontal plane along the X direction and the Y direction respectively, wherein the first driving assembly comprises a first connecting piece and second piezoelectric ceramics, the first connecting piece is used for connecting the probe, the second piezoelectric ceramics are arranged between the first connecting piece and the rack, and the second driving assembly comprises a second connecting piece and third piezoelectric ceramics, the second connecting piece is used for connecting the sample stage, and the third piezoelectric ceramics are arranged between the second connecting piece and the rack.
Preferably, the displacement adjusting assembly comprises a first moving member arranged on the frame and capable of reciprocating in the X direction and the Y direction respectively relative to the frame in the horizontal plane, and a second moving member arranged on the first moving member and capable of reciprocating in the Z direction in the vertical plane, and the mounting assembly is connected to the second moving member.
Due to the application of the technical scheme, compared with the prior art, the invention has the following advantages: according to the scanning probe microscope, the displacement adjusting assembly for controlling the movement of the reflector is coaxially arranged below the reflector, and the hollow gap for allowing light to pass through and irradiate the reflector from bottom to top is arranged in the displacement adjusting assembly, so that the center of gravity of the microscope is centered, and the measurement accuracy is high.
Drawings
FIG. 1 is a schematic diagram of the structure of the apparatus of the present invention;
FIG. 2 is a bottom view of the apparatus of the present invention;
FIG. 3 is a schematic structural view of a displacement adjustment assembly;
fig. 4 is a schematic diagram of another embodiment.
Wherein: 1. a frame; 2. an elastic member; 3. a probe; 4. a sample stage; 5. mounting the component; 51. connecting columns; 52. a connecting rod; 6. a mirror; 7. a hollow gap; 8. a barrel; 9. a sleeve body; 10. an annular carrier plate; 11. a first piezoelectric ceramic; 12. a lower support plate; 13. an upper support plate; 14. a lower piezoelectric ceramic; 15. an upper piezoelectric ceramic; 16. upper pits; 17. a second pressing member; 18. an elastic bearing plate; 19. a pressing member; 20. a reed; 21. a second piezoelectric ceramic; 22. a third piezoelectric ceramic; 23. a first moving member; 24. a second moving member; 25. a fourth piezoelectric ceramic; 26. a fifth piezoelectric ceramic; 27. the first compressing member.
Detailed Description
The technical scheme of the invention is further explained by combining the attached drawings.
Referring to fig. 1-3, the scanning probe microscope includes a frame 1, an elastic member 2 for suspending the frame 1, a probe 3 disposed on the frame 1 and capable of reciprocating in a vertical plane along a Z direction, a sample stage 4 disposed on the frame 1 and located below the probe 3 and capable of reciprocating in an X direction and a Y direction in a horizontal plane respectively, a mounting assembly 5 disposed on the frame 1 and capable of moving in three axes (the X direction, the Y direction, and the Z direction), a reflecting mirror 6 disposed in the mounting assembly 5 and located above the probe 3, a displacement adjusting assembly disposed on the frame 1 and connected to the mounting assembly 5 and capable of moving in three axes, and the mounting assembly 5 is driven to move in three axes by the displacement adjusting assembly. The X direction and the Y direction are mutually vertical, and the center of the reflecting mirror 6 is provided with a central hole which can be penetrated by the probe 3. In this embodiment, the elastic member 2 includes three springs with elastic expansion and contraction directions parallel to the vertical direction, and the center of gravity of the microscope is located in the lower suspension plane of the three springs, so that the stability of the microscope is improved. Similarly, the measurement point on the upper surface of the sample stage 4 should be as close to the suspended surface as possible.
The displacement adjusting assembly, the reflector 6 and the probe 3 extend coaxially, and a hollow gap 7 for allowing light to pass through and irradiate the reflector 6 from bottom to top is arranged in the displacement adjusting assembly. The scanning probe microscope further comprises a photoelectric detector arranged below the hollow gap 7. The displacement adjusting assembly for controlling the displacement of the reflector 6 is coaxially arranged below the reflector 6, and the hollow gap 7 for allowing light to pass through and irradiate the reflector 6 from bottom to top is arranged in the displacement adjusting assembly, so that the center of gravity of the microscope is centered, the stability is good, and the measurement precision is high.
In this embodiment, the rack 1 includes a cylinder 8 disposed at a lower portion thereof, the displacement adjusting assembly includes a sleeve 9 coaxially sleeved on the cylinder 8, an annular carrier 10 sleeved on the sleeve 9 and capable of reciprocating in the X direction and the Y direction in the horizontal plane with respect to the sleeve 9, a first driving member for driving the sleeve 9 to reciprocate in the Z direction in the vertical plane with respect to the cylinder 8, and a second driving member for driving the annular carrier 10 to reciprocate in the X direction and the Y direction in the horizontal plane with respect to the sleeve 9. The mounting assembly 5 is connected above the annular carrier plate 10, and the photodetector is disposed below the cylinder 8, i.e., outside the cylinder 8. The cylinder 8, the sleeve body 9 and the annular carrier plate 10 all extend coaxially. In the present embodiment, the mounting assembly 5 includes two connecting posts 51 connected to the annular carrier plate 10 at the lower ends thereof, and a connecting rod 52 connected between the upper ends of the two connecting posts 51, and the reflector 6 is mounted on the connecting rod 52. The connecting rod 52 has a length direction extending in a radial direction of the sheath 9, and the reflector 6 is mounted at a middle position of the connecting rod 52.
The first driving member comprises three first piezoelectric ceramics 11 which are uniformly wound around the periphery of the inner side of the sleeve body 9 and the periphery of the outer side of the cylinder body 8 at intervals along the circumferential direction, a pressing piece 19, a spring piece 20 and a first pressing piece 27 which are sequentially connected between one first piezoelectric ceramic 11 and the sleeve body 9, and the three first piezoelectric ceramics 11 are all fixed on the cylinder body 8. The first piezoelectric ceramic 11 is deformed by inputting a pulse signal, so that the sleeve body 9 is driven to move relative to the cylinder body 8. By providing the spring plate 20, the pressure of the first pressing member 27 on the first piezoelectric ceramic 11 can be adjusted to cooperatively realize the movement of the sleeve 9 in the Z direction relative to the cylinder 8.
The displacement adjusting assembly further comprises a lower support plate 12 arranged on the sleeve body 9 and positioned below the annular support plate 10, and an upper support plate 13 movably sleeved on the sleeve body 9 and positioned above the annular support plate 10. The second driving member comprises three lower piezoelectric ceramics 14 which are uniformly wound between the annular carrier plate 10 and the lower support plate 12 at intervals along the circumferential direction, and three upper piezoelectric ceramics 15 which are uniformly wound between the annular carrier plate 10 and the upper support plate 13 at intervals along the circumferential direction and are positioned above the lower piezoelectric ceramics 14 in a one-to-one correspondence manner. The displacement adjusting assembly further comprises a second pressing part 17 arranged on the sleeve body 9 and used for pressing the upper piezoelectric ceramic 15 downwards onto the annular carrier plate 10 in a one-to-one correspondence manner, an elastic bearing plate 18 arranged between the second pressing part 17 and the upper support plate 13, and an upper pit 16 arranged on the upper surface of the upper support plate 13 and used for providing a deformation space for the elastic bearing plate 18. By arranging the elastic bearing plates 18, the pressure of the second pressing piece 17 on the annular carrier plate 10 and the upper piezoelectric ceramic 15 can be adjusted to cooperatively realize the movement of the annular carrier plate in the X direction and the Y direction.
Specifically, the upper piezoelectric ceramic 15 and the lower piezoelectric ceramic 14 are each formed by stacking an X-direction polarized piezoelectric ceramic and a Y-direction polarized piezoelectric ceramic. The piezoelectric ceramic is deformed by introducing a pulse signal to the X-direction polarized piezoelectric ceramic to drive the annular carrier plate 10 to move along the X direction relative to the sleeve body 9, and the piezoelectric ceramic is deformed by introducing a pulse signal to the Y-direction polarized piezoelectric ceramic to drive the annular carrier plate 10 to move along the Y direction relative to the sleeve body 9.
The scanning probe microscope further comprises a first driving assembly arranged on the rack 1 and used for driving the probe 3 to reciprocate in the Z direction in a vertical plane, and a second driving assembly arranged on the rack 1 and used for driving the sample stage 4 to reciprocate in the X direction and the Y direction in a horizontal plane respectively. The first driving assembly comprises a first connecting piece for connecting the probe 3 and second piezoelectric ceramics 21 arranged between the first connecting piece and the rack 1; the second driving component comprises a second connecting piece for connecting the sample table 4 and a third piezoelectric ceramic 22 arranged between the second connecting piece and the rack 1. The specific structure and operation principle of the displacement adjusting assembly refer to the above description, and are not described in detail here.
Referring to fig. 4, in another embodiment, the displacement adjusting assembly includes a first moving member 23 disposed on the frame 1 and capable of reciprocating in the X-direction and the Y-direction in the horizontal plane with respect to the frame 1, a second moving member 24 disposed on the first moving member 23 and capable of reciprocating in the Z-direction in the vertical plane, a fourth piezoelectric ceramic 25 disposed between the first moving member 23 and the frame 1 for driving the first moving member 23 to move, and a fifth piezoelectric ceramic 26 disposed between the second moving member 24 and the first moving member 23 for driving the second moving member 24 to move. The above-described mounting assembly 5 is attached to the second moving member 24.
The following specifically explains the working process of this embodiment:
the position of the probe 3 and the lens is adjusted according to the position of the sample:
in a first mode of operation: and electrifying the probe 3 and the sample to enable the sample at the needle point to be excited to emit light and emit the light to the reflector 6, reflecting the light downwards to the photoelectric detector by the reflector 6, and collecting a light signal by the photoelectric detector.
In a second mode of operation: the light source is placed below the cylinder 8 and irradiates the reflector 6, the reflector 6 reflects light to the sample, the probe 3 and the sample are electrified, and the probe 3 acquires an electric signal.
In a third mode of operation: placing a light source below the cylinder 8 and irradiating the reflector 6, reflecting light to the sample by the reflector 6, electrifying the probe 3 and the sample, and collecting an electric signal by the probe 3; meanwhile, the sample reflects the light to the reflector 6, the reflector 6 reflects the light reflected by the sample to the photoelectric detector, and the photoelectric detector collects light signals.
The above embodiments are merely illustrative of the technical ideas and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and not to limit the protection scope of the present invention. All equivalent changes and modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.
Claims (9)
1. A scanning probe microscope, characterized by: the device comprises a rack, an elastic piece used for hanging the rack, a probe which is arranged on the rack and can reciprocate along the Z direction in a vertical plane, a sample table which is arranged on the rack and is positioned below the probe and can respectively reciprocate along the X direction and the Y direction in a horizontal plane, a mounting assembly which is arranged on the rack and can move in three axes (the X direction, the Y direction and the Z direction), a reflecting mirror which is arranged in the mounting assembly and is positioned above the probe, and a displacement adjusting assembly which is arranged on the rack and is connected to the mounting assembly and can move in three axes;
the displacement adjusting assembly, the reflector and the probe coaxially extend, and a hollow gap for allowing light to pass through and irradiate the reflector from bottom to top is formed in the displacement adjusting assembly;
the microscope further comprises a photoelectric detector arranged below the hollow gap.
2. A scanning probe microscope in accordance with claim 1 wherein: the rack comprises a cylinder body arranged at the lower part of the rack, the displacement adjusting assembly comprises a sleeve body coaxially sleeved on the cylinder body, an annular support plate sleeved on the sleeve body and capable of respectively reciprocating along the X direction and the Y direction relative to the sleeve body, a first driving piece used for driving the sleeve body to respectively reciprocate along the Z direction relative to the cylinder body, and a second driving piece used for driving the annular support plate to respectively reciprocate along the X direction and the Y direction relative to the sleeve body; the mounting assembly is connected to the annular carrier plate, and the photoelectric detector is arranged below the cylinder body.
3. A scanning probe microscope in accordance with claim 2 wherein: the mounting assembly comprises two connecting columns with lower ends connected to the annular carrier plate and a connecting rod connected between the upper ends of the two connecting columns, and the reflector is mounted on the connecting rod.
4. A scanning probe microscope in accordance with claim 2 wherein: the first driving piece comprises three first piezoelectric ceramics uniformly wound between the sleeve body and the cylinder body at intervals along the circumferential direction, a pressing piece, a reed and a first pressing piece, wherein the pressing piece, the reed and the first pressing piece are sequentially connected between one first piezoelectric ceramic and the sleeve body, and the three first piezoelectric ceramics are fixed on the cylinder body.
5. A scanning probe microscope in accordance with claim 2 wherein: the displacement adjusting assembly further comprises a lower supporting plate arranged on the sleeve body and positioned below the annular carrier plate, and an upper supporting plate sleeved on the sleeve body and positioned above the annular carrier plate; the second driving piece comprises three lower piezoelectric ceramics which are uniformly wound between the annular carrier plate and the lower support plate at intervals along the circumferential direction, and three upper piezoelectric ceramics which are uniformly wound between the annular carrier plate and the upper support plate at intervals along the circumferential direction and are positioned above the lower piezoelectric ceramics in a one-to-one correspondence manner; the displacement adjusting assembly further comprises second pressing pieces which are arranged on the sleeve body and used for pressing the upper piezoelectric ceramics downwards in a one-to-one correspondence mode.
6. A scanning probe microscope in accordance with claim 5 wherein: the displacement adjusting assembly is characterized in that the second pressing piece is arranged on the upper surface of the upper supporting plate, the upper supporting plate is arranged on the lower surface of the upper supporting plate, and the upper supporting plate is provided with a first elastic bearing plate and a second elastic bearing plate.
7. A scanning probe microscope in accordance with claim 1 wherein: the elastic part comprises three springs with elastic expansion directions parallel to the vertical direction, and the gravity center of the microscope is positioned in the lower end suspension plane of the three springs.
8. A scanning probe microscope in accordance with claim 1 wherein: the microscope further comprises a first driving assembly arranged on the rack and used for driving the probe to reciprocate in the Z direction in a vertical plane, and a second driving assembly arranged on the rack and used for driving the sample stage to reciprocate in the X direction and the Y direction in a horizontal plane respectively, wherein the first driving assembly comprises a first connecting piece and second piezoelectric ceramics, the first connecting piece is used for connecting the probe, the second piezoelectric ceramics are arranged between the first connecting piece and the rack, and the second driving assembly comprises a second connecting piece and third piezoelectric ceramics, the second connecting piece is used for connecting the sample stage, and the third piezoelectric ceramics are arranged between the second connecting piece and the rack.
9. A scanning probe microscope in accordance with claim 1 wherein: the displacement adjusting assembly comprises a first moving part which is arranged on the rack and can respectively reciprocate along the X direction and the Y direction in the horizontal plane relative to the rack, and a second moving part which can reciprocate along the Z direction in the vertical plane and is arranged on the first moving part, and the mounting assembly is connected to the second moving part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911409382.2A CN110940831B (en) | 2019-12-31 | 2019-12-31 | Scanning probe microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911409382.2A CN110940831B (en) | 2019-12-31 | 2019-12-31 | Scanning probe microscope |
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| Publication Number | Publication Date |
|---|---|
| CN110940831A true CN110940831A (en) | 2020-03-31 |
| CN110940831B CN110940831B (en) | 2024-10-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911409382.2A Active CN110940831B (en) | 2019-12-31 | 2019-12-31 | Scanning probe microscope |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5376790A (en) * | 1992-03-13 | 1994-12-27 | Park Scientific Instruments | Scanning probe microscope |
| JP2007003246A (en) * | 2005-06-22 | 2007-01-11 | Jeol Ltd | Scanning probe microscope |
| US20080223119A1 (en) * | 2007-03-16 | 2008-09-18 | Veeco Instruments Inc. | Fast-Scanning SPM Scanner and Method of Operating Same |
| US20150020243A1 (en) * | 2012-04-04 | 2015-01-15 | Olympus Corporation | Scanning mechanism and scanning probe microscope |
| US20180267081A1 (en) * | 2017-03-20 | 2018-09-20 | Infinitesima Limited | Measurement system |
| CN211528466U (en) * | 2019-12-31 | 2020-09-18 | 苏州衡微仪器科技有限公司 | Scanning probe microscope |
-
2019
- 2019-12-31 CN CN201911409382.2A patent/CN110940831B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5376790A (en) * | 1992-03-13 | 1994-12-27 | Park Scientific Instruments | Scanning probe microscope |
| JP2007003246A (en) * | 2005-06-22 | 2007-01-11 | Jeol Ltd | Scanning probe microscope |
| US20080223119A1 (en) * | 2007-03-16 | 2008-09-18 | Veeco Instruments Inc. | Fast-Scanning SPM Scanner and Method of Operating Same |
| US20150020243A1 (en) * | 2012-04-04 | 2015-01-15 | Olympus Corporation | Scanning mechanism and scanning probe microscope |
| US20180267081A1 (en) * | 2017-03-20 | 2018-09-20 | Infinitesima Limited | Measurement system |
| CN211528466U (en) * | 2019-12-31 | 2020-09-18 | 苏州衡微仪器科技有限公司 | Scanning probe microscope |
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| Publication number | Publication date |
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| CN110940831B (en) | 2024-10-11 |
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