CN110927868A - Directional coupling-based plasma mode conversion and multiplexer - Google Patents
Directional coupling-based plasma mode conversion and multiplexer Download PDFInfo
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- CN110927868A CN110927868A CN201911121063.1A CN201911121063A CN110927868A CN 110927868 A CN110927868 A CN 110927868A CN 201911121063 A CN201911121063 A CN 201911121063A CN 110927868 A CN110927868 A CN 110927868A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1226—Basic optical elements, e.g. light-guiding paths involving surface plasmon interaction
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/14—Mode converters
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12152—Mode converter
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Abstract
The invention discloses a directional coupling-based plasma mode conversion and multiplexer, and relates to the field of integrated optics of optical communication. The plasma mode conversion and multiplexer comprises a polymer waveguide layer, wherein the polymer waveguide layer comprises a first directional coupling waveguide and a second directional coupling waveguide, and the widths of the first directional coupling waveguide and the second directional coupling waveguide are kept unchanged; the first directional coupling waveguide and the second directional coupling waveguide are parallel and keep a certain distance to form a directional coupling area together, the directional coupling area converts a fundamental mode in the first directional coupling waveguide into a high-order mode and couples the high-order mode into the second directional coupling waveguide, the fundamental mode in the second directional coupling waveguide is kept unchanged, and finally the fundamental mode and the high-order mode coexist in the second directional coupling waveguide. The invention can realize the conversion and the multiplexing of the plasma collective mode, has simple structure, lower requirement on the precision of the manufacturing process and smaller loss.
Description
Technical Field
The invention relates to the field of integrated optics of optical communication, in particular to a directional coupling-based plasma mode conversion and multiplexer.
Background
Space division multiplexing has proven to be an effective way to increase the capacity of optical fiber communication systems or optical interconnects on chip. In particular, mode division multiplexing based spatial division multiplexing may provide new degrees of freedom for fiber optic transmission and networks on chip, which are highly desirable in data center interconnects for capacity enhancement. Mode division multiplexing can be used to increase the throughput of the interconnect while reducing the number of laser sources required.
Integrated optics is the mainstream technology for future optical communication systems. Plasmon devices based on surface plasmons, propagating on metal and medium interfaces, show great potential for guiding and manipulating light in the deep sub-wavelength range, and due to the dual advantages of electronics and photonics, great efforts have been made in developing plasmon-based waveguide structures, reporting many different waveguide structures with particular advantages, such as channel plasmon waveguides, metal-insulator-metal waveguides, wedge-shaped plasmon waveguides, hybrid plasmon waveguides and medium-loaded plasmon waveguides.
In the presently proposed plasmonic waveguide structures, dielectric loaded plasmonic waveguide devices have been investigated under practical photonic integration system conditions due to their compatibility with different dielectrics such as silicon-on-insulator platforms and to provide a good compromise between transmission loss and mode confinement. Enhancing plasma electronics is promising as a promising candidate for future chip-scale photonic integration.
In the process of implementing the invention, the inventor finds that at least the following problems exist in the prior art:
the existing plasma mode conversion and multiplexer based on the tapered coupler has the disadvantages of complex structure, high precision requirement on the manufacturing process and high loss.
Disclosure of Invention
The invention aims to overcome the defects of the background technology, and provides a directional coupling-based plasma mode conversion and multiplexer, which can realize the conversion and multiplexing of a plasma collective mode, has a simple structure, has low requirement on the precision of a manufacturing process, and has small loss.
In a first aspect, a directional coupling based plasmon mode conversion and multiplexer is provided, which includes a polymer waveguide layer, the polymer waveguide layer includes a first directional coupling waveguide and a second directional coupling waveguide, and the widths of the first directional coupling waveguide and the second directional coupling waveguide are kept unchanged; the first directional coupling waveguide and the second directional coupling waveguide are parallel and keep a certain distance to form a directional coupling area together, the directional coupling area converts a fundamental mode in the first directional coupling waveguide into a high-order mode and couples the high-order mode into the second directional coupling waveguide, the fundamental mode in the second directional coupling waveguide is kept unchanged, and finally the fundamental mode and the high-order mode coexist in the second directional coupling waveguide.
According to the first aspect, in a first possible implementation manner of the first aspect, the pitch is 0.01 to 0.05 μm.
According to the first aspect, in a second possible implementation manner of the first aspect, the length of the directional coupling region is 4-10 μm.
According to the first aspect, in a third possible implementation manner of the first aspect, the width of the first directional coupling waveguide is 300-900 nm.
According to the first aspect, in a fourth possible implementation manner of the first aspect, the width of the second directional coupling waveguide is 1000 to 1500 nm.
According to the first aspect, in a fifth possible implementation manner of the first aspect, the polymer waveguide layer further includes a first input coupler, a first input waveguide, a first curved waveguide, a second curved waveguide, and a first output waveguide, the first input coupler, the first input waveguide, the first curved waveguide, the first directional coupling waveguide, the second curved waveguide, and the first output waveguide are sequentially connected, and widths of the first input waveguide, the first curved waveguide, the first directional coupling waveguide, the second curved waveguide, and the first output waveguide are all the same.
In a sixth possible implementation manner of the first aspect, the polymer waveguide layer further includes a second input coupler and a second output waveguide, the second input coupler, the second directional coupling waveguide, and the second output waveguide are connected in sequence, and a width of the second directional coupling waveguide is the same as a width of the second output waveguide.
According to the first aspect, in a seventh possible implementation manner of the first aspect, the plasma mode conversion and multiplexer further includes a thin gold layer and a silicon dioxide substrate, the polymer waveguide layer is deposited on the thin gold layer, and the thin gold layer is deposited on the silicon dioxide substrate.
According to a seventh possible implementation manner of the first aspect, in an eighth possible implementation manner of the first aspect, the polymer waveguide layer has a thickness of 350 to 700nm and a refractive index of 1.2 to 2.
According to a seventh possible implementation manner of the first aspect, in a ninth possible implementation manner of the first aspect, the thickness of the thin gold layer is 50 to 200 nm.
Compared with the prior art, the invention has the following advantages:
(1) the directional coupling-based plasma mode conversion and multiplexing device provided by the invention can realize the conversion and multiplexing of the plasma collective mode, and has the advantages of simple structure, lower precision requirement on the manufacturing process and smaller loss.
(2) The invention has the advantages of small size, high bandwidth, low manufacturing cost, compatibility with silicon-based platforms, capability of being integrated with other silicon-based integrated devices and suitability for popularization.
Drawings
FIG. 1 is a cross-sectional view of a directional coupling based plasmon mode conversion and multiplexer in an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a polymer waveguide layer according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a directional coupling region in an embodiment of the present invention;
FIG. 4 (a) shows a TM in a first directionally coupled waveguide0Mode switching to TM1A simulation graph of the pattern;
FIG. 4 (b) shows the holding of TM in the second directional coupling waveguide0A simulation graph of the pattern;
FIG. 5 is a schematic diagram of the conversion efficiency of the directional coupling based plasmon mode conversion and multiplexer in the 1300-1700 nm working wavelength according to the embodiment of the present invention.
FIG. 6 is a diagram illustrating the conversion efficiency of a conventional plasma mode conversion multiplexer in the 1300-1700 nm operating wavelength range.
Reference numerals: 1-a polymeric waveguide layer; 2-a thin gold layer; 3-a silicon dioxide substrate; 101-a first input coupler; 102-a first input waveguide; 103-a first curved waveguide; 104-a first directionally coupled waveguide; 105-a second curved waveguide; 106-a first output waveguide; 107-second input coupler; 108-a second directionally coupled waveguide; 109-second output waveguide.
Detailed Description
Reference will now be made in detail to the present embodiments of the invention, examples of which are illustrated in the accompanying drawings. While the invention will be described in conjunction with the specific embodiments, it will be understood that they are not intended to limit the invention to the embodiments described. On the contrary, it is intended to cover alternatives, modifications, and equivalents as may be included within the spirit and scope of the invention as defined by the appended claims. It should be noted that the method steps described herein may be implemented by any functional block or functional arrangement, and that any functional block or functional arrangement may be implemented as a physical entity or a logical entity, or a combination of both.
In order that those skilled in the art will better understand the present invention, the following detailed description of the invention is provided in conjunction with the accompanying drawings and the detailed description of the invention.
Note that: the example to be described next is only a specific example, and does not limit the embodiments of the present invention necessarily to the following specific steps, values, conditions, data, orders, and the like. Those skilled in the art can, upon reading this specification, utilize the concepts of the present invention to construct more embodiments than those specifically described herein.
Referring to fig. 1, an embodiment of the present invention provides a directional coupling based plasma mode conversion and multiplexer, which includes a polymer waveguide layer 1, a thin gold layer 2 and a silicon dioxide substrate 3, wherein the polymer waveguide layer 1 is deposited on the thin gold layer 2, and the thin gold layer 2 is deposited on the silicon dioxide substrate 3. Wherein the thickness of the polymer waveguide layer 1 is 350-700 nm, and the refractive index is 1.2-2; the thickness of the thin gold layer 2 is 50-200 nm; the thickness of the silicon dioxide substrate 3 is 50-200 nm, and the refractive index is 1.4-2.0.
As a preferred embodiment, referring to fig. 2, the polymeric waveguide layer 1 comprises:
the first input coupler 101, the first input waveguide 102, the first curved waveguide 103, the first directional coupling waveguide 104, the second curved waveguide 105 and the first output end 106 are connected in sequence, and the widths of the first input waveguide 102, the first curved waveguide 103, the first directional coupling waveguide 104, the second curved waveguide 105 and the first output end 106 are the same, preferably 300 nm-900 nm; and
and the second input coupler 107, the second directional coupling waveguide 108 and the second output waveguide 109 are connected in sequence, and the width of the second directional coupling waveguide 108 is the same as that of the second output waveguide 109, preferably 1000-1500 nm.
As a preferred embodiment, the role of each device in the polymer waveguide layer 1 is as follows:
the first input coupler 101 is used to couple off-chip laser light onto the chip, and the first input coupler 101 may be a grating coupler or an end-face coupler.
The first input waveguide 102 functions to transmit light coupled in through the first input coupler 101, and the first input waveguide 102 supports 1 mode, i.e., a fundamental mode (TM)0. The width of the first input waveguide 102 is preferably 300nm to 900 nm.
The first curved waveguide 103 is used for transmitting the laser light transmitted from the first input waveguide 102 to the first directional coupling waveguide 104, and the width of the first curved waveguide 103 is the same as that of the first input waveguide 102, and is preferably 300nm to 900 nm.
Referring to FIG. 3, the first directional coupling waveguide 104 and the second directional coupling waveguide 108 are each a stripThe waveguide is shaped, and the width of the waveguide is kept unchanged. The first directional coupling waveguide 104 and the second directional coupling waveguide 108 are arranged in parallel and at a certain distance to form a directional coupling region, and the directional coupling region is used for coupling a fundamental mode TM in the first directional coupling waveguide 1040Conversion to TM1And coupled into a second directionally coupled waveguide 108, the original TM in the second directionally coupled waveguide 1080Keeping the mode unchanged, the final TM0And TM1Are co-present in the second directionally coupled waveguide 108.
Referring to FIG. 3, assume that the first directionally coupled waveguide 104 in the directional coupling region has a width waThe second directionally coupled waveguide 108 has a width wbThe directional coupling region has a length L and the first directional coupling waveguide 104 is spaced apart from the second directional coupling waveguide 108 by a distance g.
The optimum ranges for the individual parameters are found by simulation to be shown in table 1:
the distance g between the first directional coupling waveguide 104 and the second directional coupling waveguide 108 in the directional coupling region is preferably 0.01-0.05 μm, the length L of the directional coupling region is preferably 4-10 μm, and the width w of the first directional coupling waveguide 104aPreferably 300-900 nm, and the width w of the second directional coupling waveguide 108bPreferably 1000 to 1500 nm.
TABLE 1 simulation parameter table of directional coupling zone
| g(μm) | L(μm) | wa(μm) | wb(μm) |
| 0.01～0.05 | 4～10 | 0.3～0.9 | 1.0～1.5 |
The second curved waveguide 105 functions to connect the first directional coupling waveguide 104 to the first output waveguide 106, and to output the surplus energy of mode conversion of the coupling waveguide from the first output waveguide 106. The width of the second curved waveguide 105 is the same as the width of the first curved waveguide 103 and the first directional coupling waveguide 104, and is preferably 300nm to 900 nm.
The first output waveguide 106 is preferably configured with a beveled tail to reduce reflections. The width of the first output waveguide 106 is the same as the width of the second curved waveguide 105, and preferably 300nm to 900 nm.
The second input coupler 107 is used for coupling off-chip laser light into the chip, and inputting the laser light into a second directional coupling waveguide 108 and transmitting the laser light to a second output waveguide 109 connected with the second directional coupling waveguide. The second input coupler 107 may be a grating coupler or an end-face coupler.
According to the coupled mode theory, when two dielectric waveguides are close to each other, energy exchange between the two waveguides, that is, a phenomenon that light in one waveguide is transferred to the other waveguide, occurs due to the evanescent field. The two optical waveguides participating in the coupling may be of the same type or of different types. When the structures of the two waveguides are very different, the exchange of energy tends to be unequal, usually with the light of one waveguide coupling into the other.
Referring to the directional coupling region shown in fig. 3, light undergoes mode conversion in the directional coupling region formed by the first directional coupling waveguide 104 and the second directional coupling waveguide 108. Fundamental mode light (TM) existing in the first directionally coupled waveguide 1040Conversion to higher-order mode TM by mode coupling1And coupled into the second directional coupling waveguide 108, and the fundamental mode light TM existing in the second directional coupling waveguide 1080Is still TM0Keeping mode unchanged with the converted TM1Common transmissionTransit, ultimate TM0And TM1Are co-present in the second directionally coupled waveguide 108.
Referring to (a) in fig. 4, the fundamental mode light TM in the first directionally coupled waveguide 1040Conversion to higher-order mode TM by mode coupling1(ii) a And (b) in FIG. 4 is a fundamental mode light TM existing in the second directional coupling waveguide 3020Is still TM0Mode conversion does not occur, and TM from conversion does not occur1Co-transmission, ultimate TM0And TM1Are co-present in the second directionally coupled waveguide 108.
The second output waveguide 109 functions to support 2-mode transmission, i.e., support TM converted from the first directional coupling waveguide 1041And a TM in the second directionally coupled waveguide 1080The width of the second output waveguide 109 is the same as the width of the second directional coupling waveguide 108, and is 1000nm to 1500 nm.
Also, by calculation it was found that: referring to fig. 5, within the working wavelength of 1300-1700 nm, the mode conversion efficiency of the directional coupling-based plasma mode conversion and multiplexer is basically 70% -80%, and the bandwidth is as high as 400 nm. The directional coupling-based plasma mode conversion and multiplexer in the embodiment of the invention has small size, and the size of a directional coupling area is only 10 microns; the bandwidth ratio is wider within 1300-1700 nm of working wavelength, and is as high as 400 nm.
Referring to fig. 6, the mode conversion efficiency of the conventional plasma mode conversion and multiplexer is substantially 70% -80%. The mode conversion efficiency of the embodiment of the invention is basically 70% -80%, however, compared with the mode conversion efficiency curve of the existing plasma mode conversion and multiplexer, the mode conversion efficiency curve of the embodiment of the invention is slightly flat, namely, the mode conversion efficiency is relatively more stable.
Compared with the existing trapezoid coupling waveguide, the strip-shaped directional coupling waveguide in the embodiment of the invention has the same width, and the widths of the waveguides connected with the two ends of the strip-shaped directional coupling waveguide are correspondingly kept consistent with the width of the waveguide, so that the directional coupling region in the embodiment of the invention has a simpler structure, low requirement on the precision of the manufacturing process and less loss.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (10)
1. A directional coupling based plasmonic mode conversion and multiplexer comprising a polymer waveguide layer (1), characterized in that: the polymer waveguide layer (1) comprises a first directional coupling waveguide (104) and a second directional coupling waveguide (108), and the widths of the first directional coupling waveguide and the second directional coupling waveguide are kept unchanged; the first directional coupling waveguide (104) and the second directional coupling waveguide (108) are parallel and keep a certain distance, and a directional coupling area is formed together, the directional coupling area converts a basic mode in the first directional coupling waveguide (104) into a high-order mode and couples the high-order mode into the second directional coupling waveguide (108), the basic mode in the second directional coupling waveguide (108) keeps unchanged, and finally the basic mode and the high-order mode coexist in the second directional coupling waveguide (108).
2. The plasma mode converter and multiplexer of claim 1, wherein: the distance is 0.01-0.05 μm.
3. The plasma mode converter and multiplexer of claim 1, wherein: the length of the directional coupling area is 4-10 mu m.
4. The plasma mode converter and multiplexer of claim 1, wherein: the width of the first directional coupling waveguide (104) is 300-900 nm.
5. The plasma mode converter and multiplexer of claim 1, wherein: the width of the second directional coupling waveguide (108) is 1000-1500 nm.
6. The plasma mode converter and multiplexer of claim 1, wherein: the polymer waveguide layer (1) further comprises a first input coupler (101), a first input waveguide (102), a first bent waveguide (103), a second bent waveguide (105) and a first output waveguide (106), the first input coupler (101), the first input waveguide (102), the first bent waveguide (103), the first directional coupling waveguide (104), the second bent waveguide (105) and the first output waveguide (106) are sequentially connected, and the widths of the first input waveguide (102), the first bent waveguide (103), the first directional coupling waveguide (104), the second bent waveguide (105) and the first output waveguide (106) are the same.
7. The plasma mode converter and multiplexer of claim 1, wherein: the polymer waveguide layer (1) further comprises a second input coupler (107) and a second output waveguide (109), the second input coupler (107), the second directional coupling waveguide (108) and the second output waveguide (109) are sequentially connected, and the width of the second directional coupling waveguide (108) is the same as that of the second output waveguide (109).
8. The plasma mode converter and multiplexer of claim 1, wherein: the plasma mode conversion and multiplexer also comprises a thin gold layer (2) and a silicon dioxide substrate (3), wherein the polymer waveguide layer (1) is deposited on the thin gold layer (2), and the thin gold layer (2) is deposited on the silicon dioxide substrate (3).
9. The plasma mode converter and multiplexer of claim 8, wherein: the polymer waveguide layer (1) is 350-700 nm thick and 1.2-2 in refractive index.
10. The plasma mode converter and multiplexer of claim 8, wherein: the thickness of the thin gold layer (2) is 50-200 nm.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113050222A (en) * | 2021-04-16 | 2021-06-29 | 吉林大学 | Reconfigurable polymer mode converter for mode division multiplexing system |
| CN114089472A (en) * | 2021-11-16 | 2022-02-25 | 武汉邮电科学研究院有限公司 | Polymer mode multiplexer, space division multiplexing device and space division multiplexing method |
| CN114243428A (en) * | 2021-12-03 | 2022-03-25 | 武汉邮电科学研究院有限公司 | Multi-core optical fiber amplifier |
| CN115437071A (en) * | 2022-09-06 | 2022-12-06 | 上海交通大学 | Asymmetric Directional Coupler for Multiband Operation |
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