CN110926380A - Method for measuring coaxiality of optical element of laser cutting head - Google Patents
Method for measuring coaxiality of optical element of laser cutting head Download PDFInfo
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- CN110926380A CN110926380A CN201911387412.4A CN201911387412A CN110926380A CN 110926380 A CN110926380 A CN 110926380A CN 201911387412 A CN201911387412 A CN 201911387412A CN 110926380 A CN110926380 A CN 110926380A
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- optical element
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/22—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring angles or tapers; for testing the alignment of axes
- G01B21/24—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring angles or tapers; for testing the alignment of axes for testing alignment of axes
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- General Physics & Mathematics (AREA)
- Semiconductor Lasers (AREA)
Abstract
The invention discloses a method for measuring the coaxiality of an optical element of a laser cutting head, which comprises the following steps: 1) arranging a light emitting point, an optical element to be detected and a target surface in sequence along an optical axis; 2) the optical element to be measured is placed at the position A by taking the light emitting point as a zero point position and the direction vertical to the target surface as an axis, and the axis is marked as
Obtaining a point A on the target surface, wherein the barycentric coordinate of the point A is [ x, y ]]Wherein L is the distance from the light-emitting point to the target surface, and F is the focal length of the optical element to be measured; 3) the optical element to be measured is placed at position B, the axis is marked
Acquiring a point B on the target surface, wherein the barycentric coordinate of the point B is [ x ', y'](ii) a 4) Calculating the optical axis coincidence of the optical element to be measured and the light emitting pointThe axial deviation is [ d ]x,dy]Wherein
Wherein the content of the first and second substances,
is the distance between position a and position B. The invention can quickly measure the coaxiality of a single optical element or an optical system and the optical axis, and improves the reliability and the measuring efficiency of the measuring result.
Description
[ technical field ] A method for producing a semiconductor device
The invention belongs to the technical field of laser cutting, and particularly relates to a method for measuring coaxiality of an optical element of a laser cutting head.
[ background of the invention ]
The optical system of the cutting head is generally a finite distance conjugate optical system consisting of a collimating lens group and a focusing lens group. The optical design of the laser cutting head is a coaxial system, while the structural design of the cutting head needs to consider that various layouts of air paths and electric circuits are non-coaxial systems. Therefore, it is very difficult to measure the coaxiality of the cutting head in actual production.
The traditional method for detecting the coaxiality of the optical system of the cutting head is to utilize a mechanical method and respectively measure the distance between the excircle of the lens cone and a set reference through measuring tools such as a height gauge and the like so as to judge the coaxiality of each lens cone assembly. The method has two errors, namely, the first method is that the coaxiality of the lens is directly judged through the lens cone and is unscientific; the second method of mechanical measurement is an indirect measurement method, which cannot represent the coaxiality of the whole optical system to some extent.
Therefore, there is a need to provide a new method for measuring the coaxiality of optical elements of a laser cutting head to solve the above problems.
[ summary of the invention ]
The invention mainly aims to provide a method for measuring the coaxiality of an optical element of a laser cutting head, which can quickly measure the coaxiality of a single optical element or an optical system and an optical axis and improve the reliability and the measurement efficiency of a measurement result.
The invention realizes the purpose through the following technical scheme: a method of measuring the coaxiality of optical elements of a laser cutting head, comprising the steps of:
1) arranging a light emitting point, an optical element to be detected and a target surface in sequence along an optical axis;
2) the light-emitting point is taken as a zero point position, and the direction vertical to the target surface is taken as an axisA line for placing the optical element to be measured at a position A having an axial coordinate of
Obtaining a clear point target clear image point A on the target surface, wherein the barycentric coordinate of the point A is [ x, y ]]Wherein L is the distance between the light emergent point and the target surface, and F is the focal length of the optical element to be measured;
3) placing an optical element to be measured at a position B, wherein the axial coordinate of the position B is
Acquiring a clear point target clear image point B on the target surface, wherein the barycentric coordinate of the point B is [ x ', y']；
4) Calculating the deviation of the coaxiality of the optical axis of the optical element to be measured and the light emitting point as [ dx,dy]Wherein
Wherein, Delta is the distance between the position A and the position B,
further, the optical element to be measured is a single focusing lens or a positive focal lens group system.
Further, the target surface is provided by a camera target surface.
Further, the distance L between the light emergent point and the target surface is greater than or equal to 4F.
Compared with the prior art, the method for measuring the coaxiality of the optical element of the laser cutting head has the advantages that: the coaxiality of a single optical element or an optical system and an optical axis can be rapidly measured, the reliability and the measuring efficiency of a measuring result are improved, the measuring time is shortened, and errors caused by human factors and indirect measurement are avoided.
[ description of the drawings ]
FIG. 1 is an optical path diagram of the present invention with an optical element coaxial with the optical axis;
FIG. 2 is a diagram of an optical path when an optical element is deviated from an optical axis in the present invention;
FIG. 3 is a schematic diagram of the positions of the light spots focused on the target surface of the camera by the optical element at the positions A and B.
[ detailed description ] embodiments
Example (b):
the embodiment of the invention provides a method for measuring the coaxiality of an optical element of a laser cutting head, which comprises the following steps:
1) a light emitting point 1, an optical element 2 to be detected and a target surface 3 are sequentially arranged along an optical axis; the light-emitting point can be emitted by a red light collimator, the optical element to be detected can be a single positive focal lens or a positive focal lens group system, and the target surface can be provided by a camera target surface;
wherein, the distance L between the light-emitting point and the target surface is required to be more than or equal to 4F, and F is the focal length of the optical element to be measured;
2) placing an optical element to be measured at a position A by taking a light emitting point as a zero point position and a direction vertical to the target surface as an axis, wherein the axial coordinate of the position A is
Obtaining a clear point target clear image point A on the target surface, wherein the barycentric coordinate of the point A is [ x, y ]]；
3) Placing an optical element to be measured at a position B, wherein the axial coordinate of the position B is
Acquiring a clear point target clear image point B on the target surface, wherein the barycentric coordinate of the point B is [ x ', y']Please refer to fig. 3;
4) calculating the deviation of the coaxiality of the optical axis of the optical element to be measured and the light emitting point as [ dx,dy]Wherein
Wherein, Delta is the distance between the position A and the position B,
in this embodiment, the distance between the light exit point and the target surface is set to be greater than four times of the focal length of the optical element to be measured, so as to ensure that there are two positions between the light exit point and the target surface, so that the optical element to be measured can focus a light beam to the same light spot position theoretically, as shown in fig. 1. When the center of the optical element to be measured is not on the optical axis, the light spot A, B appears at the position a and the position B, respectively, and does not overlap with the light spot C when the optical element to be measured is coaxial, as shown in fig. 2.
After the coaxiality deviation of the optical element to be measured is obtained through measurement by the method, the optical element group in the laser cutting head can be coaxial with the laser optical fiber shaft by adjusting according to the deviation.
What has been described above are merely some embodiments of the present invention. It will be apparent to those skilled in the art that various changes and modifications can be made without departing from the inventive concept thereof, and these changes and modifications can be made without departing from the spirit and scope of the invention.
Claims (4)
1. A method for measuring the coaxiality of an optical element of a laser cutting head is characterized in that: which comprises the following steps:
1) arranging a light emitting point, an optical element to be detected and a target surface in sequence along an optical axis;
2) placing an optical element to be measured at a position A by taking a light emitting point as a zero point position and a direction vertical to the target surface as an axis, wherein the axial coordinate of the position A is
Obtaining a clear point target clear image point A on the target surface, wherein the barycentric coordinate of the point A is [ x, y ]]Wherein L is the distance between the light emergent point and the target surface, and F is the focal length of the optical element to be measured;
3) placing an optical element to be tested at a position B, wherein the axial direction of the position B isThe coordinates are
Acquiring a clear point target clear image point B on the target surface, wherein the barycentric coordinate of the point B is [ x ', y']；
4) Calculating the deviation of the coaxiality of the optical axis of the optical element to be measured and the light emitting point as [ dx,dy]Wherein
Wherein, Delta is the distance between the position A and the position B,
2. the method of measuring the coaxiality of optical elements of a laser cutting head of claim 1, wherein: the optical element to be measured is a single focusing lens or a positive focal lens group system.
3. The method of measuring the coaxiality of optical elements of a laser cutting head of claim 1, wherein: the target surface is provided by a camera target surface.
4. The method of measuring the coaxiality of optical elements of a laser cutting head of claim 1, wherein: the distance L between the light-emitting point and the target surface is greater than or equal to 4F.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118670307A (en) * | 2024-08-20 | 2024-09-20 | 南京埃米仪器科技有限公司 | Method for adjusting coaxiality of optical axis of objective lens in infinity imaging optical system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN118670307A (en) * | 2024-08-20 | 2024-09-20 | 南京埃米仪器科技有限公司 | Method for adjusting coaxiality of optical axis of objective lens in infinity imaging optical system |
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