CN110900356A - On-line detection device and method for surface friction characteristics of polishing disc in full-bore polishing - Google Patents
On-line detection device and method for surface friction characteristics of polishing disc in full-bore polishing Download PDFInfo
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- CN110900356A CN110900356A CN201911090087.5A CN201911090087A CN110900356A CN 110900356 A CN110900356 A CN 110900356A CN 201911090087 A CN201911090087 A CN 201911090087A CN 110900356 A CN110900356 A CN 110900356A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/02—Frames; Beds; Carriages
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/22—Equipment for exact control of the position of the grinding tool or work at the start of the grinding operation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
- B24B49/04—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent involving measurement of the workpiece at the place of grinding during grinding operation
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Abstract
本发明涉及全口径抛光中抛光盘表面摩擦特性的在线检测装置及方法，装置包括：固定部可拆卸于全口径抛光机床的横梁上；竖直驱动部连接于固定部上，且远离全口径抛光机床横梁的一侧，滑动部沿竖直方向上可滑动连接于竖直驱动部上；精密力传感器固定于滑动部上，且位于远离竖直驱动部一侧；滑动部与推力驱动部上部铰接位置为A点，精密力传感器与推力驱动部下部接触位置为B点；推力驱动部输出端连接推杆用于改变推杆的行程；推杆底部与工作板连接，且工作板底面与环抛机抛光盘抵接位置为C点；根据精密力传感器检测的横向摩擦力F，测量A点和B点的距离为X，及A点和C点之间的距离为Y，以A点为旋转轴满足力矩平衡方程：Fx‑Gy＝0，其中G为横向摩擦力。
The invention relates to an on-line detection device and method for the friction characteristics of a polishing disc surface in full-caliber polishing. The device comprises: a fixing part is detachable on a beam of a full-caliber polishing machine; a vertical driving part is connected to the fixing part and is far away from the full-caliber polishing On one side of the machine tool beam, the sliding part is slidably connected to the vertical driving part in the vertical direction; the precision force sensor is fixed on the sliding part and is located on the side away from the vertical driving part; the sliding part is hinged with the upper part of the thrust driving part The position is point A, and the contact position between the precision force sensor and the lower part of the thrust drive part is point B; the output end of the thrust drive part is connected to the push rod to change the stroke of the push rod; the bottom of the push rod is connected to the working plate, and the bottom surface of the working plate is connected to the ring throw The contact position of the machine polishing disc is point C; according to the lateral friction force F detected by the precision force sensor, the distance between points A and B is measured as X, and the distance between point A and point C is Y, and point A is the rotation The shaft satisfies the moment balance equation: Fx‑Gy=0, where G is the lateral friction force.
Description
Technical Field
The invention relates to the technical field of optical element processing, in particular to an online detection device and method for the surface friction characteristic of a polishing disc in full-aperture polishing.
Background
Full aperture polishing is one of the key technologies for processing large aperture planar optical elements. The full-caliber polishing machine tool usually adopts large-size and high-thermal-stability natural granite to manufacture a polishing disk base plate, and an annular asphalt glue layer is cast on the surface of the base plate to serve as the polishing disk. The surface of the ring belt of the asphalt polishing disk is sequentially provided with a correcting disk and a workpiece disk, wherein the correcting disk is used for correcting and controlling the shape error of the polishing disk, and the workpiece disk is used for holding a component. When in processing, the polishing disk, the correcting disk and the workpiece disk rotate around the anticlockwise direction at a constant speed, and the optical elements in the workpiece disk generate material removal under the action of the asphalt polishing disk and polishing particles carried by the asphalt polishing disk so as to form an optical surface. The optical element placed in the workpiece disc can float freely in the vertical direction and is subjected to a pair of balanced acting forces in the vertical direction, namely the self gravity and the bearing capacity of the polishing disc; while in the horizontal direction, the polishing surface of the optical element is subjected to the frictional force of the polishing pad, while the side surface of the optical element is subjected to the positive pressure applied by the workpiece pad to balance the frictional force of the polishing pad. The frictional force of the polishing disk acting on the polishing surface of the optical element depends on the frictional characteristics of the surface of the polishing disk, which is an important parameter in the polishing process and has an important influence on the material removal rate and the machining precision of the element. The friction force applied to the surface of the element by the polishing disc changes continuously in magnitude and direction along with the rotation of the polishing disc and the element in the polishing process, so that the detection of the friction force is very difficult. Therefore, how to provide an online detection device for the surface friction characteristics of a polishing disk in full-aperture polishing is a problem to be solved by those skilled in the art.
Disclosure of Invention
The present invention is directed to solving, at least to some extent, one of the above-mentioned problems in the prior art.
Therefore, an object of the present invention is to provide an online detection apparatus for detecting the surface friction characteristic of a polishing disk in full-aperture polishing, which solves the technical problem in the prior art that the detection is difficult because the magnitude and direction of the friction force of the polishing disk acting on the surface of an element are constantly changed.
The invention provides an on-line detection device for the surface friction characteristic of a polishing disk in full-caliber polishing, which comprises:
the fixing part is detachable on a beam H of the full-caliber polishing machine tool;
the vertical driving part is connected to the fixing part and is far away from one side of a cross beam H of the full-caliber polishing machine tool;
the sliding part is connected to the vertical driving part in a sliding manner along the vertical direction;
the precise force sensor is fixed on the sliding part and is positioned on one side far away from the vertical driving part;
the hinge position of the sliding part and the upper part of the thrust driving part is a point A, and the contact position of the precision force sensor and the lower part of the thrust driving part is a point B;
the output end of the thrust driving part is connected with the push rod and used for changing the stroke of the push rod;
the bottom of the push rod is connected with the working plate, and the abutting position of the bottom surface of the working plate and a polishing disc of a full-caliber polishing machine tool is a point C;
according to the transverse friction force F detected by the precision force sensor, the distance between the point A and the point B is measured to be X, the distance between the point A and the point C is measured to be Y, and the point A is taken as a rotating shaft to satisfy a moment balance equation: Fx-Gy is 0, where G is the lateral friction.
According to the technical scheme, compared with the prior art, the invention discloses the online detection device for the surface friction characteristic of the polishing disc in full-caliber polishing, the fixed part is fixed on the beam of a full-caliber polishing machine tool, the polishing machine tool is started, and the polishing disc starts to rotate at a constant speed; the vertical driving part drives the sliding part to move downwards, so that the working plate is close to the surface of the polishing disc; the push rod is driven by the thrust driving part to extend out for a certain lift range, so that the working plate is contacted with the surface of the polishing disc, and the push rod is enabled to act on the working plate by a constant acting force through the thrust driving part; the precision force sensor detects the transverse force applied by the surface of the polishing disc on the working plate, an action head at the lower part of the thrust driving part is contacted with the precision force sensor, and the precision force sensor detects the transverse action force F; measuring the distance between the point A and the point B as X, and the distance between the point A and the point C as Y; and the point A is taken as a rotating shaft, and a moment balance equation is satisfied:
Fx-Gy is 0 formula (1);
solving according to the formula to obtain the transverse friction force of the surface of the polishing disc to the working plate:
g ═ Fx/y formula (2);
knowing that the acting force of the push rod on the working plate is K, the polishing friction coefficient of the surface friction characteristic of the polishing disk is obtained:
and f is G/K formula (3).
The device for detecting the friction characteristic of the surface of the polishing disc in full-aperture polishing can be conveniently fixed on a polishing machine to measure the friction characteristic of the surface of the polishing disc on line, the measurement is carried out under a normal processing state without influencing the polishing process, the loading force on the surface of the polishing disc is controlled by adjusting the stress of the working plate, and an operator can analyze the processing performance of the polishing disc according to the measurement result so as to guide the processing process.
Preferably, the fixing part is a plate body, a threaded hole is formed in the plate body, and the fixing part is fixed on a cross beam H of the full-caliber polishing machine tool through inserting a screw into the threaded hole, so that the fixing part is conveniently installed on the cross beam of the full-caliber polishing machine tool.
Preferably, the vertical driving part comprises a track, a lead screw and a servo motor; the track sets up on the fixed part, and servo motor is fixed in track one side through the connecting plate, and the lead screw is connected with the servo motor output, and with track parallel arrangement, the sliding part slides with lead screw and track cooperation.
Preferably, the sliding part includes a slide plate and a slider; one side of the sliding plate is provided with a screw nut matched with the screw, the upper part of the other side of the sliding plate is hinged with the thrust driving part, and the lower part of the sliding plate is fixed with a precision force sensor; the slider is connected with slide one side, sets up in screw nut both sides including a plurality of correspondences, and with track slidable connection. From this servo motor drives the lead screw rotation, and screw nut moves on the lead screw, and then drives the slider and drives the slide and move along vertical direction, satisfies the work board and is close to and keeps away from the user demand of polishing dish.
Preferably, the thrust driving part comprises a rotary connecting plate and a cylinder assembly; the upper part of one surface of the rotating connecting plate is hinged with the sliding plate, and the lower part of the rotating connecting plate is provided with an acting head which is opposite to and corresponds to the precision force sensor; the air cylinder component is fixed on the other side of the rotating connecting plate and is communicated with an external air source through an air pipe.
Preferably, the supply pressure of the external gas source is greater than 0.4 MPa.
Preferably, the air pipe is provided with a precise pressure regulating device, the air supply pressure is regulated to change the lift range of the push rod so as to meet the polishing requirement, and the lift range of the push rod is preferably larger than 20 mm.
Preferably, the precise pressure regulating device is provided with a display for displaying the thrust of the push rod, so that the thrust numerical value of the push rod can be conveniently displayed. The precise pressure regulating device can be a precise pressure regulating valve with a display function.
Preferably, the bottom of the push rod is hinged to the workplate ball.
The invention also provides an online detection method for the surface friction characteristic of a polishing disk in full-caliber polishing, which comprises the following steps:
s1, fixing the fixed part on a beam of the full-caliber polishing machine tool, starting the polishing machine tool, and enabling the polishing disc to rotate at a constant speed; the vertical driving part drives the sliding part to move downwards, so that the working plate is close to the surface of the polishing disc; the push rod is driven by the thrust driving part to extend out for a certain lift range, so that the working plate is contacted with the surface of the polishing disc, and the push rod is enabled to act on the working plate by a constant acting force through the thrust driving part;
s2, detecting the transverse force exerted by the surface of the polishing disc on the working plate in the step S by the precision force sensor, contacting the action head at the lower part of the thrust driving part with the precision force sensor, and detecting the transverse action force F by the precision force sensor;
s3, measuring the distance between the point A and the point B as X, and the distance between the point A and the point C as Y;
s4, taking the point A as a rotating shaft, satisfying the moment balance equation:
Fx-Gy is 0 formula (1);
solving according to the formula to obtain the transverse friction force of the surface of the polishing disc to the working plate:
g ═ Fx/y formula (2);
knowing that the acting force of the push rod on the working plate is K, the polishing friction coefficient of the surface friction characteristic of the polishing disk is obtained:
and f is G/K formula (3).
According to the technical scheme, compared with the prior art, the method for detecting the surface friction characteristic of the polishing disc in full-aperture polishing is disclosed, the online measurement of the surface friction characteristic of the polishing disc is realized, the measurement is carried out in a normal processing state without influencing the polishing process, the loading force on the surface of the polishing disc is controlled by adjusting the stress of the working plate, and an operator can analyze the processing performance of the polishing disc according to the measurement result, so that the processing process is guided.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
FIG. 1 is a schematic structural diagram of an apparatus for online detection of the surface friction characteristics of a polishing disc in full-aperture polishing according to the present invention;
FIG. 2 is a side view of FIG. 1;
FIG. 3 is a view showing the measurement positions of a distance X and a distance Y;
FIG. 4 is a schematic structural diagram of an online detection device for detecting the surface friction characteristics of a polishing disc during full-aperture polishing applied to a full-aperture polishing machine according to the present invention;
in the figure: 100-fixed part, 200-vertical driving part, 201-track, 202-lead screw, 203-servomotor, 300-sliding part, 301-sliding plate, 302-sliding block, 400-precision force sensor, 500-thrust driving part, 501-rotary connecting plate, 5011-acting head, 502-cylinder component, 503-precision pressure regulating device, 600-push rod and 700-working plate.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
The embodiment of the invention discloses an online detection device for the surface friction characteristic of a polishing disk in full-aperture polishing, which solves the technical problems that the magnitude and the direction of the friction force of the polishing disk acting on the surface of an element are constantly changed and the detection is difficult in the prior art.
Referring to fig. 1 and 4, the present invention provides an online detection device for the surface friction characteristics of a polishing disc in full-aperture polishing, comprising:
the fixing part 100 is detachably arranged on a beam H of the full-caliber polishing machine tool, and the fixing part 100 is arranged on the beam H;
the vertical driving part 200, the vertical driving part 200 is connected to the fixing part 100, and is far away from one side of the beam H of the full-caliber polishing machine tool;
a sliding part 300, the sliding part 300 being slidably connected to the vertical driving part 200 in the vertical direction;
the precise force sensor 400, the precise force sensor 400 is fixed on the sliding part 300 and is positioned at one side far away from the vertical driving part 200;
the hinge position of the sliding part 300 and the upper part of the thrust driving part 500 is point A, and the contact position of the precision force sensor 400 and the lower part of the thrust driving part 500 is point B;
the output end of the thrust driving part 500 is connected with the push rod 600 for changing the stroke of the push rod 600;
the bottom of the push rod 600 is connected with the working plate 700, and the abutting position of the bottom surface of the working plate 700 and a polishing disc of a full-caliber polishing machine tool is a point C;
according to the transverse friction force F detected by the precision force sensor 400, the distance between the point A and the point B is measured to be X, the distance between the point A and the point C is measured to be Y, and the point A is taken as a rotating shaft to satisfy a moment balance equation: Fx-Gy is 0, where G is the lateral friction.
According to the technical scheme, compared with the prior art, the invention discloses the online detection device for the surface friction characteristic of the polishing disc in full-caliber polishing, the fixed part is fixed on the beam of the full-caliber polishing machine tool, the polishing machine tool is started, and the polishing disc starts to rotate at a constant speed; the vertical driving part drives the sliding part to move downwards, so that the working plate is close to the surface of the polishing disc; the push rod is driven by the thrust driving part to extend out for a certain lift range, so that the working plate is contacted with the surface of the polishing disc, and the push rod is enabled to act on the working plate by a constant acting force through the thrust driving part; the precision force sensor detects the transverse force applied by the surface of the polishing disc on the working plate, an action head at the lower part of the thrust driving part is contacted with the precision force sensor, and the precision force sensor detects the transverse action force F; measuring the distance between the point A and the point B as X, and the distance between the point A and the point C as Y; and the point A is taken as a rotating shaft, and a moment balance equation is satisfied:
Fx-Gy is 0 formula (1);
solving according to the formula to obtain the transverse friction force of the surface of the polishing disc to the working plate:
g ═ Fx/y formula (2);
knowing that the acting force of the push rod on the working plate is K, the polishing friction coefficient of the surface friction characteristic of the polishing disk is obtained:
and f is G/K formula (3).
The device for detecting the friction characteristic of the surface of the polishing disc in full-aperture polishing can be conveniently fixed on a polishing machine to measure the friction characteristic of the surface of the polishing disc on line, the measurement is carried out under a normal processing state without influencing the polishing process, the loading force on the surface of the polishing disc is controlled by adjusting the stress of the working plate, and an operator can analyze the processing performance of the polishing disc according to the measurement result so as to guide the processing process.
The fixing portion 100 is a plate body, which is provided with a threaded hole, and is fixed on the beam H of the full-caliber polishing machine tool by inserting a screw into the threaded hole, so that the fixing portion is conveniently installed on the beam of the full-caliber polishing machine tool.
Referring to fig. 2, the vertical driving part 200 includes a rail 201, a lead screw 202, and a servo motor 203; the track 201 is arranged on the fixing portion 100, the servo motor 203 is fixed on one side of the track 201 through a connecting plate, the lead screw 202 is connected with the output end of the servo motor 203 and is arranged in parallel with the track 201, and the sliding portion 300 is matched with the lead screw 202 and the track 201 to slide.
The sliding part 300 comprises a sliding plate 301 and a sliding block 302; one side of the sliding plate 301 is provided with a screw nut matched with the screw 202, the upper part of the other side is hinged with the thrust driving part 500, and the lower part is fixed with the precision force sensor 400; the slider 302 is connected with one side of the sliding plate 301, and comprises a plurality of corresponding parts which are arranged on two sides of the screw nut and are slidably connected with the track 201. From this servo motor drives the lead screw rotation, and screw nut moves on the lead screw, and then drives the slider and drives the slide and move along vertical direction, satisfies the work board and is close to and keeps away from the user demand of polishing dish.
Referring to fig. 2, the thrust driving part 500 includes a rotation connection plate 501 and a cylinder assembly 502; the upper part of one surface of the rotary connecting plate 501 is hinged with the sliding plate 301, and the lower part is provided with an acting head 5011 opposite to and corresponding to the precision force sensor 400; the cylinder assembly 502 is fixed on the other side of the rotary connecting plate 501, and the cylinder assembly 502 is communicated with an external air source through an air pipe.
Specifically, the air supply pressure of the external air source is more than 0.4 MPa. The air pipe is provided with a precise pressure regulating device 503 for regulating the air supply pressure to change the lift range of the push rod so as to meet the polishing requirement, and the lift range of the push rod is preferably more than 20 mm.
Wherein, be provided with the display that is used for showing the thrust of push rod 600 on the accurate pressure regulating device 503, conveniently show push rod thrust numerical value. The precise pressure regulating device can be a precise pressure regulating valve with a display function.
Advantageously, the bottom of the push rod 600 is ball-hinged to the work plate 700.
The invention also provides an online detection method for the surface friction characteristic of the polishing disk in full-caliber polishing, which comprises the following steps:
s1, fixing the fixed part on a beam of the full-caliber polishing machine tool, starting the polishing machine tool, and enabling the polishing disc to rotate at a constant speed; the vertical driving part drives the sliding part to move downwards, so that the working plate is close to the surface of the polishing disc; the push rod is driven by the thrust driving part to extend out for a certain lift range, so that the working plate is contacted with the surface of the polishing disc, and the push rod is enabled to act on the working plate by a constant acting force through the thrust driving part;
s2, the precision force sensor detects the transverse force applied by the surface of the polishing disk on the working plate in S1, the action head at the lower part of the thrust driving part is contacted with the precision force sensor, and the precision force sensor detects the transverse action force F;
s3, measuring the distance between the point A and the point B as X, and the distance between the point A and the point C as Y;
s4, taking the point A as a rotating shaft, satisfying the moment balance equation:
Fx-Gy is 0 formula (1);
solving according to the formula 1 to obtain the transverse friction force of the surface of the polishing disc to the working plate:
g ═ Fx/y formula (2);
knowing that the acting force of the push rod on the working plate is K, the polishing friction coefficient of the surface friction characteristic of the polishing disk is obtained:
and f is G/K formula (3).
The invention discloses and provides an online detection method for the surface friction characteristic of a polishing disk in full-aperture polishing, which realizes online measurement of the surface friction characteristic of the polishing disk, performs measurement in a normal processing state without influencing the polishing process, realizes control of the loading force on the surface of the polishing disk by adjusting the stress of a working plate, and can analyze the processing performance of the polishing disk according to the measurement result by an operator so as to guide the processing process.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples described in this specification can be combined and combined by those skilled in the art.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.
Claims (10)
1. On-line measuring device of polishing dish surface friction characteristic in full bore polishing, its characterized in that includes:
the fixing part (100) is detachable from a cross beam (H) of a full-caliber polishing machine tool;
the vertical driving part (200), the vertical driving part (200) is connected to the fixing part (100) and is far away from one side of a cross beam (H) of the full-caliber polishing machine tool;
a sliding part (300), the sliding part (300) being slidably connected to the vertical driving part (200) in a vertical direction;
the precision force sensor (400), the precision force sensor (400) is fixed on the sliding part (300) and is positioned on one side far away from the vertical driving part (200);
the upper hinged position of the sliding part (300) and the thrust driving part (500) is a point A, and the lower contact position of the precision force sensor (400) and the thrust driving part (500) is a point B;
the output end of the thrust driving part (500) is connected with the push rod (600) and is used for changing the stroke of the push rod (600);
the bottom of the push rod (600) is connected with the working plate (700), and the abutting position of the bottom surface of the working plate (700) and a polishing disc of a full-caliber polishing machine tool is a point C;
according to the transverse friction force F detected by the precision force sensor (400), measuring the distance between the point A and the point B as X, and the distance between the point A and the point C as Y, and taking the point A as a rotating shaft to satisfy a moment balance equation: Fx-Gy is 0, where G is the lateral friction.
2. The apparatus for on-line detection of surface friction characteristics of a polishing disc during full-caliber polishing as claimed in claim 1, wherein the fixing portion (100) is a plate body provided with a threaded hole, and is fixed on a beam (H) of a full-caliber polishing machine tool by inserting a screw into the threaded hole.
3. The device for on-line detection of the surface friction characteristic of the polishing disc in the full-aperture polishing as claimed in claim 1, wherein the vertical driving part (200) comprises a track (201), a lead screw (202) and a servo motor (203); the track (201) is arranged on the fixing portion (100), the servo motor (203) is fixed on one side of the track (201) through a connecting plate, the lead screw (202) is connected with the output end of the servo motor (203) and arranged in parallel with the track (201), and the sliding portion (300) is matched with the lead screw (202) and the track (201) to slide.
4. The apparatus for on-line detection of surface friction characteristics of a polishing disc in full-aperture polishing according to claim 3, wherein the sliding part (300) comprises a sliding plate (301) and a sliding block (302); one surface of the sliding plate (301) is provided with a screw nut matched with the screw (202), the upper part of the other surface of the sliding plate is hinged with the thrust driving part (500), and the lower part of the sliding plate is fixed with the precision force sensor (400); the sliding block (302) is connected with one surface of the sliding plate (301), comprises a plurality of sliding blocks which are correspondingly arranged on two sides of the screw nut and can be slidably connected with the track (201).
5. The apparatus for on-line detection of surface friction characteristics of a full-aperture polishing disc according to claim 4, wherein the thrust driver (500) comprises a rotary connection plate (501) and a cylinder assembly (502); the upper part of one surface of the rotary connecting plate (501) is hinged with the sliding plate (301), and the lower part of the rotary connecting plate is provided with an acting head (5011) opposite to and corresponding to the precision force sensor (400); the air cylinder assembly (502) is fixed on the other surface of the rotary connecting plate (501), and the air cylinder assembly (502) is communicated with an external air source through an air pipe.
6. The apparatus of claim 5, wherein the external air source has an air pressure greater than 0.4 MPa.
7. The device for on-line detection of the surface friction characteristic of the polishing disc in the full-caliber polishing as claimed in claim 5, wherein the air pipe is provided with a precise pressure regulating device (503).
8. The on-line detection device for the surface friction characteristic of the full-aperture polishing disc as recited in claim 7, wherein a display for displaying the pushing force of the push rod (600) is arranged on the precise pressure regulating device (503).
9. The apparatus for on-line detection of surface friction characteristics of a polishing disc in full-aperture polishing according to any one of claims 1 to 8, wherein the bottom of the push rod (600) is ball-hinged to the work plate (700).
10. The online detection method for the surface friction characteristic of the polishing disk in full-aperture polishing is characterized by comprising the following steps of:
s1, fixing the fixed part on a beam of the full-caliber polishing machine tool, starting the polishing machine tool, and enabling the polishing disc to rotate at a constant speed; the vertical driving part drives the sliding part to move downwards, so that the working plate is close to the surface of the polishing disc; the push rod is driven by the thrust driving part to extend out for a certain lift range, so that the working plate is contacted with the surface of the polishing disc, and the push rod is enabled to act on the working plate by a constant acting force through the thrust driving part;
s2, the precision force sensor detects the transverse force applied by the surface of the polishing disk on the working plate in S1, the action head at the lower part of the thrust driving part is contacted with the precision force sensor, and the precision force sensor detects the transverse action force F;
s3, measuring the distance between the point A and the point B as X, and the distance between the point A and the point C as Y;
s4, taking the point A as a rotating shaft, satisfying the moment balance equation:
Fx-Gy is 0 formula (1);
solving according to the formula (1) to obtain the transverse friction force of the surface of the polishing disc to the working plate:
g ═ Fx/y formula (2);
knowing that the acting force of the push rod on the working plate is K, the polishing friction coefficient of the surface friction characteristic of the polishing disk is obtained:
and f is G/K formula (3).
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| CN115781517A (en) * | 2022-12-20 | 2023-03-14 | 中国科学院光电技术研究所 | Control device for polishing pressure in elastic launch and method for determining polishing pressure |
| CN116038554A (en) * | 2022-12-22 | 2023-05-02 | 苏州铼铂机电科技有限公司 | Pressure-regulating grinding and polishing device for chip |
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