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CN110880555A - Coating equipment and method for mixed solution of precursor and surfactant - Google Patents

Coating equipment and method for mixed solution of precursor and surfactant Download PDF

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CN110880555A
CN110880555A CN201811028438.5A CN201811028438A CN110880555A CN 110880555 A CN110880555 A CN 110880555A CN 201811028438 A CN201811028438 A CN 201811028438A CN 110880555 A CN110880555 A CN 110880555A
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polyoxyethylene ether
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Hangzhou Microquanta Semiconductor Corp Ltd
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • H10K71/12Deposition of organic active material using liquid deposition, e.g. spin coating
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K30/00Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/50Organic perovskites; Hybrid organic-inorganic perovskites [HOIP], e.g. CH3NH3PbI3
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y02E10/549Organic PV cells

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Abstract

本发明涉及一种前驱体与表面活性剂的混合溶液的涂布设备,包括涂布模头、模头升降台、后处理装置、涂布平台以及传送装置,待涂布的基底被涂布模头涂布后被传送装置输送到后处理装置处进行后处理,在传送装置的驱动下,模头升降台与涂布平台之间产生相对移动;涂布模头通过导管与带有混合腔的注射泵接通,注射泵与至少两个原料瓶接通,其中一个原料瓶中装有二价前驱体溶液,另一个原料瓶中装有表面活性剂溶液,注射泵分别同时抽吸二价前驱体溶液和表面活性剂溶液注入到混合腔中混合,混合溶液被输送给涂布模头使用。本发明还公开该涂布设备的使用方法及其应用。本发明提高涂膜的覆盖率和涂膜表面的平整度,得到膜厚分布更加均匀的钙钛矿薄膜。

Figure 201811028438

The invention relates to a coating equipment for a mixed solution of a precursor and a surfactant, comprising a coating die head, a die head lifting platform, a post-processing device, a coating platform and a conveying device. After the head is coated, it is transported by the conveying device to the post-processing device for post-processing. Under the driving of the conveying device, the die head lift table and the coating platform move relative to each other; The syringe pump is connected, the syringe pump is connected with at least two raw material bottles, one of the raw material bottles is filled with a divalent precursor solution, the other raw material bottle is filled with a surfactant solution, and the syringe pumps are simultaneously pumping the divalent precursor. The bulk solution and the surfactant solution are injected into the mixing chamber for mixing, and the mixed solution is delivered to the coating die for use. The invention also discloses the use method and application of the coating equipment. The invention improves the coverage of the coating film and the flatness of the surface of the coating film, and obtains a perovskite film with a more uniform film thickness distribution.

Figure 201811028438

Description

前驱体与表面活性剂的混合溶液的涂布设备及其方法Coating equipment and method of mixed solution of precursor and surfactant

技术领域technical field

本发明属于钙钛矿太阳能电池制备技术领域,特别涉及一种前驱体与表面活性剂的混合溶液的涂布设备及其方法。The invention belongs to the technical field of preparation of perovskite solar cells, and particularly relates to a coating device and a method for a mixed solution of a precursor and a surfactant.

背景技术Background technique

目前大面积制备钙钛矿太阳能电池的主要有喷涂法、刮涂法、狭缝式涂布、油墨印刷法和喷墨打印法等等。狭缝式涂布(Slot Die Coating)是工业化大面积制备钙钛矿太阳能电池的最为简便的方法之一,具有制备工艺周期短、原料节省、工艺操作简单等优点。但传统的狭缝式涂布制备钙钛矿太阳能电池具有存在较多的孔洞和薄膜膜厚严重不均等缺陷,严重制约着狭缝式涂布用于钙钛矿电池的大面积制备和商业化应用。At present, the main methods for large-area preparation of perovskite solar cells include spray coating, blade coating, slot coating, ink printing, and inkjet printing. Slot Die Coating is one of the most convenient methods for industrial large-area preparation of perovskite solar cells. It has the advantages of short preparation process cycle, saving raw materials, and simple process operation. However, the traditional slit-coating preparation of perovskite solar cells has many defects such as more pores and serious uneven film thickness, which seriously restricts the large-area preparation and commercialization of perovskite cells by slot-coating. application.

通常钙钛矿太阳能电池的制备工艺包括一步法和两步法。其中,在一步法的钙钛矿溶液成膜过程中,钙钛矿的结晶速度很快以及钙钛矿薄膜的形貌难以调控。而两步法制备钙钛矿薄膜相比一步法的工艺方法和调节手段更多。两步法就是在基底上先利用钙钛矿的二价前驱体(亦称二价金属卤化物)溶液制备二价前驱体薄膜层,并在此基础上再利用一价前驱体(亦称一价阳离子卤化物)溶液制备一价前驱体薄膜层。在两步法中,通过调控二价金属卤化物的成膜过程以及一价阳离子卤化物在二价金属卤化物薄膜上的沉积过程可以有效调控钙钛矿薄膜的反应程度和钙钛矿薄膜性能。Generally, the preparation process of perovskite solar cells includes one-step and two-step methods. Among them, in the one-step perovskite solution film formation process, the perovskite crystallization speed is fast and the morphology of the perovskite film is difficult to control. Compared with the one-step method, the two-step method for preparing perovskite thin films has more process methods and adjustment means. The two-step method is to use the bivalent precursor (also known as bivalent metal halide) solution of perovskite to prepare a bivalent precursor thin film layer on the substrate, and then use the monovalent precursor (also known as a monovalent precursor) on this basis. cationic halide) solution to prepare a monovalent precursor thin film layer. In the two-step method, the reaction degree and performance of perovskite films can be effectively regulated by regulating the film formation process of divalent metal halide and the deposition process of monovalent cation halide on the divalent metal halide film. .

在公开号为CN107437587A、名称为一种在空气中制备钙钛矿太阳能电池钙钛矿活性层的方法的中国专利中,公开了采用两步法制备钙钛矿层活性层时,在碘化铅溶液中加入适量的吡啶类有机小分子作为添加剂,以减小钙钛矿活性层制备时受湿度的影响,实现空气中钙钛矿太阳能电池的制备。这种小分子添加剂无法达到前驱体溶液在成膜过程中的流平作用,无法真正解决在空气环境中二价金属卤化物涂膜造成的孔洞、膜厚不均等缺陷。In the Chinese patent with the publication number CN107437587A and the title of a method for preparing a perovskite solar cell perovskite active layer in air, it is disclosed that when a two-step method is used to prepare the perovskite layer active layer, in a lead iodide solution An appropriate amount of pyridine organic small molecules is added as an additive to reduce the influence of humidity during the preparation of the perovskite active layer, so as to realize the preparation of perovskite solar cells in the air. This small molecule additive cannot achieve the leveling effect of the precursor solution in the film formation process, and cannot really solve the defects such as holes and uneven film thickness caused by the bivalent metal halide coating film in the air environment.

如图1所示,是现有的钙钛矿溶液涂布后的电池各层截面的示意图,其中,11是基底,在导电层11上制备了亲油性的电子/空穴传输层12-2,亲油性的电子/空穴传输层12-2采用如聚[双(4-苯基)(2,4,6-三甲基苯基)胺](PTAA)、聚(3-己基噻吩-2,5-二基) (P3HT)中任意一项原料制成。16是钙钛矿溶液的涂布层。正常涂布情况下,钙钛矿溶液是亲水性,对亲油性的电子/空穴传输层难以浸润,无法铺平电子/空穴传输层表面,钙钛矿溶液涂布后容易产生很多缩口。若在较高的制备温度下,例如:100-180℃,就很容易产生很多的针孔,不仅严重影响钙钛矿电池的质量,而且也降低钙钛矿电池的转换效率。As shown in Figure 1, it is a schematic diagram of the cross-section of each layer of the battery after coating with the existing perovskite solution, wherein, 11 is the substrate, and the lipophilic electron/hole transport layer 12-2 is prepared on the conductive layer 11. , the lipophilic electron/hole transport layer 12-2 adopts poly[bis(4-phenyl)(2,4,6-trimethylphenyl)amine] (PTAA), poly(3-hexylthiophene- 2,5-diyl) (P3HT) from any of the raw materials. 16 is the coating layer of the perovskite solution. Under normal coating conditions, the perovskite solution is hydrophilic, and it is difficult to infiltrate the lipophilic electron/hole transport layer, and the surface of the electron/hole transport layer cannot be flattened. mouth. If the preparation temperature is higher, for example: 100-180 °C, many pinholes are easily generated, which not only seriously affects the quality of perovskite cells, but also reduces the conversion efficiency of perovskite cells.

发明内容SUMMARY OF THE INVENTION

本发明所要解决的技术问题在于,提供一种前驱体与表面活性剂的混合溶液的涂布设备及其方法,提高涂膜的覆盖率和涂膜表面的平整度,得到膜厚分布更加均匀的钙钛矿薄膜。The technical problem to be solved by the present invention is to provide a coating equipment and method for a mixed solution of a precursor and a surfactant, so as to improve the coverage of the coating film and the flatness of the surface of the coating film, and obtain a more uniform film thickness distribution. Perovskite thin films.

本发明是这样实现的,提供一种前驱体与表面活性剂的混合溶液的涂布设备,包括涂布模头、模头升降台、涂布平台、传送装置以及后处理装置,所述涂布模头设置在模头升降台上,所述涂布模头以及后处理装置相互分开且分别设置在涂布平台的上方,放置在涂布平台上的待涂布的基底被涂布模头涂布后被传送装置输送到后处理装置处进行后处理,在所述传送装置的驱动下,所述模头升降台与涂布平台之间产生相对移动,所述模头升降台调节涂布模头与待涂布的基底之间的高度;所述涂布模头通过导管与带有混合腔的注射泵接通,所述注射泵的混合腔通过管路与至少两个原料瓶分别接通,其中至少一个原料瓶中盛装有钙钛矿的二价前驱体溶液,至少另一个原料瓶中盛装有表面活性剂溶液,所述注射泵按设定的体积比分别同时抽吸钙钛矿的二价前驱体溶液和表面活性剂溶液注入到混合腔中混合,混合得到的混合溶液通过导管被输送给涂布模头使用。The present invention is achieved by providing a coating equipment for a mixed solution of a precursor and a surfactant, including a coating die, a die lift, a coating platform, a conveying device and a post-processing device. The die head is arranged on the die head lifting platform, the coating die head and the post-processing device are separated from each other and are respectively arranged above the coating platform, and the substrate to be coated placed on the coating platform is coated by the coating die head. After the cloth is transported by the conveying device to the post-processing device for post-processing, under the driving of the conveying device, the die head lift table and the coating platform move relative to each other, and the die head lift table adjusts the coating die. The height between the head and the substrate to be coated; the coating die head is connected to a syringe pump with a mixing cavity through a conduit, and the mixing cavity of the syringe pump is connected to at least two raw material bottles through pipelines. , wherein at least one raw material bottle is filled with a bivalent precursor solution of perovskite, and at least another raw material bottle is filled with a surfactant solution, and the syringe pump is simultaneously pumping the perovskite according to the set volume ratio. The bivalent precursor solution and the surfactant solution are injected into the mixing chamber for mixing, and the mixed solution obtained by mixing is transported to the coating die for use through the conduit.

本发明是这样实现的,提供一种前驱体与表面活性剂的混合溶液的配制方法,其特征在于,所述前驱体为钙钛矿的二价前驱体溶液,所述二价前驱体溶液包括二价金属卤化物BX2和二价前驱体溶剂,所述配制方法包括:The present invention is achieved by providing a method for preparing a mixed solution of a precursor and a surfactant, wherein the precursor is a bivalent precursor solution of perovskite, and the bivalent precursor solution includes A divalent metal halide BX 2 and a divalent precursor solvent, the preparation method includes:

将二价前驱体溶液注入一个原料瓶中,将表面活性剂溶液注入另一个原料瓶中,两个原料瓶分别通过管路与注射泵连通,注射泵按照设定的体积比同时分别抽吸二价前驱体溶液和表面活性剂溶液注入到混合腔内进行混合,经搅拌后得到前驱体与表面活性剂的混合溶液,其中,The divalent precursor solution is injected into one raw material bottle, and the surfactant solution is injected into the other raw material bottle. The two raw material bottles are respectively connected with the syringe pump through the pipeline, and the syringe pump simultaneously sucks two raw materials according to the set volume ratio. The valence precursor solution and the surfactant solution are injected into the mixing chamber for mixing, and after stirring, a mixed solution of the precursor and the surfactant is obtained, wherein,

所述二价金属卤化物BX2中的B为Pb2+、Sn2+、Ze2+中的至少一种,X为Cl-、Br-、I-中的至少一种,所述二价前驱体溶剂为N,N-二甲基甲酰胺(DMF)、二甲基亚砜(DMSO)、N-甲基吡咯烷酮(NMP)和γ-丁内酯(GBL)中的至少一种;二价前驱体溶液的浓度为0.5-1.5mol/L,表面活性剂与二价前驱体溶液质量比为0.05-5%;B in the divalent metal halide BX 2 is at least one of Pb 2+ , Sn 2+ , and Ze 2+ , X is at least one of Cl - , Br - , and I - , the divalent The precursor solvent is at least one of N,N-dimethylformamide (DMF), dimethylsulfoxide (DMSO), N-methylpyrrolidone (NMP) and γ-butyrolactone (GBL); two The concentration of the valence precursor solution is 0.5-1.5mol/L, and the mass ratio of the surfactant to the bivalent precursor solution is 0.05-5%;

所述表面活性剂溶液与二价前驱体溶液的质量比为5-100%,所述表面活性剂溶液包括活性剂溶质和活性剂溶剂,所述活性剂溶质为非离子型、阳离子型、阴离子型、双性表面活性剂,所述活性剂溶剂为石油醚、四氯化碳、三氯乙烷、苯、二氯甲烷、氯仿、乙酸乙酯、丙酮中的至少一种;The mass ratio of the surfactant solution to the divalent precursor solution is 5-100%, the surfactant solution includes an active agent solute and an active agent solvent, and the active agent solute is non-ionic, cationic, anionic type, amphoteric surfactant, the active agent solvent is at least one of petroleum ether, carbon tetrachloride, trichloroethane, benzene, dichloromethane, chloroform, ethyl acetate, and acetone;

抽吸二价前驱体溶液和表面活性剂溶液的设定的体积比为1-1000;搅拌时的环境设定温度为10-60℃。The set volume ratio of the suctioned divalent precursor solution and the surfactant solution is 1-1000; the set temperature of the environment during stirring is 10-60°C.

本发明是这样实现的,提供一种如前所述的前驱体与表面活性剂的混合溶液的涂布设备的使用方法,其特征在于,包括如下步骤:The present invention is achieved in this way, and provides a method for using a coating device for a mixed solution of a precursor and a surfactant as described above, which is characterized in that it includes the following steps:

第一步,按照如前所述的一种前驱体与表面活性剂的混合溶液的配制方法配制的钙钛矿的二价前驱体溶液和表面活性剂溶液注入不同的原料瓶中,两个原料瓶分别通过管路与注射泵连通,注射泵按照设定的体积比同时分别抽吸二价前驱体溶液和表面活性剂溶液注入到混合腔内进行混合,经搅拌后得到前驱体与表面活性剂的混合溶液;In the first step, the bivalent perovskite precursor solution and the surfactant solution prepared according to the preparation method of a mixed solution of a precursor and a surfactant as described above are injected into different raw material bottles. The bottles are respectively connected with the syringe pump through the pipeline. The syringe pump simultaneously sucks the bivalent precursor solution and the surfactant solution according to the set volume ratio and injects them into the mixing chamber for mixing. After stirring, the precursor and the surfactant are obtained. mixed solution;

第二步,将待涂布的基底放置在涂布平台上,开启注射泵和传送装置,混合溶液通过导管被输送至涂布模头处,在所述传送装置的驱动下,所述模头升降台与涂布平台之间产生相对移动,通过模头升降台调节涂布模头与待涂布的基底之间的高度,涂布模头对放置在涂布平台上的待涂布的基底表面进行涂布,基底表面涂覆后得到含有混合溶液的湿膜;In the second step, the substrate to be coated is placed on the coating platform, the syringe pump and the conveying device are turned on, and the mixed solution is transported to the coating die head through the conduit, and driven by the conveying device, the die head There is relative movement between the lifting platform and the coating platform, and the height between the coating die and the substrate to be coated is adjusted through the die lifting platform, and the coating die head is placed on the coating platform. The surface is coated, and the wet film containing the mixed solution is obtained after the substrate surface is coated;

第三步,开启后处理装置,涂覆后的基底被传送装置输送到后处理装置处进行后处理,从而在基底表面制备出一层含有二价前驱体的薄膜层。In the third step, the post-processing device is turned on, and the coated substrate is transported by the conveying device to the post-processing device for post-processing, thereby preparing a thin film layer containing a divalent precursor on the surface of the substrate.

本发明是这样实现的,提供一种钙钛矿太阳能电池的制备方法,其特征在于,在制备该钙钛矿太阳能电池的过程中使用如前所述的前驱体与表面活性剂的混合溶液的涂布设备,包括如下步骤:The present invention is achieved in this way, and provides a method for preparing a perovskite solar cell, characterized in that, in the process of preparing the perovskite solar cell, a mixed solution of the aforementioned precursor and a surfactant is used to prepare the perovskite solar cell. Coating equipment, including the following steps:

S1、按照如前所述的一种前驱体与表面活性剂的混合溶液的配制方法配制的钙钛矿的二价前驱体溶液与表面活性剂溶液倒入不同的原料瓶中,两个原料瓶分别通过管路与注射泵连通,注射泵按照设定的体积比同时分别抽吸钙二价前驱体溶液和表面活性剂溶液注入到混合腔内进行混合,经搅拌后得到前驱体与表面活性剂的混合溶液;S1. Pour the perovskite bivalent precursor solution and the surfactant solution prepared according to the preparation method of a mixed solution of a precursor and a surfactant as described above into different raw material bottles, and the two raw material bottles They are respectively connected with the syringe pump through the pipeline. The syringe pump simultaneously sucks the calcium divalent precursor solution and the surfactant solution respectively according to the set volume ratio and injects it into the mixing chamber for mixing. After stirring, the precursor and the surfactant are obtained. mixed solution;

S2、将在表面已经制备了导电层和电子/空穴传输层的基底放置在涂布平台上,开启注射泵和传送装置,混合溶液通过导管被输送至涂布模头处,在所述传送装置的驱动下,所述模头升降台与涂布平台之间产生相对移动,通过模头升降台调节涂布模头与待涂布的基底之间的高度,涂布模头对放置在涂布平台上的待涂布的基底表面进行涂布,基底表面涂覆后得到含有混合溶液的湿膜;S2. Place the substrate on which the conductive layer and the electron/hole transport layer have been prepared on the coating platform, turn on the syringe pump and the transfer device, and the mixed solution is transported to the coating die through the conduit, where the transfer Driven by the device, the die head lift table and the coating platform move relative to each other, and the height between the coating die head and the substrate to be coated is adjusted through the die head lift table. The substrate surface to be coated on the cloth platform is coated, and the wet film containing the mixed solution is obtained after the substrate surface is coated;

S3、开启后处理装置,涂覆后的基底被传送装置输送到后处理装置处进行后处理,从而在基底表面的电子/空穴传输层上面再制备出一层含有二价前驱体的薄膜层;S3. Turn on the post-processing device, and the coated substrate is transported by the conveying device to the post-processing device for post-processing, so that a thin film layer containing a divalent precursor is prepared on the electron/hole transport layer on the surface of the substrate. ;

S4、在基底的含有二价前驱体的薄膜层表面继续制备钙钛矿的一价前驱体薄膜层、空穴/电子传输层和背电极层,直至完成钙钛矿太阳能电池的制备。S4, continue to prepare the monovalent precursor thin film layer of perovskite, the hole/electron transport layer and the back electrode layer on the surface of the thin film layer containing the divalent precursor of the substrate, until the preparation of the perovskite solar cell is completed.

本发明是这样实现的,提供一种钙钛矿太阳能电池,包括钙钛矿薄膜层,所述钙钛矿薄膜层采用如前所述的前驱体与表面活性剂的混合溶液的涂布设备来制备的,或者采用如前所述的前驱体与表面活性剂的混合溶液的涂布设备的使用方法来制备的,或者采用如前所述的钙钛矿太阳能电池的制备方法来制备的。The present invention is achieved by providing a perovskite solar cell, comprising a perovskite thin film layer, and the perovskite thin film layer is formed by the coating equipment of the mixed solution of the precursor and the surfactant as described above. prepared, or prepared by using the method for using the coating equipment of the mixed solution of the precursor and the surfactant as mentioned above, or prepared by using the method for preparing the perovskite solar cell as mentioned above.

与现有技术相比,本发明的前驱体与表面活性剂的混合溶液的涂布设备及其方法,将表面活性剂加入二价金属卤化物前驱体溶液后,提高了二价金属卤化物薄膜膜厚均匀度和减少了孔洞缺陷。采用混合腔的方法,根据基底的亲水性的差异有效调节表面活性剂在钙钛矿前驱体内的含量,调节二价金属卤化物前驱体的成膜形貌,并降低表面活性剂的引入对钙钛矿太阳能电池的效率的降低等影响。在狭缝式涂布钙钛矿的二价前驱体溶液中添加表面活性剂溶液,有利于减少二价前驱体溶液与基底的传输层表面浸润不好造成的缩孔、溶液挥发过快造成的针孔、涂布溶液分布不均造成的薄膜厚度严重不均等缺陷;提高涂膜的覆盖率和涂膜表面的平整度,得到膜厚分布更加均匀的钙钛矿薄膜层,从而提高钙钛矿太阳能电池的效率。本发明的涂布设备及其方法不仅应用于钙钛矿太阳能电池技术领域,还广泛地应用于有机太阳能电池、染料敏化太阳能电池和量子点太阳能电池技术领域。Compared with the prior art, the coating equipment and method of the mixed solution of the precursor and the surfactant of the present invention, after adding the surfactant to the bivalent metal halide precursor solution, improves the divalent metal halide film. Film thickness uniformity and reduced void defects. The mixed cavity method is used to effectively adjust the content of surfactants in the perovskite precursor according to the difference in the hydrophilicity of the substrate, adjust the film-forming morphology of the bivalent metal halide precursor, and reduce the introduction of surfactants. Efficiency reduction of perovskite solar cells, etc. Adding a surfactant solution to the bivalent precursor solution of slit-coated perovskite is beneficial to reduce shrinkage cavities caused by poor infiltration between the bivalent precursor solution and the surface of the transport layer of the substrate, and excessive volatilization of the solution. Pinholes and uneven distribution of the coating solution cause serious uneven film thickness defects; improve the coverage of the coating film and the flatness of the coating surface, and obtain a perovskite film layer with a more uniform film thickness distribution, thereby improving the perovskite film. Efficiency of solar cells. The coating equipment and the method of the present invention are not only applied to the technical field of perovskite solar cells, but also widely used in the technical fields of organic solar cells, dye-sensitized solar cells and quantum dot solar cells.

附图说明Description of drawings

图1为现有技术的钙钛矿薄膜层涂布后的截面示意图;1 is a schematic cross-sectional view of a perovskite thin film layer in the prior art after coating;

图2为常用的钙钛矿太阳能电池的截面结构示意图;Figure 2 is a schematic diagram of the cross-sectional structure of a commonly used perovskite solar cell;

图3为本发明的前驱体与表面活性剂的混合溶液的涂布设备的一较佳实施例的立体示意图;3 is a schematic perspective view of a preferred embodiment of the coating equipment for the mixed solution of the precursor and the surfactant of the present invention;

图4为图3中混合腔立体示意图;Fig. 4 is a three-dimensional schematic diagram of the mixing chamber in Fig. 3;

图5为采用现有技术方法制备钙钛矿薄膜层的形貌示意图;5 is a schematic diagram of the morphology of the perovskite thin film layer prepared by the prior art method;

图6为前驱体与表面活性剂的混合溶液制成的钙钛矿薄膜层涂布后的截面示意图;6 is a schematic cross-sectional view of a perovskite thin film layer made from a mixed solution of a precursor and a surfactant after coating;

图7为采用本发明的前驱体与表面活性剂的混合溶液的涂布设备制备钙钛矿薄膜层的第一实施例的形貌示意图;7 is a schematic diagram of the morphology of the first embodiment of preparing the perovskite thin film layer by using the coating equipment of the mixed solution of the precursor and the surfactant of the present invention;

图8为本发明的实施例一和实施例二制成钙钛矿太阳能电池后的效率对比示意图。FIG. 8 is a schematic diagram illustrating the comparison of the efficiencies of the perovskite solar cells produced in the first embodiment and the second embodiment of the present invention.

具体实施方式Detailed ways

为了使本发明所要解决的技术问题、技术方案及有益效果更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention.

请参照图2所示,是常用的钙钛矿太阳能电池的截面结构示意图。在基底上依次制备了导电层11、电子/空穴传输层12、钙钛矿薄膜层13、空穴/电子传输层14、背电极层15,其中最关键的是钙钛矿薄膜层13的制备。Please refer to FIG. 2 , which is a schematic diagram of a cross-sectional structure of a commonly used perovskite solar cell. A conductive layer 11 , an electron/hole transport layer 12 , a perovskite thin film layer 13 , a hole/electron transport layer 14 , and a back electrode layer 15 are prepared in sequence on the substrate, of which the most critical is the perovskite thin film layer 13 preparation.

本发明首先公开一种制备钙钛矿薄膜层13的涂布设备,该涂布设备用于在电子/空穴传输层12上涂布含有表面活性剂的二价前驱体溶液以制成钙钛矿薄膜层13。The present invention first discloses a coating device for preparing the perovskite thin film layer 13, the coating device is used for coating the bivalent precursor solution containing surfactant on the electron/hole transport layer 12 to prepare perovskite Mineral film layer 13 .

请同时参照图3和图4所示,本发明的前驱体与表面活性剂的混合溶液的涂布设备的较佳实施例,包括涂布模头101、模头升降台102、涂布平台106、传送装置107以及后处理装置105。Please refer to FIG. 3 and FIG. 4 at the same time, the preferred embodiment of the coating equipment for the mixed solution of the precursor and the surfactant of the present invention includes a coating die 101 , a die lifting platform 102 , and a coating platform 106 , a transfer device 107 and a post-processing device 105 .

所述涂布模头101设置在模头升降台102上,待涂布的基底108放置在涂布平台106上。所述涂布模头101以及后处理装置105相互分开且分别设置在涂布平台106的上方。所述模头升降台102设置在涂布平台106两侧。待涂布的基底108被涂布模头101涂布后被传送装置107输送到后处理装置105处进行后处理。The coating die head 101 is arranged on the die head lifting platform 102 , and the substrate 108 to be coated is placed on the coating platform 106 . The coating die 101 and the post-processing device 105 are separated from each other and are respectively disposed above the coating platform 106 . The die lifting platform 102 is disposed on both sides of the coating platform 106 . The substrate 108 to be coated is coated by the coating die 101 and then transported by the conveying device 107 to the post-processing device 105 for post-processing.

在所述传送装置107的驱动下,所述模头升降台102与涂布平台106之间产生相对移动,便于涂布模头101对放置在涂布平台106上的待涂布的基底108表面进行涂布。所述模头升降台102调节涂布模头101与待涂布的基底108之间的高度。所述涂布模头101通过导管103与带有混合腔111的注射泵104接通,所述注射泵104的混合腔111通过管路112和115与至少两个原料瓶分别接通,其中至少一个原料瓶109中盛装有钙钛矿的二价前驱体溶液,至少另一个原料瓶110中盛装有表面活性剂溶液。所述注射泵104按设定的体积比1~1000分别同时抽吸钙钛矿的二价前驱体溶液和表面活性剂溶液注入到注射泵104的混合腔111中混合,混合后的混合溶液通过导管103被输送给涂布模头101使用。Driven by the conveying device 107 , the die head lift table 102 and the coating platform 106 move relative to each other, so that the coating die head 101 can apply the coating die 101 to the surface of the substrate to be coated 108 placed on the coating platform 106 . Coating is performed. The die lift table 102 adjusts the height between the coating die 101 and the substrate 108 to be coated. The coating die 101 is connected to the syringe pump 104 with the mixing chamber 111 through the conduit 103, and the mixing chamber 111 of the syringe pump 104 is respectively connected to at least two raw material bottles through the pipelines 112 and 115, wherein at least One raw material bottle 109 contains a bivalent precursor solution of perovskite, and at least another raw material bottle 110 contains a surfactant solution. The syringe pump 104 simultaneously sucks the perovskite bivalent precursor solution and the surfactant solution according to the set volume ratio of 1 to 1000 and injects them into the mixing chamber 111 of the syringe pump 104 for mixing, and the mixed mixed solution passes through The conduit 103 is fed to the coating die 101 for use.

所述模头升降台102、涂布平台106与传送装置107之间有两种装配联接关系。第一种装配联接关系是:所述传送装置107带动涂布平台106移动,所述涂布模头101和模头升降台102保持静止,所述模头升降台102与涂布平台106之间产生相对移动。第二种装配联接关系是:所述传送装置107带动涂布模头101和模头升降台102的移动,所述涂布平台106保持静止,所述模头升降台102与涂布平台106之间产生相对移动。There are two kinds of assembling and connecting relationships between the die head lifting platform 102 , the coating platform 106 and the conveying device 107 . The first assembly connection relationship is: the conveying device 107 drives the coating platform 106 to move, the coating die 101 and the die lifting platform 102 remain stationary, and the die lifting platform 102 and the coating platform 106 remain stationary. produce relative movement. The second assembly connection relationship is: the conveying device 107 drives the movement of the coating die head 101 and the die head lifting platform 102 , the coating platform 106 remains stationary, and the die lifting platform 102 and the coating platform 106 are connected. relative movement between them.

在所述模头升降台102上还设置有在涂布模头101涂布结束后的0-60s时间内对基底108表面刚被涂覆的湿膜进行成膜处理的成膜装置(图中未示出)。所述成膜装置包括加热器以及吹风机或抽风机,或者加热器以及真空泵。The die head lift table 102 is also provided with a film forming device that performs film forming treatment on the wet film just coated on the surface of the substrate 108 within 0-60 s after the coating of the coating die 101 is completed (Fig. not shown). The film-forming device includes a heater and a blower or a blower, or a heater and a vacuum pump.

具体地,所述后处理装置包括加热器、真空泵以及便于开启和闭合的密闭腔。Specifically, the post-processing device includes a heater, a vacuum pump, and a closed chamber that is convenient to open and close.

具体地,在所述混合腔111内还设置有搅拌装置或超声震荡装置。请参考图4所示,所述混合腔111分别与装有钙钛矿溶液的原料瓶109和装有表面活性剂溶液的原料瓶110分别通过管路112和115连通,注射泵104按体积比1~1000分别抽取钙钛矿溶液和表面活性剂溶液注入混合腔111中。通过搅拌装置113将混合腔111内的溶液114混合均匀。混合溶液114很快地通过导管103输送到模头101进行涂布。Specifically, a stirring device or an ultrasonic vibration device is further provided in the mixing chamber 111 . Please refer to FIG. 4 , the mixing chamber 111 is connected with the raw material bottle 109 containing the perovskite solution and the raw material bottle 110 containing the surfactant solution through pipelines 112 and 115 respectively, and the syringe pump 104 is in a volume ratio of 1 ∼1000 pumped the perovskite solution and the surfactant solution and injected them into the mixing chamber 111, respectively. The solution 114 in the mixing chamber 111 is uniformly mixed by the stirring device 113 . The mixed solution 114 is quickly delivered to the die 101 through the conduit 103 for coating.

在二价前驱体溶液与一定量的表面活性剂溶液混合后,改善涂布时电子/空穴传输层表面的亲水性、调整钙钛矿溶液成膜后与空气接触表面的平整度和调节二价前驱体溶液中的溶剂的挥发速度,从而降低涂布时造成的缩孔、针孔和膜厚不均等缺陷。制备成完整的太阳能电池后,还可以钝化钙钛矿层与传输层间的界面缺陷和钙钛矿层内部缺陷,有效提升钙钛矿太阳能电池的载流子传输性能,并抑制电子-空穴载流子对的复合,从而提高钙钛矿太阳能电池的效率。After the divalent precursor solution is mixed with a certain amount of surfactant solution, the hydrophilicity of the surface of the electron/hole transport layer during coating is improved, and the flatness and adjustment of the surface in contact with the air after the film formation of the perovskite solution is adjusted. The volatilization speed of the solvent in the bivalent precursor solution, thereby reducing defects such as shrinkage craters, pinholes, and uneven film thickness during coating. After the complete solar cell is prepared, the interface defects between the perovskite layer and the transport layer and the internal defects of the perovskite layer can also be passivated, which can effectively improve the carrier transport performance of the perovskite solar cell and suppress the electron-hole carrier. The recombination of charge pairs, thereby increasing the efficiency of perovskite solar cells.

另一方面,在二价前驱体溶液与一定量的表面活性剂溶液混合后快速地进行涂布使用,该种工艺的特点在于,大部分的表面活性剂无法完全溶解于二价前驱体溶液中,可以确保大部分表面活性剂可以快速分散到二价前驱体溶液中,避免出现直接将表面活性剂加入二价前驱体溶液后因长时间放置而出现表面活性剂与二价前驱体溶液因不相容而分层的现象。另外,该种工艺方法还具有适配可用于钙钛矿成膜的表面活性剂种类广、钙钛矿制备成膜后的均匀性有很大提升、钙钛矿薄膜的缺陷更少、二价前驱体溶液可以储存更长时间等特点。On the other hand, after the bivalent precursor solution is mixed with a certain amount of surfactant solution, it is quickly coated and used. The characteristic of this process is that most of the surfactant cannot be completely dissolved in the bivalent precursor solution. , which can ensure that most of the surfactants can be quickly dispersed into the bivalent precursor solution, and avoid the occurrence of inconsistency between the surfactant and the bivalent precursor solution due to the long-term placement of the surfactant directly into the bivalent precursor solution. Compatible and layered phenomenon. In addition, this process method also has the advantages of wide variety of surfactants suitable for perovskite film formation, greatly improved uniformity after perovskite film formation, fewer defects in perovskite films, and divalent perovskite films. Precursor solutions can be stored for longer periods of time.

在二价前驱体溶液中添加表面活性剂溶液后得到的混合溶液,利用本发明的涂布设备进行狭缝式涂布过程中,表面活性剂起到对二价前驱体溶液的流平作用,减少形成的钙钛矿薄膜的膜厚不均匀、孔洞缺陷,提高制成的钙钛矿太阳能电池的效率。与现有技术相比,本发明并涉及表面活性剂在钙钛矿溶液中起到乳化、增溶和助悬的功能。In the mixed solution obtained by adding the surfactant solution to the bivalent precursor solution, during the slit coating process using the coating equipment of the present invention, the surfactant plays a leveling effect on the bivalent precursor solution, The non-uniform film thickness and hole defects of the formed perovskite thin film are reduced, and the efficiency of the formed perovskite solar cell is improved. Compared with the prior art, the present invention also relates to the functions of surfactants in emulsifying, solubilizing and suspending in perovskite solutions.

本发明还公开一种前驱体与表面活性剂的混合溶液的配制方法,所述前驱体为钙钛矿的二价前驱体溶液,所述二价前驱体溶液包括二价金属卤化物BX2和二价前驱体溶剂,所述配制方法是:The invention also discloses a preparation method of a mixed solution of a precursor and a surfactant, the precursor is a bivalent precursor solution of perovskite, and the bivalent precursor solution includes a bivalent metal halide BX 2 and Divalent precursor solvent, the preparation method is:

将浓度为0.5-1.5mol/L的钙钛矿的二价前驱体溶液倒入一个原料瓶109中,将与二价前驱体溶液质量比为0.05-5%的表面活性剂溶液倒入另一个原料瓶110中,两个原料瓶分别通过管路112和115与注射泵104连通,注射泵104按照设定的体积比1~1000同时分别抽吸二价前驱体溶液和表面活性剂溶液注入到混合腔111内进行混合,经搅拌后得到前驱体与表面活性剂的混合溶液,其中,Pour the bivalent precursor solution of perovskite with a concentration of 0.5-1.5mol/L into a raw material bottle 109, and pour the surfactant solution with a mass ratio of 0.05-5% to the bivalent precursor solution into another. In the raw material bottle 110, the two raw material bottles are respectively connected with the syringe pump 104 through the pipelines 112 and 115. The syringe pump 104 simultaneously sucks the divalent precursor solution and the surfactant solution according to the set volume ratio of 1 to 1000 and injects it into the syringe pump 104. Mixing is carried out in the mixing chamber 111, and after stirring, a mixed solution of the precursor and the surfactant is obtained, wherein,

所述二价金属卤化物BX2中的B为Pb2+、Sn2+、Ze2+中的至少一种,X为Cl-、Br-、I-中的至少一种,所述二价前驱体溶剂为N,N-二甲基甲酰胺(DMF)、二甲基亚砜(DMSO)、N-甲基吡咯烷酮(NMP)和γ-丁内酯(GBL)中的至少一种;所述表面活性剂溶液与二价前驱体溶液的质量比为5-100%,所述表面活性剂溶液包括活性剂溶质和活性剂溶剂,所述活性剂溶质为非离子型、阳离子型、阴离子型、双性表面活性剂,所述活性剂溶剂为石油醚、四氯化碳、三氯乙烷、苯、二氯甲烷、氯仿、乙酸乙酯、丙酮中的至少一种;搅拌时的环境设定温度为10-60℃。B in the divalent metal halide BX 2 is at least one of Pb 2+ , Sn 2+ , and Ze 2+ , X is at least one of Cl - , Br - , and I - , the divalent The precursor solvent is at least one of N,N-dimethylformamide (DMF), dimethylsulfoxide (DMSO), N-methylpyrrolidone (NMP) and γ-butyrolactone (GBL); the The mass ratio of the surfactant solution to the divalent precursor solution is 5-100%, the surfactant solution includes an active agent solute and an active agent solvent, and the active agent solute is non-ionic, cationic, and anionic. , amphoteric surfactant, the active agent solvent is at least one of petroleum ether, carbon tetrachloride, trichloroethane, benzene, dichloromethane, chloroform, ethyl acetate, acetone; The fixed temperature is 10-60℃.

其中,所述活性剂溶质为聚乙二醇单油酸酯、二椰子二甲基氯化铵、二甲基二氢化牛脂基氯化铵、二甲基二氢化牛脂基甲硫酸铵、双牛脂季铵盐、聚氧乙烯失水山梨醇单月桂酸酯、聚氧乙烯失水山梨醇单硬脂酸酯、聚氧乙烯失水山梨醇单油酸酯、十六烷基二甲基苄基氯化铵、十六烷基溴化吡啶、十六烷基氯化吡啶、十六烷基三甲基溴化铵、十六烷基三甲基氯化铵、聚甘油脂肪酸酯、聚甘油多聚蓖麻醇酸酯、三甲基大豆油基氯化铵、二烷基二甲基氯化铵、二甲基二氢化牛脂基氯化铵、二甲基二椰子基氯化铵、三甲基牛脂基氯化铵、N-牛脂基五甲基丙烷二氯化二铵、L-α-磷脂酰胆碱、十二烷基硫酸钠、双十二烷基二甲基溴化铵、烷基聚氧乙烯醚、烷基酚聚氧乙烯醚、脂肪酸聚氧乙烯酯、直链醇聚氧乙烯醚、磺基琥珀酸二辛酯钠盐、N-十八烷基磺化琥珀酰胺二钠盐、椰子酰胺丙基甜菜碱、乙氧基化磺基琥珀酸酯二钠盐、烷基乙醇酰胺磺基琥珀酸酯二钠盐、烷基磺化琥珀酸酯二钠盐、脂肪醇 硫酸酯铵盐、烷基酚聚氧乙烯醚硫酸酯钠盐和铵盐、壬基酚聚氧乙烯醚、脂肪酸聚氧乙烯酯、聚氧乙烯失水山梨醇单油酸酯、聚氧乙烯醚磷酸酯、异辛基酚聚氧乙烯醚、壬基酚聚氧乙烯醚、脂肪醇聚氧乙烯醚、聚氧乙烯脂肪酰胺、脂肪醇磷酸酯、失水山梨醇单硬脂酸酯、失水山梨醇单油酸酯、十四烷基二甲基氧化铵、十六烷基二甲基氧化铵、十八烷基二甲基氧化铵、C8~18烷基二甲基氧化铵、十六烷基三甲基氯化铵、十八烷基三甲基氯化铵、十八烷基二甲基苄基氯化铵、二椰子基二甲基氯化铵、聚乙二醇山梨醇月桂酸酯、聚氧乙烯山梨醇油酸酯、聚氧乙烯山梨醇妥儿油四酯、聚氧乙烯蓖麻油、聚氧乙烯丙二醇单硬脂酸酯、聚氧乙烯山梨醇酯、聚氧乙烯山梨醇四油酸酯、聚氧乙烯山梨醇六油酸酯、硬脂酸聚氧乙烯酯、烷基酚聚氧乙烯醚、脂肪醇聚氧乙烯醚、聚氧乙烯脂肪胺、椰子油脂环氧乙烷加成物、聚氧乙烯蓖麻油、烷基酚聚氧乙烯醚、脂肪醇聚氧乙烯醚、烷基酚聚氧乙烯醚、烷芳基聚氧乙烯醚、烷基聚氧乙烯醚、烷基酚聚氧乙烯醚、脂肪醇聚氧乙烯醚、硬脂醇聚氧乙烯醚、脂肪酸聚氧乙烯酯、聚氧乙烯脂肪胺、聚氧乙烯脂肪胺、2-溴-2-硝基丙烷-1,3-二醇、烷基二甲基乙苄基氯化铵、N-烷基二甲基苄基氯化铵、N-十四烷基二甲基苄基氯化铵、N-烷基二甲基-1-萘甲基氯化铵、椰子脂肪酸二乙醇酰胺、烷芳基磺酸钠、直链烷基苯磺酸钠、丙二醇单脂肪酸酯、羧基聚甲烯化合物、直链醇聚氧乙烯醚、月桂醇聚氧乙烯醚硫酸酯铵盐、月桂醇聚氧乙烯醚硫酸酯钠盐、壬基酚聚氧乙烯醚、十二烷醇聚氧乙烯醚、N,N-二甲基羟乙基十八酰氨基硝酸季铵盐、N,N-二甲基羟乙基十八酰氨基磷酸季铵盐、聚醚、葡萄糖基氨基丙基二甲基-2-羟乙基氯化铵、2-羟乙基氯化铵、十六烷基三甲基溴化铵、十六烷基二甲基苄基氯化铵、烷基三甲基溴化铵、脂肪醇聚氧乙烯醚、丙二醇与合脂酸、聚乙二醇硬脂酸酯、聚氧乙烯蓖麻油、壬基酚聚氧乙烯醚、硬脂酸聚氧乙烯酯、壬基酚聚氧乙烯醚、脂肪醇聚氧乙烯醚、烷基萘磺酸钠、烷基萘磺酸钾、烷芳基磺酸单钙盐、十三甲基硅氧基硅酸酯、壬基酚聚氧乙烯醚、C10~13脂肪醇聚氧乙烯醚、烷基酚聚氧乙烯醚、脂肪醇聚氧乙烯醚、烷基苯磺酸钠、聚氧乙烯烷基胺、椰子脂肪酸聚氧乙烯酯、丙二醇聚氧丙烯聚氧乙烯醚、烷基酚醛树脂聚醚、蔗糖脂肪酸酯、壬基酚聚氧乙烯醚、十二烷基二苯醚二磺酸钠、正癸基二苯醚二磺酸钠、4-十二烷基-2,3-氧代-双苯磺酸二钠、环氧丙烷环氧乙烷嵌段共聚物、烷基苯磺酸钠、椰子基-1,3-丙二胺二乙酸盐、N-牛脂基-1,3-丙二胺二乙酸盐、N-椰子基-1,3-丙二胺、N-牛脂基-1,3-丙二胺、月桂基硫酸二乙醇胺、烷基聚乙二醇醚、脂肪酸烷基酰胺磺基琥珀酸单酯钠、脂肪醇聚氧乙烯醚磺基琥珀酸单酯钠、聚氧乙烯脂肪酸烷醇酰胺磺基琥珀酸单酯钠、脂肪醇磷酸酯、烷基聚氧乙烯醚磷酸酯钠盐、烷芳基聚氧乙烯醚、烷基磷酸酯钠盐、磺基琥珀酸二钠盐、磺基琥珀酸二烷基醇酰胺、烷芳基磺酸盐、烷基二甲基甜菜碱、烷基氧化叔胺、油酸聚氧乙烯酯、脂肪酸聚乙二醇酯、烷基聚乙二醇醚、聚氧乙烯脂肪胺、脂肪醇聚氧乙烯醚、烷基酚聚氧乙烯醚、烷基酚聚氧乙烯醚、十三烷氧基聚氧乙烯乙醇、、脂肪醇聚氧乙烯醚、油酸聚氧乙烯酯、、脂肪醇聚氧乙烯醚、硬脂酸聚氧乙烯酯、聚氧乙烯蓖麻油、α-烯基磺酸盐、聚氧乙烯椰子油酰胺、聚氧乙烯油酰胺、壬基酚聚氧乙烯醚、丙二醇聚氧丙烯聚氧乙烯醚、聚氧乙烯脂肪胺、改性的烷基酚聚氧乙烯醚、壬基酚聚乙二醚醚、脂肪醇聚乙二醇醚、十八烷基氯化吡啶、十六烷基溴化吡啶、十四烷基溴化吡啶、鲸蜡基三甲基溴化铵、丙二醇单蓖麻醇酸酯、甘油单蓖麻醇酸酯、乙二醇单蓖麻醇酸酯、全氟烷基磺酸铵、全氟烷基磺酸钾、氟代烷基羧酸钾、氟代烷基季铵磺人物、全氟烷基羧酸铵、氟代烷基聚氧乙烯醚、氟代烷基烷氧基化物、全氟烷基聚氧乙烯聚氧丙烯醚、聚氧乙烯山梨醇六油酸酯、聚氧乙烯甘油脂肪酸酯、聚氧乙烯聚氧丙烯单硬脂酸酯、聚氧乙烯椰子脂肪胺、烷基二甲基氯化铵、烷基聚乙二醇醚硫酸酯钠盐、丙二醇聚氧乙烯聚氧丙烯醚、咪唑烷基脲、聚氧乙烯甲基葡萄糖甙倍半硬脂酸酯、脂肪醇磷酸酯、混合有机磷酸酯、α-烯烃磺酸钠,仲链烷磺酸钠、脂肪醇聚氧乙烯醚、聚氧乙烯二异丁基苯氧基乙基二甲基苄基氯化铵、直链脂肪醇聚氧乙烯醚、烷基酚聚氧乙烯醚、辛基酚聚氧乙烯醚、壬基酚聚氧乙烯醚、二壬基酚聚氧乙烯醚、十二烷基酚聚氧乙烯醚、油酰氧乙磺酸钠、N-棕榈酰基-N-环己基牛磺酸钠、N-甲基-N-油酰基磺酸钠、脂肪醇聚氧乙烯醚、3-三氟甲基-4,4'-二氯-N,N-二苯脲、聚丙二醇,聚乙二醇、N-烷基三甲基氯化铵、聚乙二醇脂肪酸酯、有机硅酮、聚氧乙烯脂肪胺、脂肪酸聚乙二醇酯、烷基酚聚乙二醇醚、椰酰基烷基甜菜碱、椰子酰基水解动物蛋白质钾盐、丙二醇脂肪酸酯及其钾盐、聚氧乙烯蓖麻油、壬基酚聚氧乙烯醚、油醇聚氧乙烯醚、硬脂酸聚氧乙烯酯、聚氧乙烯妥尔油、油酰氨基苯磺酸钠、壬基酚聚氧乙烯醚、脂肪醇聚氧乙烯醚、十二烷醇聚氧乙烯醚、脂肪醇聚氧乙烯醚、皂角甙、烷基苯磺酸烷醇胺盐、烷烷基酚聚氧乙烯醚硫酸酯钠盐、阳离子型改性聚氧乙烯脂肪酸酯、羧甲基纤维素、聚乙二醇硬脂酸酯、壬基酚聚氧乙烯醚、烷基醇聚氧乙烯醚、聚季碱化乙烯醇、单羧化的椰子基咪唑啉衍生物、脂肪醇聚氧乙烯醚、脂肪酸聚氧乙烯酯、脂肪醇聚氧乙烯醚、烷基酚聚氧乙烯醚、烷基苯磺酸钠和脂肪酸聚乙二醇酯的混合物、烷基酚醛树脂聚醚、烷基酚醛树脂聚醚、烷基萘磺酸钠、烷基萘磺酸钠、仲醇聚氧乙烯醚、C13~15仲醇聚氧乙烯醚、仲醇聚氧乙烯醚硫酸酯盐、失水山梨醇硬脂酸酯、聚氧乙烯失水山梨醇硬脂酸酯、壬基酚聚氧乙烯醚、十六烷醇聚氧乙烯醚、C8脂肪醇聚氧乙烯醚硫酸酯钠盐、环氧丙烷环氧乙烷嵌段共聚物、环氧丙烷环氧乙烷嵌段共聚物、鲸蜡醇聚氧乙烯醚、月桂醇聚氧乙烯醚、油醇聚聚氧乙烯醚、脂肪醇聚氧乙烯醚二磷酸酯、壬基酚聚氧乙烯醚、辛基酚聚氧乙烯醚、蔗糖单月桂酸酯、蔗糖单油酸酯、蔗糖单棕榈酸酯、蔗糖二硬脂酸酯、蔗糖单、二硬脂酸酯、聚乙二醇二硬脂酸酯、壬基酚聚氧乙烯醚、脂肪醇聚氧乙烯醚、油醇/鲸蜡醇聚氧乙烯醚、壬基酚聚氧乙烯醚、油醇聚氧乙烯醚、油酸聚氧乙烯酯、油醇聚氧乙烯醚、二十烷酸聚氧乙烯酯、4-叔丁基-4'-甲氧基二苯甲酰甲烷、2-乙基己基对甲氧基月桂酸酯、脂肪醇聚氧乙烯醚、烷基甲基聚氧乙烯醚季铵盐、二甲基聚硅氧烷聚醚、尼泊金甲酯、尼泊金丙酯和乙醇单苯醚烷基磷酸酯钾、烷基磷酸酯钾、丙二醇聚氧乙烯聚氧丙烯醚、丙二醇聚氧丙烯聚氧乙烯醚、丙二醇聚氧丙烯聚氧乙烯醚、乙二胺聚氧丙烯聚氧氧乙烯醚、硬脂醇聚氧乙烯醚与硬脂醇的复配物、甘油聚氧丙烯氧乙烯醚、乙氧基化纤维素的季氨基醚、聚氧乙烯失水山梨醇脂肪酸酯、C16~20脂肪酸聚氧乙烯酯、脂肪醇聚氧乙烯醚、烷基酚聚氧乙烯醚、乙二胺聚氧乙烯聚氧丙烯醚、石油磺酸盐、季铵化的汕咪唑啉、硬脂酰乳酸钠、壬基酚聚乙烯醚、月桂醇聚氧乙烯醚硫酸酯钠盐、羊毛脂类甾醇的衍生物、十二烷基苯磺酸钠、二聚酸二异丙酯、烷基氧化胺、烷基二乙醇酰胺、聚氧乙烯型非离子表面活性剂、丙二醇环氧丙烷环氧乙烷嵌段共聚物、烷基酚醛树脂聚醚、二甲基硅氧烷、壬基酚聚氧乙烯醚、辛基酚聚氧乙烯醚、鲸蜡醇聚氧乙烯醚、月桂醇硬酸三乙醇胺、月桂醇聚氧乙烯醚硫酸酯钠盐、聚氧乙烯合成脂肪酸单乙醇酰胺、伯醇聚氧乙烯醚、烷基聚氧乙烯醚、脂肪醇聚乙烯醚混合物、季铵盐、二甲基二硬脂酰氯化胺、聚氧乙烯脂肪酰胺、硬脂酸聚氧乙烯酯、中性卵磷脂、失水山梨醇单月桂酸酯、失水山梨醇单棕酸酯、失水山梨醇单硬脂酸酯、失水山梨醇三硬脂酸酯、失水山梨醇单油酯、失水山梨醇三油酸酯、椰子酸二乙醇酰胺、月桂酸二乙醇酰胺、咪唑淋衍生物、脂肪酸聚氧乙烯醚、壬基酚聚氧乙烯醚、十二烷基苯磺酸钠、烷基苯磺酸盐、仲烷基硫酸钠、壬基酚聚氧乙烯醚、乙二胺聚氧丙烯聚氧乙烯醚、十三烷醇聚氧乙烯醚硫酸酯钠盐、月桂醇二乙醇酰胺、烷基酚聚氧乙烯醚、脂肪醇聚氧丙烯聚氧乙烯醚、脂肪醇聚氧丙烯聚氧乙烯醚琥珀酸酯中至少一种。Wherein, the active agent solute is polyethylene glycol monooleate, dicoconut dimethyl ammonium chloride, dimethyl dihydrogenated tallow ammonium chloride, dimethyl dihydrogenated tallow ammonium methosulfate, double tallow Quaternary ammonium salt, polyoxyethylene sorbitan monolaurate, polyoxyethylene sorbitan monostearate, polyoxyethylene sorbitan monooleate, cetyldimethylbenzyl Ammonium chloride, cetylpyridinium bromide, cetylpyridinium chloride, cetyltrimethylammonium bromide, cetyltrimethylammonium chloride, polyglycerol fatty acid ester, polyglycerol Polyricinoleate, Trimethyl Soybean Oil Ammonium Chloride, Dialkyl Dimethyl Ammonium Chloride, Dimethyl Dihydrogenated Tallow Ammonium Chloride, Dimethyl Dicocoammonium Chloride, Trimethyl Ammonium Chloride Methyl tallow ammonium chloride, N-tallow pentamethyl propane diammonium dichloride, L-α-phosphatidyl choline, sodium lauryl sulfate, diddecyl dimethyl ammonium bromide, Alkyl polyoxyethylene ether, alkylphenol polyoxyethylene ether, fatty acid polyoxyethylene ester, linear alcohol polyoxyethylene ether, dioctyl sulfosuccinate sodium salt, N-octadecyl sulfosuccinamide bis Sodium Salt, Cocamidopropyl Betaine, Ethoxylated Sulfosuccinate Disodium Salt, Alkylethanolamide Sulfosuccinate Disodium Salt, Alkyl Sulfosuccinate Disodium Salt, Fatty Alcohol Sulfuric Acid Ester ammonium salt, alkylphenol polyoxyethylene ether sulfate sodium and ammonium salt, nonylphenol polyoxyethylene ether, fatty acid polyoxyethylene ester, polyoxyethylene sorbitan monooleate, polyoxyethylene ether phosphoric acid Esters, isooctylphenol polyoxyethylene ether, nonylphenol polyoxyethylene ether, fatty alcohol polyoxyethylene ether, polyoxyethylene fatty amide, fatty alcohol phosphate, sorbitan monostearate, sorbitan Alcohol monooleate, tetradecyl dimethyl ammonium oxide, hexadecyl dimethyl ammonium oxide, octadecyl dimethyl ammonium oxide, C8-18 alkyl dimethyl ammonium oxide, hexadecane trimethyl ammonium chloride, octadecyl trimethyl ammonium chloride, octadecyl dimethyl benzyl ammonium chloride, dicocoyl dimethyl ammonium chloride, polyethylene glycol sorbitol lauric acid Esters, Polyoxyethylene Sorbitan Oleate, Polyoxyethylene Sorbitan Tetraester, Polyoxyethylene Castor Oil, Polyoxyethylene Propylene Glycol Monostearate, Polyoxyethylene Sorbitol, Polyoxyethylene Sorbitol Tetraoleate, polyoxyethylene sorbitan hexaoleate, polyoxyethylene stearate, alkylphenol polyoxyethylene ether, fatty alcohol polyoxyethylene ether, polyoxyethylene fatty amine, coconut oil ethylene oxide Adducts, polyoxyethylene castor oil, alkylphenol polyoxyethylene ether, fatty alcohol polyoxyethylene ether, alkylphenol polyoxyethylene ether, alkylaryl polyoxyethylene ether, alkyl polyoxyethylene ether, alkyl Phenol polyoxyethylene ether, fatty alcohol polyoxyethylene ether, stearyl alcohol polyoxyethylene ether, fatty acid polyoxyethylene ester, polyoxyethylene fatty amine, polyoxyethylene fatty amine, 2-bromo-2-nitropropane-1 ,3-Diol, alkyldimethylethylbenzylammonium chloride, N-alkyldimethylbenzylammonium chloride, N-tetradecyldimethylbenzylammonium chloride, N-alkyl Dimethyl-1-naphthylmethylammonium chloride, coconut fatty acid diethanolamide, sodium alkylarylsulfonate, sodium linear alkylbenzenesulfonate, propylene glycol monofatty acid ester, carboxypolymethylene compound, linear alcohol Polyoxyethylene ether, lauryl alcohol polyoxyethylene ether sulfur Ammonium acid ester, sodium lauryl polyoxyethylene ether sulfate, nonylphenol polyoxyethylene ether, dodecanol polyoxyethylene ether, N,N-dimethylhydroxyethyl octadecamido quaternary ammonium nitrate Salt, N,N-Dimethylhydroxyethyl octadecamidophosphoric acid quaternary ammonium salt, polyether, glucosylaminopropyldimethyl-2-hydroxyethylammonium chloride, 2-hydroxyethylammonium chloride , cetyl trimethyl ammonium bromide, cetyl dimethyl benzyl ammonium chloride, alkyl trimethyl ammonium bromide, fatty alcohol polyoxyethylene ether, propylene glycol and fatty acid, polyethylene glycol Alcohol stearate, polyoxyethylene castor oil, nonylphenol polyoxyethylene ether, polyoxyethylene stearate, nonylphenol polyoxyethylene ether, fatty alcohol polyoxyethylene ether, sodium alkylnaphthalene sulfonate, Potassium alkyl naphthalene sulfonate, monocalcium alkaryl sulfonic acid, tridecamethylsiloxysilicate, nonylphenol polyoxyethylene ether, C10-13 fatty alcohol polyoxyethylene ether, alkylphenol polyoxyethylene Vinyl ether, fatty alcohol polyoxyethylene ether, sodium alkylbenzene sulfonate, polyoxyethylene alkylamine, coconut fatty acid polyoxyethylene ester, propylene glycol polyoxypropylene polyoxyethylene ether, alkyl phenolic resin polyether, sucrose fatty acid Ester, nonylphenol polyoxyethylene ether, sodium dodecyl diphenyl ether disulfonate, sodium n-decyl diphenyl ether disulfonate, 4-dodecyl-2,3-oxo-bisbenzenesulfonic acid disodium acid, propylene oxide ethylene oxide block copolymer, sodium alkyl benzene sulfonate, coco-1,3-propanediamine diacetate, N-tallow-1,3-propanediamine Diacetate, N-coco-1,3-propanediamine, N-tallow-1,3-propanediamine, diethanolamine lauryl sulfate, alkyl polyglycol ether, fatty acid alkylamide sulfonate Sodium sulfosuccinic acid monoester, fatty alcohol polyoxyethylene ether sulfosuccinic acid monoester sodium, polyoxyethylene fatty acid alkanolamide sulfosuccinic acid monoester sodium, fatty alcohol phosphate, alkyl polyoxyethylene ether phosphate sodium salt, alkylaryl polyoxyethylene ether, alkyl phosphate sodium salt, disodium sulfosuccinate, sulfosuccinate dialkyl alcohol amide, alkyl aryl sulfonate, alkyl dimethyl betaine, Alkyl tertiary amine oxide, oleic acid polyoxyethylene ester, fatty acid polyethylene glycol ester, alkyl polyethylene glycol ether, polyoxyethylene fatty amine, fatty alcohol polyoxyethylene ether, alkylphenol polyoxyethylene ether, alkane Phenol polyoxyethylene ether, tridecyloxypolyoxyethylene ethanol, fatty alcohol polyoxyethylene ether, oleic acid polyoxyethylene ether, fatty alcohol polyoxyethylene ether, stearic acid polyoxyethylene ether, polyoxyethylene Ethylene castor oil, alpha-alkenyl sulfonate, polyoxyethylene coconut amide, polyoxyethylene oleamide, nonylphenol polyoxyethylene ether, propylene glycol polyoxypropylene polyoxyethylene ether, polyoxyethylene fatty amine, modified Alkylphenol polyoxyethylene ether, nonylphenol polyethylene glycol ether, fatty alcohol polyethylene glycol ether, octadecyl pyridine chloride, hexadecyl pyridinium bromide, tetradecyl pyridinium bromide, Cetyltrimethylammonium bromide, propylene glycol monoricinoleate, glycerol monoricinoleate, ethylene glycol monoricinoleate, ammonium perfluoroalkanesulfonate, perfluoroalkanesulfonic acid Potassium, potassium fluoroalkyl carboxylates, fluoroalkyl quaternary ammonium sulfonates, ammonium perfluoroalkyl carboxylates, fluoroalkyl polyoxyethylene ethers, fluoroalkyl alkoxylates, perfluoroalkyl poly Oxyethylene polyoxypropylene ether, polyoxyethylene sorbitan hexaoleate, polyoxyethylene glycerin fat Acid ester, polyoxyethylene polyoxypropylene monostearate, polyoxyethylene coconut fatty amine, alkyl dimethyl ammonium chloride, alkyl polyglycol ether sulfate sodium salt, propylene glycol polyoxyethylene polyoxypropylene Ether, imidazolidinyl urea, polyoxyethylene methyl glucoside sesquistearate, fatty alcohol phosphate, mixed organic phosphate, sodium α-olefin sulfonate, sodium secondary alkane sulfonate, fatty alcohol polyoxyethylene Ether, polyoxyethylene diisobutylphenoxyethyldimethylbenzyl ammonium chloride, linear fatty alcohol polyoxyethylene ether, alkylphenol polyoxyethylene ether, octylphenol polyoxyethylene ether, nonyl Phenol polyoxyethylene ether, dinonylphenol polyoxyethylene ether, dodecylphenol polyoxyethylene ether, sodium oleoyloxyethanesulfonate, sodium N-palmitoyl-N-cyclohexyl taurate, N-methyl Sodium-N-oleoyl sulfonate, fatty alcohol polyoxyethylene ether, 3-trifluoromethyl-4,4'-dichloro-N,N-diphenylurea, polypropylene glycol, polyethylene glycol, N- Alkyl trimethyl ammonium chloride, polyethylene glycol fatty acid ester, silicone, polyoxyethylene fatty amine, fatty acid polyethylene glycol ester, alkylphenol polyethylene glycol ether, cocoyl alkyl betaine, Cocoyl hydrolyzed animal protein potassium salt, propylene glycol fatty acid ester and its potassium salt, polyoxyethylene castor oil, nonylphenol polyoxyethylene ether, oleyl alcohol polyoxyethylene ether, polyoxyethylene stearate, polyoxyethylene Er oil, sodium oleamidobenzene sulfonate, nonylphenol polyoxyethylene ether, fatty alcohol polyoxyethylene ether, dodecanol polyoxyethylene ether, fatty alcohol polyoxyethylene ether, saponin, alkyl benzene sulfonate Acid alkanolamine salt, sodium alkyl phenol polyoxyethylene ether sulfate, cationic modified polyoxyethylene fatty acid ester, carboxymethyl cellulose, polyethylene glycol stearate, nonylphenol polyoxyethylene Vinyl ether, alkyl alcohol polyoxyethylene ether, polyquaternary vinyl alcohol, monocarboxylated coconut imidazoline derivatives, fatty alcohol polyoxyethylene ether, fatty acid polyoxyethylene ester, fatty alcohol polyoxyethylene ether, alkane Alkyl phenol polyoxyethylene ether, mixture of sodium alkyl benzene sulfonate and fatty acid polyethylene glycol ester, alkyl phenolic resin polyether, alkylphenolic resin polyether, sodium alkyl naphthalene sulfonate, sodium alkyl naphthalene sulfonate , Secondary alcohol polyoxyethylene ether, C13~15 secondary alcohol polyoxyethylene ether, secondary alcohol polyoxyethylene ether sulfate, sorbitan stearate, polyoxyethylene sorbitan stearate, nonyl Base phenol polyoxyethylene ether, cetyl alcohol polyoxyethylene ether, C8 fatty alcohol polyoxyethylene ether sulfate sodium salt, propylene oxide ethylene oxide block copolymer, propylene oxide ethylene oxide block copolymer Cetyl alcohol polyoxyethylene ether, lauryl alcohol polyoxyethylene ether, oleyl alcohol polyoxyethylene ether, fatty alcohol polyoxyethylene ether diphosphate, nonylphenol polyoxyethylene ether, octylphenol polyoxyethylene ether , sucrose monolaurate, sucrose monooleate, sucrose monopalmitate, sucrose distearate, sucrose mono, distearate, polyethylene glycol distearate, nonylphenol polyoxygen Vinyl ether, fatty alcohol polyoxyethylene ether, oleyl alcohol/cetyl alcohol polyoxyethylene ether, nonylphenol polyoxyethylene ether, oleyl alcohol polyoxyethylene ether, oleic acid polyoxyethylene ester, oleyl alcohol polyoxyethylene ether, Polyoxyethylene eicosanoate, 4-tert-butyl-4'-methoxydibenzoylmethane, 2-ethylhexyl-p-methoxylaurate, fatty alcohol polyoxyethylene ether, alkyl methyl polyoxygen Vinyl ether quaternary ammonium salt, dimethyl polysiloxane polyether, methylparaben, propylparaben and ethanol monophenyl ether alkyl phosphate potassium, alkyl phosphate potassium, propylene glycol polyoxyethylene polyoxy Propylene ether, propylene glycol polyoxypropylene polyoxyethylene ether, propylene glycol polyoxypropylene polyoxyethylene ether, ethylenediamine polyoxypropylene polyoxyethylene ether, compound of stearyl alcohol polyoxyethylene ether and stearyl alcohol, glycerin Polyoxypropylene oxyethylene ether, quaternary amino ether of ethoxylated cellulose, polyoxyethylene sorbitan fatty acid ester, C16-20 fatty acid polyoxyethylene ester, fatty alcohol polyoxyethylene ether, alkylphenol polyoxyethylene Vinyl ether, ethylenediamine polyoxyethylene polyoxypropylene ether, petroleum sulfonate, quaternized strychmidazoline, sodium stearoyl lactylate, nonylphenol polyvinyl ether, lauryl polyoxyethylene ether sulfate sodium salt, Derivatives of lanolin sterols, sodium dodecylbenzene sulfonate, diisopropyl dimer acid, alkyl amine oxides, alkyl diethanolamides, polyoxyethylene type nonionic surfactants, propylene glycol propylene oxide Ethylene oxide block copolymer, alkyl phenolic resin polyether, dimethylsiloxane, nonylphenol polyoxyethylene ether, octylphenol polyoxyethylene ether, cetyl alcohol polyoxyethylene ether, hard lauryl alcohol Acid triethanolamine, lauryl alcohol polyoxyethylene ether sulfate sodium salt, polyoxyethylene synthetic fatty acid monoethanolamide, primary alcohol polyoxyethylene ether, alkyl polyoxyethylene ether, fatty alcohol polyvinyl ether mixture, quaternary ammonium salt, diethyl ether Methyldistearylamine chloride, polyoxyethylene fatty amide, polyoxyethylene stearate, neutral lecithin, sorbitan monolaurate, sorbitan monopalmitate, sorbitan Monostearate, Sorbitan Tristearate, Sorbitan Monooleate, Sorbitan Trioleate, Cocoic Acid Diethanolamide, Lauric Acid Diethanolamide, Imidazole Derivatives, Fatty acid polyoxyethylene ether, nonylphenol polyoxyethylene ether, sodium dodecylbenzene sulfonate, alkylbenzene sulfonate, secondary alkyl sodium sulfate, nonylphenol polyoxyethylene ether, ethylenediamine polyoxypropylene Polyoxyethylene ether, tridecanol polyoxyethylene ether sulfate sodium salt, lauryl alcohol diethanolamide, alkylphenol polyoxyethylene ether, fatty alcohol polyoxypropylene polyoxyethylene ether, fatty alcohol polyoxypropylene polyoxyethylene At least one of ether succinate.

具体地,在所述表面活性剂溶液的原料瓶110中还预先添加了一定比例的疏水性物质,以增加混合后的二价前驱体溶液的表面流平效果。所述疏水性物质为聚二甲基硅氧烷、环甲基硅氧烷、氨基硅氧烷、聚甲基苯基硅氧烷、聚醚聚硅氧烷共聚物中的至少一种。添加的疏水性物质占表面活性剂的质量比为0-50%。Specifically, a certain proportion of hydrophobic substances are pre-added in the raw material bottle 110 of the surfactant solution to increase the surface leveling effect of the mixed bivalent precursor solution. The hydrophobic substance is at least one of polydimethylsiloxane, cyclomethicone, aminosiloxane, polymethylphenylsiloxane, and polyether polysiloxane copolymer. The added hydrophobic substance accounts for 0-50% of the mass ratio of the surfactant.

本发明还公开一种如前所述的前驱体与表面活性剂的混合溶液的涂布设备的使用方法,包括如下步骤:The present invention also discloses a method for using the coating equipment for the mixed solution of the precursor and the surfactant, which comprises the following steps:

第一步,按照如前所述的一种前驱体与表面活性剂的混合溶液的配制方法配制的钙钛矿的二价前驱体溶液和表面活性剂溶液倒入不同的原料瓶中,两个原料瓶分别通过管路112和115与注射泵104连通,注射泵104按照设定的体积比1~1000同时分别抽吸二价前驱体溶液和表面活性剂溶液注入到混合腔111内进行混合,经搅拌后得到前驱体与表面活性剂的混合溶液。In the first step, the bivalent perovskite precursor solution and the surfactant solution prepared according to the preparation method of a mixed solution of a precursor and a surfactant as described above are poured into different raw material bottles. The raw material bottle is connected with the syringe pump 104 through the pipelines 112 and 115 respectively. The syringe pump 104 simultaneously sucks the bivalent precursor solution and the surfactant solution according to the set volume ratio of 1 to 1000 and injects them into the mixing chamber 111 for mixing. After stirring, a mixed solution of the precursor and the surfactant is obtained.

第二步,将待涂布的基底108表面朝上放置在涂布平台106上,开启注射泵104和传送装置107,混合溶液通过导管103被输送至涂布模头101处,在所述传送装置107的驱动下,所述模头升降台102与涂布平台106之间产生相对移动,通过模头升降台102调节涂布模头101与待涂布的基底108之间的高度,涂布模头101对放置在涂布平台106上的待涂布的基底108表面进行涂布,基底108表面涂覆后得到含有混合溶液的湿膜。In the second step, the surface of the substrate 108 to be coated is placed on the coating platform 106, the syringe pump 104 and the conveying device 107 are turned on, and the mixed solution is conveyed to the coating die 101 through the conduit 103. Driven by the device 107, a relative movement occurs between the die head lift table 102 and the coating platform 106, and the die head lift table 102 is used to adjust the height between the coating die head 101 and the substrate 108 to be coated, and the coating The die 101 coats the surface of the substrate 108 to be coated placed on the coating platform 106, and after the surface of the substrate 108 is coated, a wet film containing the mixed solution is obtained.

第三步,开启后处理装置,涂覆后的基底108被传送装置107输送到后处理装置105处进行后处理,促使湿膜中的溶剂进一步挥发,从而在基底108表面制备出一层含有二价前驱体的薄膜层。In the third step, the post-processing device is turned on, and the coated substrate 108 is transported by the conveying device 107 to the post-processing device 105 for post-processing, so as to promote the solvent in the wet film to further volatilize, thereby preparing a layer on the surface of the substrate 108 containing two Thin film layers of valence precursors.

本发明还公开一种钙钛矿太阳能电池的制备方法,在制备该钙钛矿太阳能电池的过程中使用如前所述的前驱体与表面活性剂的混合溶液的涂布设备,包括如下步骤:The present invention also discloses a preparation method of a perovskite solar cell. In the process of preparing the perovskite solar cell, the coating equipment of the mixed solution of the precursor and the surfactant as described above is used, which includes the following steps:

S1、按照如前所述的一种前驱体与表面活性剂的混合溶液的配制方法配制的二价前驱体与表面活性剂溶液注入不同的原料瓶中,两个原料瓶分别通过管路与注射泵连通,注射泵按照设定的体积比1~1000同时分别抽吸二价前驱体溶液和表面活性剂溶液到混合腔内进行混合,经搅拌后得到前驱体与表面活性剂的混合溶液。S1. The divalent precursor and the surfactant solution prepared according to the preparation method of a mixed solution of a precursor and a surfactant as described above are injected into different raw material bottles, and the two raw material bottles are respectively injected through pipelines and injected The pump is connected, and the syringe pump simultaneously sucks the bivalent precursor solution and the surfactant solution into the mixing chamber for mixing according to the set volume ratio of 1 to 1000. After stirring, the mixed solution of the precursor and the surfactant is obtained.

S2、将在表面已经制备了导电层和电子/空穴传输层的基底108放置在涂布平台106上。开启注射泵104和传送装置107,混合溶液通过导管103被输送至涂布模头101处,在所述传送装置107的驱动下,所述模头升降台102与涂布平台106之间产生相对移动,通过模头升降台102调节涂布模头101与待涂布的基底108之间的高度,涂布模头101对放置在涂布平台106上的待涂布的基底108表面进行涂布,基底108表面涂覆后得到含有混合溶液的湿膜。S2 , placing the substrate 108 on which the conductive layer and the electron/hole transport layer have been prepared on the coating platform 106 . Turn on the syringe pump 104 and the conveying device 107, and the mixed solution is conveyed to the coating die head 101 through the conduit 103. Driven by the conveying device 107, the die head lift table 102 and the coating platform 106 are opposed to each other. Move, adjust the height between the coating die 101 and the substrate 108 to be coated by the die lifting platform 102 , and the coating die 101 coats the surface of the substrate 108 to be coated placed on the coating platform 106 , a wet film containing the mixed solution is obtained after the surface of the substrate 108 is coated.

S3、开启后处理装置,涂覆后的基底108被传送装置107输送到后处理装置105处进行后处理,促使湿膜中的溶剂进一步挥发,从而在基底表面的电子/空穴传输层上面再制备出一层含有二价前驱体的薄膜层。S3. The post-processing device is turned on, and the coated substrate 108 is transported by the conveying device 107 to the post-processing device 105 for post-processing, so as to promote the solvent in the wet film to further volatilize, so that the coated substrate 108 can be deposited on the electron/hole transport layer on the surface of the substrate. A thin film layer containing a divalent precursor is prepared.

S4、在基底的含有二价前驱体的薄膜层表面继续制备钙钛矿的一价前驱体薄膜层、空穴/电子传输层和背电极层,直至完成钙钛矿太阳能电池的制备。S4, continue to prepare the monovalent precursor thin film layer of perovskite, the hole/electron transport layer and the back electrode layer on the surface of the thin film layer containing the divalent precursor of the substrate, until the preparation of the perovskite solar cell is completed.

具体地,在S2中,所述涂布模头101涂布时,所述涂布模头101的工作设定参数条件是:涂布液量为0.2-2ul/cm2,涂布速度为0.5-50cm/s,涂布模头的出液温度为60-180℃,涂布温度为60-180℃;所述涂布模头涂布时还满足以下环境条件:环境温度15-30℃,环境湿度0-50%RH,处于一般大气环境或惰性保护气氛的环境中。Specifically, in S2, when the coating die 101 is coating, the working parameter conditions of the coating die 101 are: the amount of coating liquid is 0.2-2ul/cm 2 , and the coating speed is 0.5 -50cm/s, the liquid outlet temperature of the coating die is 60-180°C, and the coating temperature is 60-180°C; the coating die also meets the following environmental conditions during coating: the ambient temperature is 15-30°C, Ambient humidity 0-50%RH, in general atmospheric environment or inert protective atmosphere.

具体地,在所述模头升降台上还设置有在涂布模头涂布结束后的0-60s时间内对基底表面刚被涂覆的湿膜进行成膜处理的成膜装置(图中未示出)。所述成膜装置包括加热器以及吹风机或抽风机,或者加热器以及真空泵。Specifically, a film forming device is also provided on the die head lifting platform to perform film forming treatment on the wet film that has just been coated on the surface of the substrate within 0-60 s after the coating of the coating die head (Fig. not shown). The film forming apparatus includes a heater and a blower or an exhaust fan, or a heater and a vacuum pump.

具体地,所述成膜处理热处理或干燥处理。所述热处理是指将涂覆有二价前驱体湿膜的基底放置在低真空压强10-5-105Pa、空气温度25-150℃下,放置10-600s时间进行退火处理。所述干燥处理是指通过采用吹风或抽风方式造成的空气对流给二价前驱体湿膜进行快速干燥,所述吹风或抽风造成空气流动的风速为0.5-10m/s,流动空气的温度为25-150℃。Specifically, the film formation treatment is heat treatment or drying treatment. The heat treatment refers to placing the substrate coated with the bivalent precursor wet film under a low vacuum pressure of 10 -5 -10 5 Pa and an air temperature of 25-150°C for 10-600s for annealing treatment. The drying treatment refers to the rapid drying of the bivalent precursor wet film by air convection caused by blowing or exhausting, and the wind speed of the air flow caused by the blowing or exhausting is 0.5-10m/s, and the temperature of the flowing air is 25. -150℃.

在S4中,所述后处理装置所进行的后处理过程包括:将涂覆有二价前驱体混合溶液湿膜的基底放于真空、干燥空气、氮气、H2O(水)、DMF(N,N-二甲基甲酰胺)、DMSO(二甲基亚砜)、GBL(γ-丁内酯)、NMP(N-甲基吡咯烷酮)中至少一种气体作用的环境,环境压强10-5-106Pa,环境温度为100-150℃,静置时间为5-120min,使湿膜干燥成半干膜。In S4, the post-processing process performed by the post-processing device includes: placing the substrate coated with the wet film of the bivalent precursor mixed solution in a vacuum, dry air, nitrogen, H 2 O (water), DMF (N , N-dimethylformamide), DMSO (dimethyl sulfoxide), GBL (γ-butyrolactone), NMP (N-methylpyrrolidone) in the environment where at least one gas acts, the ambient pressure is 10 -5 -10 6 Pa, the ambient temperature is 100-150°C, and the standing time is 5-120min to dry the wet film into a semi-dry film.

本发明还公开一种钙钛矿太阳能电池,包括钙钛矿薄膜层,所述钙钛矿薄膜层采用如前所述的前驱体与表面活性剂的混合溶液的涂布设备来制备的,或者采用如前所述的前驱体与表面活性剂的混合溶液的涂布设备的使用方法来制备的,或者采用如前所述的钙钛矿太阳能电池的制备方法来制备的。The present invention also discloses a perovskite solar cell, comprising a perovskite thin film layer, wherein the perovskite thin film layer is prepared by using the aforementioned coating equipment of a mixed solution of a precursor and a surfactant, or It is prepared by using the method of using the coating equipment of the mixed solution of the precursor and the surfactant as described above, or by the method of preparing the perovskite solar cell as described above.

下面结合具体实施来进一步说明本发明的技术方案。The technical solutions of the present invention are further described below in conjunction with specific implementations.

实施例一Example 1

采用现有两步法技术制备钙钛矿薄膜层。首先,在已制备有PTAA电子/空穴传输层的基底上采用狭缝式涂布方式涂布1mol/L PbI2钙钛矿的二价前驱体溶液,其中钙钛矿的二价前驱体溶液中二价前驱体溶剂为DMF和DMSO,DMF和DMSO的体积比为9:1,然后,对涂布后的基底进行后处理得到的含有PbI2薄膜层。然后在PbI2薄膜层表面制备MAI一价前驱体薄膜层,得到钙钛矿薄膜层。The perovskite thin film layer was prepared using the existing two-step method. First, the bivalent precursor solution of 1 mol/L PbI 2 perovskite was coated on the substrate prepared with the PTAA electron/hole transport layer by slit coating, wherein the bivalent precursor solution of perovskite was The medium divalent precursor solvents were DMF and DMSO, and the volume ratio of DMF and DMSO was 9:1. Then, the coated substrate was post-treated to obtain a PbI 2 -containing thin film layer. Then a MAI monovalent precursor thin film layer is prepared on the surface of the PbI 2 thin film layer to obtain a perovskite thin film layer.

其中,PbI2二价前驱体溶液的狭缝式涂布条件:在温度为25℃、湿度为30%RH下,涂布液量为1ul/cm2,狭缝宽度为100um,涂布速度为5cm/s。涂布后的干燥条件:热吹风干燥,基底表面附件的风速为2m/s,基底表面附近的温度为60℃,涂布后将含有PbI2薄膜层的基底在100℃下退火2min。Among them, the slit coating conditions of the PbI 2 divalent precursor solution: under the temperature of 25 ° C and the humidity of 30% RH, the coating liquid amount is 1 ul/cm 2 , the slit width is 100 um, and the coating speed is 5cm/s. Drying conditions after coating: hot air drying, the wind speed near the substrate surface is 2m/s, the temperature near the substrate surface is 60°C, and the substrate containing the PbI2 thin film layer is annealed at 100°C for 2min after coating.

请参考图5所示,钙钛矿薄膜层内有很多白色孔洞,这是由于在涂布PbI2溶液时,亲水性的PbI2溶液难以浸润亲油性的PTAA电子/空穴传输层表面,PbI2溶液的内聚力大于与PTAA电子/空穴传输层接触部分表面的附着力,导致PbI2溶液有“收缩”的趋势,从而造成很多孔洞。Please refer to Figure 5, there are many white holes in the perovskite thin film layer, this is because the hydrophilic PbI 2 solution is difficult to infiltrate the surface of the lipophilic PTAA electron/hole transport layer when the PbI 2 solution is coated. The cohesive force of the PbI 2 solution is greater than the adhesion force of the surface in contact with the PTAA electron/hole transport layer, which causes the PbI 2 solution to have a tendency to "shrink", resulting in many holes.

实施例二Embodiment 2

采用两步法工艺,在涂布钙钛矿的二价前驱体溶液中添加表面活性剂,等涂布完再涂布一价前驱体溶液,就得到如图6所示的钙钛矿薄膜层涂布后的截面示意图。Using a two-step process, adding a surfactant to the bivalent precursor solution of the perovskite coating, and then coating the monovalent precursor solution after the coating is completed, the perovskite thin film layer as shown in Figure 6 is obtained. Schematic diagram of the cross section after coating.

在基底上依次制备导电层11和电子/空穴传输层12-2,在电子/空穴传输层12-2上制备的钙钛矿薄膜层16,由于先在电子/空穴传输层12-2上涂布含有表面活性剂的钙钛矿的二价前驱体溶液,在钙钛矿薄膜层16的下表面有表面活性剂17。图示中,表面活性剂17的小圆点为亲水性基团、曲线为亲油性基团。亲水性基团分布在靠近钙钛矿薄膜层16一侧,而亲油性基团则分布在亲油性电子/空穴传输层12-2和钙钛矿薄膜层16的空气侧。表面活性剂17的加入有效提高了钙钛矿薄膜层16对亲油性电子/空穴传输层12-2的浸润性,并且改善了与空气接触的钙钛矿溶液表面的平整度,提高钙钛矿薄膜对电子/空穴传输层12-2的覆盖率和薄膜膜厚的均匀性。The conductive layer 11 and the electron/hole transport layer 12-2 are prepared in sequence on the substrate, and the perovskite thin film layer 16 prepared on the electron/hole transport layer 12-2, because the electron/hole transport layer 12- 2 is coated with a bivalent precursor solution of perovskite containing a surfactant, and there is a surfactant 17 on the lower surface of the perovskite thin film layer 16 . In the figure, the small dots of the surfactant 17 are hydrophilic groups, and the curves are lipophilic groups. The hydrophilic groups are distributed on the side close to the perovskite thin film layer 16 , and the lipophilic groups are distributed on the air side of the lipophilic electron/hole transport layer 12 - 2 and the perovskite thin film layer 16 . The addition of the surfactant 17 effectively improves the wettability of the perovskite thin film layer 16 to the lipophilic electron/hole transport layer 12-2, and improves the flatness of the surface of the perovskite solution in contact with the air. The coverage of the electron/hole transport layer 12-2 by the thin film and the uniformity of the film thickness.

采用本发明的前驱体与表面活性剂的混合溶液的涂布设备来制备钙钛矿薄膜层的实施例,包括如下步骤:The embodiment of preparing the perovskite thin film layer by using the coating equipment of the mixed solution of the precursor and the surfactant of the present invention includes the following steps:

首先,配制以氯苯和二甲基甲酰胺体积比为1:2混合溶剂,添加有5%二甲基硅油的质量分数为10%的N-十二烷基乙醇胺的表面活性剂。First, a surfactant was prepared with a mixed solvent of chlorobenzene and dimethylformamide in a volume ratio of 1:2, and 5% dimethicone added with a mass fraction of 10% N-dodecylethanolamine.

其次,配制以二甲基亚砜和二甲基甲酰胺体积比为1:9混合溶剂,摩尔浓度为1.2M的PbI2钙钛矿二价前驱体溶液。Next, a PbI 2 perovskite divalent precursor solution with a molar concentration of 1.2 M was prepared with a mixed solvent of dimethyl sulfoxide and dimethyl formamide in a volume ratio of 1:9.

再次,将表面活性剂溶液和PbI2二价前驱体溶液分别装入两个原料瓶中。按表面活性剂溶液和钙钛矿溶液的体积比为1:20在混合腔211中搅拌混合均匀。体积比可通过抽取的溶液注入流量速度来控制。Again, the surfactant solution and the PbI2 divalent precursor solution were charged into two raw material bottles, respectively. According to the volume ratio of the surfactant solution and the perovskite solution being 1:20, the mixture is stirred and mixed uniformly in the mixing chamber 211 . The volume ratio can be controlled by the pumped solution injection flow rate.

接着,使用如前所述的前驱体与表面活性剂的混合溶液的涂布设备,在PTAA电子/空穴传输层基底上狭缝式涂布配制的混合溶液。其中,狭缝式涂布的条件:在温度为25℃、湿度为30%RH下,涂布液量为0.7ul/cm2,狭缝宽度为100um,涂布速度为5cm/s。Next, using the coating equipment for the mixed solution of the precursor and the surfactant as described above, the prepared mixed solution was slit-coated on the PTAA electron/hole transport layer substrate. Among them, the conditions of slit coating: the temperature is 25°C and the humidity is 30%RH, the coating liquid amount is 0.7ul/cm 2 , the slit width is 100um, and the coating speed is 5cm/s.

接着,对涂布结束后基底上的湿膜进行加热,使得溶剂挥发得到的含有二价前驱体的薄膜层的半干膜。其中,成膜处理条件:热吹风干燥,热吹风在涂布的基底表面附近的风速为2m/s,在基底表面附近的温度为60℃,持续时间60秒。干膜处理条件:涂布有PbI2二价前驱体薄膜的基底放置在温度100℃、压强103Pa、干燥空气环境下退火10min。Next, the wet film on the substrate after coating is heated to make the semi-dry film of the thin film layer containing the divalent precursor obtained by volatilizing the solvent. Among them, the film forming treatment conditions: hot air drying, the wind speed of the hot air near the coated substrate surface is 2m/s, the temperature near the substrate surface is 60°C, and the duration is 60 seconds. Dry film treatment conditions: The substrate coated with the PbI 2 divalent precursor thin film was placed at a temperature of 100° C., a pressure of 10 3 Pa, and annealed for 10 minutes in a dry air environment.

请参照图7所示,从图中可以清楚地看出,相比实施例一,除了还存在有少量的缩孔外,本实施例的钙钛矿薄膜层对亲油性的PTAA电子/空穴传输层基底的覆盖率有很大提高,其外表面更加平整光滑。Please refer to FIG. 7 , it can be clearly seen from the figure that, compared with Example 1, in addition to a small amount of shrinkage cavities, the perovskite thin film layer of this example has no effect on the lipophilic PTAA electrons/holes. The coverage of the transmission layer substrate is greatly improved, and its outer surface is more flat and smooth.

请参照图8所示,是将实施例一和实施例二的钙钛矿薄膜层采用相同的方式完整地制备成钙钛矿太阳能电池后的效率图。制成的钙钛矿太阳能电池的结构为:ITO/空穴传输层/钙钛矿层/C60/BCP/Cu,测试有效电池面积为1cm2。试验得到实施例一和实施例二的电池效率分别为:6.3%、16.5%。Please refer to FIG. 8 , which is an efficiency diagram after the perovskite thin film layers of Example 1 and Example 2 are completely prepared into a perovskite solar cell in the same manner. The structure of the fabricated perovskite solar cell is: ITO/hole transport layer/perovskite layer/C 60 /BCP/Cu, and the tested effective cell area is 1 cm 2 . The test results show that the cell efficiencies of Example 1 and Example 2 are 6.3% and 16.5%, respectively.

从图8中可以看出,由于实施例一中钙钛矿薄膜内具有大量的缩孔,导致钙钛矿层在电子/空穴传输层基底上的覆盖率较低,导致电池的短路电流密度JSC和填充因子FF很差。由于孔洞的存在也可能造成电池的漏电,导致开路电压VOC也较差。It can be seen from Figure 8 that due to the large number of shrinkage pores in the perovskite film in Example 1, the coverage of the perovskite layer on the electron/hole transport layer substrate is low, resulting in the short-circuit current density JSC of the battery. and fill factor FF is poor. Due to the existence of holes, the leakage of the battery may also be caused, resulting in a poor open circuit voltage VOC.

在钙钛矿的二价前驱体溶液中添加表面活性剂后得到的的二价前驱体混合溶液,利用本发明的涂布设备进行狭缝式涂布过程中,表面活性剂起到对钙钛矿的二价前驱体溶液的流平作用,减少形成的钙钛矿薄膜的膜厚不均匀、孔洞缺陷,提高制成的钙钛矿太阳能电池的效率。与现有技术相比,本发明并涉及表面活性剂在钙钛矿溶液中起到乳化、增溶和助悬的功能。In the bivalent precursor mixed solution obtained by adding surfactant to the bivalent precursor solution of perovskite, in the process of slit coating using the coating equipment of the present invention, the surfactant plays a role in reducing the perovskite The leveling effect of the bivalent precursor solution of the ore reduces the uneven film thickness and hole defects of the formed perovskite thin film, and improves the efficiency of the fabricated perovskite solar cell. Compared with the prior art, the present invention also relates to the functions of surfactants in emulsifying, solubilizing and suspending in perovskite solutions.

以上所述仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本发明的保护范围之内。The above descriptions are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention shall be included in the protection of the present invention. within the range.

Claims (20)

1. The coating equipment of the mixed solution of the precursor and the surfactant is characterized by comprising a coating die head, a die head lifting platform, a coating platform, a conveying device and a post-treatment device, wherein the coating die head is arranged on the die head lifting platform, the coating die head and the post-treatment device are separated from each other and are respectively arranged above the coating platform, a substrate to be coated placed on the coating platform is conveyed to the post-treatment device for post-treatment by the conveying device after being coated by the coating die head, the die head lifting platform and the coating platform are driven by the conveying device to generate relative movement, and the die head lifting platform adjusts the height between the coating die head and the substrate to be coated; the coating die head is communicated with an injection pump with a mixing cavity through a conduit, the mixing cavity of the injection pump is respectively communicated with at least two raw material bottles through pipelines, at least one raw material bottle contains a divalent precursor solution of perovskite, at least one other raw material bottle contains a surfactant solution, the injection pump respectively and simultaneously pumps the divalent precursor solution of perovskite and the surfactant solution according to a set volume ratio, the two raw material bottles and the surfactant solution are injected into the mixing cavity to be mixed, and the mixed solution obtained through mixing is conveyed to the coating die head through the conduit for use.
2. The apparatus and method for coating a mixed solution of a precursor and a surfactant according to claim 1, wherein the conveyor moves a coating platform, the coating die and a die lifting platform are kept stationary, and the die lifting platform and the coating platform move relatively.
3. The apparatus for coating a mixed solution of a precursor and a surfactant according to claim 1, wherein the conveyor moves a coating die and a die lift, the coating platform is kept stationary, and the die lift and the coating platform are moved relatively to each other.
4. The apparatus for coating a mixed solution of a precursor and a surfactant according to claim 2 or 3, wherein a film-forming device for forming a film on a wet film on the surface of the substrate immediately after the coating of the coating die is completed within 0 to 60 seconds is further provided on the die lift, and the film-forming device comprises a heater, and a blower or an exhaust fan, or a heater and a vacuum pump.
5. The apparatus for coating a mixed solution of a precursor and a surfactant according to claim 2 or 3, wherein the post-treatment means comprises a heater, a vacuum pump, and a closed chamber which is easy to open and close.
6. The apparatus for coating a mixed solution of a precursor and a surfactant according to claim 1, wherein a stirring device or an ultrasonic oscillation device is further provided in the mixing chamber.
7. The preparation method of the mixed solution of the precursor and the surfactant is characterized in that the precursor is a divalent precursor solution of perovskite, and the divalent precursor solution comprises a divalent metal halide BX2And a divalent precursor solvent, the formulation method comprising:
injecting a divalent precursor solution into one raw material bottle, injecting a surfactant solution into the other raw material bottle, respectively communicating the two raw material bottles with an injection pump through pipelines, simultaneously and respectively pumping the divalent precursor solution and the surfactant solution into a mixing cavity by the injection pump according to a set volume ratio for mixing, and stirring to obtain a mixed solution of a precursor and the surfactant, wherein,
the divalent metal halide BX2B in (A) is Pb2+、Sn2+、Ze2+At least one of (1), X is Cl-、Br-、I-The divalent precursor solvent is at least one of N, N-dimethylformamide, dimethyl sulfoxide, N-methylpyrrolidone and gamma-butyrolactone; the concentration of the divalent precursor solution is 0.5-1.5mol/L, and the mass ratio of the surfactant to the divalent precursor solution is 0.05-5%;
the mass ratio of the surfactant solution to the divalent precursor solution is 5-100%, the surfactant solution comprises an active agent solute and an active agent solvent, the active agent solute is a nonionic, cationic, anionic or amphoteric surfactant, and the active agent solvent is at least one of petroleum ether, carbon tetrachloride, trichloroethane, benzene, dichloromethane, chloroform, ethyl acetate and acetone;
pumping a divalent precursor solution and a surfactant solution at a set volume ratio of 1-1000; the ambient set temperature during stirring was 10-60 ℃.
8. Polyoxyethylene sorbitan, polyoxyethylene ether, polyoxyethylene sorbitan monolaurate, polyoxyethylene sorbitan polyoxyethylene ether, polyoxyethylene sorbitan monooleate, polyoxyethylene sorbitan polyoxyethylene ether, polyoxyethylene sorbitan polyoxyethylene ether, polyoxyethylene sorbitan polyoxyethylene ether, polyoxyethylene sorbitan polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene sorbitan polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene sorbitan polyoxyethylene ether, polyoxyethylene sorbitan polyoxyethylene sorbitan polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene ether, polyoxyethylene.
9. The method according to claim 7, wherein a hydrophobic substance is added to the raw material bottle of the surfactant in advance in a predetermined proportion, and the hydrophobic substance is at least one of polydimethylsiloxane, cyclomethicone, aminosiloxane, polymethylphenylsiloxane, and polyether polysiloxane copolymer.
10. Use of a device for coating a mixed solution of a precursor and a surfactant according to any one of claims 1 to 6, characterized in that it comprises the following steps:
firstly, injecting a divalent precursor solution and a surfactant solution of perovskite prepared according to the preparation method of the mixed solution of the precursor and the surfactant as claimed in claim 7, 8 or 9 into different raw material bottles, wherein the two raw material bottles are respectively communicated with an injection pump through pipelines, the injection pump simultaneously and respectively pumps the divalent precursor solution and the surfactant solution according to a set volume ratio, the divalent precursor solution and the surfactant solution are injected into a mixing cavity for mixing, and the mixed solution of the precursor and the surfactant is obtained after stirring;
secondly, placing the substrate to be coated on a coating platform, starting an injection pump and a conveying device, conveying the mixed solution to a coating die head through a conduit, driving the die head lifting platform and the coating platform to move relatively, adjusting the height between the coating die head and the substrate to be coated through the die head lifting platform, coating the surface of the substrate to be coated placed on the coating platform by the coating die head, and obtaining a wet film containing the mixed solution after coating the surface of the substrate;
and thirdly, starting the post-treatment device, conveying the coated substrate to the post-treatment device by the conveying device for post-treatment, and preparing a film layer containing a divalent precursor on the surface of the substrate.
11. The method of using a coating apparatus of a mixed solution of a precursor and a surfactant according to claim 10, wherein in the second step, when the coating die is coated, the operating setting parameter conditions of the coating die are as follows: the amount of the coating liquid is 0.2-2ul/cm2The coating speed is 0.5-50cm/s, the liquid outlet temperature of the coating die head is 60-180 ℃, and the coating temperature is 60-180 ℃; the coating die head also meets the following environmental conditions when coating: the environment temperature is 15-30 ℃, the environment humidity is 0-50% RH, and the device is in the common atmospheric environment or the environment of inert protective atmosphere.
12. The method of using a coating apparatus for a mixed solution of a precursor and a surfactant according to claim 10, wherein a film-forming device for forming a film on a wet film on a substrate surface immediately after coating of the coating die is completed within 0 to 60 seconds is further provided on the die lift, and the film-forming device includes a heater and a blower or an exhaust fan, or a heater and a vacuum pump.
13. The method of using the apparatus for coating a mixed solution of a precursor and a surfactant according to claim 12, wherein the film forming process comprises a heat treatment of placing the substrate coated with the wet film of the divalent precursor at a low vacuum pressure of 10 or a drying process-5-105Pa, airPlacing at 25-150 deg.C for 10-600s for annealing; the drying treatment refers to rapidly drying the divalent precursor wet film by air convection caused by blowing or air draft, wherein the air speed caused by blowing or air draft is 0.5-10m/s, and the temperature of flowing air is 25-150 ℃.
14. The method for using a coating apparatus of a mixed solution of a precursor and a surfactant according to claim 10, wherein in the fourth step, the post-treatment process performed by the post-treatment device includes: placing the substrate coated with the wet film of the mixed solution in an environment under the action of at least one gas selected from vacuum, dry air, nitrogen, water, N-dimethylformamide, dimethyl sulfoxide, gamma-butyrolactone and N-methylpyrrolidone, wherein the environmental pressure is 10-5-106Pa, the ambient temperature is 100-150 ℃, and the standing time is 5-120min, so that the wet film is dried into a semi-dry film.
15. A method for manufacturing a perovskite solar cell, characterized in that a coating apparatus of a mixed solution of a precursor according to any one of claims 1 to 6 and a surfactant is used in the process of manufacturing the perovskite solar cell, comprising the steps of:
s1, pouring a divalent precursor solution of perovskite and a surfactant solution prepared according to the preparation method of the mixed solution of the precursor and the surfactant as claimed in claim 7, 8 or 9 into different raw material bottles, wherein the two raw material bottles are respectively communicated with an injection pump through pipelines, the injection pumps simultaneously and respectively pump the divalent precursor solution of calcium and the surfactant solution according to a set volume ratio and inject the divalent precursor solution of calcium and the surfactant solution into a mixing cavity for mixing, and stirring to obtain a mixed solution of the precursor and the surfactant;
s2, placing the substrate with the conductive layer and the electron/hole transport layer prepared on the surface on a coating platform, starting an injection pump and a conveying device, conveying the mixed solution to a coating die head through a conduit, generating relative movement between the die head lifting platform and the coating platform under the driving of the conveying device, adjusting the height between the coating die head and the substrate to be coated through the die head lifting platform, coating the surface of the substrate to be coated placed on the coating platform by the coating die head, and obtaining a wet film containing the mixed solution after coating the surface of the substrate;
s3, starting the post-processing device, conveying the coated substrate to the post-processing device by the conveying device for post-processing, and preparing a film layer containing a divalent precursor on the electron/hole transport layer on the surface of the substrate;
s4, continuously preparing a monovalent precursor thin film layer, a hole/electron transport layer and a back electrode layer of the perovskite on the surface of the thin film layer containing the divalent precursor of the substrate until the perovskite solar cell is prepared.
16. The method for producing a perovskite solar cell as claimed in claim 15, wherein in S2, the coating die is coated under the conditions of the operating parameters of the coating die: the amount of the coating liquid is 0.2-2ul/cm2The coating speed is 0.5-50cm/s, the liquid outlet temperature of the coating die head is 60-180 ℃, and the coating temperature is 60-180 ℃; the coating die head also meets the following environmental conditions when coating: the environment temperature is 15-30 ℃, the environment humidity is 0-50% RH, and the device is in the common atmospheric environment or the environment of inert protective atmosphere.
17. The method for producing a perovskite solar cell as claimed in claim 15, wherein a film forming device for performing a film forming process on a wet film on the surface of the substrate just before coating within a time of 0 to 60 seconds after the coating of the coating die is completed is further provided on the die lift, and the film forming device comprises a heater and a blower or a suction fan, or a heater and a vacuum pump.
18. The method for producing the perovskite solar cell as claimed in claim 17, wherein the film forming process comprises a heat treatment of placing the substrate coated with the wet film of the divalent precursor at a low vacuum pressure of 10 a or a drying process-5-105Pa, air temperature 25-150 deg.CThen, the mixture is placed for 10 to 600 seconds to carry out annealing treatment; the drying treatment refers to rapidly drying the divalent precursor wet film by air convection caused by blowing or air draft, wherein the air speed caused by blowing or air draft is 0.5-10m/s, and the temperature of flowing air is 25-150 ℃.
19. The method for producing a perovskite solar cell as claimed in claim 15, wherein in S4, the post-treatment process performed by the post-treatment apparatus comprises: placing the substrate coated with the wet film of the mixed solution in an environment under the action of at least one gas selected from vacuum, dry air, nitrogen, water, N-dimethylformamide, dimethyl sulfoxide, gamma-butyrolactone and N-methylpyrrolidone, wherein the environmental pressure is 10-5-106Pa, the ambient temperature is 100-150 ℃, and the standing time is 5-120min, so that the wet film is dried into a semi-dry film.
20. A perovskite solar cell comprising a perovskite thin film layer, characterized in that the perovskite thin film layer is produced using the coating apparatus of the mixed solution of the precursor and the surfactant according to any one of claims 1 to 6, or the use method of the coating apparatus of the mixed solution of the precursor and the surfactant according to any one of claims 10 to 14, or the production method of the perovskite solar cell according to any one of claims 15 to 19.
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Application publication date: 20200313