CN110854051A - Chip picking device - Google Patents
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- CN110854051A CN110854051A CN201910859426.5A CN201910859426A CN110854051A CN 110854051 A CN110854051 A CN 110854051A CN 201910859426 A CN201910859426 A CN 201910859426A CN 110854051 A CN110854051 A CN 110854051A
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Abstract
Description
技术领域technical field
本发明涉及芯片加工技术领域,特别涉及一种芯片拾取装置。The invention relates to the technical field of chip processing, in particular to a chip pickup device.
背景技术Background technique
芯片在加工过程中通常要使用到拾取装置对芯片进行转移,使芯片从一道工序上移动到下一道工序上,目前的拾取装置大多都是简单的将芯片拾取,然后进行转移,然而芯片上残留的污染颗粒会对芯片的后续加工造成影响,例如在芯片与拾取头之间存在污染颗粒,则在拾取芯片过程中很容易因吸力的压迫导致芯片的损坏。In the process of chip processing, a pick-up device is usually used to transfer the chip, so that the chip can be moved from one process to the next process. Most of the current pick-up devices simply pick up the chip and then transfer it. However, residues remain on the chip. The contamination particles will affect the subsequent processing of the chip. For example, if there are contaminant particles between the chip and the pickup head, it is easy to damage the chip due to the pressure of suction during the process of picking up the chip.
发明内容SUMMARY OF THE INVENTION
有鉴于此,本发明的目的在于提供一种芯片拾取装置,用于去除拾取前芯片上的污染颗粒。In view of this, an object of the present invention is to provide a chip pick-up device for removing contaminant particles on chips before picking up.
基于上述目的,本发明提供的一种芯片拾取装置,包括:Based on the above purpose, a chip pickup device provided by the present invention includes:
传送带、拾取部、第二抽风机、驱动部和控制部,其中,A conveyor belt, a pick-up part, a second exhaust fan, a drive part and a control part, wherein,
所述传送带呈网状结构,芯片在所述传送带上进行转移;The conveyor belt has a mesh structure, and the chips are transferred on the conveyor belt;
所述拾取部包括吸盘、第一抽风机和电缸,所述所述吸盘设置在所述传送带的上方,所述第一抽风机通过抽风管与所述吸盘连通,所述电缸与所述吸盘动力连接,用于驱动所述吸盘上下移动;The pick-up part includes a suction cup, a first suction fan and an electric cylinder, the suction cup is arranged above the conveyor belt, the first suction fan communicates with the suction cup through an air suction pipe, and the electric cylinder is connected to the suction cup. The suction cup is connected with power to drive the suction cup to move up and down;
所述驱动部与所述电缸动力连接,用于驱动所述电缸在水平方向上来回移动;The driving part is dynamically connected with the electric cylinder for driving the electric cylinder to move back and forth in a horizontal direction;
所述第二抽风机设置在所述传送带的下方;the second exhaust fan is arranged below the conveyor belt;
所述控制部与所述第二抽风机电性连接,用于控制当所述吸盘与所述传送带上的芯片接触时,所述第二抽风机停止工作,当芯片离开所述传送带上后,所述第二抽风机开始工作。The control part is electrically connected with the second blower, and is used to control the second blower to stop when the suction cup is in contact with the chip on the conveyor belt, and when the chip leaves the conveyor belt, the second blower stops working. The second exhaust fan starts to work.
可选的,所述控制部包括压力传感器、弹簧和控制器,所述弹簧一端固定连接在所述吸盘上,另一端固定连接在所述压力传感器上,当吸盘未与芯片接触时,所述压力传感器距离所述传送带的的最小距离小于所述吸盘距离所述传送带的最小距离,所述控制器与所述压力传感器和所述第二抽风机电性连接。Optionally, the control part includes a pressure sensor, a spring and a controller. One end of the spring is fixedly connected to the suction cup, and the other end is fixedly connected to the pressure sensor. When the suction cup is not in contact with the chip, the The minimum distance between the pressure sensor and the conveyor belt is smaller than the minimum distance between the suction cup and the conveyor belt, and the controller is electrically connected with the pressure sensor and the second suction fan.
可选的,所述驱动部包括框体,所述框体上转动连接有丝杆,所述丝杆上螺纹连接与连接件,所述电缸固定连接在所述连接件的底部,所述连接件滑动连接在所述框体上,所述丝杆的一端动力连接有电机。Optionally, the driving part includes a frame body, and a screw rod is rotatably connected to the frame body, and the screw rod is threadedly connected to a connecting piece, the electric cylinder is fixedly connected to the bottom of the connecting piece, and the The connecting piece is slidably connected to the frame body, and one end of the screw rod is powered with a motor.
可选的,所述驱动部和所述拾取部均设有两组,两组驱动部分别与两组拾取部动力连接。Optionally, there are two groups of the drive part and the pick-up part, and the two groups of drive parts are respectively connected with the two groups of pick-up parts.
可选的,所述吸盘具有多个吸口。Optionally, the suction cup has multiple suction ports.
可选的,所述吸口处设有环形保护层。Optionally, an annular protective layer is provided at the suction port.
可选的,所述环形保护层由橡胶材料制成。Optionally, the annular protective layer is made of rubber material.
可选的,所述第一抽风机还连通有过滤盒,所述过滤盒内设有过滤网。Optionally, the first exhaust fan is further communicated with a filter box, and a filter screen is arranged in the filter box.
利用本装置拾取芯片时,驱动部控制电缸移动,将吸盘移动到芯片的上方,此时第一抽风机和第二抽风机均开始工作,第一抽风机的吸力小于第二抽风机的吸力,此时芯片还位于传送带上,当芯片上的污染颗粒此时会被第一抽风机吸走,控制电缸伸长,当吸盘与芯片接触时,控制部控制第二抽风机停止工作,此时芯片失去向下的吸力,在第一抽风机的工作下,芯片被吸盘吸起,此时控制器控制第二抽风机开始工作,由于芯片被吸起,芯片与第二抽风机之间的距离增大,此时第二抽风机对芯片的吸力减小,芯片在吸盘上不会落下,最后通过驱动部驱动电缸移动对芯片进行转移。When the device is used to pick up the chip, the driving part controls the electric cylinder to move and moves the suction cup to the top of the chip. At this time, both the first exhaust fan and the second exhaust fan start to work, and the suction force of the first exhaust fan is smaller than that of the second exhaust fan. , at this time the chip is still on the conveyor belt, when the polluting particles on the chip will be sucked away by the first suction fan at this time, and the electric cylinder will be controlled to extend. When the suction cup is in contact with the chip, the control part will control the second suction fan to stop working. When the chip loses its downward suction, under the operation of the first suction fan, the chip is sucked up by the suction cup. At this time, the controller controls the second suction fan to start working. When the distance increases, the suction force of the second exhaust fan on the chip is reduced, the chip will not fall on the suction cup, and finally the driving part drives the electric cylinder to move to transfer the chip.
由上述可知,本装置在吸取芯片前,通过第一抽风机的工作,可以将芯片上的污染颗粒去除,保证了芯片被吸取前芯片上没有污染颗粒,避免了污染颗粒对芯片后续加工造成影响,提升了芯片的良品率。It can be seen from the above that the device can remove the polluted particles on the chip through the operation of the first exhaust fan before the chip is sucked, which ensures that there is no polluted particle on the chip before the chip is sucked, and avoids the impact of the polluted particle on the subsequent processing of the chip. , improve the chip yield.
附图说明Description of drawings
图1为本发明的具体实施例拾取装置的主视图;1 is a front view of a pickup device according to a specific embodiment of the present invention;
图2为本发明的具体实施例框体的俯视图;2 is a top view of a frame body according to a specific embodiment of the present invention;
图3为本发明的具体实施例第一抽风机的连接关系示意图。FIG. 3 is a schematic diagram of the connection relationship of the first exhaust fan according to the specific embodiment of the present invention.
具体实施方式Detailed ways
为使本发明的目的、技术方案和优点更加清楚明白,以下结合具体实施例,并参照附图,对本发明进一步详细说明。In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to specific embodiments and accompanying drawings.
为达到上述目的,本发明实施例提供了一种芯片拾取装置。如图1至图3 所示,一种芯片拾取装置,包括:To achieve the above objective, an embodiment of the present invention provides a chip pickup device. As shown in FIG. 1 to FIG. 3, a chip pickup device includes:
传送带1、拾取部、第二抽风机2、驱动部和控制部,其中,Conveyor belt 1, pick-up part, second exhaust fan 2, drive part and control part, wherein,
所述传送带1呈网状结构,芯片在所述传送带1上进行转移;The conveyor belt 1 has a mesh structure, and the chips are transferred on the conveyor belt 1;
所述拾取部包括吸盘21、第一抽风机22和电缸23,所述所述吸盘21设置在所述传送带1的上方,所述第一抽风机22通过抽风管24与所述吸盘21 连通,所述电缸23与所述吸盘21动力连接,用于驱动所述吸盘21上下移动;The pick-up part includes a
所述驱动部与所述电缸23动力连接,用于驱动所述电缸23在水平方向上来回移动;The driving part is powered with the
所述第二抽风机2设置在所述传送带1的下方;The second exhaust fan 2 is arranged below the conveyor belt 1;
所述控制部与所述第二抽风机2电性连接,用于控制当所述吸盘21与所述传送带1上的芯片接触时,所述第二抽风机2停止工作,当芯片离开所述传送带1上后,所述第二抽风机2开始工作。The control part is electrically connected with the second exhaust fan 2, and is used to control the second exhaust fan 2 to stop working when the
利用本装置拾取芯片时,驱动部控制电缸23移动,将吸盘21移动到芯片的上方,此时第一抽风机22和第二抽风机2均开始工作,第一抽风机22的吸力小于第二抽风机2的吸力,此时芯片还位于传送带1上,当芯片上的污染颗粒此时会被第一抽风机22吸走,控制电缸23伸长,当吸盘21与芯片接触时,控制部控制第二抽风机2停止工作,此时芯片失去向下的吸力,在第一抽风机 22的工作下,芯片被吸盘21吸起,此时控制器控制第二抽风机2开始工作,由于芯片被吸起,芯片与第二抽风机2之间的距离增大,此时第二抽风机2 对芯片的吸力减小,芯片在吸盘21上不会落下,最后通过驱动部驱动电缸23 移动对芯片进行转移。When the device is used to pick up the chip, the driving part controls the
由上述可知,本装置在吸取芯片前,通过第一抽风机22的工作,可以将芯片上的污染颗粒去除,保证了芯片被吸取前芯片上没有污染颗粒,避免了污染颗粒对芯片后续加工造成影响,提升了芯片的良品率。It can be seen from the above that the device can remove the contaminating particles on the chip through the operation of the
在一些实施例中,所述控制部包括压力传感器31、弹簧32和控制器,所述弹簧32一端固定连接在所述吸盘21上,另一端固定连接在所述压力传感器 31上,当吸盘21未与芯片接触时,所述压力传感器31距离所述传送带1的的最小距离小于所述吸盘21距离所述传送带1的最小距离,所述控制器与所述压力传感器31和所述第二抽风机2电性连接。In some embodiments, the control part includes a
在吸盘21接触到芯片之前,压力传感器31会先与传送带1接触,接触后压力传感器31获得信号,并将该信号传送给控制器,控制器控制第二抽风机2停止工作,同时,当芯片在吸盘21的带动下离开传送带1后,压力传感器 31会后于芯片离开传送带1,当压力传感器31离开传送带1后,控制器接收此时压力传感器31传送过来的信号,控制第二电机44从新启动,如此反复。Before the
在一些实施例中,所述驱动部包括框体41,所述框体41上转动连接有丝杆42,所述丝杆42上螺纹连接与连接件43,所述电缸23固定连接在所述连接件43的底部,所述连接件43滑动连接在所述框体41上,所述丝杆42的一端动力连接有电机44。In some embodiments, the driving part includes a
转移芯片时,电机44工作带动丝杆42转动,丝杆42转动带动连接件43 来回移动,从而带动电缸23来回移动对芯片进行转移。When transferring the chip, the motor 44 works to drive the screw rod 42 to rotate, and the rotation of the screw rod 42 drives the connecting piece 43 to move back and forth, thereby driving the
为了提升芯片的转移效率,所述驱动部和所述拾取部均设有两组,两组驱动部分别与两组拾取部动力连接。通过两组拾取部的设计,加快了芯片的拾取速度,从而提升了芯片的转移效率。In order to improve the transfer efficiency of chips, there are two sets of the drive part and the pick-up part, and the two sets of drive parts are respectively connected with the two sets of pick-up parts. Through the design of two sets of pick-up parts, the pick-up speed of the chip is accelerated, thereby improving the transfer efficiency of the chip.
为了进一步提升芯片的转移效率,所述吸盘21具有多个吸口5。如此一个吸盘21可以同时吸取多个芯片,进一步提升了芯片的转移效率。In order to further improve the transfer efficiency of chips, the
现有的芯片大多都是超高精度的,如果在拾取芯片的过程中,芯片受力不均匀很容易使芯片损坏,为了解决该问题所述吸口5处设有环形保护层,所述环形保护层由橡胶材料制成。环形保护层的设计使得芯片的受力更加均匀,减少了芯片因受力不均匀导致芯片损坏的概率。Most of the existing chips are ultra-high-precision. If the chip is subjected to uneven force during the process of picking up the chip, it is easy to damage the chip. In order to solve this problem, the suction port 5 is provided with a ring-shaped protective layer. The layers are made of rubber material. The design of the annular protective layer makes the force of the chip more uniform, reducing the probability of chip damage due to uneven force on the chip.
为了提升装置周围环境的无尘度,所述第一抽风机22还连通有过滤盒71,所述过滤盒71内设有过滤网72。第一抽风机22吸取的污染颗粒到达过滤盒 71后,吸附在过滤网72上,避免了污染颗粒对装置周围的环境造成影响,提升装置周围环境的无尘度。In order to improve the dust-freeness of the environment around the device, the
所属领域的普通技术人员应当理解:以上任何实施例的讨论仅为示例性的,并非旨在暗示本公开的范围(包括权利要求)被限于这些例子;在本发明的思路下,以上实施例或者不同实施例中的技术特征之间也可以进行组合,并存在如上所述的本发明的不同方面的许多其它变化,为了简明它们没有在细节中提供。因此,凡在本发明的精神和原则之内,所做的任何省略、修改、等同替换、改进等,均应包含在本发明的保护范围之内。Those of ordinary skill in the art should understand that the discussion of any of the above embodiments is only exemplary, and is not intended to imply that the scope of the present disclosure (including the claims) is limited to these examples; under the spirit of the present invention, the above embodiments or Combinations of technical features in different embodiments are also possible, and there are many other variations of the different aspects of the invention as described above, which are not provided in detail for the sake of brevity. Therefore, any omission, modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.
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Effective date of registration: 20220129 Address after: 518100 Room 101, building C, No. 156, Xiyuan Road, Pingxi community, Pingdi street, Longgang District, Shenzhen, Guangdong Applicant after: Shenzhen aoweite electromechanical Co.,Ltd. Address before: 241000 room 02, building 1, cuibaiwan, Shimao Binjiang garden, Jinghu District, Wuhu City, Anhui Province Applicant before: Wuhu Derui Electronic Technology Co.,Ltd. |
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Denomination of invention: A chip picking device Granted publication date: 20220301 Pledgee: Shenzhen Rural Commercial Bank Co.,Ltd. Pingshan Sub branch Pledgor: Shenzhen aoweite electromechanical Co.,Ltd. Registration number: Y2024980002586 |