CN110829886B

CN110829886B - A macro-micro linear actuator based on GMM

Info

Publication number: CN110829886B
Application number: CN201911311734.0A
Authority: CN
Inventors: 解甜; 喻曹丰; 黄其扬; 熊美俊; 王顺
Original assignee: Anhui University of Science and Technology
Current assignee: Anhui University of Science and Technology
Priority date: 2019-12-18
Filing date: 2019-12-18
Publication date: 2024-12-10
Anticipated expiration: 2039-12-18
Also published as: NL2025198B1; CN110829886A

Abstract

The present invention relates to a macro-micro linear driver based on GMM, comprising a shell, a permanent magnet, a yoke 1, a fastening screw, a micro-motion coil, a GMM rod, an output rod, a mover bracket, a fixed base, a linear guide rail, a grating, a water-cooling pipe, a micro-motion coil skeleton, a linear rolling bearing, a sliding rod, a yoke 2, a magnetic isolation sleeve, a macro-motion coil, and a limit groove; the macro-motion coil is energized to generate a Lorentz force, which causes the mover to move axially in a stable magnetic field provided by the permanent magnet to obtain a macro displacement, the magnitude of the Lorentz force is proportional to the magnitude of a current in a conductive material, and the macro displacement is adjusted by controlling the current, the macro-motion system is in a stationary state after the initial positioning is completed, the micro-motion system performs compensation control according to the detected system error to achieve secondary positioning, current is passed through the micro-motion coil to generate a stable magnetic field around the GMM rod, the GMM rod is extended axially under the action of the magnetic field to obtain a micro displacement, and the positioning accuracy of the macro motion is compensated, thereby achieving precise positioning of the entire motion.

Description

Macro-micro linear driver based on GMM

Technical Field

The invention relates to the field of precision positioning, in particular to a macro-micro linear driver based on GMM.

Background

The ultra-precise feeding system with high precision and large stroke plays an extremely important role in the fields of modern sophisticated industrial production and scientific research, can greatly improve the processing precision of an ultra-precise machine tool, and has important significance in improving the economic development of national countries in China, shortening the gap between China and developed countries in the ultra-precise processing and detection fields and accelerating the modern construction of national defense industry. The giant magnetostrictive actuator (GiantMagnetostrictiveActuator, GMA) is a micro-displacement output device which converts electromagnetic energy into mechanical energy based on the positive effect of magnetostriction by taking a giant magnetostrictive material (GiantMagnetostrictiveMaterial, GMM) as a core driving element. The displacement driving device overcomes the defects of the traditional displacement driving device, and the high magneto-mechanical conversion efficiency is incomparable with other functional materials. The high-precision control device has the excellent characteristics of large output force, wide working frequency (0-100 KHz), microsecond response speed, high-precision control and the like. However, due to the self-performance of the giant magnetostrictive material, the maximum driving stroke of the giant magnetostrictive driver is small and is generally smaller than 0.2mm, and the requirement of a large stroke is far less than met.

The permanent magnet driving technology is applied to GMA design to obtain a novel large-stroke macro-micro driver, macro-motion and micro-motion are integrated together, the precision positioning performance can be met, the large-stroke performance can be met, and therefore the overall performance of the driver is improved.

Disclosure of Invention

The invention aims to provide a macro-micro linear driver based on GMM, which is used for further improving the working stroke of GMA, widening the application field of the GMA and reducing the influence of temperature change caused by inherent hysteresis characteristics and eddy current characteristics of the GMM on the output precision of the GMA.

The basic idea of the macro-micro composite driving platform is to compensate the motion error of a macro-motion platform with large stroke and coarse precision by using a micro-motion platform with small stroke and high precision, and finally realize macro-micro composite motion with large stroke and high precision.

The invention adopts the following technical scheme for realizing the purpose:

The utility model provides a macro-micro linear driver based on GMM, concretely, the product includes casing (1), permanent magnet (2), yoke 1 (3), fastening screw (4), micro-motion coil (5), GMM stick (6), output pole (7), active cell support (8), fixed base (9), linear guide (10), grating (11), water cooling pipe (12), micro-motion coil skeleton (13), linear antifriction bearing (14), slide bar (15), yoke 2 (16), magnetism isolating sleeve (17), macro-motion coil (18), spacing groove (19), casing (1) is fixed in fixed base (9) one side, permanent magnet (2) are inlayed in casing (1) inboard, constitute stator part, yoke 1 (3) are fixed in active cell support (8) through fastening screw (4), macro-motion coil (18) parcel water cooling pipe (12) are arranged in the intermediate layer of yoke 1 (3) and permanent magnet (2) one end, inside by inside from inside to outside in proper order wrapped micro-motion coil skeleton (13), micro-motion coil (5), 2 (16) constitute the structure, magnet isolating sleeve (17), magnet part and active cell (18) are inlayed in the magnet part, the output rod (7) and the slide rod (15) are positioned at two sides of the axis, the movable element support (8) is arranged on the fixed base (9) through the linear guide rail (10), the travel is limited through the limiting groove (19), and the grating (11) is arranged at the same side of the movable element support (8) and the fixed base (9) and used for measuring displacement. When the input value is larger than the threshold value, the controller controls the macro-movement part to move according to a preset control algorithm, the macro-movement grating ruler feeds back the position information in real time, the controller compares the feedback value with the input value, and the difference is compared with the threshold value, and if the feedback value reaches the compensation range of the micro-movement system, the micro-movement system is started to compensate until the target position is realized.

Preferably, in the macro-micro linear driver based on GMM provided by the invention, in a stable magnetic field provided by a NdFeB N38H tile-shaped permanent magnet (2), a macro moving coil (18) is electrified, and the generated Lorentz force pushes a rotor part to move along the axial direction so as to obtain macro-movement displacement, the magnitude of the Lorentz is in direct proportion to the magnitude of current in a conductive material, and the macro-movement positioning is adjusted by controlling the current.

The macro-micro linear driver based on the GMM is characterized in that a macro-motion system is in a static state after the primary positioning of the macro-motion system is finished, a micro-motion system performs compensation control according to detected system errors to realize secondary positioning, when current is introduced into a micro-motion coil (5), a stable strong magnetic field is generated around a GMM rod (6), the GMM rod (6) stretches axially under the action of the strong magnetic field to obtain micro-displacement, the positioning precision of macro motion can be compensated, and therefore the accurate positioning of the whole motion is realized.

The macro-micro linear driver based on the GMM provided by the invention uses double L-shaped brackets as supports, wherein the rotor bracket (8) is connected with a rotor structure of the driver, the rotor is in linear motion along the X direction after current is introduced into a coil, one side of the fixed base (9) is provided with a stator bracket boss, a linear rolling bearing is arranged in a limit hole of an upper slide bar to reduce linear motion friction force, the two brackets are overlapped and placed, and a linear guide rail (10) and a limit groove (19) are arranged in the middle of the two brackets to further increase motion stability.

Compared with the prior art, the macro-micro linear driver based on the GMM has the beneficial effects that:

The macro-motion system can realize quick and efficient positioning through the grating (11), the stroke of the driver is improved, and the micro-motion system realizes precise feeding and error compensation, so that the motion error of macro-motion with large stroke and coarse precision is compensated by micro-motion with small stroke and high precision, and finally macro-micro composite motion with large stroke and high precision is realized; because the macro-micro linear driver adopts the double L-shaped brackets as the support, the structure is more compact, the positioning is more accurate, and the performance is more stable.

Drawings

FIG. 1 is a schematic diagram of the structural assembly of a GMM-based macro-micro linear drive of the present invention;

In the drawing, a shell, a 2-permanent magnet, a 3-magnet yoke 1, 4-fastening screw, a 5-micro-motion coil, a 6-GMM rod, a 7-output rod, an 8-rotor support, a 9-fixed base, a 10-linear guide rail, an 11-grating, a 12-water cooling pipe, a 13-micro-motion coil framework, a 14-linear rolling bearing, a 15-sliding rod, a 16-magnet yoke 2, 17-magnetism isolating sleeve, an 18-macro-motion coil and a 19-limit groove are arranged.

Detailed Description

The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

In the description of the present invention, it should be understood that the terms "disposed," "inner," "end," "inner," and the like indicate an orientation or a positional relationship, and are merely for convenience in describing the present embodiment and simplifying the description, but do not indicate or imply that the components or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention.

Referring to fig. 1, this embodiment provides a macro-micro linear driver based on GMM, including a housing (1), a permanent magnet (2), a magnetic yoke 1 (3), a fastening screw (4), a micro-motion coil (5), a GMM rod (6), an output rod (7), a rotor support (8), a fixed base (9), a linear guide rail (10), a grating (11), a water cooling pipe (12), a micro-motion coil skeleton (13), a linear rolling bearing (14), a sliding rod (15), a magnetic yoke 2 (16), a magnetism isolating sleeve (17), a macro-motion coil (18), a limiting groove (19), wherein the housing (1) is fixed on one side of the fixed base (9), the permanent magnet (2) is embedded in the inner side of the housing (1) to form a stator part, the magnetic yoke 1 (3) is fixed in the rotor support (8) through the fastening screw (4), the macro-motion coil (18) wraps the water cooling pipe (12) and is arranged in an interlayer of one end of the magnetic yoke 1 (3) and the permanent magnet (2), the micro-motion coil rod (6), the micro-motion coil skeleton (13), the micro-motion coil (16) is wrapped inside the magnetic yoke 1 (2), the micro-motion rod (16), the micro-motion coil (2) is sequentially wrapped inside the micro-motion coil (1, the micro-motion coil (2) and the magnet (16), the magnetic yoke (16) is embedded in the center part, and the magnetism isolating sleeve (17 is embedded in the magnetic yoke 1 The macro moving coil (18) forms a rotor part, the output rod (7) and the sliding rod (15) are positioned on two sides of the axis, the rotor support (8) is arranged on the fixed base (9) through the linear guide rail (10), the travel is limited through the limiting groove (19), and the grating (11) is arranged on the same side of the rotor support (8) and the fixed base (9) for measuring displacement. When the input value is larger than the threshold value, the controller controls the macro-movement part to move according to a preset control algorithm, the macro-movement grating ruler feeds back the position information in real time, the controller compares the feedback value with the input value, and if the feedback value reaches the compensation range of the micro-movement system, the micro-movement system is started to compensate until the target position is realized.

As an optimal mode, the macro-micro linear driver based on the GMM provided by the invention has the advantages that the macro-moving coil is electrified, and the generated Lorentz force enables the rotor part to axially move in a stable magnetic field provided by the NdFeB N38H tile-shaped permanent magnet to obtain macro-moving displacement, the magnitude of Lorentz is in direct proportion to the magnitude of current in the conductive material, and the macro-moving displacement positioning is adjusted by controlling the current;

As an optimal mode, the macro-micro linear driver based on the GMM provided by the invention has the advantages that when the macro-micro linear driver is in a static state after the primary positioning of the macro-micro linear driver is finished, the micro-micro linear driver is in compensation control according to the detected system error to realize secondary positioning, when current is introduced into the micro-motion coil, a stable strong magnetic field is generated around the GMM rod, the GMM rod is axially stretched under the action of the strong magnetic field to obtain micro displacement, and the positioning precision of macro motion can be compensated, so that the accurate positioning of the whole motion is realized.

As a preferable mode of the invention, the macro-micro linear driver based on the GMM provided by the invention adopts a water-cooling temperature control method to control the temperature, the magnetic yoke 1 serves as a framework, a layer of copper pipe with the diameter of 5mm is wound on the outer side for water-cooling and cooling, heat generated by a coil is taken away, the magnetic circuit is not influenced by magnetic conduction in the driver, the copper pipe is wound in a double-spiral crossed manner, and the water convection heat exchange efficiency is improved under the condition of ensuring the compactness of winding.

As a preferable mode, the macro-micro linear driver based on the GMM provided by the invention uses a double L-shaped bracket as a support, the active cell bracket is connected with an active cell structure of the driver, coils do linear motion along the X direction after current is introduced, a stator bracket boss is arranged on one side of a fixed base, a linear rolling bearing is arranged in a limit hole of an upper slide bar to reduce linear motion friction force, two brackets are overlapped and placed, and a linear guide rail and a limit groove are arranged in the middle of the brackets to further increase motion stability.

One specific application process of this embodiment is:

the axial displacement 15.34432mm displacement is realized by the following steps:

(1) Starting the water cooling device, and releasing the set screw to enable the shaft to obtain axial freedom degree;

(2) Inputting a target value 15.34432mm into a control panel;

(3) The program autonomously recognizes the difference between the current displacement and the target value, compares the difference with a threshold value (30 mu m), activates the macro-moving coil when the difference is larger than the threshold value, and introduces about 1.5A current (the specific value of the current is controlled by the program of a given algorithm), when the difference is smaller than the threshold value, the precision of the macro-moving coil cannot meet the precision required by the residual displacement, activates the micro-moving coil, controls the program to introduce proper current to the micro-moving coil (the size is given by the algorithm in the program), and the micro-moving structure compensates the residual displacement until the displacement reaches 15.34423mm.

It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is provided for clarity only, and that the disclosure is not limited to the embodiments described in detail below, and that the embodiments described in the examples may be combined as appropriate to form other embodiments that will be apparent to those skilled in the art.

Claims

1. A macro-micro linear actuator based on GMM, comprising a housing (1), a permanent magnet (2), a yoke 1 (3), a fastening screw (4), a micro-motion coil (5), a GMM rod (6), an output rod (7), a mover bracket (8), a fixed base (9), a linear guide rail (10), a grating (11), a water cooling tube (12), a micro-motion coil skeleton (13), a linear rolling bearing (14), a sliding rod (15), a yoke 2 (16), a magnetic isolation sleeve (17), a macro-motion coil (18), The housing (1) is fixed on one side of the fixed base (9), the permanent magnet (2) is embedded in the inner side of the housing (1), and the stator part is formed. The yoke 1 (3) is fixed on the mover bracket (8) by means of a fastening screw (4). The macro-motion coil (18) is wrapped with a water cooling tube (12) and is placed in the sandwich between the yoke 1 (3) and one end of the permanent magnet (2). The GMM rod (6), the micro-motion coil frame (13), the micro-motion coil (5), the yoke 2 (16) are wrapped in the yoke 1 (3) from the inside to the outside. ) form a micro-motion structure, the micro-motion structure is embedded and installed in the central part, and together with the magnetic isolation sleeve (17), the magnetic yoke 1 (3), and the macro-motion coil (18) form a mover part, the output rod (7) and the slide rod (15) are located on both sides of the axis, the mover bracket (8) is installed on the fixed base (9) through a linear guide rail (10), and the stroke is limited by a limit groove (19), and a grating (11) is installed on the same side of the mover bracket (8) and the fixed base (9) to measure the displacement; the controller will set a threshold value (30 microns), and when the displacement information is input, the controller will start the macro-micro judgment, when the input value is less than the threshold, the micro-motion part is started to move, and the micro-motion grating ruler performs position feedback in real time to form a closed-loop control movement; when the input value is greater than the threshold, the controller controls the macro-motion part to move according to a predetermined control algorithm, and the macro-motion grating ruler feeds back the position information in real time, the controller calculates the difference between the feedback value and the input value, and compares it with the threshold value, if it reaches the range that the micro-motion system can compensate, the micro-motion system is started to compensate until the target position is achieved.

2. According to claim 1, a macro-micro linear actuator based on GMM is characterized in that: in the stable magnetic field provided by the NdFeB N38H tile-shaped permanent magnet (2), the macro-dynamic coil (18) is energized, and the generated Lorentz force pushes the mover part to move axially to obtain a macro-dynamic displacement. The size of the Lorentz force is proportional to the size of the current in the conductive material, and the macro-displacement positioning is adjusted by controlling the current.

3. According to claim 1, a macro-micro linear actuator based on GMM is characterized in that: after the initial positioning of the macro-motion system is completed, the macro-motion system is in a static state, and the micro-motion system performs compensation control according to the detected system error to achieve secondary positioning. When current is passed through the micro-motion coil (5), a stable strong magnetic field is generated around the GMM rod (6). Under the action of the strong magnetic field, the GMM rod (6) will stretch axially to obtain a micro-displacement, which can compensate for the positioning accuracy of the macro-motion, thereby achieving precise positioning of the entire movement.

4. According to claim 1, a macro-micro linear actuator based on GMM is characterized in that: the temperature control adopts a water cooling temperature control method, the yoke 1 (3) serves as a skeleton, and a layer of copper tube with a diameter of 5 mm is wound on the outside for water cooling to take away the heat generated by the coil. When installed in the actuator, it will not affect the magnetic circuit due to magnetic conduction; the copper tube is wound in a double helix cross-winding manner, which will also improve the water convection heat transfer efficiency while ensuring tight winding.

5. According to claim 1, a macro-micro linear actuator based on GMM is characterized in that: a double "L"-shaped bracket is used as a support, the mover bracket (8) is connected to the mover structure of the actuator, and after the coil is energized with current, it moves linearly along the X direction; a stator bracket boss is provided on one side of the fixed base (9), and a linear rolling bearing is installed in the upper slide rod limit hole to reduce the friction of linear motion; the two brackets are stacked and placed, and a linear guide rail (10) and a limit groove (19) are installed in the middle to further increase the smoothness of motion.