CN110795414B - Alarm analysis method and device for semiconductor equipment - Google Patents
Alarm analysis method and device for semiconductor equipment Download PDFInfo
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- CN110795414B CN110795414B CN201911058206.9A CN201911058206A CN110795414B CN 110795414 B CN110795414 B CN 110795414B CN 201911058206 A CN201911058206 A CN 201911058206A CN 110795414 B CN110795414 B CN 110795414B
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Abstract
The invention provides a semiconductor equipment alarm analysis method and a device, wherein the method comprises the following steps: after alarm is triggered, collecting alarm information corresponding to the alarm according to alarm information items preset in an alarm configuration file, and storing the alarm information in an alarm information database; searching the alarm information in the database according to the alarm serial number of the alarm, and searching operation information corresponding to the alarm information in an operation log according to the alarm serial number and the alarm information; comparing the operation information with the alarm information, and determining an alarm reason generated by the alarm; and generating and outputting alarm prompt information, wherein the alarm prompt information comprises the alarm information and the alarm reason. The method and the device can analyze the reason of the alarm problem, provide basis for searching a solution, save the cost of alarm processing and improve the efficiency of alarm processing.
Description
Technical Field
The invention relates to the field of semiconductor manufacturing, in particular to a semiconductor equipment alarm analysis method and device.
Background
At present, the equipment software problems are generally divided into software deployment problems and software operation problems, and the software operation problems comprise program design defects, data errors caused by component faults, logic errors caused by misoperation, and alarms can be generated by common characteristics of the software operation problems.
When an application is abnormal and needs user intervention or notifies the user, an alarm needs to be thrown to the user. The user carries out board processing according to alarm information, and alarm information integrality and accuracy can actively help the customer accurately to find the problem reason, according to the reason, finds the solution, reports to the police and resumes.
The existing alarm information is stored in a local file, the alarm information only comprises simple alarm information and a general problem solving direction, and when equipment gives an alarm, a client cannot find out the reason of the alarm problem and an accurate processing measure according to the current alarm information; when a customer needs to deeply analyze the reason of the alarm problem, the customer service staff needs to feed back the situation to the software staff, and after the software staff obtains the problem solution, the customer service staff verifies the problem solution without referring to the solution of the historical problem, so that the number of the staff is large, the communication cost is high, the convenience is poor, and the reusability is poor.
Disclosure of Invention
The invention aims to at least solve one technical problem in the prior art and provides a semiconductor equipment alarm analysis method and device.
To achieve the object of the present invention, there is provided a semiconductor device alarm analyzing method, the method including:
after alarm is triggered, collecting alarm information corresponding to the alarm according to alarm information items preset in an alarm configuration file, and storing the alarm information in an alarm information database;
searching the alarm information in the database according to the alarm serial number of the alarm, and searching operation information corresponding to the alarm information in an operation log according to the alarm serial number and the alarm information;
comparing the operation information with the alarm information, and determining an alarm reason generated by the alarm;
and generating and outputting alarm prompt information, wherein the alarm prompt information comprises the alarm information and the alarm reason.
Preferably, the alert information item includes at least one of: executing a flow, a flow normal execution time, a flow keyword, a data item normal value range and a data item keyword;
the alarm information includes at least one of: the execution flow related to the alarm, the normal execution time of the execution flow, the flow key words of the execution flow, the data items related to the alarm, the normal value range of the data items and the data item key words of the data items;
the operation information includes at least one of: the execution flow involved in the alarm, the actual execution time of the execution flow, the data item involved in the alarm, the actual value of the data item.
Preferably, the searching for the operation information corresponding to the alarm information in an operation log according to the alarm number and the alarm information includes:
according to the alarm number, finding a position corresponding to the alarm in the operation log;
searching upwards from the position based on the process key words of the execution process related to the alarm, searching the execution process in the running log, if the execution process is found, further acquiring the actual execution time of the execution process, and if the execution process cannot be found, recording the execution process missing;
and searching the data item in the data file of the operation log based on the data item key word related to the alarm, and acquiring the actual value of the data item.
Preferably, the comparing the operation information with the alarm information and determining the reason for the alarm generated by the alarm includes:
judging whether the operation information contains an execution process related to the alarm, if not, determining the reason of the alarm comprises the following steps: a flow execution exception;
if the execution information contains the execution flow related to the alarm, further judging whether the normal execution time of the execution flow related to the alarm is the same as the actual execution time of the execution flow, and if not, determining the reason of the alarm comprises the following steps: the execution time of the process is abnormal;
judging whether the actual value of the data item related to the alarm is within the normal value range of the data item, if not, determining the reason of the alarm comprises the following steps: the data item value is abnormal.
Preferably, a plurality of troubleshooting schemes for different alarm reasons are preset in the alarm configuration file;
generating and outputting alarm prompt information, wherein the alarm prompt information comprises the alarm information and the reason of the alarm, and the method further comprises the following steps:
acquiring a troubleshooting scheme corresponding to the alarm reason from the alarm configuration file;
and generating and outputting the alarm prompt information, wherein the alarm prompt information comprises the alarm information, the alarm reason and a troubleshooting scheme corresponding to the alarm reason.
Preferably, the method further comprises the following steps: and counting the occurrence frequency of each alarm reason, and outputting the alarm prompt information and the occurrence frequency of the alarm reason included in the alarm prompt information.
According to an aspect of the present invention, there is also provided a semiconductor device alarm analyzing apparatus, the apparatus including:
the information collection module is used for collecting alarm information corresponding to the alarm according to alarm information items preset in an alarm configuration file after the alarm is triggered, and storing the alarm information in an alarm information database;
the information searching module is used for searching the alarm information in the database according to the alarm serial number of the alarm and searching the operation information corresponding to the alarm information in the operation log according to the alarm serial number and the alarm information;
the information comparison module is used for comparing the operation information with the alarm information and determining the alarm reason generated by the alarm;
and the alarm prompt module is used for generating and outputting alarm prompt information, and the alarm prompt information comprises the alarm information and the alarm reason.
Preferably, the alert information item includes at least one of: executing a flow, a flow normal execution time, a flow keyword, a data item normal value range and a data item keyword;
the alarm information includes at least one of: the execution flow related to the alarm, the normal execution time of the execution flow, the flow key words of the execution flow, the data items related to the alarm, the normal value range of the data items and the data item key words of the data items;
the operational information includes at least one of: the execution flow involved in the alarm, the actual execution time of the execution flow, the data item involved in the alarm, the actual value of the data item.
Preferably, the information searching module comprises:
the first searching module is used for searching the alarm information in the database according to the alarm serial number of the alarm;
the second searching module is used for finding the position corresponding to the alarm in the operation log according to the alarm number; searching upwards from the position based on the process keywords of the execution process related to the alarm, searching the execution process in the running log, if the execution process is searched, further acquiring the actual execution time of the execution process, and if the execution process cannot be searched, recording the deletion of the execution process; and searching the data item in the data file of the operation log based on the data item key word related to the alarm, and acquiring the actual value of the data item.
Preferably, the information comparison module includes:
a first determining module, configured to determine whether the execution flow related to the alarm is included in the operation information, and if not, determining a reason for the alarm includes: a flow execution exception; if the execution information contains the execution flow related to the alarm, further judging whether the normal execution time of the execution flow related to the alarm is the same as the actual execution time of the execution flow, and if not, determining the reason of the alarm comprises the following steps: the execution time of the process is abnormal;
the second judging module is used for judging whether the actual value of the data item related to the alarm is in the normal value range of the data item, and if not, the determination of the reason of the alarm comprises the following steps: the data item is numerically anomalous.
The invention has the following beneficial effects:
according to the technical scheme of the semiconductor equipment alarm analysis method and device, after alarm is triggered, alarm information corresponding to alarm is collected and stored according to alarm items configured in an alarm configuration file, then the alarm information is searched in a database according to the alarm number of the alarm, and operation information corresponding to the alarm information is searched in an operation log according to the alarm number and the alarm information; finally, the alarm reason generated by the alarm is determined by comparing the operation information with the alarm information, and the alarm prompt information containing the alarm information and the alarm reason is generated and output. Therefore, by comparing the operation information with the alarm information, the place where the operation information and the alarm information are inconsistent is found, the reason for the alarm problem can be analyzed, the basis is provided for searching a solution, the cost of alarm processing is saved, and the efficiency of alarm processing is improved.
Drawings
FIG. 1 is a block flow diagram of a method for alarm analysis of a semiconductor device according to an embodiment of the present invention;
FIG. 2 is a block diagram of a process for searching for operational information in an embodiment of the present invention;
FIG. 3 is a block diagram of a process for determining a cause of an alarm in an embodiment of the present invention;
FIG. 4 is a block flow diagram of a method for alarm analysis of a semiconductor device according to another embodiment of the present invention;
fig. 5 is a schematic structural diagram of a semiconductor device alarm analysis apparatus according to an embodiment of the present invention.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the following describes in detail a semiconductor device alarm analysis method and apparatus provided by the present invention with reference to the accompanying drawings.
As shown in fig. 1, a flow chart of a semiconductor device alarm analysis method according to an embodiment of the present invention is shown, where in the embodiment of the present invention, the method includes:
step 100: and after the alarm is triggered, collecting alarm information corresponding to the alarm according to alarm information items preset in the alarm configuration file.
In a preferred embodiment of the invention, the alert information item comprises at least one of: executing the flow, executing the flow normally, processing keywords, data items, normal value ranges of the data items and data item keywords. In the preferred embodiment, alarm information items which are set in the alarm configuration file and need to be collected when an alarm occurs are added, and besides the items such as the conventional alarm description, the alarm level, the alarm type and the like, information such as an execution flow, a flow normal execution time, flow keywords, data items, a data item normal value range, data item keywords and the like also needs to be collected, so that more detailed and specific analysis and judgment can be performed. Of course, according to different requirements, which items can be flexibly set is specifically set, and the present invention is not particularly limited.
Corresponding to the alarm information item, the collected alarm information may include at least one of: the method comprises the following steps of executing a flow related to alarm, normally executing time of the executing flow, a flow keyword of the executing flow, a data item related to alarm, a normal value range of the data item and a data item keyword of the data item.
Step 101: and storing the alarm information in an alarm information database.
Step 102: and searching alarm information in the database according to the alarm serial number of the alarm. The alarm number can be processed as a part of the alarm information, or can be independently processed as an index information, and can be flexibly selected.
In the embodiment of the invention, the acquired alarm information is stored in a database form, and the acquired alarm information is stored in the database first and then retrieved in the database based on the alarm number when the alarm information needs to be used. Over time, a large amount of data is accumulated, thereby providing a data base for subsequent analysis and processing.
Step 103: and searching the operation information corresponding to the alarm information in the operation log according to the alarm serial number and the alarm information.
Correspondingly, the operation information may include at least one of: an execution flow to which the alarm relates, an actual execution time of the execution flow, a data item to which the alarm relates, an actual value of the data item.
Step 104: comparing the operation information with the alarm information, and determining the alarm reason generated by the alarm;
step 105: and generating and outputting alarm prompt information, wherein the alarm prompt information comprises alarm information and alarm reasons.
In a preferred embodiment of the present invention, as shown in fig. 2, the step of searching the operation information in step 103 may include:
step 1030: and finding the position corresponding to the alarm in the operation log according to the alarm number.
Step 1031: and searching upwards from the position based on the process key words of the execution process related to the alarm, and searching the execution process in the running log.
Step 1032: judging whether the execution flow is found; if the execution flow is found, go to step 1033; if the execution flow is not found, go to step 1036;
Step 1034: and searching the data item in a data file of the running log based on the data item key word related to the alarm, and acquiring the actual value of the data item.
Step 1035: and (6) ending.
Step 1036: the absence of the execution flow is recorded, and the step 1034 is returned to be executed.
The search of the running information is mainly performed based on the keywords, the search of the execution process is performed based on the process keywords, and the search of the data items is performed based on the data item keywords. In particular, if the corresponding flow that cannot be found based on the flow keyword is found, it is necessary to record that the execution flow is missing.
In a preferred embodiment of the present invention, as shown in fig. 3, the determining 104 the reason for the alarm includes:
step 1040: judging whether the operation information contains an execution flow related to the alarm or not, and if not, executing the step 1041; if the operation information includes the execution flow related to the alarm, step 1042 is executed.
Step 1041: determining the reason for the alarm comprises: the flow performs an exception and further proceeds to step 105.
Step 1042: judging whether the normal execution time of the execution flow related to the alarm is the same as the actual execution time of the execution flow, if not, executing the step 1043; if so, go to step 1044.
Due to different fault tolerance requirements, the normal execution time and the actual execution time may not be required to be completely consistent, and the actual execution time may have a fluctuation range, that is, within a range centered on the normal execution time, for example, a difference of 0.1% to 10% may be allowed.
Step 1043: determining the reason for the alarm comprises: the flow executes a time exception and further executes step 105.
Step 1044: judging whether the actual value of the data item related to the alarm is in the normal value range of the data item, if not, executing a step 1045; if so, step 1046 is performed.
Step 1045: determining the reason for the alarm comprises: the data item value is abnormal and step 105 is further performed.
Step 1046: and (6) ending.
In the preferred embodiment, the most common alarm reasons are preferentially judged based on the collected alarm information and the corresponding operation information, that is, the process execution is abnormal (the process which should be executed is not executed), the process execution time is abnormal (the process which should be executed at a specific time is not executed on time), and the data item value is abnormal (the specific parameter value corresponding to the process is not within a normal range). Of course, the alarm reasons are not limited to the above, and according to different requirements, the alarm information items in the alarm configuration file can be flexibly set, so that specific information is obtained when an alarm occurs, and then corresponding operation information is obtained, and thus, when the alarm reasons are judged, the information can be pertinently judged, and various alarm reasons can be determined.
In the technical scheme provided by the embodiment of the invention, after alarm is triggered, alarm information corresponding to alarm is collected and stored according to alarm items configured in an alarm configuration file, then the alarm information is searched in a database according to an alarm number of the alarm, and operation information corresponding to the alarm information is searched in an operation log according to the alarm number and the alarm information; finally, the alarm reason generated by the alarm is determined by comparing the operation information with the alarm information, and the alarm prompt information containing the alarm information and the alarm reason is generated and output. Therefore, by comparing the operation information with the alarm information, a place where the operation information and the alarm information are inconsistent is found, the reason for the alarm problem can be analyzed, a basis is provided for searching a solution, the cost of alarm processing is saved, and the efficiency of alarm processing is improved.
After the reason for the alarm is determined, for some typical reasons for the alarm, it can be considered to automatically troubleshoot the alarm based on a preset template, i.e., to automatically resolve the corresponding alarm. As shown in fig. 4, a flow chart of an alarm analysis method according to another embodiment of the present invention is shown, where in the embodiment of the present invention, the alarm analysis method includes:
step 200: and after the alarm is triggered, collecting alarm information corresponding to the alarm according to alarm information items preset in the alarm configuration file.
Step 201: and storing the alarm information in an alarm information database.
Step 202: and searching alarm information in the database according to the alarm serial number of the alarm.
Step 203: and searching the operation information corresponding to the alarm information in the operation log according to the alarm serial number and the alarm information.
Step 204: and comparing the operation information with the alarm information to determine the alarm reason generated by the alarm.
Step 205: and acquiring a preset troubleshooting scheme corresponding to the alarm reason from the alarm configuration file according to the determined alarm reason.
Step 206: and generating and outputting alarm prompt information, wherein the alarm prompt information comprises alarm information, alarm reasons and troubleshooting schemes corresponding to the alarm reasons.
In the preferred embodiment, the troubleshooting schemes corresponding to some alarm reasons are preset in the alarm configuration file, and after the specific alarm reason is determined, the corresponding troubleshooting schemes can be obtained from the alarm configuration file and displayed to the user so as to assist the user in solving the alarm. Of course, the troubleshooting scheme may also be stored in other locations, as long as the troubleshooting scheme can be obtained after the alarm reason is determined, and the invention is not particularly limited.
In a preferred embodiment of the present invention, the occurrence frequency of each alarm reason can be counted based on the data stored in the database and the judgment result of the reason of each alarm. When the alarm prompt information is output, the occurrence frequency of the alarm reason included in the alarm prompt information can also be output at the same time. The occurrence frequency of each alarm reason can be counted and can be used as a reference for a user, and the state of the semiconductor equipment can be reflected from one side, so that the user can solve the alarm in a more targeted manner, and even maintain, repair and improve the semiconductor equipment.
In a preferred embodiment of the present invention, the troubleshooting plan can be continuously modified, updated, deleted, added, etc. according to the technological progress, the feedback of the client, the improvement of the equipment, etc., so as to continuously improve the auxiliary effect of the troubleshooting plan.
Taking a water injection monitoring project commonly seen in semiconductor equipment as an example, in the water flow alarm project, the execution process may include: water injection, water drainage, a water pump switch and the like; the data items may include: water level high and low signals, water pump switch signals and the like. Suppose in a water injection monitoring alarm, the alarm information includes: the water quantity is high or low, and the reasonable value is off; but in the run information: the actual value of the water volume signal is none; the reason for determining the alarm of the current alarm item may be that the actual value of the water level high-low signal does not accord with a reasonable value, i.e. the data item value is abnormal.
Aiming at the fact that the actual value of the water volume high-low signal does not accord with the reasonable value, the checking scheme can be three types:
examination scheme 1: the liquid level sensor is checked to be at a high liquid level due to not descending along with the water level.
Examination scheme 2: the troubleshooting water-filling thread time configuration exceeds 120s.
Examination scheme 3: and (6) troubleshooting the signal fault of the sensor.
The user can refer to the troubleshooting schemes to process the alarm and feed back the effect aiming at each troubleshooting scheme so as to manage the troubleshooting schemes subsequently.
According to the semiconductor setting alarm analysis method provided by the embodiment of the invention, the troubleshooting schemes of different alarm reasons are configured in the configuration file, and the troubleshooting schemes corresponding to the alarm reasons are output, so that a basis is provided for a client to find an alarm solution and carry out alarm recovery. Furthermore, the occurrence frequency of the alarm reasons is counted, and the alarm related flow and data are visually displayed, so that a customer can be helped to quickly grasp the operation logic of the semiconductor equipment.
Correspondingly, the present invention further provides a semiconductor device alarm analysis apparatus, as shown in fig. 5, which is a schematic structural diagram of the semiconductor device alarm analysis apparatus according to an embodiment of the present invention, in this embodiment, the semiconductor device alarm analysis apparatus includes: the system comprises an information collection module 1, an information search module 2, an information comparison module 3 and an alarm prompt module 4.
The information collection module 1 is used for collecting alarm information corresponding to alarm according to alarm information items preset in the alarm configuration file after the alarm is triggered, and storing the alarm information in an alarm information database.
The information searching module 2 is used for searching alarm information in the database according to the alarm number of the alarm, and searching operation information corresponding to the alarm information in the operation log according to the alarm number and the alarm information.
The information comparison module 3 is used for comparing the operation information with the alarm information and determining the alarm reason generated by the alarm.
The alarm prompt module 4 is used for generating and outputting alarm prompt information, wherein the alarm prompt information comprises alarm information and alarm reasons.
Optionally, the alert information item comprises at least one of: executing the flow, executing the flow normally, processing keywords, data items, normal value ranges of the data items and data item keywords.
Optionally, the alert information comprises at least one of: the method comprises the steps of executing the flow related to the alarm, normally executing the executing flow, process keywords of the executing flow, data items related to the alarm, normal value ranges of the data items and data item keywords of the data items.
Optionally, the operation information comprises at least one of: the execution flow involved in the alarm, the actual execution time of the execution flow, the data item involved in the alarm, the actual value of the data item.
Optionally, the information searching module 2 includes: a first lookup module 21 and a second lookup module 22.
The first searching module 21 is used for searching alarm information in a database according to the alarm serial number of the alarm;
the second searching module 22 is used for finding the position corresponding to the alarm in the operation log according to the alarm number; searching upwards from the position based on a process keyword of an execution process related to alarming, searching the execution process in an operation log, if the execution process is searched, further acquiring the actual execution time of the execution process, and if the execution process cannot be searched, recording the deletion of the execution process; and searching the data item in the data file of the operation log based on the data item key word related to the alarm, and acquiring the actual value of the data item.
Optionally, the information comparing module 3 includes: a first determining module 31 and a second determining module 32.
The first judging module 31 is configured to judge whether the execution flow related to the alarm is included in the operation information, and if not, determining the reason for the alarm includes: a flow execution exception; if the operation information contains the execution flow related to the alarm, further judging whether the normal execution time of the execution flow related to the alarm is the same as the actual execution time of the execution flow, and if not, determining the reason of the alarm comprises the following steps: the flow execution time is abnormal.
The second judging module 32 is configured to judge whether an actual value of a data item involved in the alarm is within a normal value range of the data item, and if not, determine the reason for the alarm includes: the data item is numerically anomalous.
Optionally, a plurality of troubleshooting schemes for different alarm reasons are preset in the alarm configuration file.
The alarm prompt module 4 is further configured to obtain a troubleshooting scheme corresponding to the alarm reason from the alarm configuration file. When the alarm prompt module 4 generates and outputs the alarm prompt information, the alarm prompt information comprises alarm information, an alarm reason and a troubleshooting scheme corresponding to the alarm reason.
Optionally, the semiconductor device alarm analysis apparatus further includes:
and the statistical module is used for counting the occurrence frequency of each alarm reason.
The alarm prompt module 4 is further configured to output the alarm prompt information and output the occurrence frequency of the alarm reason included in the alarm prompt information.
After the alarm is triggered, the alarm analysis device for the semiconductor equipment provided by the embodiment of the invention collects and stores alarm information corresponding to the alarm according to alarm items configured in an alarm configuration file, searches the alarm information in a database according to an alarm number of the alarm, and searches operation information corresponding to the alarm information in an operation log according to the alarm number and the alarm information; finally, the alarm reason generated by the alarm is determined by comparing the operation information with the alarm information, and the alarm prompt information containing the alarm information and the alarm reason is generated and output. Therefore, the place where the operation information and the alarm information are inconsistent is found by comparing, the reason for generating the alarm problem can be analyzed, the basis is provided for searching a solution, the cost of alarm processing is saved, and the efficiency of alarm processing is improved.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and scope of the invention, and such modifications and improvements are also considered to be within the scope of the invention.
Claims (8)
1. A semiconductor device alarm analysis method, the method comprising:
after alarm is triggered, collecting alarm information corresponding to the alarm according to alarm information items preset in an alarm configuration file, and storing the alarm information in an alarm information database;
searching the alarm information in the database according to the alarm serial number of the alarm, and searching operation information corresponding to the alarm information in an operation log according to the alarm serial number and the alarm information;
comparing the operation information with the alarm information, and determining an alarm reason generated by the alarm;
generating and outputting alarm prompt information, wherein the alarm prompt information comprises the alarm information and the alarm reason;
the alarm information item includes at least one of: executing a flow, a flow normal execution time, a flow keyword, a data item normal value range and a data item keyword;
the alarm information includes at least one of: the execution flow related to the alarm, the normal execution time of the execution flow, the flow key words of the execution flow, the data items related to the alarm, the normal value range of the data items and the data item key words of the data items;
the operation information includes at least one of: the execution flow involved by the alarm, the actual execution time of the execution flow, the data item involved by the alarm, the actual value of the data item.
2. The alarm analysis method of claim 1, wherein the searching for the operation information corresponding to the alarm information in an operation log according to the alarm number and the alarm information comprises:
according to the alarm number, finding a position corresponding to the alarm in the running log;
searching upwards from the position based on the process keywords of the execution process related to the alarm, searching the execution process in the running log, if the execution process is searched, further acquiring the actual execution time of the execution process, and if the execution process cannot be searched, recording the deletion of the execution process;
and searching the data item in the data file of the operation log based on the data item key word related to the alarm, and acquiring the actual value of the data item.
3. The alarm analysis method of claim 1, wherein the comparing the operational information with the alarm information to determine the cause of the alarm generated by the alarm comprises:
judging whether the execution flow related to the alarm is contained in the operation information, if not, determining the reason of the alarm comprises the following steps: a flow execution exception;
if the execution information contains the execution flow related to the alarm, further judging whether the normal execution time of the execution flow related to the alarm is the same as the actual execution time of the execution flow, and if not, determining the reason of the alarm comprises the following steps: the execution time of the process is abnormal;
judging whether the actual value of the data item related to the alarm is within the normal value range of the data item, if not, determining the reason of the alarm comprises the following steps: the data item value is abnormal.
4. The alarm analysis method according to claim 1, wherein a plurality of troubleshooting schemes for different alarm reasons are preset in the alarm configuration file;
generating and outputting alarm prompt information, wherein the alarm prompt information comprises the alarm information and the reason of the alarm, and the method further comprises the following steps:
acquiring a troubleshooting scheme corresponding to the alarm reason from the alarm configuration file;
and generating and outputting the alarm prompt information, wherein the alarm prompt information comprises the alarm information, the alarm reason and a troubleshooting scheme corresponding to the alarm reason.
5. The alarm analysis method of claim 1, further comprising:
and counting the occurrence frequency of each alarm reason, and outputting the alarm prompt information and the occurrence frequency of the alarm reason included in the alarm prompt information.
6. A semiconductor device alarm analysis apparatus, the apparatus comprising:
the information collection module is used for collecting alarm information corresponding to the alarm according to alarm information items preset in an alarm configuration file after the alarm is triggered, and storing the alarm information in an alarm information database;
the information searching module is used for searching the alarm information in the database according to the alarm serial number of the alarm and searching the operation information corresponding to the alarm information in the operation log according to the alarm serial number and the alarm information;
the information comparison module is used for comparing the operation information with the alarm information and determining the alarm reason generated by the alarm;
the alarm prompting module is used for generating and outputting alarm prompting information, and the alarm prompting information comprises the alarm information and the alarm reason;
the alarm information item includes at least one of: executing a flow, a flow normal execution time, a flow keyword, a data item normal value range and a data item keyword;
the alarm information includes at least one of: the execution flow related to the alarm, the normal execution time of the execution flow, the flow key word of the execution flow, the data item related to the alarm, the normal value range of the data item and the data item key word of the data item;
the operational information includes at least one of: the execution flow involved by the alarm, the actual execution time of the execution flow, the data item involved by the alarm, the actual value of the data item.
7. The alarm analysis device of claim 6, wherein the information lookup module comprises:
the first searching module is used for searching the alarm information in the database according to the alarm serial number of the alarm;
the second searching module is used for finding the position corresponding to the alarm in the running log according to the alarm number; searching upwards from the position based on the process keywords of the execution process related to the alarm, searching the execution process in the running log, if the execution process is searched, further acquiring the actual execution time of the execution process, and if the execution process cannot be searched, recording the deletion of the execution process; and searching the data item in the data file of the operation log based on the data item key word related to the alarm, and acquiring the actual value of the data item.
8. The alarm analysis device of claim 6, wherein the information comparison module comprises:
a first determining module, configured to determine whether the execution flow related to the alarm is included in the operation information, and if not, determining the reason for the alarm includes: a flow execution exception; if the execution information contains the execution flow related to the alarm, further judging whether the normal execution time of the execution flow related to the alarm is the same as the actual execution time of the execution flow, and if not, determining the reason of the alarm comprises the following steps: the execution time of the process is abnormal;
the second judging module is used for judging whether the actual value of the data item related to the alarm is in the normal value range of the data item, and if not, the determination of the reason of the alarm comprises the following steps: the data item is numerically anomalous.
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102568147A (en) * | 2010-12-29 | 2012-07-11 | 沈阳中科博微自动化技术有限公司 | Alarm method for software failure of semiconductor device |
| CN103810823A (en) * | 2014-02-27 | 2014-05-21 | 神华集团有限责任公司 | Alarm processing method and device |
| CN104301689A (en) * | 2014-10-29 | 2015-01-21 | 杭州凯达电力建设有限公司 | Method and system for power monitoring |
| CN107908525A (en) * | 2017-10-13 | 2018-04-13 | 深圳前海微众银行股份有限公司 | Alert processing method, equipment and readable storage medium storing program for executing |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11170326A (en) * | 1997-12-15 | 1999-06-29 | Fanuc Ltd | Alarm analyzing method of injection molder and analyzing device. |
| JP4982035B2 (en) * | 2004-03-31 | 2012-07-25 | 東京瓦斯株式会社 | Alarm |
| CN101693447B (en) * | 2009-11-05 | 2011-11-02 | 中国北方车辆研究所 | Vehicle condition monitoring device |
| CN102970162B (en) * | 2012-11-14 | 2015-04-01 | 北京奇虎科技有限公司 | Processor and method used for processing data to be alarmed |
| CN203118160U (en) * | 2012-12-14 | 2013-08-07 | 中电投远达环保工程有限公司 | Flue gas desulfurization system operation monitoring and pre-warning instrument |
| CN104065921A (en) * | 2014-06-20 | 2014-09-24 | 上海成业智能科技股份有限公司 | Security and protection wide area network embedded type monitoring device and control method thereof |
| CN105428272B (en) * | 2014-07-31 | 2019-03-12 | 北京北方华创微电子装备有限公司 | The method and device of semiconductor equipment alert process |
| CN104281133A (en) * | 2014-09-25 | 2015-01-14 | 镇江北新建材有限公司 | Upper computer alarm system |
| CN104516801B (en) * | 2015-01-07 | 2017-08-18 | 山东鲁能智能技术有限公司 | A kind of computer monitoring system of transformer substation and method |
| CN104538336A (en) * | 2015-01-07 | 2015-04-22 | 海太半导体（无锡）有限公司 | Alarm recognizing and processing system and method for semiconductor encapsulation equipment |
| CN105183609B (en) * | 2015-09-16 | 2017-03-15 | 焦点科技股份有限公司 | A kind of real-time monitoring system for being applied to software system and method |
| JP6647824B2 (en) * | 2015-09-25 | 2020-02-14 | 三菱重工業株式会社 | Error diagnosis system and error diagnosis method |
| CN105608519A (en) * | 2015-11-09 | 2016-05-25 | 国家电网公司 | Prediction method for operation state of electrical-network communication equipment |
| CN106210021A (en) * | 2016-07-05 | 2016-12-07 | 中国银行股份有限公司 | The method for real-time monitoring of financial application system online business and supervising device |
| CN107591344B (en) * | 2016-07-06 | 2022-05-27 | 北京北方华创微电子装备有限公司 | Process chamber atmosphere detection method and wafer processing equipment |
| CN107678907B (en) * | 2017-05-22 | 2020-04-10 | 平安科技（深圳）有限公司 | Database service logic monitoring method, system and storage medium |
| CN107423198B (en) * | 2017-07-10 | 2020-10-16 | 中核核电运行管理有限公司 | EAM platform monitoring management method and system |
| CN107369303B (en) * | 2017-08-23 | 2019-06-28 | 北京赛普泰克技术有限公司 | Factory's intelligent diagnosing method, apparatus and system |
| CN108446184B (en) * | 2018-02-23 | 2021-09-07 | 北京天元创新科技有限公司 | Method and system for analyzing fault root cause |
| CN108833172B (en) * | 2018-06-21 | 2021-05-25 | 中国联合网络通信集团有限公司 | Network fault alarm processing method and device and network system |
| CN109765935A (en) * | 2019-03-05 | 2019-05-17 | 广州极飞科技有限公司 | The malfunction monitoring method for early warning and unmanned vehicle of unmanned vehicle |
| CN110164101B (en) * | 2019-04-09 | 2021-05-11 | 烽台科技（北京）有限公司 | Alarm information processing method and equipment |
| CN110096486A (en) * | 2019-05-07 | 2019-08-06 | 苏州浪潮智能科技有限公司 | A kind of log monitoring method, device, equipment and computer readable storage medium |
-
2019
- 2019-11-01 CN CN201911058206.9A patent/CN110795414B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102568147A (en) * | 2010-12-29 | 2012-07-11 | 沈阳中科博微自动化技术有限公司 | Alarm method for software failure of semiconductor device |
| CN103810823A (en) * | 2014-02-27 | 2014-05-21 | 神华集团有限责任公司 | Alarm processing method and device |
| CN104301689A (en) * | 2014-10-29 | 2015-01-21 | 杭州凯达电力建设有限公司 | Method and system for power monitoring |
| CN107908525A (en) * | 2017-10-13 | 2018-04-13 | 深圳前海微众银行股份有限公司 | Alert processing method, equipment and readable storage medium storing program for executing |
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|---|---|
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