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CN110793630A - Superconducting nanowire single photon detection system with impedance matching transmission line - Google Patents

Superconducting nanowire single photon detection system with impedance matching transmission line Download PDF

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CN110793630A
CN110793630A CN201911088164.3A CN201911088164A CN110793630A CN 110793630 A CN110793630 A CN 110793630A CN 201911088164 A CN201911088164 A CN 201911088164A CN 110793630 A CN110793630 A CN 110793630A
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transmission line
port
superconducting nanowire
impedance matching
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李�浩
胡鹏
尤立星
王镇
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Shanghai Institute of Microsystem and Information Technology of CAS
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    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/42Photometry, e.g. photographic exposure meter using electric radiation detectors
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Abstract

本发明提供一种具有阻抗匹配传输线的超导纳米线单光子探测系统,包括:超导纳米线单光子探测器;1/4波长阻抗匹配传输线,一端与超导纳米线单光子探测器相连接;高通滤波器,一端与1/4波长阻抗匹配传输线连接于超导纳米线单光子探测器的一端相连接,另一端接地;三端口器件三端口器件的第一端口与1/4波长阻抗匹配传输线远离超导纳米线单光子探测器的一端相连接;电流源,一端与三端口器件的第二端口相连接;放大器,放大器的输入端与三端口器件的第三端口相连接,放大器的接地端接地。本发明可以实现特定频率信号的匹配读出,实现脉冲幅度的放大,降低时间抖动;可以将信号中低频成分整形去掉,提高计数率及探测速率。

Figure 201911088164

The invention provides a superconducting nanowire single-photon detection system with an impedance matching transmission line, comprising: a superconducting nanowire single-photon detector; a 1/4 wavelength impedance matching transmission line, one end of which is connected to the superconducting nanowire single-photon detector ; high-pass filter, one end is connected to one end of the 1/4 wavelength impedance matching transmission line connected to the superconducting nanowire single-photon detector, and the other end is grounded; the first port of the three-port device The first port of the three-port device is impedance matched to 1/4 wavelength One end of the transmission line away from the superconducting nanowire single-photon detector is connected; one end of the current source is connected to the second port of the three-port device; the amplifier, the input end of the amplifier is connected to the third port of the three-port device, and the ground of the amplifier terminal to ground. The invention can realize matching readout of specific frequency signal, realize pulse amplitude amplification, reduce time jitter; can shape and remove low-frequency components in the signal, and improve counting rate and detection rate.

Figure 201911088164

Description

具有阻抗匹配传输线的超导纳米线单光子探测系统Superconducting nanowire single-photon detection system with impedance-matched transmission line

技术领域technical field

本发明属于光探测技术领域,特别是涉及一种具有阻抗匹配传输线的超导纳米线单光子探测系统。The invention belongs to the technical field of light detection, in particular to a superconducting nanowire single-photon detection system with impedance matching transmission lines.

背景技术Background technique

超导纳米线单光子探测器(Superconducting nanowire single photondetector:SNSPD)是近十几年发展起来的新型单光子探测技术,其相对于半导体探测器的最大的优势就是其超高的探测效率、快速响应速度、几乎可以忽略的暗计数以及极低的时间抖动,且光谱响应范围可覆盖可见光至红外波段。2001年,莫斯科师范大学Gol’tsman小组首先利用5nm厚的NbN超薄薄膜制备了一条200nm宽的超导纳米线,成功实现了可见光到近红外波段的单光子探测,开启了超导纳米线单光子探测器的先河。此后,欧、美、俄、日、中等多个国家和研究小组纷纷开展了对SNSPD的研究。经过十余年的发展,SNSPD在1.55μm波长的探测效率从开始的不足1%已经提升到90%,远超过半导体SPD的探测效率。除此之外,其在暗计数、低时间抖动、高计数率等方面的优异性能已经在众多应用领域得到了验证。因此,在近红外波段附近具有优良性能表现的SNSPD无疑为激光雷达、量子信息等应用提供了很好的工具。Superconducting nanowire single photon detector (SNSPD) is a new type of single photon detection technology developed in the past ten years. Its biggest advantage over semiconductor detectors is its ultra-high detection efficiency and fast response. Speed, negligible dark counts, and extremely low temporal jitter, with a spectral response spanning the visible to infrared. In 2001, the Gol'tsman group of Moscow Normal University first fabricated a 200nm-wide superconducting nanowire with a 5nm-thick NbN ultrathin film, and successfully realized single-photon detection in the visible light to near-infrared band, opening the door to the single-photon detection of superconducting nanowires. A first for photon detectors. Since then, many countries and research groups in Europe, the United States, Russia, Japan, and China have carried out research on SNSPD. After more than ten years of development, the detection efficiency of SNSPD at 1.55μm wavelength has been improved from less than 1% to 90%, far exceeding the detection efficiency of semiconductor SPD. In addition, its excellent performance in dark count, low time jitter, high count rate, etc. has been verified in many application fields. Therefore, the SNSPD with excellent performance near the near-infrared band undoubtedly provides a good tool for applications such as lidar and quantum information.

目前SNSPD已成为超导电子学和单光子探测领域的研究热点,并有力的推动了量子信息、激光雷达等领域科技发展。国际上SNSPD领域研究著名机构包括,美国的MIT、JPL、NIST、日本的NICT、俄罗斯的MSPU等。目前光纤通信波段1550nm,探测效率最高的器件为美国NIST采用极低温超导材料WSi(工作温度<1K)研发,探测效率高达93%,而采用低温超导材料NbN(工作温度>2K)研发的SNSPD最高探测效率也达到了90%以上。除科研机构外,国际上目前已有6家主要从事SNSPD相关技术产品的公司。At present, SNSPD has become a research hotspot in the field of superconducting electronics and single-photon detection, and has effectively promoted the scientific and technological development of quantum information, lidar and other fields. Well-known international research institutions in the field of SNSPD include MIT, JPL, NIST in the United States, NICT in Japan, and MSPU in Russia. At present, the optical fiber communication band is 1550nm, and the device with the highest detection efficiency is developed by NIST in the United States using the ultra-low temperature superconducting material WSi (operating temperature <1K), and the detection efficiency is as high as 93%. The highest detection efficiency of SNSPD has also reached more than 90%. In addition to scientific research institutions, there are currently 6 companies mainly engaged in SNSPD-related technology products in the world.

随着SNSPD技术发展,近年来,纳米线的微波特性也在一步一步在挖掘。一方面体现在研究人员对纳米线机理的不断探索,另一方面基于微波特性基础上各种新结构的单光子探测器被研制出应用在诸如成像等领域。With the development of SNSPD technology, in recent years, the microwave properties of nanowires are also being explored step by step. On the one hand, it is reflected in the continuous exploration of the nanowire mechanism by researchers;

现有的超导纳米线单光子探测系统是基于集总模型来分析提取波形,并未考虑到器件与读出间的阻抗匹配。一种超导纳米线单光子探测系统基于高阻抗低温放大器以实现性能的提高,但由于高阻抗低温放大器的引入,会导致信号幅值降低,从而使得信噪比降低;同时,会导致器件表征难度增大,增加了系统复杂性。同时,现有的超导纳米线单光子探测系统很难实现同时兼备高效率、极低时间抖动、高计数及实用化等综合优异性能的问题。Existing single-photon detection systems for superconducting nanowires are based on lumped models to analyze and extract waveforms, and do not take into account the impedance matching between the device and the readout. A superconducting nanowire single-photon detection system is based on a high-impedance low-temperature amplifier to achieve improved performance. However, due to the introduction of a high-impedance low-temperature amplifier, the signal amplitude is reduced, thereby reducing the signal-to-noise ratio; at the same time, it will lead to device characterization. The difficulty increases and the system complexity increases. At the same time, it is difficult for the existing single-photon detection systems for superconducting nanowires to achieve comprehensive and excellent performances such as high efficiency, extremely low time jitter, high counts, and practicality.

发明内容SUMMARY OF THE INVENTION

鉴于以上所述现有技术的缺点,本发明的目的在于提供一种具有阻抗匹配传输线的超导纳米线单光子探测系统,用于解决现有技术中的超导纳米线单光子探测系统存在的时间抖动较高、计数率低等问题,以及信噪比降低、器件表征难度大及系统复杂性等问题。In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide a superconducting nanowire single-photon detection system with an impedance matching transmission line, which is used to solve the existing problems of the superconducting nanowire single-photon detection system in the prior art. Problems such as high time jitter and low count rate, as well as reduced signal-to-noise ratio, difficulty in device characterization, and system complexity.

为实现上述目的及其他相关目的,本发明提供一种具有阻抗匹配传输线的超导纳米线单光子探测系统,所述具有阻抗匹配传输线的超导纳米线单光子探测系统包括:In order to achieve the above-mentioned purpose and other related purposes, the present invention provides a superconducting nanowire single-photon detection system with impedance matching transmission line, and the superconducting nanowire single-photon detection system with impedance matching transmission line includes:

超导纳米线单光子探测器;Superconducting nanowire single-photon detectors;

1/4波长阻抗匹配传输线,一端与所述超导纳米线单光子探测器相连接;1/4 wavelength impedance matching transmission line, one end is connected with the superconducting nanowire single photon detector;

高通滤波器,一端与所述1/4波长阻抗匹配传输线连接于所述超导纳米线单光子探测器的一端相连接,另一端接地;a high-pass filter, one end is connected to one end of the 1/4 wavelength impedance matching transmission line connected to the superconducting nanowire single-photon detector, and the other end is grounded;

三端口器件,包括第一端口、第二端口及第三端口,所述三端口器件的第一端口与所述1/4波长阻抗匹配传输线远离所述超导纳米线单光子探测器及所述高通滤波器的一端相连接;A three-port device includes a first port, a second port and a third port, and the first port of the three-port device and the 1/4 wavelength impedance matching transmission line are far away from the superconducting nanowire single-photon detector and the One end of the high-pass filter is connected;

电流源,一端与所述三端口器件的第二端口相连接;a current source, one end of which is connected to the second port of the three-port device;

放大器,包括输入端、输出端及接地端;所述放大器的输入端与所述三端口器件的第三端口相连接,所述放大器的接地端接地。The amplifier includes an input terminal, an output terminal and a ground terminal; the input terminal of the amplifier is connected to the third port of the three-port device, and the ground terminal of the amplifier is grounded.

可选地,所述超导纳米线单光子探测器的等效电路包括:Optionally, the equivalent circuit of the superconducting nanowire single-photon detector includes:

等效动态电感,一端与所述1/4波长阻抗匹配传输线相连接;Equivalent dynamic inductance, one end is connected with the 1/4 wavelength impedance matching transmission line;

等效电阻,一端与所述等效动态电感远离所述1/4波长阻抗匹配传输线的一端相连接,另一端接地;an equivalent resistance, one end of which is connected to one end of the equivalent dynamic inductance away from the 1/4 wavelength impedance matching transmission line, and the other end is grounded;

开关,一端与所述等效动态电感远离所述1/4波长阻抗匹配传输线的一端相连接,另一端接地。A switch, one end of which is connected to one end of the equivalent dynamic inductance away from the 1/4 wavelength impedance matching transmission line, and the other end is grounded.

可选地,所述高通滤波器包括:Optionally, the high-pass filter includes:

滤波电阻,一端与所述1/4波长阻抗匹配传输线的一端相连接;A filter resistor, one end of which is connected to one end of the 1/4 wavelength impedance matching transmission line;

滤波电感,一端与所述滤波电阻远离所述1/4波长阻抗匹配传输线的一端相连接,另一端接地。One end of the filter inductor is connected to one end of the filter resistor away from the 1/4 wavelength impedance matching transmission line, and the other end is grounded.

可选地,所述滤波电阻的阻值的包括50欧姆;所述高通滤波器的截止频率包括百MHz。Optionally, the resistance value of the filter resistor includes 50 ohms; the cut-off frequency of the high-pass filter includes 100 MHz.

可选地,所述三端口器件包括:Optionally, the three-port device includes:

端口电阻,一端与所述电流源相连接,另一端与所述1/4波长阻抗匹配传输线远离所述超导纳米线单光子探测器及所述高通滤波器的一端相连接;port resistance, one end is connected with the current source, and the other end is connected with the end of the 1/4 wavelength impedance matching transmission line away from the superconducting nanowire single-photon detector and the high-pass filter;

端口电容,一端与所述1/4波长阻抗匹配传输线远离所述超导纳米线单光子探测器及所述高通滤波器的一端相连接,另一端与所述放大器的输入端相连接。One end of the port capacitor is connected to one end of the 1/4 wavelength impedance matching transmission line away from the superconducting nanowire single-photon detector and the high-pass filter, and the other end is connected to the input end of the amplifier.

可选地,所述放大器包括:Optionally, the amplifier includes:

放大器电容,一端与所述三端口器件的第三端口相连接;an amplifier capacitor, one end of which is connected to the third port of the three-port device;

放大器电阻,一端与所述放大器电容远离所述三端口器件的一端相连接,另一端接地。An amplifier resistor, one end of which is connected to one end of the amplifier capacitor away from the three-port device, and the other end is grounded.

可选地,所述具有阻抗匹配传输线的超导纳米线单光子探测系统还包括:Optionally, the superconducting nanowire single-photon detection system with impedance matching transmission line further includes:

第一同轴电缆,一端与所述1/4波长阻抗匹配传输线远离所述超导纳米线单光子探测器及所述高通滤波器的一端相连接;a first coaxial cable, one end of which is connected to one end of the 1/4 wavelength impedance matching transmission line away from the superconducting nanowire single-photon detector and the high-pass filter;

第二同轴电缆,一端与所述第一同轴电缆远离所述1/4波长阻抗匹配传输线的一端相连接,另一端与所述三端口器件的第一端口相连接;a second coaxial cable, one end of which is connected to one end of the first coaxial cable away from the 1/4 wavelength impedance matching transmission line, and the other end is connected to the first port of the three-port device;

第三同轴电缆,一端与所述三端口器件的第三端口相连接,另一端与所述放大器的输入端相连接。One end of the third coaxial cable is connected to the third port of the three-port device, and the other end is connected to the input end of the amplifier.

可选地,所述1/4波长阻抗匹配传输线的阻抗满足行波匹配关系,以实现所述超导纳米线单光子探测器与包括所述三端口器件及所述放大器的外围读出电路的阻抗匹配。Optionally, the impedance of the 1/4 wavelength impedance matching transmission line satisfies the traveling wave matching relationship, so as to realize the connection between the superconducting nanowire single-photon detector and the peripheral readout circuit including the three-port device and the amplifier. Impedance matching.

可选地,所述1/4波长阻抗匹配传输线的宽度由所述1/4波长阻抗匹配传输线的特征阻抗决定,所述1/4波长阻抗匹配传输线的特征阻抗由所述超导纳米线单光子探测器中超导纳米线的材料等参数决定;所述1/4波长阻抗匹配传输线的长度由所述1/4波长阻抗匹配传输线传输的信号中上升沿的中心频率决定,以实现所述信号的上升沿的读出。Optionally, the width of the 1/4 wavelength impedance matching transmission line is determined by the characteristic impedance of the 1/4 wavelength impedance matching transmission line, and the characteristic impedance of the 1/4 wavelength impedance matching transmission line is determined by the single superconducting nanowire. The material and other parameters of the superconducting nanowire in the photon detector are determined; the length of the 1/4 wavelength impedance matching transmission line is determined by the center frequency of the rising edge in the signal transmitted by the 1/4 wavelength impedance matching transmission line, so as to realize the readout of the rising edge of the signal.

如上所述,本发明的具有阻抗匹配传输线的超导纳米线单光子探测系统,具有以下有益效果:本发明的具有阻抗匹配传输线的超导纳米线单光子探测系统通过在同一芯片上集成超导纳米线单光子探测器及1/4波长阻抗匹配传输线,可以实现特定频率信号(上升沿高频成分)的匹配读出,实现脉冲幅度的放大,降低时间抖动;通过在同一芯片上集成超导纳米线单光子探测器及高通滤波器,可以将信号中低频成分整形去掉,从而提高计数率及探测速率,大大提高超导纳米线单光子探测器的整体性能;本发明的具有阻抗匹配传输线的超导纳米线单光子探测系统不需要高阻抗低温放大器,可以确保信号幅值及信噪比,表征难度低,系统简单。As described above, the superconducting nanowire single-photon detection system with impedance matching transmission line of the present invention has the following beneficial effects: the superconducting nanowire single-photon detection system with impedance matching transmission line of the present invention integrates superconducting nanowires on the same chip. Nanowire single-photon detectors and 1/4 wavelength impedance matching transmission lines can achieve matching readout of specific frequency signals (high-frequency components on the rising edge), realize pulse amplitude amplification, and reduce time jitter; by integrating superconductors on the same chip The nanowire single-photon detector and the high-pass filter can shape and remove low-frequency components in the signal, thereby improving the counting rate and detection rate, and greatly improving the overall performance of the superconducting nanowire single-photon detector; the invention has an impedance matching transmission line. The superconducting nanowire single-photon detection system does not require a high-impedance low-temperature amplifier, which can ensure signal amplitude and signal-to-noise ratio, with low characterization difficulty and simple system.

附图说明Description of drawings

图1显示为本发明提供的具有阻抗匹配传输线的超导纳米线单光子探测系统的电路图。FIG. 1 shows a circuit diagram of a superconducting nanowire single-photon detection system with impedance matching transmission lines provided by the present invention.

元件标号说明Component label description

10 超导纳米线单光子探测器10 Superconducting Nanowire Single-Photon Detectors

11 阻抗匹配传输线11 Impedance matching transmission line

12 高通滤波器12 high pass filter

13 三端口器件13 Three-port device

14 电流源14 Current source

15 放大器15 Amplifiers

16 芯片16 chips

17 第一同轴电缆17 First coaxial cable

18 第二同轴电缆18 Second coaxial cable

19 第三同轴电缆19 Third coaxial cable

具体实施方式Detailed ways

以下通过特定的具体实例说明本发明的实施方式,本领域技术人员可由本说明书所揭露的内容轻易地了解本发明的其他优点与功效。本发明还可以通过另外不同的具体实施方式加以实施或应用,本说明书中的各项细节也可以基于不同观点与应用,在没有背离本发明的精神下进行各种修饰或改变。The embodiments of the present invention are described below through specific specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.

请参阅图1。需要说明的是,本实施例中所提供的图示仅以示意方式说明本发明的基本构想,虽图示中仅显示与本发明中有关的组件而非按照实际实施时的组件数目、形状及尺寸绘制,其实际实施时各组件的形态、数量及比例可为一种随意的改变,且其组件布局形态也可能更为复杂。See Figure 1. It should be noted that the diagrams provided in this embodiment are only to illustrate the basic concept of the present invention in a schematic way, although the diagrams only show the components related to the present invention rather than the number, shape and the number of components in actual implementation. For dimension drawing, the shape, quantity and proportion of each component can be arbitrarily changed during actual implementation, and the component layout shape may also be more complicated.

请参照图1,本发明提供一种具有阻抗匹配传输线的超导纳米线单光子探测系统,所述具有阻抗匹配传输线的超导纳米线单光子探测系统包括:超导纳米线单光子探测器10;1/4波长阻抗匹配传输线11,所述1/4波长阻抗匹配传输线11一端与所述超导纳米线单光子探测器10相连接;高通滤波器12,所述高通滤波器12一端与所述1/4波长阻抗匹配传输线11连接于所述超导纳米线单光子探测器10的一端相连接,所述高通滤波器12另一端接地;三端口器件13,所述三端口器件13包括第一端口、第二端口及第三端口,所述三端口器件13的第一端口与所述1/4波长阻抗匹配传输线11远离所述超导纳米线单光子探测器10及所述高通滤波器12的一端相连接;电流源14,所述电流源14一端与所述三端口器件13的第二端口相连接;放大器15,所述放大器15包括输入端、输出端及接地端;所述放大器15的输入端与所述三端口器件14的第三端口相连接,所述放大器15的接地端接地;其中,所述超导纳米线单光子探测器10、所述1/4波长阻抗匹配传输线11及所述高通滤波器12集成于同一芯片16上。本发明的具有阻抗匹配传输线的超导纳米线单光子探测系统通过在同一所述芯片16上集成所述超导纳米线单光子探测器10及所述1/4波长阻抗匹配传输线11,可以实现实现特定频率信号(上升沿高频成分)的匹配读出,实现脉冲幅度的放大,降低时间抖动;通过在同一所述芯片16上集成所述超导纳米线单光子探测器10及所述高通滤波器12,实现低频信号走地,可以将信号中低频成分整形去掉,从而提高计数率及探测速率,大大提高所述超导纳米线单光子探测器10的整体性能;本发明的具有阻抗匹配传输线的超导纳米线单光子探测系统不需要高阻抗低温放大器,可以确保信号幅值及信噪比,表征难度低,系统简单。Please refer to FIG. 1 , the present invention provides a superconducting nanowire single-photon detection system with impedance matching transmission lines. The superconducting nanowire single-photon detection system with impedance matching transmission lines includes: a superconducting nanowire single-photon detector 10 1/4 wavelength impedance matching transmission line 11, one end of the 1/4 wavelength impedance matching transmission line 11 is connected with the superconducting nanowire single photon detector 10; high-pass filter 12, one end of the high-pass filter 12 is connected with the The 1/4 wavelength impedance matching transmission line 11 is connected to one end of the superconducting nanowire single-photon detector 10, and the other end of the high-pass filter 12 is grounded; the three-port device 13 includes a third A port, a second port and a third port, the first port of the three-port device 13 and the 1/4 wavelength impedance matching transmission line 11 are far away from the superconducting nanowire single-photon detector 10 and the high-pass filter 12 is connected to one end; current source 14, one end of the current source 14 is connected to the second port of the three-port device 13; amplifier 15, the amplifier 15 includes an input terminal, an output terminal and a ground terminal; the amplifier The input end of 15 is connected to the third port of the three-port device 14, and the ground end of the amplifier 15 is grounded; wherein, the superconducting nanowire single-photon detector 10, the 1/4 wavelength impedance matching transmission line 11 and the high-pass filter 12 are integrated on the same chip 16 . The superconducting nanowire single-photon detection system with impedance matching transmission line of the present invention can be realized by integrating the superconducting nanowire single-photon detector 10 and the 1/4 wavelength impedance matching transmission line 11 on the same chip 16 . Realize the matching readout of specific frequency signals (high-frequency components on the rising edge), realize the amplification of pulse amplitude, and reduce time jitter; by integrating the superconducting nanowire single-photon detector 10 and the high-pass The filter 12 realizes that the low-frequency signal goes to the ground, and can shape and remove the low-frequency components in the signal, thereby improving the counting rate and detection rate, and greatly improving the overall performance of the superconducting nanowire single-photon detector 10; the present invention has impedance matching. The superconducting nanowire single-photon detection system of the transmission line does not require a high-impedance low-temperature amplifier, which can ensure the signal amplitude and signal-to-noise ratio, with low characterization difficulty and simple system.

作为示例,所述超导纳米线单光子探测器10可以为现有的任意一种超导纳米线单光子探测器,其具体结构此处不做限定。As an example, the superconducting nanowire single-photon detector 10 may be any existing superconducting nanowire single-photon detector, and its specific structure is not limited herein.

作为示例,所述超导纳米线单光子探测器10的等效电路可以包括:等效动态电感L1,所述等效电感L1一端与所述1/4波长阻抗匹配传输线11相连接;等效电阻R1,所述等效电阻R1一端与所述等效动态电感L1远离所述1/4波长阻抗匹配传输线11的一端相连接,所述等效电阻R1另一端接地;开关K,所述开关K一端与所述等效动态电感L1远离所述1/4波长阻抗匹配传输线11的一端相连接,所述开关K另一端接地。由于所述超导纳米线单光子探测器10正常工作处在超导区,当一个光子出现会使得所述超导纳米线单光子探测器10中的超导纳米线变成有阻区,这种超导区域有阻区的跳变可以使用所述等效电阻R1及所述开关K并联的结构来表示;同时,所述超导纳米线为超薄超窄结构,且其产生的读出信号为射频信号,因此其存在的等效动态电感L1是不可忽略的,故所述超导纳米线单光子探测器10的等效电路可以如上所述。As an example, the equivalent circuit of the superconducting nanowire single-photon detector 10 may include: an equivalent dynamic inductance L1, one end of the equivalent inductance L1 is connected to the 1/4 wavelength impedance matching transmission line 11; an equivalent Resistor R1, one end of the equivalent resistor R1 is connected to one end of the equivalent dynamic inductance L1 away from the 1/4 wavelength impedance matching transmission line 11, and the other end of the equivalent resistor R1 is grounded; switch K, the switch One end of K is connected to one end of the equivalent dynamic inductance L1 away from the 1/4 wavelength impedance matching transmission line 11 , and the other end of the switch K is grounded. Since the superconducting nanowire single-photon detector 10 normally works in the superconducting region, when a photon appears, the superconducting nanowire in the superconducting nanowire single-photon detector 10 becomes a resistance region, which The transition of the resistive region in the superconducting region can be represented by the parallel structure of the equivalent resistance R1 and the switch K; at the same time, the superconducting nanowire is an ultra-thin and ultra-narrow structure, and the generated readout The signal is a radio frequency signal, so its equivalent dynamic inductance L1 is not negligible, so the equivalent circuit of the superconducting nanowire single-photon detector 10 can be as described above.

作为示例,所述高通滤波器12可以包括:滤波电阻R2,所述滤波电阻R2一端与所述1/4波长阻抗匹配传输线11的一端相连接;滤波电感L2,所述滤波电感L2一端与所述滤波电阻R2远离所述1/4波长阻抗匹配传输线11的一端相连接,所述滤波电感L2另一端接地。所述高通滤波器12用于将所述超导纳米线产生的读出信号中的低频信号整形去掉,即对所述读出信号进行类似方波整形,从而提高计数率。As an example, the high-pass filter 12 may include: a filter resistor R2, one end of the filter resistor R2 is connected to one end of the 1/4 wavelength impedance matching transmission line 11; a filter inductor L2, one end of the filter inductor L2 is connected to the One end of the filter resistor R2 away from the 1/4 wavelength impedance matching transmission line 11 is connected, and the other end of the filter inductor L2 is grounded. The high-pass filter 12 is used to shape the low-frequency signal in the readout signal generated by the superconducting nanowire, that is, to perform square wave shaping on the readout signal, thereby increasing the count rate.

作为示例,所述高通滤波器12可以根据实际需要进行选择,但必须确保所述高通滤波器12可以将信号的下降沿的低频成分滤掉,保留信号的上升沿的高频成分;优选地,本实施例中,所述高通滤波器12的截止频率包括百MHz(譬如,150MHz),即所述高通滤波器12可以为截止频率为百MHz的滤波器。As an example, the high-pass filter 12 can be selected according to actual needs, but it must be ensured that the high-pass filter 12 can filter out the low-frequency components of the falling edge of the signal and retain the high-frequency components of the rising edge of the signal; preferably, In this embodiment, the cut-off frequency of the high-pass filter 12 includes 100 MHz (for example, 150 MHz), that is, the high-pass filter 12 may be a filter with a cut-off frequency of 100 MHz.

作为示例,所述高通滤波器12中的所述滤波电阻R2需要选取合适阻值的电阻,以实现最大计数率的提高;优选地,本实施例中,所述滤波电阻R2的阻值优选为50欧姆。As an example, the filter resistor R2 in the high-pass filter 12 needs to select a resistor with a suitable resistance value to achieve the improvement of the maximum count rate; preferably, in this embodiment, the resistance value of the filter resistor R2 is preferably 50 ohms.

作为示例,所述三端口器件13可以包括:端口电感L3,所述端口电感L3一端与所述电流源14相连接,所述端口电感L3另一端与所述1/4波长阻抗匹配传输线11远离所述超导纳米线单光子探测器10及所述高通滤波器12的一端相连接;端口电容C1,所述端口电容C1一端与所述1/4波长阻抗匹配传输线11远离所述超导纳米线单光子探测器10及所述高通滤波器12的一端相连接,所述端口电容C1另一端与所述放大器15的输入端相连接;所述端口电感L3及所述端口电容C1与所述1/4波长阻抗匹配传输线11远离所述超导纳米线单光子探测器10及所述高通滤波器12的一端相连接的一端即为所述三端口器件13的第一端口,所述端口电感L3与所述电流源14相连接的一端即为所述三端口器件13的第二端口;所述端口电容C1与所述放大器15相连接的一端即为所述三端口器件13的第三端口。As an example, the three-port device 13 may include: a port inductor L3, one end of the port inductor L3 is connected to the current source 14, and the other end of the port inductor L3 is far away from the 1/4 wavelength impedance matching transmission line 11 The superconducting nanowire single photon detector 10 and one end of the high-pass filter 12 are connected; the port capacitor C1, one end of the port capacitor C1 and the 1/4 wavelength impedance matching transmission line 11 are far away from the superconducting nanowire One end of the line single photon detector 10 and the high-pass filter 12 are connected, and the other end of the port capacitor C1 is connected to the input end of the amplifier 15; the port inductance L3 and the port capacitor C1 are connected with the One end of the 1/4 wavelength impedance matching transmission line 11 that is far away from the superconducting nanowire single-photon detector 10 and one end of the high-pass filter 12 is connected to the first port of the three-port device 13, and the port inductance The end of L3 connected to the current source 14 is the second port of the three-port device 13 ; the end of the port capacitor C1 connected to the amplifier 15 is the third port of the three-port device 13 .

作为示例,所述三端口器件13的第一端口即可允许直流信号通过,也允许射频信号通过;所述三端口器件13的第二端口仅允许直流信号通过,所述三端口器件13的第三端口仅允许射频信号通过。所述电流源14经由所述三端口器件13的第二端口将偏置电流施加于所述超导纳米线单光子探测器10中的超导纳米线上,所述超导纳米线产生的射频信号经所述1/4波长阻抗匹配传输线11及所述高通滤波器12处理后经由所述三端口器件13的第一端口及第三端口输出至所述放大器15。As an example, the first port of the three-port device 13 can allow both DC signals and radio frequency signals to pass through; the second port of the three-port device 13 only allows DC signals to pass through, and the third port of the three-port device 13 Three ports only allow RF signals to pass through. The current source 14 applies a bias current to the superconducting nanowires in the superconducting nanowire single-photon detector 10 via the second port of the three-port device 13, and the radio frequency generated by the superconducting nanowires The signal is processed by the 1/4 wavelength impedance matching transmission line 11 and the high-pass filter 12 and then output to the amplifier 15 through the first port and the third port of the three-port device 13 .

作为示例,所述放大器15可以包括:放大器电容C2,所述放大器电容C2一端与所述三端口器件13的第三端口相连接;放大器电阻R3,所述放大器电阻R3一端与所述放大器电容C2远离所述三端口器件13的一端相连接,所述放大器电容C2另一端接地。所述放大器15用于将所述三端口器件13输出的射频信号由1mV左右放大至百毫伏量级以便于读出。As an example, the amplifier 15 may include: an amplifier capacitor C2, one end of the amplifier capacitor C2 is connected to the third port of the three-port device 13; an amplifier resistor R3, one end of the amplifier resistor R3 is connected to the amplifier capacitor C2 One end away from the three-port device 13 is connected, and the other end of the amplifier capacitor C2 is grounded. The amplifier 15 is used to amplify the radio frequency signal output by the three-port device 13 from about 1 mV to the order of 100 mV for easy readout.

作为示例,所述具有阻抗匹配传输线的超导纳米线单光子探测系统还可以包括:第一同轴电缆17,所述第一同轴电缆17一端与所述1/4波长阻抗匹配传输线11远离所述超导纳米线单光子探测器10及所述高通滤波器12的一端相连接;第二同轴电缆18,所述第二同轴电缆18一端与所述第一同轴电缆17远离所述1/4波长阻抗匹配传输线11的一端相连接,所述第二同轴电缆18另一端与所述三端口器件13的第一端口相连接;第三同轴电缆19,所述第三同轴电缆19一端与所述三端口器件13的第三端口相连接,所述第三同轴电缆19另一端与所述放大器15的输入端相连接。As an example, the superconducting nanowire single-photon detection system with impedance matching transmission line may further include: a first coaxial cable 17 , and one end of the first coaxial cable 17 is far away from the 1/4 wavelength impedance matching transmission line 11 One end of the superconducting nanowire single photon detector 10 and the high-pass filter 12 are connected; a second coaxial cable 18, one end of the second coaxial cable 18 is far away from the first coaxial cable 17. One end of the 1/4 wavelength impedance matching transmission line 11 is connected, and the other end of the second coaxial cable 18 is connected to the first port of the three-port device 13; One end of the coaxial cable 19 is connected to the third port of the three-port device 13 , and the other end of the third coaxial cable 19 is connected to the input end of the amplifier 15 .

具体的,由于所述放大器15优选为做了标准的50欧姆阻抗匹配的放大器,故本实施例中,所述第一同轴电缆17、所述第二同轴电缆18及所述第三同轴电缆19均优选为50欧姆阻抗匹配的同轴电缆。Specifically, since the amplifier 15 is preferably an amplifier with standard 50 ohm impedance matching, in this embodiment, the first coaxial cable 17 , the second coaxial cable 18 and the third coaxial cable The coaxial cables 19 are preferably coaxial cables with 50 ohm impedance matching.

具体的,由于所述超导纳米线本身为高阻抗,而所述外围读出电路为50欧姆的阻抗匹配,故所述1/4波长阻抗匹配传输线11的目的为实现所述超导纳米线单光子探测器10与所述外围读出电路的匹配,以将所述超导纳米线单光子探测器10产生的读出信号中的特定频率信号(譬如上升沿高频成分)匹配读出。Specifically, since the superconducting nanowire itself has high impedance, and the peripheral readout circuit is impedance matching of 50 ohms, the purpose of the 1/4 wavelength impedance matching transmission line 11 is to realize the superconducting nanowire The single-photon detector 10 is matched with the peripheral readout circuit to match and read out a specific frequency signal (such as a high-frequency component of a rising edge) in the readout signal generated by the superconducting nanowire single-photon detector 10 .

更为具体的,所述1/4波长阻抗匹配传输线11的阻抗满足行波匹配关系,以实现所述超导纳米线单光子探测器10与包括所述第一同轴电缆17、所述第二同轴电缆18、所述第三同轴电缆19、所述三端口器件13及所述放大器15的外围读出电路的阻抗匹配。More specifically, the impedance of the 1/4 wavelength impedance matching transmission line 11 satisfies the traveling wave matching relationship, so as to realize the superconducting nanowire single photon detector 10 and the first coaxial cable 17, the first The impedances of the second coaxial cable 18 , the third coaxial cable 19 , the three-port device 13 and the peripheral readout circuit of the amplifier 15 are matched.

需要说明的是,行波匹配关系为通过Sonnet软件仿真得到所述1/4波长阻抗匹配传输线11(不同的所述超导纳米线有着不同的方块电感等参数)的初始特征阻抗(即所述1/4波长阻抗匹配传输线11与所述超导纳米线单光子探测器10相连接的一端的特征阻抗)及所述1/4波长阻抗匹配传输线11的终了特征阻抗(即所述1/4波长阻抗匹配传输线11与所述第一同轴电缆17相连接的一端的特征阻抗)得到所述1/4波长阻抗匹配传输线11的特征阻抗;然后,改变所述1/4波长阻抗匹配传输线11的宽度得到不同宽度下对应的特征阻抗,并拟合得到特征阻抗随所述1/4波长阻抗匹配传输线11宽度变化的函数;将特征阻抗输入到所述函数内,即可求解得到所述1/4波长阻抗匹配传输线11的宽度。It should be noted that the traveling wave matching relationship is to obtain the initial characteristic impedance of the 1/4 wavelength impedance matching transmission line 11 (different superconducting nanowires have different parameters such as square inductance) through Sonnet software simulation (that is, the 1/4 wavelength impedance matching the characteristic impedance of the end of the transmission line 11 connected to the superconducting nanowire single-photon detector 10) and the final characteristic impedance of the 1/4 wavelength impedance matching transmission line 11 (that is, the 1/4 The characteristic impedance of the end of the wavelength impedance matching transmission line 11 connected to the first coaxial cable 17) obtains the characteristic impedance of the 1/4 wavelength impedance matching transmission line 11; then, changing the 1/4 wavelength impedance matching transmission line 11 The corresponding characteristic impedance at different widths can be obtained from the width of , and the function of the characteristic impedance changing with the width of the 1/4 wavelength impedance matching transmission line 11 can be obtained by fitting; /4 wavelength impedance matching the width of the transmission line 11 .

作为示例,由于所述1/4波长阻抗匹配传输线11的长度决定了其所通过信号的中心频率,故所述1/4波长阻抗匹配传输线11的长度由所述1/4波长阻抗匹配传输线11传输的信号中上升沿的中心频率决定,以实现所述信号的上升沿的读出。As an example, since the length of the 1/4 wavelength impedance matching transmission line 11 determines the center frequency of the signal it passes through, the length of the 1/4 wavelength impedance matching transmission line 11 is determined by the length of the 1/4 wavelength impedance matching transmission line 11 The center frequency of the rising edge in the transmitted signal is determined to realize the readout of the rising edge of the signal.

综上所述,本发明提供一种具有阻抗匹配传输线的超导纳米线单光子探测系统,所述具有阻抗匹配传输线的超导纳米线单光子探测系统包括:超导纳米线单光子探测器;1/4波长阻抗匹配传输线,一端与所述超导纳米线单光子探测器相连接;高通滤波器,一端与所述1/4波长阻抗匹配传输线连接于所述超导纳米线单光子探测器的一端相连接,另一端接地;三端口器件,包括第一端口、第二端口及第三端口,所述三端口器件的第一端口与所述1/4波长阻抗匹配传输线远离所述超导纳米线单光子探测器及所述高通滤波器的一端相连接;电流源,一端与所述三端口器件的第二端口相连接;放大器,包括输入端、输出端及接地端;所述放大器的输入端与所述三端口器件的第三端口相连接,所述放大器的接地端接地。本发明的具有阻抗匹配传输线的超导纳米线单光子探测系统通过在同一芯片上集成超导纳米线单光子探测器及1/4波长阻抗匹配传输线,可以实现特定频率信号(上升沿高频成分)的匹配读出,实现脉冲幅度的放大,降低时间抖动;通过在同一芯片上集成超导纳米线单光子探测器及高通滤波器,可以将信号中低频成分整形去掉,从而提高计数率及探测速率,大大提高超导纳米线单光子探测器的整体性能;本发明的具有阻抗匹配传输线的超导纳米线单光子探测系统不需要高阻抗低温放大器,可以确保信号幅值及信噪比,表征难度低,系统简单。In summary, the present invention provides a superconducting nanowire single-photon detection system with an impedance matching transmission line, and the superconducting nanowire single-photon detection system with an impedance matching transmission line includes: a superconducting nanowire single-photon detector; A 1/4 wavelength impedance matching transmission line, one end is connected to the superconducting nanowire single photon detector; a high-pass filter, one end is connected to the superconducting nanowire single photon detector with the 1/4 wavelength impedance matching transmission line One end of the three-port device is connected, and the other end is grounded; the three-port device includes a first port, a second port and a third port, and the first port of the three-port device and the 1/4 wavelength impedance matching transmission line are far away from the superconductor The nanowire single-photon detector is connected to one end of the high-pass filter; one end of the current source is connected to the second port of the three-port device; the amplifier includes an input end, an output end and a ground end; The input terminal is connected to the third port of the three-port device, and the ground terminal of the amplifier is grounded. The superconducting nanowire single-photon detection system with impedance matching transmission line of the present invention can realize a specific frequency signal (rising edge high-frequency component) by integrating a superconducting nanowire single-photon detector and a 1/4 wavelength impedance matching transmission line on the same chip. ) matching readout to achieve pulse amplitude amplification and reduce time jitter; by integrating a superconducting nanowire single-photon detector and a high-pass filter on the same chip, the low-frequency components in the signal can be shaped and removed, thereby improving the count rate and detection. speed, greatly improving the overall performance of the superconducting nanowire single-photon detector; the superconducting nanowire single-photon detection system with impedance matching transmission line of the present invention does not require a high-impedance low-temperature amplifier, can ensure signal amplitude and signal-to-noise ratio, and characterize The difficulty is low and the system is simple.

上述实施例仅例示性说明本发明的原理及其功效,而非用于限制本发明。任何熟悉此技术的人士皆可在不违背本发明的精神及范畴下,对上述实施例进行修饰或改变。因此,举凡所属技术领域中具有通常知识者在未脱离本发明所揭示的精神与技术思想下所完成的一切等效修饰或改变,仍应由本发明的权利要求所涵盖。The above-mentioned embodiments merely illustrate the principles and effects of the present invention, but are not intended to limit the present invention. Anyone skilled in the art can modify or change the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or changes made by those with ordinary knowledge in the technical field without departing from the spirit and technical idea disclosed in the present invention should still be covered by the claims of the present invention.

Claims (9)

1. A superconducting nanowire single photon detection system with impedance matched transmission lines, comprising:
a superconducting nanowire single photon detector;
1/4 wavelength impedance matching transmission line, one end of which is connected with the superconducting nanowire single photon detector;
one end of the high-pass filter is connected with one end of the 1/4 wavelength impedance matching transmission line connected with the superconducting nanowire single-photon detector, and the other end of the high-pass filter is grounded;
the three-port device comprises a first port, a second port and a third port, wherein the first port of the three-port device is connected with one end, far away from the superconducting nanowire single photon detector and the high-pass filter, of the 1/4 wavelength impedance matching transmission line;
a current source having one end connected to the second port of the three-port device;
the amplifier comprises an input end, an output end and a grounding end; the input end of the amplifier is connected with the third port of the three-port device, and the grounding end of the amplifier is grounded;
the superconducting nanowire single photon detector, the 1/4 wavelength impedance matching transmission line and the high-pass filter are integrated on the same chip.
2. The superconducting nanowire single photon detection system with impedance matched transmission line of claim 1 wherein the equivalent circuit of the superconducting nanowire single photon detector comprises:
one end of the equivalent dynamic inductor is connected with the 1/4 wavelength impedance matching transmission line;
one end of the equivalent resistor is connected with one end of the equivalent dynamic inductor, which is far away from the 1/4 wavelength impedance matching transmission line, and the other end of the equivalent resistor is grounded;
and one end of the switch is connected with one end of the equivalent dynamic inductor, which is far away from the 1/4 wavelength impedance matching transmission line, and the other end of the switch is grounded.
3. The superconducting nanowire single photon detection system with impedance matched transmission line of claim 1 wherein the high pass filter comprises:
one end of the filter resistor is connected with one end of the 1/4 wavelength impedance matching transmission line;
and one end of the filter inductor is connected with one end of the filter resistor, which is far away from the 1/4 wavelength impedance matching transmission line, and the other end of the filter inductor is grounded.
4. The superconducting nanowire single photon detection system with impedance matched transmission line of claim 3 wherein the resistance of the filter resistor comprises 50 ohms; the cut-off frequency of the high-pass filter comprises hundreds of MHZ.
5. The superconducting nanowire single photon detection system with impedance matched transmission line of claim 1, wherein the three-port device comprises:
one end of the port resistor is connected with the current source, and the other end of the port resistor is connected with one end, far away from the superconducting nanowire single-photon detector and the high-pass filter, of the 1/4 wavelength impedance matching transmission line;
and one end of the port capacitor is connected with one end of the 1/4 wavelength impedance matching transmission line, which is far away from the superconducting nanowire single photon detector and the high-pass filter, and the other end of the port capacitor is connected with the input end of the amplifier.
6. The superconducting nanowire single photon detection system with impedance matched transmission line of claim 1, wherein the amplifier comprises:
one end of the amplifier capacitor is connected with the third port of the three-port device;
and one end of the amplifier resistor is connected with one end of the amplifier capacitor, which is far away from the three-port device, and the other end of the amplifier resistor is grounded.
7. The superconducting nanowire single photon detection system with impedance matched transmission line of claim 1 further comprising:
one end of the first coaxial cable is connected with one end, far away from the superconducting nanowire single-photon detector and the high-pass filter, of the 1/4 wavelength impedance matching transmission line;
one end of the second coaxial cable is connected with one end of the first coaxial cable, which is far away from the 1/4 wavelength impedance matching transmission line, and the other end of the second coaxial cable is connected with the first port of the three-port device;
and one end of the third coaxial cable is connected with the third port of the three-port device, and the other end of the third coaxial cable is connected with the input end of the amplifier.
8. The superconducting nanowire single photon detection system with impedance matched transmission line of any one of claims 1 to 7, wherein the impedance of the 1/4 wavelength impedance matched transmission line satisfies traveling wave matching relationship to achieve impedance matching of the superconducting nanowire single photon detector with peripheral readout circuitry including the three-port device and the amplifier.
9. The superconducting nanowire single photon detection system with impedance matched transmission line of claim 8, wherein the width of the 1/4 wavelength impedance matched transmission line is determined by the characteristic impedance of the 1/4 wavelength impedance matched transmission line, and the characteristic impedance of the 1/4 wavelength impedance matched transmission line is determined by the material of the superconducting nanowire in the superconducting nanowire single photon detector; the length of the 1/4 wavelength impedance matching transmission line is determined by the center frequency of the rising edge in the signal transmitted by the 1/4 wavelength impedance matching transmission line to enable the readout of the rising edge of the signal.
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