[go: up one dir, main page]

CN110785633A - Encoder for encoding a video signal - Google Patents

Encoder for encoding a video signal Download PDF

Info

Publication number
CN110785633A
CN110785633A CN201880040836.0A CN201880040836A CN110785633A CN 110785633 A CN110785633 A CN 110785633A CN 201880040836 A CN201880040836 A CN 201880040836A CN 110785633 A CN110785633 A CN 110785633A
Authority
CN
China
Prior art keywords
sensors
encoder
signal
angle
integer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201880040836.0A
Other languages
Chinese (zh)
Other versions
CN110785633B (en
Inventor
渡部司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
National Institute of Advanced Industrial Science and Technology AIST
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Institute of Advanced Industrial Science and Technology AIST filed Critical National Institute of Advanced Industrial Science and Technology AIST
Publication of CN110785633A publication Critical patent/CN110785633A/en
Application granted granted Critical
Publication of CN110785633B publication Critical patent/CN110785633B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/245Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

编码器10设置为:M个传感器31~34,将以预定角度间隔配置于基体的表示角度的多个组件予以检测而生成具有周期性的第一信号,M个传感器以预定角度配置,预定角度为360/M×(j‑1)(度)与360/N×MOD[(kj‑1)/D](度)所组合出的角度,其中M为2以上的整数,N为组件数量,MOD为将输入值的小数点以下的值输出的函数,D为M的因子或是为M但是不为1,j为在1至M的整数中由M个传感器取各自相异的值,kj为1至M的整数;生成器41~44,对M个传感器的每一个传感器,基于第一信号而生成第二信号,第二信号内插预定角度间隔;以及运算器50,将对于M个传感器的第二信号合并运算而求得角度位置或旋转角。

Figure 201880040836

The encoder 10 is provided with: M sensors 31 to 34, which detect a plurality of components representing angles arranged on the base at predetermined angular intervals to generate a periodic first signal, the M sensors are arranged at a predetermined angle, and the predetermined angle is the angle formed by 360/M×(j‑1)(degree) and 360/N×MOD[(k j ‑1)/D](degree), where M is an integer greater than 2, and N is the number of components , MOD is a function that outputs the value below the decimal point of the input value, D is a factor of M or M but not 1, j is an integer from 1 to M to take different values from M sensors, k j is an integer from 1 to M; generators 41 to 44, for each of the M sensors, generate a second signal based on the first signal, the second signal interpolates a predetermined angular interval; and an operator 50, for M The second signals of the two sensors are combined and calculated to obtain an angular position or a rotation angle.

Figure 201880040836

Description

编码器Encoder

技术领域technical field

本发明关于检测位置及角度的编码器。The present invention relates to an encoder for detecting position and angle.

背景技术Background technique

编码器为读取刻划在刻度盘的等角度间隔的刻度而测定旋转角及绝对角度位置等的位置的装置。刻度的间隔,根据刻划精密度或侦测刻度的传感器的精密度而其精密度有限,因而刻度所致的分辨率的提升也有限。因此,将进一步分割最小刻度间隔的正弦波经互相偏移90度相位的二个模拟信号予以生成,进行该二个模拟信号的arctan运算,使用表示角度的内插信号而决定角度,使分辨率提升。An encoder is a device for measuring positions such as a rotation angle and an absolute angular position by reading scales engraved at equal angular intervals on a dial. The interval of the scale is limited according to the precision of the marking or the precision of the sensor that detects the scale, so the improvement of the resolution caused by the scale is also limited. Therefore, two analog signals whose phases are shifted by 90 degrees are generated from sine waves further divided by the minimum scale interval, arctan operation is performed on the two analog signals, and the angle is determined using the interpolation signal representing the angle, and the resolution is promote.

再者,为了降低刻度的刻划误差及编码器的安装误差等,使用了配置多个传感器并将从各个传感器所得到的内插信号平均化的方法。再者,提案有进一步设置校正用的传感器以进行角度误差的自己校正的方法(例如,参考专利文献1)。Furthermore, in order to reduce the scribing error of the scale, the installation error of the encoder, and the like, a method of arranging a plurality of sensors and averaging the interpolated signals obtained from the respective sensors is used. Furthermore, there has been proposed a method of further providing a sensor for correction to perform self-correction of the angle error (for example, refer to Patent Document 1).

[现有技术文献][Prior Art Literature]

[专利文献][Patent Literature]

[专利文献1]日本特开2011-99804号公报[Patent Document 1] Japanese Patent Laid-Open No. 2011-99804

发明内容SUMMARY OF THE INVENTION

[发明所欲解决的问题][Problems to be Solved by Invention]

本发明的目的在于提供能够兼得高分辨率及高精密度的崭新且有用的编码器。An object of the present invention is to provide a novel and useful encoder capable of achieving both high resolution and high precision.

根据本发明的一方面,提供一种编码器,包含:M个传感器,将表示角度且以预定角度间隔配置于基体的多个组件予以检测而生成具有周期性的第一信号,M个所述传感器以预定角度配置,所述预定角度为360/M×(j-1)(度)与360/N×MOD[(kj-1)/D](度)所组合出的角度,其中M为2以上的整数,N为组件数量,MOD为将输入值的小数点以下的值输出的函数,D为M的因子或是为M但是不为1,j为在1至M的整数中由M个所述传感器取各自相异的值,kj为1至M的整数;生成器,对M个所述传感器的每一个传感器,基于所述第一信号而生成第二信号,所述第二信号内插所述预定角度间隔;以及运算器,将对于M个所述传感器的所述第二信号合并运算而求得角度位置或旋转角。According to an aspect of the present invention, an encoder is provided, comprising: M sensors for detecting a plurality of components representing an angle and arranged on a base at a predetermined angular interval to generate a first signal with periodicity, the M sensors The sensor is configured at a predetermined angle, and the predetermined angle is an angle formed by 360/M×(j-1)(degree) and 360/N×MOD[(k j -1)/D](degree), where M is an integer of 2 or more, N is the number of components, MOD is a function that outputs the value below the decimal point of the input value, D is a factor of M or M but not 1, and j is an integer from 1 to M consisting of M Each of the sensors takes different values, and k j is an integer from 1 to M; the generator, for each of the M sensors, generates a second signal based on the first signal, the second signal signal interpolation at the predetermined angular interval; and an arithmetic unit for obtaining an angular position or a rotation angle by combining and computing the second signals for the M sensors.

根据上述方面,通过将M个传感器相对于以预定角度间隔配置有表示角度的多个组件的基体,而配置在360/M×(j-1)(度)与360/N×MOD[(kj-1)/D](度)所组合出的角度的位置,而能够将起因于基于传感器所生成的第一信号而生成的内插上述预定角度间隔的第二信号的角度误差的编码器的角度误差予以降低,并且也能够将起因于对基体的旋转轴的安装所致的偏心所致的误差及以等角度间隔配置的多个组件的形成位置的误差的编码器的角度误差予以降低,结果能够提供兼得高分辨率及高精密度的编码器。According to the above aspect, by arranging the M sensors with respect to the base in which the plurality of components representing the angles are arranged at predetermined angular intervals, the distances between 360/M×(j−1) (degrees) and 360/N×MOD[(k j -1)/D] (degrees), an encoder capable of interpolating the angle error of the second signal generated based on the first signal generated by the sensor and interpolating the second signal at the predetermined angular interval. The angular error of the encoder can be reduced, and the angular error of the encoder can also be reduced due to the error due to the eccentricity caused by the attachment to the rotation shaft of the base and the error of the formation position of a plurality of components arranged at equal angular intervals. , as a result, an encoder with both high resolution and high precision can be provided.

根据本发明的另一方面,提供一种编码器,包含:M个传感器,将表示位置且以预定间隔配置在基体的多个组件予以检测而生成具有周期性的第一信号,M个所述传感器互相间隔预定距离而配置,所述预定距离为所述预定间隔(gl)的整数(mj)倍的gl×mj与gl×MOD[(kj-1)/D]所组合出的位置,其中M为2以上的整数,MOD为将输入值的小数点以下的值输出的函数,D为M的因子或是为M但是不为1,kj为1至M的整数;生成器,对M个所述传感器的每一个传感器,基于所述第一信号而生成内插所述预定间隔的组件之间的第二信号;以及运算器,将对于M个所述传感器的所述第二信号合并运算而求得位置或移动量。According to another aspect of the present invention, there is provided an encoder comprising: M sensors for generating a periodic first signal by detecting a plurality of components representing positions and arranged on a base at predetermined intervals, the M sensors The sensors are arranged at a predetermined distance from each other, and the predetermined distance is a combination of gl×m j and gl×MOD[(k j -1)/D] which is an integer (m j ) multiple of the predetermined interval (gl) position, where M is an integer greater than or equal to 2, MOD is a function that outputs the value below the decimal point of the input value, D is a factor of M or M but not 1, and k j is an integer from 1 to M; the generator, for each of the M sensors, generating, based on the first signal, a second signal interpolating between components of the predetermined interval; and an operator, for the second of the M sensors The position or movement amount is obtained by combining the signals.

根据上述方面,通过将M个传感器相对于以预定间隔配置有表示位置的多个组件的基体,而配置在该预定间隔(gl)的整数(mj)倍的gl×mj与gl×MOD[(kj-1)/D]所组合出的位置,而能够将起因于基于传感器所生成的第一信号而生成的内插上述预定间隔的第二信号的位置误差的编码器的位置误差予以降低,并且也能够将起因于对基体的对象物的安装所致的位置误差及以预定间隔配置的多个组件的形成位置的误差的编码器的误差予以降低,结果能够提供兼得高分辨率及高精密度的编码器。According to the above aspect, by arranging the M sensors at the predetermined interval (gl) with respect to the base in which the plurality of components representing the positions are arranged at an integer (m j ) multiple of the predetermined interval (gl), gl×m j and gl×MOD [(k j -1)/D] combined position, the position error of the encoder caused by the position error of the second signal generated based on the first signal generated by the sensor and the interpolation of the second signal at the predetermined interval can be calculated. It is also possible to reduce the error of the encoder due to the position error caused by the attachment of the object to the base and the error of the formation position of the plurality of components arranged at a predetermined interval. As a result, it is possible to provide both high resolution. high-speed and high-precision encoder.

附图说明Description of drawings

[图1]为表示旋转编码器的角度误差的图。[ Fig. 1] Fig. 1 is a diagram showing an angle error of a rotary encoder.

[图2]为表示旋转编码器的图1所示之角度误差的离散傅立叶变换(DFT)分析的图。[ Fig. 2] Fig. 2 is a diagram showing discrete Fourier transform (DFT) analysis of the angle error shown in Fig. 1 of the rotary encoder.

[图3]为表示旋转编码器的图1所含的内插信号的角度误差的图。[ Fig. 3] Fig. 3 is a diagram showing an angular error of an interpolation signal included in Fig. 1 of the rotary encoder.

[图4]为表示关于本发明的第一实施方式的编码器的概要构成的图。[ Fig. 4] Fig. 4 is a diagram showing a schematic configuration of an encoder according to the first embodiment of the present invention.

[图5]为表示关于本发明的第一实施方式的编码器的传感器的配置位置的图。[ Fig. 5] Fig. 5 is a diagram showing an arrangement position of sensors of the encoder according to the first embodiment of the present invention.

[图6]为表示本发明的第一实施方式之中各个传感器的配置位置的一范例的图。[ Fig. 6] Fig. 6 is a diagram showing an example of an arrangement position of each sensor in the first embodiment of the present invention.

[图7]为表示关于本发明的第一实施方式的编码器的内插信号的角度误差的图。[ Fig. 7] Fig. 7 is a diagram showing an angular error of an interpolation signal of the encoder according to the first embodiment of the present invention.

[图8]为表示关于本发明的第一实施方式的编码器的角度误差的图。[ Fig. 8] Fig. 8 is a diagram showing an angular error of the encoder according to the first embodiment of the present invention.

[图9]为表示关于本发明的第一实施方式的编码器的角度误差的DFT分析的图。[ Fig. 9] Fig. 9 is a diagram showing DFT analysis of the angle error of the encoder according to the first embodiment of the present invention.

[图10]为表示关于本发明的第二实施方式的编码器的概要构成的图。10 is a diagram showing a schematic configuration of an encoder according to a second embodiment of the present invention.

[图11]为表示本发明的第二实施方式之中各个传感器的配置位置的一范例的图。[ Fig. 11] Fig. 11 is a diagram showing an example of an arrangement position of each sensor in the second embodiment of the present invention.

具体实施方式Detailed ways

本发明人为了达成旋转编码器的高分辨率及高精密度化而进行研究,面临以下所说明的课题,并且找出了其解决手段。The inventors of the present invention conducted studies in order to achieve high resolution and high precision of the rotary encoder, faced the problems described below, and found a solution to the problem.

旋转编码器之中,以传感器读取涵盖360度设有刻度的刻度盘,基于该刻度生成正弦波及余弦波而生成内插刻度之间的信号(以下称为内插信号)。然后,基于内插信号生成角度信号,从角度信号检测出现在的角度或旋转角。设有多个传感器的场合,将自各个传感器的角度信号平均化而求得角度。内插信号用于检测比最小刻度更小的角度,换言之用于高分辨率化。Among the rotary encoders, a sensor reads a scale with a scale covering 360 degrees, generates a sine wave and a cosine wave based on the scale, and generates a signal between the interpolation scales (hereinafter referred to as an interpolated signal). Then, an angle signal is generated based on the interpolated signal, and the present angle or rotation angle is detected from the angle signal. When a plurality of sensors are provided, the angle is obtained by averaging the angle signals from the respective sensors. The interpolation signal is used to detect an angle smaller than the minimum scale, in other words, to increase the resolution.

旋转编码器,通过对刻度盘以等角度间隔配置多个传感器并将所输出的多个角度信号平均化,而降低旋转编码器的偏心误差及刻度盘的各刻度的角度位置的误差。然而,一旦调查旋转编码器的角度误差,则依然有角度误差残留,变成高精密度化的障碍。本发明人调查了以90度的等角度间隔配置有4个传感器的旋转编码器的角度误差。刻度盘的刻度数量N为360个,换言之,以间隔1度而等间隔设置,通过内插信号而32整数倍。4个传感器依照刻度盘的旋转,检测含有基本刻度与通过内插分割所产生的角度误差的信号。The rotary encoder can reduce the eccentricity error of the rotary encoder and the angular position error of each scale of the scale by arranging a plurality of sensors on the scale at equal angular intervals and averaging the plurality of output angle signals. However, once the angle error of the rotary encoder is investigated, the angle error still remains, which becomes an obstacle to high precision. The present inventors investigated the angle error of a rotary encoder in which four sensors are arranged at equal angular intervals of 90 degrees. The number N of scales on the dial is 360, in other words, they are provided at equal intervals at intervals of 1 degree, and are multiplied by 32 integers by interpolating the signal. According to the rotation of the dial, the four sensors detect the signal including the basic scale and the angle error generated by the division by interpolation.

图1为表示旋转编码器的角度误差的图,为将从4个传感器的角度信号平均化时的角度误差。参照图1而得知,涵盖360度(一周),角度误差有最大±30秒。FIG. 1 is a diagram showing an angle error of a rotary encoder, which is an angle error when angle signals from four sensors are averaged. Referring to FIG. 1 , it can be seen that, covering 360 degrees (one circle), the angle error has a maximum of ±30 seconds.

图2为表示旋转编码器的图1所示之角度误差的离散傅立叶变换(DFT)分析的图。FIG. 2 is a diagram showing discrete Fourier transform (DFT) analysis of the angle error shown in FIG. 1 of the rotary encoder.

参照图2而得知,低次部分小,对偏心误差及刻度的角度误差的降低有效。但是,360、720、1080、1440及1800次部分的角度误差为大,有2秒至11秒程度。这些角度误差部分,对于传感器数量M为4而刻度数量N为360,传感器数量M成为刻度数量360的因子,因而刻度数量的倍数次的角度误差作为内插信号的角度误差而产生。例如,传感器数量不是4个,即使为3个、5个或6个,由于是刻度数量360的因子而同样地会产生内插信号的角度误差。Referring to FIG. 2 , it can be seen that the low-order portion is small, which is effective in reducing the eccentricity error and the angular error of the scale. However, the angle errors of the 360th, 720th, 1080th, 1440th, and 1800th order parts are large, ranging from 2 seconds to 11 seconds. For these angular error portions, the number of sensors M is 4 and the number of scales N is 360, the number of sensors M becomes a factor of the number of scales 360, and angle errors of multiples of the number of scales are generated as angular errors of the interpolated signal. For example, if the number of sensors is not 4, but even if it is 3, 5, or 6, the angle error of the interpolated signal will be generated in the same way because it is a factor of 360 of the number of scales.

作为降低如此的内插信号的角度误差的一个方法,以等角度间隔配置传感器数量为7个或13个即可。7不是刻度数量360的因子,因而能够降低内插信号的角度误差。As one method of reducing the angular error of such an interpolation signal, the number of sensors may be 7 or 13 arranged at equal angular intervals. 7 is not a factor of 360 for the number of ticks, so the angular error of the interpolated signal can be reduced.

图3为依每个传感器表示旋转编码器的图1所含的内插信号的角度误差的图。图3为仅将角度误差之中内插信号的角度误差分离并依各个传感器表示者,横轴为角度(度),纵轴为角度误差(秒),黑色三角形(▲)的位置表示刻度盘的刻度的位置。FIG. 3 is a diagram showing the angular error of the interpolation signal included in FIG. 1 of the rotary encoder for each sensor. Figure 3 shows only the angle error of the interpolated signal from the angle error and is represented by each sensor. The horizontal axis is the angle (degrees), the vertical axis is the angle error (seconds), and the position of the black triangle (▲) represents the dial the position of the scale.

参照图3而得知,传感器1至传感器4的各个角度误差的波形几乎相同,相位也几乎一致。据此,即使将传感器1至传感器4的角度信号平均化,传感器1至传感器4的角度误差也无法互相抵消,如图2所示,残留有内插信号的角度误差。Referring to FIG. 3 , it can be seen that the waveforms of the angle errors of the sensors 1 to 4 are almost the same, and the phases are also almost the same. Accordingly, even if the angle signals of the sensors 1 to 4 are averaged, the angle errors of the sensors 1 to 4 cannot cancel each other, and as shown in FIG. 2 , the angle errors of the interpolated signals remain.

于是,本发明的目的在于提供一种通过对刻度盘的刻度,将多个传感器的位置互相偏移,而降低内插信号的角度误差的兼得高分辨率及高精密度化的编码器。Accordingly, an object of the present invention is to provide an encoder with both high resolution and high precision which reduces the angle error of the interpolation signal by shifting the positions of the plurality of sensors from each other by adjusting the scale of the dial.

以下基于附图说明本发明的一实施方式。另外,对多个附图之间当中共通的组件附上相同符号,省略该组件的重复的详细说明。Hereinafter, an embodiment of the present invention will be described based on the drawings. In addition, the same code|symbol is attached|subjected to the component which is common among several drawings, and the repeated detailed description of the component is abbreviate|omitted.

[第一实施方式][First Embodiment]

图4为表示关于本发明的第一实施方式的编码器的概要构成的图。FIG. 4 is a diagram showing a schematic configuration of an encoder according to the first embodiment of the present invention.

参照图4,关于第一实施方式的编码器10具有:具有配置在为角度测定对象的旋转轴15并且以等间隔形成于周方向的刻度21的刻度盘20、检测刻度21并且基于该检测而生成具有周期性的互相偏移90度相位的正弦波的检测信号的4个传感器31~34、基于对各个传感器31~34的检测信号而将内插刻度的间隔的内插信号(亦称为角度信号)生成的内插信号生成器41~44以及基于内插信号将对于各个传感器31~34的内插信号合并运算而求得角度位置或旋转角的运算器50。Referring to FIG. 4 , the encoder 10 according to the first embodiment includes a dial 20 having scales 21 arranged on the rotation shaft 15 to be measured in the angle and formed at equal intervals in the circumferential direction, detection scales 21 , and based on the detection The four sensors 31 to 34 that generate detection signals of sine waves whose phases are periodically shifted by 90 degrees from each other, and the interpolated signals (also referred to as the interpolated signals at intervals of the scale) based on the detection signals of the respective sensors 31 to 34 Interpolation signal generators 41 to 44 for generating angle signals), and calculator 50 for calculating the angular position or rotation angle by combining and calculating the interpolated signals for each of the sensors 31 to 34 based on the interpolation signals.

刻度盘20以与旋转轴15同心的方式安装,在周方向等间隔地设有刻度21,刻度21的部分可让光穿透过。The dial 20 is installed concentrically with the rotating shaft 15, and is provided with scales 21 at equal intervals in the circumferential direction, and the portion of the scale 21 allows light to pass therethrough.

传感器31~34皆具有发光组件35、狭缝36及受光组件37。图4之中,省略传感器32~34的构成组件的详细而记载,但是传感器32~34具有与传感器31相同的构成组件。传感器31~34的发光组件35所发出的光透过刻度21并通过狭缝36而由受光组件37进行受光。传感器31~34的受光组件37根据所受光的光的强度,将互相偏移90度相位的正弦波的电气信号生成而作为检测信号进行输出。2个互相偏移90度相位的正弦波的电气信号,例如一方为Sin电压信号,另一方则为Cos电压信号。Each of the sensors 31 to 34 has a light-emitting element 35 , a slit 36 and a light-receiving element 37 . In FIG. 4 , the details of the constituent elements of the sensors 32 to 34 are omitted and described, but the sensors 32 to 34 have the same constituent elements as the sensor 31 . The light emitted by the light-emitting elements 35 of the sensors 31 to 34 passes through the scale 21 and passes through the slit 36 to be received by the light-receiving element 37 . The light-receiving elements 37 of the sensors 31 to 34 generate electric signals of sine waves whose phases are shifted by 90 degrees from each other according to the intensity of the received light, and output them as detection signals. Two electrical signals of sine waves whose phases are shifted by 90 degrees from each other, for example, one is a Sin voltage signal, and the other is a Cos voltage signal.

内插信号生成器41~44,其输入部与传感器31~34的输出部电气连接,而基于所输入的检测信号将内插信号生成。具体而言,从检测信号的Sin电压信号及Cos电压信号的arctan(Sin电压信号的电压值/Cos电压信号的电压值)求得角度而将内插信号生成。内插信号为数字信号。内插信号为以等间隔分割刻度间隔的信号,例如数十整数倍~数百整数倍的信号。The input parts of the interpolation signal generators 41 to 44 are electrically connected to the output parts of the sensors 31 to 34 , and generate interpolation signals based on the input detection signals. Specifically, the interpolation signal is generated by obtaining the angle from the arctan (voltage value of the Sin voltage signal/voltage value of the Cos voltage signal) of the Sin voltage signal and the Cos voltage signal of the detection signal. The interpolated signal is a digital signal. The interpolation signal is a signal in which the scale interval is divided at equal intervals, for example, a signal of several tens of integer multiples to several hundreds of integer multiples.

运算器50分别与内插信号生成器41~44的输出部电气连接,并且将来自内插信号生成器41~44的内插信号合并运算。具体而言,例如,通过对旋转轴15的旋转所生成的内插信号的脉冲进行计数,将所得的脉冲数合并运算,以传感器数量除其结果,而求得角度位置或旋转角。运算器50,通过合并运算,能够抵消内插信号生成器41~44各自的内插信号的角度误差,而能够降低角度误差并提升精密度。The arithmetic unit 50 is electrically connected to the output parts of the interpolation signal generators 41 to 44 , respectively, and combines and calculates the interpolation signals from the interpolation signal generators 41 to 44 . Specifically, for example, the angular position or the rotation angle is obtained by counting the pulses of the interpolation signal generated by the rotation of the rotary shaft 15, combining the obtained pulse numbers, and dividing the result by the number of sensors. The arithmetic unit 50 can cancel the angle errors of the interpolation signals of the interpolation signal generators 41 to 44 by combining operations, thereby reducing the angle errors and improving the precision.

图5为表示关于本发明的第一实施方式的编码器的传感器的配置位置的图。FIG. 5 is a diagram showing an arrangement position of sensors of the encoder according to the first embodiment of the present invention.

参照图5,传感器31~34的检测位置配置在相对于刻度盘20角度为

Figure BDA0002325131950000071
的位置。角度的基点能够任意选择,但是例如能够选择传感器31的位置。角度
Figure BDA0002325131950000072
以算式1表示,θj(度)以算式2表示,δk以算式3表示。Referring to FIG. 5 , the detection positions of the sensors 31 to 34 are arranged at an angle relative to the dial 20 of
Figure BDA0002325131950000071
s position. The base point of the angle can be arbitrarily selected, but for example, the position of the sensor 31 can be selected. angle
Figure BDA0002325131950000072
It is represented by Formula 1, θ j (degree) is represented by Formula 2, and δ k is represented by Formula 3.

Figure BDA0002325131950000073
Figure BDA0002325131950000073

θj=360/M×(j-1),(j=1,2,...,M)…(2)θ j =360/M×(j-1), (j=1,2,...,M)...(2)

δkj=360/N×MOD[(kj-1)/D](kj=1,2,...,M)…(3)δ kj =360/N×MOD[(k j -1)/D](k j =1,2,...,M)...(3)

其中,j为对传感器31~34分配1~M的整数。D为M的因子或是为M(但是不为1)。M为传感器的个数,在第一实施方式之中为4。N为刻度盘20的涵盖360度的刻度21的数量,在第一实施方式之中为360。Here, j is an integer of 1 to M allocated to the sensors 31 to 34 . D is a factor of M or is M (but not 1). M is the number of sensors, which is four in the first embodiment. N is the number of graduations 21 covering 360 degrees of the dial 20, and is 360 in the first embodiment.

上述算式3的MOD为将输入值的小数点以下的值输出的函数。MOD[(kj-1)/D]为比1还小的值(小数),例如MOD[3.75]=0.75,MOD[1.25]=0.25,MOD[0.25]=0.25。如此一来,δkj变成比360/N(度)还要小,换言之,变得比最小刻度间隔还要小。The MOD of the above-mentioned formula 3 is a function to output the value below the decimal point of the input value. MOD[(k j -1)/D] is a value (decimal) smaller than 1, for example, MOD[3.75]=0.75, MOD[1.25]=0.25, and MOD[0.25]=0.25. As a result, δ kj becomes smaller than 360/N (degrees), in other words, smaller than the minimum scale interval.

另外,作为上述算式1的变形例,为

Figure BDA0002325131950000074
亦可。亦即,算式1只要为组合算式2的θj与算式3的δkj的角度即可。In addition, as a modification of the above formula 1, it is
Figure BDA0002325131950000074
You can also. That is, Equation 1 only needs to be an angle combining θ j of Equation 2 and δ kj of Equation 3.

图5之中,配置有4个传感器31~34。此在算式1~3之中,D=M=4的场合。传感器31~34分别配置在角度其中,kj=1~4=1,2,...,4。另外,三角形标记△的对向刻度盘的顶点是表示传感器的检测位置。In FIG. 5 , four sensors 31 to 34 are arranged. This is the case where D=M=4 in the equations 1 to 3. The sensors 31 to 34 are respectively arranged at the angle Among them, k j=1~4 =1,2,...,4. In addition, the apex of the dial facing the triangular mark Δ indicates the detection position of the sensor.

图6为表示本发明的第一实施方式之中各个传感器的配置位置的一范例的图,将图5所示的各个传感器的配置位置扩大表示。图6的(a)~(d)分别表示传感器31~34的配置位置。FIG. 6 is a diagram showing an example of the arrangement position of each sensor in the first embodiment of the present invention, and the arrangement position of each sensor shown in FIG. 5 is enlarged and shown. (a) to (d) of FIG. 6 show the arrangement positions of the sensors 31 to 34, respectively.

参照图6的(a)~(d),传感器31~34配置在

Figure BDA0002325131950000082
(j=1~4的整数)的角度的位置。θj为360度经四等分的角度位置,δkj为将刻度21的最小角度间隔经四等分的角度作为单位的角度。刻度数量N=360的场合,传感器31~34分别配置在例如以下
Figure BDA0002325131950000083
及(4,k4)所表示的角度。Referring to (a) to (d) of FIG. 6 , the sensors 31 to 34 are arranged in
Figure BDA0002325131950000082
(j=integer of 1 to 4) is the position of the angle. θ j is an angular position divided into quarters by 360 degrees, and δ kj is an angle whose unit is an angle at which the minimum angular interval of the scale 21 is divided into quarters. When the number of scales is N = 360, the sensors 31 to 34 are respectively arranged as follows, for example
Figure BDA0002325131950000083
and the angle represented by (4,k 4 ).

传感器31:

Figure BDA0002325131950000084
Sensor 31:
Figure BDA0002325131950000084

传感器32:

Figure BDA0002325131950000085
Sensor 32:
Figure BDA0002325131950000085

传感器33:

Figure BDA0002325131950000086
Sensor 33:
Figure BDA0002325131950000086

传感器34:

Figure BDA0002325131950000087
Sensor 34:
Figure BDA0002325131950000087

图7为表示关于本发明的第一实施方式的编码器的内插信号的角度误差的图。参照图7而得知,传感器11~14的内插信号的角度误差的波形,互相各偏移1/4度(0.25度)相位,反映出传感器31~34的配置的δkjFIG. 7 is a diagram showing an angle error of an interpolation signal of the encoder according to the first embodiment of the present invention. Referring to FIG. 7 , the waveforms of the angle errors of the interpolation signals of the sensors 11 to 14 are each shifted in phase by 1/4 degree (0.25 degrees), reflecting the δ kj of the arrangement of the sensors 31 to 34 .

图8为表示关于本发明的第一实施方式的编码器的角度误差的图。FIG. 8 is a diagram showing an angular error of the encoder according to the first embodiment of the present invention.

参照图8而得知,编码器的角度误差,最大为±16秒,相对于先前所示的图1的角度误差,为约1/2。Referring to FIG. 8 , it can be seen that the angle error of the encoder is ±16 seconds at the maximum, which is about 1/2 of the angle error shown in FIG. 1 previously.

图9为表示关于本发明的第一实施方式的编码器的角度误差的DFT分析的图,为将图8的角度误差予以DFT分析。FIG. 9 is a diagram showing DFT analysis of the angle error of the encoder according to the first embodiment of the present invention, in which the angle error of FIG. 8 is subjected to DFT analysis.

参照图9而得知,为刻度数量360的倍数次的360、720、1080及1800次部分的角度误差为2秒以下,特别是相对于图2,360次部分减少至6%,720次部分减少至9%。这明确地表示了本实施方式的功效。Referring to FIG. 9 , it can be seen that the angular errors of the 360th, 720th, 1080th, and 1800th order parts, which are multiples of the number of scales 360, are less than 2 seconds. In particular, the 360th order part is reduced to 6% compared with FIG. 2, and the 720th order part is reduced to 6%. reduced to 9%. This clearly shows the effect of the present embodiment.

作为传感器31~34的配置位置的变形例(变形例一),上述算式1的δkj可根据算式3取0、0.25、0.50及0.75的值,对传感器31~34任意地分配。例如:(δk1k2k3k4)=(0,0.50,0.25,0.75)、(0,0.75,0.25,0.50)、(0.25,0,0.50,0.75)等。由本发明的原理而知道通过此变形例也同样地得到上述的本实施方式的功效。As a modification example (modification example 1) of the arrangement positions of the sensors 31 to 34 , δ kj of the above-mentioned formula 1 can take values of 0, 0.25, 0.50, and 0.75 according to the formula 3, and can be arbitrarily allocated to the sensors 31 to 34 . For example: (δ k1k2k3k4 )=(0,0.50,0.25,0.75), (0,0.75,0.25,0.50), (0.25,0,0.50,0.75) and so on. It is understood from the principle of the present invention that the effects of the present embodiment described above can be similarly obtained by this modification example.

另外,作为传感器的配置位置的另一变形例(变形例二),算式1的θj可根据算式2而为0、90、180、270,对传感器31~34,从各自的位置仅偏移360/N的整数倍的角度而配置,但是此场合,低次部分的误差会增加,因而θj以等角度间隔进行设定为优选。In addition, as another modification example (modification example 2) of the arrangement position of the sensors, θ j of the formula 1 can be set to 0, 90, 180, and 270 according to the formula 2, and the sensors 31 to 34 are only shifted from the respective positions. However, in this case, the error of the low-order part will increase, so it is preferable to set θ j at equal angular intervals.

进一步,作为另外的变形例(变形例三),算式3的D为M的因子的场合,各个传感器在算式3之中为kj=1~M的整数之一,在传感器的数量为4的场合,D为2时,(δk1k2k3k4)=(0,0.5,0,0.5)。此场合,能够在起因于内插信号的角度误差的编码器的角度误差之中,将N倍次部分(但是(N×D)次部分除外)的误差降低。Furthermore, as another modification example (modification example 3), when D of Equation 3 is a factor of M, each sensor in Equation 3 is one of the integers from k j = 1 to M, and when the number of sensors is 4 In this case, when D is 2, (δ k1 , δ k2 , δ k3 , δ k4 )=(0, 0.5, 0, 0.5). In this case, among the angle errors of the encoder caused by the angle error of the interpolation signal, the error of the N times-order part (excluding the (N×D)-order part) can be reduced.

根据本实施方式,通过将多个传感器31~34相对于刻度盘20,而配置在算式2的右边项360度/M×(j-1)与算式3的右边项360度/N×MOD[(kj-1)/D]所组合出的角度的位置,能够在起因于内插信号的角度误差的编码器的角度误差之中,将N倍次部分(但是,(N×D次部分除外)的误差予以降低,并且也能够将起因于对刻度盘20的旋转轴15的安装所致的偏心所致的误差及刻度盘20的刻度21的形成位置的误差的编码器的角度误差予以降低。因此,根据本实施方式,能够提供兼得高分辨率及高精密度的编码器。According to the present embodiment, the plurality of sensors 31 to 34 are arranged relative to the dial 20 at the right-hand term of Equation 2 360°/M×(j−1) and the right-hand term of Equation 3 360°/N×MOD[ The position of the angle combined by (k j -1)/D] can be calculated by dividing the N-fold part (however, the (N×D-order part) from the angle error of the encoder due to the angle error of the interpolation signal. The error of the encoder is reduced, and the angle error of the encoder caused by the error due to the eccentricity caused by the attachment to the rotary shaft 15 of the dial 20 and the error of the formation position of the scale 21 of the dial 20 can also be reduced. Therefore, according to the present embodiment, it is possible to provide an encoder that achieves both high resolution and high precision.

在本实施方式中,虽列举了使用穿透型的光学传感器的例子,作为代替例,使用刻度盘表示有刻度,在该刻度与其之外的部分利用光学对比的反射式的光学传感器亦可。例如为刻度的部分的反射率比其他部分高或低(换言之,吸收率高)的刻度盘。In the present embodiment, an example of using a transmissive optical sensor is given. As an alternative example, a scale is used to indicate a scale, and a reflection-type optical sensor that optically compares the scale and other portions may be used. For example, it is a dial having a higher or lower reflectivity (in other words, higher absorptivity) of a portion of the scale than other portions.

本实施方式也能够应用于将光学传感器及刻度盘替换成磁气传感器及附有磁气式刻度的磁气式编码器。将检测磁气式刻度的多个磁气传感器,与上述的光学传感器同样的配置即可。The present embodiment can also be applied to a magnetic encoder provided with a magnetic sensor and a magnetic scale in place of the optical sensor and the dial. The plurality of magnetic sensors for detecting the magnetic scale may be arranged in the same manner as the optical sensors described above.

本实施方式的编码器10能够应用于检测旋转轴15的旋转角或转速的递增编码器,且能够应用于检测绝对角度位置的绝对编码器。The encoder 10 of the present embodiment can be applied to an incremental encoder that detects the rotation angle or rotational speed of the rotary shaft 15 , and can be applied to an absolute encoder that detects an absolute angular position.

[第二实施方式][Second Embodiment]

图10为表示关于本发明的第二实施方式的编码器的概要构成的图。FIG. 10 is a diagram showing a schematic configuration of an encoder according to a second embodiment of the present invention.

参照图10,关于第二实施方式的编码器100具有:具有配置在位置或移动量的测定对象物(未图标)并且以等间隔形成于对象物的移动方向(箭头MV所表示的方向)的刻度121的刻度盘120、检测刻度121并且基于该检测而生成具有周期性的互相偏移90度相位的正弦波的检测信号的3个传感器131~133、基于对各个传感器131~133的检测信号而将内插刻度的间隔的内插信号生成的内插信号生成器141~143以及基于内插信号将对于各个传感器131~133的内插信号合并运算而求得位置或移动量的运算器150。Referring to FIG. 10 , an encoder 100 according to the second embodiment includes a measurement object (not shown) arranged at a position or a movement amount and formed at equal intervals in the moving direction of the object (direction indicated by arrow MV). The dial 120 of the scale 121, the three sensors 131 to 133 that detect the scale 121 and generate detection signals having periodic sine waves whose phases are shifted by 90 degrees from each other based on the detection, and the detection signals based on the respective sensors 131 to 133 On the other hand, interpolation signal generators 141 to 143 that generate interpolation signals at intervals of interpolation scales, and calculator 150 that combines and calculates the interpolation signals for each of the sensors 131 to 133 based on the interpolation signals to obtain the position or the amount of movement. .

刻度盘120沿着对象物的移动方向(箭头MV所表示的方向)而安装,并且等间隔地设有刻度121。刻度121的部分能够将光反射。另外,也可为:刻度121部分将光吸收而其周围的刻度盘120的表面是将光反射。The dial 120 is attached along the moving direction of the object (the direction indicated by the arrow MV), and the scales 121 are provided at equal intervals. The portion of the scale 121 can reflect light. In addition, the part of the scale 121 may absorb the light and the surface of the scale 120 around the scale 120 may reflect the light.

传感器131~133各自具有发光组件135及受光组件137。传感器131~133的发光组件135所发出的光透过刻度121反射而由受光组件137进行受光。传感器131~133的受光组件137根据所受光的光的强度,将互相偏移90度相位的正弦波的电气信号生成而作为检测信号进行输出。2个互相偏移90度相位的正弦波的电气信号,例如一方为Sin电压信号,另一方则为Cos电压信号。The sensors 131 to 133 each have a light-emitting element 135 and a light-receiving element 137 . The light emitted by the light emitting elements 135 of the sensors 131 to 133 is reflected through the scale 121 and received by the light receiving element 137 . The light-receiving elements 137 of the sensors 131 to 133 generate electric signals of sine waves whose phases are shifted by 90 degrees from each other according to the intensity of the received light, and output them as detection signals. Two electrical signals of sine waves whose phases are shifted by 90 degrees from each other, for example, one is a Sin voltage signal, and the other is a Cos voltage signal.

内插信号生成器141~143及运算器150分别具有与第一实施方式之中的内插信号生成器41~44及运算器50同样的构成及动作,并求取刻度盘120的位置或移动量。运算器150能够抵消内插信号生成器141~143各自的内插信号的位置误差,而能够降低位置误差并提升精密度。The interpolation signal generators 141 to 143 and the arithmetic unit 150 have the same structures and operations as the interpolation signal generators 41 to 44 and the arithmetic unit 50 in the first embodiment, respectively, and obtain the position or movement of the dial 120 . quantity. The arithmetic unit 150 can cancel the position errors of the interpolation signals of the interpolation signal generators 141 to 143, thereby reducing the position errors and improving the precision.

图11为表示本发明的第二实施方式之中各个传感器的配置位置的一范例的图。图11的(a)~(c)分别表示传感器131~133的配置位置。FIG. 11 is a diagram showing an example of an arrangement position of each sensor in the second embodiment of the present invention. (a) to (c) of FIG. 11 respectively show the arrangement positions of the sensors 131 to 133 .

参照图11,传感器131~133的检测位置配置在相对于刻度盘120的位置p(j,kj)。虽然位置的基准点能够任意选择,但是例如能够选择传感器131的位置。位置p以算式5表示,Lj以算式6表示,δkj以算式7表示。11 , the detection positions of the sensors 131 to 133 are arranged at the position p(j, k j ) with respect to the dial 120 . Although the reference point of the position can be arbitrarily selected, for example, the position of the sensor 131 can be selected. The position p is expressed by Equation 5, L j is expressed in Equation 6, and δ kj is expressed in Equation 7.

p(j,kj)=Ljkj…(5)p(j,k j )=L jkj …(5)

Lj=gl×mj…(6)L j =gl×m j ...(6)

δkj=gl×MOD[(kj-1)/D](kj=1,2,...,M)…(7)δ kj =gl×MOD[(k j -1)/D](k j =1,2,...,M)...(7)

其中,j为对传感器131~133分配1~M的整数。mj为整数,对于j而选择各自相异的整数。D为M的因子或是为M(但是不为1)。gl为刻度间隔。M为传感器的个数,在第二实施方式之中为3。MOD为将输入值的小数点以下的值输出的函数,与第一实施方式相同。另外,作为上述算式5的变形例,为p(j,kj)=Ljkj亦可。换言之,算式5只要是算式6的Lj与算式7的δkj所组合的位置即可。Here, j is an integer of 1 to M allocated to the sensors 131 to 133 . m j is an integer, and different integers are selected for j. D is a factor of M or is M (but not 1). gl is the tick interval. M is the number of sensors, which is three in the second embodiment. MOD is a function that outputs a value below the decimal point of the input value, and is the same as the first embodiment. In addition, as a modification of the above-mentioned formula 5, p(j, k j )=L j −δ kj may be used. In other words, Equation 5 only needs to be a position where L j of Equation 6 and δ kj of Equation 7 are combined.

如图11的(a)~(c)所示,传感器131~133配置在p(j,kj)=Ljkj(j=1~3的整数)的位置。Lj为刻度间隔gl的整数倍(mj倍),δkj为刻度间隔gl经三等分的距离。传感器131~133分别配置在以下的p(1,k1)、p(2,k2)、p(3,k3)所表示的位置。As shown in (a) to (c) of FIG. 11 , the sensors 131 to 133 are arranged at positions of p(j, k j )=L jkj (j=an integer of 1 to 3). L j is an integer multiple (m j times) of the scale interval gl, and δ kj is the distance divided into three equal parts by the scale interval gl. The sensors 131 to 133 are arranged at positions indicated by p(1, k 1 ), p(2, k 2 ), and p(3, k 3 ) below, respectively.

传感器131:p(1,k1)=L1k1=0+0=0Sensor 131: p(1, k 1 )=L 1k1 =0+0=0

传感器132:p(2,k2)=L2k2=gl×10+gl×1/3=(10+1/3)×glSensor 132: p( 2 ,k2)=L2 + δk2 =gl×10+gl×1/3=(10+1/3)×gl

传感器133:p(3,k3)=L3k3=gl×20+gl×2/3=(20+2/3)×glSensor 133: p(3, k 3 )=L 3k3 =gl×20+gl×2/3=(20+2/3)×gl

如此配置传感器131~133,内插信号的位置误差的相位分别互相偏移刻度间隔gl的1/3相位,并以运算器150将对传感器131~133的内插信号合并运算,而降低起因于内插信号的位置误差的误差。其结果,提升了编码器100的精密度。The sensors 131 to 133 are arranged in such a way that the phases of the position errors of the interpolated signals are shifted from each other by 1/3 of the scale interval gl, and the interpolated signals for the sensors 131 to 133 are combined and calculated by the calculator 150, and the reduction caused by The error of the position error of the interpolated signal. As a result, the precision of the encoder 100 is improved.

作为传感器131~133的配置位置的变形例(变形例四),算式5的δkj通过算式7而取0、1/3及2/3的值,但对传感器131~133任意地分配亦可。由本发明的原理而知道通过此变形例也同样地得到上述的本实施方式的功效。As a modification example (modification example 4) of the arrangement positions of the sensors 131 to 133 , δ kj of the formula 5 takes the values of 0, 1/3 and 2/3 according to the formula 7, but the sensors 131 to 133 may be arbitrarily allocated. . It is understood from the principle of the present invention that the effects of the present embodiment described above can be similarly obtained by this modification example.

根据本实施方式,通过将多个传感器131~133相对于刻度盘120,而配置在算式6的右边项gl×mj与算式7的右边项gl×MOD[(kj-1)/D]所组合出的位置,能够将起因于内插信号的角度误差的编码器的角度误差降低,并且也能够将起因于对刻度盘120的对象物的安装的对准所致的误差及刻度盘120的刻度121的形成位置的误差的编码器100的位置误差予以降低。因此,根据本实施方式,能够提供兼得高分辨率及高精密度的编码器。According to the present embodiment, the plurality of sensors 131 to 133 are arranged relative to the dial 120 on the right-hand term gl×m j of Equation 6 and the right-hand term gl×MOD[(k j −1)/D] of Equation 7 The combined position can reduce the angular error of the encoder caused by the angular error of the interpolation signal, and can also reduce the error caused by the alignment of the object attached to the dial 120 and the dial 120 The position error of the encoder 100 is reduced by the formation of the position error of the scale 121 . Therefore, according to the present embodiment, it is possible to provide an encoder that achieves both high resolution and high precision.

另外,在本实施方式之中,能够使用穿透式的传感器及刻度盘来代替反射式的传感器131~133及刻度盘120。进一步,本实施方式能够应用于磁气式的编码器。In addition, in the present embodiment, transmissive sensors and dials can be used instead of the reflective sensors 131 to 133 and the dial 120 . Furthermore, this embodiment can be applied to a magnetic encoder.

以上虽然针对本发明的优选实施方式进行详述,但本发明并非限定于相关特定的实施方式,在权利要求书所记载的本发明的范围内能够进行各种的变形、变更。例如,第一实施方式及第二实施方式之中,在其中一个实施方式中说明的技术思想及变形例,亦可组合至另一个实施方式。The preferred embodiments of the present invention have been described in detail above, but the present invention is not limited to the specific embodiments, and various modifications and changes can be made within the scope of the present invention described in the claims. For example, in the first embodiment and the second embodiment, the technical idea and modification examples described in one of the embodiments may be combined in the other embodiment.

符号说明Symbol Description

10、100 编码器10, 100 encoder

20、120 刻度盘20, 120 dial

21、121 刻度21, 121 scale

31~34、131~133 传感器31~34, 131~133 Sensors

41~44、141~143 内插信号生成器41~44, 141~143 Interpolation signal generator

50、150 运算器50, 150 calculator

Claims (8)

1. An encoder, comprising:
m sensors for detecting a plurality of elements arranged on a substrate at predetermined angular intervals and representing angles, and generating a first signal having periodicity, wherein the M sensors are arranged at predetermined angles, and the predetermined angles are 360/Mx (j-1) (degree) and 360/NxMOD [ (k) j-1)/D](degree) wherein M is an integer of 2 or more, N is the number of elements, MOD is a function of an output of a value of a decimal point or less of an input value, D is a factor of M or M but not 1, j is a value different from each other for M of the sensors in an integer of 1 to M, k is jIs an integer from 1 to M;
a generator that generates, for each of the M sensors, a second signal based on the first signal, the second signal interpolating the predetermined angular interval; and
and an arithmetic unit for calculating an angular position or a rotation angle by combining the second signals for the M sensors.
2. The encoder of claim 1, wherein the substrate is a disk-shaped scale, and the component arrangements are arranged in a circumferential direction.
3. An encoder, comprising:
m sensors for detecting a plurality of elements arranged on a substrate at predetermined intervals to generate a periodic first signal, wherein the M sensors are arranged at predetermined intervals from each other, and the predetermined intervals are integers (M) of the predetermined intervals (gl) j) Multiple of gl × m jAnd gl × MOD [ (k) j-1)/D]The combined positions where M is an integer of 2 or more, MOD is a function of the output of values below the decimal point of the input value, D is a factor of M or is M but not 1, k jIs an integer from 1 to M;
a generator that generates, for each of the M number of the sensors, a second signal between components interpolated at the predetermined intervals based on the first signal; and
and an arithmetic unit for calculating a position or a movement amount by combining the second signals for the M sensors.
4. The encoder according to claim 3, wherein a plurality of the components are arranged in the same direction on the base.
5. The encoder of any of claims 1 to 4, wherein said k is jThe M sensors have different values.
6. The encoder of any one of claims 1 to 5, wherein the D is M.
7. The encoder of any one of claims 1 to 6, wherein the assembly is constituted by a slit for passing light, a member for reflecting light, or a member for absorbing light, and a plurality of the sensors are optical sensors.
8. The encoder according to any one of claims 1 to 6, wherein the component is a convex member or a magnet member made of a ferromagnetic body, and the plurality of sensors are proximity sensors that magnetically detect the convex member or the magnet member.
CN201880040836.0A 2017-08-22 2018-08-13 Encoder Active CN110785633B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2017-159471 2017-08-22
JP2017159471 2017-08-22
PCT/JP2018/030237 WO2019039344A1 (en) 2017-08-22 2018-08-13 Encoder

Publications (2)

Publication Number Publication Date
CN110785633A true CN110785633A (en) 2020-02-11
CN110785633B CN110785633B (en) 2022-03-11

Family

ID=65440055

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201880040836.0A Active CN110785633B (en) 2017-08-22 2018-08-13 Encoder

Country Status (3)

Country Link
JP (1) JP6845517B2 (en)
CN (1) CN110785633B (en)
WO (1) WO2019039344A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024125735A (en) 2023-03-06 2024-09-19 株式会社ミツトヨ Measuring device and measuring method

Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1019602A (en) * 1996-07-01 1998-01-23 Yaskawa Electric Corp Magnetic encoder
CN1188540A (en) * 1995-07-04 1998-07-22 施蓝姆伯格工业公司 Pulse encoder for liquid dispensing apparatus
DE19920596C2 (en) * 1999-05-05 2003-10-30 Maerzhaeuser Senso Tech Gmbh Method for measuring the relative position of two objects
GB0508325D0 (en) * 2005-04-26 2005-06-01 Renishaw Plc Rotary encoders
CN1789920A (en) * 2004-12-16 2006-06-21 阿尔卑斯电气株式会社 Method of calculating compensation value for angle detecting sensor and angle detecting sensor using the method
WO2010023896A1 (en) * 2008-08-26 2010-03-04 株式会社ニコン Encoder system, signal processing method, and transmission signal generation output device
CN102047078A (en) * 2008-06-05 2011-05-04 三菱电机株式会社 Optical encoder
CA2780584A1 (en) * 2009-11-26 2011-06-03 Leica Geosystems Ag Calibration method and angle measuring method for an angle measuring device, and angle measuring device
US20110147572A1 (en) * 2009-12-17 2011-06-23 Canon Kabushiki Kaisha Rotary encoder and rotation mechanism including the same
CN102483336A (en) * 2009-09-09 2012-05-30 斯图加特大学 Device and method for optically compensating for the measuring track decentralization in rotation angle sensors
CN103299153A (en) * 2011-01-07 2013-09-11 东方马达股份有限公司 Device for detecting multi-turn absolute rotation angle, and method for detecting rotation angle thereof
CN103323039A (en) * 2012-03-19 2013-09-25 山洋电气株式会社 Encoder
EP2693221A1 (en) * 2012-07-30 2014-02-05 Nxp B.V. Magnetic Sensor Arrangement
CN103649672A (en) * 2011-07-12 2014-03-19 东方马达股份有限公司 Device for calculating absolute amount of displacement, and method for same
CN105424063A (en) * 2014-09-11 2016-03-23 包米勒公司 Absolute position monitoring system and method

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2767936B2 (en) * 1989-12-01 1998-06-25 日本精工株式会社 Error correction method for linear encoder
JP2001012967A (en) * 1999-04-28 2001-01-19 Asahi Optical Co Ltd Surveying instrument equipped with encoder and magnetic encoder
JP5088313B2 (en) * 2008-12-18 2012-12-05 株式会社安川電機 Linear encoder signal processing apparatus and signal processing method
JP4984269B2 (en) * 2009-11-09 2012-07-25 独立行政法人産業技術総合研究所 Angle detector with complex self-calibration function
US10222243B2 (en) * 2015-08-06 2019-03-05 Wisys Technology Foundation, Inc. Devices, systems and methods for shifted delta sum angle measurement

Patent Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1188540A (en) * 1995-07-04 1998-07-22 施蓝姆伯格工业公司 Pulse encoder for liquid dispensing apparatus
JPH1019602A (en) * 1996-07-01 1998-01-23 Yaskawa Electric Corp Magnetic encoder
DE19920596C2 (en) * 1999-05-05 2003-10-30 Maerzhaeuser Senso Tech Gmbh Method for measuring the relative position of two objects
CN1789920A (en) * 2004-12-16 2006-06-21 阿尔卑斯电气株式会社 Method of calculating compensation value for angle detecting sensor and angle detecting sensor using the method
GB0508325D0 (en) * 2005-04-26 2005-06-01 Renishaw Plc Rotary encoders
CN102047078A (en) * 2008-06-05 2011-05-04 三菱电机株式会社 Optical encoder
WO2010023896A1 (en) * 2008-08-26 2010-03-04 株式会社ニコン Encoder system, signal processing method, and transmission signal generation output device
CN102483336A (en) * 2009-09-09 2012-05-30 斯图加特大学 Device and method for optically compensating for the measuring track decentralization in rotation angle sensors
CA2780584A1 (en) * 2009-11-26 2011-06-03 Leica Geosystems Ag Calibration method and angle measuring method for an angle measuring device, and angle measuring device
US20110147572A1 (en) * 2009-12-17 2011-06-23 Canon Kabushiki Kaisha Rotary encoder and rotation mechanism including the same
CN103299153A (en) * 2011-01-07 2013-09-11 东方马达股份有限公司 Device for detecting multi-turn absolute rotation angle, and method for detecting rotation angle thereof
CN103649672A (en) * 2011-07-12 2014-03-19 东方马达股份有限公司 Device for calculating absolute amount of displacement, and method for same
CN103323039A (en) * 2012-03-19 2013-09-25 山洋电气株式会社 Encoder
EP2693221A1 (en) * 2012-07-30 2014-02-05 Nxp B.V. Magnetic Sensor Arrangement
CN105424063A (en) * 2014-09-11 2016-03-23 包米勒公司 Absolute position monitoring system and method

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
MAHER KAYAL: "Magnetic Angular Encoder Using an Offset Compensation Technique", 《IEEE SENSORS JOURNAL》 *
吴小锋: "基于磁旋转编码器的角度传感器动态误差补偿方法", 《仪表技术与传感器》 *

Also Published As

Publication number Publication date
JP6845517B2 (en) 2021-03-17
WO2019039344A1 (en) 2019-02-28
JPWO2019039344A1 (en) 2020-03-26
CN110785633B (en) 2022-03-11

Similar Documents

Publication Publication Date Title
JP5787513B2 (en) Absolute rotary encoder
KR101449357B1 (en) Optical encoder
JP3168451B2 (en) Rotary encoder
JP5379761B2 (en) Absolute encoder
JP4142942B2 (en) Rotary encoder
WO2011055661A1 (en) Angle detector with combined self calibration function
JPH06258102A (en) Measuring device
JP2013171053A (en) Device for detecting rotational angle of rotary part
JP2012013650A (en) Absolute encoder
JP2014077752A (en) Displacement detector
JPH08178700A (en) Incremental encoder
US11573103B2 (en) Angle detector
JP2016014574A (en) Absolute encoder
CN110785633B (en) Encoder
JP6507347B2 (en) Capacitance type angle detector
JP2004309366A (en) Position detecting device
JP2012013654A (en) Absolute encoder and imaging apparatus
JP2015169602A (en) Position detection device
JP3058406B2 (en) Rotation amount measuring device
JP5902891B2 (en) Encoder and calibration method
CN220708412U (en) Slit part, photoelectric encoder, servo motor and servo system
KR100487839B1 (en) position finder method of digital and analog hybrid type
SU773426A1 (en) Shaft-rotation angle sensor
CN118089801A (en) Slit part, photoelectric encoder, servo motor and servo system
JPS61102822A (en) Encoder

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant