CN110774260A - An ultra-precision piezoelectric micro-clamping manipulator - Google Patents

Abstract

The invention relates to an ultra-precision piezoelectric micro-clamping manipulator, which is composed of a precise multi-degree-of-freedom micro-nano piezoelectric driving unit and a precise micro-clamping unit. Among them, the precision multi-degree-of-freedom micro-nano piezoelectric drive unit is composed of a stator flexible hinge and a rotor, and the piezoelectric stack drive can perform ultra-precision stepping rotary motion and linear movement. Three-layer self-centering three-claw piezoelectric hoop position mechanism, rotary drive mechanism and linear drive mechanism are embedded in the stator flexible hinge, which can perform precise hoop position, rotation and linear drive; the rotor interface is variable, which can be used with precision micro-clamping The unit is easy to connect. The precision micro-clamping unit is embedded with a secondary flexible hinge amplification mechanism, which is driven by the piezoelectric stack to perform precise micro-clamping operations. It has the advantages of simple structure, stable clamping performance, large clamping stroke, low investment and high efficiency.

Description

An ultra-precision piezoelectric micro-clamping manipulator

technical field

The invention relates to the fields of engineering science and technology such as precision micro-nano mechanical clamping operation, precision ultra-precision machining, micro-electromechanical system, biotechnology, etc., in particular to an ultra-precision piezoelectric micro-clamping manipulator.

Background technique

In recent years, with the rapid development of related technologies such as micro-electromechanical systems, micro-clamping machinery, and micro-nano drives, the development and production of robots in the high-tech field have developed rapidly and have become an emerging technology, which has further promoted the development of robotic arms. The development of micro-clamping manipulator can better realize the organic combination of mechanization and automation. At the same time, with the rapid development of precision and ultra-precision machining, electronics, biotechnology, precision measurement and other fields, human demand for ultra-precision micro-clamping robots is also increasing, and major scientific research centers around the world are also actively Research and experiment with technology. However, the traditional manipulator is large in size, complex in structure and low in motion resolution, which has long been unable to meet the application requirements of precision micro-nano mechanical clamping operation, precision ultra-precision machining, MEMS and other fields in modern industry. The micro gripping manipulator is extremely important. Due to the advantages of small size, low frequency response, output load, low noise, and stable performance of the piezoelectric stack, and the flexible hinge has no mechanical friction, no gap, and high motion sensitivity, it is widely used in the field of micro-clamping technology. High-precision piezoelectric micro-grip manipulator with stacking drive source and flexible hinge transmission mechanism. With the rapid and rapid development of the current high-precision industrial field, the traditional manipulator technical indicators can no longer meet its needs. Therefore, the significance of designing an ultra-precision piezoelectric micro-clamping manipulator is very important.

SUMMARY OF THE INVENTION

The purpose of the present invention is to meet the above-mentioned urgent need for micro-clamping technology in the existing high-precision industrial field, and to overcome the fatal defects of traditional manipulators with complex structure, large volume and low motion resolution, and design an ultra-precision ultra-precision The piezoelectric micro-clamping manipulator is mainly used in the field of precision micro-nano mechanical clamping. It has the advantages of simple structure, stable clamping performance, large clamping stroke, low investment and high efficiency.

The invention realizes the alternating hoop position movement of the upper, middle and lower layers of the mover by controlling the logical power-on sequence of the hoop position piezoelectric stack. Combined with the logic power-on control sequence corresponding to the rotary-driven piezoelectric stack and the linear-driven piezoelectric stack, the ultra-precision stepping rotary motion and linear movement of the micro-clamping flexible manipulator are finally realized. The ultra-precision micro-nano clamping process of the micro-clamping flexible manipulator is realized by controlling the power-on sequence of the micro-clamping piezoelectric stack. Therefore, parallel logic controlling the power-on sequence of each piezoelectric stack can meet the general requirements in the field of micro-clamping.

The above-mentioned purpose of the present invention is achieved through the following technical solutions:

An ultra-precision piezoelectric micro-clamping manipulator mainly includes a precision multi-degree-of-freedom micro-nano piezoelectric driving unit and a precision micro-clamping unit, wherein the precision multi-degree-of-freedom micro-nano piezoelectric driving unit is composed of a stator flexible hinge and a rotor, and uses Piezo stack drives enable ultra-precise step-by-step rotary and linear movement. It is characterized in that: the stator flexible hinge (8) is embedded in the upper, middle and lower layers of self-centering three-claw piezoelectric hoop position mechanism, rotary drive mechanism and linear drive mechanism, which can perform precise hoop position, rotation and linear drive .

The self-centering three-claw piezoelectric hoop position mechanism of the upper, middle and lower layers is exactly the same, and the hoop position mechanism of each layer is three groups, which are arranged in triangular symmetry. The stacks (7, 19, 17), the upper, middle and lower wedge block pairs (6, 18, 16) and the upper, middle and lower fastening screws (9, 10, 11) are assembled accordingly.

The said rotary drive mechanism is composed of three groups, which are arranged in triangular symmetry, and are respectively composed of a rotary drive piezoelectric stack (4) and a rotary support block (5) correspondingly assembled.

The linear driving mechanisms are in three groups, arranged in triangular symmetry, and are respectively composed of linear driving piezoelectric stacks (12), bottom wedge block pairs (13) and bottom fastening screws (14) correspondingly assembled.

The rotor (15) is designed with a variable interface, and is connected with the precision micro-clamping unit through a connecting screw (1).

The precise micro-clamping unit is mainly composed of a micro-clamping piezoelectric stack (2), a micro-clamping flexible manipulator (3) and a pre-tightening screw (20).

The main advantage of the present invention is that it can realize the ultra-precision micro-nano clamping operation function, and has the characteristics of good clamping performance, nanometer-level clamping operation resolution, and good repeatability. It can be applied to engineering science and technology fields such as precision micro-nano mechanical clamping operation, precision ultra-precision machining, micro-electromechanical systems, biotechnology, etc. The purpose is to improve the precision and clamping stroke of micro-electromechanical system micro-clamping operation, and reduce the size of mechanical mechanism , Improve the performance of the overall mechanical structure, and at the same time improve the disadvantages of traditional manipulators such as large size, complex structure and low motion resolution. The invention is mainly used in the field of precision micro-nano mechanical clamping, and has the advantages of simple structure, stable clamping performance, large clamping stroke, low investment and high benefit, and has broad application prospects.

Description of drawings

Figure 1 is an axial view of the present invention.

FIG. 2 is a front view of the present invention.

Figure 3 is a top view of the present invention.

Figure 4 is a bottom view of the present invention.

5 is a cross-sectional view of the middle layer of the present invention.

FIG. 6 is a schematic diagram of the precision manipulator of the present invention.

In the picture:

1. Connecting screw; 2. Micro-clamping piezoelectric stack; 3. Micro-clamping flexible manipulator; 4. Rotating drive piezoelectric stack X3;

5. Rotating support block X3; 6. Upper wedge block pair X3; 7. Upper hoop piezoelectric stack X3; 8. Flexible hinge;

9. Upper layer fastening screw X3; 10. Middle layer fastening screw X3; 11. Lower layer fastening screw X3; 12. Linear drive piezoelectric stack X3;

13. Bottom wedge block pair X3; 14. Bottom layer fastening screw X3; 15. Rotor; 16. Lower wedge block pair X3;

17. Lower hoop piezoelectric stack X3; 18. Middle wedge block pair X3; 19. Middle hoop piezoelectric stack X3; 20. Pre-tightening screws;

Detailed ways

The details of the present invention and the specific implementations thereof will be further described below with reference to the accompanying drawings.

1 to 6, an ultra-precision piezoelectric micro-clamping manipulator designed by the present invention mainly includes a precision multi-degree-of-freedom micro-nano piezoelectric driving unit and a precision micro-clamping unit, wherein the precision multi-degree-of-freedom micro-nano piezoelectric The drive unit is composed of a stator flexible hinge and a rotor, and can perform ultra-precise step-by-step rotary motion and linear movement using piezoelectric stack drive. It is characterized in that: the stator flexible hinge (8) is embedded in the upper, middle and lower layers of self-centering three-claw piezoelectric hoop position mechanism, rotary drive mechanism and linear drive mechanism, which can perform precise hoop position, rotation and linear drive .

The self-centering three-claw piezoelectric hoop position mechanism of the upper, middle and lower layers is exactly the same, and the hoop position mechanism of each layer is three groups, which are arranged in triangular symmetry. The stacks (7, 19, 17), the upper, middle and lower wedge block pairs (6, 18, 16) and the upper, middle and lower fastening screws (9, 10, 11) are assembled accordingly.

The said rotary drive mechanism is composed of three groups, which are arranged in triangular symmetry, and are respectively composed of a rotary drive piezoelectric stack (4) and a rotary support block (5) correspondingly assembled.

The linear driving mechanisms are in three groups, arranged in triangular symmetry, and are respectively composed of linear driving piezoelectric stacks (12), bottom wedge block pairs (13) and bottom fastening screws (14) correspondingly assembled.

The rotor (15) is designed with a variable interface, and is connected with the precision micro-clamping unit through a connecting screw (1).

The precise micro-clamping unit is mainly composed of a micro-clamping piezoelectric stack (2), a micro-clamping flexible manipulator (3) and a pre-tightening screw (20).

The precise micro-clamping unit is characterized in that the micro-clamping flexible manipulator (3) is embedded in a rhombus-shaped, lever-magnifying structure secondary flexible hinge amplifying mechanism, which extends the range of the clamping stroke of the micro-clamping manipulator (3).

The precise multi-degree-of-freedom micro-nano piezoelectric drive unit is characterized in that the rotor (15) and the stator flexible hinge (8) are connected by transition fit.

The overall structure of the stator flexible hinge (8) is seamless and arranged in triangular symmetry, wherein the three-layer self-centering three-claw piezoelectric hoop mechanism, the rotary drive mechanism and the linear drive mechanism are all three groups of identical structures, It is integrated with wire cutting to ensure the accuracy and stability of the piezoelectric drive.

The three-layer self-centering three-claw piezoelectric hoop position mechanism realizes the precision of the upper, middle and lower wedge-shaped block pairs (6, 18, 16) by adjusting the upper, middle and lower fastening screws (9, 10, 11). Move to control the precise preload of the upper, middle and lower hoop piezoelectric stacks (7, 19, 17).

The ultra-precise piezoelectric micro-clamping manipulator realizes the alternating hoop position movement of the upper, middle and lower layers by controlling the logic power-on sequence of the upper, middle and lower hoop position piezoelectric stacks (7, 19, 17). Combining the logic power-on control sequence corresponding to the rotationally driven piezoelectric stack (4) and the linearly driven piezoelectric stack (12), the ultra-precision stepping rotary motion and linear movement of the micro-clamping flexible manipulator (3) are finally realized. The power-on sequence of the micro-clamping piezoelectric stack (2) is controlled to control the ultra-precision micro-nano clamping process.

Referring to Fig. 1-6, the concrete working process of the present invention is as follows:

The specific realization of the clamping operation of the ultra-precision piezoelectric micro-clamping manipulator: first, adjust the pre-tightening screw (20) to directly pre-tighten the clamping piezoelectric stack (2), and adjust the upper, middle and lower fastening screws (9, 10, 11) and the bottom tightening screw (14) respectively fine-tune the upper, middle and lower wedge blocks (6, 18, 16) and the bottom wedge block pair (13) to indirectly clamp the piezoelectric stack (2), the upper layer, The middle and lower hoop piezoelectric stacks (7, 19, 17) and the linearly driven piezoelectric stack (12) are preloaded; secondly, control the upper, middle and lower hoop piezoelectric stacks (7, 19, 17) ) logic power-on sequence to realize the alternate hoop movement of the upper, middle and lower layers. Combining the logic power-on control sequence corresponding to the rotary driving piezoelectric stack (4) and the linear driving piezoelectric stack (12), the ultra-precision stepping rotary motion and linear movement of the micro-clamping flexible manipulator (3) are realized. Finally, the ultra-precision micro-nano clamping process is regulated and controlled by controlling the power-on sequence of the micro-clamping piezoelectric stack (2).

The movement of an ultra-precision piezoelectric micro-clamping manipulator involved in the present invention is carried out according to the sequence of strict logic power-on, changing the hoop position and driving the piezoelectric stack control sequence, which can change the direction of rotation and linear motion. The piezoelectric stack is used as the driving source and the precision flexible hinge is used as the power transmission element. It has the characteristics of compact structure, high resolution, no mechanical wear, no idle stroke, small heat generation, stable driving, reliability and high efficiency, and can realize micro Nano-level precision micro-clamping and other functions.

Claims (6)

1. The ultra-precise piezoelectric micro-clamping manipulator mainly comprises a precise multi-degree-of-freedom micro-nano piezoelectric driving unit and a precise micro-clamping unit, wherein the precise multi-degree-of-freedom micro-nano piezoelectric driving unit consists of a stator flexible hinge and a rotor, and can perform ultra-precise stepping rotary motion and linear motion by being driven by a piezoelectric stack. The method is characterized in that: the stator flexible hinge (8) is embedded into the upper, middle and lower layers of self-centering three-jaw piezoelectric hoop positioning mechanism, the rotary driving mechanism and the linear driving mechanism, and can perform precise hoop positioning, rotation and linear driving.

The upper, middle and lower three-layer self-centering three-jaw piezoelectric hoop positioning mechanisms are completely the same, each hoop positioning mechanism is three groups, are in triangular symmetrical arrangement and respectively comprise upper, middle and lower hoop positioning piezoelectric stacks (7, 19 and 17), upper, middle and lower wedge block pairs (6, 18 and 16) and upper, middle and lower fastening screws (9, 10 and 11) which are correspondingly assembled.

The three groups of rotary driving mechanisms are arranged in a triangular symmetrical mode and respectively formed by correspondingly assembling a rotary driving piezoelectric stack (4) and a rotary supporting block (5).

The three linear driving mechanisms are arranged in a triangular symmetrical mode and respectively formed by correspondingly assembling a linear driving piezoelectric stack (12), a bottom layer wedge block pair (13) and a bottom layer fastening screw (14).

The rotor (15) is designed as a variable interface and is connected with the precise micro-clamping unit through a connecting screw (1).

The precise micro-clamping unit mainly comprises a micro-clamping piezoelectric stack (2), a micro-clamping flexible manipulator (3) and a pre-tightening screw (20).

2. The precise micro clamping unit according to claim 1, wherein the micro clamping flexible manipulator (3) is embedded into a diamond-shaped, lever amplification structure secondary flexible hinge amplification mechanism, extending the range of the clamping stroke of the micro clamping manipulator (3).

3. The precise multi-degree-of-freedom micro-nano piezoelectric driving unit according to claim 1, wherein the rotor (15) and the stator flexible hinge (8) are in transition fit connection.

4. The stator flexible hinge (8) of claim 1 is integrated in a whole structure and is arranged in a triangular symmetrical mode, wherein three layers of the self-centering three-jaw piezoelectric hoop positioning mechanism, the rotary driving mechanism and the linear driving mechanism are three groups with the same structure, and are integrally processed by linear cutting, so that the piezoelectric driving precision and stability are guaranteed.

5. The three-layer self-centering three-jaw piezoelectric hoop positioning mechanism of claim 1, wherein the upper, middle and lower wedge block pairs (6, 18 and 16) are precisely moved by adjusting the fastening screws (9, 10 and 11) of the upper, middle and lower layers, and the precise pre-tightening of the hoop positioning piezoelectric stacks (7, 19 and 17) of the upper, middle and lower layers is controlled.

6. The ultra-precise piezoelectric micro-clamping manipulator as claimed in claim 1, wherein the upper, middle and lower hoop position piezoelectric stacks (7, 19, 17) are controlled to be in logic power-on sequence, so that the upper, middle and lower hoop position motions are realized alternately. And finally, ultra-precise stepping rotary motion and linear movement of the micro-clamping flexible manipulator (3) are realized by combining corresponding logic power-on control time sequences of the rotary driving piezoelectric stack (4) and the linear driving piezoelectric stack (12). And controlling the electrifying time sequence of the micro-clamping piezoelectric stack (2) to control the ultra-precise micro-nano clamping process.

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