[go: up one dir, main page]

CN110739380A - Micro light-emitting element and display device - Google Patents

Micro light-emitting element and display device Download PDF

Info

Publication number
CN110739380A
CN110739380A CN201810801693.2A CN201810801693A CN110739380A CN 110739380 A CN110739380 A CN 110739380A CN 201810801693 A CN201810801693 A CN 201810801693A CN 110739380 A CN110739380 A CN 110739380A
Authority
CN
China
Prior art keywords
electrode
layer
protruding structure
emitting element
type semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201810801693.2A
Other languages
Chinese (zh)
Other versions
CN110739380B (en
Inventor
蔡百扬
陈飞宏
史诒君
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PlayNitride Inc
Original Assignee
PlayNitride Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PlayNitride Inc filed Critical PlayNitride Inc
Priority to CN201810801693.2A priority Critical patent/CN110739380B/en
Publication of CN110739380A publication Critical patent/CN110739380A/en
Application granted granted Critical
Publication of CN110739380B publication Critical patent/CN110739380B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/85Packages
    • H10H20/8506Containers
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09FDISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • G09F9/33Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being semiconductor devices, e.g. diodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of semiconductor or other solid state devices
    • H01L25/03Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/075Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H10H20/00
    • H01L25/0753Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H10H20/00 the devices being arranged next to each other
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/85Packages
    • H10H20/857Interconnections, e.g. lead-frames, bond wires or solder balls

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Theoretical Computer Science (AREA)
  • Led Devices (AREA)
  • Led Device Packages (AREA)

Abstract

本发明提供一种微型发光元件,包括元件层、第一电极以及第二电极。元件层包括本体和配置于本体上的凸起结构。第一电极电性连接元件层。第二电极电性连接元件层。第一电极、第二电极及凸起结构设置于本体的同一侧。凸起结构位于第一电极与第二电极之间。第一电极与第二电极的连线通过凸起结构。本体具有表面。凸起结构于表面具有第一高度。第一电极与第二电极的任一于表面具有第二高度。第一高度为H1,第二高度为H2,且0.8≤H1/H2≤1.2。一种具有多个微型发光元件的显示装置也被提出。

Figure 201810801693

The present invention provides a micro-light-emitting element, including an element layer, a first electrode and a second electrode. The element layer includes a body and a protruding structure arranged on the body. The first electrode is electrically connected to the element layer. The second electrode is electrically connected to the element layer. The first electrode, the second electrode and the protruding structure are arranged on the same side of the body. The protruding structure is located between the first electrode and the second electrode. The connection line between the first electrode and the second electrode passes through the protruding structure. The body has a surface. The protruding structure has a first height on the surface. Either the first electrode or the second electrode has a second height on the surface. The first height is H1, the second height is H2, and 0.8≤H1/H2≤1.2. A display device having multiple micro-light-emitting elements is also proposed.

Figure 201810801693

Description

微型发光元件及显示装置Micro light-emitting element and display device

技术领域technical field

本发明涉及一种发光元件及显示装置,尤其涉及一种微型发光元件及显示装置。The present invention relates to a light-emitting element and a display device, in particular to a micro-light-emitting element and a display device.

背景技术Background technique

随着光电技术的演进,传统的白炽灯泡与萤光灯管已逐渐被新一代的固态光源例如是发光二极管(light-emitting diode,LED)所取代,其具有诸如寿命长、体积小、高抗震性、高光效率及低功率消耗等优点,因此已经广泛在家用照明及各种设备中作为光源使用。除了液晶显示器的背光模块与家用照明灯具已广泛采用发光二极管作为光源之外,近年来,发光二极管的应用领域已扩展至道路照明、大型户外看板、交通号志灯、UV固化及相关领域。发光二极管已经成为发展兼具省电及环保功能的光源的主要项目之一。With the evolution of optoelectronic technology, traditional incandescent light bulbs and fluorescent tubes have been gradually replaced by a new generation of solid-state light sources such as light-emitting diodes (LEDs), which have advantages such as long life, small size, and high shock resistance. Therefore, it has been widely used as a light source in household lighting and various equipment. In addition to the backlight modules of liquid crystal displays and household lighting fixtures that have widely used light-emitting diodes as light sources, in recent years, the application fields of light-emitting diodes have expanded to road lighting, large outdoor signboards, traffic lights, UV curing and related fields. Light-emitting diodes have become one of the main projects to develop light sources with both power saving and environmental protection functions.

而在LED领域中,发展出一种将原本发光二极管芯片的尺寸缩小许多,而被称为微型发光二极管(micro light emitting diode)的新技术。相较于目前市面上的有机发光二极管(organic light emitting diode)显示器,微型发光二极管因具有较长的使用寿命与较低的生产成本,有望成为下一代的显示技术主流,也因此吸引许多厂商的积极投入。然而,发光二极管在微型化的同时,也缩短了两电极接垫的间距,在转移至电子装置的接合过程中,分别连接两电极接垫的导电焊材容易因溢流而发生短路,造成不良品发生的机率增加。In the field of LED, a new technology called micro light emitting diode (micro light emitting diode) has been developed that reduces the size of the original light emitting diode chip by a lot. Compared with organic light emitting diode (OLED) displays currently on the market, miniature light emitting diodes are expected to become the mainstream of next-generation display technology due to their longer service life and lower production costs, and thus attract many manufacturers. Actively engage. However, the miniaturization of the light-emitting diode also shortens the distance between the two electrode pads. During the bonding process of transferring to the electronic device, the conductive solders respectively connecting the two electrode pads are easily short-circuited due to overflow, resulting in inconvenience. The chance of a good product will increase.

发明内容SUMMARY OF THE INVENTION

本发明提供一种微型发光元件,转移成功率高。The invention provides a miniature light-emitting element with high transfer success rate.

本发明提供一种显示装置,生产良率高。The present invention provides a display device with high production yield.

本发明的实施例提出一种微型发光元件,包括元件层、第一电极以及第二电极。元件层包括本体和配置于本体上的凸起结构。本体具有表面。第一电极电性连接元件层。第二电极电性连接元件层。第一电极、第二电极及凸起结构设置于本体的同一侧。凸起结构位于第一电极与第二电极之间,且第一电极与第二电极的连线通过凸起结构。凸起结构于表面具有第一高度。第一电极与第二电极的任一于表面具有第二高度。第一高度为H1,第二高度为H2,且0.8≤H1/H2≤1.2。An embodiment of the present invention provides a micro light-emitting element, which includes an element layer, a first electrode and a second electrode. The element layer includes a body and a protruding structure disposed on the body. The body has a surface. The first electrode is electrically connected to the element layer. The second electrode is electrically connected to the element layer. The first electrode, the second electrode and the protruding structure are arranged on the same side of the body. The protruding structure is located between the first electrode and the second electrode, and the connection line between the first electrode and the second electrode passes through the protruding structure. The protruding structure has a first height on the surface. Either one of the first electrode and the second electrode has a second height on the surface. The first height is H1, the second height is H2, and 0.8≤H1/H2≤1.2.

本发明的实施例提出一种显示装置,包括背板、第一接合垫以及第二接合垫以及如上所述的微型发光元件。第一接合垫与第二接合垫设置于背板。微型发光元件的第一电极通过第一接合垫电性连接至背板。微型发光元件的第二电极通过第二接合垫电性连接至背板。第一接合垫与第二接合垫彼此分离。An embodiment of the present invention provides a display device including a backplane, a first bonding pad, a second bonding pad, and the above-mentioned micro light-emitting element. The first bonding pad and the second bonding pad are disposed on the backplane. The first electrode of the micro light-emitting element is electrically connected to the backplane through the first bonding pad. The second electrode of the micro light-emitting element is electrically connected to the backplane through the second bonding pad. The first bond pad and the second bond pad are separated from each other.

在本发明的一实施例中,上述的微型发光元件的凸起结构的最大长度为L1。第一电极与第二电极的间距为S1,且0.8≤L1/S1≤1。In an embodiment of the present invention, the maximum length of the protruding structure of the micro light-emitting element is L1. The distance between the first electrode and the second electrode is S1, and 0.8≤L1/S1≤1.

在本发明的一实施例中,上述的微型发光元件的元件层的最大长度为L2,且L1/L2≤0.8。In an embodiment of the present invention, the maximum length of the element layer of the micro light-emitting element is L2, and L1/L2≤0.8.

在本发明的一实施例中,上述的微型发光元件的第一高度小于第二高度,且(H2-H1)/H1≤0.2。In an embodiment of the present invention, the first height of the micro light-emitting element is smaller than the second height, and (H2-H1)/H1≤0.2.

在本发明的一实施例中,上述的微型发光元件的第一高度大于第二高度,且(H1-H2)/H1≤0.2。In an embodiment of the present invention, the first height of the micro light-emitting element is greater than the second height, and (H1-H2)/H1≤0.2.

在本发明的一实施例中,上述的微型发光元件的元件层的厚度为H3,且0.01≤H1/H3≤0.95。In an embodiment of the present invention, the thickness of the element layer of the micro light-emitting element is H3, and 0.01≤H1/H3≤0.95.

在本发明的一实施例中,上述的微型发光元件的元件层具有相对的两侧缘,且两侧缘的间距为S2,凸起结构与两侧缘的任一的最短间距为S3,且0.01≤S3/S2≤0.2。In an embodiment of the present invention, the element layer of the micro light-emitting element has opposite side edges, and the distance between the two side edges is S2, the shortest distance between the protruding structure and any of the two side edges is S3, and 0.01≤S3/S2≤0.2.

在本发明的一实施例中,上述的微型发光元件的凸起结构在元件层的表面上的正投影面积与元件层的表面的表面积的比值小于等于0.8。In an embodiment of the present invention, the ratio of the orthographic projection area of the convex structure of the micro light-emitting element on the surface of the element layer to the surface area of the surface of the element layer is less than or equal to 0.8.

在本发明的一实施例中,上述的微型发光元件的本体包括第一型半导体层、发光层以及第二型半导体层。发光层设置于第一型半导体层上。第二型半导体层设置于发光层上。凸起结构连接第二型半导体层。In an embodiment of the present invention, the body of the above-mentioned micro light-emitting element includes a first-type semiconductor layer, a light-emitting layer, and a second-type semiconductor layer. The light emitting layer is disposed on the first type semiconductor layer. The second type semiconductor layer is disposed on the light emitting layer. The bump structure is connected to the second type semiconductor layer.

在本发明的一实施例中,上述的微型发光元件的元件层包括第一型半导体层、发光层以及第二型半导体层。发光层设置于第一型半导体层上。第二型半导体层设置于发光层上。凸起结构包括至少部分第二型半导体层。In an embodiment of the present invention, the element layer of the micro light-emitting element includes a first-type semiconductor layer, a light-emitting layer, and a second-type semiconductor layer. The light emitting layer is disposed on the first type semiconductor layer. The second type semiconductor layer is disposed on the light emitting layer. The raised structure includes at least part of the second type semiconductor layer.

在本发明的一实施例中,上述的微型发光元件的凸起结构包括第二型半导体层、发光层与部分第一型半导体层。In an embodiment of the present invention, the above-mentioned protruding structure of the micro light-emitting element includes a second-type semiconductor layer, a light-emitting layer and a part of the first-type semiconductor layer.

在本发明的一实施例中,上述的微型发光元件还包括绝缘层及导电层。绝缘层局部覆盖第一型半导体层与凸起结构。导电层设置于绝缘层上,并连接凸起结构中暴露于绝缘层外的第二型半导体层。第二电极连接导电层,且第一电极连接第一型半导体层。In an embodiment of the present invention, the above-mentioned micro light-emitting element further includes an insulating layer and a conductive layer. The insulating layer partially covers the first type semiconductor layer and the protruding structure. The conductive layer is disposed on the insulating layer and is connected to the second-type semiconductor layer in the raised structure exposed outside the insulating layer. The second electrode is connected to the conductive layer, and the first electrode is connected to the first type semiconductor layer.

在本发明的一实施例中,上述的微型发光元件的第一电极与第二电极具有不同电性。In an embodiment of the present invention, the first electrode and the second electrode of the above-mentioned micro light-emitting element have different electrical properties.

在本发明的一实施例中,上述的显示装置的第一接合垫与第二接合垫在背板上的正投影分别部分重叠于凸起结构在背板上的正投影。In an embodiment of the present invention, the orthographic projections of the first bonding pads and the second bonding pads of the above-mentioned display device on the backplane are respectively partially overlapped with the orthographic projections of the protruding structures on the backplane.

在本发明的一实施例中,上述的显示装置的第一接合垫、第二接合垫及凸起结构在背板上的正投影彼此错开。In an embodiment of the present invention, the orthographic projections of the first bonding pads, the second bonding pads and the protruding structures of the above-mentioned display device on the backplane are staggered from each other.

在本发明的一实施例中,上述的显示装置的凸起结构的顶面与背板的表面切齐。In an embodiment of the present invention, the top surface of the above-mentioned protruding structure of the display device is flush with the surface of the back plate.

在本发明的一实施例中,上述的显示装置的背板具有凹槽,设置在对应的第一接合垫与第二接合垫之间。微型发光元件的部分凸起结构配置于背板的凹槽。In an embodiment of the present invention, the back plate of the above-mentioned display device has a groove, which is disposed between the corresponding first bonding pads and the second bonding pads. Part of the protruding structure of the micro light-emitting element is arranged in the groove of the backplane.

基于上述,本发明一实施例的微型发光元件及显示装置,因具有设置在第一电极与第二电极之间的凸起结构,在微型发光元件转移至显示装置的接合制造中,能有效预防连接第一电极的接合垫与连接第二电极的接合垫因发生溢流而彼此导通,进而提升显示装置的生产良率,同时也能增加微型发光元件的设计裕度。Based on the above, the micro-light-emitting element and the display device according to an embodiment of the present invention have the protruding structure disposed between the first electrode and the second electrode, which can effectively prevent the micro-light-emitting element from being transferred to the display device during the bonding manufacturing process. The bonding pad connected to the first electrode and the bonding pad connected to the second electrode are connected to each other due to overflow, thereby improving the production yield of the display device and increasing the design margin of the micro light-emitting element.

为让本发明的上述特征和优点能更明显易懂,下文特举实施例,并配合所附附图作详细说明如下。In order to make the above-mentioned features and advantages of the present invention more obvious and easy to understand, the following embodiments are given and described in detail with the accompanying drawings as follows.

附图说明Description of drawings

图1为本发明一实施例的微型发光元件的剖面示意图。FIG. 1 is a schematic cross-sectional view of a micro light-emitting device according to an embodiment of the present invention.

图2为本发明一实施例的微型发光元件的上视示意图。FIG. 2 is a schematic top view of a micro light-emitting device according to an embodiment of the present invention.

图3为本发明另一实施例的微型发光元件的剖面示意图。3 is a schematic cross-sectional view of a micro light-emitting device according to another embodiment of the present invention.

图4为本发明又一实施例的微型发光元件的剖面示意图。FIG. 4 is a schematic cross-sectional view of a micro light-emitting device according to another embodiment of the present invention.

图5A至图5B为本发明一实施例的显示装置的接合流程的剖面示意图。5A to 5B are schematic cross-sectional views of a bonding process of a display device according to an embodiment of the present invention.

图6为本发明另一实施例的显示装置的剖面示意图。6 is a schematic cross-sectional view of a display device according to another embodiment of the present invention.

图7为本发明又一实施例的显示装置的剖面示意图。7 is a schematic cross-sectional view of a display device according to still another embodiment of the present invention.

【符号说明】【Symbol Description】

10A、10B、10C:显示装置10A, 10B, 10C: Display device

11、11C:背板11, 11C: Backplane

11Ca:凹槽11Ca: groove

11s、11Cs、142s:表面11s, 11Cs, 142s: Surface

12:第一接合垫12: First bond pad

13:第二接合垫13: Second bond pad

100、100A、100B、100C、100D:微型发光元件100, 100A, 100B, 100C, 100D: Micro light-emitting elements

110、110A、110B:元件层110, 110A, 110B: element layer

110a、110b:侧缘110a, 110b: side edges

111、111A、111B:第一型半导体层111, 111A, 111B: first-type semiconductor layers

112、112A、112B:发光层112, 112A, 112B: light-emitting layer

113、113A、113B:第二型半导体层113, 113A, 113B: second type semiconductor layer

120、120A、120B:第一电极120, 120A, 120B: first electrodes

130、130A、130B:第二电极130, 130A, 130B: the second electrode

140、140A、140B、140C、140D:凸起结构140, 140A, 140B, 140C, 140D: Raised structures

140Ct:顶面140Ct: top surface

142、142A、142B:本体142, 142A, 142B: Body

150、150B、160:绝缘层150, 150B, 160: insulating layer

170:导电层170: Conductive layer

D1:第一方向D1: first direction

D2:第二方向D2: second direction

D3:第三方向D3: third direction

H1:第一高度H1: first height

H2:第二高度H2: second height

H3:厚度H3: Thickness

L1、L2:长度L1, L2: length

S1、S2、S3:间距S1, S2, S3: Spacing

W1、W2、W3、W4:宽度W1, W2, W3, W4: Width

A-A’:剖线A-A': Section line

具体实施方式Detailed ways

图1为本发明一实施例的微型发光元件的剖面示意图。图2为本发明一实施例的微型发光元件的上视示意图。图1可对应于图2的剖线A-A’。特别说明的是,图2省略了图1的绝缘层150的示出。FIG. 1 is a schematic cross-sectional view of a micro light-emitting device according to an embodiment of the present invention. FIG. 2 is a schematic top view of a micro light-emitting device according to an embodiment of the present invention. Figure 1 may correspond to section line A-A' of Figure 2 . In particular, FIG. 2 omits the illustration of the insulating layer 150 in FIG. 1 .

请参照图1及图2,在本实施例中,微型发光元件100包括元件层110、第一电极120及第二电极130。第一电极120电性连接于元件层110。第二电极130电性连接于元件层110。微型发光元件100的元件层110包括凸起结构140和本体142,其中凸起结构140设置于第一电极120与第二电极130之间且配置于本体142上。第一电极120、第二电极130及凸起结构140设置于元件层110的同一侧。更具体而言,第一电极120、第二电极130及凸起结构140设置于本体142的同一侧,且在本体142的表面142s上的正投影不重叠。特别是,在本实施例中,第一电极120及第二电极130的连线通过凸起结构140,所述连线是由第一电极120上的任一点与第二电极130上的任一点所定义,进一步来说,所述连线在表面142s上的正投影会通过凸起结构140,又或者是说,所述连线在表面142s上的正投影会通过凸起结构140在表面142s上的正投影。Referring to FIG. 1 and FIG. 2 , in this embodiment, the micro light-emitting element 100 includes an element layer 110 , a first electrode 120 and a second electrode 130 . The first electrode 120 is electrically connected to the element layer 110 . The second electrode 130 is electrically connected to the element layer 110 . The element layer 110 of the micro light-emitting element 100 includes a protruding structure 140 and a body 142 , wherein the protruding structure 140 is disposed between the first electrode 120 and the second electrode 130 and disposed on the body 142 . The first electrode 120 , the second electrode 130 and the protruding structure 140 are disposed on the same side of the element layer 110 . More specifically, the first electrode 120 , the second electrode 130 and the protruding structure 140 are disposed on the same side of the body 142 , and the orthographic projections on the surface 142s of the body 142 do not overlap. In particular, in this embodiment, the connection between the first electrode 120 and the second electrode 130 passes through the protruding structure 140 , and the connection is between any point on the first electrode 120 and any point on the second electrode 130 By definition, further, the orthographic projection of the connection line on the surface 142s will pass through the convex structure 140 , or in other words, the orthographic projection of the connection line on the surface 142s will pass through the convex structure 140 on the surface 142s orthographic projection on .

在本实施例中,凸起结构140、第一电极120及第二电极130的材质可相同,例如是选自金(Au)、锡(Sn)、镍(Ni)、钛(Ti)、铟(In)、上述材料的合金及上述的组合,但本发明不以此为限。也就是说,凸起结构140与第一电极120及第二电极130可形成于同一膜层,以避免增加额外的生产成本。在其他实施例中,凸起结构140的材质也可选自透光材料,例如是氧化硅、氮化硅、氮氧化硅、其它合适的无机材料、或上述至少二种材料的堆叠层,以避免遮挡微型发光元件100的正向出光。In this embodiment, the materials of the protruding structure 140 , the first electrode 120 and the second electrode 130 may be the same, for example, selected from gold (Au), tin (Sn), nickel (Ni), titanium (Ti), and indium (In), alloys of the above-mentioned materials, and combinations of the above-mentioned materials, but the present invention is not limited thereto. That is to say, the protruding structure 140, the first electrode 120 and the second electrode 130 can be formed in the same film layer, so as to avoid increasing the extra production cost. In other embodiments, the material of the protruding structure 140 can also be selected from light-transmitting materials, such as silicon oxide, silicon nitride, silicon oxynitride, other suitable inorganic materials, or a stacked layer of at least two of the above materials, so as to Avoid blocking the forward light of the micro light-emitting element 100 .

在本实施例中,本体142包括第一型半导体层111、发光层112及第二型半导体层113,其中发光层112设置于第一型半导体层111上,第二型半导体层113设置于发光层112上,但本发明不以此为限。举例而言,在本实施例中,凸起结构140连接于第二型半导体层113,但本发明不以此为限。In this embodiment, the body 142 includes a first-type semiconductor layer 111 , a light-emitting layer 112 and a second-type semiconductor layer 113 , wherein the light-emitting layer 112 is disposed on the first-type semiconductor layer 111 , and the second-type semiconductor layer 113 is disposed on the light-emitting layer 113 . layer 112, but the present invention is not limited thereto. For example, in this embodiment, the protruding structure 140 is connected to the second-type semiconductor layer 113 , but the invention is not limited thereto.

第一型半导体层111和第二型半导体层113可包括Ⅱ-Ⅵ族材料(例如:锌化硒(ZnSe))或Ⅲ-Ⅴ氮族化物材料(例如:氮化镓(GaN)、氮化铝(AlN)、氮化铟(InN)、氮化铟镓(InGaN)、氮化铝镓(AlGaN)或氮化铝铟镓(AlInGaN))。在本实施例中,第一型半导体层111例如是N型掺杂半导体层,N型掺杂半导体层的材料例如是N型氮化镓(n-GaN)。第二型半导体层113例如是P型掺杂半导体层,P型掺杂半导体层的材料例如是P型氮化镓(p-GaN),但本发明不以此为限。在本实施例中,发光层112的结构例如是多层量子井结构(MultipleQuantum Well,MQW),多层量子井结构包括交替堆叠的多层氮化铟镓(InGaN)以及多层氮化镓(GaN),通过设计发光层112中铟或镓的比例,可调整发光层112的发光波长范围,但本发明不以此为限。The first type semiconductor layer 111 and the second type semiconductor layer 113 may include II-VI group materials (eg, zinc selenide (ZnSe)) or III-V nitride materials (eg, gallium nitride (GaN), nitride Aluminum (AlN), Indium Nitride (InN), Indium Gallium Nitride (InGaN), Aluminum Gallium Nitride (AlGaN) or Aluminum Indium Gallium Nitride (AlInGaN)). In this embodiment, the first-type semiconductor layer 111 is, for example, an N-type doped semiconductor layer, and the material of the N-type doped semiconductor layer is, for example, N-type gallium nitride (n-GaN). The second-type semiconductor layer 113 is, for example, a P-type doped semiconductor layer, and the material of the P-type doped semiconductor layer is, for example, p-type gallium nitride (p-GaN), but the invention is not limited thereto. In this embodiment, the structure of the light emitting layer 112 is, for example, a multi-layer quantum well structure (MQW), and the multi-layer quantum well structure includes alternately stacked multi-layer indium gallium nitride (InGaN) and multi-layer gallium nitride ( GaN), by designing the ratio of indium or gallium in the light-emitting layer 112, the light-emitting wavelength range of the light-emitting layer 112 can be adjusted, but the present invention is not limited to this.

在本实施例中,第一电极120贯穿第二型半导体层113及发光层112以连接第一型半导体层111,第二电极130连接于第二型半导体层113。然而,本发明不以此为限,根据其他的实施例,第一电极120及第二电极130可分别通过其他的导电层与第一型半导体层111及第二型半导体层113电性连接。此处,第一电极120例如为一N型电极,第二电极130例如为一P型电极。更具体而言,第一电极120与第二电极130具有不同的电性。在本实施例中,第一电极120及第二电极130的材料例如是选自金(Au)、锡(Sn)、镍(Ni)、钛(Ti)、铟(In)、上述材料的合金及上述的组合,但本发明不以此为限。In this embodiment, the first electrode 120 penetrates through the second type semiconductor layer 113 and the light emitting layer 112 to be connected to the first type semiconductor layer 111 , and the second electrode 130 is connected to the second type semiconductor layer 113 . However, the present invention is not limited thereto. According to other embodiments, the first electrode 120 and the second electrode 130 may be electrically connected to the first type semiconductor layer 111 and the second type semiconductor layer 113 through other conductive layers, respectively. Here, the first electrode 120 is, for example, an N-type electrode, and the second electrode 130 is, for example, a P-type electrode. More specifically, the first electrode 120 and the second electrode 130 have different electrical properties. In this embodiment, the materials of the first electrode 120 and the second electrode 130 are, for example, selected from gold (Au), tin (Sn), nickel (Ni), titanium (Ti), indium (In), and alloys of the above-mentioned materials. and the above combinations, but the present invention is not limited thereto.

请参照图1,在本实施例中,微型发光元件100还包括绝缘层150,覆盖凸起结构140、发光层112、部分的第一型半导体层111及部分的第二型半导体层113。第一电极120贯穿绝缘层150、第二型半导体层113及发光层112,与第一型半导体层111连接,第二电极130贯穿绝缘层150与第二型半导体层113连接。特别一提的是,覆盖于凸起结构140的部分绝缘层150也可视为凸起结构140的一部分,但在未示出的一实施例中,绝缘层150亦可被省略。在本实施例中,绝缘层150的材质例如是氧化硅、氮化硅、氮氧化硅、其它合适的无机材料、或上述至少二种材料的堆叠层,但本发明不以此为限。Referring to FIG. 1 , in this embodiment, the micro light-emitting element 100 further includes an insulating layer 150 covering the protruding structure 140 , the light-emitting layer 112 , part of the first-type semiconductor layer 111 and part of the second-type semiconductor layer 113 . The first electrode 120 penetrates through the insulating layer 150 , the second type semiconductor layer 113 and the light emitting layer 112 and is connected to the first type semiconductor layer 111 , and the second electrode 130 penetrates through the insulating layer 150 and is connected to the second type semiconductor layer 113 . It is particularly mentioned that a part of the insulating layer 150 covering the protruding structure 140 can also be regarded as a part of the protruding structure 140 , but in an embodiment not shown, the insulating layer 150 can also be omitted. In this embodiment, the material of the insulating layer 150 is, for example, silicon oxide, silicon nitride, silicon oxynitride, other suitable inorganic materials, or a stacked layer of at least two of the above materials, but the invention is not limited thereto.

在本实施例中,凸起结构140于本体142的表面142s的第一方向D1上,于表面100s的垂直高度为第一高度H1。第一电极120与第二电极130的任一者在第一方向D1上于该表面142s的垂直高度为第二高度H2。举例而言,凸起结构140的第一高度H1及第一电极120或第二电极130的第二高度H2可满足以下关系式:0.8≤H1/H2≤1.2,其中小于0.8会使阻挡接合过程溢流的效果不佳,大于1.2会使接合过程的良率变差。较佳的实施条件为|H1-H2|≤1微米,可有效避免过接合过程的溢流以及增加接合过程的良率,但本发明不以此为限。特别说明的是,本体142的表面142s是指本体142最顶端的表面。在一些实施例中,凸起结构140的第一高度H1小于第一电极120与第二电极130的任一者的第二高度H2,且满足以下关系式:(H2-H1)/H1≤0.2,大于0.2会使阻挡接合过程溢流的效果不佳。在另一些实施例中,凸起结构140的第一高度H1大于第一电极120与第二电极130的任一者的第二高度H2,且满足以下关系式:(H1-H2)/H1≤0.2,大于0.2影响接合过程的良率。In this embodiment, the vertical height of the protruding structure 140 on the surface 142s of the body 142 in the first direction D1 on the surface 100s is the first height H1. The vertical height of any one of the first electrode 120 and the second electrode 130 on the surface 142s in the first direction D1 is the second height H2. For example, the first height H1 of the protruding structure 140 and the second height H2 of the first electrode 120 or the second electrode 130 may satisfy the following relationship: 0.8≤H1/H2≤1.2, wherein less than 0.8 will block the bonding process The effect of overflow is not good, and greater than 1.2 will deteriorate the yield of the bonding process. A preferable implementation condition is |H1-H2|≤1 micrometer, which can effectively avoid overflow in the over-bonding process and increase the yield of the bonding process, but the present invention is not limited to this. Specifically, the surface 142s of the body 142 refers to the topmost surface of the body 142 . In some embodiments, the first height H1 of the protruding structure 140 is smaller than the second height H2 of any one of the first electrode 120 and the second electrode 130, and satisfies the following relationship: (H2-H1)/H1≤0.2 , greater than 0.2 will make the effect of blocking the overflow of the bonding process not good. In other embodiments, the first height H1 of the protruding structure 140 is greater than the second height H2 of any one of the first electrode 120 and the second electrode 130, and satisfies the following relationship: (H1-H2)/H1≤ 0.2, greater than 0.2 affects the yield of the bonding process.

在本实施例中,元件层110在第一方向D1上具有厚度H3。举例而言,凸起结构140的第一高度H1及元件层110的厚度H3可满足以下关系式:0.01≤H1/H3≤0.95,其中小于0.01会使阻挡接合过程溢流的效果不佳,大于0.95会影响接合过程的良率。较佳的实施条件为0.3≤H1/H3≤0.7,可有效阻挡接合过程的溢流以及增加接合过程的良率,但本发明不以此为限。请参照图2,在本实施例中,第一电极120与第二电极130的所述连线可实质上平行于第二方向D2(即剖线A-A’的延伸方向),且第二方向D2实质上垂直于第一方向D1,但本发明不以此为限。在本实施例中,凸起结构140沿第二方向D2上具有一最大长度L1,第一电极120与第二电极130沿第二方向D2上具有间距S 1。举例而言,凸起结构140的长度L1及第一电极120与第二电极130之间的间距S1可满足以下关系式:0.8≤L1/S1≤1,小于0.8会使阻挡溢流的效果不佳,但本发明不以此为限。In this embodiment, the element layer 110 has a thickness H3 in the first direction D1. For example, the first height H1 of the protruding structure 140 and the thickness H3 of the device layer 110 may satisfy the following relationship: 0.01≤H1/H3≤0.95, wherein less than 0.01 will make the effect of blocking overflow in the bonding process poor, and greater than 0.01 0.95 affects the yield of the bonding process. The preferred implementation condition is 0.3≤H1/H3≤0.7, which can effectively prevent the overflow of the bonding process and increase the yield of the bonding process, but the present invention is not limited to this. Referring to FIG. 2 , in this embodiment, the connection line between the first electrode 120 and the second electrode 130 may be substantially parallel to the second direction D2 (ie, the extending direction of the section line AA'), and the second The direction D2 is substantially perpendicular to the first direction D1, but the present invention is not limited to this. In this embodiment, the protruding structure 140 has a maximum length L1 along the second direction D2, and the first electrode 120 and the second electrode 130 have a distance S1 along the second direction D2. For example, the length L1 of the protruding structure 140 and the distance S1 between the first electrode 120 and the second electrode 130 may satisfy the following relationship: 0.8≤L1/S1≤1, and less than 0.8 will make the overflow blocking effect less effective. good, but the present invention is not limited to this.

在本实施例中,元件层110在第二方向D2上具有最大长度L2。举例而言,在本实施例中,凸起结构140的长度L1及元件层110的长度L2可满足以下关系式:L1/L2≤0.8,避免凸起结构140过于靠近本体142的边缘而造成良率下降,但本发明不以此为限。在本实施例中,凸起结构140在垂直于第二方向D2的第三方向D3上具有最大宽度W1,元件层110在第三方向D3上具有最大宽度W2。举例而言,在本实施例中,凸起结构140的宽度W1及元件层110的宽度W2可满足以下关系式:W1/W2≤0.8,避免凸起结构140过于靠近本体142的边缘而造成良率下降,但本发明不以此为限。特别说明的是,第一电极120与第二电极130在垂直于第二方向D2的第三方向D3上分别具有最大宽度W3和最大宽度W4,其中宽度W1分别大于宽度W3和宽度W4,可具有较佳的溢流的容许度。In this embodiment, the element layer 110 has a maximum length L2 in the second direction D2. For example, in the present embodiment, the length L1 of the protruding structure 140 and the length L2 of the device layer 110 may satisfy the following relation: L1/L2≤0.8, which prevents the protruding structure 140 from being too close to the edge of the body 142 and causing poor rate decreases, but the present invention is not limited to this. In this embodiment, the protruding structures 140 have the maximum width W1 in the third direction D3 perpendicular to the second direction D2, and the element layer 110 has the maximum width W2 in the third direction D3. For example, in the present embodiment, the width W1 of the protruding structure 140 and the width W2 of the device layer 110 may satisfy the following relationship: W1/W2≤0.8, so as to avoid the protruding structure 140 being too close to the edge of the body 142 and causing poor rate decreases, but the present invention is not limited to this. It is particularly noted that the first electrode 120 and the second electrode 130 respectively have a maximum width W3 and a maximum width W4 in the third direction D3 perpendicular to the second direction D2, wherein the width W1 is larger than the width W3 and the width W4, respectively, and may have Better overflow tolerance.

在本实施例中,元件层110具有相对的两侧缘110a、110b,两侧缘110a、110b的间距为S2。凸起结构140与两侧缘110a、110b的任一者的最短间距为S3。举例而言,在本实施例中,元件层110的两侧缘110a、110b的间距S2及凸起结构140与两侧缘110a、110b的任一者的最短间距S3可满足以下关系式:0.01≤S3/S2≤0.2,避免凸起结构140过于靠近元件层110的两侧缘110a而造成例如是侧壁漏电等问题,以致良率下降,但本发明不以此为限。特别是,在一些较佳的实施例中,凸起结构140与两侧缘110a、110b的任一者的最短间距S3可小于等于10微米。In this embodiment, the element layer 110 has opposite side edges 110a, 110b, and the distance between the two side edges 110a, 110b is S2. The shortest distance between the protruding structure 140 and any one of the two side edges 110a and 110b is S3. For example, in this embodiment, the distance S2 between the two side edges 110a and 110b of the element layer 110 and the shortest distance S3 between the protruding structure 140 and any of the two side edges 110a and 110b may satisfy the following relational expression: 0.01 ≤S3/S2≤0.2, to prevent the protruding structure 140 from being too close to the two side edges 110a of the device layer 110 to cause problems such as sidewall leakage, and thus to reduce the yield, but the invention is not limited to this. In particular, in some preferred embodiments, the shortest distance S3 between the protruding structure 140 and any one of the two side edges 110a and 110b may be less than or equal to 10 micrometers.

在本实施例中,凸起结构140在本体142的表面142s上的正投影面积与本体142的表面142s的表面积的比值可小于等于0.8,大于0.8会使凸起结构140的占比大太而降低溢流的容许度,但本发明不以此为限。虽然本发明的一些实施例特定于描述包含p-n二极管的微型发光元件,但应理解本发明的实施例不限于此,某些实施例也可应用到其他微型半导体元件,包括可控制执行预定电子功能的微型半导体元件(例如二极管、晶体管、集成电路)或具光子功能的微型半导体元件(例如发光二极管、激光二极管、光电二极管)。本发明的其他实施例也可应用到包括电路的微晶片,例如以Si或SOI晶片为材料用于逻辑或存储应用微晶片,或以GaAs晶片为材料用于RF通信应用的微晶片。In this embodiment, the ratio of the orthographic projection area of the protruding structures 140 on the surface 142s of the body 142 to the surface area of the surface 142s of the body 142 may be less than or equal to 0.8, and greater than 0.8 will cause the proportion of the protruding structures 140 to be too large. The tolerance of overflow is reduced, but the present invention is not limited to this. Although some embodiments of the present invention are specific to the description of miniature light-emitting elements including p-n diodes, it should be understood that embodiments of the present invention are not limited thereto, and certain embodiments may also be applied to other miniature semiconductor elements, including controllable execution of predetermined electronic functions micro-semiconductor components (eg diodes, transistors, integrated circuits) or micro-semiconductor components with photonic functions (eg light-emitting diodes, laser diodes, photodiodes). Other embodiments of the invention may also be applied to microchips comprising circuits, such as Si or SOI wafers for logic or memory applications, or GaAs wafers for RF communication applications.

图3为本发明另一实施例的微型发光元件的剖面示意图。请参照图3,本实施例中的微型发光元件100A与图1所示的微型发光元件100的主要差异在于,微型发光元件100A的凸起结构140A包括至少部分第二型半导体层113A。3 is a schematic cross-sectional view of a micro light-emitting device according to another embodiment of the present invention. Referring to FIG. 3 , the main difference between the micro light emitting element 100A in this embodiment and the micro light emitting element 100 shown in FIG. 1 is that the protruding structure 140A of the micro light emitting element 100A includes at least part of the second type semiconductor layer 113A.

在本实施例中,第一电极120A贯穿本体142A的第二型半导体层113A和发光层112A与暴露于绝缘层150外的第一型半导体层111A电性连接,第二电极130A连接暴露于绝缘层150外的第二型半导体层113A,但本发明不以此为限。在本实施例中,凸起结构140A的第一高度H1及元件层110A的厚度H3满足以下关系式:0.01≤H1/H3≤0.3,以有效阻挡接合过程的溢流及增加接合过程的良率。In this embodiment, the first electrode 120A penetrates through the second type semiconductor layer 113A and the light emitting layer 112A of the body 142A and is electrically connected to the first type semiconductor layer 111A exposed outside the insulating layer 150 , and the second electrode 130A is connected to the insulating layer 111A exposed to the outside. The second type semiconductor layer 113A outside the layer 150, but the invention is not limited to this. In this embodiment, the first height H1 of the protruding structure 140A and the thickness H3 of the element layer 110A satisfy the following relationship: 0.01≤H1/H3≤0.3, so as to effectively prevent the overflow of the bonding process and increase the yield of the bonding process .

图4为本发明又一实施例的微型发光元件的剖面示意图。请参照图4,本实施例中的微型发光元件100B与图1所示的微型发光元件100的主要差异在于,微型发光元件100B的凸起结构140B包括第二型半导体层113B与发光层112B。举例而言,在本实施例中,凸起结构140B还包括部分的第一型半导体层111B,且本体142B包括部分的第一型半导体层111B,但本发明不以此为限。在本实施例中,发光层112B位于中央的凸起结构140B中,且第一电极120B与第二电极130B配置于凸起结构140B的两侧。因此,微型发光元件100B的电流密度被集中,以增加微型发光元件100B的出光效率,并避免侧漏电等问题。FIG. 4 is a schematic cross-sectional view of a micro light-emitting device according to another embodiment of the present invention. Referring to FIG. 4 , the main difference between the micro light emitting element 100B in this embodiment and the micro light emitting element 100 shown in FIG. 1 is that the protruding structure 140B of the micro light emitting element 100B includes the second type semiconductor layer 113B and the light emitting layer 112B. For example, in this embodiment, the protruding structure 140B further includes a part of the first type semiconductor layer 111B, and the body 142B includes a part of the first type semiconductor layer 111B, but the invention is not limited thereto. In the present embodiment, the light emitting layer 112B is located in the protruding structure 140B in the center, and the first electrode 120B and the second electrode 130B are disposed on both sides of the protruding structure 140B. Therefore, the current density of the micro light emitting element 100B is concentrated, so as to increase the light extraction efficiency of the micro light emitting element 100B, and avoid problems such as side leakage.

特别说明的是,本实施例中的凸起结构140B与本体142B可选择同一种制造方法形成,例如都是通过有机金属化学气相沉积法(Metal-organic Chemical VaporDeposition)形成。更佳的是,第一型半导体层111B、发光层112B与第二型半导体层113B先完成后,再经由黄光、蚀刻等制造分别形成凸起结构140B与本体142B,以增加微型发光元件100B的制作效率,但本发明不以此为限。在本实施例中,凸起结构140B的第一高度H1及元件层110B的厚度H3满足以下关系式:0.7≤H1/H3≤0.95,其中小于0.7会使阻挡接合过程溢流的效果不佳,大于0.95影响接合过程的良率。In particular, the protruding structure 140B and the body 142B in this embodiment can be formed by the same manufacturing method, for example, both are formed by metal-organic chemical vapor deposition (Metal-organic Chemical Vapor Deposition). More preferably, the first-type semiconductor layer 111B, the light-emitting layer 112B and the second-type semiconductor layer 113B are completed first, and then the protruding structure 140B and the body 142B are respectively formed by yellow light, etching, etc., so as to increase the micro light-emitting element 100B. the production efficiency, but the present invention is not limited to this. In this embodiment, the first height H1 of the protruding structure 140B and the thickness H3 of the element layer 110B satisfy the following relationship: 0.7≤H1/H3≤0.95, wherein less than 0.7 will make the effect of blocking the overflow in the bonding process poor, Greater than 0.95 affects the yield of the bonding process.

在本实施例中,第一电极120B及第二电极130B设置于第一型半导体层111B上。微型发光元件100B还包括绝缘层160及导电层170。绝缘层160局部覆盖第一型半导体层111B与凸起结构140B。导电层170设置于绝缘层160上,并连接凸起结构140B中暴露于绝缘层160外的第二型半导体层113B。举例而言,第二电极130B通过导电层170与第二型半导体层113B电性连接,第一电极120B连接暴露于绝缘层150B外的第一型半导体层111B,但本发明不以此为限。在本实施例中,绝缘层160及绝缘层150B的材质可相同,材质例如是氧化硅、氮化硅、氮氧化硅、其它合适的无机材料、或上述至少二种材料的堆叠层,但本发明不以此为限。特别一提的是,覆盖于凸起结构140B的部分绝缘层150B、绝缘层160及导电层170,也可视为凸起结构140B的一部分。In this embodiment, the first electrode 120B and the second electrode 130B are disposed on the first type semiconductor layer 111B. The micro light-emitting element 100B further includes an insulating layer 160 and a conductive layer 170 . The insulating layer 160 partially covers the first-type semiconductor layer 111B and the protruding structure 140B. The conductive layer 170 is disposed on the insulating layer 160 and is connected to the second-type semiconductor layer 113B exposed outside the insulating layer 160 in the bump structure 140B. For example, the second electrode 130B is electrically connected to the second type semiconductor layer 113B through the conductive layer 170 , and the first electrode 120B is connected to the first type semiconductor layer 111B exposed outside the insulating layer 150B, but the invention is not limited thereto . In this embodiment, the insulating layer 160 and the insulating layer 150B can be made of the same material, such as silicon oxide, silicon nitride, silicon oxynitride, other suitable inorganic materials, or a stacked layer of at least two of the above materials. Inventions are not limited to this. It is particularly mentioned that the part of the insulating layer 150B, the insulating layer 160 and the conductive layer 170 covering the raised structure 140B can also be regarded as a part of the raised structure 140B.

在本实施例中,基于导电性的考量,导电层170的材料一般是使用金属材料。然而,本发明不限于此,在一些实施例中,导电层170的材料也可以使用其他导电材料,例如是合金、金属材料的氮化物、金属材料的氧化物、金属材料的氮氧化物、或其他合适的材料、或是金属材料与其他导电材料的堆叠层。在另一些实施例中,导电层170的材料也可以是反射率高的导电材料,例如是银(Ag)、铝(Al)或金(Au),以提高微型发光元件100B的有效出光强度。In this embodiment, based on the consideration of conductivity, the material of the conductive layer 170 is generally a metal material. However, the present invention is not limited thereto, and in some embodiments, the material of the conductive layer 170 may also use other conductive materials, such as alloys, nitrides of metal materials, oxides of metal materials, oxynitrides of metal materials, or Other suitable materials, or stacked layers of metallic materials and other conductive materials. In other embodiments, the material of the conductive layer 170 may also be a conductive material with high reflectivity, such as silver (Ag), aluminum (Al) or gold (Au), to improve the effective light extraction intensity of the micro light-emitting element 100B.

图5A至图5B为本发明一实施例的显示装置10A的接合流程的剖面示意图。图5A示出了多个微型发光元件100转移(transfer)至背板11上的剖面示意图。请参照图5A,在本实施例中,显示装置10A包括多个微型发光元件100、背板11、多个第一接合垫12以及多个第二接合垫13。多个第一接合垫12分别与多个微型发光元件100的第一电极120对应设置于背板11,多个第二接合垫13分别与多个微型发光元件100的第二电极130对应设置于背板11。在本实施例中,第一接合垫12及第二接合垫13的材料例如选自于金、铜、锡、铟、上述材料的合金及上述材料的组成,亦或是锡膏(solder paste),但本发明不以此为限。根据其他的实施例,第一接合垫12及第二接合垫13的材料也可以是异方性导电膜(AnisotropicConductive Film,ACF)或其他适合的接合材料。5A to 5B are schematic cross-sectional views of a bonding process of the display device 10A according to an embodiment of the present invention. FIG. 5A shows a schematic cross-sectional view of transferring a plurality of micro light-emitting elements 100 to the backplane 11 . Referring to FIG. 5A , in this embodiment, the display device 10A includes a plurality of micro light-emitting elements 100 , a backplane 11 , a plurality of first bonding pads 12 and a plurality of second bonding pads 13 . The plurality of first bonding pads 12 are respectively disposed on the backplane 11 corresponding to the first electrodes 120 of the plurality of micro light emitting elements 100 , and the plurality of second bonding pads 13 are respectively disposed corresponding to the second electrodes 130 of the plurality of micro light emitting elements 100 . Backplane 11. In this embodiment, the materials of the first bonding pads 12 and the second bonding pads 13 are selected from, for example, gold, copper, tin, indium, alloys of the above-mentioned materials and compositions of the above-mentioned materials, or solder paste. , but the present invention is not limited to this. According to other embodiments, the materials of the first bonding pad 12 and the second bonding pad 13 may also be anisotropic conductive film (ACF) or other suitable bonding materials.

图5B示出了本实施例的显示装置10A在多个第一接合垫12及多个第二接合垫13加热固化后的剖面示意图。请参照图5B,在图5A的多个第一接合垫12及多个第二接合垫13被加热至熔融状态后,呈现熔融状态的多个第一接合垫12及多个第二接合垫13分别沿着背板11的表面11s溢流。其中朝向凸起结构140流动的第一接合垫12及第二接合垫13溢流入凸起结构140与背板11之间。特别是,在本实施例中,溢流入凸起结构140与背板11之间的第一接合垫12及第二接合垫13并未接触到彼此。也就是说,本实施例中的凸起结构140可大幅降低第一接合垫12及第二接合垫13在呈现熔融状态时因溢流而造成短路的机率。5B shows a schematic cross-sectional view of the display device 10A of the present embodiment after the plurality of first bonding pads 12 and the plurality of second bonding pads 13 are heated and cured. Referring to FIG. 5B , after the plurality of first bonding pads 12 and the plurality of second bonding pads 13 in FIG. 5A are heated to a molten state, the plurality of first bonding pads 12 and the plurality of second bonding pads 13 in the molten state are displayed overflow along the surface 11s of the back plate 11, respectively. The first bonding pads 12 and the second bonding pads 13 flowing toward the raised structures 140 overflow into between the raised structures 140 and the back plate 11 . In particular, in this embodiment, the first bonding pads 12 and the second bonding pads 13 overflowing between the protruding structures 140 and the back plate 11 do not contact each other. That is to say, the protruding structure 140 in this embodiment can greatly reduce the probability of short circuit caused by overflow when the first bonding pad 12 and the second bonding pad 13 are in a molten state.

在第一接合垫12及第二接合垫13降温固化后,微型发光元件100的第一电极120通过第一接合垫12电性连接至背板11,微型发光元件100的第二电极130通过第二接合垫13电性连接至背板11,以形成本实施例的显示装置10A。在本实施例中,第一接合垫12及第二接合垫13在背板11上的正投影分别部分重叠于凸起结构140在背板11上的正投影,但本发明不以此为限。在一些实施例中,第一接合垫12、第二接合垫13及凸起结构140在背板11上的正投影彼此错开。After the first bonding pad 12 and the second bonding pad 13 are cooled and solidified, the first electrode 120 of the micro light emitting element 100 is electrically connected to the backplane 11 through the first bonding pad 12, and the second electrode 130 of the micro light emitting element 100 is electrically connected to the backplane 11 through the first bonding pad 12. The two bonding pads 13 are electrically connected to the backplane 11 to form the display device 10A of this embodiment. In this embodiment, the orthographic projections of the first bonding pads 12 and the second bonding pads 13 on the backplane 11 respectively partially overlap the orthographic projections of the protruding structures 140 on the backplane 11 , but the invention is not limited to this. . In some embodiments, the orthographic projections of the first bonding pads 12 , the second bonding pads 13 and the protruding structures 140 on the backplane 11 are offset from each other.

具体而言,在本实施例中,显示装置10A例如是微型发光二极管显示器(MicroLEDs Display)。取决于其应用,微型发光二极管显示器可包含其他组件。此等其他组件包含(但不限于):存储器、模感屏控制器及电池。在其他实施方案中,微型发光二极管显示器可为电视机、平板电脑、电话、膝上型电脑、电脑监视器、独立式终端机服务台、数字相机、手持游戏控制台、媒体显示器、电子书显示器、车用显示器或大面积电子看板显示器。此外,与一般的发光二极管技术相比,微型发光元件从毫米级降至微米级,因此微型发光二极管显示器能达高解析度,并能够降低显示的电力消耗,还具节能、机构简单、薄型等优势。Specifically, in this embodiment, the display device 10A is, for example, a Micro LEDs Display. Depending on its application, the miniature light emitting diode display may contain other components. These other components include (but are not limited to): memory, modality controller and battery. In other embodiments, the miniature light emitting diode display may be a television, tablet, telephone, laptop, computer monitor, stand-alone terminal kiosk, digital camera, handheld game console, media display, e-book display , vehicle displays or large-area electronic signage displays. In addition, compared with the general light-emitting diode technology, the micro light-emitting element is reduced from millimeters to micrometers, so the micro-LED display can reach high resolution, and can reduce the power consumption of the display, and also has the advantages of energy saving, simple structure, thin, etc. Advantage.

在本实施例中,背板11例如是画素阵列基板,画素阵列基板可选自互补式金属氧化物半导体CMOS(Complementary Metal Oxide Semiconductor)基板、硅基液晶LCOS(Liquid Crystal on Silicon)基板、薄膜晶体管TFT(Thin Film Transistor)基板或是其他具有驱动电路的基板。多个微型发光元件100可包括具有不同发光波长范围(例如红光、蓝光、绿光)的微型发光二极管,但本发明不以此为限。In this embodiment, the backplane 11 is, for example, a pixel array substrate, and the pixel array substrate can be selected from a complementary metal oxide semiconductor CMOS (Complementary Metal Oxide Semiconductor) substrate, a liquid crystal on silicon (LCOS) substrate, a thin film transistor TFT (Thin Film Transistor) substrate or other substrates with driving circuits. The plurality of micro light emitting elements 100 may include micro light emitting diodes with different emission wavelength ranges (eg, red light, blue light, green light), but the invention is not limited thereto.

在本实施例中,微型发光元件100的凸起结构140在背板11的表面11s上的正投影轮廓为长方形。然而,本发明不以此为限,根据其他的实施例,微型发光元件100的凸起结构140在背板11的表面11s上的正投影轮廓也可以是方形、圆形、菱形或其他适合的形状。值得一提的是,在一些实施例中,应用于显示装置(例如是微型发光二极管显示器)的多个微型发光元件100的凸起结构140在背板11的表面11s上的正投影轮廓可依据不同的发光波长范围而采用不同的形状。如此一来,在多个微型发光元件转移至背板(例如是画素阵列基板)的过程中,具不同外观的凸起结构140可提升不同显色画素的对位准确率。In this embodiment, the orthographic profile of the protruding structure 140 of the micro light-emitting element 100 on the surface 11s of the backplane 11 is a rectangle. However, the present invention is not limited to this. According to other embodiments, the orthographic profile of the protruding structures 140 of the micro light-emitting element 100 on the surface 11s of the back plate 11 may also be a square, a circle, a diamond or other suitable shapes. shape. It is worth mentioning that, in some embodiments, the orthographic profile of the protruding structures 140 of the plurality of micro light emitting elements 100 applied to the display device (eg, a micro light emitting diode display) on the surface 11s of the backplane 11 can be determined according to Different shapes are used for different emission wavelength ranges. In this way, during the process of transferring a plurality of micro light-emitting elements to the backplane (eg, a pixel array substrate), the protruding structures 140 with different appearances can improve the alignment accuracy of different color pixels.

图6为本发明另一实施例的显示装置的剖面示意图。请参照图6,本实施例的显示装置10B与图5B的显示装置10A的差异在于,微型发光元件100C的凸起结构140C的顶面140Ct与背板11的表面11s切齐。因此,在接合的过程中,呈现熔融状态的第一接合垫12及第二接合垫13可被微型发光元件100C的凸起结构140C完全阻挡,可大幅降低第一接合垫12及第二接合垫13在呈现熔融状态时因溢流而造成短路的机率。特别说明的是,此处凸起结构140C包括绝缘层150,但绝缘层150也可被省略,只要使呈现熔融状态的第一接合垫12及第二接合垫13被阻挡,即为本发明所属范围。6 is a schematic cross-sectional view of a display device according to another embodiment of the present invention. Referring to FIG. 6 , the difference between the display device 10B of this embodiment and the display device 10A of FIG. 5B is that the top surface 140Ct of the protruding structure 140C of the micro light-emitting element 100C is flush with the surface 11s of the backplane 11 . Therefore, during the bonding process, the first bonding pads 12 and the second bonding pads 13 in the molten state can be completely blocked by the protruding structures 140C of the micro light-emitting device 100C, which can greatly reduce the first bonding pads 12 and the second bonding pads. 13 Probability of short circuit due to overflow when in molten state. It is particularly noted that the protruding structure 140C includes the insulating layer 150, but the insulating layer 150 can also be omitted, as long as the first bonding pad 12 and the second bonding pad 13 in the molten state are blocked, it belongs to the present invention scope.

图7为本发明又一实施例的显示装置10C的剖面示意图。请参照图7,本实施例的显示装置10C与图6的显示装置10B的差异在于,背板11C具有多个凹槽11Ca,且每一凹槽11Ca分别设置在与一个微型发光元件100D对应的一组第一接合垫12及第二接合垫13之间。在本实施例中,微型发光元件100D的部分凸起结构140D配置于背板11C的凹槽11Ca。因此,相较于图6的显示装置10B,本实施例的显示装置10C可更进一步降低第一接合垫12及第二接合垫13在呈现熔融状态时因溢流而造成短路的机率。FIG. 7 is a schematic cross-sectional view of a display device 10C according to still another embodiment of the present invention. Referring to FIG. 7 , the difference between the display device 10C of this embodiment and the display device 10B of FIG. 6 is that the back plate 11C has a plurality of grooves 11Ca, and each groove 11Ca is respectively disposed in a corresponding position of a micro light-emitting element 100D. between a set of first bonding pads 12 and second bonding pads 13 . In this embodiment, part of the protruding structures 140D of the micro light-emitting element 100D is disposed in the groove 11Ca of the back plate 11C. Therefore, compared with the display device 10B of FIG. 6 , the display device 10C of the present embodiment can further reduce the probability of short circuit caused by overflow when the first bonding pad 12 and the second bonding pad 13 are in a molten state.

特别一提的是,本实施例中的背板11C的凹槽11Ca在背板11C的表面11Cs上的正投影轮廓例如是长方形,但本发明不限于此,在一些实施例中,背板11C的凹槽11Ca在背板11C的表面11Cs上的正投影轮廓也可以是方形、圆形、菱形或其他适合的形状,以匹配微型发光元件100D在背板11C的表面11Cs上的正投影轮廓。也就是说,应用于显示装置(例如是微型发光二极管显示器)的多个微形发光元件100D(例如是不同发光颜色的微型发光二极管)可利用背板11C上的凹槽11Ca在表面11Cs上的投影轮廓进行对位,以提升不同显色画素的对位准确率。It is particularly mentioned that the orthographic profile of the groove 11Ca of the back plate 11C on the surface 11Cs of the back plate 11C in this embodiment is, for example, a rectangle, but the present invention is not limited to this. In some embodiments, the back plate 11C The orthographic profile of the groove 11Ca on the surface 11Cs of the back plate 11C can also be square, circular, diamond or other suitable shapes to match the orthographic profile of the micro light emitting element 100D on the surface 11Cs of the back plate 11C. That is to say, a plurality of micro-shaped light-emitting elements 100D (eg, micro-LEDs with different light-emitting colors) applied to a display device (eg, a micro-LED display) can be formed on the surface 11Cs by the grooves 11Ca on the backplane 11C. The projection outline is aligned to improve the alignment accuracy of different color rendering pixels.

综上所述,本发明的实施例的微型发光元件及显示装置,因具有设置在第一电极与第二电极之间的凸起结构,在微型发光元件转移至显示装置的接合制造中,能有效预防连接第一电极的接合垫与连接第二电极的接合垫因发生溢流而彼此导通,进而提升显示装置的生产良率,同时也能增加微型发光元件的设计裕度。To sum up, the micro-light-emitting element and the display device according to the embodiments of the present invention have the protruding structure disposed between the first electrode and the second electrode, so that the micro-light-emitting element can be transferred to the display device in the bonding manufacturing process. It can effectively prevent the bonding pads connected to the first electrode and the bonding pads connected to the second electrode from being connected to each other due to overflow, thereby improving the production yield of the display device and increasing the design margin of the micro light-emitting element.

虽然本发明已以实施例揭示如上,然其并非用以限定本发明,任何所属技术领域中的技术人员,在不脱离本发明的精神和范围内,当可作些许的更改与润饰,故本发明的保护范围当视权利要求所界定的为准。Although the present invention has been disclosed above with examples, it is not intended to limit the present invention. Any person skilled in the art can make some changes and modifications without departing from the spirit and scope of the present invention. The protection scope of the invention shall be determined by the claims.

Claims (18)

1.一种微型发光元件,其特征在于,包括:1. A miniature light-emitting element, characterized in that, comprising: 元件层,包括本体和配置于所述本体上的凸起结构,所述本体具有表面;an element layer, comprising a body and a protruding structure disposed on the body, the body having a surface; 第一电极,电性连接所述元件层;以及a first electrode, electrically connected to the element layer; and 第二电极,电性连接所述元件层,其中所述第一电极、所述凸起结构以及所述第二电极设置于所述本体的同一侧,其中所述凸起结构位于所述第一电极与所述第二电极之间,且所述第一电极与所述第二电极的连线通过所述凸起结构,A second electrode, electrically connected to the element layer, wherein the first electrode, the protruding structure and the second electrode are disposed on the same side of the body, wherein the protruding structure is located on the first between the electrode and the second electrode, and the connection line between the first electrode and the second electrode passes through the protruding structure, 其中所述凸起结构于所述表面具有第一高度,所述第一电极与所述第二电极的任一于所述表面具有第二高度,所述第一高度为H1,所述第二高度为H2,且0.8≤H1/H2≤1.2。Wherein the protruding structure has a first height on the surface, any one of the first electrode and the second electrode has a second height on the surface, the first height is H1, the second The height is H2, and 0.8≤H1/H2≤1.2. 2.根据权利要求1所述的微型发光元件,其中所述凸起结构的最大长度为L1,所述第一电极与所述第二电极的间距为S1,且0.8≤L1/S1≤1。2 . The micro light-emitting element according to claim 1 , wherein the maximum length of the protruding structure is L1 , the distance between the first electrode and the second electrode is S1 , and 0.8≦L1/S1≦1. 3 . 3.根据权利要求2所述的微型发光元件,其中所述元件层的最大长度为L2,且L1/L2≤0.8。3. The micro light-emitting element according to claim 2, wherein the maximum length of the element layer is L2, and L1/L2≤0.8. 4.根据权利要求1所述的微型发光元件,其中所述第一高度小于所述第二高度,且(H2-H1)/H1≤0.2。4. The micro light-emitting element according to claim 1, wherein the first height is smaller than the second height, and (H2-H1)/H1≤0.2. 5.根据权利要求1所述的微型发光元件,其中所述第一高度大于所述第二高度,且(H1-H2)/H1≤0.2。5. The micro light-emitting element according to claim 1, wherein the first height is greater than the second height, and (H1-H2)/H1≤0.2. 6.根据权利要求1所述的微型发光元件,其中所述元件层的厚度为H3,且0.01≤H1/H3≤0.95。6. The micro light-emitting element according to claim 1, wherein the thickness of the element layer is H3, and 0.01≤H1/H3≤0.95. 7.根据权利要求1所述的微型发光元件,其中所述元件层具有相对的两侧缘,且所述两侧缘的间距为S2,所述凸起结构与所述两侧缘的任一的最短间距为S3,且0.01≤S3/S2≤0.2。7 . The micro light-emitting element according to claim 1 , wherein the element layer has opposite side edges, and the distance between the two side edges is S2 , the protruding structure and any one of the two side edges The shortest spacing is S3, and 0.01≤S3/S2≤0.2. 8.根据权利要求1所述的微型发光元件,其中所述凸起结构在所述本体的所述表面上的正投影面积与所述本体的所述表面的表面积的比值小于等于0.8。8 . The micro light-emitting element according to claim 1 , wherein the ratio of the orthographic projection area of the protruding structure on the surface of the body to the surface area of the surface of the body is less than or equal to 0.8. 9 . 9.根据权利要求1所述的微型发光元件,其中所述本体包括:9. The micro light emitting element of claim 1, wherein the body comprises: 第一型半导体层;first type semiconductor layer; 发光层,设置于所述第一型半导体层上;以及a light-emitting layer disposed on the first-type semiconductor layer; and 第二型半导体层,设置于所述发光层上,其中所述凸起结构连接所述第二型半导体层。A second-type semiconductor layer is disposed on the light-emitting layer, wherein the protruding structure is connected to the second-type semiconductor layer. 10.根据权利要求1所述的微型发光元件,其中所述元件层包括:10. The micro light-emitting element of claim 1, wherein the element layer comprises: 第一型半导体层;first type semiconductor layer; 发光层,设置于所述第一型半导体层上;以及a light-emitting layer disposed on the first-type semiconductor layer; and 第二型半导体层,设置于所述发光层上,其中所述凸起结构包括至少部分所述第二型半导体层。A second-type semiconductor layer is disposed on the light-emitting layer, wherein the protruding structure includes at least part of the second-type semiconductor layer. 11.根据权利要求10所述的微型发光元件,其中所述凸起结构包括所述第二型半导体层、所述发光层与部分所述第一型半导体层。11. The micro light-emitting element according to claim 10, wherein the protruding structure comprises the second-type semiconductor layer, the light-emitting layer and a part of the first-type semiconductor layer. 12.根据权利要求11所述的微型发光元件,还包括:12. The micro light-emitting element of claim 11, further comprising: 绝缘层,局部覆盖所述第一型半导体层与所述凸起结构;以及an insulating layer partially covering the first-type semiconductor layer and the protruding structure; and 导电层,设置于所述绝缘层上,并连接所述凸起结构中暴露于所述绝缘层外的所述第二型半导体层,a conductive layer disposed on the insulating layer and connected to the second-type semiconductor layer in the raised structure exposed outside the insulating layer, 其中所述第二电极连接所述导电层,且所述第一电极连接所述第一型半导体层。The second electrode is connected to the conductive layer, and the first electrode is connected to the first-type semiconductor layer. 13.根据权利要求1所述的微型发光元件,其中所述第一电极与所述第二电极具有不同电性。13. The micro light-emitting element according to claim 1, wherein the first electrode and the second electrode have different electrical properties. 14.一种显示装置,其特征在于,包括:14. A display device, comprising: 多个微型发光元件,包括:Multiple miniature light-emitting elements, including: 元件层,包括本体与配置于所述本体上的凸起结构,所述本体具有表面;an element layer, comprising a body and a protruding structure disposed on the body, the body having a surface; 第一电极,电性连接所述元件层;以及a first electrode, electrically connected to the element layer; and 第二电极,电性连接所述元件层;a second electrode, electrically connected to the element layer; 其中所述第一电极、所述凸起结构以及所述第二电极设置于所述本体的同一侧,其中所述凸起结构位于所述第一电极与所述第二电极之间,且所述第一电极与所述第二电极的连线通过所述凸起结构,所述凸起结构垂直于所述表面,且具有第一高度,所述第一电极与所述第二电极的任一垂直于所述表面,且具有第二高度,所述第一高度为H1,所述第二高度为H2,且0.8≤H1/H2≤1.2;The first electrode, the protruding structure and the second electrode are disposed on the same side of the body, wherein the protruding structure is located between the first electrode and the second electrode, and the The connection line between the first electrode and the second electrode passes through the protruding structure, and the protruding structure is perpendicular to the surface and has a first height. one is perpendicular to the surface and has a second height, the first height is H1, the second height is H2, and 0.8≤H1/H2≤1.2; 背板;以及backplane; and 第一接合垫及第二接合垫,设置于所述背板,The first bonding pad and the second bonding pad are arranged on the backplane, 其中所述微型发光元件的所述第一电极通过所述第一接合垫电性连接至所述背板,所述微型发光元件的所述第二电极通过所述第二接合垫电性连接至所述背板,且所述第一接合垫与所述第二接合垫彼此分离。The first electrode of the micro light emitting element is electrically connected to the backplane through the first bonding pad, and the second electrode of the micro light emitting element is electrically connected to the backplane through the second bonding pad the backplane, and the first bond pad and the second bond pad are separated from each other. 15.根据权利要求14所述的显示装置,其中所述第一接合垫及所述第二接合垫在所述背板上的正投影分别部分重叠于所述凸起结构在所述背板上的正投影。15 . The display device according to claim 14 , wherein the orthographic projections of the first bonding pad and the second bonding pad on the backplane respectively partially overlap the raised structures on the backplane. 16 . orthographic projection. 16.根据权利要求14所述的显示装置,其中所述第一接合垫、所述第二接合垫及所述凸起结构在所述背板上的正投影彼此错开。16 . The display device of claim 14 , wherein orthographic projections of the first bonding pad, the second bonding pad, and the protruding structure on the backplane are staggered from each other. 17 . 17.根据权利要求16所述的显示装置,其中所述凸起结构的顶面与所述背板的表面切齐。17. The display device of claim 16, wherein a top surface of the raised structure is flush with a surface of the back plate. 18.根据权利要求14所述的显示装置,其中所述背板具有凹槽,设置在对应的所述第一接合垫与所述第二接合垫之间,所述微型发光元件的部分所述凸起结构配置于所述背板的所述凹槽。18. The display device of claim 14, wherein the back plate has a groove disposed between the corresponding first bonding pad and the second bonding pad, and a portion of the micro light emitting element The protruding structure is arranged in the groove of the back plate.
CN201810801693.2A 2018-07-20 2018-07-20 Micro light-emitting element and display device Active CN110739380B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810801693.2A CN110739380B (en) 2018-07-20 2018-07-20 Micro light-emitting element and display device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810801693.2A CN110739380B (en) 2018-07-20 2018-07-20 Micro light-emitting element and display device

Publications (2)

Publication Number Publication Date
CN110739380A true CN110739380A (en) 2020-01-31
CN110739380B CN110739380B (en) 2021-02-19

Family

ID=69234130

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810801693.2A Active CN110739380B (en) 2018-07-20 2018-07-20 Micro light-emitting element and display device

Country Status (1)

Country Link
CN (1) CN110739380B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114171662A (en) * 2020-09-11 2022-03-11 京东方科技集团股份有限公司 Display panel, preparation method thereof and display device
WO2023206079A1 (en) * 2022-04-26 2023-11-02 京东方科技集团股份有限公司 Light-emitting chip, light-emitting substrate, display apparatus, and manufacturing method for light-emitting substrate

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6100103A (en) * 1998-05-21 2000-08-08 Electronics And Telecommunications Research Institute Highly integrated multicolor light emitting device and a method for manufacturing the same
US20040206977A1 (en) * 2003-04-21 2004-10-21 Samsung Electronics Co., Ltd. Semiconductor light emitting diode and method for manufacturing the same
JP6131374B1 (en) * 2016-07-18 2017-05-17 ルーメンス カンパニー リミテッド Micro LED array display device
US20180138071A1 (en) * 2016-11-15 2018-05-17 X-Celeprint Limited Micro-transfer-printable flip-chip structures and methods
CN108183156A (en) * 2017-12-26 2018-06-19 深圳市华星光电技术有限公司 Micro-led display panel and preparation method thereof

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6100103A (en) * 1998-05-21 2000-08-08 Electronics And Telecommunications Research Institute Highly integrated multicolor light emitting device and a method for manufacturing the same
US20040206977A1 (en) * 2003-04-21 2004-10-21 Samsung Electronics Co., Ltd. Semiconductor light emitting diode and method for manufacturing the same
JP6131374B1 (en) * 2016-07-18 2017-05-17 ルーメンス カンパニー リミテッド Micro LED array display device
US20180138071A1 (en) * 2016-11-15 2018-05-17 X-Celeprint Limited Micro-transfer-printable flip-chip structures and methods
CN108183156A (en) * 2017-12-26 2018-06-19 深圳市华星光电技术有限公司 Micro-led display panel and preparation method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114171662A (en) * 2020-09-11 2022-03-11 京东方科技集团股份有限公司 Display panel, preparation method thereof and display device
WO2023206079A1 (en) * 2022-04-26 2023-11-02 京东方科技集团股份有限公司 Light-emitting chip, light-emitting substrate, display apparatus, and manufacturing method for light-emitting substrate

Also Published As

Publication number Publication date
CN110739380B (en) 2021-02-19

Similar Documents

Publication Publication Date Title
TWI661575B (en) Micro light emitting device and display apparatus
US9559278B2 (en) Light emitting device package
KR102322842B1 (en) Light emitting device array
CN109980060A (en) Show equipment
US20190006559A1 (en) Micro light emitting diode and display panel
CN102966880B (en) Light emitting module and backlight unit having same
CN102201507A (en) Light-emitting device
US9070832B2 (en) Light-emitting device and fabrication method thereof
TW201639199A (en) Illuminating device
CN105322084A (en) Light emitting device module
CN108288664A (en) Micro-led chip
CN102169948B (en) Luminaire and illuminator
CN102315349B (en) Luminescent device and manufacture method thereof
KR102309092B1 (en) Light emitting device and light emitting device array including the same
CN101409318B (en) Method for manufacturing light emitting diode chip
CN110739380B (en) Micro light-emitting element and display device
TWI865962B (en) Display device
CN114122236B (en) Display device and method for manufacturing the same
KR20150028081A (en) Light Emitting Device
TWI836732B (en) Optoelectronic semiconductor element
TW202437562A (en) Optoelectronic semiconductor element
CN114613801A (en) Display panel
KR20130031524A (en) Light emitting device, light emitting device package, light unit, and method for fabricating light emitting device

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant