CN110724941A - Method for preparing porous metal film by chemical plating process - Google Patents
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
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- C23C18/38—Coating with copper
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Abstract
Description
技术领域technical field
本发明涉及涂层技术领域,特别是一种化学镀工艺制备多孔金属膜的方法。The invention relates to the technical field of coatings, in particular to a method for preparing a porous metal film by an electroless plating process.
背景技术Background technique
多孔金属膜具有工艺流程简单、孔径可控、相对密度低、比强度高、比表面积高、重量轻、隔音、隔热、渗透性好和附着力大等优势,在军事、建筑、船舶、航空业等众多领域具有潜在应用价值。Porous metal membrane has the advantages of simple process flow, controllable pore size, low relative density, high specific strength, high specific surface area, light weight, sound insulation, heat insulation, good permeability and high adhesion, etc. It has potential application value in many fields such as industry.
目前大多采用HDH钛粉制备的多孔金属膜,其孔径随着烧结温度的升高而降低,本专利制备一种多孔金属膜,且孔径可控、工艺易于控制、设备简单和成本低廉受到广泛关注。例如:专利CN201410176004.5公开了一种采用不锈钢纤维烧结毡制备的多孔金属膜及其制备方法,此方法先将不锈钢烧结毡表面氧化,然后放入尿素和硝酸镍的混合溶液中,通过控制其反应的温度、时间等反应条件,在不锈钢烧结毡基体表面原位生长镍铁水滑石薄膜。该方法制备的多孔金属膜虽然很大程度的减少了多孔金属膜的孔径比基体,但分离精度较低,只能用于固液分离,故使其应用领域大大缩小。专利CN201410834347.6公开了一种高梯度多孔金属膜的制备方法,先用预制备的无机粉体对多孔金属基体堵孔处理,然后进行金属粉末涂层,之后在氢气或惰性气氛下高温烧结得到含杂质的梯度多孔膜,最后用化学试剂冲洗(或真空浸润)或超声工艺去除该膜基体内的残留杂质得到高梯度多孔金属膜。虽然该方法制备的多孔金属膜完整性较好、梯度高,但工艺复杂,与本发明有着明显的技术上差异。At present, most of the porous metal films prepared with HDH titanium powder have a pore size that decreases with the increase of sintering temperature. This patent prepares a porous metal film with controllable pore size, easy process control, simple equipment and low cost. . For example: Patent CN201410176004.5 discloses a porous metal film prepared by using stainless steel fiber sintered felt and its preparation method. In this method, the surface of the stainless steel sintered felt is first oxidized, and then placed in a mixed solution of urea and nickel nitrate. According to the reaction conditions such as the reaction temperature and time, the nickel-iron hydrotalcite film is grown in situ on the surface of the stainless steel sintered felt substrate. Although the porous metal membrane prepared by this method greatly reduces the pore size ratio of the porous metal membrane to the matrix, the separation precision is low and can only be used for solid-liquid separation, so its application field is greatly reduced. Patent CN201410834347.6 discloses a preparation method of a high gradient porous metal film. The porous metal matrix is first blocked with pre-prepared inorganic powder, and then coated with metal powder, and then sintered at high temperature under hydrogen or an inert atmosphere to obtain The impurity-containing gradient porous membrane is finally washed with chemical reagents (or vacuum infiltration) or ultrasonic technology to remove residual impurities in the membrane matrix to obtain a high gradient porous metal membrane. Although the porous metal film prepared by this method has good integrity and high gradient, the process is complicated and has obvious technical differences with the present invention.
发明内容SUMMARY OF THE INVENTION
本发明的目的是提供一种化学镀工艺制备多孔金属膜的方法,以解决现有技术中的不足,它能够丰富目前多孔金属膜的制备方法,还可以制备复杂形状的金属膜。The purpose of the present invention is to provide a method for preparing porous metal film by chemical plating process to solve the deficiencies in the prior art, which can enrich the current preparation method of porous metal film, and can also prepare metal film with complex shape.
本发明提供了一种化学镀工艺制备多孔金属膜的方法,包括以下步骤:The invention provides a method for preparing a porous metal film by an electroless plating process, comprising the following steps:
(1)配置催化溶液:配置第一硅烷、第二硅烷、乙醇、水性聚合物溶液和水的混合溶液,在搅拌的过程中加入氨水调节pH值为9,常温搅拌1-30min后,采用柠檬酸调节pH为7,在加入1-200g/L的催化剂离子溶液,搅拌1-30min后加入异丙醇,即得催化溶液;(1) Configure a catalytic solution: configure a mixed solution of the first silane, the second silane, ethanol, an aqueous polymer solution and water, add ammonia water to adjust the pH to 9 during the stirring process, and stir at room temperature for 1-30 minutes, then use lemon The pH of the acid is adjusted to 7, the catalyst ion solution of 1-200g/L is added, and isopropanol is added after stirring for 1-30min to obtain the catalyst solution;
(2)活化基材:将上述催化溶液均匀涂覆到衬底表面,60-150℃下烘1-30min,即得活化的基材;(2) Activating the substrate: uniformly coat the above-mentioned catalytic solution on the surface of the substrate, and bake at 60-150° C. for 1-30 minutes to obtain an activated substrate;
(3)化学施镀:将活化的基材浸入镀液中施镀,施镀时间为15-60min,温度为60-90℃;(3) Electroless plating: the activated substrate is immersed in the plating solution for plating, the plating time is 15-60 min, and the temperature is 60-90 °C;
(4)将施镀后的基材水洗并超声处理,即制得多孔金属膜。(4) The plated substrate is washed with water and ultrasonically treated to obtain a porous metal film.
优选的是,步骤(1)中所述第一硅烷为二甲基二甲氧基硅烷和甲基二乙氧基硅烷中的至少一种。Preferably, the first silane in step (1) is at least one of dimethyldimethoxysilane and methyldiethoxysilane.
优选的是,步骤(1)中所述第二硅烷为γ―(2,3-环氧丙氧)丙基三甲氧基硅烷。Preferably, the second silane in step (1) is γ-(2,3-glycidoxy)propyltrimethoxysilane.
优选的是,步骤(1)中所述水性聚合物溶液的质量分数为1-10%。Preferably, the mass fraction of the aqueous polymer solution in step (1) is 1-10%.
优选的是,步骤(1)中所述水性聚合物溶液为羧甲基纤维素钠、聚乙烯醇、聚乙烯吡咯烷酮水溶液中的至少一种。Preferably, the aqueous polymer solution in step (1) is at least one of sodium carboxymethyl cellulose, polyvinyl alcohol, and polyvinylpyrrolidone aqueous solution.
优选的是,步骤(1)中所述催化剂离子为钯、金、铂和银中的至少一种。Preferably, the catalyst ion in step (1) is at least one of palladium, gold, platinum and silver.
优选的是,步骤(1)中所述第一硅烷、第二硅烷、乙醇、水性聚合物溶液、水、异丙醇和催化剂离子溶液的质量比为1:0.1-5:2:10-150:0.1-100:10-1000:0.5-50。Preferably, the mass ratio of the first silane, the second silane, ethanol, the aqueous polymer solution, water, isopropanol and the catalyst ion solution described in step (1) is 1:0.1-5:2:10-150: 0.1-100:10-1000:0.5-50.
优选的是,步骤(2)中所述基材的表面含有活性基团,所述活性基团包括羟基、羧基、环氧基、巯基。Preferably, in step (2), the surface of the substrate contains active groups, and the active groups include hydroxyl groups, carboxyl groups, epoxy groups, and mercapto groups.
优选的是,步骤(3)中所述化学施镀是化学镀铜、化学镀镍和化学镀钴中的至少一种,化学镀制备的金属镀层厚度为2-5μm。Preferably, the electroless plating in step (3) is at least one of electroless copper plating, electroless nickel plating and electroless cobalt plating, and the thickness of the metal plating layer prepared by electroless plating is 2-5 μm.
优选的是,步骤(4)中所述超声处理为由30℃逐渐以20℃/min升温至120-150℃,超声介质为液体石蜡。Preferably, in the ultrasonic treatment in step (4), the temperature is gradually increased from 30°C to 120-150°C at 20°C/min, and the ultrasonic medium is liquid paraffin.
与现有技术相比,本发明的有益效果为:采用通过制备的催化溶液催化化学镀反应制备金属膜,结合超声处理实现基材和金属膜分离。本发明的工艺简单、孔径和厚度可控,且可制备复杂形状的多孔金属膜。Compared with the prior art, the present invention has the beneficial effects of: using the prepared catalytic solution to catalyze the chemical plating reaction to prepare the metal film, and combining the ultrasonic treatment to realize the separation of the substrate and the metal film. The process of the invention is simple, the pore size and thickness are controllable, and the porous metal film of complex shape can be prepared.
附图说明Description of drawings
图1是本发明实施例1的金属铜多孔膜SEM图;Fig. 1 is the SEM image of the metal copper porous film of Example 1 of the present invention;
图2是本发明实施例1的金属铜多孔膜XRD图。FIG. 2 is an XRD pattern of the metal copper porous film of Example 1 of the present invention.
具体实施方式Detailed ways
下面通过参考附图描述的实施例是示例性的,仅用于解释本发明,而不能解释为对本发明的限制。The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, but not to be construed as a limitation of the present invention.
一种化学镀工艺制备多孔金属膜的方法,包括以下步骤:A method for preparing a porous metal film by an electroless plating process, comprising the following steps:
(1)配置催化溶液:配置第一硅烷、第二硅烷、乙醇、水性聚合物溶液和水的混合溶液,在搅拌的过程中加入氨水调节pH值为9,常温搅拌1-30min后,采用柠檬酸调节pH为7,在加入1-200g/L的催化剂离子溶液,搅拌1-30min后加入异丙醇,即得催化溶液;(1) Configure a catalytic solution: configure a mixed solution of the first silane, the second silane, ethanol, an aqueous polymer solution and water, add ammonia water to adjust the pH to 9 during the stirring process, and stir at room temperature for 1-30 minutes, then use lemon The pH of the acid is adjusted to 7, the catalyst ion solution of 1-200g/L is added, and isopropanol is added after stirring for 1-30min to obtain the catalyst solution;
(2)活化基材:将上述催化溶液均匀涂覆到衬底表面,60-150℃下烘1-30min,即得活化的基材;(2) Activating the substrate: uniformly coat the above-mentioned catalytic solution on the surface of the substrate, and bake at 60-150° C. for 1-30 minutes to obtain an activated substrate;
(3)化学施镀:将活化的基材浸入镀液中施镀,施镀时间为15-60min,温度为60-90℃;(3) Electroless plating: the activated substrate is immersed in the plating solution for plating, the plating time is 15-60 min, and the temperature is 60-90 °C;
(4)将施镀后的基材水洗并超声处理,即制得多孔金属膜。(4) The plated substrate is washed with water and ultrasonically treated to obtain a porous metal film.
步骤(1)中所述第一硅烷为二甲基二甲氧基硅烷和甲基二乙氧基硅烷中的至少一种。The first silane in step (1) is at least one of dimethyldimethoxysilane and methyldiethoxysilane.
步骤(1)中所述第二硅烷为γ―(2,3-环氧丙氧)丙基三甲氧基硅烷。The second silane in step (1) is γ-(2,3-glycidoxy)propyltrimethoxysilane.
步骤(1)中所述水性聚合物溶液的质量分数为1-10%。The mass fraction of the aqueous polymer solution in step (1) is 1-10%.
步骤(1)中所述水性聚合物溶液为羧甲基纤维素钠、聚乙烯醇、聚乙烯吡咯烷酮水溶液中的至少一种。The aqueous polymer solution in step (1) is at least one of sodium carboxymethyl cellulose, polyvinyl alcohol, and polyvinylpyrrolidone aqueous solution.
步骤(1)中所述催化剂离子为钯、金、铂和银中的至少一种。The catalyst ion in step (1) is at least one of palladium, gold, platinum and silver.
步骤(1)中所述第一硅烷、第二硅烷、乙醇、水性聚合物溶液、水、异丙醇和催化剂离子溶液的质量比为1:0.1-5:2:10-150:0.1-100:10-1000:0.5-50。The mass ratio of the first silane, the second silane, ethanol, the aqueous polymer solution, water, isopropanol and the catalyst ion solution described in the step (1) is 1:0.1-5:2:10-150:0.1-100: 10-1000: 0.5-50.
步骤(2)中所述基材的表面含有活性基团,所述活性基团包括羟基、羧基、环氧基、巯基。In step (2), the surface of the substrate contains active groups, and the active groups include hydroxyl groups, carboxyl groups, epoxy groups, and mercapto groups.
步骤(3)中所述化学施镀是化学镀铜、化学镀镍和化学镀钴中的至少一种,化学镀制备的金属镀层厚度为2-5μm。The electroless plating in step (3) is at least one of electroless copper plating, electroless nickel plating and electroless cobalt plating, and the thickness of the metal plating layer prepared by electroless plating is 2-5 μm.
步骤(4)中所述超声处理为由30℃逐渐以20℃/min升温至120-150℃,超声介质为液体石蜡。The ultrasonic treatment in step (4) is to gradually increase the temperature from 30°C to 120-150°C at 20°C/min, and the ultrasonic medium is liquid paraffin.
采用通过制备的催化溶液催化化学镀反应制备金属膜,结合超声处理实现基材和金属膜分离。The metal film is prepared by catalyzing the electroless plating reaction of the prepared catalytic solution, and the separation of the substrate and the metal film is realized by combining with ultrasonic treatment.
(1)孔径可控:催化溶液中的硅烷水解成亲油相(Si-Si长链),在成膜的过程中同催化溶液中的亲水相(亲水树脂)不相容,在成膜过程中发生分相形成颗粒状结构,另外,催化溶液中的溶剂(水、乙醇和异丙醇)的沸点不同,在成膜过程中挥发速度不同,也使得催化膜表面形成颗粒状,合理控制两相和不同溶剂相对含量,可实现调控颗粒尺寸。(1) Controllable pore size: The silane in the catalytic solution is hydrolyzed into a lipophilic phase (Si-Si long chain), which is incompatible with the hydrophilic phase (hydrophilic resin) in the catalytic solution during the film formation process. During the process, phase separation occurs to form a granular structure. In addition, the boiling points of the solvents (water, ethanol and isopropanol) in the catalytic solution are different, and the volatilization speed is different during the film formation process. The relative content of two phases and different solvents can realize the regulation of particle size.
在化学镀过程中,金属离子在催化膜表面的催化粒子的作用下沉积到其表面,由于催化溶液中含有环氧基(第二硅烷引入的),使得其同基材表面(富含活性基团)具有较强的附着力;另外由于催化膜中只有硅醇基、羟基和环氧基可吸附催化剂粒子,这些基团同催化剂粒子的配位键较弱,导致镀层同催化膜间的附着力较弱,使得金属镀层沿催化层/金属膜界面脱落,也就是说金属镀层内表面形成孔洞结构,孔洞的尺寸可通过催化膜表面形成颗粒尺寸调节。In the electroless plating process, metal ions are deposited on the surface of the catalytic film under the action of catalytic particles on the surface of the catalytic film. Since the catalytic solution contains epoxy groups (introduced by the second silane), it is the same as the surface of the substrate (rich in active groups). In addition, because only silanol groups, hydroxyl groups and epoxy groups in the catalytic film can adsorb catalyst particles, the coordination bonds between these groups and the catalyst particles are weak, resulting in the adhesion between the coating and the catalytic film. The weaker force causes the metal coating to fall off along the catalytic layer/metal film interface, that is to say, a hole structure is formed on the inner surface of the metal coating, and the size of the holes can be adjusted by the particle size formed on the surface of the catalytic film.
(2)厚度可控:随化学镀时间的增加,镀层厚度增加,本发明可通过控制化学镀时间和化学镀参数,可制备不要厚度的多孔金属膜。(2) The thickness is controllable: with the increase of the electroless plating time, the thickness of the plating layer increases, and the present invention can prepare the porous metal film with unnecessary thickness by controlling the electroless plating time and the electroless plating parameters.
(3)可制备复杂形状的多孔金属膜:化学镀属于一种原位沉积工艺,只要衬底表面形成催化膜,镀层就沉积在其表面,可通过控制衬底的形状,制备不同形状的多孔金属膜。(3) Porous metal films with complex shapes can be prepared: electroless plating is an in-situ deposition process. As long as a catalytic film is formed on the surface of the substrate, the coating will be deposited on the surface. By controlling the shape of the substrate, porous metal films of different shapes can be prepared. metal film.
本发明的实施例1:Embodiment 1 of the present invention:
一种化学镀工艺制备多孔金属膜的方法,包括以下步骤:A method for preparing a porous metal film by an electroless plating process, comprising the following steps:
将质量分数为0.5%的亲水聚合物水溶液与γ―(2,3-环氧丙氧)丙基三甲氧基硅烷和硝酸银的水溶液以相对质量比为75:20:5在500r/min的转速下搅拌混合,即得底涂液。在基材表面印制上述底涂液并置于80℃的条件下干燥10min,将干燥后的基材化学施镀铜,施镀时间为15min,施镀温度为60℃,再将施镀后的基材水洗并超声处理,超声温度由30℃逐渐以20℃/min升温至120℃,超声介质为石蜡,即得多孔金属铜膜。The mass fraction of 0.5% hydrophilic polymer aqueous solution and the aqueous solution of γ-(2,3-glycidoxy)propyltrimethoxysilane and silver nitrate with a relative mass ratio of 75:20:5 at 500r/min Stir and mix at a high speed to obtain a primer solution. The above primer solution was printed on the surface of the substrate and dried at 80°C for 10min. The dried substrate was chemically plated with copper. The plating time was 15min and the plating temperature was 60°C. The substrate was washed with water and ultrasonically treated, and the ultrasonic temperature was gradually increased from 30 °C to 120 °C at 20 °C/min, and the ultrasonic medium was paraffin to obtain a porous metal copper film.
如图1所示,金属膜背面是多孔结构,孔洞内部结构疏松。图2为金属膜XRD图。XRD谱图中2θ为43°、51°、74°的衍射峰是面心立方铜的特征峰,同时Cu的特征峰半高宽窄,无杂相,结晶性好。综上所述,表明经过该发明所述工艺,可以实现制备多孔金属铜膜。As shown in Figure 1, the back of the metal film is a porous structure, and the internal structure of the pores is loose. FIG. 2 is an XRD pattern of the metal film. The diffraction peaks at 2θ of 43°, 51°, and 74° in the XRD spectrum are characteristic peaks of face-centered cubic copper, and the characteristic peaks of Cu have a narrow half-height width, no impurity phase, and good crystallinity. To sum up, it is shown that the porous metal copper film can be prepared through the process described in this invention.
本发明的实施例2:
一种化学镀工艺制备多孔金属膜的方法,包括以下步骤:A method for preparing a porous metal film by an electroless plating process, comprising the following steps:
将质量分数为10%的亲水聚合物水溶液与γ―(2,3-环氧丙氧)丙基三甲氧基硅烷和硝酸银的水溶液以相对质量比为95:20:5在800r/min的转速下搅拌混合,即得底涂液。在基材表面印制上述底涂液并置于97℃的条件下干燥15min,将干燥后的基材化学施镀铜,施镀时间为26min,施镀温度为65℃,再将施镀后的基材水洗并超声处理,超声温度由30℃逐渐以20℃/min升温至127℃,超声介质为石蜡,即得多孔金属铜膜。The mass fraction of 10% hydrophilic polymer aqueous solution and the aqueous solution of γ-(2,3-glycidoxy)propyltrimethoxysilane and silver nitrate were mixed at a relative mass ratio of 95:20:5 at 800r/min Stir and mix at a high speed to obtain a primer solution. The above primer solution was printed on the surface of the substrate and dried at 97°C for 15min. The dried substrate was chemically plated with copper. The plating time was 26min and the plating temperature was 65°C. The substrate was washed with water and ultrasonically treated, and the ultrasonic temperature was gradually increased from 30°C to 127°C at 20°C/min, and the ultrasonic medium was paraffin to obtain a porous metal copper film.
本发明的实施例3:Embodiment 3 of the present invention:
一种化学镀工艺制备多孔金属膜的方法,包括以下步骤:A method for preparing a porous metal film by an electroless plating process, comprising the following steps:
将质量分数为2%的亲水聚合物水溶液与γ―(2,3-环氧丙氧)丙基三甲氧基硅烷和硝酸银的水溶液以相对质量比为115:20:5在1100r/min的转速下搅拌混合,即得底涂液。在基材表面印制上述底涂液并置于114℃的条件下干燥20min,将干燥后的基材化学施镀镍,施镀时间为37min,施镀温度为70℃,再将施镀后的基材水洗并超声处理,超声温度由30℃逐渐以20℃/min升温至134℃,超声介质为石蜡,即得多孔金属镍膜。The mass fraction of 2% hydrophilic polymer aqueous solution and the aqueous solution of γ-(2,3-glycidoxy)propyltrimethoxysilane and silver nitrate were combined at a relative mass ratio of 115:20:5 at 1100r/min Stir and mix at a high speed to obtain a primer solution. The above primer solution was printed on the surface of the substrate and dried at 114°C for 20min. The dried substrate was chemically plated with nickel. The plating time was 37min and the plating temperature was 70°C. The substrate was washed with water and ultrasonically treated, and the ultrasonic temperature was gradually increased from 30 °C to 134 °C at 20 °C/min, and the ultrasonic medium was paraffin to obtain a porous metal nickel film.
本发明的实施例4:Embodiment 4 of the present invention:
一种化学镀工艺制备多孔金属膜的方法,包括以下步骤:A method for preparing a porous metal film by an electroless plating process, comprising the following steps:
将质量分数为4%的亲水聚合物水溶液与γ―(2,3-环氧丙氧)丙基三甲氧基硅烷和硝酸银的水溶液以相对质量比为135:20:5在1400r/min的转速下搅拌混合,即得底涂液。在基材表面印制上述底涂液并置于131℃的条件下干燥25min,将干燥后的基材化学施镀镍,施镀时间为48min,施镀温度为75℃,再将施镀后的基材水洗并超声处理,超声温度由30℃逐渐以20℃/min升温至141℃,超声介质为石蜡,即得多孔金属镍膜。The mass fraction of 4% hydrophilic polymer aqueous solution and the aqueous solution of γ-(2,3-glycidoxy)propyltrimethoxysilane and silver nitrate were combined with the relative mass ratio of 135:20:5 at 1400r/min Stir and mix at a high speed to obtain a primer solution. The above primer solution was printed on the surface of the substrate and dried at 131°C for 25min. The dried substrate was chemically plated with nickel. The plating time was 48min and the plating temperature was 75°C. The substrate was washed with water and ultrasonically treated, and the ultrasonic temperature was gradually increased from 30 °C to 141 °C at 20 °C/min, and the ultrasonic medium was paraffin to obtain a porous metal nickel film.
本发明的实施例5:Embodiment 5 of the present invention:
一种化学镀工艺制备多孔金属膜的方法,包括以下步骤:A method for preparing a porous metal film by an electroless plating process, comprising the following steps:
将质量分数为6%的亲水聚合物水溶液与γ―(2,3-环氧丙氧)丙基三甲氧基硅烷和硝酸银的水溶液以相对质量比为155:20:5在1600r/min的转速下搅拌混合,即得底涂液。在基材表面印制上述底涂液并置于150℃的条件下干燥30min,将干燥后的基材化学施镀钴,施镀时间为60min,施镀温度为80℃,再将施镀后的基材水洗并超声处理,超声温度由30℃逐渐以20℃/min升温至150℃,超声介质为石蜡,即得多孔金属膜钴。The mass fraction of 6% hydrophilic polymer aqueous solution and the aqueous solution of γ-(2,3-glycidoxy)propyltrimethoxysilane and silver nitrate were mixed with the relative mass ratio of 155:20:5 at 1600r/min Stir and mix at a high speed to obtain a primer solution. The above primer solution was printed on the surface of the substrate and dried at 150°C for 30min. The dried substrate was chemically plated with cobalt, the plating time was 60min, and the plating temperature was 80°C. The substrate was washed with water and ultrasonically treated, the ultrasonic temperature was gradually increased from 30 °C to 150 °C at 20 °C/min, and the ultrasonic medium was paraffin, that is, the porous metal film cobalt was obtained.
以上依据图式所示的实施例详细说明了本发明的构造、特征及作用效果,以上所述仅为本发明的较佳实施例,但本发明不以图面所示限定实施范围,凡是依照本发明的构想所作的改变,或修改为等同变化的等效实施例,仍未超出说明书与图示所涵盖的精神时,均应在本发明的保护范围内。The structure, features and effects of the present invention have been described in detail above according to the embodiments shown in the drawings. The above are only the preferred embodiments of the present invention, but the scope of the present invention is not limited by the drawings. Changes made to the concept of the present invention, or modifications to equivalent embodiments with equivalent changes, shall fall within the protection scope of the present invention as long as they do not exceed the spirit covered by the description and drawings.
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