CN110706981A - Radio frequency MEMS four-way snake-shaped delayer combined with single-pole four-throw switch - Google Patents

Abstract

The invention belongs to the technical field of delayers, and in particular relates to a radio frequency MEMS four-way serpentine delayer combined with a single-pole four-throw switch, comprising a substrate, an upper electrode, a signal line, a delay line, a ground wire, an anchor point, a contact point, lower electrode, the signal line, lower electrode, delay line, and ground line are all fixed on the substrate, the signal line includes a first signal line and a second signal line, and one end of the upper electrode passes through the anchor point It is fixed on the first signal line, one end of the lower electrode is fixed with a contact, the other end of the upper electrode is arranged directly above the contact, and the other end of the lower electrode passes through the second signal line and the delay line. Cascade, there are at least two ground wires, and the ground wires are located on both sides of the signal wire and the delay wire. The invention has the advantages of large delay amount, small insertion loss, small gradient error per bit, reconfiguration, small size and the like when generating the effective delay signal. The present invention is used for the delay of signals.

Description

A radio frequency MEMS four-way serpentine delayer combined with a single-pole four-throw switch

technical field

The invention belongs to the technical field of delayers, in particular to a radio frequency MEMS four-way serpentine delayer combined with a single-pole four-throw switch.

Background technique

As a passive device, the RF MEMS delay device is one of the basic components of the RF system. It transmits or isolates microwave signals through metal-metal contact or metal-insulating medium-metal capacitors. It has low insertion loss and delay. It can be widely used in various radio frequency, microwave and millimeter wave communication systems, and is of great significance to military fields such as radar early warning, tactical strategic reconnaissance, satellite networking and guidance.

At present, most of the commonly used delay devices are formed by hybrid integration, and the delay unit is realized by cables. Its disadvantages are large size, low integration, difficult to control product consistency, and large performance changes under high and low temperature, which is difficult to meet the needs of future products.

SUMMARY OF THE INVENTION

In view of the above technical problems, a radio frequency MEMS four-way serpentine delay device with large delay amount and small insertion loss combined with a single-pole four-throw switch is provided.

In order to solve the above-mentioned technical problems, the technical scheme adopted in the present invention is:

A radio frequency MEMS four-way serpentine delay device combined with a single-pole four-throw switch, comprising a substrate, an upper electrode, a signal line, a delay line, a ground line, an anchor point, a contact point, and a lower electrode, the signal line, the lower electrode The electrode, the delay line and the ground line are all fixed on the substrate, the signal line includes a first signal line and a second signal line, one end of the upper electrode is fixed on the first signal line through an anchor point, and the lower One end of the electrode is fixed with a contact, the other end of the upper electrode is arranged directly above the contact, the other end of the lower electrode is cascaded with the delay line through the second signal line, and there are at least two ground lines , the ground wire is located on both sides of the signal wire and the delay wire.

The first signal line has a star structure, and the first signal line includes a main circuit and four branch circuits, the main circuit is respectively connected with the four branch circuits, and the upper electrodes are fixed to the branch circuits through anchor points.

The delay line has a serpentine structure, and the delay line has four groups, and the length of each group of delay lines is different.

The distance between the ground wire, the signal wire and the delay wire remains unchanged.

The substrate adopts glass, ceramic or high resistance silicon.

The upper electrode and the lower electrode are both of rectangular parallelepiped structure.

The bends of the signal lines all adopt arc structures.

Compared with the prior art, the present invention has the following beneficial effects:

The invention adopts the contact point between the upper and lower electrodes, and the lower electrode and the signal line are cascaded, the signal line and the delay serpentine line are cascaded, and the bending part of the signal line adopts an arc structure, which can effectively reduce the insertion loss. The invention has the advantages of large delay amount, small insertion loss, small gradient error per bit, reconfigurable, small size and the like when the effective delay signal is generated.

Description of drawings

Fig. 1 is the structural representation of the present invention;

2 is a schematic structural diagram of a delayer switch of the present invention;

Fig. 3 is the structural representation of the delay line of the present invention;

Among them: 1 is the substrate, 2 is the upper electrode, 3 is the signal line, 4 is the delay line, 5 is the ground line, 6 is the anchor point, 7 is the contact point, and 8 is the lower electrode.

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

A radio frequency MEMS four-way serpentine delayer combined with a single-pole four-throw switch, as shown in Figures 1 and 2, includes a substrate 1, an upper electrode 2, a signal line 3, a delay line 4, a ground wire 5, an anchor Point 6, contact 7, lower electrode 8, the signal line 3, lower electrode 8, delay line 4, and ground line 5 are all fixed on the substrate 1, and the signal line 3 includes the first signal line 3-1 and the first signal line 3-1. Two signal lines 3-2, one end of the upper electrode 2 is fixed on the first signal line 3-1 through the anchor point 6, one end of the lower electrode 8 is fixed with a contact 7, and the other end of the upper electrode 2 is arranged on the contact 7 Right above, when the upper electrode 2 is bent, it contacts with the contact 7, and the switch is in a closed state. When the upper electrode 2 is not bent, it does not contact the contact 7, and the switch is in an open state. The other end of the lower electrode 8 is cascaded with the delay line 4 through the second signal line 3 - 2 . There are at least two ground lines 5 , and the ground lines 5 are located on both sides of the signal line 3 and the delay line 4 .

Further, preferably, the first signal line 3-1 is a star structure, and the first signal line 3-1 includes one main circuit 3-1-1 and four branch circuits 3-1-2, and the main circuit 3-1-1 They are respectively connected with the four branches 3-1-2, and the branch 3-1-2 is fixed with the upper electrode 2 through the anchor point 6.

Further, preferably, the delay line 4 is a serpentine structure, and there are four groups of delay lines 4, and the length of each group of delay lines 4 is different. Different delay lines 4 have different lengths and have different ability to delay signals, so as to achieve the function of delaying signals.

Further, preferably, the distances between the ground wire 5 and the signal wire 3 and the delay wire 4 remain unchanged.

Further, preferably, the substrate 1 is made of glass, ceramics or high-resistance silicon, because the conductivity of these materials is relatively low, which ensures low loss characteristics when transmitting radio frequency signals.

Further, preferably, the upper electrode 2 and the lower electrode 8 are both cuboid structures.

Further, preferably, the bends of the signal lines 3 are all arc-shaped structures, which can effectively reduce the insertion loss.

The working process of the present invention is as follows: when the upper electrode is bent, the upper electrode is in contact with the contact point, and the switch is in an open state at this time, and when the two switches at both ends of the serpentine delay line are turned on, the signal passes through the switch at this time. Entering into different serpentine delay lines, different serpentine delay lines have different lengths and different signal delay capabilities to achieve the signal delay function. Different switches are turned on to form different delay effects. The bends of the signal wires are all arc-shaped structures, and the ground wires are of irregular shape to ensure that the distance between the ground wires and the signal wires remains unchanged, and the insertion loss of the overall system is improved.

Only the preferred embodiments of the present invention have been described in detail above, but the present invention is not limited to the above-mentioned embodiments, and within the scope of knowledge possessed by those of ordinary skill in the art, various aspects can also be made without departing from the purpose of the present invention. Various changes should be included within the protection scope of the present invention.

Claims (7)

1. A radio frequency MEMS four-way snake-shaped delayer combined with a single-pole four-throw switch is characterized in that: the high-voltage power supply comprises a substrate (1), an upper electrode (2), a signal line (3), a delay line (4), a ground line (5), an anchor point (6), a contact (7) and a lower electrode (8), wherein the signal line (3), the lower electrode (8), the delay line (4) and the ground line (5) are all fixed on the substrate (1), the signal line (3) comprises a first signal line (3-1) and a second signal line (3-2), one end of the upper electrode (2) is fixed on the first signal line (3-1) through the anchor point (6), one end of the lower electrode (8) is fixed with the contact (7), the other end of the upper electrode (2) is arranged right above the contact (7), the other end of the lower electrode (8) is cascaded with the delay line (4) through the second signal line (3-2), and at least two ground lines (5), the ground wire (5) is positioned at two sides of the signal wire (3) and the delay wire (4).

2. The rf MEMS four-way serpentine delay timer in combination with a single pole four throw switch of claim 1, wherein: the first signal line (3-1) is of a star-shaped structure, the first signal line (3-1) comprises a main path (3-1-1) and four branches (3-1-2), the main path (3-1-1) is respectively connected with the four branches (3-1-2), and the branches (3-1-2) are fixedly provided with upper electrodes (2) through anchor points (6).

3. The rf MEMS four-way serpentine delay timer in combination with a single pole four throw switch of claim 1, wherein: the delay lines (4) are of a snake-shaped structure, four groups of delay lines (4) are arranged, and the length of each group of delay lines (4) is different.

4. The rf MEMS four-way serpentine delay timer in combination with a single pole four throw switch of claim 1, wherein: and the distance between the ground wire (5) and the signal wire (3) and the distance between the ground wire and the delay line (4) are kept unchanged.

5. The rf MEMS four-way serpentine delay timer in combination with a single pole four throw switch of claim 1, wherein: the substrate (1) is made of glass, ceramic or high-resistance silicon.

6. The rf MEMS four-way serpentine delay timer in combination with a single pole four throw switch of claim 1, wherein: the upper electrode (2) and the lower electrode (8) are both of cuboid structures.

7. The rf MEMS four-way serpentine delay timer in combination with a single pole four throw switch of claim 1, wherein: the bending parts of the signal wires (3) are all arc-shaped structures.

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