CN110687679B

CN110687679B - Scanning driver and optical fiber scanning driver

Info

Publication number: CN110687679B
Application number: CN201811379277.4A
Authority: CN
Inventors: 宋海涛; 周旭东; 姚长呈
Original assignee: Chengdu Idealsee Technology Co Ltd
Current assignee: Chengdu Idealsee Technology Co Ltd
Priority date: 2018-07-06
Filing date: 2018-11-19
Publication date: 2024-02-06
Anticipated expiration: 2038-11-19
Also published as: CN110687679A

Abstract

The invention discloses a scanning driver, which comprises a first actuating part and a second actuating part which are integrally formed and are sequentially connected along the direction from back to front; the first actuating part and the second actuating part comprise piezoelectric material bodies with piezoelectric effect, inner electrode holes are formed in the first actuating part and the second actuating part, outer electrodes are arranged outside the first actuating part and the second actuating part, and inner electrodes matched with the outer electrodes are arranged in the inner electrode holes of the first actuating part and the second actuating part. The integrated forming structure avoids a series of processes of assembling, aligning, debugging and the like of a subsequent scanner, reduces the complexity and improves the manufacturing efficiency, so that the difficulty in the manufacturing process can be greatly reduced and the reliability of a device can be improved by adopting integrated forming, and meanwhile, the integrated forming structure can be prevented from being disassembled and disassembled, and the overall reliability and durability can be improved.

Description

Scanning driver and optical fiber scanning driver

Technical Field

The present invention relates to the technical field of scan driver structures, and in particular, to a scan driver and an optical fiber scan driver.

Background

The single-fiber resonance type piezoelectric scanner is a novel scanner for realizing static or dynamic image scanning by utilizing resonance characteristics of an optical fiber cantilever in two directions, and compared with an MEMS (Micro-Electro-Mechanical System; micro-electromechanical system) scanner, the single-fiber resonance type piezoelectric scanner has the advantages of smaller volume, lower cost, simple and convenient manufacturing process and easier integration.

In the existing structure of the single-fiber resonance piezoelectric scanner with a two-dimensional vibration mode, the adopted structure is to connect drivers vibrating in two directions through a certain connecting piece and make the vibration directions of the two drivers intersected, so that the two-dimensional scanning function is realized. However, in this structure, there are some problems: after long-time scanning operation, looseness can occur between the two drivers and the connecting piece, so that the vibration frequency cannot be accurately controlled; the connection may cause energy loss; the connecting piece can increase the volume and the weight of the equipment; in the manufacture of such small-volume devices, the use of connectors to splice two drives can present a mass production difficulty.

Disclosure of Invention

The embodiment of the invention provides a scanning driver and an optical fiber scanning driver, which are used for improving the accuracy, stability and convenience in processing of the scanning driver.

In order to achieve the above object, a first aspect of an embodiment of the present invention provides a scan driver including a first actuating portion and a second actuating portion integrally formed and sequentially connected in a back-to-front direction; the first actuating part and the second actuating part comprise piezoelectric material bodies with piezoelectric effect, inner electrode holes are formed in the first actuating part and the second actuating part, outer electrodes are arranged outside the first actuating part and the second actuating part, and inner electrodes matched with the outer electrodes are arranged in the inner electrode holes of the first actuating part and the second actuating part.

The rear end of the first actuating part is fixedly connected with the front end of the second actuating part, and further a separation part for connecting the two parts can be arranged between the first actuating part and the second actuating part, and the separation part is used for connecting the two actuating parts and is beneficial to separation between the first actuating part and the second actuating part. At this time, the scan driver includes a first actuating part, a spacer part and a second actuating part which are integrally formed and sequentially connected in a back-to-front direction; the first actuating part and the second actuating part comprise piezoelectric material bodies with piezoelectric effect, inner electrode holes are formed in the first actuating part and the second actuating part, outer electrodes are arranged outside the first actuating part and the second actuating part, and inner electrodes matched with the outer electrodes are arranged in the inner electrode holes of the first actuating part and the second actuating part. The isolation part is named for facilitating understanding, and in practical application, the isolation part can be a regular three-dimensional part, an irregular three-dimensional part, a virtual plane, a curved surface or an irregular surface, and is mainly used for connecting two actuation parts and realizing isolation between different electrodes.

The natural frequency of the piezoelectric material body of the second actuating portion is greater than the natural frequency of the piezoelectric material of the first actuating portion. In order for the optical fiber scanner of the present invention to drive the optical fiber cantilever to realize the grid scanning, the natural frequencies of the first actuating part and the second actuating part must be different, that is, the two parts can be regarded as a filter, and only the driving signals with the frequencies conforming to the natural frequencies of the two parts can drive the two parts to vibrate stably.

Preferably, the piezoelectric ceramic body of the first actuating portion has two first outer sides parallel to each other and perpendicular to the first axis, each first outer side is provided with a first external electrode, the piezoelectric ceramic body of the second actuating portion has two second outer sides parallel to each other and perpendicular to the second axis, each second outer side is provided with a second external electrode, and the first axis and the second axis are perpendicular to the front-back direction and are not parallel to each other.

Preferably, the piezoelectric ceramic body of the first actuating portion has two third outer sides parallel to each other and perpendicular to a third axis, and each third outer side is provided with a third external electrode, and the third axis is perpendicular to the front-rear direction and is not parallel to the first axis.

Preferably, the piezoelectric ceramic body of the second actuating portion has two fourth outer sides parallel to each other and perpendicular to a fourth axis, and each of the fourth outer sides is provided with a fourth outer electrode, and the fourth axis is perpendicular to the front-rear direction and is not parallel to the second axis.

Preferably, a fifth external electrode insulated from the first external electrode is further disposed on the first external side.

Preferably, a sixth external electrode is further disposed on the second external side and insulated from the second external electrode.

Preferably, the first outer side face is further provided with a first piezoelectric material sheet closely attached to the first outer side face, the first piezoelectric material sheet is polarized along the first axis direction, two outer surfaces of the piezoelectric material sheet perpendicular to the first axis are respectively provided with an electrode, and the electrodes on the surface of the first piezoelectric material sheet are mutually insulated from the first outer electrode on the first outer side face.

Preferably, the second outer side surface is provided with a second piezoelectric material sheet closely attached to the second outer side surface, the second piezoelectric material sheet is polarized along the second axis direction, two outer surfaces of the piezoelectric material sheet perpendicular to the second axis are respectively provided with an electrode, and the electrodes on the surface of the second piezoelectric material sheet are mutually insulated from the second outer electrode on the second outer side surface.

Preferably, the inner electrode hole of the first actuating portion is provided with second planes corresponding to the first planes where the external electrodes are located, each second plane is close to and parallel to the corresponding first plane, and the inner electrode corresponding to the external electrode on each first plane is arranged on the second plane corresponding to the first plane.

Preferably, the piezoelectric ceramic body of the first actuating portion is in a circular tube shape, two first external electrodes driving the front end of the first actuating portion to vibrate along the first axis are axially symmetrically arranged on the outer surface of the piezoelectric material body, the piezoelectric ceramic body of the second actuating portion is in a circular tube shape, two second external electrodes driving the front end of the second actuating portion to vibrate along the second axis are axially symmetrically arranged on the outer surface of the piezoelectric material body, and the first axis and the second axis are perpendicular to the front-back direction and are not parallel to each other.

Preferably, the piezoelectric ceramic body of the first actuating part is provided with two third external electrodes axially symmetrically arranged on the outer surface of the piezoelectric ceramic body for driving the front end of the first actuating part to vibrate along a third axis, and the third axis is perpendicular to the front-back direction and is not parallel to the first axis.

Preferably, the piezoelectric ceramic body of the second actuating portion is provided with two fourth external electrodes axially symmetrically arranged on the outer surface of the piezoelectric ceramic body for driving the front end of the second actuating portion to vibrate along a fourth axis, and the fourth axis is perpendicular to the front-back direction and is not parallel to the second axis.

Preferably, a fifth external electrode which is insulated from the first external electrode is arranged at a position, close to the first external electrode, of the outer surface of the piezoelectric ceramic body of the first actuating part.

Preferably, a sixth external electrode which is insulated from the second external electrode is arranged at a position, close to the second external electrode, of the outer surface of the piezoelectric ceramic body of the second actuating part.

Preferably, a first piezoelectric material sheet is arranged at a position, close to the first external electrode, of the outer surface of the piezoelectric ceramic body of the first actuating part, the first piezoelectric material sheet is an arc-shaped sheet closely attached to the piezoelectric ceramic body, the first piezoelectric material sheet is polarized along the radial direction, an electrode is respectively arranged on an inner arc-shaped surface and an outer arc-shaped surface of the first piezoelectric material arc-shaped sheet, and the electrode on the surface of the first piezoelectric material sheet is mutually insulated from the first external electrode on the first external side surface.

Preferably, a second piezoelectric material sheet is arranged at a position, close to the second external electrode, of the outer surface of the piezoelectric ceramic body of the second actuating part, the second piezoelectric material sheet is an arc-shaped sheet closely attached to the piezoelectric ceramic body, the second piezoelectric material sheet is polarized along the radial direction, an electrode is respectively arranged on an inner arc-shaped surface and an outer arc-shaped surface of the second piezoelectric material arc-shaped sheet, and the electrode on the surface of the second piezoelectric material sheet and the second external electrode on the second external side are mutually insulated.

Preferably, the number of the inner electrodes arranged in the inner electrode holes of the first actuating part is one or more, each inner electrode is matched with at least one outer electrode, the number of the inner electrodes arranged in the inner electrode holes of the second actuating part is one or more, and each inner electrode is matched with at least one outer electrode.

Preferably, the inner electrodes of the first actuating part and the inner electrodes of the second actuating part are mutually insulated or electrically connected, the inner electrodes of the first actuating part are mutually insulated or electrically connected, and the inner electrodes of the second actuating part are mutually insulated or electrically connected.

Preferably, at least one of the inner electrodes or the outer electrodes is connected with a thin film conductive layer attached to the scan driver, the thin film conductive layers are mutually insulated, and the thin film conductive layers are mutually insulated from the incoherent inner electrodes or the outer electrodes, and extend to the rear end of the scan driver. The inner electrode or the outer electrode which is not related to each thin film conductive layer means each inner electrode or each outer electrode which is not connected to the thin film conductive layer.

Preferably, the scan driver further includes a fixing portion located at a rear side of the first actuating portion and integrally formed with the first actuating portion, and the fixing portion is a solid cylinder or a second through hole having an inner electrode hole communicating with the first actuating portion.

Preferably, for the scan driver provided with the isolation portion, the isolation portion is provided with a first through hole communicating with the inner electrode holes of the first actuating portion and the second actuating portion.

Preferably, the first axis is perpendicular to the second axis.

Preferably, the third shaft and the second shaft are the same shaft, and the fourth shaft and the first shaft are the same shaft.

Preferably, the inner electrode hole of the first actuating part and the inner electrode hole of the second actuating part form a common electrode layout hole, or

The first through hole, the inner electrode hole of the first actuating part and the inner electrode hole of the second actuating part form a common electrode layout hole, or

The second through hole, the first through hole, the inner electrode hole of the first actuating part and the inner electrode hole of the second actuating part form a common electrode layout hole.

Preferably, the common electrode layout hole is a circular hole with a circular section or a square hole with a square section, and when the common electrode layout hole is a square hole, the hole wall of the common electrode layout hole comprises two planes parallel to the first outer side surface and two planes parallel to the second outer side surface.

Preferably, the wall of the common electrode layout hole is fully distributed with a common electrode layer, and the common electrode layer is shared by all the external electrodes.

Preferably, the piezoelectric material body of the first actuating portion is in a square rod shape, and the side surface of the piezoelectric material body is surrounded by two first outer side surfaces parallel to each other and two third outer side surfaces parallel to each other.

Preferably, the piezoelectric material body of the second actuating portion is in a square rod shape, and the side surface of the piezoelectric material body is surrounded by two second outer side surfaces parallel to each other and two fourth outer side surfaces parallel to each other.

Preferably, the scan driver body composed of the piezoelectric material body of the first actuator and the piezoelectric material body of the second actuator is a square bar extending in the front-rear direction and having a square cross-sectional profile, or

The scan driver body composed of the piezoelectric material body of the first actuating part, the isolating part and the piezoelectric material body of the second actuating part is a square rod extending along the front-back direction and having a square cross-section profile, or

The scan driver body composed of the fixed portion, the piezoelectric material body of the first actuating portion, the isolation portion, and the piezoelectric material body of the second actuating portion is a square rod extending in the front-rear direction and having a square cross-sectional profile.

Preferably, the common electrode layout hole is a through hole penetrating the scan driver in the front-rear direction.

The piezoelectric material body of the first actuating part, the piezoelectric material body of the second actuating part, the first piezoelectric material sheet and the second piezoelectric material sheet are all made of piezoelectric materials. The piezoelectric material includes two types: organic piezoelectric materials, inorganic piezoelectric materials, organic piezoelectric materials, i.e., isopolymers similar to polyvinylidene fluoride (PVF 2), polyvinylidene fluoride (PVDF); the inorganic piezoelectric material mainly comprises two major types of piezoelectric crystals with single crystal structures and piezoelectric ceramics with polycrystalline structures, wherein the single crystal piezoelectric material is crystals which grow orderly, such as quartz crystals, lithium niobate crystals and the like, the piezoelectric ceramics with the polycrystalline structures are artificially synthesized piezoelectric polycrystals, and the common piezoelectric ceramics comprise barium titanate, lead zirconate titanate, niobate and the like.

The thin film conductive layer can be prepared by adopting a processing method similar to a conductive metal layer on a printed circuit board, or a thin film metal conductive sheet is attached to a scanning driver and is electrically connected with a corresponding electrode by a connection mode such as welding.

A second aspect of the embodiments of the present invention provides an optical fiber scanner, including a scan driver and an optical fiber as described in any one of the above, where the optical fiber is fixedly connected to the scan driver and a front end of the optical fiber extends beyond the scan driver to form an optical fiber cantilever. The fixed connection mode can adopt conventional connection structures such as gluing, fastening of fixing pieces, welding and the like.

Optionally, an optical fiber located at the rear side of the optical fiber cantilever is fixedly connected to the outer surface of the scan driver.

Optionally, the optical fiber at the rear side of the optical fiber cantilever is fixedly arranged in the common electrode layout hole.

One or more technical solutions in the embodiments of the present invention at least have the following technical effects or advantages:

the integrated structure avoids a series of processes such as subsequent scanner assembly, alignment, debugging and the like, reduces the complexity and improves the manufacturing efficiency, so that the difficulty in the manufacturing process can be greatly reduced and the reliability of a device can be improved by adopting integrated forming, and meanwhile, the disassembly and disassembly can be prevented, and the overall reliability and durability can be increased.

Drawings

FIG. 1 is a schematic diagram of an embodiment of the present invention;

FIG. 2 is a cross-sectional view of the scan driver of the embodiment shown in FIG. 1;

FIG. 3 is a cross-sectional view of the first actuator of FIG. 2 taken along section B-B;

FIG. 4 is a cross-sectional view of the first actuator of FIG. 2 taken along section A-A;

FIG. 5 is a schematic diagram of a second embodiment of the present invention;

FIG. 6 is a cross-sectional view of the scan driver of the embodiment shown in FIG. 5;

FIG. 7 is a cross-sectional view of the first actuator of FIG. 6 taken along section B-B;

FIG. 8 is a cross-sectional view of the first actuator of FIG. 6 taken along section A-A;

FIG. 9 is a schematic diagram of a third embodiment of the present invention;

FIG. 10 is a cross-sectional view of the scan driver of the embodiment of FIG. 9;

FIG. 11 is a cross-sectional view of the first actuator of FIG. 10 taken along section B-B;

FIG. 12 is a cross-sectional view of the first actuator of FIG. 10 taken along section A-A;

FIG. 13 is a schematic view of a fourth embodiment of the present invention;

FIG. 14 is a cross-sectional view of the scan driver of the embodiment shown in FIG. 13;

FIG. 15 is a cross-sectional view of the first actuator of FIG. 14 taken along section B-B;

FIG. 16 is a cross-sectional view of the first actuator of FIG. 14 taken along section A-A;

FIG. 17 is a schematic view of a fifth embodiment of the present invention;

FIG. 18 is a cross-sectional view of the scan driver of the embodiment of FIG. 17;

FIG. 19 is a cross-sectional view of the first actuator of FIG. 18 taken along section B-B;

FIG. 20 is a cross-sectional view of the first actuator of FIG. 18 taken along section A-A;

fig. 21 is a schematic structural view of a sixth embodiment of the present invention;

FIG. 22 is a cross-sectional view of the scan driver of the embodiment of FIG. 21;

FIG. 23 is a cross-sectional view of the first actuator of FIG. 22 taken along section B-B;

FIG. 24 is a cross-sectional view of the first actuator of FIG. 22 taken along section A-A;

fig. 25 is a schematic structural view of a seventh embodiment of the present invention;

FIG. 26 is a cross-sectional view of the scan driver of the embodiment of FIG. 25;

FIG. 27 is a cross-sectional view of the first actuator of FIG. 26 taken along section B-B;

FIG. 28 is a cross-sectional view of the first actuator of FIG. 26 taken along section A-A;

fig. 29 is a schematic view of the structure of an eighth embodiment of the present invention;

FIG. 30 is a cross-sectional view of the scan driver of the embodiment of FIG. 29;

FIG. 31 is a cross-sectional view of the first actuator of FIG. 30 taken along section B-B;

FIG. 32 is a cross-sectional view of the first actuator of FIG. 30 taken along section A-A;

FIG. 33 is a cross-sectional view of a first actuator part in another embodiment of the present invention;

FIG. 34 is a cross-sectional view of a second actuator in another embodiment of the present invention;

fig. 35 is a schematic structural view of a ninth embodiment of the present invention;

FIG. 36 is a cross-sectional view of the scan driver of the embodiment shown in FIG. 35;

FIG. 37 is a cross-sectional view of the first actuator of FIG. 36 taken along section B-B;

fig. 38 is a cross-sectional view of the first actuator of fig. 36 taken along section A-A.

Description of the embodiments

The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

Various embodiments of the invention are described below, each of which further includes a plurality of unique features.

Class 1 embodiment:

as shown in fig. 1 to 8, a scan driver includes a first actuating part 1, a spacer part 2 and a second actuating part 3 integrally formed and sequentially connected in a rear-to-front direction, the first actuating part 1 and the second actuating part 3 each include a piezoelectric material body having a piezoelectric effect, inner electrode holes are provided in the interiors of the first actuating part 1 and the second actuating part 3, outer electrodes 12 and 32 are provided in the exteriors of the first actuating part 1 and the second actuating part 3, and inner electrodes 601 and 602 engaged with the outer electrodes of the interiors of the inner electrode holes of the first actuating part 1 and the second actuating part 3 are provided in the interiors of the inner electrode holes of the first actuating part 1 and the second actuating part 3 so as to realize that when the inner electrodes and the outer electrodes are connected to an external driving device, a front end portion of the first actuating part 1 vibrates along a first axis, and a front end portion of the second actuating part 3 vibrates along a second axis.

The optical fiber scanning driver adopting the scanning driver comprises an optical fiber 5 and the scanning driver, wherein the optical fiber 5 is fixedly connected with the scanning driver, and the front end of the optical fiber 5 exceeds the scanning driver to form an optical fiber 5 cantilever. The first actuating part 1 drives the optical fiber 5 to vibrate along the first axis direction, the second actuating part 3 drives the optical fiber 5 to vibrate along the second axis direction, the integrated bidirectional driver can reduce the number of parts, the scanning process is more stable, looseness caused by long-time operation can not occur at the connecting part between the first actuating part 1 and the second actuating part 3, and the optical fiber drive device has the advantages of convenience in mass production, rapid manufacturing, small error, high repeatability, high yield and the like.

Compared with the prior art that the first actuating part 1 and the second actuating part 3 adopt the fixing modes such as gluing or buckling, screws and the like, the gluing or buckling modes can lead to connection loosening due to long-time high-frequency vibration, the vibration performance of the scanner is directly affected, the fixing mode of the screws is slightly large in size and slightly complex in structure, and the existing fixing mode is high in process difficulty, time-consuming in manufacturing, poor in repeatability and low in yield.

The second actuating portion 3 and the first actuating portion 1 in the optical fiber scanner are small in size and have a thickness of about several millimeters, so that the second actuating portion 3 and the first actuating portion are easily damaged when a connecting piece is adopted in the process of connecting the second actuating portion and the first actuating portion; the integrated forming of the die is utilized, a series of processes of assembling, aligning, debugging and the like of a subsequent scanner are avoided, the complexity is reduced, and the manufacturing efficiency is improved, so that the difficulty in the manufacturing process can be greatly reduced and the reliability of a device is improved by adopting the integrated forming, and meanwhile, the disassembly and disassembly can be prevented, and the overall reliability and durability are improved.

The first actuating part 1 and the second actuating part 3 control the optical fiber 5 to generate the vibration in the combined direction of the first axial vibration and the second axial vibration according to the driving signal sent by the control component, the natural frequency of the second actuating part 3 is far greater than that of the first actuating part 1, so that the optical fiber 5 is further driven to swing in a cantilever mode, and the emitting end of the tail end of the cantilever section performs raster scanning in a three-dimensional space so as to emit laser with modulation information to display images.

The integral molding of the first actuating portion 1, the isolating portion 2 and the second actuating portion 3 means that the integral member comprising the first actuating portion 1, the isolating portion 2 and the second actuating portion 3 is integrally manufactured and molded by adopting an integral molding process. For example, the first actuating portion 1, the isolating portion 2 and the second actuating portion 3 each include a main body made of a piezoceramic powder material, and after the piezoceramic powder is put into a mold and pressed, an integral member including the first actuating portion 1, the isolating portion 2 and the second actuating portion 3 is obtained by baking, and then the first actuating portion 1 and the second actuating portion 3 are polarized as required, and driving electrodes are added to the first actuating portion 1 and the second actuating portion 3.

In the application field of the micro structure of the optical fiber scanner, the first actuating portion 1 and the second actuating portion 3 after being integrally formed are remarkable in improvement of the scanning emergent image quality, and the improvement is mainly represented by the following factors: in the optical fiber scanner, the first actuating part 1 and the second actuating part 3 vibrate at high frequency, and in the process of integrally forming the first actuating part 1 and the second actuating part 3, the pressure of tens of megapascals enables the scanner to be compact enough to realize high-efficiency performance, and meanwhile, the rigidity is extremely high, which is incomparable by using an adhesive mode, so that the interconnection part is prevented from loosening caused by the high-frequency vibration by the integral forming.

Specifically, the piezoelectric material body of the first actuating portion 1 has two first outer sides 11 parallel to each other and perpendicular to the first axis, each first outer side 11 is provided with a first outer electrode 12, the piezoelectric material body of the second actuating portion 3 has two second outer sides 31 parallel to each other and perpendicular to the second axis, each second outer side 31 is provided with a second outer electrode 32, the first axis and the second axis are perpendicular to the front-back direction and are not parallel to each other, the inner electrode hole of the first actuating portion 1 is internally provided with a first inner electrode 601 matched with the first outer electrode 12, and the inner electrode hole of the second actuating portion 3 is internally provided with a second inner electrode 602 matched with the second outer electrode 32.

By arranging the first outer side surface 11 and the second outer side surface 31, the arrangement positions of the first outer electrode 12 and the second outer electrode 32 are accurate, and when the first outer side surface 11 and the second outer side surface 31 are ensured, the included angle between the vibration direction of the first actuating part 1 and the vibration direction of the second actuating part 3 can be ensured only by arranging the outer electrode on the first outer side surface 11 and the second outer side surface 31 when the electrodes are arranged.

The front end of the first actuating part 1 vibrates along a first axis under the drive of an alternating electric field formed between the first outer electrode 12 and the first inner electrode, and the front end of the second actuating part 3 vibrates along a second axis under the drive of an alternating electric field formed between the second outer electrode 32 and the second inner electrode. Specifically, the portion of the piezoelectric material body of the first actuating portion 1 between the first external electrode 12 and the first internal electrode is polarized in the direction perpendicular to the first external side face 11, and the portion of the piezoelectric material body of the second actuating portion 3 between the second external electrode 32 and the second internal electrode is polarized in the direction perpendicular to the second external side face 31.

The first inner electrode 601 may be an electrode layer that is disposed on the inner wall of the inner electrode hole of the first actuating part 1, so that the two first outer electrodes 12 of the first actuating part 1 share one first inner electrode 601. The first inner electrodes may be two first inner electrodes 6011 disposed in the inner electrode holes of the first actuating portion 1 and respectively corresponding to the first outer electrodes 12, as shown in fig. 7, and the two first inner electrodes 6011 may be independent, insulated from each other, or electrically connected together.

Similarly, the second inner electrode 602 may be an electrode layer that is disposed on the inner wall of the inner electrode hole of the second actuating portion 3, so that the two second outer electrodes 32 of the second actuating portion 3 share one second inner electrode 602. The second inner electrodes may be two second inner electrodes 6021 disposed in the inner electrode holes of the second actuator 3 and corresponding to the second outer electrodes 32, as shown in fig. 8, and the two second inner electrodes 6021 may be independent, insulated from each other, or electrically connected together. Alternatively, the first inner electrode 601 and the second inner electrode 602 may be disposed on the wall of the inner electrode hole.

Further, each of the outer electrode and the inner electrode is connected with a conductive substance to connect devices outside the optical fiber scanning driver through the conductive substance. The conductive material may be a wire or the like, but in order to avoid the influence of a similar conductive material such as a wire on the scanning track of the optical fiber scanning driver, it is preferable that the conductive material is a thin film conductive layer 7.

The thin film conductive layer 7 and the following other embodiments refer to the thin film conductive layer in order to extend the connection point of the electrode connected to the thin film conductive layer 7 to the rear end of the scan driver, and the thin film conductive layer 7 extends from the rear end of the electrode connected to the thin film conductive layer to the rear end of the scan driver, so that the rear end of the scan driver needs to be fixed, and the connection at the rear end of the scan driver does not affect the overall vibration. Therefore, each thin film conductive layer 7 needs to be insulated from the electrode not connected with the thin film conductive layer 7, on one hand, the thin film conductive layer 7 can be directly adhered to the surface of the piezoelectric material body or the isolation part 2, and a physical gap exists between the thin film conductive layer 7 and other electrodes to realize insulation, or the thin film conductive layer 7 can be adhered to the surface of the electrode not connected with the thin film conductive layer 7, and at the moment, an insulating layer needs to be arranged between the electrode and the thin film conductive layer 7.

In particular, the arrangement structure of the thin film conductive layer according to this embodiment includes the following structures:

as shown in fig. 1 and 5, two first external electrodes 12 are respectively connected with a first thin film conductive layer, the first thin film conductive layer is insulated and adhered on the outer surface of the first actuating portion 1, and the first thin film conductive layer extends backwards to the tail end of the scan driver to weld electrical connectors such as wires and circuit pins. The two second external electrodes 32 are respectively connected with a second thin film conductive layer, the second thin film conductive layers are adhered to the outer surfaces of the first actuating part 1 and the isolation part 2 in an insulating manner, and the second thin film conductive layers extend backwards to the tail end of the scanning driver to weld electrical connectors such as wires, circuit pins and the like. The insulating coating of the film conductive layer on certain components of the scan driver as described above and below means: the thin film conductive layers are adhered to the scanning driver, the thin film conductive layers are mutually insulated, meanwhile, the thin film conductive layers are mutually insulated from the incoherent inner electrodes or the incoherent outer electrodes of the thin film conductive layers, and the incoherent inner electrodes or the incoherent outer electrodes of the thin film conductive layers refer to the inner electrodes or the outer electrodes which are not connected with the thin film conductive layers.

The first inner electrode may be connected to a first inner film conductive layer attached to the inner wall of the inner electrode hole of the first actuating portion 1, or the first inner electrode may extend to the end of the first actuating portion 1, the second inner electrode is connected to a second inner film conductive layer, and the second inner film conductive layer is attached to the front end surface of the second actuating portion 3, the outer surface of the isolating portion 2 and the outer surface of the first actuating portion 1 in an insulating manner, as shown in fig. 1, 17 and 25, so that the electrodes connected with the film conductive layers 7 are connected to an external driving device or a detection device through the corresponding film conductive layers. In the process of vibration of the optical fiber scanning driver, the film is bent and deformed along with the optical fiber scanning driver, and compared with the connection of wires, the influence on the displacement of the optical fiber scanning driver caused by the dead weight of the wires can be well overcome.

The conductive layers of the films or the first inner electrodes extending to the rear end of the first actuating part 1 are welded with electrical connectors such as wires and circuit pins at the rear end of the scanning driver, and the welded wires do not interfere with the vibration of the scanning driver because the rear end of the scanning driver is fixedly arranged.

Further alternatively, the inner electrode hole of the first actuating portion 1 and the inner electrode hole of the second actuating portion 3 may be circular holes or square holes. Further, referring to fig. 15 and 16, when the inner electrode hole is a square hole, the wall of the square hole of the inner electrode hole of the first actuating portion 1 includes a first plane parallel to the first outer side 11, the square hole of the inner electrode hole of the second actuating portion 3 includes a second plane parallel to the second outer side 31, the first plane is close to and parallel to the first outer side 11, the second plane is close to and parallel to the second outer side 31, the piezoelectric material with the same thickness is disposed between the first inner electrode and the first outer electrode 12 disposed on the first plane, and the piezoelectric material with the same thickness is disposed between the second inner electrode and the second outer electrode 32 disposed on the second plane, so that stability of scanning performance of the scanning driver is ensured to be improved.

Class 2 embodiment

The embodiment of the present invention is further preferably designed based on any one of the embodiments of the 1 st class, specifically:

as shown in fig. 5 to 8, the isolating part 2 is provided with a first through hole communicated with the inner electrode holes of the first actuating part 1 and the second actuating part 3, and the first through hole and the two inner electrode holes are coaxially arranged, so that the inner electrode holes of the first actuating part 1, the first through hole and the inner electrode hole of the first actuating part 1 penetrate through the common electrode layout hole of the scanning driver.

Further preferably, the second inner thin film conductive layer may be attached to the inner surface of the common electrode arrangement hole and extend to the rear end of the scan driver, as shown in fig. 22, avoiding bending and exposure of the second inner thin film conductive layer.

The inner electrode hole of the first actuating portion 1 and the inner electrode hole of the second actuating portion 3 are communicated, so that, in this case, as a preferred embodiment, the inner surface of the common electrode arrangement hole is fully covered with an inner electrode 6, as shown in fig. 10, that is, the inner electrode is fully covered with the wall of the common electrode arrangement hole, and the first outer electrode 12 and the second outer electrode 32 share the inner electrode.

More preferably, the common electrode layout hole is a circular hole with a circular cross section or a square hole with a square cross section, and when the common electrode layout hole is a square hole, as shown in fig. 15 and 16, the hole wall of the common electrode layout hole includes two planes parallel to the first outer side surface 11 and two planes parallel to the second outer side surface 31. And further preferably, the common electrode layout hole is a through hole penetrating through the scanning driver along the front-back direction, so that the common electrode layout hole can be used for layout of the inner electrode and the processing difficulty of the scanning driver is reduced.

For the optical fiber scanning driver of the scanning driver adopting the structure, the optical fiber 5 can be fixedly arranged on the outer surface of the scanning driver, and the front end of the optical fiber 5 exceeds the scanning driver to form an optical fiber 5 cantilever; more preferably, the optical fiber 5 is fixedly arranged in the common electrode layout hole, and the front end of the optical fiber 5 penetrates out of the common electrode layout hole to form a cantilever.

Class 3 embodiment

The embodiment of the present invention is further preferably designed based on any one of the embodiments of the class 1 and the class 2, specifically:

as shown in fig. 9 to 24, the piezoelectric material body of the first actuating portion 1 has two third outer sides 13 parallel to each other and perpendicular to a third axis, each third outer side 13 is provided with a third outer electrode 14, the third axis is perpendicular to the front-back direction and is not parallel to the first axis, and a third inner electrode matching with the third outer electrode 14 is provided inside the inner electrode hole of the first actuating portion 1. Similarly, the third inner electrode may be an electrode layer disposed on the inner wall of the inner electrode hole of the first actuating portion 1, so that the third outer electrode 14 and the first outer electrode 12 share one inner electrode. The third inner electrodes may be two third inner electrodes 6012 disposed in the inner electrode holes of the first actuating portion 1 and corresponding to the third outer electrode 14, as shown in fig. 19, for example, the third inner electrodes may be disposed on the hole walls of the inner electrode holes; and, optionally, the two third internal electrodes or the two third internal electrodes and each first internal electrode may be independent, insulated or electrically connected together. Thus, the first actuating part 1 vibrates along the third axis at its front end portion driven by the alternating electric field formed between the third outer electrode 14 and the third inner electrode. Specifically, the portion of the piezoelectric material body between the third external electrode 14 and the internal electrode is polarized in a direction perpendicular to the second external side face 31.

This enables the first actuator 1 not only to drive the optical fiber 5 to vibrate in the first axis direction, but also to simultaneously achieve correction of the scanning trajectory in the third axis direction by means of the structure in which the third external electrode 14 is provided, so as to overcome distortion of the scanning trajectory due to errors in mounting, processing, and the like.

At this time, the inner electrode hole of the first actuating portion 1 may be a circular hole or a hole wall with two first planes near the first outer side 11 and parallel to the first outer side 11 and two second planes near the third outer side 13 and parallel to the third outer side 13, as shown in fig. 15 and 19, so that the piezoelectric material with the same thickness is disposed between the first inner electrode and the first outer electrode 12 in the first plane, and the piezoelectric material with the same thickness is disposed between the third inner electrode and the third outer electrode 14 in the second plane, thereby ensuring the stability of the scanning performance of the scanning driver.

Optionally, the third outer electrode 14 and the third inner electrode are connected with a conductive substance, preferably a thin film conductive layer, to connect devices external to the optical fiber scanning driver through the conductive substance. When the third inner electrode is not electrically connected with the first inner electrode, the arrangement mode of the thin film conductive layer connected with the third inner electrode is the same as that of the first inner thin film conductive layer. When the third internal electrode is electrically connected with the first internal electrode, the third internal electrode and the first internal electrode share the same first internal thin film conductive layer. The thin film conductive layer to which the third external electrode 14 is connected is insulation-coated on the outer surface of the first actuating part 1.

Class 4 embodiment

The embodiment of the present invention is further preferably designed based on any one of the embodiments of the class 1, the class 2 and the class 3, and specifically comprises:

as shown in fig. 9 to 24, the piezoelectric material body of the second actuating portion 3 has two fourth outer sides 33 parallel to each other and perpendicular to a fourth axis, each of the fourth outer sides 33 is provided with a fourth outer electrode 34, the fourth axis is perpendicular to the front-rear direction and is not parallel to the second axis, and the inside of the inner electrode hole of the second actuating portion 3 is provided with a fourth inner electrode that is matched with the fourth outer electrode 34. Similarly, the fourth inner electrode may be an electrode layer disposed on the inner wall of the inner electrode hole of the second actuator 3, so that the fourth outer electrode 34 and the second outer electrode 32 share one inner electrode. The fourth inner electrodes may be two fourth inner electrodes 6022 disposed in the inner electrode holes of the second actuator 3 and corresponding to the fourth outer electrode 34, as shown in fig. 20. Optionally, the fourth inner electrode may be disposed on a wall of the inner electrode hole. And, optionally, the two fourth internal electrodes or each fourth internal electrode and each second internal electrode may be independent, insulated from each other, or electrically connected together. Thus, the second actuating portion 3 vibrates along the fourth axis at its front end portion driven by the alternating electric field formed between the fourth outer electrode 34 and the fourth inner electrode. Specifically, the portion of the piezoelectric material body located between the fourth outer electrode 34 and the fourth inner electrode is polarized in the direction perpendicular to the second outer side face 31.

This enables the second actuator 3 not only to drive the optical fiber 5 to vibrate in the first axis direction, but also to simultaneously correct the scanning trajectory in the fourth axis direction by means of the structure in which the fourth external electrode 34 is provided, so as to overcome distortion of the scanning trajectory due to errors in the mounting, processing, and the like.

At this time, the inner electrode hole of the second actuating portion 3 may be a circular hole or a hole wall having two first planes close to and parallel to the second outer side surface 31 and two second planes close to and parallel to the fourth outer side surface 33, as shown in fig. 16 and 20, so that the thickness of the piezoelectric material between the second inner electrode and the second outer electrode 32 disposed on the first plane is the same, and the thickness of the piezoelectric material between the fourth inner electrode and the fourth outer electrode 34 disposed on the second plane is the same, thereby ensuring the stability of the scanning performance of the scanning driver.

Optionally, the fourth outer electrode 34 and the fourth inner electrode may also be connected with a conductive substance, preferably a thin film conductive layer, to connect devices outside the optical fiber scanning driver through the conductive substance. When the fourth inner electrode is not electrically connected with the second inner electrode, the arrangement mode of the thin film conductive layer connected with the fourth inner electrode is the same as that of the second inner thin film conductive layer. When the third internal electrode is electrically connected with the first internal electrode, the third internal electrode and the first internal electrode share the same second internal thin film conductive layer. The thin film conductive layer connected to the fourth external electrode 34 is attached to the outer surfaces of the first actuator 1 and the separator 2 in an insulating manner.

Class 5 embodiment

The embodiment of the present invention is further preferably designed based on any one of the class 1 embodiment, the class 2 embodiment, the class 3 embodiment and the class 4 embodiment, specifically:

as shown in fig. 3 and 4, the first outer side 11 is further provided with a fifth outer electrode 15 insulated from the first outer electrode 12, and the fifth outer electrode 15 may be provided on only any one of the first outer sides 11, or the fifth outer electrode 15 may be provided on both the first outer sides 11, and a fifth inner electrode matched with the fifth outer electrode 15 may be provided inside the inner electrode hole of the first actuating portion 1. Similarly, the fifth inner electrode may be an electrode layer disposed on the inner wall of the inner electrode hole of the first actuating portion 1, so that the fifth outer electrode 15 shares one inner electrode 601 with the first and third outer electrodes 12 and 14. The inner electrodes may be two fifth inner electrodes disposed in the inner electrode holes of the first actuating part 1 and corresponding to the fifth outer electrode 15. Optionally, the fifth inner electrode may be disposed on a wall of the inner electrode hole. And the fifth internal electrode and the two first internal electrodes or the third internal electrode can be independent, insulated or electrically connected.

The fifth external electrode 15 is not applied with a driving voltage for monitoring vibration parameters of the first and second actuating parts 1 and 3, such as whether they are vibrating, vibration displacement, vibration frequency, etc., by measuring induced charges generated at the electrodes during vibration of the first and second actuating parts 1 and 3.

Preferably, the area of the fifth external electrode 15 covered on the first external side 11 is much smaller than the area of the first external side 11 of the first external electrode 12, for example, the width of the fifth external electrode 15 is much smaller than the width of the first external electrode 12, and/or the length of the fifth external electrode 15 is much smaller than the length of the first external electrode 12. Since the area of the inner electrode is limited by the size of the inner electrode hole, the area of the inner electrode which can be matched with the outer electrode on the first outer side surface 11 is constant, so that the area of the first outer electrode 12 is maximized, and the driving power of the first actuating part 1 can be effectively increased.

The fifth external electrode 15 and the fifth internal electrode are connected with a conductive substance to connect devices outside the optical fiber scanning driver through the conductive substance. Preferably, the conductive substance is a thin film conductive layer 7. When the fifth internal electrode is not electrically connected with the first internal electrode or the third internal electrode, the arrangement mode of the thin film conductive layer connected with the fifth internal electrode is the same as that of the first internal thin film conductive layer. When the fifth internal electrode is electrically connected to each of the first internal electrodes or each of the third internal electrodes, the fifth internal electrode shares the same thin film conductive layer as the first internal electrode or the third external electrode 14. The thin film conductive layer to which the fifth external electrode 15 is connected is insulation-coated on the outer surface of the first actuating part 1.

Class 6 embodiment

With reference to fig. 3 and fig. 4, this embodiment is further preferably designed based on any one of the class 1 embodiment, the class 2 embodiment, the class 3 embodiment, the class 4 embodiment and the class 5 embodiment, specifically:

the second outer side surface 31 is further provided with a sixth outer electrode 35 insulated from the second outer electrode 32, and the sixth outer electrode 35 may be provided on only any one of the second outer side surfaces 31, or the sixth outer electrode 35 may be provided on both of the second outer side surfaces 31, and a sixth inner electrode matched with the sixth outer electrode 35 may be provided inside an inner electrode hole of the second actuating portion 3. Similarly, the sixth inner electrode may be an electrode layer 602 disposed on the inner wall of the inner electrode hole of the second actuating portion 3, so that the sixth outer electrode 35 shares one inner electrode with the second outer electrode 32 and the fourth outer electrode 34. The sixth inner electrode may be a sixth inner electrode disposed in the inner electrode hole of the second actuator 3 and corresponding to the sixth outer electrode 35. Optionally, the fifth inner electrode may be disposed on a wall of the inner electrode hole. And, the sixth internal electrode and the two second internal electrodes or the fourth internal electrode can be independent, insulated or electrically connected.

The sixth external electrode 35 is not applied with a driving voltage for monitoring vibration parameters of the first and second actuating parts 1 and 3, such as whether they are vibrating, vibration displacement, vibration frequency, etc., by measuring induced charges generated at the electrodes during vibration of the second actuating part 3.

Preferably, the area of the sixth external electrode 35 covered on the second external side 31 is much smaller than the area of the second external side 31 of the second external electrode 32, for example, the width of the sixth external electrode 35 is much smaller than the width of the second external electrode 32, and/or the length of the sixth external electrode 35 is much smaller than the length of the second external electrode 32. Since the area of the inner electrode is limited by the size of the inner electrode hole, the area of the inner electrode that can be matched with the outer electrode on the second outer side surface 31 is constant, and thus the area of the second outer electrode 32 is maximized, and the driving power of the second actuating portion 3 can be effectively increased.

The sixth outer electrode 35 and the sixth inner electrode are also connected with a conductive substance 7, preferably a thin film conductive layer, for connecting devices external to the optical fiber scanning driver via the conductive substance. When the sixth internal electrode is not electrically connected with the second internal electrode or the fourth internal electrode, the arrangement mode of the thin film conductive layer connected with the fourth internal electrode is the same as that of the second internal thin film conductive layer. When the sixth internal electrode is electrically connected with the second internal electrode or the fourth internal electrode, the sixth internal electrode and the second internal electrode or the fourth internal electrode share the same thin film conductive layer. The thin film conductive layer connected to the sixth external electrode 35 is insulated and attached to the outer surfaces of the first actuating part 1 and the isolating part 2.

Class 7 embodiment

as shown in fig. 5-8, the first outer side 11 is further provided with a first piezoelectric material sheet 16 that is closely attached to the first outer side 11, which may be that only one of the first outer sides 11 is provided with the first piezoelectric material sheet 16, or that both of the first outer sides 11 are provided with the first piezoelectric material sheet 16, the first piezoelectric material sheet 16 is polarized along the first axis direction, two outer surfaces of the piezoelectric material sheet perpendicular to the first axis are respectively provided with an electrode, and the electrodes on the surfaces of the first piezoelectric material sheet 16 and the first outer electrodes 12 on the first outer side 11 are mutually insulated.

The first sheet of piezoelectric material 16 is used to monitor a vibration parameter of the first actuator 1 during vibration of the first actuator 1 by measuring the induced charge generated by the electrodes on the outer surface of the first sheet of piezoelectric material 16.

The electrodes of the first sheet of piezoelectric material 16 are connected with a conductive substance to connect devices external to the optical fiber scanning driver through the conductive substance. Preferably, the conductive material is a thin film conductive layer 7, and the thin film conductive layers are adhered to the outer surface of the first actuating part 1 in an insulating manner.

Class 8 embodiment

The embodiment of the present invention is further preferably designed based on any one of the class 1 embodiment, the class 2 embodiment, the class 3 embodiment, the class 4 embodiment and the class 7 embodiment, specifically:

as shown in fig. 5-8, the second outer side surface 31 is provided with a second piezoelectric material sheet 36 closely attached to the second outer side surface 31, and the second piezoelectric material sheet 36 may be provided on only any one of the second outer side surfaces 31, or the second piezoelectric material sheets 36 may be provided on both the second outer side surfaces 31, the second piezoelectric material sheet 36 is polarized along the second axis direction, two outer surfaces of the piezoelectric material sheet perpendicular to the second axis are respectively provided with an electrode, and the electrodes on the surfaces of the second piezoelectric material sheet 36 and the second outer electrodes 32 on the second outer side surfaces 31 are mutually insulated.

The second sheet of piezoelectric material 36 is used to monitor a vibration parameter of the first actuator 1 during vibration of the first actuator 1 by measuring the induced charge generated by the electrodes on the outer surface of the first sheet of piezoelectric material 16.

The electrodes of the second sheet of piezoelectric material 36 are connected with a conductive substance to connect devices external to the optical fiber scanning driver through the conductive substance. Preferably, the conductive material is a thin film conductive layer 7, and the thin film conductive layers are adhered to the outer surface of the isolation part 2 and the outer surface of the first actuating part 1 in an insulating manner.

Class 9 embodiment

The embodiment of the present invention is further preferably designed based on any one of the embodiments of the 1 st to 8 th types, specifically:

referring to fig. 1, 2, 5, 6, 9 and 10, the scan driver further includes a fixing portion 4 located at the rear side of the first actuating portion 1 and integrally formed with the first actuating portion 1, where the fixing portion 4 may be a solid cylinder or a second through hole having an inner electrode hole communicating with the first actuating portion 1. When the fixing portion 4 is a solid cylinder, the side wall of the inner electrode hole of the first actuating portion 1 is provided with a lead-out hole for a conductive substance to be led out of the inner electrode hole of the first actuating portion 1, the conductive substance refers to a wire or a thin film conductive layer connected with the inner electrode, and the thin film conductive layer led out of the lead-out hole can be adhered to the outer surface of the fixing portion 4 in an insulating manner so as to extend to the rear end of the fixing portion 4. When the fixing portion 4 has the second through hole, the thin film conductive layer or the electrode layer on the inner surface of the first actuating portion 1 extends to the rear end of the second through hole, and each thin film conductive layer attached to the outer surface of the first actuating portion 1 extends to the rear end of the fixing portion 4 backwards and is attached to the outer surface of the fixing portion 4.

The integral molding of the fixing portion 4 and the first actuating portion 1 can further avoid the occurrence of looseness between the first actuating portion 1 and the fixing portion 4, that is, the fixing portion 4, the first actuating portion 1, the isolating portion 2 and the second actuating portion 3 are integrally molded, specifically, an integral component comprising the fixing portion 4, the first actuating portion 1, the isolating portion 2 and the second actuating portion 3 is integrally manufactured and molded by adopting an integral molding process. For example, the fixing portion 4, the first actuating portion 1, the isolating portion 2 and the second actuating portion 3 each include a main body made of a piezoceramic powder material, and after the piezoceramic powder is put into a die and pressed and formed, a monolithic member including the fixing portion 4, the first actuating portion 1, the isolating portion 2 and the second actuating portion 3 is obtained by baking, and then the first actuating portion 1 and the second actuating portion 3 are polarized as needed, and driving electrodes are added to the first actuating portion 1 and the second actuating portion 3.

Although the fixing portions are all drawn in the drawings of the present application, it should be emphasized that the fixing portions are not essential components of the present application, and the embodiment not including the fixing portions only needs to fixedly mount the rear end of the first actuating portion, and can also stably operate, and the setting of the fixing portions only further facilitates the mounting and fixing of the scan driver, and improves the reliability of the fixing.

Class 10 embodiment:

the embodiment of the present invention is further preferably designed based on the embodiment of the 1 st kind, specifically:

as shown in fig. 13-16 and 21-24, a scan driver includes a first actuating part 1, a partition part 2 and a second actuating part 3 which are integrally formed and sequentially connected in a back-to-front direction, a common inner electrode hole penetrating the scan driver in a front-to-back direction is provided in the scan driver, the common inner electrode hole specifically includes an inner electrode hole in the first actuating part 1, a first through hole in the partition part 2 and an inner electrode hole in the second actuating part 3, the first actuating part 1 and the second actuating part 3 each include a piezoelectric material body, the piezoelectric material body of the first actuating part 1 has two first outer sides 11 parallel to each other and perpendicular to a first axis, each first outer side 11 is provided with one first outer electrode 12, the piezoelectric material body of the second actuating part 3 has two second outer sides 31 parallel to each other and perpendicular to a second axis, each second outer side 31 is provided with one second outer electrode 32, the first axis and the second axis are perpendicular to each other, and the inner walls of the inner electrodes 12 and the first outer electrodes 32 are provided with the first outer electrodes 32 in cooperation with each other.

The optical fiber scanning driver adopting the scanning driver comprises an optical fiber 5 and the scanning driver, wherein the optical fiber 5 can be fixedly arranged on the outer surface of the scanning driver, and the front end of the optical fiber 5 exceeds the scanning driver to form an optical fiber 5 cantilever; more preferably, the optical fiber 5 is fixedly arranged in the common inner electrode hole, the front end of the optical fiber 5 penetrates out of the inner electrode hole to form an optical fiber 5 cantilever, specifically, the optical fiber 5 penetrates into the common inner electrode hole along the back-to-front direction, the front end of the optical fiber 5 penetrates out of the common inner electrode hole to form the cantilever, and the optical fiber 5 is fixedly connected with the scanning driver.

By providing the first outer side surface 11 and the second outer side surface 31, the arrangement positions of the first outer electrode 12 and the second outer electrode 32 are accurate, and when the electrodes are arranged, the perpendicularity of the vibration direction of the first actuating part 1 and the perpendicularity of the vibration direction of the second actuating part 3 can be ensured only by arranging the outer electrodes on the first outer side surface 11 and the second outer side surface 31 as long as the perpendicularity of the first outer side surface 11 and the second outer side surface 31 is ensured during processing.

The front end of the first actuating part 1 vibrates along a first axis under the drive of an alternating electric field formed between the first outer electrode 12 and the inner electrode, and the front end of the second actuating part 3 vibrates along a second axis under the drive of an alternating electric field formed between the second outer electrode 32 and the inner electrode. Specifically, the portion of the piezoelectric material body between the first external electrode 12 and the internal electrode is polarized in the direction perpendicular to the first external side face 11, and the portion of the piezoelectric material body between the second external electrode 32 and the internal electrode is polarized in the direction perpendicular to the second external side face 31.

The first actuating part 1 and the second actuating part 3 control the optical fiber 5 to generate the vibration in the combined direction of the first axial vibration and the second axial vibration according to the driving signal sent by the control component, the natural frequency of the second actuating part 3 is far greater than the vibration frequency of the first actuating part 1, so that the optical fiber 5 is further driven to swing in a cantilever way, and the emitting end of the tail end of the cantilever section performs raster scanning in a three-dimensional space so as to emit laser with modulation information to display images.

The inner electrode may be an electrode layer that fills the wall of the common inner electrode aperture, such that the first actuating portion 1 and the second actuating portion 3 share one inner electrode 6. For the optical fiber scanning driver of this structure, as shown in fig. 21. A preferred embodiment is that the optical fiber 5 and the scanning driver are integrally formed, and the integral forming method is as follows:

coating a conductive coating on the optical fiber to serve as an inner electrode corresponding to the piezoelectric cantilever in the optical fiber scanner;

wrapping a ceramic layer on the optical fiber coated with the conductive coating along the extending direction of the optical fiber;

coating a conductive coating on the ceramic layer along the extending direction at a designated area as an external electrode;

and applying voltage to the outer electrode and the inner electrode to polarize part or all of the ceramic layer.

Optionally, a ceramic layer is coated on the optical fiber coated with the conductive coating, including:

and using a die with an extrusion function to extrude ceramic powder into the optical fiber coated with the conductive coating along the extending direction to form a ceramic layer.

Optionally, before the external electrode and the internal electrode are energized, the method further includes:

and a connecting circuit is arranged on the optical fiber, and the connecting circuit is respectively connected with the inner electrode and the outer electrode and is used as a conductive lead of the inner electrode and the outer electrode.

Optionally, in the stretching direction, the length of the conductive coating as the inner electrode is greater than the length of the ceramic layer.

Optionally, the optical fiber is a bare fiber, or an optical fiber wrapped with a coating layer and a protective sleeve; wherein, the protective sheath is tubular structure.

Optionally, the ceramic layer is square tube or circular tube.

Optionally, applying a conductive coating as an external electrode on the ceramic layer at a designated area along the extending direction, including:

dividing the ceramic layer into a first actuating part, a separation part and a second actuating part in sequence along the stretching direction;

According to the required vibration direction, at least one pair of external electrodes are respectively coated with conductive coatings on the first actuating part and the second actuating part; wherein the first and second actuation portions correspond to different vibration directions.

Optionally, if the ceramic layer is square, at least one pair of external electrodes are respectively disposed on the first actuating portion and the second actuating portion by coating a conductive coating according to a required vibration direction, including:

coating conductive coatings on two first outer side surfaces which are parallel to each other and perpendicular to the first vibration direction and/or coating conductive coatings on two second outer side surfaces which are parallel to each other and perpendicular to the second vibration direction and are included in the second conductive part; wherein, first vibration direction with the second vibration direction crossing, and all perpendicular to the optic fibre.

Optionally, the thickness of the ceramic shell is 0.04 mm-1.5 mm.

The inner electrodes may be a first inner electrode disposed in the inner electrode hole of the first actuator 1 and corresponding to the first outer electrode 12, and a second inner electrode disposed in the inner electrode hole of the second actuator 3 and corresponding to the second outer electrode 32; the first internal electrode and the second internal electrode can be independent, insulated or electrically connected.

Each of the outer electrode and the inner electrode is connected with a conductive substance to connect devices outside the optical fiber scanning driver through the conductive substance. The conductive material may be a conductive wire, etc., and in order to avoid the influence of the conductive wire, etc., on the scanning track of the optical fiber scanning driver, it is preferable that the conductive material is a thin film conductive layer. In particular, the arrangement structure of the thin film conductive layer according to this embodiment includes the following structures:

the first external electrode 12 is connected with a first thin film conductive layer, and the first thin film conductive layer is adhered to the surface of the first actuating part 1 in an insulating manner. The second external electrode 32 is connected with a second thin film conductive layer, and the second thin film conductive layer is adhered to the outer surfaces of the first actuating part 1 and the isolation part 2 in an insulating manner; thus, each external electrode is connected to an external driving device or detecting device through the corresponding thin film conductive layer. In the process of vibration of the optical fiber scanning driver, the film is bent and deformed along with the optical fiber scanning driver, and compared with the connection of wires, the influence on the displacement of the optical fiber scanning driver caused by the dead weight of the wires can be well overcome.

The electrode layer fully distributed on the wall of the common inner electrode hole can be welded with a wire at the rear end of the scanning driver, and does not interfere the vibration of the scanning driver. For the embodiment provided with the first inner electrode and the second inner electrode, the first inner electrode and the second inner electrode can be connected to the corresponding thin film conductive layers, and the thin film conductive layers are adhered to the hole walls of the common inner electrode in an insulating manner and extend to the rear end of the scanning driver.

Further optionally, the inner electrode hole is a circular hole or a square hole. When the inner electrode hole is a square hole, as shown in fig. 13, 15 and 16, the hole wall of the square hole includes a first plane parallel to the first outer side 11 and a second plane parallel to the second outer side 31, the first plane is close to the first outer side 11 and parallel to the second outer side 31, the second plane is close to the second outer side 31 and parallel to the first outer side, the inner electrode and the first outer electrode 12 disposed on the first plane are made of piezoelectric materials with consistent thickness, and the inner electrode and the second outer electrode 32 disposed on the second plane are made of piezoelectric materials with consistent thickness, so that stability of scanning performance of the scanning driver is ensured to be improved.

Class 11 embodiment:

the present embodiment is based on any one of the 10 th embodiment, and further preferably designs the structure of the first actuating portion 1, specifically:

as shown in fig. 13-16 and 21-24, the piezoelectric material body of the first actuating portion 1 has two third outer sides 13 parallel to each other and perpendicular to the second axis, each third outer side 13 is provided with a third outer electrode 14, and an inner wall of the inner electrode hole of the first actuating portion 1 is provided with an inner electrode matched with the third outer electrode 14. Similarly, the inner electrode may be an electrode layer that fills the walls of the common inner electrode aperture, such that the third outer electrode 14 shares an inner electrode with the first outer electrode 12 and the second outer electrode 32. The inner electrode may be a third inner electrode disposed in the inner electrode hole of the first actuator 1 and corresponding to the third outer electrode 14; and, between the optional two third internal electrodes or between each third internal electrode and each first internal electrode or each second internal electrode, they may be independent, insulated from each other, or electrically connected together. Thus, the first actuating part 1 vibrates along the second axis at its front end portion driven by the alternating electric field formed between the third external electrode 14 and the internal electrode. Specifically, the portion of the piezoelectric material body between the third external electrode 14 and the internal electrode is polarized in a direction perpendicular to the second external side face 31.

This enables the first actuator 1 not only to drive the optical fiber 5 to vibrate in the first axial direction, but also to simultaneously achieve correction of the scanning trajectory in the second axial direction by means of the structure in which the third external electrode 14 is provided, so as to overcome distortion of the scanning trajectory due to errors in mounting, processing, and the like.

At this time, the inner electrode hole of the first actuating part 1 may be a circular hole or a square hole. When the inner electrode hole of the first actuating portion 1 is a square hole, as shown in fig. 15 and 19, the hole wall is provided with two first planes close to and parallel to the first outer side surface 11 and two second planes close to and parallel to the third outer side surface 13, so that the inner electrode or the space between the first inner electrode and the first outer electrode 12 arranged on the first plane is made of piezoelectric material with consistent thickness, and the inner electrode or the space between the third inner electrode and the third outer electrode 14 arranged on the second plane is made of piezoelectric material with consistent thickness, thereby ensuring the stability of the scanning performance of the scanning driver.

Further preferably, the piezoelectric material body of the first actuating portion 1 is a square rod, as shown in fig. 18-20 and 21-24, and the side surface of the piezoelectric material body is surrounded by two first outer side surfaces 11 parallel to each other and two third outer side surfaces 13 parallel to each other.

Optionally, the third outer electrode 14 and the third inner electrode are connected with a conductive substance, preferably a thin film conductive layer 7, to connect devices outside the optical fiber scanning driver through the conductive substance. When the third inner electrode is not electrically connected with the first inner electrode, the arrangement mode of the thin film conductive layer connected with the third inner electrode is the same as that of the first inner thin film conductive layer. When the third internal electrode is electrically connected with the first internal electrode, the third internal electrode and the first internal electrode share the same first internal thin film conductive layer. The thin film conductive layer to which the third external electrode 14 is connected is insulation-coated on the outer surface of the first actuating part 1.

Class 12 embodiment:

the present embodiment is based on any one of the 10 th or 11 th kind of embodiments, and further preferably designs the structure of the second actuating portion 3, specifically:

as shown in fig. 13-16 and 21-24, the piezoelectric material body of the second actuating portion 3 has two fourth outer sides 33 parallel to each other and perpendicular to the first axis, each fourth outer side 33 is provided with a fourth outer electrode 34, and an inner wall of the inner electrode hole of the second actuating portion 3 is provided with an inner electrode matched with the fourth outer electrode 34. Similarly, the inner electrode may be an electrode layer that fills the walls of the common inner electrode aperture, such that the fourth outer electrode 34 shares an inner electrode with the first outer electrode 12 and the second outer electrode 32. The inner electrode may be a fourth inner electrode disposed in the inner electrode hole of the second actuator 3 and corresponding to the fourth outer electrode 34; and, between the optional two fourth internal electrodes or between each fourth internal electrode and each first internal electrode or each second internal electrode or each third internal electrode, they may be independent, insulated from each other, or electrically connected together.

The second actuating portion 3 vibrates along the first axis at its front end portion driven by an alternating electric field formed between the fourth outer electrode 34 and the inner electrode. Specifically, the portion of the piezoelectric material body between the fourth outer electrode 34 and the inner electrode is polarized in the direction perpendicular to the fourth outer side face 33.

This enables the second actuator 3 not only to drive the optical fiber 5 to vibrate in the first axial direction, but also to simultaneously correct the scanning trajectory in the second axial direction by means of the structure in which the fourth external electrode 34 is provided, so as to overcome distortion of the scanning trajectory due to errors in mounting, machining, and the like.

At this time, the inner electrode hole of the second actuating portion 3 may be a circular hole or a square hole, and when the inner electrode hole of the second actuating portion 3 is a square hole, as shown in fig. 16 and 20, the hole wall has two first planes close to and parallel to the second outer side 31 and two second planes close to and parallel to the fourth outer side 33, so that the inner electrode or the piezoelectric material with the same thickness between the second inner electrode and the second outer electrode 32 disposed on the first plane and the piezoelectric material with the same thickness between the inner electrode or the fourth inner electrode and the fourth outer electrode 34 disposed on the second plane are provided, thereby ensuring the stability of the scanning performance of the scanning driver.

Further preferably, as shown in fig. 18-20 and 21-24, the piezoelectric material body of the second actuating portion 3 is in a square rod shape, and the side surface of the piezoelectric material body is surrounded by two second outer side surfaces 31 parallel to each other and two fourth outer side surfaces 33 parallel to each other.

Further preferably, the isolation part 2 is also square bar, so that the scan driver body formed by the piezoelectric material body of the first actuating part 1, the isolation part 2 and the piezoelectric material body of the second actuating part 3 is square bar extending along the front-back direction and having the same square cross section profile, thereby facilitating the processing of integrated molding.

Alternatively, the fourth outer electrode 34 and the fourth inner electrode may also be connected with a conductive substance, preferably a thin film conductive layer 7, to connect devices outside the optical fiber scanning driver through the conductive substance. When the fourth inner electrode is not electrically connected with the second inner electrode, the arrangement mode of the thin film conductive layer connected with the fourth inner electrode is the same as that of the second inner thin film conductive layer. When the third internal electrode is electrically connected with the first internal electrode, the third internal electrode and the first internal electrode share the same second internal thin film conductive layer. The thin film conductive layer connected to the fourth external electrode 34 is attached to the outer surfaces of the first actuator 1 and the separator 2 in an insulating manner.

Class 13 embodiment

The present embodiment is based on any one of the 10 th, 11 th and 12 th embodiments, and further preferably designs the structure of the first actuating portion 1, specifically:

as shown in fig. 13, 15 and 16, the first outer side 11 is further provided with a fifth outer electrode 15 insulated from the first outer electrode 12, and the fifth outer electrode 15 may be provided on only any one of the first outer sides 11, or the fifth outer electrode 15 may be provided on both the first outer sides 11, and a fifth inner electrode matched with the fifth outer electrode 15 may be provided inside the inner electrode hole. Similarly, the fifth inner electrode may be an electrode layer disposed on the inner wall of the inner electrode hole, so that the fifth outer electrode 15 shares one inner electrode with the first outer electrode 12, the second outer electrode 32, the third outer electrode 14 and the fourth outer electrode 34. The inner electrode may be a fifth inner electrode disposed in the first actuator 1 and corresponding to the fifth outer electrode 15. And the fifth internal electrode and the first internal electrode, the second internal electrode, the third internal electrode or the fourth internal electrode can be independent, insulated or electrically connected.

The fifth external electrode 15 and the fifth internal electrode are connected with a conductive substance to connect devices outside the optical fiber scanning driver through the conductive substance. Preferably, the conductive material is a thin film conductive layer. When the fifth internal electrode is not electrically connected with the first internal electrode or the third internal electrode, the arrangement mode of the thin film conductive layer connected with the fifth internal electrode is the same as that of the first internal thin film conductive layer. When the fifth internal electrode is electrically connected to the first internal electrode or the third internal electrode, the fifth internal electrode and the first internal electrode or the third external electrode 14 share the same thin film conductive layer. The thin film conductive layer to which the fifth external electrode 15 is connected is insulation-coated on the outer surface of the first actuating part 1.

Class 14 embodiment

The present embodiment is based on any one of the 10 th, 11 th, 12 th and 13 th embodiments, and further preferably designs the structure of the second actuating portion 3, specifically:

as shown in fig. 13, 15 and 16, the second outer side surface 31 is further provided with a sixth outer electrode 35 insulated from the second outer electrode 32, and the sixth outer electrode 35 may be provided on only any one of the second outer side surfaces 31, or the sixth outer electrode 35 may be provided on both the second outer side surfaces 31, and a sixth inner electrode that is matched with the sixth outer electrode 35 may be provided inside the inner electrode hole. Similarly, the sixth inner electrode may be an electrode layer disposed on the inner wall of the inner electrode hole, so that the sixth outer electrode 35 shares one inner electrode with the first outer electrode 12, the second outer electrode 32, the third outer electrode 14 and the fourth outer electrode 34. The sixth inner electrode may be a sixth inner electrode disposed inside the second actuator 3 and provided in correspondence with the sixth outer electrode 35. And, the sixth internal electrode and the first internal electrode, the second internal electrode, the third internal electrode, the fourth internal electrode or the fifth internal electrode can be independent, insulated or electrically connected.

The sixth outer electrode 35 and the sixth inner electrode are also connected with a conductive substance, preferably a thin film conductive layer 7, for connecting devices external to the optical fiber scanning driver via the conductive substance. When the sixth internal electrode is not electrically connected with the second internal electrode or the fourth internal electrode, the arrangement mode of the thin film conductive layer connected with the fourth internal electrode is the same as that of the second internal thin film conductive layer. When the sixth internal electrode is electrically connected with the second internal electrode or the fourth internal electrode, the sixth internal electrode and the second internal electrode or the fourth internal electrode share the same thin film conductive layer. The thin film conductive layer connected to the sixth external electrode 35 is insulated and attached to the outer surfaces of the first actuating part 1 and the isolating part 2.

Class 15 embodiment

21-24, the present embodiment is further preferably designed based on any one of class 10, class 11 and class 12 embodiments, specifically:

The first outer side 11 is further provided with a first piezoelectric material sheet 16 closely attached to the first outer side 11, either the first piezoelectric material sheet 16 is arranged on any one of the first outer side 11, the first piezoelectric material sheets 16 are arranged on both the first outer side 11, the first piezoelectric material sheets 16 are polarized along the first axis direction, and two outer surfaces of the piezoelectric material sheets perpendicular to the first axis are respectively provided with an electrode.

The electrodes of the first sheet of piezoelectric material 16 are connected with a conductive substance to connect devices external to the optical fiber scanning driver through the conductive substance. Preferably, the conductive material is a thin film conductive layer, and the thin film conductive layer is adhered to the outer surface of the first actuating part 1 in an insulating manner.

Class 16 embodiment

21-24, the present embodiment is further preferably designed based on any one of class 10, class 11, class 12 and class 15 embodiments, specifically:

The second outer side surface 31 is provided with a second piezoelectric material sheet 36 closely attached to the second outer side surface 31, and the second piezoelectric material sheet 36 may be provided on only any one of the second outer side surfaces 31, or the second piezoelectric material sheets 36 may be provided on both the second outer side surfaces 31, the second piezoelectric material sheet 36 is polarized along the second axis direction, and two outer surfaces of the piezoelectric material sheet perpendicular to the second axis are respectively provided with an electrode.

Class 17 embodiment

As shown in fig. 13, 17 and 21, the present embodiment is further preferably designed based on any one of the 10 th-16 th embodiments, specifically:

The scanning driver further comprises a fixing part 4 which is positioned at the rear side of the first actuating part 1 and is integrally formed with the first actuating part 1, the fixing part 4 is a second through hole which is communicated with the inner electrode hole, the thin film conducting layer or the electrode layer on the inner surface of the first actuating part 1 extends to the rear end of the through hole, and each thin film conducting layer attached to the outer surface of the first actuating part 1 extends to the rear end of the fixing part 4 backwards and is attached to the outer surface of the fixing part 4.

Preferably, the second through hole of the fixing part 4 is a part of the common electrode layout hole, and the second through hole, the first through hole, the inner electrode hole of the first actuating part 1 and the inner electrode hole of the second actuating part 3 form a through hole penetrating through the scanning driver along the front-back direction, so that the processing is convenient, and the processing difficulty of the hole is reduced.

Class 18 embodiment

As shown in fig. 25-32, a scan driver includes a first actuating portion 1, a spacer portion 2, and a second actuating portion 3 integrally formed and sequentially connected in a back-to-front direction, wherein the first actuating portion 1 and the second actuating portion 3 each include a piezoelectric material body having a piezoelectric effect, inner electrode holes are formed in the first actuating portion 1 and the second actuating portion 3, the piezoelectric ceramic body of the first actuating portion 1 is of a circular tube type, two first external electrodes 12 for driving the front end of the first actuating portion 1 to vibrate along a first axis are axially symmetrically arranged on the outer surface of the piezoelectric material body, the piezoelectric ceramic body of the second actuating portion 3 is of a circular tube type, two second external electrodes 32 for driving the front end of the second actuating portion 3 to vibrate along a second axis are axially symmetrically arranged on the outer surface of the piezoelectric material body, and the first axis and the second axis are perpendicular to the front-to-back direction and are not parallel to each other.

The optical fiber scanning driver adopting the scanning driver comprises an optical fiber 5 and the scanning driver, wherein the optical fiber 5 can be fixedly arranged on the outer surface of the scanning driver, and the front end of the optical fiber 5 exceeds the scanning driver to form an optical fiber 5 cantilever.

The front end of the first actuating part 1 vibrates along a first axis under the drive of an alternating electric field formed between the first outer electrode 12 and the inner electrode, and the front end of the second actuating part 3 vibrates along a second axis under the drive of an alternating electric field formed between the second outer electrode 32 and the inner electrode. Specifically, the portion of the piezoelectric material body between the first outer electrode 12 and the inner electrode is polarized in the radial direction, and the portion of the piezoelectric material body between the second outer electrode 32 and the inner electrode is polarized in the radial direction.

Each of the outer electrode and the inner electrode is connected with a conductive substance to connect devices outside the optical fiber scanning driver through the conductive substance. The conductive material may be a wire, etc., and in order to avoid the influence of the wire, etc., on the scanning track of the optical fiber scanning driver, it is preferable that the conductive material is a thin film conductive layer 7. In particular, the arrangement structure of the thin film conductive layer according to this embodiment includes the following structures:

The first inner electrode can be connected with a first inner film conductive layer attached to the inner wall of an inner electrode hole of the first actuating part 1, or the first inner electrode extends backwards to the tail end of the first actuating part 1, the second inner electrode is connected with a second inner film conductive layer, and the second inner film conductive layer is attached to the front end face of the second actuating part 3, the outer surface of the isolating part 2 and the outer surface of the first actuating part 1 in an insulating manner. Thus, each electrode connected with the thin film conductive layer is connected with an external driving device or a detection device through the thin film conductive layer corresponding to the electrode. In the process of vibration of the optical fiber scanning driver, the film is bent and deformed along with the optical fiber scanning driver, and compared with the connection of wires, the influence on the displacement of the optical fiber scanning driver caused by the dead weight of the wires can be well overcome.

Class 19 embodiment

The embodiment of the present invention is further preferably designed based on any one of the embodiments of the 18 th class, specifically:

as shown in fig. 25-32, the isolating part 2 is provided with a first through hole communicated with the inner electrode holes of the first actuating part 1 and the second actuating part 3, and the first through hole and the two inner electrode holes are coaxially arranged, so that the inner electrode holes of the first actuating part 1, the first through hole and the inner electrode holes of the first actuating part 1 penetrate through the common electrode layout hole of the scanning driver.

Further preferably, the second inner thin film conductive layer may be attached to the inner surface of the common electrode arrangement hole and extend to the rear end of the scan driver, so that bending and exposure of the second inner thin film conductive layer are avoided.

The inner electrode hole of the first actuating portion 1 and the inner electrode hole of the second actuating portion 3 are communicated, so that in this case, as a preferred embodiment, the inner surface of the common electrode arrangement hole is fully covered with an inner electrode, that is, the inner electrode is fully covered with the wall of the common electrode arrangement hole, and in this case, the first outer electrode 12 and the second outer electrode 32 share the inner electrode.

More preferably, the common electrode layout hole is a circular hole with a circular cross section or a square hole with a square cross section, and when the common electrode layout hole is a square hole, the hole wall of the common electrode layout hole comprises two planes parallel to the first outer side surface 11 and two planes parallel to the second outer side surface 31. And further preferably, the common electrode layout hole is a through hole penetrating through the scanning driver along the front-back direction, so that the common electrode layout hole can be used for layout of the inner electrode and the processing difficulty of the scanning driver is reduced.

Preferably, the first axis is perpendicular to the second axis, as shown in fig. 27 and 28.

Class 20 embodiment

The embodiment of the present invention is further preferably designed based on any one of the 18 th and 19 th embodiments, specifically:

as shown in fig. 25-32, the outer surface of the piezoelectric ceramic body of the first actuating portion 1 is axisymmetrically provided with two third external electrodes 14 driving the front end of the first actuating portion 1 to vibrate along a third axis, and the third axis is perpendicular to the front-back direction and is not parallel to the first axis. A third inner electrode is provided inside the inner electrode hole of the first actuating part 1, which is matched with the third outer electrode 14. Similarly, the third inner electrode may be an electrode layer disposed on the inner wall of the inner electrode hole of the first actuating portion 1, so that the third outer electrode 14 and the first outer electrode 12 share one inner electrode. The third inner electrodes may be two third inner electrodes disposed in the inner electrode hole of the first actuating portion 1 and corresponding to the third outer electrode 14, for example, the third inner electrodes may be disposed on the wall of the inner electrode hole; and, optionally, the two third internal electrodes or the two third internal electrodes and each first internal electrode may be independent, insulated or electrically connected together. Thus, the first actuating part 1 vibrates along the third axis at its front end portion driven by the alternating electric field formed between the third outer electrode 14 and the third inner electrode. Specifically, the portion of the piezoelectric material body between the third external electrode 14 and the internal electrode is polarized in a direction perpendicular to the second external side face 31.

Preferably, the third shaft is coaxial with the second shaft, as shown in fig. 27 and 28.

Class 21 embodiment

The embodiment of the present invention is further preferably designed based on any one of the 18 th-20 th embodiments, specifically:

As shown in fig. 25-32, the outer surface of the piezoelectric ceramic body of the second actuating portion 3 is axisymmetrically provided with two fourth external electrodes 34 driving the front end of the second actuating portion 3 to vibrate along a fourth axis, the fourth axis is perpendicular to the front-back direction and is not parallel to the second axis, and the inner electrode hole of the second actuating portion 3 is internally provided with a fourth inner electrode matched with the fourth external electrodes 34. Similarly, the fourth inner electrode may be an electrode layer disposed on the inner wall of the inner electrode hole of the second actuator 3, so that the fourth outer electrode 34 and the second outer electrode 32 share one inner electrode. The fourth inner electrodes may be two fourth inner electrodes disposed in the inner electrode holes of the second actuator 3 and corresponding to the fourth outer electrodes 34. Optionally, the fourth inner electrode may be disposed on a wall of the inner electrode hole. And, optionally, the two fourth internal electrodes or each fourth internal electrode and each second internal electrode may be independent, insulated from each other, or electrically connected together. Thus, the second actuating portion 3 vibrates along the fourth axis at its front end portion driven by the alternating electric field formed between the fourth outer electrode 34 and the fourth inner electrode. Specifically, the portion of the piezoelectric material body located between the fourth outer electrode 34 and the fourth inner electrode is polarized in the direction perpendicular to the second outer side face 31.

Preferably, the fourth axis is coaxial with the first axis, as shown in fig. 27 and 28.

Class 22 embodiment

The embodiment of the present invention is further preferably designed based on any one of the 18 th-21 st embodiments, specifically:

As shown in fig. 29 to 34, the piezoelectric ceramic body of the first actuator 1 is provided with a fifth external electrode 15 insulated from the first external electrode 12 at a position close to the first external electrode 12, and as shown in fig. 33, the fifth external electrode 15 may be provided only close to any one of the first external electrodes 12, or the fifth external electrode 15 may be provided near both of the first external surfaces 11, and a fifth internal electrode that is matched with the fifth external electrode 15 may be provided inside the internal electrode hole of the first actuator 1. Similarly, the fifth inner electrode may be an electrode layer that is disposed on the inner wall of the inner electrode hole of the first actuating portion 1, so that the fifth outer electrode 15 shares one inner electrode with the first and third outer electrodes 12 and 14. The inner electrodes may be two fifth inner electrodes disposed in the inner electrode holes of the first actuating part 1 and corresponding to the fifth outer electrode 15. Optionally, the fifth inner electrode may be disposed on a wall of the inner electrode hole. And the fifth internal electrode and the two first internal electrodes or the third internal electrode can be independent, insulated or electrically connected.

The fifth external electrode 15 and the fifth internal electrode are connected with a conductive substance to connect devices outside the optical fiber scanning driver through the conductive substance. Preferably, the conductive material is a thin film conductive layer. When the fifth internal electrode is not electrically connected with the first internal electrode or the third internal electrode, the arrangement mode of the thin film conductive layer connected with the fifth internal electrode is the same as that of the first internal thin film conductive layer. When the fifth internal electrode is electrically connected to each of the first internal electrodes or each of the third internal electrodes, the fifth internal electrode shares the same thin film conductive layer as the first internal electrode or the third external electrode 14. The thin film conductive layer to which the fifth external electrode 15 is connected is insulation-coated on the outer surface of the first actuating part 1.

Class 23 embodiment

The embodiment of the present invention is further preferably designed based on any one of the 18 th-22 th embodiments, specifically:

as shown in fig. 29-34, the outer surface of the piezoelectric ceramic body of the second actuating portion 3 is provided with a sixth external electrode 35 insulated from the second external electrode 32 at a position close to the second external electrode 32, and as shown in fig. 34, the sixth external electrode 35 may be provided only in the vicinity of any one of the second external electrodes 32, or the sixth external electrode 35 may be provided in the vicinity of both of the second external electrodes 32, and a sixth internal electrode that is matched with the sixth external electrode 35 may be provided inside the internal electrode hole of the second actuating portion 3. Similarly, the sixth inner electrode may be an electrode layer disposed on the inner wall of the inner electrode hole of the second actuating portion 3, so that the sixth outer electrode 35 shares one inner electrode with the second outer electrode 32 and the fourth outer electrode 34. The sixth inner electrode may be a sixth inner electrode disposed in the inner electrode hole of the second actuator 3 and corresponding to the sixth outer electrode 35. Optionally, the fifth inner electrode may be disposed on a wall of the inner electrode hole. And, the sixth internal electrode and the two second internal electrodes or the fourth internal electrode can be independent, insulated or electrically connected.

The sixth outer electrode 35 and the sixth inner electrode are also connected with a conductive substance, preferably a thin film conductive layer, to connect devices outside the optical fiber scanning driver through the conductive substance. When the sixth internal electrode is not electrically connected with the second internal electrode or the fourth internal electrode, the arrangement mode of the thin film conductive layer connected with the fourth internal electrode is the same as that of the second internal thin film conductive layer. When the sixth internal electrode is electrically connected with the second internal electrode or the fourth internal electrode, the sixth internal electrode and the second internal electrode or the fourth internal electrode share the same thin film conductive layer. The thin film conductive layer connected to the sixth external electrode 35 is insulated and attached to the outer surfaces of the first actuating part 1 and the isolating part 2.

Class 24 embodiment

as shown in fig. 29-34, the first piezoelectric material piece 16 is disposed on the outer surface of the piezoelectric ceramic body of the first actuating portion 1 near the first external electrode 12, or the first piezoelectric material piece 16 may be disposed only near any one of the first external electrodes 12, or the first piezoelectric material pieces 16 may be disposed near both of the first external electrodes 12, as shown in fig. 33, the first piezoelectric material piece 16 is an arc-shaped piece tightly attached to the piezoelectric ceramic body, the first piezoelectric material piece 16 is polarized in the radial direction, the inner arc-shaped surface and the outer arc-shaped surface of the first piezoelectric material arc-shaped piece are respectively provided with an electrode, and the electrode on the surface of the first piezoelectric material piece 16 and the first external electrode 12 on the first external side 11 are mutually insulated.

Class 25 embodiment

The embodiment of the present invention is further preferably designed based on any kind of embodiments from the 18 th kind of embodiments to the 21 st kind of embodiments and the 24 th kind of embodiments, specifically:

as shown in fig. 29-34, the second piezoelectric material piece 36 is disposed on the outer surface of the piezoelectric ceramic body of the second actuating portion 3 near the second external electrode 32, as shown in fig. 34, the second piezoelectric material piece 36 may be disposed only near any one of the second external electrodes 32, or the second piezoelectric material pieces 36 may be disposed near both the second external electrodes 32, the second piezoelectric material piece 36 is an arc-shaped piece tightly attached to the piezoelectric ceramic body, the second piezoelectric material piece 36 is polarized in the radial direction, the inner arc-shaped surface and the outer arc-shaped surface of the second piezoelectric material arc-shaped piece are respectively provided with an electrode, and the electrode on the surface of the second piezoelectric material piece 36 and the second external electrode 32 on the second external side 31 are mutually insulated.

The electrodes of the second sheet of piezoelectric material 36 are connected with a conductive substance to connect devices external to the optical fiber scanning driver through the conductive substance. Preferably, the conductive material is a thin film conductive layer, and the thin film conductive layers are adhered to the outer surface of the isolation part 2 and the outer surface of the first actuating part 1 in an insulating manner.

Class 26 embodiment

The embodiment of the present invention is further preferably designed based on any one of the 18 th-25 th embodiments, specifically:

as shown in fig. 25, 26, 29 and 30, the scan driver further includes a fixing portion 4 located at the rear side of the first actuating portion 1 and integrally formed with the first actuating portion 1, where the fixing portion 4 may be a solid cylinder or a second through hole having an inner electrode hole communicating with the first actuating portion 1. When the fixing portion 4 is a solid cylinder, the side wall of the inner electrode hole of the first actuating portion 1 is provided with a lead-out hole for a conductive substance to be led out of the inner electrode hole of the first actuating portion 1, the conductive substance refers to a wire or a thin film conductive layer connected with the inner electrode, and the thin film conductive layer led out of the lead-out hole can be adhered to the outer surface of the fixing portion 4 in an insulating manner so as to extend to the rear end of the fixing portion 4. When the fixing portion 4 has the second through hole, the thin film conductive layer or the electrode layer on the inner surface of the first actuating portion 1 extends to the rear end of the second through hole, and each thin film conductive layer attached to the outer surface of the first actuating portion 1 extends to the rear end of the fixing portion 4 backwards and is attached to the outer surface of the fixing portion 4.

It should be understood that the isolation portion in the above embodiment is named for convenience of understanding, and in practical application, it may be a regular solid component, an irregular solid component, or a virtual plane or curved surface or an irregular surface, which is mainly used to connect two actuation portions and achieve isolation between different electrodes. When the spacer is an irregular solid member or one surface, the rear end of the first actuator may be fixedly connected to the front end of the second actuator, that is, the scan driver obtained by connecting the rear end of the first actuator to the front end of the second actuator after the spacer is removed in the above embodiment may operate in the same manner. Specific reference may be made to the following examples:

class 27 embodiment:

in this embodiment, the rear end of the first actuator is connected to the front end of the second actuator by removing the spacer in the embodiment of the 1 st embodiment. Similarly, the scan driver with the isolation portion removed can be obtained by referring to the present embodiment in all of the class 2 embodiment and the class 26 embodiment.

As shown in fig. 35 to 38, a scan driver includes a first actuating part 1 and a second actuating part 3 integrally formed and sequentially connected in a rear-to-front direction, each of the first actuating part 1 and the second actuating part 3 includes a piezoelectric material body having a piezoelectric effect, inner electrode holes are provided in the interiors of the first actuating part 1 and the second actuating part 3, outer electrodes 12 and 32 are provided in the exteriors of the first actuating part 1 and the second actuating part 3, and inner electrodes 601 and 602 mated with the outer electrodes of the interiors of the inner electrode holes of the first actuating part 1 and the second actuating part 3 are provided in the interiors of the inner electrode holes of the first actuating part 1 and the second actuating part 3 so as to realize that the front end portion of the first actuating part 1 vibrates along a first axis and the front end portion of the second actuating part 3 vibrates along a second axis after the inner electrodes and the outer electrodes are connected to an external driving device.

The integral molding of the first actuating portion 1 and the second actuating portion 3 refers to integrally manufacturing and molding a monolithic member including the first actuating portion 1 and the second actuating portion 3 by an integral molding process. For example, the first actuating portion 1 and the second actuating portion 3 each include a main body made of a piezoceramic powder material, and after the piezoceramic powder is put into a die and pressed, a monolithic member including the first actuating portion 1 and the second actuating portion 3 is obtained by baking, and then the first actuating portion 1 and the second actuating portion 3 are polarized as needed, and driving electrodes are added to the first actuating portion 1 and the second actuating portion 3.

The first and second external electrodes 12 and 32 are insulated from each other, and the first and second internal electrodes 601 and 602 may be insulated from each other or communicate with each other as needed.

The inner electrode hole in the first actuator 1 and the inner electrode hole in the second actuator 3 are connected to form a common inner electrode hole, at this time, the optical fiber 5 may be fixedly disposed in the common inner electrode hole, and the front end of the optical fiber 5 passes through the inner electrode hole to form an optical fiber 5 cantilever, specifically, the optical fiber 5 passes through the common inner electrode hole in the back-to-front direction, the front end of the optical fiber 5 passes through the common inner electrode hole to form a cantilever, and the optical fiber 5 is fixedly connected with the scan driver.

The thin film conductive layer 7 and the following other embodiments refer to the thin film conductive layer in order to extend the connection point of the electrode connected to the thin film conductive layer 7 to the rear end of the scan driver, and the thin film conductive layer 7 extends from the rear end of the electrode connected to the thin film conductive layer to the rear end of the scan driver, so that the rear end of the scan driver needs to be fixed, and the connection at the rear end of the scan driver does not affect the overall vibration. Therefore, each thin film conductive layer 7 needs to be insulated from the electrode not connected with the thin film conductive layer, on one hand, the thin film conductive layer 7 can be directly attached to the surface of the piezoelectric material body, and a physical gap exists between the thin film conductive layer 7 and other electrodes to realize insulation, or the thin film conductive layer 7 can be attached to the surface of the electrode not connected with the thin film conductive layer 7, and at the moment, an insulating layer needs to be arranged between the electrode and the thin film conductive layer 7.

as shown in fig. 35 and 5, two first external electrodes 12 are respectively connected with a first thin film conductive layer, the first thin film conductive layer is adhered to the outer surface of the first actuating portion 1 in an insulating manner, and the first thin film conductive layer extends backward to the tail end of the scan driver to weld electrical connectors such as wires and circuit pins. The two second external electrodes 32 are respectively connected with a second thin film conductive layer, the second thin film conductive layer is adhered to the outer surface of the first actuating part 1 in an insulating manner, and the second thin film conductive layer extends backwards to the tail end of the scanning driver to weld electrical connectors such as wires and circuit pins. The insulating coating of the film conductive layer on certain components of the scan driver as described above and below means: the thin film conductive layers are adhered to the scanning driver, the thin film conductive layers are mutually insulated, meanwhile, the thin film conductive layers are mutually insulated from the incoherent inner electrodes or the incoherent outer electrodes of the thin film conductive layers, and the incoherent inner electrodes or the incoherent outer electrodes of the thin film conductive layers refer to the inner electrodes or the outer electrodes which are not connected with the thin film conductive layers.

The first inner electrode may be connected to a first inner film conductive layer attached to the inner wall of the inner electrode hole of the first actuating portion 1, or the first inner electrode may extend to the end of the first actuating portion 1, the second inner electrode is connected to a second inner film conductive layer, and the second inner film conductive layer is attached to the front end surface of the second actuating portion 3, the outer surface of the second actuating portion 3 and the outer surface of the first actuating portion 1 in an insulating manner, as shown in fig. 35, 17 and 25, so that the electrodes connected with the film conductive layers 7 are connected to external driving devices or detection devices through the corresponding film conductive layers. In the process of vibration of the optical fiber scanning driver, the film is bent and deformed along with the optical fiber scanning driver, and compared with the connection of wires, the influence on the displacement of the optical fiber scanning driver caused by the dead weight of the wires can be well overcome.

It should be noted that the above-mentioned embodiments illustrate rather than limit the invention, and that those skilled in the art will be able to design alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses shall not be construed as limiting the claim. The word "comprising" or "comprises" does not exclude the presence of elements or steps not listed in a claim. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements. The use of the words first, second, third, etc. do not denote any order, and the words may be interpreted as names.

In the integral forming manufacturing process of the first actuating part and the second actuating part, the pressure of tens of megapascals enables the scanner to be compact enough to achieve high-efficiency performance, meanwhile, the rigidity is extremely high, which is incomparable by using an adhesive mode, so that the integral forming avoids loosening of the interconnection part caused by high-frequency vibration.

All of the features disclosed in this specification, except mutually exclusive features, may be combined in any manner.

Any feature disclosed in this specification (including any accompanying claims, abstract and drawings), may be replaced by alternative features serving the same, equivalent or similar purpose, unless expressly stated otherwise. That is, each feature is one example only of a generic series of equivalent or similar features, unless expressly stated otherwise.

The invention is not limited to the specific embodiments described above. The invention extends to any novel one, or any novel combination, of the features disclosed in this specification, as well as to any novel one, or any novel combination, of the steps of the method or process disclosed.

Claims

1. A scan driver for use in image scanning display, characterized by: comprises a first actuating part and a second actuating part which are integrally formed and are sequentially connected along the direction from back to front; the first actuating part and the second actuating part comprise piezoelectric material bodies with piezoelectric effect, inner electrode holes are formed in the first actuating part and the second actuating part, outer electrodes are formed outside the first actuating part and the second actuating part, and inner electrodes matched with the outer electrodes are formed in the inner electrode holes of the first actuating part and the second actuating part;

the piezoelectric ceramic body of the first actuating part is provided with two first outer side surfaces which are parallel to each other and perpendicular to the first shaft, each first outer side surface is provided with a first external electrode, the piezoelectric ceramic body of the second actuating part is provided with two second outer side surfaces which are parallel to each other and perpendicular to the second shaft, each second outer side surface is provided with a second external electrode, and the first shaft and the second shaft are perpendicular to the front-back direction and are not parallel to each other;

The inner electrode hole of the first actuating part and the inner electrode hole of the second actuating part form a common electrode layout hole, the common electrode layout hole is a through hole penetrating through the scanning driver along the front-back direction, the wall of the common electrode layout hole is fully provided with a common electrode layer, and the common electrode layer is shared by all the outer electrodes;

the natural frequency of the piezoelectric material body of the second actuating part is larger than that of the piezoelectric material of the first actuating part, so that grid scanning is realized.

2. The scan driver for image scanning display according to claim 1, wherein the piezoelectric ceramic body of the first actuating portion has two third outer sides parallel to each other and perpendicular to a third axis, and a third external electrode is provided on each of the third outer sides, the third axis being perpendicular to the front-rear direction and not parallel to the first axis.

3. A scan driver for image scanning display according to claim 2, wherein the piezoelectric ceramic body of the second actuating portion has two fourth outer sides parallel to each other and perpendicular to a fourth axis, and each of the fourth outer sides is provided with a fourth outer electrode, and the fourth axis is perpendicular to the front-rear direction and is not parallel to the second axis.

4. A scan driver for an image scanning display according to claim 2 or 3, wherein the first outer side face is further provided with a fifth outer electrode provided to be insulated from the first outer electrode.

5. A scan driver for an image scanning display according to claim 2 or 3, wherein the second outer side face is further provided with a sixth outer electrode provided to be insulated from the second outer electrode.

6. The scan driver for image scanning display according to claim 4, wherein the second external side is further provided with a sixth external electrode provided to be insulated from the second external electrode.

7. A scan driver for image scanning display according to claim 2 or 3, wherein the first outer side surface is further provided with a first piezoelectric material sheet closely attached to the first outer side surface, the first piezoelectric material sheet is polarized along the first axis direction, two outer surfaces of the piezoelectric material sheet perpendicular to the first axis are respectively provided with an electrode, and the electrode on the surface of the first piezoelectric material sheet and the first outer electrode on the first outer side surface are mutually insulated.

8. A scan driver for image scanning display according to claim 2 or 3, wherein a second piezoelectric material sheet is provided on the second outer side surface so as to be closely adhered to the second outer side surface, the second piezoelectric material sheet is polarized along the second axis direction, and electrodes are respectively provided on two outer surfaces of the piezoelectric material sheet perpendicular to the second axis, and the electrodes on the surface of the second piezoelectric material sheet are mutually insulated from the second outer electrodes on the second outer side surface.

9. The scan driver for image scanning display according to claim 7, wherein a second piezoelectric material sheet closely attached to the second outer side surface is provided on the second outer side surface, the second piezoelectric material sheet is polarized in the second axis direction, an electrode is provided on each of two outer surfaces of the piezoelectric material sheet perpendicular to the second axis, and the electrode on the surface of the second piezoelectric material sheet is insulated from the second outer electrode on the second outer side surface.

10. A scan driver for image scanning display according to any one of claims 1 to 3, 6 and 9, wherein the inner electrode hole of the first actuating portion is provided therein with second planes corresponding to the first planes in which the respective outer electrodes are located, each second plane being adjacent to and parallel to the corresponding first plane, and the inner electrode corresponding to the outer electrode on each first plane is provided on the second plane corresponding to the first plane.

11. The scan driver for image scanning display according to claim 4, wherein the inner electrode hole of the first actuating portion is provided therein with second planes corresponding to the first planes in which the respective outer electrodes are located, each of the second planes is adjacent to and parallel to the corresponding first plane, and the inner electrode corresponding to the outer electrode on each of the first planes is disposed on the second plane corresponding to the first plane.

12. The scan driver for image scanning display according to claim 5, wherein the inner electrode hole of the first actuating portion is provided therein with second planes corresponding to the first planes in which the respective outer electrodes are located, each of the second planes is adjacent to and parallel to the corresponding first plane, and the inner electrode corresponding to the outer electrode on each of the first planes is disposed on the second plane corresponding to the first plane.

13. The scan driver for image scanning display according to claim 7, wherein the inner electrode hole of the first actuating portion is provided therein with second planes corresponding to the first planes in which the respective outer electrodes are located, each of the second planes is adjacent to and parallel to the corresponding first plane, and the inner electrode corresponding to the outer electrode on each of the first planes is disposed on the second plane corresponding to the first plane.

14. The scan driver for image scanning display according to claim 8, wherein the inner electrode hole of the first actuating portion is provided therein with second planes corresponding to the first planes in which the respective outer electrodes are located, each of the second planes is adjacent to and parallel to the corresponding first plane, and the inner electrode corresponding to the outer electrode on each of the first planes is disposed on the second plane corresponding to the first plane.

15. The scan driver for image scanning and displaying according to claim 1, wherein the piezoelectric ceramic body of the first actuating portion is of a circular tube type, the outer surface of the piezoelectric material body is axially symmetrically provided with two first external electrodes driving the front end of the first actuating portion to vibrate along a first axis, the piezoelectric ceramic body of the second actuating portion is of a circular tube type, the outer surface of the piezoelectric material body is axially symmetrically provided with two second external electrodes driving the front end of the second actuating portion to vibrate along a second axis, and the first axis and the second axis are both perpendicular to the front-rear direction and are not parallel to each other.

16. The scan driver for image scanning display according to claim 15, wherein the piezoelectric ceramic body of the first actuating portion is provided with two third external electrodes axially symmetrically arranged on an outer surface thereof for driving the front end of the first actuating portion to vibrate along a third axis which is perpendicular to the front-rear direction and is not parallel to the first axis.

17. The scan driver for image scanning display according to claim 16, wherein the outer surface of the piezoelectric ceramic body of the second actuating portion is axisymmetrically provided with two fourth external electrodes driving the front end of the second actuating portion to vibrate along a fourth axis, and the fourth axis is perpendicular to the front-rear direction and is not parallel to the second axis.

18. The scan driver for image scanning display according to any one of claims 15 to 17, wherein a fifth external electrode provided to be insulated from the first external electrode is provided at a portion of the outer surface of the piezoelectric ceramic body of the first actuator portion close to the first external electrode.

19. A scan driver for image scanning display according to any one of claims 15 to 17, wherein a sixth external electrode provided to be insulated from the second external electrode is provided at a position where the outer surface of the piezoelectric ceramic body of said second actuator portion is close to the second external electrode.

20. The scan driver for image scanning display according to claim 18, wherein the piezoelectric ceramic body of the second actuating portion is provided with a sixth external electrode provided to be insulated from the second external electrode at a position where the outer surface of the piezoelectric ceramic body of the second actuating portion is close to the second external electrode.

21. The scan driver for image scanning and displaying according to any one of claims 15 to 17, wherein a first piezoelectric material sheet is provided at a portion of the outer surface of the piezoelectric ceramic body of the first actuator portion near the first external electrode, the first piezoelectric material sheet being an arc-shaped sheet closely adhered to the piezoelectric ceramic body, the first piezoelectric material sheet being polarized in a radial direction, an inner arc-shaped surface and an outer arc-shaped surface of the first piezoelectric material arc-shaped sheet being provided with one electrode, respectively, and the electrode on the surface of the first piezoelectric material sheet and the first external electrode on the first external side being insulated from each other.

22. The scan driver for image scanning display according to any one of claims 15 to 17, wherein a second piezoelectric material sheet is provided at a portion of the outer surface of the piezoelectric ceramic body of the second actuating portion, which is close to the second external electrode, the second piezoelectric material sheet being an arc-shaped sheet closely attached to the piezoelectric ceramic body, the second piezoelectric material sheet being polarized in a radial direction, an inner arc-shaped surface and an outer arc-shaped surface of the second piezoelectric material arc-shaped sheet being provided with one electrode, respectively, and the electrode on the surface of the second piezoelectric material sheet and the second external electrode on the second external side being insulated from each other.

23. The scan driver for image scanning and displaying according to claim 21, wherein a second piezoelectric material piece is disposed on the outer surface of the piezoelectric ceramic body of the second actuating portion at a position close to the second external electrode, the second piezoelectric material piece is an arc piece closely attached to the piezoelectric ceramic body, the second piezoelectric material piece is polarized in a radial direction, an electrode is disposed on each of an inner arc surface and an outer arc surface of the second piezoelectric material arc piece, and the electrode on the surface of the second piezoelectric material piece and the second external electrode on the second external side are insulated from each other.

24. A scan driver for an image scanning display according to any of claims 1 and 11 to 14, wherein the number of inner electrodes arranged in the inner electrode holes of the first actuator part is one or more, each inner electrode being associated with at least one outer electrode, and the number of inner electrodes arranged in the inner electrode holes of the second actuator part is one or more, each inner electrode being associated with at least one outer electrode.

25. A scan driver for an image scanning display according to claim 10, wherein the number of inner electrodes provided in the inner electrode holes of the first actuating portion is one or more, each inner electrode being mated with at least one outer electrode, and the number of inner electrodes provided in the inner electrode holes of the second actuating portion is one or more, each inner electrode being mated with at least one outer electrode.

26. A scan driver for image scanning display according to any one of claims 1, 11 to 14 and 25, wherein each of the inner electrodes of the first actuating portion and each of the inner electrodes of the second actuating portion are insulated from each other or electrically connected to each other, each of the inner electrodes of the first actuating portion is insulated from each other or electrically connected to each other, and each of the inner electrodes of the second actuating portion is insulated from each other or electrically connected to each other.

27. The scan driver for image scanning display according to claim 10, wherein each of the inner electrodes of the first actuating portion and each of the inner electrodes of the second actuating portion are insulated from each other or electrically connected to each other, each of the inner electrodes of the first actuating portion is insulated from each other or electrically connected to each other, and each of the inner electrodes of the second actuating portion is insulated from each other or electrically connected to each other.

28. The scan driver of claim 24, wherein the inner electrodes of the first actuating portion and the inner electrodes of the second actuating portion are insulated from each other or electrically connected to each other, and the inner electrodes of the first actuating portion and the inner electrodes of the second actuating portion are insulated from each other or electrically connected to each other.

29. A scan driver for image scanning display according to any one of claims 1, 11-14, 25, 27 and 28, wherein at least one of said inner electrodes and said outer electrodes is connected to a thin film conductive layer attached to the scan driver, each thin film conductive layer being insulated from the other, each thin film conductive layer being insulated from its incoherent inner electrode or outer electrode, the thin film conductive layer extending to the rear end of the scan driver.

30. A scan driver for image scanning display according to claim 10, wherein at least one of the inner electrodes or the outer electrodes is connected with a thin film conductive layer attached to the scan driver, the thin film conductive layers are insulated from each other, and the thin film conductive layers are insulated from the inner electrodes or the outer electrodes which are not related to each other, and the thin film conductive layers extend to the rear end of the scan driver.

31. A scan driver for image scanning display according to claim 24, wherein at least one of said inner electrodes and said outer electrodes is connected to a thin film conductive layer attached to the scan driver, each thin film conductive layer being insulated from the other, and each thin film conductive layer being insulated from its non-coherent inner electrode or outer electrode, the thin film conductive layer extending to the rear end of the scan driver.

32. A scan driver for an image scanning display according to claim 26, wherein at least one of said inner electrodes and said outer electrodes is connected to a thin film conductive layer attached to the scan driver, each thin film conductive layer being insulated from the other, and each thin film conductive layer being insulated from its non-coherent inner electrode or outer electrode, the thin film conductive layer extending to the rear end of the scan driver.

33. A scan driver for an image scanning display according to any of claims 1, 2, 7, 8, 15 and 16, wherein said first axis is perpendicular to said second axis.

34. A scan driver for an image scanning display according to claim 3, wherein said first axis is perpendicular to said second axis.

35. A scan driver for an image scanning display according to claim 17, wherein said first axis is perpendicular to said second axis.

36. A scan driver for image scanning display according to any of claims 3, 17, 34 and 35, wherein said third axis is the same axis as said second axis and said fourth axis is the same axis as said first axis.

37. The scan driver for image scanning display according to claim 1, wherein the common electrode arrangement hole is a circular hole having a circular cross section or a square hole having a square cross section, and when the common electrode arrangement hole is a square hole, a wall of the common electrode arrangement hole includes two planes parallel to the first outer side face and two planes parallel to the second outer side face.

38. The scan driver for image scanning display of claim 36, wherein the piezoelectric material body of the first actuating portion is in a square bar shape, and the side surface of the piezoelectric material body is surrounded by two first outer side surfaces parallel to each other and two third outer side surfaces parallel to each other.

39. The scan driver for image scanning display of claim 37, wherein the piezoelectric material body of the first actuating portion is in a square bar shape, and the side surface of the piezoelectric material body is surrounded by two first outer side surfaces parallel to each other and two third outer side surfaces parallel to each other.

40. The scan driver for image scanning display of claim 36, wherein the piezoelectric material body of the second actuating portion is in a square bar shape, and the side surfaces of the piezoelectric material body are surrounded by two second outer side surfaces parallel to each other and two fourth outer side surfaces parallel to each other.

41. The scan driver for image scanning display according to claim 37, wherein the piezoelectric material body of the second actuating portion is in a square bar shape, and the side surface of the piezoelectric material body is surrounded by two second outer side surfaces parallel to each other and two fourth outer side surfaces parallel to each other.

42. The scan driver for image scanning display of claim 38 or 39, wherein the piezoelectric material body of the second actuating portion has a square bar shape, and the side surface of the piezoelectric material body is surrounded by two second outer side surfaces parallel to each other and two fourth outer side surfaces parallel to each other.

43. The scan driver for image scanning display according to claim 42, wherein the scan driver body constituted by the piezoelectric material body of the first actuating portion and the piezoelectric material body of the second actuating portion is a square bar type extending in the front-rear direction and having a square cross-sectional profile.

44. A scan driver for use in image scanning display, characterized by: the device comprises a first actuating part, a separation part and a second actuating part which are integrally formed and are sequentially connected along the direction from back to front; the first actuating part and the second actuating part comprise piezoelectric material bodies with piezoelectric effect, inner electrode holes are formed in the first actuating part and the second actuating part, outer electrodes are formed outside the first actuating part and the second actuating part, and inner electrodes matched with the outer electrodes are formed in the inner electrode holes of the first actuating part and the second actuating part;

the isolation part is provided with a first through hole communicated with the inner electrode holes of the first actuating part and the second actuating part,

the first through hole, the inner electrode hole of the first actuating part and the inner electrode hole of the second actuating part form a common electrode layout hole, the common electrode layout hole is a through hole penetrating through the scanning driver along the front-back direction, the wall of the common electrode layout hole is fully provided with a common electrode layer, and all the outer electrodes share the common electrode layer;

45. The scan driver for image scanning display of claim 44, wherein the piezoelectric ceramic body of the first actuating portion has two third outer sides parallel to each other and perpendicular to a third axis, and a third external electrode is disposed on each of the third outer sides, and the third axis is perpendicular to the front-rear direction and is not parallel to the first axis.

46. The scan driver for image scanning display of claim 45, wherein the piezoelectric ceramic body of the second actuating portion has two fourth outer sides parallel to each other and perpendicular to a fourth axis, and each of the fourth outer sides is provided with a fourth external electrode, and the fourth axis is perpendicular to the front-rear direction and is not parallel to the second axis.

47. The scan driver for image scanning display of claim 45 or 46, wherein said first outer side is further provided with a fifth outer electrode which is insulated from the first outer electrode.

48. The scan driver for image scanning display of claim 45 or 46, wherein the second outer side face is further provided with a sixth external electrode provided to be insulated from the second external electrode.

49. A scan driver for an image scanning display according to claim 47, wherein the second outer side face is further provided with a sixth outer electrode provided to be insulated from the second outer electrode.

50. The scan driver for image scanning display according to claim 45 or 46, wherein a first piezoelectric material sheet is further disposed on the first outer side surface and closely attached to the first outer side surface, the first piezoelectric material sheet is polarized along a first axis direction, one electrode is disposed on each of two outer surfaces of the piezoelectric material sheet perpendicular to the first axis, and the electrode on the surface of the first piezoelectric material sheet and the first external electrode on the first outer side surface are insulated from each other.

51. The scan driver for image scanning display according to claim 45 or 46, wherein a second piezoelectric material sheet is disposed on the second outer side surface and closely attached to the second outer side surface, the second piezoelectric material sheet is polarized along the second axis, and electrodes are disposed on two outer surfaces of the piezoelectric material sheet perpendicular to the second axis, respectively, and the electrodes on the surface of the second piezoelectric material sheet are insulated from the second outer electrodes on the second outer side surface.

52. A scan driver for an image scanning display according to claim 50, wherein a second sheet of piezoelectric material is provided on the second outer side in close contact with the second outer side, the second sheet of piezoelectric material being polarized in the second axis direction, an electrode being provided on each of two outer surfaces of the second sheet of piezoelectric material perpendicular to the second axis, the electrode on the surface of the second sheet of piezoelectric material being insulated from the second outer electrode on the second outer side.

53. A scan driver for image scanning display according to any one of claims 44 to 46, 49 and 52, wherein second planes corresponding to the first planes in which the respective external electrodes are located are provided in the internal electrode holes of the first actuating portion, each second plane is adjacent to and parallel to the corresponding first plane, and the internal electrode corresponding to the external electrode on each first plane is disposed on the second plane corresponding to the first plane.

54. The scan driver for image scanning display of claim 47, wherein the inner electrode holes of the first actuating portion are provided therein with second planes corresponding to the first planes in which the respective outer electrodes are located, each of the second planes being adjacent to and parallel to the corresponding first plane, and the inner electrode corresponding to the outer electrode on each of the first planes is disposed on the second plane corresponding to the first plane.

55. The scan driver for image scanning display of claim 48, wherein the inner electrode holes of the first actuating portion are provided therein with second planes corresponding to the first planes in which the respective outer electrodes are located, each of the second planes being adjacent to and parallel to the corresponding first plane, and the inner electrode corresponding to the outer electrode on each of the first planes is disposed on the second plane corresponding to the first plane.

56. The scan driver for image scanning display according to claim 50, wherein the inner electrode holes of the first actuating portion are provided therein with second planes corresponding to the first planes in which the respective outer electrodes are located, each of the second planes being adjacent to and parallel to the corresponding first plane, and the inner electrode corresponding to the outer electrode on each of the first planes is disposed on the second plane corresponding to the first plane.

57. The scan driver for image scanning display according to claim 51, wherein the inner electrode hole of the first actuating portion is provided therein with second planes corresponding to the first planes in which the respective outer electrodes are located, each of the second planes is adjacent to and parallel to the corresponding first plane, and the inner electrode corresponding to the outer electrode on each of the first planes is disposed on the second plane corresponding to the first plane.

58. The scan driver for image scanning display according to claim 44, wherein the piezoelectric ceramic body of the first actuating portion is of a circular tube type, the outer surface of the piezoelectric material body is axially symmetrically provided with two first external electrodes driving the front end of the first actuating portion to vibrate along a first axis, the piezoelectric ceramic body of the second actuating portion is of a circular tube type, the outer surface of the piezoelectric material body is axially symmetrically provided with two second external electrodes driving the front end of the second actuating portion to vibrate along a second axis, and the first axis and the second axis are both perpendicular to the front-rear direction and are not parallel to each other.

59. The scan driver for image scanning display of claim 58, wherein the outer surface of the piezoelectric ceramic body of the first actuating part is axisymmetrically provided with two third external electrodes driving the front end of the first actuating part to vibrate along a third axis, the third axis being perpendicular to the front-rear direction and not parallel to the first axis.

60. The scan driver for image scanning display of claim 59, wherein the outer surface of the piezoelectric ceramic body of the second actuating portion is axisymmetrically provided with two fourth external electrodes driving the front end of the second actuating portion to vibrate along a fourth axis, the fourth axis being perpendicular to the front-rear direction and not parallel to the second axis.

61. The scan driver for image scanning display according to any one of claims 58 to 60, wherein a fifth external electrode provided to be insulated from the first external electrode is provided at a portion of an outer surface of the piezoelectric ceramic body of said first actuator portion close to the first external electrode.

62. The scan driver for image scanning display according to any one of claims 58 to 60, wherein a sixth external electrode provided to be insulated from the second external electrode is provided at a position where an outer surface of the piezoelectric ceramic body of said second actuator portion is close to the second external electrode.

63. The scan driver for image scanning display of claim 61, wherein the piezoelectric ceramic body of the second actuating portion is provided with a sixth external electrode provided to be insulated from the second external electrode at a position where the piezoelectric ceramic body of the second actuating portion is close to the second external electrode.

64. The scan driver for image scanning and display according to any one of claims 58 to 60, wherein a first piezoelectric material piece is provided at a portion of the outer surface of the piezoelectric ceramic body of said first actuator portion near the first external electrode, the first piezoelectric material piece being an arc-shaped piece closely attached to the piezoelectric ceramic body, the first piezoelectric material piece being polarized in a radial direction, an inner arc-shaped surface and an outer arc-shaped surface of the first piezoelectric material arc-shaped piece being provided with one electrode, respectively, and the electrode on the surface of the first piezoelectric material piece and the first external electrode on the first external side being insulated from each other.

65. The scan driver for image scanning display according to any one of claims 58 to 60, wherein a second piezoelectric material sheet is provided at a portion of an outer surface of the piezoelectric ceramic body of said second actuator portion, which portion is close to the second external electrode, the second piezoelectric material sheet being an arc-shaped sheet closely attached to the piezoelectric ceramic body, the second piezoelectric material sheet being polarized in a radial direction, an inner arc-shaped surface and an outer arc-shaped surface of the second piezoelectric material arc-shaped sheet being provided with one electrode, respectively, and the electrode on the surface of the second piezoelectric material sheet and the second external electrode on the second external side being insulated from each other.

66. The scan driver for image scanning display of claim 64, wherein a second piezoelectric material piece is disposed on an outer surface of the piezoelectric ceramic body of the second actuating portion near the second external electrode, the second piezoelectric material piece is an arc-shaped piece closely attached to the piezoelectric ceramic body, the second piezoelectric material piece is polarized in a radial direction, an inner arc-shaped surface and an outer arc-shaped surface of the second piezoelectric material arc-shaped piece are respectively provided with an electrode, and the electrode on the surface of the second piezoelectric material piece and the second external electrode on the second external side are mutually insulated.

67. The scan driver for an image scan display of any one of claims 44 and 54 to 57, wherein the number of internal electrodes disposed within the internal electrode aperture of the first actuator portion is one or more, each internal electrode is associated with at least one external electrode, and the number of internal electrodes disposed within the internal electrode aperture of the second actuator portion is one or more, each internal electrode is associated with at least one external electrode.

68. The scan driver for image scanning display of claim 53, wherein the number of inner electrodes disposed in the inner electrode holes of the first actuating portion is one or more, each inner electrode is matched with at least one outer electrode, and the number of inner electrodes disposed in the inner electrode holes of the second actuating portion is one or more, each inner electrode is matched with at least one outer electrode.

69. A scan driver for a scanned image display as claimed in any one of claims 44, 54 to 57 and 68, wherein each of said inner electrodes of said first actuator portion is insulated or electrically connected to each other and each of said inner electrodes of said second actuator portion is insulated or electrically connected to each other.

70. The scan driver for image scanning display of claim 53, wherein each of the inner electrodes of the first actuating portion and each of the inner electrodes of the second actuating portion are insulated from each other or electrically connected to each other, each of the inner electrodes of the first actuating portion is insulated from each other or electrically connected to each other, and each of the inner electrodes of the second actuating portion is insulated from each other or electrically connected to each other.

71. The scan driver for image scanning display of claim 67, wherein each of the inner electrodes of the first actuating portion and each of the inner electrodes of the second actuating portion are insulated from each other or electrically connected to each other, each of the inner electrodes of the first actuating portion is insulated from each other or electrically connected to each other, and each of the inner electrodes of the second actuating portion is insulated from each other or electrically connected to each other.

72. A scan driver for image scanning display according to any of claims 44, 54-57, 68, 70 and 71, wherein at least one of said inner electrodes and said outer electrodes is connected to a thin film conductive layer attached to the scan driver, each thin film conductive layer being insulated from the other, each thin film conductive layer being insulated from its incoherent inner electrode or outer electrode, the thin film conductive layer extending to the rear end of the scan driver.

73. A scan driver for an image scanning display according to claim 53, wherein at least one of said inner electrodes and said outer electrodes is connected to a thin film conductive layer attached to the scan driver, each thin film conductive layer is insulated from the other, each thin film conductive layer is insulated from its incoherent inner electrode or outer electrode, and the thin film conductive layer extends to the rear end of the scan driver.

74. The scan driver for image scanning display of claim 67, wherein at least one of said inner electrodes and said outer electrodes is connected to a thin film conductive layer attached to the scan driver, each thin film conductive layer is insulated from the other, each thin film conductive layer is insulated from its incoherent inner electrode or outer electrode, and the thin film conductive layer extends to the rear end of the scan driver.

75. The scan driver of claim 69, wherein at least one of the inner electrodes and the outer electrodes is connected to a thin film conductive layer attached to the scan driver, the thin film conductive layers are insulated from each other, and the thin film conductive layers are insulated from the non-coherent inner electrodes or outer electrodes, and the thin film conductive layers extend to the rear end of the scan driver.

76. The scan driver for image scanning display according to claim 44, further comprising a fixing portion which is located at a rear side of the first actuating portion and is integrally formed with the first actuating portion, wherein the fixing portion is a solid cylinder or a second through hole having an inner electrode hole communicating with the first actuating portion, the second through hole, the first through hole, the inner electrode hole of the first actuating portion and the inner electrode hole of the second actuating portion constitute a common electrode arrangement hole, the common electrode arrangement hole is a through hole penetrating through the scan driver in a front-rear direction, a wall of the common electrode arrangement hole is fully provided with a common electrode layer, and the common electrode layer is shared by the outer electrodes.

77. A scan driver for an image scanning display according to any of claims 44, 45, 50, 51, 58 and 59, wherein said first axis is perpendicular to said second axis.

78. A scan driver for an image scanning display according to claim 46, wherein said first axis is perpendicular to said second axis.

79. The scan driver for an image scanning display of claim 60, wherein said first axis is perpendicular to said second axis.

80. A scan driver for a scanned display of an image as recited in any one of claims 46, 60, 78 and 79, wherein said third axis is co-axial with said second axis and said fourth axis is co-axial with said first axis.

81. A scan driver for a scanned image display as claimed in claim 44 or 76, wherein said common electrode layout hole is a circular hole with a circular cross section or a square hole with a square cross section, and when said common electrode layout hole is a square hole, the wall of said common electrode layout hole comprises two planes parallel to the first outer side and two planes parallel to the second outer side.

82. The scan driver for image scanning display of claim 80, wherein the piezoelectric material body of the first actuating portion is in a square bar shape, and the side surface of the piezoelectric material body is surrounded by two first outer side surfaces parallel to each other and two third outer side surfaces parallel to each other.

83. The scan driver for image scanning display of claim 81, wherein the piezoelectric material body of the first actuating portion is in a square bar shape, and the side surface of the piezoelectric material body is surrounded by two first outer side surfaces parallel to each other and two third outer side surfaces parallel to each other.

84. The scan driver for image scanning display of claim 80, wherein the piezoelectric material body of the second actuating portion is in a square bar shape, and the side surfaces of the piezoelectric material body are surrounded by two second outer side surfaces parallel to each other and two fourth outer side surfaces parallel to each other.

85. The scan driver for image scanning display of claim 81, wherein the piezoelectric material body of the second actuating portion is in a square bar shape, and the side surfaces of the piezoelectric material body are surrounded by two second outer side surfaces parallel to each other and two fourth outer side surfaces parallel to each other.

86. The scan driver for image scanning display of claim 82 or 83, wherein the piezoelectric material body of the second actuating portion is in a square bar shape, and the side surface of the piezoelectric material body is surrounded by two second outer side surfaces parallel to each other and two fourth outer side surfaces parallel to each other.

87. The scan driver for image scanning display of claim 86, wherein the scan driver body comprised of the piezoelectric material body of the first actuating portion, the partition portion, and the piezoelectric material body of the second actuating portion is a square bar type extending in the front-rear direction and having a square cross-sectional profile.

88. The scan driver for image scanning display of claim 76, wherein the piezoelectric material body of the first actuating portion has a square bar shape, the side surface of the piezoelectric material body is surrounded by two first outer side surfaces parallel to each other and two third outer side surfaces parallel to each other, the piezoelectric material body of the second actuating portion has a square bar shape, the side surface of the piezoelectric material body is surrounded by two second outer side surfaces parallel to each other and two fourth outer side surfaces parallel to each other, and the scan driver body formed by the piezoelectric material body of the fixed portion, the first actuating portion, the partition portion, and the piezoelectric material body of the second actuating portion has a square bar shape extending in the front-rear direction and having a square cross-sectional profile.

89. An optical fibre scan driver comprising a scan driver for image scanning display as claimed in any one of claims 1 to 88 and an optical fibre fixedly connected to the scan driver and having a front end of the optical fibre extending beyond the scan driver to form an optical fibre cantilever.

90. The fiber optic scan driver of claim 89, wherein the optical fiber on the rear side of the fiber optic cantilever is fixedly attached to the outer surface of the scan driver.

91. The optical fiber scan driver as recited in claim 89, wherein the optical fiber on the rear side of the optical fiber suspension arm is fixedly disposed in the common electrode layout hole.