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CN110681992A - An adjustable broadband laser processing optical system and processing method - Google Patents

An adjustable broadband laser processing optical system and processing method Download PDF

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Publication number
CN110681992A
CN110681992A CN201911057407.7A CN201911057407A CN110681992A CN 110681992 A CN110681992 A CN 110681992A CN 201911057407 A CN201911057407 A CN 201911057407A CN 110681992 A CN110681992 A CN 110681992A
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light
focusing lens
laser
galvanometer
laser processing
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CN110681992B (en
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秦应雄
车昕
刘晓东
唐霞辉
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Huazhong University of Science and Technology
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0652Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising prisms
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/082Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00Technologies related to metal processing
    • Y02P10/25Process efficiency

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

The invention discloses an adjustable broadband laser processing optical system and a processing method, and belongs to the field of laser processing optical systems. The system comprises a laser, a movable focusing lens unit, a scanning galvanometer unit and a working surface; the movable focusing lens unit comprises a focusing lens, a first motor and a guide rail, wherein the first motor controls the focusing lens to move along the guide rail; the scanning galvanometer unit comprises a galvanometer and a second motor, and the galvanometer is connected with the second motor; the laser processing device comprises a laser, a focusing lens, a vibrating mirror, a laser device and a laser processing device, wherein the laser is used for processing a workpiece on a working surface, the laser device is used for emitting light beams to the focusing lens at a certain divergence angle, the light beams are collimated and focused by the focusing lens, then emitted to the vibrating mirror and reflected by the vibrating mirror, and therefore the laser processing device is used for processing the workpiece on. The invention can quickly and sensitively adjust the size of the working light spot, has obvious advantages especially for special-shaped or uneven processing surfaces, and also improves the processing uniformity and the processing efficiency.

Description

一种可调变的宽带激光加工光学系统及加工方法An adjustable broadband laser processing optical system and processing method

技术领域technical field

本发明属于激光加工光学系统领域,更具体地,是涉及一种可调变的宽带激光加工光学系统及方法。The invention belongs to the field of laser processing optical systems, and more particularly, relates to an adjustable broadband laser processing optical system and method.

背景技术Background technique

激光加工技术是一种利用高能激光和纳米材料对各类零件进行合金强化处理的表面改性技术,可在零部件表面无形变的情况下显著改善基层的耐磨、耐蚀、耐热、抗氧化等工程属性。近年来随着工业化和激光技术产业的飞速发展,激光加工作为提高器件表面质量及使用寿命的有效方法在直接成型和再制造生产工艺中得到了广泛应用。Laser processing technology is a surface modification technology that uses high-energy lasers and nanomaterials to strengthen alloys for various parts. Engineering properties such as oxidation. With the rapid development of industrialization and laser technology industry in recent years, laser processing has been widely used in direct molding and remanufacturing production processes as an effective method to improve the surface quality and service life of devices.

现有的激光加工成型系统多采用光学元件对激光束进行切割整形重组,激光加工光学系统的作用是将激光器发出的激光束转换并投射在加工面上用于激光熔覆加工。现有的激光加工光学系统难以满足加工的效率和质量要求,其固定的工作模式通常不能灵活变斑,不适用于结构比较复杂的零件,尤其是对一些尺寸较小、表面不规则的工件加工效率不高。而且,传统加工系统熔敷的效率和质量有限,以积分变换镜熔敷系统为例,其利用标量衍射理论对光束进行重新分配再会聚,积分镜变换后的光场分布带有强烈的干涉及衍射效应,在较短工作时长内,其光斑条纹结构明显,破坏了光束均匀度;尽管由于热扩散作用的存在,其条纹结构会随激光照射时长增加而逐步减弱,但由于激光的高速扫描过程,其工作温度场仍不能保证均匀性,从而会影响熔敷的效率和质量。因此,开发一种可调变的宽带激光加工光学系统对激光加工应用具有重要的意义。The existing laser processing and forming systems mostly use optical elements to cut, shape and reorganize the laser beam. The function of the laser processing optical system is to convert the laser beam emitted by the laser and project it on the processing surface for laser cladding processing. The existing laser processing optical system is difficult to meet the processing efficiency and quality requirements, and its fixed working mode usually cannot be flexibly changed into spots. low efficiency. Moreover, the efficiency and quality of cladding in traditional processing systems are limited. Taking the integrator mirror cladding system as an example, it uses the scalar diffraction theory to redistribute and then converge the beam. The light field distribution transformed by the integrator mirror has strong interference. Diffraction effect, in a short working time, the spot fringe structure is obvious, which destroys the uniformity of the beam; although the fringe structure will gradually weaken with the increase of the laser irradiation time due to the existence of thermal diffusion, but due to the high-speed scanning process of the laser , its working temperature field still cannot guarantee uniformity, which will affect the efficiency and quality of cladding. Therefore, the development of a tunable broadband laser processing optical system is of great significance for laser processing applications.

发明内容SUMMARY OF THE INVENTION

针对现有技术的缺陷,本发明了提出一种可调变的宽带激光加工光学系统及加工方法,旨在解决现有的激光加工系统加工质量差、效率低的问题。Aiming at the defects of the prior art, the present invention proposes an adjustable broadband laser processing optical system and a processing method, aiming at solving the problems of poor processing quality and low efficiency of the existing laser processing system.

为达到上述目的,本发明提供了一种可调变的宽带激光加工光学系统,该系统包括激光器、移动聚焦透镜单元、扫描振镜单元和工作面;所述移动聚焦透镜单元包括聚焦透镜、第一电机和导轨,所述第一电机控制所述聚焦透镜沿所述导轨运动;所述扫描振镜单元包括振镜、第二电机,所述振镜与所述第二电机连接;所述激光器发出的光束以一定发散角入射至所述聚焦透镜,光束经所述聚焦透镜准直聚焦后入射至所述振镜,再经所述振镜反射,从而用于对所述工作面上的工件进行激光加工。本发明使用一片准直聚焦组合镜,不需要先准直再聚焦,减少镜片污染且节约了加工成本,降低了操作难度。In order to achieve the above object, the present invention provides an adjustable broadband laser processing optical system, the system includes a laser, a moving focusing lens unit, a scanning galvanometer unit and a working surface; the moving focusing lens unit includes a focusing lens, a first a motor and a guide rail, the first motor controls the focusing lens to move along the guide rail; the scanning galvanometer unit includes a galvanometer mirror and a second motor, the galvanometer mirror is connected to the second motor; the laser The emitted light beam is incident on the focusing lens at a certain divergence angle, the beam is collimated and focused by the focusing lens and then incident on the galvanometer mirror, and then reflected by the galvanometer mirror, so as to be used for the workpiece on the working surface. Laser processing is performed. The invention uses a collimating and focusing combined mirror, which does not need to be collimated and then focused, reduces lens pollution, saves processing cost, and reduces operation difficulty.

进一步地,该系统还包括分光装置,所述分光装置包括分光棱镜、两个对称放置的反射镜和滑动槽,所述分光棱镜可沿所述滑动槽移动;Further, the system further includes a beam splitting device, the beam splitting device includes a beam splitting prism, two symmetrically placed mirrors and a sliding groove, the beam splitting prism can move along the sliding groove;

光束经所述振镜反射至所述分光棱镜的两分光棱面,通过所述分光棱镜反射分光为两个子光束,所述两个子光束分别经所述反射镜反射后会聚于所述工作面上得到两个光斑。The light beam is reflected by the galvanometer to the two beam-splitting prism surfaces of the beam-splitting prism, and is reflected and split into two sub-beams by the beam-splitting prism, and the two sub-beams are respectively reflected by the mirror and converge on the working surface Get two spots.

进一步地,所述两个子光束会聚时呈一特定夹角,在两个子光束之间形成的中空无光区域内放置多通道送粉管以进行光粉同步输送。Further, the two sub-beams form a specific angle when they converge, and a multi-channel powder feeding tube is placed in the hollow non-light area formed between the two sub-beams to carry out synchronous transmission of light powder.

进一步地,所述聚焦透镜与导轨上的支架相连接,通过所述第一电机控制其在导轨上沿光轴方向来回移动,以调节扫描时的光斑宽度。通过移动聚焦透镜的位置,可以快速调节在工作面上光斑的宽度,提高了设备加工的灵活性和加工效率。Further, the focusing lens is connected to the bracket on the guide rail, and is controlled by the first motor to move back and forth along the optical axis direction on the guide rail to adjust the spot width during scanning. By moving the position of the focusing lens, the width of the light spot on the working surface can be quickly adjusted, which improves the processing flexibility and processing efficiency of the equipment.

进一步地,所述第二电机驱动所述振镜来回振动进行宽带光束扫描,通过编程调整所述振镜扫描的角度,调节光斑的扫描范围,实现对不同尺寸的零件的高效加工。Further, the second motor drives the galvanometer to vibrate back and forth to perform broadband beam scanning, and the scanning angle of the galvanometer is adjusted by programming, and the scanning range of the light spot is adjusted to realize efficient processing of parts of different sizes.

本发明还提供了一种基于前述宽带激光加工光学系统的加工方法,通过调节所述振镜的扫描速度控制各个位置光斑的停留时长,以获得特定形状的光场分布。The present invention also provides a processing method based on the aforementioned broadband laser processing optical system, by adjusting the scanning speed of the galvanometer to control the dwell time of the light spot at each position, so as to obtain a light field distribution of a specific shape.

进一步地,控制所述振镜在偏转角度较大时的扫描速度小于偏转角度较小时的扫描速度,在所述工作面上获得光场分布呈现两侧高、中心低的鞍形光场,从而得到均匀分布的温度场,提高了熔覆层的加工质量。Further, the scanning speed of the galvanometer when the deflection angle is large is controlled to be less than the scanning speed when the deflection angle is small, and the light field distribution on the working surface presents a saddle-shaped light field with high sides and a low center, thereby A uniformly distributed temperature field is obtained, which improves the processing quality of the cladding layer.

进一步地,通过控制所述分光棱镜沿所述滑动槽在两个反射镜之间来回移动,调节两个子光束的能量分配,从而改变工作面上两个光斑的宽度比例。Further, by controlling the beam splitting prism to move back and forth between the two mirrors along the sliding groove, the energy distribution of the two sub-beams is adjusted, thereby changing the width ratio of the two light spots on the working surface.

进一步地,通过调节所述反射镜的转动角度改变两个子光束的会聚角度,从而控制所述工作面上两个光斑的间距。Further, the converging angle of the two sub-beams is changed by adjusting the rotation angle of the reflecting mirror, so as to control the distance between the two light spots on the working surface.

本发明具有如下有益效果:The present invention has the following beneficial effects:

(1)本发明通过控制振镜角度改变光斑的扫描范围,结合聚焦透镜移动调节实现变斑,提高了加工的灵活性,实现了对于各种尺寸工件的高效加工。(1) The present invention changes the scanning range of the light spot by controlling the angle of the galvanometer, and realizes the spot change in combination with the moving adjustment of the focusing lens, which improves the flexibility of processing and realizes the efficient processing of workpieces of various sizes.

(2)本发明利用分光装置一方面实现光束中空、光内送粉激光熔敷,提高了光粉耦合利用率;另一方面,其分光得到的双光束同步进行双光斑扫描,大大提高了加工效率。(2) The present invention utilizes the spectroscopic device to realize laser cladding with hollow beam and inner powder feeding on the one hand, which improves the coupling utilization rate of the optical powder; efficiency.

(3)本发明通过编程控制振镜的偏转,可实现鞍形、抛物线型等根据实际需求的特殊光场分布,以实现对异形表面的加工;尤其是鞍形光场可以得到均匀分布的扫描温度场,提高了熔覆层的加工质量。(3) The present invention controls the deflection of the galvanometer by programming, and can realize saddle-shaped, parabolic and other special light field distributions according to actual needs, so as to realize the processing of special-shaped surfaces; especially, the saddle-shaped light field can obtain evenly distributed scanning The temperature field improves the processing quality of the cladding layer.

附图说明Description of drawings

图1是本发明可调变的宽带激光加工光学系统实施例的示意图;Fig. 1 is the schematic diagram of the embodiment of the adjustable broadband laser processing optical system of the present invention;

图2是本发明可调变的宽带激光加工光学系统另一实施例的示意图;2 is a schematic diagram of another embodiment of the adjustable broadband laser processing optical system of the present invention;

图3是准直聚焦镜移动变斑原理示意图;Fig. 3 is a schematic diagram of the principle of moving spot changing of the collimating focusing mirror;

图4是分光棱镜移动调节两光斑能量比例的示意图;Fig. 4 is the schematic diagram that the beam splitting prism moves to adjust the energy ratio of two light spots;

图5(a)是改变反射镜角度调控双光斑中心间距的示意图;Figure 5(a) is a schematic diagram of changing the angle of the mirror to control the center spacing of the double light spots;

图5(b)是改变反射镜角度调控双光斑中心间距时对应的光斑分布示意图;Figure 5(b) is a schematic diagram of the corresponding light spot distribution when the angle of the mirror is changed to adjust the center distance of the double light spots;

图6(a)是实现鞍形分布光斑停留时长、光强分布及温度场分布示意图;Fig. 6(a) is a schematic diagram showing the dwell time, light intensity distribution and temperature field distribution of the saddle-shaped distribution spot;

图6(b)是实现鞍形分布对应的一个扫描周期内扫描光斑分布示意图;Figure 6(b) is a schematic diagram of the scanning spot distribution in one scanning period corresponding to the saddle-shaped distribution;

图7是分光装置内置送粉管实现光内送粉的示意图。FIG. 7 is a schematic diagram of the powder feeding tube built in the spectroscopic device to realize the powder feeding in the light.

具体实施方式Detailed ways

为了使本发明的目的、技术方案以及优点更加的清楚明白,以下结合附图与实施例对本发明进行进一步的详细说明。应当理解,此处所描述的具体实施例仅仅用于解释本发明,并不用于限定本发明。In order to make the objectives, technical solutions and advantages of the present invention more clear, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention.

实施例1Example 1

如图1所示,本发明实施例提供的一种可调变的宽带激光加工光学系统包括光纤激光器1、聚焦透镜2、用于控制聚焦透镜2移动的第一电机与导轨3、振镜4、驱动振镜振动的第二电机5和工作面6。光纤激光器1发出的光束以一定发散角入射至聚焦透镜2,光束经聚焦透镜2准直聚焦后入射至振镜4,再经振镜4反射至工作面6。As shown in FIG. 1 , an adjustable broadband laser processing optical system provided by an embodiment of the present invention includes a fiber laser 1 , a focusing lens 2 , a first motor and a guide rail 3 for controlling the movement of the focusing lens 2 , and a galvanometer 4 , the second motor 5 and the working surface 6 that drive the galvanometer to vibrate. The light beam emitted by the fiber laser 1 is incident on the focusing lens 2 at a certain divergence angle.

所述的聚焦透镜2与导轨上的支架相连接,通过第一电机控制其在导轨上沿光轴方向来回移动,以实现工作面上6变斑的效果。传统的激光加工光学系统采用多个聚焦镜组合移动调节变斑,而本发明使用准直聚焦组合镜,可以实现非常方便的长距离聚焦,减少镜片污染,且调节速度快,有利于实时变斑处理。The focusing lens 2 is connected with the bracket on the guide rail, and is controlled by the first motor to move back and forth along the optical axis direction on the guide rail, so as to achieve the effect of 6 spots on the working surface. The traditional laser processing optical system uses a combination of multiple focusing mirrors to move and adjust the spot change, while the present invention uses a collimated focus combination mirror, which can achieve very convenient long-distance focusing, reduce lens pollution, and has a fast adjustment speed, which is conducive to real-time spot change. deal with.

所述振镜4与第二电机5连接,通过第二电机5控制振镜4的来回振动,以实现宽带光束扫描的过程。在针对大型轴类零件表面等特定场合下,采用振镜扫描可自由调节矩形光斑的长度(如图中y方向所示)。另外,采用扫描方式反复照射,有利于激光熔池的震动,改善熔池,提高熔覆质量,加深激光熔覆或激光强化的硬化深度。The galvanometer 4 is connected with the second motor 5, and the back and forth vibration of the galvanometer 4 is controlled by the second motor 5, so as to realize the process of broadband beam scanning. In special occasions such as the surface of large shaft parts, the length of the rectangular light spot can be freely adjusted by galvanometer scanning (as shown in the y direction in the figure). In addition, the repeated irradiation by scanning is beneficial to the vibration of the laser molten pool, improving the molten pool, improving the cladding quality, and deepening the hardening depth of laser cladding or laser strengthening.

实施例2Example 2

如图2,本发明实施例提供的另一种可调变的宽带激光加工光学系统包括光纤激光器1、聚焦透镜2、用于控制聚焦透镜2移动的第一电机与导轨3、振镜4、驱动振镜振动的第二电机5、分光棱镜7、反射镜8、用于控制分光棱镜7位置的滑动槽9和工作面6,其中分光棱镜7、反射镜8、用于控制分光棱镜7位置的滑动槽9构成分光装置。光纤激光器1发出的光束以一定发散角入射至聚焦透镜2,光束经聚焦透镜2准直聚焦后入射至振镜4,经振镜4反射至分光棱镜7的两分光棱面,光束由分光棱镜7反射分光后,经两对称放置的反射镜8反射后会聚于工作面6上。所述的分光棱镜7可在滑动槽9上前后移动,并采用销钉进行限位。As shown in FIG. 2, another adjustable broadband laser processing optical system provided by the embodiment of the present invention includes a fiber laser 1, a focusing lens 2, a first motor and a guide rail 3 for controlling the movement of the focusing lens 2, a galvanometer 4, The second motor 5 that drives the vibration of the galvanometer, the beam splitting prism 7, the reflecting mirror 8, the sliding groove 9 and the working surface 6 for controlling the position of the beam splitting prism 7, wherein the beam splitting prism 7, the reflecting mirror 8 are used to control the position of the beam splitting prism 7 The sliding groove 9 constitutes a spectroscopic device. The beam emitted by the fiber laser 1 is incident on the focusing lens 2 at a certain divergence angle. The beam is collimated and focused by the focusing lens 2 and then incident on the galvanometer mirror 4, and is reflected by the galvanometer 4 to the two beam splitting prisms of the beam splitting prism 7. The beam is collected by the beam splitting prism. 7 After the reflection and splitting, it is reflected by two symmetrically placed mirrors 8 and converges on the working surface 6 . The dichroic prism 7 can move back and forth on the sliding groove 9, and is limited by pins.

所述的聚焦透镜2与导轨上的支架相连接,通过第一电机控制其在导轨上沿光轴方向来回移动,以实现工作面上6变斑的效果。所述振镜4偏振至虚线位置时,光束由实线变为虚线所示,光斑在工作面6沿图中所示y方向在确定范围内来回扫描,形成一定长度的双矩形光斑。The focusing lens 2 is connected with the bracket on the guide rail, and is controlled by the first motor to move back and forth along the optical axis direction on the guide rail, so as to achieve the effect of 6 spots on the working surface. When the galvanometer 4 is polarized to the dotted line position, the light beam changes from a solid line to a dotted line, and the light spot scans back and forth on the working surface 6 along the y direction shown in the figure within a certain range, forming a double rectangular light spot of a certain length.

图3示出聚焦透镜2移动至导轨3上虚线位置时,系统光路由实线变为虚线所示,实现工作面6上双矩形光斑宽度(图中x方向)变化功能。所述第二电机5通过编程控制振镜4的振动角度,可调控反射光斑在工作面上的扫描范围,实现扫描双光斑在扫描方向长度(图中y方向)的变化,结合上述聚焦镜前后移动调节光斑宽度变化,实现可调变的矩形双光斑功能。Fig. 3 shows that when the focusing lens 2 moves to the dashed line position on the guide rail 3, the solid line of the system becomes as shown by the dashed line, realizing the function of changing the double-rectangular spot width (x direction in the figure) on the working surface 6. The second motor 5 controls the vibration angle of the galvanometer 4 by programming, and can adjust the scanning range of the reflected light spot on the working surface, so as to realize the change of the length of the scanning double light spot in the scanning direction (the y direction in the figure). The width of the light spot can be adjusted by moving, and the function of adjustable rectangular double light spot can be realized.

图4所示分光棱镜7沿滑动槽9由实线中心位置移动至虚线位置时,两分光光束能量比例不同,振镜4振动范围由实线至虚线位置,在工作面6得到两宽度不等的双矩形光斑。As shown in FIG. 4 , when the beam splitting prism 7 moves from the solid line center position to the dotted line position along the sliding groove 9, the energy ratio of the two beam splitting beams is different, and the vibration range of the galvanometer 4 is from the solid line to the dotted line position. of double rectangular spots.

图5(a)所示反射镜8由实线位置转动至虚线位置时,两分光光束由实线变为虚线,其工作面的光斑分布变化情况如图5(b)所示,两光束的会聚角度改变可实现工作面上双光斑间距的变化。As shown in Fig. 5(a), when the mirror 8 is rotated from the solid line position to the dashed line position, the two beams change from the solid line to the dashed line, and the change of the spot distribution of the working surface is shown in Fig. 5(b). The change of the convergence angle can realize the change of the double spot spacing on the working surface.

通过编程控制振镜的偏转可实现鞍形、抛物线形等根据实际需求的特殊光场分布,以实现对异形表面的加工。例如,在本实施例中,通过调节振镜的扫描速度以控制各位置光斑的停留时长获得鞍形光场分布。图6(a)所示为对应加工过程中光斑停留时长t、光场强度分布I及温度场分布T情况,图6(b)所示为形成的鞍形光场在一个扫描周期内扫描光斑的分布情况。振镜的偏转角度较大时扫描速度小、偏转角度较小时扫描速度大,从而实现工作面上光场分布呈现两侧高、中心低的鞍形光场。从图6(b)可以看出,鞍形光场对应下的熔敷温度场近似为矩形分布,使得熔覆层形成的热作用过程均匀,克服了常规硬化层的月牙形状分布的缺陷,获得硬化厚度均匀的熔敷层,显著改善了加工质量。又如,当振镜偏转角度较大时,其扫描速度大,偏转角度较小时,其扫描速度小,实现工作面上光场分布呈现两侧低、中心高的抛物线形的光场,以实现对局部凸形表面的加工。由此可见,通过编程控制振镜偏转角度下的扫描速度,可以得到任意特定形状的光场分布,实现了对于异形表面的加工。By programming the deflection of the galvanometer, special light field distributions such as saddle and parabola can be realized according to actual needs, so as to realize the processing of special-shaped surfaces. For example, in this embodiment, the saddle-shaped light field distribution is obtained by adjusting the scanning speed of the galvanometer to control the dwell time of the light spot at each position. Figure 6(a) shows the light spot staying time t, light field intensity distribution I and temperature field distribution T in the processing process, and Figure 6(b) shows the saddle-shaped light field formed to scan the light spot in one scanning period distribution. When the deflection angle of the galvanometer is large, the scanning speed is small, and when the deflection angle is small, the scanning speed is large, so that the light field distribution on the working surface presents a saddle-shaped light field with high sides and low center. It can be seen from Fig. 6(b) that the cladding temperature field corresponding to the saddle-shaped light field is approximately a rectangular distribution, which makes the thermal action process formed by the cladding layer uniform, and overcomes the defect of the crescent-shaped distribution of the conventional hardened layer. Hardened deposits of uniform thickness, significantly improving processing quality. For another example, when the deflection angle of the galvanometer is large, the scanning speed is large, and when the deflection angle is small, the scanning speed is small, so that the light field distribution on the working surface presents a parabolic light field with low sides and high center. Machining of locally convex surfaces. It can be seen that by programming the scanning speed under the deflection angle of the galvanometer, the light field distribution of any specific shape can be obtained, and the processing of the special-shaped surface can be realized.

在上述解释了激光加工光学系统组成的基础上,图7所示为分光装置内置送粉管实现光内送粉的示意图。分光棱镜7和一对反射镜8使得两分光子光束以一定的倾斜角度会聚在工作面6上,两分光子光束之间形成的中空无光区域放置多通道送粉管10以实现光内送粉及光粉同步输送,其光束中空的装置特点为实现光内送粉提供了空间,如此实现了光粉的高效结合及利用,从而大大提高熔敷层的加工质量。而且,加入分光装置实现双光斑同步加工,有效提高了加工效率。On the basis of the above explanation of the composition of the laser processing optical system, Figure 7 shows a schematic diagram of the powder feeding tube built in the spectroscopic device to achieve optical powder feeding. The beam splitting prism 7 and a pair of reflecting mirrors 8 make the two photon beams converge on the working surface 6 at a certain inclination angle, and the multi-channel powder feeding tube 10 is placed in the hollow non-light area formed between the two photon beams to realize the internal transmission of light. The powder and the light powder are transported synchronously, and the hollow beam device provides space for the powder feeding within the light, thus realizing the efficient combination and utilization of the light powder, thereby greatly improving the processing quality of the cladding layer. Moreover, adding a spectroscopic device realizes the simultaneous processing of double light spots, which effectively improves the processing efficiency.

此外,本发明还可以直接与带有QBH接头光纤激光器和工业机器人相结合,提高激光加工系统的加工效率。In addition, the present invention can also be directly combined with a fiber laser with a QBH connector and an industrial robot to improve the processing efficiency of the laser processing system.

本领域的技术人员容易理解,以上所述仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本发明的保护范围之内。Those skilled in the art can easily understand that the above are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention, etc., All should be included within the protection scope of the present invention.

Claims (10)

1. An adjustable broadband laser processing optical system is characterized by comprising a laser, a movable focusing lens unit, a scanning galvanometer unit and a working surface;
the movable focusing lens unit comprises a focusing lens, a first motor and a guide rail, wherein the first motor controls the focusing lens to move along the guide rail;
the scanning galvanometer unit comprises a galvanometer and a second motor, and the galvanometer is connected with the second motor;
the laser processing device comprises a laser, a focusing lens, a vibrating mirror, a laser device and a laser processing device, wherein the laser is used for processing a workpiece on a working surface, the laser device is used for emitting light beams to the focusing lens at a certain divergence angle, the light beams are collimated and focused by the focusing lens, then emitted to the vibrating mirror and reflected by the vibrating mirror, and therefore the laser processing device is used for processing the workpiece on.
2. The broadband laser machining optical system according to claim 1, further comprising a beam splitting device including a beam splitting prism, two symmetrically disposed mirrors, and a sliding groove, the beam splitting prism being movable along the sliding groove;
the light beam is reflected to two light splitting prism surfaces of the light splitting prism through the vibrating mirror, the light is split into two sub-light beams through the light splitting prism, and the two sub-light beams are respectively reflected by the reflecting mirror and then converged on the working surface to obtain two light spots.
3. The broadband laser processing optical system of claim 2, wherein the two sub-beams form a specific angle when converging, and a multi-channel powder feeding tube is disposed in a hollow no-light area formed between the two sub-beams for synchronous light powder delivery.
4. The broadband laser processing optical system according to any one of claims 1 to 3, wherein the focusing lens is connected to a holder on a guide rail, and is controlled by the first motor to move back and forth on the guide rail in the optical axis direction to adjust the spot width during scanning.
5. The broadband laser processing optical system according to any one of claims 1 to 3, wherein the second motor drives the galvanometer to oscillate back and forth for broadband beam scanning, and the scanning range of the light spot is adjusted by programming and adjusting the scanning angle of the galvanometer.
6. A processing method based on the broadband laser processing optical system of any one of claims 1 to 3, characterized in that the stay time of each position light spot is controlled by adjusting the scanning speed of the galvanometer to obtain a light field distribution with a specific shape.
7. The process of claim 6, wherein the scanning speed of the galvanometer at a larger deflection angle is controlled to be lower than that at a smaller deflection angle, so as to obtain a saddle-shaped light field with a light field distribution presenting high sides and low center on the working surface.
8. The machining method of the broadband laser machining optical system according to claim 2 or 3, wherein the width ratio of the two light spots on the working surface is changed by controlling the beam splitting prism to move back and forth between the two reflecting mirrors along the sliding groove to adjust the energy distribution of the two sub-beams.
9. A processing method based on the broadband laser processing optical system of claim 2 or 3, wherein the distance between the two light spots on the working surface is controlled by changing the convergence angle of the two sub-beams by adjusting the rotation angle of the reflecting mirror.
10. A laser processing apparatus using the broadband laser processing optical system according to any one of claims 1 to 5.
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