CN110676187A - Device and method for accurately measuring center of photosensitive surface of photoelectric detector - Google Patents

Abstract

The invention provides a device and method for accurately measuring the center of the photosensitive surface of a photodetector, including a microscope, and a double-vertical-axis combined detection device used in cooperation with the microscope. The upper vertical shaft cover, the vertical shaft sleeve and the lower vertical shaft seat are all coaxial. The invention mainly aims at the problem of large deviation of the center of the photosensitive surface of the double four-quadrant photodetector relative to the assembly reference axis and the problem of coaxiality measurement, and can realize automatic center determination and accurate positioning. The method for accurately detecting the photosensitive center of the photodetector provided by the present invention eliminates the reference conversion error generated during the assembly process of the original plan of the ring photodetector component by trimming, and eliminates the deviation error between the device manufacturing reference and the reference axis measured by the center of the photosensitive surface , which can not only meet the assembly requirements of out-of-tolerance devices, but also eliminate the reference conversion error in the original assembly process.

Description

A device and method for accurately measuring the center of the photosensitive surface of a photodetector

technical field

The invention specifically relates to a device and method for accurately measuring the center of a photosensitive surface of a photoelectric detector, which are used for the detection of devices and similar structural parts that cannot be directly contacted for measurement.

Background technique

The dual four-quadrant photodetector is the core device of the laser seeker to capture the target. There are 8 areas in the outer quadrant and the inner quadrant. The center of the cross reticle in the inner quadrant (also known as the center of the photosensitive surface) is the photosensitive surface. The intersection of the upper F-axis and G-axis is required to have a deviation of no more than 0.1mm from the device detection reference, which plays a decisive role in the adjustment of the optical zero position and the electrical zero position of the seeker. If the coaxiality of the center of the photosensitive surface relative to the detection datum of the device is out of tolerance or the deviation is too large, it will affect the debugging of the dispersive circle curve of the objective lens part of the seeker, and the optical zero position of the seeker will not coincide with the electrical zero position. The gyro correction signal output by the head can not truly reflect the tracking angular velocity, which directly affects the accuracy of the seeker aiming and capturing the target, which may easily lead to off-target. Therefore, the dual four-quadrant photodetector is also called the eye of the laser seeker.

When the dual four-quadrant photodetector is used for device manufacturing, photoelectric detection components with rings, and optical system adjustment of the laser seeker, the measurement reference of the center of the photosensitive surface needs to be converted and iterated, resulting in iteration errors, and it cannot be directly contacted for measurement. After the measurement reference of the center of the photosensitive surface is converted and trimmed to the short cone surface of the photodetector with a ring, the device manufacturing reference in the dual four-quadrant photodetector is still used as the measurement reference, resulting in a reference misalignment error, resulting in misjudgment. If the device manufacturing benchmark and the detection benchmark of the center of the photosensitive surface of the device are not on the same axis or the deviation is large, the device manufacturing benchmark cannot be used for the detection of the center deviation of the photosensitive surface, nor can it be used for the reference cone repair of the ring-shaped photodetector component. The benchmark for cutting processing needs to solve this problem urgently.

SUMMARY OF THE INVENTION

The purpose of the present invention is to provide an accurate measuring device for the center of the photosensitive surface of the photodetector, mainly aiming at the large deviation of the center of the photosensitive surface of the double four-quadrant photodetector relative to the assembly reference axis and the problem of coaxiality measurement, which can realize automatic center determination and accurate positioning .

Another object of the present invention is to provide a method for accurately measuring the center of the photosensitive surface of a photodetector to realize batch measurement.

For this reason, the technical scheme provided by the invention is as follows:

An accurate detection device for a photosensitive center of a photodetector, comprising a microscope, and a double vertical axis combined detection device used in cooperation with the microscope, the double vertical axis combined detection device comprising an upper vertical axis cover, a vertical axis cover and a vertical axis connected in sequence from top to bottom. The shaft sleeve and the lower vertical shaft seat, the upper vertical shaft cover, the vertical shaft sleeve and the lower vertical shaft seat are all coaxial.

The upper vertical shaft cover is a circular body structure, both ends are open, and the center is a self-aligning force bearing end face and an upper vertical shaft hole in sequence from top to bottom.

The center of the vertical shaft sleeve is, from top to bottom, the outer circle of the upper vertical shaft, the self-centering conical surface, the accommodating cavity, the lower vertical shaft hole and the force end face of the lower vertical bearing.

The lower vertical shaft seat comprises a cylindrical body, a second lower vertical bearing force end face and an end face of the sighting portion arranged in sequence from top to bottom, and the cross section of the cylindrical body is the outer circle of the lower vertical shaft.

The verticality between the upper vertical shaft hole and the self-aligning bearing end face 2 is not more than 0.002mm, the cylindricity of the upper vertical shaft hole is not more than 0.003mm, and the surface roughness is Ra0.1.

The verticality between the lower vertical shaft hole and the force end face of the lower vertical bearing is less than 0.002mm, the cylindricity of the lower vertical shaft hole is less than 0.003mm, the outer circle of the upper vertical shaft and the self-centering cone surface are both the lower vertical shaft hole and the lower vertical bearing force end face 1 as the reference, and the coaxiality relative to the reference is less than 0.001mm, the outer cylindricity of the upper vertical shaft is less than 0.003mm, the gap is controlled within 0.002mm, and the surface roughness of each functional surface is Ra0.1 .

The flatness of the second end face of the sighting portion is less than 0.002mm, the outer circle of the lower vertical shaft and the second force end face of the lower vertical bearing are processed based on the end face of the sighting portion, and the second force end face of the lower vertical bearing and the second end face of the sighting portion are processed. The parallelism is less than 0.001mm, the perpendicularity between the outer circle of the lower vertical axis and the second end face of the sighting part is less than 0.001mm, and the surface roughness of each functional surface is Ra0.1.

A method for accurately measuring the center of a photosensitive surface of a photodetector, using a device for accurately measuring the photosensitive center of a photodetector, comprising the following steps:

Step 1) Trim the ring photodetector component to be detected, and iteratively convert the photosensitive center to form a new reference for the optical system adjustment;

Step 2) Place the lower vertical axis seat in the double-vertical axis combined detection device on the disc of the microscope and directly press and fix it, then adjust the eyepiece system of the tool microscope, and adjust the cross section center of the lower vertical axis seat by the cross reticle of the eyepiece After adjustment, install the trimmed photodetector component with ring to be detected on the vertical shaft sleeve, and spin the upper vertical shaft cover to achieve automatic center determination and accurate positioning, forming a fixed and stable vertical shaft;

Step 3) Set the vertical shaft to the lower vertical shaft seat to form a rotatable standard cylindrical vertical shaft. When measuring, rotate the vertical shaft sleeve and find the center of the photosensitive surface of the ring photodetector part through the microscope eyepiece.

The specific process of step 1) is as follows:

Apply polysulfide sealant to the adhesive hole of the part ring, then assemble the part ring to the detection benchmark of the photodetector part, and after the polysulfide sealant is cured, the ring photodetector part is obtained;

Based on the manufacturing benchmark of the ring photodetector components, the ring photodetector fixture is mounted on a precision lathe for trimming, and the outer circle size, reference cone surface, cone angle and end surface are processed at the corresponding parts, so that the photosensitive surface The detection datum measured by the center is iteratively converted on the datum cone to form a new datum for the adjustment of the optical system.

When trimming, the fixture is mounted on the main shaft of the equipment, and the manufacturing reference of the photodetector part with the ring is used as the clamping part, and the reference end face of the photodetector part with the ring is the auxiliary reference for trimming, and then the calibration outer circle of the fixture is adjusted to the equipment. Spindle rotation center, so that the runout is less than 0.003mm for trimming.

The beneficial effects of the present invention are:

The accurate detection device of the photosensitive center of the photoelectric detector provided by the present invention adopts the semi-moving cylindrical vertical axis structure to realize the automatic determination of the center of the photosensitive surface of the device, and realizes the rapid calibration of the cylindrical vertical axis. The device is directly measured without recalibration, enabling batch measurement.

The method for accurately detecting the photosensitive center of the photodetector provided by the present invention eliminates the reference conversion error generated during the assembly process of the original plan of the photodetector component with a ring by trimming, and eliminates the difference between the device manufacturing reference and the reference axis measured by the center of the photosensitive surface. The deviation error can not only meet the assembly requirements of the out-of-tolerance device, but also eliminate the reference conversion error in the original assembly process.

In order to make the above-mentioned content of the present invention more obvious and easy to understand, preferred embodiments are hereinafter described in detail with reference to the accompanying drawings.

Description of drawings

1 is a schematic structural diagram of a photodetector in an embodiment of the present invention;

Fig. 2 is a schematic diagram of the center of the photosensitive surface;

Fig. 3 is the structural representation of the part ring;

Fig. 4 is a schematic diagram of the structure of a photodetector with a ring;

Figure 5 is the schematic diagram of the vertical shaft structure commonly used in precision instruments. Figure (a) is a standard cylindrical vertical shaft, and Figure (b) is a semi-moving cylindrical vertical shaft;

6 is a schematic structural diagram of an embodiment of the dual vertical axis combined detection device of the present invention;

Fig. 7 is the schematic diagram of the upper vertical shaft cover in the embodiment;

Figure 8 is a schematic diagram of a vertical shaft sleeve in an embodiment;

Fig. 9 is the schematic diagram of the lower vertical shaft seat in the embodiment;

Fig. 10 is a jig for tapering the ring-shaped photodetector part in the embodiment.

Description of reference numbers:

1. Manufacturing benchmark; 2. Testing benchmark; 3. Benchmark end face 1; 4. Taper trimming part; 5. Benchmark hole; 6. Bonding glue hole; 7. Benchmark end face 2; 8. Beam trimming benchmark ;9, outer circle size; 10, reference cone surface; 11, cone surface angle; 12, end face; 13, matching size; 14, matching clearance; 15, sighting part bearing end face one; 16, sighting part end face one ;17. Self-aligning bearing end face 1; 18. Ball; 19. Conical surface; 20. Lower vertical shaft seat; 21. Vertical shaft sleeve; 22. Upper vertical shaft cover; , upper vertical shaft hole; 25, self-aligning bearing end face 2; 26, outer circle of upper vertical shaft; 27, self-centering cone angle; 28, lower vertical bearing force end face 1; 29, lower vertical shaft hole; 30 3. Self-centering cone; 31. Outer circle of lower vertical shaft; 32. Force end face of lower vertical bearing; 33. End face of sighting part; 34. Correct outer circle;

Detailed ways

The embodiments of the present invention are described below by specific embodiments, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification.

It should be noted that, in the present invention, the upper, lower, left and right in the figure are regarded as the upper, lower, left and right of the photosensitive center precise detection device of the photodetector described in this specification.

Exemplary embodiments of the present invention will now be described with reference to the accompanying drawings, however, the present invention may be embodied in many different forms and is not limited to the embodiments described herein, which are provided for the purpose of thorough and complete disclosure of the present invention invention, and fully convey the scope of the invention to those skilled in the art. The terms used in the exemplary embodiments shown in the drawings are not intended to limit the invention. In the drawings, the same elements/elements are given the same reference numerals.

Unless otherwise defined, terms (including scientific and technical terms) used herein have the commonly understood meanings to those skilled in the art. In addition, it is to be understood that terms defined in commonly used dictionaries should be construed as having meanings consistent with the context in the related art, and should not be construed as idealized or overly formal meanings.

Example 1:

This embodiment provides an accurate detection device for the photosensitive center of a photodetector, including a microscope, and a dual-vertical-axis combined detection device used in cooperation with the microscope. The dual-vertical-axis combined detection device includes an upper The vertical shaft cover 22 , the vertical shaft sleeve 21 and the lower vertical shaft seat 20 , the upper vertical shaft cover 22 , the vertical shaft sleeve 21 and the lower vertical shaft seat 20 are coaxial.

The implementation process of the present invention:

Place the lower vertical axis seat 20 in the double vertical axis combined detection device on the disc of the microscope and directly press and fix it, then adjust the eyepiece system of the tool microscope, and adjust the eyepiece cross reticle to the center of the cross section of the lower vertical axis seat 20. After adjustment, the trimmed band ring photodetector component 23 to be detected is mounted on the vertical shaft sleeve 21, and the upper vertical shaft cover 22 is spun to realize automatic center determination and accurate positioning, forming a fixed and stable vertical shaft;

Install the vertical shaft sleeve 21 on the lower vertical shaft seat 20 to form a rotatable standard cylindrical vertical shaft, rotate the vertical shaft sleeve 21 during measurement, and find the center of the photosensitive surface of the ring-shaped photodetector component 23 through the microscope eyepiece. As shown in Figure 6, the microscope is not shown in the figure. As shown in Figure 2, the center of the intersection of the F axis and the G axis is the center of the photosensitive surface.

The invention solves the problems of excessive deviation between the manufacturing benchmark 1 and the detection benchmark 2 of the double four-quadrant photodetector and the measurement of coaxiality.

Example 2:

On the basis of Embodiment 1, this embodiment provides an accurate detection device for the photosensitive center of a photodetector. The upper vertical shaft cover 22 is a circular structure with openings at both ends, and the center is self-finding from top to bottom. The positive bearing end face 12 and the upper vertical shaft hole 24 . As shown in Figure 7.

The center of the vertical shaft sleeve 21 is, from top to bottom, the upper vertical shaft outer circle 26 , the self-centering conical surface 30 , the accommodating cavity, the lower vertical shaft hole 29 and the lower vertical bearing force end face 1 28 . As shown in Figure 8.

The lower vertical shaft seat 20 includes a cylindrical body, a lower vertical bearing force end face 2 32 and an end face 12 of the sighting portion arranged in sequence from top to bottom. The cross section of the cylindrical body is the outer circle 31 of the lower vertical shaft. As shown in Figure 9.

Principle of the present invention:

The accurate detection device for the photosensitive center of the photodetector can automatically determine the center, so it can directly measure the center of the photosensitive surface of the ring-shaped photodetector component 23 . The invention adopts the structural principle of the vertical axis, uses the semi-moving cylindrical vertical axis structure to realize the automatic determination of the center of the photosensitive surface of the device, and realizes the rapid calibration of the standard cylindrical vertical axis. The device part 23 makes direct measurements.

As shown in Figure 5, Figure 5(a) is a typical standard cylindrical vertical shaft structure, and its matching size 13, matching gap 14 and the bearing end face of the sighting part-15 are properly designed to achieve rapid and accurate centering; Figure 5 5(b) is a semi-moving cylindrical vertical shaft structure with higher centering accuracy, which is an improvement on the structure of Fig. 5(a), after adding a tapered surface 19 to the upper end of the shaft sleeve, it is in line with the ball 18 and the self-aligning positive bearing end surface. 17 constitutes a kinematic bearing to achieve automatic center determination.

As shown in Figure 6, the double vertical shaft combined detection device is composed of a lower vertical shaft seat 20, a vertical shaft sleeve 21, and an upper vertical shaft cover 22. The ring photodetector component 23 is placed on the detection device, and the ring photoelectric detection The device part 23 is shown in FIG. 4 .

The detection device has the following characteristics: (1) Using the reference cone surface 10 in the photodetector part 23 with a ring, the positioning has the characteristics of floating and swinging, and by adjusting the tolerance of the cone surface 19, the photodetector part 23 with a ring is equivalent to FIG. 5 ( b) The middle ball 18 is used; (2) During the spinning process of the vertical shaft cover 22 in FIG. 7 , the self-aligning force bearing end face 25 in FIG. The upper vertical shaft hole 24 in FIG. 7 and the upper vertical shaft outer circle 26 in FIG. 8 move in coordination with the axis, and the reference cone surface 10 in FIG. 4 and the self-centering cone surface 30 in FIG. Positioning, changing the semi-moving cylindrical vertical shaft structure into a fixed fastening vertical shaft structure; (3) The lower vertical shaft hole 29 in Figure 8 is matched with the outer circle 31 of the lower vertical shaft in Figure 9, and the lower vertical bearing in Figure 8 The force end face 1 28 is closely tangent to the force end face 2 32 of the lower vertical bearing in Fig. 9 to form a standard cylindrical vertical axis; (4) Place the end face 2 33 of the sighting portion in Fig. 9 on the measuring disc of the tool microscope, and calibrate Fig. 9 The center of the outer circle 31 of the middle and lower vertical shafts is fixed to the lower vertical shaft seat 20 of FIG. 9 to form a fixed, reproducible and repeatable measurement reference.

Example 3:

On the basis of Embodiment 2, this embodiment provides a photodetector photosensitive center accurate detection device. The design technical requirements of the upper vertical shaft cover 22 are: the upper vertical shaft hole 24 and the self-aligning bearing end face 2 25 The verticality is not more than 0.002mm, the cylindricity of the upper vertical shaft hole 24 is not more than 0.003mm, it is made by one-time grinding and pressing, and the surface roughness is Ra0.1.

Example 4:

On the basis of Embodiment 2, this embodiment provides a photodetector photosensitive center accurate detection device, the design and manufacturing technical requirements of the vertical shaft sleeve 21: the lower vertical shaft hole 29 and the lower vertical bearing force end face 28 The verticality is less than 0.002mm, and the cylindricity of the lower vertical shaft hole 29 is less than 0.003mm after grinding; the angle between the self-centering cone surface 305 and the self-centering cone surface is 27, the vertical shaft hole 29 and the lower vertical bearing force end face-28 are the benchmarks, and The coaxiality relative to the reference is less than 0.001mm, and the 30° inclined plane of the self-centering cone angle 27 is processed to a positive tolerance of 30"; the vertical shaft hole 29 and the self-centering cone angle 27 below the outer circle 26 of the upper vertical shaft are After grinding, the cylindricity is less than 0.003mm, the gap is controlled within 0.002mm, and the coaxiality relative to the benchmark is less than 0.001mm, and the rotation is easy and smooth, and there is no tight hoop , stagnation or beating phenomenon; the surface roughness of each functional surface Ra0.1.

Example 5:

On the basis of Embodiment 2, this embodiment provides an accurate detection device for the photosensitive center of a photodetector. The technical requirements for the design of the lower vertical shaft seat 20 are that the flatness of the end face 233 of the sighting portion after finishing grinding is less than 0.002 mm; the outer circle 31 of the lower vertical shaft and the end face 2 32 of the lower vertical bearing are processed on the basis of the end face 2 33 of the sighting part. The verticality between the outer circle 31 of the vertical shaft and the end face 2 33 of the sighting part is less than 0.001mm, and they are matched and ground according to the size of the vertical shaft hole 29 in Figure 8. The gap is controlled within 0.002mm, and the rotation is easy and smooth, and there will be no tight hoop. , stagnation or beating phenomenon; the surface roughness of each functional surface Ra0.1.

The assembly method of the double vertical shaft combination detection device is as follows: first, the upper vertical shaft hole 24 in the upper vertical shaft cover 22 in FIG. 7 is matched with the upper vertical shaft outer circle 26 in the vertical shaft sleeve 21 in FIG. Smooth spinning, no tight hoop, stagnation phenomenon; then the above-mentioned combined components are matched with the lower vertical shaft outer circle 31 in the lower vertical shaft seat 20 of FIG. 9 through the lower vertical shaft hole 29 in the vertical shaft sleeve 21 in FIG. 8 , it can be easily and smoothly rotated against the force end face 2 32 of the lower vertical bearing as shown in Figure 9, and the assembly is completed without producing tight hoop or stagnation.

Example 6:

This embodiment provides a method for accurately measuring the center of the photosensitive surface of a photodetector, using a device for accurately measuring the photosensitive center of a photodetector, including the following steps:

Step 1) Trim and cut the ring photodetector component 23 to be detected, and iteratively convert the photosensitive center to form a new reference for the adjustment of the optical system;

Step 2) Place the lower vertical axis seat 20 in the double-vertical axis combined detection device on the disk of the microscope and directly press and fix it, then adjust the eyepiece system of the tool microscope, and adjust the horizontal direction of the lower vertical axis seat 20 by the cross reticle of the eyepiece. On the center of the section, after adjustment, the trimmed band ring photodetector component 23 to be detected is mounted on the vertical shaft sleeve 21, and the vertical shaft cover 22 is spun to achieve automatic center determination and accurate positioning, forming a fixed stable vertical axis;

Step 3) Install the vertical shaft sleeve 21 on the lower vertical shaft seat 20 to form a rotatable standard cylindrical vertical shaft, rotate the vertical shaft sleeve 21 during measurement, and find the center of the photosensitive surface of the ring photodetector component 23 through the microscope eyepiece.

Principle of the present invention:

Since the deviation between the manufacturing reference 1 of the device and the detection reference 2 measured by the center of the photosensitive surface is greater than 0.2 mm, the assembly of the existing ring-shaped photodetector component 23 and the trimming processing method of the reference tapered surface 10 thereof, the laser None of the pre-adjustment detection methods of the seeker optical system are applicable, so a new trimming method is required.

From the analysis of the assembly process, there are the following three aspects of conversion iteration errors: First, there is a manufacturing error and deviation between the device manufacturing benchmark 1 in Figure 1 and the detection benchmark 2 measured by the center of the photosensitive surface; the second is the trimming process Figure 4 When the reference tapered surface 10 and the end face 12 of the ring photodetector component 23 are not based on the detection reference 2 in FIG. 1, but the device manufacturing reference 11 in FIG. 1 is used as the clamping and positioning reference, the reference is converted and introduced. The reference misalignment error; the third is that when the center of the photosensitive surface in Figure 4 is measured, the reference cone 10 and end face 12 in Figure 4 are not used as the measurement benchmark, but the device manufacturing benchmark 1 in Figure 1 is still used as the measurement benchmark, and benchmark conversion occurs. Iteratively, misalignment errors are introduced. These factors can lead to misjudgment of results, and are also the key link in the assembly process that can be improved.

The key point analysis of the direct measurement of the center of the photosensitive surface of the ring-shaped photodetector component 23 of the present invention. After the assembly and trimming of the ring photodetector component 23 in FIG. 4 , the reference cone surface 10 and the end surface 12 in FIG. 4 are the reference for the measurement of the ring photodetector and the adjustment of the optical system of the laser seeker. During the measurement, the primary problem is to accurately simulate the reference system formed by the reference cone surface 10 and the end surface 12 in FIG. 4 , which is also the key technology in the design of the measurement method. The center of the photosensitive surface of the photodetector part 23 with ring in Fig. 4 cannot be contacted for measurement, and can only be measured by a general-purpose optical instrument. The measurement needs to meet the requirements of batch measurement, which can be quickly calibrated without repeated calibration, and the measurement efficiency is high, which is also Important considerations in the design of measurement methods. From the analysis of the structural characteristics of the photodetector component 23 with the ring, the length of the reference cone 10 in Fig. 4 is only 2.2mm and the slope angle is 30°. Stable; while the end face 12 and the reference taper face 10 in FIG. 4 are trimmed and processed at one time, which can improve the mutual positional accuracy and serve as an auxiliary reference for positioning and centering. Therefore, accurate measurement can be achieved by accurately simulating the reference system formed by the reference cone surface 10 and the end surface 12 in FIG.

The ring-shaped photodetector component 23 in FIG. 4 is formed by adhering and assembling the part ring shown in FIG. 3 on the photodetector in FIG. 1 , and then trimming and processing.

Example 7:

On the basis of Embodiment 6, the present invention provides a method for accurately measuring the center of the photosensitive surface of a photodetector. The specific process of step 1) is as follows:

Apply polysulfide sealant to the adhesive-receiving hole 6 of the part ring, then assemble the part ring to the detection benchmark 2 of the photodetector part, and after the polysulfide sealant is cured, the ringed photodetector part 23 is obtained;

Based on the manufacturing standard 1 of the ring photodetector component 23, the ring photodetector jig is mounted on a precision lathe for trimming, and the outer circle size 9, the reference cone surface 10, the cone surface angle 11 and the corresponding parts are processed. On the end face 12, the detection reference 2 measured by the center of the photosensitive surface is iteratively converted to the reference cone surface 10 to form a new reference for the optical system adjustment.

When assembling, first apply an appropriate amount of polysulfide sealant in the adhesive container hole 6 of the part ring in Fig. 3, and then assemble the part ring in Fig. 3 on the detection benchmark 2 of the photodetector in Fig. 1. The hole 2 is matched with the detection reference 2 of the photodetector in Fig. 1, and can rotate smoothly and easily without jamming, and the reference end face 2 7 in Fig. 3 is closely attached to the reference end face 1 3 in Fig. 1; After curing, take the photodetector device manufacturing benchmark 1 in Figure 1 as the benchmark, install the ring photodetector fixture on a precision lathe, trim the tapered surface trimming part 4 in Figure 3 according to the technical requirements of Figure 4, and process it. The outer circle size 9, the reference cone surface 10, the cone surface angle 11 and the end face 12 in FIG. 4 are obtained, so that the photosensitive surface center detection reference 2 of the device in FIG. 1 is iteratively converted to the reference cone surface 10 in FIG. 4 to form an optical system. Set up new benchmarks.

Example 8:

This embodiment adopts the method of the present invention to solve the problems existing in a batch of imported photodetectors.

When the imported photodetector was accepted into the factory, it was found that the deviation between the manufacturing benchmark 11 of the device in Figure 1 and the detection benchmark 2 measured at the center of the photosensitive surface in Figure 1 was greater than 0.2 mm, and there were about 2,500 out-of-tolerance devices. Devices costing more than 10,000 yuan will cause huge economic losses if they are not used. In view of the shortage of photoelectric detectors, this batch of devices needs to be used, but the assembly of the original ring-shaped photodetector component 23, the trimming and processing method of its reference cone surface 10, and the pre-adjustment and detection method of the optical system of the laser seeker are not available. Be applicable. It is necessary to focus on the classification and research on the center deviation of the photosensitive surface of this batch of imported devices, formulate corresponding assembly plans, take corresponding technical measures, and design new assembly and measurement methods, which not only meet the assembly of this batch of eccentric imported devices, but also conform to the laser seeker. Optical system performance requirements.

Solve the above practical problem with the following steps:

Step 1) Carry out the operation on the tapered surface 19 of the ring photodetector component 23

In order to eliminate the reference conversion error caused by the original assembly process of the ring-shaped photodetector component 23, the ring-shaped photodetector component 23 is clamped with a fixture. central function. When trimming, the fixture is securely mounted on the main shaft of the equipment by connecting the machine tool spindle 35. The device manufacturing benchmark 1 in Figure 1 is the clamping part, but the reference end face in Figure 1 is added. A trimming auxiliary benchmark, and then the Correct the outer circle 34 and adjust it to the center of rotation of the main shaft of the equipment, so that the runout is less than 0.003mm, and carry out trimming processing on the basis of the taper trimming benchmark 8; according to the improvement requirements, trim the 30° inclined plane of the benchmark taper surface 10 in Figure 4 into 40″ negative tolerance.

Step 2) Method for measuring the center of the photosensitive surface of the detector component

First, place the second sighting part of the lower vertical axis seat 20 in the double vertical axis combined detection device in Fig. 6 on the disk of the tool microscope and directly press and fix it without correcting to the center of rotation of the disk; then adjust the eyepiece of the tool microscope system, adjust the cross reticle of the eyepiece to the center of the outer circle 31 of the lower vertical axis in FIG. 9 . After adjustment, install the ring photodetector component 23 to be detected at the position of the ring photodetector component 23 in FIG. 6, spin the upper vertical shaft cover 22 in FIG. 6, and use the reference cone in FIG. 10 and the amount of suspension and swing between the self-centering cone surface 30 at the upper end of the shaft sleeve in Figure 8, realize automatic centering and accurate positioning, and form a fixed and stable vertical shaft; then install the lower vertical shaft hole 29 in Figure 8 to the calibration On the outer circle 31 of the lower vertical shaft in place in Figure 9, a rotatable standard cylindrical vertical shaft is formed; when measuring, rotate the knurled part of the vertical shaft sleeve 21 in Figure 6, and observe the photosensitive surface of the ring photodetector part 23 through the eyepiece of the tool microscope offset from the center. Replace the device and perform measurement according to the above method, without re-calibration, to achieve batch measurement.

The trimming method can eliminate the deviation error between the manufacturing benchmark 1 of the device in Figure 1 and the detection benchmark 2 axis measured by the center of the photosensitive surface in Figure 1, which can not only meet the assembly requirements of the out-of-tolerance device, but also eliminate the benchmark conversion error in the original assembly process.

After the trimming is completed, the center of the photosensitive surface of the ring-shaped photodetector component 23 is measured with a microscope and a dual-vertical-axis combined detection device. The present invention can directly observe and measure the photosensitive center.

Compared with the prior art, the present invention has the following characteristics:

1) In combination with the problem that the deviation of the device manufacturing benchmark 1 and the detection benchmark 22 is too large and the original assembly scheme of the ring photodetector component 23 has a benchmark conversion error, trim and cut the component assembly cone 19;

2), analyze the key technical difficulties of the direct measurement of the center of the photosensitive surface of the ring photodetector component 23, determine the measurement principle, and design a new method for accurate measurement and a highly original dual-vertical-axis combined detection device;

3) Adjust and improve the angle tolerance of the reference cone surface 10 in the photodetector component 23 with ring, and reverse the angle tolerance of the self-centering cone surface 30 at the upper end of the vertical shaft sleeve 21 to form a ring line contact, so that the When the cone surface 19 is positioned and centered, the suspension amount and the swing amount are larger, which can play the same function as the ball 18 of the semi-moving cylindrical vertical shaft;

4) After the center is automatically determined, the semi-moving cylindrical vertical shaft structure is changed into a fixed fastening vertical shaft structure by thread pressing, so that the positioning and centering is more accurate and stable.

Those skilled in the art can understand that the above-mentioned embodiments are specific examples for realizing the present invention, and in practical applications, various changes in form and details can be made without departing from the spirit and the spirit of the present invention. scope.

Claims (10)

1. The utility model provides a photosensitive center accurate detection device of photoelectric detector, includes the microscope, its characterized in that: the microscope is characterized by further comprising a double-vertical-shaft combined detection device matched with the microscope, wherein the double-vertical-shaft combined detection device comprises an upper vertical shaft cover (22), a vertical shaft sleeve (21) and a lower vertical shaft seat (20) which are sequentially connected from top to bottom, and the upper vertical shaft cover (22), the vertical shaft sleeve (21) and the lower vertical shaft seat (20) are all coaxial.

2. The device for accurately measuring the center of the light-sensitive surface of the photoelectric detector according to claim 1, wherein: the upper vertical shaft cover (22) is of a round structure, two ends of the upper vertical shaft cover are both open, and the center of the upper vertical shaft cover is provided with a self-aligning bearing end face (12) and an upper vertical shaft hole (24) from top to bottom in sequence.

3. The device for accurately measuring the center of the light-sensitive surface of the photoelectric detector according to claim 1, wherein: the center of the vertical shaft sleeve (21) is sequentially provided with an upper vertical shaft excircle (26), a self-centering conical surface (30), a containing cavity, a lower vertical shaft hole (29) and a lower vertical shaft force bearing end face I (28) from top to bottom.

4. The device for accurately measuring the center of the light-sensitive surface of the photoelectric detector according to claim 1, wherein: the lower vertical shaft seat (20) comprises a cylinder, a second lower vertical shaft bearing end face (32) and an aligning part end face (12) which are sequentially arranged from top to bottom, and the cross section of the cylinder is a lower vertical shaft excircle (31).

5. The device for accurately measuring the center of the light-sensitive surface of the photoelectric detector according to claim 2, wherein: the perpendicularity of the upper vertical shaft hole (24) and the self-aligning bearing end face II (25) is not more than 0.002mm, the cylindricity of the upper vertical shaft hole (24) is not more than 0.003mm, and the surface roughness Ra0.1 is achieved.

6. The device for accurately measuring the center of the light-sensitive surface of the photoelectric detector according to claim 3, wherein: the straightness that hangs down of vertical axis hole (29) and lower vertical axis load terminal surface (28) is less than 0.002mm, vertical axis hole (29) cylindricity is less than 0.003mm down, go up vertical axis excircle (26) and all following vertical axis hole (29) and lower vertical axis load terminal surface (28) as the benchmark from centering conical surface (30), and the axiality of relative benchmark is less than 0.001mm, go up vertical axis excircle (26) cylindricity and be less than 0.003mm, clearance control is within 0.002mm, each surface roughness Ra0.1.

7. The device for accurately measuring the center of the light-sensitive surface of the photoelectric detector according to claim 4, wherein: the flatness of the second collimation part end face (33) is less than 0.002mm, the lower vertical shaft outer circle (31) and the second lower vertical shaft bearing end face (32) are machined by taking the collimation part end face (12) as a reference, the parallelism of the second lower vertical shaft bearing end face (32) and the second collimation part end face (33) is less than 0.001mm, the verticality of the outer lower vertical shaft circle (31) and the second collimation part end face (33) is less than 0.001mm, and the surface roughness of each surface is Ra0.1.

8. A method for accurately measuring the center of a photosensitive surface of a photodetector, using the apparatus for accurately measuring the center of a photosensitive surface of a photodetector according to claim 1, characterized in that: the method comprises the following steps:

step 1) trimming a to-be-detected band-ring photoelectric detector part (23), and performing iterative conversion on a photosensitive center to form a new reference for assembling and adjusting an optical system;

step 2) a lower vertical shaft seat (20) in the double-vertical shaft combined detection device is placed on a disc of a microscope to be directly compressed and fixed, an eyepiece system of the microscope is adjusted, an eyepiece cross division line is adjusted on the center of the cross section of the lower vertical shaft seat (20), after the adjustment is finished, a trimmed photoelectric detector part (23) with a ring to be detected is installed on a vertical shaft sleeve (21), a vertical shaft cover (22) is spun, automatic center determination and accurate positioning are achieved, and a fixed stable vertical shaft is formed;

and 3) mounting the vertical shaft sleeve (21) on the lower vertical shaft seat (20) to form a rotatable standard cylindrical vertical shaft, rotating the vertical shaft sleeve (21) during measurement, and finding the center of the photosensitive surface with the photoelectric detector component (23) through the microscope ocular.

9. The method for accurately measuring the center of the light-sensitive surface of the photoelectric detector according to claim 8, wherein the specific process of the step 1) is as follows:

coating polysulfide sealant in a bonding sealant accommodating hole (6) of the part ring, assembling the part ring on a detection reference (2) of a photoelectric detector part, and obtaining a photoelectric detector part (23) with a ring after the polysulfide sealant is cured;

the manufacturing standard (1) of a part (23) with the photoelectric detector is used as a standard, the photoelectric detector with the ring is arranged on a precision lathe by a clamp for trimming, the excircle size (9), the standard conical surface (10), the conical surface angle (11) and the end surface (12) are processed at corresponding positions, the detection standard (2) measured by the center of the photosensitive surface is iteratively converted on the standard conical surface (10), and a new standard for assembling and adjusting the optical system is formed.

10. The method for accurately measuring the center of the light-sensitive surface of the photoelectric detector according to claim 8, wherein: when in trimming, the clamp is arranged on a main shaft of the equipment, the manufacturing reference (1) of the ring belt photoelectric detector component (23) is taken as a clamping part, the reference end surface (12) of the ring belt photoelectric detector component (23) is taken as a trimming auxiliary reference, and then the correcting excircle (34) of the clamp is adjusted to the rotation center of the main shaft of the equipment, so that the runout is less than 0.003mm for trimming.

Images