CN110672008B - Micro-channel positioning structure of silicon photocell and positioning method based on structure - Google Patents
Micro-channel positioning structure of silicon photocell and positioning method based on structure Download PDFInfo
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- CN110672008B CN110672008B CN201910941989.9A CN201910941989A CN110672008B CN 110672008 B CN110672008 B CN 110672008B CN 201910941989 A CN201910941989 A CN 201910941989A CN 110672008 B CN110672008 B CN 110672008B
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- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 271
- 239000010703 silicon Substances 0.000 title claims abstract description 271
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 258
- 238000000034 method Methods 0.000 title claims description 10
- 238000009434 installation Methods 0.000 claims abstract description 19
- 150000003376 silicon Chemical class 0.000 claims abstract description 12
- 230000000694 effects Effects 0.000 claims description 30
- 238000010586 diagram Methods 0.000 description 5
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a micro-channel positioning structure of a silicon photocell, which comprises a micro-channel, a light source, a silicon photocell and an installation block, wherein the silicon photocell is provided with a pin, the installation block is provided with a T-shaped installation groove, a first silicon photocell, a second silicon photocell and a third silicon photocell are respectively installed in the installation groove, the third silicon photocell is positioned on a vertical bisector of a connecting line of the first silicon photocell and the second silicon photocell, one side of the connecting line of the first silicon photocell and the second silicon photocell is provided with a micro-channel, the micro-channel is vertical to a plane where the first silicon photocell, the second silicon photocell and the third silicon photocell are positioned, and one side of the micro-channel, which is far away from the plane where the first silicon photocell, the second silicon photocell and the third silicon photocell are positioned, is provided with the light source. The cost of the micro-channel positioning technology is reduced, the requirement on hardware configuration is reduced, and only the feedback values of the two silicon photocells need to be judged, so that whether the light spot center is in the center of the micro-channel or not and whether the micro-channel rotates in the vertical plane or not can be judged.
Description
Technical Field
The invention relates to the field of microchannel positioning, in particular to a microchannel positioning structure of a silicon photocell and a positioning method based on the structure.
Background
The microchannel is a slit or a channel with the diameter smaller than 20um, the existing microchannel positioning technology adopts CCD image processing and positioning, and the image processing and positioning technology adopts a high-definition industrial camera CCD for photographing and then comparing with a calibration image to position the microchannel.
But present CCD cost is higher, and image processing's hardware demand is higher, consequently the utility model provides an utilize the diffraction effect of silicon photocell and light to carry out the structure of microchannel location.
Disclosure of Invention
The invention aims to provide a micro-channel positioning structure of a silicon photocell and a positioning method based on the structure, so as to solve the problems in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme:
the utility model provides a silicon photocell's microchannel location structure, including microchannel and light source, still include silicon photocell and installation piece, the bottom surface is provided with the pin under the silicon photocell, the silicon photocell includes a silicon photocell, No. two silicon photocells and No. three silicon photocells, the installation piece is provided with the mounting groove of T type, a silicon photocell, No. two silicon photocells and No. three silicon photocells are installed respectively in the mounting groove, No. three silicon photocells are located the perpendicular bisector of a silicon photocell and No. two silicon photocells line, one side of a silicon photocell and No. two silicon photocells line is provided with the microchannel, microchannel perpendicular to a silicon photocell, No. two silicon photocells and No. three silicon photocells place the plane, the microchannel is kept away from a silicon photocell, No. two silicon photocells and one side of No. three silicon photocells place the plane is provided with the light source.
As a further scheme of the invention: the number of the pins is two.
As a still further scheme of the invention: the diameter of the micro-channel is 18 um.
The positioning method of the micro-channel positioning structure based on the silicon photocell comprises the following steps:
1) respectively installing a first silicon photocell, a second silicon photocell and a third silicon photocell in a T-shaped installation groove formed in an installation block, wherein the third silicon photocell is positioned on a vertical bisector of the first silicon photocell and the second silicon photocell;
2) the light source emits light, the microchannel vertically moves along the first silicon photocell to the second silicon photocell, and feedback of photoelectric effects of the first silicon photocell and the second silicon photocell is detected;
3) when light emitted by a light source passes through the microchannel, the microchannel is rotationally offset along a horizontal angle, and after the microchannel is offset, feedback of photoelectric effects of the first silicon photocell, the second silicon photocell and the third silicon photocell is detected;
4) moving the microchannel obliquely along the first silicon photocell to the second silicon photocell, and detecting the feedback of the photoelectric effect of the first silicon photocell, the second silicon photocell and the third silicon photocell;
5) a silicon photocell, No. two silicon photocells and No. three silicon photocells all are connected with AD acquisition module, and AD acquisition module converts the signal of gathering into voltage signal.
As a still further scheme of the invention: in the step 2), the light source (5) is monochromatic laser.
As a still further scheme of the invention: in the step 5), the AD acquisition module is an AD7506 module.
Compared with the prior art, the invention has the beneficial effects that: the first silicon photocell, the second silicon photocell and the third silicon photocell are respectively installed in the installation grooves, the third silicon photocell is positioned on a vertical bisector of the first silicon photocell and the second silicon photocell, a microchannel is arranged between the first silicon photocell and the second silicon photocell, the light source is positioned on one side, far away from the third silicon photocell, of the vertical bisector of the first silicon photocell and the second silicon photocell, the light source emits light to a microchannel positioning structure of the silicon photocell, and when the light emitted by the light source does not enter the microchannel, the first silicon photocell, the second silicon photocell and the third silicon photocell generate photoelectric effects; when light emitted by the light source enters the micro-channel, the first silicon photocell, the second silicon photocell and the third silicon photocell generate a photoelectric effect to convert light into electric energy.
The method comprises the following steps that a light source emits light, a micro-channel vertically moves towards a second silicon photocell along a first silicon photocell, feedback of photoelectric effects of the first silicon photocell and the second silicon photocell is detected, the photoelectric effects are shown in the figure, and the first silicon photocell and the second silicon photocell can generate the photoelectric effects only when the light emitted by the light source penetrates through the micro-channel; the microchannel is moved along the first silicon photocell in an inclined mode towards the second silicon photocell, and the feedback of the photoelectric effect of the first silicon photocell, the second silicon photocell and the third silicon photocell is detected, so that the photoelectric effect of the first silicon photocell and the second silicon photocell is reduced, and the photoelectric effect of the third silicon photocell is increased; the microchannel is moved along the first silicon photocell to the second silicon photocell in an inclined mode, the feedback of the photoelectric effect of the first silicon photocell, the second silicon photocell and the third silicon photocell is detected, the position of the microchannel can be detected at the moment, and whether the microchannel is inclined in a vertical plane or not can be detected.
Drawings
FIG. 1 is a front view of a microchannel positioning structure of a silicon photovoltaic cell.
FIG. 2 is a schematic diagram of the photoelectric detection of the first cell and the second cell in the micro-channel positioning structure of the silicon photocell.
Fig. 3 is a front view of a microchannel positioning structure of a silicon photovoltaic cell.
FIG. 4 is a top view of a microchannel positioning structure of a silicon photovoltaic cell.
FIG. 5 is a diagram of the installation of the microchannel positioning structure of a silicon photovoltaic cell.
FIG. 6 is a schematic diagram of a silicon photocell with a microchannel positioning structure.
Fig. 7 is a diagram of the installation relationship of the silicon photocell with the microchannel positioning structure of the silicon photocell.
Fig. 8 is a schematic diagram of the connection between the silicon photocell and the data acquisition module of the microchannel positioning structure of the silicon photocell.
Fig. 9 is an AD collection module of a microchannel positioning structure of a silicon photovoltaic cell.
In the figure: 1-first silicon photocell, 2-second silicon photocell, 3-third silicon photocell, 4-micro channel, 5-light source, 6-silicon photocell, 7-pin, 8-mounting groove, 9-mounting block.
Detailed Description
The technical solution of the present invention will be described in further detail with reference to specific embodiments.
Example 1
Referring to fig. 1-9, a microchannel positioning structure of a silicon photocell comprises a microchannel 4, a light source 5, a silicon photocell 6 and a mounting block 9, wherein a pin 7 is arranged on the lower bottom surface of the silicon photocell 6, the silicon photocell 6 comprises a first silicon photocell 1, a second silicon photocell 2 and a third silicon photocell 3, the mounting block 9 is provided with a T-shaped mounting groove 8, the first silicon photocell 1, the second silicon photocell 2 and the third silicon photocell 3 are respectively mounted in the mounting groove 8, the third silicon photocell 3 is positioned on a perpendicular bisector of a connecting line of the first silicon photocell 1 and the second silicon photocell 2, the microchannel 4 is arranged on one side of the connecting line of the first silicon photocell 1 and the second silicon photocell 2, the microchannel 4 is perpendicular to the first silicon photocell 1, a light source 5 is arranged on one side of the plane where the second silicon photocell 2 and the third silicon photocell 3 are located, and the microchannel 4 is far away from the first silicon photocell 1, the second silicon photocell 2 and the third silicon photocell 3;
the first silicon photocell 1, the second silicon photocell 2 and the third silicon photocell 3 are respectively installed in the installation groove 8, the third silicon photocell 3 is positioned on a vertical bisector of the first silicon photocell 1 and the second silicon photocell 2, the microchannel 4 is arranged between the first silicon photocell 1 and the second silicon photocell 2, the light source 5 is positioned on one side, far away from the third silicon photocell 3, of the vertical bisector of the first silicon photocell 1 and the second silicon photocell 2, the light source 5 emits light to a microchannel positioning structure of the silicon photocell, and when the light emitted by the light source 5 does not enter the microchannel 4, the first silicon photocell 1, the second silicon photocell 2 and the third silicon photocell 3 generate photoelectric effects; when light emitted by the light source 5 enters the micro-channel 4, the first silicon photocell 1, the second silicon photocell 2 and the third silicon photocell 3 generate a photoelectric effect to convert light into electric energy.
The number of the pins 7 is at least two, and in this embodiment, preferably, the number of the pins 7 is two.
The specific size of the microchannel 4 is not limited, and in this embodiment, the diameter of the microchannel 4 is preferably 18 um.
Example 2
A method for positioning a micro-channel positioning structure based on a silicon photocell comprises the following steps:
1) respectively installing a first silicon photocell 1, a second silicon photocell 2 and a third silicon photocell 3 in a T-shaped installation groove 8 formed in an installation block 9, wherein the third silicon photocell 3 is positioned on a vertical bisector of the first silicon photocell 1 and the second silicon photocell 2, a micro channel 4 is arranged between the first silicon photocell 1 and the second silicon photocell 2, and a light source 5 is positioned on one side, far away from the third silicon photocell 3, of the vertical bisector of the first silicon photocell 1 and the second silicon photocell 2;
2) the light source 5 emits light, the microchannel 4 vertically moves along the first silicon photocell 1 to the second silicon photocell 2, and the feedback of the photoelectric effect of the first silicon photocell 1 and the second silicon photocell 2 is detected;
3) when light emitted by the light source 5 passes through the microchannel 4, the microchannel 4 is rotationally offset along a horizontal angle, and after the microchannel 4 is offset, feedback of photoelectric effects of the first silicon photocell 1, the second silicon photocell 2 and the third silicon photocell 3 is detected;
4) moving the microchannel 4 along the first silicon photocell 1 in an inclined manner to the second silicon photocell 2, and detecting the feedback of the photoelectric effect of the first silicon photocell 1, the second silicon photocell 2 and the third silicon photocell 3;
5) no. 1, No. 2 and No. 3 silicon photocells of silicon photocell are all connected with AD acquisition module, and AD acquisition module converts the signal conversion who gathers into voltage signal and reads.
In the step 2), the specific structure of the light source 5 is not limited, and in this embodiment, the light source 5 is preferably a monochromatic laser.
In the step 5), a specific structure of the AD acquisition module is not limited, and in this embodiment, the AD acquisition module is preferably an AD7506 module.
The working principle of the invention is as follows: the first silicon photocell 1, the second silicon photocell 2 and the third silicon photocell 3 are respectively installed in the installation groove 8, the third silicon photocell 3 is positioned on a vertical bisector of the first silicon photocell 1 and the second silicon photocell 2, the microchannel 4 is arranged between the first silicon photocell 1 and the second silicon photocell 2, the light source 5 is positioned on one side, far away from the third silicon photocell 3, of the vertical bisector of the first silicon photocell 1 and the second silicon photocell 2, the light source 5 emits light to a microchannel positioning structure of the silicon photocell, and when the light emitted by the light source 5 does not enter the microchannel 4, the first silicon photocell 1, the second silicon photocell 2 and the third silicon photocell 3 generate photoelectric effects; when light emitted by the light source 5 enters the micro-channel 4, the first silicon photocell 1, the second silicon photocell 2 and the third silicon photocell 3 generate a photoelectric effect to convert light into electric energy.
The light source 5 emits light, the microchannel 4 vertically moves towards the second silicon photocell 2 along the first silicon photocell 1, and the feedback of the photoelectric effect of the first silicon photocell 1 and the second silicon photocell 2 is detected, the photoelectric effect is shown in figure 2, and the photoelectric effect can be generated only when the light emitted by the light source 5 passes through the microchannel 4 and the first silicon photocell 1 and the second silicon photocell 2; the microchannel 4 is moved along the direction from the first silicon photocell 1 to the second silicon photocell 2 in an inclined manner, and the feedback of the photoelectric effect of the first silicon photocell 1, the second silicon photocell 2 and the third silicon photocell 3 is detected, so that the photoelectric effect of the first silicon photocell 1 and the second silicon photocell 2 is reduced, and the photoelectric effect of the third silicon photocell 3 is increased; the microchannel 4 is moved along the first silicon photocell 1 to the second silicon photocell 2 in an inclined manner, and the feedback of the photoelectric effect of the first silicon photocell 1, the second silicon photocell 2 and the third silicon photocell 3 is detected, so that the position of the microchannel 4 can be detected, and whether the microchannel 4 is inclined in a vertical plane or not can be detected.
While the preferred embodiments of the present invention have been described in detail, the present invention is not limited to the above embodiments, and various changes can be made without departing from the spirit of the present invention within the knowledge of those skilled in the art.
Claims (6)
1. The utility model provides a microchannel location structure of silicon photocell, including microchannel (4) and light source (5), a serial communication port, still include silicon photocell (6) and installation piece (9), bottom surface is provided with pin (7) under silicon photocell (6), silicon photocell (6) are including a silicon photocell (1), No. two silicon photocells (2) and No. three silicon photocells (3), installation piece (9) are provided with mounting groove (8) of T type, a silicon photocell (1), No. two silicon photocells (2) and No. three silicon photocells (3) are installed respectively in three limits of mounting groove (8), No. three silicon photocells (3) are located the perpendicular bisector of a silicon photocell (1) and No. two silicon photocells (2) line, one side of a silicon photocell (1) and No. two silicon photocells (2) line is provided with microchannel (4), microchannel (4) are perpendicular to a silicon photocell (1), No. two silicon photocells (2) and No. three silicon photocells (3) are located in the plane, and microchannel (4) keep away from No. one silicon photocell (1), No. two silicon photocells (2) and No. three silicon photocells (3) and are located one side of plane and are provided with light source (5).
2. The micro-channel positioning structure of a silicon photo-cell according to claim 1, wherein the number of the pins (7) is two.
3. The micro-channel positioning structure of a silicon photo-cell according to claim 1, wherein the micro-channel (4) has a channel diameter of 18 um.
4. A method for positioning a microchannel positioning structure of a silicon photocell according to any one of claims 1 to 3, comprising the steps of:
1) installing a first silicon photocell (1), a second silicon photocell (2) and a third silicon photocell (3) in a T-shaped installation groove (8) formed in an installation block (9) respectively, wherein the third silicon photocell (3) is positioned on a vertical bisector of the first silicon photocell (1) and the second silicon photocell (2), a microchannel (4) is arranged between the first silicon photocell (1) and the second silicon photocell (2), and a light source (5) is positioned on one side, far away from the third silicon photocell (3), of the vertical bisector of the first silicon photocell (1) and the second silicon photocell (2);
2) the light source (5) emits light, the microchannel (4) vertically moves along the first silicon photocell (1) to the second silicon photocell (2), and the feedback of the photoelectric effect of the first silicon photocell (1) and the second silicon photocell (2) is detected;
3) when light emitted by the light source (5) passes through the microchannel (4), the microchannel (4) is rotationally offset along a horizontal angle, and after the microchannel (4) is offset, the feedback of photoelectric effects of the first silicon photocell (1), the second silicon photocell (2) and the third silicon photocell (3) is detected;
4) moving the microchannel (4) along the first silicon photocell (1) to the second silicon photocell (2) in an inclined manner, and detecting the feedback of the photoelectric effect of the first silicon photocell (1), the second silicon photocell (2) and the third silicon photocell (3);
5) a silicon photocell (1), a silicon photocell (2) and a silicon photocell (3) are all connected with an AD acquisition module, and the AD acquisition module converts acquired signals into voltage signals.
5. The method for positioning the micro-channel positioning structure of the silicon photocell according to claim 4, wherein in the step 2), the light source (5) is a monochromatic laser.
6. The method as claimed in claim 4, wherein in step 5), the AD acquisition module is an AD7506 module.
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| CN102353659A (en) * | 2011-06-09 | 2012-02-15 | 北京工业大学 | Detector for biochip fluorescent microspectrum and manufacture method thereof |
| CN103280393A (en) * | 2013-05-30 | 2013-09-04 | 中国科学院西安光学精密机械研究所 | Cross position-sensitive anode and method for realizing photon counting integral imaging measurement by using same |
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| SU873041A1 (en) * | 1978-01-24 | 1981-10-15 | Предприятие П/Я А-7555 | Photoelectric transducer |
| EP2745074B1 (en) * | 2011-08-16 | 2022-02-16 | Leica Geosystems AG | Multi psd-arrangement and circuitry |
| CN108913565B (en) * | 2018-08-01 | 2021-07-02 | 苏州索真生物技术有限公司 | Multi-channel micro-fluidic optical detection system |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102353659A (en) * | 2011-06-09 | 2012-02-15 | 北京工业大学 | Detector for biochip fluorescent microspectrum and manufacture method thereof |
| CN103280393A (en) * | 2013-05-30 | 2013-09-04 | 中国科学院西安光学精密机械研究所 | Cross position-sensitive anode and method for realizing photon counting integral imaging measurement by using same |
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