CN110656372B - MOCVD (metal organic chemical vapor deposition) heater source convenient for mounting heating sheet and using method thereof - Google Patents
MOCVD (metal organic chemical vapor deposition) heater source convenient for mounting heating sheet and using method thereof Download PDFInfo
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- CN110656372B CN110656372B CN201911104941.9A CN201911104941A CN110656372B CN 110656372 B CN110656372 B CN 110656372B CN 201911104941 A CN201911104941 A CN 201911104941A CN 110656372 B CN110656372 B CN 110656372B
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 70
- 238000000034 method Methods 0.000 title claims abstract description 10
- 238000005229 chemical vapour deposition Methods 0.000 title abstract description 4
- 239000002184 metal Substances 0.000 title abstract description 4
- 230000009471 action Effects 0.000 claims abstract description 11
- 230000007246 mechanism Effects 0.000 claims description 44
- 238000010030 laminating Methods 0.000 claims description 13
- 238000009434 installation Methods 0.000 claims description 7
- 238000001179 sorption measurement Methods 0.000 claims description 7
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 claims 11
- 239000000243 solution Substances 0.000 description 5
- 230000001105 regulatory effect Effects 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000001125 extrusion Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 238000000927 vapour-phase epitaxy Methods 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/10—Heating of the reaction chamber or the substrate
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/46—Sulfur-, selenium- or tellurium-containing compounds
- C30B29/48—AIIBVI compounds wherein A is Zn, Cd or Hg, and B is S, Se or Te
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Abstract
The invention discloses an MOCVD (metal organic chemical vapor deposition) heater source convenient for mounting a heating sheet and a using method thereof. According to the invention, the disc is arranged in the cylinder, the elliptic rod is arranged in the elliptic hole on the disc, the elliptic block is reversely rotated, the rotating pin rotates to drive the first magnetic block to be separated from the second magnetic block, the elliptic block rotates to recover the original position to be attached to the disc under the action of the elastic force of the first reset coil spring, so that the disc is arranged, the bolt moves to extrude the clamping block, the clamping block is extruded and moved, the clamping block moves into the second limiting groove, and the end cover is arranged on the cylinder.
Description
Technical Field
The invention relates to an MOCVD (metal organic chemical vapor deposition) heater source, in particular to an MOCVD heater source convenient for mounting a heating plate and a using method thereof, belonging to the technical field of MOCVD heaters.
Background
MOCVD uses organic compounds of III group and II group elements and hydrides of V group and VI group elements as crystal growth source materials, and carries out vapor phase epitaxy on a substrate in a thermal decomposition reaction mode to grow thin layer single crystal materials of various III-V main group and II-VI sub group compound semiconductors and multi-element solid solutions thereof.
The MOCVD heater source that uses at present has certain defect, lacks the convenient installation function of disc, causes inconveniently to maintain disc and heating plate main part, and then has reduced the life of heating plate main part, lacks the fastening laminating function of heating plate main part, general heating plate main part fixed mounting is on the disc, and is inconvenient to change the heating plate main part, and then has reduced the practicality in MOCVD heater source, lacks coupling mechanism simultaneously, causes the end cover inconvenient to install on the drum, has reduced the protective effect to the heating plate main part. Accordingly, an MOCVD heater source and a method of using the same are provided to address the above problems.
Disclosure of Invention
The present invention is directed to solving the above problems by providing an MOCVD heater source that facilitates mounting of heater strips and a method of using the same.
The invention realizes the purpose through the following technical scheme, and the MOCVD heater source convenient for mounting the heating plate comprises an end cover, a cylinder, a support frame, a heating plate main body, a disc, a mounting mechanism, a fitting mechanism and a connecting mechanism, wherein the cylinder is mounted at the top end of the support frame, the end cover is mounted at the top end of the cylinder, the disc is mounted at the bottom end in the cylinder, and the heating plate main body is mounted on the disc;
the mounting mechanism comprises an elliptic rod, an elliptic block, a circular groove, a first reset coil spring, a rotating pin, a first magnetic block and a second magnetic block, the elliptic rod is fixedly mounted at the bottom end inside the cylinder, the elliptic block is mounted at the top end of the elliptic rod, the elliptic rod is mounted inside the disc, the bottom end of the elliptic block is attached to the top end of the disc, the circular groove is formed in the top end of the elliptic rod, the rotating pin is fixedly mounted at the bottom end of the elliptic block, the first reset coil spring is mounted on the annular side surface of the rotating pin, the outer side of the first reset coil spring is fixedly mounted inside the circular groove, the second magnetic block is fixedly mounted inside the circular groove, and the first magnetic block;
the laminating mechanism comprises a first fixing rod, a rotating plate, a first spring, a pressing plate and a second fixing rod, wherein the first fixing rod and the second fixing rod are symmetrically arranged on the left side and the right side of the heating sheet main body;
the connecting mechanism comprises bolts, nuts, two accommodating grooves, two limiting grooves, three springs and a fixture block, the two bolts are symmetrically installed on the annular side face of the end cover, the nuts are installed on the annular side face of the bolts, the outer sides of the nuts are fixedly installed on the end cover, the two accommodating grooves are symmetrically formed in the inner portion of the end cover, the three springs are fixedly installed in the two accommodating grooves, the three ends of the springs are fixedly installed on the fixture block, one ends of the fixture block extend to the inner portions of the accommodating grooves, one ends of the bolts extend to the inner portions of the accommodating grooves and are attached to the fixture block, the two limiting grooves are symmetrically formed in the annular side face of the cylinder, the two limiting grooves are aligned with the two accommodating grooves, and one ends of the fixture block extend to the inner portions of the limiting grooves.
Preferably, a bearing is installed on the annular side face of the rotating pin, the outer side of the bearing is fixedly installed inside the circular groove, four elliptical holes are evenly installed in one end of the disc, and an elliptical rod is installed inside the elliptical holes.
Preferably, the four mounting mechanisms are arranged in four groups, the four groups have the same structure, and the four groups of mounting mechanisms are uniformly mounted on the disc.
Preferably, the T-shaped rod is installed at one end of the second fixing rod, the second spring is installed on the annular side face of the T-shaped rod, two ends of the second spring are fixedly installed on the T-shaped rod and the second fixing rod respectively, one end of the T-shaped rod penetrates through the second fixing rod, and the limiting block is fixedly installed at one end of the T-shaped rod.
Preferably, the first accommodating groove is formed in one end of the second fixing rod, the magnetic square is fixedly installed in the first accommodating groove, one end of the limiting block extends to the inside of the first accommodating groove, the first limiting grooves are symmetrically formed in the rotating plate, and one end of the limiting block extends to the inside of the first limiting groove.
Preferably, the first fixing rods are provided with two fixing rods, a fixing pin is fixedly installed between the two first fixing rods, a rotating plate and a second reset coil spring are installed on the annular side face of the fixing pin, and the outer side of the second reset coil spring is fixedly installed inside the rotating plate.
Preferably, the laminating mechanism is provided with more than two groups, more than two groups the laminating mechanism has the same structure, more than two groups the laminating mechanism is uniformly arranged on the disc.
Preferably, the two groups of connecting mechanisms are arranged and have the same structure, and the two groups of connecting mechanisms are symmetrically arranged on the annular side face of the end cover.
Preferably, install regulating switch on the carriage, and regulating switch one end carries out electric connection with the heating plate main part, regulating switch one end carries out electric connection through wire and external power supply.
Preferably, the MOCVD heater source using method comprises the following steps:
(1) a user pulls the T-shaped rod, the T-shaped rod moves to drive the limiting block to move, the limiting block moves to enter the first accommodating groove, the limiting block moves to be attached to the magnetic part, the T-shaped rod moves to stretch the second spring, the second spring is stretched to generate elastic force, the elastic force of the second spring is smaller than the adsorption force between the magnetic part and the limiting block, and the limiting block is accommodated in the first accommodating groove;
(2) the user places the heating sheet main body on the disc, the heating sheet main body is located between the first fixing rod and the second fixing rod, then the user rotates the rotating plate, the rotating plate rotates around the fixing pin, the rotating plate compresses the second reset coil spring, the second reset coil spring generates elastic force, the elastic force of the second reset coil spring facilitates the rotation and the resetting of the rotating plate, the rotating plate rotates to drive the pressing plate to move, the pressing plate moves to be attached to the heating sheet main body, the rotating plate continues to rotate to enable the heating sheet main body to reversely extrude the pressing plate, the first spring generates elastic force, the elastic force of the first spring facilitates the pressing plate to extrude and fix the heating sheet main body, the rotating plate rotates to drive the first limiting groove to move, when the first limiting groove moves to be aligned with the first accommodating groove, the user pushes the T-shaped rod, the T-shaped rod moves to drive the limiting block to move to be separated from, the T-shaped rod drives the limiting block to move, and the limiting block moves into the first limiting groove to further fix the position of the rotating plate;
(3) a user rotates the oval block, the oval block rotates to drive the rotating pin to rotate, the rotating pin rotates to extrude the first reset coil spring, the first reset coil spring generates elastic force, the rotating pin rotates to drive the first magnetic block to move, the first magnetic block is attached to the second magnetic block, the adsorption force between the first magnetic block and the second magnetic block is larger than the elastic force of the first reset coil spring, the oval block is aligned with the oval rod, then the user installs the disc inside the cylinder, the oval rod is installed inside the oval hole in the disc, the user rotates the oval block in the reverse direction, the rotating pin rotates to drive the first magnetic block to be separated from the second magnetic block, the oval block rotates to recover to be attached to the disc under the action of the elastic force of the first reset coil spring, and then the disc and the heating plate main body are installed;
(4) the user turns on the regulating switch, so that the external power supply is connected with the heating sheet main body, and the heating sheet main body is electrified to work.
The invention has the beneficial effects that:
1. the disc is installed inside the cylinder, the elliptic rod is installed inside the elliptic hole in the disc, then a user reversely rotates the elliptic block, the rotating pin rotates to drive the first magnetic block and the second magnetic block to be separated, the elliptic block rotates to recover the original position to be attached to the disc under the action of the elastic force of the first reset coil spring, and therefore the installation of the disc and the heating plate main body is completed, the problems that the disc is inconvenient to maintain due to the fact that the disc is lack of a convenient installation function, and the service life of the heating plate main body is shortened are solved;
2. the second beneficial effect is that the rotating plate rotates to drive the pressing plate to move, the pressing plate moves to be attached to the heating plate main body, the rotating plate continues to rotate to enable the heating plate main body to reversely extrude the pressing plate, so that the first spring generates elastic force, the first spring is convenient for the pressing plate to extrude and fix the heating sheet main body, the rotating plate rotates to drive the first limit groove to move, when the first limit groove moves to be aligned with the first accommodating groove, the user pushes the T-shaped rod, the T-shaped rod moves to drive the limit block to move and separate from the magnetic direction, under the action of the second elastic force of the spring, the T-shaped rod drives the limiting block to move, the limiting block moves into the first limiting groove, the position of the rotating plate is further fixed, so that the defects that the heating sheet main body is inconvenient to replace due to the lack of a heating sheet main body fastening and attaching function, and the heating sheet main body is generally fixedly arranged on a disc, and the practicability of an MOCVD heater source is further reduced are overcome;
3. the third beneficial effect, install the end cover on the drum, then the user twists the bolt, the bolt removes along the nut, the bolt removes and extrudes the fixture block, the fixture block receives the extrusion and removes, the fixture block removes and stretches spring three for spring three produces elasticity, the automatic re-setting of fixture block is convenient for to spring three's elasticity, the fixture block removes and gets into inside the spacing groove two, and then install the end cover on the drum, solved and lacked coupling mechanism, cause the inconvenient installation of end cover on the drum, reduced the problem to heating plate main part protection effect.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive exercise.
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic view of a heating plate mounting structure according to the present invention;
FIG. 3 is a schematic view of the structure of the mounting mechanism of the present invention;
FIG. 4 is a schematic structural view of a bonding mechanism according to the present invention;
FIG. 5 is a schematic structural view of a fixing rod II according to the present invention;
fig. 6 is a schematic structural diagram of the protection mechanism of the present invention.
In the figure: 1. the device comprises an end cover, 2, a cylinder, 3, a support frame, 4, a heating sheet main body, 5, a disc, 6, an elliptic rod, 7, an elliptic block, 8, a circular groove, 9, a first reset coil spring, 10, a rotating pin, 11, a first magnetic block, 12, a second magnetic block, 13, a bearing, 14, a first fixing rod, 15, a rotating plate, 16, a first spring, 17, a pressing plate, 18, a second fixing rod, 19, a T-shaped rod, 20, a second spring, 21, a limiting block, 22, a first accommodating groove, 23, a magnetic square, 24, a fixing pin, 25, a second reset coil spring, 26, a bolt, 27, a nut, 28, a second accommodating groove, 29, a second limiting groove, 30, a third spring, 31 and a clamping block.
Detailed Description
In order to make the objects, features and advantages of the present invention more obvious and understandable, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the embodiments described below are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The technical scheme of the invention is further explained by the specific implementation mode in combination with the attached drawings.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention.
Referring to fig. 1-6, an MOCVD heater source convenient for mounting a heating plate includes an end cover 1, a cylinder 2, a support frame 3, a heating plate main body 4, a disc 5, a mounting mechanism, a bonding mechanism and a connecting mechanism, wherein the cylinder 2 is mounted at the top end of the support frame 3, the end cover 1 is mounted at the top end of the cylinder 2, the disc 5 is mounted at the bottom end inside the cylinder 2, and the heating plate main body 4 is mounted on the disc 5;
the mounting mechanism comprises an elliptical rod 6, an elliptical block 7, a circular groove 8, a first reset coil spring 9, a rotating pin 10, a first magnetic block 11 and a second magnetic block 12, the elliptical rod 6 is fixedly mounted at the bottom end inside the cylinder 2, the elliptical block 7 is mounted at the top end of the elliptical rod 6, the elliptical rod 6 is mounted inside the disc 5, the bottom end of the elliptical block 7 is attached to the top end of the disc 5, the circular groove 8 is formed at the top end of the elliptical rod 6, the rotating pin 10 is fixedly mounted at the bottom end of the elliptical block 7, the first reset coil spring 9 is mounted on the annular side surface of the rotating pin 10, the outer side of the first reset coil spring 9 is fixedly mounted inside the circular groove 8, the second magnetic block 12 is fixedly mounted inside the circular groove 8, the first magnetic block 11 is mounted on the annular side surface of the rotating pin 10, the elliptical block 7 rotates to drive the rotating pin 10 to rotate, the rotating pin 10 rotates, the rotating pin 10 rotates to drive the first magnetic block 11 to move, so that the first magnetic block 11 is attached to the second magnetic block 12, the adsorption force between the first magnetic block 11 and the second magnetic block 12 is larger than the elastic force of the reset coil spring I9, the elliptical block 7 is aligned with the elliptical rod 6, then a user installs the disc 5 inside the cylinder 2, the elliptical rod 6 is installed inside an elliptical hole in the disc 5, then the user rotates the elliptical block 7 reversely, the rotating pin 10 rotates to drive the first magnetic block 11 to be separated from the second magnetic block 12, the elliptical block 7 rotates to recover to be attached to the disc 5 in the original position under the elastic force of the reset coil spring I9, and then the disc 5 is installed;
the laminating mechanism comprises a first fixing rod 14, a rotating plate 15, a first spring 16, a pressing plate 17 and a second fixing rod 18, wherein the first fixing rod 14 and the second fixing rod 18 are symmetrically arranged on the left side and the right side of the heating sheet main body 4, the rotating plate 15 is arranged between the first fixing rods 14, the first spring 16 is fixedly arranged at the bottom end of the rotating plate 15, the bottom end of the first spring 16 is fixedly arranged on the pressing plate 17, the bottom end of the pressing plate 17 is laminated with the heating sheet main body 4, one end of the rotating plate 15 is positioned between the two second fixing rods 18, the bottoms of the first fixing rod 14 and the second fixing rod 18 are fixedly arranged on the disc 5, the rotating plate 15 is rotated, the rotating plate 15 rotates around a fixing pin 24, the rotating plate 15 compresses the second reset coil spring 25, so that the second reset coil spring 25 generates elasticity, and the elasticity of the, the rotating plate 15 rotates to drive the pressing plate 17 to move, the pressing plate 17 moves to be attached to the heating sheet main body 4, the rotating plate 15 continues to rotate to enable the heating sheet main body 4 to reversely extrude the pressing plate 17, the first spring 16 generates elastic force, the elastic force of the first spring 16 is convenient for the pressing plate 17 to extrude and fix the heating sheet main body 4, the rotating plate 15 rotates to drive the first limiting groove to move, when the first limiting groove moves to be aligned with the first accommodating groove 22, a user pushes the T-shaped rod 19, the T-shaped rod 19 moves to drive the limiting block 21 to move to be separated from the magnetic square 23, under the action of the elastic force of the second spring 20, the T-shaped rod 19 drives the limiting block 21 to move, and the limiting block 21 moves to enter the first limiting groove to further fix the;
the connecting mechanism comprises bolts 26, nuts 27, two accommodating grooves 28, two limiting grooves 29, a spring three 30 and a clamping block 31, wherein the two bolts 26 are symmetrically installed on the annular side surface of the end cover 1, the nuts 27 are installed on the annular side surface of the bolts 26, the outer side of the nuts 27 is fixedly installed on the end cover 1, the two accommodating grooves 28 are symmetrically formed in the end cover 1, the spring three 30 is fixedly installed in the accommodating groove two 28, one end of the spring three 30 is fixedly installed on the clamping block 31, one end of the clamping block 31 extends into the accommodating groove two 28, one end of the bolt 26 extends into the accommodating groove two 28 and is attached to the clamping block 31, the two limiting grooves two 29 are symmetrically formed in the annular side surface of the cylinder 2, the limiting grooves two 29 are aligned with the accommodating grooves two 28, one end of the clamping block 31 extends into the limiting grooves two 29, and a user installs the end cover 1 on the cylinder 2, then, a user screws the bolt 26, the bolt 26 moves along the nut 27, the bolt 26 moves to extrude the clamping block 31, the clamping block 31 is extruded to move, the clamping block 31 moves to stretch the spring III 30, the spring III 30 generates elastic force, the elastic force of the spring III 30 facilitates automatic resetting of the clamping block 31, the clamping block 31 moves into the limiting groove II 29, and the end cover 1 is installed on the cylinder 2.
A bearing 13 is arranged on the annular side surface of the rotating pin 10, the outer side of the bearing 13 is fixedly arranged in the circular groove 8, four elliptical holes are uniformly arranged at one end of the disc 5, and an elliptical rod 6 is arranged in each elliptical hole;
the four mounting mechanisms are arranged in four groups, the four mounting mechanisms have the same structure, and the four mounting mechanisms are uniformly mounted on the disc 5;
a T-shaped rod 19 is installed at one end of the second fixing rod 18, a second spring 20 is installed on the annular side face of the T-shaped rod 19, two ends of the second spring 20 are fixedly installed on the T-shaped rod 19 and the second fixing rod 18 respectively, one end of the T-shaped rod 19 penetrates through the second fixing rod 18, and a limiting block 21 is fixedly installed at one end of the T-shaped rod 19;
one end of the second fixing rod 18 is provided with a first accommodating groove 22, a magnetic square 23 is fixedly arranged in the first accommodating groove 22, one end of the limiting block 21 extends into the first accommodating groove 22, the rotating plate 15 is symmetrically provided with two first limiting grooves, and one end of the limiting block 21 extends into the first limiting groove;
two fixing rods (14) are arranged, a fixing pin (24) is fixedly arranged between the two fixing rods (14), a rotating plate (15) and a second reset coil spring (25) are arranged on the annular side surface of the fixing pin (24), and the outer side of the second reset coil spring (25) is fixedly arranged in the rotating plate (15);
the laminating mechanisms are more than two groups, the structures of the laminating mechanisms are the same, and the laminating mechanisms are uniformly arranged on the disc 5;
the two groups of connecting mechanisms are same in structure and are symmetrically arranged on the annular side surface of the end cover 1;
an adjusting switch is arranged on the supporting frame 3, one end of the adjusting switch is electrically connected with the heating sheet main body 4, and one end of the adjusting switch is electrically connected with an external power supply through a wire;
a method for using an MOCVD heater source comprises the following steps:
(1) a user pulls the T-shaped rod 19, the T-shaped rod 19 moves to drive the limiting block 21 to move, the limiting block 21 moves to enter the first accommodating groove 22, the limiting block 21 moves to be attached to the magnetic block 23, the T-shaped rod 19 moves to stretch the second spring 20, the second spring 20 is stretched to generate elastic force, the elastic force of the second spring 20 is smaller than the adsorption force between the magnetic block 23 and the limiting block 21, and the limiting block 21 is accommodated in the first accommodating groove 22;
(2) a user places the heating sheet main body 4 on the disc 5, so that the heating sheet main body 4 is located between the first fixing rod 14 and the second fixing rod 18, then the user rotates the rotating plate 15, the rotating plate 15 rotates around the fixing pin 24, the rotating plate 15 compresses the second reset coil spring 25, the second reset coil spring 25 generates elastic force, the elastic force of the second reset coil spring 25 facilitates the rotating and resetting of the rotating plate 15, the rotating plate 15 rotates to drive the pressing plate 17 to move, the pressing plate 17 moves to be attached to the heating sheet main body 4, the rotating plate 15 continues to rotate to enable the heating sheet main body 4 to reversely extrude the pressing plate 17, so that the first spring 16 generates elastic force, the elastic force of the first spring 16 facilitates the pressing plate 17 to extrude and fix the heating sheet main body 4, the rotating plate 15 rotates to drive the first limiting groove to move, when the first limiting groove moves to be aligned with the first accommodating groove 22, the user pushes the, the T-shaped rod 19 moves to drive the limiting block 21 to move and separate from the magnetic block 23, under the action of the elastic force of the second spring 20, the T-shaped rod 19 drives the limiting block 21 to move, the limiting block 21 moves into the first limiting groove, and the position of the rotating plate 15 is fixed;
(3) a user rotates the oval block 7, the oval block 7 rotates to drive the rotating pin 10 to rotate, the rotating pin 10 rotates to extrude the return coil spring I9, so that the first reset coil spring 9 generates elastic force, the rotating pin 10 rotates to drive the first magnetic block 11 to move, the first magnetic block 11 is attached to the second magnetic block 12, the adsorption force between the first magnetic block 11 and the second magnetic block 12 is greater than the elastic force of the first reset coil spring 9, and the elliptical block 7 is aligned with the elliptical rod 6, the user then installs the disc 5 inside the cylinder 2, so that the oval rod 6 is installed inside the oval hole on the disc 5, then a user reversely rotates the elliptical block 7, so that the rotating pin 10 rotates to drive the first magnetic block 11 to be separated from the second magnetic block 12, under the action of the elastic force of the first reset coil spring 9, the oval block 7 rotates to restore the original position and is attached to the disc 5, and then the disc 5 and the heating plate main body 4 are installed;
(4) the user turns on the adjusting switch, so that the external power supply is connected with the heating sheet main body 4, and the heating sheet main body 4 is electrified to work.
When the disc heater is used, the disc 5 is arranged in the cylinder 2, the elliptic rod 6 is arranged in the elliptic hole on the disc 5, then a user reversely rotates the elliptic block 7, the rotating pin 10 rotates to drive the first magnetic block 11 and the second magnetic block 12 to be separated, and under the action of the elastic force of the first reset coil spring 9, the elliptic block 7 rotates to restore the original position and is attached to the disc 5, so that the disc 5 and the heating plate main body 4 are installed.
The rotating plate 15 rotates to drive the pressing plate 17 to move, the pressing plate 17 moves to be attached to the heating sheet main body 4, the rotating plate 15 continues to rotate to enable the heating sheet main body 4 to reversely extrude the pressing plate 17, the first spring 16 generates elastic force, the first spring 16 enables the pressing plate 17 to extrude and fix the heating sheet main body 4 conveniently, the rotating plate 15 rotates to drive the first limiting groove to move, when the first limiting groove moves to be aligned with the first accommodating groove 22, a user pushes the T-shaped rod 19, the T-shaped rod 19 moves to drive the limiting block 21 to move to be separated from the magnetic square 23, under the action of the second spring 20, the T-shaped rod 19 drives the limiting block 21 to move, the limiting block 21 moves to enter the first limiting groove, and the position of the rotating plate 15 is fixed.
Installing end cover 1 on drum 2, then using personnel twists bolt 26, bolt 26 moves along nut 27, and bolt 26 moves and extrudes fixture block 31, and fixture block 31 receives the extrusion and moves, and fixture block 31 moves and stretches spring three 30 for spring three 30 produces elasticity, and the automatic back-off of fixture block 31 is convenient for to spring three 30's elasticity, and fixture block 31 moves inside getting into spacing groove two 29, and then installs end cover 1 on drum 2.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
The above-mentioned embodiments are only used for illustrating the technical solutions of the present invention, and not for limiting the same; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (10)
1. The utility model provides a MOCVD heater source convenient to installation heating plate which characterized in that: the heating plate comprises an end cover (1), a cylinder (2), a support frame (3), a heating plate main body (4), a disc (5), an installation mechanism, a fitting mechanism and a connection mechanism, wherein the cylinder (2) is installed at the top end of the support frame (3), the end cover (1) is installed at the top end of the cylinder (2), the disc (5) is installed at the bottom end inside the cylinder (2), and the heating plate main body (4) is installed on the disc (5);
the mounting mechanism comprises an elliptical rod (6), an elliptical block (7), a circular groove (8), a first reset coil spring (9), a rotating pin (10), a first magnetic block (11) and a second magnetic block (12), an elliptic rod (6) is fixedly arranged at the bottom end inside the cylinder (2), an elliptic block (7) is arranged at the top end of the elliptic rod (6), the elliptic rod (6) is arranged inside the disc (5), the bottom end of the elliptic block (7) is jointed with the top end of the disc (5), the top end of the elliptic rod (6) is provided with a circular groove (8), a rotating pin (10) is fixedly arranged at the bottom end of the oval block (7), a first reset coil spring (9) is arranged on the annular side surface of the rotating pin (10), the outer side of the reset coil spring I (9) is fixedly arranged in the circular groove (8), a magnetic block II (12) is fixedly arranged in the circular groove (8), and a magnetic block I (11) is arranged on the annular side surface of the rotating pin (10);
the laminating mechanism comprises a first fixing rod (14), a rotating plate (15), a first spring (16), a pressing plate (17) and a second fixing rod (18), wherein the two first fixing rods (14) and the two second fixing rods (18) are symmetrically arranged on the left side and the right side of the heating sheet main body (4), the rotating plate (15) is arranged between the two first fixing rods (14), the first spring (16) is fixedly arranged at the bottom end of the rotating plate (15), the bottom end of the first spring (16) is fixedly arranged on the pressing plate (17), the bottom end of the pressing plate (17) is laminated with the heating sheet main body (4), one end of the rotating plate (15) is located between the two second fixing rods (18), and the bottom ends of the first fixing rod (14) and the second fixing rod (18) are fixedly arranged on the disc (5;
the connecting mechanism comprises a bolt (26), a nut (27), a second accommodating groove (28), a second limiting groove (29), a third spring (30) and a clamping block (31), wherein the two bolts (26) are symmetrically installed on the annular side surface of the end cover (1), the nut (27) is installed on the annular side surface of the bolt (26), the outer side of the nut (27) is fixedly installed on the end cover (1), the two second accommodating grooves (28) are symmetrically formed in the end cover (1), the third spring (30) is fixedly installed in the second accommodating groove (28), one end of the third spring (30) is fixedly installed on the clamping block (31), one end of the clamping block (31) extends to the inside of the second accommodating groove (28), one end of the bolt (26) extends to the inside of the second accommodating groove (28) and is attached to the clamping block (31), the two second limiting grooves (29) are symmetrically formed in the annular side surface of the cylinder (2), and the second limiting groove (29) is aligned with the second accommodating groove (28), and one end of the clamping block (31) extends into the second limiting groove (29).
2. The MOCVD heater source for facilitating mounting of heater blades according to claim 1, wherein: install bearing (13) on kingpin (10) annular side, and inside bearing (13) outside fixed mounting in circular slot (8), four elliptical orifices of disc (5) one end uniform mount, and elliptical orifice internally mounted elliptical rod (6).
3. The MOCVD heater source for facilitating mounting of heater blades according to claim 1, wherein: the four mounting mechanisms are arranged and have the same structure, and are uniformly mounted on the disc (5).
4. The MOCVD heater source for facilitating mounting of heater blades according to claim 1, wherein: t type pole (19) is installed to dead lever two (18) one end, install spring two (20) on T type pole (19) annular side, and spring two (20) both ends respectively fixed mounting on T type pole (19) and dead lever two (18), dead lever two (18) is passed to T type pole (19) one end, and T type pole (19) one end fixed mounting stopper (21).
5. The MOCVD heater source for facilitating mounting of heater blades according to claim 4, wherein: one end of the second fixing rod (18) is provided with a first accommodating groove (22), the first accommodating groove (22) is fixedly provided with a magnetic square (23), one end of the limiting block (21) extends to the inside of the first accommodating groove (22), the rotating plate (15) is symmetrically provided with two limiting grooves, and one end of the limiting block (21) extends to the inside of the limiting grooves.
6. The MOCVD heater source for facilitating mounting of heater blades according to claim 1, wherein: the fixing rod I (14) is provided with two fixing rods I (14), a fixing pin (24) is fixedly installed between the two fixing rods I (14), a rotating plate (15) and a second reset coil spring (25) are installed on the annular side face of the fixing pin (24), and the outer side of the second reset coil spring (25) is fixedly installed inside the rotating plate (15).
7. The MOCVD heater source for facilitating mounting of heater blades according to claim 1, wherein: the laminating mechanism is provided with more than two groups, more than two groups the laminating mechanism has the same structure, and more than two groups the laminating mechanism is uniformly arranged on the disc (5).
8. The MOCVD heater source for facilitating mounting of heater blades according to claim 1, wherein: the connecting mechanisms are arranged in two groups, the two groups of connecting mechanisms are identical in structure, and the two groups of connecting mechanisms are symmetrically arranged on the annular side face of the end cover (1).
9. The MOCVD heater source for facilitating mounting of heater blades according to claim 1, wherein: the support frame (3) is provided with an adjusting switch, one end of the adjusting switch is electrically connected with the heating plate main body (4), and one end of the adjusting switch is electrically connected with an external power supply through a wire.
10. An MOCVD heater source for facilitating installation of a heater chip according to any one of claims 1-9 to derive an MOCVD heater source use method, wherein: the operation method comprises the following steps:
(1) a user pulls the T-shaped rod (19), the T-shaped rod (19) moves to drive the limiting block (21) to move, the limiting block (21) moves to enter the first accommodating groove (22), the limiting block (21) moves to be attached to the magnetic square (23), the T-shaped rod (19) moves to stretch the second spring (20), the second spring (20) is stretched to generate elastic force, the elastic force of the second spring (20) is smaller than the adsorption force between the magnetic square (23) and the limiting block (21), and then the limiting block (21) is accommodated in the first accommodating groove (22);
(2) a user places the heating sheet main body (4) on the disc (5) to enable the heating sheet main body (4) to be located between the first fixing rod (14) and the second fixing rod (18), then the user rotates the rotating plate (15), the rotating plate (15) rotates around the fixing pin (24), the rotating plate (15) compresses the second reset coil spring (25), the second reset coil spring (25) generates elastic force, the elastic force of the second reset coil spring (25) facilitates the rotating and resetting of the rotating plate (15), the rotating plate (15) rotates to drive the pressing plate (17) to move, the pressing plate (17) moves to be attached to the heating sheet main body (4), the rotating plate (15) continues to rotate to enable the heating sheet main body (4) to reversely extrude the pressing plate (17), the first spring (16) generates elastic force, the elastic force of the first spring (16) facilitates the pressing plate (17) to extrude and fix the heating sheet main body (4), the rotating plate (15) rotates to drive the first limiting groove to move, when the first limiting groove moves to be aligned with the first accommodating groove (22), a user pushes the T-shaped rod (19), the T-shaped rod (19) moves to drive the limiting block (21) to move and separate from the magnetic block (23), under the action of the elastic force of the second spring (20), the T-shaped rod (19) drives the limiting block (21) to move, and the limiting block (21) moves into the first limiting groove to further fix the position of the rotating plate (15);
(3) a user rotates the oval block (7), the oval block (7) rotates to drive the rotating pin (10) to rotate, the rotating pin (10) rotates to extrude the reset coil spring I (9), the reset coil spring I (9) generates elastic force, the rotating pin (10) rotates to drive the magnetic block I (11) to move, the magnetic block I (11) is attached to the magnetic block II (12), the adsorption force between the magnetic block I (11) and the magnetic block II (12) is larger than the elastic force of the reset coil spring I (9), the oval block (7) is aligned to the oval rod (6), then the user installs the disc (5) inside the cylinder (2), the oval rod (6) is installed inside the oval hole in the disc (5), then the user reversely rotates the oval block (7), the rotating pin (10) rotates to drive the magnetic block I (11) to be separated from the magnetic block II (12), and under the action of the elastic force of the reset coil spring I (9), the oval block (7) rotates to recover the original position and is attached to the disc (5), and then the disc (5) and the heating plate main body (4) are installed;
(4) the user turns on the adjusting switch, so that the external power supply is connected with the heating sheet main body (4), and the heating sheet main body (4) is electrified to work.
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| CN201911104941.9A CN110656372B (en) | 2019-11-13 | 2019-11-13 | MOCVD (metal organic chemical vapor deposition) heater source convenient for mounting heating sheet and using method thereof |
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| CN201911104941.9A CN110656372B (en) | 2019-11-13 | 2019-11-13 | MOCVD (metal organic chemical vapor deposition) heater source convenient for mounting heating sheet and using method thereof |
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| CN111153741A (en) * | 2020-03-10 | 2020-05-15 | 江苏省农业科学院 | A kind of raw material mixing device for slow-release fertilizer production |
| CN111969487B (en) * | 2020-08-18 | 2021-08-10 | 广东电网有限责任公司肇庆供电局 | Bird nest cleaning device for power line tower |
| CN112530060B (en) * | 2020-12-02 | 2022-11-11 | 杭州立方控股股份有限公司 | Access control system suitable for multi-authority management |
| CN113444554A (en) * | 2021-06-29 | 2021-09-28 | 丰县立华牧业有限公司 | Marsh gas pressure balance filter equipment that animal husbandry excrement fermentation was handled and is used |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102127757A (en) * | 2011-01-14 | 2011-07-20 | 映瑞光电科技(上海)有限公司 | Metal organic chemical vapor deposition (MOCVD) reaction system |
| CN102851652A (en) * | 2012-09-28 | 2013-01-02 | 深圳市捷佳伟创新能源装备股份有限公司 | Heater for MOCVD (metal-organic chemical vapor deposition) equipment |
| JP6361495B2 (en) * | 2014-12-22 | 2018-07-25 | 東京エレクトロン株式会社 | Heat treatment equipment |
| CN208330935U (en) * | 2018-04-15 | 2019-01-04 | 江苏实为半导体科技有限公司 | The thermal insulation board fastening assembly of MOCVD heater |
| CN208362460U (en) * | 2018-05-23 | 2019-01-11 | 江苏实为半导体科技有限公司 | Generate heat uniform MOCVD heater heating sheet |
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Denomination of invention: A MOCVD heater source for easy installation of heating pads and its usage method Effective date of registration: 20230511 Granted publication date: 20210525 Pledgee: China Postal Savings Bank Co.,Ltd. Pizhou sub branch Pledgor: JIANGSU SHIWEI SEMICONDUCTOR TECHNOLOGY CO.,LTD. Registration number: Y2023320000261 |
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