CN110649451A - Spark gap switch - Google Patents

Abstract

The invention discloses a spark gap switch, which comprises a first intake pipeline, a second intake pipeline, a switch main body, a first exhaust pipeline, a second exhaust pipeline and a fan. The air pipelines are all set at the air outlet of the fan, the first exhaust pipeline and the second exhaust pipeline are both set at the air return port of the fan, and the first intake pipeline and the first exhaust pipeline are set at the trigger electrode of the switch body On one side, the second intake pipeline and the second exhaust pipeline are arranged on the other side of the trigger electrode of the switch main body. The spark gap switch provided by the present invention is designed with a first intake pipeline, a first exhaust pipeline, a second intake pipeline, a second exhaust pipeline and a cooling device, and the nitrogen inside the spark gap switch is circulated and cooled by a fan. Cooling avoids the problem of high temperature of the working gas caused by the high-voltage discharge of the fixed nitrogen gas by the spark gap switch, effectively protects the service life of the spark gap switch, and ensures the performance of the pulsed gas laser.

Description

A spark gap switch

technical field

The invention relates to the technical field of lasers, in particular to a spark gap switch and a pulsed gas laser.

Background technique

The spark gap switch uses the high voltage loaded on the switch electrode to perform arc discharge on the working gas, and controls the conduction/closure of the switch through the discharge to realize the output frequency control of high-power pulsed systems such as high-power pulsed gas lasers. The spark gap switch has the advantages of high voltage and current, fast discharge speed, strong impact resistance, high reliability, and strong anti-interference ability, and is widely used in high-power pulsed gas laser systems.

When the existing spark gap switch is used in the field of high-power pulsed gas lasers, in order to meet the requirements of high repetition frequency and narrow pulse width of the output laser, the spark gap switch needs to repeat the on/off process quickly and repeatedly in a short period of time, which makes the The discharge recovery time of the spark gap switch is short, the temperature of the working gas rises sharply, the discharge is unstable, and the phenomenon of continuous arc discharge occurs. Unstable discharge and continuous arc discharge will cause the laser output laser repetition frequency and laser power to be unstable, which will affect the performance of high-power pulsed gas lasers. Severe continuous arc discharge will cause serious damage to the electrodes and other components of the spark gap switch, significantly reducing the spark. The service life of the gap switch.

Therefore, how to avoid the phenomenon of unstable discharge and continuous arc discharge of the spark gap switch is a technical problem to be solved urgently by those skilled in the art.

SUMMARY OF THE INVENTION

The purpose of the present invention is to provide a spark gap switch, which can recover the working gas of the spark gap switch in a relatively short time and make the working gas in the discharge region have The high flow speed can effectively avoid the continuous arc discharge phenomenon, so that the spark gap switch has high discharge stability. Another object of the present invention is to provide a pulsed gas laser, including the above-mentioned spark gap switch. By using the above-mentioned spark gap switch, the influence of the discharge of the spark gap switch on the working gas can be effectively ensured when the pulsed gas laser is in operation, and the effect of the discharge of the pulsed gas laser on the working gas can be ensured. performance, and protect the service life of the pulsed gas laser.

In order to solve the above technical problems, the present invention provides a spark gap switch and a pulsed gas laser, including a first intake pipeline, a second intake pipeline, a switch body, a first exhaust pipeline, a second exhaust pipeline and a fan. , the first intake pipeline and the second intake pipeline are both arranged at the air outlet of the fan, and the first exhaust pipeline and the second exhaust pipeline are both arranged at the air outlet of the fan The air return port, the first intake line and the first exhaust line are arranged on the trigger electrode side of the switch main body, and the second intake line and the second exhaust line are arranged at the on the other side of the trigger electrode of the switch body.

Preferably, it also includes a cooling device disposed at the air outlet of the fan.

Preferably, a fan adapter is installed at the air outlet of the fan.

Preferably, the switch body further comprises an upper electrode, a lower electrode and a switch wall, the upper electrode and the lower electrode are respectively located on both sides of the trigger electrode, and the switch wall is wound around the trigger electrode and the switch wall. The outer periphery of the upper electrode and the lower electrode is used to form a discharge area.

Preferably, the trigger electrode, the upper electrode and the switch wall form a switch upper gap, and the width of the openings at both ends of the switch upper gap is larger than the middle width of the switch upper gap.

Preferably, the first air intake pipeline and the first exhaust pipeline are respectively correspondingly provided at the openings at both ends of the upper gap of the switch.

Preferably, the trigger electrode, the lower electrode and the switch wall form a switch lower gap, and the width of the openings at both ends of the switch lower gap is larger than the middle width of the switch lower gap.

Preferably, the second intake pipeline and the second exhaust pipeline are respectively correspondingly provided at the openings at both ends of the lower gap of the switch.

Another object of the present invention is to provide a pulsed gas laser comprising a power source, an electrode, a mirror and a switch, wherein the switch is the spark gap switch described in any one of the above.

The spark gap switch provided by the present invention mainly includes a first intake pipeline, a second intake pipeline, a switch main body, a first exhaust pipeline, a second exhaust pipeline and a fan. The air intake pipelines are all set at the air outlet of the fan, the first exhaust pipeline and the second exhaust pipeline are both set at the air return opening of the fan, and the first intake pipeline and the first exhaust pipeline are set at the trigger of the switch body. On one side of the electrode, the second intake pipeline and the second exhaust pipeline are arranged on the other side of the trigger electrode of the switch main body. In the spark gap switch provided by the present invention, the first intake pipeline, the first exhaust pipeline, the second intake pipeline and the second exhaust pipeline are designed, and the nitrogen gas inside the spark gap switch is circulated and supplied to the spark by the fan. The use of the gap switch avoids the problem of excessive nitrogen gas temperature caused by the breakdown of the spark gap switch through fixed nitrogen in the prior art, effectively protects the service life of the spark gap switch, and at the same time ensures the use of the spark gap switch. life. The application also discloses a pulsed gas laser, including a power source, an electrode, a mirror and a switch. The switch is the above-mentioned spark gap switch. The spark gap switch has a gas circulation mode and a discharge area structure, which protects the service life of the spark gap switch itself. , to avoid the continuous arc discharge phenomenon of the spark gap switch during the working process of the pulsed gas laser, and to ensure the performance of the pulsed gas laser.

Another object of the present invention is to provide a pulsed gas laser, including the above-mentioned spark gap switch. By using the above-mentioned spark gap switch, the influence of the discharge of the spark gap switch on the inert gas during the operation of the pulsed gas laser can be effectively ensured, and the performance of the pulsed gas laser can be guaranteed. performance, and protect the service life of the pulsed gas laser.

Description of drawings

In order to explain the embodiments of the present invention or the technical solutions in the prior art more clearly, the following briefly introduces the accompanying drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only It is an embodiment of the present invention. For those of ordinary skill in the art, other drawings can also be obtained according to the provided drawings without creative work.

1 is a schematic diagram of the overall structure of a specific embodiment provided by the present invention;

FIG. 2 is a schematic diagram of the internal structure of the switch body shown in FIG. 1 .

Among them, in Figure 1-Figure 2:

The first intake line-1, the second intake line-2, the switch body-3, the trigger electrode-301, the upper electrode-302, the lower electrode-303, the switch wall-304, the first exhaust line-4, The second exhaust line-5, the fan-6, the cooling device-7, the fan-connecting device-8.

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

Please refer to FIG. 1 and FIG. 2 , FIG. 1 is a schematic diagram of the overall structure of a specific embodiment provided by the present invention; FIG. 2 is a schematic diagram of the internal structure of the switch body shown in FIG. 1 . Among them, the arrow in the figure indicates the gas flow direction.

In a specific embodiment provided by the present invention, the spark gap switch and the pulsed gas laser mainly include a first intake line 1 , a second intake line 2 , a switch body 3 , a first exhaust line 4 , and a second The exhaust pipe 5 and the fan 6, the first intake pipe 1 and the second intake pipe 2 are all arranged at the air outlet of the fan 6, and the first exhaust pipe 4 and the second exhaust pipe 5 are both arranged at the fan. 6, the first intake line 1 and the first exhaust line 4 are arranged on the trigger electrode 301 side of the switch body 3, and the second intake line 2 and the second exhaust line 5 are arranged on the switch body 3 on the other side of the trigger electrode 301.

Among them, the first air intake line 1 and the second air intake line 2 are both arranged at the air outlet of the fan 6, the first exhaust line 4 and the second exhaust line 5 are both arranged at the air return port of the fan 6, and the first The intake pipeline 1 and the first exhaust pipeline 4 are arranged on one side of the trigger electrode 301 of the switch main body 3 , and the second intake pipeline 2 and the second exhaust pipeline 5 are arranged on the other side of the trigger electrode 301 of the switch main body 3 . ; The first intake line 1 and the first exhaust line 4 are arranged on the side of the trigger electrode 301 of the switch body 3 for gas circulation on the upper gap of the trigger electrode 301, and the second intake line 2 and the second exhaust line The pipeline 5 is arranged on the other side of the trigger electrode 301 of the switch main body 3, and is used for gas circulation in the gap under the trigger electrode 301, and the fan 6 is used for the overall circulation power of the gas inside the spark gap switch.

Specifically, in the actual application process, first, the working gas output by the fan 6 is evenly divided into two paths through the fan adapter structure, that is, the first air inlet pipe 1 and the second air inlet pipe 2 respectively enter the switch body 3 respectively. The trigger electrode 301 and the upper electrode 302 and the switch wall 304 form the upper gap of the switch and the trigger electrode 301, the lower electrode 303 and the switch wall 304 form the lower gap of the switch and participate in the discharge; the temperature of the working gas increases due to the high voltage discharge, at this time, the fan 6. Pull out the high-temperature gas after the discharge, enter the first exhaust line 4 and the second exhaust line 5 for circulation and natural cooling, and then input the fan 6 to participate in the switch discharge. The inside of the switch body 3 causes damage to the components. On the other hand, the temperature of the working gas entering the switch body 3 to participate in the discharge is kept in a suitable temperature range, so as to avoid the unstable discharge caused by the high temperature of the working gas, and improve the spark gap switch. The working stability of the high-power pulsed gas laser is further improved.

In order to optimize the advantage that the spark gap switch in the above embodiment can better avoid the continuous arc discharge phenomenon and enhance the cooling effect of the gas after the discharge, the spark gap switch also includes a cooling device 7 arranged at the air outlet of the fan 6 . Considering the actual working conditions of the spark gap switch, in order to meet the requirements of high repetition frequency and narrow pulse width of the output laser, the spark gap switch needs to repeat the conduction and closing process quickly and repeatedly in a short period of time. A cooling device 7 is arranged between the outlet of the working gas of 3 and the fan 6. When the working gas that has undergone the discharge operation is drawn out by the fan 6, it first passes through the cooling device 7 to cool the working gas, so that the temperature of the working gas is significantly reduced. It can be maintained in a working range most suitable for discharge operations, and the working stability of the spark gap switch can be improved, thereby improving the working stability of the high-power pulsed gas laser.

Combined with the actual working conditions of the spark gap switch, the upper gap and the lower gap of the trigger electrode 301 of the spark gap switch need to be discharged at the same time to achieve the ideal breakdown effect. Therefore, a fan adapter is installed at the air outlet of the fan 6 8. The switching device 8 can distribute the working gas output by the fan 6 evenly, so that the working gas flow into the upper and lower gaps of the trigger electrode 301 is uniform, so that the discharge process of the upper electrode 302 and the lower electrode 303 is more stable. , there will be no breakdown or continuous arc discharge caused by more or less working gas, which improves the working stability of the spark gap switch, thereby improving the working stability of the high-power pulsed gas laser.

Further, the switch body 3 further includes an upper electrode 302, a lower electrode 303 and a switch wall 304, the upper electrode 302 and the lower electrode 303 are respectively located on both sides of the trigger electrode 301, and the switch wall 304 is wound around the trigger electrode 301, the upper electrode 302 and the lower The periphery of the electrode 303 is used to form a discharge region. Since the working environment of the spark gap switch is a high-voltage discharge environment, when the high-voltage discharge breaks down the working gas, it will produce extremely strong destructive ability. The outer periphery forms a special discharge area, which can reduce the impact of high-voltage discharge on other components, better protect the spark gap switch, and increase the working stability of the spark gap switch, thereby improving the work of high-power pulsed gas lasers. stability.

Combined with the above switch wall 304, the trigger electrode 301, the upper electrode 302 and the switch wall 304 form a gap on the switch, and the width of the openings at both ends of the gap on the switch is larger than the width of the middle part of the gap on the switch; the first intake pipe 1 and the first exhaust pipe The paths 4 are respectively correspondingly arranged at the openings at both ends of the upper gap of the switch. The above design can ensure that the discharge area forms a structure with a wide working gas inlet, a wide outlet and a narrow discharge area on the mechanical structure. The working gas entering this structure obtains the maximum speed in the discharge area, and the high-speed flowing working gas has a strong The arc breaking ability can reduce the phenomenon of continuous arc discharge and improve the working stability of the spark gap switch, thereby improving the working stability of the high-power pulsed gas laser.

Further, the trigger electrode 301, the lower electrode 303 and the switch wall 304 form a gap under the switch, and the width of the openings at both ends of the gap under the switch is greater than the width of the middle part of the gap under the switch; the second intake line 2 and the second exhaust line 5 are respectively The openings at both ends of the gap under the switch are correspondingly arranged. Similarly, like the upper gap structure, this design can ensure that the discharge area forms a structure with a working gas inlet, a wide outlet, and a narrow discharge area on the mechanical structure. The flowing working gas has a strong arc breaking ability, which can reduce the phenomenon of continuous arc discharge and improve the working stability of the spark gap switch, thereby improving the working stability of the high-power pulsed gas laser.

The application also discloses a pulsed gas laser, which includes a power source, an electrode, a mirror and a switch, and the switch is a spark gap switch. The spark gap switch has a gas circulation mode and a discharge area structure, which protects the service life of the spark gap switch itself, avoids the continuous arc discharge phenomenon of the spark gap switch during the working process of the pulsed gas laser, and ensures the performance of the pulsed gas laser.

To sum up, the spark gap switch and the pulsed gas laser provided in this embodiment mainly include a first intake pipeline, a second intake pipeline, a switch main body, a first exhaust pipeline, a second exhaust pipeline and a fan , the first intake pipe and the second intake pipe are both arranged at the air outlet of the fan, the first exhaust pipe and the second exhaust pipe are both arranged at the air return port of the fan, the first intake pipe and the first row The gas pipeline is arranged on one side of the trigger electrode of the switch main body, and the second intake pipeline and the second exhaust pipeline are arranged on the other side of the trigger electrode of the switch main body. In the spark gap switch provided by the present invention, the first intake pipeline, the first exhaust pipeline, the second intake pipeline and the second exhaust pipeline are designed, and the nitrogen gas inside the spark gap switch is circulated and supplied to the spark by the fan. The use of the gap switch avoids the problem of excessive nitrogen gas temperature caused by the breakdown of the spark gap switch through fixed nitrogen in the prior art, effectively protects the service life of the spark gap switch, and at the same time ensures the use of the spark gap switch. life.

The above description of the disclosed embodiments enables any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (9)

1. The utility model provides a spark gap switch, its characterized in that includes first air inlet pipeline (1), second air inlet pipeline (2), switch main part (3), first exhaust pipeline (4), second exhaust pipeline (5) and fan (6), first air inlet pipeline (1) with second air inlet pipeline (2) all set up the air outlet of fan (6), first exhaust pipeline (4) with second exhaust pipeline (5) all set up the return air inlet of fan (6), first air inlet pipeline (1) with first exhaust pipeline (4) set up in trigger electrode (301) one side of switch main part (3), second air inlet pipeline (2) with second exhaust pipeline (5) set up in trigger electrode (301) opposite side of switch main part (3).

2. The spark gap switch according to claim 1, further comprising a cooling device (7) arranged at the air outlet of the fan (6).

3. The spark gap switch according to claim 2, wherein a fan adapter (8) is mounted at the air outlet of the fan (6).

4. The spark gap switch according to any one of claims 1 to 3, wherein the switch body (3) further comprises an upper electrode (302), a lower electrode (303), and a switch wall (304), the upper electrode (302) and the lower electrode (303) are respectively located at two sides of the trigger electrode (301), and the switch wall (304) is wound around the outer peripheries of the trigger electrode (301), the upper electrode (302), and the lower electrode (303) to form a discharge region.

5. The spark gap switch as claimed in claim 4, wherein said trigger electrode (301) forms an upper switch gap with said upper electrode (302) and said switch wall (304), and the width of the opening at both ends of said upper switch gap is larger than the width of the middle of said upper switch gap.

6. The spark gap switch as claimed in claim 5, wherein said first intake line (1) and said first exhaust line (4) are respectively provided at both end openings of the gap on said switch in correspondence.

7. The spark gap switch as claimed in claim 4, wherein said trigger electrode (301) forms a lower switch gap with said lower electrode (303) and said switch wall (304), and the width of the opening at both ends of said lower switch gap is larger than the width of the middle of said lower switch gap.

8. Spark gap switch according to claim 7, characterized in that the second inlet line (2) and the second outlet line (5) are respectively provided at the two end openings of the lower gap of the switch in correspondence.

9. A pulsed gas laser comprising a power supply, electrodes, a mirror and a switch, characterized in that the switch is a spark gap switch as claimed in any one of claims 1 to 8.

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