CN110607501B - Barium titanate-strontium ruthenate nano composite film material and preparation method thereof - Google Patents
Barium titanate-strontium ruthenate nano composite film material and preparation method thereof Download PDFInfo
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- 239000000463 material Substances 0.000 title claims abstract description 79
- 229910052712 strontium Inorganic materials 0.000 title claims abstract description 79
- 239000002114 nanocomposite Substances 0.000 title claims abstract description 58
- 229910052788 barium Inorganic materials 0.000 title claims abstract description 46
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 title claims abstract description 45
- 238000002360 preparation method Methods 0.000 title claims abstract description 10
- 239000010408 film Substances 0.000 claims abstract description 73
- 229910002113 barium titanate Inorganic materials 0.000 claims abstract description 39
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 claims abstract description 36
- 239000010409 thin film Substances 0.000 claims abstract description 27
- 230000010287 polarization Effects 0.000 claims abstract description 25
- 239000002105 nanoparticle Substances 0.000 claims abstract description 9
- 239000002131 composite material Substances 0.000 claims abstract description 7
- 239000011159 matrix material Substances 0.000 claims abstract description 7
- 229910004121 SrRuO Inorganic materials 0.000 claims abstract description 3
- 239000000758 substrate Substances 0.000 claims description 35
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 claims description 33
- 238000000151 deposition Methods 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 18
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 16
- 239000013078 crystal Substances 0.000 claims description 16
- 229910052760 oxygen Inorganic materials 0.000 claims description 13
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 11
- 239000001301 oxygen Substances 0.000 claims description 11
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 8
- 239000013077 target material Substances 0.000 claims description 7
- 230000008021 deposition Effects 0.000 claims description 6
- 229910002367 SrTiO Inorganic materials 0.000 claims description 5
- 238000004549 pulsed laser deposition Methods 0.000 claims description 4
- 238000011065 in-situ storage Methods 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 229910002353 SrRuO3 Inorganic materials 0.000 abstract description 13
- 239000003990 capacitor Substances 0.000 abstract 1
- 229910002372 SrTiO3(001) Inorganic materials 0.000 description 10
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 7
- 238000000137 annealing Methods 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 238000009210 therapy by ultrasound Methods 0.000 description 5
- 238000002156 mixing Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 229910002370 SrTiO3 Inorganic materials 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- 230000015654 memory Effects 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000004321 preservation Methods 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052574 oxide ceramic Inorganic materials 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910002244 LaAlO3 Inorganic materials 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 230000006399 behavior Effects 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 239000003985 ceramic capacitor Substances 0.000 description 1
- JOPOVCBBYLSVDA-UHFFFAOYSA-N chromium(6+) Chemical compound [Cr+6] JOPOVCBBYLSVDA-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000000383 hazardous chemical Substances 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000008204 material by function Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000010897 surface acoustic wave method Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
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Abstract
本发明提供了一种钛酸钡‑钌酸锶纳米复合薄膜材料及其制备方法，所述材料组成的体积比为SrRuO3:2～9％，BaTiO3:91～98％，该材料微结构的特点是SrRuO3纳米粒子均匀地分布在BaTiO3基体上。本发明的钛酸钡‑钌酸锶纳米复合薄膜材料的优点为：介电常数与纯钛酸钡薄膜相比增加了10～24％；并且具有良好的铁电极化性能，其剩余极化强度达到40.3μC/cm2，饱和极化强度达到47.8μC/cm2，与钛酸钡薄膜对比剩余极化强度提高了950％，饱和极化强度提高了140％。该复合薄膜作为无铅铁电材料在铁电随机存储器、薄膜电容器、传感器、致动器等集成铁电器件上具有广阔的应用前景。
The invention provides a barium titanate-strontium ruthenate nanocomposite thin film material and a preparation method thereof. The volume ratio of the material is SrRuO 3 : 2-9%, BaTiO 3 : 91-98%, and the microstructure of the material is The characteristic is that the SrRuO3 nanoparticles are uniformly distributed on the BaTiO3 matrix. The advantages of the barium titanate-strontium ruthenate nanocomposite thin film material of the present invention are that the dielectric constant is increased by 10-24% compared with the pure barium titanate thin film; Compared with the barium titanate film, the remanent polarization is increased by 950%, and the saturation polarization is increased by 140%. The composite film, as a lead-free ferroelectric material, has broad application prospects in integrated ferroelectric devices such as ferroelectric random access memory, thin film capacitors, sensors, and actuators.
Description
Technical Field
The invention belongs to the field of electronic information materials, functional materials and intelligent materials, and particularly relates to a barium titanate-strontium ruthenate nano composite film material and a preparation method thereof.
Background
The ferroelectric film has excellent ferroelectric, piezoelectric, dielectric and photoelectric electrical properties, and is widely applied to integrated ferroelectric devices such as data memories, field effect transistors, surface acoustic wave devices, sensors and actuators. At present, lead zirconate titanate (Pb (Zr) is a common ferroelectric materialxTi1-x)O3PZT) is a representative lead-based oxide ceramic material, and the content of PbO in the lead-based oxide ceramic material is about 70% of the total amount of the raw materials. There is a risk of serious pollution to the ecological environment during the production, use and disposal of lead-based ferroelectric materials. In the directive on "hazardous substance restriction in electrical and electronic equipment" that the european parliament has passed, lead-containing ferroelectric, piezoelectric materials are substances that are restricted in use. The information industry department of China also requires that harmful substances such as lead, mercury, cadmium, hexavalent chromium and the like are not contained in electronic information products in the key pollution prevention and treatment catalogues of the electronic information products. Therefore, with the increasing awareness of environmental protection and the concept of sustainable development of human society, the lead-free ferroelectric material has become one of the key materials vigorously developed by various major scientific research countries in the world.
In recent years, there have been significant advances in the development and application of lead-free ferroelectric materials. However, compared with the traditional lead-based ferroelectric materials of PZT series, the performances of ferroelectric, piezoelectric, dielectric and photoelectric materials of the lead-free ferroelectric materials have larger differences. Therefore, how to develop a lead-free ferroelectric material with high performance to make the performance thereof comparable to that of the traditional PZT lead-based ferroelectric material has become a key problem of whether the lead-free ferroelectric material can replace the lead-containing ferroelectric material. The development of a novel lead-free ferroelectric film material can greatly improve the ferroelectric, piezoelectric, dielectric and photoelectric properties of the lead-free ferroelectric film material, and undoubtedly promote the application of the lead-free ferroelectric material in integrated ferroelectric devices.
Barium titanate is a typical lead-free ferroelectric material that has not found wide industrial application other than its use as a dielectric material in multilayer ceramic capacitors. The reason is that the ferroelectric polarization performance of barium titanate is low, and is generally only 5-7 μ C/cm2Compared with PZT lead-based ferroelectric materials, the material is far from the prior art. Therefore, it is of great interest to improve the ferroelectric, piezoelectric, dielectric and photoelectric properties of barium titanate and barium titanate-based lead-free ferroelectric materials, so that they can replace lead-containing ferroelectric materials such as PZT. Strontium ruthenate is a metal conductive oxide and is often used as an electrode material for ferroelectric thin films due to its good conductivity. A prerequisite for ferroelectric materials to have good ferroelectric, piezoelectric, dielectric and optoelectronic properties is that they must have good insulating properties. In general, when a second phase having metal conductivity, such as strontium ruthenate, is added to a ferroelectric material, the ferroelectric material has a decreased insulating property, and thus a relatively large leakage current is generated, and thus the ferroelectric material does not have good ferroelectric properties. In the prior art, strontium ruthenate is often used as a bottom electrode layer, but we find that if strontium ruthenate particles are controlled to be several nanometers to dozens of nanometers and are uniformly dispersed in a barium titanate matrix, the convention can be broken, and a barium titanate-based nano composite film with excellent ferroelectric and dielectric properties can be prepared, which is undoubtedly of great significance for the development and application of lead-free ferroelectric film materials.
The pulsed laser deposition method is one of the main methods for producing high-quality oxide epitaxial thin films. In the process of preparing the barium titanate-strontium ruthenate nano composite film material by using a pulse laser deposition method, the two-phase composition of barium titanate and strontium ruthenate and the size and distribution of strontium ruthenate nano particles can be accurately regulated and controlled by controlling the time for irradiating the barium titanate and strontium ruthenate target materials by using pulse laser. The nano composite film material has excellent ferroelectric and dielectric properties at room temperature, and can be even compared with a lead-based ferroelectric material PZT film. The invention provides a nano composite film material and a preparation technology thereof, which can be compatible with a semiconductor process technology, thereby having wide application prospect in micro-electro-mechanical systems such as ferroelectric memories, sensors, actuators and the like.
Disclosure of Invention
The invention aims to provide a barium titanate-strontium ruthenate nano composite film material and a preparation method thereof. The invention adopts the pulse laser deposition method to prepare the film material, and has the advantages of simple process, continuously adjustable two-phase components, uniform distribution of second-phase particles with nanometer scale on a substrate, good epitaxial relationship between the crystal orientation of the film and a substrate, accurate and controllable thickness and electrical property of the film and the like.
The invention provides a barium titanate-strontium ruthenate nano composite film material, and the two-phase composition of the composite film material meets the following requirements:
volume ratio: SrRuO3：2～9％，BaTiO3:91～98％。
The invention provides a barium titanate-strontium ruthenate nano composite film material, which is characterized in that: the residual polarization intensity of the film material is 14.1-40.3 mu C/cm2The saturation polarization is 27.4-47.8 mu C/cm2The dielectric constant is 1083-1220, the dielectric loss is 0.04-0.09, and the thin film material has crystal orientations of (001), and (001) crystal planes, respectively.
The invention provides a barium titanate-strontium ruthenate nano composite film material, which is characterized in that: strontium ruthenate nanoparticles having an average size of 8.5nm are homogeneously distributed on the barium titanate matrix. The thickness of the film is 350-400 nm.
The invention also provides a preparation method of the barium titanate-strontium ruthenate nano composite film material, which comprises the following specific steps:
(1) placing a barium titanate target material and a strontium ruthenate target material in a deposition chamber of pulse laser deposition equipment, and preparing the nano composite film by using a pulse laser deposition method, wherein the molar ratio of barium titanate, Ba, Ti and O is 1:1:3, and the molar ratio of strontium ruthenate, Sr, Ru and O is 1:1: 3.
(2) Irradiating the strontium ruthenate target material with laser for 2-9 seconds under the conditions that the temperature of the substrate is 700-800 ℃ and the oxygen pressure is 10-20 Pa, and then irradiating the barium titanate target material with laser for 22-24 seconds to respectively deposit barium titanate and strontium ruthenate on the substrate;
(3) repeating the step (2) for a plurality of times to prepare the barium titanate-strontium ruthenate nano composite films with different components and thicknesses.
As a preferred technical scheme:
in the step (1), the oxide single crystal substrate is Nb SrTiO3、SrTiO3、LaAlO3Single crystal flakes of isooxide, Nb: SrTiO3The substrate is preferred.
The substrate is cleaned by acetone and alcohol, placed on a sample seat of a deposition chamber, and is subjected to annealing treatment in vacuum at the temperature of 750 ℃ for 30min, and then the barium titanate-strontium ruthenate nano composite film is deposited on the substrate.
In the step (2), the deposition temperature is 750 ℃, and the laser energy is 1J/cm2The distance between the target and the substrate was 4cm, and the oxygen pressure was 15 Pa.
The laser irradiation of the strontium ruthenate target was 9 seconds and the laser irradiation of the barium titanate target was 22 seconds.
In the step (3), the barium titanate target and the strontium ruthenate target are respectively irradiated by laser for 40 times, and a composite film with the thickness of 380nm is obtained.
The nano composite film material prepared in the step (3) is arranged at 5 multiplied by 104Annealing in situ under Pa oxygen pressure for 30min, and cooling to room temperature at the speed of 2-10 deg.C/min.
The invention has the advantages that: the barium titanate-strontium ruthenate nano composite film material is prepared by adopting a pulse laser deposition method, and the process is simple. The material has the advantages that the two-phase components are uniform and adjustable, the strontium ruthenate nano particles are uniformly distributed on the barium titanate substrate, the film and the substrate have good crystallographic epitaxial relationship, and the film has good electrical properties such as ferroelectric property, dielectric property and the like. The barium titanate-strontium ruthenate nano composite film as a lead-free ferroelectric material has ferroelectric polarization performance comparable to that of a lead-containing ferroelectric material at room temperature, and has wide application prospect in the field of micro electro mechanical systems such as ferroelectric memories, sensors, actuators and the like.
Drawings
FIG. 1 is an X-ray diffraction diagram of a barium titanate-strontium ruthenate nanocomposite film prepared by the method.
FIG. 2 shows TEM photographs of the barium titanate-strontium ruthenate nanocomposite film prepared by the present invention, wherein (a) the image is low-magnification image and (b) the image is high-resolution image.
FIG. 3 is a schematic diagram of the microstructure of the barium titanate-strontium ruthenate nanocomposite film prepared by the present invention.
FIG. 4 is a ferroelectric hysteresis loop of the barium titanate-strontium ruthenate nanocomposite film prepared by the method of the present invention.
FIG. 5 is a graph showing the polarization behavior of a barium titanate-strontium ruthenate nanocomposite film as a function of the volume ratio of strontium ruthenate.
FIG. 6 is a ferroelectric hysteresis loop of a barium titanate-strontium ruthenate nanocomposite film containing 12% strontium ruthenate by volume.
FIG. 7 shows the dielectric properties of the barium titanate-strontium ruthenate nanocomposite film prepared by the method of the present invention varying with the volume ratio of strontium ruthenate.
Detailed Description
The following examples further illustrate the invention but are not intended to limit the invention thereto.
Example 1
Containing 2 vol% SrRuO3Barium titanate-strontium ruthenate nano composite film
(1) Mixing Nb with SrTiO3(001) Ultrasonically cleaning a substrate in acetone and alcohol for 20 minutes, heating to 750 ℃ in vacuum, and annealing for 30 minutes;
(2) using pulse laser deposition method at 750 deg.C and 15Pa oxygen pressure in Nb SrTiO3(001) Strontium ruthenate is deposited on the substrate for 2 seconds, followed by barium titanate for 24 seconds;
(3) repeating the above process for 40 times to obtain 380nm thick barium titanate-strontium ruthenate nano composite film material. The material has a crystal orientation of the (001) plane, wherein SrRuO3The volume ratio of the nanocomposite film was 2 vol%, and nano-sized particles were uniformly distributed on the barium titanate matrix (see fig. 3). The residual polarization intensity of the film material is 14.1 mu C/cm2Strong saturation polarization of27.4μC/cm2(see fig. 4 and 5), the dielectric constant was 1083, and the dielectric loss was 0.04 (see fig. 7).
Example 2
Containing 4 vol% SrRuO3Barium titanate-strontium ruthenate nano composite film
(1) SrTiO Nb is used3(001) A substrate. Performing microwave ultrasonic treatment on the substrate in acetone and alcohol for 20 minutes, heating the substrate to 750 ℃ in vacuum, and preserving heat for 30 minutes;
(2) using pulse laser deposition method at 750 deg.C and 15Pa oxygen pressure in Nb SrTiO3(001) Strontium ruthenate is deposited on the substrate for 4 seconds, followed by barium titanate for 23 seconds;
(3) repeating the above process for 40 times to obtain 380nm thick barium titanate-strontium ruthenate nano composite film material. The material has a crystal orientation of the (001) plane (see fig. 1), wherein SrRuO3The volume ratio of the nanocomposite film was 4 vol%, and nano-sized particles were uniformly distributed on the barium titanate matrix (see fig. 3). The residual polarization intensity of the film material is 15.9 mu C/cm2The saturation polarization intensity is 34.0 mu C/cm2(see FIGS. 4 and 5), a dielectric constant of 1098 and a dielectric loss of 0.05 (see FIG. 7).
Example 3
Containing 9 vol% SrRuO3Barium titanate-strontium ruthenate nano composite film
(1) SrTiO Nb is used3(001) A substrate. Performing microwave ultrasonic treatment on the substrate in acetone and alcohol for 20 minutes, heating the substrate to 750 ℃ in vacuum, and preserving heat for 30 minutes;
(2) using pulse laser deposition method at 750 deg.C and 15Pa oxygen pressure in Nb SrTiO3(001) Strontium ruthenate is deposited on the substrate for 9 seconds, followed by barium titanate for 22 seconds;
(3) repeating the above process for 40 times to obtain 380nm thick barium titanate-strontium ruthenate nano composite film material. The material has a crystal orientation of the (001) plane (see fig. 1), wherein SrRuO3The volume ratio of the nanocomposite film was 9 vol%, and the nanoparticles were uniformly distributed on the barium titanate matrix (see fig. 2). The residual polarization intensity of the film material is 40.3 mu C/cm2The saturation polarization intensity is 47.8 mu C/cm2(see fig. 4 and 5), the dielectric constant was 1220, and the dielectric loss was 0.09 (see fig. 7).
Comparative example 1
Containing 12 vol% SrRuO3Barium titanate-strontium ruthenate nano composite film
(1) Mixing Nb with SrTiO3(001) Putting the substrate in acetone and alcohol for microwave ultrasonic treatment for 20 minutes, and then heating the substrate to 750 ℃ in vacuum and carrying out heat preservation for 30 minutes for annealing;
(2) using pulse laser deposition method at 750 deg.C and 15Pa oxygen pressure in Nb SrTiO3(001) Strontium ruthenate is deposited on the substrate for 12 seconds, followed by barium titanate for 21 seconds;
(3) repeating the above process for 40 times to obtain 380nm thick barium titanate-strontium ruthenate nano composite film material. The obtained barium titanate thin film had a crystal orientation of the (001) plane. Since the leakage current of the thin film material is large, the hysteresis loop is deformed (see fig. 6), and the residual polarization and the saturation polarization cannot be determined. The dielectric properties were not measured at the same time. Thus, SrRuO of barium titanate-strontium ruthenate nanocomposite films3The volume ratio should be limited to not more than 9%.
Comparative example 2
Pure BaTiO3Film(s)
(1) Mixing Nb with SrTiO3(001) Putting the substrate in acetone and alcohol for microwave ultrasonic treatment for 20 minutes, and then heating the substrate to 750 ℃ in vacuum and carrying out heat preservation for 30 minutes for annealing;
(2) using pulse laser deposition method at 750 deg.C and 15Pa oxygen pressure in Nb SrTiO3(001) Barium titanate was deposited on the substrate for 1000 seconds. The obtained barium titanate thin film had a crystal orientation of the (001) plane (see fig. 1). The residual polarization intensity of the film material is 3.8 mu C/cm2The saturation polarization intensity is 19.6 mu C/cm2(see FIGS. 4 and 5), a dielectric constant of 980 and a dielectric loss of 0.10 (see FIG. 7). In contrast, 2-9 vol% SrRuO3The remanent polarization of the barium titanate-strontium ruthenate nano composite film is 14.1-40.3 mu C/cm2The saturation polarization is 27.4-47.8 mu C/cm2A dielectric constant of1083 to 1220, and a dielectric loss of 0.04 to 0.09. Therefore, by controlling the two-phase composition of the barium titanate-strontium ruthenate nano composite film, the ferroelectric and dielectric properties of the barium titanate-strontium ruthenate nano composite film can be regulated and controlled in a wider range.
Comparative example 3
In SrRuO3Pure BaTiO prepared on low electrode3Film(s)
(1) Mixing SrTiO3(001) Putting the substrate in acetone and alcohol for microwave ultrasonic treatment for 20 minutes, and then heating the substrate to 750 ℃ in vacuum and carrying out heat preservation for 30 minutes for annealing;
(2) using pulsed laser deposition method at 750 deg.C and 15Pa oxygen pressure in SrTiO3(001) And depositing strontium ruthenate on the substrate for 300 seconds to obtain the strontium ruthenate film with the thickness of 120 nm. The thin film has a crystal orientation of the (001) plane and can be used as a bottom electrode layer of a barium titanate thin film.
(3) Depositing barium titanate on the bottom electrode layer of strontium ruthenate for 1000 seconds by a pulse laser deposition method under the conditions that the temperature is 750 ℃ and the oxygen pressure is 15Pa, wherein the prepared barium titanate film has the crystal orientation of a (001) plane. The residual polarization intensity of the film material is 4.5 mu C/cm2The saturation polarization intensity is 21.5 mu C/cm2The dielectric constant is 990, and the dielectric loss is 0.09. In contrast, the catalyst of the present invention contains 2 to 9 vol% of SrRuO3The remanent polarization of the barium titanate-strontium ruthenate nano composite film is 14.1-40.3 mu C/cm2The saturation polarization is 27.4-47.8 mu C/cm2The dielectric constant is 1083 to 1220, and the dielectric loss is 0.04 to 0.09. Therefore, the barium titanate-strontium ruthenate nano composite film is in the ratio of SrRuO3Pure BaTiO prepared on low electrode3The thin film has high ferroelectric and dielectric properties. In addition, the strontium ruthenate film can be used as an electrode material of the ferroelectric film, and the strontium ruthenate nano-particles can also be used as a composition material of the nano-composite film, but the functions of the strontium ruthenate film and the nano-composite film are completely different.
The above embodiments are merely illustrative of the technical ideas and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and not to limit the protection scope of the present invention. All equivalent changes and modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.
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